Anti-pollution angle valve, angle valve transformation method and deposition equipment

Abstract

The invention belongs to the technical field of semiconductor manufacturing, and discloses an anti-pollution angle valve, an angle valve transformation method and deposition equipment. The anti-pollution angle valve comprises a valve body and a valve element assembly. The valve body is provided with a first connecting port, a second connecting port and a valve cavity, a first working medium can flow among the first connecting port, the second connecting port and the valve cavity, the second connecting port is used for being connected with a process cavity, a connecting channel is formed between the second connecting port and the process cavity, and the anti-pollution angle valve is coupled with a blowing channel. A first opening is formed in the purging channel on the inner side of the connecting channel, and the second working medium can enter the inner side of the connecting channel through the purging channel and the first opening. The second working medium is input through the purging channel, the stable turbulent flow state in the connecting channel can be destroyed, airflow flowing towards the process cavity is formed in the connecting channel, then residual gas or by-products are moved towards the joint of the vacuum pump and the process cavity, the residual gas and the by-products are discharged, and the working efficiency is improved. And products such as wafers are prevented from being polluted.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to an anti-contamination angle valve, an angle valve modification method, and a deposition equipment. Background Technology

[0002] Atomic Layer Deposition (ALD) is a high-precision thin-film deposition technique widely used in the manufacture of semiconductor devices such as integrated circuits and display panels, as well as devices containing semiconductor components. The ALD process involves alternating pulses of two or more precursor gases into a reaction chamber, where a self-limiting chemical reaction occurs on the substrate surface, depositing a uniform and dense thin film layer by layer. During this process, carrier gases and purge gases are typically introduced to ensure sufficient reaction of the precursor gases and effective removal of unreacted products.

[0003] One of the core components of an ALD (Alternating Discharge) system is the process chamber, which typically has an inner liner to protect the inner walls from the deposition of reaction byproducts, thereby reducing maintenance difficulty and extending equipment life. The process chamber is connected to or isolated from the high-vacuum molecular pump via valves such as angle valves and gate valves to meet the vacuum requirements of different process stages. During ALD deposition, process gases enter the chamber through the inlet block and spray plate, while a vacuum pump unit, such as a dry pump, continuously evacuates the chamber to remove unreacted gases, carrier gases, and purge gases, maintaining the high-vacuum environment required for the process.

[0004] However, existing ALD deposition equipment still has certain technical shortcomings in actual operation. For example, in the angle valve inlet flange area between the process chamber and the molecular pump, a large dead zone (i.e., eddy current disturbance zone) is easily formed due to the abrupt change in the gas flow path. During the evacuation process, some gas may generate vortices and become trapped in this dead zone, causing the two precursor gases to mix unexpectedly and react in unintended ways, generating particulate byproducts. As these byproducts accumulate, they may re-enter the process chamber and contaminate the wafer surface, thereby affecting the uniformity of thin film deposition and device performance, ultimately leading to a decrease in product yield.

[0005] Therefore, there is an urgent need for a pollution-proof angle valve, an angle valve modification method, and a deposition equipment to at least solve one of the above-mentioned technical problems. Summary of the Invention

[0006] The first objective of this invention is to provide a contamination-proof angle valve that can prevent the accumulation of byproducts in the overflow area of ​​the angle valve, thereby preventing the byproducts from accumulating and entering the process chamber to contaminate the product.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] An anti-pollution angle valve includes a valve body and a valve core assembly. The valve body has a first connection port, a second connection port, and a valve cavity. The first connection port, the second connection port, and the valve cavity are interconnected. A first working fluid can flow between the first connection port, the second connection port, and the valve cavity. The second connection port is used to connect to a process chamber, and a connection channel is formed between the second connection port and the process chamber. The valve core assembly is used to close the second connection port.

[0009] The anti-pollution angle valve is coupled with a purge channel, and the purge channel has a first opening inside the connecting channel, through which the second working fluid can enter the inside of the connecting channel.

[0010] In some embodiments, the purge channel is disposed on the valve body, and the purge channel has a second opening formed on the outer wall surface of the valve body, through which the second working fluid can enter the purge channel.

[0011] In some embodiments, the valve body includes a valve body main body and a connecting flange portion, the valve body main body and the connecting flange portion are connected and disposed, the connecting flange portion is used to connect to the process cavity, the valve cavity is formed inside the valve body main body, the connecting channel is formed inside the connecting flange portion, the second connecting port is formed at the connection between the valve body main body and the connecting flange portion, and the second opening is disposed on the outer wall surface of the valve body main body, and the first opening is disposed on the inner wall surface of the connecting flange portion.

[0012] In some embodiments, the anti-pollution angle valve further includes a purge member connected between the valve body and the process chamber. At least a portion of the connecting channel is formed inside the purge member, and the purge channel is disposed inside the purge member. The purge member has a first opening at one end inside the valve body and a second opening at the end away from the valve body, through which the second working fluid can enter the purge channel.

[0013] In some embodiments, the valve body includes a valve body main body and a connecting flange portion, the valve body main body and the connecting flange portion are connected and disposed, the connecting flange portion is used to connect with the process cavity, the valve cavity is formed inside the valve body main body, the second connection port is formed at the connection between the valve body main body and the connecting flange portion, the purging member is inserted into the connecting flange portion, and the connection channel is formed inside the connecting flange portion and inside the purging member.

[0014] In some embodiments, the purging member includes an inner annular member and an outer annular member. The outer wall surface of the inner annular member is provided with at least two protrusions, which are spaced apart along the circumferential direction of the inner annular member. A recess is formed between two adjacent protrusions, and the recess extends along the axial direction of the inner annular member.

[0015] The inner annular member is fixedly inserted into the outer annular member, and the protrusion abuts against the inner wall surface of the outer annular member along the radial direction of the inner annular member. The protrusion, the recess, and the outer annular member define the purging channel.

[0016] In some embodiments, the purging member is provided with a first flange and a second flange, the first flange and the second flange being able to abut against the inner wall surface of the process cavity in the radial direction of the purging member to limit the purging member.

[0017] In some embodiments, the purging member includes a cavity-side purging member and a valve-side purging member. The valve-side purging member is disposed closer to the valve body than the cavity-side purging member. The cavity-side purging member is provided with a first channel, and the valve-side purging member is provided with a second channel. Along the axial direction of the second connection port, the cavity-side purging member and the valve-side purging member can be fixedly connected, such that the end of the first channel away from the process cavity and the end of the second channel close to the process cavity are connected to form the purging channel.

[0018] In some embodiments, the inner wall surface of the cavity-side purge member is provided with a first connecting lug, the inner wall surface of the valve-side purge member is provided with a second connecting lug, and the anti-contamination angle valve further includes a vacuum screw, which passes through the first connecting lug and is connected to the second connecting lug to detachably connect the cavity-side purge member and the valve-side purge member.

[0019] In some embodiments, the valve body includes a valve body main body and a connecting flange portion, the valve body main body and the connecting flange portion being connected together, the connecting flange portion being used to connect to the process cavity, and the valve cavity being formed inside the valve body main body.

[0020] The anti-pollution angle valve also includes a purge member, which is inserted into the connecting flange portion. The connecting channel is formed on the inner side of the connecting flange portion and the inner side of the purge member. At least a portion of the outer wall surface of the purge member and the inner wall surface of the connecting flange portion are spaced apart and form a venting gap. The venting gap is configured as the purge channel. A first opening is formed at one end of the venting gap near the valve body, and the end of the venting gap away from the valve body is configured as a second opening. The second working fluid can enter the purge channel through the second opening.

[0021] In some embodiments, the purge channel is disposed on the valve core assembly, the valve core assembly includes a valve plate, the first opening is formed on the side of the valve plate facing the second connection port, a portion of the valve core assembly is located outside the valve body, and the purge channel has a second opening formed on the portion of the valve core assembly located outside the valve body, through which the second working fluid can enter the purge channel.

[0022] In some embodiments, the first opening is disposed at one end of the connection channel near the second connection port, and the second working fluid can flow in the connection channel in a direction away from the second connection port.

[0023] In some embodiments, the first opening is a hole-shaped structure or a slit-shaped structure.

[0024] In some embodiments, the opening direction of the first opening is set in the direction toward the second connection port.

[0025] In some embodiments, the first opening includes a first air hole or a first air slit, and the air blowing direction of the first air hole or the first air slit is parallel to the axial direction of the second connection port.

[0026] In some embodiments, the first opening includes a second air hole or a second air slit, wherein the air blowing direction of the second air hole or the second air slit is inclined to the axial direction of the second connection port.

[0027] In some embodiments, the air blowing direction of the second air hole or the second air slit is perpendicular to the axial direction of the second connection port; or,

[0028] The second air hole or the second air slit is positioned so that the air blowing direction is oriented toward the center of the second connection port.

[0029] In some embodiments, the anti-pollution angle valve further includes a heating element for heating the valve body or the second working fluid.

[0030] The second objective of this invention is to provide a method for modifying an angle valve, which can modify an existing angle valve to avoid the accumulation of byproducts in the overflow area of ​​the angle valve, thereby preventing the byproducts from accumulating and entering the process chamber to contaminate the product.

[0031] To achieve this objective, the present invention adopts the following technical solution:

[0032] An angle valve modification method, used to modify an angle valve to form the aforementioned anti-pollution angle valve, the angle valve modification method includes:

[0033] A purge channel is formed on the angle valve, allowing the second working fluid to enter between the angle valve and the process chamber through the purge channel and flow in the direction toward the process chamber.

[0034] In some embodiments, the step of forming the purge channel includes:

[0035] A channel extending from the outer wall of the angle valve to the second connection port of the angle valve is provided in the wall of the valve body; this channel is configured as the purge channel; or...

[0036] A purge element is inserted into the valve body of the angle valve, and at least a portion of the outer wall surface of the purge element and the inner wall surface of the valve body are spaced apart to form a venting gap, which is configured as the purge channel; or,

[0037] A purge element is inserted into the valve body of the angle valve. The purge element has a channel extending from its outer wall surface to its inner wall surface and / or to the end face of the purge element located within the valve body. This channel is configured as the purge channel. Alternatively,

[0038] A channel is provided in the angle valve, extending from the outer wall of the angle valve to the valve core assembly of the angle valve, and the channel is configured as the purge channel.

[0039] A third objective of this invention is to provide a deposition apparatus that can achieve a high production yield.

[0040] To achieve this objective, the present invention adopts the following technical solution:

[0041] The deposition equipment includes a process chamber, a molecular pump, and the aforementioned anti-contamination angle valve. The first connection port of the anti-contamination angle valve is connected to the molecular pump, and the second connection port of the anti-contamination angle valve is connected to the process chamber.

[0042] The beneficial effects of this invention are:

[0043] In the anti-contamination angle valve and the deposition equipment equipped with the anti-contamination angle valve, during the process of evacuating the process chamber by the vacuum pump, the second working fluid is introduced through the purge channel and the first opening, which can disrupt the stable turbulence state in the connecting channel, so that an airflow is formed in the connecting channel and flows towards the process chamber. This moves the residual gas or by-products toward the connection between the vacuum pump and the process chamber, thereby achieving the effect of discharging the residual gas and by-products and avoiding contamination of products such as wafers.

[0044] This angle valve modification method can transform an existing angle valve into the aforementioned anti-contamination angle valve. It creates an airflow in the connection channel that flows towards the process chamber, thereby moving residual gas or byproducts toward the connection between the vacuum pump and the process chamber, achieving the effect of discharging residual gas and byproducts and preventing contamination of wafers and other products. Attached Figure Description

[0045] Figure 1 This is an internal structural diagram of the angle valve in the open state in an embodiment of the present invention;

[0046] Figure 2 This is an internal structural diagram of the angle valve in the closed state in an embodiment of the present invention;

[0047] Figure 3 This is a schematic diagram illustrating the formation of the dead zone in the angle valve in an embodiment of the present invention;

[0048] Figure 4 This is an internal structure diagram of the first type of anti-pollution angle valve in an embodiment of the present invention;

[0049] Figure 5 This is a three-dimensional structural diagram of the first type of purging member in an embodiment of the present invention;

[0050] Figure 6 This is a cross-sectional view of the first type of purging member in an embodiment of the present invention;

[0051] Figure 7 This is an internal structure diagram of the second type of anti-pollution angle valve in an embodiment of the present invention;

[0052] Figure 8 This is a three-dimensional structural diagram of the second type of purging component in an embodiment of the present invention;

[0053] Figure 9 This is a cross-sectional view of the second type of purging member in an embodiment of the present invention;

[0054] Figure 10 This is a cross-sectional view of the third type of purging member in an embodiment of the present invention;

[0055] Figure 11 This is an internal structure diagram of the third type of anti-pollution angle valve in the embodiments of the present invention;

[0056] Figure 12 This is an axial view of the fourth type of purging component in an embodiment of the present invention;

[0057] Figure 13 This is a three-dimensional assembly drawing of the fourth type of purging component in the embodiments of the present invention;

[0058] Figure 14 It is along Figure 12 A three-dimensional sectional view of the purging component in the AA direction;

[0059] Figure 15 This is an internal structure diagram of the fourth type of anti-pollution angle valve in the embodiments of the present invention.

[0060] Figure 16 This is an exploded front view assembly drawing of the valve core assembly and valve body in an embodiment of the present invention;

[0061] Figure 17 This is an exploded cross-sectional assembly view of the valve core assembly and valve body in an embodiment of the present invention.

[0062] In the picture:

[0063] 100. Purge channel; 101. First opening; 1011. First air vent; 1012. Second air vent; 102. Second opening;

[0064] 1. Valve body; 11. Valve body main body; 110. Valve cavity; 12. First connection port; 13. Second connection port; 130. Connection channel;

[0065] 2. Valve core assembly; 201. Cylinder; 202. Thermal insulation connector; 203. Cylinder connecting block; 204. Cylinder connecting screw; 205. Shaft bracket; 206. Sliding bearing; 207. Valve shaft connecting screw; 208. Valve shaft connecting block; 209. Valve plate connecting shaft; 210. Bellows flange; 211. Bellows; 212. Valve plate; 213. Valve plate sealing ring;

[0066] 3. Purge component; 31. Inner annular component; 311. Protrusion; 312. Recess; 32. Outer annular component; 321. First semi-annular portion; 322. Second semi-annular portion; 33. Valve-side purge component; 331. Second connecting lug; 34. Cavity-side purge component; 341. First connecting lug; 35. Vacuum screw; 301. First flange; 302. Second flange;

[0067] 4. Process chamber; 41. Working fluid input channel; 42. Vacuum pump channel;

[0068] 51. Collar; 52. Sealing ring;

[0069] 6. Molecular pump. Detailed Implementation

[0070] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0071] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," "fixed," and "abutting" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0072] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0073] In the description of this embodiment, the terms "upper," "lower," "right," and "left," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0074] Reference Figures 1 to 3As shown, existing angle valves generally include a valve body 1 and a valve core assembly 2. The valve body 1 has a first connection port 12, a second connection port 13, and a valve cavity 110, which is formed inside the valve body 1. The first connection port 12, the second connection port 13, and the valve cavity 110 are interconnected. The first connection port 12 can be used to connect to devices such as a molecular pump 6, while the second connection port 13 is used to connect to a process chamber 4. When the second connection port 13 is connected to the process chamber 4, a connection channel 130 is formed between the second connection port 13 and the process chamber 4. The valve core assembly 2 includes a valve plate 212, which is movably disposed within the valve body 1. When the valve plate 212 moves toward the second connection port 13 and seals against the inner wall of the valve body 1, the second connection port 13 is closed, thus the angle valve is in the closed state. When the valve plate 212 is not sealed against the inner wall of the valve body 1, and the second connection port 13 is not closed, the angle valve is in the open state. When the angle valve is open, the first working fluid in the process chamber 4 can flow along the path of the second connection port 13, the valve chamber 110, and the first connection port 12, thereby being discharged from the process chamber 4. Specifically, the first working fluid can be precursor vapor, inert purge gas, or carrier gas; this invention does not impose any specific limitations on it.

[0075] For example, in an ALD deposition apparatus, the valve body 1 includes a valve body 11 and a connecting flange. One end of the connecting flange is connected to the valve body 11, and the other end has a flange connection structure for connecting to the process chamber 4. A valve chamber 110 is formed inside the valve body 11, a connecting channel 130 is formed inside the connecting flange, and a second connecting port 13 is formed at the connection between the valve body 11 and the connecting flange. The valve body 11 has the aforementioned first connecting port 12. When the valve plate 212 is not in contact with the inner wall of the valve body 1, the molecular pump 6 communicates with the process cavity of the process chamber 4 through the first connecting port 12, the valve chamber 110, the second connecting port 13, the connecting channel 130, and the process cavity 4, and can extract the first working fluid from the process cavity 4, thereby realizing the corresponding ALD process steps. When the valve plate 212 abuts against the inner wall of the valve body 1 and closes the second connection port 13, the molecular pump 6 and the process chamber 4 can be isolated, preventing contamination and leakage of the process chamber 4. Preferably, a sealing ring 52 and a collar 51 are also provided between the process chamber 4 and the connecting flange to achieve a sealed and fixed connection.

[0076] However, as Figure 3As shown, due to the presence of the connecting channel 130, a dead zone easily forms inside the connecting channel 130 when the valve plate 212 closes the second connecting port 13. For example, the process chamber 4 has a vacuum pump channel 42, through which a vacuum pump is connected. When the vacuum pump is used to evacuate the process chamber 4, turbulence occurs within the connecting channel 130, causing gas residue in the process chamber 4 to remain within the connecting channel 130. This results in the two gases mixing and reacting at the dead zone when other gases are introduced into the process chamber 4 again, producing byproduct particles, making the product in the process chamber 4 susceptible to contamination.

[0077] To address this problem, an anti-contamination angle valve is provided in an embodiment of the present invention. For example... Figures 2 to 4 As shown, based on the existing angle valve, this anti-pollution angle valve is also coupled with a purge channel 100. The purge channel 100 has a first opening 101 formed inside the connecting channel 130. The second working fluid can enter the connecting channel 130 through the purge channel 100 and the first opening 101, disrupting the turbulent flow and thus venting gases that may remain in the connecting channel 130. Preferably, the second working fluid is an inert gas that does not react with the ALD process gas, such as argon or nitrogen. Of course, since the process gases used in specific ALDs differ, the second working fluid is not specifically limited in this invention, as long as it can effectively vent residual gases and byproducts.

[0078] In use, for example, during the process of evacuating the process chamber 4 by a vacuum pump, a second working fluid is introduced into the connecting channel 130 through the purge channel 100 and the first opening 101. This can disrupt the stable turbulent state within the connecting channel 130, causing an airflow to form within the connecting channel 130 that flows toward the process chamber 4. This moves residual gas or byproducts toward the connection between the vacuum pump and the process chamber 4, thereby achieving the effect of discharging residual gas and byproducts and preventing contamination of products such as wafers.

[0079] like Figure 4 , Figure 5 As shown, in some embodiments, the anti-pollution angle valve further includes a purge element 3, which is connected between the valve body 1 and the process chamber 4. The purge element 3 has an annular structure, with at least a portion of the connecting channel 130 formed inside the purge element 3, and the aforementioned purge channel 100 is disposed inside the tube wall of the purge element 3. The purge element 3 is inserted into the connecting flange, and the end of the purge element 3 located inside the valve body 1 is provided with the aforementioned first opening 101, while the end of the purge element 3 away from the valve body 1 is provided with a second opening 102. The aforementioned second working fluid can enter the purge channel 100 through the second opening 102 and enter the connecting channel 130 through the first opening 101, thereby achieving the effect of discharging residual gas and by-products.

[0080] Specifically, in this embodiment, multiple parallel and spaced channels are formed in the wall of the purge member 3 along its axial direction. One end of each channel opens into the outer wall of the purge member 3 to form the aforementioned second opening 102. The other end of each channel opens into the end of the purge member 3 located inside the valve body 1 to form the aforementioned first opening 101. In use, by introducing a second working fluid into the second opening 102, an airflow towards the process chamber 4 can be formed within the connecting channel 130, thereby achieving the discharge of residual gas and by-products within the connecting channel 130.

[0081] Optionally, in some embodiments, the purge channel 100 may be disposed within the wall of the connecting flange portion. Similarly, the purge channel 100 has a second opening 102 formed on the outer wall surface of the connecting flange portion, through which the second working fluid can enter the purge channel 100. The first opening 101 is formed on the inner wall surface of the connecting flange portion and communicates with the purge channel 100. In use, by introducing the second working fluid into the second opening 102, an airflow towards the process chamber 4 can be formed within the connecting channel 130, thereby simultaneously achieving the discharge of residual gas and by-products within the connecting channel 130.

[0082] Of course, in some other embodiments, in order to facilitate the connection of the second opening 102 and other requirements, the purging channel 100 can be set at the connecting flange and the valve body 11, and the second opening 102 is formed on the outer wall of the valve body 11, thereby setting the second opening 102 and the process cavity 4 at intervals, and reserving sufficient installation space for connecting the second opening 102 to the air pipe connector and other connecting parts.

[0083] Furthermore, such as Figure 6 As shown, the first opening 101 is located within the connecting channel 130 near one end of the second connection port 13. The second working fluid can enter the connecting channel 130 from near the second connection port 13 and flow within the connecting channel 130 in a direction away from the second connection port 13. This arrangement can reduce the size of the dead zone along the extension direction of the connecting channel 130. In other words, the closer the distance between the first opening 101 and the second connection port 13, the better the effect of discharging residual gas and by-products from the connecting channel 130.

[0084] Preferably, multiple purging channels 100 are evenly spaced around the axis of the purging member 3, and corresponding multiple first openings 101 are also evenly spaced. The uniform arrangement of the first openings 101 can avoid the phenomenon of local residual gas and by-products, thereby reducing the residual gas and by-products in the connecting channel 130.

[0085] Optionally, a first flange 301 and a second flange 302 are also provided on the outside of the purge member 3. The first flange 301 and the second flange 302 can abut against the inner wall surface of the process cavity 4 in the radial direction of the purge member 3, thereby limiting the purge member 3. Specifically, in some embodiments, the first flange 301 and the second flange 302 both extend in the circumferential direction of the purge member 3, and are spaced apart in the axial direction of the purge member 3. When the first flange 301 and the second flange 302 abut against the inner wall surface of the process cavity 4, the axial direction of the purge member 3 and the axial direction of the second connection port 13 are parallel, thereby making the connection channel 130 have a straight shape and avoiding the negative impact of increased resistance or easy turbulence on the airflow of the connection channel 130.

[0086] Preferably, the first flange 301 and the second flange 302 are spaced apart, and the second opening 102 is formed between the first flange 301 and the second flange 302, or formed on a side of the first flange 301 near the second flange 302, to facilitate the input of working fluid into the second opening 102. For example, as... Figure 4 , Figure 7 As shown, the side wall of the process chamber 4 is provided with a working fluid input channel 41. Along the axial direction of the purging member 3, the first flange 301 seals against one side of the working fluid input channel 41, and the second flange 302 seals against the other side of the working fluid input channel 41. This not only realizes the connection between the second opening 102 and the working fluid input channel 41, eliminating the need for a gas pipe connector and facilitating the input of the second working fluid, but also avoids the risk of leakage of the second working fluid from the connection between the first flange 301 or the second flange 302 and the process chamber 4.

[0087] Of course, in some embodiments, when the purge member 3 is fixedly installed, at least a portion of the outer wall surface of the purge member 3 and the inner wall surface of the connecting flange portion can be spaced apart to form a ventilation gap, and this ventilation gap serves as the purge channel 100. In this case, the opening of the ventilation gap within the connecting flange portion can serve as the first opening 101 mentioned above, and the opening of the ventilation gap within the connecting flange portion near the end of the process chamber 4 can serve as the second opening 102 mentioned above. The second working fluid can enter the purge channel 100 through the second opening 102 and enter the connecting flange portion through the first opening 101. Of course, the present invention does not limit the fixing method of the purge member 3; the first flange 301 and the second flange 302 mentioned above can be used, or other fixing methods can be used. As long as the aforementioned ventilation gap can be formed, it falls within the scope of protection of the present invention.

[0088] Furthermore, such as Figures 7 to 9As shown, in one embodiment of the present invention, a second purging member 3 is also provided, which is also inserted through the connecting flange portion. Distinguishingly, the purging member 3 includes an inner annular member 31 and an outer annular member 32. The outer wall surface of the inner annular member 31 is provided with at least two protrusions 311, which are spaced apart along the circumferential direction of the inner annular member 31. A recess 312 is formed between two adjacent protrusions 311, extending along the axial direction of the inner annular member 31. In use, the outer annular member 32 is inserted into the inner side of the connecting flange portion, and the inner annular member 31 is fixedly inserted into the inner side of the outer annular member 32. The protrusions 311 abut against the inner wall surface of the outer annular member 32 along the radial direction of the inner annular member 31, and the protrusions 311, the recesses 312, and the outer annular member 32 define the aforementioned purging channel 100. The first opening 101 is located within the connecting channel 130 and is formed at one end of the purge channel 100 near the second connection port 13. The second opening 102 is located outside the connecting channel 130 and is formed at one end of the purge channel 100 away from the second connection port 13. The second working fluid can enter the purge channel 100 through the second opening 102 and enter the connecting channel 130 through the first opening 101, thereby facilitating the discharge of residual gas and byproducts from the connecting channel 130.

[0089] Further, in this embodiment, the first opening 101 is a hole-shaped structure. Exemplarily, the first opening 101 includes a first air vent 1011 and a second air vent 1012. The first air vent 1011 is located at the end of the purging member 3 near the second connection port 13, and at the end of the connecting channel 130 near the second connection port 13, thereby reducing the size of the dead zone. The opening direction of the first air vent 1011 faces the second connection port 13 and is parallel to the axial direction of the second connection port 13, allowing the second working fluid to first flow towards the valve plate 212 and then change direction to flow towards the process chamber 4, thereby further reducing residual gas and byproducts in the connecting channel 130. The second air vent 1012 is located further away from the second connection port 13 than the first air vent 1011, and the opening direction of the second air vent 1012 faces the second connection port 13 and is inclined to the axial direction of the second connection port 13. The second air vent 1012 creates an inclined airflow within the connecting channel 130, further reducing dead zones and removing residual gas and byproducts. Optionally, in this embodiment, the direction of the second air vent 1012 is perpendicular to the axial direction of the second connection port 13, forming an air curtain within the connecting channel 130. This further prevents gas from entering the connecting channel 130, achieving unidirectional flow within the connecting channel 130. That is, when the process chamber 4 is evacuated by a vacuum pump, due to the combined action of the valve plate 212, the first air vent 1011, and the second air vent 1012, the gas can only flow in the direction away from the second connection port 130 within the connecting channel 130. This avoids the accumulation and increase of byproducts and also allows residual gas and byproducts to be discharged from the connecting channel 130.

[0090] Preferably, a plurality of first air holes 1011 and a plurality of second air holes 1012 are provided around the axis of the purging member 3, thereby further avoiding local residual gas and by-products in the connecting channel 130.

[0091] Specifically, in the purging member 3, a plurality of second air holes 1012 are arranged at intervals along the axial direction of the inner annular member 31 and penetrate the inner annular member 31. When the inner annular member 31 is inserted into the outer annular member 32 and forms the aforementioned purging channel 100, each purging channel 100 is connected to a plurality of second air holes 1012. Optionally, as Figure 8 As shown, to facilitate the fabrication and maintenance of the second air inlet 1012, the outer annular member 32 includes a first semi-annular portion 321 and a second semi-annular portion 322. The first semi-annular portion 321 and the second semi-annular portion 322 are detachably connected and can be closed to form the outer annular member 32. The aforementioned first flange 301 is disposed on the outer annular member 32, and the second flange 302 is disposed on the inner annular member 31.

[0092] likeFigure 9 , Figure 10 As shown, in this embodiment, different settings of the second air blowing holes 1012 can be provided according to specific needs. For example, when a thinner air curtain needs to be formed, a smaller number of second air blowing holes 1012 can be provided along the axial direction of the blowing member 3. When a thicker air curtain needs to be formed, a larger number of second air blowing holes 1012 can be provided along the axial direction of the blowing member 3.

[0093] like Figures 11 to 14 As shown, this invention also provides a more conveniently disassembled purge component 3. Specifically, the purge channel includes a cavity-side purge component 34 and a valve-side purge component 33, both of which are disposed within the connecting flange. The valve-side purge component 33 is positioned closer to the valve body 1 than the cavity-side purge component 34. The cavity-side purge component 34 has a first channel, and the valve-side purge component 33 has a second channel. Along the axial direction of the second connecting port 13, the cavity-side purge component 34 and the valve-side purge component 33 are fixedly connected, such that the end of the first channel away from the process cavity 4 and the end of the second channel close to the process cavity 4 are connected to form a purge channel 100. The valve-side purge component 33 has a first opening 101 at the end away from the cavity-side purge component 34, and the cavity-side purge component 34 has a second opening 102 at the end away from the valve-side purge component 33. When the first and second channels are connected to form the purge channel 100, the second working fluid can enter the purge channel 100 through the second opening 102 and enter the connecting channel 130 through the first opening 101. When maintenance or disassembly is required, the cavity-side purge component 34 and the valve-side purge component 33 can be sequentially removed from the process chamber 4, avoiding the difficulty in removing the purge component 3 as a whole due to its excessive axial length, thus avoiding the disassembly process of the anti-pollution angle valve and the molecular pump 6. Optionally, such as... Figure 11 As shown, in this embodiment, the blowing direction of the second air hole 1012 is set towards the center of the second connection port 13, thereby achieving a better discharge effect.

[0094] It should be noted that the first opening 101 described above can also adopt a slit-shaped structure, such as a first air-blowing slit and a second air-blowing slit. Similar to the first air-blowing hole 1011 and the second air-blowing hole 1012, the opening direction of the first air-blowing slit is also arranged in the direction toward the second connecting port 13, and its air-blowing direction is parallel to the axial direction of the second connecting port 13. The air-blowing direction of the second air-blowing slit is inclined to the axial direction of the second connecting port 13, for example, perpendicular to the axial direction of the second connecting port 13, or arranged toward the center position of the second connecting port 13. These are also within the scope of protection of this invention.

[0095] like Figures 12 to 14As shown, the inner wall surface of the cavity-side purge member 34 is provided with a first connecting ear 341, and the inner wall surface of the valve-side purge member 33 is provided with a second connecting ear 331. The anti-contamination angle valve also includes a vacuum screw 35, which passes through the first connecting ear 341 and connects to the second connecting ear 331 to detachably connect the cavity-side purge member 34 and the valve-side purge member 33. Optionally, in this embodiment, around the axial direction of the purge member 3, the cavity-side purge member 34 is provided with three first connecting ears 341 evenly and at intervals, and the valve-side purge member 33 is provided with three second connecting ears 331 evenly and at intervals, thereby stably connecting the cavity-side purge member 34 and the valve-side purge member 33 by three vacuum screws 35.

[0096] Furthermore, referring to Figure 15 As shown, in one embodiment of the present invention, the anti-pollution angle valve further includes a heating element for heating the valve body 1 or the second working fluid to reduce the production and accumulation of by-products within the valve body 1. Optionally, the heating element is a heating belt, which is wound around the valve body 1 to heat the valve body 1 and the second working fluid.

[0097] Optionally, in some embodiments, the valve body 1 can be directly connected to the process cavity 4, so that the second connection port 13 communicates with the process cavity 4, and the aforementioned connection channel 130 is formed on the side of the second connection port 13 away from the valve body 1. In this case, the various purging elements 3 mentioned above can be disposed in the process cavity 4, which is also within the scope of protection of this invention.

[0098] like Figures 15 to 17As shown, the valve core assembly 2 includes a cylinder 201, a heat-insulating connector 202, a cylinder connecting block 203, a cylinder connecting screw 204, a shaft bracket 205, a sliding bearing 206, a valve shaft connecting screw 207, a valve shaft connecting block 208, a valve plate connecting shaft 209, a bellows flange 210, a bellows 211, a valve plate 212, and a valve plate sealing ring 213. The cylinder 201 is located outside the valve body 1 and is connected to the valve body 1 via the heat-insulating connector 202. The output end of the cylinder 201 is connected to the valve plate 212 via the cylinder connecting block 203, the cylinder connecting screw 204, the valve shaft connecting screw 207, and the valve shaft connecting block 208. The valve plate sealing ring 213 is located on the side of the valve plate 212 facing the second connection port 13, thereby achieving a seal when the valve plate 212 abuts against the inner wall of the valve body 1. The shaft bracket 205 fixes the sliding bearing 206 in place, and the valve plate connecting shaft 209 slides through the sliding bearing 206. The bellows flange 210 fixes one end of the bellows 211 to the valve body 1, and the other end of the bellows 211 is fixedly connected to the valve plate 212, thereby protecting the valve shaft connecting screw 207, valve shaft connecting block 208, valve plate connecting shaft 209, and other structures inside the bellows 211. The structures such as the cylinder connecting block 203, cylinder connecting screw 204, shaft bracket 205, sliding bearing 206, valve shaft connecting screw 207, valve shaft connecting block 208, valve plate connecting shaft 209, bellows flange 210, bellows 211, valve plate 212, and valve plate sealing ring 213 are similar to the relevant structures in existing angle valves, and will not be described in detail in this invention.

[0099] The heat-insulating connector 202 is made of stainless steel or other plastic components, which can keep the cylinder 201 at a lower temperature while heating the valve body 1, thereby protecting the cylinder 201. Optionally, the cylinder 201 is also connected to a position sensor to achieve automatic identification of the position of the valve plate 212. Since the position sensor is located at the cylinder 201, the heat-insulating connector 202 can also prevent the position sensor from overheating, thereby extending the service life of both the cylinder 201 and the position sensor.

[0100] Optionally, in some embodiments, the purge channel 100 can also be disposed on the valve core assembly 2, with a first opening 101 formed on the side of the valve plate 212 facing the second connection port 13. A portion of the valve core assembly 2 is located outside the valve body 1, and the purge channel 100 has a second opening 102 formed on the portion of the valve core assembly 2 located outside the valve body 1, allowing the second working fluid to enter the purge channel 100 through the second opening 102. For example, the valve plate connecting shaft 209 described above is configured as a hollow structure, with one end connected to the valve plate 212 and communicating with the purge channel 100, and the other end extending to the outside of the valve body 1 and connected to a corresponding working fluid supply device.

[0101] In one embodiment of the present invention, a method for modifying an angle valve is also provided to achieve the aforementioned anti-pollution angle valve. Specifically, the method for modifying the angle valve includes:

[0102] A purge channel 100 is formed on the angle valve, allowing the second working fluid to enter between the angle valve and the process chamber 4 through the purge channel 100 and flow in the direction toward the process chamber 4.

[0103] It should be noted that the specific measures for setting up the purge channel 100 can be either replacing the valve body 1, for example, setting up the purge channel 100 in the new valve body 1, setting up any of the above-mentioned purge components 3, or combining the functions of the above-mentioned purge components 3 to obtain other purge components 3, etc., all of which are within the scope of protection of this invention.

[0104] For example, a channel extending from the outer wall surface of the angle valve to the second connection port 13 of the angle valve can be provided in the wall of the valve body 1, and this channel can be used as a purge channel 100; a purge member 3 can be inserted into the valve body 1 of the angle valve, and at least a portion of the outer wall surface of the purge member 3 and the inner wall surface of the valve body 1 can be spaced apart to form a ventilation gap, and the ventilation gap can be used as a purge channel 100; a purge member 3 can be inserted into the valve body 1 of the angle valve, and a channel extending from the outer wall surface of the purge member 3 to the inner wall surface of the purge member 3 and / or the end face of the purge member 3 located in the valve body 1 can be provided in the wall of the purge member 3, and this channel can be used as a purge channel 100; a channel extending from the outer wall surface of the angle valve to the valve core assembly 2 of the angle valve can be provided in the angle valve, and this channel can be used as a purge channel 100... The present invention is not limited to the specific manner in which the above-mentioned purging channel 100 is formed. As long as the second working fluid can be input and the residual gas and by-products in the connecting channel 130 can be discharged, it falls within the scope of protection of the present invention.

[0105] This angle valve modification method can transform an existing angle valve into the aforementioned anti-contamination angle valve. An airflow is formed in the connection channel 130 that flows toward the process chamber 4, thereby moving residual gas or by-products toward the connection between the vacuum pump and the process chamber 4, achieving the effect of discharging residual gas and by-products and preventing contamination of products such as wafers.

[0106] One embodiment of the present invention also provides a deposition apparatus, which includes a process chamber 4, a molecular pump 6, and the aforementioned anti-contamination angle valve. The first connection port 12 of the anti-contamination angle valve is connected to the molecular pump 6, and the second connection port 13 of the anti-contamination angle valve is connected to the process chamber 4. In this anti-contamination angle valve, by introducing a second working fluid through the purge channel 100, the stable turbulent state within the connection channel 130 can be disrupted, causing an airflow to form within the connection channel 130 flowing towards the process chamber 4. This, in turn, moves residual gas or byproducts toward the connection between the vacuum pump and the process chamber 4, achieving the effect of discharging residual gas and byproducts and preventing contamination of wafers and other products.

[0107] In the description of this specification, references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0108] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A pollution-proof angle valve, comprising a valve body (1) and a valve core assembly (2), wherein the valve body (1) has a first connection port (12), a second connection port (13), and a valve cavity (110), the first connection port (12), the second connection port (13), and the valve cavity (110) are connected in communication, a first working fluid can flow between the first connection port (12), the second connection port (13), and the valve cavity (110), the second connection port (13) is used to connect to a process cavity (4), and a connection channel (130) is formed between the second connection port (13) and the process cavity (4), and the valve core assembly (2) is used to close the second connection port (13), characterized in that, The anti-pollution angle valve is coupled with a purge channel (100), and the purge channel (100) has a first opening (101) inside the connecting channel (130). The second working fluid can enter the inside of the connecting channel (130) through the purge channel (100) and the first opening (101).

2. The anti-pollution angle valve according to claim 1, characterized in that, The purge channel (100) is disposed on the valve body (1), and the purge channel (100) has a second opening (102) formed on the outer wall surface of the valve body (1), through which the second working fluid can enter the purge channel (100) from the second opening (102).

3. The anti-pollution angle valve according to claim 2, characterized in that, The valve body (1) includes a valve body body (11) and a connecting flange. The valve body body (11) and the connecting flange are connected and disposed together. The connecting flange is used to connect with the process cavity (4). The valve cavity (110) is formed inside the valve body body (11). The connecting channel (130) is formed inside the connecting flange. The second connecting port (13) is formed at the connection between the valve body body (11) and the connecting flange. The second opening (102) is disposed on the outer wall surface of the valve body body (11), and the first opening (101) is disposed on the inner wall surface of the connecting flange.

4. The anti-pollution angle valve according to claim 1, characterized in that, The anti-pollution angle valve also includes a purge element (3), which is connected between the valve body (1) and the process chamber (4). At least a portion of the connecting channel (130) is formed inside the purge element (3). The purge channel (100) is disposed inside the purge element (3). The purge element (3) located inside the valve body (1) has a first opening (101) at one end and a second opening (102) at the other end away from the valve body (1). The second working fluid can enter the purge channel (100) through the second opening (102).

5. The anti-pollution angle valve according to claim 4, characterized in that, The valve body (1) includes a valve body body (11) and a connecting flange. The valve body body (11) and the connecting flange are connected and disposed together. The connecting flange is used to connect with the process cavity (4). The valve cavity (110) is formed inside the valve body body (11). The second connection port (13) is formed at the connection between the valve body body (11) and the connecting flange. The purging member (3) is inserted into the connecting flange. The connecting channel (130) is formed inside the connecting flange and inside the purging member (3).

6. The anti-pollution angle valve according to claim 4, characterized in that, The purging member (3) includes an inner annular member (31) and an outer annular member (32). The outer wall surface of the inner annular member (31) is provided with at least two protrusions (311). The protrusions (311) are arranged at intervals along the circumferential direction of the inner annular member (31). A recess (312) is formed between two adjacent protrusions (311). The recess (312) extends along the axial direction of the inner annular member (31). The inner ring (31) is fixedly inserted into the outer ring (32), and the protrusion (311) abuts against the inner wall surface of the outer ring (32) in the radial direction of the inner ring (31). The protrusion (311), the recess (312) and the outer ring (32) define the purging channel (100).

7. The anti-pollution angle valve according to claim 4, characterized in that, The purging component (3) is provided with a first flange (301) and a second flange (302). The first flange (301) and the second flange (302) can abut against the inner wall surface of the process cavity (4) in the radial direction of the purging component (3) to limit the purging component (3).

8. The anti-pollution angle valve according to claim 5, characterized in that, The purging component (3) includes a cavity-side purging component (34) and a valve-side purging component (33). The valve-side purging component (33) is positioned closer to the valve body (1) than the cavity-side purging component (34). The cavity-side purging component (34) is provided with a first channel, and the valve-side purging component (33) is provided with a second channel. Along the axial direction of the second connection port (13), the cavity-side purging component (34) and the valve-side purging component (33) can be fixedly connected, and the end of the first channel away from the process cavity (4) and the end of the second channel close to the process cavity (4) are connected to form the purging channel (100).

9. The anti-pollution angle valve according to claim 8, characterized in that, The inner wall surface of the cavity-side purge member (34) is provided with a first connecting ear (341), and the inner wall surface of the valve-side purge member (33) is provided with a second connecting ear (331). The anti-contamination angle valve also includes a vacuum screw (35), which passes through the first connecting ear (341) and is connected to the second connecting ear (331) to detachably connect the cavity-side purge member (34) and the valve-side purge member (33).

10. The anti-pollution angle valve according to claim 1, characterized in that, The valve body (1) includes a valve body main body (11) and a connecting flange portion. The valve body main body (11) and the connecting flange portion are connected and disposed together. The connecting flange portion is used to connect with the process cavity (4). The valve cavity (110) is formed inside the valve body main body (11). The anti-pollution angle valve also includes a purge element (3), which is inserted into the connecting flange. The connecting channel (130) is formed on the inner side of the connecting flange and the inner side of the purge element (3). At least a portion of the outer wall surface of the purge element (3) and the inner wall surface of the connecting flange are spaced apart and form a ventilation gap. The ventilation gap is configured as the purge channel (100). The first opening (101) is formed at one end of the ventilation gap near the valve body (11). The end of the ventilation gap away from the valve body (11) is configured as the second opening (102). The second working fluid can enter the purge channel (100) from the second opening (102).

11. The anti-pollution angle valve according to claim 1, characterized in that, The purge channel (100) is disposed on the valve core assembly (2), the valve core assembly (2) includes a valve plate (212), the first opening (101) is formed on the side of the valve plate (212) facing the second connection port (13), a portion of the valve core assembly (2) is located outside the valve body (1), the purge channel (100) has a second opening (102) formed on the portion of the valve core assembly (2) located outside the valve body (1), and the second working fluid can enter the purge channel (100) from the second opening (102).

12. The anti-pollution angle valve according to any one of claims 1-11, characterized in that, The first opening (101) is located in the connection channel (130) near one end of the second connection port (13), and the second working fluid can flow in the connection channel (130) in a direction away from the second connection port (13).

13. The anti-pollution angle valve according to claim 12, characterized in that, The first opening (101) is a hole-shaped structure or a slit-shaped structure.

14. The anti-pollution angle valve according to claim 13, characterized in that, The opening direction of the first opening (101) is set in the direction toward the second connection port (13).

15. The anti-pollution angle valve according to claim 14, characterized in that, The first opening (101) includes a first air hole (1011) or a first air slit, and the air blowing direction of the first air hole (1011) or the first air slit is parallel to the axial direction of the second connection port (13).

16. The anti-pollution angle valve according to claim 13, characterized in that, The first opening (101) includes a second air hole (1012) or a second air slit, and the air blowing direction of the second air hole (1012) or the second air slit is inclined to the axial direction of the second connection port (13).

17. The anti-pollution angle valve according to claim 16, characterized in that, The blowing direction of the second air hole (1012) or the second air slit is perpendicular to the axial direction of the second connection port (13); or, The air blowing direction of the second air blowing hole (1012) or the second air blowing slot is set towards the center of the second connection port (13).

18. The anti-pollution angle valve according to claim 1, characterized in that, The anti-pollution angle valve also includes a heating element, which is used to heat the valve body (1) or the second working fluid.

19. A method for modifying an angle valve to form an anti-pollution angle valve as described in any one of claims 1-18, characterized in that, The angle valve modification method includes: A purge channel (100) is formed on the angle valve, allowing the second working fluid to enter between the angle valve and the process chamber (4) through the purge channel (100) and flow in the direction toward the process chamber (4).

20. The angle valve modification method according to claim 19, characterized in that, The steps of forming the purge channel (100) include: A channel extending from the outer wall of the angle valve to the second connection port (13) of the angle valve is provided in the wall of the valve body (1), and the channel is configured as the purge channel (100); or, A purge element (3) is inserted into the valve body (1) of the angle valve. At least a portion of the outer wall surface of the purge element (3) and the inner wall surface of the valve body (1) are spaced apart to form a venting gap, which is configured as the purge channel (100); or, A purge element (3) is inserted into the valve body (1) of the angle valve. The purge element (3) has a channel extending from its outer wall surface to its inner wall surface and / or to the end face of the purge element (3) located within the valve body (1). This channel is configured as the purge channel (100). Alternatively, A channel is provided in the angle valve extending from the outer wall of the angle valve to the valve core assembly (2) of the angle valve, and the channel is configured as the purge channel (100).

21. A deposition apparatus, characterized in that, It includes a process chamber (4), a molecular pump (6), and an anti-pollution angle valve as described in any one of claims 1-18, wherein the first connection port (12) of the anti-pollution angle valve is connected to the molecular pump (6), and the second connection port (13) of the anti-pollution angle valve is connected to the process chamber (4).

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