Ceramic membrane detection machine and detection method based on visual guidance

Abstract

The invention discloses a ceramic membrane detection machine based on visual guidance and a detection method, and relates to the technical field of ceramic membrane detection, the ceramic membrane detection machine comprises a feeding mechanism and a detection mechanism, and the feeding mechanism comprises a feeding moving assembly and a feeding adsorption assembly; the detection mechanism comprises a detection machine shell. A detection suction cup, a detection moving assembly and a detection assembly are installed in the detection machine shell. Wherein the detection suction cup is provided with an adsorption hole and an exhaust passage, the feeding adsorption assembly is provided with a first air blowing assembly, the detection machine shell is further internally provided with a second air blowing assembly, and the first air blowing assembly and the second air blowing assembly are jointly used for blowing air to a ceramic film material piece which is subjected to vacuum adsorption by the detection suction cup. And air between the detection suction cup and the to-be-detected ceramic membrane material sheet is exhausted from the exhaust passage, so that the detection assembly performs visual detection on the flat and clean ceramic membrane material sheet. The problem that in the prior art, the flatness and cleanliness of the ceramic film material piece are insufficient during visual inspection is solved.

Description

Technical Field

[0001] This invention relates to the field of ceramic membrane inspection technology, and in particular to a vision-guided ceramic membrane inspection machine and inspection method. Background Technology

[0002] In semiconductor manufacturing and packaging processes, ceramic films, as a key functional substrate material, are commonly used to carry or encapsulate chips. These ceramic films are typically extremely thin (approximately 20–100 micrometers) and have a large number of high-density micropores (pore diameter approximately 30–50 micrometers, numbering in the tens of thousands to hundreds of thousands) machined on their surface. The shape, size, and positional accuracy of these micropores directly affect the electrical performance and reliability of the device. Therefore, high-precision and high-efficiency visual inspection of the ceramic films is essential during production to ensure that the micropore processing quality meets process requirements.

[0003] In existing technologies, visual inspection of ceramic films mainly relies on traditional two-dimensional image measuring instruments (optical coordinate measuring machines). While this equipment can achieve certain dimensional and morphological inspections, it suffers from the following key problems that seriously affect inspection accuracy and efficiency in practical applications: On the one hand, because the ceramic membrane sheet itself is extremely thin and has a certain degree of flexibility, it is very easy to cause local warping, wrinkles or even bulges when placed on the inspection platform due to its own weight, residual stress or airflow disturbance during operation. Traditional two-dimensional inspection stages are usually rigid planes and lack adsorption and flattening mechanisms for flexible thin sheets, which makes it impossible to achieve complete adhesion between the sheet and the inspection stage. This unevenness will introduce depth of field error and image distortion during visual inspection, which will seriously affect the accurate quantitative analysis of the morphology and position of the micropore edges.

[0004] On the other hand, during the processing and handling of ceramic membrane sheets, contaminants such as dust and debris are easily attached to the surface. Dust adhering to the surface of the sheet or the detection area can block the micropores, which can easily lead to misjudgment or missed detection.

[0005] It is evident that existing ceramic film sheets suffer from insufficient flatness and cleanliness when subjected to visual inspection. Summary of the Invention

[0006] The purpose of this invention is to provide a vision-guided ceramic membrane inspection machine and inspection method, which solves the problem of insufficient flatness and cleanliness of ceramic membrane sheets in the prior art when visual inspection is involved.

[0007] To achieve this objective, the present invention adopts the following technical solution: According to a first aspect, the present invention provides a vision-guided ceramic film inspection machine, comprising a feeding mechanism and an inspection mechanism. The feeding mechanism includes a feeding moving component and a feeding adsorption component, wherein the feeding moving component is used to drive the feeding adsorption component to move along a first direction and a third direction. The inspection mechanism includes an inspection housing, wherein an inspection suction cup, an inspection moving component, and an inspection component are installed inside the inspection housing, wherein the inspection moving component is used to drive the inspection component to move along a first direction and a second direction. The detection suction cup is provided with an adsorption hole and an exhaust channel. The feeding adsorption assembly is provided with a first air blowing assembly. The detection housing is also provided with a second air blowing assembly. The first air blowing assembly and / or the second air blowing assembly are used together to blow air onto the ceramic film sheet vacuum adsorbed by the detection suction cup, so that the air between the detection suction cup and the ceramic film sheet to be detected is discharged from the exhaust channel, so that the detection assembly can perform visual inspection on the flat and clean ceramic film sheet.

[0008] Optionally, the ceramic membrane sheet is provided with a detection area and a marking point located outside the detection area, a plurality of adsorption holes are located on the detection suction cup and outside the detection area of ​​the ceramic membrane sheet, and the exhaust channel includes a first air channel and a second air channel that are interconnected. When the ceramic membrane sheet is adsorbed onto the detection suction cup, the ceramic membrane sheet completely covers the first airway and partially covers the second airway.

[0009] Optionally, the detection suction cup includes a first suction cup shell, a second suction cup shell, and a third suction cup shell connected in sequence. The suction hole and the exhaust channel are both opened on the side of the first suction cup shell facing away from the second suction cup shell. The first suction cup shell, the second suction cup shell, and the third suction cup shell enclose a suction cavity. An suction connector communicating with the suction cavity is installed on the third suction cup shell.

[0010] Optionally, the first suction cup shell is equipped with a plurality of positioning posts for positioning the ceramic film sheet. The plurality of positioning posts are distributed around the adsorption hole. Sealing gaskets are installed between the first suction cup shell and the second suction cup shell, and between the second suction cup shell and the third suction cup shell.

[0011] Optionally, the first air blowing assembly includes a first air blowing plate and a second air blowing plate connected to each other. The first air blowing plate and the second air blowing plate form an air blowing chamber. An air blowing connector communicating with the air blowing chamber is vertically installed on the first air blowing plate. At least one air blowing hole is provided on the side of the second air blowing plate facing away from the first air blowing plate. The height of the first air blowing plate, the second air blowing plate and the detection suction cup decreases along the third direction.

[0012] Optionally, the feeding and adsorption assembly includes a feeding and adsorption plate connected to the first air blowing assembly, and the feeding and adsorption plate is provided with at least one feeding and adsorption nozzle for vacuum adsorption of the ceramic film sheet.

[0013] Optionally, the second blowing assembly includes a blowing fan arranged adjacent to the detection suction cup, the blowing fan being used to provide air to the ceramic film sheet vacuum-adsorbed by the detection suction cup, which moves in a second direction, and the first blowing assembly being used to provide air to the ceramic film sheet vacuum-adsorbed by the detection suction cup, which moves in a third direction. The testing machine housing is equipped with a dust removal hood arranged opposite to the blower fan, and the testing machine housing is equipped with a dust collector connected to the dust removal hood's pipeline.

[0014] Optionally, it also includes a feeding mechanism, wherein the feeding mechanism, the detection mechanism and the feeding mechanism are arranged sequentially and located on the same straight line; The feeding mechanism includes a feeding machine housing, and a feeding moving component and a feeding adsorption component are installed inside the feeding machine housing. The feeding moving component is used to drive the feeding adsorption component to move along a first direction and a third direction, so that the feeding adsorption component can perform vacuum adsorption feeding of the detected ceramic film sheet.

[0015] According to a second aspect, the present invention provides a method for detecting ceramic films, applied to the vision-guided ceramic film detection machine of the first aspect, comprising: Step S1: The ceramic film sheet to be tested is adsorbed by the feeding and adsorption assembly, and then moved to the top of the detection suction cup by the feeding and moving assembly. Then, the first blowing assembly is activated to blow air onto the ceramic film sheet, and the ceramic film sheet is placed on the detection suction cup at the same time. Step S2: Activate the vacuum adsorption of the detection suction cup to adsorb the ceramic film sheet through the adsorption hole of the detection suction cup; at the same time, maintain or restart the first air blowing component to blow air onto the ceramic film sheet. Step S3: After the ceramic film sheet is flattened by the detection suction cup, the second air blowing component is activated to blow the surface of the ceramic film sheet and / or the periphery of the detection suction cup; after the detection suction cup stabilizes its adsorption of the ceramic film sheet, the adsorption of the feeding adsorption component is released. Step S4: The detection component is driven to move to the detection position by the detection moving component, so that the detection component can perform visual inspection on the ceramic film sheet adsorbed on the detection suction cup.

[0016] Optionally, between steps S3 and S4, the method further includes: The detection component acquires image information of the marker points on the ceramic membrane sheet, and calculates the actual adsorption posture of the ceramic membrane sheet based on the spatial position of the marker points to obtain the posture deviation parameter. Based on the posture deviation parameters, at least one of the blowing pressure and blowing time of the first blowing component is adaptively adjusted to maintain the vacuum adsorption of the detection suction cup, and the first blowing component is started again or continuously according to the adjusted parameters to blow air, while the second blowing component is kept in a closed or standby state until the adhesion of the ceramic film sheet on the detection suction cup reaches a preset flatness threshold. After the flatness of the ceramic film sheet reaches the preset flatness threshold, visual inspection is continued.

[0017] Compared with the prior art, the present invention has the following beneficial effects: This invention provides a vision-guided ceramic membrane inspection machine and method. By setting adsorption holes and exhaust channels on the inspection suction cup, and combining the synergistic effect of the first and second air blowing components, air can be blown out quickly along the exhaust channels during the process of the ceramic membrane sheet being adsorbed onto the surface of the inspection suction cup. This eliminates local warping or bulging caused by residual air, ensuring that the ceramic membrane sheet is always in a tight fit during the inspection process. This significantly reduces depth-of-field errors and image distortion caused by unevenness of the sheet, thereby significantly improving the accuracy and reliability of detecting the edge morphology and position of micropores.

[0018] While blowing out air, the first and second air-blowing components effectively remove dust, debris, and other contaminants adhering to the surface of the ceramic membrane. This prevents dust from obscuring micropores or interfering with image acquisition, reducing the risk of misjudgment or missed detection due to contamination and ensuring the authenticity and completeness of visual inspection results. The feeding and adsorption components, driven by the feeding moving component, complete the gripping, transporting, and positioning of the ceramic sheet. The detection moving component drives the detection component to perform high-precision visual scanning. The entire process requires no manual intervention, avoiding secondary contamination or deformation introduced by human operation and significantly improving detection efficiency. Therefore, this invention solves the problem of insufficient flatness and cleanliness of ceramic membrane sheets in existing technologies for visual inspection. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] The structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which the present invention can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that the present invention can produce, should still fall within the scope of the technical content disclosed in the present invention.

[0021] Figure 1 A three-dimensional structural schematic diagram of a vision-guided ceramic membrane inspection machine provided in an embodiment of the present invention; Figure 2 A three-dimensional structural diagram of the feeding mechanism in a vision-guided ceramic film inspection machine provided in an embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of a feeding and moving component in a vision-guided ceramic film inspection machine, provided in an embodiment of the present invention. Figure 4 A schematic diagram of the structure of a feeding adsorption component and a first air blowing component in a vision-guided ceramic membrane inspection machine provided in an embodiment of the present invention; Figure 5 This is an exploded structural diagram of the first air blowing component in a vision-guided ceramic membrane inspection machine provided in an embodiment of the present invention. Figure 6 A three-dimensional structural diagram of the detection mechanism in a vision-guided ceramic membrane inspection machine provided in an embodiment of the present invention; Figure 7 A schematic diagram of the internal structure of the detection mechanism in a vision-guided ceramic film inspection machine provided in an embodiment of the present invention; Figure 8 This is a schematic diagram of the exploded structure of the detection suction cup in a vision-guided ceramic membrane inspection machine provided in an embodiment of the present invention; Figure 9 for Figure 8 A magnified structural diagram at point A; Figure 10 This is a schematic diagram of the structure of a ceramic film sheet provided in an embodiment of the present invention; Figure 11 A three-dimensional structural diagram of the feeding mechanism in a vision-guided ceramic membrane inspection machine provided in an embodiment of the present invention; Figure 12 This is a schematic flowchart of a method for detecting ceramic membranes provided in an embodiment of the present invention.

[0022] Illustration: 10. Feeding mechanism; 11. Feeding moving assembly; 111. Feeding moving module; 112. Feeding rack; 113. Feeding cylinder; 12. Feeding adsorption assembly; 121. Feeding adsorption plate; 122. Feeding adsorption nozzle; 123. Feeding adsorption rack; 13. First air blowing assembly; 131. First air blowing plate; 132. Second air blowing plate; 1321. Air blowing hole; 133. Air blowing connector; 14. Feeding machine housing; 20. Testing mechanism; 21. Testing housing; 22. Testing suction cup; 221. First suction cup housing; 2211. Suction hole; 2212. First air passage; 2213. Second air passage; 222. Second suction cup housing; 223. Third suction cup housing; 224. Suction connector; 225. Positioning post; 226. Sealing gasket; 23. Testing moving assembly; 231. First moving module; 232. Second moving module; 24. Testing assembly; 25. Second air blowing assembly; 26. Dust collector hood; 27. Dust collector; 28. Testing table; 29. ​​Testing light source; 30. Feeding mechanism; 31. Feeding machine housing; 32. Feeding moving assembly; 33. Feeding adsorption assembly; 100. Ceramic membrane sheet; 101. Detection area; 102. Marking point. Detailed Implementation

[0023] To make the objectives, features, and advantages of this invention more apparent and understandable, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0024] In the description of this invention, it should be understood that the terms "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a component positioned centrally in the connection.

[0025] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0026] The first aspect of this invention provides a vision-guided ceramic film inspection machine, such as... Figures 1 to 11As shown, the device includes a feeding mechanism 10 and a detection mechanism 20. The feeding mechanism 10 includes a feeding moving component 11 and a feeding adsorption component 12. The feeding moving component 11 is used to drive the feeding adsorption component 12 to move along a first direction and a third direction. The detection mechanism 20 includes a detection housing 21. A detection suction cup 22, a detection moving component 23, and a detection component 24 are installed inside the detection housing 21. The detection moving component 23 is used to drive the detection component 24 to move along a first direction and a second direction. The detection suction cup 22 is provided with an adsorption hole 2211 and an exhaust channel. The feeding adsorption assembly 12 is provided with a first air blowing assembly 13, and the detection housing 21 is also provided with a second air blowing assembly 25. The first air blowing assembly 13 and / or the second air blowing assembly 25 are used together to blow air onto the ceramic film sheet 100 vacuum adsorbed by the detection suction cup 22, so that the air between the detection suction cup 22 and the ceramic film sheet 100 to be tested is discharged from the exhaust channel, so that the detection assembly 24 can perform visual inspection on the flat and clean ceramic film sheet 100. In this embodiment, the feeding mechanism 10 also includes a feeding housing 14, and the feeding moving assembly 11 and the feeding adsorption assembly 12 are both installed in the feeding housing 14. The detection assembly 24 uses a detection camera to perform visual inspection on the ceramic film sheet 100. The principle of visual inspection is a well-known principle in the art and will not be described in detail here.

[0027] It should be noted that the visually guided ceramic membrane inspection machine and method provided by the present invention, by setting an adsorption hole 2211 and an exhaust channel on the inspection suction cup 22, and combining the synergistic effect of the first air blowing component 13 and the second air blowing component 25, can quickly expel the air between the ceramic membrane sheet 100 and the inspection suction cup 22 along the exhaust channel during the process of the ceramic membrane sheet 100 being adsorbed onto the surface of the inspection suction cup 22, thereby eliminating local warping or bulging caused by residual air; ensuring that the ceramic membrane sheet 100 is always in a tight fit during the inspection process, greatly reducing the depth of field error and image distortion caused by unevenness of the sheet, thereby significantly improving the accuracy and reliability of the detection of the micropore edge morphology and positional accuracy.

[0028] Specifically, the detection moving component 23 includes a first moving module 231 and a second moving module 232. The first moving module 231 is used to drive the second moving module 232 to move linearly along a second direction, and the second moving module 232 is used to drive the detection component 24 to move linearly along a first direction. Both the first moving module 231 and the second moving module 232 are linear motor modules known in the art, and will not be described in detail here.

[0029] While blowing air, the first air blowing component 13 and the second air blowing component 25 can effectively remove contaminants such as dust and debris adhering to the surface of the ceramic membrane, preventing dust from obscuring micropores or interfering with image acquisition. This reduces the risk of misjudgment or missed detection due to contamination, ensuring the authenticity and integrity of the visual inspection results. The feeding moving component 11 drives the feeding adsorption component 12 to complete the gripping, transportation, and positioning of the material sheet, and the detection moving component 23 drives the detection component 24 to complete high-precision visual scanning. The entire process requires no manual intervention, avoiding secondary contamination or deformation introduced by human operation and significantly improving detection efficiency. Therefore, this invention solves the problem of insufficient flatness and cleanliness of the ceramic membrane material sheet 100 in the prior art when it is involved in visual inspection.

[0030] like Figures 4 to 10 As shown, the ceramic membrane sheet 100 is provided with a detection area 101 and a marking point 102 located outside the detection area 101. Multiple adsorption holes 2211 are located on the detection suction cup 22 and outside the detection area 101 of the ceramic membrane sheet 100. The exhaust channel includes a first air channel 2212 and a second air channel 2213 that are interconnected. When the ceramic membrane sheet 100 is adsorbed onto the detection suction cup 22, the ceramic membrane sheet 100 completely covers the first airway 2212 and partially covers the second airway 2213.

[0031] In specific implementation, by setting the adsorption hole 2211 outside the detection area 101 of the ceramic film sheet 100 and corresponding it to the outer area of ​​the marking point 102 on the sheet, this design ensures that during vacuum adsorption, the adsorption force acts directly on the solid area of ​​the sheet without precision micropores. This effectively avoids physical deformation of the micropore edges or image occlusion that may occur due to the suction force acting directly on the detection area 101 filled with high-density micropores, protecting the geometric integrity of the core detection area 101 and providing a true morphology for subsequent visual inspection. When the first air blowing component 13 is working, the airflow first drives the main air between the ceramic film sheet 100 and the detection suction cup 22 into the first air channel 2212; subsequently, the airflow enters the second air channel 2213 through the connection, and finally is smoothly discharged to the external environment from the opening of the second air channel 2213 that is not completely covered by the sheet. The first air passage 2212 establishes an efficient and directional main exhaust path, which quickly removes most of the air. The second air passage 2213 has a partially open structure, which avoids the formation of a dead zone or a sudden pressure change at the end of the air passage. This allows the sheet to adhere to the surface of the detection suction cup 22 in a gradual and controlled manner, greatly reducing the risk of stress concentration or vibration of the flexible sheet due to instantaneous pressure difference.

[0032] In actual operation, the detection component 24 can first identify the marking points 102 on the ceramic membrane sheet 100, thereby accurately locating its detection area 101 and non-detection area 101 (i.e., adsorption safety area). At the same time, the outer area of ​​the ceramic membrane sheet 100 covers the preset adsorption holes 2211 and the first air passage 2212. This vision-guided positioning and matching of the adsorption area allows the subsequent blowing and degassing leveling process to be carried out under pre-calibrated and relatively precise conditions, further eliminating flatness errors caused by placement deviations and improving the systematic accuracy and repeatability of the entire detection process.

[0033] like Figures 4 to 9 As shown, the detection suction cup 22 includes a first suction cup shell 221, a second suction cup shell 222, and a third suction cup shell 223 connected in sequence. The suction hole 2211 and the exhaust channel are both located on the side of the first suction cup shell 221 facing away from the second suction cup shell 222. The first suction cup shell 221, the second suction cup shell 222, and the third suction cup shell 223 enclose a suction cavity. A suction connector 224 communicating with the suction cavity is installed on the third suction cup shell 223. In this embodiment, the suction connector 224 is connected to a vacuum equipment pipeline known in the art. A detection stage 28 and a detection light source 29 are fixedly installed inside the detection mechanism 20. The detection suction cup 22 is fixedly installed on the detection stage 28, and the detection light source 29 is located at the bottom of the detection suction cup 22. The detection suction cup 22 is made of a light-transmitting material, and the detection light source 29 provides detection illumination to the ceramic film sheet 100 on the detection suction cup 22.

[0034] In practice, multiple adsorption holes 2211 dispersed on the surface of the first suction cup shell 221 are connected to the adsorption chamber, and then uniformly connected to the vacuum equipment by a single adsorption connector 224. This centralized negative pressure generation method with multiple holes in one chamber, compared with the scheme of independent piping for each adsorption hole 2211, can effectively balance the pressure distribution of the entire adsorption area, eliminate local suction differences, and provide uniform, stable and strong overall adsorption force for the flexible ceramic membrane sheet 100, ensuring that it resists external disturbances and maintains global flatness during the detection process. The detection suction cup 22 is made of a light-transmitting material (such as high optical grade glass or transparent polymer material) and is fixed on the detection stage 28. The light emitted by the detection light source 29 can uniformly penetrate the entire detection suction cup 22, providing full-area and shadowless backlight illumination for the ceramic membrane sheet 100 placed on the detection suction cup 22. For the ceramic membrane sheet 100 with high-density through holes, this illumination method can make the edges of the micropores form an extremely clear and high-contrast outline in the camera image. Combining the previously achieved high flatness and high cleanliness of the material, this backlighting environment completely solves the traditional problems of image blurring and edge recognition difficulties caused by surface reflection, uneven lighting, or changes in depth of field, providing better optical conditions for vision systems to perform size measurement and morphology analysis.

[0035] like Figures 4 to 9 As shown, the first suction cup shell 221 is equipped with a plurality of positioning posts 225 for positioning the ceramic film sheet 100. The plurality of positioning posts 225 are distributed around the adsorption hole 2211. Sealing gaskets 226 are installed between the first suction cup shell 221 and the second suction cup shell 222, and between the second suction cup shell 222 and the third suction cup shell 223.

[0036] In specific implementation, multiple positioning posts 225 surrounding the adsorption holes 2211 are set on the working surface of the first suction cup shell 221, providing an active mechanical positioning reference for the ceramic film sheet 100. When the feeding mechanism 10 places the sheet on the detection suction cup 22, the edge of the ceramic film sheet 100 precisely engages with the positioning posts 225, forcibly correcting the final position and angle of the ceramic film sheet 100. This eliminates micron-level slippage or rotation that may occur during the adsorption and air blowing flattening process, ensuring that the detection area 101 on the ceramic film sheet 100 remains absolutely consistent with the scanning coordinate system of the vision system during each detection. This lays a solid foundation for highly repeatable and comparable measurement results and effectively prevents batch false detections caused by placement deviations. By setting a sealing gasket 226, the airtightness of the adsorption cavity formed by the three-layer shell is ensured, thereby stably maintaining the negative pressure generated by the vacuum equipment and providing reliable protection for the adsorption force of the adsorption holes 2211.

[0037] like Figure 4 and Figure 5 As shown, the first air blowing assembly 13 includes a first air blowing plate 131 and a second air blowing plate 132 connected to each other. The first air blowing plate 131 and the second air blowing plate 132 enclose an air blowing chamber. An air blowing connector 133 communicating with the air blowing chamber is vertically mounted on the first air blowing plate 131. At least one air blowing hole 1321 is provided on the side of the second air blowing plate 132 facing away from the first air blowing plate 131. The heights of the first air blowing plate 131, the second air blowing plate 132, and the detection suction cup 22 decrease along a third direction. In this embodiment, the air blowing connector 133 is connected to a pipe of an air blowing device known in the art, and the air source in the air blowing device is compressed air. The multiple air blowing holes 1321 are arranged in a matrix on the second air outlet plate.

[0038] In practice, compressed air from an external air source first enters the cavity for buffering and pressure equalization, effectively eliminating airflow pulsations that may be caused by the air supply pipeline. Subsequently, the airflow is evenly output through multiple air holes 1321 arranged in a matrix on the second air blowing plate 132, forming a stable and uniformly distributed air curtain on the surface of the ceramic membrane sheet 100. This design avoids the impact or vibration that may be caused to the flexible sheet by excessively strong airflow at a single point or in a localized area, ensuring that the blowing process can effectively remove surface contaminants and assist the ceramic membrane sheet 100 in adhesion with a gentle and consistent air pressure, thereby improving the reliability and consistency of the cleaning and flattening process.

[0039] like Figures 2 to 5 As shown, the feeding and adsorption assembly 12 includes a feeding and adsorption plate 121 fixedly connected to the first air blowing plate 131. The feeding and adsorption plate 121 is provided with at least one feeding and adsorption nozzle 122 for vacuum adsorption of the ceramic membrane sheet 100. In a specific embodiment, two feeding and adsorption plates 121 are fixedly installed at both ends of the feeding and adsorption frame 123, and each feeding and adsorption plate 121 is equipped with four feeding and adsorption nozzles 122. The feeding and adsorption nozzles 122 are connected to negative pressure equipment pipelines known in the art, which will not be described in detail here. Specifically, the feeding moving assembly 11 includes a feeding moving module 111 and a feeding rack 112. A feeding cylinder 113 is installed on the feeding rack 112. The telescopic rod of the feeding cylinder 113 is fixedly connected to the feeding adsorption rack 123. The feeding moving module 111 is a linear motor module. The feeding moving module 111 is used to drive the feeding rack 112 to move linearly in a first direction. The feeding cylinder 113 is used to drive the feeding adsorption rack 123 to move linearly in a third direction, so that the feeding adsorption assembly 12 adsorbs the ceramic film sheet 100 in the feeding machine housing 14 for feeding operations.

[0040] In practical implementation, the feeding moving component 11 adopts a precision two-dimensional drive scheme where a linear motor module drives the first direction of movement, and a feeding cylinder 113 drives the third direction of movement. The linear motor module provides high-speed, high-precision, and high-stability horizontal positioning, ensuring that the ceramic film sheet 100 can quickly and accurately move back and forth between the feeding position and the detection position in the horizontal plane. The feeding cylinder 113 provides flexible pick-and-place action in the vertical direction. Its controllable stroke and speed allow the feeding suction nozzle 122 to contact and pick up the extremely thin and fragile ceramic film sheet 100 with appropriate force, avoiding mechanical impact. The vacuum suction method of the feeding suction nozzle 122 is a gripping method that does not cause clamping damage to flexible workpieces. This feeding mechanism 10 realizes fully automatic handling of fragile sheets safely, reliably, and accurately.

[0041] like Figures 6 to 9 As shown, the second blowing assembly 25 includes a blowing fan arranged adjacent to the detection suction cup 22. The blowing fan is used to provide air to the ceramic film sheet 100 vacuum adsorbed by the detection suction cup 22, which moves in a second direction. The first blowing assembly 13 is used to provide air to the ceramic film sheet 100 vacuum adsorbed by the detection suction cup 22, which moves in a third direction. The testing housing 21 is equipped with a dust removal hood 26 arranged opposite to the blower fan, and the testing housing 21 is equipped with a dust collector 27 connected to the dust removal hood 26 by pipes.

[0042] In practice, by setting the blowing direction of the first blowing assembly 13 to a third direction (vertically downward) and the blowing direction of the second blowing assembly 25 to a second direction (horizontal), a spatially orthogonal and synergistic airflow combination is formed. The airflow of the first blowing assembly 13 mainly serves to attach the material sheet to the detection suction cup 22 and blow off contaminants attached to the surface; while the horizontal airflow of the second blowing assembly 25 can sweep the surface of the material sheet, thoroughly blowing away light debris and dust that are difficult to completely remove by the vertical airflow and are retained due to static electricity or microstructure from the detection area 101 along a specific direction. This multi-dimensional airflow design of vertical pressing and horizontal sweeping constitutes a three-dimensional and active dynamic cleaning field, enabling the surface cleanliness of the ceramic film material sheet 100 to reach a higher level, laying the foundation for subsequent visual inspection.

[0043] When the fan blows contaminants horizontally off the surface of the ceramic membrane sheet 100, the dust collector hood 26 directly opposite immediately generates a directional negative pressure suction force, capturing and removing the airborne dust and debris in real time, which is then collected and processed by the dust collector 27. This mechanism creates a dynamic, locally clean space with directional airflow in the core area of ​​the testing station, effectively preventing the blown-off contaminants from spreading, drifting, and re-settling onto the sheet or other optical components within the testing chamber, thus eliminating secondary pollution and ensuring the long-term cleanliness of the testing environment and the long-term stability of the testing results.

[0044] like Figures 1 to 11 As shown, it also includes a feeding mechanism 30, a feeding mechanism 10, a detection mechanism 20, and the feeding mechanism 30 arranged sequentially and located on the same straight line; The unloading mechanism 30 includes an unloading housing 31, within which an unloading moving component 32 and an unloading adsorption component 33 are installed. The unloading moving component 32 drives the unloading adsorption component 33 to move along a first direction and a third direction, so that the unloading adsorption component 33 performs vacuum adsorption unloading of the tested ceramic film sheet 100. In this embodiment, the unloading moving component 32 and the loading moving component 11 have the same specific structure, and the unloading adsorption component 33 and the loading adsorption component 12 have the same specific structure, which will not be described again here. Based on the visual inspection result of the detection component 24, the unloading mechanism 30 places qualified ceramic film sheets 100 into the OK box, or places unqualified ceramic film sheets 100 into the NG box.

[0045] In practical implementation, by arranging the feeding mechanism 10, the inspection mechanism 20, and the unloading mechanism 30 in a straight line, this equipment forms a highly integrated automated inspection production line. The feeding mechanism 10 is responsible for accurately feeding the uninspected pieces into the inspection station. After the inspection mechanism 20 completes high-precision visual inspection, the unloading mechanism 30 immediately moves to efficiently remove the inspected pieces. This design completely replaces the manual loading and unloading or complex transfer steps required in traditional inspection, ensuring the automation, continuity, and smoothness of the material flow throughout the input-processing-output process, maximizing the overall operating efficiency and capacity of the equipment. Since the unloading moving component 32 has the same structure as the feeding moving component 11, and the unloading adsorption component 33 has the same structure as the feeding adsorption component 12, this mirror or reuse design strategy significantly reduces the design and manufacturing costs of the equipment and achieves standardization of core functional modules. On the other hand, it ensures that the loading and unloading links have the same motion accuracy and reliability.

[0046] A second aspect of this invention provides a method for detecting ceramic films, applied to the vision-guided ceramic film detection machine of the first aspect, such as... Figure 12 As shown, it includes: Step S1: The ceramic film sheet 100 to be tested is adsorbed by the feeding adsorption component 12 and moved to the top of the detection suction cup 22 by the feeding moving component 11. Then, the first blowing component 13 is started to blow air onto the ceramic film sheet 100 and place the ceramic film sheet 100 on the detection suction cup 22. Step S2: Start the vacuum adsorption of the detection suction cup 22 and adsorb the ceramic film sheet 100 through the adsorption hole 2211 of the detection suction cup 22; at the same time, maintain or restart the first air blowing component 13 to blow air onto the ceramic film sheet 100. Step S3: After the ceramic film sheet 100 is flattened by the detection suction cup 22, the second blowing component 25 is activated to blow the surface of the ceramic film sheet 100 and / or the periphery of the detection suction cup 22; after the detection suction cup 22 stabilizes its adsorption of the ceramic film sheet 100, the adsorption of the feeding adsorption component 12 is released. In step S4, the detection component 24 is moved to the detection position by the detection moving component 23, so that the detection component 24 performs visual inspection on the ceramic film sheet 100 adsorbed on the detection suction cup 22.

[0047] It should be noted that in step S1, the transfer process of the loading and adsorption component 12 is combined with the initial blowing action of the first blowing component 13, so that the surface of the ceramic membrane sheet 100 is initially cleaned before arriving at the detection station, effectively removing loose contaminants that may have adhered during the handling process. Immediately afterwards, blowing continues while the sheet is placed on the detection suction cup 22 to preemptively remove interfacial air. This integrated process design, which combines cleaning and initial leveling work in advance and in parallel with the material transfer process, shortens the overall cycle time and optimizes efficiency. In step S2, the detection suction cup 22 initiates vacuum adsorption while simultaneously maintaining or restarting the first blowing component 13 for blowing; this operation creates a synergistic mechanical environment of upward blowing and downward suction. The combined effect of upward adsorption and downward blowing pressure effectively removes and expels air remaining between the ceramic film and the suction cup, especially air that is easily trapped in micropores or tiny depressions. This completely avoids localized non-contact, warping, or deformation caused by the air cushion effect, providing a relatively ideal flat reference surface for high-precision visual inspection. In step S3, after the ceramic film 100 is vacuum-adsorbed and flattened, the second blowing assembly 25 is activated for purging. This sequence ensures that the ceramic film 100 is physically stable and fixed, and the applied horizontal (second direction) blowing airflow will not disturb its position. This purging specifically targets particles that have been suppressed by the vertical airflow but may remain due to static electricity or strong adhesion, and forms a closed-loop cleaning system with the dust hood 26 and dust collector 27 to remove contaminants in real time. This process ensures that the surface of the film reaches a high level of cleanliness before the detection assembly 24 is in place.

[0048] In one embodiment, between steps S3 and S4, the method further includes: The image information of the marker point 102 on the ceramic membrane sheet 100 is acquired by the detection component 24, and the actual adsorption posture of the ceramic membrane sheet 100 is calculated based on the spatial position of the marker point 102 to obtain the posture deviation parameter. Based on the posture deviation parameters, at least one of the blowing pressure and blowing time of the first blowing component 13 is adaptively adjusted to maintain the vacuum adsorption of the detection suction cup 22, and the first blowing component 13 is started again or continuously according to the adjusted parameters to blow air, while the second blowing component 25 is kept in the off or standby state until the adhesion of the ceramic film sheet 100 on the detection suction cup 22 reaches the preset flatness threshold. After the flatness of the ceramic film sheet 100 reaches the preset flatness threshold, visual inspection continues.

[0049] Specifically, the detection component 24 (typically a combination of a high-resolution industrial camera and lens) is moved to a predetermined calibration position by the detection moving component 23 to acquire images of the ceramic film sheet 100 adsorbed on the detection suction cup 22. The target of the acquisition is one or more pre-processed high-precision markers 102 (such as crosshairs or circular targets) on the sheet. The acquired images of the markers 102 are transmitted to a computing platform (such as an industrial control computer) connected to the detection machine. Based on a preset ideal coordinate model of the markers 102, the image processing software calculates the actual image coordinates of each marker 102 using algorithms known in the art, such as sub-pixel edge extraction and template matching. Through coordinate transformation and comparison, the actual adsorption posture of the ceramic film sheet 100 is calculated. The posture deviation parameters include: the translational deviation (ΔX, ΔY) of the ceramic film sheet 100 in the plane of the detection suction cup 22, and the flatness deviation indirectly calculated through multi-point height information (such as the height difference or warpage curvature of each marker 102 relative to the ideal plane).

[0050] The control system (such as the control software in a PLC or industrial computer) receives the calculated attitude deviation parameters and compares them with internally preset flatness thresholds (such as the maximum allowable translation, rotation, and flatness error). If the deviation parameters exceed the thresholds, it is determined that the current adsorption fit has not met the optimal detection requirements. The system then adaptively adjusts the operating parameters of the first air blowing component 13. The adjustment strategy can be based on preset rules or algorithm models, for example: If there is a slight overall warping (flatness deviation), increase the blowing pressure and / or extend the blowing time proportionally to enhance the downward pressure and duration of expelling residual air.

[0051] During this period, the vacuum adsorption of the detection suction cup 22 is maintained to provide a stable base fixing force for the leveling process. At the same time, the second air blowing assembly 25 is kept in a closed or standby state to prevent its horizontal airflow from interfering with the ongoing vertical fine leveling process.

[0052] Based on the adjusted parameters, the first air blowing component 13 is restarted or continuously activated to perform a new round of precision blowing on the material sheet. After the blowing is completed, the image of the marker point 102 can be acquired again through the detection component 24, and the attitude can be evaluated. This closed-loop process of "detection-evaluation-adjustment-re-action" can be iterated until all the calculated attitude deviation parameters fall within the preset flatness threshold range, indicating that the adhesion of the ceramic film material sheet 100 on the detection suction cup 22 has reached the optimal state. Once the flatness is confirmed to meet the standard, the control system issues a command to exit the fine-tuning cycle and continue with the formal visual inspection process in step S4. At this time, the ceramic film material sheet 100 is in a highly flat and stable state, which provides a guarantee for obtaining the highest quality micropore detection images.

[0053] Traditional methods rely on preset, fixed blowing and adsorption parameters, which cannot cope with the impact of individual differences in the material sheets (such as initial warpage and slight thickness variations), environmental fluctuations, or minor changes in equipment status. This method introduces real-time feedback based on actual images to construct an intelligent closed-loop control system. This system can proactively sense the actual flatness effect of each adsorption cycle and determine the optimal adjustment strategy, dynamically compensating for various uncertainties. This ensures that each material sheet can be adjusted to near its theoretical limit for optimal flatness, achieving unprecedented consistency and repeatability in inspection conditions. This method deeply integrates the spatial perception capability of the vision system with the mechanical adjustment capability of the pneumatic system. Image information is no longer only used for final dimensional inspection but also serves as a direct feedback input for process control; the blowing action is no longer a simple timing switch but a process variable that can be precisely controlled based on visual feedback. This multimodal perception and actuator collaboration reflects the intelligent development direction of manufacturing inspection equipment towards a perception-decision-execution integrated system.

[0054] The above-described embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vision-guided ceramic membrane inspection machine, characterized in that, The application relates to a ceramic membrane material piece detection device, which comprises a feeding mechanism (10) and a detection mechanism (20), wherein the feeding mechanism (10) comprises a feeding moving assembly (11) and a feeding adsorption assembly (12), the feeding moving assembly (11) is used for driving the feeding adsorption assembly (12) to move along a first direction and a third direction; the detection mechanism (20) comprises a detection machine shell (21), a detection adsorption disc (22), a detection moving assembly (23) and a detection assembly (24) are arranged in the detection machine shell (21), the detection moving assembly (23) is used for driving the detection assembly (24) to move along the first direction and a second direction. The detection adsorption disc (22) is provided with an adsorption hole (2211) and an exhaust channel, the feeding adsorption assembly (12) is provided with a first air blowing assembly (13), the detection machine shell (21) is further provided with a second air blowing assembly (25), the first air blowing assembly (13) and / or the second air blowing assembly (25) are used for blowing air to the ceramic membrane material piece (100) adsorbed on the detection adsorption disc (22) to exhaust air between the detection adsorption disc (22) and the ceramic membrane material piece (100) to be detected from the exhaust channel, so that the detection assembly (24) can visually detect the flat and clean ceramic membrane material piece (100).

2. The vision-guided ceramic membrane inspection machine of claim 1, wherein, The ceramic membrane material piece (100) is provided with a detection area (101) and a mark point (102) located outside the detection area (101), a plurality of adsorption holes (2211) are located on the detection adsorption disc (22) and outside the detection area (101) of the ceramic membrane material piece (100), and the exhaust channel comprises a first air channel (2212) and a second air channel (2213) penetrating each other. When the ceramic membrane material piece (100) is adsorbed on the detection adsorption disc (22), the ceramic membrane material piece (100) covers the first air channel (2212) and partially covers the second air channel (2213).

3. The vision-guided ceramic membrane inspection machine of claim 1 or 2, wherein, The detection adsorption disc (22) comprises a first adsorption disc shell (221), a second adsorption disc shell (222) and a third adsorption disc shell (223) connected in sequence, the adsorption hole (2211) and the exhaust channel are arranged on the back of the first adsorption disc shell (221) to the second adsorption disc shell (222), the first adsorption disc shell (221), the second adsorption disc shell (222) and the third adsorption disc shell (223) form an adsorption cavity, and the third adsorption disc shell (223) is provided with an adsorption connector (224) communicating with the adsorption cavity.

4. The vision-guided ceramic membrane inspection machine of claim 3, wherein, A plurality of positioning columns (225) for positioning the ceramic membrane material piece (100) are arranged on the first adsorption disc shell (221), the positioning columns (225) are distributed around the adsorption hole (2211), and sealing pads (226) are arranged between the first adsorption disc shell (221) and the second adsorption disc shell (222) and between the second adsorption disc shell (222) and the third adsorption disc shell (223).

5. The vision-guided ceramic membrane inspection machine of claim 1, wherein, The first blowing assembly (13) comprises a first blowing plate (131) and a second blowing plate (132) connected with each other, the first blowing plate (131) and the second blowing plate (132) form a blowing cavity, a blowing joint (133) communicating with the blowing cavity is vertically installed on the first blowing plate (131), at least one blowing hole (1321) is arranged on the side of the second blowing plate (132) facing away from the first blowing plate (131), and the height of the first blowing plate (131), the second blowing plate (132) and the detection suction disc (22) along the third direction decreases in a decreasing trend.

6. The vision-guided ceramic membrane inspection machine of claim 1 or 2 or 5, wherein, The upper feeding suction assembly (12) comprises an upper feeding suction disc (121) connected with the first blowing assembly (13), and at least one upper feeding suction nozzle (122) for vacuum suction of the ceramic membrane sheet (100) is arranged on the upper feeding suction disc (121).

7. The vision-guided ceramic membrane inspection machine of claim 1, wherein, The second blowing assembly (25) comprises a blowing fan arranged adjacent to the detection suction disc (22), the blowing fan is used for providing blowing gas moving along the second direction to the ceramic membrane sheet (100) vacuum-sucked by the detection suction disc (22), and the first blowing assembly (13) is used for providing blowing gas moving along the third direction to the ceramic membrane sheet (100) vacuum-sucked by the detection suction disc (22). The detection machine shell (21) is provided with a dust collector (27) in communication with the dust removal cover (26).

8. The vision-guided ceramic membrane inspection machine of claim 1, wherein, The upper feeding mechanism (10), the detection mechanism (20) and the lower feeding mechanism (30) are arranged in sequence and located on the same straight line. The lower feeding mechanism (30) comprises a lower feeding shell (31), a lower feeding moving assembly (32) and a lower feeding suction assembly (33) are installed in the lower feeding shell (31), the lower feeding moving assembly (32) is used for driving the lower feeding suction assembly (33) to move along the first direction and the third direction, so that the lower feeding suction assembly (33) vacuum-sucks and feeds the ceramic membrane sheet (100) after detection.

9. A method for detecting a ceramic film, applied to the vision-guided ceramic film detection machine according to any one of claims 1 to 8, characterized in that, Comprise: Step S1, the ceramic membrane sheet (100) to be detected is sucked by the upper feeding suction assembly (12), and is moved to the upper side of the detection suction disc (22) by the upper feeding moving assembly (11), then the first blowing assembly (13) is started to blow air to the ceramic membrane sheet (100), and the ceramic membrane sheet (100) is placed on the detection suction disc (22); Step S2, the vacuum suction of the detection suction disc (22) is started, and the ceramic membrane sheet (100) is sucked through the suction hole (2211) of the detection suction disc (22); at the same time, the first blowing assembly (13) is maintained or started again to blow air to the ceramic membrane sheet (100); Step S3, after the ceramic membrane sheet (100) is adsorbed and flattened by the detection chuck (22), the second blowing assembly (25) is started to blow the surface of the ceramic membrane sheet (100) and / or the periphery of the detection chuck (22); after the adsorption of the detection chuck (22) to the ceramic membrane sheet (100) is stable, the adsorption of the feeding and adsorbing assembly (12) is released; Step S4, the detection assembly (24) is driven by the detection moving assembly (23) to move to a detection position, so that the detection assembly (24) performs visual detection on the ceramic membrane sheet (100) adsorbed on the detection chuck (22).

10. The method of detecting a ceramic film according to claim 9, wherein Between the step S3 and the step S4, further comprising: The detection assembly (24) collects image information of the mark point (102) on the ceramic membrane sheet (100), and calculates the actual adsorption posture of the ceramic membrane sheet (100) based on the spatial position of the mark point (102), to obtain a posture deviation parameter; According to the posture deviation parameter, at least one of the blowing pressure and the blowing time of the first blowing assembly (13) is adaptively adjusted, the vacuum adsorption of the detection chuck (22) is maintained, and the first blowing assembly (13) is started again or continuously according to the adjusted parameter, while the second blowing assembly (25) is kept in a closed or standby state, until the fit of the ceramic membrane sheet (100) on the detection chuck (22) reaches a preset flatness threshold; After the flatness of the ceramic membrane sheet (100) reaches the preset flatness threshold, visual detection is continued.

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