Ultraviolet diamond detector in complex environments

Abstract

The application provides a kind of ultraviolet diamond detector in complex environment, it is related to photoelectric detection technical field, including detector body and detection head, detection head has detection port, diamond sheet is equipped in detection head, diamond sheet has opposite first surface and second surface, first surface is equipped with first positive pole and first negative pole, second surface is equipped with second positive pole and second negative pole, and is equipped with silicon base in conjunction;When ultraviolet is irradiated diamond sheet through detection port, carrier is generated in diamond sheet, then bias voltage is applied to make first positive pole and first negative pole or second positive pole and second negative pole generate first electric field, second electric field is generated between first positive pole and second negative pole or second positive pole and first negative pole, to increase the distribution range and uniformity of electric field in diamond sheet, reduce the difficulty of carrier directional motion and the difficulty of carrier collection, so that carrier in diamond sheet can be effectively collected, ensure detector sensitivity and responsivity.

Description

Technical Field

[0001] This invention relates to the field of photoelectric detection technology, and in particular to an ultraviolet diamond detector for complex environments. Background Technology

[0002] Ultraviolet (UV) detection technology has important applications in space communication, missile guidance, discharge detection, and medicine. Diamond, as a wide-bandgap (5.5 eV) semiconductor material, corresponds to a UV wavelength of 225 nm and exhibits solar-blindness, allowing it to be used in detectors without the need for filters or dielectric coatings against visible light backgrounds. Furthermore, diamond possesses many excellent electrical, optical, thermal, and mechanical properties, as well as high radiation resistance and physicochemical stability, such as low dielectric constant, high carrier mobility, high radiation hardness, high resistivity, and high-voltage breakdown. When UV light irradiates diamond, photon energy is absorbed, exciting electron-hole pairs. After applying a bias voltage across the detector to create an internal electric field, the carriers (electrons and holes) separate and move directionally under the influence of the electric field, thus forming a photocurrent. By detecting changes in the photocurrent, the presence of UV light can be sensed and its intensity quantified. The detection electrodes of existing diamond-based ultraviolet detectors mainly adopt two structures: one is a planar interdigitated electrode structure deposited on the upper surface of diamond, and the other is a sandwich structure in which metal electrodes are deposited on both the upper and lower surfaces of diamond.

[0003] In existing technologies, the electric field of planar interdigitated electrode structures is mainly distributed several micrometers below the diamond surface, which cannot effectively collect charge carriers far from the surface area, affecting the detector's sensitivity and responsivity; while sandwich electrode structures have a large overall thickness, making it more difficult for charge carriers to move and collect.

[0004] The information disclosed in the background section of this invention is intended only to enhance the understanding of the general background of this invention and should not be construed as an admission or in any way implying that such information constitutes prior art known to those skilled in the art. Summary of the Invention

[0005] Therefore, it is necessary to provide an ultraviolet diamond detector for complex environments, addressing the problems existing in current ultraviolet diamond detectors.

[0006] The above objectives are achieved through the following technical solutions:

[0007] An ultraviolet diamond detector for complex environments includes a detector body and a detector head connected to each other. The detector head has a detection port and a diamond sheet is disposed inside the detector head. The diamond sheet has a first surface and a second surface opposite to each other. The first surface is close to the detection port and the second surface is away from the detection port. The first surface has a first positive electrode and a first negative electrode, and the second surface has a second positive electrode and a second negative electrode. A silicon substrate is attached to the first surface. When ultraviolet light irradiates the diamond sheet through the detection port, charge carriers are generated in the diamond sheet. A bias voltage is applied to generate a first electric field between the first positive electrode and the first negative electrode or between the second positive electrode and the second negative electrode, and a second electric field between the first positive electrode and the second negative electrode or between the second positive electrode and the first negative electrode. The first electric field and the second electric field cause the charge carriers to separate and move in a directional manner.

[0008] Furthermore, the first positive electrode, the first negative electrode, the second positive electrode, and the second negative electrode are all composed of a base and a branch. The base is located at the edge of the first surface or the second surface and extends inward and outward. One end of the branch is connected to the base, and the other end is distributed on the first surface or the second surface. The first surface and the second surface are provided with receiving grooves, and the base and the branch are disposed in the receiving grooves.

[0009] Furthermore, the distances of the branches of the first positive electrode and the branches of the first negative electrode relative to the first surface are different, and the distances of the branches of the second positive electrode and the branches of the second negative electrode relative to the second surface are different.

[0010] Furthermore, the diamond sheet has a first straight line, which is a line connecting the center of the diamond sheet to its edge, and the branches of the first positive electrode, the first negative electrode, the second positive electrode, and the second negative electrode are arranged sequentially along the first straight line.

[0011] Furthermore, one end of the branch connects to one side of the base, while the other end extends along an arc-shaped trajectory to the other side of the base.

[0012] Furthermore, the branches bend repeatedly to form a serpentine structure.

[0013] Furthermore, the first positive electrode, the first negative electrode, the second positive electrode, and the second negative electrode are each composed of a base and at least two branches, and the two branches of the first positive electrode, the first negative electrode, the second positive electrode, or the second negative electrode are nested inside and outside each other.

[0014] Furthermore, the branches of the first positive electrode and the branches of the first negative electrode are alternately arranged from the inside to the outside, and the branches of the second positive electrode and the branches of the second negative electrode are alternately arranged from the inside to the outside.

[0015] Furthermore, the silicon substrate has protrusions that are used to hold the branch of the second positive electrode or the branch of the second negative electrode within the receiving groove.

[0016] Furthermore, the thickness of the base and the branch are equal.

[0017] The present invention has at least the following beneficial effects:

[0018] (1) The first and second electric fields generated within the diamond sheet can increase the distribution range and uniformity of the electric field within the diamond sheet, reduce the difficulty of directional movement of charge carriers and the difficulty of collecting charge carriers, and enable all charge carriers in the diamond sheet to be effectively collected, thereby ensuring the detector sensitivity and responsivity to a certain extent. At the same time, the base and branches are embedded in the receiving groove and are flush with or lower than the first or second surface, so they will not block the obliquely irradiated ultraviolet light source, avoid the formation of shadow areas, reduce the area of ​​the metal electrodes on the diamond sheet surface, increase the irradiated detection area of ​​the diamond sheet, and increase the duty cycle of the diamond sheet surface, thereby increasing the number of charge carriers generated. Moreover, the four metal electrodes are staggered in two directions, which can further increase the distribution range of the electric field within the diamond sheet.

[0019] (2) The arc-shaped support has lower resistance, which can further reduce the difficulty of directional movement of charge carriers and the difficulty of charge carrier collection, improve the charge carrier collection effect, and ensure the sensitivity and responsivity of the detector. At the same time, the serpentine support can further increase the distribution range and uniformity of the electric field in the diamond sheet, so as to collect more charge carriers, further reduce the difficulty of charge carrier collection, improve the charge carrier collection effect, and ensure the sensitivity and responsivity of the detector. At the same time, the serpentine structure helps to reduce the formation of local hot spots and promote the uniformity of current distribution. Moreover, in a vibration environment, the serpentine structure can more effectively resist deformation or stress, improve the stability and reliability of the detector. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of an ultraviolet diamond detector in a complex environment provided in an embodiment of the present invention;

[0021] Figure 2 for Figure 1 Schematic diagram of the internal structure of the probe;

[0022] Figure 3 for Figure 2 Top view;

[0023] Figure 4 for Figure 3 Sectional view along axis AA;

[0024] Figure 5 for Figure 4 A magnified view of a section at point B in the middle;

[0025] Figure 6 for Figure 2 Exploded view of the parts;

[0026] Figure 7for Figure 6 A magnified view of a section at point C.

[0027] in:

[0028] 101. Detector body; 102. Detector head; 103. Silicon-based;

[0029] 201. Diamond sheet; 202. First positive electrode; 203. First negative electrode; 204. Second positive electrode; 205. Second negative electrode; 206. Base; 207. Branch; 208. Receiving groove; 209. Protrusion. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below through embodiments and in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

[0031] The component designations used in this document, such as "first" and "second," are merely for distinguishing the described objects and do not have any sequential or technical meaning. The terms "connection" and "linkage" used in this invention, unless otherwise specified, include both direct and indirect connections (linkages). It should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are used only for the convenience of describing the invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the invention.

[0032] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "beneath" of the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0033] like Figures 1 to 7As shown, this embodiment of the invention provides an ultraviolet diamond detector for complex environments, including a detector body 101 and a detector head 102 connected to each other. The detector head 102 has a detection port, and a diamond sheet 201 is disposed inside the detector head 102. The diamond sheet 201 has a first surface and a second surface opposite to each other. The first surface is close to the detection port and the second surface is away from the detection port. The first surface is provided with a first positive electrode 202 and a first negative electrode 203, and the second surface is provided with a second positive electrode 204 and a second negative electrode 205, and a silicon substrate 103 is attached thereto. When ultraviolet light irradiates the diamond sheet 201 through the detection port, charge carriers are generated in the diamond sheet 201. A bias voltage is applied to generate a first electric field between the first positive electrode 202 and the first negative electrode 203 or between the second positive electrode 204 and the second negative electrode 205, and a second electric field between the first positive electrode 202 and the second negative electrode 205 or between the second positive electrode 204 and the first negative electrode 203. The first electric field and the second electric field cause the charge carriers to separate and move in a directional manner.

[0034] When ultraviolet light irradiates the diamond sheet 201 through the detection port, charge carriers are generated within the diamond sheet 201. A bias voltage is then applied to generate a first electric field between the first positive electrode 202 and the first negative electrode 203 or between the second positive electrode 204 and the second negative electrode 205, and a second electric field between the first positive electrode 202 and the second negative electrode 205 or between the second positive electrode 204 and the first negative electrode 203. This increases the distribution range and uniformity of the electric field in the diamond sheet 201, reduces the difficulty of directional movement of charge carriers and the difficulty of collecting charge carriers, and ensures that all charge carriers in the diamond sheet 201 can be effectively collected, thereby guaranteeing the detector's sensitivity and responsivity to a certain extent.

[0035] It is worth noting that, since the first positive electrode 202 and the first negative electrode 203 are close to the first plane, and the second positive electrode 204 and the second negative electrode 205 are close to the second plane, the first electric field generated between the first positive electrode 202 and the first negative electrode 203 and between the second positive electrode 204 and the second negative electrode 205 is basically parallel to the first plane and the second plane, while the second electric field generated between the first positive electrode 202 and the second negative electrode 205 and between the second positive electrode 204 and the first negative electrode 203 is basically perpendicular to the first plane and the second plane, thereby increasing the distribution range and uniformity of the electric field in the diamond sheet 201.

[0036] The detector body 101 and the detector head 102 are connected by a flexible cable, facilitating the alignment of the detector head 102 with the area to be measured. One side of the detector head 102 has a detection port, and the first surface of the diamond plate 201 inside the detector head 102 faces the detection port to receive ultraviolet radiation. The detector body 101 has functions for power supply, signal amplification, data processing, and control, and also has a display screen and operation buttons for user operation and viewing of relevant readings. The structure and working principle of the detector body 101 are existing technologies and will not be described in detail in this application.

[0037] Furthermore, the diamond sheet 201 can be rectangular, circular, elliptical, or other shapes. This embodiment uses a rectangular diamond sheet 201 as an example, with its two surfaces parallel to each other. Compared to existing sandwich structures, the diamond sheet 201 used in this application has a smaller thickness and can be understood as a thin-film structure. The metal electrode can be made of gold, chromium, or titanium, etc. Metal electrodes made of the above materials have good adhesion to the diamond sheet 201, so as to form a good ohmic contact between the two. For ease of description, the first positive electrode 202, the first negative electrode 203, the second positive electrode 204, and the second negative electrode 205 can be collectively referred to as metal electrodes below.

[0038] During production, after processing the silicon substrate 103, a second positive electrode 204 and a second negative electrode 205 are formed on the silicon substrate 103 using a photoresist coating process. A diamond wafer 201 is epitaxially grown on the surface of the silicon substrate 103 as a conductor layer using chemical vapor deposition (CVD) under specific growth parameters. Then, a first positive electrode 202 and a first negative electrode 203 are formed on the first surface of the diamond wafer 201 using a photoresist coating process, ensuring that the first positive electrode 202, the first negative electrode 203, the second positive electrode 204, and the second negative electrode 205 all form ohmic contacts with the diamond wafer 201. Furthermore, after the above operations are completed, the wafer is annealed in an argon atmosphere at 400℃~500℃ for 40min~50min to further optimize the ohmic characteristics of the contact between the metal electrode and the diamond wafer 201. The photolithography process mainly includes coating, photolithography, metal deposition, and lift-off. The operating principles and specific processes of the above-mentioned chemical vapor deposition process and photolithography process are existing technologies, and this application will not elaborate on them.

[0039] In one embodiment, the first positive electrode 202, the first negative electrode 203, the second positive electrode 204, and the second negative electrode 205 are all composed of a base 206 and a branch 207. The base 206 is located at the edge of the first surface or the second surface and extends inward and outward. One end of the branch 207 is connected to the base 206, and the other end is distributed on the first surface or the second surface. The first surface and the second surface are provided with receiving grooves 208, and the base 206 and the branch 207 are disposed in the receiving grooves 208.

[0040] The base 206 extends outward relative to the first or second surface to facilitate the application of voltage, while the branches 207 extend and are distributed on the first or second surface to collect charge carriers. Furthermore, the base 206 and branches 207 are fitted into the receiving groove 208 and are flush with or below the first or second surface, thus preventing obstruction of the obliquely irradiated ultraviolet light source, avoiding the formation of shadow areas, reducing the area of ​​the metal electrode on the diamond sheet 201 surface, increasing the irradiated detection area of ​​the diamond sheet 201, and improving the duty cycle of the diamond sheet 201 surface, thereby increasing the number of charge carriers generated, further improving the charge carrier collection effect, and ensuring detector sensitivity and responsivity.

[0041] The planes containing the base 206 and the branch 207 are parallel to either the first or second surface. The outer surfaces of the base 206 and the branch 207 may be flush with or lower than the first or second surface. The receiving groove 208 includes a first segment corresponding to the base 206 and a second segment corresponding to the branch 207. The width of the first segment is greater than or equal to the width of the base 206, and the width of the second segment is greater than or equal to the width of the branch 207, so as to facilitate the fitting of the base 206 and the branch 207 into the corresponding receiving groove 208.

[0042] During production, the receiving groove 208 can be obtained by etching the surface of the diamond sheet 201. The diamond etching process includes inductively coupled plasma (ICP) etching, reactive ion etching (RIE), etc. The operating principle and specific process are existing technologies, and this application will not elaborate on them.

[0043] In one embodiment, the distances of the branch 207 of the first positive electrode 202 and the branch 207 of the first negative electrode 203 relative to the first surface are different, and the distances of the branch 207 of the second positive electrode 204 and the branch 207 of the second negative electrode 205 relative to the second surface are different.

[0044] The first electric field formed between the branch 207 of the first positive electrode 202 and the branch 207 of the first negative electrode 203 forms an angle with the first plane, so that the first electric field formed between the branch 207 of the first positive electrode 202 and the branch 207 of the first negative electrode 203 has a larger carrier collection range. Similarly, the first electric field formed between the branch 207 of the second positive electrode 204 and the branch 207 of the second negative electrode 205 forms an angle with the second plane, so that the first electric field formed between the branch 207 of the second positive electrode 204 and the branch 207 of the second negative electrode 205 has a larger carrier collection range. This further increases the distribution range of the electric field in the diamond sheet 201, so as to collect more carriers, further reduce the difficulty of carrier collection, improve the carrier collection effect, and ensure the sensitivity and responsivity of the detector.

[0045] It is worth noting that for metal electrodes that are relatively far from the first or second surface, their thickness is less than the depth of the corresponding receiving groove 208. The metal electrode is placed at the bottom of the corresponding receiving groove 208 so that the surface of the metal electrode is lower than the first or second surface, that is, the distance between the metal electrode and the first or second surface is relatively large. For metal electrodes that are relatively far from the first or second surface, their thickness is equal to the depth of the corresponding receiving groove 208. The metal electrode is placed at the bottom of the corresponding receiving groove 208 so that the surface of the metal electrode is flush with the first or second surface, that is, the distance between the metal electrode and the first or second surface is relatively small.

[0046] In one embodiment, the diamond sheet 201 has a first straight line, which is a line connecting the center of the diamond sheet 201 to its edge. The branch 207 of the first positive electrode 202, the branch 207 of the first negative electrode 203, the branch 207 of the second positive electrode 204 and the branch 207 of the second negative electrode 205 are arranged sequentially along the first straight line.

[0047] In the thickness direction of the diamond, the branches 207 of the first positive electrode 202 are not directly opposite to the branches 207 of the second negative electrode 205, but are staggered. This results in the second electric field formed between them not being perpendicular to the first and second planes, but being set at an acute angle. This allows the second electric field formed by the branches 207 of the first positive electrode 202 and the branches 207 of the second negative electrode 205 to have a larger carrier collection area. Similarly, in the thickness direction of the diamond, the branches 207 of the second positive electrode 204 are not directly opposite to the branches 207 of the first negative electrode 203, but are staggered. This results in the second electric field formed between them not being perpendicular to the first and second planes, but being set at an acute angle. This allows the second electric field formed by the branches 207 of the second positive electrode 204 and the branches 207 of the first negative electrode 203 to have a larger carrier collection area. This further increases the distribution range of the electric field in the diamond sheet 201, allowing for the collection of more carriers, further reducing the difficulty of carrier collection, improving the carrier collection effect, and ensuring the detector sensitivity and responsivity.

[0048] In the thickness direction of the diamond, the branch 207 of the first positive electrode 202 can be completely offset from or have a certain overlap with the branch 207 of the second negative electrode 205. In other words, it is acceptable as long as they are not completely opposite to each other.

[0049] In one embodiment, one end of the branch 207 is connected to one side of the base 206, and the other end extends along an arc-shaped trajectory to the other side of the base 206.

[0050] The branch 207 is set as an arc-shaped structure to reduce the resistance of the branch 207, thereby further reducing the difficulty of directional movement of charge carriers and the difficulty of collection of charge carriers, improving the collection effect of charge carriers, and ensuring the sensitivity and responsiveness of the detector.

[0051] In addition, reducing the resistance of the 207 branch has the following effects: reducing dark current, improving the signal-to-noise ratio, and enhancing the ability to detect weak light signals; it also helps with heat dissipation and temperature control, maintains the long-term stability and reliability of the detector, and extends its service life.

[0052] The base 206 has a straight plate-like structure, while the branch 207 has a strip-like structure, meaning the width of the base 206 is greater than the width of the branch 207. Furthermore, the other end of the branch 207 does not contact the other side of the base 206, but rather maintains a gap; that is, the other end of the branch 207 is a free end.

[0053] In one embodiment, the branch 207 bends back and forth to form a serpentine structure.

[0054] The serpentine structure of branch 207 further increases the distribution range and uniformity of the electric field in the diamond sheet 201, thereby collecting more charge carriers, reducing the difficulty of charge carrier collection, improving the collection effect, and ensuring the detector's sensitivity and responsivity. Simultaneously, the serpentine structure helps reduce the formation of local hot spots and promotes the uniformity of current distribution. Furthermore, in vibration environments, the serpentine structure can more effectively resist deformation or stress, improving the detector's stability and reliability.

[0055] Among them, the branch 207 is bent back and forth to form a convex corner, the direction of which is perpendicular to the trajectory direction of the branch 207, and the convex corner is rounded.

[0056] In one embodiment, the first positive electrode 202, the first negative electrode 203, the second positive electrode 204, and the second negative electrode 205 are each composed of a base 206 and at least two branches 207, and the two branches 207 of the first positive electrode 202, the first negative electrode 203, the second positive electrode 204, or the second negative electrode 205 are nested inside and outside each other.

[0057] The branch 207 is set with at least two branches, which can further increase the distribution range and uniformity of the electric field in the diamond sheet 201, so as to collect more charge carriers, further reduce the difficulty of charge carrier collection, improve the charge carrier collection effect, and ensure the detector sensitivity and responsivity.

[0058] In one embodiment, the branches 207 of the first positive electrode 202 and the branches 207 of the first negative electrode 203 are alternately arranged from the inside to the outside, and the branches 207 of the second positive electrode 204 and the branches 207 of the second negative electrode 205 are alternately arranged from the inside to the outside.

[0059] The branch 207 of the first negative electrode 203 can form a first electric field with the branch 207 of the first positive electrode 202 on both sides, and the branch 207 of the second negative electrode 205 can form a first electric field with the branch 207 of the second positive electrode 204 on both sides, so as to increase the intensity of the electric field in the diamond sheet 201 and improve the collection efficiency of charge carriers.

[0060] In one embodiment, the silicon substrate 103 is provided with a protrusion 209, which is used to hold the branch 207 of the second positive electrode 204 or the branch 207 of the second negative electrode 205 within the receiving groove 208.

[0061] The shape and trajectory of the protrusion 209 can be the same as the branch 207 of the second positive electrode 204 or the branch 207 of the second negative electrode 205, i.e., both are serpentine structures. During production, the pattern of the protrusion 209 is defined by a photolithography process, and then the protrusion 209 is formed on the surface of the silicon substrate 103 by a silicon etching process. After that, the photoresist is removed and the substrate is cleaned. The operating principle and specific process are existing technologies. Then, a photolithography process is used to form the second positive electrode 204 of the corresponding shape at the protrusion 209 of the silicon substrate 103.

[0062] In one embodiment, the base 206 and the branch 207 have the same thickness.

[0063] The working principle of this application is as follows:

[0064] When ultraviolet light irradiates the diamond sheet 201 through the detection port, photon energy is absorbed, and charge carriers are excited and generated in the diamond sheet 201. Then, a bias voltage is applied to generate a first electric field between the first positive electrode 202 and the first negative electrode 203 or between the second positive electrode 204 and the second negative electrode 205, and a second electric field is generated between the first positive electrode 202 and the second negative electrode 205 or between the second positive electrode 204 and the first negative electrode 203. The charge carriers separate and move in a direction under the action of the electric field, thereby forming a photocurrent, which is displayed on the display screen of the detector body 101.

[0065] The first and second electric fields generated within the diamond sheet 201 increase the distribution range and uniformity of the electric field within the diamond sheet 201, reducing the difficulty of directional movement of charge carriers and the difficulty of charge carrier collection. This ensures that all charge carriers in the diamond sheet 201 can be effectively collected, thereby guaranteeing the detector's sensitivity and responsivity to a certain extent. Simultaneously, the base 206 and branch 207, embedded within the receiving groove 208 and flush with or below the first or second surface, do not obstruct the obliquely irradiated ultraviolet light source, avoiding the formation of shadow areas. This reduces the area occupied by the metal electrodes on the surface of the diamond sheet 201, increases the irradiated detection area of ​​the diamond sheet 201, and improves the duty cycle of the diamond sheet 201 surface, thereby increasing the number of charge carriers generated. Furthermore, the staggered arrangement of the four metal electrodes in two directions further increases the distribution range of the electric field within the diamond sheet 201.

[0066] The arc-shaped branch 207 has lower resistance, which further reduces the difficulty of directional movement and collection of charge carriers, improving the collection effect and ensuring detector sensitivity and responsivity. Simultaneously, the serpentine branch 207 further increases the distribution range and uniformity of the electric field in the diamond sheet 201, collecting more charge carriers and further reducing the collection difficulty, thus improving the collection effect and ensuring detector sensitivity and responsivity. The serpentine structure also helps reduce the formation of local hot spots and promotes uniform current distribution. Furthermore, in vibration environments, the serpentine structure can more effectively resist deformation or stress, improving the stability and reliability of the detector.

[0067] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0068] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the appended claims.

Claims

1. An ultraviolet diamond detector for complex environments, characterized in that, The device includes a detector body and a detector head that are connected to each other. The detector head has a detector port and a diamond sheet inside the detector head. The diamond sheet has a first surface and a second surface that are opposite to each other. The first surface is close to the detector port and the second surface is far away from the detector port. The first surface has a first positive electrode and a first negative electrode, and the second surface has a second positive electrode and a second negative electrode. A silicon substrate is attached to the first surface. When ultraviolet light irradiates the diamond sheet through the detection port, charge carriers are generated inside the diamond sheet. A bias voltage is applied to generate a first electric field between the first positive electrode and the first negative electrode or between the second positive electrode and the second negative electrode, and a second electric field between the first positive electrode and the second negative electrode or between the second positive electrode and the first negative electrode. The first electric field and the second electric field cause the charge carriers to separate and move in a directional manner.

2. The ultraviolet diamond detector for complex environments according to claim 1, characterized in that, The first positive electrode, the first negative electrode, the second positive electrode, and the second negative electrode are all composed of a base and a branch. The base is located at the edge of the first surface or the second surface and extends inward and outward. One end of the branch is connected to the base, and the other end is distributed on the first surface or the second surface. The first surface and the second surface are provided with receiving grooves, and the base and the branch are disposed in the receiving grooves.

3. The ultraviolet diamond detector for complex environments according to claim 2, characterized in that, The distances between the branches of the first positive electrode and the branches of the first negative electrode relative to the first surface are different, and the distances between the branches of the second positive electrode and the branches of the second negative electrode relative to the second surface are different.

4. The ultraviolet diamond detector for complex environments according to claim 2, characterized in that, The diamond sheet has a first straight line, which is a line connecting the center of the diamond sheet to its edge. The branches of the first positive electrode, the first negative electrode, the second positive electrode, and the second negative electrode are arranged sequentially along the first straight line.

5. The ultraviolet diamond detector for complex environments according to claim 2, characterized in that, One end of the branch connects to one side of the base, and the other end extends along an arc-shaped trajectory to the other side of the base.

6. The ultraviolet diamond detector for complex environments according to claim 5, characterized in that, The branches bend back and forth to form a serpentine structure.

7. The ultraviolet diamond detector for complex environments according to claim 5, characterized in that, The first positive electrode, the first negative electrode, the second positive electrode, and the second negative electrode each consist of a base and at least two branches, with the two branches of the first positive electrode, the first negative electrode, the second positive electrode, or the second negative electrode nested inside and outside each other.

8. The ultraviolet diamond detector for complex environments according to claim 7, characterized in that, The branches of the first positive electrode and the first negative electrode are arranged alternately from the inside to the outside, and the branches of the second positive electrode and the second negative electrode are arranged alternately from the inside to the outside.

9. The ultraviolet diamond detector for complex environments according to claim 2, characterized in that, The silicon substrate has protrusions that are used to hold the branch of the second positive electrode or the branch of the second negative electrode within the receiving groove.

10. The ultraviolet diamond detector for complex environments according to claim 2, characterized in that, The thickness of the base is equal to that of the branch.

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