Workpiece clamping device

Abstract

The invention provides a workpiece clamping device which enables clamping of a workpiece with high reliability or clamping of a workpiece with high efficiency even if a workpiece with a three-dimensional shape is included. A workpiece clamping device for clamping a workpiece is provided with: a frame-shaped support part; a flexible and air-tight hollow bag-shaped body which is attached to one surface of the frame-shaped support part and accommodates therein a substance the state of which changes due to the transition of the clogging; an electrostatic adsorption member which is disposed on a contact surface with the workpiece in the hollow bag-shaped body and which electrostatically adsorbs the workpiece; and a shape retaining member that reforms and retains the shape of the hollow bag-shaped body by imitating the shape of a workpiece, the frame-shaped support part and the hollow bag-shaped body each having at least a non-contact region in which the frame-shaped support part and the hollow bag-shaped body do not contact each other. The hollow bag-shaped body is mounted on one surface of the frame-shaped support part, and when in use, the workpiece is pressed against the contact surface of the hollow bag-shaped body with the workpiece to be clamped and adsorbed by using the holding of the shape due to the transfer of the plug and the electrostatic adsorption.

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