Recycling and filtering device for silicon single crystal rod cutting fluid

Abstract

The invention discloses a silicon single crystal rod cutting fluid recycling and filtering device, which relates to the technical field of silicon rod cutting and comprises a first precipitation tank, a second precipitation tank and two groups of filtering components. The upper sides of the two precipitation tanks are connected with the input end of the second filter assembly, the lower sides are connected with the input end of the first filter assembly through a second communicating pipe, and the front ends are connected with a cutting machine cutting fluid outlet through a first communicating pipe; the output end of the second filtering assembly is connected with a cutting machine liquid inlet through a fourth communicating pipe. The output end of the first filtering assembly is connected with the first communicating pipe through a third communicating pipe. The device adopts two groups of precipitation tanks for alternate use, used cutting fluid is precipitated, and it is ensured that the upper-layer cutting fluid is relatively clean. Through cooperation of the precipitation tank and the filtering assembly, the content of silicon powder in the recycled cutting fluid is reduced to the maximum extent, the cooling and lubricating effect and the cutting quality of the cutting fluid are guaranteed, shutdown is not needed when precipitated silicon powder is cleaned through alternate switching, and production continuity is maintained.

Description

Technical Field

[0001] This invention relates to the field of silicon rod cutting technology, specifically to a single-crystal silicon rod cutting fluid recovery and filtration device. Background Technology

[0002] Cutting fluid is a crucial component in the single-crystal silicon rod cutting process, playing a key role. It provides lubrication, cooling, and other functions, contributing to improved wafer quality and production efficiency. During the cutting process, silicon powder generated from the single-crystal silicon rods mixes with the cutting fluid. As cutting time accumulates, the amount of silicon powder increases, raising its density within the fluid. This affects the fluid's cooling and lubrication functions, often resulting in wire breakage or skipping, and in severe cases, impacting cutting quality and reducing efficiency. Therefore, removing the silicon powder from the cutting fluid is essential for reuse and ensuring consistent cutting quality. Summary of the Invention

[0003] This invention provides a single-crystal silicon rod cutting fluid recovery and filtration device to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, the present invention provides the following technical solution: A single-crystal silicon rod cutting fluid recovery and filtration device includes a first sedimentation tank and a second sedimentation tank. The upper sides of the first sedimentation tank and the second sedimentation tank are both connected to the input end of a second filter assembly. The lower sides of the first sedimentation tank and the second sedimentation tank are connected to the input end of the first filter assembly through a second connecting pipe. The front ends of the first sedimentation tank and the second sedimentation tank are connected to the cutting fluid outlet of a cutting machine through a first connecting pipe. The output end of the second filter assembly is connected to the cutting fluid inlet of the cutting machine through a fourth connecting pipe. The output end of the first filter assembly is connected to the first connecting pipe through a third connecting pipe.

[0005] Preferably, the ports of the first connecting pipe that connect to the first sedimentation tank and the second sedimentation tank are respectively provided with first connecting valves; The ports of the second connecting pipe that connect to the first sedimentation tank and the second sedimentation tank are respectively equipped with second connecting valves.

[0006] Preferably, the first filter assembly includes a first housing, on which a first filter inlet and a first filter outlet are provided, the first filter inlet being connected to a second connecting pipe, and the first filter outlet being connected to a third connecting pipe; The first housing is provided with a first filter plate, which is cylindrical and has a filter screen on its side wall. The opening of the first filter plate is connected to a first filter inlet.

[0007] Preferably, the first filter outlet is provided with a first impeller, which is rotatably connected to the first housing. One end of the first impeller is fixedly connected to a first pulley, which is connected to a second pulley via a first transmission belt. The second pulley is fixedly connected to a first transmission rod, which is rotatably connected to the first housing. A worm gear is provided on the first transmission rod, meshing with a worm wheel. The worm wheel is fixedly connected to a second transmission rod, which is rotatably connected to the first housing. A gear is provided on the second transmission rod, located inside the first housing, meshing with an internal gear. The internal gear is fixedly connected to a first filter screen plate, which is rotatably connected to the first housing.

[0008] Preferably, a third pulley is provided on the second transmission rod, the third pulley is connected to a fourth pulley through a second transmission belt, the fourth pulley is fixedly connected to the third transmission rod, the third transmission rod is rotatably connected to the sewage discharge sleeve, the sewage discharge sleeve is fixedly inserted into the first housing, and the portion of the sewage discharge sleeve located inside the first housing is inserted into the first filter screen plate, and the first filter screen plate is rotatably connected to the sewage discharge sleeve; The third transmission rod is fixedly connected to a spiral sewage discharge component at the part located in the sewage discharge sleeve. The portion of the sewage sleeve located inside the first filter screen is provided with a sewage collection port, and a first scraper is fixedly connected to the sewage collection port. The first scraper is slidably connected to the inner wall of the first filter screen. The portion of the drain sleeve located outside the first housing is provided with a drain outlet, and a collection trough is provided below the drain outlet. The collection trough is detachably connected to the first housing.

[0009] Preferably, the sewage collection port faces upwards; The sewage outlet faces downwards.

[0010] Preferably, the second filter assembly includes a second housing, with a second filter inlet and a second filter outlet respectively provided at both ends of the second housing. The second filter inlet is connected to a sedimentation tank, and the second filter outlet is connected to a fourth connecting pipe. A second filter screen is provided inside the second housing.

[0011] Preferably, a fixing frame is fixedly connected inside the second housing, a drive shaft is rotatably connected to the fixing frame, a second impeller is fixedly connected to the drive shaft, and the second impeller is located at the second filter outlet; A flow divider block is fixedly connected to the drive shaft, and a second scraper is provided on the flow divider block, which can contact the second filter screen.

[0012] Preferably, the second filter screen is frustum-shaped, and a sliding sleeve is fixedly connected to the edge of the second filter screen, the sliding sleeve being slidably connected to the inner wall of the second housing.

[0013] Preferably, a linkage plate is fixedly connected to the top of the second filter screen, and the linkage plate is slidably connected to the drive shaft; A fixing sleeve is fixedly connected to the drive shaft; The fixed sleeve is provided with an inclined limiting slip ring; A follower slide rod is fixedly connected to the linkage plate. The follower slide rod is slidably connected to the fixed frame. Two sets of limiting rollers are rotatably connected to the follower slide rod. The inclined limiting slip ring is slidably connected between the two sets of limiting rollers.

[0014] Compared with the prior art, the present invention has at least the following beneficial effects: This application sets up two sets of sedimentation tanks, which are used alternately. The cutting fluid after cutting is settled through the first sedimentation tank and the second sedimentation tank to ensure that the cutting fluid in the upper layer of the sedimentation tank is in a relatively clean state. By using two sets of sedimentation tanks and two sets of filter components in combination, the silicon powder content in the reused cutting fluid can be reduced to the greatest extent possible, ensuring the cooling and lubrication effect of the cutting fluid and guaranteeing the cutting quality. Furthermore, the two sets of sedimentation tanks can be used alternately, so that the cutting fluid can be cleaned of the settled silicon powder without stopping the machine, ensuring production continuity. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the main structure of the present invention; Figure 2 This is a schematic diagram of the inlet side structure of the first filter component of the present invention; Figure 3 This is a schematic diagram of the outlet side structure of the first filter assembly of the present invention; Figure 4 This is a schematic diagram of the internal structure of the first filter component of the present invention; Figure 5 This is a schematic diagram of the sewage discharge structure of the first filter screen of the present invention; Figure 6 This is a schematic diagram of the first filter screen driving structure of the present invention; Figure 7 This is a schematic diagram of the inlet side structure of the second filter assembly of the present invention; Figure 8 This is a schematic diagram of the outlet side structure of the second filter assembly of the present invention; Figure 9 This is a partial structural diagram of the second filter component of the present invention.

[0016] In the diagram: 1. Cutting machine; 2. First sedimentation tank; 3. Second sedimentation tank; 4. First connecting pipe; 5. First connecting valve; 6. Second connecting pipe; 7. Second connecting valve; 8. First filter assembly; 9. Third connecting pipe; 10. Second filter assembly; 11. Fourth connecting pipe; 12. First housing; 13. First filter inlet; 14. First pulley; 15. First transmission belt; 16. Second pulley; 17. First filter screen; 18. First impeller; 19. First transmission rod; 20. Worm gear; 21. Worm wheel; 22. Third pulley; 23. Sewage discharge sleeve; 24. Second... 25. Transmission belt; 26. Fourth pulley; 27. Collection trough; 28. Second transmission rod; 29. ​​Spiral sewage discharge component; 30. Sewage outlet; 31. First scraper; 32. Sewage collection outlet; 33. Gear; 34. Internal gear; 35. Second filter inlet; 36. Diverter block; 37. Second scraper; 38. Sliding sleeve; 39. Second filter screen; 40. Fixing frame; 41. Transmission shaft; 42. Second impeller; 43. Second filter outlet; 44. Fixing sleeve; 45. Follower slide rod; 46. Linkage plate; 47. Inclined limiting slip ring; 48. Limiting roller. Detailed Implementation

[0017] In this invention, the terms "first," "second," etc., are used for descriptive purposes only and do not specifically refer to any order or sequence, nor are they intended to limit the invention. They are merely used to distinguish protective components or operations described using the same technical terms, and should not be construed as indicating or implying their relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Furthermore, the technical solutions and features of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this invention.

[0018] Example 1: Please refer to Figure 1 , Figure 2 A single-crystal silicon rod cutting fluid recovery and filtration device includes a first sedimentation tank 2 and a second sedimentation tank 3. The upper sides of the first sedimentation tank 2 and the second sedimentation tank 3 are both connected to the input end of a second filter assembly 10. The lower sides of the first sedimentation tank 2 and the second sedimentation tank 3 are connected to the input end of a first filter assembly 8 through a second connecting pipe 6. The front ends of the first sedimentation tank 2 and the second sedimentation tank 3 are connected to the cutting fluid outlet of a cutting machine 1 through a first connecting pipe 4. The output end of the second filter assembly 10 is connected to the cutting fluid inlet of the cutting machine 1 through a fourth connecting pipe 11. The output end of the first filter assembly 8 is connected to the first connecting pipe 4 through a third connecting pipe 9.

[0019] The first connecting pipe 4 is equipped with a first connecting valve 5 at the port connecting the first sedimentation tank 2 and the second sedimentation tank 3 respectively; The ports of the second connecting pipe 6 that connect to the first sedimentation tank 2 and the second sedimentation tank 3 are respectively equipped with second connecting valves 7.

[0020] The working principle and beneficial effects of the above scheme are as follows: This application sets up two sets of sedimentation tanks, which are used alternately. The cutting fluid after cutting is settled through the first sedimentation tank 2 and the second sedimentation tank 3 to ensure that the cutting fluid in the upper layer of the sedimentation tank is in a relatively clean state. When the first sedimentation tank 2 is used to collect and precipitate the cutting fluid after cutting, the first connecting pipe 4 is opened to connect the first connecting valve 5 at the first sedimentation tank 2, allowing the waste liquid generated by the cutting machine 1 to enter the first sedimentation tank 2. The second connecting pipe 6 is opened to connect the second connecting valve 7 at the first sedimentation tank 2, allowing the silicon powder in the cutting fluid in the first sedimentation tank 2 to enter the first filter assembly 8 for filtration and discharge. The filtered cutting fluid is then discharged back into the first sedimentation tank 2 for sedimentation. The second connecting pipe 6 is connected to the second connecting valve 7 at the second sedimentation tank 3, and the first connecting pipe 4 is connected to the first connecting valve 5 at the second sedimentation tank 3, both of which are in the closed state. The second filter assembly 10 on the upper side of the second sedimentation tank 3 discharges the precipitated and filtered cutting fluid into the cutting machine 1 for reuse. When the cutting fluid level in the second sedimentation tank 3 is lower than the input end of the second filter assembly 10, the first sedimentation tank 2 is used to replenish the cutting machine 1. When the second sedimentation tank 3 is used to collect and precipitate the cutting fluid after cutting, the first connecting pipe 4 is opened to connect the first connecting valve 5 at the second sedimentation tank 3, allowing the waste liquid generated by the cutting machine 1 to enter the second sedimentation tank 3. The second connecting pipe 6 is opened to connect the second connecting valve 7 at the second sedimentation tank 3, allowing the silicon powder in the cutting fluid in the second sedimentation tank 3 to enter the first filter assembly 8 for filtration and discharge. The filtered cutting fluid is then discharged back into the second sedimentation tank 3 for sedimentation. The second connecting pipe 6 is connected to the second connecting valve 7 at the first sedimentation tank 2, and the first connecting pipe 4 is connected to the first connecting valve 5 at the first sedimentation tank 2, both of which are in the closed state. The second filter assembly 10 on the upper side of the first sedimentation tank 2 discharges the precipitated and filtered cutting fluid into the cutting machine 1 for reuse. When the cutting fluid level in the first sedimentation tank 2 is lower than the input end of the second filter assembly 10, the second sedimentation tank 3 is used to replenish the cutting machine 1. By using two sets of sedimentation tanks and two sets of filter components in combination, the silicon powder content in the reused cutting fluid can be reduced to the greatest extent possible, ensuring the cooling and lubrication effect of the cutting fluid and guaranteeing the cutting quality. Furthermore, the two sets of sedimentation tanks can be used alternately, so that the cutting fluid can be cleaned of the settled silicon powder without stopping the machine, ensuring production continuity.

[0021] Example 2: Please refer to Figures 2-6Based on Embodiment 1, the first filter assembly 8 includes a first housing 12, on which a first filter inlet 13 and a first filter outlet are provided. The first filter inlet 13 is connected to the second connecting pipe 6, and the first filter outlet is connected to the third connecting pipe 9. The first housing 12 is provided with a first filter plate 17, which is cylindrical and has a filter screen on its side wall. The opening of the first filter plate 17 is connected to the first filter inlet 13.

[0022] The first filter outlet is provided with a first impeller 18, which is rotatably connected to the first housing 12. One end of the first impeller 18 is fixedly connected to a first pulley 14. The first pulley 14 is connected to a second pulley 16 via a first transmission belt 15. The second pulley 16 is fixedly connected to a first transmission rod 19, which is rotatably connected to the first housing 12. A worm gear 20 is provided on the first transmission rod 19, which meshes with a worm wheel 21. The worm wheel 21 is fixedly connected to a second transmission rod 27, which is rotatably connected to the first housing 12. A gear 32 is provided on the second transmission rod 27, which is located inside the first housing 12. The gear 32 meshes with an internal gear 33, which is fixedly connected to a first filter screen 17, which is rotatably connected to the first housing 12.

[0023] The second transmission rod 27 is provided with a third pulley 22, which is connected to a fourth pulley 25 via a second transmission belt 24. The fourth pulley 25 is fixedly connected to the third transmission rod, which is rotatably connected to the sewage sleeve 23. The sewage sleeve 23 is fixedly inserted into the first housing 12, and the portion of the sewage sleeve 23 located inside the first housing 12 is inserted into the first filter screen 17. The first filter screen 17 is rotatably connected to the sewage sleeve 23. The third transmission rod is fixedly connected to the spiral sewage discharge component 28 at the part located in the sewage discharge sleeve 23; The portion of the drain sleeve 23 located inside the first filter screen 17 is provided with a sludge collection port 31. A first scraper 30 is fixedly connected to the sludge collection port 31, and the first scraper 30 is slidably connected to the inner wall of the first filter screen 17. The portion of the drain sleeve 23 located outside the first housing 12 is provided with a drain outlet 29, and a collection trough 26 is provided below the drain outlet 29. The collection trough 26 is detachably connected to the first housing 12.

[0024] The sewage collection port 31 faces upwards; The drain outlet 29 faces downwards.

[0025] The working principle and beneficial effects of the above scheme are as follows: When the cutting fluid in the lower layer of the sedimentation tank is filtered by the first filter assembly 8, the cutting fluid enters the first filter screen 17 through the first filter inlet 13, is filtered by the first filter screen 17, and is discharged from the first filter outlet. When the cutting fluid flows through the first filter outlet, it will drive the first impeller 18 to rotate. The first drive rod 19 will rotate through the first pulley 14, the first transmission belt 15, and the second pulley 16. The rotation direction will be changed through the worm 20 and the worm wheel 21, and the second drive rod 27 will rotate. The gear 32 and the internal gear 33 will drive the first filter screen 17 to rotate, so that the first scraper 30 in the first filter screen 17 scrapes the inner wall of the first filter screen 17 and scrapes the filtered material on the inner wall of the first filter screen 17 into the drain sleeve 23. The second transmission rod 27 drives the spiral sewage discharge component 28 to rotate through the third pulley 22, the second transmission belt 24, and the fourth pulley 25, which carries the filter material falling into the sewage discharge sleeve 23 to the sewage discharge port 29. The filter material falls into the collection tank 26 under the action of gravity, completing the filtration of the lower layer of the cutting fluid. The filtered cutting fluid enters the sedimentation tank again through the first filter outlet and the third connecting pipe 9 for multiple filtrations. Since the lower layer of the cutting fluid contains a large amount of silicon powder, the silicon powder is discharged through the first filter component 8, which is highly efficient.

[0026] Example 3: Please refer to Figures 7-9 Based on Embodiment 1, the second filter assembly 10 includes a second housing 34, with a second filter inlet 35 and a second filter outlet 43 respectively provided at both ends of the second housing 34. The second filter inlet 35 is connected to the sedimentation tank, and the second filter outlet 43 is connected to the fourth connecting pipe 11. A second filter screen 39 is provided inside the second housing 34.

[0027] A fixing frame 40 is fixedly connected inside the second housing 34. A drive shaft 41 is rotatably connected to the fixing frame 40. A second impeller 42 is fixedly connected to the drive shaft 41. The second impeller 42 is located at the second filter outlet 43. A diverter block 36 is fixedly connected to the drive shaft 41, and a second scraper 37 is provided on the diverter block 36. The second scraper 37 can contact the second filter screen 39.

[0028] The second filter plate 39 is frustum shaped, and a sliding sleeve 38 is fixedly connected to the edge of the second filter plate 39. The sliding sleeve 38 is slidably connected to the inner wall of the second housing 34.

[0029] The top of the second filter screen 39 is fixedly connected to a linkage plate 46, which is slidably connected to the drive shaft 41; A fixing sleeve 44 is fixedly connected to the drive shaft 41; An inclined limiting slip ring 47 is provided on the fixed sleeve 44; A follower slide rod 45 is fixedly connected to the linkage plate 46. The follower slide rod 45 is slidably connected to the fixed frame 40. Two sets of limiting rollers 48 are rotatably connected to the follower slide rod 45. The inclined limiting slip ring 47 is slidably connected between the two sets of limiting rollers 48.

[0030] The working principle and beneficial effects of the above scheme are as follows: The upper layer of the sedimentation tank is filtered by the second filter component 10. Since the silicon powder content in the cutting fluid in the upper layer of the sedimentation tank is low, no filter discharge component is set up. When the second filter assembly 10 filters the upper layer of the sedimentation tank, the upper layer of cutting fluid enters the second housing 34, is filtered by the second filter screen 39, and is discharged from the second filter outlet 43, and enters the cutting machine 1 for reuse. When the cutting fluid flows through the second filter outlet 43, it drives the second impeller 42 to rotate, which in turn drives the diverter block 36 to rotate via the drive shaft 41. The second scraper 37 on the diverter block 36 rotates accordingly, and the fixed sleeve 44 on the drive shaft 41 also rotates. Due to the restriction of the inclined limiting slip ring 47 and the limiting roller 48, the follower slide rod 45 slides, which in turn drives the second filter screen plate 39 to slide via the linkage plate 46. The sliding of the second filter screen plate 39 makes the contact surface between the second scraper 37 and the second filter screen plate 39 uncertain and changing. Due to the rotation of the second scraper 37, it can be ensured that the second scraper 37 can completely scrape the second filter screen plate 39 within a certain period of time. The sliding of the second filter screen plate 39 makes the impact force of the cutting fluid on the second filter screen plate 39 change. Under the scraping of the second scraper 37, the constantly changing impact can make the second filter screen plate 39 cleaner.

[0031] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A single crystal silicon rod cutting fluid recovery filtering device, characterized in that, It comprises a first sedimentation tank (2) and a second sedimentation tank (3), the upper sides of the first sedimentation tank (2) and the second sedimentation tank (3) are connected to the input end of a second filtering assembly (10), the lower sides of the first sedimentation tank (2) and the second sedimentation tank (3) are connected to the input end of a first filtering assembly (8) through a second communication pipe (6), the front ends of the first sedimentation tank (2) and the second sedimentation tank (3) are connected to the cutting fluid discharge port of a cutting machine (1) through a first communication pipe (4), the output end of the second filtering assembly (10) is connected to the cutting fluid inlet of the cutting machine (1) through a fourth communication pipe (11), and the output end of the first filtering assembly (8) is connected to the first communication pipe (4) through a third communication pipe (9).

2. The single crystal silicon rod cutting fluid recovery filtering device according to claim 1, characterized in that, The ports of the first communication pipe (4) connected to the first sedimentation tank (2) and the second sedimentation tank (3) are respectively provided with first communication valves (5); The ports of the second communication pipe (6) connected to the first sedimentation tank (2) and the second sedimentation tank (3) are respectively provided with second communication valves (7).

3. The single crystal silicon rod cutting fluid recovery filtering device according to claim 1, characterized in that, The first filtering assembly (8) comprises a first shell (12), the first shell (12) is provided with a first filtering inlet (13) and a first filtering outlet, the first filtering inlet (13) is communicated with the second communication pipe (6), and the first filtering outlet is communicated with the third communication pipe (9); A first filter screen plate (17) is arranged in the first shell (12), the first filter screen plate (17) is in a cylindrical shape, a filter screen is arranged on the side wall of the first filter screen plate (17), and the first filter screen plate (17) is connected to the first filtering inlet (13) at an opening.

4. The single crystal silicon rod cutting fluid recovery filtering device according to claim 3, characterized in that, The first filtering outlet is provided with a first impeller (18), the first impeller (18) is rotationally connected to the first shell (12), one end of the first impeller (18) is fixedly connected with a first pulley (14), the first pulley (14) is connected with a second pulley (16) through a first transmission belt (15), the second pulley (16) is fixedly connected to a first transmission rod (19), the first transmission rod (19) is rotationally connected to the first shell (12), a worm (20) is arranged on the first transmission rod (19), the worm (20) is meshed with a worm wheel (21), the worm wheel (21) is fixedly connected to a second transmission rod (27), the second transmission rod (27) is rotationally connected to the first shell (12), a gear (32) is arranged on the second transmission rod (27), the gear (32) is located in the first shell (12), the gear (32) is meshed with an internal gear (33), the internal gear (33) is fixedly connected to the first filter screen plate (17), and the first filter screen plate (17) is rotationally connected to the first shell (12).

5. The single crystal silicon rod cutting fluid recovery filtering device according to claim 4, characterized in that, The second transmission rod (27) is provided with a third belt wheel (22), the third belt wheel (22) is connected with a fourth belt wheel (25) through a second transmission belt (24), the fourth belt wheel (25) is fixedly connected to a third transmission rod, the third transmission rod is rotatably connected to a blowdown sleeve (23), the blowdown sleeve (23) is fixedly inserted into the first shell (12), and the part of the blowdown sleeve (23) in the first shell (12) is inserted into a first filter screen plate (17), and the first filter screen plate (17) is rotatably connected to the blowdown sleeve (23); The part of the third transmission rod in the blowdown sleeve (23) is fixedly connected with a spiral blowdown piece (28); The part of the blowdown sleeve (23) in the first filter screen plate (17) is provided with a blowdown collecting port (31), the blowdown collecting port (31) is fixedly connected with a first blowdown scraping plate (30), and the first blowdown scraping plate (30) is slidably connected with the inner wall of the first filter screen plate (17); The part of the blowdown sleeve (23) outside the first shell (12) is provided with a blowdown port (29), and a collecting groove (26) is arranged below the blowdown port (29), and the collecting groove (26) is detachably connected with the first shell (12). 6.The single crystal silicon rod cutting fluid recovery filtering device according to claim 5, characterized in that, the blowdown collecting port (31) is upwardly open; the blowdown port (29) is downwardly open. 7.The single crystal silicon rod cutting fluid recovery filtering device according to claim 1, characterized in that, the second filter assembly (10) comprises a second shell (34), the second shell (34) is provided with a second filter inlet (35) and a second filter outlet (43) at two ends respectively, the second filter inlet (35) is connected to the sedimentation tank, the second filter outlet (43) is connected to the fourth communication pipe (11), and the second shell (34) is provided with a second filter screen plate (39) therein. 8.The single crystal silicon rod cutting fluid recovery filtering device according to claim 7, characterized in that, the second shell (34) is fixedly connected with a fixing frame (40) therein, the fixing frame (40) is rotatably connected with a transmission shaft (41) thereon, the transmission shaft (41) is fixedly connected with a second impeller (42) thereon, and the second impeller (42) is located at the second filter outlet (43); the transmission shaft (41) is fixedly connected with a flow dividing block (36), the flow dividing block (36) is provided with a second blowdown scraping plate (37), and the second blowdown scraping plate (37) can be in contact with the second filter screen plate (39). 9.The single crystal silicon rod cutting fluid recovery filtering device according to claim 8, characterized in that, the second filter screen plate (39) is in the shape of a circular truncated cone, the second filter screen plate (39) is fixedly connected with a sliding sleeve (38) at the edge thereof, and the sliding sleeve (38) is slidably connected to the inner wall of the second shell (34). 10.The single crystal silicon rod cutting fluid recovery filtering device according to claim 9, characterized in that, the second filter screen plate (39) is fixedly connected with a linkage plate (46) at the top end thereof, and the linkage plate (46) is slidably connected to the transmission shaft (41); the transmission shaft (41) is fixedly connected with a fixing sleeve (44); the fixing sleeve (44) is provided with an obliquely arranged limiting sliding ring (47). The linkage plate (46) is fixedly connected with a follow-up slide rod (45), the follow-up slide rod (45) is slidably connected to the fixed frame (40), and the follow-up slide rod (45) is rotatably connected with two groups of limiting rollers (48); the obliquely arranged limiting slide ring (47) is slidably connected between the two groups of limiting rollers (48).

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