Vacuum evaporation and sample encapsulation system

Abstract

The present application provides a kind of vacuum evaporation and sample packaging system, it is related to the technical field of vacuum coating, vacuum evaporation and sample packaging system includes: sample packaging mechanism, first cavity is formed in sample packaging mechanism, first cavity is suitable for accommodating sample box, sample box is suitable for containing sample disc, and is configured to be encapsulated in first cavity under vacuum state to sample disc;Transition part, one end of transition part is communicated with first cavity;Evaporation mechanism, second cavity is formed in evaporation mechanism, second cavity is communicated with the other end of transition part, is configured to evaporate sample disc, and after sample disc completes evaporation, is isolated by transition part with first cavity;Transmission assembly is suitable for carrying sample disc and transports sample disc between first cavity and second cavity, can realize the efficient transfer of sample disc between two cavities, avoid frequent vacuum breaking, and reduce the oxidation pollution in the transfer process of sample disc from first cavity to outside.

Description

Technical Field

[0001] This invention relates to the technical field of vacuum coating, and more specifically, to a vacuum evaporation and sample packaging system. Background Technology

[0002] Thin film evaporation, as a traditional vapor deposition method, is widely used in scientific research and industrial production due to its advantages such as simple film formation, high film purity, good density, and high material utilization. Traditional vacuum evaporation apparatuses generally adopt a single-cavity structure, and evaporation and sample encapsulation need to be completed in different vacuum environments.

[0003] Currently, existing vapor deposition instruments have the following drawbacks in sample transport and transfer, and heating uniformity: Firstly, sample vapor deposition is completed in a single chamber, while sample encapsulation is completed in another single chamber. Frequent vacuum breaking is required for both vapor deposition and encapsulation, leading to frequent interruptions of the vapor deposition instrument, increasing time and labor costs, and easily introducing environmental pollutants. Secondly, during the transfer of nanomaterials prepared by vapor deposition from a vacuum environment to the atmosphere, oxidation, gas adsorption, and aggregation occur, potentially causing air oxidation contamination of the sample during transfer. Furthermore, uneven heating during the heating process leads to inconsistent thickness and properties of the vapor-deposited film. Summary of the Invention

[0004] To address at least one of the technical problems in the prior art, embodiments of the present invention provide a vacuum evaporation and sample packaging system that enables efficient transfer of the sample disk between two cavities, avoids frequent vacuum breaks, and reduces oxidation contamination during the transfer of the sample disk from the first cavity to the outside.

[0005] This invention provides a vacuum evaporation and sample packaging system, comprising: a sample packaging mechanism having a first cavity formed therein, the first cavity being suitable for accommodating a sample box, the sample box being suitable for holding a sample tray, and configured to package the sample tray under vacuum conditions within the first cavity; a transition portion having one end connected to the first cavity; an evaporation mechanism having a second cavity formed therein, the second cavity being connected to the other end of the transition portion, configured to evaporate the sample tray, and after the sample tray has been evaporated, to be isolated from the first cavity through the transition portion; and a transport assembly suitable for carrying the sample tray and transporting the sample tray between the first cavity and the second cavity.

[0006] Optionally, the vapor deposition mechanism includes: a first driving assembly inserted into the second cavity from the top of the second cavity; a sample holder disposed in the second cavity and connected to the first driving assembly, configured to receive the sample tray transported by the transmission assembly, and drive the sample tray to move along the axial direction of the first driving assembly or rotate around the axial direction of the first driving assembly under the drive of the first driving assembly; and a vapor deposition assembly disposed in the second cavity and located below the sample holder, suitable for vapor deposition on the sample tray located on the sample holder.

[0007] Optionally, the first driving assembly includes: a housing having a first limiting hole; a first driving rod slidingly engaged with the housing, one end of which is connected to the sample holder, the first driving rod having a second limiting hole and a third limiting hole spaced apart along its axial direction, the sample holder being moved along its axial direction by an external force, such that the second or third limiting hole aligns with the first limiting hole, and the first driving rod is fixed to the housing by a limiting member; a transmission part having one end sleeved on the outside of the housing; and a driving part having its output end connected to the other end of the transmission part, configured to drive the sample holder to rotate around the axial direction of the first driving rod when the first driving rod is fixed inside the housing.

[0008] Optionally, when the sample holder moves axially along the first drive rod to the first position, the second limiting hole aligns with the first limiting hole to allow the first limiting member to pass through and fix the first drive rod to the housing, so that the sample holder can receive the sample tray transported by the transfer assembly. The first position is at the same height as the height at which the transfer assembly transports the sample tray. When the sample holder moves axially along the first drive rod to the second position, the third limiting hole aligns with the first limiting hole to allow the second limiting member to pass through and fix the first drive rod to the housing, so that the transfer assembly is disengaged from the handle of the sample tray. The second position is higher than the first position.

[0009] Optionally, the vapor deposition mechanism further includes a molecular pump installed at the bottom of the second cavity, the inlet of the molecular pump being connected to the second cavity, and configured to establish a vacuum in the second cavity and in the first cavity through the transition section.

[0010] Optionally, the transition portion includes: a valve block body, on both sides of which a first through hole and a second through hole are respectively provided, the first through hole communicating with the first cavity and the second through hole communicating with the second cavity; an electromagnetic coil configured to be energized to generate a magnetic field; a valve core disposed between the first through hole and the second through hole of the valve block body, one end of the valve core being connected to the electromagnetic coil and configured to move under the drive of the magnetic field, thereby communicating the first through hole and the second through hole; and an elastic element connected to the other end of the valve core and configured to drive the valve core to move when the electromagnetic coil is de-energized, thereby isolating the first through hole and the second through hole.

[0011] Optionally, the above-mentioned vapor deposition assembly includes: a vapor deposition stage, disposed above the air inlet of the molecular pump, configured to heat the sample plate by an external heating device and perform vapor deposition; and multiple first shielding plates, spaced apart and parallel to each other between the air inlet of the molecular pump and the vapor deposition stage, so as to block the heat radiation generated by the vapor deposition stage from entering the molecular pump during the vapor deposition process of the sample plate.

[0012] Optionally, the vapor deposition assembly further includes: a support frame installed at the bottom of the second cavity; two second drive rods inserted into the second cavity from the outside and rotatably mounted on the support frame; and two baffles, one end of each baffle being connected to the two second drive rods, the two baffles rotating about the axial direction of the two second drive rods under their drive, and the other ends of each baffle away from the two second drive rods having a closed state that is close to each other and an open state that is far away from each other.

[0013] Optionally, the aforementioned transmission assembly includes: two sliding rods that slide in cooperation with the first cavity and the second cavity; a limiting plate installed between the two sliding rods to abut against the sample holder when the sample tray is transported to the sample holder, thereby preventing the two sliding rods from sliding on the inner walls of the first cavity and the second cavity; and a support portion that protrudes from the limiting plate along the direction in which the sample tray is transported by the transmission assembly, and carries the sample tray through the handle of the sample tray.

[0014] Optionally, the sample packaging mechanism includes a third drive rod, which is inserted into the first cavity from the top and connected to the top cover of the sample box. The top cover of the sample box moves along the axial direction of the third drive rod under the drive of the third drive rod to cooperate with the chassis of the sample box.

[0015] According to an embodiment of the present invention, a vacuum evaporation and sample packaging system includes a first cavity formed within a sample packaging mechanism. The first cavity is suitable for accommodating a sample box, which is suitable for holding a sample tray. The sample box is configured to encapsulate the sample tray under vacuum within the first cavity. One end of a transition section is connected to the first cavity. A second cavity is formed within the evaporation mechanism and is connected to the other end of the transition section. The second cavity is configured to vapor-deposit the sample tray and is isolated from the first cavity through the transition section after the sample tray has been vapor-deposited. A transfer component is suitable for carrying the sample tray and transporting it between the first and second cavities. This system enables efficient transfer of the sample tray between the two cavities, avoids frequent vacuum breaks, and reduces oxidation contamination during the transfer of the sample tray from the first cavity to the outside. Attached Figure Description

[0016] Figure 1 This is a perspective view of a vacuum evaporation and sample packaging system according to an embodiment of the present invention;

[0017] Figure 2 yes Figure 1 A magnified view of a section at point A in the middle;

[0018] Figure 3 This is a perspective view of a vapor deposition mechanism according to an embodiment of the present invention;

[0019] Figure 4 This is a first-view perspective view of a first driving assembly, a sample holder, and a sample tray according to an embodiment of the present invention;

[0020] Figure 5 This is a second-view perspective perspective view of the first drive assembly, sample holder, and sample tray according to an embodiment of the present invention;

[0021] Figure 6 yes Figure 3 A magnified view of the first-person perspective at point B in the middle;

[0022] Figure 7 yes Figure 3 A magnified view of the second perspective at point B in the middle;

[0023] Figure 8 This is a perspective view of a sample holder according to an embodiment of the present invention;

[0024] Figure 9 This is a perspective view of a sample tray according to an embodiment of the present invention;

[0025] Figure 10 yes Figure 3 A magnified view of a section at point C;

[0026] Figure 11 This is a temperature simulation diagram of the working surface of the vapor deposition stage after heating according to an embodiment of the present invention;

[0027] Figure 12 This is a perspective view of a transmission component according to an embodiment of the present invention;

[0028] Figure 13 This is a perspective view of the base of a sample box according to an embodiment of the present invention.

[0029] In the accompanying drawings, the meanings of the reference numerals are as follows:

[0030] 100. Work platform;

[0031] 1. First cavity;

[0032] 2. Transition section;

[0033] 3. Second cavity;

[0034] 4. First driving component;

[0035] 41. Third connector;

[0036] 42. Shell;

[0037] 420. First limiting hole;

[0038] 43. Transmission wheel;

[0039] 44. Transmission belt;

[0040] 45. First drive lever;

[0041] 450. Second limiting hole;

[0042] 46. ​​Drive unit;

[0043] 5. Molecular pump;

[0044] 6. Transmission components;

[0045] 61. Second handle;

[0046] 62. Sliding rod;

[0047] 63. Supporting part;

[0048] 630. Limit plate;

[0049] 631. Support section;

[0050] 7. Third drive lever;

[0051] 8. Sample box;

[0052] 81. Top cover;

[0053] 82. Chassis;

[0054] 820. Boss;

[0055] 821. Baffle plate;

[0056] 9. First mounting bracket;

[0057] 10. Second mounting bracket;

[0058] 11. Third mounting bracket;

[0059] 12. Second window;

[0060] 13. Buckle;

[0061] 14. Baking lamp;

[0062] 15. Sample rack;

[0063] 150. Installation components;

[0064] 16. Sample tray;

[0065] 160. Stainless steel sheet;

[0066] 161. Handle;

[0067] 17. Lampshade;

[0068] 18. Evaporation station;

[0069] 19. First shielding plate;

[0070] 20. Support frame;

[0071] 21. Baffle;

[0072] 22. Second shielding plate;

[0073] 23. Film thickness measuring instrument;

[0074] 24. Second drive lever. Detailed Implementation

[0075] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the invention. In the following detailed description, numerous specific details are set forth to provide a thorough understanding of the embodiments of the invention for ease of explanation. However, it will be apparent that one or more embodiments may be practiced without these specific details. Furthermore, descriptions of well-known structures and techniques are omitted in the following description to avoid unnecessarily obscuring the concept of the invention.

[0076] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the invention. The terms “comprising,” “including,” etc., as used herein indicate the presence of the stated features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0077] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein are to be interpreted in a manner consistent with the context of this specification, and not in an idealized or overly rigid way.

[0078] When using expressions such as "at least one of A, B, and C," the expression should generally be interpreted in accordance with the meaning commonly understood by a person skilled in the art (e.g., "a system having at least one of A, B, and C" should include, but is not limited to, systems having A alone, having B alone, having C alone, having A and B, having A and C, having B and C, and / or having A, B, and C, etc.). When using expressions such as "at least one of A, B, or C," the expression should generally be interpreted in accordance with the meaning commonly understood by a person skilled in the art (e.g., "a system having at least one of A, B, or C" should include, but is not limited to, systems having A alone, having B alone, having C alone, having A and B, having A and C, having B and C, and / or having A, B, and C, etc.).

[0079] Figure 1 This is a perspective view of a vacuum evaporation and sample packaging system according to an embodiment of the present invention. Figure 2 yes Figure 1 A magnified view of a portion of point A in the middle.

[0080] A vacuum evaporation and sample packaging system according to an embodiment of the present invention, such as... Figure 1 and Figure 2 As shown, the vacuum evaporation and sample packaging system includes a sample packaging mechanism, a transition section 2, an evaporation mechanism, and a transfer assembly 6. The sample packaging mechanism has a first cavity 1, which is used to accommodate a sample box 8. The sample box 8 is used to hold a sample tray and is configured to encapsulate the sample tray under vacuum within the first cavity 1. One end of the transition section 2 is connected to the first cavity 1. The evaporation mechanism has a second cavity 3, which is connected to the other end of the transition section 2. The evaporation mechanism is configured to evaporate the sample tray and is isolated from the first cavity 1 via the transition section 2 after the sample tray has been evaporated. The transfer assembly 6 is used to carry the sample tray and transport it between the first cavity 1 and the second cavity 3.

[0081] According to an embodiment of the present invention, the overall height of the vacuum evaporation and sample packaging system is approximately 2.2m, the length is approximately 2.1m, and the width is approximately 0.85m.

[0082] According to an embodiment of the present invention, the vacuum evaporation and sample packaging system further includes a work platform 100, wherein the sample packaging mechanism is detachably mounted on the work platform 100 via at least one pair of first mounting brackets 9, and the evaporation mechanism is detachably mounted on the work platform 100 via at least one pair of second mounting brackets 10. The first mounting brackets 9 and the second mounting brackets 10 may be made of aluminum profiles.

[0083] According to an embodiment of the invention, the first cavity 1 has a length of approximately 1030 mm, a width of approximately 570 mm, and a height of approximately 410 mm. The second cavity 3 has a length of approximately 700 mm, a width of approximately 680 mm, and a height of approximately 700 mm, and the second cavity 3 is configured to evaporate and deposit a thin film on the surface of the sample disk.

[0084] According to an embodiment of the present invention, the sample box 8 includes a top cover 81 and a base 82. The base 82 has a length of 434 mm and a width of 434 mm. The base 82 has two protrusions, which are arranged parallel to each other at a distance from each other on the bottom of the base 82. The first cavity 1 of the sample packaging mechanism is provided with two third mounting brackets 11. Each third mounting bracket 11 includes at least two legs to support the base 82. Each leg has a groove to engage with the protrusions, thereby limiting the position of the base 82 on the third mounting bracket 11.

[0085] According to an embodiment of the present invention, the bottom surface of the top cover 81 is a flat end face with four sides, which is mirror-polished to avoid air leakage caused by scratches during the packaging process. A groove is formed on the surface of the base 82 that contacts the top cover 81 to embed a sealing ring. The groove is 6mm wide and 4mm deep, ensuring a good sealing environment inside the sample box 8 after packaging. The sealing ring can be a fluororubber O-ring.

[0086] According to an embodiment of the present invention, the outer side of the sample packaging mechanism protrudes along the direction of transporting the sample tray by the transfer assembly 6, and a third cavity is formed in the protruding part. The third cavity is connected to the first cavity 1 so that the sample tray is packaged by the sample box 8 under a vacuum state in the third cavity, and at the same time, it provides space for the transfer assembly 6 to transport the sample tray from the second cavity 3 to the first cavity 1.

[0087] According to an embodiment of the present invention, a first viewing window is provided on the side wall of the sample packaging mechanism so that the operator can observe the sample tray placed on the chassis 82 in the first cavity 1 when the sample tray is transported between the first cavity 1 and the second cavity 3 using the transmission component 6, and can also observe the situation where the top cover 81 and the chassis 82 encapsulate the sample tray in the sample box 8.

[0088] According to an embodiment of the present invention, a first cavity 1 is formed within the sample packaging mechanism. The first cavity 1 is suitable for accommodating a sample box 8, and the sample box 8 is suitable for holding a sample tray. The sample tray is packaged in a vacuum state within a third cavity connected to the first cavity 1. One end of the transition portion 2 is connected to the first cavity 1. A second cavity 3 is formed within the vapor deposition mechanism. The second cavity 3 is connected to the other end of the transition portion 2. The vapor deposition mechanism is configured to vapor-deposit the sample tray and is isolated from the first cavity 1 through the transition portion 2 after the sample tray has completed vapor deposition. The transfer component 6 is suitable for carrying the sample tray and transporting the sample tray between the first cavity 1 and the second cavity 3. After the sample tray has completed vapor deposition in the second cavity 3 under vacuum, it is first transported to the first cavity 1 through the transfer component 6, and then transported to the third cavity and packaged in the sample box 8. This avoids frequent vacuum breaking and enables efficient transfer of the sample tray between the two cavities. At the same time, it reduces oxidation contamination during the transfer of the sample tray from the first cavity 1 to the outside, meeting the industrial requirements for high-purity thin film preparation.

[0089] Figure 3 This is a perspective view of a vapor deposition mechanism according to an embodiment of the present invention.

[0090] According to embodiments of the present invention, such as Figure 2 and Figure 3 As shown, the vapor deposition mechanism includes a first drive assembly 4, a sample holder 15, and a vapor deposition assembly. The first drive assembly 4 is inserted into the second cavity 3 from the top. The sample holder 15 is disposed within the second cavity 3 and connected to the first drive assembly 4. The sample holder 15 is configured to receive a sample tray 16 transported by a transfer assembly 6 and, driven by the first drive assembly 4, moves the sample tray 16 along the axial direction of the first drive assembly 4 or rotates it about the axial direction of the first drive assembly 4. The vapor deposition assembly is disposed within the second cavity 3 and located below the sample holder 15. The vapor deposition assembly is suitable for vapor deposition on the sample tray 16 located on the sample holder 15.

[0091] Figure 4 This is a first-view perspective view of a first driving assembly, a sample holder, and a sample tray according to an embodiment of the present invention. Figure 5 This is a second-view perspective view of the first driving assembly, sample holder, and sample tray according to an embodiment of the present invention. Figure 6 yes Figure 3 A magnified view of a first-person perspective at point B in the middle. Figure 7 yes Figure 3 A magnified view of the second perspective at point B in the middle. Figure 8 This is a perspective view of a sample holder according to an embodiment of the present invention.

[0092] According to embodiments of the present invention, such as Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 and Figure 8 As shown, the sample holder 15 has an opening in the direction of transporting the sample tray 16 along the transfer assembly 6 to receive the sample tray 16 transported by the transfer assembly 6. A mounting member 150 is installed on the top of the sample holder 15 to facilitate fixing the sample holder 15 to the first drive assembly 4 by means of a first connector (e.g., an M6 screw).

[0093] Figure 9 This is a perspective view of a sample tray according to an embodiment of the present invention.

[0094] According to embodiments of the present invention, such as Figure 8 and Figure 9 As shown, the sample tray 16 includes a stainless steel plate 160 and a handle 161. The stainless steel plate 160 is approximately 370 mm long, approximately 370 mm wide, and approximately 2 mm thick. The handle 161 is approximately 32 mm high and approximately 146 mm long. The handle 161 is fixed to the stainless steel plate 160 by a second connector (e.g., an M6 screw). Multiple handles 161 can be spaced out, such as two, three, or four. The bottom of the sample holder 15 is hollowed out, and steps are formed on both sides of the bottom of the sample holder 15. The sample tray 16 is mounted on the steps on both sides. The vapor deposition assembly is suitable for vapor deposition on the surface of the sample tray 16 facing the vapor deposition assembly.

[0095] According to embodiments of the present invention, such as Figure 3 , Figure 5 , Figure 6 and Figure 8 As shown, the vapor deposition mechanism also includes a lampshade 17 and a baking lamp 14. A mounting plate is installed on the top of the second cavity 3. One end of the first drive assembly 4 passes through the top of the lampshade 17 and is connected to the mounting member 150 of the sample holder 15. The lampshade 17 is located above the sample holder 15 and is fixed to the mounting plate by multiple third connectors 41 (e.g., bolts). The baking lamp 14 is snapped into the inside of the lampshade 17 and is arranged facing the sample holder 15. The baking lamp 14 can preheat the sample tray 16 before vapor deposition, with a preheating temperature of 150℃~200℃. It can also assist in heating during the vapor deposition process of the sample tray 16 to promote the densification of the vapor-deposited film. The lampshade 17 can concentrate the heat of the baking lamp 14 onto the sample tray 16.

[0096] According to embodiments of the present invention, such as Figure 3 , Figure 4 , Figure 5 and Figure 8As shown, the first driving assembly 4 includes a housing 42, a first driving rod 45, a transmission part, and a driving part 46. A first limiting hole 420 is provided on the housing 42. The first driving rod 45 is slidably fitted with the housing 42, and one end of the first driving rod 45 is connected to the sample holder 15. A second limiting hole 450 and a third limiting hole are spaced apart along the axial direction of the first driving rod 45. An external force drives the first driving rod 45 to move the sample holder 15 along the axial direction of the first driving rod 45, aligning the second limiting hole 450 or the third limiting hole with the first limiting hole 420, and fixing the first driving rod 45 to the housing 42 by a limiting member. One end of the transmission part is sleeved on the outside of the housing 42. The output end of the driving part 46 is connected to the other end of the transmission part. The driving part 46 is configured to drive the sample holder 15 to rotate around the axial direction of the first driving rod 45 when the first driving rod 45 is fixed inside the housing 42, via the transmission part and the first driving rod 45.

[0097] According to an embodiment of the present invention, one end of the first drive rod 45 passes through the housing 42, the lamp cover 17 and the mounting part 150 of the sample holder 15 is connected by a first connector (e.g., an M6 screw) and slides in cooperation with the housing 42. The other end of the first drive rod 45 is provided with a first handle so that the operator can pull the first drive rod 45 from the outside of the second cavity 3 to drive the sample holder 15 to move along the axial direction of the first drive rod 45, thereby changing the position of the sample holder 15 above the vapor deposition assembly.

[0098] According to an embodiment of the present invention, the first drive rod 45 drives the sample holder 15 to move axially along the first drive rod 45, so that the second limiting hole 450 or the third limiting hole is aligned with the first limiting hole 420, and the first drive rod 45 is fixed to the housing 42 by a limiting member (the limiting member includes the first limiting member and the second limiting member, which will be described in detail below).

[0099] According to an embodiment of the present invention, the transmission unit includes a transmission wheel 43 and a transmission belt 44. The transmission wheel 43 is sleeved on the outside of the housing 42, and the transmission belt 44 is wrapped around the transmission wheel 43 and the output end of the drive unit 46, such that the drive unit 46 drives the sample holder 15 to rotate around the axial direction of the first drive rod 45 when the first drive rod 45 is fixed inside the housing 42.

[0100] According to an embodiment of the present invention, the drive unit 46 can be a stepper motor, and the vacuum evaporation and sample packaging system further includes a motor control module, which is suitable for controlling the stepper motor to rotate at a uniform speed to ensure the uniformity of the thin film deposition on the sample tray 16.

[0101] According to embodiments of the present invention, such as Figure 3As shown, the vacuum evaporation and sample packaging system also includes a film thickness gauge 23, which is inserted into the second cavity 3 from the outside and faces the bottom surface of the sample tray 16. The film thickness gauge 23 is suitable for real-time detection of film thickness.

[0102] According to an embodiment of the present invention, the various modules work together, and the motor control module and the film thickness detector 23 achieve precise control and real-time monitoring through a PC control program.

[0103] According to embodiments of the present invention, such as Figures 1 to 9 As shown, when the sample holder 15 moves axially along the first drive rod 45 to the first position, the second limiting hole 450 aligns with the first limiting hole 420 to allow the first limiting member (e.g., a screw) to pass through and fix the first drive rod 45 to the housing 42, so that the sample holder 15 can receive the sample tray 16 transported by the transfer assembly 6. The first position is at the same height as the transfer assembly 6 transporting the sample tray 16. When the sample holder 15 moves axially along the first drive rod 45 to the second position, the third limiting hole aligns with the first limiting hole 420 to allow the second limiting member (e.g., a screw) to pass through and fix the first drive rod 45 to the housing 42, so that the transfer assembly 6 disengages from the handle 161 of the sample tray 16. The second position is higher than the first position.

[0104] According to an embodiment of the present invention, after the sample holder 15 receives the sample tray 16 transported by the transfer assembly 6, the sample holder 15 moves axially along the first drive rod 45 to a second position, where the third limiting hole aligns with the first limiting hole 420 to allow the second limiting member (e.g., a screw) to pass through and fix the first drive rod 45 to the housing 42, thereby disengaging the transfer assembly 6 from the handle 161 of the sample tray 16. At this time, the transfer assembly 6 retracts from the second cavity 3 to the first cavity 1. During the vapor deposition process of the vapor deposition assembly on the sample tray 16, the drive unit 46 can drive the sample holder 15 to rotate uniformly around the axial direction of the first drive rod 45 via the transmission wheel 43, the transmission belt 44, and the first drive rod 45, thereby improving the uniformity of the surface film deposition of the sample tray 16 facing the vapor deposition assembly. Before and after vapor deposition of the sample tray 16, the position of the sample holder 15 above the vapor deposition assembly needs to be adjusted to facilitate the transport of the sample tray 16.

[0105] According to embodiments of the present invention, such as Figure 1 As shown, a second viewing window 12 is provided on the side wall of the vapor deposition mechanism so that the operator can observe the sample tray 16 placed on the sample holder 15 in the second cavity 3 and the position of the sample holder 15 above the vapor deposition assembly when the sample tray 16 is transported between the first cavity 1 and the second cavity 3 using the transfer component 6. At the same time, the vapor deposition of the sample tray 16 can also be observed.

[0106] According to an embodiment of the present invention, the vapor deposition mechanism further includes a molecular pump 5, which is installed at the bottom of the second cavity 3. The inlet of the molecular pump 5 is connected to the second cavity 3. The molecular pump 5 is configured to establish a vacuum in the second cavity 3 and in the first cavity 1 through the transition section 2.

[0107] According to an embodiment of the present invention, the molecular pump 5 can be installed in the second cavity 3 either by direct connection or side connection to meet the installation specifications required by the manufacturer. In the direct connection method, the molecular pump 5 is installed at the bottom of the second cavity 3, which avoids friction between the fan blades inside the molecular pump 5 and the inner wall of the molecular pump 5. In the side connection method, the molecular pump 5 is installed on the side wall of the second cavity 3.

[0108] According to an embodiment of the present invention, the inlet of the molecular pump 5 is connected to the second cavity 3 via a flange, which can be a CF200 flange.

[0109] According to an embodiment of the present invention, the outlet of the molecular pump 5 is connected to the inlet of the mechanical pump. The molecular pump 5 can be used in conjunction with the mechanical pump to ensure that the vacuum level is stable within the range required for the experiment. The mechanical pump is suitable for reducing the vacuum level from atmospheric pressure to the starting region of the molecular pump 5, while the molecular pump 5 further reduces the vacuum level to the required experimental environment.

[0110] According to an embodiment of the present invention, the air inlet of the mechanical pump is connected to the first cavity 1 via a flange, which can be a CF35 flange.

[0111] According to an embodiment of the present invention, the transition portion 2 includes a valve block body, an electromagnetic coil, a valve core, and an elastic element. A first through hole and a second through hole are respectively provided on both sides of the valve block body. The first through hole communicates with a first cavity 1, and the second through hole communicates with a second cavity 3. The electromagnetic coil is configured to be energized to generate a magnetic field. The valve core is disposed between the first and second through holes of the valve block body. One end of the valve core is connected to the electromagnetic coil, and the valve core is configured to move under the drive of the magnetic field, thereby connecting the first and second through holes. The elastic element is connected to the other end of the valve core, and the elastic element is configured to drive the valve core to move when the electromagnetic coil is de-energized, thereby isolating the first and second through holes.

[0112] According to an embodiment of the present invention, the transition section 2 may be selected as a pneumatic vacuum solenoid valve.

[0113] According to an embodiment of the present invention, one end of the valve core is connected to an electromagnetic coil and moves under the drive of the magnetic field generated by the electromagnetic coil, so that the first through hole and the second through hole are connected. At this time, the molecular pump 5 can establish a vacuum in the second cavity 3 and in the first cavity 1 through the transition part 2. After the sample tray 16 completes the evaporation, it is transported from the second cavity 3 to the base 82 of the sample box 8 in the first cavity 1 through the transfer assembly 6. An external air compressor is suitable for providing high-pressure gas. The valve core is driven to move by the elastic element when the electromagnetic coil is de-energized, so as to isolate the first through hole and the second through hole, thereby isolating the first cavity 1 and the second cavity 3, which can ensure rapid response and stability of vacuum switching. When the sample tray 16 is encapsulated in the sample box 8, the vacuum degree in the first cavity 1 is maintained at 10. -4 The sample box 8 is vacuum-sealed in the Pa range. After the vacuum in the first cavity 1 is broken and the sample box 8 is taken out, the sample tray 16 is still in a vacuum, thus avoiding contamination of the sample tray 16.

[0114] According to an embodiment of the present invention, the transition section 2 may also be a pneumatic slide gate valve.

[0115] According to an embodiment of the present invention, the valve is driven by high-pressure gas supplied by an air compressor. The air compressor compresses air to drive the piston of the cylinder, which in turn drives the valve core mechanism to close or open the sealing plate, thereby achieving isolation or connection between the first chamber 1 and the second chamber 3.

[0116] According to an embodiment of the present invention, the vacuum evaporation and sample packaging system further includes a vacuum monitoring module, which is suitable for real-time monitoring of the vacuum level in the first chamber 1 and the second chamber 3. The vacuum monitoring module achieves precise control and real-time monitoring through a PC control program.

[0117] Figure 10 yes Figure 3 A magnified view of a section at point C.

[0118] According to embodiments of the present invention, such as Figure 3 and Figure 10 As shown, the vapor deposition assembly includes a vapor deposition stage 18 and multiple first shielding plates 19. The vapor deposition stage 18 is positioned above the inlet of the molecular pump 5 and is configured to heat the sample tray 16 via an external heating device. The multiple first shielding plates 19 are spaced apart and parallel to each other between the inlet of the molecular pump 5 and the vapor deposition stage 18 to prevent thermal radiation generated by the vapor deposition stage 18 from entering the molecular pump 5 during the vapor deposition process of the sample tray 16.

[0119] According to an embodiment of the present invention, the evaporation stage 18 can be made of brass, suitable for powder evaporation, with a thermal conductivity of 400 W / (m²). The vapor deposition stage 18, approximately 220×220×25mm in size, contains three sets of heating rods (each approximately 10mm in diameter and 220mm in effective heating length), with adjustable power for each set. To suppress surface oxidation and improve heating uniformity, an electron beam vapor deposition process deposits a gold film approximately 100nm thick on the working surface of the stage. A multi-zone independent temperature control heating system is employed, with three sets of heating rods (two in pairs from the outside to the inside, totaling six rods) controlled by three AC adjustable power supplies. Different power is applied to different areas of the heating element, ultimately achieving a uniform temperature distribution on the working surface of the stage 18, with a heating uniformity of ±1.5℃.

[0120] Figure 11 This is a temperature simulation diagram of the working surface of the vapor deposition stage after heating, according to an embodiment of the present invention.

[0121] According to embodiments of the present invention, such as Figure 11 The image shows the temperature distribution of the working surface of the vapor deposition stage 18 after heating, simulated using COMSOL software. Figure 11 The temperature axis ranges from 490.24℃ to 490.36℃. Heating resistance wires controlled by three heating power supplies are responsible for heating the working surface of the vapor deposition stage. The heating rods used are specially customized, arranged in pairs from the outside to the inside. The heating rods are numbered 1-6 from left to right. The power of heating rods numbered 1 and 6 is a, the power of heating rods numbered 2 and 5 is b, and the power of heating rods numbered 3 and 4 is c. The total power P is expressed by the following formula (1):

[0122] P = a + b + c (1);

[0123] Where b = f × a, c = f × f × a, and f is the proportionality coefficient 0.9.

[0124] Based on the above model analysis, the power requirements for the six horizontally distributed heating rods are different. The power difference between heating rods numbered 1 and 6 and those numbered 2 and 5 is 0.9 times, and the power difference between heating rods numbered 2 and 5 and those numbered 3 and 4 is 0.81 times. This allows the temperature of the working surface of the vapor deposition stage 18 to fluctuate within ±0.1℃ in the horizontal direction. Following the same principle, the heating rods should also be distributed with different power loads in different areas of the working surface of the vapor deposition stage 18 in the axial direction to achieve a temperature fluctuation within ±0.1℃ in the axial direction. In actual operation, by applying different power to different areas of the heating wires, the uniformity of the working surface temperature of the vapor deposition stage 18 can be achieved. The temperature uniformity error measured by the four thermocouples on the working surface of the vapor deposition stage 18 does not exceed ±1.5℃.

[0125] According to an embodiment of the present invention, the vacuum evaporation and sample packaging system further includes a thermocouple temperature acquisition module and an infrared temperature measurement module. The thermocouple temperature acquisition module is suitable for real-time monitoring of the temperature of the evaporation stage 18, and the infrared temperature measurement module is suitable for monitoring the temperature of the sample tray 16.

[0126] According to an embodiment of the present invention, the various modules work together, and the thermocouple temperature acquisition module and the infrared temperature measurement module are precisely controlled and monitored in real time through a PC control program.

[0127] According to an embodiment of the present invention, the first shielding plate 19 can be made of stainless steel, and there can be five layers. The shape of the first shielding plate 19 can be circular. The multi-layer first shielding plate 19 is annularly covering the air inlet of the molecular pump 5 and is arranged parallel to each other between the air inlet of the molecular pump 5 and the vapor deposition stage 18 at intervals. The diameters of the multi-layer first shielding plates 19 from the air inlet near the molecular pump 5 to the air inlet away from the molecular pump 5 are 280mm, 290mm, 300mm, 310mm and 320mm respectively. The interval between adjacent first shielding plates 19 is approximately 10mm, and the thickness of each first shielding plate 19 is approximately 1mm. This can effectively block the heat radiation generated by the vapor deposition stage 18 from entering the molecular pump 5 and causing thermal damage to the internal components of the molecular pump 5, thereby reducing the damage to the internal components of the molecular pump 5.

[0128] According to an embodiment of the present invention, a plurality of second shielding plates 22 are detachably installed on the inner wall of the second cavity 3. The second shielding plates 22 can be made of stainless steel and can be square in shape. The thickness of each second shielding plate 22 is approximately 1 mm. A gap of approximately 10 mm is maintained between each second shielding plate 22 and the inner wall of the second cavity 3, which can reduce the heat conduction of the second cavity 3 to the external environment.

[0129] According to embodiments of the present invention, such as Figure 3 and Figure 10 As shown, the vapor deposition assembly also includes a support frame 20, two second drive rods 24, and two baffles 21. The support frame 20 is installed at the bottom of the second cavity 3. The two second drive rods 24 are inserted into the second cavity 3 from the outside and are rotatably mounted on the support frame 20. One end of each of the two baffles 21 is connected to one of the two second drive rods 24. Under the drive of the two second drive rods 24, the two baffles 21 rotate about the axial direction of the two second drive rods 24 respectively. The other ends of the two baffles 21, respectively away from the two second drive rods 24, have a closed state that is close to each other and an open state that is far away from each other.

[0130] According to an embodiment of the present invention, the support frame 20 extends along the direction of transporting the sample tray 16 in the transfer assembly 6 and extends upward to form a protrusion. Two second drive rods 24 are inserted into the second cavity 3 from the outside and are rotatably disposed on the support frame 20. Each of the two second drive rods 24 is provided with an operating handle at its outer end, so that the operator can switch the two baffles 21 between the closed state and the open state by rotating the operating handle.

[0131] According to an embodiment of the present invention, before the vapor deposition stage 18 performs vapor deposition on the sample tray 16, the operator rotates the operating handle to open the two baffles 21 away from the two second drive rods 24. After the sample tray 16 completes vapor deposition, the operator rotates the operating handle to close the two baffles 21 away from the two second drive rods 24.

[0132] According to embodiments of the present invention, the evaporation deposition apparatus is suitable for the preparation of thin films of various materials, and is also suitable for thin film deposition in fields such as semiconductor devices and nanomaterials, and can adapt to applications in the fields of optics, electronics and materials science. It is simple to operate, highly stable, and highly adaptable, and can significantly improve the efficiency and quality of thin film evaporation deposition.

[0133] Figure 12 This is a perspective view of a transmission component according to an embodiment of the present invention.

[0134] According to embodiments of the present invention, such as Figure 1 , Figure 3 , Figure 9 and Figure 12 As shown, the transfer assembly 6 includes two sliding rods 62, a limiting plate 630, and a support portion 631. The two sliding rods 62 are slidably engaged with the first cavity 1 and the second cavity 3. The limiting plate 630 is installed between the two sliding rods 62 to abut against the sample holder 15 when the sample tray 16 is transported to the sample holder 15, thereby preventing the two sliding rods 62 from sliding against the inner walls of the first cavity 1 and the second cavity 3. The support portion 631 protrudes from the limiting plate 630 along the direction in which the sample tray 16 is transported by the transfer assembly 6, and carries the sample tray 16 through the handle 161 of the sample tray 16.

[0135] According to an embodiment of the present invention, the transmission assembly 6 further includes a second handle 61, and two sliding rods 62 are installed at intervals at both ends of the second handle 61. Each sliding rod 62 has a length of 200 mm and an outer diameter of 10 mm, and the material of the sliding rods 62 can be stainless steel. Slide rails are provided on the inner walls of the first cavity 1 and the second cavity 3 to slide with the two sliding rods 62. Multiple latches are provided on the slide rails to limit the position of the two sliding rods 62 on the slide rails on both sides of the inner walls of the first cavity 1 and the second cavity 3, ensuring efficient and convenient transmission of the sample tray 16 between the first cavity 1 and the second cavity 3.

[0136] According to an embodiment of the present invention, the limiting plate 630 and the support portion 631 constitute a support portion 63 to carry the sample tray 16 under the action of the two sliding rods 62 and transport the sample tray 16 between the first cavity 1 and the sample holder 15. The handle 161 of the sample tray 16 is configured with two spaced-apart grooves so that the support portion 631 passes through the handle 161 of the sample tray 16 to carry the sample tray 16.

[0137] Figure 13 This is a perspective view of the base of a sample box according to an embodiment of the present invention.

[0138] According to embodiments of the present invention, such as Figure 1 , Figure 2 , Figure 3 , Figure 12 and Figure 13 As shown, two protrusions 820 are spaced parallel to each other on the base 82 of the sample box 8 along the direction of transporting the sample tray 16 by the transfer assembly 6, to support the sample tray 16. Each protrusion 820 is 390 mm long, 20 mm wide, and 19 mm high. The ends of the two protrusions 820 away from the second cavity 3 protrude upward to form baffles 821. When the support 631 transports the sample tray 16 from the second cavity 3 to the base 82 of the sample box 8, the operator continues to pull the two sliding rods 62 through the second handle 61 into the third cavity. The sample tray 16 is blocked by the baffles 821 on the two protrusions 820, so that the support 631 is fully pulled out of the sample box 8. The height of each protrusion 820 is 34 mm.

[0139] According to an embodiment of the present invention, when the operator pushes and pulls the transmission assembly 6 between the first cavity 1 and the second cavity 3, he / she should ensure that the push and pull are gentle to prevent the two sliding rods 62 of the transmission assembly 6 from disengaging from the slide rails provided on the inner walls of the first cavity 1 and the second cavity 3, thereby affecting the transmission of the sample and the normal operation of other parts in the first cavity 1 and the second cavity 3.

[0140] According to embodiments of the present invention, such as Figure 2As shown, the sample packaging mechanism includes a third drive rod 7, which is inserted into the first cavity 1 from the top and connected to the top cover 81 of the sample box 8. The top cover 81 of the sample box 8 moves along the axial direction of the third drive rod 7 under the drive of the third drive rod 7 to cooperate with the base 82 of the sample box 8.

[0141] According to an embodiment of the present invention, one end of the third drive rod 7 is inserted into the first cavity 1 from the top and connected to the top cover 81 of the sample box 8. The other end of the third drive rod 7 is provided with a third handle, so that the operator can pull the third drive rod 7 from the outside of the first cavity 1 to drive the top cover 81 of the sample box 8 to move along the axial direction of the third drive rod 7, so as to lock it onto the base 82 of the sample box 8 and close it with the base 82. The operator then pulls the two sliding rods 62 through the second handle 61 to transfer the sample box 8 with the top cover 81 and the base 82 closed into the third cavity. The sample tray 16 is sealed in the sample box 8 in the third cavity to ensure effective isolation of the sample tray 16.

[0142] According to an embodiment of the present invention, the sample box 8 further includes a buckle 13, which is disposed at both ends of the sample box 8 and is used to fix the top cover 81 and the base plate 82 of the sample box 8 after the operator removes the sample box 8 from the first cavity 1 after the vacuum is broken, so that the top cover 81 and the base plate 82 remain in contact and are pressed together with the base plate 82.

[0143] According to an embodiment of the present invention, the top cover 81 of the sample box 8 is fixed to one end of the third drive rod 7 by a fourth connector (e.g., an M6 screw).

[0144] According to an embodiment of the present invention, the sample box 8 is prepared for encapsulation in a non-vacuum state within the first cavity 1. The operator pulls the third drive rod 7 upwards using the third handle, thereby lifting the top cover 81 of the sample box 8. At this time, the top cover 81 is separated from the base 82, and the transfer assembly 6 is positioned at a height between the top cover 81 and the base 82. A fluororubber O-ring is placed in the groove of the base 82 of the sample box 8, and the edges are filled with vacuum silicone grease.

[0145] According to an embodiment of the present invention, the support portion 631 of the transmission assembly 6 passes through the handle 161 of the sample tray 16 so that the sample tray 16 can be transported between the first cavity 1 and the second cavity 3 with the transmission assembly 6, and the support portion 631 places the sample tray 16 on the base 82 of the sample box 8.

[0146] According to an embodiment of the present invention, before opening the pneumatic vacuum solenoid valve, the pressure difference between the first chamber 1 and the second chamber 3 is checked. The valve can only be opened if the pressure difference across the pneumatic vacuum solenoid valve is no greater than 2700 Pa; otherwise, the pneumatic vacuum solenoid valve will not be able to open. After the pneumatic vacuum solenoid valve is opened, the first chamber 1 and the second chamber 3 are connected. After the molecular pump 5 is turned on, the molecular pump 5 can simultaneously establish a vacuum in the first chamber 1 and the second chamber 3. The vacuum degree in the first chamber 1 can reach 10. -4 Pa level.

[0147] According to an embodiment of the present invention, the operator pulls the first drive rod 45 through the first handle, and the sample holder 15 moves to the first position along the axial direction of the first drive rod 45. At this time, the second limiting hole 450 is aligned with the first limiting hole 420 to allow the first limiting member (e.g., a screw) to pass through and fix the first drive rod 45 to the housing 42. The sample tray 16 is transferred from the first cavity 1 to the second cavity 3 through the transfer assembly 6 and placed in the sample holder 15.

[0148] According to an embodiment of the present invention, the operator pulls the first drive rod 45 via the first handle, and the sample holder 15 moves axially along the first drive rod 45 to the second position. At this time, the third limiting hole aligns with the first limiting hole 420 to allow the second limiting member (e.g., a screw) to pass through and fix the first drive rod 45 to the housing 42, so that the support part 631 of the transfer assembly 6 disengages from the handle 161 of the sample tray 16, but the stainless steel plate 160 of the sample tray 16 has not yet reached the position height of the support part 631 of the transfer assembly 6. At this time, the support part 631 is not in contact with the sample tray 16 and is not under force. The operator pulls the transfer assembly 6 via the second handle 61, so that the transfer assembly 6 retracts into the first cavity 1.

[0149] According to an embodiment of the present invention, the power supply of the baking lamp 14 is turned on, enabling the baking lamp 14 to operate, and the infrared temperature measurement module is turned on to monitor the temperature of the sample tray 16. After preheating by the baking lamp 14, the temperature of the sample tray 16 can reach 150℃~200℃ and remain stable. The heater of the heating rod is turned on, steadily raising the temperature of the working surface of the vapor deposition stage 18. Four thermocouples on the vapor deposition stage 18 are used to monitor its temperature. The drive unit 46 is turned on and is in a state of uniform rotation, driving the sample tray 16 in the sample holder 15 to rotate uniformly. After the heating rod makes the working surface of the vapor deposition stage 18 reach the target temperature, the operator rotates the operating handle to make the other ends of the two baffles 21, which are respectively away from the two second drive rods 24, be in an open state away from each other, at which point vapor deposition begins. After vapor deposition is completed, the operator rotates the operating handle to make the other ends of the two baffles 21, which are respectively away from the two second drive rods 24, be in a closed state close to each other, and turns off the power supply of the heating rod to cool down.

[0150] According to an embodiment of the present invention, after the vapor deposition is completed and the vapor deposition stage 18 cools to below 80°C, the pneumatic vacuum solenoid valve is opened. The operator pulls the first drive rod 45 through the first handle, and the sample holder 15 moves to the first position along the axial direction of the first drive rod 45. The transfer assembly 6 is pushed into the second cavity 3, and the handle 161 of the sample tray 16 rests on the support part 631 of the transfer assembly 6. Then, the operator pulls the first drive rod 45 through the first handle, and the sample holder 15 is lowered by another 1 cm. At this time, the sample tray 16 is no longer in contact with the sample holder 15.

[0151] According to an embodiment of the present invention, the sample tray 16 is transferred from the second cavity 3 back to the first cavity 1 via the transfer assembly 6. The sample tray 16 reaches the position of the base 82 of the sample box 8, and is positioned above the boss 820. The operator continues to pull the transfer assembly 6 via the second handle 61. The sample tray 16 is blocked by the baffles 821 of the two bosses 820, causing the support portion 631 to be fully pulled out of the sample box 8, while the sample tray 16 remains on the two bosses 820. The pneumatic vacuum solenoid valve is then closed, isolating the first cavity 1 from the second cavity 3.

[0152] According to an embodiment of the present invention, after the sample tray 16 is transported back to the first cavity 1, the sample tray 16 is placed on the base 82 of the sample box 8. The operator pushes the third drive rod 7 downward through the third handle, causing the top cover 81 of the sample box 8 to move axially along the third drive rod 7 to contact and press against the base 82 of the sample box 8. At this time, the third drive rod 7 is separated from the top cover 81. The operator then pulls the two sliding rods 62 through the second handle 61 to transfer the sample box 8, with the top cover 81 and the base 82 closed, into the third cavity, sealing the sample tray 16 inside the sample box 8. After the vacuum in the first cavity 1 is broken, the sample box 8 remains in a vacuum state, isolating the sample tray 16 from air and preventing oxidation, awaiting further experiments or characterization.

[0153] The embodiments of the present invention have been described above. However, these embodiments are merely illustrative and not intended to limit the scope of the invention. Although various embodiments have been described above, this does not mean that the measures in the various embodiments cannot be used advantageously in combination. The scope of the invention is defined by the appended claims and their equivalents. Various substitutions and modifications can be made by those skilled in the art without departing from the scope of the invention, and all such substitutions and modifications should fall within the scope of the invention.

Claims

1. A vacuum evaporation and sample packaging system, characterized in that, include: A sample packaging mechanism having a first cavity formed therein, the first cavity being adapted to accommodate a sample box, the sample box being adapted to hold a sample tray, and being configured to package the sample tray under a vacuum state within the first cavity. The transition section, one end of which is connected to the first cavity; A vapor deposition mechanism having a second cavity formed therein, the second cavity being connected to the other end of the transition section, configured to vapor deposit the sample tray, and isolated from the first cavity by the transition section after the vapor deposition of the sample tray is completed; A transport assembly adapted to carry the sample tray and transport the sample tray between the first cavity and the second cavity; The vapor deposition mechanism includes: A first drive assembly is inserted into the second cavity from the top of the second cavity; The sample holder, disposed in the second cavity and connected to the first drive assembly, is configured to receive the sample tray transported by the transmission assembly, and drive the sample tray to move along the axial direction of the first drive assembly or rotate around the axial direction of the first drive assembly under the drive of the first drive assembly. A vapor deposition assembly is disposed in the second cavity and located below the sample holder, and is suitable for vapor deposition on the sample tray located on the sample holder; The first driving component includes: A housing, wherein a first limiting hole is provided on the housing; A first drive rod is slidably engaged with the housing, and one end of the first drive rod is connected to the sample holder. A second limiting hole and a third limiting hole are provided on the first drive rod at intervals along the axial direction of the first drive rod. The sample holder is moved along the axial direction of the first drive rod by an external force, so that the second limiting hole or the third limiting hole is aligned with the first limiting hole, and the first drive rod is fixed to the housing by a limiting member. A transmission part, one end of which is sleeved on the outside of the housing; The drive unit, whose output end is connected to the other end of the transmission unit, is configured to drive the sample holder to rotate about the axis of the first drive rod through the transmission unit and the first drive rod when the first drive rod is fixed inside the housing. The transition section includes: The valve block body has a first through hole and a second through hole on its two sides, respectively. The first through hole communicates with the first cavity, and the second through hole communicates with the second cavity. An electromagnetic coil is constructed to generate a magnetic field when energized. A valve core is disposed between the first through hole and the second through hole of the valve block body. One end of the valve core is connected to the electromagnetic coil and is configured to move under the drive of the magnetic field, so that the first through hole and the second through hole are connected. An elastic element, connected to the other end of the valve core, is configured to drive the valve core to move when the electromagnetic coil is de-energized, so as to isolate the first through hole from the second through hole; The sample packaging mechanism includes: The third drive rod is inserted into the first cavity from the top and connected to the top cover of the sample box. The top cover of the sample box moves along the axial direction of the third drive rod under the drive of the third drive rod to cooperate with the chassis of the sample box.

2. The vacuum evaporation and sample packaging system according to claim 1, characterized in that, When the sample holder moves to a first position along the axial direction of the first drive rod, the second limiting hole aligns with the first limiting hole to allow the first limiting member to pass through and fix the first drive rod to the housing, so that the sample holder can receive the sample tray transported by the transfer assembly. The first position is the same height at which the transfer assembly transports the sample tray. When the sample holder moves to the second position along the axial direction of the first drive rod, the third limiting hole aligns with the first limiting hole to allow the second limiting member to pass through and fix the first drive rod to the housing, thereby disengaging the transfer assembly from the handle of the sample tray. The second position is higher than the first position.

3. The vacuum evaporation and sample packaging system according to claim 1, characterized in that, The vapor deposition mechanism also includes: A molecular pump, installed at the bottom of the second cavity, has its inlet connected to the second cavity and is configured to establish a vacuum in the second cavity and in the first cavity via the transition section.

4. The vacuum evaporation and sample packaging system according to claim 3, characterized in that, The vapor deposition assembly includes: A vapor deposition stage, located above the inlet of the molecular pump, is configured to heat the sample tray via an external heating device for vapor deposition. Multiple first shielding plates are arranged parallel to each other at intervals between the air inlet of the molecular pump and the evaporation stage, so as to block the heat radiation generated by the evaporation stage from entering the molecular pump during the evaporation of the sample plate by the evaporation stage.

5. The vacuum evaporation and sample packaging system according to claim 4, characterized in that, The vapor deposition assembly also includes: The support frame is installed at the bottom of the second cavity; Two second drive rods are inserted into the second cavity from the outside and are rotatably mounted on the support frame; Two baffles, one end of each baffle is connected to two second drive rods respectively. The two baffles rotate about the axis of the two second drive rods under the drive of the two second drive rods respectively. The other ends of the two baffles away from the two second drive rods have a closed state that is close to each other and an open state that is far away from each other.

6. The vacuum evaporation and sample packaging system according to claim 5, characterized in that, The transmission component includes: Two sliding rods are slidably engaged with the first cavity and the second cavity; A limiting plate is installed between the two sliding rods to abut against the sample holder when the sample tray is conveyed to the sample holder, thereby preventing the two sliding rods from sliding on the inner walls of the first cavity and the second cavity; The support portion protrudes from the limiting plate along the direction in which the sample tray is transported by the transmission assembly, and carries the sample tray through the handle of the sample tray.

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