Illumination intensity detection method, illumination intensity detection system, equipment and medium
By configuring preset delay time and a unified time reference, the problem of timing deviation between the light source and the sensor was solved, achieving high precision in light intensity detection and improving the performance of semiconductor manufacturing equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-16
- Publication Date
- 2026-03-31
AI Technical Summary
In the prior art, due to the response delay of the light source and the transmission delay of the control signal, there is a deviation between the emission time of the light source and the acquisition time of the sensor, which causes the peak radiation of the light source to be out of sync with the acquisition cycle of the sensor, affecting the mask alignment accuracy and the performance of semiconductor manufacturing equipment.
By configuring independent preset light source trigger delay time and preset sensor trigger delay time, and controlling the light source emission and sensor acquisition actions based on a unified current time reference, accurate compensation for light source response delay and sensor acquisition delay is achieved. A synchronization signal generator is used to generate a periodic synchronization signal to ensure time consistency.
It significantly improves the accuracy of light intensity detection, avoids measurement errors caused by inherent hardware delays, and enhances the system's real-time performance and detection accuracy.
Smart Images
Figure CN121762023A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of light intensity detection technology, and in particular to a light intensity detection method, light intensity detection system, equipment and medium. Background Technology
[0002] Luminous intensity is defined as the luminous flux radiated by a light source within a unit solid angle in a specific direction, and it is an important parameter characterizing the directional radiation intensity of a light source. In precision optical alignment systems, luminous intensity sensors are needed to monitor the luminous intensity data at the target location in real time, and to dynamically adjust the spatial position and orientation of the light source or mechanical device accordingly. Especially in the photolithography process and mask alignment stage of semiconductor manufacturing, the precise control of the light source's radiation state and the accurate acquisition of luminous intensity information in a specific direction are of decisive significance.
[0003] Before acquiring light intensity, the system needs to send a light emission control command to the light source via the light source controller, and simultaneously issue a acquisition trigger command to the sensor via the sensor controller. However, due to the response delay of the light source and the transmission delay of the control signal, the actual light emission time deviates from the theoretical value; similarly, affected by the sensor response time and the transmission delay of the trigger signal, the actual acquisition time also deviates from the theoretical timing. These timing deviations caused by hardware characteristics significantly reduce the real-time performance of the system, causing the peak radiation of the light source to lose synchronization with the sensor acquisition cycle, resulting in the sensor being unable to capture the maximum light intensity value in that direction. This deviation will directly affect the mask alignment accuracy and ultimately restrict the overall performance indicators of the semiconductor manufacturing equipment. Summary of the Invention
[0004] In view of this, the purpose of this application is to provide a light intensity detection method, light intensity detection system, device and medium. By configuring independent preset light source trigger delay time and preset sensor trigger delay time, and controlling the light source emission and sensor acquisition actions respectively based on a unified current time reference, the method achieves accurate compensation for light source response delay and sensor acquisition delay, and significantly improves the accuracy of light intensity detection.
[0005] In a first aspect, embodiments of this application provide a method for detecting light intensity, wherein the method is applied to a light intensity detection system, the light intensity detection system comprising a core controller, a light source controller, a sensor controller, a light source, and a light intensity sensor; the light intensity detection method includes: When light intensity detection begins, the core controller sends operating instructions to the light source controller and the sensor controller; In response to the working command, the light source controller sends a light emission command to the light source based on a preset sensor trigger delay time under the current time reference, so that the light source emits light according to the light emission command. In response to the working instruction, the sensor controller sends a light intensity acquisition instruction to the light intensity sensor based on a preset light source trigger delay time under the current time reference, so that the light intensity sensor can acquire the light intensity value of the light source based on the light intensity acquisition instruction.
[0006] Furthermore, the core controller determines the preset light source trigger delay time and the preset sensor trigger delay time through the following steps: Obtain a pre-set set of light source trigger delay times; wherein, the set of light source trigger delay times includes multiple different initial light source trigger delay times; For each initial light source trigger delay time in the set of light source trigger delay times, the initial sensor trigger delay time is gradually adjusted from the initial value. After each adjustment, the light source is controlled to perform light emission operation according to the initial light source trigger delay time. At the same time, the light intensity sensor is controlled to perform light intensity acquisition based on the currently adjusted initial sensor trigger delay time and record the corresponding acquired light intensity value. Based on the recorded multiple light intensity values, a curve showing the relationship between the light intensity value and the initial sensor trigger delay time was plotted, and the maximum light intensity value in the curve and its corresponding optimal sensor trigger delay time were determined. Summarize the maximum light intensity values corresponding to all initial light source trigger delay times, and determine the initial light source trigger delay time corresponding to the largest light intensity value among the multiple maximum light intensity values and its corresponding optimal sensor trigger delay time as the preset light source trigger delay time and the preset sensor trigger delay time, respectively.
[0007] Furthermore, after the light intensity sensor acquires the light intensity value of the light source based on the light intensity acquisition command, the light intensity detection method further includes: When the core controller detects that the light intensity value has not reached the preset light intensity peak, it adjusts the preset light source trigger delay time and the preset sensor trigger delay time respectively, and returns to the step of sending working instructions to the light source controller and the sensor controller.
[0008] Furthermore, the light intensity detection system also includes a synchronization signal generator, and before performing the light intensity detection, the light intensity detection method further includes: The synchronization signal generator generates a periodic synchronization signal and simultaneously sends the periodic synchronization signal to the light source controller and the sensor controller, so that the light source controller and the sensor controller establish the current time reference.
[0009] Furthermore, the periodic synchronization signal is a square wave signal, and the light source controller and the sensor controller determine the time reference by detecting the rising edge or falling edge of the periodic synchronization signal; The signal transmission path length from the synchronization signal generator to the light source controller is equal to the signal transmission path length to the sensor controller, and the same transmission medium and interface protocol are used to ensure that the periodic synchronization signal arrives at the light source controller and the sensor controller at the same time.
[0010] Secondly, this application also provides a light intensity detection system, which includes a core controller, a light source controller, a sensor controller, a light source, and a light intensity sensor. The core controller is used to send working instructions to the light source controller and the sensor controller when the light intensity detection starts; The light source controller is used to respond to the working instruction and, based on a preset sensor trigger delay time, send a light emission instruction to the light source in the current time reference, so that the light source emits light according to the light emission instruction; The sensor controller is configured to respond to the working instruction and, based on the current time reference, send a light intensity acquisition instruction to the light intensity sensor based on a preset light source trigger delay time, so that the light intensity sensor acquires the light intensity value of the light source based on the light intensity acquisition instruction.
[0011] Furthermore, the core controller is also used to determine the preset light source trigger delay time and the preset sensor trigger delay time through the following steps: Obtain a pre-set set of light source trigger delay times; wherein, the set of light source trigger delay times includes multiple different initial light source trigger delay times; For each initial light source trigger delay time in the set of light source trigger delay times, the initial sensor trigger delay time is gradually adjusted from the initial value. After each adjustment, the light source is controlled to perform light emission operation according to the initial light source trigger delay time. At the same time, the light intensity sensor is controlled to perform light intensity acquisition based on the currently adjusted initial sensor trigger delay time and record the corresponding acquired light intensity value. Based on the recorded multiple light intensity values, a curve showing the relationship between the light intensity value and the initial sensor trigger delay time was plotted, and the maximum light intensity value in the curve and its corresponding optimal sensor trigger delay time were determined. Summarize the maximum light intensity values corresponding to all initial light source trigger delay times, and determine the initial light source trigger delay time corresponding to the largest light intensity value among the multiple maximum light intensity values and its corresponding optimal sensor trigger delay time as the preset light source trigger delay time and the preset sensor trigger delay time, respectively.
[0012] Furthermore, after the light intensity sensor acquires the light intensity value of the light source based on the light intensity acquisition command, the core controller is also used to: When the light intensity value is detected to be below the preset light intensity peak, the preset light source trigger delay time and the preset sensor trigger delay time are adjusted respectively, and the process returns to the step of sending working instructions to the light source controller and the sensor controller.
[0013] Thirdly, embodiments of this application also provide an electronic device, including: a processor, a memory, and a bus. The memory stores machine-readable instructions executable by the processor. When the electronic device is running, the processor communicates with the memory via the bus. When the machine-readable instructions are executed by the processor, the steps of the light intensity detection method described above are performed.
[0014] Fourthly, embodiments of this application also provide a computer-readable storage medium storing a computer program, which, when executed by a processor, performs the steps of the light intensity detection method described above.
[0015] This application provides a light intensity detection method, system, device, and medium. The light intensity detection method is applied to the light intensity detection system, which includes a core controller, a light source controller, a sensor controller, a light source, and a light intensity sensor. When light intensity detection begins, the core controller sends a working instruction to the light source controller and the sensor controller. In response to the working instruction, the light source controller sends a light emission instruction to the light source based on a preset sensor trigger delay time at the current time reference, causing the light source to emit light based on the light emission instruction. In response to the working instruction, the sensor controller sends a light intensity acquisition instruction to the light intensity sensor based on a preset light source trigger delay time at the current time reference, causing the light intensity sensor to acquire the light intensity value of the light source based on the light intensity acquisition instruction.
[0016] This application achieves precise compensation for light source response delay and sensor acquisition delay by configuring independent preset light source trigger delay time and preset sensor trigger delay time, and controlling the light source emission and sensor acquisition actions separately based on a unified current time reference. It solves the problem of sampling time deviating from the peak light intensity caused by fixed or asynchronous triggering methods in existing technologies. This application effectively avoids measurement errors caused by inherent hardware delays and significantly improves the accuracy of light intensity detection.
[0017] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0019] Figure 1 A flowchart illustrating a light intensity detection method provided in an embodiment of this application; Figure 2 This is one of the structural schematic diagrams of a light intensity detection system provided in an embodiment of this application; Figure 3 This is a second schematic diagram of the structure of a light intensity detection system provided in an embodiment of this application; Figure 4 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Detailed Implementation
[0020] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. Based on the embodiments of this application, every other embodiment obtained by those skilled in the art without inventive effort falls within the scope of protection of this application.
[0021] First, the applicable scenarios for this application will be introduced. This application can be applied to the field of light intensity detection technology.
[0022] Luminous intensity is defined as the luminous flux radiated by a light source within a unit solid angle in a specific direction, and it is an important parameter characterizing the directional radiation intensity of a light source. In precision optical alignment systems, luminous intensity sensors are needed to monitor the luminous intensity data at the target location in real time, and to dynamically adjust the spatial position and orientation of the light source or mechanical device accordingly. Especially in the photolithography process and mask alignment stage of semiconductor manufacturing, the precise control of the light source's radiation state and the accurate acquisition of luminous intensity information in a specific direction are of decisive significance.
[0023] Research has revealed that before light intensity acquisition, the system needs to send a light emission control command to the light source via the light source controller, and simultaneously issue a acquisition trigger command to the sensor via the sensor controller. However, due to the response delay of the light source and the transmission delay of the control signal, the actual light emission time deviates from the theoretical value. Similarly, affected by the sensor response time and the transmission delay of the trigger signal, the actual acquisition time also deviates from the theoretical timing. These timing deviations caused by hardware characteristics significantly reduce the system's real-time performance, causing the peak radiation of the light source to become out of sync with the sensor's acquisition cycle, resulting in the sensor being unable to capture the maximum light intensity value in that direction. This deviation directly affects the mask alignment accuracy and ultimately restricts the overall performance indicators of semiconductor manufacturing equipment.
[0024] Based on this, the embodiments of this application provide a light intensity detection method that achieves accurate compensation for light source response delay and sensor acquisition delay, and significantly improves the accuracy of light intensity detection.
[0025] Please see Figure 1 , Figure 1 This is a flowchart illustrating a light intensity detection method provided in an embodiment of this application. The light intensity detection method is applied to a light intensity detection system, which includes a core controller, a light source controller, a sensor controller, a light source, and a light intensity sensor; as shown... Figure 1 As shown, the light intensity detection method includes: S101, When the light intensity detection starts, the core controller sends working instructions to the light source controller and the sensor controller.
[0026] Here, the core controller is the central processing unit in the light intensity detection system, responsible for coordinating the workflow of the light source controller and the sensor controller. The light source controller receives instructions from the core controller to control the light source to emit light at a specified time. The sensor controller receives instructions from the core controller to control the light intensity sensor to collect light intensity values at a specified time.
[0027] Regarding step S101 above, in specific implementation, when the light intensity detection task is started, the core controller first sends working instructions to the light source controller and the sensor controller simultaneously.
[0028] As an optional embodiment, the light intensity detection system further includes a synchronization signal generator, and the light intensity detection method further includes the following steps before performing the light intensity detection: The synchronization signal generator generates a periodic synchronization signal and simultaneously sends the periodic synchronization signal to the light source controller and the sensor controller, so that the light source controller and the sensor controller establish the current time reference.
[0029] Here, the current time reference refers to a synchronization time starting point shared by the light source controller and the sensor controller, which is usually established by an external synchronization signal.
[0030] According to the embodiments provided in this application, to establish a unified time base, an independent synchronization signal generator is introduced, whose output is connected to the external trigger input interface of the light source controller and the sensor controller. The synchronization signal generator generates a periodic synchronization signal, such as a square wave signal with a frequency of 1kHz, and sends this signal to both the light source controller and the sensor controller simultaneously. Both the light source controller and the sensor controller determine the current time base by detecting the rising edge (or falling edge) of this signal. Subsequently, all delay-based control actions use this edge as the timing origin. This avoids the transmission delay difference problem caused by relying on the core controller to issue commands one by one through the communication bus, realizes hardware-level synchronization across devices, and greatly improves the timing consistency of the system.
[0031] Thus, this application fundamentally solves the timing asynchrony problem caused by different command transmission paths and communication jitter between multiple controllers by introducing a synchronization signal generator to generate a periodic synchronization signal and using it as a common time reference for the light source controller and sensor controller. All operations use the characteristic edge of the synchronization signal as the starting reference point, achieving high-precision time alignment across devices, providing a hardware foundation for precise timing control, and greatly improving the overall time consistency and repeatability of the system.
[0032] As an optional embodiment, the periodic synchronization signal is a square wave signal. The light source controller and the sensor controller determine the time reference by detecting the rising or falling edge of the periodic synchronization signal. For example, whenever the synchronization signal has a rising edge, it is considered the start of a new detection cycle. The light source controller and the sensor controller each start a countdown in their internal timers, waiting for their respective preset delay times before performing their corresponding operations. The signal transmission path length from the synchronization signal generator to the light source controller is equal to the signal transmission path length to the sensor controller, and the same transmission medium and interface protocol are used to ensure that the periodic synchronization signal arrives at the light source controller and the sensor controller at the same time. This further ensures that the transmission path length of the synchronization signal to each controller is equal, and that the same transmission medium and interface protocol are used, eliminating the asymmetry of signal propagation delay at the physical level. Even in high-frequency operating mode, it can be guaranteed that the synchronization signal arrives at the light source controller and the sensor controller almost simultaneously, preventing sampling mismatch caused by the accumulation of small time deviations.
[0033] S102, the light source controller responds to the working instruction and sends a light emission instruction to the light source based on a preset sensor trigger delay time under the current time reference, so that the light source emits light according to the light emission instruction.
[0034] S103, in response to the working instruction, the sensor controller sends a light intensity acquisition instruction to the light intensity sensor based on a preset light source trigger delay time under the current time reference, so that the light intensity sensor acquires the light intensity value of the light source based on the light intensity acquisition instruction.
[0035] Here, the preset sensor trigger delay time refers to the time interval between the sensor controller sending a light intensity acquisition command to the light intensity sensor and the light intensity sensor acquiring light intensity based on that command. It typically includes the transmission time of the light intensity acquisition command and the response time of the light intensity sensor. The preset light source trigger delay time refers to the time interval between the light source controller issuing a light emission command to the light source and the light source emitting light based on that command. It typically includes the transmission time of the light emission command and the response time of the light source.
[0036] Regarding steps S102-S103 above, in specific implementation, after receiving the working instruction, the light source controller waits for a preset sensor trigger delay time based on the current time reference, and then sends a light emission instruction to the light source, driving the light source to start emitting light when it receives the light emission instruction at a specified time. Simultaneously, the sensor controller also waits for a preset light source trigger delay time based on the current time reference, and then sends a light intensity acquisition instruction to the light intensity sensor, causing it to acquire the light intensity value of the current environment at a specified time. For example: assuming the current time reference is T0, the preset light source trigger delay time is 50μs, and the preset sensor trigger delay time is 72μs, then the light source controller sends a light emission instruction to the light source at T0+72μs, and the light source emits light at T0+72μs+50μs. The sensor controller sends a light intensity acquisition instruction to the light intensity sensor at T0+50μs, and the light intensity sensor detects the light intensity at T0+72μs+50μs. By adjusting these two delay parameters separately, the acquisition action can be precisely aligned with the time window in which the light source radiation peak occurs, thereby improving measurement accuracy.
[0037] In practical applications, after receiving a light emission command, the light source does not instantly reach a stable light intensity output. Instead, it undergoes a brief rise, with its intensity increasing approximately exponentially over time, maintaining a peak value for a period before gradually decaying. Similarly, after receiving a trigger command, the light intensity sensor's internal circuitry needs to complete reset and analog-to-digital conversion preparations, resulting in a certain delay before it can effectively sense the light signal. If the control timing fails to match the timing of the light source's radiation peak with the sensor's effective acquisition window, the acquired light intensity value will be significantly lower than the theoretical maximum, leading to decreased system measurement sensitivity and increased positioning error. Therefore, this application configures independent preset light source trigger delay times and preset sensor trigger delay times, achieving precise compensation for light source response delay and sensor acquisition delay.
[0038] Furthermore, as an optional embodiment, the core controller determines the preset light source trigger delay time and the preset sensor trigger delay time through the following steps: A: Obtain the pre-set set of light source trigger delay times.
[0039] Regarding step A above, in specific implementation, a pre-set set of light source trigger delay times is obtained. Here, the set of light source trigger delay times includes multiple different initial light source trigger delay times. As an example, firstly, the minimum trigger delay time of a light source is estimated, and then the minimum trigger delay time is gradually increased to obtain multiple different initial light source trigger delay times, which cover the typical response delay range that the light source may have. The setting of this set can be initialized based on the datasheet parameters of the light source device or historical experience data; this application does not specifically limit this.
[0040] B: For each initial light source trigger delay time in the set of light source trigger delay times, the initial sensor trigger delay time is gradually adjusted from the initial value. After each adjustment, the light source is controlled to perform light emission operation according to the initial light source trigger delay time. At the same time, the light intensity sensor is controlled to perform light intensity acquisition based on the currently adjusted initial sensor trigger delay time and record the corresponding acquired light intensity value.
[0041] In the specific implementation of the above steps, for each initial light source trigger delay time in the set of light source trigger delay times, the initial sensor trigger delay time is gradually adjusted from the initial value. Here, the initial value can be set to 0 μs, and starting from this initial value, it is gradually increased to a certain upper limit in fixed steps (such as 1 μs), thereby traversing a complete sensor delay search interval.
[0042] For each adjusted initial sensor trigger delay time, the core controller coordinates the light source controller and the sensor controller. The light source controller controls the light source to perform emission operation according to the initial light source trigger delay time, while the sensor controller controls the light intensity sensor to perform light intensity acquisition based on the currently adjusted initial sensor trigger delay time. After completing one light intensity acquisition, the light intensity sensor feeds back the acquired light intensity value to the core controller, which associates and records the acquired light intensity value with the current initial light source trigger delay time.
[0043] C: Based on the recorded multiple light intensity values, plot the relationship curve between the light intensity value and the initial sensor trigger delay time, and determine the maximum light intensity value in the relationship curve and its corresponding optimal sensor trigger delay time.
[0044] Regarding step C above, in practical implementation, after scanning the entire sensor trigger delay time search interval for the initial light source trigger delay time, the core controller obtains a set of data corresponding to the acquired light intensity value and the initial sensor trigger delay time. Based on this data, a relationship curve of "acquired light intensity value - initial sensor trigger delay time" can be plotted. The core controller analyzes this curve to determine the change in the initial sensor trigger delay time corresponding to the maximum acquired light intensity value on the curve, and defines this value as the optimal sensor trigger delay time under the condition of the maximum acquired light intensity value.
[0045] D: Summarize the maximum light intensity values corresponding to all initial light source trigger delay times, and determine the initial light source trigger delay time corresponding to the largest light intensity value among multiple maximum light intensity values and its corresponding optimal sensor trigger delay time as the preset light source trigger delay time and the preset sensor trigger delay time, respectively.
[0046] Regarding step D above, in specific implementation, steps B and C are repeated until all initial light source trigger delay times in the set of light source trigger delay times have been traversed. Ultimately, the core controller obtains an optimal sensor trigger delay time corresponding to each of the multiple initial light source trigger delay times, as well as the maximum achievable light intensity value for each combination. The core controller performs a horizontal comparison of all these maximum light intensity values and selects the one with the largest value. The initial light source trigger delay time corresponding to this maximum value and its paired optimal sensor trigger delay time are determined as the final results of this calibration process, namely, the preset light source trigger delay time and the preset sensor trigger delay time.
[0047] Thus, based on steps A-D above, joint optimization of the light source emission timing and sensor acquisition timing is achieved. This method no longer relies on the nominal average response time of the devices, but instead finds the true optimal operating point of the light source and light intensity sensor through actual measurement, effectively compensating for the complex and non-ideal dynamic response characteristics between the light source and the sensor. This method does not rely on nominal device parameters or manual experience for debugging, and can adapt to the actual response characteristics of different types of light sources and sensors, improving calibration efficiency and convergence stability, and ensuring that the system always operates at its highest sensitivity.
[0048] As an optional embodiment, after the light intensity sensor acquires the light intensity value of the light source based on the light intensity acquisition command, the light intensity detection method further includes: When the core controller detects that the light intensity value has not reached the preset light intensity peak, it adjusts the preset light source trigger delay time and the preset sensor trigger delay time respectively, and returns to the step of sending working instructions to the light source controller and the sensor controller.
[0049] Regarding the above steps, in specific implementation, after completing a standard light intensity detection process, the core controller receives light intensity feedback data from the light source sensor and determines whether the value reaches the preset light intensity peak. This preset light intensity peak can be determined based on the light source model. If it does not meet the standard, it is determined that the current system timing is not fully aligned, and there may be new delay deviations. At this time, the core controller will activate a compensation mechanism, first attempting to fine-tune the existing preset light source trigger delay time and preset sensor trigger delay time, for example, by increasing or decreasing it by 2μs. After adjustment, the core controller sends working instructions to the light source controller and sensor controller again to restart a new round of detection until the detected light intensity value reaches the preset light intensity peak. This closed-loop mechanism can dynamically adapt to performance changes caused by factors such as component aging and temperature drift during long-term equipment operation, ensuring the stability and reliability of the detection results.
[0050] This application provides a light intensity detection method applied to a light intensity detection system. The light intensity detection system includes a core controller, a light source controller, a sensor controller, a light source, and a light intensity sensor. When light intensity detection begins, the core controller sends a working instruction to the light source controller and the sensor controller. In response to the working instruction, the light source controller sends a light emission instruction to the light source based on a preset sensor trigger delay time at the current time reference, causing the light source to emit light based on the light emission instruction. In response to the working instruction, the sensor controller sends a light intensity acquisition instruction to the light intensity sensor based on a preset light source trigger delay time at the current time reference, causing the light intensity sensor to acquire the light intensity value of the light source based on the light intensity acquisition instruction.
[0051] This application achieves precise compensation for light source response delay and sensor acquisition delay by configuring independent preset light source trigger delay time and preset sensor trigger delay time, and controlling the light source emission and sensor acquisition actions separately based on a unified current time reference. It solves the problem of sampling time deviating from the peak light intensity caused by fixed or asynchronous triggering methods in existing technologies. This application effectively avoids measurement errors caused by inherent hardware delays and significantly improves the accuracy of light intensity detection.
[0052] Please see Figure 2 , Figure 2 This is one of the structural schematic diagrams of a light intensity detection system provided in the embodiments of this application. Figure 3 This is a second schematic diagram of a light intensity detection system provided in an embodiment of this application. Figure 2 As shown, the light intensity detection system 200 includes: a core controller 201, a light source controller 202, a sensor controller 203, a light source 204, and a light intensity sensor 205; The core controller 201 is used to send working instructions to the light source controller 202 and the sensor controller 203 when the light intensity detection starts; The light source controller 202 is used to respond to the working instruction and, based on a preset sensor trigger delay time, send a light emission instruction to the light source 204 under the current time reference, so that the light source 204 emits light based on the light emission instruction; The sensor controller 203 is configured to respond to the working instruction and, based on the current time reference, send a light intensity acquisition instruction to the light intensity sensor 205 based on a preset light source trigger delay time, so that the light intensity sensor 205 acquires the light intensity value of the light source based on the light intensity acquisition instruction.
[0053] Furthermore, the core controller 201 is also used to determine the preset light source trigger delay time and the preset sensor trigger delay time through the following steps: Obtain a pre-set set of light source trigger delay times; wherein, the set of light source trigger delay times includes multiple different initial light source trigger delay times; For each initial light source trigger delay time in the set of light source trigger delay times, the initial sensor trigger delay time is gradually adjusted from the initial value. After each adjustment, the light source 204 is controlled to perform light emission operation according to the initial light source trigger delay time, and the light intensity sensor 203 is controlled to perform light intensity acquisition based on the currently adjusted initial sensor trigger delay time, and the corresponding acquired light intensity value is recorded. Based on the recorded multiple light intensity values, a curve showing the relationship between the light intensity value and the initial sensor trigger delay time was plotted, and the maximum light intensity value in the curve and its corresponding optimal sensor trigger delay time were determined. Summarize the maximum light intensity values corresponding to all initial light source trigger delay times, and determine the initial light source trigger delay time corresponding to the largest light intensity value among the multiple maximum light intensity values and its corresponding optimal sensor trigger delay time as the preset light source trigger delay time and the preset sensor trigger delay time, respectively.
[0054] Furthermore, after the light intensity sensor 205 acquires the light intensity value of the light source based on the light intensity acquisition command, the core controller 201 is also used to: When the light intensity value is detected to be below the preset light intensity peak, the preset light source trigger delay time and the preset sensor trigger delay time are adjusted respectively, and the process returns to the step of sending working instructions to the light source controller and the sensor controller.
[0055] Furthermore, such as Figure 3 As shown, the light intensity detection system 200 also includes a synchronization signal generator 206, which is used to: Before performing the light intensity detection, the synchronization signal generator 206 is used to: A periodic synchronization signal is generated and simultaneously sent to the light source controller 202 and the sensor controller 203, so that the light source controller 202 and the sensor controller 203 establish the current time reference.
[0056] Furthermore, the periodic synchronization signal is a square wave signal, and the light source controller 202 and the sensor controller 203 determine the time reference by detecting the rising edge or falling edge of the periodic synchronization signal. The signal transmission path length from the synchronization signal generator 206 to the light source controller 202 is equal to the signal transmission path length to the sensor controller 203, and the same transmission medium and interface protocol are used to ensure that the periodic synchronization signal arrives at the light source controller 202 and the sensor controller 203 at the same time.
[0057] Please see Figure 4 , Figure 4 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Figure 4 As shown, the electronic device 400 includes a processor 410, a memory 420, and a bus 430.
[0058] The memory 420 stores machine-readable instructions executable by the processor 410. When the electronic device 400 is running, the processor 410 communicates with the memory 420 via the bus 430. When the machine-readable instructions are executed by the processor 410, they can perform the operations described above. Figure 1 The steps of the light intensity detection method in the illustrated method embodiment can be found in the method embodiment for specific implementation, and will not be repeated here.
[0059] This application also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, can perform the above-described actions. Figure 1 The steps of the light intensity detection method in the illustrated method embodiment can be found in the method embodiment for specific implementation, and will not be repeated here.
[0060] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.
[0061] In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Additionally, the shown or discussed mutual couplings, direct couplings, or communication connections may be through some communication interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.
[0062] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.
[0063] In addition, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.
[0064] If the aforementioned functions are implemented as software functional units and sold or used as independent products, they can be stored in a processor-executable, non-volatile, computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.
[0065] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The scope of protection of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the scope of the technology disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.
Claims
1. A method of detecting an intensity of illumination, characterized by, The light intensity detection method is applied to a light intensity detection system, and the light intensity detection system comprises a core controller, a light source controller, a sensor controller, a light source, and a light intensity sensor. The light intensity detection method comprises: When the light intensity detection starts, the core controller sends a working instruction to the light source controller and the sensor controller; The light source controller responds to the working instruction and sends a light-emitting instruction to the light source based on a preset sensor trigger delay time under a current time reference, so that the light source emits light based on the light-emitting instruction; The sensor controller responds to the working instruction and sends a light intensity collection instruction to the light intensity sensor based on a preset light source trigger delay time under the current time reference, so that the light intensity sensor collects the light intensity value of the light source based on the light intensity collection instruction.
2. The light intensity detection method according to claim 1, wherein The core controller determines the preset light source trigger delay time and the preset sensor trigger delay time by the following steps: Obtain a preset light source trigger delay time set; wherein the light source trigger delay time set comprises a plurality of different initial light source trigger delay times; For each initial light source trigger delay time in the light source trigger delay time set, the initial sensor trigger delay time is adjusted step by step from the initial value, and after each adjustment, the light source is controlled to perform light-emitting operation according to the initial light source trigger delay time, while the light intensity sensor is controlled to perform light intensity collection based on the current adjusted initial sensor trigger delay time, and the corresponding collected light intensity value is recorded; Based on the recorded multiple collected light intensity values, a relationship curve of the collected light intensity value changing with the initial sensor trigger delay time is drawn, and the maximum collected light intensity value and its corresponding optimal sensor trigger delay time in the relationship curve are determined; The maximum collected light intensity value corresponding to each initial light source trigger delay time is summarized, and the initial light source trigger delay time corresponding to the maximum collected light intensity value in the multiple maximum collected light intensity values and its corresponding optimal sensor trigger delay time are determined as the preset light source trigger delay time and the preset sensor trigger delay time, respectively.
3. The light intensity detection method according to claim 1, wherein After the light intensity sensor collects the light intensity value of the light source based on the light intensity collection instruction, the light intensity detection method further comprises: When the core controller detects that the light intensity value does not reach a preset light intensity peak value, the preset light source trigger delay time and the preset sensor trigger delay time are adjusted respectively, and the step of sending the working instruction to the light source controller and the sensor controller is returned.
4. The light intensity detection method according to claim 1, wherein The light intensity detection system further comprises a synchronization signal generator, and before the light intensity detection, the light intensity detection method further comprises: The synchronization signal generator generates a periodic synchronization signal and sends the periodic synchronization signal to the light source controller and the sensor controller at the same time, so that the light source controller and the sensor controller establish the current time reference.
5. The light intensity detection method according to claim 4, wherein The periodic synchronization signal is a square wave signal, and the light source controller and the sensor controller determine the time reference by detecting the rising edge or the falling edge of the periodic synchronization signal; The signal transmission path length from the synchronization signal generator to the light source controller is equal to the signal transmission path length to the sensor controller, and the same transmission medium and interface protocol are used to ensure that the periodic synchronization signal reaches the light source controller and the sensor controller at the same time.
6. An illumination intensity detection system characterized by, The light intensity detection system comprises a core controller, a light source controller, a sensor controller, a light source, and a light intensity sensor. The core controller is configured to send a work instruction to the light source controller and the sensor controller when light intensity detection starts. The light source controller is configured to, in response to the work instruction, send a light-emitting instruction to the light source at a current time reference based on a preset sensor trigger delay time, so that the light source emits light based on the light-emitting instruction. The sensor controller is configured to, in response to the work instruction, send a light intensity acquisition instruction to the light intensity sensor at the current time reference based on a preset light source trigger delay time, so that the light intensity sensor acquires the light intensity value of the light source based on the light intensity acquisition instruction.
7. The light intensity detection system of claim 6, wherein The core controller is further configured to determine the preset light source trigger delay time and the preset sensor trigger delay time by the following steps: obtain a set of preset light source trigger delay times, wherein the set of light source trigger delay times comprises a plurality of different initial light source trigger delay times; for each initial light source trigger delay time in the set of light source trigger delay times, gradually adjust an initial sensor trigger delay time from an initial value, and after each adjustment, control the light source to perform light-emitting operation according to the initial light source trigger delay time, while controlling the light intensity sensor to perform light intensity acquisition based on the currently adjusted initial sensor trigger delay time, and recording the corresponding acquisition light intensity value; based on the recorded plurality of acquisition light intensity values, draw a relationship curve of acquisition light intensity value changing with initial sensor trigger delay time, and determine the maximum acquisition light intensity value in the relationship curve and the corresponding optimal sensor trigger delay time; summarize the maximum acquisition light intensity values corresponding to all initial light source trigger delay times, and determine the initial light source trigger delay time corresponding to the maximum acquisition light intensity value in the plurality of maximum acquisition light intensity values and the corresponding optimal sensor trigger delay time as the preset light source trigger delay time and the preset sensor trigger delay time, respectively.
8. The light intensity detection system of claim 6, wherein, After the light intensity sensor acquires the light intensity value of the light source based on the light intensity acquisition instruction, the core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller.
9. An electronic device, comprising: The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source controller and the sensor controller. The core controller is further configured to: when it is detected that the light intensity value does not reach a preset light intensity peak value, adjust the preset light source trigger delay time and the preset sensor trigger delay time, respectively, and return to the step of sending a work instruction to the light source A processor, a memory, and a bus, the memory storing machine readable instructions executable by the processor, when the electronic device is running, the processor and the memory communicating through the bus, the machine readable instructions being executed by the processor to perform the steps of the light intensity detection method of any one of claims 1 to 5.
10. A computer-readable storage medium, characterized in that, A computer readable storage medium storing a computer program, the computer program being executed by the processor to perform the steps of the light intensity detection method of any one of claims 1 to 5.