Voltage sampling method, voltage sampling circuit and radio frequency power supply equipment

Abstract

The invention provides a voltage sampling method, a voltage sampling circuit and radio frequency power supply equipment, the voltage sampling method is applied to the voltage sampling circuit, and the voltage sampling circuit comprises a sampling unit, an analog-to-digital conversion unit and a control unit. The voltage sampling method comprises the following steps: continuously acquiring voltage sampling values output by an analog-to-digital conversion unit at a first preset interval, and determining whether the voltage sampling value acquired each time is a saturated value or an unsaturated value; and when each voltage sampling value is a saturation value, the sampling coefficient of the sampling unit in a time period from the current acquisition of the voltage sampling value to the next acquisition of the voltage sampling value is controlled to be reduced. And when each voltage sampling value is an unsaturated value, controlling the sampling unit to increase the sampling coefficient in a time period from the current acquisition of the voltage sampling value to the next acquisition of the voltage sampling value, or determining that the voltage sampling value is a target voltage sampling value of the radio frequency electric energy. According to the invention, the voltage sampling requirement of radio frequency electric energy can be met.

Description

Technical Field

[0001] This application relates to the field of radio frequency technology, and in particular to a voltage sampling method, a voltage sampling circuit, and a radio frequency power supply device. Background Technology

[0002] Currently, with the application and popularization of radio frequency (RF) technology, RF power supply equipment is increasingly used in various fields. During the application of RF power supply equipment, real-time voltage sampling of RF power is generally required. However, the power of RF power often fluctuates significantly, making existing voltage sampling methods unable to meet the voltage sampling requirements of RF power. Therefore, how to meet the voltage sampling requirements of RF power when its power continuously fluctuates has become a problem that needs to be considered. Summary of the Invention

[0003] This application provides a voltage sampling method, a voltage sampling circuit, and an RF power supply device, which can meet the voltage sampling requirements of RF power.

[0004] In a first aspect, a voltage sampling method is provided, wherein the voltage sampling method is applied to a voltage sampling circuit for sampling the voltage of radio frequency power, the voltage sampling circuit including a sampling unit, an analog-to-digital conversion unit and a control unit, the sampling unit and the analog-to-digital conversion unit being sequentially disposed in the transmission path of the radio frequency power, and the sampling unit having an adjustable sampling coefficient.

[0005] The voltage sampling method includes: The voltage sample value output by the analog-to-digital conversion unit is continuously acquired at a first preset interval, and it is determined whether the voltage sample value acquired each time is a saturated value or a non-saturated value.

[0006] When the voltage sample value is saturated, the sampling coefficient of the sampling unit is reduced during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition.

[0007] When the voltage sample value is non-saturated, the sampling coefficient of the sampling unit is increased during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition, or the voltage sample value is determined to be the target voltage sample value of the radio frequency power.

[0008] In one possible implementation, when each voltage sample value is a non-saturated value, controlling the sampling unit to increase the sampling coefficient during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition, or determining that this voltage sample value is the target voltage sample value for radio frequency power, includes: When each voltage sample value is a non-saturated value and this voltage sample value is within the range of the first sample value, the sampling coefficient of the sampling unit is increased during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition.

[0009] When each voltage sample value is a non-saturated value and is within the range of the second sample value, the voltage sample value is determined to be the target voltage sample value of the radio frequency power.

[0010] The minimum value within the second sampling value range is equal to the maximum value within the first sampling value range.

[0011] In one possible implementation, the sampling unit includes a voltage divider module and an isolation module sequentially disposed on the radio frequency power supply. The voltage divider module has an adjustable voltage divider coefficient, the isolation module has an adjustable gain coefficient, and the sampling coefficient is the product of the voltage divider coefficient and the sampling coefficient.

[0012] Wherein, when each voltage sample value is a saturation value, controlling the sampling unit to reduce the sampling coefficient during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition includes: When the voltage sample value is saturated, the voltage division coefficient of the voltage divider module and / or the gain coefficient of the isolation module during the time period from the current voltage sample value to the next voltage sample value are controlled and adjusted to reduce the sampling coefficient of the sampling unit during the time period from the current voltage sample value to the next voltage sample value.

[0013] In one possible implementation, when each voltage sample value is a saturation value, controlling the voltage divider module to adjust the voltage divider coefficient during the time interval between the current voltage sample value acquisition and the next voltage sample value acquisition, and / or the isolation module to adjust the gain coefficient during the time interval between the current voltage sample value acquisition and the next voltage sample value acquisition, to reduce the sampling coefficient of the sampling unit during the time interval between the current voltage sample value acquisition and the next voltage sample value acquisition, includes: When the voltage sample value is saturated, the voltage divider module is controlled to reduce the voltage divider coefficient during the time period from the current voltage sample value to the next voltage sample value, and the isolation module is controlled to reduce the gain coefficient during the time period from the current voltage sample value to the next voltage sample value, so as to reduce the sampling coefficient of the sampling unit during the time period from the current voltage sample value to the next voltage sample value.

[0014] In one possible implementation, the voltage divider module includes a first resistor and a voltage divider resistor assembly, and the isolation module includes an operational amplifier, a ground resistor, and a feedback resistor assembly. The voltage division coefficient is related to the resistance value of the first resistor and the resistance value of the voltage divider resistor assembly, and the gain coefficient is related to the resistance value of the ground resistor and the resistance value of the feedback resistor assembly. The resistance value of the voltage divider resistor assembly is adjustable to make the voltage division coefficient adjustable, and the resistance value of the feedback resistor assembly is adjustable to make the gain coefficient adjustable.

[0015] The voltage division coefficient of the control and adjustment voltage divider module during the time period from the current voltage sampling value acquisition to the next voltage sampling value acquisition, and / or the gain coefficient of the isolation module during the time period from the current voltage sampling value acquisition to the next voltage sampling value acquisition, include: Control the resistance value of the voltage divider resistor assembly to adjust the voltage division coefficient of the voltage divider module during the time period from the current voltage sample value to the next voltage sample value, and / or control the resistance value of the feedback resistor assembly to adjust the gain coefficient of the isolation module during the time period from the current voltage sample value to the next voltage sample value.

[0016] In one possible implementation, the radio frequency source is used to output the radio frequency power, and the radio frequency source has a first output mode and a second output mode.

[0017] Wherein, when each voltage sample value is a saturation value, controlling the sampling unit to reduce the sampling coefficient during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition includes: When the voltage sample value is saturated and the RF source is in the first output mode, the control adjusts the sampling coefficient of the sampling unit to within the first coefficient range during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition.

[0018] When the voltage sample value is saturated and the RF source is in the second output mode, the control adjusts the sampling coefficient of the sampling unit to within the range of the second coefficient during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition.

[0019] In one possible implementation, determining whether each acquired voltage sample value is a saturated or unsaturated value includes: Each time the voltage sample value equals the sampling threshold, the voltage sample value is determined to be the saturation value.

[0020] When a voltage sample value is not equal to the sampling threshold, the voltage sample value is determined to be an unsaturated value.

[0021] Secondly, a voltage sampling circuit is also provided, which is used to sample the voltage of radio frequency (RF) power. The voltage sampling circuit includes a sampling unit, an analog-to-digital (ADC) conversion unit, and a control unit. The sampling unit and the ADC are sequentially arranged in the transmission path of the RF power. The sampling unit has an adjustable sampling coefficient. The control unit is used to continuously acquire the voltage sample value output by the ADC at a first preset interval, determine whether each acquired voltage sample value is a saturated value or a non-saturated value, and when the voltage sample value is the saturated value, control to decrease the sampling coefficient of the sampling unit during the time period from the current acquisition of the voltage sample value to the next acquisition of the voltage sample value; and when the voltage sample value is the non-saturated value, control to increase the sampling coefficient of the sampling unit during the time period from the current acquisition of the voltage sample value to the next acquisition of the voltage sample value, or determine that this voltage sample value is the target voltage sample value of the RF power.

[0022] In one possible implementation, the sampling unit includes a voltage divider module and an isolation module sequentially disposed in the transmission path of the radio frequency power. The voltage divider module has an adjustable voltage division coefficient, and the isolation module has an adjustable gain coefficient. The sampling coefficient is the product of the voltage division coefficient and the sampling coefficient. The control unit is configured to, when each voltage sample value is the non-saturation value, control and adjust the voltage division coefficient of the sampling unit during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition, and / or the gain coefficient of the isolation module during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition, to reduce the sampling coefficient of the sampling unit during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition.

[0023] Thirdly, a radio frequency (RF) power supply device is also provided, comprising an RF source and a voltage sampling circuit. The voltage sampling circuit is used to sample the voltage of the RF power. The voltage sampling circuit includes a sampling unit, an analog-to-digital converter (ADC), and a control unit. The sampling unit and the ADC are sequentially arranged in the transmission path of the RF power. The sampling unit has an adjustable sampling coefficient. The control unit is used to continuously acquire the voltage sample value output by the ADC at a first preset interval, determine whether each acquired voltage sample value is a saturated value or a non-saturated value, and when the voltage sample value is the saturated value, control to decrease the sampling coefficient of the sampling unit during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition; and when the voltage sample value is the non-saturated value, control to increase the sampling coefficient of the sampling unit during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition, or determine that this voltage sample value is the target voltage sample value of the RF power.

[0024] The voltage sampling method, voltage sampling circuit, and RF power supply device of this application can determine whether each acquired voltage sample value meets the requirements by determining whether the acquired voltage sample value is a saturated value or a non-saturated value. When the voltage sample value is a saturated value, the sampling coefficient of the sampling unit during the time period from the current voltage sample value to the next voltage sample value can be controlled to be reduced, so that the voltage sample value is closer to usable. When the voltage sample value is a non-saturated value, the sampling coefficient of the sampling unit during the time period from the current voltage sample value to the next voltage sample value can be controlled to be increased, so that the voltage sample value is also closer to usable. Alternatively, the voltage sample value can be directly determined to be usable, that is, the voltage sample value is the target voltage sample value of the RF power, so as to meet the voltage sampling requirements of the RF power. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this application or the background art, the accompanying drawings used in the embodiments of this application or the background art will be described below.

[0026] Figure 1 This is a flowchart of a voltage sampling method in some embodiments of this application.

[0027] Figure 2 for Figure 1 The sub-flowchart of step S300 is shown.

[0028] Figure 3 This is another flowchart of the voltage sampling method in some embodiments of this application.

[0029] Figure 4This is yet another flowchart of the voltage sampling method in some embodiments of this application.

[0030] Figure 5 This is another flowchart of the voltage sampling method in some embodiments of this application.

[0031] Figure 6 for Figure 1 The sub-flowchart of step S200 is shown.

[0032] Figure 7 for Figure 1 The sub-flowchart of step S100 is shown.

[0033] Figure 8 This is a schematic diagram of a voltage sampling circuit in some embodiments of this application.

[0034] Figure 9 This is a schematic diagram of the sampling unit and control unit in some embodiments of this application.

[0035] Figure 10 This is another schematic diagram of the sampling unit and control unit in some embodiments of this application.

[0036] Figure 11 This is a schematic diagram of a radio frequency power supply device in some embodiments of this application.

[0037] Explanation of reference numerals in the attached diagram: 10, voltage sampling circuit; 100, sampling unit; 110, voltage divider module; R1, first resistor; R2, voltage divider resistor assembly; 120, isolation module; OP, operational amplifier; R3, grounding resistor; R4, feedback resistor assembly; GND, ground; 200, analog-to-digital conversion unit; 300, control unit; 20, radio frequency source; 1000, radio frequency power supply device. Detailed Implementation

[0038] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0039] In the description of the embodiments of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0040] In the description of the embodiments of this application, it should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in orders other than those illustrated or described herein.

[0041] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion, such that a process, method, system, product, or server that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such processes, methods, products, or devices.

[0042] Please see Figure 1 , Figure 1 This is a flowchart of a voltage sampling method in some embodiments of this application. This application provides a voltage sampling method applied to a voltage sampling circuit for sampling radio frequency (RF) power. The voltage sampling circuit includes a sampling unit, an analog-to-digital (ADC) conversion unit, and a control unit. The sampling unit and the ADC are sequentially arranged in the RF power transmission path. The sampling unit has an adjustable sampling coefficient. Wherein, as... Figure 1 As shown, the voltage sampling method includes: Step S100: Continuously acquire voltage sample values ​​output by the analog-to-digital conversion unit at a first preset interval, and determine whether the voltage sample value acquired each time is a saturated value or a non-saturated value.

[0043] Step S200: When the voltage sample value is saturated each time, control the sampling unit to reduce the sampling coefficient during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition.

[0044] Step S300: When the voltage sample value is a non-saturated value each time, control the sampling unit to increase the sampling coefficient during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition, or determine that this voltage sample value is the target voltage sample value of the radio frequency power.

[0045] Therefore, the voltage sampling method described above in this application can determine whether each voltage sample value meets the requirements by determining whether the voltage sample value obtained each time is a saturated value or a non-saturated value. When the voltage sample value is a saturated value, the sampling coefficient of the sampling unit during the time period from the current voltage sample value to the next voltage sample value can be controlled to be reduced, so that the voltage sample value is closer to usable. When the voltage sample value is a non-saturated value, the sampling coefficient of the sampling unit during the time period from the current voltage sample value to the next voltage sample value can also be controlled to be increased, so that the voltage sample value is closer to usable. Alternatively, it can be directly determined that the voltage sample value is usable, that is, the voltage sample value is the target voltage sample value of the radio frequency power, so as to meet the voltage sampling requirements of the radio frequency power.

[0046] Specifically, analog-to-digital conversion units can generally only acquire voltage sample values ​​within a certain range, such as 0-1V. When the range is exceeded, a saturation value will be displayed, and the true voltage sample value cannot be determined. When the power of the radio frequency power fluctuates continuously, the voltage value obtained by the sampling unit based on the sampling coefficient may not be within the acquisition range of the analog-to-digital conversion unit, thus failing to meet the voltage sampling requirements of the radio frequency power.

[0047] In particular, the voltage sampling method described above in this application controls the sampling coefficient of the sampling unit based on the determination result of whether the voltage sample value obtained each time is a saturated value or a non-saturated value, and controls the sampling coefficient of the sampling unit to sample during the time period between the current voltage sample value and the next voltage sample value.

[0048] In particular, the sampling frequency of the sampling unit can be greater than the first preset interval.

[0049] Please refer to the following: Figure 2 , Figure 2 for Figure 1 The sub-flowchart of step S300 is shown below. Figure 1 , Figure 2 As shown, step S300: When the voltage sample value is a non-saturated value, control the sampling unit to increase the sampling coefficient during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition, or determine that this voltage sample value is the target voltage sample value of the radio frequency power, including: Step S310: When each voltage sample value is a non-saturated value and the voltage sample value is within the range of the first sample value, control the increase of the sampling coefficient of the sampling unit during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition.

[0050] Step S320: When the voltage sample value is a non-saturated value and the voltage sample value is within the range of the second sample value, determine the voltage sample value as the target voltage sample value of the radio frequency power.

[0051] The minimum value within the second sampling value range is equal to the maximum value within the first sampling value range.

[0052] Therefore, the voltage sampling method described above in this application can determine whether the voltage sampling value is too small when the voltage sampling value is not saturated each time, based on the range of the voltage sampling value. If the voltage sampling value is too small, it may not meet the subsequent calculation requirements, and thus cannot meet the voltage sampling requirements of radio frequency power. Therefore, by controlling and increasing the sampling coefficient of the sampling unit during the time period from the current voltage sampling value to the next voltage sampling value, the voltage sampling value can be made closer to usable.

[0053] Specifically, the first sampling value can be in the range of 0-0.5V, and the second sampling value can be in the range of 0.5-1V.

[0054] Please refer to the following: Figure 3 , Figure 3 This is another flowchart of a voltage sampling method in some embodiments of this application. The sampling unit includes a voltage divider module and an isolation module sequentially disposed in the radio frequency power supply. The voltage divider module has an adjustable voltage division coefficient, the isolation module has an adjustable gain coefficient, and the sampling coefficient is the product of the voltage division coefficient and the sampling coefficient. Wherein, as... Figure 1 , Figure 3 As shown, step S200: When the voltage sample value is a saturation value each time, control the sampling unit to reduce the sampling coefficient during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition, including: Step S210: When the voltage sample value is saturation value each time, control the voltage divider module to adjust the voltage divider coefficient during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition and / or the isolation module to adjust the gain coefficient during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition, so as to reduce the sampling coefficient of the sampling unit during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition.

[0055] Therefore, the voltage sampling method described above in this application can reduce the sampling coefficient of the sampling unit during the time period from the current voltage sampling value to the next voltage sampling value by controlling the voltage division coefficient of the voltage divider module or the gain coefficient of the isolation module during the time period from the current voltage sampling value to the next voltage sampling value, thereby enabling adjustment as needed.

[0056] Please refer to the following: Figure 4 , Figure 4 This is yet another flowchart of the voltage sampling method in some embodiments of this application. For example... Figure 3 , Figure 4 As shown, step S210: When each voltage sample value is a saturation value, control the voltage divider module to adjust the voltage divider coefficient during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition and / or the isolation module to adjust the gain coefficient during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition, so as to reduce the sampling coefficient of the sampling unit during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition, including: Step S211: When the voltage sample value is saturated each time, control the voltage divider module to reduce the voltage divider coefficient during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition, and control the isolation module to reduce the gain coefficient during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition, so as to reduce the sampling coefficient of the sampling unit during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition.

[0057] Therefore, the voltage sampling method described above in this application, by simultaneously controlling and reducing the voltage division coefficient of the voltage divider module during the time period from the current voltage sampling value to the next voltage sampling value, and controlling and reducing the gain coefficient of the isolation module during the time period from the current voltage sampling value to the next voltage sampling value, can quickly reduce the sampling coefficient of the sampling unit during the time period from the current voltage sampling value to the next voltage sampling value. Especially when radio frequency power is applied to plasma load and there is a sudden and large change in power, generally when the power increases rapidly, the voltage sampling value can quickly approach usable value, and damage to the analog-to-digital conversion unit can also be avoided.

[0058] Please refer to the following: Figure 5 , Figure 5 This is another flowchart illustrating the voltage sampling method in some embodiments of this application. The voltage divider module includes a first resistor and a voltage divider resistor assembly. The isolation module includes an operational amplifier, a grounding resistor, and a feedback resistor assembly. The voltage division coefficient is related to the resistance value of the first resistor and the resistance value of the voltage divider resistor assembly. The gain coefficient is related to the resistance value of the grounding resistor and the resistance value of the feedback resistor assembly. The resistance value of the voltage divider resistor assembly is adjustable to make the voltage division coefficient adjustable, and the resistance value of the feedback resistor assembly is adjustable to make the gain coefficient adjustable. For example... Figure 3 , Figure 5As shown, the voltage division coefficient of the control and adjustment voltage divider module during the time period from the current voltage sampling value acquisition to the next voltage sampling value acquisition, and / or the gain coefficient of the isolation module during the time period from the current voltage sampling value acquisition to the next voltage sampling value acquisition, in step S210, include: Step S212 controls and adjusts the resistance value of the voltage divider resistor assembly to adjust the voltage division coefficient of the voltage divider module during the time period from the current voltage sampling value to the next voltage sampling value, and / or controls and adjusts the resistance value of the feedback resistor assembly to adjust the gain coefficient of the isolation module during the time period from the current voltage sampling value to the next voltage sampling value.

[0059] That is, such as Figure 3 , Figure 5 As shown, step S210: When each voltage sampling value is a saturation value, control the voltage division coefficient of the voltage divider module during the time period from the current voltage sampling value to the next voltage sampling value and / or the gain coefficient of the isolation module during the time period from the current voltage sampling value to the next voltage sampling value, so as to reduce the sampling coefficient of the sampling unit during the time period from the current voltage sampling value to the next voltage sampling value. Specifically, this may include: when each voltage sampling value is a saturation value, controlling the resistance value of the voltage divider resistor component to adjust the voltage division coefficient of the voltage divider module during the time period from the current voltage sampling value to the next voltage sampling value, and / or controlling the resistance value of the feedback resistor component to adjust the gain coefficient of the isolation module during the time period from the current voltage sampling value to the next voltage sampling value.

[0060] Therefore, the voltage sampling method described above in this application can adjust the sampling coefficient by controlling the voltage division coefficient of the voltage divider module during the time period from the current voltage sampling value to the next voltage sampling value when using a resistor voltage divider for sampling, and can adjust the sampling coefficient by controlling the gain coefficient of the isolation module during the time period from the current voltage sampling value to the next voltage sampling value when using an operational amplifier for isolation.

[0061] In this configuration, one end of the first resistor can be placed in the radio frequency power transmission path, and the other end of the first resistor is grounded through a voltage divider resistor assembly. The positive input terminal of the operational amplifier can be connected to the connection point between the other end of the first resistor and the voltage divider resistor assembly. The negative input terminal of the operational amplifier can be grounded through a grounding resistor. The output terminal of the operational amplifier can be connected to an analog-to-digital converter unit. One end of the feedback resistor assembly can be connected to the connection point between the negative input terminal of the operational amplifier and the grounding resistor, and the other end of the feedback resistor assembly can be connected to the connection point between the output terminal of the operational amplifier and the analog-to-digital converter unit.

[0062] Furthermore, the voltage divider resistor assembly may include multiple parallel first gating branches, each first gating branch being selectively connected to the connection point between the other end of the first resistor and the positive input terminal of the operational amplifier. Each first gating branch has a resistance value, thereby making the resistance value of the voltage divider resistor assembly adjustable. The feedback resistor assembly may include multiple parallel second gating branches, each second gating branch being selectively connected to the connection point between the negative input terminal and the output terminal of the operational amplifier. Each second gating branch has a resistance value, thereby making the resistance value of the feedback resistor assembly adjustable.

[0063] Furthermore, the resistance value of each first-selection branch can be the same or different. The resistance value of each second-selection branch can also be the same or different.

[0064] Among them, such as Figure 3 , Figure 4 , Figure 5 For details of step S100 shown, please refer to [reference needed]. Figure 1 The details of step S100 shown will not be repeated here.

[0065] Please refer to the following: Figure 6 , Figure 6 for Figure 1 The sub-flowchart of step S200 is shown. The RF source is used to output RF power, and the RF source has a first output mode and a second output mode. Wherein, as... Figure 1 , Figure 6 As shown, step S200: When the voltage sample value is a saturation value each time, control the sampling unit to reduce the sampling coefficient during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition, including: Step S220: When the voltage sample value is a saturation value and the RF source is in the first output mode, the control adjusts the sampling coefficient of the sampling unit to within the first coefficient range during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition.

[0066] Step S230: When the voltage sample value is a saturation value and the RF source is in the second output mode, the control adjusts the sampling coefficient of the sampling unit to within the range of the second coefficient during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition.

[0067] Among them, the power value of the radio frequency power output by the radio frequency source in the first output mode can be greater than the power value of the radio frequency power output by the radio frequency source in the second output mode, and the maximum value in the first coefficient range is equal to the minimum value in the second coefficient range.

[0068] Therefore, the voltage sampling method described in this application is more suitable for acquiring voltage when providing radio frequency (RF) power to a plasma sub-load. It addresses situations where the power value required by the RF power of the plasma sub-load fluctuates significantly, but the general process is predictable; for example, a higher power RF power is needed initially, followed by a lower power RF power. Furthermore, it allows for adjusting the sampling coefficient of the sampling unit to different ranges within the time interval between the current voltage sample value acquisition and the next voltage sample value acquisition, based on the different output modes of the RF source.

[0069] Please refer to the following: Figure 7 , Figure 7 for Figure 1 The sub-flowchart of step S100 is shown below. Figure 1 , Figure 7 As shown, step S100: Determining whether each acquired voltage sample value is a saturated or non-saturated value includes: Step S110: When the voltage sample value is equal to the sampling threshold each time, determine that the voltage sample value is the saturation value.

[0070] Step S120: When the voltage sample value is not equal to the sampling threshold, determine that the voltage sample value is an unsaturated value.

[0071] Therefore, the voltage sampling method described above in this application can determine whether the voltage sample value obtained each time is a saturated value or a non-saturated value by judging the relationship between the voltage sample value and the sampling threshold, that is, determine whether the analog-to-digital conversion unit displays a saturated value and exceeds the acquisition range.

[0072] The voltage sampling method of this application, through the above steps, can adjust the sampling coefficient according to specific needs, so that the voltage sampling value obtained by the analog-to-digital conversion unit is the target voltage sampling value of the radio frequency power, thereby meeting the voltage sampling requirements of the radio frequency power.

[0073] Please see Figure 8 , Figure 8 This is a schematic diagram of a voltage sampling circuit in some embodiments of this application. For example... Figure 8As shown, this application also provides a voltage sampling circuit 10, which is used to sample the voltage of radio frequency power. The voltage sampling circuit 10 includes a sampling unit 100, an analog-to-digital converter 200, and a control unit 300. The sampling unit 100 and the analog-to-digital converter 200 are sequentially arranged in the transmission path of the radio frequency power. The sampling unit 100 has an adjustable sampling coefficient. The control unit 300 is used to continuously acquire the voltage sample value output by the analog-to-digital converter 200 at a first preset interval, determine whether each acquired voltage sample value is a saturated value or a non-saturated value, and when the voltage sample value is saturated, control to decrease the sampling coefficient of the sampling unit 100 during the time period from the current acquisition of the voltage sample value to the next acquisition of the voltage sample value; and when the voltage sample value is non-saturated, control to increase the sampling coefficient of the sampling unit 100 during the time period from the current acquisition of the voltage sample value to the next acquisition of the voltage sample value, or determine that this voltage sample value is the target voltage sample value of the radio frequency power.

[0074] Please refer to the following: Figure 9 , Figure 9 This is a schematic diagram of the sampling unit and control unit in some embodiments of this application. For example... Figure 8 , Figure 9 As shown, the sampling unit 100 includes a voltage divider module 110 and an isolation module 120 sequentially disposed in the transmission path of the radio frequency power. The voltage divider module 110 has an adjustable voltage division coefficient, and the isolation module 120 has an adjustable gain coefficient. The sampling coefficient is the product of the voltage division coefficient and the sampling coefficient. The control unit 300 is used to control and adjust the voltage division coefficient of the sampling unit 100 and / or the gain coefficient of the isolation module 120 during the time period from the current voltage sampling value to the next voltage sampling value when the voltage sampling value is non-saturated, thereby reducing the sampling coefficient of the sampling unit 100 during the time period from the current voltage sampling value to the next voltage sampling value.

[0075] Please refer to the following: Figure 10 , Figure 10 This is another schematic diagram of the sampling unit and control unit in some embodiments of this application. For example... Figure 8 , Figure 9 , Figure 10As shown, the voltage divider module 110 includes a first resistor R1 and a voltage divider resistor assembly R2, and the isolation module 120 includes an operational amplifier OP, a grounding resistor R3, and a feedback resistor assembly R4. The voltage division coefficient is related to the resistance value of the first resistor R1 and the resistance value of the voltage divider resistor assembly R2, and the gain coefficient is related to the resistance value of the grounding resistor R3 and the resistance value of the feedback resistor assembly R4. The resistance value of the voltage divider resistor assembly R2 is adjustable so that the voltage division coefficient is adjustable, and the resistance value of the feedback resistor assembly R4 is adjustable so that the gain coefficient is adjustable.

[0076] like Figure 8 , Figure 9 , Figure 10 As shown, one end of the first resistor R1 can be placed in the radio frequency power transmission path, and the other end of the first resistor R1 is grounded to GND through the voltage divider resistor assembly R2. The positive input terminal of the operational amplifier OP can be connected to the connection point between the other end of the first resistor R1 and the voltage divider resistor assembly R2. The negative input terminal of the operational amplifier OP can be grounded to GND through the grounding resistor R3. The output terminal of the operational amplifier OP can be connected to the analog-to-digital converter unit 200. One end of the feedback resistor assembly R4 can be connected to the connection point between the negative input terminal of the operational amplifier OP and the grounding resistor R3. The other end of the feedback resistor assembly R4 can be connected to the connection point between the output terminal of the operational amplifier OP and the analog-to-digital converter unit 200.

[0077] Furthermore, the voltage divider resistor assembly R2 may include multiple parallel first gating branches, each of which is selectively connected to the connection point between the other end of the first resistor R1 and the positive input terminal of the operational amplifier OP. Each first gating branch has a resistance value, thereby making the resistance value of the voltage divider resistor assembly R2 adjustable. The feedback resistor assembly R4 may include multiple parallel second gating branches, each of which is selectively connected to the connection point between the negative input terminal and the output terminal of the operational amplifier OP. Each second gating branch has a resistance value, thereby making the resistance value of the feedback resistor assembly R4 adjustable.

[0078] Furthermore, the resistance value of each first-selection branch can be the same or different. The resistance value of each second-selection branch can also be the same or different.

[0079] The operations performed by the voltage sampling circuit 10 or the control unit 300 correspond to the steps in the voltage sampling method of any of the foregoing embodiments. Further operations that the voltage sampling circuit 10 or the control unit 300 can perform can be found in the relevant content of the wavefront error calibration method in any of the foregoing embodiments, and will not be repeated here.

[0080] The analog-to-digital conversion unit 200 is mainly used to perform the voltage sampling method described above to convert the voltage sample value at a first preset interval.

[0081] The control unit 300 is mainly used to execute other specific steps of the voltage sampling method described above. The control unit 300 may include a processor, which may be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), application specific integrated circuit (ASIC), field-programmable gate array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, or other logic control devices. It may also be a microprocessor such as a micro control unit (MCU).

[0082] The voltage sampling method and voltage sampling circuit 10 of this application, through the above steps and structure, can adjust the sampling coefficient according to specific needs, so that the voltage sampling value obtained by the analog-to-digital conversion unit 200 is the target voltage sampling value of the radio frequency power, so as to meet the voltage sampling requirements of the radio frequency power.

[0083] Please see Figure 11 , Figure 11 This is a schematic diagram of a radio frequency power supply device in some embodiments of this application. For example... Figure 11 As shown, this application also provides an RF power supply device 1000, which includes an RF source 20 and a voltage sampling circuit 10 in any of the foregoing embodiments.

[0084] Please refer to it again. Figure 8 .like Figure 8As shown, the voltage sampling circuit 10 is used to sample the voltage of radio frequency power. The voltage sampling circuit 10 includes a sampling unit 100, an analog-to-digital converter 200, and a control unit 300. The sampling unit 100 and the analog-to-digital converter 200 are sequentially arranged in the transmission path of the radio frequency power. The sampling unit 100 has an adjustable sampling coefficient. The control unit 300 is used to continuously acquire the voltage sample value output by the analog-to-digital converter 200 at a first preset interval, determine whether each acquired voltage sample value is a saturated value or a non-saturated value, and when the voltage sample value is saturated, control to decrease the sampling coefficient of the sampling unit 100 during the time period from the current acquisition of the voltage sample value to the next acquisition of the voltage sample value; and when the voltage sample value is non-saturated, control to increase the sampling coefficient of the sampling unit 100 during the time period from the current acquisition of the voltage sample value to the next acquisition of the voltage sample value, or determine that this voltage sample value is the target voltage sample value of the radio frequency power.

[0085] For a more detailed description of the voltage sampling circuit 10, please refer to the relevant content of the voltage sampling circuit 10 in any of the foregoing embodiments, which will not be repeated here.

[0086] The voltage sampling method, voltage sampling circuit 10, and radio frequency power supply device 1000 of this application, through the above steps and structure, can adjust the sampling coefficient according to specific needs, so that the voltage sampling value obtained by the analog-to-digital conversion unit 200 is the target voltage sampling value of the radio frequency power, thereby meeting the voltage sampling requirements of the radio frequency power.

[0087] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Where there is no conflict, the embodiments and features in the embodiments of this application can be combined with each other. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A voltage sampling method, characterized in that, A voltage sampling circuit is applied to a voltage sampling circuit for sampling radio frequency power. The voltage sampling circuit includes a sampling unit, an analog-to-digital conversion unit, and a control unit. The sampling unit and the analog-to-digital conversion unit are sequentially arranged in the transmission path of the radio frequency power. The sampling unit has an adjustable sampling coefficient. The voltage sampling method includes: The voltage sample value output by the analog-to-digital conversion unit is continuously acquired at a first preset interval, and it is determined whether the voltage sample value acquired each time is a saturated value or a non-saturated value. When the voltage sample value is saturated, the sampling coefficient of the sampling unit is reduced during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition. When the voltage sample value is non-saturated, the sampling coefficient of the sampling unit is increased during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition, or the voltage sample value is determined to be the target voltage sample value of the radio frequency power.

2. The voltage sampling method according to claim 1, characterized in that, When each voltage sample value is a non-saturated value, controlling the sampling coefficient of the sampling unit to be increased during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition, or determining that this voltage sample value is the target voltage sample value of the radio frequency power, includes: When each voltage sample value is a non-saturated value and this voltage sample value is within the range of the first sample value, the sampling coefficient of the sampling unit is increased during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition. When each voltage sample value is a non-saturated value and is within the range of the second sample value, the voltage sample value is determined to be the target voltage sample value of the radio frequency power. The minimum value within the second sampling value range is equal to the maximum value within the first sampling value range.

3. The voltage sampling method according to claim 1, characterized in that, The sampling unit includes a voltage divider module and an isolation module sequentially disposed on the radio frequency power supply. The voltage divider module has an adjustable voltage divider coefficient, and the isolation module has an adjustable gain coefficient. The sampling coefficient is the product of the voltage divider coefficient and the sampling coefficient. Wherein, when each voltage sample value is a saturation value, controlling the sampling unit to reduce the sampling coefficient during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition includes: When the voltage sample value is saturated, the voltage division coefficient of the voltage divider module and / or the gain coefficient of the isolation module during the time period from the current voltage sample value to the next voltage sample value are controlled and adjusted to reduce the sampling coefficient of the sampling unit during the time period from the current voltage sample value to the next voltage sample value.

4. The voltage sampling method according to claim 3, characterized in that, The step of controlling the voltage divider module to adjust the voltage division coefficient during the time interval between the current voltage sampling value and the next voltage sampling value, and / or the gain coefficient of the isolation module during the time interval between the current voltage sampling value and the next voltage sampling value, when each voltage sampling value is a saturation value, to reduce the sampling coefficient of the sampling unit during the time interval between the current voltage sampling value and the next voltage sampling value, includes: When the voltage sample value is saturated, the voltage divider module is controlled to reduce the voltage divider coefficient during the time period from the current voltage sample value to the next voltage sample value, and the isolation module is controlled to reduce the gain coefficient during the time period from the current voltage sample value to the next voltage sample value, so as to reduce the sampling coefficient of the sampling unit during the time period from the current voltage sample value to the next voltage sample value.

5. The voltage sampling method according to claim 3, characterized in that, The voltage divider module includes a first resistor and a voltage divider resistor assembly. The isolation module includes an operational amplifier, a grounding resistor, and a feedback resistor assembly. The voltage division coefficient is related to the resistance value of the first resistor and the resistance value of the voltage divider resistor assembly. The gain coefficient is related to the resistance value of the grounding resistor and the resistance value of the feedback resistor assembly. The resistance value of the voltage divider resistor assembly is adjustable so that the voltage division coefficient is adjustable, and the resistance value of the feedback resistor assembly is adjustable so that the gain coefficient is adjustable. The voltage division coefficient of the control and adjustment voltage divider module during the time period from the current voltage sampling value acquisition to the next voltage sampling value acquisition, and / or the gain coefficient of the isolation module during the time period from the current voltage sampling value acquisition to the next voltage sampling value acquisition, include: Control the resistance value of the voltage divider resistor assembly to adjust the voltage division coefficient of the voltage divider module during the time period from the current voltage sample value to the next voltage sample value, and / or control the resistance value of the feedback resistor assembly to adjust the gain coefficient of the isolation module during the time period from the current voltage sample value to the next voltage sample value.

6. The voltage sampling method according to claim 1, characterized in that, The radio frequency source is used to output the radio frequency power, and the radio frequency source has a first output mode and a second output mode; Wherein, when each voltage sample value is a saturation value, controlling the sampling unit to reduce the sampling coefficient during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition includes: When the voltage sample value is saturation value and the RF source is in the first output mode, the control will reduce the sampling coefficient of the sampling unit to the first coefficient range during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition. When the voltage sample value is saturated and the RF source is in the second output mode, the control adjusts the sampling coefficient of the sampling unit to within the range of the second coefficient during the time period between the current voltage sample value acquisition and the next voltage sample value acquisition.

7. The voltage sampling method according to claim 1, characterized in that, Determining whether each acquired voltage sample value is a saturated or non-saturated value includes: Each time the voltage sample value equals the sampling threshold, this voltage sample value is determined to be a saturation value; When a voltage sample value is not equal to the sampling threshold, the voltage sample value is determined to be an unsaturated value.

8. A voltage sampling circuit, characterized in that, The voltage sampling circuit is used for voltage sampling of radio frequency power. The voltage sampling circuit includes a sampling unit, an analog-to-digital conversion unit, and a control unit. The sampling unit and the analog-to-digital conversion unit are sequentially arranged in the transmission path of the radio frequency power. The sampling unit has an adjustable sampling coefficient. The control unit is configured to continuously acquire voltage sample values ​​output by the analog-to-digital conversion unit at a first preset interval, determine whether each acquired voltage sample value is a saturated value or a non-saturated value, and when each voltage sample value is the saturated value, control to reduce the sampling coefficient of the sampling unit during the time period from the current acquisition of the voltage sample value to the next acquisition of the voltage sample value; and when each voltage sample value is the non-saturated value, control to increase the sampling coefficient of the sampling unit during the time period from the current acquisition of the voltage sample value to the next acquisition of the voltage sample value; or, determine that this voltage sample value is the target voltage sample value of the radio frequency power.

9. The voltage sampling circuit according to claim 8, characterized in that, The sampling unit includes a voltage divider module and an isolation module sequentially disposed in the transmission path of the radio frequency power. The voltage divider module has an adjustable voltage divider coefficient, the isolation module has an adjustable gain coefficient, and the sampling coefficient is the product of the voltage divider coefficient and the sampling coefficient. The control unit is configured to, when the voltage sample value is the non-saturation value, control and adjust the voltage division coefficient of the sampling unit during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition and / or the gain coefficient of the isolation module during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition, so as to reduce the sampling coefficient of the sampling unit during the time period from the current voltage sample value acquisition to the next voltage sample value acquisition.

10. A radio frequency power supply device, characterized in that, It includes a radio frequency source and a voltage sampling circuit as described in any one of claims 8-9.

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