Electron microscope system dynamic compensation calibration method, device, equipment, medium and program product

Abstract

The invention relates to the technical field of electron microscopes, in particular to an electron microscope system dynamic compensation calibration method and device, computer equipment, a storage medium and a computer program product. The method comprises the following steps: acquiring an initial pixel position of a feature pattern; respectively changing the digital-to-analog conversion coding value of the compensation signal, and correspondingly obtaining the target pixel position of the feature pattern under each variable; the pixel distance between the initial pixel position and the target pixel position is calculated, and an actual displacement change mean value is obtained through conversion; determining a conversion relation between the digital-to-analog conversion coding value and the displacement, and respectively calculating to obtain compensation coefficients of the first reference direction and the second reference direction; and establishing a mapping relation between the phase change and the compensation amount of the digital-to-analog conversion coding value based on the compensation coefficient, and carrying out dynamic compensation calibration on the target equipment based on the mapping relation. By adopting the method, a real-time dynamic compensation function can be realized, and the imaging quality and the measurement precision of the electron microscope system are improved.

Description

Technical Field

[0001] This application relates to the field of electron microscopy technology, and in particular to a dynamic compensation calibration method, apparatus, computer equipment, storage medium, and computer program product for an electron microscopy system. Background Technology

[0002] An electron microscope (EM) is a high-resolution scientific instrument that uses an electron beam instead of visible light for microscopic imaging. The EM system emits an electron beam through an electron gun, which is then focused onto the sample by an electromagnetic lens system. The interaction between the sample and the electron beam generates various signals, such as secondary electrons and backscattered electrons. These signals are received by a detector and converted into images, enabling the observation and analysis of the sample's nanoscale or even atomic-level structure. Based on the different ways the electron beam interacts with the sample, EMs are mainly divided into two categories: scanning electron microscopes (SEM) and transmission electron microscopes (TEM). EM systems are widely used in materials science, life sciences, the semiconductor industry, nanotechnology, and other fields, and are an indispensable tool for modern microscopic analysis.

[0003] In electron microscopy systems, various factors, such as electromagnetic interference, mechanical vibration, and circuit temperature drift, can cause various distortions and drifts during imaging. These distortions and drifts severely affect image quality and accuracy, especially in high-resolution imaging and dynamic process observation, where even minor deviations can lead to erroneous conclusions. To eliminate mechanical vibrations on the motion platform, dynamic compensation techniques are used. Dynamic compensation involves real-time monitoring of the position change of the motion platform relative to the target position and converting this position change into an electron beam deflection compensation signal to achieve real-time compensation for the position change. Due to the presence of electron optical assembly errors and circuit errors in the electron microscopy system, the compensation effect of dynamic compensation requires rigorous calibration to accurately obtain the conversion relationship between position change and compensation signal; otherwise, it is impossible to improve image quality through compensation.

[0004] In related technologies, offline analysis of imaging effects is usually relied upon, and software algorithms are used to perform post-processing and correction of images, such as using image registration algorithms to correct image translation and rotation.

[0005] However, current dynamic compensation calibration methods have the following technical problems:

[0006] Existing compensation calibration methods rely on offline analysis and post-calibration processes, which result in cumbersome procedures and slow response times, and need to be optimized. Summary of the Invention

[0007] Therefore, it is necessary to provide a dynamic compensation calibration method, device, computer equipment, computer-readable storage medium, and computer program product for an electron microscope system that can achieve real-time dynamic compensation and improve the imaging quality and measurement accuracy of the electron microscope system, in order to address the above-mentioned technical problems.

[0008] Firstly, this application provides a dynamic compensation calibration method for an electron microscope system. The method includes:

[0009] Based on the preset initial digital-to-analog conversion encoding value corresponding to the feature pattern, the initial pixel position of the feature pattern in the target image is obtained;

[0010] By changing the digital-to-analog conversion encoding values ​​of the compensation signals in the first reference direction and the second reference direction respectively, the target pixel positions of the feature patterns under each variable are obtained accordingly.

[0011] The pixel distance between the initial pixel position and the target pixel position is calculated, and the average actual displacement change in the first reference direction and the second reference direction is obtained based on the field of view of the target device and the size parameters of the target image.

[0012] Based on the change in the digital-to-analog conversion code value and the average actual displacement change, the conversion relationship between the digital-to-analog conversion code value and the displacement is determined, and the compensation coefficients for the first reference direction and the second reference direction are calculated based on the period parameters of the target device.

[0013] Based on the compensation coefficient, a mapping relationship is established between the phase change and the compensation amount of the digital-to-analog conversion encoded value, and dynamic compensation calibration of the target device is performed based on the mapping relationship.

[0014] In one embodiment, the step of changing the digital-to-analog conversion encoded values ​​of the compensation signals in the first reference direction and the second reference direction respectively, and obtaining the target pixel position of the feature pattern under each variable, includes:

[0015] The digital-to-analog conversion encoding value in the second reference direction is kept unchanged, while the digital-to-analog conversion encoding value of the compensation signal in the first reference direction is changed.

[0016] While keeping the digital-to-analog conversion encoding value in the first reference direction unchanged, the digital-to-analog conversion encoding value of the compensation signal in the second reference direction is changed.

[0017] In one embodiment, calculating the pixel distance between the initial pixel position and the target pixel position, based on the field of view of the target device and the size parameters of the target image, and converting the average actual displacement change in the first reference direction and the second reference direction, includes:

[0018] Multiple target pixel positions are obtained by repeatedly changing the digital-to-analog conversion encoding value in the same direction;

[0019] After calculating the corresponding pixel distance, the average value is taken as the average pixel distance in that direction, and the average actual displacement change is calculated based on the average pixel distance.

[0020] In one embodiment, establishing a mapping relationship between the phase change and the compensation amount of the digital-to-analog conversion encoded value based on the compensation coefficient, and performing dynamic compensation calibration of the target device based on the mapping relationship includes:

[0021] The laser interferometer of the target device acquires motion signals of the electron microscope stage, and the motion signals include phase signals of the first reference direction and the second reference direction;

[0022] Based on the compensation coefficient, the phase signal is converted into a corresponding compensation amount of the digital-to-analog conversion code value, and dynamic compensation calibration is performed based on the compensation amount of the digital-to-analog conversion code value.

[0023] In one embodiment, the periodic parameter of the target device includes the displacement value corresponding to one operating cycle of the laser interferometer. The process of determining the conversion relationship between the digital-to-analog conversion code value and the displacement based on the change in the digital-to-analog conversion code value and the average actual displacement change, and calculating the compensation coefficients for the first reference direction and the second reference direction based on the periodic parameter of the target device, includes:

[0024] Based on the conversion relationship between the displacement value corresponding to one operating cycle of the laser interferometer and the digital-to-analog conversion code value and the displacement, the compensation coefficient is obtained through quantitative calculation.

[0025] In one embodiment, the method further includes:

[0026] In response to acquiring the target image to be processed, the dynamic compensation calibration is performed on the target image, and the imaging process is maintained continuously while the target image is being dynamically compensated and calibrated.

[0027] Secondly, this application also provides a dynamic compensation calibration device for an electron microscope system. The device includes:

[0028] The initial pixel position module is used to obtain the initial pixel position of the feature pattern in the target image based on a preset initial digital-to-analog conversion encoding value corresponding to the feature pattern;

[0029] The target pixel position module is used to change the digital-to-analog conversion encoding values ​​of the compensation signals in the first reference direction and the second reference direction respectively, and obtain the target pixel position of the feature pattern under each variable.

[0030] The displacement change mean module is used to calculate the pixel distance between the initial pixel position and the target pixel position, and to convert the actual displacement change mean in the first reference direction and the second reference direction based on the field of view of the target device and the size parameters of the target image.

[0031] The compensation coefficient module is used to determine the conversion relationship between the digital-to-analog conversion code value and the displacement based on the change in the digital-to-analog conversion code value and the average value of the actual displacement change, and to calculate the compensation coefficients for the first reference direction and the second reference direction based on the period parameters of the target device.

[0032] The dynamic compensation calibration module is used to establish a mapping relationship between the phase change and the compensation amount of the digital-to-analog conversion encoded value based on the compensation coefficient, and to perform dynamic compensation calibration of the target device based on the mapping relationship.

[0033] In one embodiment, the target pixel location module includes:

[0034] The x-axis encoding value module is used to keep the digital-to-analog conversion encoding value in the second reference direction unchanged and change the digital-to-analog conversion encoding value of the compensation signal in the first reference direction.

[0035] The y-axis encoding value module is used to keep the digital-to-analog conversion encoding value in the first reference direction unchanged and change the digital-to-analog conversion encoding value of the compensation signal in the second reference direction.

[0036] In one embodiment, the displacement variation mean module includes:

[0037] A sampling module is used to obtain the positions of multiple target pixels by changing the digital-to-analog conversion encoded value in the same direction multiple times;

[0038] The displacement mean module is used to calculate the corresponding pixel distance and take the average value as the pixel distance mean in that direction, and to calculate the actual displacement change mean based on the pixel distance mean.

[0039] In one embodiment, the dynamic compensation calibration module includes:

[0040] A motion signal module is used to acquire motion signals of the electron microscope stage based on the laser interferometer of the target device, wherein the motion signals include phase signals of the first reference direction and the second reference direction;

[0041] The compensation module is used to convert the phase signal into a compensation amount corresponding to the digital-to-analog conversion encoded value based on the compensation coefficient, and to perform dynamic compensation calibration based on the compensation amount of the digital-to-analog conversion encoded value.

[0042] In one embodiment, the periodic parameter of the target device includes the displacement value corresponding to one operating cycle of the laser interferometer, and the compensation coefficient module includes:

[0043] The conversion relationship module is used to obtain the compensation coefficient by quantitative calculation based on the conversion relationship between the displacement value corresponding to one operating cycle of the laser interferometer and the digital-analog conversion code value and the displacement amount.

[0044] In one embodiment, the device further includes:

[0045] An online compensation module is used to perform dynamic compensation calibration on the target image in response to acquiring the target image to be processed, and to continuously maintain the imaging process while performing dynamic compensation calibration on the target image.

[0046] Thirdly, this application also provides a computer device. The computer device includes a memory and a processor, the memory storing a computer program, and the processor executing the computer program to implement the steps of a dynamic compensation calibration method for an electron microscope system as described in any embodiment of the first aspect.

[0047] Fourthly, this application also provides a computer-readable storage medium. The computer-readable storage medium stores a computer program thereon, which, when executed by a processor, implements the steps of a dynamic compensation calibration method for an electron microscope system as described in any embodiment of the first aspect.

[0048] Fifthly, this application also provides a computer program product. The computer program product includes a computer program that, when executed by a processor, implements the steps of a dynamic compensation calibration method for an electron microscope system as described in any embodiment of the first aspect.

[0049] The above-described method, apparatus, computer equipment, storage medium, and computer program product for dynamic compensation calibration of an electron microscope system, derived from the technical features in the embodiments, can achieve the following beneficial effects to address the technical problems in the background art:

[0050] This application provides a dynamic compensation calibration method for an electron microscope system. In implementation, dynamic compensation calibration is performed by observing the pixel position changes of feature patterns, achieving precise calibration and online calibration of the dynamic compensation coefficients of the electron microscope system. By adjusting the DAC encoding value and observing the pixel displacement changes of the feature patterns, combined with the field of view and image size parameters, the average actual displacement change is calculated, thereby establishing the conversion relationship between the DAC encoding value and the displacement amount, and calculating the compensation coefficient based on the system period parameters. This application does not rely on complex offline analysis or post-processing software, and can achieve quantitative calibration through rapidly measurable physical quantities during normal system operation, contributing to calibration efficiency and real-time performance. By constructing a mapping relationship between phase change and DAC compensation amount, rapid and accurate compensation for electron beam deflection is achieved, helping to suppress image distortion and drift caused by mechanical vibration, circuit temperature drift, and other factors. This application has advantages such as fast response, strong applicability, and support for online calibration, significantly improving the imaging quality and measurement accuracy of electron microscope systems. Attached Figure Description

[0051] To more clearly illustrate the technical solutions in the embodiments of this application or related technologies, the drawings used in the description of the embodiments of this application or related technologies will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0052] Figure 1 This is an application environment diagram of a dynamic compensation calibration method for an electron microscope system in one embodiment.

[0053] Figure 2 This is a schematic diagram of the first process of a dynamic compensation calibration method for an electron microscope system in one embodiment;

[0054] Figure 3 This is a schematic diagram of the second process of a dynamic compensation calibration method for an electron microscope system in another embodiment;

[0055] Figure 4 This is a schematic diagram of the third process of a dynamic compensation calibration method for an electron microscope system in another embodiment;

[0056] Figure 5 This is a schematic diagram of the fourth process of a dynamic compensation calibration method for an electron microscope system in another embodiment;

[0057] Figure 6 This is a schematic diagram of the fifth step of a dynamic compensation calibration method for an electron microscope system in another embodiment;

[0058] Figure 7This is a schematic diagram of the sixth process of a dynamic compensation calibration method for an electron microscope system in another embodiment;

[0059] Figure 8 This is a schematic diagram of the dynamic compensation calibration process in one embodiment;

[0060] Figure 9 A schematic diagram of pixel position image overlay after changing the X-direction compensation signal DAC Code value in one embodiment;

[0061] Figure 10 Another embodiment is a schematic diagram of the pixel position image superposition after changing the X-direction compensation signal DAC Code value;

[0062] Figure 11 A schematic diagram of pixel position image overlay after changing the Y-direction compensation signal DAC Code value in one embodiment;

[0063] Figure 12 Another embodiment is a schematic diagram of the pixel position image superposition after changing the Y-direction compensation signal DAC Code value;

[0064] Figure 13 This is a structural block diagram of a dynamic compensation calibration device for an electron microscope system in one embodiment.

[0065] Figure 14 This is an internal structural diagram of a computer device in one embodiment. Detailed Implementation

[0066] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0067] In related technologies, offline analysis of imaging effects is usually relied upon, and software algorithms are used to perform post-processing and correction of images, such as using image registration algorithms to correct image translation and rotation.

[0068] However, current dynamic compensation calibration methods have the following technical problems:

[0069] Existing compensation calibration methods rely on offline analysis and post-calibration processes, which result in cumbersome procedures and slow response times, and need to be optimized.

[0070] Based on this, embodiments of this application provide a dynamic compensation calibration method, apparatus, computer equipment, storage medium, and computer program product for an electron microscope system.

[0071] The embodiment of this application provides a dynamic compensation calibration method for an electron microscope system, which can be applied to, for example... Figure 1 The application environment is shown. In this system, coordinates XsOsYs represent the stage position of the electron microscope system, and coordinates XwOwYw represent the position of the laser interferometer. The laser interferometer can acquire the phase signal of the platform movement and calculate the relationship between the corresponding compensation value and the phase.

[0072] In one embodiment, such as Figure 2 As shown, a dynamic compensation calibration method for an electron microscope system is provided. Taking the application of this method to the terminal of an electron microscope system as an example, the method includes the following steps:

[0073] Step 202: Based on the preset initial digital-to-analog conversion encoding value corresponding to the feature pattern, obtain the initial pixel position of the feature pattern in the target image.

[0074] In this context, "feature pattern" refers to a sample pattern or mark with clearly identifiable characteristic structures used in electron microscopy imaging. "Digital-to-Analog Converter (DAC) code" refers to the digital input code used to control the DAC. It is a key control parameter for converting digital signals to analog voltages. The DAC code is used to generate the electron beam deflection compensation voltage; changes in the code directly correspond to changes in the compensation voltage, thereby controlling the electron beam deflection to compensate for image drift caused by stage movement.

[0075] Step 204: Change the digital-to-analog conversion encoding values ​​of the compensation signals in the first reference direction and the second reference direction respectively, and obtain the target pixel position of the feature pattern under each variable.

[0076] The first reference direction can refer to the X direction of the coordinate system, and the second reference direction can refer to the Y direction of the coordinate system.

[0077] Step 206: Calculate the pixel distance between the initial pixel position and the target pixel position. Based on the field of view of the target device and the size parameters of the target image, calculate the average actual displacement change in the first reference direction and the second reference direction.

[0078] Step 208: Based on the change in the digital-to-analog conversion code value and the average actual displacement change, determine the conversion relationship between the digital-to-analog conversion code value and the displacement, and calculate the compensation coefficients for the first reference direction and the second reference direction based on the period parameters of the target device.

[0079] Step 2010: Establish a mapping relationship between the phase change and the compensation amount of the digital-to-analog conversion encoded value based on the compensation coefficient, and perform dynamic compensation calibration of the target device based on the mapping relationship.

[0080] For example, the deflection sensitivity can be set to γ ​​(V / nm), and the deflection voltage change can be set to ΔV. Then, the relationship between the deflection voltage changes in the X and Y directions and the position changes is as follows:

[0081] ΔV x =ΔL x *γ x

[0082] ΔV y =ΔL y *γ y

[0083] Wherein, γx and γy are system parameters related to electron optics.

[0084] For example, when calculating the digital-to-analog conversion encoded value, the voltage can be compensated by the DACCode of the DAC chip on the dynamic compensation board. The resolution of the DAC chip is N, and the maximum output compensation voltage of the circuit is a constant V0. Then the digital-to-analog conversion encoded value can be expressed as follows:

[0085]

[0086] make You can get .

[0087] For example, in the calculation of the compensation coefficient, let The relationship between the change in the digital-to-analog conversion encoded value and the phase change can be:

[0088]

[0089] At this point, the relationship between the changes in the digital-to-analog conversion encoded values ​​and the displacement changes in the X and Y directions is as follows:

[0090]

[0091] In the above-mentioned dynamic compensation calibration method for an electron microscope system, by reasonably deducing the technical features of the embodiments, the following beneficial effects are achieved, which can solve the technical problems raised in the background art:

[0092] This application provides a dynamic compensation calibration method for an electron microscope system. In implementation, dynamic compensation calibration is performed by observing the pixel position changes of feature patterns, achieving precise calibration and online calibration of the dynamic compensation coefficients of the electron microscope system. By adjusting the DAC encoding value and observing the pixel displacement changes of the feature patterns, combined with the field of view and image size parameters, the average actual displacement change is calculated, thereby establishing the conversion relationship between the DAC encoding value and the displacement amount, and calculating the compensation coefficient based on the system period parameters. This application does not rely on complex offline analysis or post-processing software, and can achieve quantitative calibration through rapidly measurable physical quantities during normal system operation, contributing to calibration efficiency and real-time performance. By constructing a mapping relationship between phase change and DAC compensation amount, rapid and accurate compensation for electron beam deflection is achieved, helping to suppress image distortion and drift caused by mechanical vibration, circuit temperature drift, and other factors. This application has advantages such as fast response, strong applicability, and support for online calibration, significantly improving the imaging quality and measurement accuracy of electron microscope systems.

[0093] In one embodiment, it can be as follows Figure 3 As shown, step 204 includes:

[0094] Step 302: Keep the digital-to-analog conversion encoding value in the second reference direction unchanged, and change the digital-to-analog conversion encoding value of the compensation signal in the first reference direction.

[0095] Step 304: Keep the digital-to-analog conversion encoding value in the first reference direction unchanged, and change the digital-to-analog conversion encoding value of the compensation signal in the second reference direction.

[0096] In this embodiment, by independently changing the DAC encoding values ​​in two reference directions while keeping the encoding value in the other direction unchanged, the present invention achieves independent calibration of the compensation effect in both the X and Y directions. This design avoids mutual interference, ensures the purity and accuracy of the calibration data, makes the calculation of the compensation coefficient more reliable, thereby improving the overall stability and accuracy of dynamic compensation, and enhancing the effectiveness and repeatability of the calibration method.

[0097] In one embodiment, it can be as follows Figure 4 As shown, step 206 includes:

[0098] Step 402: Obtain multiple target pixel positions by changing the digital-to-analog conversion encoding value in the same direction multiple times.

[0099] Step 404: Calculate the corresponding pixel distance and take the average value as the average pixel distance in that direction. Based on the average pixel distance, calculate the average actual displacement change.

[0100] In this embodiment, by repeatedly changing the DAC encoding value to obtain the average pixel displacement, random errors and noise interference introduced by a single measurement are suppressed, improving the stability and reliability of the displacement change data. This step effectively improves the calculation accuracy of the actual displacement change average through averaging, laying a data foundation for the accurate determination of subsequent compensation coefficients and enhancing the robustness and repeatability of the calibration method.

[0101] In one embodiment, it can be as follows Figure 5 As shown, step 2010 includes:

[0102] Step 502: Acquire motion signals of the electron microscope stage based on the laser interferometer of the target device, the motion signals including phase signals of the first reference direction and the second reference direction.

[0103] For example, a laser interferometer can acquire the output x and y direction signals to obtain the phase increment. , The unit is rad. The phase change Δ is calculated by comparing it with the set feature pattern position data. .

[0104] Step 504: Based on the compensation coefficient, convert the phase signal into the corresponding compensation amount of the digital-to-analog conversion code value, and perform dynamic compensation calibration based on the compensation amount of the digital-to-analog conversion code value.

[0105] In this embodiment, the motion phase signal acquired by the laser interferometer is converted into a DAC compensation value in real time based on the compensation coefficient, realizing online response and accurate compensation for the motion error of the electron microscope stage. This helps to improve the real-time performance and automation level of dynamic compensation, ensuring that the compensation signal is closely matched with the actual state of the system, thereby effectively suppressing image distortion and drift, and significantly enhancing the stability and accuracy of the electron microscope system in high-resolution imaging and dynamic observation.

[0106] In one embodiment, it can be as follows Figure 6 As shown, the periodic parameters of the target device include the displacement value corresponding to one operating cycle of the laser interferometer, and step 208 includes:

[0107] Step 602: Based on the conversion relationship between the displacement value corresponding to one operating cycle of the laser interferometer and the digital-to-analog conversion code value and the displacement, the compensation coefficient is obtained through quantitative calculation.

[0108] For example, the displacement corresponding to one complete cycle of the laser interferometer can be set as λ, and the phase change as... If the displacements in the X and Y directions are ΔLx and ΔLy, respectively, then the relationship between the position and phase changes can be:

[0109]

[0110] Where λ can be a known parameter of the laser interferometer system.

[0111] In this embodiment, the compensation coefficient is accurately calculated through quantitative conversion based on the periodic displacement value of the laser interferometer and the encoding-displacement conversion relationship. This helps to establish a direct and stable mathematical model using known system parameters, significantly simplifies the calculation process of the compensation coefficient, improves the operability and reliability of the calibration method, and enhances the consistency of the system's compensation behavior under different operating conditions.

[0112] In one embodiment, it can be as follows Figure 7 As shown, the method further includes:

[0113] Step 702: In response to acquiring the target image to be processed, perform the dynamic compensation calibration on the target image, and continuously maintain the imaging process while performing dynamic compensation calibration on the target image.

[0114] In this embodiment, while performing dynamic compensation calibration on the target image to be processed, the imaging process is continuously maintained without interruption. This helps to achieve seamless integration of real-time online calibration of the electron microscope system with normal imaging tasks, avoiding the efficiency losses caused by the need for downtime or reliance on special samples in traditional calibration methods. This helps to improve the practicality and operational continuity of the electron microscope system, ensuring the high efficiency and stability of the imaging process.

[0115] In one specific embodiment, it can be as follows: Figure 8 As shown, displacement can be measured under the conditions of setting the scanning electron microscope FOV to 2µm and the image size to 1024 pixels.

[0116] Specifically, the DAC Code values ​​of the X and Y direction compensation signals can be set to (0x7FFF, 0x7FFF) to obtain the pixel positions in the image corresponding to the feature pattern at this time as (496, 499).

[0117] First, the X-direction compensation signal DAC Code value can be changed to (0x3FFF, 0x7FFF). At this point, the pixel position in the image corresponding to the feature pattern is (865, 802). The images of the two pixel positions can be superimposed as follows: Figure 9 As shown, the straight-line distance ΔLx between the two positions in the figure can be calculated to be 477.46 pixels.

[0118] Subsequently, the X-direction compensation signal DAC Code value can be changed to (0xBFFF, 0x7FFF). At this time, the pixel position in the image corresponding to the feature pattern is (122, 191). The two pixel images are superimposed as follows: Figure 10 As shown, the straight-line distance ΔLx between the two positions in the figure is calculated to be 484.50 pixels.

[0119] Subsequently, the Y-direction compensation signal DAC Code value can be changed to (0x7FFF, 0x3FFF). At this time, the pixel position in the image corresponding to the feature pattern is (217, 886). The two pixel images can be superimposed as follows: Figure 11 As shown, the straight-line distance ΔLy between the two positions in the figure is calculated to be 477.08 pixels.

[0120] Subsequently, the Y-direction compensation signal DAC Code value can be changed to (0x7FFF, 0xBFFF). At this time, the pixel position in the image corresponding to the feature pattern is (769, 110). The two pixel images can be superimposed as follows: Figure 12 As shown, the straight-line distance ΔLy between the two positions in the figure is calculated to be 475.24 pixels.

[0121] At this point, the displacement value ΔL can be calculated: The average value in the X direction is (477.46 + 484.50) / 2 = 480.98 pixels; the average value in the Y direction is (477.08 + 475.24) / 2 = 476.16 pixels. Since the image has a FOV of 2um and a size of 1024 pixels, the displacement can be calculated as follows:

[0122] ΔLx=2*1000 / 1024*480.98=939.4141nm

[0123] ΔLy=2*1000 / 1024*476.16=930.00nm

[0124] For example, when the system deflection sensitivity parameters are known and If the value is 0.0034V / nm, then the conversion relationship between the DAC code value and the shift can be:

[0125] According to the deflection sensitivity theory, the value is calculated to be: 0.0034 * 32768 / 5 = 22.2822 / nm;

[0126] The conversion relationship between the X-direction DAC code value and the displacement obtained from the actual calibration calculation is: 16384 / 939.4141 = 17.441 / nm;

[0127] Similarly, the conversion relationship between the DAC code value and the shift in the Y direction can be obtained: 16384 / 930.00 = 17.617 / nm;

[0128] At this point, based on the formula obtained from theoretical calculation and the formula obtained from actual calibration, it can be seen that there will be a deviation between the theoretical value calculated according to the given deflection sensitivity and the actual calibration value. Therefore, actual dynamic compensation calibration can be performed to overcome the deviation.

[0129] For example, if the displacement λ corresponding to one complete cycle of the laser interferometer is 158 nm, then the conversion relationship between the DAC code value and the phase can be obtained as follows:

[0130] =17.441*158 / 2 / π= 438.5801 / rad

[0131] =17.617*158 / 2 / π= 443.0059 / rad

[0132] Accordingly, the relationship between DAC code compensation and phase change is as follows:

[0133]

[0134] Ultimately, the system can use the calibrated compensation coefficients to perform dynamic compensation functions.

[0135] It should be understood that although the steps in the flowcharts of the embodiments described above are shown sequentially according to the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless explicitly stated herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some steps in the flowcharts of the embodiments described above may include multiple steps or multiple stages. These steps or stages are not necessarily completed at the same time, but can be executed at different times. The execution order of these steps or stages is not necessarily sequential, but can be performed alternately or in turn with other steps or at least some of the steps or stages of other steps.

[0136] Based on the same inventive concept, this application also provides a dynamic compensation calibration device for an electron microscope system for implementing the aforementioned dynamic compensation calibration method. The solution provided by this device is similar to the solution described in the above method. Therefore, the specific limitations of one or more embodiments of the dynamic compensation calibration device for an electron microscope system provided below can be found in the limitations of the dynamic compensation calibration method for an electron microscope system described above, and will not be repeated here.

[0137] In one embodiment, such as Figure 13As shown, a dynamic compensation calibration device for an electron microscope system is provided, comprising: an initial pixel position module, a target pixel position module, a displacement change mean module, a compensation coefficient module, and a dynamic compensation calibration module, wherein:

[0138] The initial pixel position module is used to obtain the initial pixel position of the feature pattern in the target image based on a preset initial digital-to-analog conversion encoding value corresponding to the feature pattern;

[0139] The target pixel position module is used to change the digital-to-analog conversion encoding values ​​of the compensation signals in the first reference direction and the second reference direction respectively, and obtain the target pixel position of the feature pattern under each variable.

[0140] The displacement change mean module is used to calculate the pixel distance between the initial pixel position and the target pixel position, and to convert the actual displacement change mean in the first reference direction and the second reference direction based on the field of view of the target device and the size parameters of the target image.

[0141] The compensation coefficient module is used to determine the conversion relationship between the digital-to-analog conversion code value and the displacement based on the change in the digital-to-analog conversion code value and the average value of the actual displacement change, and to calculate the compensation coefficients for the first reference direction and the second reference direction based on the period parameters of the target device.

[0142] The dynamic compensation calibration module is used to establish a mapping relationship between the phase change and the compensation amount of the digital-to-analog conversion encoded value based on the compensation coefficient, and to perform dynamic compensation calibration of the target device based on the mapping relationship.

[0143] In one embodiment, the target pixel location module includes:

[0144] The x-axis encoding value module is used to keep the digital-to-analog conversion encoding value in the second reference direction unchanged and change the digital-to-analog conversion encoding value of the compensation signal in the first reference direction.

[0145] The y-axis encoding value module is used to keep the digital-to-analog conversion encoding value in the first reference direction unchanged and change the digital-to-analog conversion encoding value of the compensation signal in the second reference direction.

[0146] In one embodiment, the displacement variation mean module includes:

[0147] A sampling module is used to obtain the positions of multiple target pixels by changing the digital-to-analog conversion encoded value in the same direction multiple times;

[0148] The displacement mean module is used to calculate the corresponding pixel distance and take the average value as the pixel distance mean in that direction, and to calculate the actual displacement change mean based on the pixel distance mean.

[0149] In one embodiment, the dynamic compensation calibration module includes:

[0150] A motion signal module is used to acquire motion signals of the electron microscope stage based on the laser interferometer of the target device, wherein the motion signals include phase signals of the first reference direction and the second reference direction;

[0151] The compensation module is used to convert the phase signal into a compensation amount corresponding to the digital-to-analog conversion encoded value based on the compensation coefficient, and to perform dynamic compensation calibration based on the compensation amount of the digital-to-analog conversion encoded value.

[0152] In one embodiment, the periodic parameter of the target device includes the displacement value corresponding to one operating cycle of the laser interferometer, and the compensation coefficient module includes:

[0153] The conversion relationship module is used to obtain the compensation coefficient by quantitative calculation based on the conversion relationship between the displacement value corresponding to one operating cycle of the laser interferometer and the digital-analog conversion code value and the displacement amount.

[0154] In one embodiment, the device further includes:

[0155] An online compensation module is used to perform dynamic compensation calibration on the target image in response to acquiring the target image to be processed, and to continuously maintain the imaging process while performing dynamic compensation calibration on the target image.

[0156] Each module in the aforementioned dynamic compensation calibration device for an electron microscope system can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in or independent of the processor in a computer device, or stored in the memory of a computer device as software, so that the processor can call and execute the corresponding operations of each module.

[0157] In one embodiment, a computer device is provided, which may be a terminal, and its internal structure diagram may be as follows: Figure 14As shown, the computer device includes a processor, memory, input / output interface, communication interface, display unit, and input device. The processor, memory, and input / output interface are connected via a system bus, and the communication interface, display unit, and input device are also connected to the system bus via the input / output interface. The processor provides computational and control capabilities. The memory includes non-volatile storage media and internal memory. The non-volatile storage media stores the operating system and computer programs. The internal memory provides an environment for the operation of the operating system and computer programs in the non-volatile storage media. The input / output interface is used for exchanging information between the processor and external devices. The communication interface is used for wired or wireless communication with external terminals; wireless communication can be achieved through Wi-Fi, mobile cellular networks, NFC (Near Field Communication), or other technologies. When executed by the processor, the computer program implements a dynamic compensation calibration method for an electron microscope system. The display unit is used to form a visually visible image and can be a display screen, projection device, or virtual reality imaging device. The display screen can be an LCD screen or an e-ink screen. The input device of the computer device can be a touch layer covering the display screen, or buttons, trackballs, or touchpads set on the casing of the computer device, or external keyboards, touchpads, or mice, etc.

[0158] Those skilled in the art will understand that Figure 14 The structure shown is merely a block diagram of a portion of the structure related to the present application and does not constitute a limitation on the computer device to which the present application is applied. Specific computer devices may include more or fewer components than those shown in the figure, or combine certain components, or have different component arrangements.

[0159] In one embodiment, a computer device is also provided, including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to implement the steps in the above method embodiments.

[0160] In one embodiment, a computer-readable storage medium is provided having a computer program stored thereon that, when executed by a processor, implements the steps in the above method embodiments.

[0161] In one embodiment, a computer program product is provided, including a computer program that, when executed by a processor, implements the steps in the above method embodiments.

[0162] It should be noted that the user information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data used for analysis, data stored, data displayed, etc.) involved in this application are all information and data authorized by the user or fully authorized by all parties, and the collection, use and processing of related data must comply with the relevant laws, regulations and standards of the relevant countries and regions.

[0163] Those skilled in the art will understand that all or part of the processes in the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium. When executed, the computer program can include the processes of the embodiments described above. Any references to memory, databases, or other media used in the embodiments provided in this application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM can take many forms, such as Static Random Access Memory (SRAM) or Dynamic Random Access Memory (DRAM). The databases involved in the embodiments provided in this application may include at least one type of relational database and non-relational database. Non-relational databases may include, but are not limited to, blockchain-based distributed databases. The processors involved in the embodiments provided in this application may be general-purpose processors, central processing units, graphics processing units, digital signal processors, programmable logic devices, quantum computing-based data processing logic devices, etc., and are not limited to these.

[0164] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0165] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this application should be determined by the appended claims.

Claims

1. A method of dynamic compensation calibration for an electron microscope system, the method comprising: The method comprises: acquiring an initial pixel position of a feature pattern in a target image based on a preset initial digital-analog conversion encoding value corresponding to the feature pattern; respectively changing the digital-analog conversion encoding value of the compensation signal of the first reference direction and the second reference direction to correspondingly acquire a target pixel position of the feature pattern under each variable; calculating a pixel distance between the initial pixel position and the target pixel position, and converting to obtain an actual displacement change average of the first reference direction and the second reference direction based on a field of view range of a target device and a size parameter of the target image; determining a conversion relationship between the digital-analog conversion encoding value and the displacement based on the change amount of the digital-analog conversion encoding value and the actual displacement change average, and respectively calculating a compensation coefficient of the first reference direction and the second reference direction based on a period parameter of the target device; establishing a mapping relationship between phase change and the compensation amount of the digital-analog conversion encoding value based on the compensation coefficient, and performing dynamic compensation calibration of the target device based on the mapping relationship.

2. The method of claim 1, wherein, The method comprises: maintaining the digital-analog conversion encoding value of the second reference direction unchanged and changing the digital-analog conversion encoding value of the compensation signal of the first reference direction; maintaining the digital-analog conversion encoding value of the first reference direction unchanged and changing the digital-analog conversion encoding value of the compensation signal of the second reference direction.

3. The method of claim 1, wherein, The method comprises: acquiring a plurality of target pixel positions by changing the digital-analog conversion encoding value of the same direction multiple times; calculating the average of the corresponding pixel distances as the pixel distance average of the direction, and converting to obtain the actual displacement change average based on the pixel distance average.

4. The method of claim 1, wherein, The method comprises: acquiring a motion signal of an electron microscope stage based on a laser interferometer of the target device, the motion signal comprising phase signals of the first reference direction and the second reference direction; converting the phase signals to the compensation amount of the corresponding digital-analog conversion encoding value based on the compensation coefficient, and performing dynamic compensation calibration based on the compensation amount of the digital-analog conversion encoding value.

5. The method of claim 1, wherein, The periodic parameter of the target device includes a displacement value corresponding to one operation period of the laser interferometer, the conversion relationship between the digital-to-analog conversion code value and the displacement is determined based on the change amount of the digital-to-analog conversion code value and the actual displacement change average, and the compensation coefficients of the first reference direction and the second reference direction are respectively calculated based on the periodic parameter of the target device, and the compensation coefficients include: The compensation coefficients are obtained by quantitative conversion based on the conversion relationship between the displacement value corresponding to one operation period of the laser interferometer and the digital-to-analog conversion code value and the displacement.

6. The method of claim 1, wherein, The method further includes: In response to obtaining a target image to be processed, performing the dynamic compensation calibration on the target image, and continuously maintaining the imaging process during the dynamic compensation calibration on the target image.

7. An electron microscope system dynamic compensation calibration device, characterized by, The device includes: An initial pixel position module configured to obtain an initial pixel position of a feature pattern in a target image based on a preset initial digital-to-analog conversion code value corresponding to the feature pattern; A target pixel position module configured to change the digital-to-analog conversion code value of a compensation signal in a first reference direction and a second reference direction respectively, and obtain a target pixel position of the feature pattern under each variable; A displacement change average module configured to calculate a pixel distance between the initial pixel position and the target pixel position, and convert to obtain an actual displacement change average in the first reference direction and the second reference direction based on a field of view range of a target device and a size parameter of the target image; A compensation coefficient module configured to determine a conversion relationship between the digital-to-analog conversion code value and the displacement based on a change amount of the digital-to-analog conversion code value and the actual displacement change average, and calculate the compensation coefficients of the first reference direction and the second reference direction based on a periodic parameter of the target device; A dynamic compensation calibration module configured to establish a mapping relationship between a phase change and a compensation amount of the digital-to-analog conversion code value based on the compensation coefficients, and perform dynamic compensation calibration of the target device based on the mapping relationship.

8. A computer device comprising a memory and a processor, the memory storing a computer program, characterized in that, The processor executes the computer program to implement the steps of the method of any one of claims 1 to 6.

9. A computer-readable storage medium having stored thereon a computer program, characterized in that, The computer program is executed by the processor to implement the steps of the method of any one of claims 1 to 6.

10. A computer program product comprising a computer program, characterized in that, The computer program is executed by the processor to implement the steps of the method of any one of claims 1 to 6.

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