Cleaning treatment device

Abstract

The present invention is a cleaning treatment device (1) provided with a horn-shaped ultrasonic wave generating device (5) for transmitting ultrasonic waves to a cleaning liquid supplied to a polishing cloth (109) of a polishing device (100), the polishing device (100) having a lower stage (101) to which the polishing cloth (109) is attached on the upper surface, a sun gear (105) provided on the inner side of the lower stage (101), and an internal gear (107) provided on the outer side of the lower stage (101), the cleaning processing device is characterized in that the cleaning processing device is provided with a track (3) on which an ultrasonic wave generating device (5) is mounted, the track (3) is fixed on a sun gear (105) and an internal gear (107) in a manner of crossing a lower platform (101), the ultrasonic wave generating device (5) can move on the track (3), and ultrasonic cleaning is carried out in a manner that the ultrasonic wave generating device (5) is moved on the track (3), and the ultrasonic wave generating device (5) can move on the internal gear (107) while the ultrasonic wave generating device (5) is moved on the track (3). While ultrasonic waves are generated by the horn (23), the ultrasonic waves are transmitted to the abrasive cloth (109) via the cleaning liquid. As a result, provided is a cleaning processing device which can perform ultrasonic cleaning by maintaining the distance between the horn and the abrasive cloth with high precision even when a horn-shaped ultrasonic wave generating device is provided.

Description

Technical Field

[0001] This invention relates to a cleaning treatment apparatus. Background Technology

[0002] Generally speaking, in the grinding process of semiconductor wafers, if abrasive cloths such as foamed polyurethane pads are used to continuously grind the wafers, slurry aggregates and grinding debris generated from the wafers will continuously accumulate inside the foamed part of the abrasive cloth.

[0003] These deposits accumulate and solidify inside the abrasive cloth, becoming a major cause of damage to the wafer surface during abrasion. Furthermore, the lifespan of the abrasive cloth is determined by wafer quality deterioration, and this lifespan is further reduced due to deposits. Therefore, a method for cleaning abrasive cloths that can thoroughly remove deposits from within the cloth has been desired.

[0004] Patent Document 1 describes a method for cleaning an abrasive cloth by high-pressure spraying of a cleaning liquid and using a flowing ultrasonic generator to finish the surface of the abrasive cloth. Furthermore, Patent Document 2 describes a method for cleaning the surface of an abrasive cloth using a horn-shaped ultrasonic generator. Existing technical documents Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2008-142851 Patent Document 2: Japanese Patent Application Publication No. 2003-282506 Summary of the Invention The problem that the invention aims to solve

[0006] As described in Patent Document 2, ultrasonic cleaning is effective in removing foreign matter attached to or inside the abrasive cloth. However, in order to maintain a more effective frequency and output, it is preferable to use a horn-shaped ultrasonic generator with a frequency of less than 100 kHz and an amplitude of more than 10 μm.

[0007] However, the housing and weight of the device that meets this condition are relatively large. As in Patent Document 1, when the handle with the ultrasonic generator installed at the front end is inserted from outside the platform, the handle will not be rigid enough, causing tilting and vibration. It will be unable to maintain the distance between the abrasive cloth and the speaker of the ultrasonic generator, thus posing a risk of contact and failing to achieve the desired cleaning effect.

[0008] The present invention was made to solve the above-mentioned problems, and its purpose is to provide a cleaning treatment apparatus that can perform ultrasonic cleaning with high precision while maintaining the distance between the horn and the abrasive cloth, even when equipped with a horn-shaped ultrasonic generator. Methods for solving problems

[0009] The present invention was made to solve the above-mentioned objective by providing a cleaning treatment apparatus comprising a horn-shaped ultrasonic generator that transmits ultrasonic waves to a cleaning liquid supplied to an abrasive cloth in an abrasive device for ultrasonic cleaning of the abrasive cloth. The abrasive device has a lower platform on which the abrasive cloth is attached to its upper surface, a sun gear disposed on the inner side of the lower platform, and an inner gear disposed on the outer side of the lower platform. The cleaning treatment apparatus is characterized by having a track for mounting the ultrasonic generator, the track being fixed to the sun gear and the inner gear in a manner that spans the lower platform. The ultrasonic generator is movable on the track and performs ultrasonic cleaning by generating ultrasonic waves from the horn while moving the ultrasonic generator on the track, and transmitting the generated ultrasonic waves to the abrasive cloth via the cleaning liquid.

[0010] According to such an ultrasonic generating device, the ultrasonic generating device is fixed to the sun gear and the inner gear by means of a track spanning the lower platform, and the ultrasonic generating device is mounted thereon, so that the ultrasonic generating device is held on both the sun gear and the inner gear by the track.

[0011] Therefore, compared to structures such as cantilever beams with handles that have ultrasonic generators installed at the front, this design ensures the rigidity of the track and enables ultrasonic cleaning with high precision while maintaining the distance between the horn and the abrasive cloth.

[0012] At this time, the track can have a gear fixing hole, and is fixed to the sun gear and the inner gear through the gear fixing hole, the gear fixing hole being provided on the surface that contacts the sun gear and the inner gear.

[0013] This allows the track to be completely fixed to the sun gear and the internal gear.

[0014] At this time, the track can adjust the height distance between the horn of the ultrasonic generating device and the abrasive cloth by moving the sun gear or the internal gear up and down.

[0015] Therefore, even if the track and ultrasonic generating device themselves do not have the function of raising and lowering the horn, the level and height of the track can still be adjusted and maintained with high precision by adjusting the height of the sun gear and the internal gear, and the distance between the horn and the abrasive cloth can be kept constant.

[0016] At this time, the ultrasonic generating device can move along the track in the direction of the sun gear or the inner gear while the lower platform is rotating.

[0017] Therefore, while the platform is rotating, the ultrasonic generating device can be moved from the center of the platform to the outer periphery or in the opposite direction to perform ultrasonic cleaning, which can efficiently and effectively clean the entire surface of the abrasive cloth.

[0018] At this time, the material of the track can be stainless steel or titanium.

[0019] Therefore, the track can easily ensure sufficient rigidity in bearing the weight of the ultrasonic generating device.

[0020] At this time, the horn of the ultrasonic generating device can be made of stainless steel or titanium.

[0021] As a result, the tensile strength of the speaker increases, allowing it to withstand high amplitudes, thus enabling the generation of high-amplitude ultrasonic waves.

[0022] At this time, a cleaning liquid supply nozzle is provided, which supplies the cleaning liquid to the abrasive cloth so that a water seal is formed between the horn and the abrasive cloth.

[0023] Therefore, during ultrasonic cleaning, the space between the speaker and the surface of the abrasive cloth is filled with cleaning fluid, which enables reliable cleaning. The effects of the invention

[0024] As described above, the cleaning apparatus according to the present invention can maintain the distance between the horn and the abrasive cloth with high precision for ultrasonic cleaning even when equipped with a horn-shaped ultrasonic generating device.

[0025] Specifically, the distance between the ultrasonic generator and the platform, which is difficult to maintain in conventional devices, can be maintained with high precision by the present invention, and the possibility of contact between the platform and the ultrasonic generator can be greatly reduced.

[0026] Furthermore, it is possible to install heavy ultrasonic generators, and to install horn-type ultrasonic generators with vibrators with frequencies below 100kHz. Furthermore, the possibility of contact with the platform is very low, so ultrasonic cleaning can be performed while the platform is rotated, and the ultrasonic generating device is moved from the center of the platform to the outer periphery or in the opposite direction. Attached Figure Description

[0027] Figure 1 A top view of a washing treatment apparatus according to an embodiment of the present invention and an abrasive apparatus having an abrasive cloth as the object of washing is shown. Figure 2 It shows Figure 1 A three-dimensional view of the washing and processing device. Figure 3A side view shows the washing and cleaning device fixed to the grinding device. Figure 4 The diagram shows a case where the radial distance of the abrasive cloth from its inner circumference is recorded as the measurement position of the interval between the horn and the abrasive cloth. Detailed Implementation

[0028] The present invention will now be described in detail, but the present invention is not limited to these descriptions.

[0029] As described above, a cleaning apparatus is sought that can perform ultrasonic cleaning with high precision while maintaining the distance between the horn and the abrasive cloth, even when equipped with a horn-shaped ultrasonic generator.

[0030] The inventors dedicated themselves to researching the aforementioned technical problems and discovered that a cleaning device can perform ultrasonic cleaning with high precision while maintaining the distance between the horn and the abrasive cloth, even when equipped with a horn-shaped ultrasonic generator. This invention is thus completed. The cleaning device includes a horn-shaped ultrasonic generator that transmits ultrasonic waves to the cleaning liquid supplied to the abrasive cloth in the abrasive device, thereby ultrasonically cleaning the abrasive cloth. The abrasive device has a lower platform with the abrasive cloth attached to its upper surface, a sun gear disposed on the inner side of the lower platform, and an inner gear disposed on the outer side of the lower platform. The cleaning device is characterized by having a track for mounting the ultrasonic generator. The track is fixed to the sun gear and the inner gear across the lower platform. The ultrasonic generator can move on the track and performs ultrasonic cleaning by generating ultrasonic waves from the horn while moving the ultrasonic generator on the track, and transmitting the generated ultrasonic waves to the abrasive cloth via the cleaning liquid.

[0031] The following is a reference. Figures 1-4 The washing treatment apparatus in the embodiments of the present invention will be explained.

[0032] Here, an example is shown of a cleaning device for an abrasive cloth, which is installed in an abrasive device used for abrading semiconductor single-crystal wafers, particularly silicon wafers.

[0033] First, regarding the schematic configuration of the abrasive device having an abrasive cloth that is the object of abrasive cleaning in the cleaning treatment apparatus of this embodiment, refer to... Figure 1 Please provide an explanation. For example... Figure 1 As shown, the grinding device 100 includes a lower platform 101, a grinding cloth 109, a sun gear 105, and an internal gear 107.

[0034] The lower platform 101 is a platform on which an abrasive cloth 109 is attached to the upper surface. Here, it has a circular plate shape with a circular hole in the center. The abrasive cloth 109 is a component used to abrade the silicon wafer W, and can be an example of a foamed material such as a foamed polyurethane pad.

[0035] The sun gear 105 is a spur gear located inside the inner periphery 101a of the lower platform 101, and the internal gear 107 is an internal gear located outside the outer periphery 101b of the lower platform 101.

[0036] The grinding apparatus 100 holds the silicon wafer W by meshing a spur gear called a bracket 111 with a sun gear 105 and an internal gear 107. While supplying a grinding fluid such as slurry to the grinding cloth 109, the lower platform 101 rotates around the axis of the disk and further presses the silicon wafer W against the grinding cloth 109, thereby grinding the lower surface of the silicon wafer W.

[0037] During polishing, the upper surface of the silicon wafer W can be pressurized through an upper platform to which polishing cloth is attached. Thus, with the platform located at both the upper and lower positions of the support 111, both sides of the silicon wafer W can be polished, making the polishing apparatus 100 a double-sided polishing apparatus.

[0038] On the other hand, when pressure is applied only when the platform is set to the lower platform 101 and the upper surface of the silicon wafer W is not ground, the lower surface of the silicon wafer W can be ground only, so the grinding device 100 becomes a single-sided grinding device.

[0039] If a foamed polyurethane pad or the like is used as the abrasive cloth 109 to continuously abrade the silicon wafer W, slurry aggregates and abrasive debris generated from the silicon wafer W will continuously accumulate inside the foamed portion of the abrasive cloth 109.

[0040] These deposits can accumulate inside the abrasive cloth 109 and solidify, sometimes causing damage to the surface of the silicon wafer W during abrasion. Therefore, the abrasive cloth 109 needs to be cleaned by periodically rinsing the deposits.

[0041] Next, refer to Figures 1-4 Explain the composition of the cleaning treatment device. Figures 1-4 The cleaning device 1 shown is a device that uses a horn-shaped ultrasonic generator 5 to ultrasonically clean the abrasive cloth while supplying cleaning liquid to it. It includes a track 3, an ultrasonic generator 5, and a cleaning liquid supply nozzle 7.

[0042] Track 3 is a component used to mount the ultrasonic wave generating device 5, such as... Figure 1 As shown, it is fixed to the sun gear 105 and the inner gear 107 in such a way that it spans the inner periphery 101a and the outer periphery 101b of the lower platform 101 radially.

[0043] like Figure 2 As shown, track 3 includes: frame-shaped track components 3a and 3b, upper connecting components 11 and 13, and lower connecting components 15 and 17. The frame-shaped track components 3a and 3b are rectangular and frame-shaped tracks equipped with ultrasonic generating devices 5. The long side of the rectangle faces the horizontal direction, which is the radial direction of the lower platform 101 in this case, and the short side faces the vertical direction. Furthermore, reinforcing components such as cross braces can be installed inside the frame of the frame-shaped track components 3a and 3b. Figure 2 The track 3 has a pair of two frame-shaped track members 3a and 3b, but the number of frame-shaped track members is not limited to two.

[0044] The upper connecting members 11 and 13 are plate materials that connect the frame-shaped track members 3a and 3b at their upper ends along the length direction. Upper connecting member 11 connects to one end along the length direction, and upper connecting member 13 connects to the other end along the length direction. There are no particular limitations on the connection method between the upper connecting members 11 and 13 and the frame-shaped track members 3a and 3b. They can be fastened using bolts, nuts, etc., or joined by welding, etc.

[0045] The lower connecting members 15 and 17 are as follows: they connect the lower end faces of the frame-shaped track members 3a and 3b, which are opposite to and located below the upper frame-shaped track members 3a and 3b, in the longitudinal direction, and have a surface on the lower surface that contacts the sun gear 105 and the internal gear 107 when the track 3 is fixed to the sun gear 105 and the internal gear 107. In the following description, the case in which the lower surface of the lower connecting member 15 contacts the sun gear 105 and the lower surface of the lower connecting member 17 contacts the internal gear 107 will be used as an example.

[0046] Figure 2 In the middle, the lower connecting member 15 connects to one end in the length direction, and the lower connecting member 17 connects to the other end in the length direction. The connection means between the lower connecting member 15 and the lower connecting member 17 and the frame-shaped track members 3a and 3b are not particularly limited. They can be fastened with bolts, nuts, etc., or joined by welding, etc.

[0047] like Figure 2 As shown, the lower connecting members 15 and 17 preferably have gear fixing holes 15a and 17a, which are provided on the surfaces that contact the sun gear 105 and the internal gear 107. The gear fixing holes 15a and 17a are holes used to fix the track 3 to the sun gear 105 and the internal gear 107. Figure 2 The example shows through holes through which the lower connecting members 15 and 17 pass through from top to bottom.

[0048] like Figure 3 As shown, for example, the lower connecting members 15 and 17 are arranged on the sun gear 105 and the inner gear 107, and the pin 31a passes through the gear fixing holes 15a and 17a. Furthermore, the pin 31a is inserted into the holes provided in the sun gear 105 and the inner gear 107, thereby the track 3 is completely fixed to the sun gear 105 and the inner gear 107 through the gear fixing holes 15a and 17a.

[0049] Furthermore, the gear fixing holes 15a and 17a can be internal threads with threaded grooves on the inside. In this case, the pin 31a will become an external thread for bolts or the like that engage with the gear fixing holes 15a and 17a.

[0050] The materials used for the frame-shaped track components 3a and 3b, the upper connecting components 11 and 13, and the lower connecting components 15 and 17 constituting the track 3 are preferably materials with high rigidity. Specifically, stainless steel or titanium are preferred as they easily ensure that the track 3 has sufficient rigidity to withstand the weight of the ultrasonic generating device 5, but resin or the like can also be used.

[0051] The ultrasonic generating device 5 is a horn-shaped ultrasonic generating device that can transmit ultrasonic waves to the cleaning liquid supplied to the abrasive cloth 109 of the abrasive device 100, and as... Figure 2 and Figure 3 As shown, it includes: a main body 21, a horn 23, and a sliding part 25.

[0052] The main body 21 is a component including a vibrator for vibrating the horn 23. The frequency of the vibrator is preferably set to 15 to 100 kHz. The horn 23 is a component that generates ultrasonic waves by vibrating with the vibrator, and is connected to the main body 21 in a manner facing the abrasive cloth 109, which is to be cleaned. Specifically, when the abrasive cloth 109 attached to the lower platform 101 is to be cleaned, the horn 23 can be arranged facing downwards.

[0053] However, the direction of the horn 23 can be made movable. For example, if the grinding device 100 is a double-sided grinding device and can also wash the grinding cloth attached to the upper platform, the horn 23 can be configured to rotate about a horizontal axis (not shown) as a center. The horn 23 can also be configured to... Figure 2 The state is flipped up and down and is positioned so that it faces upwards in the manner of the abrasive cloth 109 attached to the upper platform.

[0054] The speaker 23 is preferably capable of generating high-amplitude ultrasonic waves, specifically, it is preferably capable of applying ultrasonic waves of 10 μm or more and 40 μm or less.

[0055] The higher the tensile strength of the material used for the speaker 23, the better it can withstand high-amplitude ultrasonic waves. Therefore, materials with high tensile strength, such as stainless steel and titanium, are preferred. Furthermore, when comparing stainless steel and titanium, titanium has an advantage in terms of tensile strength. In addition, stainless steel or titanium is preferred because it is less likely to become an impurity when adhering to the abrasive cloth 109 during cleaning.

[0056] The sliding part 25 is a component arranged across the frame-shaped track members 3a and 3b, and is a component that allows the ultrasonic generating device 5 to move on the track 3. Specifically, the sliding part 25 is a component that moves along the long side of the frame-shaped track members 3a and 3b, i.e. Figure 1 , Figure 3 The component that moves the ultrasonic generating device 5 by moving the sun gear in direction A or the internal gear in direction B.

[0057] Figure 2 and Figure 3 In order to simplify the drawing, the sliding part 25 is configured as a component that is placed directly on the flat plate on the upper surface of the frame-shaped track components 3a and 3b, and the ultrasonic generating device 5 is configured to slide along the track 3 by sliding on the frame-shaped track components 3a and 3b, but the sliding method is not limited to this.

[0058] For example, regarding the sliding method, bearings, wheels, tracks, etc. can be provided in the sliding part 25 of the ultrasonic generating device 5 or the frame-shaped track members 3a and 3b of the track 3 to enable sliding. When it is a wheel, it is desirable to provide a rim on the outer periphery of the wheel in a way that is embedded in the inner side of the frame-shaped track members 3a and 3b, and then to make the tread surface conical or arc-shaped.

[0059] Furthermore, the sliding method can be manual or automatic. Automatic sliding methods may include: rotating the shaft via gears, or attaching a rope to the sliding part 25 of the ultrasonic generator 5 and then pulling the rope.

[0060] Particularly preferred is that the ultrasonic generating device 5 can move along the track 3 in the direction of the sun gear A or the direction of the internal gear B while the lower platform 101 is rotating. In this way, while the lower platform 101 is rotating, the ultrasonic generating device 5 is moved from the center of the lower platform 101 (… Figure 1 The inner periphery 101a) moves towards the outer periphery 101b or in the opposite direction while being ultrasonically cleaned, thereby efficiently cleaning the entire surface of the abrasive cloth 109.

[0061] Furthermore, track 3 is preferably adjustable, such as Figure 4The ultrasonic generator 5 shown has a height distance H between the horn 23 and the abrasive cloth 109. As such a configuration, a mechanism for raising and lowering the ultrasonic generator 5 could be provided on the track 3, but it is preferable to adjust the distance H by moving the ultrasonic generator 5 up and down along the entire track 3 by moving the sun gear 105 or the internal gear 107 up and down.

[0062] At this time, even if the track 3 and the ultrasonic generating device 5 do not have the lifting function of the horn 23, the level and height of the track 3 can still be adjusted and maintained with high precision by adjusting the height of the sun gear 105 or the internal gear 107, and the distance (interval H) between the horn 23 and the abrasive cloth 109 can be kept constant.

[0063] Figure 1 The cleaning fluid supply nozzle 7 shown is used to supply cleaning water to the abrasive cloth 109. Preferably, the cleaning fluid supply nozzle 7 supplies cleaning fluid to the abrasive cloth 109 to create a water seal between the horn 23 and the abrasive cloth 109. Therefore, during ultrasonic cleaning, the cleaning fluid reliably fills the space between the horn 23 and the surface of the abrasive cloth 109, allowing ultrasonic waves to be transmitted to the cleaning fluid and effectively cleaning the abrasive cloth 109. That is, the horn 23 will not separate from the cleaning fluid surface, preventing ultrasonic waves from being transmitted to the cleaning fluid.

[0064] The phrase "to seal the horn 23 with water" as used here includes not only the case where the front end of the horn 23 and the abrasive cloth 109 are sealed with water, but also the case where the horn front end and the abrasive cloth are sealed with water even when a liquid other than water is used as a cleaning solution.

[0065] The location of the cleaning fluid supply nozzle 7 is not particularly limited as long as it can supply cleaning water to the abrasive cloth 109. However, in order to form a water seal between the horn 23 and the abrasive cloth 109, it is preferable to place it near the horn 23. Therefore, more preferably, the cleaning fluid supply nozzle 7 is also configured to move in the same way when the ultrasonic generating device 5 moves on the track 3.

[0066] Thus, the cleaning device 1 can perform ultrasonic cleaning in the following manner: while moving the ultrasonic generating device 5 on the track 3, ultrasonic waves are generated by the speaker 23, and the generated ultrasonic waves are transmitted to the abrasive cloth 109 via the cleaning liquid.

[0067] Next, an example of a cleaning method for the abrasive cloth 109 using the cleaning treatment device 1 will be briefly described. First, the cleaning device 1 is fixed to the sun gear 105 and internal gear 107 of the abrasive device 100. Next, the horn 23 is oriented towards the abrasive cloth 109 to be cleaned, and then the distance H between the horn 23 and the abrasive cloth 109 is set. The distance H is preferably such that it creates a water seal between the horn 23 and the abrasive cloth 109, specifically 5 mm or less. Furthermore, the lower limit of the distance H is 0 mm, allowing the horn 23 to contact the abrasive cloth 109.

[0068] Next, while supplying a cleaning solution such as pure water, ammonia, KOH, NaOH, or TMAH (tetramethylammonium hydroxide) to the cleaning solution supply nozzle 7 to form a water seal between the speaker 23 and the abrasive cloth 109, the ultrasonic generating device 5 is driven to generate ultrasonic waves from the speaker 23. The ultrasonic waves are then transmitted to the interior of the abrasive cloth 109 via the cleaning solution to remove accumulated substances.

[0069] Furthermore, since ultrasound is easily transmitted in liquids, applying ultrasound after the cleaning solution has penetrated into the interior of the abrasive cloth 109 allows the ultrasound to easily transmit in the cleaning solution, thereby enhancing the ability to remove deposits from the interior of the abrasive cloth 109.

[0070] During washing, while the lower platform 101 is rotating, the water flows along track 3 on one side. Figure 1 , Figure 3 The washing process, which involves moving the sun gear in direction A or the internal gear in direction B, effectively cleans the entire surface of the abrasive cloth 109.

[0071] In addition, when the grinding device 100 is a double-sided grinding device with an upper platform, the grinding cloth attached to the upper platform can also be washed.

[0072] Specifically, the speaker 23 is positioned facing upwards and toward the abrasive cloth 109 attached to the upper platform. While the cleaning liquid supply nozzle 7 supplies cleaning liquid to the abrasive cloth attached to the upper platform, the ultrasonic generating device 5 is driven to create a water seal between the speaker 23 and the abrasive cloth 109, thereby generating ultrasonic waves from the speaker 23. The ultrasonic waves are then transmitted to the interior of the abrasive cloth 109 via the cleaning liquid to remove accumulated substances.

[0073] At this time, the cleaning fluid will flow down from the abrasive cloth 109 due to its own weight. However, by setting the distance between the horn 23 and the abrasive cloth 109 to a degree that the surface tension of the cleaning fluid can be used to create a water seal between the horn 23 and the abrasive cloth 109, even if the cleaning fluid flows down, the surface tension of the cleaning fluid can still be used to maintain the water seal.

[0074] Furthermore, even when the horn 23 is oriented upwards or downwards, the water seal gap can be maintained by utilizing the surface tension of the cleaning fluid, and is less than 5 mm when the cleaning fluid is pure water. Example

[0075] The present invention will be specifically illustrated below with examples, but the present invention is not limited to these examples.

[0076] (Example) Will Figures 1-4 The cleaning device 1 shown is fixed to the abrasive device 100, and then an attempt is made to clean the abrasive cloth 109 attached to the lower platform 101. Specifically, a cleaning treatment device 1 is first prepared, which has a stainless steel track 3 and a titanium horn 23 as an ultrasonic generating device 5. The track 3 is configured with lower connecting members 15 and 17 having gear fixing holes 15a and 17a.

[0077] Next, the prepared cleaning device 1's track 3 is fixed to the sun gear 105 and internal gear 107 of the grinding device 100 via gear fixing holes 15a and 17a. The radial length of the grinding cloth 109 of the grinding device 100 is set to 1500mm, and the material is made of foamed polyurethane pad.

[0078] Furthermore, with the front end of the horn 23 facing the abrasive cloth 109, the target distance (interval H) between the abrasive cloth 109 and the horn 23 is set to 1 mm, 3 mm, and 5 mm. The sun gear 105 and the internal gear 107 are raised and lowered. While generating ultrasonic waves, the distance (interval H) is measured every 250 mm within a measurement range of 0 mm to 1500 mm.

[0079] The results are shown in Table 1. In addition, the so-called “measurement position” in Table 1 shows the radial distance from the inner circumferential end of the abrasive cloth 109 when the position of the inner circumferential end of the abrasive cloth 109 on the sun gear 105 side is set to 0 mm.

[0080] [Table 1]

[0081] As shown in Table 1, under any target distance, the actual measured value of the distance (interval H) is the same as the target distance. It can be seen that the cleaning treatment device 1, when fixed to the abrasive device 100, can keep the distance (interval H) between the speaker 23 and the abrasive cloth 109 constant.

[0082] Next, the operation is carried out with a target distance (space H) of 3 mm between the abrasive cloth 109 and the speaker 23. While supplying the abrasive cloth 109 with pure water at 25°C as a cleaning solution, the ultrasonic generating device 5 is driven to create a water seal between the speaker 23 and the abrasive cloth 109, thereby generating ultrasonic waves from the speaker 23. The amplitude of the ultrasonic waves is set to 20 μm, and the frequency of the vibrator of the ultrasonic generating device 5 is set to 40 kHz.

[0083] Furthermore, while rotating the lower platform 101 counterclockwise, the ultrasonic generating device 5 is manually slid on the track 3 to perform ultrasonic cleaning of the entire surface of the abrasive cloth 109. After ultrasonic cleaning, the extent to which the accumulated material inside the abrasive cloth 109 is removed is checked to evaluate the effectiveness of the material removal. As a result, the removal effect of the deposits can be observed, and the surface of the abrasive cloth 109 is not damaged.

[0084] (Comparative example) The ultrasonic generating device 5 used in the embodiment is mounted on a stainless steel handle and intended to be held above the abrasive cloth 109 of the abrasive device 100. However, the handle is not rigid enough to keep the distance (interval H) between the abrasive cloth 109 and the speaker constant.

[0085] As described above, according to the embodiments of the present invention, even when equipped with a horn-shaped ultrasonic generating device 5, the cleaning processing device 1 can still maintain the distance H between the horn 23 and the abrasive cloth 109 with high precision and perform ultrasonic cleaning of the abrasive cloth 109 with good efficiency.

[0086] This instruction manual includes the following methods. [1]: A cleaning treatment apparatus comprising a horn-shaped ultrasonic generator that transmits ultrasonic waves to a cleaning liquid supplied to an abrasive cloth in an abrasive device for ultrasonic cleaning of the abrasive cloth, the abrasive device having a lower platform on which the abrasive cloth is attached to an upper surface, a sun gear disposed on the inner side of the lower platform, and an inner gear disposed on the outer side of the lower platform, the cleaning treatment apparatus being characterized in that... The device is equipped with a track for mounting the ultrasonic wave generating device, the track being fixed to the sun gear and the internal gear in a manner that spans the lower platform. The ultrasonic generating device is capable of moving on the track, and Ultrasonic cleaning is performed by moving the ultrasonic generating device on the track while generating ultrasonic waves from a horn, and transmitting the generated ultrasonic waves to the abrasive cloth via the cleaning liquid. [2]: The cleaning treatment device according to [1] above is characterized in that the track has a gear fixing hole and is fixed to the sun gear and the internal gear through the gear fixing hole, and the gear fixing hole is provided on the surface that contacts the sun gear and the internal gear. [3]: The cleaning treatment apparatus according to [1] or [2] above is characterized in that the track can adjust the distance between the horn of the ultrasonic generating device and the abrasive cloth in the height direction by moving the sun gear or the internal gear up and down. [4]: The cleaning treatment apparatus according to any one of [1] to [3] above is characterized in that, in the state of the lower platform rotation, the ultrasonic generating device is capable of moving on the track in the direction of the sun gear or the direction of the internal gear. [5]: The washing treatment apparatus according to any one of [1] to [4] above is characterized in that the material of the track is stainless steel or titanium. [6]: The cleaning treatment apparatus according to any one of [1] to [5] above is characterized in that the horn of the ultrasonic generating device is made of stainless steel or titanium. [7]: The cleaning treatment apparatus according to any one of [1] to [6] above is characterized in that it comprises a cleaning liquid supply nozzle, which supplies the cleaning liquid to the abrasive cloth so that the horn and the abrasive cloth are subjected to a water seal.

[0087] Furthermore, the present invention is not limited to the embodiments described above. The embodiments described above are illustrative examples, and all technical solutions having a substantially identical structure to the technical concept described in the claims of the present invention and capable of performing the same effects are included within the technical scope of the present invention.

Claims

1. A cleaning treatment apparatus comprising a horn-shaped ultrasonic generator that transmits ultrasonic waves to a cleaning liquid supplied to an abrasive cloth in an abrasive device for ultrasonic cleaning of the abrasive cloth, the abrasive device having a lower platform on which the abrasive cloth is attached to an upper surface, a sun gear disposed on the inner side of the lower platform, and an inner gear disposed on the outer side of the lower platform, characterized in that... The cleaning device includes a track for mounting the ultrasonic generator, the track being fixed to the sun gear and the internal gear in a manner that spans the lower platform. The ultrasonic wave generating device is capable of moving on the track, and, Ultrasonic cleaning is performed by moving the ultrasonic generating device on the track while generating ultrasonic waves from a horn, and transmitting the generated ultrasonic waves to the abrasive cloth via the cleaning liquid.

2. The washing and processing apparatus according to claim 1, characterized in that, The track has a gear fixing hole and is fixed to the sun gear and the inner gear through the gear fixing hole, which is located on the surface that contacts the sun gear and the inner gear.

3. The washing and processing apparatus according to claim 1, characterized in that, The track can adjust the vertical spacing between the horn of the ultrasonic generator and the abrasive cloth by moving the sun gear or the internal gear up and down.

4. The washing and processing apparatus according to any one of claims 1 to 3, characterized in that, While the lower platform is rotating, the ultrasonic generating device can move along the track in the direction of the sun gear or the inner gear.

5. The washing and cleaning device according to claim 1, characterized in that, The track is made of stainless steel or titanium.

6. The washing and processing apparatus according to claim 1, characterized in that, The horn of the ultrasonic generating device is made of stainless steel or titanium.

7. The washing and processing apparatus according to claim 1, characterized in that, The device is equipped with a cleaning fluid supply nozzle, which supplies the cleaning fluid to the abrasive cloth to create a water seal between the speaker and the abrasive cloth.

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