Gas inlet device of waste gas treatment equipment

Abstract

The invention relates to a gas inlet device of waste gas treatment equipment, which comprises a gas inlet top cover, the gas inlet top cover is connected with a Y-shaped gas inlet pipe, the Y-shaped gas inlet pipe comprises a vertical pipe section and an inclined pipe section, the gas inlet top cover is provided with a waste gas inlet, the inclined pipe section is connected with the waste gas inlet, and the vertical pipe section is connected with the inclined pipe section. The bottom end of the vertical pipe section is intersected with the inclined pipe section; a telescopic movable scraper assembly is installed in the inclined pipe section and used for conducting mechanical blockage removal and dust removal on a pipe cavity of the Y-shaped air inlet pipe. And a heating belt is arranged on the air inlet valve connecting pipe. The gas inlet pipeline can be effectively prevented from being blocked, long-term stable operation of equipment is guaranteed, and the waste gas treatment efficiency and capacity are remarkably improved by optimizing the gas inlet mode.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and more specifically, to an air intake device for an exhaust gas treatment equipment. Background Technology

[0002] The semiconductor device manufacturing process generates a large amount of process waste gas containing combustible components (hydrogen ≥250Slm) and solid dust.

[0003] These waste gases face two major technical challenges when entering the treatment equipment: 1. Pipeline blockage problem: Dust in the exhaust gas is prone to condensation, adhesion and accumulation in pipelines and valves at low temperatures, which reduces the effective diameter of the pipeline and increases resistance, eventually triggering equipment alarms or even shutdowns, seriously affecting the continuity of production.

[0004] 2. Processing efficiency issues: Traditional air intake methods typically allow exhaust gas to enter the reaction chamber parallel to the combustion flame. In this method, some process gases at the edge of the airflow fail to mix and contact fully with the high-temperature flame; they are rapidly drawn away from the reaction zone under negative pressure, resulting in incomplete treatment and low exhaust gas destruction efficiency.

[0005] Existing technologies typically employ single-mode heating or intermittent purging to address blockages, but these methods are limited in effectiveness and cannot handle demanding conditions involving high dust levels and large flow rates. Furthermore, there is a lack of effective means to optimize the intake airflow field, making it difficult to overcome the bottleneck in equipment processing capacity. Summary of the Invention

[0006] The purpose of this application is to provide an air intake device for a waste gas treatment equipment, which can effectively prevent blockage of the air intake pipeline, ensure long-term stable operation of the equipment, and significantly improve the treatment efficiency and capacity of waste gas by optimizing the air intake method.

[0007] To achieve the above objectives, the present invention provides an air intake device for a waste gas treatment equipment, including an air inlet cover, the air inlet cover being connected to a Y-shaped air inlet pipe, the Y-shaped air inlet pipe including a vertical pipe section and an inclined pipe section, the air inlet cover being provided with a waste gas inlet, the inclined pipe section being connected to the waste gas inlet, and the bottom end of the vertical pipe section intersecting with the inclined pipe section; A retractable scraper assembly is installed inside the inclined pipe section. The scraper assembly is used to mechanically clean and remove dust from the cavity of the Y-shaped air intake pipe. An intake valve assembly and an intake valve connecting pipe, wherein a heating band is provided on the intake valve connecting pipe; An intake branch pipe is connected between the intake valve assembly and the Y-shaped intake pipe. The intake branch pipe includes an intake bifurcation pipe and an intake straight pipe that can be connected to the vertical pipe section. The two air outlets of the intake bifurcation pipe and the air outlet of the intake straight pipe are respectively connected to the top opening of the vertical pipe section; A nitrogen purging module and a pressure detection module are connected to the intake valve connecting pipe corresponding to the intake bifurcation pipe. The nitrogen purging module includes a hot nitrogen purging pipe, and a purging branch line is connected between the hot nitrogen purging pipe and the pressure detection module.

[0008] In an optional embodiment, a burner is provided at the center of the inner side of the air inlet top cover, and the nozzle of the burner is arranged downwards. The exhaust gas inlet is located on the circumferential periphery of the burner and extends outward from the inside to the outside along the radial direction of the inlet top cover. The angle between the inclination direction of each exhaust gas inlet and the blowing direction of the burner is 30-45°.

[0009] In an optional embodiment, the top cover of the air inlet is further connected to an air inlet, which is horizontally positioned below the exhaust gas inlet and includes 90° bends located on both sides of the top cover of the air inlet in the same radial direction.

[0010] In an optional embodiment, the air inlet cover includes a top cover outer shell and a top cover inner shell arranged concentrically, the space between the top cover outer shell and the top cover inner shell forms a top cover interlayer, and the air inlet and the exhaust gas inlet are respectively connected to the interlayer space of the top cover interlayer.

[0011] In an optional embodiment, a mixed gas inlet is provided on the inner shell of the top cover, and the mixed gas inlet corresponds one-to-one with the exhaust gas inlet. In the inclined direction of the exhaust gas inlet, the projections of the mixed gas inlet and the exhaust gas inlet overlap. The Y-shaped air inlet pipe is inserted into the interlayer space of the top cover interlayer through the exhaust gas inlet.

[0012] In an optional embodiment, the exhaust gas inlet includes an exhaust gas inlet flange, and the Y-type inlet pipe includes a Y-type inlet pipe flange that can be connected to the exhaust gas inlet flange and a Y-type inlet pipe sleeve connected to the Y-type inlet pipe flange, the Y-type inlet pipe sleeve extending into the top cover interlayer. The inclined pipe section is inserted into the Y-type intake pipe sleeve by the Y-type intake pipe flange, and the gap between the inclined pipe section and the Y-type intake pipe sleeve constitutes the intake pipe interlayer of the Y-type intake pipe. The open end of the inclined pipe section is recessed within the open end of the Y-shaped air intake pipe sleeve. An air intake notch is provided at the open end of the Y-shaped air intake pipe sleeve, and the air intake notch is located on the side of the open end of the inclined pipe section.

[0013] In an optional embodiment, the open end of the Y-shaped air inlet sleeve is located at the mixed gas inlet, so that the air inlet can remain in the interlayer space of the top cover layer. Alternatively, the open end of the Y-shaped air intake pipe sleeve is inserted into the cavity of the inner shell of the top cover, and at least a portion of the air intake notch can intersect with the interlayer space of the top cover interlayer.

[0014] In an optional embodiment, the scraper assembly includes a cylinder, a fixing plate, and a scraper. The scraper is connected to the telescopic rod of the cylinder, the cylinder is connected to the fixing plate, and the fixing plate is installed on the inlet of the inclined pipe section.

[0015] In an optional embodiment, the pressure detection module includes a pressure detection tube connected to the intake valve connecting pipe and a pressure sensor connected to the pressure detection tube, and the purging branch line is connected between the hot nitrogen purging pipe and the pressure detection tube.

[0016] In an optional embodiment, the hot nitrogen purging pipe is connected to a heater and a solenoid valve, the outlet of the heater is provided with a temperature switch, and the solenoid valve and the temperature switch are electrically connected to the temperature control unit of the nitrogen purging module.

[0017] The air intake device of the exhaust gas treatment equipment in this application can fundamentally solve the problem of pipeline blockage in the treatment of high dust exhaust gas, and significantly reduce the frequency of equipment maintenance and the risk of downtime.

[0018] Other features and advantages of this application will be described in detail in the following detailed description section. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the air intake device of the waste gas treatment equipment in this application; Figure 2 for Figure 1 A structural diagram of one side; Figure 3 for Figure 1 A structural diagram of the other side; Figure 4 This is a schematic diagram of the external structure of the air intake top cover; Figure 5This is a schematic diagram of the internal structure of the air intake top cover; Figure 6 This is a schematic diagram of the Y-shaped air intake pipe. Figure 7 A schematic diagram of the structure of the nitrogen purging module, pressure detection module, and inlet valve connecting pipe; Figure 8 This is a schematic diagram of the scraper assembly.

[0021] icon: 1-Air inlet top cover; 1a-Top cover outer shell; 1b-Top cover inner shell; 11-Exhaust gas inlet; 111-Exhaust gas inlet flange; 12-Burn; 13-Air inlet; 14-Mixed gas inlet; 2-Y-type intake pipe; 21-Vertical pipe section; 22-Inclined pipe section; 23-Y-type intake pipe flange; 24-Y-type intake pipe sleeve; 25-Air intake notch; 3-Scraper assembly; 31-Cylinder; 32-Fixing plate; 33-Scraper; 4-Intake valve assembly; 5-Intake valve connecting pipe; 6-Intake bifurcation pipe; 7-Intake straight pipe; 8-Nitrogen purging module; 81-Hot nitrogen purging pipe; 82-Purge branch line; 83-Heater; 84-Solenoid valve; 85-Temperature switch; 86-Temperature control unit; 9-Pressure detection module; 91-Pressure detection tube; 92-Pressure sensor. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0023] In the description of this application, it should be noted that the terms "inner" and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0024] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "setup" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0025] The exhaust gas treatment equipment in this application has an air intake device that is specifically used in process exhaust gas treatment systems with large flow rates of hydrogen and a lot of dust, especially to improve the air intake conditions of process exhaust gas during the process of introducing it into high-temperature incineration equipment.

[0026] See Figure 1 and combined Figures 2-8 The exhaust gas treatment equipment in this invention includes an air inlet cover 1, which is connected to the top of the high-temperature incineration equipment and is specifically used to introduce process exhaust gas containing dust into the high-temperature incineration equipment for incineration treatment.

[0027] The top cover 1 of the air inlet is connected to a Y-shaped air inlet pipe 2. The Y-shaped air inlet pipe 2 includes a vertical pipe section 21 and an inclined pipe section 22. An exhaust gas inlet 11 is provided on the top cover 1 of the air inlet. The inclined pipe section 22 is connected to the exhaust gas inlet 11. The bottom end of the vertical pipe section 21 intersects with the inclined pipe section 22. A retractable scraper assembly 3 is installed inside the inclined pipe section 22. The scraper assembly 3 is used to mechanically clean and remove dust from the cavity of the Y-shaped air intake pipe 2. When the scraper assembly 3 is running, it can effectively remove dust adhering to the pipe wall, realize the mechanical cleaning function, and significantly reduce the risk of pipe blockage caused by dust accumulation.

[0028] It also includes an intake valve assembly 4 and an intake valve connecting pipe 5. Process exhaust gas enters the high-temperature incineration equipment through the intake valve assembly 4 and the intake valve connecting pipe 5. The intake valve assembly 4 is connected to the Y-type intake pipe 2 through the intake valve connecting pipe 5. The outer wall of the intake valve connecting pipe 5 is wrapped with a heating strip to continuously heat the pipeline and the internal gas, preventing dust from condensing and adhering due to temperature drop.

[0029] An intake branch pipe is connected between the intake valve assembly 4 and the Y-shaped intake pipe 2. The intake branch pipe includes an intake bifurcation pipe 6 and an intake straight pipe 7 that can be connected to the vertical pipe section 21. The two air outlets of the intake bifurcation pipe 6 and the air outlet of the intake straight pipe 7 are respectively connected to the top opening of the vertical pipe section 21. The intake bifurcation pipe 6 forms a two-part intake diversion structure, which can cope with a sudden increase in exhaust gas flow, avoid single pipe over-limit alarms, and ensure stable operation of the equipment.

[0030] Meanwhile, when there is a high level of dust in the process exhaust gas, if one of the intake bifurcation pipes 6 becomes blocked, the other can serve as an online redundant channel to ensure stable air intake and continuous stable operation of the equipment. The intake straight pipe 7 serves as a one-to-one backup pipe and can be connected to other backup equipment to achieve equipment-level redundancy and further improve system reliability. The intake bifurcation pipe 6 is also equipped with a nitrogen purging port for purging residual process exhaust gas in the pipeline after equipment failure.

[0031] A nitrogen purging module 8 and a pressure detection module 9 are connected to the intake valve connecting pipe 5 corresponding to the intake bifurcation pipe 6. The nitrogen purging module 8 includes a hot nitrogen purging pipe 81, which is connected to a heater 83 and a solenoid valve 84. A temperature switch 85 is provided at the outlet of the heater 83. The solenoid valve 84 and the temperature switch 85 are electrically connected to the temperature control unit 86 of the nitrogen purging module 8 to achieve intelligent control.

[0032] When the temperature switch 85 detects that the outlet temperature of the heater 83 is lower than the set value, the temperature control unit 86 controls the solenoid valve 84 to close and stop purging, ensuring that the temperature of the hot nitrogen meets the anti-blocking requirements.

[0033] The pressure detection module 9 includes a pressure detection tube 91 connected to the intake valve connecting pipe 5, and a pressure sensor 92 connected to the pressure detection tube 91. The pressure sensor 92 is specifically in the form of a negative pressure sensor, and a purging branch line 82 is connected between the hot nitrogen purging pipe 81 and the pressure detection tube 91.

[0034] The negative pressure sensor is used to monitor the pressure of the intake pipe. At the same time, hot nitrogen is introduced through the flow-limited purging branch line 82 to purge the pressure detection tube 91 to prevent dust blockage.

[0035] The purging line 82 can introduce a small amount of hot nitrogen into the pressure detection tube 91 to continuously purge the interface of the pressure sensor 92, preventing dust from clogging the pressure measuring port and ensuring the accuracy and continuity of pressure monitoring.

[0036] The hot nitrogen purge pipe 81 is connected to the inlet valve connecting pipe 5 via a clamp and a stainless steel pipe. It is used to heat the process exhaust gas. At the same time, the heating tape wrapped on the inlet valve connecting pipe 5 also heats the pipeline and the internal gas. This is to prevent dust in the process exhaust gas from adhering to the inlet pipeline and the inside of the inlet valve assembly 4 and causing blockage, which would lead to equipment alarm and shutdown.

[0037] The top of the vertical section 21 of the Y-shaped intake pipe 2 and the bottom of the inclined section 22 are connected to the intake port cover 1 and the intake branch pipe 6 or the intake straight pipe 7 respectively by KF clamps. The other interface, namely the top port of the inclined section 22, is used to connect the scraper assembly 3.

[0038] The exhaust gas treatment equipment in this application has an air intake device that effectively prevents dust from clogging the air intake device by integrating a multi-layered anti-clogging system that includes hot nitrogen preheating, pipeline heating, mechanical scraper 33, and nitrogen purging.

[0039] By combining a dual-redundant air intake with a one-to-one backup pipeline setup, online redundancy and flow buffering are achieved. Furthermore, through an air intake structure with a sandwiched flow stabilization and inclined air intake angle, the problems of pipeline blockage and low treatment efficiency in the treatment of high-dust, high-flow-rate hydrogen waste gas can be fundamentally solved, achieving long-term stable operation and efficient treatment of the equipment.

[0040] A burner 12 is disposed at the center of the inner side of the air inlet top cover 1, with the nozzle of the burner 12 facing downwards. Further, an exhaust gas inlet 11 is disposed on the circumferential periphery of the burner 12, and extends radially outwards from the inside to the outside along the air inlet top cover 1. The angle between the inclination direction of each exhaust gas inlet 11 and the blowing direction of the burner 12 is 30-45°. Preferably, the angle between the inclination direction of each exhaust gas inlet 11 and the blowing direction of the burner 12 is 45°, which allows the process exhaust gas to vertically enter the flame, greatly enhancing the gas-flame mixing intensity and improving processing efficiency.

[0041] From the perspective of ensuring complete combustion, an air inlet 13 is also connected to the top cover 1 of the air inlet. The air inlet 13 is horizontally arranged below the exhaust gas inlet 11 and includes 90° bends on both sides of the top cover 1 of the air inlet. Externally supplied air enters the top cover 1 of the air inlet through the air inlet 13 of the 90° bend. The air supplied from both sides can ensure the air volume. At the same time, the arrangement of the air inlet on the top cover 1 of the air inlet can form a relatively balanced air supply form, ensuring that the process exhaust gas can be well mixed with the air.

[0042] The air inlet top cover 1 is specifically a sandwich structure, including a top cover outer shell 1a and a top cover inner shell 1b arranged concentrically. The space between the top cover outer shell 1a and the top cover inner shell 1b constitutes the top cover sandwich. The air inlet 13 and the exhaust gas inlet 11 are respectively connected to the sandwich space of the top cover sandwich, which enables the air and process exhaust gas to mix in the sandwich space and plays a good buffering effect during the mixing process, avoiding impact on the flame and ensuring the stability of process exhaust gas incineration treatment.

[0043] The top cover interlayer with a stable flow, combined with the air outlet direction set at 45° to the flame axis, can optimize the flow field and improve mixing efficiency.

[0044] The exhaust gas inlet 11 includes an exhaust gas inlet flange 111. The Y-type inlet pipe 2 includes a Y-type inlet pipe flange 23 that can be connected to the exhaust gas inlet flange 111 and a Y-type inlet pipe sleeve 24 connected to the Y-type inlet pipe flange 23. The Y-type inlet pipe sleeve 24 extends into the top cover interlayer.

[0045] The Y-type air inlet pipe 2 is inserted into the interlayer space of the top cover layer through the exhaust gas inlet port 11. The exhaust gas inlet port 11 is specifically designed for the Y-type air inlet pipe 2 to be inserted and connected. At the same time, the exhaust gas inlet port flange 111 and the Y-type air inlet pipe flange 23 are mated and fitted together, and the two flanges are fixed with clamps after mating, so that the Y-type air inlet pipe 2 is stably and reliably installed on the exhaust gas inlet port 11.

[0046] The inclined pipe section 22 is inserted into the Y-shaped inlet pipe sleeve 24 via the Y-shaped inlet pipe flange 23. The gap between the inclined pipe section 22 and the Y-shaped inlet pipe sleeve 24 forms the inlet pipe interlayer of the Y-shaped inlet pipe 2. The inlet pipe interlayer provides a buffer space for the process exhaust gas before it enters the top cover interlayer, effectively homogenizing the airflow velocity, avoiding airflow disturbance, and further optimizing the mixing effect. This allows the process exhaust gas to be effectively buffered in the inlet pipe interlayer before it is discharged from the bottom end of the inclined pipe section 22.

[0047] Air enters through the air inlets 13 on both sides via the fan. It first enters the top cover interlayer to restrict the airflow velocity, and then enters the cavity of the high-temperature incineration equipment through the interlayer of the Y-shaped air inlet pipe 2. This avoids direct entry into the cavity, which would affect the stability of the flame, and also provides sufficient oxygen for processing large volumes of hydrogen.

[0048] In the existing air intake structure, the flame and the process exhaust gas are parallel in the air intake direction of the top cover 1 of the air intake port. Gases that are far from the flame are drawn away by the negative pressure at the outlet before they are treated, which greatly affects the efficiency of exhaust gas treatment.

[0049] The top cover interlayer and the inclined shape of the exhaust gas inlet 11 relative to the burner 12 in this application greatly improve the mixing effect of exhaust gas and flame, avoid the gas "short circuit" phenomenon, and greatly improve the exhaust gas destruction efficiency (DRE) and treatment capacity. It can make the process exhaust gas fully combusted and improve the treatment efficiency.

[0050] The inner shell 1b of the top cover is provided with a mixed gas inlet 14. After the air and process exhaust gas are buffered and mixed in the interlayer space, they enter the cavity of the high-temperature incineration equipment through the mixed gas inlet 14 and are treated by the combustion action of the burner 12 flame.

[0051] The mixed gas inlet 14 corresponds one-to-one with the exhaust gas inlet 11, and the projections of the mixed gas inlet 14 and the exhaust gas inlet 11 overlap in the inclined direction of the exhaust gas inlet 11, so that the inclined direction of the mixed gas inlet 14 on the inner shell 1b of the top cover also forms a 45° angle with respect to the flame direction of the burner 12.

[0052] During the flow of the mixed gas, it enters the inner cavity of the equipment through the inclined mixed gas inlet 14. This arrangement allows the mixed gas to be burned at an angle relative to the flame direction of the burner 12, so that the process waste gas and the supplied air can come into contact with the high-temperature flame and react immediately after entering the cavity, greatly improving the process gas processing capacity.

[0053] From the angle at which air and process exhaust gas can be buffered and mixed at the bottom of the Y-shaped air inlet pipe 2, both the bottom end of the inclined pipe section 22 and the bottom end of the Y-shaped air inlet pipe sleeve 24 are provided with open pipe openings. The open pipe opening of the inclined pipe section 22 is recessed into the open pipe opening of the Y-shaped air inlet pipe sleeve 24, which allows the open pipe opening at the bottom end of the inclined pipe section 22 to remain inside the Y-shaped air inlet pipe sleeve 24. Furthermore, an air inlet notch 25 is provided at the open pipe opening of the Y-shaped air inlet pipe sleeve 24. The air inlet notch 25 is located on the side of the open pipe opening of the inclined pipe section 22, which allows the air entering the top cover interlayer to mix with the process exhaust gas at the air inlet notch 25.

[0054] The Y-shaped intake pipe 2 has an intake pipe jacket inside. Combined with the open opening of the inclined pipe section 22 recessed into the open opening of the Y-shaped intake pipe sleeve 24, the incoming process exhaust gas can be buffered and stabilized. After entering the intake pipe jacket, the process exhaust gas first enters the intake pipe jacket at the open opening of the inclined pipe section 22. After being buffered and stabilized, it is then mixed and diluted by the air supplemented by the side air intake gap 25, and finally treated by combustion reaction.

[0055] From the angle of the Y-shaped intake pipe sleeve 24 installed in the top cover interlayer, in one form, the open end of the Y-shaped intake pipe sleeve 24 is located at the mixed gas inlet 14, so that the air intake gap 25 can remain in the interlayer space of the top cover interlayer, ensuring that air enters the intake pipe interlayer stably.

[0056] In another configuration, the open end of the Y-shaped air inlet sleeve 24 is inserted into the cavity of the inner shell 1b of the top cover through the mixed gas inlet 14, and at least a portion of the air inlet gap 25 can intersect with the interlayer space of the top cover layer, achieving multi-stage mixing of air and exhaust gas and further improving mixing uniformity. This configuration can, to a certain extent, avoid the retention of dust in the process exhaust gas in the top cover interlayer, effectively reducing dust blockage in the top cover interlayer.

[0057] The scraper assembly 3 specifically includes a cylinder 31, a fixing plate 32, and a scraper 33, which periodically cleans the dust from the inner wall of the Y-shaped air intake pipe 2. The scraper 33 has a ring structure, and its center is connected to the end of the telescopic rod of the cylinder 31. The edge of the scraper 33 can fit against the inner wall of the pipe, allowing it to clean the inner wall of the pipe during telescopic movement.

[0058] The scraper 33 is connected to the telescopic rod of the cylinder 31, and the cylinder 31 is connected to the fixing plate 32, which is installed on the opening of the inclined pipe section 22. When the scraper assembly 3 is activated, the cylinder 31 drives the scraper 33 to reciprocate along the inner wall of the inclined pipe section 22, effectively removing dust adhering to the pipe wall, realizing the mechanical unblocking function, and significantly reducing the risk of pipe blockage caused by dust accumulation.

[0059] In this application, a hot nitrogen source is connected to the corresponding intake valve connecting pipe 5 of the intake bifurcation pipe 6 to preheat the incoming process exhaust gas. At the same time, a heating strip is wrapped around the outer wall of the entire intake valve assembly 4 and the intake valve connecting pipe 5 to continuously heat the pipeline and the internal gas, preventing dust from adhering due to temperature drop.

[0060] A scraper assembly 3 is installed on the Y-shaped air intake pipe 2 where the airflow converges. Driven by a cylinder 31, the scraper 33 periodically or as needed scrapes away the dust accumulated on the inner wall of the Y-shaped air intake pipe 2.

[0061] A nitrogen purging port is provided on the intake branch pipe 6, which serves as the main intake path, to purge residual process waste gas and dust in the pipeline after the equipment is shut down.

[0062] Two sets of "one-to-two" intake bifurcation pipes 6 are used as the main intake path. On the one hand, they can divert suddenly increased exhaust gas flow to avoid single pipe over-limit alarms. On the other hand, when one path is blocked, the other path can serve as a redundant backup to ensure uninterrupted operation of the equipment.

[0063] Two additional sets of one-to-one intake straight pipes 7 are provided as backup channels for the system. They can be connected to other processing equipment to achieve equipment-level backup, further improving the reliability of the entire system.

[0064] The top cover of the air inlet 1 has a sandwich structure. Air enters the top cover sandwich from both sides, first passes through flow stabilization and speed limiting, and then smoothly enters the cavity.

[0065] The direction of the final mixed gas inlet 14 of the air inlet top cover 1 is inclined at a 45° angle to the flame direction of the burner 12, and is actually perpendicular to the flame direction. This allows the process exhaust gas and combustion air to immediately generate strong turbulence and cross-mixing with the high-temperature flame after entering the cavity, ensuring that all gas molecules can fully contact the flame and react, thereby greatly improving the exhaust gas treatment capacity and destruction efficiency.

[0066] By connecting a negative pressure sensor to the intake valve connecting pipe 5, real-time monitoring of the system's operating status is achieved, providing a data foundation for preventive maintenance and intelligent control.

[0067] It should be noted that, where there is no conflict, the features in the embodiments of this application can be combined with each other.

[0068] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An air intake device for a waste gas treatment equipment, characterized in that, Includes an air inlet top cover, the air inlet top cover is connected to a Y-shaped air inlet pipe, the Y-shaped air inlet pipe includes a vertical pipe section and an inclined pipe section, the air inlet top cover is provided with an exhaust gas inlet, the inclined pipe section is connected to the exhaust gas inlet, and the bottom end of the vertical pipe section intersects with the inclined pipe section; A retractable scraper assembly is installed inside the inclined pipe section. The scraper assembly is used to mechanically clean and remove dust from the cavity of the Y-shaped air intake pipe. An intake valve assembly and an intake valve connecting pipe, wherein a heating band is provided on the intake valve connecting pipe; An intake branch pipe is connected between the intake valve assembly and the Y-shaped intake pipe. The intake branch pipe includes an intake bifurcation pipe and an intake straight pipe that can be connected to the vertical pipe section. The two air outlets of the intake bifurcation pipe and the air outlet of the intake straight pipe are respectively connected to the top opening of the vertical pipe section; A nitrogen purging module and a pressure detection module are connected to the intake valve connecting pipe corresponding to the intake bifurcation pipe. The nitrogen purging module includes a hot nitrogen purging pipe, and a purging branch line is connected between the hot nitrogen purging pipe and the pressure detection module.

2. The air intake device of the waste gas treatment equipment according to claim 1, characterized in that, A burner is provided at the center of the inner side of the air inlet top cover, and the nozzle of the burner is set downwards; The exhaust gas inlet is located on the circumferential periphery of the burner and extends outward from the inside to the outside along the radial direction of the inlet top cover. The angle between the inclination direction of each exhaust gas inlet and the blowing direction of the burner is 30-45°.

3. The air intake device of the waste gas treatment equipment according to claim 1, characterized in that, An air inlet is also connected to the top cover of the air inlet. The air inlet is horizontally positioned below the exhaust gas inlet and includes 90° bends located on both sides of the top cover of the air inlet in the same radial direction.

4. The air intake device of the waste gas treatment equipment according to claim 3, characterized in that, The air inlet top cover includes a top cover outer shell and a top cover inner shell arranged concentrically. The space between the top cover outer shell and the top cover inner shell forms a top cover interlayer. The air inlet and the exhaust gas inlet are respectively connected to the interlayer space of the top cover interlayer.

5. The air intake device of the waste gas treatment equipment according to claim 4, characterized in that, The inner shell of the top cover is provided with a mixed gas inlet, which corresponds one-to-one with the exhaust gas inlet. In the inclined direction of the exhaust gas inlet, the projections of the mixed gas inlet and the exhaust gas inlet overlap. The Y-shaped air inlet pipe is inserted into the interlayer space of the top cover layer through the exhaust gas inlet.

6. The air intake device of the waste gas treatment equipment according to claim 5, characterized in that, The exhaust gas inlet includes an exhaust gas inlet flange, and the Y-type inlet pipe includes a Y-type inlet pipe flange that can be connected to the exhaust gas inlet flange and a Y-type inlet pipe sleeve connected to the Y-type inlet pipe flange, the Y-type inlet pipe sleeve extending into the top cover interlayer. The inclined pipe section is inserted into the Y-type intake pipe sleeve by the Y-type intake pipe flange, and the gap between the inclined pipe section and the Y-type intake pipe sleeve constitutes the intake pipe interlayer of the Y-type intake pipe. The open end of the inclined pipe section is recessed within the open end of the Y-shaped air intake pipe sleeve. An air intake notch is provided at the open end of the Y-shaped air intake pipe sleeve, and the air intake notch is located on the side of the open end of the inclined pipe section.

7. The air intake device of the waste gas treatment equipment according to claim 6, characterized in that, The open end of the Y-shaped air inlet sleeve is located at the air inlet of the mixed gas, so that the air inlet can remain in the interlayer space of the top cover layer. Alternatively, the open end of the Y-shaped air intake pipe sleeve is inserted into the cavity of the inner shell of the top cover, and at least a portion of the air intake notch can intersect with the interlayer space of the top cover interlayer.

8. The air intake device of the waste gas treatment equipment according to claim 5, characterized in that, The scraper assembly includes a cylinder, a fixing plate, and a scraper. The scraper is connected to the telescopic rod of the cylinder. The cylinder is connected to the fixing plate, and the fixing plate is installed on the inlet of the inclined pipe section.

9. The air intake device of the waste gas treatment equipment according to claim 5, characterized in that, The pressure detection module includes a pressure detection tube connected to the intake valve connecting pipe and a pressure sensor connected to the pressure detection tube. The purging branch line is connected between the hot nitrogen purging pipe and the pressure detection tube.

10. The air intake device of the waste gas treatment equipment according to claim 5, characterized in that, The hot nitrogen purging pipe is connected to a heater and a solenoid valve. A temperature switch is installed at the outlet of the heater. The solenoid valve and the temperature switch are electrically connected to the temperature control unit of the nitrogen purging module.

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