Wide-temperature-range energy-saving temperature control system
By incorporating heat exchangers and throttling devices into semiconductor temperature control equipment, combined with precise control methods, the problem of temperature control over a wide temperature range is solved, achieving precise temperature control and energy-saving effects, while reducing power consumption and costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-31
- Publication Date
- 2026-04-03
AI Technical Summary
Existing semiconductor temperature control equipment has high power consumption, low temperature control accuracy, and high cost over a wide temperature range, making it difficult for traditional systems to achieve precise temperature control and energy saving.
By adding heat exchangers and throttling devices to the plant water system and circulating fluid system, combined with precise control methods, accurate temperature control can be achieved in multiple temperature ranges. Energy loss is reduced by using a replenishment water tank, and wide temperature range control can be achieved by using heat exchangers and expansion valves.
It achieves precise temperature control over a wide temperature range, reduces power consumption, improves temperature control accuracy, reduces costs, and saves energy.
Smart Images
Figure CN121785404A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of semiconductor manufacturing technology, specifically a wide-temperature-range energy-saving temperature control system. Background Technology
[0002] In advanced integrated circuit manufacturing processes, new demands have arisen for semiconductor temperature control equipment to meet the processing requirements. With advancements in process technology, semiconductor temperature control equipment needs to provide both low and high temperatures, i.e., a wide temperature range. To meet this wide temperature range requirement, cascade systems are often employed, using multiple evaporators to control the high and low temperature segments by activating compressors at different temperature stages. However, due to the diverse temperatures involved in semiconductor processes, long-term operation and precise temperature control are required. Since circulating fluid is expensive, prolonged operation not only leads to significant fluid consumption but also results in energy waste. Summary of the Invention
[0003] To address the shortcomings of existing technologies, this invention provides a wide-temperature-range energy-saving temperature control system. By adding a heat exchanger to the plant water system and circulating fluid system, it achieves precise temperature control across multiple temperature ranges. At the same time, it incorporates a control method into the control mode, solving the problems of high power consumption, low temperature control accuracy, and high temperature control cost of traditional semiconductor temperature control systems.
[0004] The technical solution adopted by this invention to solve the above-mentioned technical problems is: a wide-temperature-range energy-saving temperature control system, comprising: The plant water system includes a first Y-type filter, the outlet of which is connected to the inlet of a proportional valve, the outlet of which is connected to a first manual valve, and the outlet of which is connected to a water tank. The circulating fluid system includes a second Y-type filter, the inlet of which is connected to a high-temperature liquid pipeline at the client end, a second hand valve connected to the outlet of the second Y-type filter, a flow meter connected to the outlet of the second hand valve, a lower outlet of the water tank connected to the upper inlet of the heating tank, an upper outlet of the heating tank connected to the upper inlet of the water tank, a water pump installed at the lower outlet of the water tank, a pressure sensor connected to the outlet of the water pump, a temperature sensor connected to the outlet of the pressure sensor, a third hand valve connected to the outlet of the temperature sensor, and the outlet of the third hand valve connected to a liquid pipeline at the client end requiring the specified temperature. The refrigeration system includes a compressor. The compressor outlet pipe is connected to the lower inlet of the second heat exchanger and the upper outlet of the third heat exchanger. The lower outlet of the second heat exchanger is connected to the lower inlet of the heating tank. The upper outlet of the second heat exchanger is connected to the compressor inlet. The upper outlet of the third heat exchanger is connected to the lower inlet of the first heat exchanger. The lower outlet of the third heat exchanger is connected to the lower inlet of the second heat exchanger. The upper outlet of the first heat exchanger is connected to the customer's ambient temperature liquid pipeline. The lower outlet of the first heat exchanger is connected to the lower inlet of the heating tank. The upper inlet of the first heat exchanger and the lower outlet of the second heat exchanger are connected. A high-pressure gauge is installed on the compressor outlet pipe, and a low-pressure gauge is installed on the compressor inlet pipe. A pressure protection switch is installed between the high-pressure gauge and the low-pressure gauge.
[0005] Preferably, the outlet of the proportional valve is connected to the lower inlet of the third heat exchanger.
[0006] Preferably, the flow meter outlet is connected to the upper inlet of the second heat exchanger.
[0007] Preferably, a first solenoid valve is provided between the lower outlet pipe of the second heat exchanger and the lower inlet of the heating tank, and a one-way valve is connected to the outlet of the first solenoid valve.
[0008] Preferably, a second solenoid valve is provided between the lower outlet pipe of the second heat exchanger and the upper inlet pipe of the first heat exchanger.
[0009] Preferably, a second expansion valve is installed between the compressor outlet pipe and the lower inlet pipe of the second heat exchanger.
[0010] Preferably, a drying filter is installed between the lower outlet pipe of the third heat exchanger and the lower inlet pipe of the second heat exchanger. A sight glass is connected to the outlet of the drying filter, and a first expansion valve is installed on the outlet pipe of the sight glass.
[0011] Preferably, the lower outlet pipe of the third heat exchanger is also connected to the inlet pipe of the compressor, and a third expansion valve is provided on the connecting pipe.
[0012] Preferably, a pipeline is added to the end of the flow meter and the outlet of the water pump, and a third hand valve is provided in the middle of the pipeline.
[0013] Preferably, the water outlet pipe at the lower end of the water tank is connected to the outlet pipe at the upper end of the first heat exchanger.
[0014] The beneficial effects of this invention are: 1. A wide-temperature-range energy-saving temperature control system. This invention adds a heat exchanger and a throttling device to the traditional plant water system and circulating fluid system, which can achieve precise temperature control in multiple temperature ranges. At the same time, the control system adds the throttling device control method to the traditional system, which greatly reduces power consumption and improves temperature control accuracy. 2. A wide-temperature-range energy-saving temperature control system, which uses a replenishment water tank to cool the water tank by passing the plant water through the replenishment water tank. This keeps the temperature in the water tank within a controllable range, reduces liquid energy loss in the water tank, and saves costs. At the same time, through the application of heat exchangers and expansion valves, it realizes the functions of low-temperature cooling, medium-temperature cooling and high-temperature cooling, with a wide temperature control range and precise temperature control. Attached Figure Description
[0015] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0016] Figure 1 This is a schematic diagram of the principle structure of the present invention.
[0017] In the picture: 1. First Y-type filter; 2. Proportional valve; 3. First manual valve; 4. Water tank; 5. Second Y-type filter; 6. Second manual valve; 7. Flow meter; 8. Third manual valve; 9. Temperature sensor; 10. Pressure sensor; 11. Water pump; 12. Heating tank; 13. First solenoid valve; 14. Second solenoid valve; 15. First heat exchanger; 16. Second heat exchanger; 17. Third heat exchanger; 18. Compressor; 19. High pressure gauge; 20. Low pressure gauge; 21. Pressure protection switch; 22. First expansion valve; 23. Second expansion valve; 24. Third expansion valve; 25. Dryer filter; 26. Sight glass; 27. Third manual valve; 28. Check valve. Detailed Implementation
[0018] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments. Example
[0019] See Figure 1 A wide-temperature-range energy-saving temperature control system includes a plant water system. The plant water system includes a first Y-type filter 1. The inlet of the first Y-type filter 1 is connected to an external plant water pipe. The outlet of the first Y-type filter 1 is connected to the inlet of a proportional valve 2. The outlet of the proportional valve 2 is connected to a first manual valve 3. The outlet of the first manual valve 3 is connected to a water tank 4.
[0020] In practice, the plant water pipeline is first connected to the inlet of the first Y-type filter 1, and the first hand valve 3 is opened. A portion of the plant water passes through the first Y-type filter 1 and enters the bottom of the water tank 4. A U-shaped pipe is installed at the bottom of the water tank 4. When the plant water passes through the U-shaped pipe at the bottom of the water tank 4, it can cool the liquid inside the water tank 4. At the same time, the flow rate of the plant water slows down, thereby keeping the liquid inside the water tank 4 at a normal water temperature. In addition, when another portion of the plant water passes through the first Y-type filter 1, the proportional valve 2 is automatically opened. Then, the water flows through the pipeline from the lower inlet of the third heat exchanger 17 into the interior of the third heat exchanger 17 and exchanges heat with the exhaust end of the compressor 18. After that, it enters the interior of the first heat exchanger 15 from the upper outlet of the third heat exchanger 17, and then is discharged from the upper outlet of the first heat exchanger 15 into the customer's normal temperature water system. Example
[0021] The technical solution is basically the same as that in Embodiment 1, see below. Figure 1 The difference lies in the circulating fluid system, which includes a second Y-type filter 5. The inlet of the second Y-type filter 5 is connected to the high-temperature liquid pipeline of the client. The outlet of the second Y-type filter 5 is connected to a second hand valve 6. The outlet of the second hand valve 6 is connected to a flow meter 7. The lower outlet of the water tank 4 is connected to the upper inlet of the heating tank 12. The upper outlet of the heating tank 12 is connected to the upper inlet of the water tank 4. A water pump 11 is installed at the lower outlet of the water tank 4. A pipeline is added between the end of the flow meter 7 and the outlet of the water pump 11, and a third hand valve 27 is installed in the middle of the pipeline. The outlet of the water pump 11 is connected to a pressure sensor 10. The outlet of the pressure sensor 10 is connected to a temperature sensor 9. The outlet of the temperature sensor 9 is connected to a third hand valve 8. The outlet of the third hand valve 8 is connected to the liquid pipeline of the client requiring the specified temperature.
[0022] In specific operation, when the required temperature is below +20°C, the control mode is as follows: open the second hand valve 6 and the third hand valve 8. The high-temperature liquid from the client passes through the second Y-type filter 5, the second hand valve 6 and the flow meter 7, and then enters the interior of the second heat exchanger 16 from the upper inlet. After exchanging heat with the refrigeration system medium, the high-temperature liquid enters the interior of the heating tank 12 from the lower outlet of the second heat exchanger 16 through the first solenoid valve 13 and the one-way valve 28. At this time, the heating wire in the heating tank 12 can heat the refrigerated liquid. Start the water pump 11, and pump the heated liquid out and discharge it to the client through the pressure sensor 10, the temperature sensor 9 and the third hand valve 8 in sequence, thereby providing the client with the liquid at the required temperature. When the required temperature is above +20°C, the control mode is as follows: Open the second hand valve 6 and the third hand valve 8. The high-temperature liquid from the client passes through the second Y-type filter 5, the second hand valve 6 and the flow meter 7, and then enters the interior of the second heat exchanger 16 from the upper inlet. After exchanging heat with the refrigeration system medium, the high-temperature liquid is discharged from the lower outlet of the second heat exchanger 16. At this time, close the first solenoid valve 13 and the one-way valve 28, and open the second solenoid valve 14. The liquid passes through the second solenoid valve 14 and enters the interior of the first heat exchanger 15 from the upper inlet to exchange heat with the plant water. After heat exchange, the water flows from the lower outlet of the first heat exchanger 15 into the heating tank 12. The one-way valve 28, which is closed at this time, can prevent liquid backflow. The heating wire in the heating tank 12 can heat the liquid after heat exchange. Start the water pump 11, and pump the heated liquid out and discharge it to the client through the pressure sensor 10, the temperature sensor 9 and the third hand valve 8 in sequence, thereby providing the client with the liquid at the required temperature.
[0023] It should be noted that in this embodiment, the purpose of setting the third hand valve 27 is to reduce the outlet pressure of the water pump 11, thereby ensuring that the liquid pressure and flow rate supplied to the customer can meet the customer's needs. Example
[0024] The technical solution is basically the same as that in Embodiment 2, see below. Figure 1 The difference lies in the refrigeration system, which includes a second heat exchanger 16, a third heat exchanger 17, and a compressor 18. The outlet pipe of the compressor 18 is connected to the lower inlet of the second heat exchanger 16 and the upper outlet of the third heat exchanger 17. The lower outlet of the second heat exchanger 16 is connected to the lower inlet of the heating tank 12. A first solenoid valve 13 is installed between the lower outlet pipe of the second heat exchanger 16 and the lower inlet of the heating tank 12. A one-way valve 28 is connected to the outlet of the first solenoid valve 13. The upper outlet of the second heat exchanger 16 is connected to the inlet of the compressor 18. The outlet of the flow meter 7 is connected to the upper inlet of the second heat exchanger 16. The upper outlet of the third heat exchanger 17 is connected to the lower inlet of the first heat exchanger 15. The lower outlet of the third heat exchanger 17 is connected to the second heat exchanger 16. The lower inlet of heat exchanger 16 is connected to the proportional valve 2, and the lower inlet of the third heat exchanger 17 is connected to the proportional valve 2. The upper outlet of the first heat exchanger 15 is connected to the customer's ambient temperature liquid pipeline. The lower outlet of the water tank 4 is connected to the upper outlet of the first heat exchanger 15. The lower outlet of the first heat exchanger 15 is connected to the lower inlet of the heating tank 12. The upper inlet of the first heat exchanger 15 and the lower outlet of the second heat exchanger 16 are connected to the first heat exchanger 15. A second solenoid valve 14 is installed between the lower outlet of the second heat exchanger 16 and the upper inlet of the first heat exchanger 15. A high pressure gauge 19 is installed on the outlet pipeline of the compressor 18, and a low pressure gauge 20 is installed on the inlet pipeline of the compressor 18. A pressure protection switch 21 is installed between the high pressure gauge 19 and the low pressure gauge 20.
[0025] A second expansion valve 23 is installed between the outlet pipe of the compressor 18 and the lower inlet pipe of the second heat exchanger 16. A dryer filter 25 is installed between the lower outlet pipe of the third heat exchanger 17 and the lower inlet pipe of the second heat exchanger 16. A sight glass 26 is connected to the outlet of the dryer filter 25. A first expansion valve 22 is installed on the outlet pipe of the sight glass 26. The lower outlet pipe of the third heat exchanger 17 is also connected to the inlet pipe of the compressor 18, and a third expansion valve 24 is installed on the connecting pipe.
[0026] In specific operation, the high-temperature section refrigeration process is as follows: After the compressor 18 draws in the medium gas at the suction end, it is compressed and discharged from the exhaust port as high-temperature and high-pressure gas. The high-temperature and high-pressure gas passes through the high-pressure gauge 19 and the second expansion valve 23 and enters the lower inlet of the second heat exchanger 16. Here, the second expansion valve 23 can open when the equipment is unloaded or under a small load, while the first expansion valve 22 can be automatically adjusted so that a portion of the low-temperature and low-pressure liquid passes through the lower inlet of the second heat exchanger 16. After a small amount of heat exchange between the high-temperature and high-pressure gas and the low-temperature and low-pressure liquid, it returns to the compressor 18 from the upper outlet of the second heat exchanger 16. Medium-temperature refrigeration process: After the compressor 18 draws in the medium gas at the suction end, it is compressed and discharged from the exhaust port. It enters the interior of the third heat exchanger 17 through the upper inlet, and then exchanges heat with the plant water. After that, it is discharged from the lower outlet of the third heat exchanger 17 as a high-pressure room-temperature liquid medium. After being filtered by the dryer filter 25, it flows in through the sight glass 26. The sight glass 26 is set to facilitate manual observation of the real-time status of the refrigerant. Then, the high-pressure room-temperature liquid passes through the first expansion valve 22 and enters the interior of the second heat exchanger 16 through the lower inlet. After exchanging heat with the circulating liquid, it returns to the compressor 18 from the upper outlet of the second heat exchanger 16. Low-temperature cooling process: A third expansion valve 24 is added between the lower outlet of the third heat exchanger 17 and the return gas end of the compressor 18. The third expansion valve 24 can set its own temperature. When the temperature in the return gas pipeline is higher than the set temperature, the third expansion valve 24 can automatically adjust its opening according to the temperature, thereby cooling the intake gas of the compressor 18 and ensuring that the medium returning to the inside of the compressor 18 is in a low-temperature state. A low-pressure gauge 20 is added to the return gas end to detect the pressure of the low-pressure medium in real time.
[0027] The working principle of this invention during use: Plant water circulation process: First, connect the plant water pipeline to the inlet of the first Y-type filter 1, open the first hand valve 3, and a portion of the plant water enters the bottom of the water tank 4 after passing through the first Y-type filter 1. The bottom of the water tank 4 is equipped with a U-shaped pipe. When the plant water passes through the U-shaped pipe at the bottom of the water tank 4, the plant water can cool the liquid inside the water tank 4. At the same time, the flow rate of the plant water slows down, thereby keeping the liquid inside the water tank 4 at a normal water temperature. In addition, when another part of the plant water passes through the first Y-type filter 1, the proportional valve 2 is automatically opened. Then the water flows through the pipeline from the lower inlet of the third heat exchanger 17 into the interior of the third heat exchanger 17 and exchanges heat with the exhaust end of the compressor 18. After that, it enters the interior of the first heat exchanger 15 from the upper outlet of the third heat exchanger 17, and then is discharged from the upper outlet of the first heat exchanger 15 into the customer's ambient temperature water system.
[0028] Circulating liquid circulation process: When the required temperature is below +20°C, the control mode is as follows: Open the second hand valve 6 and the third hand valve 8. The high-temperature liquid from the client passes through the second Y-type filter 5, the second hand valve 6 and the flow meter 7, and then enters the interior of the second heat exchanger 16 from the upper inlet. After exchanging heat with the refrigeration system medium, the high-temperature liquid enters the interior of the heating tank 12 from the lower outlet of the second heat exchanger 16 through the first solenoid valve 13 and the one-way valve 28. At this time, the heating wire in the heating tank 12 can heat the refrigerated liquid. Start the water pump 11, and pump the heated liquid out and discharge it to the client through the pressure sensor 10, the temperature sensor 9 and the third hand valve 8 in sequence, thereby providing the client with the liquid at the required temperature. When the required temperature is above +20°C, the control mode is as follows: Open the second hand valve 6 and the third hand valve 8. The high-temperature liquid from the client passes through the second Y-type filter 5, the second hand valve 6 and the flow meter 7, and then enters the interior of the second heat exchanger 16 from the upper inlet. After exchanging heat with the refrigeration system medium, the high-temperature liquid is discharged from the lower outlet of the second heat exchanger 16. At this time, close the first solenoid valve 13 and the one-way valve 28, and open the second solenoid valve 14. The liquid passes through the second solenoid valve 14 and enters the interior of the first heat exchanger 15 from the upper inlet to exchange heat with the plant water. After heat exchange, the water flows from the lower outlet of the first heat exchanger 15 into the heating tank 12. The one-way valve 28, which is closed at this time, can prevent liquid backflow. The heating wire in the heating tank 12 can heat the liquid after heat exchange. Start the water pump 11, and pump the heated liquid out and discharge it to the client through the pressure sensor 10, the temperature sensor 9 and the third hand valve 8 in sequence, thereby providing the client with the liquid at the required temperature.
[0029] Refrigeration process: High-temperature section refrigeration process: After the compressor 18 draws in the medium gas at the suction end, it is compressed and discharged from the exhaust port as high-temperature and high-pressure gas. The high-temperature and high-pressure gas passes through the high-pressure gauge 19 and the second expansion valve 23 and enters the lower inlet of the second heat exchanger 16. Here, the second expansion valve 23 can open when the equipment is unloaded or under a small load, while the first expansion valve 22 can automatically adjust, so that a part of the low-temperature and low-pressure liquid passes through the lower inlet of the second heat exchanger 16. After a small amount of heat exchange between the high-temperature and high-pressure gas and the low-temperature and low-pressure liquid, it returns to the compressor 18 from the upper outlet of the second heat exchanger 16. Medium-temperature refrigeration process: After the compressor 18 draws in the medium gas at the suction end, it is compressed and discharged from the exhaust port. It enters the interior of the third heat exchanger 17 through the upper inlet, and then exchanges heat with the plant water. After that, it is discharged from the lower outlet of the third heat exchanger 17 as a high-pressure room-temperature liquid medium. After being filtered by the dryer filter 25, it flows in through the sight glass 26. The sight glass 26 is set to facilitate manual observation of the real-time status of the refrigerant. Then, the high-pressure room-temperature liquid passes through the first expansion valve 22 and enters the interior of the second heat exchanger 16 through the lower inlet. After exchanging heat with the circulating liquid, it returns to the compressor 18 from the upper outlet of the second heat exchanger 16. Low-temperature cooling process: A third expansion valve 24 is added between the lower outlet of the third heat exchanger 17 and the return gas end of the compressor 18. The third expansion valve 24 can set its own temperature. When the temperature in the return gas pipeline is higher than the set temperature, the third expansion valve 24 can automatically adjust its opening according to the temperature, thereby cooling the intake gas of the compressor 18 and ensuring that the medium returning to the inside of the compressor 18 is in a low-temperature state. A low-pressure gauge 20 is added to the return gas end to detect the pressure of the low-pressure medium in real time.
[0030] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of protection claimed by the present invention. The scope of protection of the present invention is defined by the appended claims and their equivalents.
Claims
1. A wide-temperature-range energy-saving temperature control system, characterized in that, include: The plant water system includes a first Y-type filter, a proportional valve, a first hand valve, and a water tank. The inlet of the first Y-type filter is connected to the external plant water pipeline, the outlet of the first Y-type filter is connected to the inlet of the proportional valve, the outlet of the proportional valve is connected to the first hand valve, and the outlet of the first hand valve is connected to the water tank. The circulating fluid system includes a second Y-type filter, a second hand valve, a flow meter, a third hand valve, a temperature sensor, a pressure sensor, a water pump, and a heating tank. The inlet of the second Y-type filter is connected to the high-temperature liquid pipeline at the client end. The outlet of the second Y-type filter is connected to the second hand valve, and the outlet of the second hand valve is connected to the flow meter. The lower outlet of the water tank is connected to the upper inlet of the heating tank, and the upper outlet of the heating tank is connected to the upper inlet of the water tank. A water pump is installed at the lower outlet of the water tank, and the outlet of the water pump is connected to the pressure sensor. The outlet of the pressure sensor is connected to the temperature sensor, and the outlet of the temperature sensor is connected to the third hand valve. The outlet of the third hand valve is connected to the liquid pipeline at the client end requiring the specified temperature. The refrigeration system includes a first heat exchanger, a second heat exchanger, a third heat exchanger, a compressor, a high-pressure gauge, a low-pressure gauge, and a pressure protection switch. The compressor outlet pipe is connected to the lower inlet of the second heat exchanger and the upper outlet of the third heat exchanger. The lower outlet of the second heat exchanger is connected to the lower inlet of the heating tank. The upper outlet of the second heat exchanger is connected to the compressor inlet. The upper outlet of the third heat exchanger is connected to the lower inlet of the first heat exchanger. The lower outlet of the third heat exchanger is connected to the lower inlet of the second heat exchanger. The upper outlet of the first heat exchanger is connected to the customer's ambient temperature liquid pipeline. The lower outlet of the first heat exchanger is connected to the lower inlet of the heating tank. The upper inlet of the first heat exchanger and the lower outlet of the second heat exchanger are connected. A high-pressure gauge is installed on the compressor outlet pipe, and a low-pressure gauge is installed on the compressor inlet pipe. A pressure protection switch is installed between the high-pressure gauge and the low-pressure gauge.
2. The wide-temperature-range energy-saving temperature control system according to claim 1, characterized in that: The outlet of the proportional valve is connected to the lower inlet of the third heat exchanger.
3. The wide-temperature-range energy-saving temperature control system according to claim 1, characterized in that: The flow meter outlet is connected to the upper inlet of the second heat exchanger.
4. The wide-temperature-range energy-saving temperature control system according to claim 1, characterized in that: A first solenoid valve is installed between the lower outlet pipe of the second heat exchanger and the lower inlet of the heating tank, and a one-way valve is connected to the outlet of the first solenoid valve.
5. The wide-temperature-range energy-saving temperature control system according to claim 1, characterized in that: A second solenoid valve is installed between the lower outlet pipe of the second heat exchanger and the upper inlet pipe of the first heat exchanger.
6. The wide-temperature-range energy-saving temperature control system according to claim 1, characterized in that: A second expansion valve is installed between the compressor outlet pipe and the lower inlet pipe of the second heat exchanger.
7. The wide-temperature-range energy-saving temperature control system according to claim 1, characterized in that: A drying filter is installed between the lower outlet pipe of the third heat exchanger and the lower inlet pipe of the second heat exchanger. A sight glass is connected to the outlet of the drying filter, and a first expansion valve is installed on the outlet pipe of the sight glass.
8. The wide-temperature-range energy-saving temperature control system according to claim 1, characterized in that: The lower outlet pipe of the third heat exchanger is also connected to the inlet pipe of the compressor, and a third expansion valve is installed on the connecting pipe.
9. The wide-temperature-range energy-saving temperature control system according to claim 1, characterized in that: A pipeline is added to the end of the flow meter and the outlet of the water pump, and a third hand valve is installed in the middle of the pipeline.
10. A wide-temperature-range energy-saving temperature control system according to claim 1, characterized in that: The water outlet pipe at the lower end of the water tank is connected to the outlet pipe at the upper end of the first heat exchanger.