A deburring process for a pps wire needle jig plate

Abstract

The application discloses a pps wire needle jig plate burr removing process and relates to the field of PCB test jig manufacturing. The process removes burrs on a pps plate by using plasma, utilizes the physical bombardment and chemical reaction between high-activity particles in plasma and the material surface, effectively and accurately removes burrs based on the "tip effect" and "specific surface area difference" of the burrs, and is provided with a reinforced ion adsorption body in a dense array on a cathode substrate. High-density ion adsorption bodies are arranged at opening positions, positive ions in plasma are gathered and hit the plate area by utilizing the self-bias effect of the cathode, a visual detection scheme and a microneedle plasma generator are added for burrs that are difficult to remove, point-to-point burr removal is realized, the burr removing process is further refined, and the process is essentially a new material detection and standardized processing means.

Description

Technical Field

[0001] This invention relates to the field of new material standardization processing technology, specifically a deburring process for PPS thread needle fixture plates. Background Technology

[0002] In the manufacturing of online needle fixtures, PPS sheets need to be drilled with a large number of micropores to accommodate the probes. Currently, in pursuit of high precision and low burrs, the industry generally uses high-rigidity, high-cost imported Japanese PPS materials. For the burrs generated after drilling, the most similar existing cleaning technologies mainly include:

[0003] High-pressure air blowing / cleaning agent rinsing: Using compressed air or chemical cleaning agents to rinse the board after drilling in an attempt to blow away or dissolve the burrs;

[0004] Mechanical grinding / deburring: Using micro-tools or abrasives to perform secondary processing on the opening, physically scraping away burrs.

[0005] However, the above-mentioned cleaning techniques have the following drawbacks:

[0006] Incomplete cleaning: High-pressure air blowing and cleaning agent rinsing have limited effectiveness in removing firmly attached microburrs, especially deep inside holes (caused by the plastic deformation of PPS material), and residues are easily left behind;

[0007] Secondary damage is likely to occur: Mechanical grinding or the use of deburring tools are contact processing methods, which may scratch the surface of the sheet material, enlarge the hole diameter, or change the hole shape accuracy. They require high operating skills and have poor consistency.

[0008] High cost and passive approach: Simply relying on imported high-performance PPS materials is a high-cost, passive avoidance strategy that cannot solve the core problem of low material utilization and is powerless to deal with the burrs that have already been generated.

[0009] Limited functionality: The above methods only target burrs and cannot simultaneously achieve deep cleaning of oil stains and dust on the board surface, requiring additional cleaning steps.

[0010] Based on the current state of the industry, and through reference to and in-depth research on cross-domain "deburring" technologies, we have found that;

[0011] Plasma deburring of PPS is feasible to a certain extent, mainly based on the following two physical effects:

[0012] "Sharp point effect": Burrs are microscopic protrusions left after drilling. Their radius of curvature is extremely small. In a plasma environment, the electric field will preferentially concentrate on these sharp protrusions, resulting in the bombardment energy and reaction rate of active particles on the burr area being much higher than that on a flat plate surface. This makes the burrs preferentially and quickly etched away.

[0013] "Specific surface area difference": Burrs have a huge specific surface area (surface area per unit mass). Compared with a flat plate surface, under the same plasma environment, burrs receive more active particle bombardment per unit area and the reaction is more intense.

[0014] In simple terms, plasma processing is essentially an isotropic surface etching, but it has a natural "preferred attack" on "sharp, raised, and thin" burrs.

[0015] Meanwhile, experimental research on PPS revealed that;

[0016] Adapting to the material properties of PPS: PPS is a semi-crystalline polymer, and its amorphous regions are more easily etched by plasma than its crystalline regions. The burrs are mainly amorphous, loose mechanical deformation layers. Therefore, the etching rate is much higher than that of the structurally intact plate body. By controlling the above parameters, this difference in characteristics can be perfectly utilized.

[0017] Addressing the challenge of "deep and tiny" pores: Plasma, being a gaseous substance, possesses excellent diffraction and permeability, enabling it to penetrate deep into micron-sized pores without dead angles. This is an absolute advantage that mechanical methods cannot match. To enhance the plasma density within deep pores, the environmental vacuum level is improved, and the flow direction and intensity of the plasma are optimized, thereby allowing the plasma to form an "air knife" with deburring effect. Based on experimental research, a deburring process for PPS thread needle fixture plates is proposed. Summary of the Invention

[0018] To address the shortcomings of existing technologies, this invention provides a deburring process for PPS thread needle fixture plates, which solves the problems of limited technical means, poor technical effects, and insufficient cost-effectiveness in the existing deburring processes for PPS thread needle fixture plates.

[0019] To achieve the above objectives, the present invention provides the following technical solution: a deburring process for PPS thread needle fixture plates, comprising the following steps:

[0020] S1. Loading and clamping, and internal environment adjustment;

[0021] S2. First-side full-area treatment: The plate is bombarded by the plasma generation module, so that the plate receives plasma irradiation on one side.

[0022] S3. Detection and judgment: A preliminary scan is performed using a visual inspection scheme. If there are no burrs on this side, proceed to the next step.

[0023] S4. Local reinforcement treatment: If local residue is detected on the board, move the board so that the area with burrs is close to the plasma source and perform local fine treatment of the burrs.

[0024] S5. Second-side full-area processing: Flip the board over and repeat steps S2-S4 to achieve standardized processing of PPS board and detection during the processing.

[0025] S6. Internal environment decompression, material unloading;

[0026] The plate is clamped on the cathode substrate, and the cathode substrate is densely arrayed with enhanced ion adsorbents. The cathode self-bias effect is used to make positive ions in the plasma gather and bombard the plate area. At the same time, the enhanced ion adsorbents at the opening positions of the plate are arranged in a high density to form a high-density ion adsorbent, further focusing the deburring effect at the opening positions.

[0027] The plasma generation module uses a matrix plasma generator and is also equipped with a microneedle plasma generator. In step S4, the microneedle plasma generator is used to perform targeted plasma bombardment.

[0028] Preferably, the enhanced ion adsorbent is made of high-purity graphite or copper-tungsten alloy. A recess is formed by drilling on the cathode substrate, and the enhanced ion adsorbent is welded and fixed in the recess using a brazing process. Then, conductive silver paste is coated on the surface, and after curing, the top of the cathode substrate is polished so that the enhanced ion adsorbent and the cathode substrate surface are at the same level, and the enhanced ion adsorbent and the recess are tightly fitted without gaps.

[0029] Preferably, the enhanced ion adsorbent is arranged symmetrically on the surface of the cathode substrate, so that when the substrate is flipped during double-sided processing, the other side of the opening on the surface of the substrate can face the high-density ion adsorbent.

[0030] Preferably, in step S1, the drilled PPS sheet is fixed in a preset position in the vacuum chamber, the chamber door is closed, the vacuum chamber is evacuated to a preset vacuum level, and then a preset flow rate of process gas is introduced.

[0031] Preferably, the process gas includes oxygen and / or argon. The oxygen free radicals in oxygen can undergo a vigorous oxidation reaction with the hydrocarbon backbone in PPS, exhibiting good selectivity. The argon ions in argon remove burrs through physical bombardment by high-energy ions, exhibiting strong anisotropy.

[0032] Preferably, the process gas achieves a synergistic effect of physical bombardment and chemical reaction by adjusting the mixing ratio of oxygen and argon, wherein the oxygen content is 15% and the argon content is 85%.

[0033] Preferably, in step S2, a uniform plasma is generated in the vacuum chamber by activating the plasma generation module, wherein:

[0034] The matrix plasma generator uses a low power of 30W-60W and precisely controls the processing time to 2-5 minutes. The matrix plasma generator adopts a pulse mode with a pulse frequency of 1-10kHz and a duty cycle of 10%-50%, so that the heat on the surface of the board can be dissipated during the pulse interval, reducing the overall thermal effect and preventing the PPS material from deforming and degrading due to overheating.

[0035] The microneedle plasma generator uses a medium power of 80-120W; the processing time is ≤30s, and the microneedle plasma generator adopts a continuous pulse type, which can quickly and efficiently eliminate burrs point-to-point.

[0036] Preferably, in step S3, the visual inspection scheme involves assembling a high-precision optical camera module on the inner wall of the vacuum chamber, using the optical camera module to visually observe the removal of burrs on the surface of the plate; and the optical camera module provides visual positioning for the local strengthening treatment in step S4, ensuring that the microneedle plasma generator accurately acts on the area where burrs have not been removed.

[0037] Preferably, before the detection action in step S3 is performed, the current burr removal progress is detected by setting a spectrum, wherein:

[0038] By configuring a spectrometer, the intensity of specific spectral lines in the plasma is monitored in real time. When a large number of burrs are etched, corresponding characteristic spectra such as CN and CH will be generated. When the burrs are basically removed and the PPS body is mainly etched, the spectral signal will tend to stabilize. By monitoring the rate of change of the spectral signal, the burr removal ratio can be determined in real time. By setting a spectral signal threshold, the plasma generator will stop when the threshold is reached to prevent over-etching.

[0039] Preferably, the vacuum chamber is externally connected to a process gas supply and recovery module, a control host is installed externally to the vacuum chamber, a three-axis moving part is provided at the bottom of the vacuum chamber, and a clamping station is provided at the top of the three-axis moving part.

[0040] The clamping station includes the cathode substrate and a tooling fixture rotatably mounted on top of the cathode substrate. The tooling fixture has a clamping space facing the enhanced ion adsorbent.

[0041] This invention discloses a deburring process for PPS thread needle fixture plates, which has the following beneficial effects:

[0042] 1. This PPS thread needle fixture deburring process innovatively uses plasma to remove burrs from PPS sheets. Its technical basis is the physical bombardment and chemical reaction between highly active particles in plasma and the material surface. By precisely controlling the plasma power and processing time, burrs can be effectively removed without damaging the sheet material itself.

[0043] 2. The deburring process for PPS needle fixture plates involves placing the plate on a cathode substrate, on which a dense array of enhanced ion adsorbents is arranged. The cathode self-bias effect is used to cause positive ions in the plasma to gather and bombard the plate area. At the same time, the enhanced ion adsorbents at the opening positions of the plate are arranged in a high-density manner to form a high-density ion adsorbent, which further focuses the deburring effect at the opening positions, thereby achieving a highly efficient deburring effect.

[0044] 3. This PPS needle fixture deburring process for sheet metal addresses the issues of "non-homogeneous" and "regionally clustered" burrs by adding a visual inspection system and a microneedle plasma generator. After full-coverage plasma bombardment of the entire sheet surface by a matrix plasma generator, the residual burrs on the sheet surface are observed by an optical camera module. For any burrs that have not been removed, the optical camera module is used to locate them and control the movement of a three-axis moving component, so that the "partially uncleared" positions are moved to the position directly opposite the microneedle plasma generator. At this point, the microneedle plasma generator is used for precise "point-to-point" bombardment to remove the burrs, thereby further refining the deburring process.

[0045] 4. In this deburring process for PPS needle fixtures, the process gas is a mixture of oxygen and argon. During actual operation, the oxygen free radicals in the oxygen can undergo a violent oxidation reaction with the hydrocarbon backbone in PPS, exhibiting better selectivity. Meanwhile, the argon plasma in the argon gas removes burrs through the physical bombardment of high-energy ions, exhibiting strong anisotropy, thereby further enhancing the plasma deburring effect. Attached Figure Description

[0046] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0047] Figure 1 This is a flowchart of the deburring process for the PPS thread needle fixture plate of the present invention.

[0048] Figure 2 This is a cross-sectional view of the internal structure of the vacuum chamber of the present invention;

[0049] Figure 3 This is a schematic diagram of the outer surface structure of the clamping fixture of the present invention.

[0050] In the diagram: 1. Vacuum chamber; 2. Plasma generation module; 22. Matrix plasma generator; 23. Microneedle plasma generator; 3. Process gas supply and recovery module; 4. Control host; 5. Three-axis moving parts; 6. Clamping station; 61. Cathode substrate; 62. Tooling fixture; 63. Clamping space; 64. Enhanced ion adsorbent; 65. High-density ion adsorbent; 7. Optical camera module. Detailed Implementation

[0051] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention are described clearly and completely. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0052] This application provides a deburring process for PPS thread needle fixture plates, which solves the problems of limited technical means, poor technical effect, and insufficient cost-effectiveness in the existing deburring processes for PPS thread needle fixture plates.

[0053] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0054] This invention discloses a deburring process for PPS thread needle fixture plates.

[0055] According to the appendix Figure 1-3 As shown, it includes the following steps:

[0056] S1. Loading and clamping, and internal environment adjustment;

[0057] S2. First-side full-area treatment: The plasma generating module 2 bombards the board, so that the board receives plasma irradiation on one side. The board is PPS, and the main body has an extremely low coefficient of thermal expansion. When the temperature changes during the test, the deformation of the fixture is low, which can ensure that the plasma will not damage the main body of the board.

[0058] S3. Detection and judgment: A preliminary scan is performed using a visual inspection scheme. If there are no burrs on this side, proceed to the next step.

[0059] S4. Local reinforcement treatment: If local residue is detected on the board, move the board so that the area with burrs is close to the plasma source and perform local fine treatment of the burrs.

[0060] S5. Second-side full-area processing: Flip the board over and repeat steps S2-S4 to achieve standardized processing of PPS board and detection during the processing.

[0061] S6. Internal environment decompression, material unloading;

[0062] The plate is clamped on the cathode substrate 61, and the cathode substrate 61 is densely arrayed with enhanced ion adsorbents 64. The cathode self-bias effect is used to make positive ions in the plasma gather and bombard the plate area. At the same time, the enhanced ion adsorbents 64 at the opening position of the plate are arranged in a high density to form a high-density ion adsorbent 65, which further focuses the deburring effect at the opening position.

[0063] The plasma generation module 2 includes a matrix plasma generator 22 and a microneedle plasma generator 23. In step S4, the microneedle plasma generator 23 is used to perform targeted plasma bombardment.

[0064] The enhanced ion adsorbent 64 is made of high-purity graphite or copper-tungsten alloy. A recess is formed by drilling on the cathode substrate 61, and the enhanced ion adsorbent 64 is welded and fixed in the recess using a brazing process. Then, conductive silver paste is coated on the surface. After curing, the top of the cathode substrate 61 is polished so that the enhanced ion adsorbent 64 and the surface of the cathode substrate 61 are at the same level, and the enhanced ion adsorbent 64 and the recess are tightly fitted without gaps.

[0065] The enhanced ion adsorbent 64 is symmetrically arranged on the surface of the cathode substrate 61 so that when the substrate is flipped during double-sided processing, the other side of the opening position on the surface of the substrate can be directly opposite the high-density ion adsorbent 65.

[0066] In step S1, the drilled PPS sheet is fixed in a preset position in the vacuum chamber 1, the chamber door is closed, the vacuum chamber 1 is evacuated to a preset vacuum level, and then a preset flow rate of process gas is introduced.

[0067] The process gases include oxygen and / or argon. The oxygen free radicals in oxygen can undergo a violent oxidation reaction with the hydrocarbon backbone in PPS, exhibiting good selectivity. The argon ions in argon remove burrs through physical bombardment by high-energy ions, exhibiting strong anisotropy.

[0068] The process gas achieves a synergistic effect of physical bombardment and chemical reaction by adjusting the mixing ratio of oxygen and argon, with oxygen content at 15% and argon content at 85%.

[0069] In step S2, a uniform plasma is generated in the vacuum chamber 1 by activating the plasma generation module 2, wherein:

[0070] The matrix plasma generator 22 uses a low power of 30W-60W and precisely controls the processing time to 2-5 minutes. The matrix plasma generator 22 uses a pulse mode with a pulse frequency of 1-10kHz and a duty cycle of 10%-50%, so that the heat on the surface of the board can be dissipated during the pulse interval, reducing the overall thermal effect and preventing the PPS material from deforming and degrading due to overheating.

[0071] The microneedle plasma generator 23 uses a medium power of 80-120W; the processing time is ≤30s, and the microneedle plasma generator 23 adopts a continuous pulse type, which can quickly eliminate burrs point by point with high energy.

[0072] In step S3, the visual inspection scheme uses a high-precision optical camera module 7 mounted on the inner wall of the vacuum chamber 1 to visually observe the burr removal status on the surface of the plate. The optical camera module 7 also provides visual positioning for the local strengthening treatment in step S4, ensuring that the microneedle plasma generator 23 accurately acts on the area where burrs have not been removed.

[0073] Before the detection action in step S3 is executed, the current burr removal progress is detected by setting the spectrum, wherein:

[0074] By configuring a spectrometer, the intensity of specific spectral lines in the plasma is monitored in real time. When a large number of burrs are etched, corresponding characteristic spectra such as CN and CH will be generated. When the burrs are basically removed and the PPS body is mainly etched, the spectral signal will tend to stabilize. By monitoring the rate of change of the spectral signal, the burr removal ratio can be determined in real time. By setting a spectral signal threshold, the plasma generator will stop when the threshold is reached to prevent over-etching.

[0075] The vacuum chamber 1 is externally connected to a process gas supply and recovery module 3, and a control host 4 is installed externally on the vacuum chamber 1. A three-axis moving part 5 is provided at the bottom of the vacuum chamber 1, and a clamping station 6 is provided at the top of the three-axis moving part 5.

[0076] The clamping station 6 includes a cathode substrate 61 and a tooling fixture 62 rotatably disposed on the top of the cathode substrate 61. The tooling fixture 62 has a clamping space 63 facing the enhanced ion adsorbent 64.

[0077] Working Principle: This PPS thread needle fixture deburring process innovatively uses plasma to remove burrs from PPS sheets. Its technological basis lies in utilizing the physical bombardment and chemical reaction between highly active particles in plasma and the material surface. It achieves "selective" removal, primarily based on the following two physical effects: First, the "sharpness effect": Burrs are microscopic protrusions left after drilling, with extremely small radii of curvature. In a plasma environment, the electric field preferentially concentrates on these sharp protrusions, resulting in a much higher bombardment energy and reaction rate of active particles on the burr area compared to a flat sheet surface. This allows the burrs to be preferentially and rapidly etched away. Second, the "specific surface area difference": Burrs have a huge specific surface area. Compared to a flat sheet surface, under the same plasma environment, burrs receive more active particle bombardment per unit area, resulting in a more intense reaction. By precisely controlling the plasma power and processing time, burrs can be effectively removed without damaging the sheet material itself.

[0078] This solution modifies the traditional plasma box by designing a three-axis moving part 5 inside the plasma box. A clamping station 6 is installed on the three-axis moving part 5. The clamping station 6 is equipped with a cathode substrate 61 and a tooling fixture 62 that is rotatably set on the top of the cathode substrate 61. By clamping the plate onto the cathode substrate 61, which has a dense array of enhanced ion adsorbents 64, the positive ions in the plasma are concentrated and bombarded by the cathode self-bias effect. At the same time, the enhanced ion adsorbents 64 are arranged in a high density at the opening position of the plate to form a high-density ion adsorbent 65, which further focuses the deburring effect at the opening position.

[0079] In this technology, the enhanced ion adsorbent 64 is made of high-purity graphite or copper-tungsten alloy. A recess is drilled into the cathode substrate 61, and the enhanced ion adsorbent 64 is brazed and fixed into the recess. Then, conductive silver paste is coated onto the surface, and after curing, the top of the cathode substrate 61 is polished to ensure that the enhanced ion adsorbent 64 and the surface of the cathode substrate 61 are on the same horizontal plane, and that the enhanced ion adsorbent 64 and the recess are tightly fitted without gaps. Furthermore, the enhanced ion adsorbent 64 is symmetrically arranged on the surface of the cathode substrate 61, so that when the substrate is flipped during double-sided processing, the other side of the opening on the substrate surface can directly face the high-density ion adsorbent 65. The plasma generation module... 2. A matrix plasma generator 22 is used to generate plasma, and a microneedle plasma generator 23 is also configured. In actual operation, the matrix plasma generator 22 is used to bombard the entire surface of the plate with plasma. At this time, under the action of the densely arrayed reinforced ion adsorbents 64, the cations in the plasma form a "cathode self-bias effect" at the cathode substrate 61, so that the ions bombard the PPS plate on the cathode substrate 61 more densely. Furthermore, by using a high-density arrangement of the reinforced ion adsorbents 64 at the corresponding opening positions of the PPS plate to form a high-density ion adsorbent 65, the ion bombardment effect on the opening positions of the PPS plate is further enhanced, thereby effectively removing burrs at the opening positions.

[0080] Furthermore, the entire board is processed separately on both sides. By symmetrically arranging the enhanced ion adsorbent 64 on the surface of the cathode substrate 61, the other side of the opening position on the board surface can face the high-density ion adsorbent 65 after the board is flipped during processing.

[0081] Secondly, in this scheme, the process gas is a mixture of oxygen and argon. In actual operation, the oxygen free radicals in the oxygen can undergo a violent oxidation reaction with the hydrocarbon backbone in PPS, which has better selectivity; while the argon plasma in the argon gas removes burrs through the physical bombardment of high-energy ions, which has strong anisotropy, thereby further improving the plasma deburring effect.

[0082] In addition, this solution addresses the issues of "non-homogeneous" and "regionally clustered" burrs by adding a visual inspection scheme and a microneedle plasma generator 23. After the entire surface of the board is bombarded with plasma by the matrix plasma generator 22, the burr residue on the board surface is observed by the optical camera module 7. For burrs that have not been removed, the optical camera module 7 is used to locate them and control the movement of the three-axis moving part 5 so that the "partially uncleared" position is moved to be directly opposite the microneedle plasma generator 23. At this time, the microneedle plasma generator 23 is used to perform "point-to-point" precise bombardment to remove the burrs, thereby further refining the burr removal process.

[0083] Meanwhile, the solution also utilizes a spectrometer to monitor the intensity of specific spectral lines in the plasma in real time during the "burr removal detection" process. When a large number of burrs are etched, corresponding characteristic spectra such as CN and CH will be generated. When the burrs are basically removed and the PPS body is mainly etched, the spectral signal will tend to stabilize. By monitoring the rate of change of the spectral signal, the burr removal ratio can be determined in real time. By setting a spectral signal threshold, the plasma generator will stop when the threshold is reached to prevent over-etching, thereby protecting the PPS board.

[0084] Example 2, see attached document Figure 2-3 This embodiment proposes a deburring device for PPS needle fixture plates based on Embodiment 1, used to execute the process scheme proposed in Embodiment 1. In this embodiment, it includes a vacuum chamber 1, a process gas supply and recovery module 3 connected to the outside of the vacuum chamber 1, a control host 4 installed outside the vacuum chamber 1, a three-axis moving part 5 provided at the bottom inside the vacuum chamber 1, and a clamping station 6 provided at the top of the three-axis moving part 5; and a high-precision optical camera module 7 is installed on the inner side wall of the vacuum chamber 1, while a plasma generating module 2 is installed at the top inside the vacuum chamber 1. The plasma generating module 2 includes a matrix plasma generator 22 and a microneedle plasma generator 23.

[0085] The clamping station 6 includes a cathode substrate 61 and a tooling fixture 62 rotatably mounted on top of the cathode substrate 61. The tooling fixture 62 has a clamping space 63 facing the enhanced ion adsorbent 64. The enhanced ion adsorbent 64 is made of high-purity graphite or copper-tungsten alloy. A recess is drilled into the cathode substrate 61, and the enhanced ion adsorbent 64 is brazed and fixed in the recess. Then, conductive silver paste is coated on the surface. After curing, the top of the cathode substrate 61 is polished so that the enhanced ion adsorbent 64 and the surface of the cathode substrate 61 are on the same horizontal plane, and the enhanced ion adsorbent 64 and the recess are tightly fitted without gaps. At the same time, the enhanced ion adsorbent 64 is arranged in a high density at the opening position of the plate to form a high-density ion adsorbent 65. The enhanced ion adsorbent 64 is symmetrically arranged on the surface of the cathode substrate 61 so that when the plate is processed on both sides, after flipping, the other side of the opening position on the plate surface can face the high-density ion adsorbent 65.

[0086] In operation, the device involves fixing the drilled PPS sheet to a preset position within vacuum chamber 1, closing the chamber door, evacuating the chamber to a preset vacuum level, and then introducing a preset flow rate of process gas. The process gas is controlled by adjusting the oxygen and argon mixing ratio, with an oxygen content of 15% and an argon content of 85%. The control unit 4 then activates the plasma generation module 2, generating a uniform plasma within vacuum chamber 1. The matrix plasma generator 22 uses a low power of 30W-60W, operates in pulse mode with a pulse frequency of 1-10kHz and a duty cycle of 10%-50%. This allows the heat on the surface of the plate to dissipate during the pulse interval, reducing the overall thermal effect and preventing the PPS material from deforming and degrading due to overheating. The processing time is precisely controlled to be 2-5 minutes. At this time, the cations in the plasma form a "cathode self-bias effect" at the cathode substrate 61, which makes the ions bombard the PPS plate on the cathode substrate 61 more densely. Furthermore, by using a high-density arrangement of the ion adsorbents 64 at the corresponding opening positions of the PPS plate to form high-density ion adsorbents 65, the ion bombardment effect on the opening positions of the PPS plate is further enhanced, thereby effectively removing the burrs at the opening positions.

[0087] Then, the burr removal status on the board surface is observed visually using the optical camera module 7. For burrs that are not completely removed, the optical camera module 7 is positioned and moved by the three-axis moving part 5 so that the burr position is directly opposite the microneedle plasma generator 23. The microneedle plasma generator 23 uses a medium power of 80-120W and adopts a continuous pulse type. The microneedle plasma generator 23 performs precise "point-to-point" bombardment to remove burrs, with a processing time of ≤30s. Then, the high-precision optical camera module 7 is used for observation again to ensure that the burrs are completely removed.

[0088] Meanwhile, the device can also be equipped with a spectrometer to monitor the intensity of specific spectral lines in the plasma in real time. When a large number of burrs are etched, corresponding characteristic spectra such as CN and CH will be generated. When the burrs are basically removed and the PPS body is mainly etched, the spectral signal will tend to stabilize. By monitoring the rate of change of the spectral signal, the burr removal ratio can be determined in real time. By setting a spectral signal threshold, the plasma generator will stop when the threshold is reached to prevent over-etching. This module can be selected according to the processing precision.

[0089] It should be noted that, firstly, the technical content of this patent describes PPS, a high-performance special engineering plastic, as the target material of this process. Secondly, in the detection and judgment step S3 of the process, a "spectral detection scheme" is explicitly introduced, which uses a spectrometer to monitor the intensity changes of characteristic spectra such as CN and CH generated during plasma treatment in real time. This is essentially a new material detection method.

[0090] Furthermore, this process integrates both visual inspection and spectral detection as metrological methods. Visual inspection provides quantitative information on morphology and location, while spectral analysis provides quantitative data on changes in chemical composition. By setting spectral signal thresholds, the process can be controlled, demonstrating precise measurement and process control of the treatment effect.

[0091] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of this invention is defined by the appended claims and their equivalents.

Claims

1. A deburring process for PPS thread needle fixture plates, characterized in that, Includes the following steps: S1. Loading and clamping, and internal environment adjustment; S2. First-side full-area treatment: The plate is bombarded by the plasma generation module, so that the plate receives plasma irradiation on one side. S3. Detection and judgment: A preliminary scan is performed using a visual inspection scheme. If there are no burrs on this side, proceed to the next step. S4. Local reinforcement treatment: If local residue is detected on the board, move the board so that the area with burrs is close to the plasma source and perform local fine treatment of the burrs. S5. Second-side full-area processing: Flip the board over and repeat steps S2-S4 to achieve standardized processing of PPS board and detection during the processing. S6. Internal environment decompression, material unloading; The plate is clamped on the cathode substrate, and the cathode substrate is densely arrayed with enhanced ion adsorbents. At the same time, the enhanced ion adsorbents at the opening positions of the plate are arranged in a high-density manner to form a high-density ion adsorbent. The plasma generation module uses a matrix plasma generator and is also equipped with a microneedle plasma generator. In step S4, the microneedle plasma generator is used to perform targeted plasma bombardment. The enhanced ion adsorbent is made of high-purity graphite or copper-tungsten alloy. A recess is formed by drilling on the cathode substrate, and the enhanced ion adsorbent is welded and fixed in the recess using a brazing process. Then, conductive silver paste is coated on the surface. After curing, the top of the cathode substrate is polished so that the enhanced ion adsorbent and the cathode substrate surface are at the same level and the enhanced ion adsorbent and the recess are tightly fitted without gaps. In step S1, the drilled PPS sheet is fixed in a preset position in the vacuum chamber, then the chamber door is closed, the vacuum chamber is evacuated to a preset vacuum level, and then a preset flow rate of process gas is introduced. In step S2, a uniform plasma is generated in the vacuum chamber by activating the plasma generation module, wherein: The matrix plasma generator uses a low power of 30W-60W and precisely controls the processing time to 2-5 minutes. The matrix plasma generator adopts a pulse mode with a pulse frequency of 1-10kHz and a duty cycle of 10%-50%, so that the heat on the surface of the board can be dissipated during the pulse interval, reducing the overall thermal effect and preventing the PPS material from deforming and degrading due to overheating. The microneedle plasma generator uses a medium power of 80-120W; the processing time is ≤30s, and the microneedle plasma generator adopts a continuous pulse type, which can quickly and efficiently eliminate burrs point-to-point.

2. The deburring process for PPS thread needle fixture plates according to claim 1, characterized in that, The enhanced ion adsorbent is symmetrically arranged on the surface of the cathode substrate, so that when the substrate is flipped during double-sided processing, the other side of the opening on the substrate surface can face the high-density ion adsorbent.

3. The deburring process for PPS thread needle fixture plates according to claim 2, characterized in that, The process gases include oxygen and / or argon.

4. The deburring process for PPS thread needle fixture plates according to claim 3, characterized in that, The process gas is prepared by adjusting the mixing ratio of oxygen and argon, wherein the oxygen content is 15% and the argon content is 85%.

5. The deburring process for PPS thread needle fixture plates according to claim 3, characterized in that, In step S3, the visual inspection scheme uses a high-precision optical camera module mounted on the inner wall of the vacuum chamber to visually observe the removal of burrs on the surface of the plate. The optical camera module also provides visual positioning for the local strengthening treatment in step S4, ensuring that the microneedle plasma generator accurately acts on the area where burrs have not been removed.

6. The deburring process for PPS thread needle fixture plates according to claim 5, characterized in that, Before the detection action in step S3 is executed, the current burr removal progress is detected by setting a spectrum, wherein: By configuring a spectrometer, the intensity of specific spectral lines in the plasma is monitored in real time. When a large number of burrs are etched, corresponding CN and CH characteristic spectra are generated. When the burrs are basically removed and the PPS body is mainly etched, the spectral signal tends to stabilize. By monitoring the rate of change of the spectral signal, the burr removal ratio is determined in real time. By setting a spectral signal threshold, the plasma generator stops when the threshold is reached to prevent over-etching.

7. The deburring process for PPS thread needle fixture plates according to claim 6, characterized in that, The vacuum chamber is externally connected to a process gas supply and recovery module, and a control host is installed outside the vacuum chamber. A three-axis moving part is provided at the bottom of the vacuum chamber, and a clamping station is provided at the top of the three-axis moving part. The clamping station includes the cathode substrate and a tooling fixture rotatably mounted on top of the cathode substrate. The tooling fixture has a clamping space facing the enhanced ion adsorbent.

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