Rotary compensator and optical measurement system

Abstract

The invention discloses a rotary compensator and an optical measurement system, the rotary compensator comprises a hollow motor, an adapter ring, an elastic fastener and a mounting seat for placing an optical element, the mounting seat is provided with a first spherical surface fitting part and a first flange part, and the adapter ring is provided with a second spherical surface fitting part and a second flange part; the first spherical surface fitting part and the second spherical surface fitting part are opposite and are connected in a fitting manner, and the elastic fastener is connected with the first flange part and the second flange part which are opposite in a spaced manner so as to fix the mounting seat and the adapter ring; a hollow shaft of the hollow motor is fixed to the adapter ring so as to drive the adapter ring to drive the mounting base to rotate. On the basis of a spherical fitting and elastic connection form established between the adapter ring and the mounting seat by the spherical fitting part and the elastic fastener, the coaxiality of the hollow motor, the optical element and the associated optical device can be adjusted, and the influence of manufacturing and assembling errors of parts can be reduced or even eliminated; and support is provided for ensuring the consistency of the light beams, improving the measurement precision and stability and the like.

Description

Technical Field

[0001] This application relates to the field of optical measurement technology, specifically to a rotary compensator and an optical measurement system. Background Technology

[0002] Optical compensators are a type of delay device used in optical systems to continuously adjust or compensate for the phase of light waves within a certain range.

[0003] Currently, common optical compensators mainly include liquid crystal compensators and waveplate compensators. Liquid crystal compensators primarily utilize an electric field to adjust the alignment of liquid crystal molecules, thereby regulating the polarization state or phase of incident light. However, liquid crystal compensators have a relatively slow response speed and are typically used in optical displays and communications. Waveplate compensators are commonly used in optical measurement (e.g., ellipsometers, polarization microscopes), where the phase or polarization state of incident light is continuously adjusted by changing the gap between two or more birefringent crystal waveplates. However, waveplate compensators have a more complex structure and occupy a larger size or space. Therefore, proposing improvements to optical compensators has become a key focus in the industry. Summary of the Invention

[0004] The main technical problem addressed by this application is to provide a rotary compensator and an optical measurement system using the rotary compensator, which can provide support for improving measurement accuracy and stability.

[0005] According to a first aspect, one embodiment provides a rotary compensator, including a hollow motor, an adapter ring, a resilient fastener, and a mounting base for housing optical elements, wherein the hollow motor, the adapter ring, and the mounting base are arranged sequentially along the axis of the rotary compensator; wherein:

[0006] The mounting base is provided with a first spherical fitting part surrounding the axis, and the adapter ring is provided with a second spherical fitting part surrounding the axis. The first spherical fitting part and the second spherical fitting part are opposite to and fitted together in the direction of the axis.

[0007] The mounting base is further provided with a first flange portion located on the outer periphery of the first spherical fitting portion, and the adapter ring is further provided with a second flange portion located on the outer periphery of the second spherical fitting portion. The first flange portion and the second flange portion are spaced apart from each other in the direction of the axis.

[0008] The elastic fastener connects the first flange portion and the second flange portion to fix the mounting base and the adapter ring; the hollow shaft of the hollow motor is fixed to the adapter ring to drive the adapter ring to rotate the mounting base around the axis.

[0009] In some embodiments, the first spherical fitting portion protrudes from the surface of the mounting base facing the adapter ring, and the second spherical fitting portion is recessed from the surface of the adapter ring facing the mounting base.

[0010] In some embodiments, the mounting base has a mounting cavity inside, the mounting cavity having a first opening and a second opening opposite each other along the axis; the first spherical fitting portion surrounds the first opening and is disposed on the side of the mounting base facing the adapter ring; the second opening is used to allow the optical element to be placed in the mounting cavity.

[0011] In some embodiments, the rotation compensator further includes an optical element and a limiting member; the limiting member is detachably connected to the mounting base for detachably fixing the optical element within the mounting cavity.

[0012] In some embodiments, the rotation compensator further includes a plurality of optical elements with different parameters, which are alternatively positioned on the mounting base.

[0013] In some embodiments, the number of the resilient fasteners is set to multiple, and the multiple resilient fasteners are evenly arranged around the axis;

[0014] The resilient fastener includes a fastener and a resilient element; the fastener passes through one of the first flange portion and the second flange portion and is screwed onto the other of the first flange portion and the second flange portion; the resilient element is clamped between the first flange portion and the second flange portion.

[0015] In some embodiments, the rotary compensator further includes a sealed housing, the hollow motor, the adapter ring, the elastic fastener and the mounting base are disposed inside the sealed housing, and the body of the hollow motor is fixed to the sealed housing;

[0016] The sealing housing has optical interfaces on two opposite sidewalls in the direction of the axis. The optical interfaces are used to allow external light beams to be incident on the optical element along the axis, and the optical interfaces are also used to allow light beams that have passed through the optical element to exit the sealing housing along the axis.

[0017] In some embodiments, the sidewall of the sealing housing is further provided with a mating sealing ring surrounding the optical interface; the mating sealing ring is used to seal the gap between the optical device and the sealing housing when the optical device outside the sealing housing is fixed to the sealing housing;

[0018] And / or the side wall of the sealed housing is also provided with a mating magnetic ring surrounding the optical interface, the mating magnetic ring being used to fix the optical device outside the sealed housing to the sealed housing and seal the gap between the optical device and the sealed housing.

[0019] In some embodiments, the optical device includes a collimator and an analyzer, the mating seal ring is used to seal the gap between the collimator and the sealing housing, and the mating magnetic ring is used to fix the analyzer to the sealing housing.

[0020] In some embodiments, the sealing housing includes a first end cap, a first housing, a second housing, and a second end cap that are sequentially mated and sealed along the axis; wherein the first end cap and the second end cap are both provided with the optical interface through the optical interface, the adapter ring and the mounting base are located inside the first housing, the body of the hollow motor is fixed to the second housing, and the second housing has a heat dissipation structure.

[0021] According to a second aspect, one embodiment provides an optical measurement system including the rotation compensator described in the first aspect.

[0022] The rotary compensator according to the above embodiment includes a hollow motor, an adapter ring, elastic fasteners, and a mounting base for placing optical elements. The mounting base has a first spherical fitting portion and a first flange portion, and the adapter ring has a second spherical fitting portion and a second flange portion. The first spherical fitting portion and the second spherical fitting portion are opposite to and fitted together, and the first flange portion and the second flange portion are spaced apart from each other. The elastic fastener connects the first flange portion and the second flange portion to fix the mounting base and the adapter ring. The hollow shaft of the hollow motor is fixed to the adapter ring to drive the adapter ring to rotate the mounting base. Based on the spherical fitting and elastic connection between the adapter ring and the mounting base established by the spherical fitting portion and the elastic fastener, the coaxiality between the hollow motor, optical elements, and associated optical devices can be adjusted, and the influence of manufacturing and assembly errors of components can be reduced or even eliminated, providing support for ensuring beam consistency and improving measurement accuracy and stability. Attached Figure Description

[0023] Figure 1 A schematic diagram of the outer contour structure of a rotary compensator according to one embodiment (I).

[0024] Figure 2 This is a schematic diagram of the outer contour structure of a rotary compensator according to one embodiment (II).

[0025] Figure 3 This is a schematic diagram of the cross-sectional structure of a rotary compensator in the axial direction of one embodiment.

[0026] Figure 4This is an exploded view of the structure of a rotary compensator according to one embodiment.

[0027] Figure 5 This is a cross-sectional view of a rotary compensator according to one embodiment, omitting the first end cap.

[0028] Figure 6 This is a schematic diagram of the rotary compensator according to one embodiment, omitting the sealed housing and the hollow motor.

[0029] Figure 7 This is a schematic diagram (I) showing the structural relationship between the mounting base and the transition ring in a rotary compensator according to one embodiment.

[0030] Figure 8 This is a schematic diagram (II) showing the structural relationship between the mounting base and the transition ring in a rotary compensator according to one embodiment.

[0031] In the picture:

[0032] 10. Mounting base; 11. First spherical mating part; 12. First flange part; 13. Mounting cavity; 20. Adapter ring; 21. Second spherical mating part; 22. Second flange part; 30. Hollow motor; 40. Elastic fastener; 50. Optical element; 60. Limiting element; 70. Sealing housing; 71. First optical interface; 72. Second optical interface; 73. Butt sealing ring; 74. Butt magnetic ring; 75. First end cap; 76. First housing; 77. Second housing; 78. Second end cap; L. Axis. Detailed Implementation

[0033] The present application will now be described in further detail with reference to the accompanying drawings and specific embodiments. Similar elements in different embodiments are referred to by related similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of the present application. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to the present application are not shown or described in the specification. This is to avoid obscuring the core parts of the present application with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0034] Furthermore, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments. At the same time, the steps or actions in the method description can be rearranged or adjusted in a manner obvious to those skilled in the art. Therefore, the various orders in the specification and drawings are only for the clear description of a particular embodiment and do not imply a necessary order, unless otherwise stated that a particular order must be followed.

[0035] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages).

[0036] Rotary compensators are commonly found in piping systems. They typically consist of an inner pipe, an outer pipe, and a sealing packing between the outer and inner pipes. The sealing packing can absorb and compensate for axial, lateral, or angular displacements and deformations in the piping system caused by thermal expansion and contraction, installation errors, equipment vibration, foundation settlement, etc., thereby protecting the pipeline and related valves and equipment from stress damage.

[0037] In contrast, the rotation compensator provided in this application is an optical compensator used in an optical system. This rotation compensator drives the optical element to rotate, and uses the rotation effect of the optical element to dynamically and controllably modulate the light properties (such as polarization, phase, etc.). For example, when applied to a polarized light measurement system, the rotation compensator can dynamically modulate the polarization state of the light wave, so that the measurement system can obtain information such as the thickness, optical coefficient, and nanostructure characteristics of the sample by detecting the change in the polarization state of the light wave reflected or transmitted by the sample, thereby realizing the detection and measurement of the sample.

[0038] Please see Figures 1 to 5 The present application provides a rotary compensator, which includes a mounting base 10, an adapter ring 20, a hollow motor 30, an elastic fastener 40, and other functional components as needed; the details are described below.

[0039] Please see Figure 3 and Figure 5 The hollow motor 30, the adapter ring 20, and the mounting base 10 are arranged coaxially along the axis L of the rotary compensator. The adapter ring 20 is fixedly connected to the hollow shaft of the hollow motor 30, for example, the adapter ring 20 is fixed to one end of the hollow shaft of the hollow motor 30 by fasteners such as screws. The elastic fastener 40 secures the mounting base 10 to the side of the adapter ring 20 away from the hollow motor 30. The mounting base 10 is used to place the optical element 50.

[0040] The hollow motor 30 drives the adapter ring 20 to rotate the mounting base 10 around the axis L, so that the optical element 50 placed on the mounting base 10 can rotate synchronously with the mounting base 10. In this way, the rotation effect of the optical element 50 can be used to perform periodic dynamic modulation processing of light waves.

[0041] For example, the optical element 50 includes a quarter-wave plate, half-wave plate, or other crystal sheet or combination thereof with birefringence properties, which are fixedly mounted inside or outside the mounting base 10 along the axis L. When a light beam passes through the optical element 50, a phase difference is generated between the ordinary ray (o-ray) and the extraordinary ray (e-ray) decomposed by the optical element 50. This phase difference can be adjusted by rotating the optical element 50 driven by the mounting base 10 to produce a periodic phase delay, thereby achieving dynamic modulation of the polarization state of light, such as converting linearly polarized light into elliptically polarized light.

[0042] In some embodiments, please refer to Figure 3 , Figures 5 to 8 The mounting base 10 and the adapter ring 20 are respectively provided with a first spherical fitting portion 11 and a second spherical fitting portion 21 surrounding the axis L on their opposite sides in the direction of axis L. The mounting base 10 is provided with a first flange portion 12 on the outer periphery of the first spherical fitting portion 11, and the adapter ring 20 is provided with a second flange portion 22 on the outer periphery of the second spherical fitting portion 21. The first spherical fitting portion 11 and the second spherical fitting portion 21 are opposite to each other and fitted together in the direction of axis L. The first flange portion 12 and the second flange portion 22 are spaced apart and opposite to each other in the direction of axis L. The elastic fastener 40 connects and fixes the mounting base 10 and the adapter ring 20 together by connecting the first flange portion 12 and the second flange portion 22, and keeps the first spherical fitting portion 11 and the second spherical fitting portion 21 in a tight fit.

[0043] For example, please refer to Figures 6 to 8 The first spherical fitting portion 11 protrudes from the surface of the mounting base 10 facing the adapter ring 20 around the axis L. The end face of the first spherical fitting portion 11 near the adapter ring 20 can be constructed as a spherical structure. Correspondingly, the second spherical fitting portion 21 is recessed around the axis L on the surface of the adapter ring 20 facing the mounting base 10, and the surface of the second spherical fitting portion 21 is constructed as a spherical structure complementary to the first spherical fitting portion 11. In this way, the first spherical fitting portion 11 can extend into the adapter ring 20 along the axis L and be opposite and fitted to the second spherical fitting portion 21, thereby establishing a concave-convex spherical fitting relationship between the mounting base 10 and the adapter ring 20.

[0044] Of course, the first spherical fitting part 11 can also be recessed on the surface of the mounting base 10, while the second spherical fitting part 21 protrudes from the surface of the adapter ring 20. In this way, the second spherical fitting part 21 can extend into the mounting base 10 along the axis L and be opposite to and fitted with the first spherical fitting part 11.

[0045] In other embodiments, the first spherical fitting portion 11 and the second spherical fitting portion 21 may also adopt other suitable structures and be respectively disposed on the mounting base 10 and the adapter ring 20, as long as the purpose is to achieve a concave-convex spherical fitting connection between the mounting base 10 and the adapter base 20.

[0046] For example, please refer to Figures 6 to 8 The first flange portion 12 can be an annular protrusion protruding from the outer peripheral surface of the mounting base 10, or it can be multiple protrusions distributed around the axis L or the first spherical fitting portion 11 and protruding from the outer peripheral surface of the mounting base 10. The second flange portion 22 can adopt a structure adapted to the first flange portion 12; when the first spherical fitting portion 11 and the second spherical fitting portion 21 are in a relatively fitted state, the first flange portion 12 and the second flange portion 22 are spaced apart in the axis L direction, and then the first flange portion 12 and the second flange portion 22 are connected by the elastic fastener 40, thereby fixing the mounting base 10 and the adapter ring 20, and keeping them in contact at the spherical fitting portion, while keeping the other parts spaced apart.

[0047] It should be noted that, Figure 3 and Figure 5 In the accompanying drawings, reference numerals 11 / 21 indicate the first spherical bonding portion 11 and the second spherical bonding portion 21, and the position indicated by reference numerals 11 / 21 indicates that the first spherical bonding portion 11 and the second spherical bonding portion 21 are bonded together.

[0048] Firstly, based on the concave-convex spherical bonding relationship between the first spherical bonding part 11 and the second spherical bonding part 21, it is equivalent to the mounting base 10 and the adapter ring 20 forming a spherical pair. The mounting base 10 can drive the optical element 50 to pitch, swing, and rotate around the adapter ring 20 as a fulcrum, so as to conveniently and flexibly adjust the spatial position or attitude of the optical element 50 in the rotary compensator, making the coaxiality between the hollow motor 30, the adapter ring 20, the mounting base 10, and the optical element 50 adjustable. Furthermore, the elastic connection relationship established between the mounting base 10 and the adapter ring 20 by the elastic fastener 40 can achieve precise adjustment and maintenance of coaxiality, ensure the consistency of the beam, and provide support for improving the optical performance of the rotary compensator.

[0049] Secondly, the mounting base 10 and the adapter ring 20 adopt a concave-convex spherical mating structure and are connected and fixed by elastic fasteners 40. This can reduce or even eliminate the influence of factors such as component manufacturing and assembly errors on the optical performance (e.g., coaxiality) of the rotary compensator, thereby enhancing the precision and stability of the rotary compensator's own structure.

[0050] Thirdly, since the first spherical fitting part 11 and the second spherical fitting part 21 can always maintain a tight fit, the gap between the mounting base 10 and the adapter ring 20 can be sealed, so as to form a channel that allows the light beam to pass through between the hollow shaft of the hollow motor 30 and the optical element 50. For example, when the optical element 50 is placed inside the mounting base 10 along the axis L, the external light beam can be incident on the optical element 50 through the hollow shaft of the hollow motor 30, the adapter ring 20 and the mounting base 10. In this way, the influence or contamination of the light beam by the external environmental factors of the rotation compensator can be effectively reduced, which helps to improve the effect of the optical element 50 on the light beam modulation processing.

[0051] Fourth, by integrating the optical element 50 into the rotating mechanism composed of the hollow motor 30, the adapter ring 20 and the mounting base 10, the overall compactness of the rotary compensator can be effectively enhanced, making it easier to install or integrate the rotary compensator into the structure of the optical measurement system. Thus, by adjusting the coaxiality between the hollow motor 30, the optical element 50 and the associated optical devices, the consistency of the beam can be ensured, and the measurement accuracy and stability of the optical measurement system can be improved.

[0052] It should be noted that the description of the optical element 50 in this application is intended to facilitate understanding of the structure, application scenarios, and implementation principles of the rotary compensator by those skilled in the art, and does not imply that the optical element 50 is necessarily a component of the rotary compensator. That is, in some embodiments, the optical element 50 is a component of the rotary compensator, and it is fixedly mounted on the mounting base 10 in a detachable or non-detachable manner. In other embodiments, the optical element 50 is not a component of the rotary compensator, but rather a device used in conjunction with the rotary compensator. For example, depending on the application scenario of the rotary compensator, the corresponding optical element 50 can be fixedly mounted on the mounting base 10 to achieve beam modulation by driving the optical element 50 to rotate.

[0053] In some embodiments, please refer to Figure 5The number of elastic fasteners 40 is set to multiple, such as two, three, four, or more. These multiple elastic fasteners 40 are evenly connected between the first flange portion 12 and the second flange portion 22 around the axis L. By connecting and fixing the mounting base 10 and the adapter ring 20 from multiple positions using multiple elastic fasteners 40, the force balance and connection stability of the mounting base 10 and the adapter ring 20 can be improved. This also facilitates precise adjustment of the spatial position or orientation of the optical element 50, thereby providing support for precise adjustment of the coaxiality between components.

[0054] For example, please refer to Figure 6 The elastic fastener 40 includes a fastener 41 and an elastic element 42; wherein, the fastener 41 may be a screw structure, and the elastic element 42 may be a helical spring sleeved on the fastener 41; the fastener 41 is disposed through the first flange portion 12 along the axis L and screwed to the second flange portion 22, while the elastic element 42 is clamped between the first flange portion 12 and the second flange portion 22.

[0055] Thus, based on the spherical bonding relationship between the first spherical bonding part 11 and the second spherical bonding part 21, the first flange part 12 and the second flange part 22 can be moved closer to each other or further away from each other along the axis L by tightening the fastener 41. This causes the mounting base 10 to swing relative to the adapter ring 20 along the axis L, thereby achieving precise adjustment of the swing angle of the mounting base 10 or the optical element 50, and thus achieving precise adjustment of coaxiality. The elastic element 42 can provide an elastic preload force to make the first flange part 12 and the second flange part 22 move away from each other, ensuring the stability of the connection between the mounting base 10 and the adapter ring 20.

[0056] In addition, since the fastener 41 passes through the first flange portion 12 and is screwed to the second flange portion 22, the fastener 41 can be operated from the side of the mounting base 10 away from the adapter ring 20, which helps to reduce the difficulty of coaxiality adjustment.

[0057] Of course, depending on the structural configuration of the rotary compensator, the fastener 41 can also pass through the second flange portion 22 and be screwed to the first flange portion 12; or the elastic fastener 40 can also adopt other suitable structures, such as the elastic element 42 being an elastic gasket clamped between the first flange portion 12 and the second flange portion 22. The goal is simply to establish an elastic fixed connection between the first flange portion 12 and the second flange portion 22.

[0058] In some embodiments, please refer to Figure 8 and combined Figure 3 , Figure 5 and Figure 6The mounting base 10 has a mounting cavity 13 for accommodating the optical element 50. The mounting cavity 13 has a first opening and a second opening opposite each other along the axis L. The first opening and the second opening respectively connect the outside of the mounting base 10 to the mounting cavity 13. The first spherical fitting part 11 surrounds the first opening and is disposed on the side of the mounting base 10 facing the adapter ring 20.

[0059] Based on the spherical bonding relationship between the first spherical bonding portion 11 and the second spherical bonding portion 21, the hollow shaft of the hollow motor 30 can be sealed and connected to the mounting cavity 13, forming an optical path channel that allows light beams to pass through. For example, a light beam from outside the rotary compensator can enter the mounting cavity 13 through the hollow shaft of the hollow motor 30, the adapter ring 20, and the first opening and be incident on the optical element 50, while the light beam passing through the optical element 50 can exit through the second opening. In this way, the influence of the external environment of the rotary compensator on the internal light beam can be reduced, ensuring the effect of the optical element 50 in modulating the light beam; at the same time, the second opening allows the optical element 50 to be placed in the mounting cavity 13, so as to realize the assembly and disassembly of the optical element 50 and the mounting base 10.

[0060] Of course, depending on the application scenario of the rotary compensator, the light beam outside the rotary compensator can also be incident on the optical element 50 through the second opening, and the light beam passing through the optical element 50 is emitted from the hollow shaft of the hollow motor 30.

[0061] In some embodiments, please refer to Figures 3 to 6 The rotary compensator also includes a limiting member 60; the limiting member 60 is detachably connected to the mounting base 10 and is mainly used to detachably fix the optical element 50 in the mounting cavity 13.

[0062] For example, the limiting member 60 includes one or more threaded rings. When the optical element 50 is placed in the mounting cavity 13, the threaded rings can be inserted from the second opening and screwed into the mounting cavity 13. By screwing the threaded rings so that they press against the contour edge of the optical element 50 along the axis L toward the side where the first opening is located, the optical element 50 can be finally stably limited and fixed in the mounting cavity 13.

[0063] Of course, the limiting member 60 can also adopt other suitable structures, as long as the optical element 50 can be detachably fixed in the mounting cavity 13, which will not be elaborated here.

[0064] In some embodiments, the number of optical elements 50 can be set to multiple, and the multiple optical elements 50 have different parameters. For example, each optical element 50 includes a lens and a lens ring fixed to the outer periphery of the lens. The lenses of different optical elements 50 can have different dimensional parameters (e.g., thickness, diameter), different optical parameters (e.g., light transmittance), and can also be made of different materials. In addition, the multiple optical elements 50 can also be elements of different types or with different light processing functions.

[0065] Multiple optical elements 50 can be interchangeably placed in the mounting base 10. For example, depending on the application scenario of the rotary compensator, the optical element 50 suitable for the corresponding scenario can be restricted and fixed in the mounting cavity 13 by removing and installing the limiting member 60, thereby improving the adaptability of the rotary compensator to different application scenarios (such as different optical measurement processes).

[0066] In some embodiments, please refer to Figures 1 to 5 The rotary compensator also includes a sealed housing 70, a mounting base 10, an adapter ring 20, a hollow motor 30, and an elastic fastener 40, all of which are disposed inside the sealed housing 70. The hollow motor 30 is fixedly connected to the sealed housing 70 so that the hollow motor 30 can drive the adapter ring 20 to rotate the mounting base 10 and the optical element 50 placed on the mounting base 10 around the axis L inside the sealed housing 70.

[0067] The sealing housing 70 has optical interfaces on two opposite sidewalls along the axis L. The optical interfaces are used to allow light beams from outside the sealing housing 70 to enter the optical element 50 along the axis L, and to allow light beams passing through the optical element 50 to exit the sealing housing 70 along the axis L.

[0068] For example, for ease of distinction and description, the optical interface on the side wall of the sealed housing 70 near the hollow motor 30 in the direction of axis L is defined as the first optical interface 71, and the optical interface on the side wall near the mounting base 10 is defined as the second optical interface 72; wherein, the first optical interface 71 can be coaxially opposite to the hollow shaft of the hollow motor 30, and the second optical interface 72 can be coaxially opposite to the mounting base 10 (specifically, the second opening).

[0069] In some applications, a light beam outside the sealed housing 70 can be incident on the optical element 50 through the first optical interface 71, the hollow shaft of the hollow motor 30, the adapter ring 20, and the first opening. The light beam passing through the optical element 50 can exit the sealed housing 70 through the second opening and the second optical interface 72. Alternatively, a light beam outside the sealed housing 70 can also be incident on the optical element 50 through the second optical interface 72 and the second opening. The light beam passing through the optical element 50 can exit the sealed housing 70 through the first opening, the adapter ring 20, the hollow shaft of the hollow motor 30, and the first optical interface 72.

[0070] Based on this, by placing the mounting base 10, adapter ring 20, and hollow motor 30 inside the sealed housing 70, firstly, the rotary compensator can be structurally constructed into a relatively complete and independent functional unit, thereby enhancing the flexibility of the rotary compensator's assembly and disassembly; secondly, the sealed housing 70 can protect the internal components, for example, by isolating the air flowing outside the sealed housing 70 and reducing its impact on the internal beam; thirdly, the optical interface can provide a structural channel for the beam to enter and exit the rotary compensator, and also provide structural support for the connection between the rotary compensator and related optical devices in the optical measurement system, thereby improving the measurement accuracy and stability of the optical measurement system.

[0071] In some embodiments, please refer to Figures 1 to 4 The side wall of the sealed housing 70 is also provided with a docking sealing ring 73 and a docking magnetic ring 74 surrounding the optical interface; wherein, the docking sealing ring 73 is used to seal the gap between the optical device and the sealed housing 70 when the optical device outside the sealed housing 70 is fixed to the sealed housing 70; the docking magnetic ring 74 is used to fix the optical device outside the sealed housing 70 to the sealed housing 70 and seal the gap between the optical device and the sealed housing 70.

[0072] For example, please refer to Figure 1 and Figure 4 The optical components include a collimator that cooperates with a rotation compensator (specifically, optical element 50). For example, the collimator converts the light beam into parallel and collimated linearly polarized light, while optical element 50 can convert the linearly polarized light into elliptically polarized light. A mating sealing ring 73 is fixed to the side wall of the sealing housing 70 around the first optical interface 71. For example, a dovetail groove surrounding the first optical interface 71 can be provided on the side wall of the sealing housing 70, and the mating sealing ring 73 can be a dovetail-type sealing ring made of materials such as rubber. The mating sealing ring 71 is inserted and fixed within the dovetail groove. The collimator can be fixed to the outside of the sealing housing 70 by fasteners such as screws, while the mating sealing ring 73 is clamped between the collimator and the side wall of the sealing housing 70, thereby sealing the gap between the collimator and the sealing housing 70.

[0073] In this way, by using the mating sealing ring 73 to seal the sealing housing 70 to the collimator, the influence of external environmental factors (such as flowing air) on the internal beam of the rotary compensator and the internal beam of the collimator can be reduced, thereby providing support for improving the measurement accuracy and stability of the optical measurement system.

[0074] For example, please refer to Figure 2 and Figure 3 The optical devices include an analyzer used in conjunction with a rotation compensator (specifically, optical element 50), for example, an analyzer that can allow light beams in a specific direction to pass through in order to convert light polarization information into light intensity information; wherein, a docking magnetic ring 74 is arranged around the second optical interface 72.

[0075] The analyzer (e.g., the bellows of the analyzer) can be magnetically fixed to the sealed housing 70 using the docking magnetic ring 74, so that the analyzer and the second optical interface 72 are sealed and connected. This reduces the influence of external environmental factors (e.g., flowing air) on the internal beam of the rotary compensator and the internal beam of the analyzer, thereby providing support for improving the measurement accuracy and stability of the optical measurement system. At the same time, by magnetically fixing the analyzer to the sealed housing 70, not only is the connection reliable, but the assembly and disassembly of the analyzer and the rotary compensator are also more convenient.

[0076] In other embodiments, depending on the application scenario of the rotary compensator or the optical device, the sealing housing 70 may also selectively be provided with a docking sealing ring 73 and a docking magnetic ring 74 on the side wall. For example, the sealing housing 70 may be provided with a docking sealing ring 73 surrounding the corresponding optical interface on two opposite side walls in the direction of axis L.

[0077] In some embodiments, the sealing housing 70 adopts a split-type assembly structure; for details, please refer to [link to relevant documentation]. Figures 1 to 5 The sealed housing 70 includes a first end cap 75, a first housing 76, a second housing 77, and a second end cap 78 that are sequentially connected and sealed along axis L; wherein, the mounting base 10 and the adapter ring 20 are located inside the first housing 76, the body of the hollow motor 30 is fixedly disposed inside the second housing 77, and the optical interface is disposed through the first end cap 75 and the second end cap 78, for example, the first optical interface 73 is disposed through the second end cap 78, and the second optical interface 74 is disposed through the first end cap 75.

[0078] Thus, a sealed housing 70 is formed by combining the first end cap 75, the first housing 76, the second housing 77, and the second end cap 78, with the mounting base 10, the adapter ring 20, the hollow motor 30, and the optical interface distributed across different components of the sealed housing 70. On one hand, this reduces the overall difficulty of disassembling and assembling the rotary compensator and provides support for adjusting the coaxiality between components; for example, by disassembling the first end cap 75, the mounting base 10 and the elastic fastener 40 can be exposed in the first housing 76, which not only facilitates the disassembly and replacement of the optical element 50 but also allows for adjustment of the coaxiality between the hollow motor 30 and the optical element 50. On the other hand, it reduces the machining difficulty of the various components of the rotary compensator, thereby helping to reduce assembly errors.

[0079] In some embodiments, please refer to Figures 1 to 4 The second housing 77 is provided with a heat dissipation structure 79, which can be a finned structure, a grooved structure, or other suitable structure disposed on the outer surface of the second housing 77. Since the heat generated by the hollow motor 30 during operation may be transferred to the optical element 50 through the adapter ring 20 and the mounting base 10, thereby affecting the performance of the optical element 50, the heat dissipation structure disposed on the second housing 77 can promptly conduct the heat generated by the hollow motor 30 to the outside of the sealed housing 70, reducing the impact of heat on the optical element 50.

[0080] Please combine Figures 1 to 3 This application also provides an optical measurement system, which includes a rotary compensator of any of the foregoing embodiments and optical devices (such as collimators, analyzers, etc.) that cooperate with the rotary compensator.

[0081] For example, the optical measurement system is an elliptic polarization measurement system (e.g., an ellipsometer). The optical element 50 in the rotation compensator includes a crystal with birefringence properties (mica waveplate, quartz waveplate, etc.). During the operation of the optical measurement system, the hollow motor 30 drives the optical element 50 to rotate, which can cause the optical element 50 to produce a periodically changing phase delay for the incident polarized light, thereby realizing dynamic modulation of the polarization state of the light. By detecting the change in the polarization state of the light wave reflected or transmitted by the sample, information such as the thickness, optical coefficient, and structural characteristics of the sample can be obtained.

[0082] In summary, the precise adjustment of the coaxiality between the hollow motor 30 and the optical element 50 of the rotary compensator ensures beam consistency. The sealed connection established between the spherical mating part and the mounting base 10, and the sealed connection established between the sealing housing 70 and the compensator and the associated optical element, effectively reduces the influence of external environmental factors on the beam. Therefore, the rotary compensator provides a guarantee for improving the measurement accuracy and stability of the optical measurement system. It should be understood that the optical measurement system with the rotary compensator provided in this application should also have the same technical effects, and therefore will not be elaborated further here.

[0083] The above examples illustrate this application only to aid understanding and are not intended to limit its scope. Those skilled in the art to which this application pertains can make various simple deductions, modifications, or substitutions based on the ideas presented.

Claims

1. A rotary compensator, characterized in that, The system includes a hollow motor, an adapter ring, elastic fasteners, and a mounting base for housing optical components, wherein the hollow motor, the adapter ring, and the mounting base are arranged sequentially along the axis of the rotary compensator; wherein: The mounting base is provided with a first spherical fitting part surrounding the axis, and the adapter ring is provided with a second spherical fitting part surrounding the axis. The first spherical fitting part and the second spherical fitting part are opposite to and fitted together in the direction of the axis. The mounting base is further provided with a first flange portion located on the outer periphery of the first spherical fitting portion, and the adapter ring is further provided with a second flange portion located on the outer periphery of the second spherical fitting portion. The first flange portion and the second flange portion are spaced apart from each other in the direction of the axis. The elastic fastener connects the first flange portion and the second flange portion to fix the mounting base and the adapter ring; the hollow shaft of the hollow motor is fixed to the adapter ring to drive the adapter ring to rotate the mounting base around the axis.

2. The rotary compensator as described in claim 1, characterized in that, The first spherical fitting portion protrudes from the surface of the mounting base facing the adapter ring, and the second spherical fitting portion is recessed from the surface of the adapter ring facing the mounting base.

3. The rotary compensator as described in claim 1, characterized in that, The mounting base has a mounting cavity inside, the mounting cavity having a first opening and a second opening opposite each other along the axis; the first spherical fitting portion surrounds the first opening and is disposed on the side of the mounting base facing the adapter ring; the second opening is used to allow the optical element to be placed in the mounting cavity.

4. The rotary compensator as described in claim 3, characterized in that, The rotation compensator also includes an optical element and a limiting member; the limiting member is detachably connected to the mounting base and is used to detachably fix the optical element in the mounting cavity.

5. The rotary compensator as described in claim 1, characterized in that, The rotation compensator also includes a plurality of optical elements with different parameters, which are interchangeably mounted on the mounting base.

6. The rotary compensator as described in claim 1, characterized in that, The number of elastic fasteners is set to multiple, and the multiple elastic fasteners are evenly arranged around the axis. The resilient fastener includes a fastener and a resilient element; the fastener passes through one of the first flange portion and the second flange portion and is screwed onto the other of the first flange portion and the second flange portion; the resilient element is clamped between the first flange portion and the second flange portion.

7. The rotary compensator as described in any one of claims 1 to 6, characterized in that, The rotary compensator also includes a sealed housing, in which the hollow motor, the adapter ring, the elastic fastener and the mounting base are disposed inside the sealed housing, and the body of the hollow motor is fixed to the sealed housing; The sealing housing has optical interfaces on two opposite sidewalls in the direction of the axis. The optical interfaces are used to allow external light beams to be incident on the optical element along the axis, and the optical interfaces are also used to allow light beams that have passed through the optical element to exit the sealing housing along the axis.

8. The rotary compensator as described in claim 7, characterized in that, The side wall of the sealed housing is also provided with a mating sealing ring surrounding the optical interface; the mating sealing ring is used to seal the gap between the optical device and the sealed housing when the optical device outside the sealed housing is fixed to the sealed housing; And / or the side wall of the sealed housing is also provided with a mating magnetic ring surrounding the optical interface, the mating magnetic ring being used to fix the optical device outside the sealed housing to the sealed housing and seal the gap between the optical device and the sealed housing.

9. The rotary compensator as described in claim 8, characterized in that, The optical device includes a collimator and an analyzer. The mating sealing ring is used to seal the gap between the collimator and the sealing housing, and the mating magnetic ring is used to fix the analyzer to the sealing housing.

10. The rotary compensator as claimed in claim 7, characterized in that, The sealed housing includes a first end cap, a first housing, a second housing, and a second end cap that are sequentially connected and sealed along the axis; wherein the first end cap and the second end cap are both provided with the optical interface through the axis, the adapter ring and the mounting base are located inside the first housing, the body of the hollow motor is fixed to the second housing, and the second housing has a heat dissipation structure.

11. An optical measurement system, characterized in that, Includes the rotary compensator according to any one of claims 1-10.

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