Low-friction pneumatic control and force control mounting assembly

Abstract

The invention relates to a low-friction pneumatic control and force control mounting assembly, a pneumatic control assembly and a ball spline are respectively arranged on a rotating motor assembly, and the rotating motor assembly is arranged on a base assembly and is in driving connection with the ball spline; the rotary joint assembly is arranged in the pneumatic control assembly, the first end of the rotary joint assembly is connected to a negative pressure source and abuts against the air flotation control piece, the second end of the rotary joint assembly elastically abuts against the rotary motor assembly and is in shaft connection with a spline shaft of the ball spline, and the suction nozzle assembly is located below the rotary motor assembly and connected with the spline shaft; the air floating control is arranged in the air control assembly in an air control floating mode, and the air control assembly is used for adjusting the floating position of the air floating control through air pressure so as to adjust the acting force of the rotating joint assembly on the ball spline; the interchangeable suction nozzle assembly is detachably installed below the suction nozzle head assembly, and the interchangeable suction nozzle assembly is configured to sequentially pass through the suction nozzle head assembly, the spline shaft and the rotary joint assembly to be connected with a negative pressure source in a negative pressure transmission mode, so that the problem of a traditional voice coil force control mode is solved, and the force control precision is improved.

Description

Technical Field

[0001] This application relates to the field of precision force control, and in particular to low-friction pneumatic force control mounting components. Background Technology

[0002] In some manufacturing processes, precise force control is required, demanding accurate and controllable contact pressure. The following example illustrates this: In the traditional optical communication industry, laser chips are typically mounted on ceramic substrates, with thicknesses as thin as 25μm or even less. However, the thinner the product, the more prone it is to breakage during handling. Therefore, for such thin products, the requirements for bonding force control are high, requiring a minimum controllable force within 10g, or even as low as 5g. The equipment used for die bonding or eutectic bonding processes is collectively referred to as the Die Bonder (DB). The core component of this equipment is the bonding head, which directly contacts the chip.

[0003] However, to manage and control such small forces, it is necessary to minimize the friction of the bearing during mechanical movement, making the friction sufficiently small, and the mass of the bearing motion mechanism must be light enough to reliably achieve micro-force control.

[0004] Traditional bonding processes control the bonding force of chips by using voice coil motors. The repeatability of force control data is related to the hardware of voice coil motion control. In other words, to achieve better force control accuracy, hardware with high motion control accuracy is required, which increases the cost of the equipment.

[0005] From the perspective of the force-controlled mechanical structure of die bonding in optical communication modules, most current equipment uses a voice coil motor whose mover is fixed on a precision guide rail by a connecting plate to drive the spline shaft to move up and down. The bonding force control requirements of different products are achieved by adjusting the current of the voice coil motor. However, from the perspective of structural reliability, the following problems exist.

[0006] One issue is the impact of force control accuracy. Because the voice coil motor connected to the spline shaft has an overturning torque, this can lead to inaccuracy between the actual force control and the output force control.

[0007] On the other hand, friction affects the system. Since the voice coil driver requires a guide rail for mounting, the friction of this guide rail will also affect the entire force control system, causing the friction of the entire system to increase exponentially.

[0008] On the other hand, the misalignment between the force control drive and the rotating shaft will cause the force control resistance of the spline shaft to be inconsistent at different rotation angles. It is difficult to achieve a completely uniform force control resistance at every angle. This is due to the concentricity of the force control drive structure and the rotating shaft, which cannot be solved from the perspective of the implementation principle of the voice coil motor.

[0009] The traditional force control device for voice coil bonding has the above-mentioned structural problems, which are theoretically unavoidable. This has a particularly significant impact on the force control bonding of ultra-thin optical communication modules and urgently needs to be addressed. Summary of the Invention

[0010] Therefore, it is necessary to provide a low-friction pneumatic and force-controlled mounting assembly.

[0011] One embodiment of this application is a low-friction pneumatic force-controlled mounting assembly, which includes an air flotation control, a base assembly, a rotary motor assembly, a rotary joint assembly, a pneumatic control assembly, a nozzle assembly, an interchangeable nozzle assembly, and a ball spline. The pneumatic control assembly and the ball spline are respectively disposed on the rotary motor assembly, which is disposed on the base assembly and drives the ball spline. The rotary joint assembly is disposed in the pneumatic control assembly, with its first end connected to a negative pressure source and abutting against the air flotation control, and its second end elastically abutting against the rotary motor assembly and axially connected to the spline shaft of the ball spline. The nozzle assembly is located below the rotary motor assembly and connected to the spline shaft. The air flotation control is disposed in the pneumatic control assembly in a pneumatically controlled floating manner. The pneumatic control assembly is used to adjust the floating position of the air flotation control by air pressure to adjust the force exerted by the rotary joint assembly on the ball spline. The interchangeable nozzle assembly is detachably installed below the nozzle assembly, and the interchangeable nozzle assembly is configured to sequentially pass through the nozzle assembly, the spline shaft, and the rotary joint assembly to connect to the negative pressure source in a negative pressure transmission manner.

[0012] The aforementioned low-friction pneumatic force-controlled mounting assembly, through the cooperation of an air-float control system, a base assembly, a rotary motor assembly, a rotary joint assembly, a pneumatic control assembly, a nozzle assembly, an interchangeable nozzle assembly, and a ball spline, achieves two key benefits. Firstly, it employs a pneumatically driven method to move the interchangeable nozzle assembly, with the downward pressure direction of the pneumatic control concentric with the spline shaft. This overcomes the overturning moment problem caused by the eccentricity of traditional voice coil force control methods, thus improving force control accuracy. Secondly, its structure solves the problem of misalignment between the traditional voice coil force control method and the spline shaft, thereby reducing the risk of the spline shaft rotating to any position. The frictional error at any angle further improves the force control accuracy; on the other hand, it abandons the traditional voice coil force control method combined with the guide rail to limit the direction, thus fundamentally reducing the frictional force on the force control, which is conducive to further improving the force control accuracy; on the other hand, it has the advantages of reliable structure and convenient adjustment, easy to manufacture and apply, and does not require the use of voice coil motors and high-precision reading heads, which not only helps to reduce the cost of low-friction pneumatic force control mounting components, but also helps to improve the reliability of low-friction pneumatic force control mounting components, and also has the advantage of easy maintenance.

[0013] In some embodiments, the base assembly is configured to be rotatably mounted on an external structure; or, the rotary motor assembly is disposed on the side of the base assembly; or, the air flotation control is a steel ball; or, the low-friction pneumatic force-controlled mounting assembly further includes a baffle, a pressure ring, a pressure cap, a suction cup seat, a bushing, a collar, a suction cup, and a spring; one end of the ball spline is fixed to the rotary motor assembly by the baffle, and the other end is fixed to the rotary motor assembly by the pressure ring, so that the ball spline is fixed in the bearing hole of the rotary motor assembly; the pressure cap is pressed onto the pressure ring and fixed to the rotary motor assembly, and the pneumatic control assembly is disposed on the pressure cap; the collar is embedded in the pressure cap and shaft-connected to the second end of the rotary joint assembly, the bushing is disposed in the collar and shaft-connected to the spline shaft, and the second end of the rotary joint assembly elastically abuts against the collar or pressure cap by a spring; the suction cup seat is sealed to the spline shaft, and the suction cup is sealed to the suction cup seat and the nozzle assembly for transmitting negative pressure.

[0014] In some embodiments, the base assembly includes a base plate, an adjusting stop, a pressure gauge, a first micro-connector, and a second micro-connector; a rotary motor assembly is disposed on the base plate, the base plate is rotatably connected to the adjusting stop, and the adjusting stop is configured to be mounted on an external structure; the first micro-connector and the second micro-connector are connected in communication, the first micro-connector is connected to a rotary joint assembly, and the second micro-connector is connected to a negative pressure source; the pressure gauge is connected to one of the first micro-connector and the second micro-connector.

[0015] In some embodiments, the rotary motor assembly includes a bearing body, a motor flange, a stepper motor, and a synchronous pulley; the bearing body is disposed on the base assembly, and the stepper motor is mounted on the bearing body via the motor flange; the pneumatic control assembly and the ball spline are respectively disposed on the bearing body; the output end of the stepper motor is driven to connect to the ball spline via the synchronous pulley.

[0016] In some embodiments, the rotary motor assembly has a bearing hole in the bearing head body, a ball spline is installed in the bearing hole and the spline shaft is located outside the bearing hole; or, the rotary motor assembly also includes a sensing plate and a photoelectric switch; the sensing plate is disposed on the synchronous pulley and the photoelectric switch is disposed on the bearing head body, and the sensing plate cooperates with the photoelectric switch to correct the position of the synchronous pulley.

[0017] In some embodiments, the rotary joint assembly includes a rotary joint seat, a joint rotating shaft, a bearing, and a third micro-tube connector; the rotary joint seat elastically abuts against the rotary motor assembly, the joint rotating shaft is located on the rotary joint seat and is connected to the upper part of the rotary joint seat through the bearing; the lower part of the rotary joint seat is connected to a splined shaft; the third micro-tube connector is disposed on the joint rotating shaft, and one end is directly connected to a negative pressure source or connected to a negative pressure source through a base assembly, and the other end is sealed and connected to the splined shaft.

[0018] In some embodiments, the pneumatic control assembly includes a pneumatically driven base, a fourth micro-pipe connector, and an air-floating cavity formed in the pneumatically driven base; the pneumatically driven base is disposed on the rotary motor assembly; the rotary connector assembly is disposed in the air-floating cavity; the air-floating control is disposed in the air-floating cavity in a pneumatically controlled floating manner; the fourth micro-pipe connector is disposed on the pneumatically driven base and is used to connect an external air source to regulate the air pressure in the air-floating cavity in order to adjust the floating position of the air-floating control.

[0019] In some embodiments, the nozzle head assembly includes a nozzle blade, a fifth locating pin, and a fifth micro-connector; the nozzle blade is detachably and sealingly connected to a ball spline shaft, and the bottom of the nozzle blade is detachably and sealingly connected to the nozzle of an interchangeable nozzle assembly for transmitting negative pressure; the fifth locating pin is connected to the nozzle blade and is used to limit the angle of the nozzle blade in conjunction with the spline shaft; the fifth micro-connector is connected to the nozzle blade and configured to access a negative pressure source so that the nozzle blade is connected to the nozzle holder of the interchangeable nozzle assembly by negative pressure adsorption.

[0020] In some embodiments, the interchangeable nozzle assembly includes a nozzle holder, a guide post, and a nozzle; the nozzle holder is detachably mounted under the nozzle head assembly, and the nozzle holder is respectively sealed to the nozzle head assembly and the nozzle for transmitting negative pressure to the nozzle; the guide post is respectively connected to the nozzle holder and the nozzle head assembly for cooperating with the nozzle head assembly or the nozzle blade of the nozzle head assembly to limit the position of the nozzle holder.

[0021] In some embodiments, the low-friction pneumatic force-controlled mounting assembly further includes a strain gauge assembly disposed on the rotary motor assembly, and an air flotation control disposed on the strain gauge assembly and located in the pneumatic control assembly, wherein the strain gauge assembly is configured to sense changes in the height of the spline shaft. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of an embodiment of the low-friction pneumatic force-controlled mounting assembly described in this application.

[0023] Figure 2 for Figure 1 The illustrated embodiment is shown in an exploded view.

[0024] Figure 3 for Figure 2 An exploded view of the base assembly in the illustrated embodiment.

[0025] Figure 4 for Figure 2 An exploded view of the rotary motor assembly in the embodiment shown.

[0026] Figure 5 for Figure 2 An enlarged schematic diagram of the rotary joint assembly of the illustrated embodiment.

[0027] Figure 6 for Figure 5 The illustrated embodiment is shown in an exploded view.

[0028] Figure 7 for Figure 2 An enlarged schematic diagram of the pneumatic control component in the illustrated embodiment.

[0029] Figure 8 for Figure 7 The illustrated embodiment is shown in an exploded view.

[0030] Figure 9 for Figure 2 An enlarged schematic diagram of the strain gauge assembly of the embodiment shown.

[0031] Figure 10 for Figure 9 The illustrated embodiment is shown in an exploded view.

[0032] Figure 11 for Figure 2 An enlarged schematic diagram of the nozzle head assembly of the illustrated embodiment.

[0033] Figure 12 for Figure 11 The illustrated embodiment is shown in an exploded view.

[0034] Figure 13 for Figure 2 An enlarged schematic diagram of the interchangeable nozzle assembly of the illustrated embodiment.

[0035] Figure 14 for Figure 13 The illustrated embodiment is shown in an exploded view.

[0036] Reference numerals: Low-friction pneumatic and force-controlled mounting assembly 100, base assembly 200, rotary motor assembly 300, rotary joint assembly 400, pneumatic control assembly 500, strain gauge assembly 600, nozzle assembly 700, interchangeable nozzle assembly 800, ball spline assembly 900, baffle 101, pressure ring 102, pressure cap 103, suction cup seat 104, bushing 105, collar 106, tungsten carbide ball 108, suction cup 109, spring 110, synchronous toothed belt 111, first positioning pin 112, first locating screw 113, first mounting screw 114, first fixing screw 115. Base plate 201, adjusting stop 202, pressure gauge 203, first micro-pipe connector 204, second micro-pipe connector 205, inner bushing 206, second locating pin 207, first hex socket head cap screw 208, mounting screw seat 209, head body 301, motor flange 302, stepper motor 303, synchronous pulley 304, sensing plate 305, adjustable pad 306, photoelectric switch 307, second fixing screw 308, third fixing screw 309, third locating pin 310, fourth fixing screw 311, fifth fixing screw 312, bearing hole 313, rotary joint seat 4 01. Connector rotating shaft 402. Bearing 403. Low resistance pad 404. First sealing ring 405. Third micro-pipe connector 406. First brass set screw with copper washer 407. Silicone hose 408. First plug 409. Air drive base 501. First cover plate 502. Second cover plate 503. Fourth micro-pipe connector 504. Second sealing ring 505. Second plug 506. Second mounting screw 507. First locking screw 508. First hex socket countersunk screw 509. Air flotation cavity 510. Bracket base 601. Fixing seat 602. Spring 603. Mounting piece 60 4. Strain gauge 605, sixth fixing screw 606, fixing cover 608, second locating screw 609, fourth positioning pin 610, first fastening screw 611, suction nozzle blade 701, fifth positioning pin 702, fifth miniature tube connector 703, second brass set screw with copper washer 704, magnet 705, screw washer block 706, terminal block 707, second socket head cap screw 708, third mounting screw 709, insulating sleeve terminal 710, suction nozzle fixing seat 801, guide post 802, third brass set screw with copper washer 803, foolproof pin 804, suction nozzle 805. Detailed Implementation

[0037] To make the above-mentioned objects, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. Those skilled in the art can make similar modifications without departing from the spirit of this application; therefore, this application is not limited to the specific embodiments disclosed below. It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in the specification of this application are for illustrative purposes only and do not represent the only possible embodiments.

[0038] To achieve precise force control, such as in high-precision bonding in semiconductor force-controlled bonding processes for optical module chips, the following will combine... Figures 1 to 14 This application discloses a low-friction gas-controlled force-controlled mounting assembly, which includes some or all of the technical features of the following embodiments; that is, the low-friction gas-controlled force-controlled mounting assembly includes some or all of the following structures. In one embodiment of this application, a low-friction gas-controlled force-controlled mounting assembly 100 is as follows... Figure 1 As shown, it includes an air flotation control system, a base assembly 200, a rotary motor assembly 300, a rotary joint assembly 400, a pneumatic control assembly 500, a nozzle assembly 700, an interchangeable nozzle assembly 800, and a ball spline assembly 900; combined with Figure 2 The pneumatic control component 500 and the ball spline 900 are respectively mounted on the rotary motor component 300, which is mounted on the base component 200 and drives the ball spline 900. The rotary joint component 400 is located in the pneumatic control component 500. The first end of the rotary joint component 400 is connected to a negative pressure source and abuts against the air flotation control, and the second end elastically abuts against the rotary motor component 300 and is axially connected to the spline shaft 910 of the ball spline 900. The nozzle head component 700 is located below the rotary motor component 300. It is connected to the spline shaft 910; the air flotation control is set in the air control assembly 500 in a pneumatically controlled floating manner, and the air control assembly 500 is used to adjust the floating position of the air flotation control by air pressure, so as to adjust the force of the rotary joint assembly 400 on the ball spline 900; the interchangeable nozzle assembly 800 is detachably installed under the nozzle head assembly 700, and the interchangeable nozzle assembly 800 is configured to sequentially pass through the nozzle head assembly 700, the spline shaft 910 and the rotary joint assembly 400 to connect to the negative pressure source in a negative pressure transmission manner. This is an example and not a limitation. Figure 2 In the illustrated embodiment, the air flotation control is a steel ball, such as a tungsten steel ball 108.

[0039] This design, through the coordination of air-bearing controls, base assembly 200, rotary motor assembly 300, rotary joint assembly 400, air control assembly 500, nozzle assembly 700, interchangeable nozzle assembly 800, and ball spline 900, achieves two key benefits. Firstly, it utilizes air-controlled movement of the interchangeable nozzle assembly 800, with the downward pressure direction of the air control concentric with the spline shaft 910. This fundamentally overcomes the overturning moment problem caused by eccentricity in traditional voice coil force control methods, thus improving force control accuracy. Secondly, it structurally solves the problem of misalignment between the traditional voice coil force control method and the spline shaft 910, thereby reducing the risk of spline damage. The frictional error of the key shaft 910 rotating to any angle further improves the force control accuracy. On the other hand, it abandons the traditional voice coil force control method combined with the guide rail to limit the direction, thus fundamentally reducing the frictional force on the force control, which is conducive to further improving the force control accuracy. Furthermore, it has the advantages of reliable structure and convenient adjustment, is easy to manufacture and apply, and does not require the use of voice coil motors and high-precision reading heads. This not only helps to reduce the cost of the low-friction pneumatic force control mounting assembly 100, but also helps to improve the reliability of the low-friction pneumatic force control mounting assembly 100, and also has the advantage of easy maintenance.

[0040] To facilitate the assembly of the low-friction pneumatic force-controlled mounting assembly 100, in some embodiments, the base assembly 200 is configured to be mounted on an external structure. In various embodiments, the pneumatic control assembly 500 and the ball spline 900 are respectively disposed on the rotary motor assembly 300, which is disposed on the base assembly 200. That is, the pneumatic control assembly 500 and the ball spline 900, etc., are disposed on the base assembly 200 via the rotary motor assembly 300; the base assembly 200 serves as a base. Figure 1 In the illustrated embodiment, the rotary motor assembly 300 is disposed on the side of the base assembly 200. To facilitate angle adjustment of the low-friction pneumatic force-controlled mounting assembly 100, in some embodiments, the base assembly 200 is configured to be rotatably mounted to an external structure.

[0041] This design offers several advantages. First, the base assembly 200 serves as a unified base, with the rotary motor assembly 300 centrally supporting structural components such as the pneumatic control assembly 500 and the ball spline 900. This effectively ensures the concentricity of the components, reduces accumulated assembly errors, and further enhances the operational stability of the low-friction pneumatic and force-controlled mounting assembly 100. Second, the rotatable mounting configuration of the base assembly 200 allows for fine-tuning of the angle without additional modifications to the external structure, flexibly adapting to different mounting conditions and improving the assembly's scenario adaptability. Third, the modular assembly design simplifies the installation process, reduces assembly difficulty, facilitates mass production, and allows for overall or disassembly operations via the base assembly 200 during maintenance, further optimizing maintenance convenience. Furthermore, the absence of additional auxiliary positioning components controls costs while ensuring assembly accuracy and structural reliability.

[0042] In some of these embodiments, such as Figure 2 and Figure 3 As shown, the base assembly 200 includes a base plate 201, an adjusting block 202, a pressure gauge 203, a first micro-connector 204, and a second micro-connector 205. A rotary motor assembly 300 is mounted on the base plate 201, which is rotatably connected to the adjusting block 202. The adjusting block 202 is configured to be mounted on an external structure to cooperate with the base plate 201 in adjusting the angle of the low-friction pneumatic force-controlled mounting assembly 100 relative to the external structure. The first micro-connector 204 and the second micro-connector 205 are connected. The first micro-connector 204 is connected to the rotary joint assembly 400, and the second micro-connector 205 is connected to a negative pressure source. That is, the first end of the rotary joint assembly 400 is sequentially connected to the negative pressure source through the first micro-connector 204 and the second micro-connector 205. The connection objects of the first micro-connector 204 and the second micro-connector 205 are also interchangeable. The pressure gauge 203 is connected to one of the first micro-connector 204 and the second micro-connector 205 for detecting negative pressure.

[0043] This design offers several advantages. First, the base plate 201 and the adjusting stop 202 are rotatably connected, enabling precise angle adjustment of the low-friction pneumatic force-controlled mounting assembly 100 relative to the external structure. This design is convenient and provides stable positioning, allowing for adaptation to diverse mounting conditions without the need for complex adjustment mechanisms, thus improving the assembly's adaptability to various scenarios. Second, the design of the first micro-connector 204 and the second micro-connector 205 simplifies the connection path between the rotary connector assembly 400 and the negative pressure source, enhances assembly flexibility, reduces the difficulty of installation and maintenance, and ensures the sealing and stability of negative pressure transmission. Third, the pressure gauge 203 monitors the negative pressure status in real time, enabling timely detection and feedback of negative pressure anomalies. This prevents the interchangeable nozzle assembly 800 from failing to adsorb or deviating from its mounting position due to unstable negative pressure, thereby further improving mounting accuracy and operational reliability.

[0044] In some of these embodiments, such as Figure 1 and Figure 2 As shown, the low-friction pneumatic force-controlled mounting assembly 100 also includes a baffle 101, a pressure ring 102, a pressure cap 103, a suction cup seat 104, a bushing 105, a collar 106, a suction cup 109, and a spring 110; one end of the ball spline 900 is fixed to the rotary motor assembly 300 via the baffle 101, and the other end is fixed to the rotary motor assembly 300 via the pressure ring 102, combined with... Figure 4 This allows the ball spline 900 to be fixed in the bearing hole 313 of the rotary motor assembly 300, that is, the ball spline 900 is fixed in the bearing hole 313 from both the top and bottom directions; the pressure cap 103 is pressed onto the pressure ring 102 and fixed onto the rotary motor assembly 300, and the pneumatic control assembly 500 is disposed on the pressure cap 103; the collar 106 is embedded in the pressure cap 103 and is axially connected to the second end of the rotary joint assembly 400, and the bushing 105 is disposed on the collar 102. In section 6, the spline shaft 910 is connected to the rotary joint assembly 400. The second end of the rotary joint assembly 400 elastically abuts against the shaft collar 106 or the pressure cap 103 via the spring 110. The suction cup seat 104 is sealed to the spline shaft 910, and the suction cup 109 is sealed to the suction cup seat 104 and the suction head assembly 700. This assembly is used to transmit negative pressure so that the negative pressure from the negative pressure source is sequentially transmitted to the suction head assembly 700 via the rotary joint assembly 400, the spline shaft 910, the suction cup seat 104, and the suction cup 109. As an example, the pressure cap 103 is concentric with the rotation center of the ball spline 900 and its spline shaft 910, the rotary joint assembly 400 is concentric with the pressure cap 103, and the air flotation control is concentric with the pressure cap 103; that is, the air flotation control, the rotary joint assembly 400, the pressure cap 103 and the ball spline 900 are concentric, which can also be understood as the center of the air flotation control, the rotary joint assembly 400 and the pressure cap 103 being located on the axis of the ball spline 900, so as to ensure as much as possible that the downward pressure direction of the air control is concentric with the spline shaft 910.

[0045] This design, on the one hand, uses the baffle 101 and the pressure ring 102 to fix the ball spline 900 in the bearing hole 313 of the rotary motor assembly 300 from both above and below, and with the clamping fixation of the pressure cap 103, significantly improves the installation stability of the ball spline 900, preventing displacement or shaking during operation and providing structural protection for force control accuracy; on the other hand, the concentric design of the air flotation control, rotary joint assembly 400, pressure cap 103, and ball spline 900 maximizes the concentricity between the air control downward pressure direction and the spline shaft 910, structurally further avoiding the risk of overturning moment and significantly reducing the frictional error when the spline shaft 910 rotates. The design of the collar 106 and bushing 105 reduces the direct friction between the rotary joint assembly 400 and the splined shaft 910, while the elastic contact of the spring 110 buffers the pressure impact, protecting the components and improving the smoothness of operation, while reducing wear and tear. Furthermore, the sealed connection structure between the suction cup seat 104 and the suction cup 109 ensures that the negative pressure is transmitted from the rotary joint assembly 400 to the nozzle assembly 700 without leakage, ensuring the adsorption reliability of the interchangeable nozzle assembly 800. Moreover, the assembly logic of each component is clear and the connection is tight, without the need for complex auxiliary structures, thus taking into account both assembly convenience and maintainability.

[0046] In some of these embodiments, such as Figure 4 As shown, the rotary motor assembly 300 includes a flange body 301, a motor flange 302, a stepper motor 303, and a synchronous pulley 304. The flange body 301 is mounted on the base assembly 200, and the stepper motor 303 is mounted on the flange body 301 via the motor flange 302. A pneumatic control assembly 500 and a ball spline 900 are respectively mounted on the flange body 301. The output end of the stepper motor 303 is driven by the ball spline 900 via the synchronous pulley 304. Figure 2 As an example, the low-friction pneumatic force-controlled mounting assembly 100 also includes a synchronous toothed belt 111, with a synchronous pulley 304 synchronously connected to a ball spline 900 via the synchronous toothed belt 111. Combined with Figure 1 and Figure 9 For the embodiment with strain gauge assembly 600 described below, as an example, the strain gauge assembly 600 or the bracket base 601 therein is disposed on the head body 301.

[0047] This design serves several purposes. First, the main body 301 acts as an integrated mounting base, centrally supporting the pneumatic control component 500, ball spline 900, and strain gauge component 600 or bracket base 601. This effectively ensures the concentricity and positional accuracy of each core component, reducing errors caused by dispersed component placement and laying a solid structural foundation for the stable operation of the low-friction pneumatic force control mounting component 100. Second, the stepper motor 303 is conveniently mounted on the main body 301 via the motor flange 302. Combined with the transmission method of the synchronous pulley 304 and synchronous toothed belt 111, the transmission is precise and has low frictional loss, stably driving the ball spline 900 and preventing transmission deviations from affecting control and mounting accuracy, further improving the reliability of the component operation. Third, the modular mounting structure simplifies the disassembly and maintenance process of the stepper motor 303, reducing maintenance costs. Furthermore, the synchronous transmission design eliminates the need for complex gear mechanisms, controlling both the component size and weight and reducing mechanical wear.

[0048] In some of these embodiments, such as Figure 4 As shown, the rotary motor assembly 300 has a bearing hole 313 in the bearing head body 301. The ball spline 900 is installed in the bearing hole 313, and the spline shaft 910 is located outside the bearing hole 313, so as to play a positioning and assembly role in the bearing hole 313. In some embodiments, the rotary motor assembly 300 also includes a sensing plate 305 and a photoelectric switch 307; the sensing plate 305 is disposed on the synchronous pulley 304, and the photoelectric switch 307 is disposed on the bearing head body 301. The sensing plate 305 cooperates with the photoelectric switch 307 to correct the position of the synchronous pulley 304. As an example, the rotary motor assembly 300 also includes an adjustable pad 306. The photoelectric switch 307 is mounted on the head body 301 via the adjustable pad 306. The adjustable pad 306 is used to adjust the position of the photoelectric switch 307, thereby matching the positional movement of the synchronous toothed belt 111 when it is engaged with the synchronous pulley 304 for tension adjustment. This ensures the positional accuracy of the stepper motor 303 driving the ball spline 900 via the synchronous pulley 304 as much as possible, that is, ensuring the accuracy of the radial displacement of the spline shaft 910.

[0049] This design serves several purposes. First, the bearing hole 313 of the main body 301 provides a precise positioning and assembly reference for the ball spline 900, effectively limiting its radial wobble, ensuring the coaxiality of the spline shaft 910, reducing displacement errors, and providing structural support for the force control accuracy of the low-friction pneumatic force control mounting assembly 100. Second, the sensor 305 and photoelectric switch 307 work together to correct the position of the synchronous pulley 304 in real time, promptly correcting transmission deviations and avoiding mounting errors caused by positioning offsets, significantly improving the positional accuracy of the assembly operation. Third, the adjustable pad 306 can flexibly adjust the installation position of the photoelectric switch 307, facilitating precise calibration according to actual working conditions, ensuring the transmission accuracy of the stepper motor 303 driving the ball spline 900 through the synchronous pulley 304, further guaranteeing the accuracy of the radial displacement of the spline shaft 910. Fourth, the overall structural design is simple and compact, and the positioning and correction mechanism does not require complex electrical control modules, which reduces the probability of failure and simplifies the debugging and maintenance process, while maintaining the advantages of low cost and high reliability of the overall structure.

[0050] In each embodiment, such as Figure 1 As shown, the rotary joint assembly 400 is disposed in the pneumatic control assembly 500. The first end of the rotary joint assembly 400 is connected to a negative pressure source and abuts against the air flotation control. The second end elastically abuts against the rotary motor assembly 300 and is axially connected to the spline shaft 910 of the ball spline 900, so as to connect the nozzle head assembly 700 through the spline shaft 910. The rotary motor assembly 300 drives the ball spline 900, that is, the rotary motor assembly 300 drives the spline sleeve connected to the ball spline 900, causing the spline sleeve to rotate, thereby causing the spline shaft 910 to move radially, that is, move up and down. With the help of the air flotation control, the rotary joint assembly 400 drives the spline shaft 910 to move radially precisely, thereby achieving precise force control.

[0051] In some of these embodiments, such as Figure 5 and Figure 6 As shown, the rotary joint assembly 400 includes a rotary joint seat 401, a joint rotating shaft 402, a bearing 403, and a third micro-pipe connector 406. The rotary joint seat 401 elastically abuts against the rotary motor assembly 300. The joint rotating shaft 402 is located on the rotary joint seat 401 and is connected to the upper part of the rotary joint seat 401 through the bearing 403. The lower part of the rotary joint seat 401 is connected to the spline shaft 910. The third micro-pipe connector 406 is disposed on the joint rotating shaft 402, and one end is directly connected to a negative pressure source or connected to a negative pressure source through the base assembly 200, while the other end is sealed to the spline shaft 910.

[0052] This design serves several purposes. First, the rotating shaft 402 of the connector is connected to the upper part of the rotary connector seat 401 via the bearing 403, significantly reducing frictional resistance during rotational transmission, ensuring smooth rotation of the spline shaft 910, reducing the interference of friction on force control accuracy, and further improving the operational accuracy of the low-friction pneumatic force control mounting assembly 100. Second, the third micro-tube connector 406 achieves a sealed connection between the negative pressure source and the spline shaft 910, and the connection method is flexible, ensuring leak-free negative pressure transmission, guaranteeing the adsorption stability of the interchangeable nozzle assembly 800, and preventing workpiece detachment or displacement during mounting. Third, the rotary connector seat 401 elastically abuts against the rotary motor assembly 300, which can buffer the pressure impact during operation, protect the connection between the rotary connector assembly 400 and the rotary motor assembly 300, and extend the service life of the components.

[0053] As an example, such as Figure 5 and Figure 6 As shown, the rotary joint assembly 400 further includes a low-resistance pad 404, which is disposed on the side of the joint rotation shaft 402. The low-resistance pad 404 is used to reduce the frictional effects of rotation. For an embodiment with a strain gauge assembly 600, as an example, the rotary joint assembly 400 further includes a low-resistance pad 404, which is disposed on the joint rotation shaft 402. At least one low-resistance pad 404 is horizontally disposed in the slot of the joint rotation shaft 402, and at least one low-resistance pad 404 is disposed on the side of the joint rotation shaft 402. The air flotation control is located on the horizontally disposed low-resistance pad 404. The horizontally disposed low-resistance pad 404 is used to reduce the frictional effects of the strain gauge assembly 600, and the side-displaced low-resistance pad 404 is used to reduce the frictional effects of rotation. As an example, the rotary joint assembly 400 or the joint rotation shaft 402 therein is disposed in the pneumatic control assembly 500.

[0054] This design, on the one hand, effectively reduces the frictional impact of the rotating shaft 402 when the connector rotates, ensuring smooth transmission of the spline shaft 910 and reducing the interference of friction on force control accuracy, further consolidating the low-friction advantage of the low-friction pneumatic force control mounting assembly 100; on the other hand, the horizontally positioned low-friction pad 404 specifically reduces the frictional impact of the strain gauge assembly 600, avoiding frictional interference with the force feedback detection signal, ensuring the detection accuracy of the strain gauge assembly 600, and providing reliable data support for precise force control; furthermore, the low resistance... The force pad 404 is rationally arranged in different areas, achieving multi-dimensional friction reduction without the need for complex structures. This protects the contact area between the rotary joint assembly 400 and the strain gauge assembly 600, reducing wear and tear, extending component lifespan, and reducing maintenance frequency. Furthermore, the rotary joint assembly 400 or the joint rotation shaft 402 is located in the pneumatic control assembly 500, ensuring concentricity with the air flotation control and ball spline 900. This ensures that the pneumatic pressure direction is consistent with the spline shaft 910, further mitigating the risk of overturning moment and maximizing force control accuracy.

[0055] In various embodiments, the air flotation control is disposed in the air control assembly 500 in a pneumatically controlled floating manner. The air control assembly 500 is used to adjust the floating position of the air flotation control by air pressure, thereby adjusting the force exerted by the rotary joint assembly 400 on the ball spline 900; in some embodiments, such as Figure 7 and Figure 8 As shown, the pneumatic control assembly 500 includes a pneumatically driven base 501, a fourth micro-pipe connector 504, and an air-floating cavity 510 formed in the pneumatically driven base 501. The pneumatically driven base 501 is mounted on the rotary motor assembly 300. The rotary connector assembly 400 is disposed in the air-floating cavity 510. The air-floating control is disposed in the air-floating cavity 510 in a pneumatically controlled floating manner. The fourth micro-pipe connector 504 is disposed on the pneumatically driven base 501 and is used to connect an external air source to regulate the air pressure in the air-floating cavity 510, thereby adjusting the floating position of the air-floating control. For an embodiment with a strain gauge assembly 600, combined with... Figure 1 The strain gauge assembly 600, together with the air-driven base 501, seals the air-bearing cavity 510; or in combination with... Figure 2 The strain gauge assembly 600, together with the air-driven base 501 and the pressure cap 103, seals the air-float cavity 510.

[0056] This design offers several advantages. First, the pneumatic control component 500 connects to an external air source via the fourth micro-pipe connector 504, precisely regulating the air pressure within the air-float cavity 510. This allows for flexible adjustment of the floating position of the air-float control, thereby precisely controlling the force exerted by the rotary joint component 400 on the ball spline 900. Combined with the levitation characteristics of the air-float control, this reduces contact friction and further enhances force control accuracy structurally. Second, the air-float cavity 510 of the pneumatic base 501 provides a stable installation space for the air-float control and the rotary joint component 400. Combined with the sealing fit of the strain gauge component 600 or the pressure cap 103, this ensures stable air pressure in the air-float cavity 510, preventing force control fluctuations caused by air pressure leakage and guaranteeing the operational stability of the interchangeable nozzle component 800. Third, the air pressure regulation method is convenient to operate, requiring no complex mechanical adjustment structure, and can quickly adapt to different mounting force requirements, improving the component's adaptability to various working conditions.

[0057] Considering the applicability of force control equipment, the bonding process should not be limited by changes in product thickness. During bonding, the pre-compression of the bonding head, such as the bonding head body 301, needs to be monitored in real time to ensure repeatability of precise force control each time. In some embodiments, such as... Figure 1 and Figure 2 As shown, the low-friction pneumatic force-controlled mounting assembly 100 also includes a strain gauge assembly 600, which is mounted on the rotary motor assembly 300. An air-bearing control is mounted on the strain gauge assembly 600 and located within the pneumatic control assembly 500. The strain gauge assembly 600 is configured to sense changes in the height of the spline shaft 910. Combined with... Figure 9 and Figure 10 As an example, the strain gauge assembly 600 includes a support base 601, a spring 603, and a strain gauge 605; the support base 601 is disposed on the rotary motor assembly 300; the strain gauge 605 is disposed on one end of the spring 603 and is fixed together with the spring 603 in the support base 601; the air flotation control is disposed on the other end of the spring 603 and is located in the air control assembly 500.

[0058] This design achieves several advantages. First, the strain gauge assembly 600 senses the height changes of the spline shaft 910 in real time, accurately monitoring the preload of the bonding head body 301. This effectively overcomes the limitations imposed by product thickness variations on the bonding process, ensuring precise force control repeatability for each bonding operation and significantly improving the adaptability of the low-friction pneumatic force control bonding assembly 100. Second, the coordinated design of the spring 603 and strain gauge 605 provides high sensitivity and rapid feedback of height change data, offering precise guidance for the pneumatic control assembly 500 to adjust the floating position of the air-bearing control, further optimizing force control accuracy and response speed. Third, the bracket base 601 is securely mounted on the rotary motor assembly 300, achieving compact integration of the strain gauge assembly 600 with other components without increasing the component volume. The assembly logic is clear, facilitating production and maintenance.

[0059] As an example, such as Figure 9 and Figure 10 As shown, the strain gauge assembly 600 includes a support base 601, a fixing seat 602, a spring 603, a mounting plate 604, a strain gauge 605, and a fixing cover 608. The support base 601 is mounted on the rotary motor assembly 300, the fixing seat 602 is disposed within the support base 601, the strain gauge 605 is disposed on one end of the spring 603, and together with the spring 603, is fixed to the fixing seat 602 via the mounting plate 604. The fixing cover 608 and the air flotation control are disposed on the other end of the spring 603 and are located within the pneumatic control assembly 500. The fixing cover 608 abuts against the air flotation control to fix its position. As an example, the fixing cover 608 is disposed on the other end of the spring 603, and the air flotation control is disposed below the other end of the spring 603.

[0060] This design serves two purposes. First, the mounting base 602 cooperates with the mounting plate 604 to securely fix the spring 603 and strain gauge 605 to the support base 601, effectively preventing displacement or shaking of the sensing components during operation. This ensures the sensing stability and accuracy of the strain gauge 605, providing reliable structural support for real-time monitoring of the height change of the spline shaft 910 and precise control of the preload of the main body 301. Second, the fixing cover 608 precisely abuts against the air flotation control and limits its position, ensuring the air flotation control and the spring 603 and rotary joint assembly 40 are properly positioned. The concentricity of the 0 and ball spline 900 further ensures that the direction of the air control pressure is consistent with the spline shaft 910, structurally avoiding the risk of overturning moment and helping to further improve the force control accuracy of the low-friction air control force control mounting component 100; on the other hand, the spring 603 has a reasonable distribution of components at both ends, with one end carrying the sensing element and the other end carrying the air float control and the fixed cover 608. The layout is compact and the force is balanced, which does not increase the size of the component, but also improves the sensing response speed, ensuring that the height change signal is quickly fed back to the air control component 500.

[0061] In various embodiments, the nozzle head assembly 700 is located below the rotary motor assembly 300 and connected to the splined shaft 910. In some embodiments, such as Figure 11 and Figure 12 As shown, the nozzle head assembly 700 includes a nozzle cutter head 701 and a fifth positioning pin 702. The nozzle cutter head 701 is detachably and sealingly connected to the spline shaft 910 of the ball spline 900, and the bottom of the nozzle cutter head 701 is detachably and sealingly connected to the nozzle 805 of the interchangeable nozzle assembly 800 for transmitting negative pressure. The fifth positioning pin 702 connects to the nozzle cutter head 701 and is used to limit the angle of the nozzle cutter head 701 in conjunction with the spline shaft 910. In some embodiments, such as Figure 11 and Figure 12As shown, the nozzle head assembly 700 includes a nozzle cutter head 701, a fifth locating pin 702, and a fifth micro-connector 703. The nozzle cutter head 701 is detachably and sealingly connected to the spline shaft 910 of the ball spline 900, and the bottom of the nozzle cutter head 701 is detachably and sealingly connected to the interchangeable nozzle assembly 800. The fifth locating pin 702 is connected to the nozzle cutter head 701 and is used to cooperate with the spline shaft 910 of the ball spline 900 to limit the angle of the nozzle cutter head 701. The fifth micro-connector 703 is connected to the nozzle cutter head 701 and is configured to be connected to a negative pressure source so that the nozzle cutter head 701 is connected to the nozzle holder 801 of the interchangeable nozzle assembly 800 by negative pressure adsorption, so as to facilitate quick and accurate replacement of the interchangeable nozzle assembly 800.

[0062] This design offers several advantages. First, the nozzle head 701 is detachably connected to the splined shaft 910 and has an interchangeable nozzle assembly 800 at its bottom. This allows for quick replacement of the adapter component to suit different workpieces without altering the main structure of the low-friction pneumatic force-controlled placement assembly 100, significantly improving the flexibility of the assembly's adaptability. Second, the fifth positioning pin 702, in conjunction with the splined shaft 910, precisely limits the angle of the nozzle head 701, preventing angular deviation during placement and ensuring the operational accuracy of the interchangeable nozzle assembly 800, further solidifying overall placement accuracy. Third, the fifth micro-connector 703, in conjunction with the nozzle head 701, uses negative pressure to adsorb the interchangeable nozzle assembly 800, maintaining stable adsorption force while allowing for rapid replacement, effectively preventing workpiece detachment or placement deviation, and improving operational reliability. Fourth, the highly modular overall structure and detachable design simplify component replacement and maintenance processes, allowing operation without complex tools. This reduces usage and maintenance costs while maintaining the advantages of reliable component structure and ease of production application. Simultaneously, the precise positioning and sealing design provide a solid guarantee for force control accuracy.

[0063] In each embodiment, such as Figure 1 and Figure 2 As shown, the interchangeable nozzle assembly 800 is detachably mounted under the nozzle head assembly 700, and the interchangeable nozzle assembly 800 is configured to sequentially pass through the nozzle head assembly 700, the splined shaft 910, and the rotary joint assembly 400 to connect to a negative pressure source in a negative pressure transmission manner. In some embodiments, such as Figure 13 and Figure 14As shown, the interchangeable nozzle assembly 800 includes a nozzle holder 801, a guide post 802, and a nozzle 805. The nozzle holder 801 is detachably mounted under the nozzle head assembly 700, and the nozzle holder 801 seals and connects the nozzle head assembly 700 and the nozzle 805 respectively, for transmitting negative pressure to the nozzle 805. The guide post 802 connects the nozzle holder 801 and the nozzle head assembly 700 respectively, for cooperating with the nozzle head assembly 700 or the nozzle blade 701 of the nozzle head assembly 700 to limit the position of the nozzle holder 801. As an example, the guide post 802 protrudes from the nozzle holder 801. As an example, the guide post 802 is integrally formed with the nozzle holder 801. In embodiments with a nozzle blade 701, as an example, the guide post 802 is at least partially detachably embedded in the nozzle blade 701 to position and assemble the nozzle holder 801. To prevent the interchangeable nozzle assembly 800 from falling off and being damaged due to power failure or negative pressure interruption, as an example, the nozzle head assembly 700 is provided with a magnet 705 at the bottom of the nozzle cutter head 701, and the nozzle fixing seat 801 is magnetically attracted by the magnet 705.

[0064] This design serves two purposes. First, the nozzle holder 801 can be detachably installed under the nozzle head assembly 700. Combined with the positioning assembly of the guide post 802 and the nozzle blade 701, it precisely limits the position of the nozzle holder 801, preventing offset or wobbling during placement. This ensures the concentricity of the interchangeable nozzle assembly 800 and the splined shaft 910, further solidifying the force control and placement accuracy of the low-friction pneumatic force control placement assembly 100. Second, the nozzle holder 801 provides a sealed connection between the nozzle head assembly 700 and the nozzle 805. This design constructs a complete and sealed negative pressure transmission path, ensuring no leakage of negative pressure, maintaining stable adsorption force of the nozzle 805, effectively preventing workpiece detachment or placement deviation, and improving operational reliability. Furthermore, the guide post 802 is integrated with the nozzle fixing seat 801 and partially embedded in the nozzle cutter head 701, which simplifies the assembly process, improves installation efficiency, and enhances structural stability. At the same time, the detachable design allows for quick replacement of nozzles 805 adapted to different workpieces without modifying the main structure, greatly improving the flexibility of component adaptability.

[0065] The following will continue to combine Figures 1 to 14 The following example illustrates a low-friction pneumatic force-controlled mounting assembly 100. In some embodiments, the low-friction pneumatic force-controlled mounting assembly 100 includes a base assembly 200, a rotary motor assembly 300, a rotary joint assembly 400, a pneumatic control assembly 500, a strain gauge assembly 600, a nozzle assembly 700, an interchangeable nozzle assembly 800, a ball spline 900, a baffle 101, a pressure ring 102, a pressure cap 103, a suction cup seat 104, a bushing 105, a collar 106, tungsten carbide balls 108, a suction cup 109, a spring 110, a synchronous toothed belt 111, a first positioning pin 112, a first locating screw 113, a first mounting screw 114, and a first fixing screw 115.

[0066] As an example, the lower part of the rotary motor assembly 300 is connected to an interchangeable nozzle assembly 800, which is located at the bottom of the low-friction pneumatic force-controlled mounting assembly 100 and is used for adsorbing die-bonding components inside the optical communication system. The nozzle head assembly 700 is directly connected to the ball spline 900 and is used to adsorb and fix the interchangeable nozzle assembly 800 for replacement to accommodate optical communication components of different sizes. A baffle 101 is used to fix the ball spline 900 to prevent it from dislodging from the bearing hole 313 of the rotary motor assembly 300. A suction cup 109 is mounted on a suction cup holder 104 for vacuum conduction with the interchangeable nozzle assembly 800. The suction cup holder 104 is connected to the ball spline 900, and after communicating with the upper rotary joint assembly 400 via the spline shaft 910 of the ball spline 900, it is directly connected to a vacuum hose, such as a silicone hose 408. The synchronous pulley on the ball spline 900 transmits power to the synchronous pulley 304 of the rotary motor assembly 300 via the synchronous toothed belt 111. A pressure ring 102 is mounted on the upper part of the rotary motor assembly 300. The pressure ring 102 is evenly tightened around its perimeter by first locating screws 113 to ensure zero axial clearance of the deep groove ball bearing on the ball spline 900. Four first locating screws 113 are fixed to a cover 103, which is connected to the rotary motor assembly 300. Two third locating pins 310 on the rotary motor assembly 300 are used to precisely position the cover 103, ensuring that the center of the cover 103 is concentric with the rotation center of the ball spline 900.

[0067] Similarly, a first positioning pin 112 is also installed on the pressure cap 103 for precise positioning of the pneumatic control component 500. A bushing 105, a collar 106, and a spring 110 are sequentially installed between the ball spline 900 and the rotary joint assembly 400. The downward pressure of the ball spline 900 is generated by the pre-set air pressure inside the cavity of the pneumatic control component 500, which drives the air-bearing control, such as the tungsten steel ball 108, forcing the rotary joint assembly 400 to move downwards. A first mounting screw 114 secures the pneumatic control component 500 and the pressure cap 103 together to the rotary motor assembly 300, and a first fixing screw 115 secures the baffle 101 to the rotary motor assembly 300. A strain gauge assembly 600 is installed on the rotary motor assembly 300 to monitor the pre-compression of the low-friction pneumatic force-controlled bonding assembly 100 during the bonding process in real time. The amount of pre-compression is determined by the change in the analog quantity of the strain gauge. The pitch adjustment of the low-friction pneumatic force control mounting component 100 is achieved through the base component 200.

[0068] In some embodiments, the main function of the base assembly 200 in the low-friction pneumatic force-controlled mounting assembly 100 is to adjust the pitch angle of the low-friction pneumatic force-controlled mounting assembly 100, so that the rotation axis of the low-friction pneumatic force-controlled mounting assembly 100 is perpendicular to the working surface of the low-friction pneumatic force-controlled mounting assembly 100. As an example, the left-right pitch of the low-friction pneumatic force-controlled mounting assembly 100 is adjusted left-right using the first hexagon socket head cap screw 208, and the front-back pitch of the low-friction pneumatic force-controlled mounting assembly 100 is fine-tuned using precision shims of different thicknesses. The pressure gauge 203 is a pressure sensor used to monitor the vacuum pressure value of the suction nozzle 805. The second micro-connector 205 is connected to a negative pressure source, such as a vacuum source, and the first micro-connector 204 is connected to the rotary joint assembly 400. The base plate 201 is used to adapt to various types of equipment adapter plates. The adjustment block 202, also called an adjustment block, is used to set the left-right yaw or up-down pitch conditions. The second locating pin 207 is used to position and install the rotary motor assembly 300. The first internal hexagonal head screw 208, together with the inner bushing 206 and the mounting screw seat 209, rotatably connects the base plate 201 and the adjusting block 202.

[0069] As an example, the rotary motor assembly 300 provides the rotational power source for the interchangeable nozzle assembly 800 and serves as the support for the rotary joint assembly 400, pneumatic control assembly 500, strain gauge assembly 600, and nozzle head assembly 700. A stepper motor 303, such as a harmonic reducer type stepper motor, is fixed to the motor flange 302. Both are fixed to the flange body 301 as a power source. A synchronous pulley 304 is fixed to the shaft end of the stepper motor 303 and connected to the ball spline by a synchronous toothed belt. A sensing element 305 for angle return to origin is fixed to the synchronous pulley 304, providing a signal to the motion control system via a photoelectric switch 307. A second fixing screw 308 is used to fix the sensing element 305, a third fixing screw 309 is used to fix the photoelectric switch, a third locating pin 310 is used to position the mounting cover 103, and a fifth fixing screw 312 is used to fix the motor flange 302.

[0070] As an example, the rotary joint assembly 400 ensures that the low-friction pneumatic force-controlled mounting assembly 100 can rotate freely while transmitting vacuum to the nozzle 805 of the interchangeable nozzle assembly 800. The rotary joint assembly 400 also transmits pneumatic force to the splined shaft 910 of the ball spline 900. The bottom of the rotary joint seat 401 is threaded to the splined shaft 910 and secured by a first brass set screw 407 with a copper washer. A first sealing ring 405 is placed at the bottom of the rotary joint seat 401 for rotational sealing. The outer ring of the bearing 403 is fixed in the top circular groove of the rotary joint seat 401, and the joint rotation shaft 402 is inserted into the inner ring of the bearing 403. Low-resistance pads 404 are installed horizontally and laterally in the slot of the joint rotation shaft 402. The horizontally placed low-resistance pads 404 are used to reduce the frictional effects caused by the contact of the strain gauge assembly 600 or its strain gauge 605, while the laterally placed low-resistance pads 404 are used to reduce the frictional effects of rotational limiting contact. Specifically, since the joint is in a floating rotational state when driven by the stepper motor 303, it will also have a certain amount of oscillation from a microscopic perspective. This floating oscillation will cause contact, and once contact occurs, it will generate friction on the up-and-down movement of the joint. In order to reduce the impact, low-resistance pads 404 are used to reduce the friction coefficient of the contact area as much as possible. The third micro-tube connector 406 on the joint rotation shaft 402 is connected to the silicone hose 408, for example, a φ4 silicone hose, for the negative pressure introduction of the suction nozzle 805. The first brass set screw 407 with copper washer fixes the rotary joint assembly 400 to the spline shaft 910; the first plug 409 can be a nut screw for sealing the air passage.

[0071] As an example, the pneumatic control assembly 500 provides a constant pressure source for the low-friction pneumatic force-controlled mounting assembly 100, derived from a constant pressure generated within the air-float chamber 510 under constant air pressure. The air-drive base 501 contains the air-float chamber 510 for the frictionless up-and-down movement of the tungsten carbide balls 108. A ball-head type first locking screw 508 limits the rotary joint and also ensures that the rotary joint assembly 400 is in a floating state. The fourth micro-connector 504 is an air-float connector; its air source is provided by a precision pressure regulating valve to ensure a stable pressure, thereby achieving precise force control. The first cover plate 502 and the second cover plate 503 are used for sealing after the tungsten carbide balls 108 are assembled in the air-float chamber 510, and can also be opened for cleaning. The first socket head cap screw 509 installs the first cover plate 502 and the second sealing ring 505 onto the air drive base 501. The second mounting screw 507 installs the second cover plate 503 onto the air drive base 501. The second plug 506 is used to seal the air passage and can be a nut screw.

[0072] As an example, the strain gauge assembly 600 is used to record the pre-compression height of the mounting head. For different products of the same model, even with height errors, it ensures consistent pre-compression height for each mounting and is compatible with products of varying thicknesses. The bracket base 601 is fixed to the rotary motor assembly 300 and precisely positioned via bottom pin holes. A spring 603 holds a strain gauge 605, both fixed to a mounting base 602. Tungsten steel balls 108 and a fixing cover 608 are attached to the spring 603 with strong adhesive and installed onto the bracket base 601 via a fourth positioning pin 610. After the angle is adjusted and determined, it is fixed to the mounting base 602 with a second locating screw 609. The tungsten steel balls 108 press against the low-resistance pad 404 of the rotary joint assembly 400 to monitor the real-time height change of the ball spline shaft 910. This height change is calculated from the analog change of the strain gauge 605. The sixth fixing screw 606 secures the mounting plate 604 and the spring plate 603 to the fixing base 602. For example, the sixth fixing screw 606 is an internal hex socket head cap screw. The first fastening screw 611 is used to fix the fourth locating pin 610. For example, the first fastening screw 611 is a nut screw.

[0073] As an example, the nozzle head assembly 700 is used to attract the interchangeable nozzle assembly 800 and the grounded nozzle 805. The nozzle cutter head 701 is fixed to the bottom of the spline shaft 910 of the ball spline 900 by a second brass set screw 704 with a copper washer. A magnet 705 for attracting the interchangeable nozzle assembly 800 is embedded in the bottom of the nozzle cutter head 701. The angle of the nozzle head assembly 700 is limited by a fifth locating pin 702. A terminal block 707 is fixed to the side of the nozzle cutter head 701, and an insulating sleeve terminal 710, such as a nylon insulating sleeve type terminal, is fixed on it. The lead cable is directly connected to the equipment ground. A fifth micro-connector 703 is installed on the nozzle cutter head 701 for connecting negative pressure gas; or the fifth micro-connector 703 is used for connecting positive and negative pressure gas to the low-friction pneumatic force-controlled mounting assembly 100. A threaded washer 706 is disposed in the nozzle cutter head 701 and threaded onto the second brass set screw 704 with a copper washer, acting as a nut and facilitating easy replacement. A second socket head cap screw 708 is used to secure and lock the insulating sleeve terminal 710. A third mounting screw 709 secures the terminal block 707 to the nozzle cutter head 701 for easy replacement.

[0074] As an example, the interchangeable nozzle assembly 800 is detachably mounted under the nozzle head assembly 700, allowing for quick interchangeability. It is primarily used to secure nozzles 805 of different sizes and specifications used in the low-friction pneumatic force-controlled mounting assembly 100. The nozzle holder 801 has a nozzle hole at its bottom for securing the nozzle 805, a third brass set screw 803 with a copper washer for locking the nozzle 805, and a guide post 802 inserted into the nozzle holder 801 for guiding and positioning the interchangeable nozzle assembly 800. A foolproof pin 804 acts as a positioning pin to prevent incorrect installation angles.

[0075] This design offers several advantages. First, the low-friction pneumatic force control mounting assembly 100 improves force control accuracy, avoiding overturning torque caused by voice coil force control eccentricity. Second, by eliminating the voice coil force control, the assembly 100 also eliminates the need for guide rails, significantly reducing friction. Third, the pneumatic control structure, consisting of the pneumatic control assembly 500, air float control, and rotary joint assembly 400, has its downward pressure direction concentric with the spline shaft 910, resolving the issue of misalignment between the voice coil force control and the spline shaft 910. This ensures minimal friction error when the spline shaft 910 rotates to any angle. Fourth, by eliminating the voice coil motor and high-precision reading head, the low-friction pneumatic force control mounting assembly 100 replaces it with a precision pressure regulating valve and strain gauge, offering better cost-effectiveness and significantly superior performance compared to traditional voice coil force control structures. It should be noted that other embodiments of this application also include a low-friction pneumatic force-controlled mounting assembly formed by combining the technical features of the above embodiments.

[0076] The technical features of the embodiments described above can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as the combination of these technical features does not contradict each other, it should be considered within the scope of this specification. The embodiments described above only illustrate several implementation methods of this application, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.

Claims

1. A low-friction pneumatic force-controlled mounting assembly (100), characterized in that, It includes an air flotation control system, a base assembly (200), a rotary motor assembly (300), a rotary joint assembly (400), an air control assembly (500), a nozzle assembly (700), an interchangeable nozzle assembly (800), and a ball spline assembly (900). The pneumatic control component (500) and the ball spline (900) are respectively disposed on the rotary motor assembly (300), which is disposed on the base assembly (200) and is driven by the ball spline (900). The rotary joint assembly (400) is disposed in the pneumatic control assembly (500). The first end of the rotary joint assembly (400) is configured to connect to a negative pressure source and abut against the air flotation control, and the second end elastically abuts against the rotary motor assembly (300) and is axially connected to the spline shaft (910) of the ball spline (900). The suction head assembly (700) is located below the rotary motor assembly (300) and connected to the spline shaft (910). The air flotation control is set in the air control component (500) in an air-controlled floating manner. The air control component (500) is used to adjust the floating position of the air flotation control by air pressure, so as to adjust the force of the rotary joint assembly (400) on the ball spline (900). The interchangeable nozzle assembly (800) is detachably mounted under the nozzle head assembly (700), and the interchangeable nozzle assembly (800) is configured to connect to the negative pressure source in a negative pressure transmission manner by sequentially passing through the nozzle head assembly (700), the spline shaft (910) and the rotary joint assembly (400).

2. The low-friction pneumatic force-controlled mounting assembly (100) according to claim 1, characterized in that, The base assembly (200) is configured to be rotatably mounted to an external structure; or, The rotary motor assembly (300) is disposed on the side of the base assembly (200); or, The air flotation control component is a steel ball; or... The low-friction pneumatic force-controlled mounting assembly (100) also includes a baffle (101), a pressure ring (102), a pressure cap (103), a suction cup seat (104), a bushing (105), a collar (106), a suction cup (109), and a spring (110). One end of the ball spline (900) is fixed to the rotary motor assembly (300) by the baffle (101), and the other end is fixed to the rotary motor assembly (300) by the pressure ring (102), so that the ball spline (900) is fixed in the bearing hole (313) of the rotary motor assembly (300); The pressure cap (103) is pressed onto the pressure ring (102) and fixed onto the rotary motor assembly (300), and the pneumatic control assembly (500) is disposed on the pressure cap (103); The collar (106) is embedded in the cover (103) and is axially connected to the second end of the rotary joint assembly (400). The bushing (105) is disposed in the collar (106) and is axially connected to the spline shaft (910). The second end of the rotary joint assembly (400) elastically abuts against the collar (106) or the cover (103) through the spring (110). The suction cup seat (104) is sealed to the spline shaft (910), and the suction cup (109) is sealed to the suction cup seat (104) and the suction head assembly (700) for transmitting negative pressure.

3. The low-friction pneumatic force-controlled mounting assembly (100) according to claim 1, characterized in that, The base assembly (200) includes a base plate (201), an adjustment stop (202), a pressure gauge (203), a first micro connector (204), and a second micro connector (205). The rotary motor assembly (300) is disposed on the base plate (201), the base plate (201) is rotatably connected to the adjusting block (202), and the adjusting block (202) is configured to be mounted on an external structure; The first micro-connector (204) is connected to the second micro-connector (205), the first micro-connector (204) is connected to the rotary joint assembly (400), and the second micro-connector (205) is configured to connect to the negative pressure source; The pressure gauge (203) is connected to one of the first micro connector (204) and the second micro connector (205).

4. The low-friction pneumatic force-controlled mounting assembly (100) according to claim 1, characterized in that, The rotary motor assembly (300) includes a flange body (301), a motor flange (302), a stepper motor (303), and a synchronous pulley (304). The head body (301) is disposed on the base assembly (200), and the stepper motor (303) is mounted on the head body (301) through the motor flange (302); The pneumatic control component (500) and the ball spline (900) are respectively disposed on the main body (301) of the head; The output end of the stepper motor (303) is driven to connect to the ball spline (900) via the synchronous pulley (304).

5. The low-friction pneumatic force-controlled mounting assembly (100) according to claim 4, characterized in that, The rotary motor assembly (300) has a bearing hole (313) in the head body (301), the ball spline (900) is installed in the bearing hole (313) and the spline shaft (910) is located outside the bearing hole (313); or, The rotary motor assembly (300) also includes a sensing sheet (305) and a photoelectric switch (307). The sensing element (305) is disposed on the synchronous pulley (304), and the photoelectric switch (307) is disposed on the main body (301). The sensing element (305) cooperates with the photoelectric switch (307) to correct the position of the synchronous pulley (304).

6. The low-friction pneumatic force-controlled mounting assembly (100) according to claim 1, characterized in that, The rotary joint assembly (400) includes a rotary joint seat (401), a joint rotation shaft (402), a bearing (403), and a third micro-pipe joint (406). The rotary joint seat (401) elastically abuts against the rotary motor assembly (300), and the joint rotation shaft (402) is located on the rotary joint seat (401) and is connected to the upper part of the rotary joint seat (401) through the bearing (403); The lower part of the rotary joint seat (401) is connected to the spline shaft (910). The third micro-pipe connector (406) is disposed on the connector rotating shaft (402), and one end is directly connected to the negative pressure source or connected to the negative pressure source through the base assembly (200), while the other end is sealed to the spline shaft (910).

7. The low-friction pneumatic force-controlled mounting assembly (100) according to claim 1, characterized in that, The pneumatic control assembly (500) includes a pneumatic base (501), a fourth micro-pipe connector (504), and an air-float cavity (510) formed in the pneumatic base (501). The pneumatic base (501) is mounted on the rotary motor assembly (300); The rotary joint assembly (400) is disposed in the air flotation cavity (510); The air flotation control is set in the air flotation cavity (510) in a pneumatically controlled floating manner. The fourth micro-pipe connector (504) is set on the air-driven base (501) and is used to connect to an external air source to regulate the air pressure in the air flotation cavity (510) so as to adjust the floating position of the air flotation control.

8. The low-friction pneumatic force-controlled mounting assembly (100) according to claim 1, characterized in that, The nozzle head assembly (700) includes a nozzle blade (701), a fifth positioning pin (702), and a fifth micro connector (703). The suction nozzle head (701) is detachably and sealingly connected to the spline shaft (910) of the ball spline (900), and the bottom of the suction nozzle head (701) is detachably and sealingly connected to the suction nozzle (805) of the interchangeable suction nozzle assembly (800) for transmitting negative pressure; The fifth positioning pin (702) is connected to the suction nozzle cutter head (701) and is used to cooperate with the spline shaft (910) to limit the angle of the suction nozzle cutter head (701); The fifth micro-connector (703) is connected to the nozzle cutter head (701) and is configured to access a negative pressure source so that the nozzle cutter head (701) is connected to the nozzle holder (801) of the interchangeable nozzle assembly (800) by negative pressure adsorption.

9. The low-friction pneumatic force-controlled mounting assembly (100) according to claim 1, characterized in that, The interchangeable nozzle assembly (800) includes a nozzle holder (801), a guide post (802), and a nozzle (805). The nozzle holder (801) is detachably installed under the nozzle head assembly (700), and the nozzle holder (801) is respectively sealed to the nozzle head assembly (700) and the nozzle (805) for transmitting negative pressure to the nozzle (805). The guide post (802) is connected to the nozzle holder (801) and the nozzle head assembly (700) respectively, and is used to cooperate with the nozzle head assembly (700) to limit the position of the nozzle holder (801).

10. The low-friction pneumatic force-controlled mounting assembly (100) according to any one of claims 1 to 9, characterized in that, The low-friction pneumatic force-controlled mounting assembly (100) further includes a strain gauge assembly (600) disposed on the rotary motor assembly (300), and the air flotation control is disposed on the strain gauge assembly (600) and located in the pneumatic control assembly (500). The strain gauge assembly (600) is configured to sense changes in the height of the spline shaft (910).

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