Chip grabbing system for chip repair

Abstract

The invention relates to a chip grabbing system for chip repair, which comprises a chip fixing frame, a loading mechanical arm and an unloading mechanical arm, and is characterized in that the chip fixing frame comprises a lower suction cup, an upper air bag body and a frame body, and the lower suction cup and the upper air bag body are inserted into the frame body.

Description

TECHNICAL FIELD

[0001] The present application relates to a kind of grabbing system, in particular to a kind of grabbing system used to grab chip in chip repair process. BACKGROUND

[0002] It is known that with the popularization of various intelligent devices, the demand for various chips is gradually increasing, and chip products need to be tested after production to check the quality of chips. After chip testing, unqualified chips need to be concentrated for chip repair work.

[0003] When performing chip repair work, chips need to be grabbed constantly, so that chips can be repaired in different workstations. When chips are converted between different workstations, the traditional method is to use different mechanical hands to grab chips frequently. The mechanical hand needs to directly contact the chip during each grabbing. However, the above-mentioned method of using different mechanical hands to grab chips frequently is easy to cause structural damage to the chip, and the overall grabbing efficiency is low, which is the main drawback of the prior art. SUMMARY

[0004] The technical solution adopted by the present application is: a chip grabbing system for chip repair, characterized by: comprising a chip fixing frame, a feeding mechanical arm and a discharging mechanical arm, wherein the chip fixing frame comprises a lower suction cup, an upper air bag body and a frame body, and the lower suction cup and the upper air bag body are inserted into the frame body.

[0005] The chip grabbing system works according to the following steps.

[0006] Firstly, the feeding mechanical arm grabs the chip fixing frame in the material taking area, and fixes the chip fixing frame at the lower end of the feeding mechanical arm.

[0007] Secondly, the feeding mechanical arm drives the chip fixing frame to move, so that the chip fixing frame moves to the top of the chip, and the feeding mechanical arm presses down to make the lower suction cup of the chip fixing frame press down and adhere to the top of the chip.

[0008] Thirdly, the feeding mechanical arm moves up and drives the chip fixing frame and the chip to move up synchronously.

[0009] Fourth step, the loading mechanical arm moves to a chip repair station to place the chip fixing frame and the chip in the chip repair station, then the loading mechanical arm separates from the chip fixing frame, the chip is repaired in the chip repair station, when the chip needs to be transferred to another station, the loading mechanical arm moves above the chip fixing frame, the loading mechanical arm directly grabs the chip fixing frame and moves up, then the loading mechanical arm moves to another chip repair station to place the chip fixing frame and the chip in another chip repair station, then the loading mechanical arm separates from the chip fixing frame.

[0010] Fifth step, when the chip completes the chip repair work in the last chip repair station, the loading mechanical arm grabs the chip fixing frame and moves to the unloading station, and the chip fixing frame and the chip are placed in the unloading station.

[0011] Sixth step, the unloading mechanical arm moves to the unloading station, the unloading mechanical arm grabs the chip fixing frame, and fixes the chip fixing frame at the lower end of the loading mechanical arm, at the same time, the unloading mechanical arm presses the upper air bag body of the chip fixing frame, so that the chip fixing frame is separated from the top of the chip, the chip is left in the unloading station, the unloading mechanical arm carries the chip fixing frame away from the unloading station, and the unloading mechanical arm places the chip fixing frame in the material taking area in the first step for the loading mechanical arm to grab again, so that the above-mentioned first step to sixth step is repeatedly performed to realize the grabbing work of the chip.

[0012] The chip fixing frame is used for fixing the chip, the mechanical arm grabs the chip fixing frame for station conversion in the repair process, and physical damage of the chip caused by the mechanical arm can be avoided. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of the application.

[0014] Figure 2 It is a structural schematic diagram of the chip fixing frame.

[0015] Figure 3 It is a working process schematic diagram of the application.

[0016] Figure 4 It is another structural schematic diagram of the chip fixing frame.

[0017] Figure 5 It is a structural exploded schematic diagram of the application.

[0018] Figure 6 It is a gas hole schematic diagram of the application.

[0019] Figure 7The schematic view of the lower suction disc of the chip fixing frame being pressed down and adsorbed on the top of the chip by the feeding mechanical arm in the second step of the present application.

[0020] Figure 8 The schematic view of the upper air bag body of the chip fixing frame being pressed down by the unloading mechanical arm in the sixth step of the present application, so that the chip fixing frame is separated from the top of the chip.

[0021] Figure 9 The bottom view of the upper air bag body of the present application.

[0022] Figure 10 The top view of the lower suction disc of the present application.

[0023] Figure 11 The bottom view of the lower sleeve of the present application.

[0024] Figure 12 The top view of the upper disc body of the present application. DETAILED DESCRIPTION

[0025] As shown in Figures 1 to 12 A chip grabbing system for chip repair includes a chip fixing frame 100, a feeding mechanical arm 10 and an unloading mechanical arm 20, wherein the chip fixing frame 100 includes a lower suction disc 200, an upper air bag body 300 and a frame body 400, the lower suction disc 200 and the upper air bag body 300 are inserted into the frame body 400.

[0026] As shown in Figure 3 The chip grabbing system works according to the following steps.

[0027] First step, the feeding mechanical arm 10 grabs the chip fixing frame 100 in a feeding area, and fixes the chip fixing frame 100 at the lower end of the feeding mechanical arm 10.

[0028] Second step, the feeding mechanical arm 10 drives the chip fixing frame 100 to move, so that the chip fixing frame 100 moves to the top of a chip 30, the feeding mechanical arm 10 presses down the lower suction disc 200 of the chip fixing frame 100, and the lower suction disc 200 is adsorbed on the top of the chip 30.

[0029] Third step, the feeding mechanical arm 10 moves up and drives the chip fixing frame 100 and the chip 30 to move up synchronously.

[0030] Fourth step, the feeding mechanical arm 10 moves to a chip repair station to place the chip fixing frame 100 and the chip 30 on the chip repair station, then the feeding mechanical arm 10 is separated from the chip fixing frame 100, and the chip 30 is repaired in the chip repair station.

[0031] When the chip 30 needs to be transferred to a work station, the feeding mechanical arm 10 moves above the chip fixing frame 100, and directly grabs the chip fixing frame 100 to move up, and then the feeding mechanical arm 10 moves to another chip repairing work station to place the chip fixing frame 100 and the chip 30 on the other chip repairing work station, and then the feeding mechanical arm 10 separates from the chip fixing frame 100.

[0032] In this way, the chip 30 can be transferred between work stations by the feeding mechanical arm 10 grabbing the chip fixing frame 100 instead of the chip 30, so as to complete various chip repairing work.

[0033] In the fifth step, when the chip 30 completes the chip repairing work at the last chip repairing work station, the feeding mechanical arm 10 grabs the chip fixing frame 100 to move to the unloading work station, and places the chip fixing frame 100 and the chip 30 on the unloading work station.

[0034] In the sixth step, the unloading mechanical arm 20 moves to the unloading work station, grabs the chip fixing frame 100, and fixes the chip fixing frame 100 at the lower end of the feeding mechanical arm 10, and at the same time, the unloading mechanical arm 20 presses the upper air bag body 300 of the chip fixing frame 100 to make the chip fixing frame 100 separate from the top of the chip 30.

[0035] The chip 30 stays in the unloading work station, the unloading mechanical arm 20 carries the chip fixing frame 100 away from the unloading work station, and places the chip fixing frame 100 on the material taking area in the first step for the feeding mechanical arm 10 to grab again, so as to repeatedly perform the above-mentioned first step to sixth step to realize the grabbing work of the chip 30.

[0036] As shown in Figures 5 to 6 The lower suction disc 200 includes a suction disc body 210 and an upper insertion column 220, wherein the upper insertion column 220 is arranged at the top of the suction disc body 210, the suction disc body 210 has a suction disc cavity 211, the upper insertion column 220 has an upper column cavity 221 and a column top surface 222, wherein a plurality of upper column grooves 230 are concavely arranged downward from the column top surface 222, each upper column groove 230 has an upper groove top opening 231, an upper groove outer opening 232 and an upper groove inner opening 233, wherein the upper groove top opening 231 is located at the top of the upper column groove 230, the upper groove top opening 231 is flush with the column top surface 222, the upper groove outer opening 232 and the upper groove inner opening 233 are respectively located at both sides of the upper column groove 230, and the upper column groove 230, the upper column cavity 221 and the suction disc cavity 211 are in communication with each other.

[0037] As shown in Figures 5 to 6As shown, the upper air bag body 300 comprises an air bag body 310 and a lower insertion column 320, wherein the lower insertion column 320 is arranged at the bottom of the air bag body 310, the air bag body 310 has a bag cavity 311, the lower insertion column 320 has a lower column cavity 321 and a column bottom surface 322, wherein a plurality of lower column grooves 330 are concavely arranged upward from the column bottom surface 322, each of the lower column grooves 330 has a lower groove top opening 331, a lower groove outer opening 332 and a lower groove inner opening 333, wherein the lower groove top opening 331 is located at the bottom of the lower column groove 330, the lower groove top opening 331 is flush with the column bottom surface 322, the lower groove outer opening 332 and the lower groove inner opening 333 are respectively located at both sides of the lower column groove 330, and the lower column groove 330, the lower column cavity 321 and the bag cavity 311 are in communication with each other.

[0038] The column bottom surface 322 of the lower insertion column 320 is pressed on the column top surface 222 of the upper insertion column 220, the lower column grooves 330 correspond to the upper column grooves 230 one by one, the lower groove top opening 331 of the lower column groove 330 is in communication with the upper groove top opening 231 of the upper column groove 230, and one lower column groove 330 and one upper column groove 230 form an air hole 340, wherein the lower groove outer opening 332 of the lower column groove 330 and the upper groove outer opening 232 of the upper column groove 230 form a hole outer opening 341 of the air hole 340 in communication, and the lower groove inner opening 333 of the lower column groove 330 and the upper groove inner opening 233 of the upper column groove 230 form a hole inner opening 342 of the air hole 340 in communication.

[0039] A valve strip 500 is arranged between the upper insertion column 220 and the lower insertion column 320, the valve strip 500 corresponds to the air hole 340 one by one, the valve strip 500 comprises a fitting part 510, a cover body 520 and a convex diaphragm 530, wherein the fitting part 510 is fitted on the outer surface of the lower insertion column 320, the cover body 520 is connected at the bottom of the fitting part 510, the cover body 520 is arranged on the hole outer opening 341 of the air hole 340, the convex diaphragm 530 is connected on the cover body 520, the convex diaphragm 530 is arranged in the air hole 340 from the hole outer opening 341 to the hole inner opening 342, and the part of the convex diaphragm 530 penetrating out of the hole inner opening 342 forms a diaphragm head 531.

[0040] As shown, Figure 7 The process of the above-mentioned second step of pressing the lower suction disc 200 of the chip fixing frame 100 to the top of the chip 30 by the upper feeding mechanical arm 10 is as follows.

[0041] Step A, the upper feeding mechanical arm 10 presses the lower suction disc 200 of the chip fixing frame 100 to contact the top of the chip 30.

[0042] Step B, the upper loading mechanical arm 10 continues to press down to make the lower suction disc 200 physically deform, the suction disc cavity 211 of the suction disc body 210 is compressed, and the air A in the suction disc cavity 211 is pressed into the upper column cavity 221.

[0043] Step C, the air A in the upper column cavity 221 presses the cover 520 of the valve piece strip 500, so that the cover 520 is separated from the hole outer port 341, at this moment, the air A is discharged from the upper column cavity 221 along the hole outer port 341, and a negative pressure is formed in the suction disc cavity 211, the lower suction disc 200 is adsorbed on the top of the chip 30 through the negative pressure, and at the same time, the convex diaphragm 530 of the valve piece strip 500 can block part of the air A from entering the lower column cavity 321, so as to increase the value of the negative pressure, so that the lower suction disc 200 is adsorbed on the top of the chip 30 with greater force.

[0044] The volume of the suction disc cavity 211 is greater than three times the volume of the capsule cavity 311.

[0045] As shown in Figure 8 the above sixth step, the process of pressing down the upper air bag body 300 of the chip fixing frame 100 by the unloading mechanical arm 20 to separate the chip fixing frame 100 from the top of the chip 30 is as follows.

[0046] Step a, the unloading mechanical arm 20 presses down the upper air bag body 300 of the chip fixing frame 100 to make the upper air bag body 300 physically deform, the capsule cavity 311 of the upper air bag body 300 is compressed, and the air B in the capsule cavity 311 is pressed into the lower column cavity 321.

[0047] Step b, the air B in the lower column cavity 321 presses down the convex diaphragm 530 of the valve piece strip 500, so that the diaphragm head 531 covers the hole inner port 342 to close the air hole 340, and at the same time, the air B enters the suction disc cavity 211 through the upper column cavity 221 to eliminate the negative pressure in the suction disc cavity 211, at this moment, the chip 30 is separated from the lower suction disc 200.

[0048] As shown in Figures 5 to 12 in the specific implementation, the frame body 400 includes an upper disc body 600 and a lower sleeve 700, the upper disc body 600 is screwed on the top of the lower sleeve 700, the lower sleeve 700 has a sleeve cavity 710, the upper insertion column 220 of the lower suction disc 200 is inserted into the bottom of the sleeve cavity 710, the lower insertion column 320 of the upper air bag body 300 is inserted into the top of the sleeve cavity 710, a valve piece groove 720 is recessed on the inner side wall of the sleeve cavity 710, and the valve piece strip 500 is inserted into the valve piece groove 720 to fix the valve piece strip 500 at the position of the air hole 340.

[0049] In a specific implementation, the valve piece slot 720 has an inclined wall 721, a fixing slot 722 and a slot opening 723, wherein the cover 520 of the valve piece strip 500 corresponds to the inclined wall 721, the top of the abutting portion 510 of the valve piece strip 500 is provided with a clamping head 511 clamped in the fixing slot 722 to fix the valve piece strip 500 in the valve piece slot 720, and the slot opening 723 is in communication with the valve piece slot 720 and located at the bottom of the lower sleeve 700.

[0050] In step C, the air A in the upper column cavity 221 pushes the cover 520 of the valve piece strip 500 to make the cover 520 move away from the hole outer opening 341, and the cover 520 is pressed on the inclined wall 721 to limit the maximum opening angle of the cover 520.

[0051] In step C, after the air A in the upper column cavity 221 is discharged along the hole outer opening 341, the air A flows along the valve piece slot 720 and is discharged to the outside of the frame 400 through the slot opening 723.

[0052] In a specific implementation, the upper disc body 600 has a disc cavity 610 in communication with the cylinder cavity 710, the air bag body 310 of the upper air bag body 300 is arranged in the disc cavity 610, and the disc cavity 610 is provided with an open top 611.

[0053] In a specific implementation, the top surface of the upper disc body 600 is provided with a plurality of grabbing structures 620, and the grabbing structures 620 are arranged in a ring on the top surface of the upper disc body 600. Each grabbing structure 620 comprises a magnetic ring 621 and a positioning slot 622.

[0054] As shown in Figure 1 The upper feeding mechanical arm 10 comprises a plurality of upper feeding claw heads 11 corresponding to the grabbing structures 620, and each upper feeding claw head 11 comprises an upper feeding magnetic table 12 and an upper feeding positioning head 13.

[0055] In the first step, when the upper feeding mechanical arm 10 grabs the chip fixing frame 100 in the material taking area, the upper feeding claw head 11 moves above the grabbing structure 620, and then the upper feeding claw head 11 moves downward. After the upper feeding positioning head 13 is inserted into the positioning slot 622, the upper feeding magnetic table 12 magnetically attracts the magnetic ring 621 to complete the action of grabbing the chip fixing frame 100.

[0056] In the fourth step, when the upper feeding mechanical arm 10 separates from the chip fixing frame 100, the upper feeding magnetic table 12 is powered off to eliminate the electromagnetic attraction force, thereby eliminating the magnetic attraction force between the upper feeding magnetic table 12 and the magnetic ring 621.

[0057] As shown in Figure 1As shown, the unloading robotic arm 20 includes several unloading claws 21 and unloading pushers 22. The unloading claws 21 correspond one-to-one with the gripping structure 620, and the unloading pushers 22 correspond to the airbag body 310 of the upper airbag body 300. Each unloading claw 21 includes an unloading magnetic suction table 23 and an unloading positioning head 24.

[0058] In the sixth step above, the unloading claw 21 moves above the gripping structure 620, and then the unloading claw 21 moves down. After the unloading positioning head 24 is inserted into the positioning groove 622, the unloading magnetic suction table 23 magnetically attracts the magnetic suction ring 621 so that the chip fixing frame 100 is fixed at the lower end of the loading robot arm 10.

[0059] At the same time, the feeding pusher 22 is pressed into the disc cavity 610 from the opening 611 of the upper disc 600. The feeding pusher 22 presses down on the airbag body 310 of the upper airbag 300, the airbag cavity 311 is compressed, and the air B in the airbag cavity 311 is forced into the lower column cavity 321.

[0060] In practice, the feeding pusher 22 has a convex bottom surface and the airbag body 310 has an convex top surface. The convex bottom surface pressing down on the convex top surface can quickly compress the airbag cavity 311.

[0061] like Figures 1 to 12 As shown, a method for picking up a chip during chip repair includes the following steps.

[0062] Step 1: The loading robotic arm 10 grabs the chip holder 100 in the material handling area and fixes the chip holder 100 to the lower end of the loading robotic arm 10. The chip holder 100 includes a lower suction cup 200, an upper airbag 300, and a frame 400, with the lower suction cup 200 and the upper airbag 300 inserted into the frame 400.

[0063] The lower suction cup 200 includes a suction cup body 210 and an upper insertion post 220. The upper insertion post 220 is disposed on the top of the suction cup body 210. The suction cup body 210 has a suction cup cavity 211. The upper insertion post 220 has an upper post cavity 221 and a post top surface 222. Several upper post slots 230 are recessed downward from the post top surface 222. Each upper post slot 230 has an upper post top opening 231, an upper post outer opening 232, and an upper post inner opening 233. The upper post top opening 231 is located at the top of the upper post slot 230 and is flush with the post top surface 222. The upper post outer opening 232 and the upper post inner opening 233 are respectively located on both sides of the upper post slot 230. The upper post slot 230, the upper post cavity 221, and the suction cup cavity 211 are interconnected.

[0064] The upper air bag body 300 comprises an air bag body 310 and a lower insertion column 320, wherein the lower insertion column 320 is arranged at the bottom of the air bag body 310, the air bag body 310 has a bag cavity 311, the lower insertion column 320 has a lower column cavity 321 and a column bottom surface 322, wherein a plurality of lower column grooves 330 are concavely arranged upward from the column bottom surface 322, each of the lower column grooves 330 has a lower groove top opening 331, a lower groove outer opening 332 and a lower groove inner opening 333, wherein the lower groove top opening 331 is located at the bottom of the lower column groove 330, the lower groove top opening 331 is flush with the column bottom surface 322, the lower groove outer opening 332 and the lower groove inner opening 333 are respectively located at both sides of the lower column groove 330, the lower column groove 330, the lower column cavity 321 and the bag cavity 311 are in communication with each other,

[0065] The column bottom surface 322 of the lower insertion column 320 is pressed on the column top surface 222 of the upper insertion column 220, the lower column groove 330 corresponds to the upper column groove 230 one by one, the lower groove top opening 331 of the lower column groove 330 is in communication with the upper groove top opening 231 of the upper column groove 230, one lower column groove 330 and one upper column groove 230 form an air hole 340, wherein the lower groove outer opening 332 of the lower column groove 330 and the upper groove outer opening 232 of the upper column groove 230 form the hole outer opening 341 of the air hole 340, the lower groove inner opening 333 of the lower column groove 330 and the upper groove inner opening 233 of the upper column groove 230 form the hole inner opening 342 of the air hole 340.

[0066] The valve piece strip 500 is arranged between the upper insertion column 220 and the lower insertion column 320, the valve piece strip 500 corresponds to the air hole 340 one by one, the valve piece strip 500 comprises a fitting part 510, a cover body 520 and a convex diaphragm 530, wherein the fitting part 510 is fitted on the outer surface of the lower insertion column 320, the cover body 520 is connected at the bottom of the fitting part 510, the cover body 520 is arranged on the hole outer opening 341 of the air hole 340, the convex diaphragm 530 is connected on the cover body 520, the convex diaphragm 530 is arranged in the air hole 340 from the hole outer opening 341 to the hole inner opening 342, the part of the convex diaphragm 530 which passes through the hole inner opening 342 forms a diaphragm head 531.

[0067] The frame body 400 comprises an upper disc body 600 and a lower sleeve 700, wherein the upper disc body 600 is screwed on the top of the lower sleeve 700, the lower sleeve 700 has a sleeve cavity 710, the upper insertion column 220 of the lower suction disc 200 is inserted at the bottom of the sleeve cavity 710, the lower insertion column 320 of the upper air bag body 300 is inserted at the top of the sleeve cavity 710, a valve piece groove 720 is concavely arranged on the inner side wall of the sleeve cavity 710, the valve piece strip 500 is inserted in the valve piece groove 720 to fix the valve piece strip 500 at the position of the air hole 340.

[0068] The valve plate groove 720 has an inclined baffle wall 721, a fixing groove 722, and a slot 723. The cover 520 of the valve plate strip 500 corresponds to the inclined baffle wall 721. The top of the fitting portion 510 of the valve plate strip 500 is provided with a clip 511, which is engaged in the fixing groove 722 to fix the valve plate strip 500 in the valve plate groove 720. The slot 723 communicates with the valve plate groove 720 and is located at the bottom of the lower sleeve 700.

[0069] The upper disc body 600 has a disc cavity 610, which is connected to the cylindrical cavity 710. The airbag body 310 of the upper airbag body 300 is disposed in the disc cavity 610. The top of the disc cavity 610 is provided with an opening 611. Several gripping structures 620 are provided on the top surface of the upper disc body 600. Several gripping structures 620 are arranged around the top surface of the upper disc body 600. Each gripping structure 620 includes a magnetic ring 621 and a positioning groove 622.

[0070] The loading robotic arm 10 includes several loading claws 11, each of which corresponds to the gripping structure 620. Each loading claw 11 includes a loading magnetic suction table 12 and a loading positioning head 13.

[0071] In the first step, when the loading robotic arm 10 grabs the chip holder 100 in the picking area, the loading claw 11 moves above the gripping structure 620, and then the loading claw 11 moves down. After the loading positioning head 13 is inserted into the positioning groove 622, the loading magnetic suction table 12 magnetically attracts the magnetic ring 621 to complete the action of grabbing the chip holder 100.

[0072] The second step is that the loading robotic arm 10 drives the chip holder 100 to move, so that the chip holder 100 moves to the top of the chip 30. The loading robotic arm 10 presses down, so that the lower suction cup 200 of the chip holder 100 presses down and is attracted to the top of the chip 30.

[0073] In the second step, the process of pressing down the loading robotic arm 10 to press down the lower suction cup 200 of the chip holder 100 and adsorb it onto the top of the chip 30 is carried out according to the following steps.

[0074] Step A: The loading robotic arm 10 presses down so that the lower suction cup 200 of the chip holder 100 contacts the top of the chip 30.

[0075] Step B: The loading robotic arm 10 continues to press down, causing the lower suction cup 200 to undergo physical deformation. The suction cup cavity 211 of the suction cup body 210 is compressed, and the air A in the suction cup cavity 211 is forced into the upper column cavity 221.

[0076] Step C: The air A in the upper column cavity 221 presses against the cover 520 of the valve strip 500, causing the cover 520 to leave the outer opening 341. At this moment, the air A is discharged from the upper column cavity 221 along the outer opening 341, forming a negative pressure in the suction cup cavity 211. This negative pressure causes the lower suction cup 200 to adhere to the top of the chip 30. At the same time, the convex diaphragm 530 of the valve strip 500 can block some of the air A from entering the lower column cavity 321, thereby increasing the value of the negative pressure and causing the lower suction cup 200 to adhere to the top of the chip 30 with greater force.

[0077] In step C above, the air A in the upper column cavity 221 presses against the cover 520 of the valve strip 500, causing the cover 520 to leave the outer opening 341 of the hole. When the cover 520 leaves the outer opening 341, it presses against the inclined baffle 721 to limit the maximum opening angle of the cover 520. After the air A is discharged from the upper column cavity 221 along the outer opening 341 of the hole in step C above, the air A flows along the valve strip groove 720 and is discharged to the outside of the frame 400 through the groove opening 723.

[0078] The third step is that the loading robotic arm 10 moves upward and drives the chip holder 100 and the chip 30 to move upward simultaneously.

[0079] Fourth step: The loading robot arm 10 moves to a chip repair station and places the chip holder 100 and the chip 30 at the chip repair station. Then, the loading robot arm 10 separates from the chip holder 100, and the chip 30 is repaired at the chip repair station. When the chip 30 needs to change stations, the loading robot arm 10 moves above the chip holder 100 and directly grabs the chip holder 100 and moves it upward. Then, the loading robot arm 10 moves to another chip repair station and places the chip holder 100 and the chip 30 at the other chip repair station. Then, the loading robot arm 10 separates from the chip holder 100. This cycle is repeated. By having the loading robot arm 10 grab the chip holder 100 instead of the chip 30, the chip 30 can be moved between multiple stations to complete various chip repair tasks.

[0080] In the fourth step, when the loading robot arm 10 separates from the chip holder 100, the loading magnetic suction table 12 is de-energized to eliminate the electromagnetic attraction, thereby releasing the magnetic attraction between the loading magnetic suction table 12 and the magnetic ring 621.

[0081] Step 5: After the chip 30 completes the chip repair work at the last chip repair station, the loading robot arm 10 grabs the chip holder 100 and moves it to the unloading station, and places the chip holder 100 and the chip 30 at the unloading station.

[0082] Step 6: The unloading robotic arm 20 moves to the unloading station, grabs the chip holder 100, and fixes the chip holder 100 to the lower end of the loading robotic arm 10. At the same time, the unloading robotic arm 20 presses down on the upper airbag 300 of the chip holder 100, causing the chip holder 100 to detach from the top of the chip 30.

[0083] The chip 30 is left at the unloading station. The unloading robot arm 20 carries the chip holder 100 away from the unloading station. The unloading robot arm 20 places the chip holder 100 in the picking area of ​​the first step for the loading robot arm 10 to grab again. The actions of the first to sixth steps are repeated to achieve the picking of the chip 30.

[0084] The unloading robotic arm 20 includes several unloading claws 21 and unloading pushers 22. The unloading claws 21 correspond one-to-one with the gripping structure 620, and the unloading pushers 22 correspond to the airbag body 310 of the upper airbag body 300. Each unloading claw 21 includes an unloading magnetic suction table 23 and an unloading positioning head 24.

[0085] In the sixth step, the unloading claw 21 moves above the gripping structure 620, and then the unloading claw 21 moves down. After the unloading positioning head 24 is inserted into the positioning groove 622, the unloading magnetic suction table 23 magnetically attracts the magnetic suction ring 621 to fix the chip holder 100 to the lower end of the loading robot arm 10. At the same time, the unloading push head 22 is pressed into the disk cavity 610 from the opening 611 of the upper disk 600. The unloading push head 22 presses down on the airbag body 310 of the upper airbag body 300, and the air cavity 311 is compressed. The air B in the air cavity 311 is forced into the lower column cavity 321. The unloading push head 22 has a lower convex bottom surface, and the airbag body 310 has an upper convex top surface. The lower convex bottom surface pressing down on the upper convex top surface can make the air cavity 311 be compressed quickly.

[0086] In the sixth step, the process of pressing down the upper airbag 300 of the chip holder 100 with the unloading robotic arm 20 to detach the chip holder 100 from the top of the chip 30 is carried out according to the following steps.

[0087] Step a: The unloading robotic arm 20 presses down on the upper airbag 300 of the chip holder 100, causing the upper airbag 300 to undergo physical deformation. The cavity 311 of the upper airbag 300 is compressed, and the air B in the cavity 311 is forced into the lower column cavity 321.

[0088] Step b: The air B in the lower column cavity 321 presses down on the convex diaphragm 530 of the valve strip 500, so that the diaphragm head 531 covers the inner opening 342 of the hole to seal the air hole 340. At the same time, the air B enters the suction cup cavity 211 through the upper column cavity 221 to eliminate the negative pressure in the suction cup cavity 211. At this moment, the chip 30 is detached from the lower suction cup 200.

Claims

1. A chip picking system for chip repair, characterized in that: The device includes a chip holder, a loading robotic arm, and an unloading robotic arm. The chip holder comprises a lower suction cup, an upper airbag, and a frame, with the lower suction cup and the upper airbag inserted into the frame. The chip grasping system operates according to the following steps: Step 1: The loading robotic arm grabs the chip holder in the material handling area and fixes the chip holder to the lower end of the loading robotic arm. The second step involves the loading robotic arm moving the chip holder to the top of the chip. The robotic arm then presses down, causing the lower suction cup of the chip holder to press down and adhere to the top of the chip. The third step involves the loading robotic arm moving upwards, simultaneously moving the chip holder and the chip upwards. Step 4: The loading robot arm moves to a chip repair station, places the chip holder and the chip there, and then separates from the chip holder. The chip undergoes repair at this station. When the chip needs to be moved to a different station, the loading robot arm moves above the chip holder, directly grabs the chip holder, and lifts it. Then, the loading robot arm moves to another chip repair station, places the chip holder and the chip there, and then separates from the chip holder again. Step 5: After the chip repair work is completed at the last chip repair station, the loading robotic arm picks up the chip holder and moves it to the unloading station, where the chip holder and the chip are placed. Step 6: The unloading robotic arm moves to the unloading station, grabs the chip holder, and fixes it to the lower end of the loading robotic arm. At the same time, the unloading robotic arm presses down on the upper airbag of the chip holder, causing the chip holder to detach from the top of the chip. The chip remains at the unloading station. The unloading robotic arm carries the chip holder away from the unloading station and places the chip holder in the picking area of ​​Step 1 for the loading robotic arm to grab again. The actions of Step 1 to Step 6 are repeated to achieve the chip grabbing operation.

2. The chip picking system for chip repair as described in claim 1, characterized in that: The lower suction cup includes a suction cup body and an upper insertion post. The upper insertion post is located at the top of the suction cup body. The suction cup body has a suction cup cavity, and the upper insertion post has an upper post cavity and a post top surface. Several upper post slots are recessed downward from the post top surface. Each upper post slot has an upper post top opening, an upper post outer opening, and an upper post inner opening. The upper post top opening is located at the top of the upper post slot and is flush with the post top surface. The upper post outer opening and the upper post inner opening are located on both sides of the upper post slot. The upper post slots, the upper post cavity, and the suction cup cavity are interconnected. The upper airbag includes an airbag body and a lower insertion post. The lower insertion post is located at the bottom of the airbag body. The airbag body has a cavity, and the lower insertion post has a lower post cavity and a post bottom surface. Several lower post grooves are recessed upward from the post bottom surface. Each lower post groove has a lower post top opening, a lower post outer opening, and a lower post inner opening. The lower post top opening is located at the bottom of the lower post groove and is flush with the post bottom surface. The lower post outer opening and the lower post inner opening are located on both sides of the lower post groove. The lower post grooves, the lower post cavity, and the airbag cavity are interconnected. The bottom surface of the lower insertion post is pressed against the top surface of the upper insertion post. The lower post slot corresponds one-to-one with the upper post slot. The top opening of the lower post slot is connected to the top opening of the upper post slot. A connection between one lower post slot and one upper post slot forms an air hole. The outer opening of the lower post slot is connected to the outer opening of the upper post slot to form the outer opening of the air hole. The inner opening of the lower post slot is connected to the inner opening of the upper post slot to form the inner opening of the air hole. A valve strip is provided between the upper plug and the lower plug, and the valve strip corresponds to the air hole one by one. The valve strip includes a bonding part, a cover and a convex diaphragm. The bonding part is bonded to the outer surface of the lower plug, the cover is connected to the bottom of the bonding part and covers the outer opening of the air hole, and the convex diaphragm is connected to the cover. The convex diaphragm passes through the air hole from the outer opening to the inner opening, and the part of the convex diaphragm that passes through the inner opening of the hole forms a diaphragm head.

3. The chip picking system for chip repair as described in claim 2, characterized in that: The process in the second step described above, where the loading robotic arm presses down to cause the lower suction cup of the chip holder to press down and adhere to the top of the chip, is carried out according to the following steps: Step A: The loading robotic arm presses down, causing the lower suction cup of the chip holder to contact the top of the chip. Step B: The loading robotic arm continues to press down, causing physical deformation of the lower suction cup. The suction cup cavity of the suction cup body is compressed, and the air in the suction cup cavity is forced into the upper column cavity. Step C: The air in the upper column cavity presses against the cover of the valve strip, causing the cover to leave the outer opening of the hole. At this moment, the air is discharged from the upper column cavity along the outer opening of the hole, creating a negative pressure in the suction cup cavity. This negative pressure causes the lower suction cup to adhere to the top of the chip. Simultaneously, the convex diaphragm of the valve strip can prevent some of the air from entering the lower column cavity, thereby increasing the value of the negative pressure. This negative pressure causes the lower suction cup to adhere to the top of the chip with greater force. In step six above, the process of pressing down the upper airbag of the chip holder with the unloading robotic arm to detach the chip holder from the top of the chip is carried out according to the following steps: Step a: The unloading robotic arm presses down on the upper airbag of the chip holder, causing physical deformation of the upper airbag. The cavity of the upper airbag is compressed, and the air in the cavity is forced into the lower column cavity. Step b: The air in the lower column cavity presses down on the convex diaphragm of the valve strip, so that the diaphragm head covers the inner opening of the hole to seal the air hole. At the same time, the air enters the suction cup cavity through the upper column cavity to eliminate the negative pressure in the suction cup cavity. At this moment, the chip detaches from the lower suction cup.

4. The chip picking system for chip repair as described in claim 3, characterized in that: The frame includes an upper plate and a lower sleeve. The upper plate is screwed onto the top of the lower sleeve. The lower sleeve has a cavity. The upper insertion post of the lower suction cup is inserted into the bottom of the cavity, and the lower insertion post of the upper airbag is inserted into the top of the cavity. A valve plate groove is recessed on the inner wall of the cavity. The valve strip is inserted into the valve strip groove to fix it at the air hole position. The valve strip groove has an inclined baffle wall, a fixing groove, and a slot. The cover of the valve strip corresponds to the inclined baffle wall. A clip is provided at the top of the fitting portion of the valve strip, which engages with the fixing groove to fix the valve strip in the valve strip groove. The slot communicates with the valve strip groove and is located at the bottom of the lower sleeve. In step C above, the air in the upper column cavity presses against the cover of the valve strip, causing the cover to leave the outer opening of the hole. At this point, the cover presses against the inclined baffle wall to limit the maximum opening angle of the cover. In step C above, after the air is discharged from the upper column cavity through the outer opening of the hole, the air flows along the valve plate groove and is discharged to the outside of the frame through the groove.

5. The chip picking system for chip repair as described in claim 4, characterized in that: The upper plate has a plate cavity that is connected to the cylindrical cavity. The airbag body of the upper airbag is disposed in the plate cavity. The top of the plate cavity has an opening. Several gripping structures are disposed on the top surface of the upper plate. Several gripping structures are arranged in a ring on the top surface of the upper plate. Each gripping structure includes a magnetic suction ring and a positioning groove.

6. The chip picking system for chip repair as described in claim 5, characterized in that: The loading robotic arm includes several loading claws, each corresponding to a gripping structure. Each loading claw includes a loading magnetic platform and a loading positioning head. In the first step described above, when the loading robotic arm grasps the chip holder in the picking area, the loading claw moves above the grasping structure. Then, the loading claw moves down, the loading positioning head inserts into the positioning slot, and the loading magnetic suction table magnetically attracts the magnetic ring to complete the action of grasping the chip holder. In the fourth step above, when the loading robot arm separates from the chip holder, the loading magnetic platform is powered off to eliminate the electromagnetic attraction, thereby releasing the magnetic attraction between the loading magnetic platform and the magnetic ring.

7. The chip picking system for chip repair as described in claim 5, characterized in that: The unloading robotic arm includes several unloading claws and an unloading pusher. Each unloading claw corresponds to a gripping structure, and each unloading pusher corresponds to the airbag body of the upper airbag. Each unloading claw includes an unloading magnetic suction table and an unloading positioning head. In the sixth step above, the unloading claw moves to the top of the gripping structure, and then the unloading claw moves down. After the unloading positioning head is inserted into the positioning groove, the unloading magnetic suction table magnetically attracts the magnetic suction ring to fix the chip holder at the lower end of the loading robot arm. At the same time, the unloading push head is pressed into the cavity of the upper plate from the opening of the upper plate. The unloading push head presses down on the airbag body of the upper airbag, the airbag cavity is compressed, and the air in the airbag cavity is forced into the lower column cavity.

8. The chip picking system for chip repair as described in claim 7, characterized in that: The feeding pusher has a convex bottom surface, and the airbag body has a convex top surface.

9. The chip picking system for chip repair as described in claim 1, characterized in that: The volume of the suction cup cavity is more than three times the volume of the cyst cavity.

Images