Water jet perpendicularity online compensation device and method for water-jet guided laser processing equipment

Abstract

The invention relates to the technical field of water-jet guided laser processing, in particular to a water jet perpendicularity online compensation device and method for water-jet guided laser processing equipment. The swing head mounting component is connected to the tail end of the five-axis swing head, the swing head mounting component comprises a base, a movable platform, an angle adjusting module and a locking module, and the base is provided with a first connecting surface connected with the five-axis swing head. By means of the independent angle adjusting module precisely driven by the servo motor, programmable control over the angle in the Y-axis direction can be achieved, programmable control over the angle in the X-axis direction can be achieved through the X-axis swing head, rigid locking is provided through the locking module, on-line and precise compensation calibration of the perpendicularity is achieved, and the perpendicularity can be accurately adjusted. And the posture stability in the machining process can be ensured, and the problems that in the prior art, a manual adjusting mechanism can only conduct off-line shutdown adjustment, and gaps and loosening risks possibly exist are avoided.

Description

Technical Field

[0001] This invention relates to the field of water-guided laser processing technology, and more specifically to an online compensation device and method for the verticality of water jets in water-guided laser processing equipment. Background Technology

[0002] Five-axis tilting water-guided laser processing equipment, through the flexible movement of two rotating axes (usually A / C axes), allows the laser-guided water jet to approach the workpiece at any spatial angle. This makes it ideal for precision machining of molds, microfluidic chips, and optical glass components with deep cavities, sidewalls, or complex three-dimensional flow channels. In this type of processing, the perpendicularity of the water jet axis to the workpiece surface normal is one of the core process parameters determining the processing quality. Deviations in perpendicularity will directly lead to increased taper of microholes or kerfs, deterioration of sidewall roughness, and even secondary damage caused by jet scattering.

[0003] Currently, the industry standard for controlling and correcting waterjet verticality typically involves adding a manually adjustable mechanical adapter platform between the processing head and the end flange of the five-axis oscillating head. This platform is usually designed with two mutually perpendicular adjustment directions (such as X and Y directions), each achieved through fine-tuning of the angle using high-precision micrometer screws, eccentric cams, or wedge blocks. When the jet verticality fails to meet requirements due to nozzle wear, replacement, or initial installation errors, the operator must pause processing and use a dial indicator, laser interferometer, or by cutting a specific pattern and observing it under a microscope to determine the direction and magnitude of the verticality deviation. Subsequently, based on experience, the operator manually tightens the adjusting screw using specialized tools, subtly altering the spatial tilt angle of the processing head to correct the jet direction. This process often requires multiple iterations of "measurement-fine-tuning-verification" until a satisfactory result is achieved.

[0004] However, during continuous processing, the high-pressure water jet causes continuous and uneven abrasion on the inner wall of the sapphire or diamond nozzle, resulting in a slow but persistent drift in the jet direction. Each manual adjustment is a lengthy production interruption, requiring operators to perform a series of highly skill-dependent operations, including stopping the equipment, installing measuring instruments, repeated trial cuts and observations, fine-tuning by feel, and re-verification. The entire process often takes 1-2 hours or even longer, and the accuracy and results of manual adjustments are highly dependent on the operator's experience, skill, and even state of mind. Significant differences exist in the results of adjustments performed by different personnel or by the same person at different times. This uncontrollable human factor makes it impossible to standardize and stably reproduce the processing parameters, which is the main root cause affecting the consistency between product batches and hinders the improvement of the quality management system and the continuous improvement of product yield. Summary of the Invention

[0005] The first aspect of the present invention provides a technical solution: an online compensation device for the verticality of a water jet in a water-guided laser processing equipment, comprising: Five-axis oscillating head; A swivel head mounting component connected to the end of the five-axis swivel head includes a base, a movable platform, an angle adjustment module, and a locking module. The base has a first connecting surface that connects to the five-axis swivel head, and the movable platform has a second connecting surface. The movable platform can rotate relative to the base along the Y-axis, so that the second connecting surface and the first connecting surface rotate along the Y-axis and form a predetermined angle. A processing head mounting component is connected to the second connecting surface, and the processing head mounting component is used to mount a water-guided laser processing head; The controller is electrically connected to the five-axis oscillating head, angle adjustment module, and locking module; The angle adjustment module is mounted on the base, and its output is connected to the movable platform. The controller is configured as follows: Control the five-axis oscillating head to drive the movable platform to rotate around the X-axis to a first predetermined angle for X-axis angle compensation; The control angle adjustment module drives the movable platform to rotate around the Y-axis to a second predetermined angle for Y-axis angle compensation. After the movable platform is adjusted to the position, the locking component rigidly locks the movable platform relative to the base. The first predetermined angle and the second predetermined angle are determined based on the deviation angle of the water jet emitted by the current water-guided laser processing head.

[0006] Preferably, an elastic connector is provided between the movable platform and the base, and the elastic connector is configured to give the base a tendency to rotate about the Y-axis in a first direction.

[0007] Preferably, the angle adjustment component includes a linear actuator. The body of the linear actuator is fixed to the base, and its output end abuts against the movable platform on the side facing the first direction. The angle adjustment component can drive the movable platform to overcome the elastic force of the elastic connector and rotate around the Y-axis in the second direction to adjust the angle of the second connecting surface relative to the first connecting surface on the Y-axis.

[0008] Preferably, the base is further provided with an angle limiting structure to limit the maximum rotation angle of the movable platform relative to the base.

[0009] Preferably, the locking component includes multiple locking drive units, which are respectively disposed in the first direction and the second direction of the movable platform. The drive end of each locking drive unit can abut against the surface of the movable platform when locked to maintain the movable platform at its current angle. When released, the drive end of each locking drive unit leaves the surface of the movable platform, so that the movable platform can be driven by the angle adjustment component to adjust to the target angle.

[0010] Preferably, the linear actuator is a servo electric linear actuator with a built-in position feedback encoder. The controller is connected to the encoder signal to form a closed-loop control of the deflection angle of the movable platform.

[0011] Preferably, the base is constructed to include a first plate structure and a second plate structure that are perpendicular to each other, and the movable platform is constructed to include a third plate structure and a fourth plate structure that are perpendicular to each other. The side of the first plate structure facing away from the second plate structure is a first connecting surface. The second plate structure is provided with a U-shaped groove. The third plate structure is connected to the U-shaped groove through a rotating shaft structure. The side of the fourth plate structure facing away from the third plate structure is a second connecting surface.

[0012] Preferably, it also includes a water jet angle detection component, which is used to detect the first angle of the water jet emitted by the water-guided laser processing head in the current state. The controller is electrically connected to the water jet angle detection component, and the controller is configured to calculate and generate control commands for the first angle compensation and the second angle compensation based on the deviation between the current spatial angle and the target vertical angle.

[0013] Preferably, the water jet angle detection component includes a reference block, the reference block having at least two mutually perpendicular precision reference edges; The controller is configured to obtain the angular deviation of the water jet in a certain direction through the following steps: A1. Contact detection: Control the five-axis oscillating head movement so that the water jet emitted by the water-guided laser processing head contacts or reaches a preset gap with the corresponding reference edge of the reference block at the first height position of the Z-axis, and record the coordinates of the first contact point; A2. Secondary Contact with Displacement: Control the five-axis oscillating head to move along the Z-axis, so that the water jet rises or falls by a known distance H, and then control it to make contact with the same reference edge or reach the preset gap again, and record the coordinates of the second contact point; A3. Angle Calculation: Based on the offset Δ between the first contact point and the second contact point in the direction parallel to the reference edge, and the known distance H, the angle deviation of the water jet in this direction is calculated using trigonometric functions.

[0014] A second aspect of this invention provides a technical solution: an online compensation method for the verticality of a water jet in a water-guided laser processing equipment. Using the aforementioned online compensation device for the verticality of a water jet in a water-guided laser processing equipment, the method includes the following steps: Step S1: Control the five-axis tilting head to move the water-guided laser processing head to the detection station and obtain the current spatial angle of the water jet; Step S2: Compare the current spatial angle with the target vertical angle, and calculate the first deviation component in the X-axis direction and the second deviation component in the Y-axis direction; Step S3: Based on the first deviation component and the second deviation component, control the five-axis oscillating head to move around its corresponding rotation axis to compensate for the first deviation component, and control the angle adjustment module to move to compensate for the second deviation component. Step S4: After the compensation motion is completed, control the locking module to rigidly lock the movable platform.

[0015] Compared with the prior art, the advantages of the present invention are as follows: This invention enables programmable control of the Y-axis angle through an independent, precision-driven servo motor-operated angle adjustment module, programmable control of the X-axis angle through an X-axis tilting head, and rigid locking through a locking module. This not only achieves online and precise compensation and calibration of perpendicularity but also ensures posture stability during processing. It avoids the risks of manual adjustment mechanisms in existing technologies, which can only be adjusted offline and may have gaps or loosening. It compresses the time-consuming debugging work to minutes for automatic completion and eliminates accuracy fluctuations caused by human factors.

[0016] Through periodic or triggered automatic calibration, the verticality drift caused by nozzle wear can be compensated in real time, turning the verticality of the water jet from an uncontrollable variable into a controlled constant, thus fundamentally ensuring the long-term consistency of batch processing quality. It is particularly suitable for precision production scenarios with large-volume and high consistency requirements. Attached Figure Description

[0017] The accompanying drawings are not intended to be drawn to scale. In the drawings, each identical or nearly identical component shown in the various figures may be denoted by the same reference numeral. For clarity, not every component is labeled in each figure. Embodiments of various aspects of the invention will now be described by way of example and with reference to the accompanying drawings, wherein: Figure 1 This is a schematic diagram of the structure of the online compensation device for the verticality of a water jet in a water-guided laser processing equipment, as shown in an embodiment of the present invention. Figure 2 This is a schematic diagram of the structure of the swing head mounting component shown in an embodiment of the present invention; Figure 3 This is a front view of the swivel head mounting component shown in an embodiment of the present invention; Figure 4 This is a side view of the swivel head mounting component shown in an embodiment of the present invention; Figure 5 This is a top view of the swivel head mounting component shown in an embodiment of the present invention; Figure 6 This is a bottom view of the swing head mounting component shown in an embodiment of the present invention; Figure 7(a) is a schematic diagram of the movable platform rotating in the first direction according to an embodiment of the present invention; Figure 7(b) is a schematic diagram of the movable platform rotating in the second direction according to an embodiment of the present invention; Figure 8(a) is a schematic diagram of the coordinates of the first contact point of the water-guided laser processing head shown in an embodiment of the present invention; Figure 8(b) is a schematic diagram of the movement of the water-guided laser processing head along the Z-axis according to an embodiment of the present invention; Figure 8(c) is a schematic diagram of the coordinates of the second contact point of the water-guided laser processing head shown in the embodiment of the present invention. Detailed Implementation

[0018] To better understand the technical content of the present invention, specific embodiments are described below in conjunction with the accompanying drawings.

[0019] {Example 1} The first aspect of the present invention provides a technical solution, an online compensation device for the verticality of water jet in a water-guided laser processing equipment, comprising a five-axis oscillating head 10, an oscillating head mounting component 20, a processing head loading component 30, and a controller.

[0020] Combination Figure 1 As shown, the five-axis oscillating head 10 has a dual-oscillating head structure, including a Z-axis oscillating head 11 and an X-axis oscillating head 12. The Z-axis oscillating head 11 can drive the X-axis oscillating head 12 to rotate around the Z-axis, and the X-axis oscillating head 12 can drive the oscillating head mounting component 20 to rotate around the X-axis. Through the combined motion of the Z-axis oscillating head 11 and the X-axis oscillating head 12, the attitude positioning of the water-guided laser processing head 31 mounted at the end can be achieved in any direction in space.

[0021] Furthermore, the oscillating head mounting component 20 is connected to the end of the five-axis oscillating head 10, and in particular to the output end of the X-axis oscillating head 12.

[0022] Combination Figure 2As shown, the oscillating head mounting component 20 includes a base 21, a movable platform 22, an angle adjustment module 23, and a locking module 25. The base 21 has a first connecting surface that is connected to the five-axis oscillating head 10. The movable platform 22 has a second connecting surface 222. The processing head loading component 30 is connected to the second connecting surface 222. The processing head mounting component 30 is used to mount the water-guided laser processing head 31.

[0023] The movable platform 22 can rotate relative to the base 21 along the Y-axis. This allows the second connecting surface 222 to form a predetermined angle with the first connecting surface along the Y-axis, thereby changing the angle of the water-guided laser processing head 31 along the Y-axis.

[0024] It should be understood that if the water jet angle of the water-guided laser processing head 31 deviates due to wear or other reasons, the X-axis tilting head 12 can be independently controlled to make the water-guided laser processing head 31 perform angle compensation adjustment in the X-axis direction, and the rotation angle of the movable platform 22 around the Y-axis can be independently controlled to make the water-guided laser processing head 31 perform angle compensation adjustment in the Y-axis direction.

[0025] Furthermore, the controller is electrically connected to the five-axis oscillating head 10, the angle adjustment module 23, and the locking module 25. The angle adjustment module 23 is mounted on the base 21, and its output is connected to the movable platform 22. The controller is configured as follows: The five-axis oscillating head 10 drives the movable platform 22 to rotate around the X-axis to a first predetermined angle to perform X-axis angle compensation. The control angle adjustment module 23 drives the movable platform 22 to rotate around the Y-axis to the second predetermined angle for Y-axis angle compensation. After the movable platform 22 is adjusted to the position, the locking component 25 rigidly locks the movable platform 22 relative to the base 21. The first predetermined angle and the second predetermined angle are determined based on the deviation angle of the water jet emitted by the current water-guided laser processing head 31.

[0026] As mentioned above, the angle in the Y-axis direction can be programmably controlled by an independent angle adjustment module 23, which is precisely driven by a servo motor, and the angle in the X-axis direction can be programmably controlled by the X-axis oscillating head 12 (as shown in Figures 7(a) and 7(b)). The locking module 25 provides rigid locking, which not only enables online and precise compensation and calibration of perpendicularity, but also ensures the stability of the posture during the processing, avoiding the risks of gaps and loosening that may exist in the manual adjustment mechanism of the prior art, which can only be adjusted offline when the machine is stopped.

[0027] In addition, the controller decouples the verticality deviation into components in the X and Y directions, which are then compensated by the five-axis oscillating head 10 (X-axis direction) and the angle adjustment module 23 (Y-axis direction), respectively. This enables rapid, accurate, and automatic compensation for water jet verticality deviation caused by nozzle wear or replacement, completely replacing the inefficient, low-precision, and unstable manual adjustment method, thus ensuring the stability of processing quality and production efficiency.

[0028] In a specific embodiment, combined with Figures 2 to 5 As shown, the base 21 is constructed to include a first plate structure and a second plate structure that are perpendicular to each other. The movable platform 22 is constructed to include a third plate structure and a fourth plate structure that are perpendicular to each other. The side of the first plate structure opposite to the second plate structure is a first connecting surface. The second plate structure is provided with a U-shaped groove 211. The third plate structure is connected to the U-shaped groove 211 through a pivot structure 212. The side of the fourth plate structure opposite to the third plate structure is a second connecting surface 222.

[0029] It should be understood that both the base 21 and the movable platform 22 are constructed as L-shaped structures. This structure can effectively resist torque and provide a stable mechanical foundation for angle adjustment and locking. At the same time, through the cooperation of the U-shaped groove 211 and the rotating shaft 212, the physical axis of rotation of the movable platform 22 around the Y-axis is clearly defined, making the angle measurement and control model simple and accurate.

[0030] The surface of the third plate structure is a pressure-bearing surface 211. The surface of the pressure-bearing surface 211 is provided with a spring seat 224 and a positioning seat 223. The locking component 25 is also rigidly locked by pressing against the pressure-bearing surface 211 and the bottom surface of the third plate structure.

[0031] Thus, the pressure-bearing surface 221 provides ample space for the installation of the spring seat 224, the positioning seat 223, and the drive unit for arranging the locking module 25, resulting in a compact structure and high functional integration.

[0032] Furthermore, the base 21 is also provided with an angle limiting structure 213, which is used to limit the maximum rotation angle of the movable platform 22 relative to the base 21.

[0033] Optionally, the angle limiting structure 213 is a Z-shaped component, which is fixed to one side of the U-shaped groove 211 of the second plate structure, has a portion extending into the movement path of the third plate structure, and this portion is connected with screws.

[0034] Specifically, by rotating the screw, the end of the screw can be moved closer to or further away from the third plate structure, adjusting the limit position of the third plate structure's rotation, thereby achieving the function of limiting and protecting the movable platform 22 and preventing uncontrollable rotation of the movable platform 22 due to the failure of other components.

[0035] Combination Figures 2 to 5As shown, an elastic connector 24 is provided between the movable platform 22 and the base 21. The elastic connector 24 is configured to give the base 21 a tendency to rotate about the Y-axis in a first direction.

[0036] Specifically, the elastic connector 24 is a spring, and the two ends of the spring are respectively connected to the spring seat 224 fixed to the pressure surface 211 and the first plate structure.

[0037] Furthermore, the angle adjustment component 23 includes a linear actuator, the body of which is fixed to the base 21, and its output end abuts against the movable platform 22 on the side facing the first direction.

[0038] As described above, the movable platform 22 can be driven by the angle adjustment component 23 to overcome the elastic force of the elastic connector 24 and rotate around the Y-axis in the second direction, so as to adjust the angle of the second connecting surface 222 relative to the first connecting surface on the Y-axis.

[0039] Thus, the spring exerts an upward pulling force on the bearing surface 211, and the linear actuator, in contact with the surface of the bearing surface 211, exerts a downward pressure. The two forces are balanced, resulting in a stable state.

[0040] In an optional embodiment, the linear actuator is a servo electric linear actuator with a built-in position feedback encoder. The controller is connected to the encoder signal to form a closed-loop control of the deflection angle of the movable platform 22.

[0041] In this way, the encoder can provide real-time, high-resolution position feedback, enabling the controller to precisely control the extension and retraction of the push rod, thereby achieving micron-level equivalent angular displacement control with extremely high repeatability. Furthermore, the displacement of the push rod can be directly controlled by the CNC system through programming, facilitating automatic linkage and parameterized compensation with the detection process, allowing the deflection angle of the movable platform 22 to be precisely controlled and deflected to the target angle.

[0042] Furthermore, the output end of the servo electric actuator specifically contacts the V-groove 223a of the positioning seat 223, and the direction of the V-groove 223a is perpendicular to the Y-axis direction.

[0043] In this way, the ball head at the output end of the servo electric actuator forms a two-point contact with the two inclined surfaces of the V-groove, which can automatically center and accurately convert the linear thrust of the actuator into the torque that drives the movable platform 22 to rotate. At the same time, it avoids jamming caused by machining or assembly errors. Furthermore, due to the low friction and zero gap of the point contact form, it ensures high sensitivity of drive response and high repeatability of positioning.

[0044] Furthermore, the locking component 25 includes multiple locking drive units, which are respectively disposed in the first direction and the second direction of the movable platform 22. The drive end of each locking drive unit can abut against the surface of the movable platform 22 when locked to maintain the movable platform 22 at its current angle. When released, the drive end of each locking drive unit moves away from the surface of the movable platform 22, so that the movable platform 22 can be driven by the angle adjustment component 23 to adjust to the target angle.

[0045] Specifically, in combination Figures 2 to 5 As shown, the locking component 25 includes four locking drive units, each of which is a cylinder structure, namely the first locking cylinder 25a, the second locking cylinder 25b, the third locking cylinder 25c and the fourth locking cylinder 25d. All four locking cylinders are connected to the base 21 through the bracket 251.

[0046] The first locking cylinder 25a and the second locking cylinder 25b are located above the third plate structure of the movable platform 22, while the other two are located below the third plate structure of the movable platform 22. When the movable platform 22 can be driven by the angle adjustment component 23 to adjust to the target angle, all the locking cylinders extend to rigidly fix the movable platform 22 to the current position.

[0047] Furthermore, it also includes a water jet angle detection component, which is used to detect the first angle of the water jet emitted by the water-guided laser processing head 31 in the current state. The controller is electrically connected to the water jet angle detection component, and the controller is set to calculate and generate control commands for the first angle compensation and the second angle compensation based on the deviation between the current spatial angle and the target vertical angle.

[0048] Specifically, based on the current angle information of the water jet, the five-axis oscillating head 10 is controlled to rotate the water-guided laser processing head 31 around the X-axis by the target angle, and the angle adjustment component 23 and the locking component 25 are controlled to rotate the water-guided laser processing head 31 around the Y-axis by the target angle.

[0049] As described above, the water jet deviation detection and online compensation calibration mode form a self-calibration and self-compensation system. From detection and calculation to dual-axis collaborative compensation and rigid locking, the entire process requires no manual intervention, shortening the traditional long-term manual debugging to a few minutes of automatic process, greatly improving equipment utilization. Moreover, through periodic or triggered automatic calibration, it can compensate for vertical drift caused by nozzle wear in real time, turning the verticality of the water jet from an uncontrollable variable into a controlled constant, thus fundamentally ensuring the long-term consistency of batch processing quality.

[0050] In addition, the spatial angle calculation and coordinated motion of the water jet verticality are automatically completed by the controller, reducing the reliance on the operator's experience and enabling the high-precision machining process to be standardized and solidified.

[0051] In an optional embodiment, as shown in Figures 8(a) to 8(c), the water jet angle detection component includes a reference block having at least two mutually perpendicular precision reference edges. The controller is configured to obtain the angular deviation of the water jet in a certain direction through the following steps: A1. Contact detection: Control the movement of the five-axis oscillating head 10 so that the water jet emitted by the water-guided laser processing head 31 contacts or reaches the preset gap with the corresponding reference edge of the reference block at the first height position of the Z axis, and record the coordinates of the first contact point, as shown in Figure 8(a). A2. Secondary contact with displacement: Control the five-axis oscillating head 10 to move along the Z-axis, so that the water jet rises or falls by a known distance H. This position is shown in Figure 8(b). Control it again to make contact with the same reference edge or reach the preset gap, and record the coordinates of the second contact point. This position is shown in Figure 8(c). A3. Angle Calculation: Based on the offset ΔX (ΔY) between the first and second contact points in the direction parallel to the reference edge, and the known distance H, the angle deviation of the water jet in this direction is calculated using trigonometric functions.

[0052] The water jet angle detection based on the reference block, as described above, is based on classic geometric and trigonometric relationships. The algorithm is simple and avoids the misjudgments and algorithm instability problems that may occur in complex vision or laser measurement systems. Moreover, the mechanical contact or micro-gap detection method is not affected by water mist, splashes, or changes in light that are common in the processing environment, and remains stable and reliable even under harsh working conditions.

[0053] In other embodiments, the water jet angle detection component may also employ a non-contact measurement method. For example, a laser displacement sensor array may be used to fit the spatial axis of the nozzle by scanning the outer cylindrical surface of the nozzle or a target mounted on the nozzle; alternatively, an industrial vision system may be used to calculate the angle by capturing images of the nozzle with a camera and analyzing its contours.

[0054] {Example 2} A second aspect of this invention provides a technical solution: an online compensation method for the verticality of a water jet in a water-guided laser processing equipment. Using the aforementioned online compensation device for the verticality of a water jet in a water-guided laser processing equipment, the method includes the following steps: Step S1: Control the five-axis oscillating head 10 to move the water-guided laser processing head 31 to the detection station and obtain the current spatial angle of the water jet; Step S2: Compare the current spatial angle with the target vertical angle, and calculate the first deviation component in the X-axis direction and the second deviation component in the Y-axis direction. Step S3: Based on the first deviation component and the second deviation component, control the five-axis oscillating head 10 to move around its corresponding rotation axis to compensate for the first deviation component, and control the angle adjustment module 23 to move to compensate for the second deviation component. Step S4: After the compensation motion is completed, control the locking module 25 to rigidly lock the movable platform 22.

[0055] In step S1, a reference block with mutually perpendicular reference edges is used for detection. For each reference edge, perform the following: make the water jet contact or reach a preset gap at the first Z-axis height and record the first coordinate; after changing the Z-axis height by a known amount H, make it contact or reach the preset gap again and record the second coordinate; based on the offset ΔX (ΔY) of the two coordinates in the direction parallel to the reference edge and the height H, calculate the angular deviation component A of the water jet in that direction (Ax: deviation angle along the X-axis direction / Ay: deviation angle along the Y-axis direction).

[0056] In one specific embodiment, the system periodically triggers the verticality calibration process. The controller controls the five-axis oscillating head 10 to move the water-guided laser processing head 31 to a reference block station in a fixed position. In the X direction, the oscillating head drives the jet to contact the X-direction reference edge of the reference block and records the coordinates; then the Z-axis rises a fixed distance H, contacts the same edge again, and records the coordinates. The system automatically calculates the X-direction angular deviation ΔX based on this. The same process is repeated in the Y direction to obtain the deviation ΔY.

[0057] The controller performs coordinated compensation calculations: ΔX is allocated to the X-axis oscillating head 12 of the five-axis oscillating head 10 to perform compensated rotation; ΔY is allocated to the servo electric push rod of the angle adjustment module 23 to drive the movable platform 22 to deflect around the Y-axis. The locking module 25 is in a released state during the adjustment process. After the adjustment is in place, all its locking cylinders (first locking cylinder 25a, second locking cylinder 25b, third locking cylinder 25c and fourth locking cylinder 25d) extend simultaneously, firmly pressing the movable platform 22 onto the base 21 to complete rigid locking.

[0058] The head is moved back to the processing position and processing continues in the corrected vertical state. The whole process is completed automatically within a few minutes, and the compensation accuracy can reach the arcsecond level, ensuring the verticality of the water jet in subsequent processing.

[0059] In optional embodiments, the above method is triggered to execute under any of the following circumstances: for example, during device startup and initialization, after replacing the water-guided laser processing head 31 or nozzle, when the cumulative processing time reaches a preset threshold, or based on the judgment of online processing quality monitoring results.

[0060] While the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the invention. Those skilled in the art can make various modifications and refinements without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention shall be determined by the claims.

Claims

1. An online compensation device for the verticality of a water jet in a water-guided laser processing equipment, characterized in that, include: Five-axis oscillating head (10); A swivel head mounting component (20) is connected to the end of the five-axis swivel head (10). The swivel head mounting component (20) includes a base (21), a movable platform (22), an angle adjustment module (23), and a locking module (25). The base (21) has a first connecting surface that connects to the five-axis swivel head (10). The movable platform (22) has a second connecting surface (222). The movable platform (22) can rotate relative to the base (21) along the Y-axis, so that the second connecting surface and the first connecting surface rotate along the Y-axis and form a predetermined angle. A processing head mounting component (30) is connected to the second connecting surface (222), and the processing head mounting component (30) is used to mount a water-guided laser processing head (31); The controller is electrically connected to the five-axis oscillating head (10), the angle adjustment module (23), and the locking module (25); The angle adjustment module (23) is mounted on the base (21), and its output is connected to the movable platform (22). The controller is configured as follows: The five-axis oscillating head (10) is controlled to drive the movable platform (22) to rotate around the X-axis to the first predetermined angle for X-axis angle compensation; The control angle adjustment module (23) drives the movable platform (22) to rotate around the Y-axis to a second predetermined angle for Y-axis angle compensation. After the movable platform (22) is adjusted to the position, the locking component (25) rigidly locks the movable platform (22) relative to the base (21). The first predetermined angle and the second predetermined angle are determined based on the deviation angle of the water jet emitted by the current water-guided laser processing head (31).

2. The online water jet verticality compensation device for water-guided laser processing equipment according to claim 1, characterized in that, An elastic connector (24) is provided between the movable platform (22) and the base (21), and the elastic connector (24) is configured to give the base (21) a tendency to rotate about the Y axis in a first direction.

3. The online water jet verticality compensation device for water-guided laser processing equipment according to claim 2, characterized in that, The angle adjustment component (23) includes a linear actuator. The body of the linear actuator is fixed to the base (21), and its output end abuts against the movable platform (22) on the side facing the first direction. The angle adjustment component (23) can drive the movable platform (22) to overcome the elastic force of the elastic connector (24) and rotate around the Y-axis in the second direction to adjust the angle of the second connecting surface (222) relative to the first connecting surface on the Y-axis.

4. The online water jet verticality compensation device for water-guided laser processing equipment according to claim 1, characterized in that, The linear actuator is a servo electric push rod, which has a built-in position feedback encoder. The controller is connected to the encoder signal to form a closed-loop control of the deflection angle of the movable platform (22).

5. The online water jet verticality compensation device for water-guided laser processing equipment according to claim 1, characterized in that, The locking component (25) includes multiple locking drive units, which are respectively arranged in the first and second directions of the movable platform (22). The drive end of each locking drive unit can abut against the surface of the movable platform (22) when locked to maintain the movable platform (22) at its current angle. When released, the drive end of each locking drive unit leaves the surface of the movable platform (22) so that the movable platform (22) can be driven by the angle adjustment component (23) to adjust to the target angle.

6. The online water jet verticality compensation device for water-guided laser processing equipment according to claim 1, characterized in that, The base (21) is also provided with an angle limiting structure (213) to limit the maximum rotation angle of the movable platform (22) relative to the base (21).

7. The online water jet verticality compensation device for water-guided laser processing equipment according to any one of claims 1-6, characterized in that, The base (21) is constructed to include a first plate structure and a second plate structure that are perpendicular to each other. The movable platform (22) is constructed to include a third plate structure and a fourth plate structure that are perpendicular to each other. The side of the first plate structure facing away from the second plate structure is a first connecting surface. The second plate structure is provided with a U-shaped groove (211). The third plate structure is connected to the U-shaped groove (211) through a rotating shaft structure (212). The side of the fourth plate structure facing away from the third plate structure is a second connecting surface (222).

8. The online water jet verticality compensation device for water-guided laser processing equipment according to any one of claims 1-6, characterized in that, It also includes a water jet angle detection component, which is used to detect the first angle of the water jet emitted by the water-guided laser processing head (31) in the current state. The controller is electrically connected to the water jet angle detection component, and the controller is set to calculate and generate control commands for the first angle compensation and the second angle compensation based on the deviation between the current spatial angle and the target vertical angle.

9. The online water jet verticality compensation device for water-guided laser processing equipment according to claim 8, characterized in that, The water jet angle detection component includes a reference block, which has at least two mutually perpendicular precision reference edges, forming reference edges parallel to the X-axis and Y-axis directions. The controller is configured to obtain the angular deviation of the water jet in a certain direction through the following steps: A1. Control the movement of the five-axis oscillating head (10) so that the water jet emitted by the water-guided laser processing head (31) contacts the corresponding reference edge or reaches a preset gap at the first height position of the Z-axis, and record the coordinates of the first contact point; A2. Control the five-axis oscillating head (10) to move along the Z-axis, so that the water jet rises or falls by a known distance H, and then control it to contact the same reference edge or reach the preset gap again, and record the coordinates of the second contact point. A3. Based on the offset between the first contact point and the second contact point in the direction parallel to the reference edge, and the known distance H, the angular deviation of the water jet in this direction is calculated using trigonometric functions.

10. A method for online compensation of water jet verticality in a water-guided laser processing equipment, characterized in that, Using the online water jet verticality compensation device for a water-guided laser processing equipment according to any one of claims 1-9 includes the following steps: Step S1: Control the five-axis oscillating head (10) to move the water-guided laser processing head (31) to the detection station and obtain the current spatial angle of the water jet; Step S2: Compare the current spatial angle with the target vertical angle, and calculate the first deviation component in the X-axis direction and the second deviation component in the Y-axis direction; Step S3: Based on the first deviation component and the second deviation component, control the five-axis oscillating head (10) to move around its corresponding rotation axis to compensate for the first deviation component, and control the angle adjustment module (23) to move to compensate for the second deviation component. Step S4: After the compensation motion is completed, control the locking module (25) to lock the movable platform (22) rigidly.

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