Glass substrate conveying mechanism and glass substrate detection device

Abstract

The invention discloses a glass substrate conveying mechanism and a glass substrate detection device, and relates to the technical field of display substrate detection, the glass substrate conveying mechanism comprises a conveying module and a substrate carrying table, the glass substrate detection device comprises a conveying module and a substrate carrying table sliding on the conveying module, the substrate carrying table is provided with a supporting and floating assembly, and the supporting and floating assembly is arranged on the substrate carrying table. The supporting and floating assembly comprises a supporting and floating part and a bearing part, the light source plate is provided with a light emitting area, the bearing part is used for supporting the glass substrate in a first state, the glass substrate is separated from the supporting of the bearing part in a second state, and the supporting and floating part is configured to support the glass substrate in a suspension mode; and the supporting and floating part allows the glass substrate to move along the second direction. The glass substrate is supported by the supporting and floating part in a suspension manner at the detection station, so that adverse effects caused by contact type bearing can be avoided.

Description

Technical Field

[0001] This invention relates to the field of display substrate inspection technology, and in particular to a glass substrate conveying mechanism and a glass substrate inspection device. Background Technology

[0002] Glass substrates are a crucial basic material in the manufacturing of display devices. During the display screen manufacturing process, after the glass substrate undergoes cutting and dicing, defects such as bumps, bright lines, and microcracks can easily occur on the substrate edges and surfaces, potentially leading to display abnormalities, bright and dark lines, and other issues in the final product. Therefore, defect detection of the liquid crystal glass substrate after cutting and dicing is a core quality control step to ensure product yield and display consistency.

[0003] Current defect detection methods for glass substrates typically employ automated conveying mechanisms in conjunction with testing equipment. For example, an automated conveying mechanism continuously supplies the glass substrate to be tested to the testing equipment, which has a detection area. Within this area, different colors or wavelengths of detection light, such as red, green, and blue, are sequentially generated. By observing the display effect of the glass substrate under different optical conditions, defects such as bright lines and bumps can be identified, and the pass / fail status can be determined.

[0004] In practical applications, existing glass substrate inspection methods typically employ support structures for positioning or stabilization during the transport and inspection phases to ensure the stability of the glass substrate's position and orientation. However, this approach inevitably exposes the glass substrate to factors such as the load-bearing state of the interface, contact conditions, and the cleanliness of the environment, leading to damage or interference on the substrate's surface or edges. This reduces the accuracy and comprehensiveness of the inspection results. Therefore, existing glass substrate inspection methods, in practical applications, struggle to effectively mitigate the adverse effects of the interface on the inspection results while ensuring inspection stability. Summary of the Invention

[0005] The purpose of this invention is to provide a glass substrate conveying mechanism and a glass substrate testing device, which solves the problem that existing glass substrate testing methods are difficult to effectively reduce the adverse effects of the bearing interface on the testing results while ensuring testing stability in practical applications.

[0006] To achieve this objective, the present invention adopts the following technical solution: A glass substrate conveying mechanism includes a conveying module and a substrate stage sliding on the conveying module. A buoyancy component is provided on the substrate stage. The buoyancy component includes a buoyancy part and a support part. The support part is used to support the glass substrate in a first state. In a second state, the glass substrate is detached from the support part. The buoyancy part is configured to support the glass substrate in a suspending manner and allows the glass substrate to move in a second direction.

[0007] Optionally, the conveying module includes a linear slide and a moving carrier. The linear slide extends along a first direction, the moving carrier is slidably connected to the linear slide, and the substrate platform is fixedly connected to the moving carrier. The moving carrier reciprocates between the loading station, the inspection station, and the unloading station in sequence.

[0008] Optionally, the substrate stage has a receiving groove, and a mounting frame adapted to the contour of the receiving groove is provided in the receiving groove. A light source plate is provided in the mounting frame. The supporting part is connected to the mounting frame and is spaced above the light source plate along the second direction. The light source board is used to sequentially generate light sources of at least three colors: red, green, and blue in the light-emitting area. There is a gap between the light source board and the bottom of the receiving groove, and there is a gap between the surface of the light source board and the bearing surface of the bearing part.

[0009] Optionally, the bearing portion includes a telescopic component and support blocks symmetrically arranged on both sides inside the mounting frame. The support blocks are slidably inserted into the mounting frame, and the telescopic component is used to drive the support blocks to extend or retract to the side wall of the mounting frame.

[0010] Optionally, the buoyancy section includes a fan and an air guide port located between the light source plate and the support section. The fan is located below the substrate platform and connected to the mobile carrier. A first air duct is opened inside the substrate platform, and air holes communicating with the first air duct are opened in the bottom array of the receiving groove. A first cavity is formed between the bottom of the receiving groove and the light source plate, and a second cavity is formed between the light source plate and the supporting surface of the support block. A second air duct is symmetrically opened on the mounting frame to connect the first cavity and the second cavity, and the air guide is located at the outlet of the second air duct inside the second cavity.

[0011] Optionally, the air guide is inclined toward one side of the support block, and an adjustment control is provided inside the air guide. The adjustment control adjusts the air volume in the air guide to make the glass substrate move closer to or away from the light source plate along the second direction, or to make any side of the glass substrate move closer to or away from the light source plate along the second direction.

[0012] Optionally, there is a gap between the outer edge of the glass substrate and the inner sidewall of the mounting frame.

[0013] This invention also provides a glass substrate inspection device, including the glass substrate conveying mechanism as described above. The glass substrate inspection device includes a support frame and a loading module, an optical module, and a unloading module sequentially disposed on the support frame along a first direction. The feeding module includes a feeding conveyor belt and a feeding drive unit, and the unloading module includes an unloading conveyor belt and an unloading drive unit. Both the feeding module and the unloading module include a suction cup connected to their respective drive units. The suction cup can move along a second direction or a third direction. The optical module includes a mounting bracket fixed on the carrier frame and a detection drive unit disposed on the mounting bracket. A vision camera is connected to the first drive unit. The first drive unit is used to drive the vision camera to move along a first direction or a third direction. The vision camera is used to identify the display state of the glass substrate at least. The conveying module is mounted on the carrier frame. Along the first direction, one end of the conveying module is a loading station and the other end is a unloading station. The loading module is located at the loading station, and the unloading module is located at the loading station. Along the second direction, the position directly below the optical module and corresponding to the conveying module is the detection station. When the substrate stage is at the detection station, the glass substrate is detected.

[0014] Optionally, the first state is the state in which the substrate stage operates between the loading station and the inspection station and between the inspection station and the unloading station, and the second state is the state in which the substrate stage is inspected at the inspection station.

[0015] Optionally, the substrate stage is provided with a detection area and an anti-static area, the buoyancy component is disposed in the detection area, and the anti-static area is provided with an anti-static contact block. Along the second direction, the upper surface of the anti-static contact block is higher than the height of the glass substrate. The suction cup part includes a mounting base and a gripping suction cup and an anti-static suction cup disposed on the mounting base. The lower end face height of the anti-static suction cup is lower than or equal to the lower end face height of the gripping suction cup, and the anti-static suction cup has a telescopic range in the third direction.

[0016] Compared with the prior art, the present invention has the following beneficial effects: In a glass substrate testing device provided by this invention, a substrate stage is used to support the glass substrate and can reciprocate between a loading station, a testing station, and a unloading station under the drive of a conveying module. The supporting unit is used to support and carry the glass substrate in the non-testing state. When the substrate stage moves to the testing station, the levitation unit supports the glass substrate in a suspended manner, keeping the glass substrate in a non-contact supporting state. This effectively avoids direct contact between the glass substrate and the supporting structure during conveying and testing, and maintains the stability of the glass substrate during conveying. It also helps to reduce the influence of factors such as the bearing state of the bearing interface, contact conditions, and the cleanliness of the contact environment on the glass substrate, thereby improving the accuracy and comprehensiveness of the test results.

[0017] In addition, in the floating state, the floating part allows the glass substrate to move closer to or further away from the light source plate along the second direction, so that the glass substrate can form a stable and adjustable spatial position relationship within a predetermined range during the detection process, which is convenient to adapt to different detection conditions and ensure comprehensive detection of the glass substrate. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] The structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which the present invention can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that the present invention can produce, should still fall within the scope of the technical content disclosed in the present invention.

[0020] Figure 1 This is a schematic diagram of a glass substrate detection device according to an embodiment of the present invention.

[0021] Figure 2 This is a partial structural schematic diagram of a glass substrate detection device according to an embodiment of the present invention.

[0022] Figure 3 This is a partial structural schematic diagram of a glass substrate detection device according to an embodiment of the present invention.

[0023] Figure 4 This is a schematic diagram of the suction cup section.

[0024] Figure 5 This is a schematic diagram of the substrate stage.

[0025] Figure 6 This is an exploded view of the substrate stage structure.

[0026] Figure 7 This is a cross-sectional view of the substrate stage.

[0027] Figure 8 for Figure 7 A magnified view of part A in the middle.

[0028] Illustrations: 1. Support frame; 11. Conveying module; 111. Linear slide; 112. Moving carrier; 12. Loading module; 121. Loading conveyor belt; 122. Loading drive unit; 13. Unloading module; 131. Unloading conveyor belt; 132. Unloading drive unit; 14. Optical module; 141. Detection drive unit; 142. Vision camera; 15. Suction cup unit; 151. Mounting base; 152. Gripping suction cup; 153. Antistatic suction cup; 2. Substrate platform; 21. Receiving slot; 22. First air duct; 23. Air vent; 24. Mounting frame; 241. Second air duct; 25. Antistatic contact block; 3. Floating assembly; 31. Floating part; 311. Fan; 312. Air guide; 32. Light source board; 33. Supporting part; 331. Support block. Detailed Implementation

[0029] To make the objectives, features, and advantages of this invention more apparent and understandable, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0030] In the description of this invention, it should be understood that the terms "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a component positioned centrally in the connection.

[0031] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0032] Example 1: likeFigures 1-8 As shown, this embodiment of the invention provides a glass substrate inspection device, suitable for scenarios where defect detection is performed after a large glass substrate has been cut into fragments. The defect detection of the glass substrate is achieved by transmitting red, green, and blue primary colors of light through the glass substrate and observing the display effect of the glass substrate. In view of the defects in existing inspection methods where the unavoidable contact and support of the glass substrate affect the accuracy and comprehensiveness of the inspection results, this embodiment of the invention improves the structure of the glass substrate inspection device, which at least effectively reduces the adverse effects of support and contact on the inspection results.

[0033] like Figure 1 , Figure 2 and Figure 3 As shown, in this embodiment, the glass substrate detection device includes a conveying module 11 and a substrate stage 2 that slides on the conveying module 11. A buoyancy component 3 is provided on the substrate stage 2. The buoyancy component 3 includes a buoyancy part 31 and a support part 33. The light source plate 32 has a light-emitting area. The support part 33 is used to support the glass substrate in a first state. In a second state, the glass substrate is detached from the support of the support part 33. The buoyancy part 31 is configured to support the glass substrate in a suspending manner and allows the glass substrate to move in a second direction.

[0034] Specifically, the substrate stage 2 is equipped with a buoyancy assembly 3, which includes a buoyancy part 31 and a support part 33. The support part 33 is used to support and carry the glass substrate in the non-inspection state. When the substrate stage 2 moves to the inspection station, the glass substrate is released from the support of the support part 33. At this time, the buoyancy part 31 is activated and supports the glass substrate in a suspended manner, so that the glass substrate is in a non-contact support state. This effectively avoids direct contact between the glass substrate and the support structure during the inspection process, and can maintain the stability of the glass substrate during transportation. It helps to reduce the influence of factors such as the support interface state, contact conditions, and cleanliness of the contact environment on the glass substrate, thereby reducing the risk of scratches and interference from foreign matter adhesion on the inspection accuracy, thus improving the accuracy and comprehensiveness of the inspection results.

[0035] Furthermore, in the floating state, the buoyancy section 31 allows the glass substrate to move along the second direction, thereby enabling the glass substrate to form a stable and adjustable spatial position within a predetermined range during the inspection process. This allows for adaptation to different inspection conditions while ensuring inspection stability, ensuring comprehensive inspection of the glass substrate. By employing different support methods at different workstations—namely, using the carrier section 33 for contact support of the glass substrate during transport and non-inspection states, and using the buoyancy section 31 for suspension support at the inspection station—the glass substrate can meet stability requirements during inspection while avoiding the adverse effects of contact support.

[0036] like Figure 1 , Figure 2 and Figure 3 As shown, in one embodiment of the present invention, the conveying module 11 includes a linear slide 111 and a moving carrier 112. The linear slide 111 extends along a first direction, the moving carrier 112 is slidably connected to the linear slide 111, the substrate platform 2 is fixedly connected to the moving carrier 112, and the moving carrier 112 reciprocates between the loading station, the inspection station and the unloading station in sequence.

[0037] For example, the linear slide 111 can adopt a motor-driven linear guide structure, and its driving method can be in the form of screw drive, synchronous belt drive, or linear motor drive, etc., to realize the precise positioning and reciprocating movement of the moving carrier 112 in the first direction. During operation, the moving carrier 112 pauses when it reaches the loading station, inspection station, and unloading station. At the loading and unloading stations, the substrate stage 2 is in the state of supporting the glass substrate with the bearing part 33 to complete the automatic loading and unloading of the glass substrate; at the inspection station, after the moving carrier 112 pauses, the buoyancy component 3 is activated, so that the glass substrate is detached from the bearing part 33 and enters a suspended support state, thereby cooperating with the optical module 14 to complete the inspection process. Driven by the conveying module 11, the substrate stage 2 realizes the automatic switching of the glass substrate between the various stations, and the inspection process does not require manual intervention, thus forming a continuous and stable automated inspection.

[0038] like Figure 5 , Figure 6 and Figure 7 As shown, in this embodiment of the invention, the substrate stage 2 has a receiving groove 21, and a mounting frame 24 adapted to the contour of the receiving groove 21 is provided in the receiving groove 21. The light source plate 32 and the support part 33 are connected to the mounting frame 24. The light source plate 32 is used to generate light sources of at least three colors, namely red, green and blue, in the light-emitting area in sequence. There is a gap between the light source plate 32 and the bottom of the receiving groove 21, and there is a gap between the surface of the light source plate 32 and the support surface of the support part 33.

[0039] Specifically, the substrate stage 2 can be fixed to the mobile carrier 112 by a support column. A receiving groove 21 is opened on the upper end surface of the substrate stage 2 to receive the floating component 3. A mounting frame 24 that matches the contour of the receiving groove 21 is provided in the receiving groove 21. The mounting frame 24 is fixed in the substrate stage 2 to provide a mounting base for the light source board 32 and the support part 33. By replacing the mounting frame 24 and the internal floating component 3, the testing requirements of glass substrates of different sizes can be quickly adapted.

[0040] Meanwhile, both the light source plate 32 and the support portion 33 are connected to the mounting frame 24 and are spaced apart from bottom to top along the second direction. The light source plate 32 is located at the lower part of the mounting frame 24, with a gap between its plate surface and the bottom of the receiving groove 21; the support portion 33 is located above the light source plate 32, with a gap between its support surface and the plate surface of the light source plate 32, thus separating the light source plate 32 and the support portion 33 in space. The light source plate 32 has a light-emitting area for providing a detection light source to the glass substrate during the detection process. In the second direction, the orthographic projection outline of the glass substrate is located within the light-emitting area of ​​the light source plate 32, thereby ensuring that the glass substrate is completely within the effective illumination range of the detection light source when at the detection station. The light-emitting area can sequentially generate at least three colors of light source—red, green, and blue—during the detection process. By switching between multiple colors of light source, defects such as bright lines, bumps, and microcracks can exhibit differentiated display effects under different colors of light source, and together with the optical module 14, the detection of defects in the glass substrate can be achieved. In the second direction, the orthographic projection outline of the glass substrate is located within the light-emitting area, thereby ensuring that the entire glass substrate is within the effective illumination range of the light-emitting area during detection. This allows the glass substrate to be supported in contact with the carrier 33 during transport and when not in detection mode, effectively preventing scratches from occurring between the glass substrate and the light source plate 32.

[0041] Furthermore, the load-bearing part 33 includes a telescopic member and support blocks 331 symmetrically arranged on both sides inside the mounting frame 24. The support blocks 331 are slidably inserted into the mounting frame 24, and the telescopic member is used to drive the support blocks 331 to extend or retract to the side wall of the mounting frame 24.

[0042] Specifically, the support block 331 is slidably inserted into the mounting frame 24 along a direction perpendicular to the inner wall of the mounting frame 24, and the upper surface of the support block 331 forms a support surface for supporting the glass substrate. The telescopic component can be driven by an electric push rod, motor, or other means to extend or retract the support block 331 to the side wall of the mounting frame 24. For example, when the support block 331 is in the extended state, the support surface of the support block 331 is located inside the mounting frame 24 to support the glass substrate; when the support block 331 is in the retracted state, the support block 331 retracts to the side wall position of the mounting frame 24, causing the glass substrate to detach from the support of the support block 331.

[0043] For example, a contact sensor can be provided on the upper surface of the support block 331. When the substrate stage 2 moves to the detection station, the buoy 31 is activated and suspends the glass substrate. The contact sensor is used to obtain the support state of the support block 331 on the glass substrate. If the glass substrate is detached from the support surface of the support block 331, the telescopic component is activated to retract the support block 331 into the mounting frame 24, so that the glass substrate can be completely within the light-emitting area of ​​the light source plate 32, which is beneficial to realize the comprehensive detection of the glass substrate and avoid the detection dead zone caused by contact support.

[0044] like Figure 6 , Figure 7 and Figure 8 As shown, in this embodiment of the invention, the buoyancy part 31 includes a fan 311 and an air guide 312 disposed between the light source plate 32 and the support part 33. The fan 311 is disposed below the substrate platform 2 and connected to the moving carrier 112. A first air duct 22 is opened inside the substrate platform 2. The bottom of the receiving groove 21 is arrayed with air holes 23 communicating with the first air duct 22. A first cavity is formed between the bottom of the receiving groove 21 and the light source plate 32. A second cavity is formed between the light source plate 32 and the support surface of the support block 331. A second air duct 241 communicating with the first cavity and the second cavity is symmetrically opened on the mounting frame 24. The air guide 312 is disposed at the outlet of the second air duct 241 located inside the second cavity.

[0045] Specifically, the fan 311 is positioned below the substrate platform 2 and fixedly connected to the moving carrier 112 so as to move synchronously with the substrate platform 2. The fan 311 can be an axial flow fan, a turbine fan, etc., to generate airflow. A first air duct 22 is provided inside the substrate platform 2, which is connected to the air outlet of the fan 311. The first air duct 22 can also be connected to the outside of the substrate platform 2, and the opening to the outside can be closed. Multiple air holes 23 are arrayed at the bottom of the receiving groove 21, and each air hole 23 is connected to the first air duct 22 to guide the airflow generated by the fan 311 into the receiving groove 21. A first cavity is formed between the bottom of the receiving groove 21 and the light source plate 32, and a second cavity is formed between the light source plate 32 and the support surface of the support block 331. Second air ducts 241 can be symmetrically provided on the four sides of the mounting frame 24, and the second air ducts 241 are used to connect the first cavity and the second cavity. The air vent 312 can be a through-type structure, and it is located at the outlet of the second air duct 241 within the second cavity.

[0046] At the testing station, the fan 311 starts and generates airflow. The airflow enters the first cavity through the first air duct 22, and then enters the second cavity through the second air duct 241 and the air guide 312. From the air guide 312, it acts upward on the bottom of the glass substrate, thereby forming a uniformly distributed buoyant airflow under the glass substrate, keeping the glass substrate in a suspended and supported state. In this process, the airflow undergoes multiple stages of diversion and buffering, and the glass substrate is buoyed by a uniform and stable airflow from all four sides to ensure the stability of the glass substrate testing.

[0047] Furthermore, the air vent 312 is inclined toward the support block 331, and an adjustment control is provided inside the air vent 312. The adjustment control can adjust the air volume of the air vent 312 to make the glass substrate move closer to or away from the light source plate 32 along the second direction, or to make any side of the glass substrate move closer to or away from the light source plate 32 along the second direction.

[0048] Specifically, the air guide 312 is located at the outlet of the second air duct 241 within the second cavity, and the air guide 312 is inclined relative to the glass substrate, with its air outlet direction facing the glass substrate. The adjustment control can be a baffle, valve, or other structure installed within the air guide 312, used to adjust the airflow volume in the air guide 312. During the detection process, by adjusting the airflow volume of each air guide 312, the buoyancy airflow acting on the bottom of the glass substrate changes, thereby adjusting the buoyancy state of the glass substrate. For example, when the overall airflow volume of each air guide 312 increases or decreases, the glass substrate moves closer to or further away from the light source plate 32 along the second direction; when the airflow volume of the air guide 312 on one side of the glass substrate changes relative to the other side, the corresponding side of the glass substrate can move closer to or further away from the light source plate 32 along the second direction, thereby adjusting the orientation of the glass substrate. This is beneficial for obtaining more suitable optical imaging effects under different detection conditions and improving the flexibility of the detection.

[0049] Furthermore, a gap exists between the outer edge of the glass substrate and the inner wall of the mounting frame 24. Through this gap, when the buoyancy section 31 supports the glass substrate using wind power, the airflow supporting the glass substrate can exit through the gap, preventing disordered airflow within the second cavity and improving the stability of the glass substrate. Additionally, the airflow exiting the gap can also carry away dust, particles, and other debris from inside the second cavity, further improving the accuracy of glass substrate detection. For example, after the airflow carries away particles from the second cavity and the surface of the light source plate 32, the buoyancy section 31 can gradually bring the glass substrate closer to the light source plate 32 and eventually place it on the light source plate 32. At this point, even if the glass substrate contacts the light source plate 32, the adverse effects of the light source plate 32 on the detection results can be effectively reduced, further improving the flexibility and accuracy of the detection.

[0050] Example 2: This invention also provides a glass substrate testing device including the glass substrate conveying mechanism as described above. The glass substrate testing device includes a support frame and a loading module, an optical module, and a unloading module sequentially disposed on the support frame along a first direction. The feeding module includes a feeding conveyor belt and a feeding drive unit, and the unloading module includes an unloading conveyor belt and an unloading drive unit. Both the feeding module and the unloading module include a suction cup connected to their respective drive units. The suction cup can move along a second direction or a third direction. The optical module includes a mounting bracket fixed on a carrier frame and a detection drive unit disposed on the mounting bracket. A vision camera is connected to the first drive unit. The first drive unit is used to drive the vision camera to move along a first direction or a third direction. The vision camera is used to identify the display status of the glass substrate at least. The conveying module is mounted on the support frame. Along the first direction, one end of the conveying module is the loading station and the other end is the unloading station. The loading module is located at the loading station, and the unloading module is located at the loading station. Along the second direction, the position directly below the optical module and corresponding to the conveying module is the inspection station. When the substrate stage is at the inspection station, the glass substrate is inspected.

[0051] Specifically, the support frame 1 serves as the support platform for the glass substrate inspection device and can be installed in an automated glass substrate processing line. After the glass substrate is cut and split, it is transported to the glass substrate inspection device for defect detection. A conveying module 11 is installed on the support frame 1. Along a first direction, one end of the conveying module 11 is designated as a loading station, and the other end as a unloading station. An optical module 14 is positioned above the conveying module 11 along a second direction. The inspection station is located directly below the optical module 14, corresponding to the position of the conveying module 11, and is situated between the loading and unloading stations. The substrate stage 2 carries the glass substrate and can reciprocate between the loading, inspection, and unloading stations under the drive of the conveying module 11, thereby achieving automated inspection.

[0052] A feeding module 12 is provided on the support frame near the feeding station, and a discharging module 13 is provided on the support frame near the discharging station. The feeding module 12 includes a feeding conveyor belt 121 and a feeding drive unit 122. The discharging module 13 includes a discharging conveyor belt 131 and a discharging drive unit 132. Both the feeding module 12 and the discharging module 13 include a suction cup part 15 connected to their respective drive units. The suction cup part 15 can move along a second direction or a third direction.

[0053] For example, both the loading drive unit 122 and the unloading drive unit 132 can be driven by a combination of linear motors and cylinders, with the cylinders slidably connected to the linear motors. For instance, in the loading module 12, the linear motor drives the suction cup unit 15 to move directly above the glass substrate on the loading conveyor belt 121, and the cylinder drives the suction cup unit 15 to descend and grab the glass substrate. Then, the glass substrate is transferred to the substrate stage 2 in the opposite manner, thereby enabling automatic loading and unloading of the glass substrate in the inspection device.

[0054] For example, the detection drive unit 141 may include a first linear motor and a second linear motor. The second linear motor is slidably connected to the first linear motor to reciprocate along a third direction under the drive of the first linear motor. The vision motor is connected to the second linear motor, which can drive the vision camera 142 to reciprocate along a first direction, enabling the vision camera 142 to switch between different positions above the detection station to ensure that the vision camera 142 can be accurately aligned with the glass substrate. The vision camera 142 is at least used to acquire display status information of the glass substrate under the illumination of the detection light source, and to identify display abnormalities, bright lines, or other defects of the glass substrate through the acquired image data, thereby realizing the detection of defects in the glass substrate.

[0055] like Figure 4 and Figure 5 As shown, for example, the substrate stage 2 is provided with a detection area and an anti-static area at intervals. The buoyancy component 3 is provided in the detection area. The anti-static area is provided with an anti-static contact block 25. Along the second direction, the upper end surface of the anti-static contact block 25 is higher than the height of the glass substrate. The suction cup part 15 includes a mounting base 151 and a gripping suction cup 152 and an anti-static suction cup 153 provided on the mounting base 151. The lower end surface of the anti-static suction cup 153 is lower than or equal to the lower end surface of the gripping suction cup 152. The anti-static suction cup 153 has a telescopic amount in the third direction.

[0056] Specifically, the substrate stage 2 has a detection area and an anti-static area spaced apart along the third direction. The levitation component 3 is located in the detection area to suspend and support the glass substrate for detection at the detection station. An anti-static contact block 25 is located in the anti-static area. The mounting base 151 has gripping suction cups 152 and anti-static suction cups 153 spaced apart along the third direction. Four sets of gripping suction cups 152 can be symmetrically arranged to adsorb the glass substrate near its four corners, facilitating stable adsorption. The positions of the four sets of gripping suction cups 152 are adjustable to accommodate glass substrates of different sizes. Along the second direction, the upper surface of the anti-static contact block 25 is higher than the height of the glass substrate, ensuring that the glass substrate preferentially contacts the anti-static contact block 25 when not levitated. The anti-static suction cup 153 has a certain amount of extension and retraction in the third direction. When the suction cup 15 approaches the glass substrate for gripping, the antistatic suction cup 153 can contact the glass substrate before the gripping suction cup 152, thereby releasing static electricity from the gripping substrate in advance and effectively preventing the gripping suction cup 152 from generating static electricity when adsorbing the glass substrate.

[0057] The above-described embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A glass substrate conveying mechanism, characterized in that, It includes a conveying module (11) and a substrate stage (2) that slides on the conveying module (11). A buoyancy component (3) is provided on the substrate stage (2). The buoyancy component (3) includes a buoyancy part (31) and a support part (33). The support portion (33) is used to support the glass substrate in a first state. In a second state, the glass substrate is detached from the support portion (33), and the buoyancy portion (31) is configured to support the glass substrate in a suspending manner, and the buoyancy portion (31) allows the glass substrate to move in a second direction.

2. The glass substrate conveying mechanism according to claim 1, characterized in that, The conveying module (11) includes a linear slide (111) and a moving carrier (112). The linear slide (111) extends along a first direction, the moving carrier (112) is slidably connected to the linear slide (111), and the substrate stage (2) is fixedly connected to the moving carrier (112).

3. The glass substrate conveying mechanism according to claim 2, characterized in that, The substrate stage (2) has a receiving groove (21), and a mounting frame (24) adapted to the contour of the receiving groove (21) is provided in the receiving groove (21). A light source plate (32) is provided in the mounting frame (24). The supporting part (33) is connected to the mounting frame (24) and along the second direction, the supporting part (33) is spaced above the light source plate (32). The orthographic projection contour of the glass substrate is located in the light-emitting area of ​​the light source plate (32). The light source plate (32) is used to sequentially generate light sources of at least three colors: red, green, and blue in the light-emitting area. There is a gap between the light source plate (32) and the bottom of the receiving groove (21), and there is a gap between the surface of the light source plate (32) and the bearing surface of the bearing part (33).

4. The glass substrate conveying mechanism according to claim 3, characterized in that, The bearing part (33) includes a telescopic member and support blocks (331) symmetrically arranged on both sides inside the mounting frame (24). The support blocks (331) are slidably inserted into the mounting frame (24). The telescopic member is used to drive the support blocks (331) to extend or retract to the side wall of the mounting frame (24).

5. The glass substrate conveying mechanism according to claim 4, characterized in that, The buoyancy section (31) includes a fan (311) and an air duct (312) located between the light source plate (32) and the support section (33). The fan (311) is located below the substrate platform (2) and connected to the mobile carrier (112). A first air duct (22) is provided inside the substrate platform (2). The bottom of the receiving groove (21) is arrayed with air holes (23) communicating with the first air duct (22). The bottom of the receiving groove (21) and the light source plate (32) form a first cavity, and the light source plate (32) and the support surface of the support block (331) form a second cavity. The mounting frame (24) is symmetrically provided with a second air duct (241) connecting the first cavity and the second cavity. The air guide (312) is located at the outlet of the second air duct (241) in the second cavity.

6. The glass substrate conveying mechanism according to claim 5, characterized in that, The air vent (312) is inclined toward the support block (331) and an adjustment control is provided inside the air vent (312). The adjustment control can adjust the air volume in the air vent (312) to make the glass substrate move closer to or further away from the light source plate (32) along the second direction, or to make any side of the glass substrate move closer to or further away from the light source plate (32) along the second direction.

7. The glass substrate conveying mechanism according to claim 6, characterized in that, There is a gap between the outer edge of the glass substrate and the inner sidewall of the mounting frame (24).

8. A glass substrate inspection device, comprising a glass substrate conveying mechanism as described in any one of claims 1-7, characterized in that, The glass substrate testing equipment includes a support frame (1) and a loading module (12), an optical module (14) and a unloading module (13) arranged sequentially on the support frame (1) along a first direction; The loading module (12) includes a loading conveyor belt (121) and a loading drive unit (122), and the unloading module (13) includes an unloading conveyor belt (131) and an unloading drive unit (132). Both the loading module (12) and the unloading module (13) include a suction cup (15) connected to their respective drive units. The suction cup (15) can move along a second direction or a third direction. The optical module (14) includes a mounting bracket fixed on the support frame (1) and a detection drive unit (141) provided on the mounting bracket. A vision camera (142) is connected to the first drive unit. The first drive unit is used to drive the vision camera (142) to move along a first direction or a third direction. The vision camera (142) is used to identify the display state of the glass substrate at least. The conveying module (11) is mounted on the support frame (1). Along the first direction, one end of the conveying module (11) is a loading station and the other end is a unloading station. The loading module is located at the loading station and the unloading module is located at the loading station. Along the second direction, the position on the conveying module (11) corresponding to the optical module (14) is a detection station. When the substrate stage (2) is at the detection station, the glass substrate is detected.

9. The glass substrate testing equipment according to claim 8, characterized in that, The first state is the state in which the substrate stage (2) operates between the loading station and the inspection station and between the inspection station and the unloading station. The second state is the state in which the substrate stage (2) is inspected at the inspection station.

10. The glass substrate testing equipment according to claim 8, characterized in that, The substrate stage (2) is provided with a detection area and an anti-static area at intervals. The buoyancy component (3) is provided in the detection area. The anti-static area is provided with an anti-static contact block (25). Along the second direction, the upper surface of the anti-static contact block (25) is higher than the height of the glass substrate. The suction cup part (15) includes a mounting base (151) and a gripping suction cup (152) and an antistatic suction cup (153) disposed on the mounting base (151). The height of the lower end face of the antistatic suction cup (153) is lower than or equal to the height of the lower end face of the gripping suction cup (152). The antistatic suction cup (153) has a telescopic range in the third direction.

Images