Suction gun device and helium mass spectrometer leak detector

Abstract

The invention relates to the technical field of vacuum leak detection, and discloses a suction gun device and a helium mass spectrometer leak detector, the suction gun device comprises a pipeline and an adjusting structure, the pipeline and the adjusting structure are arranged, and the adjusting structure adjusts the radial size of a first channel; the cross-sectional area of the first channel is equal to the cross-sectional area of a hole in a capillary tube in the related technology. On the basis, the leakage rate of combination between the pipeline and the adjusting structure is equal to the leakage rate of a capillary tube in the related technology, and meanwhile, the cross section area of the pipeline matched with the adjusting structure can be equal to the cross section area of a middle hole of the capillary tube, so that the manufacturing difficulty of the pipeline can be reduced by increasing the diameter of the first channel; therefore, the simplicity and convenience of pipeline manufacturing are improved. Meanwhile, by increasing the radial size of the first channel, the rigidity of the pipeline can be improved, so that the technical effect of improving the leak rate detection accuracy and the use reliability of the suction gun device is achieved.

Description

Technical Field

[0001] This invention relates to the field of vacuum leak detection technology, specifically to a suction gun device and a helium mass spectrometer leak detector. Background Technology

[0002] Leak detection using a suction gun is a commonly used method in helium mass spectrometry leak detectors (hereinafter referred to as leak detectors). This leak detection method is widely used in the refrigeration industry, including refrigerators, freezers, and air conditioners.

[0003] The core structure of the leak detection suction gun device commonly used in helium mass spectrometry on the market today is a capillary tube with a small diameter and a certain length. Specifically, the capillary tube is made of metal, and the pore size of the capillary tube is about 0.1 mm, and the length is greater than 30 mm. The pore size of the capillary tube is used to achieve a stable leak rate (i.e., suction gun background).

[0004] Due to the small pore size of capillary tubes, their manufacturing is extremely difficult, resulting in very high production costs. This increases the difficulty of sealing the capillary tube with mating components, easily affecting the leak rate and disrupting the normal operation of the helium mass spectrometer leak detector. Furthermore, capillary tubes are prone to breakage or deformation, impacting the accuracy and repeatability of leak detection. Summary of the Invention

[0005] This invention provides a suction gun device and a helium mass spectrometer leak detector to address the challenges posed by the small pore size of capillary tubes, which makes their fabrication extremely difficult and costly. This, in turn, increases the difficulty of sealing the capillary tube with mating components, potentially affecting the leak rate and the normal operation of the helium mass spectrometer leak detector. Furthermore, the capillary tube is prone to breakage or deformation, impacting the accuracy and repeatability of leak detection.

[0006] In a first aspect, the present invention provides a suction gun device, comprising: Pipeline, including the first channel; The adjusted structure is located within the first channel and spaced apart from the inner wall of the first channel.

[0007] Beneficial Effects: By setting up a pipe and adjusting the structure, the radial dimension of the first channel is adjusted so that the cross-sectional area of ​​the first channel is equal to the cross-sectional area of ​​the capillary orifice in the related technology. Based on this, the leakage rate of the combination of the pipe and the adjusting structure is equal to the leakage rate of the capillary in the related technology. Furthermore, since the cross-sectional area of ​​the pipe and the adjusting structure must match to equal the cross-sectional area of ​​the capillary orifice, the diameter of the first channel in this invention can be increased to reduce the manufacturing difficulty of the pipe, thereby improving the ease of pipe fabrication. Simultaneously, increasing the radial dimension of the first channel in this invention improves the rigidity of the pipe, preventing the radial dimension of the first channel from affecting the accuracy and repeatability of leakage rate detection, thus achieving the technical effect of improving the accuracy and reliability of the leakage rate detection of the suction gun device.

[0008] In one optional embodiment, the suction gun device includes: A first fixing unit includes a second channel, and the first fixing unit is connected to the pipe so that the second channel communicates with the first channel.

[0009] Beneficial effects: By setting the first fixing unit, the position of the pipeline can be limited, thereby improving the technical effect of fixing the pipeline position.

[0010] In one optional embodiment, the suction gun device includes: A filter unit is disposed within the second channel and at one end of the second channel away from the pipe.

[0011] Beneficial effects: By setting up a filter unit, air that does not pass through the filter unit cannot enter the pipe. The filter unit filters out moisture and dust in the air, preventing moisture and dust from clogging the gap between the pipe and the adjustment structure, which would cause the suction gun device to fail. This achieves the technical effect of improving the reliability of the suction gun device.

[0012] In one optional implementation, the filtering unit includes: The first filter structure is located within the second channel.

[0013] Beneficial effects: By setting up a first filter structure, the first filter structure can perform coarse filtration of the air, specifically adsorbing water and large particles in the dust.

[0014] In one optional implementation, the filtering unit includes: The second filter structure is located at one end of the first filter structure near the first channel and is spaced apart from the first filter structure.

[0015] Beneficial effects: By setting up a second filter structure, the second filter structure can filter out fine dust in the air.

[0016] In one optional implementation, the first filter structure is a cotton filter element; And / or, the second filter structure is a sintered filter element.

[0017] In one optional embodiment, the suction gun device includes: The second fixing unit includes a third channel. The second fixing unit is disposed in the second channel and connected to the pipe so that the first channel, the second channel and the third channel are connected.

[0018] Beneficial effects: By setting a second fixing unit, the outer diameter of the pipe can be increased to make it easier for the user to hold, thereby improving the reliability of the suction gun device.

[0019] In one optional embodiment, the suction gun device includes: A sealing unit includes a fourth channel. One end of the sealing unit is disposed within the second channel, and the other end of the sealing unit is disposed between the second fixing unit and the pipe, with the pipe disposed within the fourth channel.

[0020] Beneficial effects: By setting a sealing unit, the sealing point between the second fixed unit and the first fixed unit can be achieved, increasing the difficulty for residual helium in the second channel to enter the pipeline, avoiding the residual helium from affecting the leak rate detection results, and ensuring that the gas drawn in by the suction gun can only enter the pipeline through the first fixed unit, thereby improving the accuracy of the helium capture rate of the suction gun and thus improving the detection accuracy of the suction gun.

[0021] In one alternative implementation, the adjustment structure is a shaft; And / or, when the radial dimension of the first channel is 0.254 mm, the axial length of the first channel is 100 mm, the diameter of the adjustment structure is in the range of 0.12 mm to 0.14 mm, and the axial length of the adjustment structure is in the range of 15 mm to 60 mm; And / or, when the radial dimension of the first channel is 0.3 mm, the axial length of the first channel is 70 mm, the diameter of the adjustment structure is in the range of 0.13 mm to 0.18 mm, and the axial length of the adjustment structure is in the range of 10 mm to 60 mm.

[0022] Secondly, the present invention also provides a helium mass spectrometer leak detector, comprising: The suction gun device described above.

[0023] Beneficial effects: Since the helium mass spectrometer leak detector includes a suction gun device, it has the same effect as the suction gun device, which will not be elaborated here. Attached Figure Description

[0024] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0025] Figure 1 This is a partial cross-sectional view of a suction gun device according to this embodiment; Figure 2 This is a cross-sectional view of the pipe, adjustment structure, first fixing unit, filter unit, second fixing unit, and sealing unit in this embodiment; Figure 3 This is a cross-sectional view of the pipes and adjustment structure in this embodiment.

[0026] Explanation of reference numerals in the attached figures: 1. Pipeline; 2. Adjustment structure; 3. First fixed unit; 4. Filter unit; 401. First filter structure; 402. Second filter structure; 5. Second fixing unit; 6. Sealing unit; 7. Handle; 8. Support structure. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0028] The following is combined with Figures 1 to 3 The following describes embodiments of the present invention.

[0029] According to an embodiment of the present invention, in one aspect, a suction gun device is provided, comprising: Pipeline 1, including the first channel; Adjust structure 2, which is located inside the first channel and spaced apart from the inner wall of the first channel.

[0030] In the suction gun device of this embodiment, by setting up a pipe 1 and an adjustment structure 2, the adjustment structure 2 adjusts the radial dimension of the first channel so that the cross-sectional area of ​​the first channel is equal to the cross-sectional area of ​​the capillary orifice in the related art. Based on this, the leakage rate of the combination of pipe 1 and adjustment structure 2 is equal to the leakage rate of the capillary in the related art. At the same time, since the cross-sectional area of ​​pipe 1 and adjustment structure 2 must be equal to the cross-sectional area of ​​the capillary orifice, the manufacturing difficulty of pipe 1 can be reduced by increasing the diameter of the first channel in this embodiment, thereby improving the ease of manufacturing pipe 1. Furthermore, by increasing the radial dimension of the first channel in this embodiment, the rigidity of pipe 1 can be improved, preventing the radial dimension of the first channel from affecting the accuracy and repeatability of leakage rate detection, thereby achieving the technical effect of improving the leakage rate accuracy and reliability of the suction gun device.

[0031] Meanwhile, in this embodiment, increasing the radial dimension of the first channel improves the ease of connection between the pipe 1 and the support structure 8.

[0032] Wherein, cross-section refers to Figure 3 The cross section in the vertical direction.

[0033] In addition, in this embodiment, pipe 1 is a tubular structure and is made of metal, and adjustment structure 2 is a shaft and is also made of metal.

[0034] Of course, in other embodiments, the materials of the pipe 1 and the shape of the adjustment structure 2 are adjusted according to the different designs of the suction gun device.

[0035] In addition, combined Figure 1 and Figure 2 As shown, in this embodiment, the suction gun device includes: The first fixing unit 3 includes a second channel. The first fixing unit 3 is fixedly connected to the pipe 1 so that the second channel is connected to the first channel.

[0036] By setting the first fixing unit 3, the position of the pipe 1 can be limited, thereby achieving the technical effect of improving the reliability of fixing the position of the pipe 1.

[0037] In this embodiment, the first fixing unit 3 is a shell-shaped structure. Of course, in other embodiments, the shape of the first fixing unit 3 may be adjusted depending on the design of the suction gun device.

[0038] Of course, in other embodiments, depending on the design of the suction gun device, the suction gun device may be limited to not including the first fixing unit 3.

[0039] In this embodiment, the method of fixing the first fixing unit 3 and the pipe 1 is not limited. As long as the connection between the first fixing unit 3 and the pipe 1 can be achieved, it is within the protection scope of this invention. As an alternative implementation, the first fixing unit 3 and the pipe 1 can also be detachably connected.

[0040] In addition, combined Figure 2 As shown, in this embodiment, the suction gun device includes: The filter unit 4 is located in the second channel and at the end of the second channel away from the pipe 1.

[0041] Of course, in other embodiments, depending on the design of the suction gun device, the filter unit 4 may not be provided. Compared with other embodiments, in this embodiment, air that has not passed through the filter unit 4 cannot enter the pipe 1, so that the filter unit 4 can filter the moisture and dust in the air, avoiding the moisture and dust from clogging the gap between the pipe 1 and the adjustment structure 2, which would cause the suction gun device to fail, thereby achieving the technical effect of improving the reliability of the suction gun device.

[0042] Furthermore, in this embodiment, combined with Figure 2 As shown, in this embodiment, the filtering unit 4 includes: The first filter structure 401 is located within the second channel; The second filter structure 402 is located at one end of the first filter structure 401 near the first channel and is spaced apart from the first filter structure 401.

[0043] By setting a first filter structure 401 and a second filter structure 402, the first filter structure 401 can perform coarse filtration of air, specifically adsorbing water and large particles in the dust in the air, while the second filter structure 402 can filter fine dust in the air.

[0044] The first filter structure 401 is a cotton filter element, and the second filter structure 402 is a sintered filter element.

[0045] Preferably, the first filter structure 401 and the second filter structure 402 are filled into the first channel so that the first filter structure 401 and the second filter structure 402 can be replaced after the suction gun device has been used for a period of time.

[0046] Of course, in other embodiments, the specific types of the first filter structure 401 and the second filter structure 402 can be adjusted according to the different designs of the suction gun device.

[0047] In other embodiments, depending on the design of the suction gun device, it may be that only the filter unit 4 includes the first filter structure 401, or only the filter unit 4 includes the second filter structure 402, both of which are within the protection scope of the present invention.

[0048] As an alternative implementation, it is also possible to limit only the first filter structure 401 to a cotton filter element, or to limit only the second filter structure 402 to a sintered filter element. Alternatively, the first filter structure 401 and the second filter structure 402 may be fixedly connected to the inner wall of the first channel, all of which are within the protection scope of this invention.

[0049] In addition, combined Figure 2 As shown, in this embodiment, the suction gun device includes: The second fixing unit 5 includes a third channel. The second fixing unit 5 is disposed in the second channel and connected to the pipe 1 so that the first channel, the second channel and the third channel are connected.

[0050] By setting the second fixing unit 5, the outer diameter of the pipe 1 can be increased to make it easier for the user to hold, thereby improving the reliability of the suction gun device.

[0051] In this embodiment, the second fixing unit 5 is a shell-like structure. Of course, in other embodiments, the structure of the second fixing unit 5 may be adjusted depending on the design of the suction gun device.

[0052] As an alternative implementation, the suction gun device may not include the second fixing unit 5.

[0053] Preferably, combined with Figure 2 As shown, the suction gun device includes: The sealing unit 6 includes a fourth channel. One end of the sealing unit 6 is located in the second channel, and the other end of the sealing unit 6 is located between the second fixing unit 5 and the pipe 1, and the pipe 1 is located in the fourth channel.

[0054] The sealing unit 6 is fitted between the second fixing unit 5 and the pipe 1. Because helium molecules are small, they easily remain in gaps. By setting the sealing unit 6, the sealing point between the second fixing unit 5 and the first fixing unit 3 can be achieved, increasing the sealing unit 6's position along the pipe. Figure 2 The difficulty of residual helium in the second channel on the left entering the pipe 1 is reduced, and residual helium between the second fixed unit 5 and the first fixed unit 3 is avoided from affecting the leak rate detection results. This ensures that the gas drawn in by the suction gun can only enter the pipe 1 through the first fixed unit 3, thereby improving the accuracy of the helium capture rate of the suction gun and thus improving the detection accuracy of the suction gun. In turn, this improves the recovery speed of the suction gun.

[0055] Specifically, a first positioning groove is provided on the inner wall of the second channel, and the sealing unit 6 is disposed in the first positioning groove and positioned by the first positioning groove. At the end of the sealing unit 6 furthest from the filter unit 4, a second positioning groove is provided on its outer surface. A third positioning groove communicating with the second positioning groove is provided on the inner wall of the second channel. The radial dimension of the third positioning groove is larger than that of the second positioning groove, so that the space enclosed between the second and third positioning grooves can accommodate the second fixing unit 5. Simultaneously, a fourth positioning groove is provided on the inner wall of the third channel, so that the fourth positioning groove can limit the radial position of the sealing unit 6. Based on this, the technical effect of improving the reliability of the radial position fixation between the first fixing unit 3, the sealing unit 6, and the second fixing unit 5 can be achieved.

[0056] Preferably, the first fixing unit 3 and the sealing unit 6, the first fixing unit 3 and the second fixing unit 5, and the sealing unit 6 and the second fixing unit 5 are all fixed by plugging in, so as to facilitate the replacement of the first fixing unit 3, the sealing unit 6 and the second fixing unit 5, thereby achieving the technical effect of improving the ease of maintenance of the suction gun device.

[0057] Of course, in other embodiments, depending on the design of the suction gun device, the fixed connection between the first fixing unit 3 and the second fixing unit 5, the first fixing unit 3 and the sealing unit 6, and the sealing unit 6 and the second fixing unit 5 are all within the protection scope of this invention.

[0058] Preferably, combined with Figure 1 As shown, in this embodiment, the suction gun device includes: The handle 7 is a shell-like structure. The handle 7 is fixedly connected to the first fixing structure and is used to protect the second fixing unit 5. The handle 7 is detachably connected to the outer surface of the pipe 1 through the support structure 8.

[0059] By setting the handle 7 and the support structure 8, the impact resistance of the suction gun device can be improved, thereby achieving the technical effect of improving the reliability of the suction gun device.

[0060] In this design, the handle 7 is detachably connected to the first fixing unit 3 via a thread, and the support structure 8 is snap-fitted to the pipe 1. This reduces assembly difficulty and cost, as well as maintenance difficulty. Of course, in other embodiments, depending on the design of the suction gun device, the handle 7 and the first fixing unit 3 may also be fixedly connected, and the support structure 8 may be fixedly connected to the pipe 1; all of these are within the scope of protection of this invention.

[0061] Additionally, it should be noted that in this embodiment of the suction gun device, two types of suction gun devices are described in detail. The parameters of the first type of suction gun device are as follows: when the radial dimension of the first channel is 0.254mm, the axial length of the first channel is 100mm, the diameter of the adjustment structure 2 is in the range of 0.12mm-0.14mm, and the axial length of the adjustment structure 2 is in the range of 15mm-60mm.

[0062] The parameters of the second suction gun device are as follows: when the radial dimension of the first channel is 0.3mm, the axial length of the first channel is 70mm, the diameter of the adjustment structure 2 is in the range of 0.13mm-0.18mm, and the axial length of the adjustment structure 2 is in the range of 10mm-60mm.

[0063] In related technologies, the inner diameter of the capillary is 0.254 mm, and its length is within the range of 200 mm to 300 mm. At this point, the capillary in the related technologies, the first suction gun device in this embodiment, and the second suction gun device in this embodiment have completely identical functions, including leakage rate. It can be understood that even if the cross-sectional area of ​​the first channel in pipe 1 in this embodiment is basically the same as the inner diameter cross-sectional area of ​​the capillary in the related technologies, the length of pipe 1 in this embodiment is less than the length of the capillary, achieving the technical effect of saving materials.

[0064] In this embodiment, pipe 1 achieves a stable leakage rate by limiting the flow conductance. Therefore, the leakage rate can be reflected by the flow conductance. Comparing the leakage rates of the first suction gun device, the second suction gun device, and capillary tubes in related technologies can be achieved by comparing the flow conductance. Specifically, in an environment of 20°C, the formula for calculating the flow conductance in this embodiment is:

[0065] in, Let L be the average pressure of the gas in pipe 1, L be the axial length of pipe 1, D1 be the inner diameter of the first channel, and D2 be the radial dimension of the adjustment structure 2.

[0066] The average pressure of the gas in pipe 1 can be measured. This technology is mature and will not be elaborated on here.

[0067] As an alternative implementation, it is also possible to limit only the parameters of the first suction gun device, or to limit only the parameters of the second suction gun device.

[0068] According to an embodiment of the present invention, in another aspect, a helium mass spectrometer leak detector is also provided, comprising: The suction gun device in this embodiment.

[0069] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A suction gun device, characterized in that, include: Pipeline (1), including the first channel; Adjust the structure (2) and place it inside the first channel, and space it apart from the inner wall of the first channel.

2. The suction gun device according to claim 1, characterized in that, The suction gun device includes: The first fixing unit (3) includes a second channel, and the first fixing unit (3) is fixedly connected to the pipe (1) so that the second channel communicates with the first channel.

3. The suction gun device according to claim 2, characterized in that, The suction gun device includes: The filter unit (4) is located in the second channel and at one end of the second channel away from the pipe (1).

4. The suction gun device according to claim 3, characterized in that, The filtering unit (4) includes: The first filter structure (401) is located within the second channel.

5. The suction gun device according to claim 4, characterized in that, The filtering unit (4) includes: The second filter structure (402) is located at one end of the first filter structure (401) near the first channel and is spaced apart from the first filter structure (401).

6. The suction gun device according to claim 5, characterized in that, The first filter structure (401) is a cotton filter element; And / or, the second filter structure (402) is a sintered filter element.

7. The suction gun device according to any one of claims 2-6, characterized in that, The suction gun device includes: The second fixing unit (5) includes a third channel. The second fixing unit (5) is disposed in the second channel and connected to the pipe (1) so that the first channel, the second channel and the third channel are connected.

8. The suction gun device according to claim 7, characterized in that, The suction gun device includes: The sealing unit (6) includes a fourth channel. One end of the sealing unit (6) is located in the second channel, and the other end of the sealing unit (6) is located between the second fixing unit (5) and the pipe (1). The pipe (1) is located in the fourth channel.

9. The suction gun device according to any one of claims 1-6, characterized in that, The adjustment structure (2) is a shaft; And / or, when the radial dimension of the first channel is 0.254 mm, the axial length of the first channel is 100 mm, the diameter of the adjustment structure (2) is in the range of 0.12 mm to 0.14 mm, and the axial length of the adjustment structure (2) is in the range of 15 mm to 60 mm; And / or, when the radial dimension of the first channel is 0.3mm, the axial length of the first channel is 70mm, the diameter of the adjustment structure (2) is in the range of 0.13mm-0.18mm, and the axial length of the adjustment structure (2) is in the range of 10mm-60mm.

10. A helium mass spectrometer leak detector, characterized in that, include: The suction gun device according to any one of claims 1-9.

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