Glass substrate cassette with permanent magnet damping member

Abstract

The glass substrate cassette with permanent magnet damping support cantilever of the present application comprises upper and lower frames with corresponding width and depth, left and right outer frame columns and rear frame column supported between the upper and lower frames to form a receiving space; the left and right outer frame columns are respectively provided with a plurality of short support rods extending into the receiving space, characterized in that the rear frame column is respectively provided with a plurality of support cantilevers with fixed end and free end, the free end is provided with permanent magnet damping part, the permanent magnet damping part is respectively provided with upper and lower magnetic poles, the arrangement direction of the magnetic poles is opposite to the other permanent magnet damping part of the free end of the upper and lower adjacent support cantilevers, so that when the free end deviates from a balance position and starts to vibrate, the permanent magnet damping part will be synchronously driven, and the combined magnetic restoring force from the upper and lower adjacent permanent magnet damping parts towards the balance position will make the free end return to the balance position more quickly.

Description

Technical Field

[0001] This invention relates to a glass substrate holder, and more particularly to a glass substrate holder with a support cantilever having a permanent magnet damping element. Background Technology

[0002] In the manufacturing of displays and other screens, to reduce mass production costs and improve output efficiency, current glass substrates tend to be larger. However, during the handling of large-area glass substrates, there are concerns about damage to substrates that are several meters long and wide but only millimeters thick, and also about preventing deformation. Therefore, in-factory handling often utilizes cassettes for batch transport. For example, the current G11 substrate has dimensions of 3000 x 3320 mm and a thickness of only 0.5 mm; even the smaller G8.5 substrate has dimensions of 2200 x 2500 mm.

[0003] Existing cartridges such as Figure 1 and Figure 2 As shown in invention patent CN103523401B, the main feature is that on the existing outer frame columns 3' and 4' on the left and right sides, side-paired and corresponding support members 72' are arranged at equal intervals, and a slot 40' is formed in the right outer frame column 4', in which a connecting rod 70' that can slide up and down is installed. A clamping member 71' is set on the connecting rod 70' corresponding to each support member 72'. When the forklift moves the glass substrate 100 into and out of the cassette, the connecting rod 70' is first pushed up, so that each clamping member 71' rises away from the corresponding support member 72', allowing the glass substrate 100 to be placed into the cassette one by one. After all the glass substrates are loaded, the cassette is lifted up, so that the connecting rod 70' falls relative to each other. Each clamping member 71' is pressed against the side of the glass substrate by gravity, so that the glass substrate is relatively positioned during the moving process.

[0004] As the glass substrate increases in size, its weight causes the central portion to sag, making the support from both sides insufficient. In severe cases, this can even cause substrate deformation. Therefore, in the aforementioned prior art, a rear support cantilever 8' is added. However, once the length of the single-sided cantilever 8' increases, it will oscillate due to stress when placing or removing the glass substrate. Especially since the rear support cantilever is fixed to the rear outer frame post, the oscillation is transmitted to the rear outer frame post and will also cause other rear support cantilever posts arranged parallel above and below to oscillate. If resonance occurs at a natural frequency, it is not easy to stop. This will also cause trouble when placing the next glass substrate. For safety reasons, the next glass substrate must be placed only after the oscillation stops.

[0005] Furthermore, the original spacing between the glass substrates in the cassette is only about 4 centimeters. Additional clamping components must be installed above the support members on both sides. Even if it only costs 1 centimeter in thickness, it undoubtedly further restricts the operating space when the forklift enters and exits, further limiting the allowable height for the glass substrates to enter and exit, and greatly increasing the risk of accidental collision damage. If we want to maintain a sufficient operating height for placement and retrieval, we must reduce the number of glass substrates stored in the same height cassette, which significantly affects the efficiency and yield of transportation.

[0006] Therefore, in another prior art CN205525452U, it is disclosed that the support rods extending in the front and rear directions are not only fixed unidirectionally to the rear outer frame column, but also multiple crossbars are laid between the two outer frame columns on the front side as a support mechanism, so that the front end of each support rod is also supported. However, since the front side, unlike the rear side, cannot use multiple longitudinal outer frame columns as support, it must maintain complete lateral unobstructedness. Therefore, when the glass substrate is expanded laterally to a width of more than 2 meters, the support rods must be increased to four or five longitudinal rows. However, the front outer frame columns only have a single suspended crossbar as support for the entire row of four or five support rods. If the crossbar itself occupies 1 centimeter of height, it also restricts the space height for forklifts to move forward and backward to pick up and put down the glass substrate, making it difficult to pick up and put down. Under long-term heavy use, the central part of the front crossbar will bend downward, which also seriously restricts the operation difficulty of forklifts to move forward and backward. In particular, due to the complex connection between the crossbar and multiple support rods, maintenance and replacement become increasingly difficult.

[0007] To avoid the limitations of existing technologies that rely primarily on short support members on the left and right sides, making them increasingly inadequate for handling larger panel areas, and to avoid the difficulties in placing and removing multiple crossbars on the front side, it is necessary to consider using a multi-column single-sided support cantilever structure. This would allow each glass substrate to be supported by multiple rear-fixed single-sided cantilever arms, thereby distributing the weight across each cantilever. However, considering both the lightweight design of the cartridge and the weight of the rear cantilever arms, choosing 2-3 meter long carbon fiber support cantilever arms would necessitate additional consideration of vibration issues.

[0008] Damping ratio (ξ) is a dimensionless quantity that measures the time it takes for a mechanical or structural system to return to equilibrium after being disturbed, as the vibrational energy decays. When a system is disturbed and moves away from its equilibrium position, it oscillates. This oscillation gradually decays until it returns to its original equilibrium position. Although the internal damping of carbon fiber can reach 1% to 3% (0.01 to 0.03), considering the glass substrate supporting it, the time required to return to equilibrium is prolonged. When the end is disturbed and vibrates up and down, the visible shaking can often last for more than a minute. This also limits the time interval between placing the two glass substrates into the cassette.

[0009] Therefore, the problem to be solved by this invention is how to make the oscillation energy of the supporting cantilever decay quickly and return to a state of equilibrium so as to facilitate the placement of the next glass substrate and improve the overall transportation efficiency. Summary of the Invention

[0010] One objective of this invention is to provide a glass substrate holder with a permanent magnet damping component for a support cantilever. By using the permanent magnet damping component installed at the free end of the support cantilever, a magnetic restoring force is provided when the support cantilever starts to vibrate, thereby accelerating energy consumption and shortening the time required to return to the equilibrium state.

[0011] Another objective of this invention is to provide a glass substrate holder with a permanent magnet damping component on a support cantilever. Through a simple support cantilever structure, it facilitates the entry and exit of forklifts, improves the efficiency of picking up and placing glass substrates, and reduces the probability of unnecessary collisions.

[0012] Another objective of this invention is to provide a glass substrate cassette with a permanent magnet damping component supporting a cantilever, which simplifies the front access structure of the cassette, thereby reducing the frequency of maintenance and shortening the time and labor required for maintenance.

[0013] To achieve the above objectives, this invention discloses a glass substrate holder with a permanent magnet damping component supporting a cantilever, comprising at least one upper frame and at least one lower frame. The upper frame and the lower frame have corresponding widths and corresponding depths. A plurality of left outer frame posts, right outer frame posts, and rear frame posts are supported between the upper frame and the lower frame, for relatively fixing the upper frame and the lower frame and forming an accommodating space. The left outer frame posts and right outer frame posts each extend into the accommodating space with a plurality of short support rods spaced at intervals. The rear frame posts each extend into the accommodating space with a plurality of support cantilever arms corresponding in number to the short support rods. Each support cantilever arm has a fixed end fixed to the rear frame post and a free end opposite to the fixed end. The arm length between the fixed end and the free end of the support cantilever arm is... Corresponding to the depth; and each of the supporting cantilever arms is respectively equipped with a permanent magnet vibration damper at its free end, the permanent magnet vibration damper having an upper magnetic pole and a lower magnetic pole respectively, the arrangement direction of the upper magnetic pole and the lower magnetic pole of each of the permanent magnet vibration dampers being opposite to the other permanent magnet vibration damper installed at the free end of the adjacent supporting cantilever arms, such that when the free end deviates from a balance position and vibrates relative to the fixed end, the permanent magnet vibration damper will be synchronously driven, the upper magnetic pole and the lower magnetic pole will respectively receive a repulsive force that increases due to approach and a repulsive force that decreases due to distance relative to the adjacent permanent magnet vibration dampers above and below, and the increased repulsive force will be greater than the decreased repulsive force, such that when the free end starts to vibrate, the permanent magnet vibration damper will be subjected to a magnetic restoring force exerted by the combined action of the adjacent permanent magnet vibration dampers above and below, which drives the supporting cantilever arm toward the balance position.

[0014] By using permanent magnet vibration dampers, when the free end of the support cantilever starts to vibrate, the permanent magnet vibration dampers at the free ends of the upper and lower adjacent support cantilever arms provide magnetic restoring force to resist the tendency to deviate from the equilibrium position during vibration. This allows each support cantilever arm to share the vibration energy that deviates from the equilibrium position, significantly shortening the time required for the overall structure to stop vibrating. This improves the efficiency of loading or unloading glass substrates in the cartridge. On the other hand, the simplified structure of the front inlet / outlet side also improves the efficiency of glass substrate loading and unloading and reduces the probability of collision damage. In particular, it reduces unnecessary downtime for maintenance and also reduces the frequency and workload of maintenance. This greatly improves the efficiency and yield of the cartridge when loading and unloading glass substrates and effectively reduces maintenance costs. Attached Figure Description

[0015] Figure 1 This is a perspective view of a prior art cartridge, illustrating the placement of the glass substrate.

[0016] Figure 2 for Figure 1 The enlarged view shows the correspondence between the existing support components and clamping components.

[0017] Figure 3 This is a three-dimensional structural diagram of the first preferred embodiment of the present invention.

[0018] Figure 4 A schematic diagram of the three-dimensional structure supporting the cantilever.

[0019] Figure 5 The diagram shows the three-dimensional structure supporting the free end of the cantilever, illustrating the correspondence between each permanent magnet damping component and each supporting cantilever.

[0020] Figure 6 for Figure 5 A schematic diagram of the structure of a single permanent magnet vibration damper.

[0021] Figure 7 This is a schematic diagram of the magnetic force interaction between the various permanent magnet damping components.

[0022] Figure 8 This is a three-dimensional structural diagram of the short support rod.

[0023] Explanation of reference numerals in the attached figures

[0024] 1… Upper frame 10… Upper impedance component

[0025] 2…lower frame 20…lower impedance component

[0026] 3…Left outer frame column 4…Right outer frame column

[0027] 3'...Left existing technology outer frame post; 4'...Right existing technology outer frame post; 40'...Slot; 5...Rear frame post

[0028] 6…accommodation space 7…short support rod

[0029] 70…Main body 70'…Connecting rod

[0030] 71'…Clamping component 72…Supporting part

[0031] 72'…Support member 74…Top support

[0032] 8'… Existing technology supports cantilever

[0033] 8…0th Support Cantilever

[0034] 81…First Support Cantilever

[0035] 8 m-1 …m-1th supporting cantilever

[0036] 8 m …mth supporting cantilever

[0037] 8 m+1 …m+1th supporting cantilever

[0038] 8 n-2 …the (n-2)th supporting cantilever

[0039] 8 n-1 …the (n-1)th supporting cantilever

[0040] 8 n …the nth supporting cantilever

[0041] 80… Fixed end

[0042] 82…Free End 82 n-1 …the (n-1)th free end

[0043] 9…0th permanent magnet vibration damper

[0044] 91…First permanent magnet vibration damper

[0045] 9 m-1 …m-1th permanent magnet vibration damping component

[0046] 9 m …mth permanent magnet vibration damping component

[0047] 9 m+1 …m+1th permanent magnet vibration damping component

[0048] 9 n-1 …the (n-1)th permanent magnet vibration damping component

[0049] 9 n …the nth permanent magnet vibration damping component

[0050] 90… the 0th upper magnetic pole

[0051] 901…First Upper Magnetic Pole

[0052] 90 m-1 …the (m-1)th upper magnetic pole

[0053] 90 m …the mth upper magnetic pole

[0054] 90 m+1 …the (m+1)th upper magnetic pole

[0055] 90 n-1 …the (n-1)th upper magnetic pole

[0056] 90 n …the nth upper magnetic pole

[0057] 92…Lower 0th Magnetic Pole

[0058] 921…First lower magnetic pole

[0059] 92 m-1 …the (m-1)th lower magnetic pole

[0060] 92 m …mth lower magnetic pole

[0061] 92 m+1 …the (m+1)th lower magnetic pole

[0062] 92 n-2 …the (n-2)th lower magnetic pole

[0063] 92 n-1 …the (n-1)th lower magnetic pole

[0064] 92 n …the nth lower magnetic pole

[0065] 94…Magnetic core 96…Rubber protective layer

[0066] F n …the nth magnetic repulsion force 100…glass substrate

[0067] F n-1 …the (n-1)th magnetic repulsive force

[0068] F n-2 …the (n-2)th magnetic repulsive force

[0069] F n-3 …the (n-3)th magnetic repulsion force Detailed Implementation

[0070] The above and other technical contents, features and effects of the present invention will be clearly presented in the following detailed description of preferred embodiments in conjunction with the accompanying drawings; furthermore, in each embodiment, the same elements will be indicated by similar reference numerals.

[0071] like Figure 3 As shown, a first preferred embodiment of a glass substrate cassette with a permanent magnet damping element supporting a cantilever according to the present invention is provided. The upper frame 1 and lower frame 2 have corresponding widths and depths; in this example, both the width and depth exceed 3 meters to accommodate the width and length of the glass substrate. A left outer frame post 3, a right outer frame post 4, and a rear frame post 5 are provided between the upper frame 1 and lower frame 2 to support and relatively fix the upper frame 1 and lower frame 2, thereby forming an accommodating space 6. Furthermore, the left outer frame post 3 and right outer frame post 4 each extend into the accommodating space 6 with a plurality of short support rods 7 spaced apart from each other. Corresponding to each short support rod 7, a 0th supporting cantilever 8 extends from the rear frame post 5 into the accommodating space 6. In this example, the 0th supporting cantilever 8 is primarily composed of carbon fiber.

[0072] Refer to together Figures 4 to 6 Each of the 0th support cantilever arms 8 has a fixed end 80 fixed to the rear frame column 5 and a free end 82 opposite to the fixed end 80. The length of the support cantilever arm between the fixed end 80 and the free end 82 corresponds to the depth of the accommodating space 6. In this example, the arm length is also more than 3 meters. It is composed of a hollow body molded from carbon fiber and a metal connector at the end for fixing. On the free end 82 side of each 0th support cantilever arm 8, a 0th permanent magnet vibration damper 9 is installed in the hollow body. For ease of explanation, the magnetic poles of each 0th permanent magnet vibration damper 9 are arranged in the vertical direction, with the upward magnetic pole called the 0th upper magnetic pole 90 and the downward end called the 0th lower magnetic pole 92.

[0073] In this example, on the front side of the upper frame 1, corresponding to the free end 82 of the 0th support cantilever 8, an upper impedance element 10 is installed, for example, with the upper part being the N pole and the lower part being the S pole. The 1st, ... m-1st, mth, m+1st, ... n-2nd, n-1st, and nth support cantilever arms below are labeled 81, ..., 8 from top to bottom. m-1 8 m 8 m+1 、…、8 n-2 8 n-1 8 n Among them, the first supporting cantilever 81 near the upper impedance component 10 has a first permanent magnet vibration damper 91 fixed to its free end with the S pole facing upward as the first upper magnetic pole 901 and the N pole facing downward as the first lower magnetic pole 921. Similarly, if the (m-1)th permanent magnet vibration damper 91 at the free end of the supporting cantilever... m-1 The m-1 upper magnetic pole 90 m-1It is the N pole, the (m-1)th lower magnetic pole, 92. m-1 If it is the S pole; then the adjacent m-th supporting cantilever 8 m The m-th permanent magnet vibration damper at the free end 9 m The mth upper magnetic pole 90 m It would be the S pole, the mth lower magnetic pole, 92. m That's the N pole; the next one is the (m+1)th supporting cantilever 8. m+1 The (m+1)th permanent magnet vibration damper at the free end 9 m+1 The (m+1)th upper magnetic pole 90 m+1 It would be the N pole, the (m+1)th lower magnetic pole, 92. m+1 That is, the S pole, arranged in the same reverse order until the bottom nth supporting cantilever 8. n If its nth upper magnetic pole is 90 n It is the S pole, the nth lower magnetic pole 92 n If it is an N pole, then a lower impedance component 20 is also provided at the corresponding position on the front side of the lower frame 2, and the installation method is that the N magnetic pole is on the top and the S magnetic pole is on the bottom.

[0074] In this example, the 0th permanent magnet damping component 9 includes, for example, a neodymium iron boron magnet core 94, with the 0th upper magnetic pole 90 and the 0th lower magnetic pole 92 respectively covered with steel. On the one hand, this strengthens the guidance of the magnetic field line distribution direction and increases the intensity of the magnetic force in the vertical direction. On the other hand, it improves the overall structural strength. The sides are protected by a non-magnetic material such as a rubber protective layer 96, which increases the overall service life of the permanent magnet damping component 9.

[0075] In this example, the (n-1)th supporting cantilever 8 above frame 2. n-1 For example, because the glass substrate is placed in, it causes it to oscillate up and down, that is, the (n-1)th free end 82 n-1 When vibration occurs relative to its fixed end, the (n-1)th permanent magnet vibration damper 9 n-1 It will be synchronously driven to break away from its original equilibrium position and begin to oscillate up and down. As shown by the dotted line, the (n-1)th lower magnetic pole is 92. n-1 It will be closer to the nth support cantilever below. n The nth upper magnetic pole at the free end 90 n The (n-1)th magnetic repulsion force F between the two n-1 It increases inversely with the square of the distance; conversely, the upper magnetic pole at 90 degrees... n-1 It will be further away from the (n-2)th supporting cantilever above. n-2 The (n-2)th lower magnetic pole at the free end 92 n-2 This causes the (n-2)th magnetic repulsive force F applied from above to... n-2 It decreases inversely with the square of the distance, causing the (n-1)th supporting cantilever to oscillate downwards. n-1The sum of the downward-increasing and upward-decreasing magnetic repulsive forces merges into an upward restoring force toward the equilibrium position; conversely, when the (n-1)th supporting cantilever 8 n-1 When vibrating upwards, the magnetic repulsive force increases above and decreases below, together forming a downward magnetic restoring force towards the equilibrium position. Furthermore, when the adjacent nth supporting cantilever 8... n Subjected to the (n-1)th adjacent permanent magnet damping element 9 n-1 When the vertical oscillation is affected, the (n-1)th lower magnetic pole is 92. n-1 It will periodically swing closer and further away from the free end, and will also drive the nth supporting cantilever 8. n Subject to the nth permanent magnet vibration damping component 9 n The transmitted magnetic repulsive force increases or decreases and oscillates slightly, that is, the (n-1)th supporting cantilever 8 n-1 The kinetic energy of the up-and-down vibration will, like ripples, successively change the (n-3)th and nth magnetic repulsive forces F above and below. n-3 and F n The energy is then distributed to each supporting cantilever in the same column above and below, forming a structural energy distribution.

[0076] As can be seen, in the example presented here, the second glass substrate 100 from the bottom up is placed on each of the supporting cantilever arms in the same horizontal row, resulting in the (n-1)th supporting cantilever arm 8 n-1 The kinetic energy of the vertical vibration will be generated by the 0th, ..., n-2nd, ..., nth supporting cantilever 81, ... 8 of each corresponding column. n-2 、 and 8 n The energy is gradually distributed and quickly absorbed by the structure and converted into heat energy. Such vibration energy can even be dispersed to the upper frame 1 and lower frame 2 by the magnetic repulsion force of the upper impedance element 10 and the lower impedance element 20, so that all the support cantilevers that have just received or released the glass substrate can stop the visible swaying more quickly, for example, in 0.5 to 1 second, and return to the equilibrium position more quickly.

[0077] like Figure 8As shown, each of the left outer frame pillar 3 or the right outer frame pillar 4 is provided with a short support rod 7. In this example, the short support rod 7 includes a main body 70 fixed to the left outer frame pillar 3 or the right outer frame pillar 4, and a support part 72 extending along the main body 70 into the aforementioned receiving space. The main body 70 and each support part 72 are integrally formed impact-resistant polymers, in this example, polycarbonate (PC), which provides excellent impact resistance and heat resistance. The support parts 72 are spaced apart from each other and extend parallel to each other. At the end of each support part 72 away from the main body 70, a low-wear top support part 74 is provided. In this example, the thermoplastic engineering plastic polyetheretherketone (PEEK) is used as its material, utilizing its wear resistance, high temperature resistance, fatigue resistance, and creep resistance to reduce the wear of the glass substrate cassette. Since the short support rod 7 is integrally formed in this example, the height of the main body 70 in the vertical direction is slightly equal to the height inside the cartridge, making the resistance arm the longest when supporting the weight of the glass substrate, thus providing optimal torque support.

[0078] Of course, as those skilled in the art can easily understand, the structure of the short support rod described above is not limited to the above embodiment, and the permanent magnet damping component is not limited to the material and structure of this example. Even if a neodymium iron boron magnet core is simply used, or a large number of small neodymium iron boron magnet cores covered with rubber are used as strips, the structural damping of the combined 0th support cantilever 8 and the 0th permanent magnet damping component 9 can be effectively improved, thereby increasing the loss of oscillation energy of all support cantilever oscillations in the cartridge and accelerating the system to return to a balanced state more quickly.

[0079] Furthermore, even if multiple individual short support rods are fixed on each of the left and right outer frame columns, each short support rod is, for example, a support part integrally formed from an impact-resistant polymer and a low-wear top support part located at the end of the support part; or it is changed to multiple short support rods integrally formed with the left and right outer frame columns, and a top support part is provided at the end of the short support rod, it is also a preferred embodiment of the present invention.

[0080] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify the above embodiments without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention should be determined by the claims.

Claims

1. A glass substrate holder with a permanent magnet damping element supporting a cantilever, comprising at least one upper frame and at least one lower frame, wherein the upper frame and the lower frame have corresponding widths and corresponding depths, and a plurality of left outer frame posts, right outer frame posts, and rear frame posts supported between the upper frame and the lower frame for relatively fixing the upper frame and the lower frame and forming a receiving space; the left outer frame posts and the right outer frame posts each extend into the receiving space and are provided with a plurality of short support rods spaced apart from each other, characterized in that: The rear frame column extends into the accommodating space and is provided with a plurality of support cantilever arms corresponding to the number of the short support rods. Each support cantilever arm has a fixed end fixed to the rear frame column and a free end opposite to the fixed end. The length of the support cantilever arm between the fixed end and the free end corresponds to the depth. as well as Each of the aforementioned support cantilever arms is equipped with a permanent magnet vibration damper at its free end. Each permanent magnet vibration damper has an upper magnetic pole and a lower magnetic pole. The arrangement direction of the upper and lower magnetic poles of each permanent magnet vibration damper is opposite to that of the other permanent magnet vibration damper installed at the free end of the adjacent support cantilever arms. This allows the permanent magnet vibration damper to be synchronously driven when the free end vibrates relative to the fixed end, as it deviates from an equilibrium position. The upper and lower magnetic poles will receive a repulsive force that increases due to proximity and a repulsive force that decreases due to distance from the adjacent permanent magnet vibration dampers, respectively. The increased repulsive force is greater than the decreased repulsive force. This allows the permanent magnet vibration damper to receive a magnetic restoring force exerted by the adjacent permanent magnet vibration dampers, which drives the support cantilever arm toward the equilibrium position. Furthermore, the kinetic energy of the vertical vibration of the support cantilever arm is sequentially distributed and transferred to each of the support cantilever arms above and below, forming a structural energy dispersion that is gradually shared and rapidly absorbed by the structure and converted into heat energy.

2. The glass substrate holder with a permanent magnet damping element supporting the cantilever according to claim 1, characterized in that, Each of the short support rods further includes a main body fixed to the left outer frame post or the right outer frame post, and at least one support extending along the main body into the receiving space.

3. The glass substrate holder with a permanent magnet damping element supporting the cantilever according to claim 2, characterized in that, Each of the main body portions extends with a plurality of spaced-apart and parallel support portions, and each of the support portions is provided with a low-wear top support portion at its end away from the main body portion.

4. The glass substrate holder with a permanent magnet damping element supporting the cantilever according to claim 3, characterized in that, Each of the main body portions and each of the support portions extending from the main body portions are integrally formed impact-resistant polymers, thereby maximizing the resistance arm when supporting the gravity of the glass substrate.

5. The glass substrate holder with a permanent magnet damping element supporting the cantilever according to claim 1, characterized in that... Each of the short support rods is integrally formed with the left outer frame column or the right outer frame column.

6. The glass substrate holder with a permanent magnet damping element for the supporting cantilever according to any one of claims 1 to 5, characterized in that, The permanent magnet damper has a neodymium iron boron magnet core.

7. The glass substrate holder with a permanent magnet damping element supporting the cantilever according to claim 6, characterized in that, The permanent magnet damping component also includes upper and lower steel magnetic poles respectively disposed above and below the neodymium iron boron magnet core.

8. The glass substrate holder with a permanent magnet damping element supporting the cantilever according to claim 6, characterized in that, The permanent magnet vibration damping component also includes a rubber protective layer that covers the neodymium iron boron magnet core, the upper magnetic pole, and the lower magnetic pole respectively.

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