Method and apparatus for dispensing gas into container

Abstract

A method and a rinse flow distribution module for controlling a flow of a rinse gas into a substrate container are provided. The purge flow distribution module includes a purge module including an inlet for receiving a flow of purge gas, a check valve for adjusting a flow direction of the purge gas, a filter, and a filter holder. A diffuser holder and a diffuser device may be attached to the filter holder. The flushing module may provide a portion of a flow to the diffusion device, and a second portion of the flow may exit the flushing module. The flushing module may be mounted into a housing to define a chamber. The chamber may receive the second portion of the flow and direct the second portion of the flow to another diffusion device.

Description

Technical Field

[0001] This disclosure relates to methods and systems for controlling or distributing gases into containers. More specifically, this disclosure relates to a flushing flow distribution system for controlling or distributing flushing gases into substrate containers and modules thereof. Background Technology

[0002] Substrates in wafer form can be processed to form semiconductor devices. Wafer substrates (or simply substrates) undergo a series of process steps. Exemplary process steps may include, but are not limited to, deposition, doping, etching, or chemical or physical reactions of the substrate material. Substrate containers are used to store and transport wafers in process between process steps within a manufacturing facility. During some process steps, substrates are processed by processing equipment within a clean environment (e.g., a cleanroom). During processing (e.g., during a rinsing process), gases must be introduced into and removed from the substrate container (e.g., a front-opening wafer cassette (FOUP)), thus requiring the FOUP to have one or more locations where rinsing gases can enter or exit. Substrates can be transferred from the substrate container to a processing tool via an Equipment Front-End Module (EFEM). An EFEM typically includes a loading port for receiving the substrate container, transfer units, frames or a “mini-environment,” and fan filter units for generating airflow within the EFEM.

[0003] In use, the substrate container can be docked to the loading port. Then, the door is detached from the substrate container, allowing the transfer unit housed within the EFEM to receive the substrate contained within the substrate container for processing. Airflow introduced by the fan filter unit flows through the EFEM from top to bottom. When the front opening of the substrate container interfaces with the loading port opening of the EFEM, some gas flowing through the EFEM and across the loading port opening can be unintentionally diverted into the interior of the container, potentially interfering with the flushing capability of the substrate container by temporarily increasing the relative humidity or oxygen content within the microenvironment of the substrate container, which may be undesirable.

[0004] Rinsing gases can be used to remove or prevent the ingress of contaminants to protect substrates and improve the yield of those substrates (e.g., wafers). Rinsing gases are typically supplied by diffusers (e.g., diffuser towers) configured to receive rinsing gases at each port, providing a standard flow rate based on the supply of rinsing gas to the port. The diffusers are mounted in the substrate container by placing them in a container and attaching them to fittings disposed inside the wafer container. Rinsing assemblies can direct the received flow of rinsing gas to diffusers at specific locations within the wafer container.

[0005] Containers used in substrate processing can be flushed with suitable flushing gases to remove humid air or other potential contaminants, protecting wafers and improving the yield of those substrates. Flushing assemblies can be used to provide flushing to the interior of the container. Flushing assemblies for substrate containers (e.g., front-opening wafer cassettes (FOUPs)) typically comprise multiple discrete components, including grommets, valves (e.g., check valves), and various sealing elements. The diffuser is mounted to the flushing assembly once it is installed in the substrate container by placing the diffuser inside and attaching it to fittings located within the container. The flushing assembly directs the received flow of flushing gas to the diffuser at a specific location within the substrate container. Filters are typically held in place by fastening them into appropriate positions within a filter element, which is then included in the flushing assembly. The filter is typically circular in shape. Summary of the Invention

[0006] This disclosure relates to methods and systems for controlling or distributing rinsing for substrate containers (e.g., wafer or photomask carrier containers, such as FOUPs or cassettes (e.g., photomask cassettes) used in semiconductor manufacturing). More specifically, this disclosure relates to a rinsing flow distribution system for controlling or distributing the flow of rinsing gas into substrate containers and their modules.

[0007] The flushing module can be configured to filter the received stream and direct a first portion of the filtered received stream to a diffuser, and direct a second portion of the filtered received stream to another space. This allows the second portion to be directed to another structure for introduction into the substrate container, thereby allowing the flushing operation in the substrate container to be improved by an additional point of introduction of flushing gas.

[0008] The rinsing module can be configured such that the diffuser can be attached before being attached to the substrate container, and the substrate container and rinsing module can be configured such that the assembled diffuser and rinsing module can be inserted from outside the housing of the substrate container into the internal space of the housing to mount the rinsing module and diffuser into the substrate container. This allows the insertion of the rinsing module and diffuser without performing any operations inside the housing of the substrate container. This reduces the possibility of installation errors and / or reduces particle generation or contaminant accumulation within the housing of the substrate container. This, in turn, reduces wafer loss and improves the yield from processes using substrate containers that include such rinsing modules and diffusers.

[0009] In one embodiment, a filter with openings can be used, allowing some components of the flushing module to extend through the filter, thus reducing the overall length of the flushing module. This allows, for example, the use of a larger check valve, thereby allowing a larger flushing flow without causing problems such as rises, pressure spikes, or the like, and thus improving flushing effectiveness.

[0010] In one embodiment, a method is provided for distributing a stream of rinsing gas into a substrate container. The method includes receiving a stream of rinsing gas at an inlet of a rinsing module and supplying the rinsing gas from an outlet of the rinsing module into a chamber formed by a combination of the rinsing module and a gas distributor, the gas distributor having at least one outlet. The method further includes dividing the rinsing gas into at least a first flow path within the chamber to supply the rinsing gas to the at least one outlet of the gas distributor.

[0011] In another embodiment, a flushing gas assembly is provided for supplying flushing gas to a substrate container. The flushing gas assembly includes: a gas distributor including at least one outlet; and a flushing module including an inlet, a check valve, and an outlet for receiving a flow of the flushing gas. The combination of the gas distributor and the flushing module forms a chamber, and the chamber is configured to supply the flushing gas to the at least one outlet of the gas distributor.

[0012] In another embodiment, a method for assembling a substrate container having a gas distribution device is provided. The method includes: attaching a flushing gas assembly to a bottom wall of the substrate container, wherein the flushing gas assembly includes a gas distributor having at least one outlet; assembling a flushing module including an inlet, a check valve, and an outlet for receiving a flow of flushing gas; and inserting the flushing module into the gas distributor to form a chamber such that the chamber is configured to supply the flushing gas to the at least one outlet, wherein the method is performed outside the substrate container.

[0013] Therefore, as discussed herein, a substrate container or a flushing gas assembly having a flushing gas assembly has at least the following advantages:

[0014] A structure configured to deliver flushing gas from an existing post-flushing gas inlet location to a front gas distribution device (e.g., a manifold or diffuser), wherein the flushing gas is delivered to the front gas distribution device via or along a substrate container housing.

[0015] A structure configured to control or distribute flushing gas from a post-flushing gas inlet location to the front of a substrate container by dividing or redirecting portions of the flushing gas, such that the amount of flushing gas can be adjusted for optimal performance.

[0016] A method for conveying or controlling a flow of rinsing gas from an inlet location to a gas distribution device inside a substrate container, and particularly from a post-rinsing module to a front gas distribution device.

[0017] In one embodiment, a flushing module includes a grommet, a check valve at least partially received in the grommet, and a module body. The module body includes a cavity configured to receive the grommet and the check valve. The module body defines one or more channels from the cavity. The flushing module further includes a filter and a filter holder. The filter holder and the module body are configured to house the filter. The flushing module also includes a diffuser holder configured to support a diffuser. The diffuser holder includes a diffuser inlet. The filter holder and the diffuser holder are configured such that a first portion of a flow of gas through the filter enters the diffuser inlet and a second portion of the flow of gas through the filter passes through one or more orifices defined by one or both of the filter holder and the diffuser holder.

[0018] In one embodiment, the rinsing module further includes the diffuser. In one embodiment, in a plan view, the diffuser is entirely within the periphery of the module body.

[0019] In one embodiment, the module body includes a protrusion extending from a surface, the surface including an end of at least one of the one or more channels. In another embodiment, a portion of the cavity is defined by the protrusion, and a portion of the check valve extends into said portion of the cavity.

[0020] In one embodiment, the filter includes an opening defined by an inner periphery, the opening being configured to receive the protrusion. In another embodiment, the filter holder and the module body are configured such that when the filter holder and the module body are snapped together, the filter holder and the module body clamp the filter along the entire inner periphery and along the entire outer periphery of the filter.

[0021] In one embodiment, the module body includes a groove disposed on the outer surface of the module body, and the flushing module further includes a lip seal or O-ring disposed in the groove.

[0022] In one embodiment, the flushing module includes a module holder configured to engage with one or more features of the substrate container.

[0023] In one embodiment, the module body and the filter holder are configured to engage via snap-fit.

[0024] In one embodiment, a method of directing purging gas into a substrate container includes: receiving the purging gas at a grommets of a purging module; directing the purging gas through a check valve into a cavity defined in a module body of the purging module; directing the purging gas from the cavity into a filter through one or more channels in the module body; directing a first portion of the purging gas from the filter into a diffuser, the diffuser being held in a diffuser holder contained in the purging module; and directing a second portion of the purging gas out of the purging module through one or more orifices defined by one or both of the filter holder and the diffuser holder.

[0025] In one embodiment, the second portion of the flushing gas is directed into a chamber surrounding the flushing module, and the method further includes directing the second portion of the flushing gas from the chamber into a second diffuser.

[0026] In an embodiment, the flow rate of the flushing gas received at the grommet is in the range of 500 standard L / min or less.

[0027] In one embodiment, a method includes assembling a flushing module. Assembling the flushing module includes attaching a check valve to a grommets; inserting the grommets into a module body; clamping a filter between the module body and a filter retainer; and attaching a diffuser retainer to the filter retainer. The diffuser retainer includes a diffuser inlet.

[0028] In an embodiment, the filter holder and the diffuser holder are configured such that a first portion of the gas flow through the filter enters the diffuser inlet and a second portion of the gas flow through the filter passes through one or more orifices defined by one or both of the filter holder and the diffuser holder.

[0029] In one embodiment, the method further includes attaching a diffuser to the diffuser holder. In another embodiment, the method further includes inserting the diffuser from outside the substrate container through a hole provided on the substrate container and inserting the rinsing module into the hole, such that at least a portion of the rinsing module is received within the hole. In another embodiment, the hole is formed by the outer shell and bottom plate of the substrate container.

[0030] In one embodiment, the method further includes attaching a locking ring to the module body such that the locking ring is rotatable independently of the module body. In another embodiment, the method further includes inserting the rinsing module from outside the substrate container into an aperture disposed on the substrate container, such that at least a portion of the rinsing module is received within the aperture, and rotating the locking ring such that the locking ring engages one or more engagement features disposed at the aperture.

[0031] In one embodiment, a flushing module includes a grommet, a check valve at least partially received in the grommet, and a module body. The module body includes a cavity configured to receive the grommet and the check valve. The module body defines one or more channels from the cavity. The flushing module further includes a filter and a filter holder. The filter holder and the module body are configured to receive the filter. The module body includes a protrusion extending from a surface, and the surface includes an end of at least one of the one or more channels. The filter includes an opening defined by an inner periphery, the opening being configured to receive the protrusion.

[0032] In one embodiment, a portion of the cavity is defined by the protrusion, and a portion of the check valve extends into that portion of the cavity.

[0033] In one embodiment, the filter holder and the module body are configured such that when the filter holder and the module body are snapped together, the filter holder and the module body clamp the filter along the entire inner periphery and along the entire outer periphery of the filter.

[0034] In one embodiment, the flushing module further includes a diffuser retainer configured to support the diffuser, the diffuser retainer including a diffuser inlet.

[0035] In an embodiment, the filter holder and the diffuser holder are configured such that a first portion of the gas flow through the filter enters the diffuser inlet and a second portion of the gas flow through the filter passes through one or more orifices defined by one or both of the filter holder and the diffuser holder.

[0036] In one embodiment, the rinsing module further includes the diffuser. In one embodiment, in a plan view, the diffuser is entirely within the periphery of the module body.

[0037] In one embodiment, the module body includes a groove disposed on the outer surface of the module body, and the flushing module further includes a lip seal or O-ring disposed in the groove.

[0038] In one embodiment, the flushing module includes a module holder configured to engage with one or more features of the substrate container.

[0039] In one embodiment, the module body and the filter holder are configured to engage via snap-fit.

[0040] In one embodiment, a method includes assembling a flushing module. Assembling the flushing module includes attaching a check valve to a grommets and inserting the grommets into a module body. The module body includes a surface with protrusions. The method further includes positioning a filter with an opening such that the protrusions extend through the opening, and attaching a filter retainer to the module body such that the filter retainer and the module body clamp the filter at an outer periphery and an inner periphery of the filter. The inner periphery defines the opening.

[0041] In one embodiment, the method further includes attaching a diffuser holder to the filter holder, wherein the diffuser holder includes a diffuser inlet. In another embodiment, the filter holder and the diffuser holder are configured such that a first portion of a flow of gas through the filter enters the diffuser inlet and a second portion of the flow of gas through the filter passes through one or more orifices defined by one or both of the filter holder and the diffuser holder. In another embodiment, the method further includes attaching the diffuser to the diffuser holder. In yet another embodiment, the method further includes inserting the diffuser from outside the substrate container through an orifice disposed on the substrate container and inserting the flushing module into the orifice, such that at least a portion of the flushing module is received within the orifice.

[0042] In one embodiment, the method further includes attaching a locking ring to the module body such that the locking ring is rotatable independently of the module body. In another embodiment, the method further includes inserting the rinsing module from outside the substrate container into an aperture disposed on the substrate container, such that at least a portion of the rinsing module is received within the aperture, and rotating the locking ring such that the locking ring engages one or more engagement features disposed at the aperture.

[0043] In one embodiment, the filter holder and the module body clamp the filter over the entire outer periphery of the filter and over the entire inner periphery of the filter.

[0044] In this embodiment, the filter holder and the module body are engaged by snap-fit.

[0045] In one embodiment, the module body defines a cavity, a portion of which is defined by the protrusion, and a portion of the check valve extends into that portion of the cavity.

[0046] In one embodiment, a flushing assembly for a substrate container includes a housing defining a chamber and a flushing module. The flushing module includes a grommet, a check valve at least partially received in the grommet, and a module body. The module body includes a cavity configured to receive the grommet and the check valve. The module body defines one or more channels from the cavity. The flushing module further includes a filter and a filter holder. The filter holder and the module body are configured to house the filter. The flushing module is configured to receive a flow of flushing gas, direct the flow of flushing gas to the filter via the check valve, and allow at least a portion of the flow of flushing gas to pass from the flushing module into the chamber.

[0047] In one embodiment, the rinsing module further includes a diffuser configured to extend from the housing. In another embodiment, the diffuser is held within the housing. In yet another embodiment, the rinsing module contacts the diffuser such that the diffuser is held within an opening disposed in the housing. In yet another embodiment, the rinsing module further includes a diffuser holder further configured to support the diffuser.

[0048] In one embodiment, the substrate container includes a flushing assembly. The flushing assembly includes a housing and a flushing module. The housing and the flushing module define a chamber. The flushing module includes: a grommet; a check valve at least partially received within the grommet; a module body including a cavity configured to receive the grommet and the check valve, the module body defining one or more channels from the cavity; a filter; and a filter holder. The filter holder and the module body are configured to house the filter. The flushing module is configured to receive a flow of flushing gas, direct the flow of flushing gas to the filter via the check valve, and allow at least a portion of the flow of flushing gas to pass from the flushing module into the chamber.

[0049] In one embodiment, the substrate container further includes a diffuser configured to extend from the housing into the interior space of the substrate container. In another embodiment, the diffuser is held within the housing. In yet another embodiment, the flushing module contacts the diffuser such that the diffuser is held within a pore disposed within the housing.

[0050] In one embodiment, the rinsing module further includes a diffuser holder configured to support the diffuser. In another embodiment, the rinsing module further includes the diffuser, wherein the diffuser extends through the housing and into the interior space of the substrate container.

[0051] In one embodiment, the module body includes a protrusion extending from a surface that includes an end of at least one of the one or more channels, a portion of the cavity is defined by the protrusion, a portion of the check valve extends into the portion of the cavity, and the filter includes an opening defined by an inner periphery configured to receive the protrusion. Attached Figure Description

[0052] Figure 1 An exploded view of a substrate container with a flushing gas assembly according to an embodiment is shown.

[0053] Figure 2A and 2B An exploded view illustrating the assembly of the flushing gas assembly according to an embodiment.

[0054] Figure 3 A cross-sectional view is shown of a flushing gas assembly and a flushing module for receiving flushing gas according to an embodiment.

[0055] Figure 4A , 4B 4C shows a flushing gas assembly attached to a carrier plate according to an embodiment.

[0056] Figure 5 A flowchart illustrating the control of the flow of flushing gas via a flushing gas assembly according to an embodiment is provided.

[0057] Figure 6 A flowchart illustrating an embodiment for assembling a substrate container with a flushing gas assembly is provided.

[0058] Figure 7A An exploded view of the rinsing module according to an embodiment is shown.

[0059] Figure 7B An exploded view of the rinsing module according to an embodiment is shown.

[0060] Figure 8 A cross-sectional view of the flushing module according to an embodiment is shown.

[0061] Figure 9A A cross-sectional view of the rinsing module at the inner circumference of the filter is shown according to an embodiment.

[0062] Figure 9B Demonstrates the outer circumference of the filter according to an embodiment. Figure 9AA cross-sectional view of the flushing module.

[0063] Figure 10 A flowchart illustrating a method for assembling a flushing module according to an embodiment.

[0064] Figure 11 A flowchart illustrating the flow of flushing gas through the flushing module according to an embodiment. Detailed Implementation

[0065] Although the terms “front” and “back” and “right” and “left” are used herein to describe various elements, the elements are not limited by these terms. Specifically, the terms are used only to distinguish one element from another. Alternatively, the terms are broadly interpreted to include any positional relationship between elements, including front, back, side, top, bottom, or any combination thereof, without departing from the scope of this disclosure.

[0066] As used in this specification and the appended claims, the singular forms “a / an” and “the” include the plural references unless otherwise clearly indicated. As used in this specification and the appended claims, the term “or” is generally used in the sense that it includes “and / or” unless otherwise clearly indicated.

[0067] The following detailed description should be read with reference to the figures, in which similar elements in different figures are numbered the same. The detailed description and figures are not necessarily to scale and depict illustrative embodiments and are not intended to limit the scope of the invention. The illustrative embodiments depicted are intended to be exemplary only. Selected features of any illustrative embodiment may be incorporated into additional embodiments unless expressly stated otherwise.

[0068] This disclosure relates to methods and systems for controlling or distributing rinsing gases for substrate containers (e.g., wafer or photomask carrier containers, such as front-opening wafer cassettes (FOUPs) or cassettes (e.g., photomask cassettes) used in semiconductor manufacturing). A substrate container is a container used to carry a substrate during various processing steps, wherein the substrate may be in the form of a wafer, photomask, panel, or tray that can be processed to form a semiconductor device. The substrate container is accessed through a front opening. More specifically, this disclosure relates to a rinsing gas assembly for controlling or distributing the flow of rinsing gas into a substrate container, wherein the rinsing gas assembly is configured to supply a flow of rinsing gas into the interior space of the substrate container by dividing the rinsing gas flow and preferably into a first flow path to supply a first gas distribution device and a second flow path to supply a second gas distribution device. In some embodiments, the rinsing gas assembly may be configured to prevent gas from entering the front opening of the substrate container when the substrate container is open or to act as an outlet to facilitate the discharge of rinsing gas from the substrate container when the substrate container is closed.

[0069] Figure 1An exploded view is shown of a substrate container 100, a carrier (or conveyor) plate 115, and a flushing gas assembly 120 for supplying flushing gas to the substrate container 100 according to an embodiment. In an embodiment, the flushing gas assembly 120 may be configured to filter the received stream of flushing gas and direct a first portion of the flushing gas to a first gas distribution device, and a second portion of the flushing gas to at least a second gas distribution device to allow for improved flushing operations in the substrate container through additional points of flushing gas introduction, as further discussed below. In some embodiments, components of the flushing gas assembly 120 may include one or more of a flushing module, a gas distribution device, a control valve, piping, etc. In some embodiments, some components (e.g., the flushing module) may be assembled or attached separately from the flushing gas assembly 120, for example, modular components. Thus, at least a portion of the flushing gas assembly 120 may be pre-assembled on the carrier plate 115 and attached to the substrate container 100. In some embodiments, the flushing module can be assembled or attached to the flushing gas assembly 120 after it has been attached to the substrate container 100, such that the flushing module can be installed into the substrate container 100 without requiring (or minimally requiring) any operation within the container body 102 of the substrate container 100. By being able to install some components of the flushing gas assembly 120, and specifically the flushing module, from outside the substrate container 100, this installation reduces the likelihood of installation errors or reduces particle generation or contaminant accumulation within the container body or housing of the substrate container. This, in turn, reduces substrate (e.g., wafer) loss and improves yield from processes using substrate containers that include the flushing gas assembly or gas distribution device. In some embodiments, the flushing gas assembly 120 may be configured such that it includes any of its components, including any gas distribution device, such as a diffuser or manifold, attached together prior to attachment to the substrate container 100. In other embodiments, the different components of the flushing gas assembly 120 may be modular, wherein different components can be removed or modified as needed.

[0070] Return to reference Figure 1 The substrate container 100 includes a container body 102 and a front door 103. The substrate container 100 is a container configured to receive one or more substrates for transport, storage, or handling. The substrates housed in the substrate container 100 may be, for example, semiconductor substrates, such as wafers. The substrate container 100 may be any suitable container for substrates, such as a front-opening wafer cassette (FOUP). In an embodiment, the substrate container 100 may be a container for a photomask, such as a photomask cassette. In this embodiment, the container body 102 may include at least a portion of an outer casing configured to receive an inner casing.

[0071] The container body 102 defines an internal space 104 configured to accommodate one or more substrates (e.g., wafers) for processing. A front opening, for example, via a removal front door 103, allows substrates to be inserted into or removed from the container body 102. The container body 102 includes a first sidewall 105, a second sidewall 106, a rear wall 107, a top wall 108, and a bottom wall 109. The substrate container 100 may include a plurality of inlet flush ports 110 or outlet flush ports 110 corresponding to inlets or outlets of the substrate container 100 on the bottom wall 109 or the first and second sidewalls 105 and 106. The plurality of inlet flush ports 110 (and outlet flush ports) may be connected to a flush gas assembly 120, as further discussed below. At least one outlet port 110 may be configured to discharge gas from the substrate container 100 into the internal space 104 and may be disposed in the bottom wall 109. It should be understood that the inlet flush port 110 or the outlet flush port 110 may also be provided in different locations along the container body 102, such as in the rear wall 107.

[0072] The substrate container 100 may also include top automation features, such as a hookup 112 on the top wall of the container body 102. In an embodiment, the hookup 112 may allow standard automation attachments (not shown) for moving the substrate container 100 (e.g., but not limited to, automated arms) to be attached to the substrate container 100. For example, an automated arm may be used to move the substrate container 100 between different processing equipment. In an embodiment, the substrate container 100 may include one or more handles (not shown) to allow a user (e.g., a technician, etc.) to manually move the substrate container 100.

[0073] The carrier plate 115 can provide a base to which the container body 102 can be attached or to which the flushing gas assembly 120 can be attached. The carrier plate 115 can be a base plate having an automated interface configured to attach to a delivery system for handling substrates or assembling the substrate container 100.

[0074] The flushing gas assembly 120 may be attached to or integrally formed with the top surface of the carrier plate 115. In one embodiment, a portion of the flushing gas assembly 120 may be positioned within the container body 102. In another embodiment, the flushing gas assembly 120 may be positioned adjacent to the container body 102. In yet another embodiment, the flushing gas assembly 120 may be at least partially disposed between the container body 102 and the carrier plate 115. While the flushing gas assembly 120 is described herein as being attached to the carrier plate 115, this disclosure is not intended to be limiting. In another embodiment, the flushing gas assembly 120 may be attached to the bottom wall of the substrate container 102 or disposed between the substrate container 100 and the carrier plate 115.

[0075] The flushing gas assembly 120 is configured to distribute flushing gas to one or more gas distribution devices. The flushing stream can be any suitable gas that does not contaminate the environment within the container body 102. Non-limiting examples of flushing stream gases may be nitrogen, clean dry air (CDA), or the like. The flushing gas assembly 120 includes a gas distributor 130 configured to receive a flushing module (e.g., flushing module 230 described below and shown in Figure 2), as discussed in further detail below. The flushing module 230 may have an inlet for receiving a stream of flushing gas, a check valve for regulating the flow direction of the flushing gas, and an outlet for supplying flushing gas. The flushing module 230 may be configured such that a first gas distribution device 140 (e.g., a diffuser or manifold) can be attached to the flushing module 230. In some embodiments, the flushing gas assembly 120 may include at least two flushing modules 230 for providing flushing gas to first and second sides of the substrate container 100, wherein each of the flushing modules 230 is configured to supply flushing gas to a rear gas distribution device for a rear portion of the substrate container 100, a front gas distribution device 180 for a front portion of the substrate container 100, or other flushing ports on the substrate container 100. In some embodiments, the flushing gas assembly 120 may be configured such that a first gas distribution device 140 may be directly attached to the flushing gas assembly 120 or a portion thereof to provide flushing gas inside the substrate container 100.

[0076] In some embodiments, the flushing gas assembly 120 may further include: a control valve connected to the flushing module 230, wherein the control valve is configured to control the distribution of the flushing gas flow; and a conduit 170 for connecting the flushing module 230 to at least one front gas distribution device to distribute the flushing gas to the front of the substrate container 100. It should be understood that while the flushing gas assembly 120 is discussed herein as including a control valve, this disclosure is non-limiting, as other means may be used to control or regulate the flow of flushing gas through the flushing gas assembly 120 to the front gas distribution device. For example, in some embodiments, orifices with smaller or larger cross-sectional areas, spring-loaded deflectors, or conduits or piping / pipelines may be used to regulate the flow of flushing gas.

[0077] Figure 2A and 2B These are exploded views and partial cross-sectional views of an example embodiment of an assembly of a substrate container 200 having a flushing gas assembly 220, the flushing gas assembly 220 possibly having... Figure 1The flushing gas assembly 220 has the same or similar features as the flushing gas assembly 120. The substrate container 200 has at least an internal space 204, a rear wall 207, and a bottom wall 209, wherein the bottom wall 209 includes at least an inlet flushing port 210 for receiving a gas distribution device (e.g., a diffuser or manifold 240). At least some components of the flushing gas assembly 220 are attachable to the top surface of the carrier plate 215 and include a flushing module 230.

[0078] The flushing gas assembly 220 includes a gas distributor 222 having one or more outlets, wherein the gas distributor 222 is configured to receive the flushing module 230. In embodiments, the gas distributor may be an inflation chamber, a manifold, or other gas distribution structure and may have: a first outlet defining a first flow path for guiding a first portion of the flushing gas to a first opening 224, for example, via an input flushing port 210, to a rear portion of the substrate container 200; and a second outlet defining a second flow path for guiding a second portion of the flushing gas to a second opening 226 to distribute the flushing gas to a front portion (not shown) of the substrate container 200. When the flushing module 230 is inserted into the gas distributor 222, the combination of the flushing module 230 and the gas distributor 222 forms a chamber, which is fluidly sealed such that the combination of the flushing module 230 and the gas distributor 222 forms an inflation chamber, manifold, or other gas distribution device, wherein flushing gas from the outlet of the flushing module 230 is received in the enclosed space or volume of the chamber for dividing a first flow path to a first outlet of the gas distributor and a second flow path to a second outlet of the gas distributor.

[0079] In one embodiment, the combination of gas distributor 222 and flushing module 230 is configured such that a second portion of the flushing gas flow received via the inlet of flushing module 230 is received in the chamber and directed via the outlet of flushing module 230 to a second opening 226, while a first portion of the flushing gas flow is diverted or directed via a first opening 224 from the outlet of flushing module 230 (e.g., diffuser holder or diffuser inlet) to a post-diffuser 240 to distribute flushing gas in the rear portion of substrate container 200 via input flushing port 210. In another embodiment, pressurization of the chamber can be controlled by a control valve connected to a second outlet of gas distributor 222 at the second opening 226. For example, by adjusting or controlling the control valve to regulate or distribute the gas flow in a second flow path, some flushing gas flows through the control valve and some through the first opening 224, for example, the post-diffuser 240. Therefore, the flushing gas is divided or distributed within the chamber to supply the flushing gas, for example, via the second opening 226 to the front diffuser and via the first opening 224 to the rear diffuser to distribute the flushing gas into the interior space 204. While not intended to be limiting, at least one gas distribution device is described as both a rear gas distribution device or diffuser and a front gas distribution device or diffuser. It should be understood that more than two gas distribution devices may be used at various locations of the substrate container 200 or at plugged or capped portions of the flushing gas assembly (e.g., excluding gas distribution devices for distributing flushing gas into the substrate container 200).

[0080] Return to reference Figure 2A and 2BThe assembly of the substrate container 200 having the flushing gas assembly 220 is discussed below. As discussed above, in some embodiments, the flushing gas assembly 220 or components thereof may be pre-assembled. For example, in one embodiment, the flushing gas assembly 220 is attached to the top surface of a carrier plate 215, some of its components (e.g., piping, control valves, gas distributor 222, or the like) being assembled to the top surface of the carrier plate 215. The carrier plate 215 (or the flushing gas assembly 220 alone) may be attached to the bottom wall 209 of the substrate container 200. It should be understood that the attachment of the carrier plate 215 to the substrate container 200 can be securely secured, for example, using tabs, screws, or other fastening devices, and can be detached or removably attached as needed. After attaching the carrier plate 215 having the flushing gas assembly 220 to the substrate container 200 (e.g., integrally manufactured, wherein the carrier plate 215 is formed as the base plate of the substrate container 200), the flushing module 230 is inserted into the flushing gas assembly 220, and more specifically, into the gas distributor 222. Thus, the combination of the flushing module 230 and the gas distributor 222 forms a chamber for guiding at least one first flow path to the outlet of the gas distributor 222. In an embodiment, the flushing module 230 may include a gas distribution device, such as a diffuser 240, wherein the diffuser 240 may be inserted into the interior space 204 of the substrate container 200 via an input flushing port 210. At least given the construction of the flushing gas assembly 220 and the flushing module 230, it should be understood that the flushing module 230 is modular, meaning it can be removed and replaced such that it can be installed into the flushing gas assembly 220 or the substrate container 200 without requiring (or minimally requiring) any operation within the substrate container 200. While the gas distributor 222 and the chamber have been discussed above with regard to at least two outlets or openings, this disclosure is not intended to be limiting. For example, in embodiments, the gas distributor 222 and the chamber may have only one outlet for receiving flushing gas from the outlet of the flushing module 230 in a volume or space formed between the gas distributor 222 and the flushing module 230. Although the flushing module 230 for receiving inlet flushing gas is discussed as a post-flushing module, it should be understood that, depending on the substrate processing system and the substrate container, the flushing module 230 may be located in other locations, such as front, middle, or side. Furthermore, although the gas distribution device has been described herein as a diffuser or manifold, it should be understood that other gas distribution devices may be included. For example, the gas distribution device may be a diffuser, manifold, thin film, section with slits or nozzles or made of porous material, bend or flow deflector or similar structure or combination thereof capable of guiding flushing gas into the interior of the substrate container.

[0081] Figure 3This is a cross-sectional view of an example embodiment of a substrate container 300 having a flushing gas assembly 320, which may have the same characteristics as... Figure 1 The flushing gas assembly 320 has the same or similar features as or similar to that of the flushing gas assembly 120 or 220 of FIG. 2. The substrate container 300 has an internal space 304, a rear wall 307, and a bottom wall 309, wherein the bottom wall 309 includes an inlet flushing port 310 for receiving a gas distribution device (e.g., diffuser 340). The flushing gas assembly 320 is attached to the top surface of the carrier plate 315 and includes a flushing module 330 and a gas distributor 322 that combine to form a chamber for receiving flushing gas from the flushing module 330.

[0082] The combination of gas distributor 322 and flushing module 330 includes: a first outlet defining a first flow path for guiding a first portion of flushing gas to a first opening 324, for example, via inlet flushing port 310 and / or rear diffuser 340, to a rear portion of substrate container 300; and a second outlet defining a second flow path for guiding a second portion of flushing gas to a second opening 326 to distribute flushing gas to a front portion (not shown) of substrate container 300. In an embodiment, flushing module 330 is inserted into gas distributor 322 and diffuser 340 is attached to flushing module 330 and inserted into the rear portion of substrate container 300 via inlet flushing port 310 to form a sealed arrangement. In an embodiment, sealing ring 350 may be disposed around the outer surface of flushing module 330 such that at least the outlet of flushing module 330 is fluidly sealed by gas distributor 322 and sealing ring 350. Therefore, the flushing gas exiting the outlet of the flushing module 330 is divided within the chamber, with a first portion of the flushing gas directed to a first opening 324 and a second portion directed to a second opening 326, for example, by pressurization controlled by a control valve attached to the second outlet of the gas distributor 322. The sealing ring 350 may be a lip seal, an O-ring, a gasket, or other compressible mechanical gasket material, such as a polymer or elastomeric material. In some embodiments, the flushing module 330 may be completely sealed within the gas distributor 322, and in some embodiments, only the outlet of the flushing module 330 is sealed by the gas distributor 322. While the chamber discussed herein has been described as the space or volume between the gas distributor 322 and the flushing module 330, it should be understood that this disclosure is not intended to be limiting. For example, in some embodiments, the chamber may be formed in other structures (e.g., the chamber body, the bottom wall of the substrate container, or a portion of the bottom wall) to form a sealed arrangement with the flushing module 330 or other flushing gas distributor, such that flushing gas from the outlet of the flushing module 330 or other flushing gas distributor can be divided or distributed to one or more flow paths.

[0083] In one embodiment, the flushing module 330 may be held to the flushing gas assembly 320 using a module holder 355. The module holder 355 may be configured to hold the flushing module 330 to the carrier plate 315 or to the flushing gas assembly 320, for example, via hooks, tabs, or screw fittings. The module holder 355 may allow the flushing module 330 or diffuser 340 to be separately mounted or replaced to the substrate container 300 from the flushing gas assembly 320. Thus, the flushing module 330 may be a standalone unit that can be assembled onto the substrate container 300 at a later time.

[0084] In an embodiment, the flushing module 330 may include an inlet 331, a check valve 332 for regulating the flow direction of the flushing gas, a module body 333, and an outlet 334. At the inlet 331, a flow of flushing gas from a flushing gas supply system is received. The flushing gas supply system delivers flushing gas, which is typically an inert gas. The flushing gas may include, for example, but not limited to, one or more of nitrogen, clean dry air (CDA), and ultra-clean dry air (xCDA). The check valve 332 is received in the module body 333 and configured to allow the flushing gas to flow in only one direction from the inlet 331 through the module body 333 to the outlet 334. The module body 333 defines one or more channels or pathways from the inlet 331 for allowing the flushing gas to pass through the flushing module 330 and the check valve 332. The flushing module 330 may further include a filter disposed in front of or behind the outlet 334, a filter retainer for holding the filter on the flushing module 330, a diffuser retainer 335 configured to support the diffuser 340, and a diffuser 340 attached to the flushing module 330 or the flushing gas assembly 320. The filter retainer and the diffuser retainer may be configured such that the flushing gas leaving the outlet 334 is divided or distributed such that a first portion of the flow of flushing gas through the filter enters a first opening 324 (by being at least partially connected to the diffuser 340) and a second portion of the flow of flushing gas through the filter passes through one or more orifices 337 defined by one or both of the filter retainer and the diffuser retainer and enters at least the chamber 322.

[0085] Therefore, in the embodiments discussed herein, the flushing gas assembly having a chamber formed by a combination of a gas distributor and a flushing module allows multiple openings for flushing gas exit to provide one or more flow paths for supplying flushing gas to the interior space of the substrate container 300. That is, the flushing gas can flow vertically through a first opening into the rear diffuser and, in some embodiments, horizontally through a second opening into the front diffuser to allow multiple diffusion / flushing locations from a single load port inlet. Furthermore, the flushing gas is filtered because it is redirected from the outlet of the flushing module (which is after the filter).

[0086] Figure 4A , 4B 4C describes the flushing gas assembly 420 according to an embodiment. The flushing gas assembly 420 is attached to a carrier plate 415 and includes a means for distributing flushing gas to a substrate container (e.g., Figure 1 100 in Figure 2, 200 in Figure 2 or Figure 3 At least two flushing modules 430 on the first and second sides of the 300).

[0087] Figure 4A Is it possible to have with Figure 1 Flushing gas assembly 120 or Figure 2A / 2B of 220 or Figure 3 A top view of a flushing gas assembly 420 having the same or similar features as 320. The flushing gas assembly 420 includes at least two gas distributors 430, a rear gas distribution device (e.g., a rear diffuser 440), a control valve 460, piping 470, and a front gas distribution device 480. The at least two gas distributors 430 may accommodate flushing modules, as discussed above, for example, 230 in Figure 2. Figure 3 The flushing module (e.g., 230, 330) may be configured to receive flushing gas at an inlet, filter the flushing gas, and supply the filtered flushing gas to a chamber formed in the flushing gas assembly 420. The flushing module (e.g., 230, 330) may be fluidly sealed using a gas distributor to form the chamber, wherein a first portion of the flushing gas is directed to a first opening defining a first opening in the gas distributor to distribute the flushing gas to a first outlet of a rear portion of the substrate container via a rear diffuser 440, and at least a second portion of the flushing gas is directed to a second outlet defining a second opening in the gas distributor to distribute the flushing gas to a second opening of a front portion of the substrate container to a front gas distribution device 480 via a second flow path. The front gas distribution device 480 may include a connection (e.g., a bend) for fluidly connecting the flushing gas assembly 420 to the substrate container or a diffuser to distribute a second portion of the flushing gas into the interior space of the substrate container.

[0088] The second flow path connects control valve 460 to the gas distributor (e.g., 222 in Figure 2 or...). Figure 3 The second opening of (e.g., 226 in Figure 2) of 322) Figure 3The control valve 460 is configured to control the distribution of a second portion of the flushing gas from the flushing module 430. The control valve 460 is configured to control the amount of the second portion of the flushing gas distributed to the front gas distribution device 480, for example, by redirecting a certain amount of flushing gas from the rear flushing module 430 through pressurization in the control chamber. The control of the amount of flushing gas can be set manually (e.g., by turning the valve to a set flushing gas flow rate using a manual tool), or the amount of flushing gas can be set manually or automatically intermittently (e.g., via automation, such as when the FOUP is at the loading port, through a controller that enables the processor, or by providing an automatic control of the set point for the flushing gas flow). The control valve 460 may include a needle valve, ball valve, butterfly valve, fixed orifice valve, check valve, or a similarly constructed valve for setting the amount of flushing gas supplied to the gas distribution device. It should be understood that the amount of flushing gas supplied to the front gas distribution unit 480 can also be controlled as needed using orifices with smaller or larger cross-sectional areas, spring-loaded diverters, or piping / piping setups.

[0089] like Figure 4B The description indicates that, in an embodiment, control valve 460 may include valve body 462, valve needle 464, valve retainer 466, tube retainer 468, and sealing ring 461. Valve body 462 includes inlet 463 in the same flow direction as outlet 469. Inlet 463 may include a snap-fit ​​connection to a second opening of a chamber, wherein the sealing ring may be disposed between the second opening of the chamber and inlet 463 of control valve 460 to fluidly seal them. The snap-fit ​​connection may include a flexible component that can deform when a force is applied, for example, using torsion or pushing, such that interlocking occurs with the corresponding component when in its final position (e.g., return to its original position). Although the reception and supply of the flushing gas flow are described as being in the same flow direction (e.g., inlet 463 parallel to outlet 469), this disclosure is not intended to be limiting, and other flow patterns may be used, such as the outlet being positioned at an angle to the inlet or similar. Furthermore, the valve body 462 is configured to receive a valve needle 464, which is secured to the valve body using a valve retainer 466 and a sealing ring 461. The valve retainer 466 may be snap-fitted onto the valve body 462 or attached via other securing mechanisms (e.g., cam locks, screw fittings, locking tabs, or the like), wherein the sealing ring 461 is positioned between the valve needle 464 and the valve body 462 and the valve retainer 466 to fluidly seal the valve needle 464 to the valve body 462. The valve body 462 and the valve needle 464 may include corresponding threaded portions 465 to allow precise setting of the control valve 460 to control the precise flow of flushing gas to the upstream gas distribution device 480.

[0090] The valve needle 464 may further include a valve head 467 configured to provide safety (e.g., a safety device feature) to allow setting of the flow rate of flushing gas to the pre-gas distribution device and to prevent alteration of the valve setting once set. In an embodiment, the safety device feature may include a cap covering the valve head 467, which has a special design compatible only with special tools (e.g., an Allen wrench or a star-patterned or specially shaped head), such as sealing the valve head 467 with resin or a hard material (e.g., metal or plastic), making it necessary to drill through the valve head 467 to adjust the valve setting or a locking mechanism, such as a lock. Thus, the control valve 460 can be safely set to supply a predetermined amount of flushing gas to the pre-gas distribution device 480.

[0091] Figure 4CThis illustration shows a top perspective view of a flushing gas assembly 420 having conduit 470 (e.g., a bend connection for connecting to a pre-diffuser (not shown) to further form a second flow path) connected to a control valve 460 and a pre-gas distribution device 480. Conduit 470 may be a flexible polymer tube formed of a fluoropolymer (e.g., perfluoroalkoxyalkane (PFA)) or polyethylene (e.g., high-density polyethylene (HDPE)) or a similar compatible material used for substrate processing. In embodiments, to allow the flushing gas assembly 420 to be pre-assembled on a carrier plate 415 outside the substrate container, conduit 470 may be configured to be assembled with the control valve 460 or the pre-gas distribution device 480 using a reliable connection system. In embodiments, the reliable connection system may include snap-fit ​​connectors 468, 472 and sealing rings 461, 471, such as O-rings, gaskets, or other compressible mechanical gasket materials, such as polymer or elastomeric materials. Therefore, one end of the conduit 470 can be inserted into the outlet 469 of the control valve 460 and a sealing ring 461 placed along the outer surface of the conduit 470, such that when the snap-fit ​​connector 468 is snapped into the outlet 469 of the control valve 460, the sealing ring 461 is compressed to fluidly seal the conduit 470 using the control valve 460. Similarly, the other end of the conduit 470 can be inserted into the front gas distribution device 480 and a sealing ring 471 placed along the outer surface of the conduit 470, such that when the snap-fit ​​connector 472 is snapped into the front gas distribution device 480, the sealing ring 471 is compressed to fluidly seal the conduit 470 using the front gas distribution device 480. The snap-fit ​​connectors 468, 472 may include flexible components that can deform when force is applied, for example, using torsional or pushing forces, such that when in the final position of the components (e.g., restored), interlocking occurs with the corresponding components on the outlet 469 or the front gas distribution device 480. Therefore, a reliable connection system can be provided for pre-assembling the flushing gas assembly 420 on the carrier plate 415, such that the flushing gas assembly 420 can be pre-assembled and, when the carrier plate 415 and the flushing gas assembly 420 are attached to the substrate container, the flushing module and optionally including a diffuser can be inserted from outside the substrate container into the substrate container without intruding or minimally intruding into the internal space of the substrate container for assembly.

[0092] The pre-gas distribution device 480 may be connected to the input flush port (e.g., Figure 1The front gas distribution device 480 is a bend (110) or a diffuser or manifold inserted through the bottom wall of the substrate container. When the front gas distribution device 480 is a bend, the front gas distribution device 480 may be attached or locked to the side wall of the substrate container, for example, via an inlet flush port, and the diffuser or manifold may then be connected to the front gas distribution device 480 via minimal operation inside the container body. In some embodiments, the front gas distribution device 480 may be configured such that the diffuser or manifold can be removed or replaced by simply rotating it to lock or unlock it from the front gas distribution device 480.

[0093] Therefore, a simple and efficient flushing gas assembly can be provided to deliver flushing gas from the inlet and post-flushing modules via a flexible polymer tube passing through the housing of the substrate container to the front gas distribution unit without modifying the substrate container or drilling holes in the carrier plate. The components can be simply twist-locked or snap-fitted together to provide a reliable connection. This flushing gas flow distribution can be routed within the existing FOUP geometry with minimal modification, for example, because the pre-assembly of the flushing gas assembly can be completed outside the substrate container.

[0094] Figure 5 A flowchart illustrating a method for controlling the flow of flushing gas via a flushing gas assembly according to an embodiment is provided. Method 500 includes: at 510, receiving a flushing gas flow at the inlet of a flushing module; at 520, supplying flushing gas from the outlet of the flushing module into a chamber formed by a combination of the flushing module and a gas distributor of the flushing gas assembly, the gas distributor having at least one outlet flushing module; and at 530, dividing the flushing gas in the chamber into at least a first flow path to supply the flushing gas to at least one outlet of the gas distributor.

[0095] At 510, a flushing gas flow is received at the inlet of the flushing module. The flushing module may include an inlet, a check valve for regulating the flow direction of the flushing gas, a module body, and an outlet. At the inlet, a flushing gas flow is received from a flushing gas supply system. The flushing gas supply system delivers flushing gas, which is typically an inert gas. The flushing gas may include, for example, but not limited to, one or more of nitrogen, clean dry air (CDA), and ultra-clean dry air (xCDA). The check valve is received in the module body and configured to allow the flushing gas to flow in only one direction from the inlet through the module body to the outlet. The module body defines one or more channels or passages from the inlet for allowing the flushing gas to pass through the flushing module and the check valve. The flushing module may further include a filter disposed before or after the outlet, a filter retainer for retaining the filter on the flushing module, a diffuser retainer configured to support a diffuser, and a diffuser attached to the flushing module or the flushing gas assembly. The filter retainer and diffuser retainer can be configured such that the flushing gas exiting the outlet is divided or distributed such that a first portion of the flushing gas flow through the filter enters a first opening (by at least partially connecting to the diffuser) and a second portion of the flushing gas flow through the filter passes through one or more orifices defined by one or both of the filter retainer and diffuser retainer and at least enters the chamber. Based on the structure and composition of the media used in the filter, the filter can remove any suitable contaminants, such as volatile organic compounds, particulate matter, and the like. Therefore, the supply of the flushing gas flow can include one or more of the following: guiding the flushing gas through a check valve of the flushing module to a passage defined in the module body of the flushing module; guiding the flushing gas from the passage through one or more channels in the module body to the filter; guiding a first portion of the flushing gas from the filter and filter retainer into a first flow path leading to a first gas distribution device; and guiding a second portion of the flushing gas from the filter out of the flushing module through one or more orifices defined by one or both of the filter retainer and diffuser retainer into a second flow path leading to a second gas distribution device.

[0096] At 520, flushing gas is supplied from the flushing module to a chamber formed by the combination of the flushing module and the gas distributor of the flushing gas assembly. The flushing gas assembly includes a gas distributor and a flushing module having at least one outlet, wherein the gas distributor and the flushing module are combined to form a chamber for receiving the flushing flow. In an embodiment, the gas distributor has: at least one first outlet defining a first flow path for guiding a first portion of the flushing gas to a first opening for distributing it to a rear portion of the substrate container; and at least one second outlet defining a second flow path for guiding a second portion of the flushing gas to a second opening for distributing the flushing gas to a front portion of the substrate container. In an embodiment, the flushing module is inserted into the chamber and a diffuser is attached to the flushing module and inserted into the rear portion of the substrate container via an inlet flushing port to form a sealed arrangement. Thus, flushing gas exiting the outlet of the flushing module is supplied to a chamber surrounding at least the outlet of the flushing module. Although the gas distributor and chamber have been discussed with respect to two outlets, this disclosure is not intended to be limiting. For example, the gas distributor or chamber may have a single outlet or a single opening or three or more outlets or openings for supplying flushing gas to a gas distribution device within the substrate container.

[0097] At 530, purging gas is divided into at least a first flow path within the chamber to supply purging gas to at least one outlet of the gas distributor. After purging gas exiting the outlet of the purging module is supplied into the chamber, the purging gas is divided within the chamber, wherein a first portion of the purging gas may be directed to a first opening and a second portion of the purging gas may be directed to a second opening. The first portion of the purging gas may be directed to the first opening of the chamber via the purging module (e.g., a diffuser holder or diffuser inlet) or through the chamber itself (e.g., a passage within the chamber that receives the purging gas and directs it to the first opening). The second portion of the purging gas may be directed to the second opening of the chamber by supplying purging gas into the chamber through one or more orifices defined at the outlet of the purging module (e.g., not through the diffuser inlet). The second portion of the purging gas may be sent via a second flow path to a front gas distribution device to distribute the second portion of the purging gas in the front portion of the substrate container. The second flow path for the flushing gas in the second part may further include, for example, regulating the flow of flushing gas in the second flow path leading to the second gas distribution device by controlling a valve. Thus, the flow of flushing gas in the second flow path can be regulated or distributed by pressurizing the chamber via a valve, with some flushing gas flowing through the valve and some through the first opening (e.g., the rear diffuser 240). Therefore, the flushing gas is divided or distributed within the chamber to supply flushing gas, for example, via the second opening to the front diffuser and via the first opening to the rear diffuser to distribute the flushing gas into the interior space of the substrate container.

[0098] Figure 6 A flowchart illustrating a method for assembling a substrate container having a gas distribution device according to an embodiment is provided. Method 600 includes: at 610, attaching a flushing gas assembly to the bottom wall of the substrate container; at 620, assembling the flushing gas assembly; at 630, attaching the gas distribution device to an outlet of a flushing module; and at 640, inserting the flushing module into a gas distributor to form a chamber, such that the gas distribution device is inserted into the interior space of the substrate container through at least one outlet of the gas distributor.

[0099] The flushing gas assembly is attached to the bottom wall 610 of the substrate container. Attachment of the flushing gas assembly to the substrate container may include a pre-assembly step. In the pre-assembly step, the flushing gas assembly, including piping, valves, and a gas distributor, may be attached or molded to the top surface of a carrier plate. In some embodiments, pre-assembly may include one or more of the following: attaching piping to connect a second opening of the chamber to a second gas distribution device; snap-fit ​​connections to the piping and the second opening of the chamber, or snap-fit ​​connections to the piping and the second gas distribution device; attaching a control valve to the second opening of the chamber for regulating the flow of flushing gas; and snap-fit ​​connections to the inlet of the control valve to the second opening of the chamber. While attachment of the flushing gas assembly to a carrier plate is discussed herein, it should be understood that this disclosure is not intended to be limiting. For example, in embodiments, the flushing gas assembly may be a separate unit for mounting to the substrate container. When assembling the substrate container, a carrier plate including the flushing gas assembly may be attached to the bottom wall of the substrate container to define the bottom plate of the substrate container to form a complete substrate container system. The carrier plate may be securely fastened, for example, using tabs, screws or other fastening devices, and is not intended to be disassembled as needed to form an integral or removable attachment.

[0100] Assemble the flushing module at 620. The assembly of the flushing module includes assembling the flushing module to include an inlet for receiving the flow of flushing gas, a check valve for regulating the flow direction of the flushing gas, and an outlet for supplying flushing gas.

[0101] Optionally, a gas distribution device is attached at 630. The assembly may further include attaching the gas distribution device to the outlet of the flushing module. The gas distribution device may be a diffuser, manifold, membrane, section having a slit or nozzle or made of porous material, bend or flow deflector, or similar structures and combinations thereof capable of directing flushing gas into the interior of the substrate container. Attachment may include using a diffuser retainer or the gas distribution device may be directly attached to the flushing module. In some embodiments, different retainers are configured to direct flushing gas to the gas distribution device, for example, via a flared inlet. It should be understood that in some embodiments, the gas distribution device may optionally be attached to the flushing module. In other embodiments, plugs or stops may be provided to control the distribution of flow into the chamber.

[0102] At 640, a flushing module can be inserted into a gas distributor to form a chamber. During further assembly of the substrate container, a flushing module including a gas distribution device is inserted into a gas distributor to form a chamber, the chamber at least surrounding the outlet of the flushing module, such that the gas distribution device is inserted into the interior space of the substrate container through at least one outlet of the gas distributor to divide the flushing gas into at least a first flow path. In an embodiment, the gas distributor includes a first outlet defining a first opening for guiding the first flow path to the gas distribution device to distribute a first portion of the flushing gas. In some embodiments, the gas distributor may include a second outlet defining a second opening for guiding a second flow path to at least one second gas distribution device to distribute a second portion of the flushing gas. Thus, because the flushing gas assembly can be pre-assembled, the pre-assembled flushing gas assembly can be attached to the outside of the substrate container, followed by the flushing module, such that the gas distribution device (e.g., a diffuser or manifold) can be inserted into the substrate container from the outside without intruding into or minimally intruding into the interior space of the substrate container. Therefore, the assembly of the substrate container can be performed largely or entirely outside the substrate container.

[0103] In some embodiments, attaching the flushing gas assembly may further include attaching a second flushing gas assembly to a carrier plate before attaching the carrier plate to the bottom wall of the substrate, wherein the second flushing gas assembly includes a second gas distributor having at least one outlet. Furthermore, inserting the flushing module may further include inserting the second flushing module having the second gas distribution device into the second gas distributor to form a second chamber at least surrounding the outlet of the flushing module, such that the second gas distribution device is inserted into the interior space of the substrate container through at least one outlet of the second gas distributor.

[0104] Figure 7AAn exploded view of a flushing module, which may be identical or similar to flushing modules 230, 330, or 430 as discussed above, is shown according to an embodiment. Flushing module 700 includes a grommet 702, a check valve 704, a module body 706, a filter 708, a filter retainer 710, and a diffuser retainer 712. Optionally, a module retainer 714 may be included in flushing module 700. Optionally, a lip seal 716 may be included in flushing module 700. Lip seal 716 may be a circular sealing member configured to be received in a lip seal groove 736. Optionally, a diffuser 718 may be included in flushing module 700.

[0105] The rinsing module 700 is a module configured to be received in a rinsing port of a substrate container. In one embodiment, the rinsing module 700 is configured to be received in a post-rinsing port of the substrate container. In another embodiment, the rinsing module 700 is configured to be received in a chamber configured to receive filtered rinsing gas from the rinsing module 700 and to direct a portion of the rinsing gas to another rinsing distribution structure, such as those described above. Figure 1 The second or front gas distribution device 180 shown in the image.

[0106] The flushing module 700 includes a loop 702. The loop 702 may be made of an elastic material. In an embodiment, the elastic material may be a fluorinated elastomer (e.g., Viton). TM The grommets may contain fumes, thermoplastic elastomers, thermoplastic olefins, thermoplastic polyurethanes, or the like. The grommets may include orifices configured to receive a flow of fuming gas from a fuming gas source (e.g., a port disposed on a tool containing a substrate container in which the fuming module 700 is to be used). The grommets 702 may further include a portion configured to receive a check valve 704a, such that the check valve 704a can receive fuming gas introduced at the orifices of the grommets 702. The grommets 702 may include a groove 720 configured to engage with a protrusion 722 formed on the check valve 704a, such that the check valve 704a is secured to the grommets 702.

[0107] Check valve 704a is a valve configured to allow flow through check valve 704a to module body 706 and to prevent flow from module body 706a from returning through check valve 704a. Check valve 704a can be any suitable check valve, such as an umbrella valve assembly, a spring-loaded valve assembly, or the like. At least a portion of check valve 704a can be inserted into a groove formed in ring 702. Check valve 704a may include a protrusion 722 configured to engage with ring 702 at groove 720. In an embodiment, protrusion 722 may be an annular protrusion. In an embodiment, check valve 704a may include a sealing groove 724. Sealing groove 724 may receive a seal 726. Seal 726 can be any suitable component for forming a seal between check valve 704a and ring 702, such as an O-ring, gasket, or the like.

[0108] Module body 706a is configured to receive a cable ring 702 and a check valve 704. Module body 706a may be made of a rigid material (e.g., polycarbonate). In an embodiment, carbon fiber filler may be included in the material used to form module body 706. Module body 706a may include a filter-facing surface 728, which includes the ends of one or more channels 730. Protrusions 732 may be provided from the filter-facing surface 728 of module body 706. Module body 706a may further include a first snap-fit ​​feature 734 configured to allow a filter retainer 710 to snap-fit ​​into module body 706. In an embodiment, module body 706a may include a lip seal groove 736 configured to receive a lip seal 716. The lip seal 716 may be a circular sealing member configured to be received in the lip seal groove 736. In one embodiment, the module body 706a may include a second snap-fit ​​feature 738 configured to engage with the module retainer 714. The module body 706a and the loop 702 may be configured such that the module body 706a and the loop 702 are held together by a press fit.

[0109] Filter 708 may be any suitable filter for filtering purging gas. Filter 708 may contain any suitable filter media for removing contaminants (e.g., particulate matter, volatile organic compounds, or the like) from the purging gas as it passes through filter 708. In an embodiment, filter 708 may include an opening defined by an inner periphery 740. The opening defined by the inner periphery 740 may be configured to receive a protrusion 732 of module body 706 such that filter 708 surrounds a portion of module body 706a when assembling purging module 700. In an embodiment, protrusion 732 may be omitted from module body 706, and filter 708 without an opening may be used.

[0110] A filter holder 710 is configured to attach to a module body 706a to hold a filter 708 between the module body 706a and the filter holder 710. The filter holder 710 may include a snap-fit ​​ring 742 configured to form a snap-fit ​​with a first snap-fit ​​feature 734 of the module body 706. The filter holder 710 may be made of a rigid material (e.g., polycarbonate). The filter holder 710 may be configured to abut against the module body 706 to clamp the outer periphery of the filter 708, for example, as shown in the image. Figure 9B As shown and discussed below. In embodiments where the filter 708 includes an opening defined by an inner periphery 740, the filter holder 710 and module body 706a may be configured to clamp the filter 708 at the inner periphery 740. The filter holder 710 includes a grille 744 defining a plurality of openings. In embodiments, the openings may allow at least some of the flow of flushing gas to pass through the flushing module 700 and exit the flushing module 700.

[0111] A diffuser retainer 712 is configured to support a diffuser, such as diffuser 718. The diffuser retainer 712 is further configured to attach to a filter retainer 710, for example, via a snap-fit ​​engagement. The snap-fit ​​engagement between the diffuser retainer 712 and the filter retainer 710 may be formed by a diffuser retainer snap-fit ​​feature 746 that can be configured to engage with features of the filter retainer 710 (e.g., portions of grille 744). The diffuser retainer 712 may be made of a rigid material (e.g., polycarbonate). The diffuser retainer 712 includes a diffuser inlet 748 configured to receive diffuser 718 and to direct a flow of flushing gas into diffuser 718. The diffuser retainer 712 may define one or more openings, alone or in combination with the filter retainer 710, through which a portion of the flushing gas may exit the flushing module 700 without reaching the diffuser inlet 748. For example, as Figure 7A and 7BAs shown, the diffuser retainer 712 may include a grille 750 to allow flushing gas to exit the flushing module 700 without flowing into the diffuser inlet 748. Flushing gas that does not enter the diffuser inlet 748 may flow into a chamber (e.g., a chamber formed by the combination of the gas distributor 222 described above and shown in Figure 2 with the flushing module 230). In an embodiment, the filter retainer 710 may provide additional support for the diffuser 718, such that the diffuser 718 is held at the diffuser inlet 748 of the diffuser retainer 712. In an embodiment, the diffuser inlet 748 is positioned such that the diffuser 718 is within the periphery of the module body 706. In an embodiment, the diffuser 718 is not offset from the module body 706. In an embodiment, when the flushing module 700 is viewed in plan view, the diffuser 718 is positioned around the periphery of the module body 706. The diffuser 718 and rinsing module 700 can be mounted as a complete assembly from outside the substrate container, for example, by inserting the diffuser through a hole in the substrate container and then continuing to insert the rinsing module into the hole. This avoids the need to install the diffuser 718 through operations on the inside of the substrate container, reducing the risk of introducing contaminants (e.g., particulate matter) from such operations. In an embodiment, the diffuser holder 712 may alternatively include a cap (not shown) instead of the diffuser 718. The cap may be a separate element held in the diffuser inlet 748, or it may be integrally formed above the diffuser inlet 748.

[0112] Optionally, a module retainer 714 may be included to secure the rinsing module 700 to the substrate container. The module retainer 714 may be made of a rigid material (e.g., polycarbonate). The module retainer 714 includes one or more snap-fit ​​features 752 configured to engage with a second snap-fit ​​feature 738 disposed on the module body 706. In an embodiment, the snap-fit ​​between the one or more snap-fit ​​features 752 and the second snap-fit ​​feature 738 allows the module retainer 714 to rotate a full 360° when snap-fitted to the module body 706. The module retainer 714 is configured to mechanically engage with the substrate container at an aperture in which the rinsing module 700 is received. For example, the module retainer 714 may include a plurality of container engagement features 754 configured to insert into the substrate container in a first position and engage with the substrate container in a second position to retain the rinsing module 700. The container engagement feature 754 may have any suitable shape that provides insertability in the first position and engagement when rotated to the second position.

[0113] Optionally, a lip seal 716 may be included to provide a seal between the module body 706a and the substrate container to which the flushing module 700 is mounted. The lip seal 716 may be an elastic material, such as a fluoropolymer (e.g., Viton).TM (or FKM), thermosetting elastomers, thermoplastic elastomers, thermoplastic olefins, thermoplastic polyurethanes, or the like. The lip seal 716 may be a circular sealing element configured to be received in the lip seal groove 736. The lip seal 716 may include an anti-rotation feature 756 configured to engage a notch 758 formed in the lip seal groove 736 of the module body 706a.

[0114] A diffuser 718 may be included in a flushing module 700. The diffuser 718 may be a tube formed of a porous material, configured to release flushing gas received by the diffuser 718 within a substrate container to which the flushing module 700 is mounted. The diffuser 718 includes an open end configured to receive flushing gas that may be supplied at a diffuser inlet 748. The diffuser 718 may further include a closed end, which may be, for example, a flat closed end, a hemispherical closed end, a flat closed end having a bevel or rounded corner at the transition from the body of the diffuser 718 to the closed end, or the like. The diffuser 718 may be held in place by a diffuser holder 712 or a combination of a filter holder 710 and a diffuser holder 712.

[0115] Figure 7B An exploded view of the rinsing module according to an embodiment is shown. Figure 7B In the embodiment shown, the check valve 704b is sized such that the module body 706b can accommodate the check valve 704b without including... Figure 7A The protrusion 732 is shown in the diagram. Except for differences in size and / or shape relative to the corresponding module bodies 706a and 706b, the other features of the check valve 704b are as described for the check valve 704a. Except for the absence of the protrusion 732 on the module body 706a, the module body 706b may otherwise be as described for the module body 706a. The filter 708b may be a continuous disc without an opening defined by the inner periphery 740, unlike... Figure 7A The filter 708a is shown in the image. Therefore, the filter 708b can be, for example, according to the... Figure 9B The filter 708b is held in place by clamping at its outer periphery, as shown in the diagram and described below. In an embodiment, this clamping at the outer periphery of the filter 708b may be the sole attachment for securing the filter 708b to its proper position within the flushing module 700. Other features of the filter 708b may be as described with respect to the filter 708a. Figure 7B As can be seen, the diffuser 718 includes a bevel or chamfer 760 at its end.

[0116] Figure 8A cross-sectional view of a flushing module according to an embodiment is shown. The flushing module 800 includes a grommet 802, a check valve 804, a module body 806, a filter 808, a filter retainer 810, and a diffuser retainer 812. Optionally, a module retainer 814 may be included in the flushing module 800. Optionally, a lip seal 816 may be included in the flushing module 800. Optionally, a diffuser 818 may be included in the flushing module 800.

[0117] The rinsing module 800 is a module configured to be received in a rinsing port of a substrate container. In one embodiment, the rinsing module 800 is configured to be received in a post-rinsing port of the substrate container. In another embodiment, the rinsing module 800 is configured to be received in a chamber configured to receive filtered rinsing gas from the rinsing module 800 and to direct a portion of the rinsing gas to another rinsing distribution structure, such as those described above. Figure 1 The second or front gas distribution device 180 shown in the image.

[0118] The loop 802 may be made of an elastic material. In an embodiment, the elastic material may be a fluorinated elastomer (e.g., Viton). TM The grommets may be made of thermoplastic elastomers, thermoplastic olefins, thermoplastic polyurethanes, or the like. The grommets may include orifices configured to receive a flow of rinsing gas from a rinsing gas source (e.g., a port disposed on a tool containing a substrate container in which the rinsing module 800 is to be used). The grommets 802 may further include portions configured to receive a check valve 804, such that the check valve 804 can receive rinsing gas introduced at the orifices of the grommets 802. The grommets 802 may include grooves 820 configured to engage with protrusions 822 formed on the check valve 804, thereby securing the check valve 804 to the grommets 802. The grommets 802 may further include ribs 824 configured to engage the module body 806 to further secure the engagement of the grommets 802 within the module body 806 during assembly of the rinsing module 800.

[0119] Check valve 804 is a valve configured to allow flow through check valve 804 to module body 806 and to prevent flow from module body 806 from returning through check valve 804. Check valve 804 can be any suitable check valve, such as an umbrella valve assembly, a spring-loaded valve assembly, or the like. At least a portion of check valve 804 can be inserted into an opening or recess formed in ring 802. Check valve 804 may include a protrusion 822 configured to engage with ring 802 at groove 820. In an embodiment, protrusion 822 may be an annular protrusion. In an embodiment, check valve 804 may include a sealing groove 826. Sealing groove 826 may receive a seal 828. Seal 828 can be any suitable component for forming a seal between check valve 804 and ring 802, such as an O-ring, gasket, or the like. A portion of the check valve 804 extends into a portion of the cavity 830 within the module body 806.

[0120] Module body 806 is configured to receive a grommets 802 and a check valve 804. Module body 806 may be made of a rigid material (e.g., polycarbonate). In embodiments, carbon fiber filler may be included in the material used to form module body 806. Module body 806 may define a cavity 830. Cavity 830 may include a first portion configured to receive the grommets 802. The first portion of cavity 830 may be configured such that module body 806 and grommets 802 are held to each other by a press fit. Cavity may include a second portion configured to receive a portion of check valve 804 protruding from grommets 802 when check valve 804 is mounted into grommets 802. Module body 806 may optionally include a protrusion 832 protruding beyond the filter-facing surface 834 of module body 806. Cavity 830 may include a portion defined by the protrusion 832, for example, a portion of cavity 830 capable of receiving a portion of check valve 804. Module body 806 includes one or more channels from cavity 830 to surface 834 facing the filter (not shown, because...). Figure 8 The cross-section is taken across the solid rib defining the channel, as described above, and in... Figure 7A and 7B The channel 730 is shown in the diagram. The module body 806 may further include a first snap-fit ​​feature 836 configured to allow the filter holder 810 to snap-fit ​​into the module body 806. In an embodiment, the module body 806 may include a lip seal groove 838 configured to receive a lip seal 816. In an embodiment, the module body 806 may include a second snap-fit ​​feature 840 configured to form a snap-fit ​​with the module holder 814.

[0121] Filter 808 may be any suitable filter for filtering purging gas. Filter 808 may contain any suitable filter media for removing contaminants (e.g., particulate matter, volatile organic compounds, or the like) from the purging gas as it passes through filter 808. In an embodiment, filter 808 may include an opening defined by an inner periphery 842. In this embodiment, the opening may be configured to receive a protrusion, such as... Figure 7A The module body 706a shown in the diagram has a protrusion 732. In an embodiment, the filter 808 is, for example, a continuous shape of a disk, without openings in its outer periphery. In this embodiment, this filter can be used when the module body is, for example, a module body 706b lacking this protrusion. The opening defined by the inner periphery 842 can be configured to receive the protrusion 832 of the module body 806 such that the filter 808 surrounds a portion of the module body 806 when the flushing module 800 is assembled. In an embodiment, the protrusion 832 can be omitted from the module body 806, and a filter 808 without openings can be used.

[0122] A filter retainer 810 is configured to attach to a module body 806 to hold a filter 808 between the module body 806 and the filter retainer 810. The filter retainer 810 may include a snap-fit ​​ring 844 configured to form a snap-fit ​​with a first snap-fit ​​feature 836 of the module body 806. The filter retainer 810 may be made of a rigid material (e.g., polycarbonate). The filter retainer 810 may be configured to abut against the module body 806 to clamp the outer periphery of the filter 808, for example, as shown in the image. Figure 9B The following is illustrated and discussed. In embodiments where filter 808 includes an opening defined by an inner periphery 842, filter holder 810 and module body 806 may be configured to clamp filter 808 at the inner periphery 842. Filter holder 810 includes a grille 846 defining a plurality of openings. In embodiments, the openings may allow at least some of the flow of flushing gas to pass through flushing module 800 and exit flushing module 800. Diffuser retaining protrusion 848 may be included on filter holder 810. Diffuser retaining protrusion 848 may be configured such that when diffuser 818 is mounted in diffuser holder 812 and diffuser holder 812 is attached to filter holder 810, the diffuser is secured between diffuser retaining protrusion 848 and one or more suitable features (e.g., diffuser inlet 850) of diffuser holder 812.

[0123] A diffuser retainer 812 is configured to support a diffuser, such as diffuser 818. The diffuser retainer 812 is further configured to attach to a filter retainer 810, for example, via a snap-fit ​​engagement. The diffuser retainer 812 may be made of a rigid material (e.g., polycarbonate). The diffuser retainer 812 includes a diffuser inlet 850 configured to receive diffuser 818 and to direct a flow of flushing gas into diffuser inlet 850 within diffuser 818. The diffuser retainer 812 may define one or more openings, alone or in combination with filter retainer 810, through which a portion of the flushing gas may exit flushing module 800 without entering diffuser inlet 850. Flushing gas that does not enter diffuser inlet 850 may enter a chamber (e.g., a chamber formed by the combination of gas distributor 222 described above and shown in FIG. 2 with flushing module 230). In an embodiment, flushing gas within the chamber may enter diffuser inlet 850 to enter diffuser 818. In one embodiment, the filter holder 810 includes a diffuser holding protrusion 848 that presses the diffuser 818 into the diffuser inlet 850 such that the diffuser 818 is held within the diffuser inlet 850 by the combination of the filter holder 810 and the diffuser holder 812. In one embodiment, the diffuser inlet 850 is positioned such that the diffuser 818 is within the periphery of the module body 806. In one embodiment, the diffuser 818 is not offset from the module body 806. In one embodiment, when viewed in plan view, the diffuser 818 is positioned within the periphery of the module body 806. The diffuser 818 and the flushing module 800 can be mounted as a complete assembly from outside the substrate container into the substrate container, for example, by inserting the diffuser through a hole in the substrate container and then continuing to insert the flushing module into the hole. This avoids the need to install the diffuser 818 through operations on the inside of the substrate container, reducing the risk of introducing contaminants (e.g., particulate matter) from such operations. In an embodiment, the diffuser retainer 812 may alternatively include a cap (not shown) instead of the diffuser 818. The cap may be a separate element retained in the diffuser inlet 850, or it may be integrally formed above the diffuser inlet 850.

[0124] Optionally, a module holder 814 may be included to secure the flushing module 800 to the substrate container. The module holder 814 may be made of a rigid material (e.g., polycarbonate). The module holder 814 includes one or more snap-fit ​​features (not shown) configured to engage with a second snap-fit ​​feature 840 disposed on the module body 806, such as those described above. Figure 7A and 7BThe snap-fit ​​feature 752 is shown in the diagram. In an embodiment, the snap-fit ​​formed with the second snap-fit ​​feature 840 allows the module holder 814 to rotate a full 360° when snap-fitted to the module body 806. The module holder 814 is configured to mechanically engage with the substrate container at an aperture in which the flushing module 800 is received. For example, the module holder 814 may include a plurality of container engagement features 852 configured to be inserted into the substrate container in a first position and to engage with the substrate container to retain the flushing module 800 when the module holder 814 is rotated to a second position. The container engagement features 852 may have any suitable shape that provides insertability in the first position and engagement when rotated to the second position, for example in Figure 8 The hook-shaped cross-section is visible in the image. Figure 8 In the embodiment shown, the container engagement feature 852 includes a container contact surface 854 configured to contact a flange or other suitable feature disposed in a substrate container into which the rinsing module 800 is inserted.

[0125] Optionally, a lip seal 816 may be included to provide a seal between the module body 806 and the substrate container to which the flushing module 800 is mounted. The lip seal 816 may be an elastic material, such as a fluoropolymer (e.g., Viton). TM (or FKM). The lip seal 816 may be a circular sealing element configured to be received in the lip seal groove 838.

[0126] A diffuser 818 may be included in a flushing module 800. The diffuser 818 may be a tube formed of a porous material, configured to release flushing gas received by the diffuser 818 within a substrate container to which the flushing module 800 is mounted. The diffuser 818 includes an open end configured to receive flushing gas that may be supplied at a diffuser inlet 850. The diffuser 818 may be held in place by a diffuser retainer 812 or a combination of a filter retainer 810 and a diffuser retainer 812. For example, the diffuser 818 may be held between the diffuser inlet 850 and one or more diffuser retaining protrusions 848 disposed on the filter retainer 810. The diffuser 818 may further include a closed end, which may be, for example, a flat closed end, a hemispherical closed end, a flat closed end having a bevel or rounded corner at the transition from the body of the diffuser 818 to the closed end, or the like.

[0127] Figure 9A A cross-sectional view of a flushing module at the inner circumference of a filter, according to an embodiment, is shown. The flushing module 900 includes a module body 902 and a filter retainer 904. Figure 9BThe filter 906 shown is held between the module body 902 and the filter holder 904. The module body 902 includes a filter-facing surface 908, an inner shoulder 910, and an inner module body clamping surface 912. The filter holder 904 includes an inner filter holder clamping surface 914, an inner contact surface 916, and a filter grid 918.

[0128] Module body 902 is the main body of flushing module 900. Module body 902 is configured such that filter holder 904 can be attached to module body 902, for example, by providing one or more snap-fit ​​features. Module body 902 can be, for example, as described above and respectively... Figure 7A and 7B and Figure 8 The module body 706a, 706b or module body 806 shown in the image.

[0129] The filter holder 904 is configured to attach to the module body 902, such that... Figure 9B The filter 906 shown is held between the module body 902 and the filter holder 904. The filter holder can be configured to be attached to the module body 902 by, for example, snap engagement (e.g., by providing one or more snap-fit ​​features configured to interface with corresponding snap-fit ​​features disposed on the module body 902). The filter holder 904 can be, for example, as described above and respectively in... Figure 7A and 7B and Figure 8 The filter holder 710 or filter holder 810 shown in the image.

[0130] Figure 9B The filter 906 shown is a filter configured to be placed between the module body 902 and the filter holder 904. Figure 9B The filter 906 shown may contain any suitable filter media, such as those used to remove one or more contaminants selected from particulate matter, volatile organic compounds, or the like. Figure 9B The filter 906 shown can be shaped to cover the channels through the module body 902, so that fluid passing through the module body 902 is then guided to... Figure 9B The filter 906 shown in the image. Figure 9B The filter 906 shown may include an opening defined by an inner periphery. The inner periphery may surround a protrusion extending from the module body 902. Figure 9B The filter 906 shown may initially have a flat disc shape, with or without an opening defined by an inner periphery, and is twisted into shape by corresponding clamping at its outer periphery and (when present) its inner periphery. Figure 9B The shapes shown in the image.

[0131] A filter-facing surface 908 is disposed on the module body 902. A channel through the module body 902 terminates at the filter-facing surface 908. The filter-facing surface 908 extends into an inner shoulder 910. The inner shoulder 910 is a transition from the filter-facing surface 908 to a vertical surface, extending toward the inner module body clamping surface 912. Figure 9B The filter 906 shown can be bent above the inner shoulder 910, following the space defined between the module body 902 and the filter holder 904. The inner module body clamping surface 912 is a surface that is separate from and offset from the filter-facing surface 908.

[0132] The filter holder 904 includes an inner filter holder clamping surface 914. The inner filter holder clamping surface 914 is configured to be opposite to the inner module body clamping surface 912 when the filter holder 904 is attached to the module body 902. Figure 9B The filter 906 shown can be compressed between the inner module body clamping surface 912 and the inner filter holder clamping surface 914, so that... Figure 9B The filter 906 shown in the image allows for reduced or no flow through the inner periphery of the filter 906. Figure 9B The side edge of filter 906 is shown in the image.

[0133] The inner contact surface 916 is the surface of the filter holder 904 configured to directly contact the module body 902. The inner contact surface 916 is located inside the inner periphery of the filter 908 relative to the central axis of the flushing module 900, so that direct contact can be made between the filter holder 904 and the module body 902.

[0134] Filter grille 918 is a configuration of filter retainer 904 to hold Figure 9B The filter 906 shown in the image remains in place while allowing passage. Figure 9B The flow of filter 906 shown in the image passes through the grid of filter retainer 904. Filter grid 918 may be included in the flow passage. Figure 9B The filter 906 shown in the figure retains any suitable structure of the filter 906.

[0135] Figure 9B Demonstrates the outer circumference of the filter according to an embodiment. Figure 9A A cross-sectional view of the flushing module. Figure 9BThe filter 906 shown in the image has a module body 902 comprising a filter-facing surface 908, an outer shoulder 920, and an outer module body clamping surface 922 at its outer circumference. The filter holder 904 includes a filter grid 918, an outer filter holder clamping surface 924, and an outer contact surface 926. The filter-facing surface 908 extends to the outer shoulder 920. At the outer shoulder 920, the module body transitions from the filter-facing surface to a portion extending to the outer module body clamping surface 922. The outer module body clamping surface 922 surrounds the filter-facing surface 908 of the module body 902. The outer filter holder clamping surface 924 is disposed on the filter holder 902. The outer filter holder clamping surface 924 is configured to face the outer module body clamping surface 922, such that the filter 906 can be compressed between the outer module body clamping surface 922 and the outer filter holder clamping surface 924, allowing the filter 906 to pass through its side edges at its outer periphery with reduced or no flow. The filter holder 904 further includes an outer contact surface 926, which is a surface of the filter holder 904 configured to directly contact the module body 902. The outer contact surface 926 is located outside the outer periphery of the filter 908, allowing direct contact between the filter holder 904 and the module body 902. Figure 9A and 9B As shown, the module body 902 and filter holder 904 can clamp the filter 906 at their inner periphery at the inner module body clamping surface 912 and the inner filter holder clamping surface 914, and at their outer periphery at the outer module body clamping surface 922 and the outer filter holder clamping surface 924. Therefore, when the filter 906 includes an opening, the filter 906 can be sealed at both its inner and outer peripheries.

[0136] In one embodiment, filter 906 may be a continuous surface that does not include an inner perimeter. In this embodiment, filter 906 can pass through only such... Figure 9B The engagement at the outer perimeter, as shown in the diagram, is used to maintain the connection, rather than in the case of... Figure 9A The inner perimeter shown in the image remains unchanged.

[0137] Figure 10A flowchart illustrating a method for assembling a flushing module according to an embodiment is provided. Method 1000 includes: engaging a check valve to a grommets at 1002; engaging the grommets to a flushing module body at 1004; positioning a filter at 1006; attaching a filter holder to the flushing module body at 1008; and optionally attaching a diffuser holder to the filter holder at 1010. Optionally, assembling the flushing module may further include mounting a diffuser at 1012. Optionally, method 1000 may further include: inserting a diffuser 1014 through an aperture in a substrate container; inserting at least a portion of the flushing module into the aperture at 1016; and / or attaching the flushing module to the substrate container at 1018 using a module holder.

[0138] At step 1002, the check valve is engaged to the ring. The check valve can be engaged to the ring by inserting it into an opening in the ring and forming a press fit between the ring and the check valve. In embodiments, the ring and / or check valve includes engagement features for securing the attachment of the ring to the check valve, such as (for example) annular protrusions and / or annular grooves disposed on one of the ring and the check valve and configured to interface with a surface on the other. For example, the connection between the check valve and the ring can be sealed by including an O-ring between the surfaces of the ring and the check valve.

[0139] At 1004, the grommets are engaged to the flushing module body. The grommets can be engaged to the flushing module body after or during 1002, when the check valve is engaged to the grommets. The grommets can be engaged to the flushing module body at 1004 by inserting the grommets into a cavity formed in the flushing module body and forming a press fit between the inner wall of the flushing module body and the outer wall of the grommets. In embodiments, the flushing module body and / or the grommets may include one or more engagement features for securing the flushing module body to the check valve, such as (e.g.) corresponding annular ribs and grooves formed in the flushing module body and the grommets, respectively.

[0140] Position the filter at 1006. The filter can be positioned at 1006 to cover the passage through the flushing module body, such that flushing gas flowing through such passages is directed to the filter. In an embodiment, the filter is circular in shape. In an embodiment, the filter includes, for example, an opening at the center of the filter. In an embodiment, the flushing module body includes a protrusion, and the filter is positioned at 1006 such that the protrusion of the flushing module body protrudes through the opening in the filter. At 1008, attach the filter holder to the flushing module body. The filter holder can be attached to the flushing module by forming a snap-fit ​​engagement between the filter holder and the flushing module body. In an embodiment, features forming the snap-fit ​​engagement are provided around the entire circumference of the flushing module, such as an annular protrusion on the flushing module body and a corresponding annular groove on the filter holder. At 1008, the attachment of the filter holder to the flushing module body may include clamping the filter at the periphery of the filter. In embodiments where the filter includes an opening, both the outer periphery of the filter and the inner periphery defining the opening of the filter can be free from corresponding features of the flushing module body and the filter module holder (e.g., described above and in…). Figure 9A and 9B (Features shown in the diagram) clamping. In an embodiment, clamping the filter seals the edges of the filter, minimizing or eliminating the escape of flushing gas through the side of the filter.

[0141] At 1010, a diffuser retainer is attached to a filter retainer. The diffuser retainer includes a diffuser inlet. The diffuser retainer can be attached to the filter retainer at 1010 via a snap-fit ​​engagement, for example, between corresponding engaging features provided on the diffuser retainer and / or the filter retainer. The diffuser retainer can be configured to support a diffuser. The diffuser retainer may include a diffuser inlet. In an embodiment, method 1000 may further include attaching the diffuser to the diffuser retainer at 1012. In an embodiment, attaching the diffuser includes positioning the diffuser such that it is captured by the diffuser retainer, for example, by positioning the diffuser such that the flared portion of the diffuser is surrounded by the diffuser inlet. In an embodiment, the attachment of the diffuser to the diffuser retainer at 1012 may include inserting the diffuser into the diffuser inlet until the diffuser is fully seated in the diffuser inlet.

[0142] In one embodiment, the rinsing module and diffuser can be mounted into a substrate container. Optionally, mounting the diffuser may include inserting the diffuser 1014 through an aperture on the substrate container. Insertion of the diffuser into the aperture at 1014 can be performed from outside the substrate container. In another embodiment, mounting the diffuser may include inserting at least a portion of the rinsing module into the aperture at 1016 and / or attaching the rinsing module to the substrate container at 1018 using a module holder.

[0143] Figure 11A flowchart illustrating a method for flowing flushing gas through a flushing module according to an embodiment is provided. Method 1100 includes: at 1102, introducing flushing gas at a grommet; at 1104, passing the flushing gas through a check valve; at 1106, guiding the flushing gas through a channel in the flushing module body to a filter; at 1108, filtering the flushing gas; guiding a first portion of the filtered flushing gas to a diffuser inlet 1110; and at 1112, guiding a second portion of the filtered flushing gas out of the flushing module.

[0144] At 1102, flushing gas is introduced at the grommet. The grommet 1102 may interface with a flushing source, such as a flushing gas port located on a tool used with a substrate container containing a flushing module. The flushing gas is provided at any suitable flow rate that can be used for the flushing operation. In embodiments, the flow rate of the flushing gas may be controlled to reduce or avoid vibration or lifting of the substrate container. In embodiments, the flow rate of the flushing gas may be in the range from (1) to 500 standard liters per minute. In embodiments, the flow rate of the flushing gas may be in the range from 200 to 500 standard liters per minute. At 1104, the flushing gas from the grommet passes through a check valve. The check valve allows unidirectional flow of the flushing gas from the grommet into a chamber defined by the flushing module body. At 1106, the flushing gas passes through one or more channels formed in the flushing module body to flow from the chamber to a filter located in the flushing module. At 1108, the flushing gas at the filter is filtered by passing through the filter. The filtration in 1108 can remove any suitable contaminants, such as volatile organic compounds, particulate matter, and the like, based on the structure and composition of the media used in the filter.

[0145] At 1110, a first portion of the flushing gas filtered at 1108 is directed to the diffuser inlet. This first portion of the flushing gas may contain some, but not all, of the flushing gas already filtered at 1108. The direction of the flushing gas to the diffuser inlet may be guided by structural features of the flushing module, such as the shape of the filter holder, the shape of the diffuser holder, and / or the location of the diffuser inlet. The flushing gas entering the diffuser inlet may then proceed into the diffuser and through the diffuser into the substrate container to flush the substrate container.

[0146] At 1112, a second portion of the flushing gas filtered at 1108 is directed out of the flushing module. This second portion of the flushing gas may be some, but not all, of the flushing gas that passed through the filter at 1108, and is different from the first portion that entered the diffuser inlet at 1110. The second portion of the flushing gas may exit the flushing module at 1112 through an opening in one or both of the filter holder and the diffuser holder without reaching the diffuser inlet. In an embodiment, the second portion of the flushing gas enters a chamber defined by a substrate container (e.g., defined by one or both of a housing or a base plate). In an embodiment, the second portion of the flushing gas may be further directed to a second diffuser. In an embodiment, at least some of the flushing gas from the chamber may circulate within the chamber and subsequently reach the diffuser inlet. In an embodiment, the relative amounts of the first and second portions of the flushing gas may be affected by the pressure within the diffuser and / or the chamber.

[0147] aspect:

[0148] It should be understood that any aspect from 1 to 9 can be combined with any aspect from 10 to 31, 32 to 41, 42 to 44, 45 to 51, 52 to 61, 62 to 71, 72 to 76, or 77 to 83. It should be understood that any aspect from 10 to 31 can be combined with any aspect from 32 to 41, 42 to 44, 45 to 51, 52 to 61, 62 to 71, 72 to 76, or 77 to 83. It should be understood that any aspect from 32 to 41 can be combined with any aspect from 42 to 44, 45 to 51, 52 to 61, 62 to 71, 72 to 76, or 77 to 83. It should be understood that any aspect from 42 to 44 can be combined with any aspect from 45 to 51, 52 to 61, 62 to 71, 72 to 76, or 77 to 83. It should be understood that any one of aspects 45 to 51 can be combined with any one of aspects 52 to 61, 62 to 71, 72 to 76, or 77 to 83. It should be understood that any one of aspects 52 to 61 can be combined with any one of aspects 62 to 71, 72 to 76, or 77 to 83. It should be understood that any one of aspects 62 to 71 can be combined with any one of aspects 72 to 76 or 77 to 83. It should be understood that any one of aspects 72 to 76 can be combined with any one of aspects 77 to 83.

[0149] Aspect 1. A method for distributing a stream of rinsing gas into a substrate container, comprising: receiving a stream of rinsing gas at an inlet of a rinsing module; supplying the rinsing gas from an outlet of the rinsing module into a chamber formed by a combination of the rinsing module and a gas distributor, the gas distributor having at least one outlet; and dividing the rinsing gas in the chamber into at least a first flow path to supply the rinsing gas to the at least one outlet of the gas distributor.

[0150] Aspect 2. The method according to aspect 1, wherein dividing the flushing gas further comprises supplying the at least first flow path to supply the first gas distribution device, and dividing the flushing gas into a second flow path to supply the second gas distribution device through the second outlet of the gas distributor.

[0151] Aspect 3. The method according to Aspect 2, wherein supplying the flushing gas flow comprises one or more of the following: directing the flushing gas through a check valve of the flushing module into a passage defined in the module body of the flushing module; directing the flushing gas from the passage into a filter through one or more channels in the module body; directing a first portion of the flushing gas from the filter and the filter holder into a first flow path leading to a first gas distribution device; and directing a second portion of the flushing gas from the filter and the filter holder from the flushing module into a second flow path leading to a second gas distribution device through one or more orifices defined by one or both of the filter holder and the diffuser holder.

[0152] Aspect 4. The method according to any one of aspects 2 to 3, wherein dividing the flushing gas in the chamber further includes regulating the flow of the flushing gas in the second flow path leading to the second gas distribution device.

[0153] Aspect 5. The method according to aspect 4, wherein the flow of the regulating flushing gas includes a control valve to distribute the flow of the flushing gas through the second flow path leading to the second gas distribution device.

[0154] Aspect 6. The method according to any one of aspects 2 to 5, wherein the second flow path is formed by connecting a control valve to a second opening of the chamber.

[0155] Aspect 7. The method according to aspect 6, wherein the connection of the control valve includes snap-fitting the valve body of the control valve to the second opening of the chamber.

[0156] Aspect 8. The method according to any one of aspects 2 to 7, wherein the second flow path is formed by connecting a conduit or fitting to the second opening in the chamber.

[0157] Aspect 9. The method according to aspect 8, wherein the connection of the conduit or fitting comprises snap-fitting the conduit or fitting to the second opening of the chamber.

[0158] Aspect 10. A flushing gas assembly for distributing flushing gas to a substrate container, the flushing gas assembly comprising: a gas distributor including at least one outlet; a flushing module including an inlet, a check valve, and an outlet for receiving a flow of the flushing gas; wherein the combination of the gas distributor and the flushing module forms a chamber, and the chamber is configured to supply the flushing gas to the at least one outlet of the gas distributor.

[0159] Aspect 11. The flushing gas assembly according to aspect 10, wherein the gas distributor includes at least two outlets.

[0160] Aspect 12. The flushing gas assembly according to aspect 11, wherein one of the at least two outlets defines a first opening for guiding a first flow path to a first gas distribution device to distribute a first portion of the flushing gas in a first portion of the substrate container, and one of the at least two outlets defines a second opening for guiding a second flow path to at least one second gas distribution device to distribute a second portion of the flushing gas in a second portion of the substrate container.

[0161] Aspect 13. The flushing gas assembly according to any one of aspects 10 to 12, wherein the chamber at least surrounds the outlet of the flushing module.

[0162] Aspect 14. The flushing gas assembly according to any one of aspects 10 to 13, wherein the flushing module further includes a filter for supplying filtered flushing gas to the outlet of the flushing module.

[0163] Aspect 15. The flushing gas assembly according to any one of aspects 12 to 14, wherein the outlet of the flushing module includes at least one of the following: for supplying the flushing gas from the flushing module to one or more orifices in the chamber or at least partially connected to the outlet of the first gas distribution device.

[0164] Aspect 16. The flushing gas assembly according to any one of aspects 12 to 15, further comprising a control valve connected to the second opening of the chamber for regulating the flow of the flushing gas through the second flow path to the second gas distribution device.

[0165] Aspect 17. The flushing gas assembly according to aspect 16, wherein the control valve is a needle valve, ball valve, fixed orifice valve, or butterfly valve.

[0166] Aspect 18. The flushing gas assembly according to any one of aspects 16 to 17, wherein the control valve includes a valve retainer and a sealing ring for snap-fitting the control valve into the chamber.

[0167] Aspect 19. The flushing gas assembly according to any one of aspects 16 to 18, wherein the control valve includes a safety device for preventing changes to the valve settings of the control valve.

[0168] Aspect 20. The flushing gas assembly according to any one of aspects 12 to 19, further comprising a conduit for forming the second flow path to connect the flow of the flushing gas from the chamber to the second gas distribution device.

[0169] Aspect 21. The flushing gas assembly according to aspect 20, wherein the conduit includes a sealing ring and a pipe retainer for snap-fit ​​connection of the conduit to the second gas distribution device.

[0170] Aspect 22. The flushing gas assembly according to any one of aspects 10 to 15, further comprising a control valve, piping, and a carrier plate, wherein the flushing module, the control valve, and the piping are connected along the top surface of the carrier plate.

[0171] Aspect 23. The flushing gas assembly according to any one of aspects 10 to 22, wherein the upper surface of the chamber is formed by the chamber body, a portion of the base plate, or along the bottom wall of the substrate container.

[0172] Aspect 24. A method for assembling a substrate container having a gas distribution device, comprising: attaching a flushing gas assembly to a bottom wall of the substrate container, wherein the flushing gas assembly includes a gas distributor having at least one outlet; assembling a flushing module including an inlet, a check valve, and an outlet for receiving a flow of flushing gas; inserting the flushing module into the gas distributor to form a chamber such that the chamber is configured to supply the flushing gas to the at least one outlet, wherein the method is performed outside the substrate container.

[0173] Aspect 25. The method according to aspect 24, further comprising attaching a first gas distribution device to the flushing module, wherein the attachment of the flushing gas assembly includes attaching a second flushing gas assembly to the bottom wall of the substrate, wherein the second flushing gas assembly includes a second gas distributor having at least one outlet; wherein inserting the flushing module includes inserting the second flushing module having the second gas distribution device into the second gas distributor to form a second chamber, the second chamber at least surrounding the outlet of the flushing module, such that the second gas distribution device is inserted into the interior space of the substrate container through the at least one outlet of the second gas distributor.

[0174] Aspect 26. The method according to any one of aspects 24 to 25, wherein the gas distributor includes at least two outlets.

[0175] Aspect 27. The method according to aspect 28, wherein the attached flushing gas assembly includes an attached pipeline for connecting a second of the at least two outlets of the gas distributor to a second gas distribution device.

[0176] Aspect 28. The method according to aspect 27, wherein the attachment of the conduit includes a snap-fit ​​connection or a snap-fit ​​connection on the conduit and the second of the at least two outlets of the gas distributor.

[0177] Aspect 29. The method according to any one of aspects 26 to 29, wherein attaching the flushing gas assembly includes attaching a control valve to the second of the at least two outlets of the gas distributor for distributing the flow of flushing gas.

[0178] Aspect 30. The method according to aspect 29, wherein attaching the control valve includes snap-fitting a snap-fitting connection on the inlet of the control valve to a second opening of the chamber.

[0179] Aspect 31. The method according to any one of aspects 20 to 24, wherein attaching the flushing gas assembly includes attaching the flushing gas assembly to a carrier plate for connection to the substrate container.

[0180] Aspect 32. A flushing module comprising:

[0181] Ring;

[0182] A check valve, which is at least partially received in the cable ring;

[0183] The module body includes a cavity configured to receive the grommets and the check valve, the module body defining one or more channels from the cavity;

[0184] Filter;

[0185] Filter holder, the filter holder and the module body are configured to house the filter; and

[0186] A diffuser holder configured to support a diffuser, the diffuser holder including a diffuser inlet;

[0187] The filter holder and the diffuser holder are configured such that a first portion of the gas flow through the filter enters the diffuser inlet and a second portion of the gas flow through the filter passes through one or more orifices defined by one or both of the filter holder and the diffuser holder.

[0188] Aspect 33. The rinsing module according to aspect 32, further comprising the diffuser.

[0189] Aspect 34. The flushing module according to aspect 33, wherein, in a plan view, the diffuser is entirely within the periphery of the module body.

[0190] Aspect 35. A flushing module according to any one of aspects 32 to 34, wherein the module body includes a protrusion extending from a surface, the surface including an end of at least one of the one or more channels.

[0191] Aspect 36. The flushing module according to aspect 35, wherein a portion of the cavity is defined by the protrusion, and a portion of the check valve extends into the portion of the cavity.

[0192] Aspect 37. The flushing module according to any one of aspects 35 to 36, wherein the filter includes an opening defined by an inner periphery, the opening being configured to receive the protrusion.

[0193] Aspect 38. The flushing module according to aspect 37, wherein the filter holder and the module body are configured such that when the filter holder and the module body are snapped together, the filter holder and the module body clamp the filter along the entire inner periphery and along the entire outer periphery of the filter.

[0194] Aspect 39. A flushing module according to any one of aspects 32 to 38, wherein the module body includes a groove disposed on an outer surface of the module body, and the flushing module further includes a circular sealing member disposed in the groove.

[0195] Aspect 40. The flushing module according to any one of aspects 32 to 39, further comprising a module holder configured to engage with one or more features of the substrate container.

[0196] Aspect 41. The flushing module according to any one of aspects 32 to 40, wherein the module body and the filter holder are configured to engage by snap-fit.

[0197] Aspect 42. A method for directing a flushing gas into a substrate container, comprising:

[0198] The flushing gas is received at the grommet of the flushing module;

[0199] The flushing gas is guided into a cavity defined in the module body of the flushing module by a check valve;

[0200] The flushing gas from the cavity is directed to the filter through one or more channels in the main body of the module;

[0201] A first portion of the flushing gas from the filter is directed into a diffuser, which is held in a diffuser holder contained within the flushing module; and

[0202] A second portion of the flushing gas is guided out of the flushing module through one or more orifices defined by one or both of the filter retainer and the diffuser retainer.

[0203] Aspect 43. The method according to aspect 43, wherein the second portion of the flushing gas is directed into a chamber surrounding the flushing module, the method further comprising directing the second portion of the flushing gas from the chamber into a second diffuser.

[0204] Aspect 44. The method according to any one of aspects 42 to 43, wherein the flow rate of the flushing gas received at the grommet is in the range of 500 standard L / min or less.

[0205] Aspect 45. A method of assembling a flushing module, wherein assembling the flushing module comprises:

[0206] Attach the check valve to the cable ring;

[0207] Insert the cable loop into the module body;

[0208] The filter is held between the module body and the filter holder; and

[0209] A diffuser holder is attached to the filter holder, wherein the diffuser holder contains a diffuser inlet.

[0210] Aspect 46. The method according to aspect 45, wherein the filter holder and the diffuser holder are configured such that a first portion of the flow of gas through the filter enters the diffuser inlet and a second portion of the flow of gas through the filter passes through one or more orifices defined by one or both of the filter holder and the diffuser holder.

[0211] Aspect 47. The method according to any one of aspects 45 to 46, further comprising attaching the diffuser to the diffuser holder.

[0212] Aspect 48. The method according to aspect 47, further comprising inserting the diffuser from outside the substrate container through a hole provided on the substrate container and inserting the rinsing module into the hole, such that at least a portion of the rinsing module is received within the hole.

[0213] Aspect 49. The method according to aspect 48, wherein the pores are formed by the outer shell and the bottom plate of the substrate container.

[0214] Aspect 50. The method according to any one of aspects 39 to 43, further comprising attaching a locking ring to the module body such that the locking ring is rotatable independently of the module body.

[0215] Aspect 51. The method according to aspect 44, further comprising inserting the flushing module from outside the substrate container into an aperture disposed on the substrate container such that at least a portion of the flushing module is received within the aperture, and rotating the locking ring such that the locking ring engages one or more engagement features disposed at the aperture.

[0216] Aspect 52. A flushing module comprising:

[0217] Ring;

[0218] A check valve, which is at least partially received in the cable ring;

[0219] The module body includes a cavity configured to receive the grommets and the check valve, the module body defining one or more channels from the cavity;

[0220] Filter;

[0221] A filter holder, wherein the filter holder and the module body are configured to house the filter;

[0222] The module body includes a protrusion extending from a surface, the surface including an end of at least one of the one or more channels, and

[0223] The filter includes an opening defined by an inner periphery, the opening being configured to receive the protrusion.

[0224] Aspect 53. The flushing module according to aspect 52, wherein a portion of the cavity is defined by the protrusion, and a portion of the check valve extends into the portion of the cavity.

[0225] Aspect 54. The flushing module according to any one of aspects 52 to 53, wherein the filter holder and the module body are configured such that when the filter holder and the module body are snapped together, the filter holder and the module body clamp the filter along the entire inner periphery and along the entire outer periphery of the filter.

[0226] Aspect 55. The flushing module according to any one of aspects 52 to 54, further comprising a diffuser retainer configured to support a diffuser, the diffuser retainer including a diffuser inlet.

[0227] Aspect 56. The flushing module according to aspect 55, wherein the filter retainer and the diffuser retainer are configured such that a first portion of the flow of gas through the filter enters the diffuser inlet and a second portion of the flow of gas through the filter passes through one or more orifices defined by one or both of the filter retainer and the diffuser retainer.

[0228] Aspect 57. The flushing module according to any one of aspects 55 to 56, further comprising the diffuser.

[0229] Aspect 58. The flushing module according to aspect 57, wherein, in a plan view, the diffuser is completely within the periphery of the module body.

[0230] Aspect 59. A flushing module according to any one of aspects 52 to 58, wherein the module body includes a groove disposed on an outer surface of the module body, and the flushing module further includes a lip seal disposed in the groove.

[0231] Aspect 60. The flushing module according to any one of aspects 52 to 59, further comprising a module holder configured to engage with one or more features of the substrate container.

[0232] Aspect 61. The flushing module according to any one of aspects 52 to 60, wherein the module body and the filter holder are configured to engage by snap-fit.

[0233] Aspect 62. A method of assembling a flushing module, wherein assembling the flushing module comprises:

[0234] Attach the check valve to the cable ring;

[0235] The grommets are inserted into the module body, wherein the module body includes a surface with protrusions;

[0236] Position the filter with an opening such that the protrusion extends through the opening;

[0237] The filter retainer is attached to the module body such that the filter retainer and the module body clamp the filter at the outer periphery and the inner periphery of the filter, the inner periphery defining the opening.

[0238] Aspect 63. The method according to aspect 62, further comprising attaching a diffuser retainer to the filter retainer, wherein the diffuser retainer includes a diffuser inlet.

[0239] Aspect 64. The method according to aspect 63, wherein the filter holder and the diffuser holder are configured such that a first portion of the flow of gas through the filter enters the diffuser inlet and a second portion of the flow of gas through the filter passes through one or more orifices defined by one or both of the filter holder and the diffuser holder.

[0240] Aspect 65. The method according to any one of aspects 63 to 64, further comprising attaching the diffuser to the diffuser holder.

[0241] Aspect 66. The method according to aspect 65, further comprising inserting the diffuser from outside the substrate container through a hole provided on the substrate container and inserting the rinsing module into the hole, such that at least a portion of the rinsing module is received within the hole.

[0242] Aspect 67. The method according to any one of aspects 62 to 67, further comprising attaching a locking ring to the module body such that the locking ring is rotatable independently of the module body.

[0243] Aspect 68. The method according to aspect 67, further comprising inserting the rinsing module from outside the substrate container into an aperture disposed on the substrate container such that at least a portion of the rinsing module is received within the aperture, and rotating the locking ring such that the locking ring engages one or more engagement features disposed at the aperture.

[0244] Aspect 69. The method according to any one of aspects 62 to 68, wherein the filter holder and the module body clamp the filter over the entire outer periphery of the filter and over the entire inner periphery of the filter.

[0245] Aspect 70. The method according to any one of aspects 62 to 69, wherein the filter retainer and the module body are engaged by a snap-fit.

[0246] Aspect 71. The method according to any one of aspects 62 to 70, wherein the module body defines a cavity, a portion of the cavity is defined by the protrusion, and a portion of the check valve extends into the portion of the cavity.

[0247] Aspect 72. A flushing assembly for a substrate container, comprising:

[0248] The outer casing; and

[0249] A flushing module, wherein the housing and the flushing module define a chamber, the flushing module comprising:

[0250] Ring;

[0251] A check valve, which is at least partially received in the cable ring;

[0252] The module body includes a cavity configured to receive the grommets and the check valve, the module body defining one or more channels from the cavity;

[0253] Filters; and

[0254] A filter holder, and the module body thereof, are configured to house the filter.

[0255] The flushing module is configured to receive a flow of flushing gas, direct the flow of flushing gas to the filter via the check valve, and allow at least a portion of the flow of flushing gas to pass from the flushing module into the chamber.

[0256] Aspect 73. The flushing assembly according to aspect 72, further comprising a diffuser configured to extend from the housing.

[0257] Aspect 74. The flushing assembly according to aspect 73, wherein the diffuser is retained in the housing.

[0258] Aspect 75. The flushing assembly according to aspect 74, wherein the flushing module contacts the diffuser such that the diffuser is held in a pore disposed in the housing.

[0259] Aspect 76. The flushing assembly according to aspect 73, wherein the flushing module further includes a diffuser retainer further configured to support the diffuser.

[0260] Aspect 77. A substrate container comprising a flushing assembly, the flushing assembly comprising:

[0261] The outer casing; and

[0262] A flushing module, wherein the housing and the flushing module define a chamber, the flushing module comprising:

[0263] Ring;

[0264] A check valve, at least partially received in the ring;

[0265] The module body includes a cavity configured to receive the grommets and the check valve, the module body defining one or more channels from the cavity;

[0266] Filters; and

[0267] A filter holder, and the module body thereof, are configured to house the filter.

[0268] The flushing module is configured to receive a flow of flushing gas, direct the flow of flushing gas to the filter via the check valve, and allow at least a portion of the flow of flushing gas to pass from the flushing module into the chamber.

[0269] Aspect 78. The substrate container according to aspect 77, further comprising a diffuser configured to extend from the housing into the interior space of the substrate container.

[0270] Aspect 79. The substrate container according to aspect 78, wherein the diffuser is held within the housing.

[0271] Aspect 80. The substrate container according to aspect 79, wherein the rinsing module contacts the diffuser such that the diffuser is held in a pore disposed in the housing.

[0272] Aspect 81. The substrate container according to any one of aspects 77 to 80, wherein the rinsing module further includes a diffuser holder configured to support the diffuser.

[0273] Aspect 82. The substrate container according to aspect 81, wherein the rinsing module further includes the diffuser, wherein the diffuser extends through the housing and into the interior space of the substrate container.

[0274] Aspect 83. The substrate container according to any one of aspects 77 to 82, wherein:

[0275] The module body includes a protrusion extending from a surface, the surface including an end of at least one of the one or more channels.

[0276] A portion of the cavity is defined by the protrusion, and a portion of the check valve extends into that portion of the cavity.

[0277] The filter includes an opening defined by an inner periphery, the opening being configured to receive the protrusion.

[0278] The examples disclosed in this application should be considered illustrative and non-limiting in all respects. The scope of the invention is indicated by the appended claims rather than by the foregoing description; and all modifications falling within the meaning and scope of the equivalents of the claims are intended to be covered therein.

Claims

1. A flushing module, comprising: Ring; A check valve, at least partially received in the ring; The module body includes a cavity configured to receive the grommets and the check valve, the module body defining one or more channels from the cavity; Filter; A filter holder, wherein the filter holder and the module body are configured to house the filter; and A diffuser holder configured to support a diffuser, the diffuser holder including a diffuser inlet; The filter holder and the diffuser holder are configured such that a first portion of the gas flow through the filter enters the diffuser inlet and a second portion of the gas flow through the filter passes through one or more orifices defined by one or both of the filter holder and the diffuser holder.

2. The rinsing module according to claim 1, further comprising the diffuser.

3. The flushing module according to claim 2, wherein, in a plan view, the diffuser is completely within the periphery of the module body.

4. The flushing module of claim 1, wherein the module body includes a protrusion extending from a surface, the surface including an end of at least one of the one or more channels.

5. The flushing module of claim 4, wherein a portion of the cavity is defined by the protrusion, and a portion of the check valve extends into the portion of the cavity.

6. The flushing module of claim 4, wherein the filter includes an opening defined by an inner periphery, the opening being configured to receive the protrusion.

7. The flushing module of claim 6, wherein the filter holder and the module body are configured such that when the filter holder and the module body are snapped together, the filter holder and the module body clamp the filter along the entire inner periphery and along the entire outer periphery of the filter.

8. The flushing module according to claim 1, wherein the module body includes a groove disposed on the outer surface of the module body, and the flushing module further includes a circular sealing member disposed in the groove.

9. The flushing module of claim 1, further comprising a module holder configured to engage one or more features of the substrate container.

10. The flushing module of claim 1, wherein the module body and the filter holder are configured to engage by snap-fit.

11. A method for guiding a flushing gas into a substrate container, passing the flushing gas through a flushing module, wherein a first portion of the flushing gas flows from the flushing module to a diffuser held by a diffuser holder of the flushing module, and a second portion of the flushing gas exits the flushing module through one or more orifices defined by one or both of a filter holder and the diffuser holder.

12. The method of claim 11, wherein the second portion of the flushing gas is directed into a chamber surrounding the flushing module, the method further comprising directing the second portion of the flushing gas from the chamber into a second diffuser.

13. The method of claim 11, wherein the flow rate of the flushing gas at the inlet of the flushing module is in the range of 200 standard L / min to 500 standard L / min.

14. A substrate container comprising a flushing assembly, the flushing assembly including: shell; and A flushing module, wherein the housing and the flushing module define a chamber, the flushing module comprising: Ring; A check valve, at least partially received in the ring; The module body includes a cavity configured to receive the grommets and the check valve, the module body defining one or more channels from the cavity; Filters; and A filter holder, and the module body thereof, are configured to house the filter. The flushing module is configured to receive a flow of flushing gas, direct the flow of flushing gas to the filter via the check valve, and allow at least a portion of the flow of flushing gas to pass from the flushing module into the chamber.

15. The substrate container of claim 14, further comprising a diffuser configured to extend from the housing into the interior space of the substrate container.

16. The substrate container of claim 15, wherein the diffuser is contained within the housing.

17. The substrate container of claim 16, wherein the rinsing module contacts the diffuser such that the diffuser is held in a pore disposed in the housing.

18. The substrate container of claim 14, wherein the rinsing module further comprises a diffuser holder configured to support the diffuser.

19. The substrate container of claim 18, wherein the rinsing module further includes the diffuser, wherein the diffuser extends through the housing and into the interior space of the substrate container.

20. The substrate container according to claim 14, wherein: The module body includes a protrusion extending from a surface, the surface including an end of at least one of the one or more channels. A portion of the cavity is defined by the protrusion, and a portion of the check valve extends into that portion of the cavity. The filter includes an opening defined by an inner periphery, the opening being configured to receive the protrusion.

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