An integrated controlled wafer scriber vacuum holding system

Abstract

The application belongs to the technical field of wafer processing, and particularly relates to a vacuum holding system of a comprehensive control wafer dicing machine. The system comprises a cutting platform and a vacuum control pipeline, and further comprises: a vacuum holding control pipeline, one end of the vacuum holding control pipeline being in communication with the atmosphere, the other end of the vacuum holding control pipeline being in communication with a wafer stage of the cutting platform, a first vacuum generator, a first electromagnetic valve and a first check valve being arranged on the vacuum holding control pipeline; an electromagnetic valve control circuit, the electromagnetic valve control circuit being used for controlling the first electromagnetic valve to be turned on when the vacuum control pipeline fails; and a check valve control circuit, the check valve control circuit being used for controlling the first check valve to be turned on when the vacuum control pipeline fails. When the vacuum control pipeline fails, the vacuum state of the wafer stage of the cutting platform is maintained through the vacuum holding control pipeline, and an alarm is realized, so that loss caused by vacuum degree drop is prevented.

Description

Technical Field

[0001] This application belongs to the field of wafer processing technology, and specifically relates to a vacuum holding system for a dicing machine with integrated control. Background Technology

[0002] Traditional dicing machines rely on a vacuum system to hold the wafers on the cutting platform. When the circuitry and power supply are normal, the machine operates normally, using I / O power to control solenoid valves. In the event of a malfunction leading to insufficient vacuum, the solenoid valves control alarm lights and buzzers to alert operators and prompt them to troubleshoot the problem.

[0003] However, when a power outage or I / O power supply failure occurs, the original solenoid valves in the equipment will fail, causing the equipment vacuum level to drop without triggering an alarm, resulting in incalculable losses.

[0004] Therefore, it is desirable to have a technical solution to overcome or at least mitigate one of the aforementioned defects of the prior art. Utility Model Content

[0005] The purpose of this application is to provide a comprehensive control vacuum holding system for a dicing machine to solve at least one problem existing in the prior art.

[0006] The technical solution of this application is:

[0007] A comprehensive control vacuum holding system for a dicing machine includes a cutting platform and vacuum control piping, and further includes:

[0008] A vacuum holding control pipeline, one end of which is connected to the atmosphere and the other end of which is connected to the wafer stage of the cutting platform, is provided with a first vacuum generator, a first solenoid valve and a first check valve;

[0009] A solenoid valve control circuit is used to control the first solenoid valve to open when the vacuum control pipeline fails.

[0010] A one-way valve control circuit is provided, which is used to control the first one-way valve to open when the vacuum control pipeline fails.

[0011] In at least one embodiment of this application, a manual valve is further provided on the vacuum holding control pipeline, and the manual valve is connected in parallel with the first solenoid valve.

[0012] In at least one embodiment of this application, the solenoid valve control circuit is provided with a first solenoid valve, a first relay, and a buzzer, wherein,

[0013] When the input contact of the first relay does not receive a fault signal from the vacuum control pipeline, the coil of the first relay is energized, the normally closed contact is in the open state, the first solenoid valve is disconnected, and the buzzer does not work.

[0014] When the input contact of the first relay receives a fault signal in the vacuum control pipeline, the coil of the first relay is disconnected, the normally closed contact is in the energized state, the first solenoid valve is turned on, and the buzzer starts to work.

[0015] In at least one embodiment of this application, the one-way valve control circuit is provided with a first one-way valve and a second relay, wherein,

[0016] When the input contact of the second relay does not receive a fault signal from the vacuum control pipeline, the coil of the second relay is energized, the normally closed contact is in the open state, and the first check valve is disconnected.

[0017] When the input contact of the second relay receives a fault signal in the vacuum control pipeline, the coil of the second relay is disconnected, the normally closed contact is in the energized state, and the first check valve is turned on.

[0018] In at least one embodiment of this application, one end of the vacuum control pipeline is connected to the atmosphere, and the other end of the vacuum control pipeline is connected to the wafer stage of the cutting platform. The vacuum control pipeline is provided with a filter, a second vacuum generator, a second solenoid valve, a second check valve, a buffer tank, and a vacuum pressure gauge.

[0019] It also includes a controller, which is used to receive the vacuum pressure signal from the vacuum pressure gauge, control the opening degree of the second solenoid valve and the second check valve according to the vacuum pressure signal, generate a vacuum control pipeline fault signal according to the vacuum pressure signal, and send the vacuum control pipeline fault signal to the input contacts of the first relay and the second relay.

[0020] In at least one embodiment of this application, a bellows is further provided on the vacuum control pipeline.

[0021] The utility model has at least the following beneficial technical effects:

[0022] The integrated control vacuum holding system of this application maintains the vacuum state of the wafer stage of the dicing platform through the vacuum holding control pipeline when the vacuum control pipeline fails, and also realizes an alarm to prevent the vacuum level from dropping and causing losses. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of a comprehensive control vacuum holding system for a dicing machine according to one embodiment of this application;

[0024] Figure 2 This is a schematic diagram of a solenoid valve control circuit according to one embodiment of this application;

[0025] Figure 3 This is a schematic diagram of a one-way valve control circuit according to one embodiment of this application;

[0026] Figure 4 This is a schematic diagram of a vacuum control pipeline according to one embodiment of this application. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in the embodiments of this application will be described in more detail below with reference to the accompanying drawings. In the drawings, the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The described embodiments are some, but not all, embodiments of this application. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this application, and should not be construed as limiting this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application. The embodiments of this application will be described in detail below with reference to the accompanying drawings.

[0028] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this application.

[0029] The following is in conjunction with the appendix Figures 1 to 4 This application will be described in further detail.

[0030] The application does not provide a comprehensive control vacuum holding system for a dicing machine, including a cutting platform, vacuum control lines, and vacuum holding control lines.

[0031] like Figure 1As shown, one end of the vacuum holding control line is connected to the atmosphere, and the other end is connected to the wafer stage of the cutting platform. The vacuum holding control line is equipped with a first vacuum generator, a first solenoid valve, and a first check valve. The first solenoid valve is controlled to open and close via a solenoid valve control circuit. When the vacuum control line is working normally, the first solenoid valve is opened; when the vacuum control line malfunctions, the first solenoid valve is closed. Similarly, the first check valve is controlled to open and close via a check valve control circuit. When the vacuum control line is working normally, the first check valve is opened; when the vacuum control line malfunctions, the first check valve is closed.

[0032] In a preferred embodiment of this application, a manual valve is also provided on the vacuum holding control pipeline, and the manual valve is connected in parallel with the first solenoid valve. The first solenoid valve and the manual valve form a dual-redundant control. When the solenoid valve control circuit is working normally, the manual valve is open; when the solenoid valve control circuit malfunctions, if it is determined that the problem is not with the power system (first vacuum generator), the manual valve can be manually controlled to open, and the first vacuum generator continues to work, maintaining the vacuum state of the wafer stage until the cause is found.

[0033] In one embodiment of this application, such as Figure 2 As shown, the solenoid valve control circuit includes a first solenoid valve Y1, a first relay K1, and a buzzer H1. In this embodiment, the solenoid valve control circuit uses a 24V power supply. The first relay K1 is connected to the positive and negative terminals of the power supply through a set of contacts, and receives a vacuum control pipeline fault signal through its input contact I0.01. Specifically, when the input contact I0.01 of the first relay K1 does not receive a vacuum control pipeline fault signal, the coil of the first relay K1 is energized, the normally closed contact is open, the first solenoid valve Y1 is open, and the buzzer does not work. When the input contact I0.01 of the first relay K1 receives a vacuum control pipeline fault signal, the coil of the first relay K1 is de-energized, the normally closed contact is energized, the first solenoid valve Y1 is activated, and the buzzer H1 starts working.

[0034] In one embodiment of this application, such as Figure 3As shown, the one-way valve control circuit includes a first one-way valve Y2 and a second relay K2. In this embodiment, the one-way valve control circuit also uses a 24V power supply. The second relay is connected to the positive and negative terminals of the power supply through a set of contacts, and receives a vacuum control pipeline fault signal through its input contact I0.01. Specifically, when the input contact I0.01 of the second relay K2 does not receive a vacuum control pipeline fault signal, the coil of the second relay K2 is energized, the normally closed contact is open, and the first one-way valve Y2 is disconnected; when the input contact I0.01 of the second relay K2 receives a vacuum control pipeline fault signal, the coil of the second relay K2 is de-energized, the normally closed contact is energized, and the first one-way valve Y2 is turned on.

[0035] In one embodiment of this application, such as Figure 4 As shown, one end of the vacuum control pipeline is connected to the atmosphere, and the other end is connected to the wafer stage of the cutting platform. The vacuum control pipeline is equipped with a filter, a second vacuum generator, a second solenoid valve, a second check valve, a buffer tank, and a vacuum pressure gauge. The filter, installed before the inlet of the second vacuum generator, filters dust, debris, impurities, and other particulate matter from the air, preventing them from entering the second vacuum generator and causing wear, blockage, or damage, thus extending its service life. The second vacuum generator generates negative pressure to extract air from the wafer stage of the cutting platform to achieve the required vacuum level. The second solenoid valve regulates the airflow and pressure to meet the vacuum and extraction volume requirements of the cutting platform under different operating conditions. The second check valve prevents backflow of gas, ensuring that gas flows only in one direction, from the cutting platform to the second vacuum generator, preventing reverse gas flow from affecting the system when the second vacuum generator stops working or the system pressure changes. The buffer tank is used to buffer the airflow, stabilize the pressure, reduce airflow pulsation and pressure fluctuations, making the pumping process smoother and improving the system's stability and the efficiency of the second vacuum generator. The vacuum pressure gauge is used to collect vacuum pressure signals and monitor the vacuum level in the pipeline in real time.

[0036] In this embodiment, a controller is also included. The controller receives the vacuum pressure signal from the vacuum pressure gauge, controls the opening degree of the second solenoid valve and the second check valve according to the vacuum pressure signal, generates a vacuum control pipeline fault signal according to the vacuum pressure signal, and sends the vacuum control pipeline fault signal to the input contacts of the first relay and the second relay. Typically, if the vacuum pressure signal is lower than a set pressure threshold, the controller generates a vacuum control pipeline fault signal.

[0037] In a preferred embodiment of this application, a bellows is also provided on the vacuum control pipeline. The bellows has good flexibility and extensibility, which is used to compensate for the displacement and deformation of the pipeline caused by thermal expansion and contraction, installation errors or equipment vibration, etc., to avoid damage to the pipeline due to additional stress, and also helps to reduce the propagation of vibration and noise.

[0038] The integrated control vacuum holding system for a dicing machine disclosed in this application uses independent power supplies for the vacuum control pipeline and the vacuum holding control pipeline. A power outage or malfunction in the vacuum control pipeline does not affect the normal operation of the vacuum holding control pipeline. When the vacuum control pipeline is functioning normally, it provides a vacuum environment to the wafer stage of the dicing platform. In the event of a malfunction in the vacuum control pipeline, the vacuum holding control pipeline maintains the vacuum state of the wafer stage on the dicing platform and triggers an alarm to prevent losses due to a drop in vacuum level.

[0039] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A comprehensive control vacuum holding system for a dicing machine, comprising a cutting platform and vacuum control piping, characterized in that, Also includes: A vacuum holding control pipeline, one end of which is connected to the atmosphere and the other end of which is connected to the wafer stage of the cutting platform, is provided with a first vacuum generator, a first solenoid valve and a first check valve; A solenoid valve control circuit is used to control the first solenoid valve to open when the vacuum control pipeline fails. A one-way valve control circuit is provided, which is used to control the first one-way valve to open when the vacuum control pipeline fails.

2. The integrated control vacuum holding system for a dicing machine according to claim 1, characterized in that, The vacuum holding control line is also equipped with a manual valve, which is connected in parallel with the first solenoid valve.

3. The integrated control vacuum holding system for a dicing machine according to claim 2, characterized in that, The solenoid valve control circuit includes the first solenoid valve, the first relay, and a buzzer. When the input contact of the first relay does not receive a fault signal from the vacuum control pipeline, the coil of the first relay is energized, the normally closed contact is in the open state, the first solenoid valve is disconnected, and the buzzer does not work. When the input contact of the first relay receives a fault signal in the vacuum control pipeline, the coil of the first relay is disconnected, the normally closed contact is in the energized state, the first solenoid valve is turned on, and the buzzer starts to work.

4. The integrated control vacuum holding system for a dicing machine according to claim 3, characterized in that, The one-way valve control circuit is equipped with a first one-way valve and a second relay, wherein... When the input contact of the second relay does not receive a fault signal from the vacuum control pipeline, the coil of the second relay is energized, the normally closed contact is in the open state, and the first check valve is disconnected. When the input contact of the second relay receives a fault signal in the vacuum control pipeline, the coil of the second relay is disconnected, the normally closed contact is in the energized state, and the first check valve is turned on.

5. The integrated control vacuum holding system for a dicing machine according to claim 4, characterized in that, One end of the vacuum control pipeline is connected to the atmosphere, and the other end of the vacuum control pipeline is connected to the wafer stage of the cutting platform. The vacuum control pipeline is equipped with a filter, a second vacuum generator, a second solenoid valve, a second check valve, a buffer tank, and a vacuum pressure gauge. It also includes a controller, which is used to receive the vacuum pressure signal from the vacuum pressure gauge, control the opening degree of the second solenoid valve and the second check valve according to the vacuum pressure signal, generate a vacuum control pipeline fault signal according to the vacuum pressure signal, and send the vacuum control pipeline fault signal to the input contacts of the first relay and the second relay.

6. The integrated control vacuum holding system for a dicing machine according to claim 5, characterized in that, A corrugated pipe is also installed on the vacuum control pipeline.

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