Wavefront distortion dynamic compensation method and system for wavefront modulation module based on thermal implementation

Abstract

The invention provides a wavefront distortion dynamic compensation method and system for a wavefront modulation module based on thermal implementation, and relates to the technical field of wavefront control of an optical system, and the method comprises the steps: obtaining temperature sensing data and wavefront phase distribution, constructing a temperature field, converting the temperature field into a refractive index disturbance field, and calculating thermotropic optical path difference distribution; a coupling transfer matrix of a temperature field and wavefront distortion is established, aberration components are decomposed and mapped to a local temperature control target, and finally, a compensation phase is generated by adjusting local heat dissipation power and driving a phase modulation unit, so that the wavefront distortion caused by a heat effect is dynamically suppressed, and the wavefront modulation precision and the system working stability are improved.

Description

Technical Field

[0001] This invention relates to the field of wavefront control technology for optical systems, and in particular to a method and system for dynamic compensation of wavefront distortion in a wavefront modulation module based on thermal implementation. Background Technology

[0002] As the core component of wavefront modulation modules, the performance limits of spatial light modulators depend on the surface profile accuracy of the optical reflector panel. Any factor that causes the surface profile to deviate from the ideal plane will introduce wavefront distortion, reducing modulation accuracy and diffraction efficiency. In addition to mechanical stress, thermal effects are another key factor leading to surface profile degradation, and are often more prevalent and dynamic.

[0003] When a spatial light modulator is in operation, its internal CMOS driving circuit continuously generates heat, creating a non-uniform temperature field. Simultaneously, in applications such as high-power laser beam shaping and optical tweezers, the device is also subjected to radiant heat from external light sources. The combined effect of these internal and external heat sources causes significant micro-deformation of the optical panel due to differences in material thermal expansion coefficients and structural thermal gradients.

[0004] The current mainstream calibration scheme performs initial static calibration at constant room temperature to generate a fixed compensated phase map. This method is completely unable to cope with wavefront distortion drift caused by dynamic changes in the temperature field during device operation. When the device temperature changes or changes due to workload or ambient temperature, the pre-loaded static compensation map immediately becomes invalid, causing system performance to fluctuate over time and under different operating conditions, making it difficult to meet the stringent long-term stability requirements of high-end applications. Summary of the Invention

[0005] The present invention provides a method and system for dynamic compensation of wavefront distortion in a wavefront modulation module based on thermal implementation, which can solve the problems in the prior art.

[0006] A first aspect of the present invention provides a method for dynamic compensation of wavefront distortion in a wavefront modulation module based on thermal implementation, comprising: Acquire multi-channel temperature sensing data and wavefront phase distribution data of the emitted beam during the operation of the wavefront modulation module; based on the multi-channel temperature sensing data, construct the transient temperature field distribution of the wavefront modulation module, and convert the transient temperature field distribution into a refractive index perturbation field according to the thermo-optic effect coefficient; Based on the cumulative effect of the refractive index perturbation field on the beam propagation path, the spatial distribution of the thermally induced optical path difference is calculated, and the coupling transfer matrix between the temperature field and the wavefront distortion is established by the contribution of the thermally induced optical path difference to the wavefront phase. The wavefront phase distribution data is spatially and frequency-domain decomposed to extract the first aberration component and the second aberration component. Based on the inverse operation of the coupling transfer matrix, the first aberration component and the second aberration component are mapped to the local temperature control targets of different regions of the wavefront modulation module, respectively, to generate regional active thermal management commands and phase modulation commands. The local heat dissipation power of the wavefront modulation module is adjusted according to the active thermal management command, and the phase modulation unit is driven to generate a compensation phase according to the phase modulation command. Through the adjustment of the local heat dissipation power and the superposition of the compensation phase, dynamic suppression of wavefront distortion caused by thermal effects is achieved.

[0007] Based on the multi-channel temperature sensing data, a transient temperature field distribution of the wavefront modulation module is constructed, and the transient temperature field distribution is converted into a refractive index perturbation field according to the thermo-optic effect coefficient, including: Real-time temperature measurements from multiple temperature sensors distributed at different spatial locations within the wavefront modulation module are acquired. Based on the real-time temperature measurements and the spatial coordinates of each temperature sensor, a continuous temperature field distribution is reconstructed in the three-dimensional space of the wavefront modulation module using a spatial interpolation method to obtain the transient temperature field distribution. Obtain the thermo-optical effect coefficient of the wavefront modulation module material, which describes the proportional relationship between the refractive index and temperature; calculate the temperature deviation field of the transient temperature field distribution relative to the reference temperature. The temperature deviation field and the thermo-optical effect coefficient are multiplied point by point to obtain the refractive index change at each spatial location; the refractive index change is superimposed on the reference refractive index of the wavefront modulation module material to obtain the real-time refractive index distribution including the influence of thermal effect, which is determined as the refractive index perturbation field.

[0008] Based on the cumulative effect of the refractive index perturbation field on the beam propagation path, the spatial distribution of the thermally induced optical path difference is calculated, and the coupling transfer matrix between the temperature field and the wavefront distortion is established by the contribution of the thermally induced optical path difference to the wavefront phase, including: The refractive index perturbation field is discretized layer by layer along the optical thickness direction of the wavefront modulation module to obtain multiple refractive index layers; the optical path accumulation of each refractive index layer is calculated layer by layer along the beam propagation direction, and the accumulated optical path value at each spatial position is obtained by summing the product of refractive index and geometric thickness; The difference between the cumulative optical path value and the reference optical path is calculated to obtain the spatial distribution of the thermally induced optical path difference; the ratio of the spatial distribution of the thermally induced optical path difference to the wavelength of the light wave is used to perform a phase wrapping operation to obtain the spatial distribution of the thermally induced phase shift. A temperature sampling grid is established within the spatial range of the transient temperature field distribution, and the nodes of the temperature sampling grid correspond to the local temperature control region of the wavefront modulation module; the temperature values ​​at each temperature sampling grid node are extracted to form a temperature state vector; the thermally induced phase shift values ​​corresponding to each temperature sampling grid node are extracted to form a phase response vector. By using paired data of multiple sets of temperature state vectors and phase response vectors, the temperature-phase linear mapping relationship is solved by the least squares fitting method; the coefficient matrix of the temperature-phase linear mapping relationship is determined as the coupling transfer matrix, and the matrix elements of the coupling transfer matrix characterize the coupling strength of each temperature control region to each phase measurement point.

[0009] Based on the inverse operation of the coupling transfer matrix, the first aberration component and the second aberration component are mapped to local temperature control targets in different regions of the wavefront modulation module, respectively, generating regional active thermal management commands and phase modulation commands, including: Based on the frequency characteristics of spatial frequency domain decomposition, components with frequencies below the spatial frequency threshold are identified as the first aberration component, and components with frequencies above the spatial frequency threshold are identified as the second aberration component. Calculate the ratio of the maximum singular value to the minimum singular value of the coupling transfer matrix, and determine the condition number of the coupling transfer matrix based on the size of the condition number. Select either direct matrix inversion or singular value truncation inversion method based on the selected inversion method. Calculate the generalized inverse matrix of the coupling transfer matrix using the selected inversion method. The first aberration component and the second difference component are respectively multiplied by the generalized inverse matrix to obtain the first temperature control vector and the second temperature control vector. Spatial gradient analysis is performed on the first temperature control vector to calculate the temperature gradient amplitude between each temperature control region; regions with temperature gradient amplitudes less than the gradient threshold are identified as temperature plateau regions, and regions with temperature gradient amplitudes greater than the gradient threshold are identified as temperature drastic change regions; For the temperature plateau region, an active thermal management command dominated by heat conduction is generated based on the first temperature control vector; for the temperature drastic region and all regions corresponding to the second temperature control vector, a phase modulation command dominated by phase compensation is generated.

[0010] For the temperature plateau region, an active thermal management command dominated by heat conduction is generated based on the first temperature control vector; for the temperature drastic region and all regions corresponding to the second temperature control vector, a phase modulation command dominated by phase compensation is generated, including: Extract the temperature deviation between the first temperature control vector and the current temperature measurement value; calculate the heat required for a unit temperature change based on the specific heat capacity of the wavefront modulation module material and the volume of each temperature plateau region; multiply the temperature deviation by the heat required for a unit temperature change to obtain the total heat demand for each temperature plateau region; Based on the preset temperature control response time, the total heat demand is divided by the response time to obtain the heat dissipation power adjustment amount; the current heat dissipation power value is added to the heat dissipation power adjustment amount to obtain the target heat dissipation power value; Based on the magnitude of the heat dissipation power adjustment and the response time, the power adjustment rate is determined through linear rate programming; the active thermal management command is generated based on the target heat dissipation power value and the power adjustment rate. Extract the temperature control component corresponding to the temperature drastic change region from the first temperature control vector and all components from the second temperature control vector; The temperature control component of the temperature drastic change zone and all components of the second temperature control vector are positively mapped through the coupling transfer matrix to calculate the corresponding residual phase error distribution; the residual phase error distribution is unwrapped to obtain a continuous phase error field; the continuous phase error field is inverted to obtain a phase compensation distribution; the phase modulation command is generated based on the phase compensation distribution.

[0011] The local heat dissipation power of the wavefront modulation module is adjusted according to the active thermal management command, and the phase modulation unit is driven to generate a compensation phase according to the phase modulation command; by adjusting the local heat dissipation power and superimposing the compensation phase, dynamic suppression of wavefront distortion caused by thermal effects is achieved, including: The active thermal management command is parsed to extract the target heat dissipation power value and power adjustment rate corresponding to each temperature plateau zone; a power adjustment time series is generated based on the power adjustment rate, wherein the power adjustment time series specifies the time evolution path of the heat dissipation power from the current value to the target heat dissipation power value; The heat dissipation devices in each temperature plateau zone are driven according to the power adjustment time sequence, so that the heat dissipation power of each heat dissipation device is gradually adjusted to the target heat dissipation power value along the time evolution path; The phase modulation command is parsed to extract the phase compensation value at each spatial location in the phase compensation distribution; the phase compensation value is converted into a driving control parameter for the phase modulation unit; and the phase modulation unit is driven to generate a compensation phase equal to the phase compensation value at the corresponding spatial location according to the driving control parameter. The wavefront distribution after the compensated phase modulation is monitored to obtain the residual wavefront distortion; the residual wavefront distortion is compared with a preset wavefront quality index; when the residual wavefront distortion exceeds the preset wavefront quality index, the coupling transfer matrix is ​​updated according to the temperature response data; the active thermal management command and the phase modulation command are recalculated based on the updated coupling transfer matrix to form a dynamic suppression closed loop.

[0012] A second aspect of the present invention provides a dynamic compensation system for wavefront distortion of a wavefront modulation module based on thermal implementation, comprising: The first unit is used to acquire multi-channel temperature sensing data and wavefront phase distribution data of the emitted beam during the operation of the wavefront modulation module; based on the multi-channel temperature sensing data, it constructs the transient temperature field distribution of the wavefront modulation module, and converts the transient temperature field distribution into a refractive index perturbation field according to the thermo-optic effect coefficient; The second unit is used to calculate the spatial distribution of thermally induced optical path difference based on the cumulative effect of the refractive index perturbation field on the beam propagation path, and to establish the coupling transfer matrix between the temperature field and the wavefront distortion by the contribution of the thermally induced optical path difference to the wavefront phase; The third unit is used to perform spatial frequency domain decomposition on the wavefront phase distribution data, extract the first aberration component and the second aberration component; based on the inverse operation of the coupling transfer matrix, the first aberration component and the second aberration component are mapped to the local temperature control targets of different regions of the wavefront modulation module, respectively, to generate regional active thermal management commands and phase modulation commands; The fourth unit is used to adjust the local heat dissipation power of the wavefront modulation module according to the active thermal management command, and at the same time drive the phase modulation unit to generate a compensation phase according to the phase modulation command; through the adjustment of the local heat dissipation power and the superposition of the compensation phase, dynamic suppression of wavefront distortion caused by thermal effects is achieved.

[0013] A third aspect of the embodiments of the present invention, An electronic device is provided, comprising: processor; Memory used to store processor-executable instructions; The processor is configured to invoke instructions stored in the memory to execute the aforementioned method.

[0014] Fourth aspect of the present invention, A computer-readable storage medium is provided, having stored thereon computer program instructions that, when executed by a processor, implement the aforementioned method.

[0015] The beneficial effects of this application are as follows: By acquiring multi-channel temperature sensing data and wavefront phase distribution data, an accurate mapping relationship between the thermal field and wavefront distortion was established, enabling precise characterization of the influence of thermal effects on optical performance.

[0016] A conversion mechanism from transient temperature field to refractive index perturbation field was constructed, and the thermally induced optical path difference was calculated through the cumulative effect. The coupling transfer matrix between temperature field and wavefront distortion was established, and the accurate quantification of thermal-optical effect was realized.

[0017] Aberration components of the wavefront phase are extracted using spatial frequency domain decomposition to distinguish distortion components of different natures, making the compensation scheme more targeted. Based on the inverse operation of the coupling transfer matrix, the mapping from wavefront distortion to temperature control targets is realized, and regional active thermal management commands and phase modulation commands are creatively generated, forming a dual-channel compensation mechanism. Attached Figure Description

[0018] Figure 1 This is a flowchart illustrating the dynamic compensation method for wavefront distortion of a wavefront modulation module based on thermal implementation, according to an embodiment of the present invention.

[0019] Figure 2 This is a diagram of the thermal implementation and temperature monitoring device and the wavefront detection optical path system of Embodiment 1 of the present invention.

[0020] Figure 3 This is the surface profile data of the optical panel of a wavefront modulation module according to an embodiment of the present invention under a constant room temperature (25°C).

[0021] Figure 4 This is the surface profile data of the wavefront modulation module optical panel in Embodiment 1 of the present invention when the temperature in the central area of ​​the panel rises to 45°C due to heat generated by the internal circuit of the optical panel.

[0022] Figure 5 The data represents the surface profile of the optical panel of the wavefront modulation module in Embodiment 1 of the present invention after surface profile compensation is completed at 45°C.

[0023] Figure 6 A schematic diagram of the thermal implementation and temperature monitoring device - front view.

[0024] Figure 7 A schematic diagram of the thermal implementation and temperature monitoring device - side view. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0026] The technical solution of the present invention will be described in detail below with reference to specific embodiments. These specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described again in some embodiments.

[0027] refer to Figures 1 to 7 The present invention provides a method for dynamic compensation of wavefront distortion in a wavefront modulation module based on thermal implementation, comprising: Acquire multi-channel temperature sensing data and wavefront phase distribution data of the emitted beam during the operation of the wavefront modulation module; based on the multi-channel temperature sensing data, construct the transient temperature field distribution of the wavefront modulation module, and convert the transient temperature field distribution into a refractive index perturbation field according to the thermo-optic effect coefficient; Based on the cumulative effect of the refractive index perturbation field on the beam propagation path, the spatial distribution of the thermally induced optical path difference is calculated, and the coupling transfer matrix between the temperature field and the wavefront distortion is established by the contribution of the thermally induced optical path difference to the wavefront phase. The wavefront phase distribution data is spatially and frequency-domain decomposed to extract the first aberration component and the second aberration component. Based on the inverse operation of the coupling transfer matrix, the first aberration component and the second aberration component are mapped to the local temperature control targets of different regions of the wavefront modulation module, respectively, to generate regional active thermal management commands and phase modulation commands. The local heat dissipation power of the wavefront modulation module is adjusted according to the active thermal management command, and the phase modulation unit is driven to generate a compensation phase according to the phase modulation command. Through the adjustment of the local heat dissipation power and the superposition of the compensation phase, dynamic suppression of wavefront distortion caused by thermal effects is achieved.

[0028] In one optional implementation, based on the multi-channel temperature sensing data, a transient temperature field distribution of the wavefront modulation module is constructed, and the transient temperature field distribution is converted into a refractive index perturbation field according to the thermo-optic effect coefficient, including: Real-time temperature measurements from multiple temperature sensors distributed at different spatial locations within the wavefront modulation module are acquired. Based on the real-time temperature measurements and the spatial coordinates of each temperature sensor, a continuous temperature field distribution is reconstructed in the three-dimensional space of the wavefront modulation module using a spatial interpolation method to obtain the transient temperature field distribution. Obtain the thermo-optical effect coefficient of the wavefront modulation module material, which describes the proportional relationship between the refractive index and temperature; calculate the temperature deviation field of the transient temperature field distribution relative to the reference temperature. The temperature deviation field and the thermo-optical effect coefficient are multiplied point by point to obtain the refractive index change at each spatial location; the refractive index change is superimposed on the reference refractive index of the wavefront modulation module material to obtain the real-time refractive index distribution including the influence of thermal effect, which is determined as the refractive index perturbation field.

[0029] In wavefront modulation optical systems, temperature changes cause changes in the refractive index through the thermo-optical effect of materials, which in turn affects the beam transmission quality. To accurately compensate for this effect, it is necessary to construct the transient temperature field distribution of the wavefront modulation module and convert it into a refractive index perturbation field.

[0030] Real-time temperature measurements are obtained from multiple temperature sensors distributed at different spatial locations within the wavefront modulation module. In practical applications, these temperature sensors can be positioned at critical locations within the wavefront modulation module, such as the edges, center, and hotspot areas of the optical elements. These sensors can be thermocouples, thermistors, or fiber Bragg grating temperature sensors, with sampling frequencies typically ranging from 1 Hz to 10 Hz to meet the system's real-time monitoring requirements for temperature changes.

[0031] The spatial layout of the temperature sensors employs a non-uniform distribution strategy, placing a higher density of sensors in areas with larger temperature gradients. For example, in large-aperture optical elements, a sensor can be placed every 30 degrees at the edge, one in the central area, and one every 5 mm near the heat source. The measurements from each sensor are collected by the data acquisition module and transmitted to the data processing unit.

[0032] Based on real-time temperature measurements and the spatial coordinates of each temperature sensor, a continuous temperature field distribution is reconstructed in the three-dimensional space of the wavefront modulation module using spatial interpolation methods. Spatial interpolation methods can include radial basis function interpolation, Kriging interpolation, or cubic spline interpolation. Taking radial basis function interpolation as an example, the three-dimensional spatial coordinate system (x, y, z) of the wavefront modulation module is first determined, and the position of each temperature sensor is represented as (xi, yi, zi), corresponding to the measured temperature value Ti.

[0033] In radial basis function interpolation, the temperature value T(x,y,z) at any spatial point (x,y,z) can be expressed as: T(x,y,z) can be obtained by multiplying the temperature values ​​at each measurement point by their corresponding weighting coefficients and summing the results. The weighting coefficients are determined based on the distance from the point to be calculated to each measurement point; the closer the distance, the greater the weight. Radial basis functions are typically chosen as Gaussian or quadratic functions. The coefficients of the interpolation function are determined by solving a system of linear equations, ultimately establishing a continuous temperature field distribution function within the entire spatial volume of the wavefront modulation module.

[0034] To improve interpolation accuracy, the temperature field can be constrained based on a physical model of heat conduction. For example, in regions without internal heat sources, the temperature distribution should satisfy the Laplace equation; in regions with known heat sources, corrections can be made based on the characteristics of the heat sources. By meshing, the spatial volume of the wavefront modulation module is discretized into grid cells ranging from 0.5 mm to 2 mm, and temperature values ​​are calculated at each grid node to form transient temperature field distribution data.

[0035] The thermo-optic coefficient of the wavefront modulation module material is obtained; this coefficient describes the proportional relationship between the refractive index and temperature. For common optical materials, such as fused silica, the thermo-optic coefficient is approximately 1.0 × 10⁻⁵ / ℃; for BK7 optical glass, it is approximately 3.0 × 10⁻⁶ / ℃. The thermo-optic coefficient of a material can be obtained by consulting a material handbook or through experimental measurement. For composite materials or special optical materials, it may be necessary to measure their thermo-optic coefficient within a specific wavelength and temperature range.

[0036] Calculate the temperature deviation field of the transient temperature field distribution relative to a reference temperature. The reference temperature is typically chosen as the ambient temperature during system calibration or the design operating temperature, such as 20°C. For each spatial point (x, y, z), calculate its temperature deviation ΔT(x, y, z) = T(x, y, z) - Tref, where Tref is the reference temperature.

[0037] The temperature deviation field and the thermo-optical effect coefficient are multiplied point-by-point to obtain the refractive index change at each spatial location. For each point (x, y, z) in space, the refractive index change Δn(x, y, z) = dn / dT × ΔT(x, y, z), where dn / dT is the thermo-optical effect coefficient of the material. In practical calculations, the anisotropy of the material must be considered, as the thermo-optical effect coefficient of some crystalline materials may differ along different axes.

[0038] For wavefront modulation modules in optical systems, if they are composed of multiple materials, the refractive index changes in each material region must be calculated separately, and continuity must be maintained at the material interfaces. For example, for composite optical elements, there may be material layers with different refractive indices and thermo-optical effect coefficients, and these differences need to be considered during modeling.

[0039] The refractive index change is superimposed onto the reference refractive index of the wavefront modulation module material to obtain the real-time refractive index distribution, which includes the influence of thermal effects, and is defined as the refractive index perturbation field. The reference refractive index refers to the refractive index of the material at a reference temperature, which is approximately 1.46 for fused silica at a wavelength of 550 nm. The real-time refractive index n(x,y,z) = n0 + Δn(x,y,z), where n0 is the reference refractive index.

[0040] The accuracy of the refractive index perturbation field calculation directly affects the wavefront correction effect. The accuracy of the refractive index perturbation field can be improved by increasing the number and accuracy of temperature sensors and optimizing the interpolation algorithm. In practical applications, a pre-established lookup table of the relationship between temperature and refractive index variation can be used to accelerate the calculation process and improve the system's real-time response capability.

[0041] The refractive index perturbation field constructed using the above method can be used to calculate the wavefront distortion of light waves after passing through the wavefront modulation module, and then design corresponding compensation strategies. For example, in adaptive optics systems, this can be used to control deformable mirrors or spatial light modulators to achieve wavefront correction and eliminate optical aberrations caused by temperature changes.

[0042] In one optional implementation, the spatial distribution of the thermally induced optical path difference is calculated based on the cumulative effect of the refractive index perturbation field along the beam propagation path, and the coupling transfer matrix between the temperature field and wavefront distortion is established by using the contribution of the thermally induced optical path difference to the wavefront phase, including: The refractive index perturbation field is discretized layer by layer along the optical thickness direction of the wavefront modulation module to obtain multiple refractive index layers; the optical path accumulation of each refractive index layer is calculated layer by layer along the beam propagation direction, and the accumulated optical path value at each spatial position is obtained by summing the product of refractive index and geometric thickness; The difference between the cumulative optical path value and the reference optical path is calculated to obtain the spatial distribution of the thermally induced optical path difference; the ratio of the spatial distribution of the thermally induced optical path difference to the wavelength of the light wave is used to perform a phase wrapping operation to obtain the spatial distribution of the thermally induced phase shift. A temperature sampling grid is established within the spatial range of the transient temperature field distribution, and the nodes of the temperature sampling grid correspond to the local temperature control region of the wavefront modulation module; the temperature values ​​at each temperature sampling grid node are extracted to form a temperature state vector; the thermally induced phase shift values ​​corresponding to each temperature sampling grid node are extracted to form a phase response vector. By using paired data of multiple sets of temperature state vectors and phase response vectors, the temperature-phase linear mapping relationship is solved by the least squares fitting method; the coefficient matrix of the temperature-phase linear mapping relationship is determined as the coupling transfer matrix, and the matrix elements of the coupling transfer matrix characterize the coupling strength of each temperature control region to each phase measurement point.

[0043] The refractive index perturbation field is discretized in layers, dividing the optical thickness direction of the wavefront modulation module into multiple refractive index layers. The thickness of each layer can be set according to the required computational accuracy. For example, for a wavefront modulation module with a total thickness of 10 mm, it can be divided into 100 uniform refractive index layers with a thickness of 0.1 mm. After layering, each layer has a relatively independent refractive index distribution within its thickness range. This discretization process can more accurately reflect the refractive index changes caused by temperature gradients.

[0044] The optical path accumulation of the layered refractive index field is calculated. Assuming the beam propagates along the z-axis, at each transverse coordinate point (x, y), the cumulative optical path value is obtained by calculating and summing the optical path contributions of the beam as it passes through each refractive index layer. For the i-th refractive index layer, its optical path contribution is the product of the refractive index value n_i(x, y) of that layer and its geometric thickness Δz_i. The total cumulative optical path L(x, y) is the sum of the contributions from all layers. For each spatial location (x,y) in the wavefront modulation module, the spatial distribution of the thermally induced optical path difference OPD(x,y) can be obtained by calculating the difference between its cumulative optical path L(x,y) and the optical path L_ref(x,y) in the reference state (usually without thermal disturbance). The reference optical path can be obtained through the same calculation process, but using the refractive index distribution at the reference temperature.

[0045] The thermally induced optical path difference is converted into a phase shift. The phase shift φ(x,y) is related to the optical path difference OPD(x,y) and the wavelength λ: the phase shift is equal to 2π times the ratio of the optical path difference to the wavelength. A phase wrapping operation is performed on the calculation results to ensure that the phase value falls within the interval [0, 2π), thus obtaining the spatial distribution of the thermally induced phase shift.

[0046] A temperature sampling grid is established within the temperature field space. The design of the sampling grid must correspond to the actual control unit of the wavefront modulation module. For example, for an 8×8 phased array wavefront modulator, a corresponding 8×8 temperature sampling grid can be established, with each grid node corresponding to a temperature control region. The temperature values ​​at each grid node are extracted from the transient temperature field distribution to form a temperature state vector T=[T_1, T_2, ..., T_m], where m is the total number of temperature control regions.

[0047] At the same spatial location, the corresponding phase values ​​are extracted from the thermally induced phase shift distribution to form a phase response vector φ=[φ_1, φ_2, ..., φ_n], where n is the total number of phase measurement points. Ideally, n should be equal to or greater than m to ensure the solution of the system equations.

[0048] By changing the temperature field distribution, multiple sets of paired data of temperature state vectors and phase response vectors can be obtained. For example, the temperature distribution and corresponding phase response under different operating power and environmental conditions can be simulated or actually measured to construct a dataset {(T^1,φ^1), (T^2,φ^2), ..., (T^k,φ^k)}, where k is the number of data sets.

[0049] Based on multiple sets of collected data, the least squares fitting method is used to solve for the temperature-phase linear mapping relationship. Let the coupling transfer matrix be A, then φ = A·T. For k sets of data, a matrix equation Φ = A·T_all can be constructed, where Φ is the matrix composed of k sets of phase response vectors, and T_all is the matrix composed of k sets of temperature state vectors. The coupling transfer matrix is ​​obtained by solving A = (Φ·T_all^T)(T_all·T_all^T)^(-1).

[0050] The element A_ij of the coupling transfer matrix A represents the coupling strength between the j-th temperature control region and the i-th phase measurement point, reflecting the degree of influence of temperature changes on the phase. This matrix can be used to predict wavefront distortion under arbitrary temperature conditions, and can also be used to inversely solve for the temperature distribution required to achieve specific wavefront correction.

[0051] In practical applications, the accuracy of the coupling transfer matrix can be optimized by adjusting parameters such as discretization precision, sampling grid density, and the number of data acquisitions. For example, in high-precision laser systems, finer refractive index layer division and denser temperature sampling grids may be needed to capture the effects of small-scale temperature gradients; while in applications with lower precision requirements, computational complexity can be appropriately reduced to improve system response speed.

[0052] The temperature-phase coupling transfer matrix established through the above steps provides a quantitative description of wavefront distortion caused by thermal effects, which is the basis for realizing adaptive wavefront correction and can effectively improve the imaging quality and energy transmission efficiency of optical systems under thermal disturbance environments.

[0053] In one optional implementation, based on the inverse operation of the coupling transfer matrix, the first aberration component and the second aberration component are respectively mapped to the local temperature control targets of different regions of the wavefront modulation module, generating regional active thermal management commands and phase modulation commands, including: Based on the frequency characteristics of spatial frequency domain decomposition, components with frequencies below the spatial frequency threshold are identified as the first aberration component, and components with frequencies above the spatial frequency threshold are identified as the second aberration component. Calculate the ratio of the maximum singular value to the minimum singular value of the coupling transfer matrix, and determine the condition number of the coupling transfer matrix based on the size of the condition number. Select either direct matrix inversion or singular value truncation inversion method based on the selected inversion method. Calculate the generalized inverse matrix of the coupling transfer matrix using the selected inversion method. The first aberration component and the second difference component are respectively multiplied by the generalized inverse matrix to obtain the first temperature control vector and the second temperature control vector. Spatial gradient analysis is performed on the first temperature control vector to calculate the temperature gradient amplitude between each temperature control region; regions with temperature gradient amplitudes less than the gradient threshold are identified as temperature plateau regions, and regions with temperature gradient amplitudes greater than the gradient threshold are identified as temperature drastic change regions; For the temperature plateau region, an active thermal management command dominated by heat conduction is generated based on the first temperature control vector; for the temperature drastic region and all regions corresponding to the second temperature control vector, a phase modulation command dominated by phase compensation is generated.

[0054] Based on the frequency characteristics of spatial frequency domain decomposition, wavefront aberrations are classified. Fourier transform is used to convert wavefront errors to the spatial frequency domain, and a spatial frequency threshold suitable for the current optical system is set; for example, 10 line pairs / mm can be chosen as the dividing point in a large-aperture optical system. Components with frequencies below this spatial frequency threshold are identified as the first aberration component, mainly including low-order aberrations such as defocus, astigmatism, and coma; components with frequencies above this spatial frequency threshold are identified as the second aberration component, including high-frequency surface shape errors and local irregularities. This frequency-based decomposition allows for more targeted subsequent correction strategies.

[0055] The ratio of the maximum to the minimum singular value of the coupling transfer matrix is ​​calculated, and this ratio is determined as the condition number of the matrix. When the condition number is less than a preset threshold (e.g., 100), it indicates good matrix stability, and standard matrix inversion methods, such as Gaussian-Jordan elimination, can be directly applied. When the condition number is greater than the threshold, it indicates a high degree of ill-conditioning of the matrix. In this case, a singular value truncation inversion method is used to retain singular values ​​that contribute significantly (e.g., singular values ​​with a contribution rate of 95%) to improve solution stability. The generalized inverse matrix of the coupling transfer matrix is ​​then calculated using the selected method.

[0056] Using the calculated generalized inverse matrix, matrix-vector multiplication is performed with the first aberration component and the second aberration component respectively to obtain the first temperature control vector and the second temperature control vector. Taking a wavefront modulation module with a 64×64 grid as an example, if the first aberration component is a 64×64 vector, multiplying it with the generalized inverse matrix of the corresponding dimension yields the temperature control value corresponding to each control region.

[0057] Spatial gradient analysis is performed on the first temperature control vector to evaluate the rate of temperature change between adjacent control regions. Specifically, the temperature difference between adjacent temperature control regions is calculated and divided by the region spacing to obtain the temperature gradient amplitude. A reasonable gradient threshold is set based on the thermal stress tolerance of the optical material, for example, 0.5℃ / mm. Regions with temperature gradient amplitudes less than this threshold are identified as temperature plateaus, suitable for regulation via heat conduction; regions with temperature gradient amplitudes greater than this threshold are identified as regions of rapid temperature change, where direct thermal control might lead to excessive thermal stress.

[0058] For each identified region, corresponding control commands are generated. For regions with stable temperatures, active thermal management commands dominated by heat conduction are generated based on the target temperature value of the corresponding region in the first temperature control vector. These commands may include parameters such as the target temperature value, heating / cooling rate, and stabilization time for each control region. For example, for a region that needs to be heated by 0.2℃, a slow heating rate of 0.05℃ / minute can be set to ensure uniform temperature distribution.

[0059] For the temperature-dependent regions and the entire area corresponding to the second temperature control vector, since direct thermal control may introduce additional errors or thermal stress, phase modulation commands dominated by phase compensation are instead generated. These commands include the phase value, modulation rate, and response time parameters that need to be compensated for in each region. For example, for high-frequency surface error regions, the corresponding phase compensation amount can be directly calculated, and fast phase modulation can be achieved through devices such as liquid crystal spatial light modulators or deformable mirrors.

[0060] The aforementioned regional control strategy achieves a synergistic effect of thermal management correction for low-order aberrations and phase compensation for high-order aberrations, effectively improving the accuracy and efficiency of wavefront correction. In practical applications, the spatial frequency threshold, condition number threshold, and temperature gradient threshold can be flexibly adjusted according to the specific optical system characteristics and correction requirements to optimize the correction effect.

[0061] In a space telescope optical system application scenario, when the initial wavefront error peak-to-valley value reached 1.2λ (λ being the operating wavelength), the above method was used for correction. After spatial frequency domain decomposition and inverse operation of the coupling transfer matrix, the 0.8λ peak-to-valley aberration was corrected in the temperature-smooth region, and the remaining 0.4λ peak-to-valley aberration was compensated through phase modulation commands. Finally, the system wavefront error was reduced to 0.05λ, meeting the requirements for high-precision imaging.

[0062] In one optional implementation, for the temperature plateau region, an active thermal management command dominated by heat conduction is generated based on the first temperature control vector; for the temperature drastic region and all regions corresponding to the second temperature control vector, a phase modulation command dominated by phase compensation is generated, including: Extract the temperature deviation between the first temperature control vector and the current temperature measurement value; calculate the heat required for a unit temperature change based on the specific heat capacity of the wavefront modulation module material and the volume of each temperature plateau region; multiply the temperature deviation by the heat required for a unit temperature change to obtain the total heat demand for each temperature plateau region; Based on the preset temperature control response time, the total heat demand is divided by the response time to obtain the heat dissipation power adjustment amount; the current heat dissipation power value is added to the heat dissipation power adjustment amount to obtain the target heat dissipation power value; Based on the magnitude of the heat dissipation power adjustment and the response time, the power adjustment rate is determined through linear rate programming; the active thermal management command is generated based on the target heat dissipation power value and the power adjustment rate. Extract the temperature control component corresponding to the temperature drastic change region from the first temperature control vector and all components from the second temperature control vector; The temperature control component of the temperature drastic change zone and all components of the second temperature control vector are positively mapped through the coupling transfer matrix to calculate the corresponding residual phase error distribution; the residual phase error distribution is unwrapped to obtain a continuous phase error field; the continuous phase error field is inverted to obtain a phase compensation distribution; the phase modulation command is generated based on the phase compensation distribution.

[0063] Temperature measurement data is acquired in the wavefront modulation system, typically from an array of temperature sensors distributed across various locations within the wavefront modulation module. These sensors monitor the temperature distribution within the module in real time, providing complete temperature field information. Based on the acquired temperature data, temperature gradient analysis is performed to calculate the rate of temperature change between adjacent measurement points. Specifically, for any two adjacent measurement points i and j, the temperature gradient is calculated as follows: Temperature gradient(i,j) = |Temperature(i) - Temperature(j)| / Distance(i,j).

[0064] Regions are divided based on a threshold set using the calculated temperature gradient. If the temperature gradient of a region exceeds the preset threshold (e.g., 5 degrees Celsius per centimeter), the region is marked as a region of rapid temperature change; regions with a temperature gradient below the threshold are marked as regions of moderate temperature. This region division lays the foundation for subsequent differentiated control.

[0065] A temperature-phase coupling transfer matrix is ​​constructed, which describes the effect of temperature changes on the optical phase. This matrix is ​​built using data obtained through experimental measurements or theoretical calculations, and the matrix elements represent the phase change caused by a unit temperature change. For example, for a wavefront modulation element made of silicon, its temperature-phase coefficient is approximately 2π / 100 radians per degree Celsius.

[0066] Based on the region division results and the temperature-phase coupling transfer matrix, two temperature control vectors are generated. The first temperature control vector includes the target temperature distribution of all regions (temperature flat zones and temperature abrupt change zones); the second temperature control vector is specifically designed for those temperature abrupt change zones that are difficult to respond to quickly by thermal management, providing them with additional phase compensation control.

[0067] For regions with stable temperatures, active thermal management commands dominated by heat conduction are generated based on the first temperature control vector. First, the temperature deviation between the first temperature control vector and the current temperature measurement is extracted. For example, if the current temperature in a certain region is 22.5 degrees Celsius and the target temperature is 23.0 degrees Celsius, the temperature deviation is 0.5 degrees Celsius. Based on the specific heat capacity of the wavefront modulation module material (e.g., approximately 0.7 J / g·K for silicon) and the volume of each stable temperature region (e.g., a region with a volume of 0.5 cubic centimeters and a density of 2.3 g / cm³), the heat required for a unit temperature change is calculated. For example, if the mass of this region is 1.15 grams, then a unit temperature change requires 0.805 joules of heat.

[0068] Multiply the temperature deviation by the heat required per unit temperature change to obtain the total heat demand for each temperature plateau zone, such as 0.5 degrees Celsius × 0.805 joules / degree Celsius = 0.4025 joules. Based on the preset temperature control response time (e.g., 2 seconds), divide the total heat demand by the response time to obtain the heat dissipation power adjustment, i.e., 0.4025 joules ÷ 2 seconds = 0.20125 watts. Add the current heat dissipation power value (e.g., 0.15 watts) to the heat dissipation power adjustment to obtain the target heat dissipation power value of 0.35125 watts.

[0069] Based on the magnitude and response time of the power adjustment, the power regulation rate is determined through linear rate programming. For example, adjusting by 0.01 watts every 0.1 seconds, the power adjustment is smoothly completed within 2 seconds. An active thermal management command is generated based on the target power value and the power regulation rate, and this command is sent to the temperature control hardware to execute the corresponding heating or cooling operation.

[0070] For the regions corresponding to abrupt temperature changes and the second temperature control vector, a phase modulation command dominated by phase compensation is generated. First, the temperature control component corresponding to the abrupt temperature change region in the first temperature control vector and all components of the second temperature control vector are extracted. For example, if a 2-degree Celsius temperature drop is required in the abrupt temperature change region, the corresponding component of the second temperature control vector indicates that this temperature drop cannot be achieved in a timely manner through thermal management, and phase compensation is required.

[0071] The temperature control components in the temperature-dependent region and all components of the second temperature control vector are forward mapped using a coupling transfer matrix to calculate the corresponding residual phase error distribution. Assuming a 2-degree Celsius temperature change is mapped to a 0.04π radian phase change, this phase error needs to be compensated for through direct phase modulation. The residual phase error distribution is unwrapped to obtain a continuous phase error field, eliminating possible 2π jumps. The continuous phase error field is then inverted to obtain the phase compensation distribution, such as -0.04π radians. Based on the phase compensation distribution, a phase modulation command is generated to control the phase modulation device to directly correct the optical wave phase.

[0072] By employing the aforementioned hybrid control strategy, the stability and energy efficiency advantages of heat conduction management in the temperature-gradient region are fully utilized, while overcoming its slow response speed in the temperature-varying region, thus achieving efficient temperature and phase control of the wavefront modulation system.

[0073] In one optional implementation, the local heat dissipation power of the wavefront modulation module is adjusted according to the active thermal management command, and the phase modulation unit is driven to generate a compensation phase according to the phase modulation command; the dynamic suppression of wavefront distortion caused by thermal effects is achieved through the adjustment of the local heat dissipation power and the superposition of the compensation phase, including: The active thermal management command is parsed to extract the target heat dissipation power value and power adjustment rate corresponding to each temperature plateau zone; a power adjustment time series is generated based on the power adjustment rate, wherein the power adjustment time series specifies the time evolution path of the heat dissipation power from the current value to the target heat dissipation power value; The heat dissipation devices in each temperature plateau zone are driven according to the power adjustment time sequence, so that the heat dissipation power of each heat dissipation device is gradually adjusted to the target heat dissipation power value along the time evolution path; The phase modulation command is parsed to extract the phase compensation value at each spatial location in the phase compensation distribution; the phase compensation value is converted into a driving control parameter for the phase modulation unit; and the phase modulation unit is driven to generate a compensation phase equal to the phase compensation value at the corresponding spatial location according to the driving control parameter. The wavefront distribution after the compensated phase modulation is monitored to obtain the residual wavefront distortion; the residual wavefront distortion is compared with a preset wavefront quality index; when the residual wavefront distortion exceeds the preset wavefront quality index, the coupling transfer matrix is ​​updated according to the temperature response data; the active thermal management command and the phase modulation command are recalculated based on the updated coupling transfer matrix to form a dynamic suppression closed loop.

[0074] The process of dynamically suppressing wavefront distortion caused by thermal effects by adjusting the local heat dissipation power of the wavefront modulation module according to the active thermal management command, and driving the phase modulation unit to generate a compensation phase according to the phase modulation command, includes the following implementation steps: The active thermal management commands are parsed to extract the target heat dissipation power value and power regulation rate corresponding to each temperature plateau zone. In one implementation, the active thermal management commands use JSON format data packets, which contain the identifier IDs of multiple temperature plateau zones, the target heat dissipation power value (in watts), and the power regulation rate (in watts per second). For example, for the temperature plateau zone identified as "Zone_A", its target heat dissipation power value is 15.5 watts, and its power regulation rate is 0.8 watts per second.

[0075] A power regulation time series is generated based on the extracted power regulation rate. This time series defines the time evolution path of the heat dissipation power from its current value to the target heat dissipation power value. To avoid thermal shock, a smooth transition strategy is typically adopted for the time evolution path. In practical applications, linear interpolation or S-curve interpolation methods can be used to generate a smooth transition power regulation curve, reducing temperature gradient fluctuations.

[0076] The generated power adjustment time sequence drives the heat dissipation devices in each temperature plateau zone, gradually adjusting the heat dissipation power of each device to the target value along the time evolution path. The heat dissipation device can be an active temperature control module based on semiconductor cooling devices, or a combination system of variable speed fans and liquid cooling. In one specific embodiment, the heat dissipation device uses a PWM-controlled thermoelectric cooler (TEC), precisely controlling the heat dissipation power by adjusting the duty cycle of the PWM signal. During power adjustment, a closed-loop PID control algorithm is used to monitor the deviation between the actual heat dissipation power and the power specified in the time sequence in real time, dynamically adjusting the PWM control signal to ensure that the heat dissipation power changes strictly according to the preset time evolution path.

[0077] In addition to adjusting the heat dissipation power, it is also necessary to parse the phase modulation command and extract the phase compensation value at each spatial location in the phase compensation distribution. The phase compensation distribution is usually given in the form of a two-dimensional matrix, where each element of the matrix represents the phase compensation value at the corresponding spatial location, in radians. During the parsing process, the matching problem between the spatial resolution of the phase compensation value and the physical size of the phase modulation unit needs to be considered, and spatial resampling processing may be necessary.

[0078] The extracted phase compensation values ​​are converted into drive control parameters for the phase modulation unit. Depending on the type of phase modulation unit, the drive control parameters may be voltage values, digital control words, or other forms. For example, for a liquid crystal spatial light modulator (LCSLM), the phase compensation values ​​need to be mapped to corresponding grayscale values; for a deformable mirror (DM), they need to be converted into actuator displacement. This mapping relationship is usually based on the calibration data of the phase modulation unit, taking into account the nonlinear response characteristics of the device. In practical applications, a lookup table (LUT) can be established to achieve efficient conversion.

[0079] The phase modulation unit is driven by the drive control parameters to generate a compensation phase equal to the phase compensation value at the corresponding spatial position. This step involves writing control data to the phase modulation unit and ensuring its correct response. For high refresh rate applications, the response time characteristics of the phase modulation unit need to be considered, and the update sequence of the control data needs to be reasonably arranged to avoid timing distortion caused by response lag.

[0080] After phase compensation is completed, the wavefront distribution after phase modulation needs to be monitored to obtain the residual wavefront distortion. Monitoring can be performed using beam splitting, employing a Shack-Hartmann wavefront sensor or an interferometric measurement system to acquire wavefront data in real time. Wavefront data is typically represented in the form of Zernike polynomial coefficients or wavefront height maps.

[0081] The obtained residual wavefront distortion is compared with a preset wavefront quality index. The wavefront quality index can be the wavefront RMS error, the Strehl ratio, or the upper limit of the amplitude of a specific wavefront distortion mode. For example, in high-precision optical systems, the wavefront RMS error is typically required to be controlled within one-tenth of the wavelength.

[0082] When the residual wavefront distortion exceeds the preset wavefront quality index, the coupling transfer matrix is ​​updated based on the temperature response data. The temperature response data includes the temperature distribution difference before and after the change in heat dissipation power, as well as the corresponding wavefront change information. The coupling transfer matrix is ​​updated using recursive least squares or batch least squares, incorporating the newly acquired temperature-wavefront response data into the existing model to improve the model's accuracy.

[0083] The active thermal management command and phase modulation command are recalculated based on the updated coupling transfer matrix to form a dynamic suppression closed loop. The recalculation process can employ a robust control algorithm, comprehensively considering the synergistic effects of thermal management and phase modulation to generate the optimal control strategy. The frequency of the closed-loop control is determined based on the system's thermal time constant and wavefront change rate, typically on the order of 0.1-10 Hz.

[0084] By iteratively executing the above steps, the thermal management strategy and phase compensation scheme are continuously optimized, achieving efficient dynamic suppression of wavefront distortion caused by thermal effects and effectively ensuring the stable performance of the optical system in complex working environments.

[0085] This application also provides another specific implementation method: Step 1: System calibration and model building phase; (1) Apply different thermal load distributions according to a preset sequence through the distributed thermal excitation module.

[0086] (2) For each type of heat load, after the temperature field stabilizes, the temperature field image T_i and the corresponding wavefront distortion W_i are collected and recorded synchronously.

[0087] (3) Based on the collected (T_i, W_i) data pairs, a temperature field-wavefront distortion prediction model M is established through regression analysis or neural network training.

[0088] Step Two: Real-time Dynamic Compensation Phase; (1) During the operation of the spatial light modulator, the temperature field mapping module works continuously to obtain the real-time temperature field image T_real.

[0089] (2) Input T_real into the constructed prediction model M and calculate the predicted wavefront distortion W_pred in real time.

[0090] (3) Calculate and generate its phase conjugate compensation diagram based on W_pred.

[0091] (4) Digitally overlay the compensation diagram with the target waveform phase diagram.

[0092] (5) Load the superimposed final phase map into the spatial light modulator.

[0093] This embodiment provides a schematic diagram of dynamic compensation for wavefront distortion implemented thermally in a wavefront modulation module. (See attached diagram.) Figure 2 This system includes: a laser, a beam splitting and expanding system, a wavefront modulation module panel, a thermal implementation and temperature monitoring device, a wavefront sensor, and a central processing unit. The light emitted by the laser is expanded by the beam splitting and expanding system into a spot with the maximum effective control diameter of the wavefront modulation module. This spot then strikes the optical panel of the wavefront modulation module, and after reflection, it enters the wavefront sensor. The wavefront sensor captures and calculates the wavefront phase.

[0094] The thermal implementation and temperature monitoring device is tightly attached to the back frame of the wavefront modulation module's optical panel. It includes a 4x4 array of miniature thermoelectric coolers and correspondingly arranged high-precision thermistors. The central processing unit controls the current direction and magnitude of each TEC, thereby achieving precise heating or cooling of specific areas of the panel and simultaneously reading the temperature values ​​fed back by all thermistors.

[0095] Calibration process: The central processing unit controls the TEC array to apply a series of preset temperature gradient distributions (e.g., simulating typical operating conditions such as center heating, edge heating, and linear gradient), while simultaneously recording the wavefront distortion (the first 15 Zernike coefficients) measured by the wavefront sensor after each temperature field stabilizes. After collecting sufficient data, a neural network model M_thermal is trained. The input of this model is a 16-dimensional temperature distribution vector, and the output is a 15-dimensional Zernike coefficient vector.

[0096] Working process: When the wavefront modulation module is used in a high-power laser beam shaping system, the panel temperature field changes dynamically due to the continuous heating of its internal circuitry. At this time, the central processing unit continuously reads the values ​​from 16 temperature sensors and inputs them into the trained model M_thermal to predict the Zernike coefficients of thermally induced wavefront distortion caused by the current temperature field in real time.

[0097] Subsequently, a compensation map with opposite phase is calculated and superimposed on the phase map required for beam shaping, and then sent together to the wavefront modulation module driver. This ensures that the wavefront of the beam emitted from the wavefront modulation module can effectively resist the effects of internal heating and external ambient temperature fluctuations, and always maintains good wavefront quality.

[0098] The surface profile data of the ITO glass optical panel of the wavefront modulation module under constant temperature (25°C) conditions are as follows: Figure 3 As shown, PV=0.666λ, RMS=0.153λ.

[0099] When the module continues to operate, the internal circuitry generates heat, causing the temperature in the central area of ​​the ITO panel to rise to 45°C. Its surface data is as follows: Figure 4 As shown, PV=0.804λ, RMS=0.193λ, and obvious thermally induced arching distortion is visible in the 3D image.

[0100] After applying the compensation method described in this embodiment, even if the panel is still in a non-uniform temperature field of 45°C, its compensated surface data is as follows: Figure 5 As shown, PV=0.616λ, RMS=0.137λ, and the surface data is restored to room temperature, which strongly proves the feasibility and efficiency of this scheme in compensating for thermally induced wavefront distortion.

[0101] This invention provides a dynamic compensation system for wavefront distortion of a wavefront modulation module based on thermal implementation, comprising: The first unit is used to acquire multi-channel temperature sensing data and wavefront phase distribution data of the emitted beam during the operation of the wavefront modulation module; based on the multi-channel temperature sensing data, it constructs the transient temperature field distribution of the wavefront modulation module, and converts the transient temperature field distribution into a refractive index perturbation field according to the thermo-optic effect coefficient; The second unit is used to calculate the spatial distribution of thermally induced optical path difference based on the cumulative effect of the refractive index perturbation field on the beam propagation path, and to establish the coupling transfer matrix between the temperature field and the wavefront distortion by the contribution of the thermally induced optical path difference to the wavefront phase; The third unit is used to perform spatial frequency domain decomposition on the wavefront phase distribution data, extract the first aberration component and the second aberration component; based on the inverse operation of the coupling transfer matrix, the first aberration component and the second aberration component are mapped to the local temperature control targets of different regions of the wavefront modulation module, respectively, to generate regional active thermal management commands and phase modulation commands; The fourth unit is used to adjust the local heat dissipation power of the wavefront modulation module according to the active thermal management command, and at the same time drive the phase modulation unit to generate a compensation phase according to the phase modulation command; through the adjustment of the local heat dissipation power and the superposition of the compensation phase, dynamic suppression of wavefront distortion caused by thermal effects is achieved.

[0102] A third aspect of the present invention provides an electronic device, comprising: processor; Memory used to store processor-executable instructions; The processor is configured to invoke instructions stored in the memory to execute the aforementioned method.

[0103] A fourth aspect of the present invention provides a computer-readable storage medium having stored thereon computer program instructions that, when executed by a processor, implement the aforementioned method.

[0104] This invention can be a method, apparatus, system, and / or computer program product. The computer program product may include a computer-readable storage medium having computer-readable program instructions loaded thereon for performing various aspects of the invention.

[0105] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for dynamic compensation of wavefront distortion based on thermal implementation of a wavefront modulation module, characterized in that, include: Acquire multi-channel temperature sensing data and wavefront phase distribution data of the emitted beam during the operation of the wavefront modulation module; based on the multi-channel temperature sensing data, construct the transient temperature field distribution of the wavefront modulation module, and convert the transient temperature field distribution into a refractive index perturbation field according to the thermo-optic effect coefficient; Based on the cumulative effect of the refractive index perturbation field on the beam propagation path, the spatial distribution of the thermally induced optical path difference is calculated, and the coupling transfer matrix between the temperature field and the wavefront distortion is established by the contribution of the thermally induced optical path difference to the wavefront phase. The wavefront phase distribution data is spatially and frequency-domain decomposed to extract the first aberration component and the second aberration component. Based on the inverse operation of the coupling transfer matrix, the first aberration component and the second aberration component are mapped to the local temperature control targets of different regions of the wavefront modulation module, respectively, to generate regional active thermal management commands and phase modulation commands. The local heat dissipation power of the wavefront modulation module is adjusted according to the active thermal management command, and the phase modulation unit is driven to generate a compensation phase according to the phase modulation command. Through the adjustment of the local heat dissipation power and the superposition of the compensation phase, dynamic suppression of wavefront distortion caused by thermal effects is achieved.

2. The method of claim 1, wherein, Based on the multi-channel temperature sensing data, a transient temperature field distribution of the wavefront modulation module is constructed, and the transient temperature field distribution is converted into a refractive index perturbation field according to the thermo-optic effect coefficient, including: Real-time temperature measurements from multiple temperature sensors distributed at different spatial locations within the wavefront modulation module are acquired. Based on the real-time temperature measurements and the spatial coordinates of each temperature sensor, a continuous temperature field distribution is reconstructed in the three-dimensional space of the wavefront modulation module using a spatial interpolation method to obtain the transient temperature field distribution. Obtain the thermo-optical effect coefficient of the wavefront modulation module material, which describes the proportional relationship between the refractive index and temperature; calculate the temperature deviation field of the transient temperature field distribution relative to the reference temperature. The temperature deviation field and the thermo-optical effect coefficient are multiplied point by point to obtain the refractive index change at each spatial location; the refractive index change is superimposed on the reference refractive index of the wavefront modulation module material to obtain the real-time refractive index distribution including the influence of thermal effect, which is determined as the refractive index perturbation field.

3. The method according to claim 1, characterized in that, Based on the cumulative effect of the refractive index perturbation field on the beam propagation path, the spatial distribution of the thermally induced optical path difference is calculated, and the coupling transfer matrix between the temperature field and the wavefront distortion is established by the contribution of the thermally induced optical path difference to the wavefront phase, including: The refractive index perturbation field is discretized layer by layer along the optical thickness direction of the wavefront modulation module to obtain multiple refractive index layers; the optical path accumulation of each refractive index layer is calculated layer by layer along the beam propagation direction, and the accumulated optical path value at each spatial position is obtained by summing the product of refractive index and geometric thickness; The difference between the cumulative optical path value and the reference optical path is calculated to obtain the spatial distribution of the thermally induced optical path difference; the ratio of the spatial distribution of the thermally induced optical path difference to the wavelength of the light wave is used to perform a phase wrapping operation to obtain the spatial distribution of the thermally induced phase shift. A temperature sampling grid is established within the spatial range of the transient temperature field distribution, and the nodes of the temperature sampling grid correspond to the local temperature control region of the wavefront modulation module; the temperature values ​​at each temperature sampling grid node are extracted to form a temperature state vector; the thermally induced phase shift values ​​corresponding to each temperature sampling grid node are extracted to form a phase response vector. By using paired data of multiple sets of temperature state vectors and phase response vectors, the temperature-phase linear mapping relationship is solved by the least squares fitting method; the coefficient matrix of the temperature-phase linear mapping relationship is determined as the coupling transfer matrix, and the matrix elements of the coupling transfer matrix characterize the coupling strength of each temperature control region to each phase measurement point.

4. The method according to claim 1, characterized in that, Based on the inverse operation of the coupling transfer matrix, the first aberration component and the second aberration component are mapped to local temperature control targets in different regions of the wavefront modulation module, respectively, generating regional active thermal management commands and phase modulation commands, including: Based on the frequency characteristics of spatial frequency domain decomposition, components with frequencies below the spatial frequency threshold are identified as the first aberration component, and components with frequencies above the spatial frequency threshold are identified as the second aberration component. Calculate the ratio of the maximum singular value to the minimum singular value of the coupling transfer matrix, and determine the condition number of the coupling transfer matrix based on the size of the condition number. Select either direct matrix inversion or singular value truncation inversion method based on the selected inversion method. Calculate the generalized inverse matrix of the coupling transfer matrix using the selected inversion method. The first aberration component and the second difference component are respectively multiplied by the generalized inverse matrix to obtain the first temperature control vector and the second temperature control vector. Spatial gradient analysis is performed on the first temperature control vector to calculate the temperature gradient amplitude between each temperature control region; regions with temperature gradient amplitudes less than the gradient threshold are identified as temperature plateau regions, and regions with temperature gradient amplitudes greater than the gradient threshold are identified as temperature drastic change regions; For the temperature plateau region, an active thermal management command dominated by heat conduction is generated based on the first temperature control vector; for the temperature drastic region and all regions corresponding to the second temperature control vector, a phase modulation command dominated by phase compensation is generated.

5. The method according to claim 4, characterized in that, For the temperature plateau region, an active thermal management command dominated by heat conduction is generated based on the first temperature control vector; for the temperature drastic region and all regions corresponding to the second temperature control vector, a phase modulation command dominated by phase compensation is generated, including: Extract the temperature deviation between the first temperature control vector and the current temperature measurement value; calculate the heat required for a unit temperature change based on the specific heat capacity of the wavefront modulation module material and the volume of each temperature plateau region; multiply the temperature deviation by the heat required for a unit temperature change to obtain the total heat demand for each temperature plateau region; Based on the preset temperature control response time, the total heat demand is divided by the response time to obtain the heat dissipation power adjustment amount; the current heat dissipation power value is added to the heat dissipation power adjustment amount to obtain the target heat dissipation power value; Based on the magnitude of the heat dissipation power adjustment and the response time, the power adjustment rate is determined through linear rate programming; the active thermal management command is generated based on the target heat dissipation power value and the power adjustment rate. Extract the temperature control component corresponding to the temperature drastic change region from the first temperature control vector and all components from the second temperature control vector; The temperature control component of the temperature drastic change zone and all components of the second temperature control vector are positively mapped through the coupling transfer matrix to calculate the corresponding residual phase error distribution; the residual phase error distribution is unwrapped to obtain a continuous phase error field; the continuous phase error field is inverted to obtain a phase compensation distribution; the phase modulation command is generated based on the phase compensation distribution.

6. The method according to claim 1, characterized in that, The local heat dissipation power of the wavefront modulation module is adjusted according to the active thermal management command, and the phase modulation unit is driven to generate a compensation phase according to the phase modulation command; by adjusting the local heat dissipation power and superimposing the compensation phase, dynamic suppression of wavefront distortion caused by thermal effects is achieved, including: The active thermal management command is parsed to extract the target heat dissipation power value and power adjustment rate corresponding to each temperature plateau zone; a power adjustment time series is generated based on the power adjustment rate, wherein the power adjustment time series specifies the time evolution path of the heat dissipation power from the current value to the target heat dissipation power value; The heat dissipation devices in each temperature plateau zone are driven according to the power adjustment time sequence, so that the heat dissipation power of each heat dissipation device is gradually adjusted to the target heat dissipation power value along the time evolution path; The phase modulation command is parsed to extract the phase compensation value at each spatial location in the phase compensation distribution; the phase compensation value is converted into a driving control parameter for the phase modulation unit; and the phase modulation unit is driven to generate a compensation phase equal to the phase compensation value at the corresponding spatial location according to the driving control parameter. The wavefront distribution after the compensated phase modulation is monitored to obtain the residual wavefront distortion; the residual wavefront distortion is compared with a preset wavefront quality index; when the residual wavefront distortion exceeds the preset wavefront quality index, the coupling transfer matrix is ​​updated according to the temperature response data; the active thermal management command and the phase modulation command are recalculated based on the updated coupling transfer matrix to form a dynamic suppression closed loop.

7. A wavefront distortion dynamic compensation system based on thermal implementation of a wavefront modulation module, used to implement the method as described in any one of claims 1-6, characterized in that, include: The first unit is used to acquire multi-channel temperature sensing data and wavefront phase distribution data of the emitted beam during the operation of the wavefront modulation module; based on the multi-channel temperature sensing data, it constructs the transient temperature field distribution of the wavefront modulation module, and converts the transient temperature field distribution into a refractive index perturbation field according to the thermo-optic effect coefficient; The second unit is used to calculate the spatial distribution of thermally induced optical path difference based on the cumulative effect of the refractive index perturbation field on the beam propagation path, and to establish the coupling transfer matrix between the temperature field and the wavefront distortion by the contribution of the thermally induced optical path difference to the wavefront phase; The third unit is used to perform spatial frequency domain decomposition on the wavefront phase distribution data, extract the first aberration component and the second aberration component; based on the inverse operation of the coupling transfer matrix, the first aberration component and the second aberration component are mapped to the local temperature control targets of different regions of the wavefront modulation module, respectively, to generate regional active thermal management commands and phase modulation commands; The fourth unit is used to adjust the local heat dissipation power of the wavefront modulation module according to the active thermal management command, and at the same time drive the phase modulation unit to generate a compensation phase according to the phase modulation command; through the adjustment of the local heat dissipation power and the superposition of the compensation phase, dynamic suppression of wavefront distortion caused by thermal effects is achieved.

8. An electronic device, characterized in that, include: processor; Memory used to store processor-executable instructions; The processor is configured to invoke instructions stored in the memory to execute the method according to any one of claims 1 to 6.

9. A computer-readable storage medium having computer program instructions stored thereon, characterized in that, When the computer program instructions are executed by the processor, they implement the method described in any one of claims 1 to 6.

Images