Suction unit, control method thereof, and manufacturing system and manufacturing method of display device

Abstract

A method for controlling a suction unit according to another aspect of the present invention may comprise the steps of: simulating an air flow for an improved suction port to prevent smoke from moving to the outside of the suction unit when a stage unit on which a target substrate to be cut by laser beam irradiation is disposed moves; the improved air blowers are arranged on three surfaces or four surfaces around the laser cutting end close to the height of the improved suction port; and controlling on / off of first to fourth solenoid valves of the improved blower in conjunction with movement of the stage unit when laser dicing is performed on the target substrate while moving the stage unit.

Description

Technical Field

[0001] This invention relates to a suction unit, its control method, a manufacturing system and method for a display device, and more specifically, to a manufacturing system for a display device including a suction unit, a manufacturing method for the display device, and a control method for the suction unit, wherein the suction unit is capable of controlling the smoke generated during laser cutting while the stage unit of a laser cutting facility moves. Background Technology

[0002] With the development of multimedia, the importance of display devices is increasing. In response, various types of display devices, such as organic light-emitting diodes (OLEDs) and liquid crystal displays (LCDs), are being used.

[0003] The display panel that constitutes the display device can be formed by cutting a unit-level substrate formed from a mother substrate, and fine particles or fumes may be generated during the substrate cutting process. The fine particles or fumes generated during the cutting process may adhere to the pad (or "solder pad") portions and cause contact failures in the pad portions.

[0004] Recently, manufacturing systems and methods for display devices have been developed that can effectively remove fumes that may be generated during the substrate cutting process.

[0005] Traditionally, for example, in Korean Patent Application No. 2020-0048601, a suction cup is formed around the panel according to the panel cutting shape of the display device, and while the position of the panel and the suction cup is fixed, smoke is removed by a suction port formed on the outside of the suction cup according to the cutting shape during laser cutting.

[0006] However, in this case, when the stage with the panel is moved, the distance between the laser cutting position and the suction port increases, which reduces the suction force and leads to contamination of the upper optical system.

[0007] In addition, since the display panel contains adhesive components, the smoke generated during panel cutting also contains adhesive components that can clog the suction port and reduce suction performance. Summary of the Invention

[0008] Technical issues Therefore, the present invention has been completed to solve these problems, and the object of the present invention is to provide a manufacturing system and method for a display device that can effectively remove smoke that may be generated during the substrate cutting process.

[0009] The purpose of this invention is not limited to the above-described purposes, and other technical purposes not mentioned will be clearly understood by those skilled in the art through the following description.

[0010] Technical solution A manufacturing system for a display device according to an embodiment of the present invention includes: a main body having an upward opening and a downward opening forming an empty internal space, such that a laser beam emitted by an optical system irradiates a target substrate; an exhaust channel formed between the upper surface of a lower plate, the inner surface of an outer casing constituting the main body, and the outer surface of an inner cup surrounding a cutting line of the target substrate; a stage unit on which the target substrate is disposed, and the cutting line of the target substrate is moved relative to the laser beam; a suction unit configured to suction and remove smoke generated during laser beam irradiation while the stage unit is moving; and a control unit controlling a setpoint of the suction unit according to the moving speed of the stage unit and the moving direction of the smoke to prevent smoke leakage into the optical system or external devices.

[0011] A method for manufacturing a display device according to an embodiment of the present invention includes: controlling the on / off operation time of an improved blower by interlocking an improved suction port with an improved blower and combining this with the movement of a stage unit; the improved suction port having an expanded aperture to prevent smoke generated from a target substrate to be processed by laser beam irradiation from accumulating, and a vortex forming portion for causing the smoke to swirl internally; the improved blower being disposed between the suction port and the internal space where laser beam irradiation is performed to form an airflow toward the suction port.

[0012] According to another aspect of the invention, a suction unit includes: an improved suction port connected to an exhaust passage; an improved blower disposed at the lower part of a main body having an internal space for performing laser beam irradiation, between the improved suction port and the internal space, and adjacent to the improved suction port to form an airflow such that smoke generated during laser beam irradiation and cutting of a target substrate moves toward the improved suction port; and a control unit configured to control the improved blower according to the moving speed of the stage unit and the moving direction of the smoke, thereby drawing the smoke into the improved suction port.

[0013] The improved suction port may include an expansion hole formed to extend through the inner cup and outer casing constituting the main body, a guide portion that slopes upward and outward from the edge of the expansion hole, and a vortex forming portion extending from the guide portion, the vortex forming portion being used to form a vortex for smoke drawn in through the expansion hole by the negative pressure formed when the dust collection unit connected to the exhaust channel is operated.

[0014] According to another aspect of the invention, the control method of the suction unit may include: simulating the airflow of the improved suction port to prevent smoke from moving outside the suction unit when the stage unit, on which the target substrate to be irradiated and cut by the laser beam is positioned, moves; installing an improved blower on three or four sides around the laser cutting end at a vertical height matching the improved suction port; and controlling the switching of a first to a fourth solenoid valve of the improved blower in conjunction with the movement of the stage unit while performing laser cutting on the target substrate.

[0015] Additionally, the control method may include: selectively controlling the switching operation of the first to fourth solenoid valves of the improved blower, and adjusting the injection position and injection angle of the nozzle of the improved blower; controlling the pipe pressure of the first and second connecting pipes by controlling the pipe pressure regulating valves of the connecting pipes connected to the dust collection unit; storing the switching operation and operation time data of the first to fourth solenoid valves according to the moving speed and moving direction of the station unit; verifying the airflow simulation while adjusting the switching, injection angle, air pressure and pipe pressure of the improved blower in response to the movement of smoke caused by the station unit, optimizing the switching and switching operation time settings of the first to fourth solenoid valves of the improved blower; and converting the optimized settings of the improved blower for the target substrate into a scheme.

[0016] Beneficial effects The manufacturing system and method for a display device according to embodiments of the present invention aim to provide a manufacturing system and method for a display device that can ensure the quality and productivity of the display device by controlling the smoke generated when a table on which the display device is mounted moves in a laser cutting apparatus for the display device.

[0017] The manufacturing system and method for the display device according to embodiments of the present invention, as confirmed by airflow simulation, can prevent equipment contamination caused by smoke movement due to table movement, such as contamination of the external or optical systems.

[0018] According to the manufacturing system and method of the display device according to the embodiments of the invention, the clogging of the suction port caused by smoke containing adhesive components can be minimized by optimizing the design of the suction port, thereby extending the maintenance interval of the suction unit.

[0019] According to the manufacturing system and method for the display device based on embodiments of the present invention, it is possible to control the operation switches of multiple blowers provided on all sides of the suction unit, and to convert them into a scheme based on the laser cutting line length for each target substrate model and the switch setting value received in real time in conjunction with the movement of the stage unit. Attached Figure Description

[0020] Figure 1 This is a plan view of a manufacturing system for a display device according to an embodiment of the present invention.

[0021] Figure 2 It is along Figure 1 A sectional view taken from line I-I'.

[0022] Figure 3 It is along Figure 1 The sectional view taken from line II-II'.

[0023] Figure 4 This is a view showing a manufacturing system for a display device according to a first modified embodiment of the present invention.

[0024] Figure 5 yes Figure 4 A magnified view of a portion of the image.

[0025] Figure 6 This is a view showing the expected direction of the smoke as the stage unit moves during laser cutting.

[0026] Figure 7 This is a cross-sectional view of a suction unit according to an embodiment of another aspect of the present invention.

[0027] Figure 8 This is a cross-sectional view of the suction unit according to another aspect of the present invention, which is a first modified embodiment.

[0028] Figure 9 This is a conceptual diagram illustrating an improved blower control device with improved suction port interlocking with the suction unit according to another embodiment of the present invention.

[0029] Figure 10 It is shown that it is used for Figure 9 A diagram showing the control logic of the improved blower control device.

[0030] Figure 11 This is a plan view of the suction unit according to a first modified embodiment of another aspect of the present invention.

[0031] Figure 12 yes Figure 11 Perspective view.

[0032] Figure 13 This is a plan view illustrating a control method for moving a stage unit of a suction unit according to a first modified embodiment of another aspect of the present invention.

[0033] Figure 14 This is a simulation diagram of the airflow of the suction unit in the manufacturing system of the display device according to an embodiment of the present invention.

[0034] Figure 15 This is a conceptual diagram of the control unit of a manufacturing system for a display device according to an embodiment of the present invention.

[0035] Figure 16 It is shown Figure 15 A view of the configuration of the improved blower operation scheme.

[0036] Figure 17 This is a flowchart illustrating a method for manufacturing a display device according to an embodiment of the present invention.

[0037] Figure 18 The diagram illustrates the effects of conventional and experimental examples of the present invention. Detailed Implementation

[0038] The advantages and features of the present invention, as well as methods of implementing them, will become apparent from the embodiments described in detail below with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be practiced in various different forms, and the presented embodiments are provided only to make the disclosure of the invention complete and to fully convey the scope of the invention to those skilled in the art, and the invention is defined only by the scope of the claims.

[0039] When an element or layer is referred to as being "on" another element or layer, this includes both cases where the element or layer is directly on the other element or where another layer or element is placed in between. Throughout the specification, the same reference numerals denote the same elements.

[0040] Although terms such as "first" and "second" are used to describe various components, these components are not limited by these terms. These terms are only used to distinguish one component from another. Therefore, it should be understood that, within the technical spirit of the invention, the first component mentioned below may be referred to as the second component.

[0041] Preferred embodiments of the invention will be described below with reference to the accompanying drawings.

[0042] Figure 1 This is a plan view of a manufacturing system for a display device according to an embodiment of the present invention. Figure 2 It is along Figure 1 A cross-sectional view taken by line I-I'. Figure 3 It is along Figure 1 The sectional view taken from line II-II'.

[0043] Reference Figure 1 The target substrate PS cut by the display device manufacturing system 1 can be a display panel or substrate of a display device, such as an organic light-emitting display device.

[0044] The manufacturing system 1 for the display device can be used to cut inspection pads for inspecting organic light-emitting display panels or to cut protective films attached to protect organic light-emitting display panels.

[0045] In the Figure 1 The target substrate PS, as shown by the dashed line, can be rectangular in shape before cutting. The four corners can be rounded (rounded), and to form the display device, a laser beam can be used to perform the cutting along a cutting line CL with a closed curve shape. The cutting line CL can be a virtual cutting line on the target substrate PS illuminated by the laser beam LB. However, the cutting line CL is not limited to this and can be actually formed. The cutting line CL can be the edge of the display panel after cutting. The target substrate PS before cutting can include a central portion located inside the cutting line CL and becoming the display panel DP after cutting, and an edge portion located outside the cutting line CL and becoming a virtual portion after cutting.

[0046] The manufacturing system 1 for a display device according to an embodiment of the present invention can be an apparatus capable of cutting a target substrate PS by irradiating a target substrate PS with a laser beam LB. The manufacturing system 1 for the display device may include a laser module 10, an optical system 20, a stage unit 100, and a suction unit 200.

[0047] Laser module 10 can emit a laser beam LB. The laser beam LB can irradiate along the cutting line CL of the target substrate PS. Laser module 10 may include a gas laser (such as a carbon dioxide laser, excimer laser, helium-neon laser) or may include a solid-state laser (such as a ruby ​​laser, glass laser, YAG laser, YLF laser).

[0048] Optical system 20 can adjust the path of the laser beam LB so that the laser beam LB emitted from laser module 10 can reach the target substrate PS. Optical system 20 may include a homogenizer for uniformizing the intensity distribution of the laser beam LB and / or a focusing lens for focusing the laser beam LB. The laser beam LB, having passed through optical system 20, can form a line beam. Depending on the relative arrangement of laser module 10 and optical system 20, optical system 20 may also include a mirror for changing the direction of the laser beam LB. For example, optical system 20 may include a galvano scanner or a multifaceted mirror.

[0049] Stage unit 100 provides space on which the target substrate PS is mounted and can support the target substrate PS. That is, the target substrate PS can be mounted on stage unit 100. Stage unit 100 may include a suction port (not shown) disposed on its upper surface and opening upward. Stage unit 100 can fix the target substrate PS by providing negative pressure through the suction port (not shown). The target substrate PS can typically be located at the center of stage unit 100, but is not limited thereto.

[0050] The suction unit 200 can be positioned above the stage unit 100. When the laser beam LB is irradiated along the cutting line CL of the target substrate PS, smoke is generated, and the suction unit 200 can extract the smoke and exhaust it to the outside. More details about the suction unit 200 will be described later.

[0051] The manufacturing system 1 for the display device according to an embodiment of the present invention may further include a dust collection unit 300 and a control unit 400. The dust collection unit 300 can be connected to the suction unit 200 via a connecting pipe C. The dust collection unit 300 can capture smoke drawn by the suction unit 200. The dust collection unit 300 may include a motor, pump, or fan for adjusting the negative pressure provided by the suction unit 200. However, it is not limited thereto, and the motor, pump, or fan may be configured to be separate from the dust collection unit 300. The dust collection unit 300 may include a filter for filtering smoke. The control unit 400 can control parameters of the laser beam LB generated by the laser module 10, the negative pressure provided by the dust collection unit 300, etc.

[0052] Reference Figure 2 and Figure 3 The suction unit 200 may include main bodies 210 and 220, pipes (or connecting pipes) P1 and P2, connecting pipe C, and blowers 250 and 260. Pipes P1 and P2 are located on both sides of the main bodies 210 and 220, the connecting pipe C connects pipes P1 and P2 to the dust collection unit 300, and the blowers 250 and 260 may be located on the upper side of the main bodies 210 and 220.

[0053] The bodies 210 and 220 may include an outer casing 210 having an upper opening and a lower opening, and an inner cup 220 disposed inside the outer casing 210. The inner cup 220 may include an upper opening and a lower opening corresponding to the upper opening and the lower opening of the outer casing 210, respectively. The bodies 210 and 220 may confine fumes generated during the cutting process inside and prevent them from escaping to the outside.

[0054] The bodies 210 and 220 may have openings at their top and bottom and an empty internal space 200a, such that the laser beam LB exiting the optical system 20 irradiates the target substrate PS. Additionally, the bodies 210 and 220 may have a structure capable of effectively drawing in fumes generated during the cutting process. The specific structures of the outer casing 210 and the inner cup 220 will be described below.

[0055] The outer casing 210 can typically have a cuboid shape, but is not limited to it, and can have other polygonal prism or cylindrical shapes besides cuboids. In an exemplary embodiment, the outer casing 210 can have a rectangular prism shape.

[0056] The outer casing 210 has a hollow interior and can accommodate the inner cup 220. Pipes P1 and P2 communicating with the interior of the outer casing 210 can be connected to or formed on at least one side of the outer casing 210.

[0057] The inner cup 220 can be disposed inside the outer casing 210. The inner cup 220 may include an upper sidewall 220a having a hollow rectangular prism shape, an inclined sidewall 220b having a frustum shape, and a lower sidewall 220c having a hollow rectangular prism shape. The inner cup 220 can be separated from the outer casing 210. The inner cup 220 may have a three-dimensional structure similar to a square funnel or hopper. The inner cup 220 may have a shape corresponding to the shape of the outer casing 210. For example, when the outer casing 210 has a cylindrical shape, the inner cup 220 may have a three-dimensional structure similar to a circular funnel.

[0058] The internal space of the inner cup 220 can provide a channel for the laser beam LB to pass through. The laser beam LB can pass through the bodies 210 and 220 and irradiate along the cutting line CL of the target substrate PS. Therefore, in the plan view, the cutting line CL of the target substrate PS can be set inside the lower opening of the bodies 210 and 220.

[0059] The upper sidewall 220a, inclined sidewall 220b, and lower sidewall 220c of the inner cup 220 can be formed as a single component or integrally formed, and the components can be formed and assembled separately. However, it is not limited to this, and in the inner cup 220, the inclined sidewall 220b and lower sidewall 220c can be integrally formed, the upper sidewall 220a can be formed separately, and the upper part of the inclined sidewall 220b can be attached to the lower part of the upper sidewall 220a.

[0060] The upper openings of the main bodies 210 and 220 can be defined by the upper end of the upper sidewall 220a of the inner cup 220, and the lower openings of the main bodies 210 and 220 can be defined by the lower end of the lower sidewall 220c of the inner cup 220. The upper openings of the main bodies 210 and 220 can be larger than the lower openings. Therefore, the inclined sidewall 220b can have a structure in which the internal width decreases from the upper sidewall 220a to the lower sidewall 220c. That is, the internal structure of the inclined sidewall 220b can have a structure in which the internal width gradually decreases like a funnel. Therefore, a downward flow effect is maintained inside the inner cup 220, thereby enabling smooth smoke extraction. The outer surface of the upper sidewall 220a can be in close contact with the inner surface of the outer casing 210.

[0061] The suction unit 200 may also include a bracket and a lower plate 240, the bracket for fixing the inner cup 220, the lower plate 240 cooperating with the inner cup 220 to define the suction port 230 and together with the outer casing 210 and the inner cup 220 to define the exhaust passage PL.

[0062] The lower plate 240 can be attached to the lower end of the outer casing 210. The lower plate 240 can be attached to the lower end of the outer casing 210 by means of a screw or by a sliding connection. The lower plate 240 may include a through-hole penetrating the interior.

[0063] The through hole of the lower plate 240 can be larger than the lower opening of the inner cup 220.

[0064] The lower plate 240 may include a suction end 231 that defines a through hole and surrounds the end of the through hole. The suction end 231 may be horizontally stacked with the lower end of the lower sidewall 220c of the inner cup 220. The suction end 231 and the lower end of the lower sidewall 220c of the inner cup 220 may define a suction port 230. Smoke can be drawn into the suction unit 200 from the outside through the suction port 230. The suction port 230 may be disposed around the lower end of the lower sidewall 220c of the inner cup 220. The suction port 230 may be vertically open, but is not limited thereto.

[0065] The upper surface of the lower plate 240, the inner surface of the outer casing 210, and the outer surface of the inner cup 220 (specifically, the outer surfaces of the inclined sidewalls 220b and lower sidewalls 220c) define the exhaust passage PL. The exhaust passage PL can be the space within the bodies 210 and 220 where smoke drawn in through the suction port 230 flows. The exhaust passage PL can be substantially sealed except for the portion communicating with pipes P1 and P2 and the suction port 230. Therefore, most of the smoke drawn in through the suction port 230 can move through the exhaust passage PL to pipes P1 and P2. The smoke that has moved to pipes P1 and P2 can be collected in the dust collection unit 300 via the connecting pipe C.

[0066] Blowers 250 and 260 may be disposed on the upper part of the main bodies 210 and 220. Blowers 250 and 260 may inject air toward the target substrate PS. The air supplied by blowers 250 and 260 may form an airflow within the internal space of the inner cup 220. Blowers 250 and 260 may include a pair of first blowers 250 disposed along the long side of the outer casing 210 and a pair of second blowers 260 disposed along the short side of the outer casing 210.

[0067] The first blower 250 can be arranged to face each other along the long side of the outer casing 210. The first blower 250 may include a first main pipe 251, a plurality of first nozzles 253 disposed below the first main pipe 251 and arranged along a first direction, and a first auxiliary pipe 252 disposed above the first main pipe 251.

[0068] The first main duct 251 may be a duct extending along a first direction and including an internal flow path. The first main duct 251 may be disposed along the long side of the outer casing 210. The first main duct 251 provides a space for containing air before air is injected through the first nozzle 253, and this space for containing air may be the internal flow path of the first main duct 251. The air contained in the internal flow path of the first main duct 251 may be supplied from the first auxiliary duct 252 disposed on the upper side and injected into the internal space of the inner cup 220 through the first nozzle 253 disposed on the lower side. The direction of air injection may be substantially consistent with the orientation of the first nozzle 253. The air injected through the first nozzle 253 may form an airflow in the injection direction.

[0069] The first nozzle 253 can be a channel through which air contained inside the first main duct 251 is ejected to the outside. Multiple first nozzles 253 can be arranged below the first main duct 251 along its extension direction. The first nozzles 253 can extend in a direction perpendicular to the first main duct 251. The inclination angle of the first nozzles 253 can be variable. The inclination angle of the first nozzles 253 can be defined as the angle at which the first nozzles 253 are tilted relative to a plane parallel to a surface of the target substrate PS.

[0070] The air ejected from the first nozzle 253 can have an ejection angle that is substantially the same as the tilt angle of the first nozzle 253. The first nozzle 253 can be configured to adjust the tilt angle, but is not limited thereto, and can have a fixed tilt angle.

[0071] In an exemplary embodiment, the inclination of the first nozzle 253 can be set such that the air ejected from the first nozzle 253 traverses the interior space of the inner cup 220. The first nozzle 253 can be oriented toward the suction port 230 located below the first blower 250 and opposite thereto.

[0072] Therefore, the airflow formed by the air ejected from the first nozzle 253 can be drawn into the suction port 230 located on the opposite side of the first nozzle 253. In addition, the airflow formed by the air ejected from the first nozzles 253, which are set to face each other, can intersect in the internal space of the inner cup 220, but is not limited thereto.

[0073] Now, refer to Figures 4 to 18 A manufacturing system and method for a display device according to a first modified embodiment of the present invention are described, which solves the problem of smoke movement caused by changes in external airflow when the on-stage unit 100 moves.

[0074] Figure 4 This is a view illustrating a manufacturing system for a display device according to a first modified embodiment of the present invention. Figure 5 yes Figure 4 A magnified view of a portion of the image.

[0075] Except that the stage unit 100 includes a substrate 110 and a UVW stage driving unit 130, the manufacturing system 1' of the display device according to the first modified embodiment of the present invention is the same as the manufacturing system 1 of the display device according to the embodiment of the present invention. A target substrate PS or panel of the display device to be laser-cut is disposed on the substrate 110. The UVW stage driving unit 130 is used to position the substrate 110 with high precision and high responsiveness in the X-axis, Y-axis and θ directions, fix the laser module 10 and the optical system 20, and move the stage unit 100 in the X-axis, Y-axis and θ directions to perform the laser cutting process of the target substrate PS or panel of the display device.

[0076] First, such as Figure 3 As shown, the target substrate PS is placed on the stage unit 100, and the laser beam LB is irradiated along the cutting line CL of the closed curve for at least one cycle to cut the target substrate PS. When the laser beam LB is used to cut the target substrate PS, the smoke can be drawn out by the negative pressure provided by the dust collection unit 300 and the smoke can be effectively discharged to the outside, so that the laser beam is not blocked by the smoke generated in the area irradiated by the laser beam LB.

[0077] Specifically, smoke mist can be drawn through the suction port 230 of the suction unit 200. The suction port 230 is located at the lower part of the suction unit 200 and may have a downward opening shape. The suction port 230 may be located outside the cutting line CL. The suction port 230 may not overlap with the cutting line CL of the target substrate PS, but is not limited thereto.

[0078] Air can be injected by blowers 250 and 260 to create an airflow that can move the smoke to the outside of the cutting line CL. However, even if the smoke moves to the outside of the cutting line CL, most of the smoke can be drawn in through the suction port 230 of the suction unit 200, so that the smoke hardly leaks to the outside of the suction unit 200.

[0079] However, as Figure 4 and Figure 5 As shown, when the target substrate PS is placed on the stage unit 100 and the substrate 110 of the stage unit 100 is moved by the UVW stage drive unit 130 while the laser beam LB is fixed, so that the cutting line of the target substrate PS moves, the suction performance may deteriorate because the distance D between the position where the laser beam LB is irradiated and the laser cutting is performed and the suction port 230 increases.

[0080] In addition, when the suction force of the suction unit 200 is reduced in this way, the smoke remaining in the internal space 200a may rise and cause contamination of the optical system 20.

[0081] Additionally, if the target substrate PS or panel of the display device has a multi-layer structure and includes adhesive components (e.g., pressure-sensitive adhesive (PSA)) Ab between multiple layers, in the event of smoke generated during laser cutting of the target substrate PS or panel of the display device having adhesive components (such as PSA), the suction port 230 may gradually narrow and become blocked due to the adhesive components adhering to the area around the suction port 230.

[0082] In this way, if the suction port 230 gradually narrows or becomes blocked due to the adhesive components of the smoke generated during the laser cutting of the target substrate PS, the suction performance of the suction unit 200 may deteriorate.

[0083] Figure 6 This is a view showing the expected direction of the smoke as the stage unit moves during laser cutting.

[0084] like Figure 6 As shown, in the manufacturing system 1' of the display device according to the first modified embodiment of the present invention, when the substrate 110 of the stage unit 100 is moved from a first position #1 Pos' along a first direction, at a second position #2 Pos' along a second direction perpendicular to the first direction, and at a third position #3 Pos' along a third direction opposite to the first direction using the UVW stage driving unit 130, the direction along which the laser beam LB irradiates and performs laser cutting is opposite to the first direction, the second direction, and the third direction. It can be seen that smoke caused by laser cutting is generated in the same direction as the stage unit 100 moving along the first direction, the second direction, and the third direction.

[0085] According to the manufacturing system 1' of the display device of the first modified embodiment of the present invention, it can be seen that the smoke is not sufficiently removed due to the moving speed of the stage unit 100 and the moving direction of the smoke, and the smoke may rise or leak to the outside, thereby contaminating the optical system 20 or the periphery of the device.

[0086] Figure 7 This is a cross-sectional view of a suction unit according to another embodiment of the present invention.

[0087] According to another embodiment of the invention, the suction unit 200' has an improved construction to control the smoke generated during the laser cutting process of the target substrate PS or panel of the display device while the stage unit 100 is moving, and may be characterized by a structure disposed at the lower part of the outer box 210' and the inner cup 220'.

[0088] According to another embodiment of the invention, the suction unit 200' includes an improved suction port 230', which prevents smoke from accumulating in the suction port 230 or being exposed to the optical system 20 or the outside due to the moving speed of the stage unit 100 and the moving direction of the smoke.

[0089] The improved suction port 230' may include an expansion hole 231', a guide portion 233', and a vortex forming portion 235'. The expansion hole 231' is formed to be wider than the through hole of the lower plate 240', so that the smoke generated during the laser cutting process can be completely sucked in according to the moving speed of the stage unit 100 and the moving direction of the smoke. The guide portion 233' is inclined upward and outward from the edge of the lower plate 240' to form the expansion hole 231' relative to the lower plate 240' (i.e., the expansion hole 231' can extend relative to the lower plate 240' through the inner cup 220' and the outer box 210'). The vortex forming portion 235' extends in a direction parallel to the lower plate 240' to form a vortex, so that the smoke sucked in through the expansion hole 231' in the improved suction port 230' will not be exposed to the outside when a negative pressure is formed during the operation of the dust collection unit 300.

[0090] Figure 8 This is a cross-sectional view of the suction unit according to another aspect of the present invention, which is a first modified embodiment.

[0091] The suction unit 200' according to another aspect of the invention shares the same feature as the first modified embodiment, which has an improved suction port 230', having an expansion hole 231', a guide portion 233', and a vortex forming portion 235' to prevent smoke from accumulating in the suction port 230 or being exposed to the optical system 20 or the outside due to the moving speed of the stage unit 100 and the moving direction of the smoke. The difference is that the suction unit 200' further includes a smoke storage cavity 237' extending from the vortex forming portion 235' of the improved suction port 230' to store smoke temporarily collected by negative pressure and prevent smoke leakage to the outside. The smoke storage cavity 237' may be box-shaped.

[0092] Additionally, the smoke storage chamber 237' also includes improved blowers 250' and 260' located along the laser cutting line CL on all sides of the target substrate PS between the internal space 200a irradiated by the laser beam LB and the improved suction port 230'. That is, the improved blowers 250' and 260' are positioned near the lower part of the main body, close to the improved suction port 230', between the expansion hole 231' and the internal space 200a, thereby creating a lateral airflow that moves the smoke toward the improved suction port 230'.

[0093] The smoke storage chamber 237' can fully accommodate the smoke vortex that is rapidly introduced via the expansion hole 231' by the improved blowers 250' and 260', thereby effectively preventing the smoke from being exposed to the optical system 20 or the outside.

[0094] Figure 9 This is a conceptual diagram illustrating an improved blower control device with improved suction port interlocking with the suction unit according to another embodiment of the present invention. Figure 10 It is shown Figure 9 A diagram showing the control method of the improved blower control device.

[0095] Again Figure 7 and Figure 8 As shown, according to another embodiment of the present invention, the improved suction port 230' of the suction unit 200' can be controlled by the control unit 400 to interlock with the improved blower 250', which blows air directly toward the improved suction port 230' at a vertical height near the improved suction port 230'.

[0096] like Figure 9As shown, the control unit 400 receives the moving speed and direction of the stage unit 100, and controls the switching time of the first solenoid valve 255a, the second solenoid valve 255b, the third solenoid valve 255c, and the fourth solenoid valve 255d of a pair of improved blowers 250' and a pair of improved blowers 260'. The pair of improved blowers 250' are arranged on the long side of the inner space 200a surrounding the laser cutting, such that the distance D from the cutting line CL remains constant. The pair of improved blowers 260' are arranged on the short side.

[0097] A pair of improved blowers 250' disposed on the long side are referred to as the first improved blower 250', and a pair of improved blowers 260' disposed on the short side are referred to as the second improved blower 260'. The first improved blower 250' and the second improved blower 260' may similarly include a first main pipe 251', a plurality of first nozzles 253' disposed below the first main pipe 251' and arranged along a first direction, and a first auxiliary pipe 252' disposed above the first main pipe 251'. A first solenoid valve 255a, a second solenoid valve 255b, a third solenoid valve 255c, and a fourth solenoid valve 255d are respectively installed in the first main pipe 251' to selectively activate the plurality of first nozzles 253'.

[0098] Unlike the first blower 250 and the second blower 260, the first improved blower 250' and the second improved blower 260' have a first main duct 251' installed at the bottom through the outer casing 210', and a first nozzle 253' can be installed between the improved suction port 230' and the internal space 200a for performing laser cutting.

[0099] like Figure 10 As shown, during the laser cutting process, the improved blowers 250' and 260' can be selectively operated at a distance relative to the activated improved suction port 231' which is under negative pressure by the dust collection unit 300, instead of operating the improved blowers 250' and 260' which are close to the improved suction port 231' in operation.

[0100] More specifically, in standby mode, the pump and the first solenoid valve 255a, the second solenoid valve 255b, the third solenoid valve 255c, and the fourth solenoid valve 255d are de-energized. In order to use the improved suction port 231' on the first long side, the first solenoid valve 255a of the first improved blower 250' mounted on the second long side is opened. In order to use the improved suction port 231' on the first short side, the second solenoid valve 255b of the second improved blower 260' mounted on the second short side is opened. In order to use the improved suction port 231' on the second long side, the third solenoid valve 255c of the first improved blower 250' mounted on the first long side is opened. It can also be seen that in order to use the improved suction port 231' on the second short side, the fourth solenoid valve 255d of the second improved blower 260' mounted on the first short side is controlled to be open.

[0101] Now, refer to Figures 11 to 13 The suction unit according to another aspect of the invention will be described in more detail.

[0102] Figure 11 This is a plan view of the suction unit according to a first modified embodiment of another aspect of the present invention. Figure 12 yes Figure 11 Perspective view, Figure 13 This is a plan view illustrating a control method for moving a stage unit of a suction unit according to a first modified embodiment of another aspect of the present invention.

[0103] like Figure 11 As shown, the air injection direction of the first improved blower 250' and the second improved blower 260' can be substantially the same as the direction indicated by the first nozzle 253', and the air injected through the first nozzle 253' can form an airflow in the injection direction.

[0104] The first nozzle 253' can be a channel through which air contained inside the first main pipe 251' is ejected to the outside. Multiple first nozzles 253' can be arranged below the first main pipe 251' along its extension direction. The first nozzles 253' can extend in a direction perpendicular to the first main pipe 251'. The inclination of the first nozzles 253' can vary.

[0105] like Figure 11 As shown, the spray angle of the air ejected from the first nozzle 253' can be substantially the same as the tilt angle of the first nozzle 253', and the tilt angle of the first nozzle 253' can be adjusted by the spray angle adjustment unit 260.

[0106] like Figure 12As shown, the spray position of the first nozzle 253' arranged along the extension direction of the first main pipe 251' can be adjusted, and the spray position of the first nozzle 253' can be adjusted along the long side or the short side by the spray position adjustment unit 270 installed on the lower part of the outer casing 210' of the suction unit 200'.

[0107] Figure 13 This is a view showing the improved blower switch according to the direction of movement of the unit.

[0108] exist Figure 13 In the diagram, the dashed line represents the laser cutting line, the dashed arrow indicates the direction of stage movement, and the arrow inside the laser processing hole indicates the direction of air jet and smoke movement during improved blower operation.

[0109] like Figure 13 As shown, when the stage unit 110 moves in the +y direction and performs laser cutting in the long side direction, the first solenoid valve 255a of the improved suction unit 200' opens and air is injected toward the second improved suction port 231a' facing the first solenoid valve 255a, so that the air injected from the first improved blower 250' can cause the smoke generated in the long side region of the cutting line CL of the target substrate PS to move toward the second improved suction port 231a'.

[0110] When the stage unit 110 moves in the -x direction and performs laser cutting in the short side direction, the fourth solenoid valve 255d of the improved suction unit 200' opens and air is injected toward the third improved suction port 231a' facing the fourth solenoid valve 255d, so that the air injected from the second improved blower 260' can cause the smoke generated in the short side region of the cutting line CL of the target substrate PS to move toward the third improved suction port 231b'.

[0111] When the stage unit 110 moves in the +y direction and performs laser cutting in the long side direction, the first solenoid valve 255a of the improved suction unit 200' opens and air is injected toward the second improved suction port 231a' facing the first solenoid valve 255a, so that the air injected from the first improved blower 250' can cause the smoke generated in the long side region of the cutting line CL of the target substrate PS to move toward the second improved suction port 231a'.

[0112] Simultaneously, when the stage unit 110 moves in the +y direction and then performs corner laser cutting while moving in the -x axis direction, taking into account the direction of the smoke generated by the stage unit 110 moving in the -x axis direction after moving in the +y direction, the third solenoid valve 255c' and the fourth solenoid valve 255d' open together, so that the air ejected from the first improved blower 250' and the second improved blower 260' can use the third improved suction port and the fourth improved suction port to move the smoke generated in the corner area of ​​the cutting line CL of the target substrate PS.

[0113] Now, referring to Figure 14 and Figure 15 The analysis will focus on how the suction unit of the manufacturing system of the display device according to an embodiment of the present invention interlocks the improved suction port 230' with the improved blowers 250' and 260' to form a predetermined airflow to completely remove smoke.

[0114] Figure 14 This is a simulation diagram of the airflow of the suction unit in the manufacturing system of the display device according to an embodiment of the present invention. Figure 15 This is a conceptual diagram of the control unit of a manufacturing system for a display device according to an embodiment of the present invention.

[0115] like Figure 14 As shown, a simulation of the airflow generated during a laser cutting process in a manufacturing system for a display device according to an embodiment of the present invention is observed. A downward flow is generated in the internal space 200a irradiated by the laser beam LB. When at least one of the first improved blowers 250' and the second improved blower 260' located on all sides is opened relative to the downward flow and close to the laser cutting portion where the laser cutting process is performed, it can be seen that the downward flow is deflected toward and guided toward at least one improved suction port among the first to fourth suction ports where a negative pressure is formed by the dust collection unit 300.

[0116] Furthermore, as a result of simulating the flow rate change in at least one improved suction port region where negative pressure is formed among the first to fourth suction ports, it is confirmed that external airflow was introduced.

[0117] like Figure 15 As shown, in the manufacturing system of the display device according to an embodiment of the present invention, the control unit 400 can control the air injection position by selectively activating the first solenoid valve 255a, the second solenoid valve 255b, the third solenoid valve 255c and the fourth solenoid valve 255d of the first improving blower 250' and the second improving blower 260' of the suction unit 200 of the manufacturing system of the display device according to an embodiment of the present invention, and can adjust the angle of each nozzle 253.

[0118] In addition, the control unit 400 can adjust the negative pressure of the dust collection unit 300 (the connecting pipe C of the dust collection unit 300 is connected to the first connecting pipe P1 and the second connecting pipe P2 of the suction unit 200), and can adjust the pipe pressure of the first connecting pipe P1 and the second connecting pipe P2 of the suction unit 200 of the manufacturing system of the display device according to the embodiment of the present invention via the pipe pressure regulating valves P1V / V and P2V / V.

[0119] Figure 16 This is a view illustrating the configuration of an improved blower operation scheme for the control unit of a manufacturing system for a display device according to an embodiment of the present invention. Figure 17 This is a flowchart illustrating a method for manufacturing a display device according to an embodiment of the present invention.

[0120] like Figure 16 and Figure 17 As shown, the control unit 400 of the manufacturing system of the display device according to an embodiment of the present invention designs an improved suction port structure by means of airflow simulation to prevent smoke from moving to the outside of the suction port 230 formed around all sides of the work object (e.g., target substrate PS) when the stage unit 110 moves (S110).

[0121] Improved blowers 250' and 260' are installed at a vertical height matching the improved suction port on three or four sides of the laser cutting end near the laser beam LB that is introduced and performs laser cutting (S120), and laser cutting is performed while the stage unit 110 is moved (S130). The movement of the stage unit 110 controls the switching of the first solenoid valve 255a, the second solenoid valve 255b, the third solenoid valve 255c, and the fourth solenoid valve 255d of the improved blowers 250' and 260' on the three or four sides (S140).

[0122] The air injection position can be adjusted by switching the first solenoid valve 255a, the second solenoid valve 255b, the third solenoid valve 255c, and the fourth solenoid valve 255d of the first improved blower 250' and the second improved blower 260'. The angle of each nozzle 253 can be adjusted, and the negative pressure of the dust collection unit 300 (the connecting pipe C of the dust collection unit 300 is connected to the first connecting pipe P1 and the second connecting pipe P2 of the suction unit 200) can be adjusted by the pipe pressure regulating valves P1V / V and P2V / V. The switching time of the improved blowers 250' and 260' is controlled by the moving speed and moving direction data of the stage unit 140 (S150).

[0123] While adjusting the switching and injection angle, air pressure (negative pressure) and pipeline pressure of the first improved blower 250' and the second improved blower 260', the airflow simulation is confirmed to minimize contamination of the optical system or external equipment caused by the movement of smoke due to the movement of the stage unit 110 (S160).

[0124] The set values ​​for the switching and switching operation times of the first solenoid valve 255a, the second solenoid valve 255b, the third solenoid valve 255c, and the fourth solenoid valve 255d of the first improved blower 250' and the second improved blower 260' are optimized according to the size and specifications of the work object (e.g., target substrate PS) (S170) and stored in the storage unit of the control unit 400 to convert the blower operation and time for each target substrate PS model into a scheme (S170).

[0125] like Figure 16 and Figure 17 As shown, in the manufacturing method of the display device according to an embodiment of the present invention, the settings for each model can be optimized by changing the setting values ​​of the switching and switching operation times of the first solenoid valve 255a, the second solenoid valve 255b, the third solenoid valve 255c, and the fourth solenoid valve 255d of the improved blowers 250' and 260' disposed on all sides around the target substrate PS, so that the improved blowers 250' and 260' face the suction port formed in the form of a closed curve around the target substrate PS during the laser cutting process according to the model of the work object (e.g., the target substrate PS), and the operation time of the improved blowers 250' and 260' can be optimized according to each work object (e.g., the model of the target substrate PS) by converting the operation time of the improved blowers 250' and 260' into a scheme.

[0126] Figure 18 The diagram illustrates the effects of conventional and experimental examples of the present invention.

[0127] from Figure 18 As can be seen from the manufacturing method of the conventional example display device, in the process of cutting the target substrate PS with a laser beam LB without using blowers 250 and 260 or without performing switch control, it can be seen that the smoke generated along the cutting line CL blocks the laser beam LB and interferes with the processing of the target substrate PS, resulting in particles remaining on the surface of the target substrate PS or dark lines forming on the surface of the target substrate PS.

[0128] On the other hand, according to the manufacturing method of the display device of the experimental example of the present invention, the improved switching and switching operation time of the blowers 250' and 260' combined with the movement control of the stage unit 110, the smoke generated on the target substrate PS is simultaneously generated and descended by the downward flow of the internal space LP forming the inner cup 220, and is sucked and removed by the improved suction port 230' of the suction unit 200, thereby confirming that almost no particles remain on the surface of the target substrate PS and significantly reducing the formation of dark lines.

[0129] Industrial applicability The manufacturing system and method for a display device according to embodiments of the present invention aim to provide a manufacturing system and method for a display device that can ensure the quality of the display device and improve the yield by ensuring the smoke control technology generated when the stage on which the display device is mounted moves in the laser cutting apparatus of the display device.

[0130] According to the manufacturing system and method of the display device according to embodiments of the present invention, when verifying airflow simulation, it is possible to prevent equipment contamination (e.g., external or optical system contamination) caused by smoke movement due to table movement.

[0131] According to the manufacturing system and method of the display device according to the embodiments of the invention, the clogging of the suction port caused by smoke containing adhesive components can be minimized by optimizing the design of the suction port, thereby extending the maintenance cycle of the suction unit.

[0132] According to the manufacturing system and method for the display device based on embodiments of the present invention, it is possible to control the operation switches of multiple blowers provided on all sides of the suction unit, and to convert them into a scheme based on the laser cutting line length for each target substrate model and the switch setting value received in real time in conjunction with the movement of the stage unit.

Claims

1. A manufacturing system for a display device, the manufacturing system comprising: The main body has openings at the top and bottom, forming an empty internal space, so that a laser beam emitted through the optical system can irradiate the target substrate; An exhaust channel is formed between the upper surface of the lower plate, the inner surface of the outer casing constituting the main body, and the outer surface of the inner cup surrounding the cut line of the target substrate; A stage unit, wherein the target substrate is disposed on the stage unit, and the cutting line of the target substrate is moved relative to the laser beam; The suction unit is configured to suction and remove smoke generated during laser beam irradiation while the stage unit is moving. as well as The control unit controls the set value of the suction unit according to the moving speed of the platform unit and the moving direction of the smoke, so as to prevent the smoke from leaking into the optical system or external devices.

2. The manufacturing system according to claim 1, wherein, The suction unit includes an improved suction port connected to the exhaust channel, and the improved suction port includes an expansion hole extending through the inner cup and the outer casing relative to the lower plate.

3. The manufacturing system according to claim 2, wherein, The improved suction port also includes a guide portion that slopes upward and outward from the edge of the expansion hole and a vortex-forming portion extending from the guide portion, the vortex-forming portion being used to form a vortex in the smoke drawn in through the expansion hole by the negative pressure generated when the dust collection unit connected to the exhaust passage is operated.

4. The manufacturing system according to claim 3, wherein, A box-shaped smoke storage chamber extends from the vortex-forming portion and is located at both ends for storing the smoke collected through the expansion holes and preventing the smoke from leaking to the outside.

5. The manufacturing system of claim 2, further comprising an improved blower disposed at a lower portion of the body near the improved suction port between the expansion hole and the internal space and forming a lateral airflow such that the smoke moves toward the improved suction port.

6. The manufacturing system according to claim 5, wherein, The control unit is configured to receive the moving speed and direction of the stage unit, the improved blower includes a pair of first improved blowers disposed on the long side of the side surrounding the interior space and a pair of second improved blowers disposed on the short side, and the control unit independently controls the switching operation of the first to fourth solenoid valves installed in the first and second improved blowers.

7. The manufacturing system according to claim 6, wherein, The first improved blower and the second improved blower include a first main pipe installed through the lower part of the outer casing of the main body and a first nozzle installed on the first main pipe, and the first solenoid valve to the fourth solenoid valve each control the opening and closing of the first nozzle.

8. The manufacturing system according to claim 7, further comprising a jet angle adjustment unit and a jet position adjustment unit, wherein the jet angle adjustment unit is used to adjust the tilt of the first nozzle, and the jet position adjustment unit is used to adjust the jet position of the first nozzle.

9. The manufacturing system according to claim 8, wherein, The control unit controls the on / off timing of the improved blower by interlocking the improved suction port with the improved blower and in conjunction with the movement of the stage unit. The improved suction port has an expanded aperture to prevent smoke generated from the target substrate to be processed by laser beam irradiation from accumulating, and a vortex-forming portion for causing the smoke to swirl internally. The improved blower is disposed between the suction port and the internal space where laser beam irradiation is performed to form an airflow to the suction port.

10. A suction unit, the suction unit comprising: An improved suction port connects to the exhaust channel; An improved blower is disposed at the lower part of the main body having an internal space for performing laser beam irradiation, between the improved suction port and the internal space, and is located close to the improved suction port to form an airflow, such that the smoke generated during the laser beam irradiation and cutting of the target substrate moves toward the improved suction port. as well as The control unit is configured to control the improved blower according to the moving speed of the platform unit and the moving direction of the smoke, thereby drawing the smoke into the improved suction port.

11. The suction unit according to claim 10, wherein, The improved suction port includes an expansion hole extending through the inner cup and outer casing that constitute the body.

12. The suction unit according to claim 11, wherein, The improved suction port also includes a guide portion that slopes upward and outward from the edge of the expansion hole and a vortex-forming portion extending from the guide portion, the vortex-forming portion being used to form a vortex in the smoke drawn in through the expansion hole by the negative pressure generated when the dust collection unit connected to the exhaust passage is operated.

13. The suction unit according to claim 12, the suction unit further comprising a box-shaped smoke storage cavity extending from the vortex forming portion and disposed at both ends, for storing the smoke collected through the expansion hole and preventing the smoke from leaking to the outside.

14. The suction unit according to claim 13, wherein, The control unit receives the moving speed and direction of the platform unit. The improved blower includes a pair of first improved blowers disposed on the long side of the side surrounding the interior space and a pair of second improved blowers disposed on the short side. The control unit independently controls the switching of a first to a fourth solenoid valve installed in the first and second improved blowers.

15. The suction unit according to claim 14, wherein, The first improved blower and the second improved blower include a first main pipe installed through the lower part of the outer casing of the main body and a first nozzle attached to the first main pipe, and the first solenoid valve to the fourth solenoid valve each control the opening and closing of the first nozzle.

16. The suction unit according to claim 14, further comprising a jet angle adjustment unit and a jet position adjustment unit, wherein the jet angle adjustment unit is used to adjust the tilt of the first nozzle, and the jet position adjustment unit is used to adjust the jet position of the first nozzle.

17. A control method for a suction unit, the control method comprising: The airflow of the simulated suction port is improved to prevent smoke from moving outside the suction unit as the stage unit, which is set with a target substrate to be irradiated and cut by the laser beam, moves. An improved blower is installed on three or four sides around the laser-cutting end at a vertical height matching the improved suction port; and While performing laser cutting on the target substrate while moving the stage unit, the movement of the stage unit controls the switching of the first to fourth solenoid valves of the improved blower.

18. The control method for the suction unit according to claim 17, further comprising: Selectively control the switching operation of the first to the fourth solenoid valves of the improved blower, and adjust the injection position and injection angle of the nozzle of the improved blower; The pipe pressure of the first and second connecting pipes is controlled by controlling the pipe pressure regulating valves of the first and second connecting pipes connected to the dust collection unit. Store the switching operations and operation time data of the first solenoid valve to the fourth solenoid valve according to the moving speed and moving direction of the platform unit; as well as To address the movement of the smoke caused by the aforementioned unit, airflow simulation was confirmed while adjusting the switching and injection angle of the improved blower, air pressure, and duct pressure.

19. The control method for the suction unit according to claim 18, the control method further comprising: The switching and switching operation time settings of the first to fourth solenoid valves of the improved blower are optimized. as well as The optimized settings of the improved blower used for the target substrate are converted into a scheme.

Images