Cryogenic cold trap device and vacuum system

Abstract

This invention relates to the fields of vacuum technology and cryogenic engineering, and discloses a cryogenic cold trap device and a vacuum system. The cryogenic cold trap device includes: a housing with an extraction port; an adapter connecting the housing and having an openable or closable channel; a condenser assembly housed within the housing; a cold source mounted on the housing and exchanging heat with the condenser assembly; and a drive mechanism mounted on the housing for driving the condenser assembly to move in and out of the housing along the channel. This invention, by driving the condenser assembly in and out of the housing along the channel using a drive mechanism, allows the cryogenic cold trap device to operate within an extraction pipe, achieving high cold trap efficiency. During cold trap regeneration, it can be removed from the extraction pipe, avoiding pipe shutdown and not affecting extraction operations, thereby ensuring the extraction efficiency and performance of the extraction pipe.

Description

Technical Field

[0001] This invention relates to the fields of vacuum technology and cryogenic engineering, and more particularly to a cryogenic cold trap device and vacuum system. Background Technology

[0002] In fields such as vacuum technology, nuclear fusion devices, and scientific research (e.g., surface analysis, molecular beam epitaxy), obtaining and maintaining a clean high-vacuum or ultra-high-vacuum environment is crucial. However, in actual vacuum systems, even after extraction by main pumps such as mechanical and molecular pumps, a large amount of condensable gases remain. Among these, water vapor (H2O), due to its wide range of sources (e.g., venting from chamber materials, release during processes) and its ease of adsorption onto the inner walls of chambers at room temperature, often becomes the main residual gas component limiting vacuum improvement and affecting process cleanliness.

[0003] To effectively capture condensable gases such as water vapor, cryogenic cold traps are widely used in pumping pipelines as auxiliary pumps to the main pump. The basic principle of a cryogenic cold trap is to capture gas molecules by condensation on a low-temperature surface, thereby removing them from the vacuum system. However, cryogenic cold traps in related technologies are usually divided into two types: series-connected and external, which cannot simultaneously achieve the pumping rate of the vacuum system and the working efficiency of the cold trap. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a cryogenic cold trap device, which can ensure the pumping rate of the vacuum system without stopping the pumping system, and also improve the working efficiency of the cold trap.

[0005] The present invention also aims to provide a vacuum system for using the above-described cryogenic cold trap device.

[0006] A cryogenic cold trap device according to an embodiment of the present invention includes: a housing having an air extraction port; an adapter communicating with the housing and having an openable or closable channel; a condensation assembly disposed within the housing; a cold source disposed on the housing and exchanging heat with the condensation assembly; and a drive mechanism disposed on the housing for driving the condensation assembly to enter and exit the housing along the channel.

[0007] According to the embodiments of the present invention, the cryogenic cold trap device drives the condensation component to enter and exit the housing along the channel by a drive mechanism. When the cryogenic cold trap device is working, it can be placed in the extraction pipe to achieve high cold trap working efficiency. When the cold trap is regenerating, it can be removed from the extraction pipe to avoid the extraction pipe from shutting down and to not affect the extraction work. This ensures the extraction efficiency and extraction performance of the extraction pipe.

[0008] In some embodiments of the present invention, the drive mechanism is located on the outside of the housing.

[0009] In some embodiments of the present invention, the housing is a retractable corrugated pipe and has a first pipe end and a second pipe end disposed opposite to each other. The cold source is disposed on the first pipe end and connected to the condensation assembly. The adapter is disposed on the second pipe end. The driving mechanism is used to drive the housing to extend and retract.

[0010] In some embodiments of the present invention, the driving mechanism is a telescopic driving member, and includes a main body and a telescopic part. The telescopic part is disposed on the main body and is telescopically movable relative to the main body. One of the main body and the telescopic part is connected to the first pipe end, and the other is connected to the second pipe end.

[0011] In some embodiments of the present invention, the adapter includes a valve seat and a valve plate. The valve seat is disposed on the housing and has the channel. The valve plate is slidably disposed on the valve seat in an axial direction perpendicular to the channel, for opening or closing the channel.

[0012] In some embodiments of the present invention, the condensation assembly includes a condenser, a heat-conducting element, and a heating element. One end of the heat-conducting element is connected to the cold source, and the other end is connected to the condenser. The heating element is disposed on the condenser.

[0013] In some embodiments of the present invention, the condenser includes a cylindrical frame and condenser plates, wherein there are multiple condenser plates disposed within the cylindrical frame, and the multiple condenser plates are arranged parallel to the axial direction of the cylindrical frame.

[0014] In some embodiments of the present invention, there are two heating elements configured as flexible heating wires, and the two heating elements are disposed on opposite sides of the heat-conducting element and surround the cylindrical frame.

[0015] In some embodiments of the present invention, the heat-conducting component includes a connecting plate and a plurality of heat-conducting plates. The connecting plate is connected to the cold source, and the plurality of heat-conducting plates are parallel to each other and perpendicular to the connecting plate. The other end of each heat-conducting plate away from the connecting plate is connected to the cylindrical frame.

[0016] A vacuum system according to an embodiment of the present invention includes: an air extraction pipe, wherein a branch port is provided on the side of the air extraction pipe; a cryogenic cold trap device as described in any of the preceding descriptions, wherein the adapter is connected to the branch port, and wherein the driving mechanism is capable of driving the condensation assembly to enter and exit the air extraction pipe along the channel and the branch port.

[0017] According to the vacuum system of the present invention, by employing the cryogenic cold trap device, it can achieve high pumping efficiency and pumping performance, while also improving the working efficiency of the cold trap.

[0018] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0019] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0020] Figure 1 Exploded views of a cryogenic cold trap device provided in some embodiments of the present invention;

[0021] Figure 2 This is a three-dimensional structural schematic diagram of a cryogenic cold trap device provided in some embodiments of the present invention;

[0022] Figure 3 A three-dimensional structural schematic diagram of a condensation assembly provided in some embodiments of the present invention;

[0023] Figure 4 This is a schematic diagram of a cryogenic cold trap device in a vacuum system provided in some embodiments of the present invention, where the device is not connected to the evacuation pipe.

[0024] Figure 5 This is a schematic diagram of the cryogenic cold trap device entering the pumping pipe in a vacuum system provided in some embodiments of the present invention.

[0025] Figure label:

[0026] 1000. Vacuum system;

[0027] 100. Low-temperature cold trap device;

[0028] 10. Shell; 10a. Air extraction port; 101. First pipe end; 102. Second pipe end;

[0029] 20. Adapter; 201. Valve seat; 202. Valve plate; 20a. Channel;

[0030] 30. Condensing assembly; 301. Condensing component; 3011. Cylindrical frame; 3012. Condensing plate; 302. Heat-conducting component; 3021. Connecting plate; 3022. Heat-conducting plate; 303. Heating component;

[0031] 40. Cold source;

[0032] 50. Drive mechanism; 501. Main body; 502. Telescopic part;

[0033] 200, exhaust pipe; 200a, branch pipe inlet. Detailed Implementation

[0034] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0035] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0036] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0037] The cryogenic cold trap device 100 of this invention can be applied to vacuum systems, and is especially suitable for vacuum pumping systems rich in water vapor, such as nuclear fusion devices, semiconductor manufacturing equipment, and large-volume vacuum equipment.

[0038] The following is for reference. Figures 1-5 The following describes a cryogenic cold trap device 100 according to an embodiment of the present invention.

[0039] like Figure 1 and Figure 2As shown, a cryogenic cold trap device 100 according to an embodiment of the present invention includes: a housing 10, an adapter 20, a condenser assembly 30, a cold source 40, and a drive mechanism 50. The housing 10 has an exhaust port 10a. The adapter 20 communicates with the housing 10 and has an openable / closeable channel 20a. The condenser assembly 30 is disposed within the housing 10. The cold source 40 is disposed on the housing 10 and exchanges heat with the condenser assembly 30. The drive mechanism 50 is disposed on the housing 10 and is used to drive the condenser assembly 30 to enter and exit the housing 10 along the channel 20a.

[0040] Housing 10 may refer to the outer shell of the cryogenic cold trap device 100, and its material may be, but is not limited to, stainless steel, etc. Adapter 20 refers to the evacuation pipe 200 (see [link to adapter]) used to connect housing 10 to the vacuum system 1000. Figure 4 and Figure 5 The connected components, such as adapter 20, can be understood as valve-type components. The condenser assembly 30 is the component responsible for providing a low-temperature surface to trap gases. The cold source 40 is the component that generates and maintains the low-temperature environment required for the cold trap; optionally, the cold source 40 can be a GM refrigerator or liquid nitrogen. The drive mechanism 50 is the mechanism that can drive the condenser assembly 30 to move. The drive mechanism 50 can be directly physically connected to the condenser assembly 30 to drive its movement, or it can drive the condenser assembly 30 to move in a non-contact manner, such as through magnetic attraction.

[0041] refer to Figure 4 and Figure 5The cryogenic cold trap device 100 is connected to a branch port 200a beside the extraction pipe 200 via an adapter 20. When the cryogenic cold trap device 100 is needed for auxiliary extraction, the vacuum pump unit is connected to the extraction port 10a, and the housing 10 is evacuated to a vacuum state below 10 Pa through the extraction port 10a. Then, the extraction port 10a is closed, and the cold source 40 is activated to cool the condenser component 30 until it drops to 100-120 K (a temperature sensor can be installed on the condenser component 30, not shown in the figure). When the cryogenic cold trap device 100 is needed to operate, the adapter 20 opens the channel 20a, and the drive mechanism 50 is controlled to move the condenser component 30, causing the condenser component 30 to slowly descend into the extraction pipe 200, thereby achieving efficient capture of water vapor in the extraction pipe 200. If it is necessary to adjust the water vapor extraction speed or affect the flow conductance of the extraction pipe 200, the drive mechanism 50 can also be controlled to freely select the depth of the condenser component 30 entering the extraction pipe 200. When the water vapor pumping speed of the cryogenic cold trap device 100 drops significantly, i.e., it becomes saturated, the cryogenic cold trap needs to be regenerated. The control drive mechanism 50 slowly moves the condenser component 30 out of the exhaust pipe 200 and closes the channel 20a of the adapter 20. This does not affect the vacuuming operation of the exhaust pipe 200. The cold source 40 is turned off, and the exhaust port 10a is opened to remove water vapor. After regeneration, the temperature can be lowered to the target temperature again, and the adapter 20 can be opened again to allow the condenser component 30 to re-enter the exhaust pipe 200 for operation.

[0042] As can be seen from the above analysis, when the cryogenic cold trap device 100 needs to be regenerated, it can exit the pumping pipe 200 without shutting down the vacuum system, and the pumping pipe 200 can continue to pump air. The whole process achieves the effect of non-interference with the operation of the pumping pipe 200, thereby ensuring the pumping efficiency. At the same time, when the cryogenic cold trap device 100 is working, it is located inside the pumping pipe 200 and can directly capture water vapor molecules in the pipe, thus having a high cold trap working efficiency.

[0043] Furthermore, in the above technical solution, the depth of the condensing component 30 entering the extraction pipe 200 can be controlled by the drive mechanism 50, and the pumping speed within the extraction pipe 200 can be adjusted. This allows for adjustment of the gas capture capability of the cryogenic cold trap device 100 as needed. For example, by controlling the movement stroke of the condensing component 30 driven by the drive mechanism 50, the condensing component 30 can be adjusted to partially enter the extraction pipe 200 to capture easily captured gases first, and then fully enter the extraction pipe 200 to capture more difficult-to-capture gases, thus meeting different usage requirements.

[0044] It should be noted that other components of the cryogenic cold trap device 100 in this embodiment of the invention, such as temperature control and monitoring components, collection devices, and operation, are known to those skilled in the art and will not be described in detail here.

[0045] According to the embodiment of the present invention, the low-temperature cold trap device 100 drives the condensation component 30 to enter and exit the housing 10 along the channel 20a by the drive mechanism 50. When the low-temperature cold trap device 100 is working, it can be placed in the extraction pipe 200 to achieve high cold trap working efficiency. When the cold trap is regenerated, it can be removed from the extraction pipe 200 to avoid the extraction pipe 200 from stopping and to not affect the extraction work. This ensures the extraction efficiency and extraction performance of the extraction pipe 200.

[0046] In some embodiments of the present invention, such as Figure 1 and Figure 2 As shown, the drive mechanism 50 is located on the outside of the housing 10. When the drive mechanism 50 is working, it is easy to generate heat or contaminants such as debris. By placing the drive mechanism 50 on the outside of the housing 10, the impact on the low temperature of the condensation component 30 can be reduced, and the cleanliness and stability of the internal environment of the housing 10 can be ensured, thereby ensuring the reliability of the condensation component 30 in capturing water vapor molecules.

[0047] In some embodiments of the present invention, such as Figure 1 and Figure 2 As shown, the housing 10 is a retractable corrugated pipe and has a first pipe end 101 and a second pipe end 102 arranged opposite to each other. The cold source 40 is provided on the first pipe end 101 and connected to the condenser assembly 30. The adapter 20 is provided on the second pipe end 102. The drive mechanism 50 is used to drive the housing 10 to extend and retract.

[0048] In the above technical solution, the driving mechanism 50 does not directly drive the condensing component 30. Instead, it drives the condensing component 30 to enter and exit the housing 10 through the channel 20a by extending and retracting the retractable bellows. This structure makes it simple to drive the condensing component 30 outside the housing 10, which can reduce the overall structural complexity and improve the reliability of the whole device.

[0049] In some embodiments of the present invention, such as Figure 1 and Figure 2 As shown, the drive mechanism 50 is a telescopic drive member, and includes a main body 501 and a telescopic part 502. The telescopic part 502 is provided on the main body 501 and can be telescopically moved relative to the main body 501. One of the main body 501 and the telescopic part 502 is connected to the first pipe end 101, and the other is connected to the second pipe end 102.

[0050] The telescopic drive component can be, but is not limited to, a hydraulic rod, a cylinder, an electric actuator, or a lead screw mechanism, etc. For example, if the telescopic drive component is a hydraulic rod, then the main body 501 can be a cylinder body, and the telescopic part 502 can be a piston rod. In the above technical solution, the telescopic part 502 moves telescopically on the main body 501, thereby driving the housing 10 to extend and retract.

[0051] Optionally, there may be multiple drive mechanisms 50, arranged around the perimeter of the housing 10. That is, the number of drive mechanisms 50 can be, but is not limited to, two, three, four, etc. Driving the condenser assembly 30 with multiple drive mechanisms 50 helps to reduce the load on each drive mechanism 50 and improves the stability of the entire device.

[0052] In some embodiments of the present invention, such as Figure 1 As shown, the adapter 20 includes a valve seat 201 and a valve plate 202. The valve seat 201 is disposed on the housing 10 and has a channel 20a. The valve plate 202 is slidably disposed on the valve seat 201 in an axial direction perpendicular to the channel 20a, and is used to open or close the channel 20a.

[0053] The adapter 20 can be a plug-in valve-like structure, with the valve seat 201 connected to the bottom of the housing 10 and having a channel 20a. The valve plate 202 can open or close the channel 20a by sliding on the valve seat 201. In the above technical solution, the adapter 20 has a smaller structural size, especially a smaller height, and can easily form a larger channel 20a, thereby providing more space for the condenser assembly 30 to enter and exit.

[0054] In some embodiments of the present invention, such as Figure 3 As shown, the condensing assembly 30 includes a condensing element 301, a heat-conducting element 302, and a heating element 303. One end of the heat-conducting element 302 is connected to the cold source 40, and the other end is connected to the condensing element 301. The heating element 303 is disposed on the condensing element 301.

[0055] The condenser 301 can refer to a component that forms a low-temperature surface to trap gas, and can be, but is not limited to, a plate, a grid, or a disc. The heat-conducting component 302 can refer to a component that can transfer cold energy and serve a connecting function, on the one hand transferring the low temperature of the cold source 40 to the condenser 301, and on the other hand serving to mount the condenser 301. Optionally, the condenser 301 and the heat-conducting component 302 are made of a material with high thermal conductivity, for example, copper. Furthermore, the surfaces of the condenser 301 and the heat-conducting component 302 can be plated with bright nickel to prevent corrosion. The heating component 303 can refer to a component that performs a heating function, and can be, but is not limited to, a heating wire, a heating tube, etc.

[0056] In the above technical solution, the heat-conducting component 302 serves to connect the cold source 40 and the condenser 301, and compensates for the displacement required for the movement of the condenser 301. The heating component 303 is used to heat the condenser 301 to achieve cold trap regeneration. For example, during the regeneration stage, the heating component 303 is driven to heat the condenser 301, raising its temperature to 350K to 400K, and the vacuum inside the casing 10 drops below 10Pa, indicating that regeneration is complete.

[0057] In some embodiments of the present invention, such as Figure 3 As shown, the condenser 301 includes a cylindrical frame 3011 and multiple condenser plates 3012 disposed within the cylindrical frame 3011, with the plates parallel to the axial direction of the frame 3011. This design creates a grid-like structure for the condenser 301, increasing the surface area of ​​the low-temperature zone and enhancing its ability to capture water vapor. When the condenser 301 is placed within the extraction pipe 200, the cylindrical frame 3011 and the extraction pipe 200 are coaxially arranged. Therefore, the multiple condenser plates 3012, being parallel to the axial direction of the cylindrical frame 3011, are also parallel to the axial direction of the extraction pipe 200. This ensures that the condenser plates 3012 are parallel to the gas molecule flow direction, maximizing the water vapor extraction speed while minimizing the impact on the extraction pipe 200's extraction of non-condensable gases, thus guaranteeing extraction efficiency.

[0058] Optionally, multiple condenser plates 3012 can be arranged in parallel to each other.

[0059] Optionally, such as Figure 3 As shown, some of the multiple condensing plates 3012 are first condensing plates arranged parallel to each other, while others are second condensing plates perpendicular to the first condensing plates. This arrangement allows the multiple condensing plates 3012 to form a crisscross structure, resulting in higher overall strength and improved reliability.

[0060] In some embodiments of the present invention, such as Figure 3 As shown, there are two heating elements 303, which are constructed as flexible heating wires. The two heating elements 303 are located on opposite sides of the heat-conducting element 302 and are arranged around the cylindrical frame 3011. It can be understood that the heating elements 303, with the above-mentioned structure, can be bent and installed on the cylindrical frame 3011, which helps to reduce assembly difficulty and improve the structural compactness of the assembly formed by the heating elements 303 and the cylindrical frame 3011. Having two heating elements 303 allows for heating at both ends of the condenser 301, which helps to ensure uniform heating and improve regeneration efficiency.

[0061] Optionally, the heating element 303 and the cylindrical frame 3011 are fixedly connected by rivets. In this way, the rivets can be flush with the surface of the cylindrical frame 3011 as much as possible, which can avoid large protruding structures on the surface of the cylindrical frame 3011, reduce the size, and facilitate installation inside the housing 10.

[0062] In some embodiments of the present invention, such as Figure 3 As shown, the heat-conducting component 302 includes a connecting plate 3021 and a plurality of heat-conducting plates 3022. The connecting plate 3021 is connected to the cold source 40. The plurality of heat-conducting plates 3022 are parallel to each other and perpendicular to the connecting plate 3021. The other end of each heat-conducting plate 3022 away from the connecting plate 3021 is connected to the cylindrical frame 3011.

[0063] In the above technical solution, both the connecting plate 3021 and the heat-conducting plate 3022 are plate-shaped with a large surface area, which increases the overall surface area of ​​the heat-conducting component 302, thereby increasing the heat transfer surface and improving the heat transfer efficiency between the cold source 40 and the condenser 301. Furthermore, multiple heat-conducting plates 3022 connect the cold source 40 and the connecting plate 3021, thus giving the condenser assembly 30 high structural strength, making it less prone to damage and ensuring high overall reliability. This also helps reduce the overall weight of the condenser assembly 30, thereby reducing the load on the drive mechanism 50 and improving the overall reliability of the device.

[0064] In some embodiments of the present invention, the cryogenic cold trap device 100 includes a displacement detection element for detecting the drive stroke of the drive mechanism 50 or the condensation assembly 30. The displacement detection element is configured to output a control signal to control the pumping speed of the extraction pipe 200. That is, by detecting the drive stroke of the drive mechanism 50 or the condensation assembly 30 through the displacement detection element, the depth of the condensation assembly 30 entering the extraction pipe 200 can be adjusted, thereby adjusting the pumping speed of the cryogenic cold trap device 100 for water vapor, i.e., adjusting the gas capture capability of the cryogenic cold trap device 100 and controlling the pumping speed of the extraction pipe 200.

[0065] like Figures 1 to 5 This describes a specific embodiment of the cryogenic cold trap device 100 of the present invention.

[0066] The cryogenic cold trap device 100 includes a housing 10, an adapter 20, a condensation assembly 30, a cold source 40, and a drive mechanism 50.

[0067] The housing 10 is a retractable bellows, which has an air extraction port 10a for connecting to a vacuum pump unit. The retractable bellows has a first pipe end 101 and a second pipe end 102 that are arranged opposite to each other. The cold source 40 is located on the first pipe end 101, and the adapter 20 is located on the second pipe end 102.

[0068] The adapter 20 is a slide gate valve and is connected to the housing 10. The slide gate valve has an openable or closed channel 20a. The retractable bellows is connected to the air extraction pipe 200 through the adapter 20.

[0069] A condensing assembly 30 is disposed within the housing 10. The condensing assembly 30 includes a condensing element 301, a heat-conducting element 302, and a heating element 303. One end of the heat-conducting element 302 is connected to a cold source 40, and the other end is connected to the condensing element 301. The heating element 303 is disposed on the condensing element 301. The condensing element 301 includes a cylindrical frame 3011 and multiple condensing plates 3012 disposed within the cylindrical frame 3011, with the multiple condensing plates 3012 arranged parallel to the axial direction of the cylindrical frame 3011. Two heating elements 303 are flexible heating wires, disposed on opposite sides of the heat-conducting element 302 and arranged circumferentially around the cylindrical frame 3011. The heat-conducting component 302 includes a connecting plate 3021 and three heat-conducting plates 3022. The connecting plate 3021 is connected to the cold source 40. The three heat-conducting plates 3022 are parallel to each other and perpendicular to the connecting plate 3021. Each heat-conducting plate 3022 is connected to the cylindrical frame 3011.

[0070] The cold source 40 is located on the housing 10. The cold source 40 is a GM refrigerator or liquid nitrogen, used for heat exchange with the condenser assembly 30.

[0071] The drive mechanism 50 is located on the outside of the housing 10. There are three drive mechanisms 50 around the periphery of the telescopic tube, and each of them is a hydraulic rod. One of the hydraulic rods is connected to the first tube end 101, and the other is connected to the second tube end 102.

[0072] like Figure 4 and Figure 5 As shown, a vacuum system 1000 according to an embodiment of the present invention includes an extraction pipe 200 and a cryogenic cold trap device 100 as described in any of the preceding embodiments. A branch port 200a is provided on the side of the extraction pipe 200; an adapter 20 connects to the branch port 200a, wherein a drive mechanism 50 can drive a condensation assembly 30 to enter and exit the extraction pipe 200 along the channel 20a and the branch port 200a.

[0073] According to an embodiment of the present invention, the vacuum system 1000, by employing the cryogenic cold trap device 100, can have high pumping efficiency and pumping performance, and at the same time improve the working efficiency of the cold trap.

[0074] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0075] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A cryogenic cold trap device, characterized in that, include: A housing, wherein the housing is provided with an air extraction port; An adapter that connects to the housing and has an openable or closable channel; A condensation assembly, wherein the condensation assembly is disposed within the housing; A cold source is disposed on the housing and exchanges heat with the condensation assembly; A drive mechanism, which is disposed on the housing, is used to drive the condensation assembly to move in and out of the housing along the channel.

2. The cryogenic cold trap device according to claim 1, characterized in that, The drive mechanism is located on the outside of the housing.

3. The cryogenic cold trap device according to claim 2, characterized in that, The housing is a retractable corrugated pipe with a first pipe end and a second pipe end arranged opposite to each other. The cold source is located on the first pipe end and connected to the condenser assembly. The adapter is located on the second pipe end. The driving mechanism is used to drive the housing to extend and retract.

4. The cryogenic cold trap device according to claim 3, characterized in that, The driving mechanism is a telescopic driving component, and includes a main body and a telescopic part. The telescopic part is disposed on the main body and is telescopically movable relative to the main body. One of the main body and the telescopic part is connected to the first pipe end, and the other is connected to the second pipe end.

5. The cryogenic cold trap device according to claim 1, characterized in that, The adapter includes a valve seat and a valve plate. The valve seat is disposed on the housing and has the channel. The valve plate is slidably disposed on the valve seat in an axial direction perpendicular to the channel, for opening or closing the channel.

6. The cryogenic cold trap device according to any one of claims 1 to 5, characterized in that, The condensation assembly includes a condenser, a heat-conducting component, and a heating component. One end of the heat-conducting component is connected to the cold source, and the other end is connected to the condenser. The heating component is disposed on the condenser.

7. The cryogenic cold trap device according to claim 6, characterized in that, The condenser includes a cylindrical frame and condenser plates. There are multiple condenser plates disposed within the cylindrical frame, and the multiple condenser plates are arranged parallel to the axial direction of the cylindrical frame.

8. The cryogenic cold trap device according to claim 7, characterized in that, The heating element consists of two flexible heating wires, which are arranged on opposite sides of the heat-conducting element and surround the cylindrical frame.

9. The cryogenic cold trap device according to claim 7, characterized in that, The heat-conducting component includes a connecting plate and multiple heat-conducting plates. The connecting plate is connected to the cold source, and the multiple heat-conducting plates are parallel to each other and perpendicular to the connecting plate. The other end of each heat-conducting plate away from the connecting plate is connected to the cylindrical frame.

10. A vacuum system, characterized in that, include: An air extraction pipe, wherein a branch pipe opening is provided on the side of the air extraction pipe; The cryogenic cold trap apparatus as described in any one of claims 1 to 9, wherein the adapter is connected to the branch port, wherein, The drive mechanism can drive the condenser assembly to enter and exit the extraction pipe along the channel and the branch port.

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