Electronic-grade phosphoric acid purification device and purification method

Abstract

The invention discloses an electronic-grade phosphoric acid purification device and method, and relates to the technical field of phosphoric acid purification, the electronic-grade phosphoric acid purification device comprises a liquid distribution mechanism and a crystallization mechanism, the liquid distribution mechanism is located above the crystallization mechanism, and a shell is arranged outside the liquid distribution mechanism; the liquid distribution mechanism comprises a liquid distribution disc and liquid distribution holes, and a conical block and a guide groove are arranged at the top of the liquid distribution disc and used for evenly distributing raw materials to the crystallization disc; a stepped concentric circle groove is formed in the liquid distribution disc, so that raw materials are uniformly sprayed in a stepped flowing form; the crystallization mechanism comprises a crystallization disc, a crystallization set and a power set, the crystallization set is composed of a crystallization ring composed of a plurality of rotating plates, the power set drives the crystallization disc to rotate and vibrate, and efficient cooperation of the whole crystallization, washing and crystal melting process is achieved; the shell is provided with a jacket layer which is communicated with the crystallization disc for temperature control; through uniform liquid distribution, multi-stage crystallization, deep washing and efficient crystal melting, the phosphoric acid purification efficiency and the product purity are remarkably improved.

Description

Technical Field

[0001] This invention relates to the field of phosphoric acid purification technology, specifically to an electronic-grade phosphoric acid purification device and purification method. Background Technology

[0002] Electronic-grade phosphoric acid is a high-purity phosphoric acid widely used in the microelectronics industry, such as large-scale integrated circuits and thin-film liquid crystal displays (TFT-LCDs). It is mainly used for cleaning and etching chips. Its purity and cleanliness have a great impact on the yield, conductivity and reliability of electronic components. Lower purity phosphoric acid is mainly used for cleaning LCD panel components, while higher purity phosphoric acid is mainly used for cleaning and etching in the electronic wafer manufacturing process. Since insoluble solid particles or metal ions can conduct current between micro-circuits, causing short circuits, electronic-grade phosphoric acid has strict requirements on the content of insoluble solid particles and most metal ions. Existing phosphoric acid purification devices typically use a stirred tank for crystallization and melting. This makes it impossible for the raw materials to be evenly distributed when they enter the stirred tank, resulting in inconsistent raw material concentration and thickness in different areas of the crystallization plate. Consequently, this leads to uneven crystal growth and large differences in crystal size. Summary of the Invention

[0003] The purpose of this invention is to provide an electronic-grade phosphoric acid purification device and purification method to solve the problem of uneven raw material distribution in the prior art.

[0004] To achieve the above objectives, the present invention provides the following technical solution: An electronic-grade phosphoric acid purification device includes a liquid distribution mechanism and a crystallization mechanism, wherein the liquid distribution mechanism is located above the crystallization mechanism, and a housing is provided outside the liquid distribution mechanism and the crystallization mechanism; The liquid distribution mechanism includes a liquid distribution plate, several liquid distribution holes, a conical block, and a guide groove. The liquid distribution plate is connected to the housing, and the liquid distribution holes communicate with the liquid distribution plate. The conical block is located on the top of the liquid distribution plate, and the guide groove is located on the side of the liquid distribution plate near the conical block. The liquid distribution holes communicate with the guide groove. The crystallization mechanism includes a crystallization disk, a crystallization assembly, and a power assembly. The crystallization assembly is located above the crystallization disk, and the power assembly is located below the crystallization disk. The crystallization disk is connected to the housing. The shell is provided with a jacket layer, which is in communication with the crystallization disk.

[0005] Before the raw material enters the liquid distribution plate, it first passes through a conical block, which then diverts the raw material under the action of the conical block, so that the raw material is evenly dispersed into the guide groove and transported to the liquid distribution plate through the guide groove. Then, it is transported to several liquid distribution holes through the liquid distribution plate, and finally to the crystallization plate through the liquid distribution holes. When the raw material enters the crystallization disc, it falls into the crystallization group. At the same time, the power unit drives the crystallization disc to move, so that the raw material is stirred and crystallized in the crystallization group. Meanwhile, ice-salt water is transported to the jacket layer, so that the ice-salt water is transported to the crystallization disc, thereby affecting the raw material and causing it to crystallize in the crystallization group. After crystallization, ultrapure water is output to the crystallization plate through the liquid distribution plate, so that the ultrapure water washes the crystals, rinsing away impurities and residual raw materials on the crystal surface. After washing, the power unit drives the crystallization plate to move, so that the crystals are stirred and melted on the surface of the crystallization plate. At the same time, hot water is introduced into the jacket layer, so that the hot water enters the crystallization plate, and the crystals are melted under the action of hot water.

[0006] Preferably, the liquid distribution plate has a cavity that communicates with the guide groove. A plurality of concentric circular grooves are provided on the side of the cavity near the liquid distribution hole. The plurality of concentric circular grooves are arranged in a stepped manner. The liquid distribution hole communicates with the concentric circular grooves.

[0007] The raw material enters the cavity through the guide groove, and then flows along the inner wall of the cavity. During the flow, the raw material flows through each concentric circular groove. Since the concentric circular grooves are arranged in a stepped manner, the raw material flows over the surface of each concentric circular groove in a stepped manner, and finally exits through the liquid distribution hole. Since the liquid distribution hole is connected to the concentric circular grooves, the liquid distribution hole is also arranged in a concentric circle, which allows the raw material to be evenly transported to the crystallization plate through the liquid distribution hole. After the raw material is transported and crystallized on the crystallization plate, ultrapure water is transported into the guide tank and then through the liquid distribution holes to the crystallization plate. The ultrapure water washes the crystals on the crystallization plate and washes away the residual raw materials and impurities.

[0008] Preferably, the crystallization assembly includes a support frame and a plurality of crystallization rings. The crystallization rings are connected to the support frame. A plurality of support rings are provided on the outer side of the support frame. An elastic element is provided between the support rings. The support rings are rotatably connected to the housing. The plurality of crystallization rings are arranged in concentric circles.

[0009] The concentric circular conveying channel composed of several liquid distribution holes transports the raw material evenly to the area between two adjacent crystallization rings, allowing the raw material to crystallize on the inner and outer walls of the crystallization rings, thereby increasing the crystallization area of ​​the raw material and improving the crystallization efficiency.

[0010] Preferably, the crystallization ring is composed of several rotating plates, the rotating plates are rotatably connected to the support frame, and a power component is provided inside the support frame, the power component being connected to the rotating plates.

[0011] Since the crystallization ring is composed of several rotating plates, the rotating plates are driven to rotate by a power component; During the crystallization stage, the rotating plates open and close at a certain angle under the action of the power components, so that there is a certain gap between two adjacent rotating plates, and the area between two adjacent crystallization rings is in a connected state. Thus, the raw materials can flow in the area between two adjacent crystallization rings. After the raw materials crystallize, the ultrapure water transported from the liquid distribution plate can also flow through the gap between the rotating plates, thereby realizing the crystallization and washing process from the outer crystallization ring to the central crystallization ring (i.e. from the outside to the inside). During the crystal melting stage, the power component drives the rotating plate to rotate back and forth, causing the rotating plate to perform intermittent reciprocating motion within the rotation radius. Since the surface of the rotating plate is covered with precipitated crystals, the crystals on the surfaces of two adjacent rotating plates will come into contact with each other and squeeze during the rotation, causing the crystals on the rotating plate to break and fall off. At the same time, the rotation of the rotating plate will also squeeze the crystals in the area between two adjacent crystal rings, causing the crystals to fall off from the crystallization disk. Furthermore, the rotation of the rotating plate will also stir the crystals on the surface of the crystallization disk, thereby accelerating the crystal melting efficiency.

[0012] Preferably, the power unit includes a support group and a drive group. The support group consists of a support block and a pressure member. The support block is slidably connected to the housing, and the inner wall of the support block is rotatably connected to the crystallization disk. The pressure member is connected to the outer side of the support block through a support plate, and an elastic element is provided on the pressure member.

[0013] During the crystallization stage, the support group is in a static state, while the driving group is in a dynamic state. During the crystal melting stage, the controller activates the pressure component, which in turn moves the support block vertically up and down. As the support block moves, it moves the crystallization disk, which in turn moves the crystallization ring, causing the crystallization ring to move vertically along with the crystallization disk. The movement of the support assembly causes the crystallization disk and the shell to vibrate. The vibration is transmitted to the crystals on the crystallization disk, and the crystals undergo melting under the action of vibration and rotation of the rotating plate, thereby further accelerating the crystal melting rate.

[0014] Preferably, the drive assembly consists of a gear ring, a helical gear, and a drive component. The gear ring is located at the bottom of the crystallization disk, the drive component is slidably connected to the housing via a support plate, the drive component is connected to the helical gear, and the helical gear meshes with the gear ring for transmission.

[0015] During the crystallization stage, the controller starts the drive unit, which drives the helical gear to rotate. The helical gear rotates, which in turn drives the gear ring to rotate. The gear ring then drives the crystallization disk to rotate. As the crystallization disk rotates, it drives the support frame and the crystallization ring to rotate. Thus, the raw material on the crystallization disk is stirred and crystallized during the rotation of the crystallization disk. During the crystal melting stage, the drive unit works in conjunction with the support unit and the rotating plate to rotate, which causes the crystallization disk to vibrate during its rotation. The rotating plate then rotates on the crystallization disk, further stirring and melting the crystal, thus improving the efficiency of crystal melting.

[0016] Preferably, a discharge pipe is provided in the middle of the crystallization disc, and a separation hood is provided in the middle of the plurality of crystallization rings. The separation hood is located above the discharge pipe and connects the discharge pipe and the space between the crystallization disc and the liquid distribution disc.

[0017] During the crystallization stage, the discharge pipe is closed, thus preventing the raw material from entering the discharge pipe through the separation hood; During the washing stage, the discharge pipe is opened, and after the ultrapure water washes the crystals, it is transported to the discharge pipe through the separation hood and then output through the discharge pipe. During the crystal melting stage, the discharge pipe is temporarily closed. After the crystal melting is completed, the discharge pipe is opened and the material is output through the separation hood to the discharge pipe.

[0018] Preferably, a plurality of guide rods are provided on the side of the crystallization disk near the rotating plate. The guide rods extend into the rotating plate and are also provided with sleeves. The sleeves are in communication with the jacket layer. The guide rods are slidably and sealingly connected to the rotating plate, and the crystallization disk is rotatably and sealingly connected to the shell.

[0019] During the crystallization and melting stages, ice-salt water and hot water are introduced into the jacket layer, respectively, so that the ice-salt water and hot water are delivered to the guide rod through the sleeve at different processing stages. This allows heat to be transferred to the surface of the rotating plate through the guide rod, thereby enabling the raw material to crystallize or the crystal to melt more quickly.

[0020] A purification method for an electronic-grade phosphoric acid purification device, the purification method comprising the following specific steps: S1. A fixed amount of raw material is transported from the liquid distribution plate to the crystallization plate. S2. The crystallization mechanism stirs the raw materials, and crystals are gradually precipitated from the raw materials. S3. After the raw material crystallizes, ultrapure water is transported to the crystallization plate through the liquid distribution plate; S4. Ultrapure water washes the precipitated crystals from the outside to the inside of the crystallization plate, rinsing away impurities and residual original solution from the crystal surface. S5. After washing, the crystallization mechanism performs crystal melting treatment on the crystals; S6. The crystal melting is complete, and it is output from the discharge pipe.

[0021] Compared with the prior art, the beneficial effects of the present invention are: 1. In the liquid distribution stage, a conical block is set at the top of the liquid distribution plate. When the raw material enters, it is first diverted by the conical block, so that the raw material is evenly distributed to the guide groove, avoiding the problem of local accumulation caused by the concentrated impact of raw material on a certain area in traditional devices. The liquid distribution plate is set with stepped concentric circular grooves. When the raw material flows along the cavity, it flows through each concentric circular groove in sequence, and is evenly distributed in a stepped flow form. Finally, it is sprayed and transported to the crystallization plate through the liquid distribution holes arranged in concentric circles. This ensures that the raw material is evenly distributed in space before entering the crystallization plate.

[0022] 2. In the crystallization stage, a crystallization group is formed by several concentric crystallization rings, with the liquid distribution holes corresponding to the positions of the crystallization rings. This allows the raw material to be evenly sprayed into the area between adjacent crystallization rings. The raw material crystallizes simultaneously on the inner and outer walls of the crystallization rings, significantly increasing the crystallization surface area. The crystallization ring is composed of multiple rotating plates. During the crystallization stage, the rotating plates open and close at a certain angle under the action of the power component, connecting the areas between adjacent crystallization rings. The raw material can flow evenly between the areas, avoiding excessively high or low local concentrations, and further ensuring the uniformity of crystal growth. During the crystallization process, the drive group drives the crystallization disk to rotate at a uniform speed, allowing the raw material to crystallize uniformly under dynamic conditions, resulting in crystals with consistent size and morphology.

[0023] 3. During the washing and crystal melting stage, ultrapure water is also sprayed evenly through concentric distribution holes and flows layer by layer from the outside to the inside through the gap of the rotating plate, so as to achieve uniform and deep cleaning of the crystal surface and improve the impurity removal rate. Moreover, due to the uniform crystal shape, the heat conduction efficiency is greatly improved. Combined with the reciprocating rotation of the rotating plate, the vertical vibration of the support group and the rotation of the drive group, the crystal melts quickly and evenly under the synergistic effect of mechanical action and heat, and the crystal melting time is greatly shortened. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the internal structure of the present invention. Figure 1 ; Figure 2 This is a schematic diagram of the internal structure of the present invention. Figure 2 ; Figure 3 This is an internal front view of the present invention; Figure 4 A diagram of the liquid distribution plate; Figure 5 Schematic diagram of the crystallization mechanism Figure 1 ; Figure 6 Schematic diagram of the crystallization mechanism Figure 2 ; Figure 7 This is a schematic diagram of the internal structure of the crystallization mechanism; Figure 8 This is an internal front view of the crystallization mechanism.

[0025] In the diagram: 10. Jacket layer; 1. Liquid distribution mechanism; 11. Liquid distribution plate; 12. Liquid distribution hole; 13. Conical block; 14. Guide groove; 15. Concentric groove; 2. Crystallization mechanism; 21. Crystallization disc; 211. Discharge pipe; 212. Separation hood; 213. Guide rod; 22. Crystallization assembly; 23. Power assembly; 24. Support frame; 241. Support ring; 25. Crystallization ring; 251. Rotating plate; 26. Support assembly; 261. Support block; 262. Pressure component; 27. Drive assembly; 271. Gear ring; 272. Helical gear. Detailed Implementation

[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] Example: Figures 1-8 As shown, the present invention provides a technical solution: an electronic-grade phosphoric acid purification device, comprising a liquid distribution mechanism 1 and a crystallization mechanism 2, wherein the liquid distribution mechanism 1 is located above the crystallization mechanism 2, and a housing is provided outside the liquid distribution mechanism 1 and the crystallization mechanism 2; The liquid distribution mechanism 1 includes a liquid distribution plate 11 and a plurality of liquid distribution holes 12. The liquid distribution plate 11 is connected to the housing, and the liquid distribution holes 12 communicate with the liquid distribution plate 11. The liquid distribution plate 11 is used to transport raw materials to the crystallization plate 21. The liquid distribution mechanism 1 further includes a conical block 13 and a guide groove 14. The conical block 13 is disposed on the top of the liquid distribution plate 11, and the guide groove 14 is disposed on the side of the liquid distribution plate 11 near the conical block 13. The liquid distribution hole 12 is connected to the guide groove 14. The crystallization mechanism 2 includes a crystallization disk 21, a crystallization group 22, and a power group 23. The crystallization group 22 is located above the crystallization disk 21, and the power group 23 is located below the crystallization disk 21. The crystallization disk 21 is connected to the shell. The crystallization disk 21 is used for the crystallization and melting of raw materials. The shell is provided with a jacket layer 10, which is in communication with the crystallization disk 21.

[0028] In one specific embodiment of the present invention, a cavity is provided in the liquid distribution plate 11, the cavity is connected to the guide groove 14, and a plurality of concentric circular grooves 15 are provided on the side of the cavity near the liquid distribution hole 12. The plurality of concentric circular grooves 15 are arranged in a stepped manner, and the liquid distribution hole 12 is connected to the concentric circular grooves 15.

[0029] In one specific embodiment of the present invention, the crystallization group 22 includes a support frame 24 and a plurality of crystallization rings 25. The crystallization rings 25 are connected to the support frame 24. A plurality of support rings 241 are provided on the outer side of the support frame 24. An elastic element (spring) is provided between the support rings 241. The support rings 241 are rotatably connected to the housing. The plurality of crystallization rings 25 are arranged in concentric circles.

[0030] In one specific embodiment of the present invention, the crystallization ring 25 is composed of a plurality of rotating plates 251, the rotating plates 251 are rotatably connected to the support frame 24, and a power component (a micro motor) is provided inside the support frame 24, the power component being connected to the rotating plates 251.

[0031] In one specific embodiment of the present invention, a discharge pipe 211 is provided in the middle of the crystallization disk 21, and a separation cover 212 is provided in the middle of the plurality of crystallization rings 25. The separation cover 212 is located above the discharge pipe 211 and connects the discharge pipe 211 and the space between the crystallization disk 21 and the liquid distribution disk 11.

[0032] In one specific embodiment of the present invention, a plurality of guide rods 213 are provided on the side of the crystallization disk 21 near the rotating plate 251. The guide rods 213 extend into the rotating plate 251, and a sleeve is also provided inside the guide rods 213. The sleeve communicates with the jacket layer 10. The guide rods 213 are slidably and sealingly connected to the rotating plate 251, and the crystallization disk 21 is rotatably and sealingly connected to the shell.

[0033] In one specific embodiment of the present invention, the power unit 23 includes a support unit 26 and a drive unit 27. The support unit 26 consists of a support block 261 and a pressure member 262 (the pressure member 262 is a hydraulic cylinder). The support block 261 is slidably connected to the housing, and the inner wall of the support block 261 is rotatably connected to the crystallization disk 21. The pressure member 262 is connected to the outer side of the support block 261 through a support plate, and an elastic member (the elastic member is a spring) is provided on the pressure member 262.

[0034] In one specific embodiment of the present invention, the drive assembly 27 is composed of a gear ring 271, a helical gear 272 and a drive component (the drive component is a drive motor). The gear ring 271 is located at the bottom of the crystallization disk 21. The drive component is slidably connected to the housing through a support plate. The drive component is connected to the helical gear 272, and the helical gear 272 meshes with the gear ring 271 for transmission.

[0035] A purification method for an electronic-grade phosphoric acid purification device, the purification method comprising the following specific steps: S1. A fixed amount of raw material is conveyed from the liquid distribution plate 11 to the crystallization plate 21; S2, Crystallization mechanism 2 stirs the raw material, and crystals are gradually precipitated from the raw material; S3. After the raw material crystallizes, ultrapure water is delivered to the crystallization plate 21 through the liquid distribution plate 11. S4. Ultrapure water washes the precipitated crystals from the outside to the inside of the crystallization disk 21, rinsing away impurities and residual original solution from the crystal surface. S5. After washing, the crystallization mechanism 2 performs crystal melting treatment on the crystals; S6. The crystal melting is complete and the crystal is output from the discharge pipe 211.

[0036] Working principle of the invention: Before the raw material enters the liquid distribution plate 11, it first passes through the conical block 13. Under the action of the conical block 13, the raw material is diverted and evenly dispersed into the guide groove 14. The raw material enters the cavity through the guide groove 14 and then flows along the inner wall of the cavity. During the flow, the raw material flows through each concentric circular groove 15. Since the concentric circular grooves 15 are arranged in a stepped manner, the raw material flows over the surface of each concentric circular groove 15 in a stepped flow form and is finally output through the liquid distribution hole 12. Since the liquid distribution hole 12 is connected to the concentric circular grooves 15, the liquid distribution hole 12 is also arranged in a concentric circle. The raw material is then evenly transported to the crystallization plate 21 through the liquid distribution hole 12. When the raw material enters the crystallization disk 21, it falls into the crystallization group 22. At the same time, the power unit 23 drives the crystallization disk 21 to move, so that the raw material is stirred and crystallized in the crystallization group 22. Meanwhile, ice-salt water is transported to the jacket layer 10, so that the ice-salt water is transported to the crystallization disk 21. As a result, the raw material is affected by the ice-salt water, so that the raw material precipitates crystals in the crystallization group 22. When conveying raw materials, the concentric circular conveying channel composed of several liquid distribution holes 12 sprays the raw materials evenly into the area between two adjacent crystallization rings 25, so that the raw materials crystallize on the inner and outer walls of the crystallization rings 25, thereby increasing the crystallization area of ​​the raw materials. Since the crystallization ring 25 is composed of several rotating plates 251, the rotating plates 251 are driven to rotate by a power component; at this time, the discharge pipe 211 is in a closed state, so the raw material cannot enter the discharge pipe 211 through the separation cover 212; During the crystallization stage, the rotating plate 251 opens and closes at a certain angle under the action of the power component, so that there is a certain gap between two adjacent rotating plates 251, and the area between two adjacent crystallizing rings 25 is in a connected state, so that the raw material can flow in the area between two adjacent crystallizing rings 25. At the same time, the controller controls the start of the drive unit, which drives the helical gear 272 to rotate. When the helical gear 272 rotates, it drives the gear ring 271 to rotate. The gear ring 271 then drives the crystallization disk 21 to rotate. During the rotation of the crystallization disk 21, it drives the support frame 24 and the crystallization ring 25 to rotate. Thus, the raw material on the crystallization disk 21 is stirred and crystallized during the rotation of the crystallization disk 21. After the raw material crystallizes on the crystallization plate 21, ultrapure water is supplied to the guide tank 14, and the ultrapure water is supplied to the crystallization plate 21 through the liquid distribution hole 12. The ultrapure water washes the crystals on the crystallization plate 21, thereby rinsing away the residual raw materials and impurities. The ultrapure water supplied from the liquid distribution plate 11 can also flow through the gap between the rotating plates 251, thereby realizing the crystallization and washing process from the outer crystallization ring 25 to the central crystallization ring 25 (i.e. from the outside to the inside); at this time, the discharge pipe 211 is opened, and after the ultrapure water washes the crystals, it is transported to the discharge pipe 211 through the separation hood 212 and output through the discharge pipe 211. After washing is completed, the power unit 23 drives the crystallization disk 21 to move, so that the crystals are stirred and melted on the surface of the crystallization disk 21. At the same time, hot water is introduced into the jacket layer 10, so that the hot water enters the crystallization disk 21, and the crystals are melted under the action of hot water.

[0037] The power component drives the rotating plate 251 to rotate back and forth, causing the rotating plate 251 to perform intermittent reciprocating motion within the rotation radius. Since the surface of the rotating plate 251 is covered with precipitated crystals, the crystals on the surfaces of two adjacent rotating plates 251 will come into contact with each other and squeeze during the rotation, causing the crystals on the rotating plate 251 to break and fall off. At the same time, the rotation of the rotating plate 251 will also squeeze the crystals in the area between two adjacent crystal rings 25, and the crystals will also fall off the crystallization disk 21. Furthermore, the rotation of the rotating plate 251 will also stir the crystals on the surface of the crystallization disk 21. The controller controls the pressure component 262 to start, and the pressure component 262 drives the support block 261 to move, so that the support block 261 moves vertically up and down. During the movement of the support block 261, the support block 261 drives the crystallization disk 21 to move, and the crystallization disk 21 drives the crystallization ring 25 to move, so that the crystallization ring 25 also moves vertically with the movement of the crystallization disk 21. The movement of the support group 26 causes the crystallization disk 21 and the shell to vibrate. The vibration is transmitted to the crystals on the crystallization disk 21, and then the crystals undergo melting treatment under the action of vibration and rotation of the rotating plate 251. The drive group 27 rotates in conjunction with the support group 26 and the rotating plate 251, so that the crystallization disk 21 is subjected to vibration transmission during its rotation, and the rotating plate 251 rotates on the crystallization disk 21, thereby further stirring and melting the crystal. During the crystal melting stage, the discharge pipe 211 is temporarily closed. After the crystal melting is completed, the discharge pipe 211 is opened and the material is output through the separation cover 212 to the discharge pipe 211.

[0038] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. An electronic-grade phosphoric acid purification device, characterized in that: It includes a liquid distribution mechanism (1) and a crystallization mechanism (2), wherein the liquid distribution mechanism (1) is located above the crystallization mechanism (2), and the liquid distribution mechanism (1) and the crystallization mechanism (2) are provided with a housing on their exterior; The liquid distribution mechanism (1) includes a liquid distribution plate (11), a plurality of liquid distribution holes (12), a conical block (13) and a guide groove (14). The liquid distribution plate (11) is connected to the housing, and the liquid distribution holes (12) are connected to the liquid distribution plate (11). The conical block (13) is disposed on the top of the liquid distribution plate (11), and the guide groove (14) is disposed on the side of the liquid distribution plate (11) near the conical block (13). The liquid distribution holes (12) are connected to the guide groove (14). The crystallization mechanism (2) includes a crystallization disk (21), a crystallization group (22) and a power group (23). The crystallization group (22) is located above the crystallization disk (21), and the power group (23) is located below the crystallization disk (21). The crystallization disk (21) is connected to the shell. The shell is provided with a jacket layer (10), which is connected to the crystallization disk (21).

2. The electronic-grade phosphoric acid purification device according to claim 1, characterized in that: The liquid distribution plate (11) is provided with a cavity, which is connected to the guide groove (14). Several concentric circular grooves (15) are provided on the side of the cavity near the liquid distribution hole (12). The several concentric circular grooves (15) are arranged in a stepped manner. The liquid distribution hole (12) is connected to the concentric circular grooves (15).

3. The electronic-grade phosphoric acid purification device according to claim 1, characterized in that: The crystallization group (22) includes a support frame (24) and a plurality of crystal rings (25). The crystal rings (25) are connected to the support frame (24). A plurality of support rings (241) are provided on the outer side of the support frame (24). Elastic elements are provided between the support rings (241). The support rings (241) are rotatably connected to the shell. The plurality of crystal rings (25) are arranged in concentric circles.

4. The electronic-grade phosphoric acid purification apparatus according to claim 3, characterized in that: The crystallization ring (25) is composed of several rotating plates (251), the rotating plates (251) are rotatably connected to the support frame (24), and the support frame (24) is provided with a power component, which is connected to the rotating plates (251).

5. The electronic-grade phosphoric acid purification apparatus according to claim 1, characterized in that: The power unit (23) includes a support unit (26) and a drive unit (27). The support unit (26) consists of a support block (261) and a pressure member (262). The support block (261) is slidably connected to the housing. The inner wall of the support block (261) is rotatably connected to the crystallization disk (21). The pressure member (262) is connected to the outer side of the support block (261) through a support plate. An elastic element is provided on the pressure member (262).

6. The electronic-grade phosphoric acid purification apparatus according to claim 5, characterized in that: The drive assembly (27) consists of a gear ring (271), a helical gear (272) and a drive component. The gear ring (271) is located at the bottom of the crystallization disk (21). The drive component is slidably connected to the housing through a support plate. The drive component is connected to the helical gear (272). The helical gear (272) meshes with the gear ring (271) for transmission.

7. The electronic-grade phosphoric acid purification apparatus according to claim 4, characterized in that: The crystallization disc (21) is provided with a discharge pipe (211) in the middle, and the separation cover (212) is provided in the middle of the plurality of crystallization rings (25). The separation cover (212) is located above the discharge pipe (211) and the separation cover (212) connects the discharge pipe (211) and the space between the crystallization disc (21) and the liquid distribution disc (11).

8. The electronic-grade phosphoric acid purification apparatus according to claim 4, characterized in that: The crystallization disk (21) is provided with a number of guide rods (213) on the side near the rotating plate (251). The guide rods (213) extend into the rotating plate (251). A sleeve is also provided inside the guide rods (213). The sleeve is connected to the jacket layer (10). The guide rods (213) are slidably and sealed to the rotating plate (251). The crystallization disk (21) is rotatably and sealed to the shell.

9. A purification method applied to an electronic-grade phosphoric acid purification apparatus as described in any one of claims 1-8, characterized in that: The purification method includes the following specific steps: S1. A fixed amount of raw material is transported from the liquid distribution plate (11) to the crystallization plate (21); S2, Crystallization mechanism (2) stirs the raw material, and the raw material gradually precipitates crystals; S3. After the raw material crystallizes, ultrapure water is transported to the crystallization plate (21) through the liquid distribution plate (11); S4. Ultrapure water washes the precipitated crystals from the outside to the inside on the surface of the crystallization plate (21) to remove impurities and residual original solution from the crystal surface. S5. After washing, the crystallization mechanism (2) performs crystal melting treatment on the crystals; S6. The crystal melting is complete and it is output from the discharge pipe (211).

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