Double-manipulator transplanting steering structure, working method and production line thereof

Abstract

The invention belongs to the technical field of conveying, and particularly relates to a material carrying device, in particular to a double-manipulator transplanting steering structure, a working method and a production line thereof. The double-manipulator transplanting steering structure comprises a linear module and two grabbing steering mechanisms, each grabbing steering mechanism comprises a Z-axis linear module, a rotary driving assembly and at least one grabbing assembly, and each rotary driving assembly is fixed to the side wall of the movable end of the corresponding Z-axis linear module; the grabbing assembly is fixed to the bottom wall of the output end of the rotary driving assembly. The linear module drives the two grabbing steering mechanisms to move horizontally. The Z-axis linear module drives the rotary driving assembly and the grabbing assembly on the corresponding side to vertically ascend and descend. The rotary driving assemblies drive the grabbing assemblies on the corresponding sides to rotate around the vertical shafts, so that the corresponding grabbing assemblies act independently, and the feeding / discharging action can be executed synchronously.

Description

Technical Field

[0001] This invention belongs to the field of conveying technology, specifically relating to material handling devices, and more particularly to a dual-manipulator transfer and steering structure, its working method, and its production line. Background Technology

[0002] In the coating process of perovskite solar cells, substrate loading, unloading, and orientation adjustment are crucial for the efficient operation of coating equipment. Current technologies commonly employ a transfer arm structure for substrate transfer, but this structure has revealed several technical shortcomings in practical applications: On the one hand, when the coating platform completes the substrate unloading action and the uncoated substrate loading action, the two actions of the conveyor arm structure cannot be performed synchronously and can only be performed sequentially, which greatly reduces the substrate conveying efficiency and restricts the production cycle of the entire coating production line. On the other hand, the transfer arm is limited by its own spatial structure and cannot be equipped with an additional rotating mechanism, making it impossible to adjust the direction during substrate transfer. This means that the structure is only suitable for a single application scenario where the substrate transfer direction is fixed. It is difficult to adapt to the different requirements of substrate placement direction in different processes of perovskite battery production, resulting in extremely limited application.

[0003] Therefore, how to solve the problems of low substrate loading and unloading efficiency and lack of steering function is a technical problem that urgently needs to be solved in this field.

[0004] It should be noted that the information disclosed in this background section is only for understanding the background technology of this application concept, and therefore, the above description is not considered to constitute information related to the technology. Summary of the Invention

[0005] This disclosure provides at least one dual-manipulator transfer and steering structure, its working method, and its production line.

[0006] In a first aspect, embodiments of this disclosure provide a dual-manipulator transfer and steering structure, comprising: A linear module and two gripping and steering mechanisms, wherein the gripping and steering mechanisms are slidably mounted on the linear module, including: The assembly comprises a Z-axis linear module, a rotary drive assembly, and at least one gripping assembly, wherein the Z-axis linear module is connected to the linear module via a connecting plate assembly; The rotary drive assembly is fixed to the movable end sidewall of the Z-axis linear module; The gripping component is fixed to the bottom wall of the output end of the rotary drive component; The linear module drives two sets of gripping and steering mechanisms to move horizontally. The Z-axis linear module drives the vertical lifting and lowering motion of the corresponding side rotary drive component and gripping component; The rotary drive component drives the corresponding gripping component to rotate around the vertical axis, so that the corresponding gripping component can move independently and perform loading / unloading actions synchronously.

[0007] In one optional embodiment, the Z-axis linear module includes: a first mounting plate and a second mounting plate, wherein the first mounting plate is fixed to the connecting plate assembly; The second mounting plate is fixed to the movable end sidewall of the Z-axis linear module; The rotary drive assembly includes a harmonic reducer, which is fixed to the side wall of the second mounting plate, and the output end of the harmonic reducer is connected to the rotary connecting plate of the gripping assembly.

[0008] In one optional embodiment, the gripping assembly includes: a gripper connecting plate, a gripper cylinder, and a vacuum gripper. The rotating connecting plate is fixed to the gripper connecting plate, the gripper cylinder is mounted on the gripper connecting plate, and the actuating end of the gripper cylinder is connected to the vacuum gripper, which is used to grip the substrate.

[0009] In one optional implementation, the number of gripping components can be increased or decreased according to the coating process requirements, and the vacuum gripper can grip two wafers at a time, which is suitable for the equipment working conditions of coating two silicon wafers with a dual gantry.

[0010] In one alternative implementation, the harmonic reducer can drive the gripping assembly to rotate 90°, thereby enabling the substrate to switch between the X-axis transmission direction and the Y-axis coating placement direction.

[0011] Secondly, this disclosure also provides a battery coating production line with a dual-manipulator transfer and steering structure, comprising: The feeding unit, coating unit, and annealing unit are connected in sequence, as well as the dual robotic arm transfer and turning structure. The dual robotic arm transfer and turning structure is mounted above the feeding unit, coating unit, and annealing unit to realize the transfer, turning, feeding, and unloading of the substrate between the units. The feeding unit is a dual-track feeding structure, which outputs two uncoated substrates at a time. The coating unit is a dual coating platform structure, which is adapted to the substrate coating requirements of dual-track feeding. The annealing unit includes two configurations: a dual-track annealing device and an eight-track annealing device. The dual-track annealing device is directly compatible with the dual-track feeding and dual-coating platform, while the eight-track annealing device is connected to the coating unit through a feeding mechanism that can move along the Y-axis.

[0012] In one optional implementation, the strokes of the two sets of gripping and steering mechanisms of the dual robotic arm transfer and steering structure are coordinated with each other. The stroke of one set of gripping components is the AB segment from the feeding unit to the coating unit, and the stroke of the other set of gripping components is the BC segment from the coating unit to the annealing unit. The two sets of strokes do not interfere with each other and can be executed synchronously.

[0013] Thirdly, this disclosure also provides a method for operating a dual-manipulator transfer and steering structure, comprising the following steps: S1. Material preparation: The linear module drives two sets of gripping and steering mechanisms to move to the preset position. The Z-axis linear module adjusts the vertical position of the gripping mechanism according to the substrate placement height. S2. Synchronous loading and unloading: The vacuum gripper of the left gripping and steering mechanism uses the opening and closing of the gripping cylinder to grip the uncoated substrate, and then transfers it to the coating platform of the coating machine through the cooperation of the linear module and the Z-axis linear module to complete the loading action; at the same time, the vacuum gripper of the right gripping and steering mechanism grips the coated substrate on the coating platform of the coating machine to complete the unloading action. S3. Substrate rotation: The harmonic reducer drives the gripping mechanism to rotate 90°, adjusting the substrate from the X-axis transmission direction to the Y-axis coating placement direction, or from the Y-axis coating placement direction to the X-axis transmission direction, to adapt to the directional requirements of the coating and annealing processes. S4. Material unloading and transfer: After the coated substrate has been turned, it is transferred to the feeding end of the annealing equipment through the cooperation of the linear module and the Z-axis linear module. After the left gripping and turning mechanism leaves the coating platform, the left gripping and turning mechanism immediately performs the next round of uncoated substrate loading action, forming a continuous loading and unloading cycle.

[0014] In one optional implementation, step S4, the unloading and transfer of the coated substrate includes: directly transferring the substrate to the feed end of the dual-rail annealing equipment to achieve dual-rail unloading annealing.

[0015] In one optional implementation, step S4, the unloading and transfer of the coated substrate includes: first transferring the substrate to an unloading mechanism that can move along the Y-axis, and then having the unloading mechanism dock with the feed end of the eight-rail annealing equipment to achieve eight-rail unloading annealing.

[0016] The beneficial effects of this invention are as follows: This invention provides a dual-manipulator transfer and steering structure, working method, and production line. By setting two sets of independently operating gripping and steering mechanisms, the loading and unloading actions of the coating platform can be completed simultaneously, breaking the limitation of sequential execution of loading and unloading actions in the prior art and effectively reducing the time loss of substrate transfer. At the same time, the gripping mechanism can grip two substrates at a time, adapting to the equipment conditions of dual-gantry coating of dual silicon wafers, and the loading and unloading form a continuous cycle. After the right gripping mechanism leaves the coating platform, the left gripping mechanism immediately performs the next round of loading, further improving the production cycle of the entire production line and meeting the efficiency requirements of mass production of batteries. By setting a harmonic reducer as a rotary drive component on the gripping mechanism, the gripping mechanism can be precisely driven to rotate 90°, realizing flexible switching between the X-axis transmission direction and the Y-axis coating placement direction of the substrate. This solves the technical defect of existing transfer arms that cannot add a rotating mechanism due to space limitations. This structure and supporting production line can adapt to the different requirements of substrate placement direction in different processes, greatly expanding the application scenarios of coating equipment and improving the versatility of the equipment.

[0017] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention are realized and obtained through the structures particularly pointed out in the description and the drawings.

[0018] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the specific embodiments or related technologies of the present invention, the drawings used in the description of the specific embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0020] Figure 1 A perspective view of the dual-manipulator transfer and steering structure provided in the embodiments of this disclosure; Figure 2 This is a front view of the dual-manipulator transfer and steering structure provided in an embodiment of this disclosure; Figure 3 A front view of the gripping and steering mechanism provided in an embodiment of this disclosure; Figure 4 A schematic diagram of the dual-track feeding structure of the battery coating production line provided in this embodiment of the disclosure; Figure 5This is a schematic diagram of an eight-track feeding structure for a battery coating production line provided in an embodiment of this disclosure.

[0021] In the picture: 1. Linear module; 10. Connecting plate assembly; 11. Connecting plate A; 12. Connecting plate B; 13. Connecting plate C 2. Gripping and steering mechanism; 21. Z-axis linear module; 211. First mounting plate; 212. Second mounting plate; 22. Rotary drive assembly; 23. Gripping assembly; 230. Rotary connecting plate; 231. Gripper connecting plate; 232. Gripping finger cylinder; 233. Vacuum gripper; 3. Feeding unit; 4. Coating unit; 5. Annealing unit. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.

[0024] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify an entire column of elements when following a column of elements. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0025] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise expressly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.

[0026] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.

[0027] The defects in the above solutions and the reasons for their occurrence are the results of the inventors' practice and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as the inventors' contributions to this disclosure.

[0028] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0029] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0030] like Figures 1 to 3 As shown, at least one embodiment provides a dual-manipulator transfer and steering structure, including: a linear module 1 and two sets of gripping and steering mechanisms 2 slidably disposed on the linear module 1. The two sets of gripping and steering mechanisms 2 have identical structures and operate independently, and can synchronously perform loading and unloading actions without interfering with each other. The gripping and steering mechanism 2 includes a Z-axis linear module 21, a rotary drive assembly 22, and a gripping assembly 23 connected sequentially along the vertical direction. The Z-axis linear module 21 is stably connected to the linear module 1 through a connecting plate assembly 10. The Z-axis linear module 21 can drive the rotary drive assembly 22 to perform vertical lifting and lowering movements. The rotary drive assembly 22 is fixed to the movable end side wall of the Z-axis linear module 21, and the gripping assembly 23 is fixed to the output end bottom wall of the rotary drive assembly 22. The components cooperate to realize the horizontal transfer, vertical lifting and lowering, and rotational direction change of the gripping assembly 23 around the vertical axis.

[0031] like Figure 2As shown, the connecting plate assembly 10 is assembled with the Z-axis linear module 21. The connecting plate assembly 10 has a hierarchical structure, including connecting plate A11, connecting plate B12, and connecting plate C13 (corresponding to the first mounting plate 211 of the Z-axis linear module). The two sliders of the linear module 1 are welded and fixed to connecting plate A11 and connecting plate B12 respectively. The two first mounting plates 211 are detachably fixed to connecting plate A11 or connecting plate B12 by high-strength bolt groups. This connection method takes into account both assembly stability and convenience of later maintenance. The length of the connecting plate can be adjusted according to the actual equipment working conditions to adapt to different installation spaces.

[0032] like Figure 3 The Z-axis linear module 21 also includes a second mounting plate 212, which is integrally formed on the movable end sidewall of the Z-axis linear module 21 to provide a mounting reference surface for the rotary drive assembly 22. The mounting surface of the second mounting plate 212 is precision milled with a flatness error of ≤0.02mm to ensure the coaxiality of the rotary drive assembly 22 and avoid jamming or wobble during rotation.

[0033] like Figure 3 The rotary drive assembly 22 is a harmonic reducer, which is fixed to the side wall bolts of the second mounting plate 212 via a flange. The output end of the harmonic reducer is vertically downward and connected to the rotary connecting plate 230 of the gripping assembly 23. The connection is axially limited by an elastic retaining ring to prevent axial movement during rotation. In this embodiment, the reduction ratio of the harmonic reducer is 1:80, and the output torque is ≥50 N·m. It can accurately drive the gripping assembly 23 to rotate 90° around the vertical axis with a rotation positioning accuracy of ≤±0.1°, meeting the requirement for precise switching between the substrate in the X-axis transmission direction and the Y-axis coating placement direction. The harmonic reducer is equipped with a servo motor drive. The servo motor and the drive motors of the linear module 1 and the Z-axis linear module are all connected to the same PLC control system to realize the linkage control of rotation, transfer, and lifting actions.

[0034] Please refer to the appendix again. Figure 3The gripping assembly 23 includes a gripper connecting plate 231, a gripper cylinder 232, and a vacuum gripper 233. The rotating connecting plate 230 is fixed to the gripper connecting plate 231 by bolts. Two sets of gripper cylinders 232 are symmetrically installed on the lower surface of the gripper connecting plate 231. Each set of gripper cylinders 232 has a vacuum gripper 233 connected to each of its two actuating ends. That is, a single gripping assembly 23 is equipped with 4 vacuum grippers 233, which can realize the function of gripping 2 substrates at a time, perfectly adapting to the equipment working conditions of dual-gantry coating of dual silicon wafers. The vacuum gripper 233 adopts a silicone suction cup structure, which ensures both the adsorption and gripping force on the substrate and avoids scratching the substrate surface. The vacuum gripper 233 is connected to a negative pressure generator to ensure that the substrate does not fall off during the gripping process. The finger-gripping cylinder 232 is a pneumatic finger cylinder, which can adjust the opening and closing distance according to the size of the substrate, and is suitable for battery substrates of different specifications such as 156×156mm, 182×182mm, 210×210mm, and 210*105mm. In this embodiment, the number of gripping components 23 can be increased or decreased according to the coating process requirements. For example, for a single gantry coating equipment, the number of gripping components 23 can be reduced to one set to achieve gripping one substrate at a time; for coating large-size substrates, the number of vacuum grippers 233 can be increased to improve gripping stability, and the structure has strong adaptability.

[0035] Working principle of the dual-manipulator transfer and steering structure: The linear module 1 adopts a synchronous belt drive type linear module with an adjustable moving speed of 0-500mm / s. It drives two sets of gripping and steering mechanisms 2 to perform horizontal transfer movements, realizing the horizontal transport of the substrate between the feeding unit 3, coating unit 4, and annealing unit 5. The Z-axis linear module adopts a ball screw type linear module with an adjustable moving speed of 0-200mm / s. It drives the corresponding side rotary drive component 22 and gripping component 23 to perform vertical lifting movements, completing the gripping and placement of the substrate. The harmonic reducer of the rotary drive component 22 drives the corresponding side gripping component 23 to rotate around the vertical axis, realizing the adjustment of the substrate orientation.

[0036] The two sets of gripping and turning mechanisms 2 operate independently under the control of the PLC control system. When the left gripping and turning mechanism 2 performs the loading action, the right gripping and turning mechanism 2 can simultaneously perform the unloading action, breaking the limitation of sequential execution of loading and unloading actions in the existing technology and greatly reducing the time loss of substrate transmission.

[0037] like Figure 4 , Figure 5As shown, at least one embodiment provides a battery coating production line with a dual-manipulator transfer and steering structure, including a feeding unit 3, a coating unit 4, an annealing unit 5 connected in sequence, and the aforementioned dual-manipulator transfer and steering structure. The dual-manipulator transfer and steering structure is mounted on a bracket above the feeding unit 3, the coating unit 4, and the annealing unit 5, making full use of vertical space without occupying additional horizontal production space, effectively improving the space utilization rate of the production line, and facilitating the technical transformation and upgrading of existing coating production lines.

[0038] The feeding unit 3 adopts a dual-track feeding structure, including two parallel feeding conveyor belts. Each conveyor belt can continuously transport substrates and output two uncoated substrates at a time. This is compatible with the function of the gripping component 23 to grip two substrates at a time, ensuring that the feeding efficiency matches the gripping efficiency. The coating unit 4 adopts a dual coating platform structure, including two independent coating platforms. Each coating platform is equipped with a set of coating nozzles, which can coat two substrates at the same time. It is compatible with the structure of the dual-track feeding and dual-grip component 23 to realize the dual-station synchronous operation of the coating process. Annealing unit 5 offers two configurations: a dual-track annealing device and an eight-track annealing device. The dual-track annealing device is the basic configuration, while the eight-track annealing device is the mass production configuration. The eight-track annealing device is connected to coating unit 4 through a feeding mechanism that can move along the Y-axis. The two configurations can be flexibly switched according to the customer's production needs, and the production line has strong scalability.

[0039] The dual-manipulator transfer and steering structure is compatible with the production line. The strokes of the two sets of gripping and steering mechanisms 2 in the dual-manipulator transfer and steering structure are coordinated with each other, without interference and executed synchronously. like Figure 4 The left gripping and steering mechanism 2's gripping component 23 has a stroke of segment AB from the feeding unit 3 to the coating unit 4, and is only responsible for the substrate feeding action. The stroke distance is set according to the installation distance between the feeding unit 3 and the coating unit 4. In this embodiment, the AB segment distance is 900mm. The right gripping and steering mechanism 2's gripping component 23 has a stroke of segment BC from the coating unit 4 to the annealing unit 5, and is only responsible for the substrate unloading and transfer action. In this embodiment, the BC segment distance is 900mm. The strokes of the two gripping components 23 are precisely positioned by the PLC control system, eliminating the risk of collision during movement. Furthermore, the actions of segments AB and BC are performed synchronously, ensuring continuous operation of the production line.

[0040] At least one embodiment provides a working method for a dual-manipulator transfer and steering structure. This working method is based on the aforementioned dual-manipulator transfer and steering structure and is applicable to the coating, feeding, unloading, and transfer and steering of perovskite solar cell substrates before annealing. It includes two implementation methods: dual-track unloading annealing and eight-track unloading annealing. The core steps of the two methods are the same, with differences only in the subsequent unloading and transfer stage. The specific general steps are as follows: S1 Material preparation involves pre-setting the motion parameters of each mechanism through the PLC control system, including the transfer position of linear module 1, the lifting height of Z-axis linear module 21, the rotation angle of the harmonic reducer, the opening and closing stroke of the gripper cylinder 232, and the negative pressure value of the vacuum gripper 233. Linear module 1 drives two sets of gripping and steering mechanisms 2 to move synchronously to the preset gripping position of the material loading unit 3. Z-axis linear module 21 precisely adjusts the vertical position of gripping component 23 according to the placement height of the substrate in the material loading unit 3, so that the vacuum gripper 233 fits against the upper surface of the substrate, completing the material preparation.

[0041] S2 synchronous loading and unloading: the gripping cylinder 232 of the left gripping and steering mechanism 2 is activated, driving the vacuum gripper 233 to open and adsorb two uncoated substrates. After the negative pressure generator detects that the vacuum value has reached the preset value, the Z-axis linear module 21 drives the gripping component 23 to rise vertically. The linear module 1 drives the left gripping and steering mechanism 2 to move along the X-axis to above the coating platform of the coating unit 4. The Z-axis linear module 21 drives the gripping component 23 to descend vertically. The vacuum gripper 233 releases the negative pressure and accurately places the uncoated substrates at the preset position on the coating platform, completing the loading action. While the left gripping and steering mechanism 2 performs the feeding action, the right gripping and steering mechanism 2 operates synchronously. Its vacuum gripper 233 adsorbs the two substrates that have been coated in the coating unit 4 and completes the unloading action. The actions of the two gripping and steering mechanisms 2 are carried out synchronously without time overlap and loss, which greatly improves the conveying efficiency.

[0042] S3 substrate rotation: Since the substrate transport direction in loading unit 3 is the X-axis, the substrate coating placement direction in coating unit 4 is the Y-axis, and the substrate annealing placement direction in annealing unit 5 is the X-axis, the substrate rotation must be completed by the rotation drive assembly 22 during both substrate loading and unloading processes. During feeding, the harmonic reducer drives the left gripping component 23 to rotate 90°, adjusting the substrate from the X-axis transmission direction to the Y-axis coating placement direction, ensuring precise alignment between the substrate and the coating station of the coating platform; During feeding, the harmonic reducer drives the right gripping component 23 to rotate 90°, adjusting the substrate from the Y-axis coating placement direction to the X-axis transmission direction to meet the feeding requirements of the annealing unit 5.

[0043] The substrate turning action is coordinated with the lifting action of the Z-axis linear module 21 and the transplanting action of the linear module 1, without requiring additional action time, thus further improving work efficiency.

[0044] S4 material feeding and transfer with continuous cycle: After the coated substrate has been turned, it is transferred to the feeding end of the annealing unit 5 by the cooperation of linear module 1 and Z-axis linear module 21. At the moment when the right gripping and turning mechanism 2 grabs the coated substrate and leaves the coating platform, the left gripping and turning mechanism 2 immediately starts to grab the next round of uncoated substrates and enters the next feeding and unloading cycle, realizing continuous substrate transfer operation with no coating platform idle time.

[0045] This invention provides two material handling and transfer implementation methods to meet different mass production needs: like Figure 4 Implementation method 1: Dual-track feeding annealing, which is suitable for small and medium batch perovskite battery production. In step S4, the right gripping and turning mechanism 2 directly transfers the coated substrate to the feeding end of the dual-track annealing equipment. The dual-track annealing equipment is directly compatible with the dual-track feeding and dual-coating platform. The substrate is conveyed into the annealing furnace through the dual tracks to complete the annealing. The whole process has no intermediate transfer links, the structure is simple and the operation is smooth.

[0046] like Figure 5 Implementation Method 2: Eight-track feeding annealing, suitable for mass production of perovskite solar cells. In step S4, the right-side gripping and steering mechanism 2 first transfers the coated substrate to the feeding mechanism, which can move along the Y-axis. This feeding mechanism is a linear modular conveying structure that can reciprocate along the Y-axis, transferring the substrate to the feeding end of the eight-track annealing equipment. The feeding efficiency of the eight-track annealing equipment is four times that of the dual-track annealing equipment, which can significantly improve the processing capacity of the annealing process and meet the needs of mass production. In the description of the embodiments of this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components. For those skilled in the art, the specific meaning of the above terms in this invention can be understood according to the specific circumstances.

[0047] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as a second element, component, region, layer, or segment.

[0048] Based on the above-described preferred embodiments of the present invention, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the inventive concept. The technical scope of this invention is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A dual-manipulator transfer and steering structure, characterized in that, include: A linear module (1) and at least two gripping and steering mechanisms (2), wherein the gripping and steering mechanisms (2) are slidably disposed on the linear module (1), and include: The assembly includes a Z-axis linear module (21), a rotary drive assembly (22), and at least one gripping assembly (23), wherein the Z-axis linear module (21) is connected to the linear module (1) via a connecting plate assembly (10); The rotary drive assembly (22) is fixed to the movable end sidewall of the Z-axis linear module (21); The gripping component (23) is fixed to the bottom wall of the output end of the rotary drive component (22); The linear module (1) drives two sets of gripping and steering mechanisms (2) to move horizontally; The Z-axis linear module (21) drives the corresponding side rotary drive component (22) and gripping component (23) to move vertically up and down; The rotary drive assembly (22) drives the corresponding gripping assembly (23) to rotate around the vertical axis so that the corresponding gripping assembly (23) can move independently and perform loading / unloading actions synchronously.

2. The dual-manipulator transfer and steering structure as described in claim 1, characterized in that, The Z-axis linear module (21) includes: a first mounting plate (211) and a second mounting plate (212), wherein the first mounting plate (211) is fixed to the connecting plate assembly (10); The second mounting plate (212) is fixed to the movable end sidewall of the Z-axis linear module (21); The rotary drive assembly (22) includes a harmonic reducer, which is fixed to the side wall of the second mounting plate (212), and the output end of the harmonic reducer is connected to the rotary connecting plate (230) of the gripping assembly (23).

3. The dual-manipulator transfer and steering structure as described in claim 2, characterized in that, The gripping component (23) includes: a gripper connecting plate (231), a gripper cylinder (232), and a vacuum gripper (233). The rotating connecting plate (230) is fixed to the gripper connecting plate (231). The gripper cylinder (232) is installed on the gripper connecting plate (231). The actuating end of the gripper cylinder (232) is connected to the vacuum gripper (233). The vacuum gripper (233) is used to grip the substrate.

4. The dual-manipulator transfer and steering structure as described in claim 3, characterized in that, The number of gripping components (23) can be increased or decreased according to the coating process requirements. The vacuum gripper (233) can grip 2 wafers at a time, which is suitable for the equipment working conditions of coating dual silicon wafers with a dual gantry.

5. The dual-manipulator transfer and steering structure as described in claim 2, characterized in that, The harmonic reducer can drive the gripping component (23) to rotate 90°, thereby enabling the substrate to switch between the X-axis transmission direction and the Y-axis coating placement direction.

6. A battery coating production line employing the dual-manipulator transfer and steering structure described in any one of claims 1-5, characterized in that, include: The feeding unit (3), coating unit (4) and annealing unit (5) are connected in sequence, as well as the dual robotic arm transfer and turning structure. The dual robotic arm transfer and turning structure is mounted above the feeding unit (3), coating unit (4) and annealing unit (5) to realize the transfer, turning, feeding and unloading of the substrate between the units. The feeding unit (3) is a dual-track feeding structure, which outputs two uncoated substrates at a time. The coating unit (4) is a dual coating platform structure, which is adapted to the substrate coating requirements of dual-track feeding. The annealing unit (5) includes two configurations: a dual-track annealing device and an eight-track annealing device. The dual-track annealing device is directly compatible with the dual-track feeding and dual-coating platform. The eight-track annealing equipment is connected to the coating unit (4) through a feeding mechanism that can move along the Y-axis.

7. The battery coating production line with a dual-manipulator transfer and steering structure as described in claim 6, characterized in that, The strokes of the two sets of gripping and steering mechanisms (2) of the dual robotic arm transfer and steering structure are coordinated with each other. The stroke of one set of gripping components (23) is the AB segment from the feeding unit (3) to the coating unit (4), and the stroke of the other set of gripping components (23) is the BC segment from the coating unit (4) to the annealing unit (5). The two sets of strokes do not interfere with each other and can be executed synchronously.

8. A working method based on the dual-manipulator transfer and steering structure according to any one of claims 1-5, characterized in that, Includes the following steps: S1. Material preparation: The linear module (1) drives the two sets of gripping and steering mechanisms (2) to move to the preset position. The Z-axis linear module (21) adjusts the vertical position of the gripping mechanism according to the substrate placement height. S2. Synchronous loading and unloading: The vacuum gripper (233) of the left gripping and turning mechanism (2) opens and closes through the gripping cylinder (232) to grip the uncoated substrate, and then transfers it to the coating platform of the coating machine through the cooperation of the linear module (1) and the Z-axis linear module (21) to complete the loading action; at the same time, the vacuum gripper (233) of the right gripping and turning mechanism (2) completes the gripping of the coated substrate on the coating platform of the coating machine to complete the unloading action. S3. Substrate rotation: The harmonic reducer drives the gripping mechanism to rotate 90°, adjusting the substrate from the X-axis transmission direction to the Y-axis coating placement direction, or from the Y-axis coating placement direction to the X-axis transmission direction, to adapt to the directional requirements of the coating and annealing processes. S4. Material transfer: After the coated substrate has been turned, it is transferred to the feeding end of the annealing equipment through the cooperation of the linear module (1) and the Z-axis linear module (21); after the left gripping and turning mechanism (2) leaves the coating platform, the left gripping and turning mechanism (2) immediately performs the next round of uncoated substrate loading action, forming a continuous loading and unloading cycle.

9. The working method of the dual-manipulator transfer and steering structure as described in claim 8, characterized in that, In step S4, the unloading and transfer of the coated substrate includes: directly transferring the substrate to the feed end of the dual-rail annealing equipment to achieve dual-rail unloading annealing.

10. The working method of the dual-manipulator transfer and steering structure as described in claim 8, characterized in that, In step S4, the unloading and transfer of the coated substrate includes: first, transferring the substrate to an unloading mechanism that can move along the Y-axis, and then having the unloading mechanism connect to the feed end of the eight-rail annealing equipment to achieve eight-rail unloading annealing.

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