Gas-liquid separator

Abstract

The invention discloses a gas-liquid separator which comprises a degassing box, a rotary degassing tower and a gravity degassing tower, the degassing tank is provided with a liquid inlet and a liquid outlet, the liquid inlet is communicated with a connector of ozone wastewater, the liquid outlet is communicated with a discharge port, an aeration pipe is arranged on one side of the degassing tank and is communicated with nitrogen or compressed air, and the upper end of the degassing tank is communicated with a rotary degassing tower; the rotary degassing tower comprises a rotary pipe, a rotational flow generator and a reversing pipe; the rotational flow generator is used for enabling gas to rotate and flow, a reversing pipe is arranged on one side of the rotating pipe, and the reversing pipe is communicated with the rotating pipe and the gravity degassing tower; the middle section of the gravity degassing tower is communicated with the reversing pipe, the lower end of the gravity degassing tower is communicated with the degassing box, and an exhaust port is formed in the upper end of the gravity degassing tower. According to the invention, ozone gas can be rapidly catalyzed by a catalyst to react into oxygen under the condition of not using heating, and then the oxygen is harmlessly discharged into the atmospheric environment.

Description

Technical Field

[0001] This invention relates to the field of separator technology, and in particular to a gas-liquid separator. Background Technology

[0002] In semiconductor wafer manufacturing, ozone water is widely used in wafer cleaning processes. After the cleaning process, the ozone water still retains strong oxidizing properties and requires decomposition treatment before discharge. Existing cleaning equipment uses ultraviolet (UV) photochemical decomposition to treat ozone water. However, when directly treating the aqueous phase with UV irradiation, the UV lamps have high power and limited lifespan, resulting in high maintenance and electricity costs, making it economically unfeasible. Furthermore, it is technically difficult to implement and cost-control when dealing with large flow rates and high concentrations, limiting its application to treating specific small-flow, low-concentration wastewater at designated locations. Summary of the Invention

[0003] According to an embodiment of the present invention, a gas-liquid separator is provided, comprising: a degassing box, a rotary degassing tower, and a gravity degassing tower;

[0004] The degassing box has a liquid inlet and a liquid outlet. The liquid inlet is connected to the interface of ozone water wastewater, and the liquid outlet is connected to the discharge outlet. An aeration pipe is provided on one side of the degassing box, and the aeration pipe is connected to nitrogen or compressed air. The upper end of the degassing box is connected to a rotary degassing tower.

[0005] The rotary degassing tower includes: a rotating tube, a cyclone generator, and a reversing tube;

[0006] The cyclone generator is located at the connection between the rotating tube and the degassing box. The cyclone generator is used to make the gas rotate and flow. A reversing pipe is provided on one side of the rotating tube, and the reversing pipe connects the rotating tube and the gravity degassing tower.

[0007] The middle section of the gravity degassing tower is connected to the reversing pipe, the lower end of the gravity degassing tower is connected to the degassing box, and the upper end of the gravity degassing tower is provided with an exhaust port.

[0008] Furthermore, the degassing box is provided with a first baffle and a second baffle, the heights of the first baffle and the second baffle are staggered, the second baffle is located between the two first baffles, and a baffle channel is provided below the second baffle.

[0009] Furthermore, the degassing box is provided with a plurality of aeration pipes, which are arranged between the first baffle and the second baffle.

[0010] Furthermore, a liquid level pipe is provided on one side of the degassing box, the liquid level pipe is located at the liquid outlet, and the two ends of the liquid level pipe are respectively connected to the lower end and the upper end of the degassing box.

[0011] Furthermore, the liquid level tube is equipped with several liquid level sensors, which are set to correspond to low liquid level, lower liquid level, upper liquid level and high liquid level.

[0012] Furthermore, the swirling generator includes: a swirling tube and a guide plate;

[0013] The cyclone tube is fixed on and connected to the degassing box. Several guide holes are provided on the side wall of the cyclone tube. The guide holes are equidistant from the axial circumference of the cyclone tube. One end of the guide plate is connected to the side plate of the cyclone tube through a connecting plate. The guide plate is arranged tangentially to the cyclone tube.

[0014] Furthermore, a condenser plate is provided at the top of the rotating tube, which is used to cool the separated liquid.

[0015] Furthermore, the gravity degassing tower includes: a gravity pipe and a guide pipe;

[0016] The middle section of the gravity tube is connected to the reversing tube. The guide tube is located in the gravity tube and its inlet end is connected to the end of the guide tube. The outlet end of the guide tube is set downward. There is a gap between the guide tube and the gravity tube.

[0017] Furthermore, a drain pump is provided at the liquid outlet of the degassing box.

[0018] According to an embodiment of the present invention, an ozone water wastewater is introduced into a degassing tank through an inlet. Nitrogen or compressed air is introduced into the ozone water wastewater through an aeration pipe to strip the ozone gas from the wastewater, significantly reducing the partial pressure of the ozone gas and thus lowering the concentration of the ozone water to below 0.5 ppm. The degassed ozone water with a concentration less than 0.5 ppm is discharged through an outlet. A cyclone generator causes the gas-liquid mixture generated during the stripping process to undergo centrifugal motion for the first gas-liquid separation. The separated gas is then introduced into a gravity degassing tower through a reversing pipe for a second gas-liquid separation. The resulting liquid is discharged into the degassing tank. This process allows the ozone gas to be rapidly catalyzed into oxygen without heating and then harmlessly released into the atmosphere.

[0019] It should be understood that both the foregoing general description and the following detailed description are exemplary and intended to provide further illustration of the claimed technology. Attached Figure Description

[0020] Figure 1 This is a structural diagram of a gas-liquid separator according to an embodiment of the present invention;

[0021] Figure 2 This is a structural diagram of the degassing box of a gas-liquid separator according to an embodiment of the present invention;

[0022] Figure 3 This is a cross-sectional view of the degassing chamber of a gas-liquid separator according to an embodiment of the present invention;

[0023] Figure 4 This is a structural diagram of a rotary degassing tower for a gas-liquid separator according to an embodiment of the present invention;

[0024] Figure 5 This is a structural diagram of a cyclone generator for a gas-liquid separator according to an embodiment of the present invention;

[0025] Figure 6 This is a structural diagram of a gravity degassing tower for a gas-liquid separator according to an embodiment of the present invention.

[0026] The attached diagram is labeled as follows: 1 is the degassing box, 11 is the first baffle plate, 12 is the second baffle plate, 13 is the liquid level pipe, 14 is the liquid level sensor, 15 is the drain pump, 2 is the aeration pipe, 3 is the rotating degassing tower, 31 is the rotating pipe, 32 is the cyclone generator, 321 is the cyclone pipe, 322 is the guide plate, 33 is the reversing pipe, 34 is the condenser plate, 4 is the gravity degassing tower, 41 is the gravity pipe, and 42 is the guide pipe. Detailed Implementation

[0027] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, further illustrating the present invention.

[0028] First, combine Figures 1-6 A gas-liquid separator according to an embodiment of the present invention is described for decomposing and treating ozone water.

[0029] like Figures 1-6 As shown, a gas-liquid separator according to an embodiment of the present invention includes: a degassing box 1, a rotary degassing tower 3, and a gravity degassing tower 4;

[0030] The degassing box 1 has an inlet and an outlet. The inlet is connected to the interface of ozone water wastewater, and the outlet is connected to the discharge port. An aeration pipe 2 is provided on one side of the degassing box 1. The aeration pipe 2 is connected to nitrogen or compressed air. The upper end of the degassing box 1 is connected to a rotary degassing tower 3.

[0031] The rotary degassing tower 3 includes: a rotary tube 31, a cyclone generator 32, and a reversing tube 33;

[0032] The cyclone generator 32 is located at the connection between the rotating tube 31 and the degassing box 1. The cyclone generator 32 is used to make the gas rotate and flow. A reversing pipe 33 is provided on one side of the rotating tube 31. The reversing pipe 33 connects the rotating tube 31 and the gravity degassing tower 4.

[0033] The middle section of the gravity degassing tower 4 is connected to the reversing pipe 33, the lower end of the gravity degassing tower 4 is connected to the degassing box 1, and the upper end of the gravity degassing tower 4 is provided with an exhaust port.

[0034] This application introduces ozone wastewater into the degassing tank 1 through the inlet, and introduces nitrogen or compressed air into the ozone wastewater through the aeration pipe 2 to strip the ozone gas from the ozone water, significantly reducing the partial pressure of the ozone gas and thus lowering the concentration of the ozone water to below 0.5 ppm. The degassed ozone water with a concentration less than 0.5 ppm is discharged through the outlet. The gas-liquid mixture generated during the stripping process is centrifuged by a cyclone generator 32 for the first gas-liquid separation. The separated gas is introduced into a gravity degassing tower 4 through a reversing pipe 33 for a second gas-liquid separation. The resulting liquid is discharged back into the degassing tank 1. This process allows the ozone gas to be rapidly catalyzed into oxygen without heating and then harmlessly released into the atmosphere.

[0035] The degassing box 1 is provided with a first baffle 11 and a second baffle 12. The heights of the first baffle 11 and the second baffle 12 are staggered. The second baffle 12 is located between the two first baffles 11. A baffle channel is provided below the second baffle 12.

[0036] The degassing box 1 is provided with a plurality of aeration pipes 2, which are arranged between the first baffle 11 and the second baffle 12.

[0037] In this embodiment, according to Henry's Law, under isothermal and isobaric conditions, the solubility of ozone gas in a liquid is proportional to the equilibrium partial pressure of the gas.

[0038]

[0039] Solubility refers to the solubility of ozone gas in pure water at a fixed temperature.

[0040] It is the constant of Henry's Law.

[0041] It is the partial pressure of ozone gas.

[0042] When nitrogen or compressed air is introduced into the degassing chamber 1, the partial pressure of ozone gas can be significantly reduced, thereby reducing the concentration of ozone water to below 0.5 ppm.

[0043] By installing baffles inside the degassing chamber 1, the flow path of the ozone wastewater is increased, and the aeration time of the ozone wastewater in the degassing chamber 1 is increased, ensuring that the concentration of the discharged ozone wastewater is less than 0.5 ppm.

[0044] A liquid level pipe 13 is provided on one side of the degassing box 1. The liquid level pipe 13 is located at the liquid outlet, and the two ends of the liquid level pipe 13 are respectively connected to the lower end and the upper end of the degassing box 1.

[0045] The liquid level pipe 13 is equipped with several liquid level sensors 14, which are set to correspond to low liquid level, lower liquid level, upper liquid level and high liquid level. The degassing tank 1 is equipped with a drain pump 15 at the liquid outlet.

[0046] In this embodiment, the liquid level in the degassing tank 1 can be observed in real time through the liquid level pipe 13. The low liquid level, lower liquid level, upper liquid level and high liquid level of the degassing tank 1 are detected by the liquid level sensor 14. The liquid level sensor 14 is used in conjunction with the drain pump 15 to keep the liquid level between the lower liquid level and the upper liquid level to ensure the aeration time of the liquid.

[0047] The swirling generator 32 includes: a swirling tube 321 and a guide plate 322;

[0048] The cyclone tube 321 is fixed on the degassing box 1 and communicates with the degassing box 1. A plurality of guide holes are provided on the side wall of the cyclone tube 321. The guide holes are equidistant from the axial circumference of the cyclone tube 321. One end of the guide plate 322 is connected to the side plate of the cyclone tube 321 through a connecting plate. The guide plate 322 is arranged along the tangential direction of the cyclone tube 321.

[0049] The top of the rotating tube 31 is provided with a condenser plate 34, which is used to cool the separated liquid.

[0050] In this embodiment, the gas-liquid mixture inside the cyclone tube 321 exits through the guide hole and flows tangentially along the guide plate 322. Due to the different densities of the gas and liquid, the magnitudes of the centrifugal forces they experience are also different, causing the droplets to adhere close to the tube wall under the influence of centrifugal force. The centrifugal force F per unit volume of gas / droplet can be expressed as:

[0051]

[0052] Due to the initial velocity and radius of rotation While the densities of gases and liquids are the same, the density of gases and liquids differs significantly under the same conditions. Typically, the density of a gas is only about one-thousandth that of a liquid. Therefore, the rotary degassing tower 3 can effectively separate liquid droplets from the gas-liquid mixture.

[0053] The separated gas enters the gravity degassing tower 4 through the reversing pipe 33, while the liquid accumulates on the condenser plate 34 and falls off under gravity, flowing back into the degassing box 1 through the guide hole on the cyclone pipe 321.

[0054] The gravity degassing tower 4 includes: a gravity pipe 41 and a guide pipe 42;

[0055] The middle section of the gravity tube 41 is connected to the reversing tube 33. The guide tube 42 is located in the gravity tube 41 and its inlet end is connected to the end of the guide tube 42. The outlet end of the guide tube 42 is set downward. There is a gap between the guide tube 42 and the gravity tube 41.

[0056] In this embodiment, the rotary degassing tower 3 can effectively remove most of the liquid from the gas-liquid mixture, but a small portion of the liquid still exists in the form of mist. After the misty liquid enters the gravity degassing tower 4 through the reversing pipe 33, it is guided by the guide pipe 42 to make the misty liquid flow vertically back into the degassing box 1, while the gas flows upward to the exhaust port through the gap between the guide pipe 42 and the gravity pipe 41.

[0057] According to the theory of droplet sedimentation, which mainly follows Stokes' Law, the terminal sedimentation velocity of a droplet in a stationary gas can be calculated as follows:

[0058]

[0059] Acceleration due to gravity (9.81 m / s²)

[0060] Droplet diameter (m, the minimum particle size to be removed needs to be specified, such as 50μm)

[0061] Liquid density (kg / m³, water ≈ 1000)

[0062] Gas density (kg / m³, air ≈ 1.2)

[0063] Gas dynamic viscosity (Pa·s, air ≈ 1.8 × 10⁻) 5 )

[0064] The droplets inside gravity degassing tower 4 need to settle to the liquid collection surface within the gas residence time, and the height H of gravity degassing tower 4 must satisfy:

[0065]

[0066] Apparent gas velocity (m / s, vertical direction)

[0067] Droplet settling time (s) and

[0068] Based on the above formula, the inner diameter and height of the degassing tube can be selected to ensure that droplets with a diameter of 50 μm or larger can be effectively removed.

[0069] Above, refer to Figures 1-6This invention describes a gas-liquid separator according to an embodiment of the present invention. Ozone water wastewater is introduced into a degassing tank 1 through an inlet. Nitrogen or compressed air is introduced into the ozone water wastewater through an aeration pipe 2 to strip ozone gas from the wastewater, significantly reducing the partial pressure of ozone gas and thus lowering the concentration of ozone water to below 0.5 ppm. The degassed ozone water with a concentration less than 0.5 ppm is discharged through an outlet. A cyclone generator 32 centrifuges the gas-liquid mixture generated during the stripping process for the first gas-liquid separation. The separated gas is introduced into a gravity degassing tower 4 through a reversing pipe 33 for a second gas-liquid separation. The resulting liquid is discharged back into the degassing tank 1. This process allows ozone gas to be rapidly catalyzed into oxygen without heating, resulting in its harmless release into the atmosphere.

[0070] It should be noted that, in this specification, the terms "comprising," "including," or any other variations thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0071] Although the present invention has been described in detail through the preferred embodiments above, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above description. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A gas-liquid separator, characterized in that, include: Degassing chamber, rotary degassing tower, and gravity degassing tower; The degassing box has a liquid inlet and a liquid outlet. The liquid inlet is connected to the interface of ozone water wastewater, and the liquid outlet is connected to the discharge outlet. An aeration pipe is provided on one side of the degassing box, and the aeration pipe is connected to nitrogen or compressed air. The upper end of the degassing box is connected to a rotary degassing tower. The rotary degassing tower includes: a rotating tube, a cyclone generator, and a reversing tube; The cyclone generator is located at the connection between the rotating tube and the degassing box. The cyclone generator is used to make the gas rotate and flow. A reversing pipe is provided on one side of the rotating tube, and the reversing pipe connects the rotating tube and the gravity degassing tower. The middle section of the gravity degassing tower is connected to the reversing pipe, the lower end of the gravity degassing tower is connected to the degassing box, and the upper end of the gravity degassing tower is provided with an exhaust port.

2. The gas-liquid separator as described in claim 1, characterized in that, The degassing box is provided with a first baffle and a second baffle, the heights of the first baffle and the second baffle are staggered, the second baffle is located between the two first baffles, and a baffle channel is provided below the second baffle.

3. The gas-liquid separator as described in claim 2, characterized in that, The degassing box is equipped with several aeration pipes, which are arranged between the first baffle and the second baffle.

4. The gas-liquid separator as described in claim 1, characterized in that, A liquid level pipe is provided on one side of the degassing box. The liquid level pipe is located at the liquid outlet, and the two ends of the liquid level pipe are respectively connected to the lower end and the upper end of the degassing box.

5. The gas-liquid separator as described in claim 4, characterized in that, The liquid level tube is equipped with several liquid level sensors, which are set to correspond to low liquid level, lower liquid level, upper liquid level and high liquid level.

6. The gas-liquid separator as described in claim 1, characterized in that, The cyclone generator includes: a cyclone tube and a guide plate; The cyclone tube is fixed on and connected to the degassing box. Several guide holes are provided on the side wall of the cyclone tube. The guide holes are equidistant from the axial circumference of the cyclone tube. One end of the guide plate is connected to the side plate of the cyclone tube through a connecting plate. The guide plate is arranged tangentially to the cyclone tube.

7. The gas-liquid separator as described in claim 1, characterized in that, The top of the rotating tube is equipped with a condenser plate, which is used to cool the separated liquid.

8. The gas-liquid separator as described in claim 1, characterized in that, The gravity degassing tower includes: a gravity pipe and a guide pipe; The middle section of the gravity tube is connected to the reversing tube. The guide tube is located in the gravity tube and its inlet end is connected to the end of the guide tube. The outlet end of the guide tube is set downward. There is a gap between the guide tube and the gravity tube.

9. A gas-liquid separator as described in claim 1, characterized in that, A drain pump is installed at the outlet of the degassing box.

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