Infinite-length reel-to-reel photoetching equipment

Abstract

The invention relates to the field of exposure equipment, in particular to infinite-length reel-to-reel photoetching equipment which comprises a rack, an unwinding device, a winding device and an exposure device are arranged on the rack, a conveying guide roller for conveying a film material is further arranged on the rack, an exposure head of the exposure device does not move, and the exposure head of the exposure device is arranged on the rack. The rack is also provided with a vacuum adsorption roller provided with a driving structure, the vacuum adsorption roller is used for adsorbing a film material and driving the film material to move, and the vacuum adsorption roller is close to the exposure position of the exposure device and is located in the movement direction of the film material at the exposure position. A fixed exposure structure is adopted to be matched with a reel-to-reel structure, and uniform-speed conveying of a film material is realized through a vacuum adsorption roller, so that continuous exposure of the whole reel of film material can be realized without an exposure platform, and exposure of an ultra-long film material can be completed while the exposure efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of photolithography equipment, and more particularly to an infinitely long roll-to-roll photolithography apparatus. Background Technology

[0002] Flexible substrates (films) are printed with patterns using photolithography. With the development of technology, most film photolithography is now done in roll-to-roll mode, that is, the film is unwound by an unwinding mechanism, and after being exposed by an exposure mechanism, it is wound up by a rewinding mechanism.

[0003] Existing roll-to-roll exposure equipment basically involves feeding the film onto the exposure platform, where exposure is completed. However, the current exposure platform can only reach a length of 1.6m. For some specific patterns, the length far exceeds 1.6m, requiring splicing exposure. The overall efficiency of splicing exposure is low, requiring repeated film feeding, platform adsorption of film, and exposure. Furthermore, after completing one exposure, calibration and positioning are required before the next exposure. Summary of the Invention

[0004] The purpose of this invention is to provide an infinitely long roll-to-roll lithography device that adopts a fixed exposure structure in conjunction with a roll-to-roll structure, and achieves uniform speed conveying of the film material through a vacuum adsorption roller. In this way, the entire roll of film material can be continuously exposed without the need for an exposure platform, thereby improving exposure efficiency and enabling the exposure of ultra-long film materials.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows: an infinitely long roll-to-roll lithography apparatus, comprising a frame, an unwinding device, a winding device, and an exposure device, wherein the frame is also provided with a conveying guide roller for conveying film material, the exposure head of the exposure device is stationary, and the frame is also provided with a vacuum adsorption roller equipped with a driving structure, the vacuum adsorption roller is used to adsorb film material and drive the film material to move, and the vacuum adsorption roller is close to the exposure position of the exposure device and is in the direction of film material movement of the exposure position.

[0006] Preferably, the vacuum adsorption roller includes a roller shaft, an outer cylinder that can rotate relative to the roller shaft is sleeved on the roller shaft, the outer cylinder is equipped with a power structure to drive its rotation, and an adsorption hole is opened on the outer cylinder. The roller shaft is a hollow shaft with an adsorption air channel inside. The end of the adsorption air channel is connected to a negative pressure component, and the part of the roller shaft inside the outer cylinder is provided with a communication hole that communicates with the adsorption air channel. A blocking block is also fixedly connected to the part of the roller shaft in the outer cylinder. The blocking block is used to block the adsorption hole of the outer cylinder, and the blocked area is 1 / 4 to 1 / 2 of the outer cylinder.

[0007] Preferably, the frame is provided with two exposure guide rollers of the same height at a position below the exposure device, and the exposure guide roller near the vacuum adsorption roller is cooperated with the exposure pressure roller.

[0008] Preferably, the frame is further provided with a calibration roller whose height matches that of the exposure guide roller. The calibration roller is used to place the calibration plate in conjunction with the exposure guide roller and keep the calibration plate horizontal.

[0009] Preferably, both the unwinding device and the winding device are driven by a speed-adjustable motor, and the linear speeds of the unwinding device, the winding device, and the vacuum adsorption roller are the same.

[0010] Preferably, the frame is provided with a floating device and a correction device for conveying film material in the area between the unwinding device and the vacuum adsorption roller, and the frame is provided with a floating device for conveying film sheet in the area between the winding device and the vacuum adsorption roller. The floating device is used to sense the tension of the film sheet and to control the motor speed of the unwinding device or the winding device.

[0011] Preferably, the floating device includes a floating mounting base mounted on a frame, a vertically oriented floating slide rail and a floating cylinder mounted on the floating mounting base, a floating slider cooperating with the floating slide rail, and the floating cylinder connected to the floating slider, a floating guide roller mounted on the floating slider, and the film material at the floating guide roller forming a "V" shape, the floating cylinder cooperating with a pneumatic proportional valve, and a magnetic grating ruler and a magnetic grating reading head cooperating with each other on the floating mounting base and the floating slider.

[0012] Preferably, the exposure device includes an exposure frame mounted on a frame, an exposure mounting base mounted on the exposure frame, an exposure structure mounted on the exposure mounting base, the portion of the exposure mounting base used to mount the exposure structure being inclined, and the exposure structure including an exposure head mounted at an angle on the exposure mounting base, the exposure head being equipped with a reflective structure that reflects the light beam into a vertically downward direction.

[0013] Preferably, the exposure structure includes at least two exposure heads arranged side by side, each exposure head being equipped with a reflective structure.

[0014] Preferably, the exposure mounting base is provided with an exposure adjustment slide rail parallel to its inclined surface. The exposure adjustment slide rail is fitted with an inclined movable block, and the inclined movable block has an inclined adjustment locking groove. It is locked to the exposure mounting base by bolts in conjunction with the inclined adjustment locking groove. A transverse movable block is installed on the inclined movable block. The inclined movable block is also provided with two transverse adjustment lugs. The transverse movable block also includes a transverse adjustment protrusion located between the two transverse adjustment lugs. The transverse adjustment lugs are fitted with through transverse adjustment bolts, and the transverse adjustment bolts abut against the transverse adjustment protrusions. The transverse movable block also has a transverse adjustment locking groove, and it is locked to the inclined movable block by bolts in conjunction with the transverse adjustment locking groove. The exposure head is mounted on the transverse movable block.

[0015] The technical effects of this invention are as follows: 1. It adopts a fixed exposure structure, combined with a roll-to-roll structure, and uses a vacuum adsorption roller to achieve uniform speed conveying of the film material. This eliminates the need for an exposure platform, enabling continuous exposure of the entire roll of film material, improving exposure efficiency, and allowing for the exposure of ultra-long film materials.

[0016] 2. The structural design of the vacuum adsorption roller ensures that the negative pressure air path does not interfere with the rotation of the outer cylinder. At the same time, the blocking block can block part of the rotating outer cylinder, ensuring that the outer cylinder can adsorb the film material without affecting the overall movement of the film material.

[0017] 3. The structural design of two exposure guide rollers in conjunction with the exposure pressure roller ensures that the film material entering the exposure section is horizontal, thereby guaranteeing the exposure effect.

[0018] 4. The design of the calibration guide roller ensures that the calibration plate attached to the film material remains horizontal at all times. This allows for calibration with the calibration camera on the exposure device, which in turn calculates the linear velocity of the film material under the action of the vacuum adsorption roller. This enables better coordination with the exposure device to complete the exposure of an infinite length (whole roll) of film material.

[0019] 5. The take-up and unwinding are driven by an adjustable-speed motor. With the structural design of the floating device, the difference between the take-up and unwinding linear speed and the vacuum adsorption roller linear speed can be fed back by the up and down floating guide roller, and then adjusted in time to ensure that the overall tension of the film material remains basically consistent during the conveying process, thereby improving the exposure accuracy.

[0020] 6. The structural design of the exposure device allows the exposure head to lie on the exposure mounting base, reducing the influence of gravity and thus minimizing the impact on accuracy caused by long-term strain.

[0021] 7. The design of the oblique and lateral adjustment structures enables fine-tuning of the exposure structure in a limited space, ensuring that the position, angle, and flatness of the images from multiple lenses meet the requirements. Attached Figure Description

[0022] Figure 1 This is a three-dimensional schematic diagram of an infinitely long roll-to-roll lithography device.

[0023] Figure 2 This is a three-dimensional schematic diagram of the membrane material conveying mechanism.

[0024] Figure 3 A three-dimensional schematic diagram of the film material conveying mechanism after the calibration plate is installed.

[0025] Figure 4 This is a cross-sectional view of a vacuum adsorption roller.

[0026] Figure 5 This is a three-dimensional schematic diagram of the floating device.

[0027] Figure 6 This is a three-dimensional schematic diagram of the exposure device.

[0028] Figure 7 This is a three-dimensional schematic diagram of the exposure structures arranged side by side on the exposure mounting base.

[0029] Figure 8 A three-dimensional schematic diagram of a single exposure structure mounted on an exposure mounting base.

[0030] Figure 9 for Figure 8 A magnified view of part A in the image.

[0031] The text labels in the diagram represent: 1. Frame; 2. Unwinding device; 3. Rewinding device; 4. Exposure device; 5. Floating device; 6. Tracking device; 7. Conveyor roller; 8. Vacuum adsorption roller; 11. Exposure guide roller; 12. Exposure pressure roller; 13. Calibration roller; 14. Calibration plate; 15. Roller shaft; 16. Outer cylinder; 17. Adsorption hole; 18. Adsorption air passage; 19. Connecting hole; 20. Blocking block; 21. Floating mounting base; 22. Floating slide rail; 23. Floating slider; 24. Floating guide roller; 25. Floating cylinder; 31. Exposure frame; 32. Exposure mounting base; 33. Exposure structure; 34. Exposure head; 35. Reflective structure; 37. Exposure adjustment slide rail; 38. Inclined movable block; 39. Inclined adjustment locking groove; 40. Lateral adjustment lug; 41. Lateral movable block; 42. Lateral adjustment protrusion. Detailed Implementation

[0032] To enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be described in detail below with reference to the accompanying drawings. The description in this part is only exemplary and explanatory, and should not be used to limit the scope of protection of the present invention in any way.

[0033] like Figure 1-2 As shown, the present invention discloses an infinite roll-to-roll lithography apparatus, comprising a frame 1, an unwinding device 2, a winding device 3, and an exposure device 4, wherein the frame 1 is also provided with a conveying guide roller 7 for conveying film material, the exposure head of the exposure device 4 is stationary, and the frame 1 is also provided with a vacuum adsorption roller 8 equipped with a driving structure, the vacuum adsorption roller 8 is used to adsorb film material and drive the film material to move, and the vacuum adsorption roller 8 is close to the exposure position of the exposure device 4 and is in the direction of film material movement of the exposure position.

[0034] The specific operation of this invention is as follows: First, the film material end of the unwinding device 2 is pulled out, passes through multiple conveying guide rollers 7 and vacuum adsorption rollers 8, and is then fixed onto the winding device 3 to complete the preparation of the film material. Then, the film material is moved along a uniform linear speed by the fixed rotation of the vacuum adsorption rollers 8. The exposure device 4 exposes the film material at a uniform linear speed, thus realizing the exposure operation of the moving film material. Moreover, the film material moves at a uniform linear speed when the whole roll is unwound, so it can be used with the exposure device 4 to achieve the exposure of the whole roll, thereby achieving the exposure of ultra-long film materials. Theoretically, as long as there is enough film material in the unwinding device, the exposure of infinitely long rolls can be achieved.

[0035] like Figure 2 and Figure 4 As shown, the vacuum adsorption roller 8 includes a roller shaft 15, on which an outer cylinder 16 that can rotate relative to it is sleeved. The outer cylinder 16 is equipped with a power structure to drive its rotation, and an adsorption hole 17 is provided on the outer cylinder 16. The roller shaft 15 is a hollow shaft with an adsorption air channel 18 inside. The end of the adsorption air channel 18 is connected to a negative pressure component. The part of the roller shaft 15 inside the outer cylinder 16 is provided with a connecting hole 19 that communicates with the adsorption air channel 18. A blocking block 20 is also fixedly connected to the part of the roller shaft 15 in the outer cylinder 16. The blocking block 20 is used to block the adsorption hole 17 of the outer cylinder 16, and the blocked area is 1 / 4 to 1 / 2 of the outer cylinder 16.

[0036] The specific operation of the vacuum adsorption roller 8 for adsorbing and conveying the film material is as follows: First, connect the negative pressure component to the end of the roller shaft 15, so that the negative pressure component (adsorption air pump) can be connected to the adsorption air channel 18. The outer cylinder 16 is connected to the power structure (such as a motor) that drives its rotation. Then, the power structure drives the outer cylinder 16 to rotate at a fixed speed. At the same time, the negative pressure component continuously evacuates the adsorption air channel 18 to form a negative pressure space inside the outer cylinder 16. In this way, the film material can be adsorbed onto the outer cylinder 16 through the adsorption holes 17. As the outer cylinder 16 rotates, the film material moves. When the part of the outer cylinder 16 that adsorbs the film material enters the position where the adsorption holes 17 are blocked by the blocking block 20, it can no longer adsorb the film material, thus completing the separation of the film material from the outer cylinder 16. In this way, the rotation of the outer cylinder 16 can continuously convey the subsequent film material.

[0037] like Figure 2-3 As shown, the frame 1 is positioned below the exposure device 4 and has two exposure guide rollers 11 of the same height, with the exposure guide roller 11 near the vacuum adsorption roller 8 being fitted with an exposure pressure roller 12.

[0038] This application designs two exposure guide rollers 11 of the same height below the exposure device 4. When the film material enters below the exposure device 4, it will be in a horizontal state under the guidance of the two exposure guide rollers 11, thus ensuring the exposure effect.

[0039] like Figure 3 As shown, the frame 1 is also provided with a calibration roller 13 whose height matches that of the exposure guide roller 11. The calibration roller 13 is used to cooperate with the exposure guide roller 11 to place the calibration plate 14 and keep the calibration plate 14 horizontal.

[0040] Before exposure, it is necessary to determine the linear velocity of the film material under the action of the vacuum adsorption roller 8 in order to better control the exposure structure. Specifically, the calibration plate 14 is attached to the position of the film material above the first guide roller 11, and the other parts of the calibration plate 14 are supported by the calibration roller 13. Then, under the action of the vacuum adsorption roller 8, the film material and the calibration plate 14 are moved together. The top camera at the exposure device 4 will take pictures of the calibration plate 14. In this way, the linear velocity of the film material can be calculated by the time interval between adjacent calibration positions on the calibration plate 14 calibrated by the calibration camera.

[0041] like Figure 1-2 As shown, both the unwinding device 2 and the winding device 3 are driven by motors with adjustable speeds, and the linear speeds of the unwinding device 2, the winding device 3, and the vacuum adsorption roller 8 are the same. The frame 1 is provided with a floating device 5 and a correction device 6 for conveying film material in the area between the unwinding device 2 and the vacuum adsorption roller 8. The frame 1 is provided with a floating device 5 for conveying film sheet in the area between the winding device 3 and the vacuum adsorption roller 8. The floating device 5 is used to sense the tension of the film sheet and to control the motor speed of the unwinding device 2 or the winding device 3.

[0042] While the vacuum adsorption roller 8 moves the film material, the unwinding device 2 and the winding device 3 also need to work together to unwind. When the linear speeds of the three are consistent, the film material can be ensured to move at a stable and uniform speed. However, due to the change of the reel, the linear speed of unwinding and winding will also change. Therefore, it is necessary to adjust the transfer of the unwinding device 2 and the winding device 3 to achieve the purpose of speed adjustment and avoid large fluctuations in the tension of the film material (i.e., being stretched). This application sets up a floating device 5, which is a tension adjustment structure. It can also sense the change in tension and calculate the change in tension to adjust the speed of the unwinding device and the winding device.

[0043] like Figure 5As shown, the floating device 5 includes a floating mounting base 21 mounted on the frame 1. A vertically oriented floating slide rail 22 and a floating cylinder 25 are mounted on the floating mounting base 21. The floating slide rail 22 is fitted with a floating slider 23, and the floating cylinder 25 is connected to the floating slider 23. A floating guide roller 24 is mounted on the floating slider 23, and the film material at the floating guide roller 24 is in a "V" shape. The floating cylinder 25 is fitted with a pneumatic proportional valve. A magnetic grating ruler and a magnetic grating reading head are provided on the floating mounting base 21 and the floating slider 23.

[0044] Under normal circumstances, a constant air pressure is applied to the floating cylinder 25, causing its push rod to extend, which in turn drives the floating slider 23 to move downward, thereby causing the floating guide roller 24 to press down on the film material, achieving the desired effect. Figure 2 The "V" shape shown is followed by calculating the required winding and unwinding speeds to achieve the linear speed of the vacuum adsorption roller based on the diameter of the winding and unwinding reels. Then, the winding and unwinding, and vacuum adsorption roller 8 are operated. As the unwinding reel decreases and the winding reel increases, the linear speed generated by the corresponding speed changes, and the tension of the film material also changes accordingly. This tension change feeds back to the force acting on the floating guide roller 24. With the floating cylinder 25 equipped with a pneumatic proportional valve, the change in force on the floating guide roller 24 causes a position change in the floating slider 23. The corresponding push rod of the floating cylinder 25 will extend or retract accordingly. The magnetic scale and magnetic scale reader measure the position change of the floating slider 23 and feed it back to the control system, thereby controlling the winding and unwinding speeds. Specifically, the unwinding speed increases, and the winding speed decreases. By adjusting, the floating slider 23 returns to its original position, ensuring that the tension of the film material only fluctuates within a small range and remains basically within a stable range throughout the entire film material conveying process.

[0045] like Figure 6-9As shown, the exposure device 4 includes an exposure frame 31 mounted on a frame 1. An exposure mounting base 32 is mounted on the exposure frame 31, and an exposure structure 33 is mounted on the exposure mounting base 32. The portion of the exposure mounting base 32 used to mount the exposure structure 33 is inclined. The exposure structure 33 includes an exposure head 34 inclinedly mounted on the exposure mounting base 32. The exposure head 34 is equipped with a reflective structure 35 that reflects the light beam vertically downwards. The exposure structure 33 includes at least two exposure heads 34 arranged side-by-side, each exposure head 34 equipped with a reflective structure. An exposure adjustment slide rail 37 parallel to the inclined surface is provided on the exposure mounting base 32, and the exposure adjustment slide rail 37 is equipped with an inclined movable block 38. The inclined movable block 38 has an inclined adjustment locking groove 39, which is locked to the exposure mounting base 32 by bolts. A transverse movable block 41 is installed on the inclined movable block 38. Two transverse adjustment lugs 40 are also provided on the inclined movable block 38. The transverse movable block 41 also includes a transverse adjustment protrusion 42 between the two transverse adjustment lugs 40. The transverse adjustment lugs 40 are fitted with through transverse adjustment bolts, and the transverse adjustment bolts abut against the transverse adjustment protrusion 42. The transverse movable block 41 also has a transverse adjustment locking groove, which is locked to the inclined movable block 38 by bolts. The exposure head 34 is installed on the transverse movable block 41.

[0046] First, adjust the exposure structure according to the size of the film to be exposed, and select the number of exposure heads to use, such as... Figure 6 As shown, both exposure heads can be used, or only one side can be used, and the number of heads used on each side can also be selected. Then, the spacing between adjacent exposure heads and the position of the exposure heads are adjusted. Specifically, first, loosen the bolts engaging the oblique adjustment locking groove 39, then slide the oblique movable block 38 on the exposure adjustment slide rail 37. After adjustment, lock the oblique movable block 38 onto the exposure mounting base 32 using the bolts engaging the oblique adjustment locking groove 39. Then, adjust the spacing between adjacent exposure heads 34 by turning the lateral adjustment bolts engaging the lateral adjustment lugs 40. By turning the bolts on both sides, the lateral adjustment protrusions 42 are adjusted. The position is adjusted by moving the horizontal movable block 41 and then locking it onto the inclined movable block 38 using bolts and the horizontal adjusting locking groove. After that, each exposure head 34 is activated, emitting a beam of light for exposure. After passing through the reflective structure 35, the beam is emitted vertically downwards and acts on the film material to be exposed, thus completing the exposure of the film material. The inclined design of the exposure head in this application can reduce the effect of gravity on the exposure head and prevent the exposure head from falling under the influence of gravity during long-term operation (vertical exposure structures are prone to falling under the influence of gravity during long-term operation), thereby ensuring a stable exposure effect.

[0047] It should be noted that, in this document, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0048] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only for the purpose of helping to understand the method and core ideas of the present invention. The above descriptions are only preferred embodiments of the present invention. It should be noted that due to the limitations of textual expression, while there are objectively infinite specific structures, those skilled in the art can make several improvements, modifications, or changes without departing from the principles of the present invention, and can also combine the above technical features in an appropriate manner. These improvements, modifications, changes, or combinations, or the direct application of the inventive concept and technical solution to other situations without modification, should all be considered within the scope of protection of the present invention.

Claims

1. An infinite-length roll-to-roll lithography apparatus, comprising a frame, wherein an unwinding device, a winding device, and an exposure device are disposed on the frame, characterized in that, The frame is also equipped with a conveying guide roller for conveying film material. The exposure head of the exposure device does not move. The frame is also equipped with a vacuum adsorption roller with a drive structure. The vacuum adsorption roller is used to adsorb film material and drive the film material to move. The vacuum adsorption roller is close to the exposure position of the exposure device and is in the direction of film material movement of the exposure position.

2. The infinite roll-to-roll lithography apparatus according to claim 1, characterized in that, The vacuum adsorption roller includes a roller shaft, on which an outer cylinder that can rotate relative to it is sleeved. The outer cylinder is equipped with a power structure to drive its rotation, and an adsorption hole is opened on the outer cylinder. The roller shaft is a hollow shaft with an adsorption air channel inside. The end of the adsorption air channel is connected to a negative pressure component. The part of the roller shaft inside the outer cylinder is provided with a communication hole that communicates with the adsorption air channel. A blocking block is also fixedly connected to the part of the roller shaft in the outer cylinder. The blocking block is used to block the adsorption hole of the outer cylinder, and the blocked area is 1 / 4 to 1 / 2 of the outer cylinder.

3. The infinite roll-to-roll lithography apparatus according to claim 1, characterized in that, The frame is positioned below the exposure device and has two exposure guide rollers of the same height, with the exposure guide roller near the vacuum adsorption roller being fitted with an exposure pressure roller.

4. The infinite roll-to-roll lithography apparatus according to claim 3, characterized in that, The frame is also equipped with a calibration roller whose height matches that of the exposure guide roller. The calibration roller is used to place the calibration plate in conjunction with the exposure guide roller and keep the calibration plate horizontal.

5. The infinite roll-to-roll lithography apparatus according to claim 1, characterized in that, Both the unwinding device and the winding device are driven by motors with adjustable speeds, and the linear speeds of the unwinding device, the winding device, and the vacuum adsorption roller are consistent.

6. The infinite roll-to-roll lithography apparatus according to claim 5, characterized in that, The frame is equipped with a floating device and a correction device for conveying film material in the area between the unwinding device and the vacuum adsorption roller. The frame is equipped with a floating device for conveying film sheet in the area between the winding device and the vacuum adsorption roller. The floating device is used to sense the tension of the film sheet and to control the motor speed of the unwinding device or the winding device.

7. The infinite roll-to-roll lithography apparatus according to claim 6, characterized in that, The floating device includes a floating mounting base mounted on a frame, on which a vertically oriented floating slide rail and a floating cylinder are mounted. The floating slide rail is fitted with a floating slider, and the floating cylinder is connected to the floating slider. The floating slider is fitted with a floating guide roller, and the film material at the floating guide roller is in a "V" shape. The floating cylinder is fitted with a pneumatic proportional valve. The floating mounting base and the floating slider are equipped with a magnetic scale and a magnetic scale reading head that cooperate with each other.

8. The infinite roll-to-roll lithography apparatus according to claim 1, characterized in that, The exposure device includes an exposure frame mounted on a rack, an exposure mounting base mounted on the exposure frame, and an exposure structure mounted on the exposure mounting base. The portion of the exposure mounting base used to mount the exposure structure is inclined. The exposure structure includes an exposure head mounted at an angle on the exposure mounting base, and the exposure head is equipped with a reflective structure that reflects the light beam into a vertically downward direction.

9. The infinite roll-to-roll lithography apparatus according to claim 8, characterized in that, The exposure structure includes at least two exposure heads arranged side by side, each exposure head being equipped with a reflective structure.

10. An infinitely long roll-to-roll lithography apparatus according to claim 8, characterized in that, The exposure mounting base is equipped with an exposure adjustment slide rail parallel to its inclined surface. The exposure adjustment slide rail is fitted with an inclined movable block, and the inclined movable block has an inclined adjustment locking groove. It is locked to the exposure mounting base by bolts in conjunction with the inclined adjustment locking groove. A transverse movable block is installed on the inclined movable block. The inclined movable block is also equipped with two transverse adjustment lugs. The transverse movable block also includes a transverse adjustment protrusion located between the two transverse adjustment lugs. The transverse adjustment lugs are fitted with through transverse adjustment bolts, and the transverse adjustment bolts abut against the transverse adjustment protrusions. The transverse movable block also has a transverse adjustment locking groove, and it is locked to the inclined movable block by bolts in conjunction with the transverse adjustment locking groove. The exposure head is mounted on the transverse movable block.

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