Method and system for acquiring residual stress distribution of composite substrate

Abstract

The invention provides a method and system for acquiring residual stress distribution of a composite substrate, and the method comprises the steps: obtaining a surface topography parameter data set of the composite substrate and a characteristic parameter data set of the composite substrate, removing invalid BOW values from the BOW value data set to obtain an effective BOW value data set, and obtaining the characteristic parameter data set of the composite substrate according to the effective BOW value data set and the characteristic parameter data set of the composite substrate, and obtaining the residual stress distribution of the composite substrate based on the effective BOW values in the effective BOW value data set and the characteristic parameter data in the characteristic parameter data set. The method can effectively prevent the interference of invalid BOW values, improve the accuracy of the obtained residual stress distribution of the composite substrate, provide a quantitative monitoring means for a semiconductor manufacturing process, can be used for improving the manufacturing process of the composite substrate, guiding the design of a device, optimizing the performance of the device and improving the reliability of the device, and has better application prospects compared with methods such as an X-ray diffraction method or a Raman spectroscopy method. The method is high in acquisition speed and low in cost, has no special requirements on the to-be-detected samples, and can be applied to a wide variety of to-be-detected samples.

Description

Technical Field

[0001] This invention relates to the fields of semiconductor manufacturing and materials testing technology, and in particular to a method and system for obtaining the residual stress distribution of a composite substrate. Background Technology

[0002] Composite substrates are used as base materials for fabricating semiconductor devices such as filters, optical waveguide modulators, optical waveguide switches, spatial light modulators, optical frequency doublers, surface acoustic wave generators, infrared detectors, and ferroelectric memories. Composite substrates mainly consist of a substrate layer and a thin film layer. Mainstream fabrication processes include deposition and smart lift-off. Deposition involves depositing a thin film layer on the substrate layer. Smart lift-off involves first ion implantation of a thin film wafer to form an ion-implanted wafer containing a thin film layer, a release layer, and a residual mass layer. The ion-implanted wafer is then bonded to the substrate layer from the thin film layer side to form a bonded body. Next, the bonded body undergoes annealing. During annealing, the implanted ions in the release layer form gas and generate bubbles. When these bubbles connect and form a wafer, the residual mass layer separates from the thin film layer at the release layer, leaving the thin film layer on the substrate layer, resulting in the composite substrate. These manufacturing processes involve thin film deposition and heat treatment, which can generate residual stress within the composite substrate. Excessive residual stress can lead to warping during the composite substrate fabrication process and even cracks in subsequent device processing, causing device failure. Therefore, obtaining the residual stress distribution of composite substrates is of great significance for improving composite substrate fabrication processes, guiding device design, optimizing device performance, and improving device reliability.

[0003] Currently, traditional methods for measuring residual stress mainly include X-ray diffraction or Raman spectroscopy. These methods have limitations such as slow measurement speed, expensive equipment, or special requirements for the sample. There is still great room for improvement in the measurement technology of residual stress distribution in composite substrates. There is an urgent need in this field to develop new methods and systems for obtaining residual stress distribution in composite substrates. Summary of the Invention

[0004] This invention provides a method and system for obtaining the residual stress distribution of a composite substrate to solve the above-mentioned problems.

[0005] In a first aspect, the present invention provides a method for obtaining the residual stress distribution of a composite substrate, comprising: The surface morphology parameter data of the composite substrate are obtained to obtain a surface morphology parameter dataset, wherein the surface morphology parameter data includes BOW values ​​and the surface morphology parameter dataset is a BOW value dataset; The characteristic parameters of the composite substrate are obtained to obtain a characteristic parameter dataset. Invalid BOW values ​​are removed from the BOW value dataset to obtain a valid BOW value dataset; Based on the effective BOW values ​​in the effective BOW value dataset and the characteristic parameter data in the characteristic parameter dataset, the residual stress distribution of the composite substrate is obtained.

[0006] In some feasible embodiments, the method of obtaining the BOW value of the composite substrate is not limited and can be implemented by any existing technology. For example, the composite substrate can be scanned in the whole field by an FM200 measuring instrument to obtain the BOW value of the composite substrate. Each scanning point corresponds to a BOW value. After scanning, several BOW values ​​are obtained, and then a BOW value dataset is obtained.

[0007] In some feasible embodiments, invalid BOW values ​​are removed from the BOW value dataset to obtain a valid BOW value dataset, including: Based on the measurement range of the BOW value measuring device and the physical occupancy range of the composite substrate, BOW values ​​located outside the physical occupancy range of the composite substrate are identified and marked as invalid BOW values. Determine whether the BOW values ​​in the BOW value dataset are empty; if so, mark them as invalid BOW values. Determine whether the BOW values ​​in the BOW value dataset are outliers; if so, mark them as invalid BOW values. The invalid BOW values ​​are removed to obtain the dataset of valid BOW values.

[0008] In some feasible embodiments, it is determined whether the BOW values ​​in the BOW value dataset are outliers; if so, they are marked as invalid BOW values, including: Calculate the difference between any BOW value and other BOW values ​​in the BOW value dataset to obtain several differences; Taking the absolute value of the aforementioned differences yields several absolute values ​​of the differences; The number of absolute values ​​of the aforementioned differences that are not less than a preset threshold is counted. If the proportion of such numbers is not less than 1 / 2, then the BOW value is an outlier and is marked as an invalid BOW value. The preset threshold is 40 μm.

[0009] In some feasible embodiments, the feature parameters in the feature parameter dataset include the Young's modulus of the substrate layer of the composite substrate, the thickness of the substrate layer, the Poisson's ratio of the substrate layer, the thickness of the thin film layer of the composite substrate, and the diameter of the composite substrate.

[0010] In some feasible embodiments, the residual stress distribution of the composite substrate is obtained based on the effective BOW values ​​in the effective BOW value dataset and the characteristic parameter data in the characteristic parameter dataset, including: Obtain the stress calculation model used to calculate the residual stress; The effective BOW value and the characteristic parameter data are input into the stress calculation model, and the residual stress distribution of the composite substrate is obtained by calculation through the stress calculation model.

[0011] In some feasible embodiments, the stress calculation model is defined by the following formula: ; in, The Young's modulus of the substrate layer of the composite substrate, The thickness of the base layer, For effective BOW value, The Poisson's ratio of the substrate layer, The thickness of the thin film layer of the composite substrate, The diameter of the composite substrate is given.

[0012] In a second aspect, the present invention provides a system for obtaining the residual stress distribution of a composite substrate, comprising: The data acquisition unit is configured to acquire surface morphology parameter data and feature parameter data of the composite substrate, thereby obtaining a surface morphology parameter dataset and a feature parameter dataset; wherein, the surface morphology parameter data includes BOW values, and the surface morphology parameter dataset is a BOW value dataset. The data processing unit is configured to remove invalid BOW values ​​from the BOW value dataset to obtain a valid BOW value dataset. The residual stress acquisition unit is configured to obtain the residual stress distribution of the composite substrate based on the effective BOW value in the effective BOW value dataset and the characteristic parameter data in the characteristic parameter dataset.

[0013] In some feasible embodiments, the system further includes a visualization unit; The visualization unit is configured to display the residual stress distribution of the composite substrate in the form of a residual stress distribution map.

[0014] In some feasible embodiments, the system further includes a data conversion unit; The data conversion unit is configured to convert the valid BOW values ​​in the valid BOW value dataset and the feature parameter data in the feature parameter dataset into units.

[0015] In some feasible embodiments, the system further includes a controller; The controller is configured to send control commands to various units of the system to control the execution of the various units of the system; Specifically configured as follows: Send a first control command to the data acquisition unit to trigger the data acquisition unit to acquire the surface morphology parameter data of the composite substrate and the feature parameters of the composite substrate, so as to obtain the surface morphology parameter dataset and the feature parameter dataset; Send a second control command to the data processing unit to trigger the data processing unit to remove invalid BOW values ​​from the BOW value dataset to obtain a valid BOW value dataset; A third control command is sent to the residual stress acquisition unit to trigger the residual stress acquisition unit to execute the residual stress distribution of the composite substrate based on the effective BOW value in the effective BOW value dataset and the feature parameter data in the feature parameter dataset.

[0016] In some feasible embodiments, the controller is further configured to send a fourth control command to the visualization unit to trigger the visualization unit to display the residual stress distribution of the composite substrate in the form of a residual stress distribution map.

[0017] In some feasible embodiments, the controller is further configured to send a unit conversion instruction to the data conversion unit before sending a third control instruction to the residual stress acquisition unit, so as to trigger the data conversion unit to perform conversion of the units of the effective BOW values ​​in the effective BOW value dataset and the feature parameter data in the feature parameter dataset.

[0018] As can be seen from the above technical solutions, the present invention provides a method for obtaining the residual stress distribution of a composite substrate. First, the BOW value of the composite substrate is obtained, and invalid BOW values ​​are removed from the BOW value dataset. Then, the residual stress distribution of the composite substrate is successfully obtained based on the valid BOW values ​​and the characteristic parameter data of the composite substrate. It can effectively prevent interference from invalid BOW values, improve the accuracy of the obtained residual stress distribution of the composite substrate, and provide a precise quantitative monitoring means for semiconductor manufacturing processes. It can be used to improve composite substrate processes, guide device design, optimize device performance, and improve device reliability. Compared with existing technologies such as X-ray diffraction or Raman spectroscopy, it has a fast acquisition speed, low cost, no special requirements for the test sample, a wide range of applicable test samples, and few limitations.

[0019] This invention eliminates invalid BOW values ​​by considering both the measurement range of the BOW value measuring device and the physical occupancy range of the composite substrate. It identifies BOW values ​​outside the physical occupancy range of the composite substrate obtained by the BOW value measuring device and records them as invalid BOW values, thus eliminating interference from BOW value data of non-composite substrates obtained by the BOW value measuring device. It also includes determining whether the BOW value is null; if so, it records it as an invalid BOW value, eliminating interference from abnormal values ​​such as null values. Furthermore, it includes determining whether the BOW value is an anomaly; if so, it records it as an invalid BOW value, eliminating interference from obvious anomalies caused by composite substrate edge effects, surface contamination, or noise from the BOW value measuring device.

[0020] This invention identifies outliers by defining a preset threshold. First, it calculates the difference between any BOW value and other BOW values ​​in the BOW value dataset, obtaining several differences. Then, it takes the absolute value of these differences, obtaining several absolute values ​​of the differences. Finally, it counts the number of absolute values ​​of the differences that are not less than a preset threshold (40μm). If the proportion of such values ​​is not less than 1 / 2, the BOW value is identified as an outlier. This identification condition can accurately identify invalid BOW values, avoiding the omission of invalid BOW values ​​and misidentification, thus improving the accuracy of identification, improving the accuracy of the valid BOW value dataset, and consequently improving the accuracy of the obtained residual stress distribution of the composite substrate.

[0021] This invention is based on A stress calculation model is defined to obtain the residual stress distribution of the composite substrate. The parameters involved include the Young's modulus E of the substrate layer of the composite substrate under test. s , base layer thickness h s basal layer Poisson ratio V s The thickness t of the thin film layer on the composite substrate f The effective BOW value is obtained by screening the inherent parameters of the composite substrate under test, such as the diameter D of the composite substrate, and the BOW value obtained by BOW value measurement equipment such as the FM200 measuring instrument. The method of obtaining the effective BOW value is simple, fast and low cost. There are no special requirements for the sample under test. Moreover, the formula is based on the relationship between the radius of curvature and the Bow value and the Stoney formula, which has data reliability. The residual stress distribution of the composite substrate obtained in this way is more accurate and reliable.

[0022] This invention also provides a system for acquiring the residual stress distribution of a composite substrate, comprising a data acquisition unit for acquiring the BOW value and characteristic parameter data of the composite substrate, a data processing unit for removing invalid BOW values ​​from the BOW value dataset to obtain valid BOW value data, a residual stress acquisition unit for acquiring the residual stress distribution of the composite substrate based on the valid BOW values ​​and characteristic parameter data through a formula, a visualization unit for displaying the residual stress distribution of the composite substrate in the form of a residual stress distribution map, and a controller for issuing commands to control the execution of each unit of the system. This system achieves automated and high-precision acquisition of the residual stress distribution of the composite substrate, and visualizes the residual stress distribution of the composite substrate, transforming abstract residual stress data into an intuitive graphical interface that displays the residual stress at various locations on the composite substrate, facilitating rapid analysis and decision-making by the user.

[0023] The composite substrate residual stress distribution acquisition system of the present invention also includes a data conversion unit, which is used to convert the units of the effective BOW values ​​in the effective BOW value dataset and the characteristic parameter data of the composite substrate in the characteristic parameter dataset, unify the units, ensure that all data conform to the SI system required by the composite substrate residual stress distribution calculation formula, avoid calculation errors caused by unit mismatch, and improve the accuracy of the acquired composite substrate residual stress distribution. Attached Figure Description

[0024] To more clearly illustrate the technical solution of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 A flowchart illustrating the method for obtaining the residual stress distribution of a composite substrate provided in an embodiment of this application; Figure 2 A schematic diagram of the structure of the system for obtaining the residual stress distribution of the composite substrate provided in an embodiment of this application; Figure 3 The residual stress distribution diagram of the composite substrate provided in the embodiments of this application is shown. Detailed Implementation

[0026] The embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following examples do not represent all embodiments consistent with this application.

[0027] This invention provides a method for obtaining the residual stress distribution of a composite substrate, such as... Figure 1 As shown, the method includes the following steps: S110: Obtain the surface morphology parameter data and the feature parameter data of the composite substrate to obtain a surface morphology parameter dataset and a feature parameter dataset, wherein the surface morphology parameter data includes BOW values ​​and the surface morphology parameter dataset is a BOW value dataset.

[0028] In this embodiment, the method of obtaining the BOW value of the composite substrate is not limited, and the device for obtaining the BOW value is not limited to a specific type. For example, the composite substrate can be scanned in its entirety by an FM200 measuring instrument to obtain the BOW value of the composite substrate. Each scanning point corresponds to a BOW value, and several BOW values ​​are obtained after scanning, thus obtaining a BOW value dataset.

[0029] A feature parameter dataset is a collection of parameter values ​​used to describe the inherent physical properties and geometric dimensions of the composite substrate under test. These parameters are independent of a single measurement and are typically the material properties and design specifications of the composite substrate. In this embodiment, the feature parameter data in the feature parameter dataset includes the Young's modulus of the substrate layer, the thickness of the substrate layer, the Poisson's ratio of the substrate layer, the thickness of the thin film layer of the composite substrate, and the diameter of the composite substrate.

[0030] S120: Remove invalid BOW values ​​from the BOW value dataset to obtain a valid BOW value dataset.

[0031] The BOW value dataset obtained above comes directly from the output of the measurement equipment. It may contain information that does not represent the true state of the composite substrate. If this invalid data is included in subsequent calculations, it will affect the results of the residual stress distribution. Therefore, the original data needs to be cleaned to obtain a clean BOW value dataset, i.e., a valid BOW value dataset.

[0032] In this embodiment, invalid BOW values ​​are removed from the BOW value dataset to obtain a valid BOW value dataset. This includes: identifying BOW values ​​located outside the physical occupancy range of the composite substrate based on the measurement range (range coverage range) of the BOW value measuring device (such as an FM200 measuring instrument) and the physical occupancy range of the composite substrate, and marking them as invalid BOW values; determining whether the BOW values ​​in the BOW value dataset are empty, and if so, marking them as invalid BOW values; determining whether the BOW values ​​in the BOW value dataset are outliers, and if so, marking them as invalid BOW values; and removing the invalid BOW values ​​to obtain a valid BOW value dataset.

[0033] Specifically, it is necessary to first identify and remove BOW values ​​located outside the physical occupancy area of ​​the composite substrate. This step is necessary because the measuring equipment usually samples the entire scanning area uniformly. When the scanning point falls outside the composite substrate, the instrument measures the data of the support platform or other background. These data are unrelated to the composite substrate, and their numerical characteristics are completely different from the data on the composite substrate.

[0034] After completing the placeholder range filtering, the dataset is traversed to identify and remove BOW values ​​that are null, and the true data is found to ensure the accuracy of the dataset.

[0035] Next, we identify and remove BOW values ​​that are outliers. Although an outlier is a numerical value, it differs significantly from most BOW values ​​in the BOW value dataset. These outliers may be due to factors such as composite substrate edge effects, surface contamination, or noise from the BOW value measurement equipment. Removing these outliers can improve the accuracy of the dataset.

[0036] In this embodiment, determining whether a BOW value in the BOW value dataset is an outlier, and if so, marking it as an invalid BOW value, includes: calculating the difference between any BOW value in the BOW value dataset and other BOW values ​​to obtain several differences; taking the absolute value of the several differences to obtain several absolute values ​​of the differences; counting the number of absolute values ​​of the several differences that are not less than a preset threshold (the preset threshold is 40μm); if the proportion of the number is not less than 1 / 2, then the BOW value is an outlier and the BOW value is marked as an invalid BOW value.

[0037] In this embodiment, for each BOW value in the BOW value dataset, it is compared with other BOW values ​​in the dataset, which are all data except itself. This method can eliminate spurious data points that significantly deviate from the normal physical morphology due to composite substrate edge effects, surface contamination, or measurement equipment noise.

[0038] All invalid BOW values ​​will be removed from the original dataset. After removal, the remaining data points in the dataset will all be valid BOW values, forming a valid BOW value dataset. Valid BOW values ​​are considered to characterize the true surface morphology of the composite substrate, eliminating interference from obvious outliers caused by composite substrate edge effects, surface contamination, or noise from the BOW value acquisition equipment. By using identification criteria, invalid BOW values ​​can be accurately identified, avoiding omissions and misidentifications, improving identification accuracy, increasing the accuracy of the valid BOW value dataset, and consequently improving the accuracy of the obtained residual stress distribution of the composite substrate.

[0039] S130: Based on the effective BOW values ​​in the effective BOW value dataset and the characteristic parameter data in the characteristic parameter dataset, the residual stress distribution of the composite substrate is obtained.

[0040] This step converts geometric quantities into mechanical quantities. An effective BOW value and a complete set of characteristic parameters are input into a pre-defined stress calculation model, which outputs the residual stress value at the location corresponding to that effective BOW value. Repeating this calculation process for each effective BOW value in the dataset yields a set of stress values ​​corresponding to all effective BOW value locations, i.e., the complete residual stress distribution.

[0041] In some embodiments, the residual stress distribution of the composite substrate is obtained based on the effective BOW values ​​in the effective BOW value dataset and the feature parameter data in the feature parameter dataset, including: obtaining a stress calculation model for calculating the residual stress; inputting the effective BOW values ​​and the feature parameter data into the stress calculation model, and calculating the residual stress distribution of the composite substrate through the stress calculation model.

[0042] The measured BOW value is only a geometric quantity and cannot be directly equated to the stress value. It must be converted into a residual stress with a clear physical meaning through a conversion model. This conversion process is the process of determining and using the stress calculation model.

[0043] The stress calculation model is defined by the following formula: ; in, The Young's modulus of the substrate layer of the composite substrate, The thickness of the base layer, For effective BOW value, The Poisson's ratio of the substrate layer, The thickness of the thin film layer of the composite substrate, The diameter of the composite substrate is given.

[0044] During calculation, each valid BOW value is substituted into the BOW value position in the formula, and the characteristic parameter data is substituted into its corresponding sign position. Multiplication and division operations are then performed to obtain the residual stress value corresponding to the BOW value point.

[0045] In this embodiment, the formula Based on the relationship between radius of curvature and BOW value and the Stoney formula, specifically, the original Stoney formula describes the stress relationship between the thin film layer and the substrate layer, as shown in the following equation: ; in, The stress in the thin film layer (unit: Pa) The Young's modulus of the base layer (unit: Pa). The thickness of the base layer (unit: m) The Poisson's ratio (dimensionless) of the basal layer. The thickness of the thin film layer (unit: m) The radius of curvature of the basal layer (unit: m).

[0046] The relationship between the radius of curvature and the BOW value is as follows. Where B is the BOW value of the composite substrate (unit: m); D is the diameter of the composite substrate (unit: m); and R is the radius of curvature (unit: m, without distinction between thin film layer / substrate layer).

[0047] Substituting the relationship between the radius of curvature and the BOW value into the Stoney formula, we obtain... Based on the method of this embodiment, through the formula This allows us to obtain the residual stress corresponding to each effective BOW value in the effective BOW value dataset.

[0048] In this embodiment, when acquiring BOW values ​​using a BOW value measurement device, each scan point corresponds to a BOW value. Invalid BOW values ​​are removed from the BOW value dataset, and the corresponding scan point information is retained when obtaining valid BOW values. That is, the scan points and valid BOW value data are known. Therefore, when obtaining the residual stress corresponding to each valid BOW value, countless scan points and residual stress data can be obtained, leading to the residual stress distribution of the composite substrate. This calculation is repeated for all valid BOW values ​​to obtain the set of residual stress values ​​corresponding to all valid measurement points. This set represents the residual stress distribution of the entire composite substrate.

[0049] The method provided in this embodiment has no special requirements for the sample to be tested and can be applied to a wide range of sample types. For example, the composite substrate may include a substrate layer and a thin film layer. The material of the substrate layer may be lithium niobate, lithium tantalate, quartz, silicon, sapphire, silicon carbide, etc., and the material of the thin film layer may be lithium niobate, lithium tantalate, silicon carbide, silicon, gallium nitride, gallium arsenide, etc.

[0050] Based on the above-mentioned method for obtaining the residual stress distribution of a composite substrate, such as Figure 2 As shown, some embodiments of this application also provide a system for obtaining the residual stress distribution of a composite substrate, including: The data acquisition unit, serving as the system's front-end input, is responsible for acquiring raw measurement data. Specifically, it is configured to acquire surface morphology parameter data and feature parameter data of the composite substrate, resulting in a surface morphology parameter dataset and a feature parameter dataset. The surface morphology parameter data includes BOW values, and the surface morphology parameter dataset is a BOW value dataset. For example, a high-precision non-contact optical measuring instrument, preferably an FM200 measuring instrument, is used. After acquiring the BOW values ​​of the composite substrate, the BOW value data of the composite substrate and the inherent feature parameters of the composite substrate under test are acquired to form the BOW value dataset and the feature parameter dataset.

[0051] The data processing unit is responsible for cleaning the raw measurement data to ensure its validity. Specifically, it is configured to remove invalid BOW values ​​from the BOW value dataset to obtain a valid BOW value dataset.

[0052] The residual stress acquisition unit, which is the core computing engine of the system in this embodiment, is configured to convert geometric deformation data into physical stress data. Specifically, it is configured to obtain the residual stress distribution based on the effective BOW value in the effective BOW value dataset and the feature parameter data in the feature parameter dataset, using the residual stress distribution formula of the composite substrate, and finally generate a residual stress distribution dataset covering the entire surface of the composite substrate.

[0053] This embodiment can be referred to in the above-described embodiments of the acquisition method. For the same content, it will not be repeated here, but can be referred to in the same way.

[0054] In some embodiments, the system further includes a data conversion unit; this unit is responsible for standardizing the data to ensure data consistency. Specifically, it is configured to convert the units of the valid BOW values ​​in the valid BOW value dataset and the feature parameter data in the feature parameter dataset, unifying the units to ensure that all data conforms to the International System of Units (SI) required by the formula for calculating the residual stress distribution of the composite substrate, avoiding calculation errors caused by unit mismatch, and thus improving the accuracy of the obtained residual stress distribution of the composite substrate.

[0055] Understandably, the process of converting units also applies to the implementation of the method.

[0056] In some embodiments, the system further includes a visualization unit configured to display the residual stress distribution of the composite substrate in the form of a residual stress distribution map. This transforms abstract residual stress data into an intuitive graphical interface, displaying the residual stress at various locations on the composite substrate, facilitating rapid analysis and decision-making by the user. By visualizing the residual stress gradient distribution, users can directly correlate it with anomalies in specific manufacturing processes. For example, when the temperature zone of the deposition equipment is uneven, the stress map will exhibit a characteristic ring-shaped distribution; when the cooling rate of the annealing process is out of control, a central tensile stress peak will be displayed, enabling rapid analysis and decision-making by the user.

[0057] For example, residual stress at various locations on a composite substrate can be displayed in the form of a two-dimensional density map on a graphical user interface. This two-dimensional density map can use color gradients to characterize the magnitude and sign (tensile or compressive) of the residual stress, for example, as shown below. Figure 3 As shown, warm colors (such as red) are commonly used to represent tensile stress, and cool colors (such as blue) are used to represent compressive stress. The figure can clearly show the uniformity of residual stress, the residual stress gradient, and the location of high stress areas. Here, r represents the radius of the composite substrate, h represents the thickness of the substrate layer, E represents the Young's modulus of the substrate layer, and stress represents the residual stress. Positive values ​​represent tensile stress, and negative values ​​represent compressive stress.

[0058] In some embodiments, the system further includes a controller, which serves as the central controller of the system in this embodiment and is responsible for coordinating the operation of each functional unit. Specifically, it is used to send control commands to each unit of the system to control the execution of each unit of the system; Specifically configured as follows: Send a first control command to the data acquisition unit to trigger the data acquisition unit to acquire surface morphology parameter data and feature parameter data of the composite substrate, so as to obtain surface morphology parameter dataset and feature parameter dataset; Send a second control command to the data processing unit to trigger the data processing unit to remove invalid BOW values ​​from the BOW value dataset to obtain a valid BOW value dataset; Send a unit conversion instruction to the data conversion unit to trigger the data conversion unit to convert the units of the valid BOW values ​​in the valid BOW value dataset and the feature parameter data in the feature parameter dataset; A third control command is sent to the residual stress acquisition unit to trigger the residual stress acquisition unit to execute the residual stress distribution of the composite substrate based on the effective BOW value in the effective BOW value dataset and the feature parameter data in the feature parameter dataset. A fourth control command is sent to the visualization unit to trigger the visualization unit to display the residual stress distribution of the composite substrate in the form of a residual stress distribution map.

[0059] In this embodiment, the controller issues commands to control the execution of various units of the system. For example, according to user commands, it sends control signals to the data acquisition unit, data processing unit, data conversion unit, residual stress acquisition unit, and visualization unit, directing each unit to execute tasks sequentially or in parallel, thereby realizing a fully automated process from data acquisition to result display, ensuring the smoothness and efficiency of data flow and control flow in the system.

[0060] Similar parts between the embodiments provided in this application can be referred to mutually. The specific implementation methods provided above are only a few examples under the overall concept of this application and do not constitute a limitation on the scope of protection of this application. For those skilled in the art, any other implementation methods extended from the solution of this application without creative effort shall fall within the scope of protection of this application.

Claims

1. A method for obtaining the residual stress distribution of a composite substrate, characterized in that, include: The surface morphology parameter data of the composite substrate are obtained to obtain a surface morphology parameter dataset, wherein the surface morphology parameter data includes BOW values ​​and the surface morphology parameter dataset is a BOW value dataset; The characteristic parameters of the composite substrate are obtained to obtain a characteristic parameter dataset. Invalid BOW values ​​are removed from the BOW value dataset to obtain a valid BOW value dataset; Based on the effective BOW values ​​in the effective BOW value dataset and the characteristic parameter data in the characteristic parameter dataset, the residual stress distribution of the composite substrate is obtained.

2. The method for obtaining the residual stress distribution of the composite substrate according to claim 1, characterized in that, Invalid BOW values ​​are removed from the BOW value dataset to obtain a valid BOW value dataset, including: Based on the measurement range of the BOW value measuring device and the physical occupancy range of the composite substrate, BOW values ​​located outside the physical occupancy range of the composite substrate are identified and marked as invalid BOW values. Determine whether the BOW values ​​in the BOW value dataset are empty; if so, mark them as invalid BOW values. Determine whether the BOW values ​​in the BOW value dataset are outliers; if so, mark them as invalid BOW values. The invalid BOW values ​​are removed to obtain the dataset of valid BOW values.

3. The method for obtaining the residual stress distribution of the composite substrate according to claim 2, characterized in that, Determine whether the BOW values ​​in the BOW value dataset are outliers. If so, mark them as invalid BOW values, including: Calculate the difference between any BOW value and other BOW values ​​in the BOW value dataset to obtain several differences; Taking the absolute value of the aforementioned differences yields several absolute values ​​of the differences; The number of absolute values ​​of the aforementioned differences that are not less than a preset threshold is counted. If the proportion of such numbers is not less than 1 / 2, then the BOW value is an outlier and is marked as an invalid BOW value. The preset threshold is 40 μm.

4. The method for obtaining the residual stress distribution of the composite substrate according to claim 1, characterized in that, The feature parameters in the feature parameter dataset include the Young's modulus of the substrate layer of the composite substrate, the thickness of the substrate layer, the Poisson's ratio of the substrate layer, the thickness of the thin film layer of the composite substrate, and the diameter of the composite substrate.

5. The method for obtaining the residual stress distribution of the composite substrate according to claim 1, characterized in that, Based on the effective BOW values ​​in the effective BOW value dataset and the characteristic parameter data in the characteristic parameter dataset, the residual stress distribution of the composite substrate is obtained, including: Obtain the stress calculation model used to calculate the residual stress; The effective BOW value and the characteristic parameter data are input into the stress calculation model, and the residual stress distribution of the composite substrate is calculated by the stress calculation model.

6. The method for obtaining the residual stress distribution of the composite substrate according to claim 5, characterized in that, The stress calculation model is defined by the following formula: ； in, The Young's modulus of the substrate layer of the composite substrate, The thickness of the base layer, For effective BOW value, The Poisson's ratio of the substrate layer, The thickness of the thin film layer of the composite substrate, The diameter of the composite substrate is given.

7. A system for obtaining the residual stress distribution of a composite substrate, characterized in that, include: The data acquisition unit is configured to acquire surface morphology parameter data and feature parameter data of the composite substrate, thereby obtaining a surface morphology parameter dataset and a feature parameter dataset; wherein, the surface morphology parameter data includes BOW values, and the surface morphology parameter dataset is a BOW value dataset. The data processing unit is configured to remove invalid BOW values ​​from the BOW value dataset to obtain a valid BOW value dataset. The residual stress acquisition unit is configured to obtain the residual stress distribution of the composite substrate based on the effective BOW value in the effective BOW value dataset and the characteristic parameter data in the characteristic parameter dataset.

8. The system for obtaining the residual stress distribution of a composite substrate according to claim 7, characterized in that, The system also includes a visualization unit; The visualization unit is configured to display the residual stress distribution of the composite substrate in the form of a residual stress distribution map.

9. The system for obtaining the residual stress distribution of a composite substrate according to claim 7, characterized in that, The system also includes a data conversion unit; The data conversion unit is configured to convert the valid BOW values ​​in the valid BOW value dataset and the feature parameter data in the feature parameter dataset into units.

10. The system for obtaining the residual stress distribution of a composite substrate according to claim 7, characterized in that, The system also includes a controller; The controller is configured to send control commands to various units of the system to control the execution of the various units of the system; Specifically configured as follows: Send a first control command to the data acquisition unit to trigger the data acquisition unit to acquire the surface morphology parameter data of the composite substrate and the feature parameters of the composite substrate, so as to obtain the surface morphology parameter dataset and the feature parameter dataset; Send a second control command to the data processing unit to trigger the data processing unit to remove invalid BOW values ​​from the BOW value dataset to obtain a valid BOW value dataset; A third control command is sent to the residual stress acquisition unit to trigger the residual stress acquisition unit to execute the residual stress distribution of the composite substrate based on the effective BOW value in the effective BOW value dataset and the feature parameter data in the feature parameter dataset.

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