Photoresist film thickness control method, control device and coating equipment

Abstract

The invention provides a photoresist film thickness control method, a photoresist film thickness control device and coating equipment. The method is applied to a control system of the coating equipment. The method comprises the following steps: detecting the balance of a first batch of photoresist material to be used; in response to the condition that the allowance of the first batch of photoresist material meets a preset replacement condition, indicating the coating equipment to execute film thickness detection to obtain film thickness data of coating of a second batch of photoresist material; wherein the coating equipment automatically starts to use the second batch of photoresist materials after the allowance meets the replacement condition; calculating a corresponding rotating speed parameter according to the film thickness data, and indicating the coating equipment to update the rotating speed parameter; and indicating the coating equipment to execute film thickness detection on the photoresist film formed after the rotating speed parameter is updated until the detected film thickness data belongs to a target film thickness range.

Description

Technical Field

[0001] This application relates to the semiconductor field, specifically to a method, control device, and coating equipment for controlling the thickness of a photoresist film. Background Technology

[0002] In semiconductor photolithography, the thickness of the photoresist film directly affects its absorption and reflection of light, thus impacting the lithography resolution and even causing deviations between the photoresist film thickness and the photoresist pattern dimensions. To meet the requirements of the photolithography process and ensure consistency between the photoresist layer thickness and pattern dimensions, the photoresist film thickness must also possess good stability. The photoresist film thickness may be affected by batch variations in the photoresist raw material.

[0003] In related technologies, the photoresist film thickness is typically monitored by periodic checks or by manually starting a measurement machine. However, these methods have limitations and cannot meet the need for timely adjustments to the photoresist film thickness, resulting in decreased stability of the product's photoresist film thickness or additional waste of manpower. Summary of the Invention

[0004] In view of this, embodiments of this application provide a method, control device, and coating equipment for controlling the thickness of a photoresist film.

[0005] In a first aspect, embodiments of this application provide a method for controlling the thickness of a photoresist film, the method being applied to a control system of a coating equipment, the method comprising:

[0006] In response to the detection of photoresist material replacement, the coating equipment is instructed to perform a first film thickness detection to obtain the first film thickness data of the photoresist material coating.

[0007] Determine whether the first film thickness data belongs to the target film thickness range;

[0008] In response to the first film thickness data not falling within the target film thickness range, the coating equipment is instructed to update the corresponding rotation speed parameters based on the first film thickness data.

[0009] In some embodiments, the method further includes:

[0010] In response to the coating equipment updating the rotation speed parameter, the coating equipment is instructed to perform a second film thickness detection to obtain film thickness data;

[0011] Determine whether the second film thickness data belongs to the target film thickness range;

[0012] In response to the second film thickness data not belonging to the target film thickness range, the coating equipment is instructed to update the corresponding rotation speed parameter according to the second film thickness data until the detected second film thickness data belongs to the target film thickness range;

[0013] In response to the first film thickness data or the second film thickness data belonging to the target film thickness range, the rotation speed parameter is stopped from being updated.

[0014] In some embodiments, after the first film thickness detection and / or the second film thickness detection, the method further includes:

[0015] Determine whether the detected first film thickness data and / or second film thickness data comply with film thickness safety specifications;

[0016] If either the first film thickness data or the second film thickness data does not conform to the film thickness safety specification, the coating equipment is controlled to stop the coating operation and output a prompt message.

[0017] In some embodiments, determining whether the detected first film thickness data and / or second film thickness data comply with film thickness safety specifications includes one or more of the following:

[0018] Determine whether the first film thickness data or the second film thickness data meets the preset film thickness safety range;

[0019] Determine whether the change in film thickness between the first film thickness data or the second film thickness data and the first film thickness data or the second film thickness data obtained from the previous film thickness detection meets the preset range of film thickness change.

[0020] In some embodiments, prior to performing the first film thickness detection or the second film thickness detection, the method further includes:

[0021] Determine whether the coating equipment meets the detection conditions; wherein, the detection conditions include: the rotation speed parameter of the current coating equipment meets the preset rotation speed monitoring range, and / or the current coating equipment includes photoresist material whose coated film thickness is within the preset thickness monitoring range;

[0022] In response to the coating equipment meeting the detection conditions, the coating equipment is instructed to perform either the first film thickness detection or the second film thickness detection.

[0023] In some embodiments, the method further includes:

[0024] Calculate the corresponding rotational speed to be determined based on the first film thickness data or the second film thickness data;

[0025] Determine whether the desired rotational speed conforms to the preset rotational speed safety specifications;

[0026] In response to the condition that the desired rotational speed meets the rotational speed safety specifications, the rotational speed parameters to be used are determined based on preset confidence parameters and the desired rotational speed.

[0027] In some embodiments, determining whether the desired rotational speed conforms to a preset rotational speed safety specification includes one or more of the following:

[0028] Determine whether the desired rotational speed conforms to the preset safe rotational speed range;

[0029] Determine whether the change in rotational speed between the desired rotational speed and the current rotational speed of the coating equipment conforms to a preset range of rotational speed change.

[0030] In some embodiments, the method further includes:

[0031] If the desired rotational speed does not meet the rotational speed safety specifications, the current rotational speed is maintained and a prompt message is output.

[0032] In some embodiments, the method further includes:

[0033] Detect the first remaining amount of the photoresist material in the container to be used;

[0034] In response to the first margin being less than or equal to the first threshold, real-time monitoring of the coating amount of the coating equipment is initiated.

[0035] In response to the coating amount reaching a preset second threshold, it is determined that the photoresist material needs to be replaced; wherein the second threshold is greater than or equal to the pipeline storage capacity of the coating equipment.

[0036] In some embodiments, starting real-time monitoring of the coating amount of the coating equipment includes:

[0037] The number of sprays applied by the coating equipment is obtained;

[0038] The coating amount is determined based on the number of spraying operations and the amount of coating applied in each spraying operation.

[0039] Secondly, embodiments of this application also provide a photoresist film thickness control device, which is applied to the control system of a coating equipment; the device includes:

[0040] The first film thickness detection module is used to instruct the coating equipment to perform the first film thickness detection in response to the detection of photoresist material replacement, so as to obtain the first film thickness data of the photoresist material coating.

[0041] The film thickness determination module is used to determine whether the first film thickness data belongs to the target film thickness range;

[0042] The rotation speed adjustment module is used to, in response to the first film thickness data not falling within the target film thickness range, instruct the coating equipment to update the corresponding rotation speed parameters based on the first film thickness data.

[0043] In some embodiments, the control device further includes:

[0044] The second film thickness detection module is used to respond to the coating equipment updating the rotation speed parameter, instruct the coating equipment to perform a second film thickness detection, and obtain film thickness data;

[0045] The film thickness determination module is also used to determine whether the second film thickness data belongs to the target film thickness range;

[0046] The speed adjustment module is also used to, in response to the second film thickness data not belonging to the target film thickness range, instruct the coating equipment to update the corresponding speed parameters according to the second film thickness data until the detected second film thickness data belongs to the target film thickness range;

[0047] The speed adjustment module is also used to stop updating the speed parameters in response to the first film thickness data or the second film thickness data belonging to the target film thickness range.

[0048] In some embodiments, the film thickness determination module is further configured to determine, after the first film thickness detection and / or the second film thickness detection, whether the detected first film thickness data and / or the second film thickness data comply with the film thickness safety specifications.

[0049] The device further includes a control module, which, in response to the first film thickness data or the second film thickness data not conforming to the film thickness safety specification, controls the coating equipment to stop the coating operation and outputs a prompt message.

[0050] In some embodiments, the film thickness determination module is specifically used to determine one or more of the following:

[0051] Determine whether the first film thickness data or the second film thickness data meets the preset film thickness safety range;

[0052] Determine whether the change in film thickness between the first film thickness data or the second film thickness data and the first film thickness data or the second film thickness data obtained from the previous film thickness detection meets the preset range of film thickness change.

[0053] In some embodiments, the apparatus further includes a detection and verification module for performing the first film thickness detection or the second film thickness detection before...

[0054] Determine whether the coating equipment meets the detection conditions; wherein, the detection conditions include: the rotation speed parameter of the current coating equipment meets the preset rotation speed monitoring range, and / or the current coating equipment includes photoresist material whose coated film thickness is within the preset thickness monitoring range;

[0055] In response to the coating equipment meeting the detection conditions, the coating equipment is instructed to perform either the first film thickness detection or the second film thickness detection.

[0056] In some embodiments, the speed adjustment module includes:

[0057] The calculation unit calculates the corresponding rotational speed to be determined based on the first film thickness data or the second film thickness data;

[0058] The rotational speed determination unit determines whether the rotational speed to be determined conforms to the preset rotational speed safety specifications;

[0059] The determining unit, in response to the fact that the speed to be determined conforms to the speed safety specification, determines the speed parameter to be used based on the preset confidence parameter and the speed to be determined.

[0060] In some embodiments, the rotational speed determination unit is specifically used to determine one or more of the following:

[0061] Determine whether the desired rotational speed conforms to the preset safe rotational speed range;

[0062] Determine whether the change in rotational speed between the desired rotational speed and the current rotational speed of the coating equipment conforms to a preset range of rotational speed change.

[0063] In some embodiments, the determining unit is further configured to maintain the current speed and output a prompt message in response to the unknown speed not conforming to the speed safety specification.

[0064] In some embodiments, the apparatus further includes a replacement determination module, the replacement determination module comprising:

[0065] A container balance detection unit is used to detect the first balance in the container of the photoresist material to be used.

[0066] The monitoring unit is configured to start real-time monitoring of the coating amount of the coating equipment in response to the first margin being less than or equal to the first threshold.

[0067] A replacement determination unit is used to determine that the photoresist material needs to be replaced in response to the coating amount reaching a preset second threshold; wherein the second threshold is greater than or equal to the pipeline storage capacity of the coating equipment.

[0068] In some embodiments, the monitoring unit is specifically used for

[0069] The number of sprays applied by the coating equipment is obtained;

[0070] The coating amount is determined based on the number of spraying operations and the amount of coating applied in each spraying operation.

[0071] Thirdly, embodiments of this application also provide a photoresist material coating apparatus, comprising:

[0072] A control system, wherein the control system is used to execute the control method described above;

[0073] A photoresist material container, comprising a container for one or more photoresist materials;

[0074] The coating apparatus is connected to the photoresist material container via a pipeline and is used to perform the coating operation;

[0075] The operating chamber is used to house the coating device and the target product to be coated.

[0076] The photoresist film thickness control method provided in this application automatically performs film thickness detection when a change in photoresist material is detected, and updates the rotation speed parameters of the coating equipment based on the film thickness data obtained from the detection. Thus, by automatically triggering detection and timely updating the rotation speed parameters through photoresist material replacement, the coating process parameters can be adjusted promptly, reducing the risk of changes in photoresist film thickness and product yield loss due to batch changes in photoresist materials. Furthermore, it eliminates the need for manual machine start-up, reducing manpower waste and improving production efficiency. Attached Figure Description

[0077] Figure 1 A schematic diagram of the steps of a method for controlling the thickness of a photoresist film provided in this application embodiment. Figure 1 ;

[0078] Figure 2 A schematic diagram of the steps of a method for controlling the thickness of a photoresist film provided in this application embodiment. Figure 2 ;

[0079] Figure 3 A schematic diagram of the steps of a method for controlling the thickness of a photoresist film provided in this application embodiment. Figure 3 ;

[0080] Figure 4 A schematic diagram of the steps of a method for controlling the thickness of a photoresist film provided in this application embodiment. Figure 4 ;

[0081] Figure 5 A schematic diagram of the steps of a method for controlling the thickness of a photoresist film provided in this application embodiment. Figure 5 ;

[0082] Figure 6 A schematic diagram of the steps of a method for controlling the thickness of a photoresist film provided in this application embodiment. Figure 6 ;

[0083] Figure 7 A schematic diagram of the steps of a method for controlling the thickness of a photoresist film provided in this application embodiment. Figure 7 ;

[0084] Figure 8 A schematic diagram illustrating the relationship between photoresist film thickness and rotation speed provided in this application embodiment. Figure 1 ;

[0085] Figure 9 A schematic diagram of the steps of a method for controlling the thickness of a photoresist film provided in this application embodiment. Figure 8 ;

[0086] Figure 10 A schematic diagram of the steps of a method for controlling the thickness of a photoresist film provided in this application embodiment. Figure 9 ;

[0087] Figure 11 A schematic diagram of the steps of a method for controlling the thickness of a photoresist film provided in this application embodiment. Figure 10 ;

[0088] Figure 12 A schematic diagram of the steps of a method for controlling the thickness of a photoresist film provided in this application embodiment. Figure 10 one;

[0089] Figure 13 A schematic diagram of the steps of a method for controlling the thickness of a photoresist film provided in this application embodiment. Figure 10 two;

[0090] Figures 14A to 14B A schematic diagram of the steps of a method for controlling the thickness of a photoresist film provided in this application embodiment. Figure 10 three;

[0091] Figure 15 A flowchart illustrating a method for controlling the thickness of a photoresist film provided in this application embodiment. Figure 1 ;

[0092] Figure 16 A schematic diagram of a photoresist film thickness control device provided in an embodiment of this application;

[0093] Figure 17 This is a schematic diagram of a photoresist coating device provided in an embodiment of this application. Detailed Implementation

[0094] To facilitate understanding of this application, exemplary embodiments disclosed herein will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of this application are shown in the drawings, it should be understood that this application can be implemented in various forms and should not be limited to the specific embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of this application and to fully convey the scope of the disclosure of this application to those skilled in the art.

[0095] In the following description, numerous specific details are set forth in order to provide a more thorough understanding of this application. However, it will be apparent to those skilled in the art that this application can be practiced without one or more of these details. In some embodiments, to avoid confusion with this application, some technical features well-known in the art are not described; that is, not all features of the actual embodiments may be described herein, nor well-known functions and structures may be described in detail.

[0096] Generally, terms can be understood at least in part from their use in context. For example, depending at least in part on the context, the term "one or more" as used herein can be used to describe any feature, structure, or characteristic in a singular sense, or it can be used to describe a combination of features, structures, or characteristics in a plural sense. Similarly, terms such as "a" or "described" can also be understood to convey either a singular or a plural usage, depending at least in part on the context. Additionally, the use of "based on" can be understood to not necessarily convey an exclusive set of factors, and can alternatively allow for the presence of additional factors that are not necessarily explicitly described, also depending at least in part on the context.

[0097] Unless otherwise defined, the terminology used herein is intended only to describe particular embodiments and is not intended to limit the scope of this application. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising” and / or “including,” when used in this specification, identify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0098] To fully understand this application, detailed steps and structures will be presented in the following description to illustrate the technical solution of this application. Preferred embodiments of this application are described in detail below; however, in addition to these detailed descriptions, this application may have other implementation methods.

[0099] In semiconductor photolithography, ensuring the precision of the process and the performance of the final product requires that the photoresist film thickness meets certain requirements. Deviations in photoresist film thickness can lead to inaccuracies in the photoresist layer thickness and pattern dimensions, reducing the yield and reliability of semiconductor products. Generally, film thickness is managed by periodically monitoring it and having engineers adjust the coating machine parameters offline based on the measurement results. While this method can increase film thickness stability to some extent, it also suffers from the inability to monitor and adjust in real time. Specifically, this method cannot promptly detect batch changes in photoresist raw materials. Slight differences in composition ratios or properties between different batches of photoresist material can result in different film thicknesses when coating with the same parameters after a batch change. Therefore, it may be necessary to adjust the coating equipment's process parameters according to the characteristics of the new batch of photoresist material to maintain the same film thickness after batch change. On the one hand, extending the periodic monitoring and adjustment cycle of film thickness makes it difficult to detect thickness changes in a timely manner, hindering the improvement of photoresist film thickness stability and increasing the risk of deviations in photoresist pattern dimensions. On the other hand, simply increasing the frequency of monitoring and adjustment to achieve timely adjustments to the coating machine parameters will severely reduce machine capacity and increase production costs. Furthermore, relying on engineers to directly adjust the coating machine parameters may increase the risk of human error, not only increasing the workload of engineers but also hindering the improvement of film thickness control reliability.

[0100] In view of this, embodiments of this application provide a method for controlling the thickness of a photoresist film, which can be applied to the control system of a coating equipment. For example... Figure 1 As shown, the method for controlling the thickness of the photoresist film includes the following steps.

[0101] Step S101: In response to the detection of photoresist material replacement, instruct the coating equipment to perform the first film thickness detection to obtain the first film thickness data of the photoresist material coating.

[0102] Step S102: Determine whether the first film thickness data belongs to the target film thickness range.

[0103] Step S103: In response to the first film thickness data not being within the target film thickness range, the coating equipment is instructed to update the corresponding rotation speed parameters based on the first film thickness data.

[0104] The first film thickness measurement can be performed using the Resist Thickness Monitor (RTM) unit in the coating equipment. Specifically, the sample stage in the coating equipment is moved so that the point to be measured is aligned with the measurement probe of the RTM. The probe light emitted by the measurement probe is reflected by the wafer surface and received by the detector. By analyzing the intensity and phase of the reflected light, the thickness of the photoresist film on the wafer surface is calculated. By moving the sample stage, multiple single-point film thickness data can be obtained on the wafer surface. The film thickness data obtained from the film thickness measurement is then automatically uploaded to the control system and saved. The first film thickness data can be the original multiple single-point film thickness data, or it can be statistical data obtained by analyzing and processing the original data, such as the average film thickness or standard error (used to characterize the uniformity of film thickness). The target film thickness range refers to the range of photoresist film thickness that meets the current product process requirements. Different products or different process steps may require different photoresist film thicknesses. Therefore, the target film thickness range can be determined according to the settings of the current coating equipment. Specifically, the target film thickness range can include the single-point target film thickness range, the average film thickness range, and the uniformity index range.

[0105] By determining whether the first film thickness data falls within the target film thickness range through step S102, it can be determined whether the corresponding rotation speed parameters need to be updated based on the first film thickness data. For example, it is determined whether the average film thickness of the photoresist falls within its average film thickness range. If the average film thickness is too large or too small and does not fall within the average film thickness range, the rotation speed parameters of the coating equipment are adjusted according to the average film thickness so that the photoresist film thickness formed by coating operations using the updated rotation speed parameters falls within the target film thickness range. It should be noted that determining whether to adjust the rotation speed parameters based on the average film thickness is only illustrative; in actual operation, multiple indicators can be combined for judgment. The rotation speed parameters may include the main coating speed, acceleration, and other relevant parameters such as uniform coating time, spray volume, or nozzle flow rate.

[0106] The photoresist film thickness control method provided in this application automatically performs film thickness detection when a change in photoresist material is detected, and updates the rotation speed parameters of the coating equipment based on the film thickness data obtained from the detection. Thus, by automatically triggering detection and timely updating the rotation speed parameters through photoresist material replacement, the coating process parameters can be adjusted promptly, reducing the risk of changes in photoresist film thickness and product yield loss due to batch changes in photoresist materials. Furthermore, it eliminates the need for manual machine start-up, reducing manpower waste and improving production efficiency.

[0107] In some embodiments, such as Figure 2 As shown, the above-mentioned method for controlling the thickness of the photoresist film also includes the following steps.

[0108] Step S201: In response to the coating equipment updating the rotation speed parameters, instruct the coating equipment to perform a second film thickness detection to obtain the second film thickness data.

[0109] Step S202: Determine whether the second film thickness data belongs to the target film thickness range.

[0110] Step S203: In response to the second film thickness data not being within the target film thickness range, the coating equipment is instructed to update the corresponding rotation speed parameters according to the second film thickness data until the detected second film thickness data is within the target film thickness range.

[0111] Step S204: In response to the first film thickness data or the second film thickness data belonging to the target film thickness range, stop updating the rotation speed parameters.

[0112] To confirm whether the adjusted rotation speed parameters can make the coated film thickness fall within the target film thickness range using the photoresist material (the replaced photoresist material), the coating operation can be performed based on the updated rotation speed parameters after updating the rotation speed parameters, and a second film thickness detection can be performed.

[0113] If the second film thickness data obtained from the second film thickness detection falls within the target film thickness range, it is considered that a photoresist film within the target film thickness range can be obtained under the current rotation speed parameters and the photoresist material after batch replacement. The rotation speed parameters can then be stopped from being updated, and subsequent coating operations can be performed using these parameters. Similarly, if the first film thickness data obtained from the first film thickness detection falls within the target film thickness range, it is considered that a photoresist film within the target film thickness range can be obtained under the original rotation speed parameters and the photoresist material after batch replacement, and no adjustment of the rotation speed parameters is necessary.

[0114] If the second film thickness data obtained by the second film thickness detection does not fall within the target film thickness range, it is considered that the updated rotation speed parameter still cannot meet the target requirements, and the rotation speed parameter needs to be further adjusted until the photoresist film thickness obtained by coating using the rotation speed parameter falls within the target film thickness range.

[0115] In some embodiments, such as Figure 3 As shown, after the first film thickness detection and / or the second film thickness detection, the above-mentioned method for controlling the photoresist film thickness further includes the following steps:

[0116] Step S301: Determine whether the detected first film thickness data and / or second film thickness data comply with the film thickness safety specifications.

[0117] Step S302: In response to the first film thickness data or the second film thickness data not conforming to the film thickness safety specification, the coating equipment is controlled to stop the coating operation and output a prompt message.

[0118] To ensure that the parameters set by the control system for the coating equipment meet the general requirements for forming photoresist films, the film thickness must meet certain safety specifications. Otherwise, if the parameters set by the control system are abnormal, for example, exceeding the safe operating range of the equipment, it can easily lead to equipment downtime or product abnormalities during subsequent manufacturing processes. Therefore, if the film thickness data obtained from the measurement does not meet the safety specifications, it indicates that there may have been an error in the previous calculations or equipment operation. In this case, the coating equipment can be stopped, and relevant prompts should be output, awaiting confirmation from engineers for further processing.

[0119] In one embodiment, the control system can access the database of the control system at regular intervals (e.g., 10 seconds) to obtain film thickness data (first film thickness data or second film thickness data) obtained from film thickness detection, and determine whether the film thickness data conforms to a preset film thickness safety range. Step S102, determining whether the first film thickness data belongs to the target film thickness range, or step S202, determining whether the second film thickness data belongs to the target film thickness range, specifically includes: step S303, in response to the first film thickness data or the second film thickness data conforming to the film thickness safety specification, determining whether the first film thickness data or the second film thickness data belongs to the target film thickness range. Figure 4 As shown, if the first film thickness data or the second film thickness data meets the film thickness safety specifications, then step S303 is executed. If the first film thickness data or the second film thickness data does not belong to the target film thickness range, then step S304 is executed to update the corresponding rotation speed parameters based on the film thickness data (first film thickness data or second film thickness data) obtained from the film thickness detection, so that the film thickness data (first film thickness data or second film thickness data) of the photoresist film formed after updating the rotation speed parameters belongs to the target film thickness range.

[0120] In other embodiments, after performing step S102 (determining whether the first film thickness data belongs to the target film thickness range) or step S202 (determining whether the second film thickness data belongs to the target film thickness range), if the first film thickness data or the second film thickness data does not belong to the target film thickness range, then step S301 is performed to determine whether the detected first film thickness data and / or second film thickness data conform to the film thickness safety specification. If it conforms to the film thickness safety specification, then the coating equipment is instructed to update the corresponding rotation speed parameters based on the first film thickness data or the second film thickness data.

[0121] In some embodiments, such as Figure 5 As shown, in step S301 above, determining whether the detected first film thickness data and / or second film thickness data comply with film thickness safety specifications includes one or more of the following:

[0122] Step S501: Determine whether the first film thickness data or the second film thickness data meets the preset film thickness safety range.

[0123] Step S502: Determine whether the change in film thickness between the first film thickness data or the second film thickness data and the first film thickness data or the second film thickness data obtained from the previous film thickness detection meets the preset range of film thickness change.

[0124] On the one hand, the inherent thickness of the photoresist film can be used as an evaluation standard for film thickness safety specifications. On the other hand, the difference in film thickness data obtained from two consecutive film thickness tests (the amount of film thickness change) can be used as an evaluation standard for film thickness safety specifications to ensure the stability of the photoresist film thickness and the process. Either step S501 or S502 above can be used as a basis for judging whether the film thickness data meets the film thickness safety specifications.

[0125] In some embodiments, after performing the above steps S501 and / or S502, the method further includes step S302: in response to the first film thickness data or the second film thickness data not conforming to the film thickness safety specification, the coating equipment is controlled to stop the coating operation and output a prompt message.

[0126] In some embodiments, after performing steps S501 and / or S502, the method further includes updating the corresponding rotational speed parameters based on the film thickness data in response to the film thickness data conforming to the film thickness safety specification. Specifically, in response to the film thickness data conforming to the film thickness safety range, it is determined whether the film thickness data belongs to the target film thickness range. Alternatively, in response to the film thickness change between the film thickness data and the film thickness data obtained from the previous film thickness detection conforming to a preset film thickness change range, it is determined whether the film thickness data belongs to the target film thickness range. Alternatively, in response to the film thickness data conforming to the film thickness safety range and the film thickness change conforming to the film thickness change range, it is determined whether the film thickness data belongs to the target film thickness range.

[0127] In some embodiments, such as Figure 6 As shown, before performing the first film thickness detection or the second film thickness detection, the above control method further includes the following steps.

[0128] Step S601: Determine whether the coating equipment meets the detection conditions. The detection conditions include: the rotation speed parameter of the current coating equipment meets the preset rotation speed monitoring range, and / or the current coating equipment contains photoresist material with a coated film thickness within the preset thickness monitoring range.

[0129] Step S602: In response to the coating equipment meeting the detection conditions, instruct the coating equipment to perform a first film thickness detection or a second film thickness detection.

[0130] The rotation speed monitoring range refers to the maximum or minimum permissible rotation speed range of the coating machine when spin-coating photoresist. If the rotation speed exceeds the set monitoring range, it may affect equipment safety. Similarly, the film thickness monitoring range refers to the maximum or minimum permissible range of photoresist film thickness. Likewise, if the film thickness exceeds the thickness monitoring range, it may also affect equipment safety.

[0131] In some embodiments, after performing step S103 above and updating the rotation speed parameters in the coating equipment, it is necessary to further determine whether the current rotation speed parameters (updated rotation speed parameters) exceed the rotation speed monitoring range and whether the film thickness exceeds the film thickness monitoring range, in order to determine whether film thickness detection needs to be performed on the photoresist film formed after updating the rotation speed parameters. If the rotation speed does not exceed the rotation speed monitoring range and the film thickness does not exceed the film thickness monitoring range, it can be considered that the updated rotation speed parameters and film thickness will not affect equipment safety, and subsequent film thickness detection can be performed.

[0132] In one specific embodiment, after performing step S103 (or step S203) above, it is only determined whether the current rotational speed parameter of the coating equipment exceeds the rotational speed monitoring range. Then, step S602 specifically includes: in response to the current rotational speed parameter of the coating equipment meeting the preset rotational speed monitoring range, instructing the coating equipment to perform a first film thickness detection or a second film thickness detection.

[0133] In another specific embodiment, after performing step S103 (or step S203) above, it is only determined whether the film thickness exceeds the film thickness monitoring range. Then step S602 includes: in response to the fact that the current coating equipment contains photoresist material whose coated film thickness is within the preset thickness monitoring range, instructing the coating equipment to perform a first film thickness detection or a second film thickness detection.

[0134] In another specific embodiment, after performing step S103 (or step S203) above, it is determined whether the current rotation speed parameter of the coating equipment exceeds the rotation speed monitoring range, and whether the film thickness exceeds the film thickness monitoring range. Then, step S602 includes: in response to the current rotation speed parameter of the coating equipment meeting the preset rotation speed monitoring range, and the current coating equipment containing photoresist material with a film thickness within the preset thickness monitoring range, instructing the coating equipment to perform film thickness detection. If the rotation speed does not exceed the rotation speed monitoring range, and the film thickness does not exceed the film thickness monitoring range, it can be considered that the updated rotation speed parameter and film thickness will not affect equipment safety, and subsequent film thickness detection can be performed.

[0135] In some embodiments, such as Figure 7 As shown, the above control method also includes the following steps.

[0136] Step S701: Calculate the corresponding rotational speed to be determined based on the first film thickness data or the second film thickness data.

[0137] Step S702: Determine whether the speed to be determined conforms to the preset speed safety specifications.

[0138] Step S703: In response to the fact that the speed to be determined meets the speed safety specifications, the speed parameters to be used are determined according to the preset confidence parameters and the speed to be determined.

[0139] In some embodiments, the corresponding rotational speed w can be calculated based on the film thickness data obtained from the film thickness test and the following formula (1).

[0140]

[0141] Where c is the weighting coefficient (which can be fixed for a given photoresist, coating equipment, and uniform coating time); t is the film thickness. This weighting coefficient can also be obtained through periodic experimental testing.

[0142] Figure 8 The diagram illustrates the relationship between the rotational speed of photoresist A and its film thickness. The horizontal axis represents the rotational speed of the coating machine, and the vertical axis represents the film thickness of photoresist A. For different photoresists, the corresponding coating machine rotational speed can vary. In this embodiment, the coating machine rotational speed for photoresist A is between 800 and 3000 revolutions per minute (RPM).

[0143] The calculated desired rotational speed may be too high or too low, or even exceed the operating range of the coating equipment. Directly applying the calculated desired rotational speed during coating operations may damage the coating equipment. The desired rotational speed parameter can be obtained based on the calculated desired rotational speed and preset confidence parameters, and the original rotational speed parameters in the control system can be updated. It should be noted that this update only updates the original rotational speed parameters in the control system and does not update the operating rotational speed of the coating and developing machine (or spin coater).

[0144] It is understood that the aforementioned rotational speed parameters to be used have a one-to-one correspondence with the film thickness data obtained from film thickness detection. In some embodiments, there may be situations where multiple second film thickness tests need to be performed, and the control system always calculates the corresponding undetermined rotational speed and rotational speed parameters based on the latest second film thickness data.

[0145] In some embodiments, such as Figure 9 As shown, step S702 above, determining whether the speed to be determined conforms to the preset speed safety specifications, includes one or more of the following:

[0146] Step S901: Determine whether the speed to be determined meets the preset safe speed range.

[0147] Step S902: Determine whether the change in rotational speed between the desired rotational speed and the current rotational speed of the coating equipment conforms to the preset range of rotational speed change.

[0148] If the calculated rotational speed is too high or too low, it may exceed the operating range of the coating equipment and affect its normal operation. Similarly, if the difference between the calculated rotational speed and the current rotational speed of the coating equipment is too large or too small, it will also affect the film thickness and the stability of the coating equipment. Either step S901 or S902 can be used as a basis for determining whether the film thickness data meets the preset rotational speed safety specifications.

[0149] In some embodiments, in response to the expected rotational speed falling within a preset rotational speed safety range, a rotational speed parameter to be used is determined based on a preset confidence parameter. Specifically, this includes: determining the rotational speed parameter to be used based on a preset confidence parameter in response to the expected rotational speed falling within a preset rotational speed safety range; or, determining the rotational speed parameter to be used based on a preset confidence parameter in response to the rotational speed change between the expected rotational speed and the current rotational speed of the coating equipment falling within a preset rotational speed change range; or, determining the rotational speed parameter to be used based on a preset confidence parameter in response to both the expected rotational speed falling within a preset rotational speed safety range and the rotational speed change between the expected rotational speed and the current rotational speed of the coating equipment falling within a preset rotational speed change range.

[0150] In some embodiments, such as Figure 10 As shown, the above control method also includes the following steps.

[0151] Step S1001: In response to the unknown speed not conforming to the speed safety specification, maintain the current speed and output a prompt message.

[0152] In step S1001 above, specifically, it may include: maintaining the current speed and outputting a prompt message in response to the pending rotational speed not conforming to a preset safe rotational speed range; or maintaining the current rotational speed and outputting a prompt message in response to the rotational speed change between the pending rotational speed and the current rotational speed of the coating equipment not conforming to a preset range of rotational speed change; or maintaining the current rotational speed and outputting a prompt message in response to the pending rotational speed not conforming to a preset safe rotational speed range, or in response to the rotational speed change between the pending rotational speed and the current rotational speed of the coating equipment not conforming to a preset range of rotational speed change.

[0153] In some embodiments, such as Figure 11 As shown, the above control method also includes the following steps.

[0154] Step S1101: Detect the first remaining amount of the photoresist material in the container to be used.

[0155] Step S1102: In response to the first margin being less than or equal to the first threshold, start real-time monitoring of the coating amount of the coating equipment.

[0156] Step S1103: In response to the coating amount reaching a preset second threshold, the photoresist material is determined to be replaced. The second threshold is greater than or equal to the pipeline storage capacity of the coating equipment.

[0157] In some embodiments, the control method further includes determining that the photoresist material has not been replaced in response to the coating amount not reaching the pipeline residual amount, and continuing to monitor the coating amount of the coating equipment.

[0158] A first residual amount in the container used to store photoresist material can be detected. When the first residual amount in the container is less than or equal to a first threshold, the container cannot supply any more photoresist material of that batch, and a portion of that batch of photoresist material still exists in the tubing of the coating equipment (i.e., the tubing storage amount). Furthermore, the tubing storage amount is generally relatively fixed (e.g., 500 ml). At this point, by comparing the coating amount of the coating equipment (i.e., the amount of photoresist material consumed) with the tubing storage amount, it can be confirmed whether the photoresist material used for coating is the remaining portion of that batch of photoresist material in the tubing, or whether the coating equipment is using a new batch of photoresist material for the coating operation.

[0159] In other embodiments, the photoresist container can be replaced manually by plugging and unplugging the tube to provide a new batch of photoresist material. However, the tube supplying the photoresist material will retain some material from the previous batch. If film thickness testing is performed immediately after replacing the photoresist container, the photoresist material actually used will still be from the previous batch. This results in the film thickness data obtained from the film thickness test not accurately reflecting the characteristics of the new batch of photoresist material, which is detrimental to the control of the photoresist film thickness. The coating amount of the coating equipment can be monitored by the control system. Film thickness testing should be performed promptly when it is determined that the remaining photoresist material from the previous batch in the tube has been exhausted.

[0160] In some embodiments, such as Figure 12 As shown, the above control method also includes the following steps.

[0161] Step S1201: In response to the replacement of the photoresist container, start real-time monitoring of the coating amount of the coating equipment.

[0162] Step S1103: In response to the coating amount reaching the preset second threshold, the photoresist material is replaced.

[0163] In some embodiments, such as Figure 13 As shown, in step S1102 or step S1201 above, the coating amount of the coating equipment is monitored in real time, which specifically includes the following steps.

[0164] Step S1301: Obtain the number of sprays from the coating equipment.

[0165] Step S1302: Determine the coating amount based on the number of spraying times and the amount of coating applied each time.

[0166] For example, for a 300mm wafer, the amount of coating applied each time may be between 0.5ml and 4ml. The number of coatings and the amount of coating applied each time can be read by the glue pump control program and accumulated to obtain the total coating amount within the monitoring period.

[0167] Figure 14A and Figure 14B This illustration shows a step diagram of a method for controlling the thickness of a photoresist film according to an embodiment of this application; Figure 15 A flowchart illustrating a method for controlling photoresist film thickness according to an embodiment of this application is shown. In one specific embodiment, as... Figure 14A , Figure 14B and Figure 15 As shown, the method for controlling the thickness of the photoresist film includes the following steps S11 to S25:

[0168] Step S11: Detect the first remaining amount of the photoresist material in the container to be used.

[0169] Step S12: In response to the first margin being less than or equal to a first threshold, the number of coating operations performed by the coating equipment is obtained. For example, when the control system detects that the first margin in the container is equal to 0, the number of coating operations performed by the coating equipment is obtained.

[0170] Step S13: Determine the coating amount based on the number of sprays and the amount of coating applied each time.

[0171] Step S14: In response to the coating amount reaching the preset second threshold, the photoresist material is determined to be replaced, and the coating equipment is instructed to perform the first film thickness detection to obtain the first film thickness data.

[0172] Step S15: Determine whether the first film thickness data meets the preset film thickness safety range.

[0173] Step S16: Determine whether the change in film thickness between the film thickness data and the film thickness data obtained from the previous film thickness detection meets the preset range of film thickness change.

[0174] It is understood that the embodiments of this application do not limit the specific execution order of the above steps S15 and S16.

[0175] Step S17: In response to the film thickness data being within the preset film thickness safety range, and the film thickness change between the film thickness data and the film thickness data obtained from the previous film thickness detection also being within the preset film thickness change range, determine whether the film thickness data belongs to the target film thickness range.

[0176] Step S18: In response to the film thickness data falling within the target film thickness range, instruct the coating equipment to continue the coating operation with the current rotation speed parameters.

[0177] Step S19: In response to the film thickness data not falling within the target film thickness range, calculate the corresponding undetermined rotation speed based on the film thickness data.

[0178] After completing step S19, proceed to steps S20 and S21:

[0179] Step S20: Determine whether the speed to be determined meets the preset safe speed range.

[0180] Step S21: Determine whether the change in rotational speed between the desired rotational speed and the current rotational speed of the coating equipment conforms to the preset range of rotational speed change.

[0181] After completing steps S20 and S21, proceed to step S22. In response to the fact that the speed to be determined meets the preset speed safety range and the speed change between the speed to be determined and the current speed of the coating equipment meets the preset speed change range, the speed parameter to be used is determined according to the preset confidence parameter.

[0182] Additionally, refer to Figure 15 If the speed to be determined does not meet the preset safe speed range, or if the speed change between the speed to be determined and the current speed of the coating equipment does not meet the preset speed change range, the coating equipment will be controlled to stop the coating operation and output a prompt message.

[0183] After completing step S22, proceed to steps S23 and S24:

[0184] Step S23: The rotation speed parameters of the current coating equipment meet the preset rotation speed monitoring range.

[0185] Step S24: The current coating equipment contains photoresist material whose film thickness is within the preset thickness monitoring range.

[0186] Step S25: In response to the current rotation speed parameter of the coating equipment meeting the preset rotation speed monitoring range, and the current coating equipment including photoresist material whose film thickness is within the preset thickness monitoring range, the coating equipment is instructed to perform film thickness detection on the photoresist film formed after updating the rotation speed parameter.

[0187] After receiving the film thickness data corresponding to the new rotation speed parameter, return to steps S15 and S16 to determine whether the film thickness data meets the preset film thickness safety range, and determine whether the film thickness change between the film thickness data and the film thickness data obtained from the previous film thickness detection meets the preset film thickness change range, until step S18, where the film thickness data belongs to the target film thickness range.

[0188] Additionally, please continue to refer to Figure 15If the current rotational speed does not exceed the rotational speed monitoring threshold and the film thickness data does not exceed the film thickness monitoring threshold, it is considered that there is no need to perform film thickness detection again, and the operation ends.

[0189] This application also provides a photoresist film thickness control device, which is applied to the control system of a coating equipment; such as Figure 16 As shown, the device 160 includes:

[0190] The first film thickness detection module 161 is used to, in response to the detection of photoresist material replacement, instruct the coating equipment to perform the first film thickness detection to obtain the first film thickness data of the photoresist material coating.

[0191] The film thickness determination module 162 is used to determine whether the first film thickness data belongs to the target film thickness range.

[0192] The rotation speed adjustment module 163 is used to respond to the first film thickness data not being within the target film thickness range, and to instruct the coating equipment to update the corresponding rotation speed parameters according to the first film thickness data.

[0193] The photoresist film thickness control device 160 provided in this embodiment automatically performs a first film thickness detection module 161 when a change in photoresist material is detected, and updates the rotation speed parameters of the coating equipment based on the first film thickness data obtained from the first film thickness detection. Thus, by automatically triggering detection and timely updating the rotation speed parameters through photoresist material replacement, the coating process parameters can be adjusted promptly, reducing the risk of changes in photoresist film thickness and product yield loss due to batch changes in photoresist materials. Furthermore, it eliminates the need for manual machine start-up, reducing manpower waste and improving production efficiency.

[0194] In some embodiments, the control device further includes:

[0195] The second film thickness detection module is used to respond to the updated rotation speed parameters of the coating equipment, instruct the coating equipment to perform a second film thickness detection, and obtain film thickness data;

[0196] The film thickness determination module is also used to determine whether the second film thickness data belongs to the target film thickness range;

[0197] The speed adjustment module is also used to respond to the second film thickness data not being within the target film thickness range, and to instruct the coating equipment to update the corresponding speed parameters according to the second film thickness data until the detected second film thickness data is within the target film thickness range;

[0198] The speed adjustment module is also used to stop updating the speed parameters in response to the first film thickness data or the second film thickness data falling within the target film thickness range.

[0199] In some embodiments, the film thickness determination module is further configured to determine, after the first film thickness detection and / or the second film thickness detection, whether the detected first film thickness data and / or second film thickness data comply with the film thickness safety specification.

[0200] The device also includes a control module, which, in response to the first film thickness data or the second film thickness data not conforming to the film thickness safety specification, controls the coating equipment to stop the coating operation and outputs a prompt message.

[0201] In some embodiments, the film thickness determination module is specifically used to determine one or more of the following:

[0202] Determine whether the first film thickness data or the second film thickness data meets the preset film thickness safety range;

[0203] Determine whether the change in film thickness between the first or second film thickness data and the first or second film thickness data obtained from the previous film thickness detection meets the preset range of film thickness change.

[0204] In some embodiments, the apparatus further includes a detection verification module for performing a first film thickness detection or a second film thickness detection before...

[0205] Determine whether the coating equipment meets the testing conditions; wherein, the testing conditions include: the rotation speed parameter of the current coating equipment meets the preset rotation speed monitoring range, and / or the current coating equipment contains photoresist material whose coated film thickness is within the preset thickness monitoring range;

[0206] In response to the coating equipment meeting the testing conditions, the coating equipment is instructed to perform either a first film thickness test or a second film thickness test.

[0207] In some embodiments, the speed adjustment module includes:

[0208] The calculation unit calculates the corresponding rotational speed to be determined based on the first film thickness data or the second film thickness data;

[0209] The speed determination unit determines whether the speed to be determined conforms to the preset speed safety specifications;

[0210] The unit determines the speed parameters to be used based on preset confidence parameters and the speed to be determined, in response to the speed to be determined conforming to the speed safety specifications.

[0211] In some embodiments, the rotation speed determination unit is specifically used to determine one or more of the following:

[0212] Determine whether the speed to be determined meets the preset safe speed range;

[0213] Determine whether the change in rotational speed between the desired rotational speed and the current rotational speed of the coating equipment conforms to the preset range of rotational speed change.

[0214] In some embodiments, the determining unit is further configured to maintain the current speed and output a prompt message in response to the unknown speed not conforming to the speed safety specification.

[0215] In some embodiments, the apparatus further includes a replacement determining module, the replacement determining module comprising:

[0216] The container balance detection unit is used to detect the first balance of the photoresist material to be used in the container.

[0217] The monitoring unit is used to start real-time monitoring of the coating amount of the coating equipment in response to the first margin being less than or equal to the first threshold.

[0218] A replacement determination unit is used to determine the replacement of photoresist material in response to the coating amount reaching a preset second threshold; wherein the second threshold is greater than or equal to the pipeline storage capacity of the coating equipment.

[0219] In some embodiments, the monitoring unit is specifically used to acquire the number of sprays applied by the coating equipment;

[0220] The coating amount is determined based on the number of sprays and the amount of coating applied in each spray.

[0221] This application embodiment also provides a photoresist material coating apparatus 170, such as... Figure 17 As shown, the coating equipment includes:

[0222] The control system 1701 is used to execute the control method described above.

[0223] Photoresist material container 1702 includes a container for one or more photoresist materials.

[0224] The coating apparatus 1703 is connected to the photoresist material container 1702 via a pipeline and is used to perform the coating operation.

[0225] Operating compartment 1704 is used to house the coating equipment and the target product to be coated.

[0226] Since the control system included in the coating equipment can be used to execute the photoresist film thickness control method described above, the coating equipment also has similar beneficial effects to the control method described above. Therefore, the beneficial effects of the coating equipment will not be repeated here.

[0227] It should be noted that the features disclosed in the several method or device embodiments provided in this application can be arbitrarily combined to obtain new method or device embodiments without conflict.

[0228] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A method for controlling the thickness of a photoresist film, characterized in that, The method is applied to the control system of a coating equipment; the method includes: In response to the detection of photoresist material replacement, the coating equipment is instructed to perform a first film thickness detection to obtain the first film thickness data of the photoresist material coating. Determine whether the first film thickness data belongs to the target film thickness range; In response to the first film thickness data not falling within the target film thickness range, the coating equipment is instructed to update the corresponding rotation speed parameters based on the first film thickness data.

2. The control method according to claim 1, characterized in that, The method further includes: In response to the coating equipment updating the rotation speed parameter, the coating equipment is instructed to perform a second film thickness detection to obtain second film thickness data; Determine whether the second film thickness data belongs to the target film thickness range; In response to the second film thickness data not belonging to the target film thickness range, the coating equipment is instructed to update the corresponding rotation speed parameter according to the second film thickness data until the detected second film thickness data belongs to the target film thickness range; In response to the first film thickness data or the second film thickness data belonging to the target film thickness range, the rotation speed parameter is stopped from being updated.

3. The control method according to claim 2, characterized in that, After the first film thickness detection and / or the second film thickness detection, the method further includes: Determine whether the detected first film thickness data and / or second film thickness data comply with film thickness safety specifications; If either the first film thickness data or the second film thickness data does not conform to the film thickness safety specification, the coating equipment is controlled to stop the coating operation and output a prompt message.

4. The control method according to claim 3, characterized in that, The determination of whether the detected first film thickness data and / or second film thickness data comply with film thickness safety specifications includes one or more of the following: Determine whether the first film thickness data or the second film thickness data meets the preset film thickness safety range; Determine whether the change in film thickness between the first film thickness data or the second film thickness data and the first film thickness data or the second film thickness data obtained from the previous film thickness detection meets the preset range of film thickness change.

5. The control method according to claim 2, characterized in that, Before performing the first film thickness detection or the second film thickness detection, the method further includes: Determine whether the coating equipment meets the detection conditions; wherein, the detection conditions include: the rotation speed parameter of the current coating equipment meets the preset rotation speed monitoring range, and / or the current coating equipment includes photoresist material whose coated film thickness is within the preset thickness monitoring range; In response to the coating equipment meeting the detection conditions, the coating equipment is instructed to perform either the first film thickness detection or the second film thickness detection.

6. The control method according to claim 2, characterized in that, The method further includes: Calculate the corresponding rotational speed to be determined based on the first film thickness data or the second film thickness data; Determine whether the desired rotational speed conforms to the preset rotational speed safety specifications; In response to the condition that the desired rotational speed meets the rotational speed safety specifications, the rotational speed parameters to be used are determined based on preset confidence parameters and the desired rotational speed.

7. The control method according to claim 6, characterized in that, Determining whether the desired rotational speed conforms to a preset rotational speed safety specification includes one or more of the following: Determine whether the desired rotational speed conforms to the preset safe rotational speed range; Determine whether the change in rotational speed between the desired rotational speed and the current rotational speed of the coating equipment conforms to a preset range of rotational speed change.

8. The control method according to claim 6, characterized in that, The method further includes: If the desired rotational speed does not meet the rotational speed safety specifications, the current rotational speed is maintained and a prompt message is output.

9. The control method according to any one of claims 1 to 8, characterized in that, The method further includes: Detect the first remaining amount of the photoresist material in the container to be used; In response to the first margin being less than or equal to the first threshold, real-time monitoring of the coating amount of the coating equipment is initiated. In response to the coating amount reaching a preset second threshold, it is determined that the photoresist material needs to be replaced; wherein the second threshold is greater than or equal to the pipeline storage capacity of the coating equipment.

10. The control method according to claim 9, characterized in that, The step of starting real-time monitoring of the coating amount of the coating equipment includes: The number of sprays applied by the coating equipment is obtained; The coating amount is determined based on the number of spraying operations and the amount of coating applied in each spraying operation.

11. A device for controlling the thickness of a photoresist film, characterized in that, The device is used in the control system of a coating equipment; the device includes: The first film thickness detection module is used to instruct the coating equipment to perform the first film thickness detection in response to the detection of photoresist material replacement, so as to obtain the first film thickness data of the photoresist material coating. The film thickness determination module is used to determine whether the first film thickness data belongs to the target film thickness range; The rotation speed adjustment module is used to, in response to the first film thickness data not falling within the target film thickness range, instruct the coating equipment to update the corresponding rotation speed parameters based on the first film thickness data.

12. A coating device for photoresist material, characterized in that, include: A control system for performing the control method as described in any one of claims 1 to 10; A photoresist material container, comprising a container for one or more photoresist materials; The coating apparatus is connected to the photoresist material container via a pipeline and is used to perform the coating operation; The operating chamber is used to house the coating device and the target product to be coated.

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