Diffusion welding method of aluminum nitride ceramic and aluminum nitride ceramic heating plate

Abstract

The invention relates to an aluminum nitride ceramic diffusion welding method and an aluminum nitride ceramic heating plate, in particular to the field of aluminum nitride ceramic, and the diffusion welding method comprises the steps that at least two independent aluminum nitride ceramic bodies are subjected to diffusion welding; the heat preservation temperature of diffusion welding ranges from 1000 DEG C to 1750 DEG C, and the pressure ranges from 4 MPa to 25 MPa. According to the diffusion welding method provided by the invention, efficient welding of the aluminum nitride ceramic is realized by optimizing relevant control parameters of diffusion welding, so that an aluminum nitride ceramic product obtained by welding has excellent welding strength and excellent use performance, and meanwhile, a rare earth connecting auxiliary agent is not adopted in the process, so that the cost is remarkably reduced. The diffusion welding process is further optimized, the diffusion welding process of sectional heat preservation and pressure preservation is adopted, the synergistic effect of all the stages is utilized, in the welding process, complete attachment of interface micro-protrusions is achieved, interface air holes are eliminated, abnormal growth of interface phases is avoided, and therefore efficient combination is achieved.

Description

A diffusion welding method for aluminum nitride ceramics, and an aluminum nitride ceramic heating plate. Technical Field

[0001] This invention relates to the field of aluminum nitride ceramics, and more specifically to a diffusion welding method for aluminum nitride ceramics and an aluminum nitride ceramic heating plate. Background Technology

[0002] Currently, aluminum nitride ceramics play an irreplaceable role in high-temperature applications such as semiconductor heaters and power module substrates due to their excellent thermal conductivity, electrical insulation, and chemical stability. These applications typically require ceramic components to withstand operating temperatures above 1500°C in a vacuum or inert atmosphere, thus necessitating highly reliable welding techniques to achieve ceramic-to-ceramic connections.

[0003] For example, CN121270280A discloses an aluminum nitride ceramic welding assembly, comprising: a first aluminum nitride ceramic component with a first pin hole on its welding surface; a second aluminum nitride ceramic component with a second pin hole corresponding to the first pin hole on its welding surface; an aluminum nitride ceramic positioning pin with its two ends inserted into the first pin hole and the second pin hole respectively; and a slurry layer containing rare earth oxides disposed on the welding surface of the first aluminum nitride ceramic component, wherein the rare earth oxide distribution density decreases from near the first aluminum nitride ceramic component to away from the first aluminum nitride ceramic component.

[0004] CN119462191A discloses a welding method for an aluminum nitride ceramic heating plate. The welding method first involves precision grinding and cleaning of the welding surfaces of both the aluminum nitride sleeve and the aluminum nitride plate. Then, a welding layer material Y2O3-CaCO3-SiO2-MgO is printed and coated onto the welding surfaces of both the aluminum nitride sleeve and the aluminum nitride plate. Finally, sintering is performed to obtain an aluminum nitride ceramic heating plate with good sealing performance, high welding strength, and high thermal conductivity.

[0005] However, existing welding processes all introduce specific bonding agents into the welding surface to achieve the bonding of aluminum nitride ceramics, and most of them are rare earth elements, resulting in high costs and still having the defect of low welding strength. Summary of the Invention

[0006] In view of the problems existing in the prior art, the purpose of the present invention is to provide a diffusion welding method for aluminum nitride ceramics and an aluminum nitride ceramic heating plate, so as to solve the defect of low welding strength when aluminum nitride ceramics are diffusion welded.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] In a first aspect, the present invention provides a diffusion welding method for aluminum nitride ceramics, the diffusion welding method comprising:

[0009] At least two independent aluminum nitride ceramic bodies are diffusion welded together;

[0010] The heat preservation temperature for diffusion welding is 1000-1750℃, and the pressure is 4-25MPa.

[0011] The diffusion welding method provided by this invention achieves efficient welding of aluminum nitride ceramics by optimizing the relevant control parameters of diffusion welding. This results in aluminum nitride ceramic products with excellent welding strength and performance. At the same time, no rare earth bonding agents are used in the process, which significantly reduces costs.

[0012] As a preferred embodiment of the present invention, the diffusion welding time is 2-10 hours.

[0013] As a preferred technical solution of the present invention, the diffusion welding includes: a first heat preservation and pressure preservation, a second heat preservation and pressure preservation, and a third heat preservation and pressure preservation in sequence.

[0014] As a preferred technical solution of the present invention, the temperature of the first heat preservation and pressure preservation is 1000-1100℃.

[0015] Preferably, the pressure of the first heat preservation and pressure holding is 8-12 MPa.

[0016] Preferably, the first heat preservation and pressure holding time is 2-3 hours.

[0017] As a preferred embodiment of the present invention, the second heat preservation and pressure preservation temperature is 1650-1750℃.

[0018] Preferably, the pressure of the second heat preservation and pressure holding is 15-25 MPa.

[0019] Preferably, the second heat preservation and pressure holding time is 4-6 hours.

[0020] As a preferred technical solution of the present invention, the temperature of the third heat preservation and pressure preservation is 1200-1300℃.

[0021] Preferably, the pressure of the third heat preservation and pressure holding is 4-5 MPa.

[0022] Preferably, the third heat preservation and pressure holding time is 2-3 hours.

[0023] As a preferred technical solution of the present invention, the aluminum nitride ceramic body is obtained by sequentially cold pressing and sintering aluminum nitride powder.

[0024] Preferably, the aluminum nitride powder has a D50 particle size of 70-120 μm.

[0025] Preferably, the loose packing density of the aluminum nitride powder is ≥1 g / cm³. 3 .

[0026] Preferably, a sintering aid is added to the aluminum nitride powder.

[0027] Preferably, the sintering aid comprises yttrium oxide and / or magnesium oxide.

[0028] Preferably, the amount of the sintering aid added is 1-5% of the mass of aluminum nitride powder.

[0029] As a preferred embodiment of the present invention, the pressure of the cold pressing is 200-250 MPa.

[0030] Preferably, the cold pressing time is 20-50 minutes.

[0031] Preferably, the sintering includes pressureless sintering and / or pressure sintering.

[0032] Preferably, the pressure of the pressure sintering is 10-25 MPa.

[0033] Preferably, the sintering temperature is 1700-1800℃.

[0034] Preferably, the sintering time is 3-6 hours.

[0035] In a second aspect, the present invention provides an aluminum nitride ceramic heating plate, the aluminum nitride ceramic heating plate comprising: preparing the aluminum nitride ceramic component in the aluminum nitride ceramic heating plate by means of the diffusion welding method described in the first aspect.

[0036] As a preferred embodiment of the present invention, the aluminum nitride ceramic component includes: a first disc and a second disc.

[0037] Preferably, the first disc and / or the second disc are provided with air passage grooves.

[0038] Compared with existing technical solutions, the present invention has the following beneficial effects:

[0039] (1) The diffusion welding method provided by the present invention achieves efficient welding of aluminum nitride ceramics by optimizing the relevant control parameters of diffusion welding, so that the aluminum nitride ceramic products obtained by welding have excellent welding strength and excellent performance. At the same time, no rare earth connecting agents are used in the process, which significantly reduces the cost and the welding strength is ≥252.9MPa.

[0040] (2) By further optimizing the diffusion welding process, the present invention adopts a segmented heat preservation and pressure preservation diffusion welding process, and utilizes the synergistic effect between each stage to achieve complete bonding of the interface micro-protrusions during the welding process, eliminate interface pores, and avoid abnormal growth of the interface phase, thereby achieving efficient bonding and welding strength of more than 262.1 MPa, and more than 293.8 MPa under the preferred scheme.

[0041] The present invention will now be described in further detail. However, the examples described below are merely simplified examples of the present invention and do not represent or limit the scope of protection of the present invention. The scope of protection of the present invention is determined by the claims. Detailed Implementation

[0042] To better illustrate the present invention and facilitate understanding of its technical solutions, typical but non-limiting embodiments of the present invention are as follows:

[0043] Currently, aluminum nitride ceramic components typically need to withstand operating temperatures above 1500°C in a vacuum or inert atmosphere. Therefore, highly reliable welding techniques are required to achieve ceramic-to-ceramic connections. However, existing welding processes all introduce specific bonding agents into the welding surface to achieve the connection of aluminum nitride ceramics, and these are mostly rare earth elements, resulting in high costs. Furthermore, they still suffer from low weld strength. Based on this, this invention optimizes the diffusion welding process, achieving highly efficient welding of aluminum nitride ceramics without the need for rare earth bonding agents, as detailed below:

[0044] I. This embodiment provides a diffusion welding method for aluminum nitride ceramics, the diffusion welding method comprising:

[0045] At least two independent aluminum nitride ceramic bodies are diffusion welded together.

[0046] In this invention, diffusion welding is performed under a protective atmosphere, such as nitrogen, helium, neon, argon, etc.

[0047] The heat preservation temperature for diffusion welding is 1000-1750℃, for example, it can be 1000℃, 1075℃, 1150℃, 1225℃, 1300℃, 1375℃, 1450℃, 1525℃, 1600℃, 1675℃ or 1750℃, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable, with 1600-1750℃ being preferred.

[0048] The diffusion welding pressure is 4-25 MPa, for example, it can be 4 MPa, 6.1 MPa, 8.2 MPa, 10.3 MPa, 12.4 MPa, 14.5 MPa, 16.6 MPa, 18.7 MPa, 20.8 MPa, 22.9 MPa or 25 MPa, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0049] The diffusion welding time is 2-10 hours, for example, it can be 2 hours, 2.8 hours, 3.6 hours, 4.4 hours, 5.2 hours, 6 hours, 6.8 hours, 7.6 hours, 8.4 hours, 9.2 hours or 10 hours, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0050] In this invention, by further optimizing the diffusion welding process, a segmented heat preservation and pressure preservation diffusion welding process is adopted. By utilizing the synergistic effect between each stage, complete adhesion of the interface micro-protrusions is achieved during the welding process, eliminating interface pores and avoiding abnormal growth of the interface phase, thereby achieving efficient bonding.

[0051] The diffusion welding process includes: a first heat preservation and pressure holding, a second heat preservation and pressure holding, and a third heat preservation and pressure holding, performed sequentially.

[0052] The temperature of the first heat preservation and pressure holding is 1000-1100℃, for example, it can be 1000℃, 1010℃, 1020℃, 1030℃, 1040℃, 1050℃, 1060℃, 1070℃, 1080℃, 1090℃ or 1100℃, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0053] The pressure of the first heat preservation and pressure holding is 8-12 MPa, for example, it can be 8 MPa, 8.4 MPa, 8.8 MPa, 9.2 MPa, 9.6 MPa, 10 MPa, 10.4 MPa, 10.8 MPa, 11.2 MPa, 11.6 MPa or 12 MPa, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0054] The first heat preservation and pressure holding time is 2-3 hours, for example, it can be 2 hours, 2.1 hours, 2.2 hours, 2.3 hours, 2.4 hours, 2.5 hours, 2.6 hours, 2.7 hours, 2.8 hours, 2.9 hours or 3 hours, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0055] The second heat preservation and pressure holding temperature is 1650-1750℃, for example, it can be 1650℃, 1660℃, 1670℃, 1680℃, 1690℃, 1700℃, 1710℃, 1720℃, 1730℃, 1740℃ or 1750℃, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0056] The second heat preservation and pressure is 15-25 MPa, for example, it can be 15 MPa, 16 MPa, 17 MPa, 18 MPa, 19 MPa, 20 MPa, 21 MPa, 22 MPa, 23 MPa, 24 MPa or 25 MPa, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0057] The second heat preservation and pressure holding time is 4-6 hours, for example, it can be 4 hours, 4.2 hours, 4.4 hours, 4.6 hours, 4.8 hours, 5 hours, 5.2 hours, 5.4 hours, 5.6 hours, 5.8 hours or 6 hours, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0058] The third heat preservation and pressure holding temperature is 1200-1300℃, for example, it can be 1200℃, 1210℃, 1220℃, 1230℃, 1240℃, 1250℃, 1260℃, 1270℃, 1280℃, 1290℃ or 1300℃, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0059] The third heat preservation and pressure is 4-5 MPa, for example, it can be 4 MPa, 4.1 MPa, 4.2 MPa, 4.3 MPa, 4.4 MPa, 4.5 MPa, 4.6 MPa, 4.7 MPa, 4.8 MPa, 4.9 MPa or 5 MPa, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0060] The third heat preservation and pressure holding time is 2-3 hours, for example, it can be 2 hours, 2.1 hours, 2.2 hours, 2.3 hours, 2.4 hours, 2.5 hours, 2.6 hours, 2.7 hours, 2.8 hours, 2.9 hours or 3 hours, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0061] In this invention, after the third heat preservation and pressure holding is completed, cooling can be carried out in accordance with the conventional requirements in the field, such as cooling with the furnace to room temperature of 10-40℃.

[0062] The aluminum nitride ceramic body is obtained by sequentially cold pressing and sintering aluminum nitride powder.

[0063] The aluminum nitride powder has a D50 particle size of 70-120 μm, such as 70 μm, 75 μm, 80 μm, 85 μm, 90 μm, 95 μm, 100 μm, 105 μm, 110 μm, 115 μm or 120 μm, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0064] The loose packing density of the aluminum nitride powder is ≥1 g / cm³. 3 For example, it could be 1g / cm 3 1.05g / cm 3 1.1g / cm 3 1.15g / cm 3 1.2g / cm 3 1.25g / cm 3 1.3g / cm 3 1.35g / cm 3 1.4g / cm 3 1.45g / cm 3 Or 1.5g / cm 3 The values ​​may include, but are not limited to, the listed values; other unlisted values ​​within this range also meet the requirements.

[0065] A sintering aid is added to the aluminum nitride powder.

[0066] The sintering aid includes yttrium oxide and / or magnesium oxide.

[0067] The amount of the sintering aid added is 1-5% of the mass of aluminum nitride powder, for example, it can be 1%, 1.4%, 1.8%, 2.2%, 2.6%, 3%, 3.4%, 3.8%, 4.2%, 4.6% or 5%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0068] The pressure for cold pressing is 200-250 MPa, for example, it can be 200 MPa, 205 MPa, 210 MPa, 215 MPa, 220 MPa, 225 MPa, 230 MPa, 235 MPa, 240 MPa, 245 MPa or 250 MPa, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0069] The cold pressing time is 20-50 min, for example, it can be 20 min, 23 min, 26 min, 29 min, 32 min, 35 min, 38 min, 41 min, 44 min, 47 min or 50 min, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0070] The sintering includes pressureless sintering and / or pressure sintering.

[0071] The pressure of the pressure sintering is 10-25 MPa, for example, it can be 10 MPa, 11.5 MPa, 13 MPa, 14.5 MPa, 16 MPa, 17.5 MPa, 19 MPa, 20.5 MPa, 22 MPa, 23.5 MPa or 25 MPa, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0072] The sintering temperature is 1700-1800℃, for example, it can be 1700℃, 1710℃, 1720℃, 1730℃, 1740℃, 1750℃, 1760℃, 1770℃, 1780℃, 1790℃ or 1800℃, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0073] The sintering time is 3-6 hours, for example, it can be 3 hours, 3.3 hours, 3.6 hours, 3.9 hours, 4.2 hours, 4.5 hours, 4.8 hours, 5.1 hours, 5.4 hours, 5.7 hours or 6 hours, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0074] II. This embodiment provides an aluminum nitride ceramic heating plate, which includes: preparing the aluminum nitride ceramic component in the aluminum nitride ceramic heating plate using the diffusion welding method described in the first aspect.

[0075] The aluminum nitride ceramic component includes a first disc and a second disc.

[0076] The first disc and / or the second disc are provided with air passage grooves.

[0077] In this invention, the aluminum nitride ceramic component includes other related components, such as a support for supporting the plate and accommodating the electrode connection channel. The specific design can be reasonably selected according to the purpose of the heating plate.

[0078] In this invention, the air passage groove can be designed separately on the first plate or the second plate, or a portion of the air passage groove can be set on both plates and welded together to form a complete air passage groove.

[0079] III. To illustrate the welding effect achievable by the diffusion welding method for aluminum nitride ceramics provided by this invention, the following example is used for explanation:

[0080] Example 1

[0081] This embodiment provides a diffusion welding method for aluminum nitride ceramics, the diffusion welding method comprising:

[0082] Two independent aluminum nitride ceramic bodies were diffusion welded in a nitrogen atmosphere;

[0083] The diffusion welding was performed at a temperature of 1700℃, a pressure of 10MPa, and a time of 6 hours.

[0084] The aluminum nitride ceramic body is obtained by sequentially cold pressing and sintering aluminum nitride powder;

[0085] The aluminum nitride powder has a D50 particle size of 80 μm and a bulk density of 1 g / cm³. 3 A sintering aid is added to the aluminum nitride powder; the sintering aid is yttrium oxide; the amount of the sintering aid added is 2% of the mass of the aluminum nitride powder.

[0086] The cold pressing pressure is 225 MPa; the cold pressing time is 30 min; the sintering includes pressureless sintering and / or pressure sintering; the pressure of the pressure sintering is 10-25 MPa; the sintering temperature is 1780℃; and the sintering time is 3.5 h.

[0087] Example 2

[0088] This embodiment provides a diffusion welding method for aluminum nitride ceramics, the diffusion welding method comprising:

[0089] Two independent aluminum nitride ceramic bodies were diffusion welded in a nitrogen atmosphere;

[0090] The diffusion welding was performed at a holding temperature of 1600℃, a pressure of 10MPa, and a time of 2 hours.

[0091] The aluminum nitride ceramic body is obtained by sequentially cold pressing and sintering aluminum nitride powder;

[0092] The aluminum nitride powder has a D50 particle size of 100 μm and a bulk density of 1.5 g / cm³. 3 A sintering aid is added to the aluminum nitride powder; the sintering aid is magnesium oxide; the amount of the sintering aid added is 3% of the mass of the aluminum nitride powder.

[0093] The cold pressing pressure is 230 MPa; the cold pressing time is 25 min; the sintering includes pressureless sintering; the sintering temperature is 1750 °C; and the sintering time is 4 h.

[0094] Example 3

[0095] This embodiment provides a diffusion welding method for aluminum nitride ceramics, the diffusion welding method comprising:

[0096] Two independent aluminum nitride ceramic bodies were diffusion-welded in a helium atmosphere;

[0097] The diffusion welding includes: a first heat preservation and pressure holding, a second heat preservation and pressure holding, and a third heat preservation and pressure holding in sequence;

[0098] The first heat preservation and pressure holding temperature is 1050℃; the first heat preservation and pressure holding pressure is 10MPa; the first heat preservation and pressure holding time is 2.5h;

[0099] The second heat preservation and pressure holding temperature is 1700℃; the second heat preservation and pressure holding pressure is 20MPa; the second heat preservation and pressure holding time is 5h;

[0100] The third heat preservation and pressure holding temperature is 1250℃; the third heat preservation and pressure holding pressure is 4.5MPa; the third heat preservation and pressure holding time is 2.5h;

[0101] The aluminum nitride ceramic body is obtained by sequentially cold pressing and sintering aluminum nitride powder;

[0102] The aluminum nitride powder has a D50 particle size of 70 μm and a bulk density of 1 g / cm³. 3 A sintering aid is added to the aluminum nitride powder; the sintering aid is yttrium oxide; the amount of the sintering aid added is 2% of the mass of the aluminum nitride powder.

[0103] The cold pressing pressure is 200 MPa; the cold pressing time is 50 min; the sintering includes pressure sintering; the pressure of the pressure sintering is 10 MPa; the sintering temperature is 1800 °C; and the sintering time is 3 h.

[0104] Example 4

[0105] This embodiment provides a diffusion welding method for aluminum nitride ceramics, the diffusion welding method comprising:

[0106] Two independent aluminum nitride ceramic bodies were diffusion-welded in a helium atmosphere;

[0107] The diffusion welding includes: a first heat preservation and pressure holding, a second heat preservation and pressure holding, and a third heat preservation and pressure holding in sequence;

[0108] The first heat preservation and pressure holding temperature is 1080℃; the first heat preservation and pressure holding pressure is 9MPa; the first heat preservation and pressure holding time is 2.2h;

[0109] The second heat preservation and pressure holding temperature is 1700℃; the second heat preservation and pressure holding pressure is 20MPa; the second heat preservation and pressure holding time is 5h;

[0110] The third heat preservation and pressure holding temperature is 1280℃; the third heat preservation and pressure holding pressure is 4.2MPa; the third heat preservation and pressure holding time is 2.2h;

[0111] The aluminum nitride ceramic body is obtained by sequentially cold pressing and sintering aluminum nitride powder;

[0112] The aluminum nitride powder has a D50 particle size of 120 μm and a bulk density of 1 g / cm³. 3 A sintering aid is added to the aluminum nitride powder; the sintering aid is magnesium oxide; the amount of the sintering aid added is 4% of the mass of the aluminum nitride powder.

[0113] The cold pressing pressure is 250 MPa; the cold pressing time is 20 min; the sintering includes pressure sintering; the pressure of the pressure sintering is 25 MPa; the sintering temperature is 1700 °C; and the sintering time is 6 h.

[0114] Example 5

[0115] The difference from Example 1 is only that the diffusion welding includes: a first heat preservation and pressure holding, a second heat preservation and pressure holding, and a third heat preservation and pressure holding performed sequentially;

[0116] The first heat preservation and pressure holding temperature is 1100℃; the first heat preservation and pressure holding pressure is 8MPa; the first heat preservation and pressure holding time is 2h;

[0117] The second heat preservation and pressure holding temperature is 1750℃; the second heat preservation and pressure holding pressure is 15MPa; the second heat preservation and pressure holding time is 4h;

[0118] The temperature of the third heat preservation and pressure holding is 1300℃; the pressure of the third heat preservation and pressure holding is 4MPa; and the time of the third heat preservation and pressure holding is 2h.

[0119] Example 6

[0120] The difference from Example 2 is only that the diffusion welding includes: a first heat preservation and pressure holding, a second heat preservation and pressure holding, and a third heat preservation and pressure holding performed sequentially;

[0121] The first heat preservation and pressure holding temperature is 1000℃; the first heat preservation and pressure holding pressure is 12MPa; the first heat preservation and pressure holding time is 3h;

[0122] The second heat preservation and pressure holding temperature is 1650℃; the second heat preservation and pressure holding pressure is 25MPa; the second heat preservation and pressure holding time is 6h;

[0123] The temperature of the third heat preservation and pressure holding is 1200℃; the pressure of the third heat preservation and pressure holding is 5MPa; and the time of the third heat preservation and pressure holding is 3h.

[0124] Example 7

[0125] The only difference from Example 3 is that the first heat preservation and pressure preservation are not performed.

[0126] Example 8

[0127] The only difference from Example 3 is that the second heat preservation and pressure preservation are not performed.

[0128] Example 9

[0129] The only difference from Example 3 is that the third heat preservation and pressure preservation is not performed.

[0130] Example 10

[0131] The only difference from Example 3 is that the temperature of the first heat preservation and pressure preservation is 800°C.

[0132] Example 11

[0133] The only difference from Example 3 is that the temperature of the first heat preservation and pressure preservation is 1200°C.

[0134] Example 12

[0135] The only difference from Example 3 is that the second heat preservation and pressure preservation temperature is 1500℃.

[0136] Example 13

[0137] The only difference from Example 3 is that the temperature of the third heat preservation and pressure preservation is 1000℃.

[0138] Example 14

[0139] The only difference from Example 3 is that the temperature of the third heat preservation and pressure preservation is 1400℃.

[0140] The aluminum nitride ceramic products obtained in the above embodiments were subjected to welding strength testing. Specifically, the tensile strength was tested according to GB / T 2651-2023 Metallic Materials Weld Destructive Test - Transverse Tensile Test. The results are shown in Table 1 below.

[0141] Table 1

[0142]

[0143] As shown in Table 1, the solution provided by the present invention achieves efficient welding of aluminum nitride ceramics by optimizing the relevant control parameters of diffusion welding. This results in aluminum nitride ceramic products with excellent welding strength and performance. At the same time, no rare earth bonding agents are used in the process, which significantly reduces costs.

[0144] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present invention, various simple modifications can be made to the technical solution of the present invention, and these simple modifications all fall within the protection scope of the present invention.

[0145] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not describe the various possible combinations separately.

[0146] Furthermore, various different embodiments of the present invention can be combined in any way, as long as they do not violate the spirit of the present invention, they should also be regarded as the content disclosed by the present invention.

Claims

1. A diffusion welding method for aluminum nitride ceramics, characterized in that, The diffusion welding method includes: diffusion welding at least two independent aluminum nitride ceramic bodies; the holding temperature for diffusion welding is 1000-1750℃, and the pressure is 4-25MPa.

2. The welding method as described in claim 1, characterized in that, The diffusion welding time is 2-10 hours.

3. The diffusion welding method as described in claim 1, characterized in that, The diffusion welding includes: a first heat preservation and pressure holding, a second heat preservation and pressure holding, and a third heat preservation and pressure holding in sequence.

4. The diffusion welding method as described in claim 3, characterized in that, The temperature of the first heat preservation and pressure holding is 1000-1100℃; preferably, the pressure of the first heat preservation and pressure holding is 8-12MPa; preferably, the time of the first heat preservation and pressure holding is 2-3h.

5. The diffusion welding method as described in claim 3, characterized in that, The second heat preservation and pressure holding temperature is 1650-1750℃; preferably, the second heat preservation and pressure holding pressure is 15-25MPa; preferably, the second heat preservation and pressure holding time is 4-6h.

6. The diffusion welding method as described in claim 3, characterized in that, The temperature of the third heat preservation and pressure holding is 1200-1300℃; preferably, the pressure of the third heat preservation and pressure holding is 4-5MPa; preferably, the time of the third heat preservation and pressure holding is 2-3h.

7. The diffusion welding method as described in claim 1, characterized in that, The aluminum nitride ceramic body is obtained by sequentially cold pressing and sintering aluminum nitride powder; preferably, the D50 particle size of the aluminum nitride powder is 70-120 μm; preferably, the loose packing density of the aluminum nitride powder is ≥1 g / cm³. 3 Preferably, a sintering aid is added to the aluminum nitride powder; preferably, the sintering aid includes yttrium oxide and / or magnesium oxide; preferably, the amount of the sintering aid added is 1-5% of the mass of the aluminum nitride powder.

8. The diffusion welding method as described in claim 7, characterized in that, The cold pressing pressure is 200-250 MPa; preferably, the cold pressing time is 20-50 min; preferably, the sintering includes pressureless sintering and / or pressure sintering; preferably, the pressure of the pressure sintering is 10-25 MPa; preferably, the sintering temperature is 1700-1800℃; preferably, the sintering time is 3-6 h.

9. An aluminum nitride ceramic heating plate, characterized in that, The aluminum nitride ceramic heating plate comprises: preparing the aluminum nitride ceramic component in the aluminum nitride ceramic heating plate by using the diffusion welding method as described in any one of claims 1-8.

10. The aluminum nitride ceramic heating plate as described in claim 9, characterized in that, The aluminum nitride ceramic component includes: a first disc and a second disc; preferably, the first disc and / or the second disc are provided with air passage grooves.

Images