Welding device for quartz tube tail supporting cover

Abstract

The utility model provides a quartz tube tail supporting cover welding device which comprises a base, a first clamping mechanism, a second clamping mechanism, an inner side welding mechanism and an outer side welding mechanism, a sliding rail is arranged on the base, and the second clamping mechanism is movably arranged on the sliding rail. The second clamping mechanism is internally provided with an installation channel, the inner side welding mechanism comprises a first support and an inner ring lamp, the first support is arranged in the installation channel in a penetrating mode, and the inner ring lamp is arranged on the first support. The outer side welding mechanism comprises a bottom frame, a second support and an outer ring lamp, and the outer ring lamp and the inner ring lamp are coaxially arranged. The inner ring lamp heats the inner contact surface of the quartz tube and the supporting cover, and the outer ring lamp heats the outer contact surface of the quartz tube and the supporting cover, so that uniform heating in the wall thickness direction of the quartz tube and synchronous internal and external melting are ensured, deep welding is realized, the welding strength, the sealing property and the welding seam uniformity are remarkably improved, and bubbles and internal defects are reduced; and meanwhile, the welding efficiency and the automation degree can be improved.

Description

A welding device for a quartz tube tail support cover Technical Field

[0001] This utility model relates to the field of automation equipment technology, and in particular to a welding device for a quartz tube tail support cover. Background Technology

[0002] In the photovoltaic and semiconductor industries, diffusion equipment is commonly used for material diffusion processes, while deposition equipment is used for material deposition processes. Quartz tubes, with their excellent high-temperature resistance, thermal stability, and light transmittance, are frequently used as cavity materials in diffusion or deposition equipment. A typical quartz tube consists of a cylindrical body and an arc-shaped tail connected to the end of the body. Several through-holes need to be formed at the tail for installing process piping in the diffusion or deposition equipment. Therefore, to ensure the structural strength and service life of the quartz tube, a hollow support cover needs to be welded to the tail of the quartz tube.

[0003] When welding the support cover, it is necessary to accurately ensure the coaxiality of the quartz tube and the support cover as well as the accuracy of the welding position. Simple fixtures are difficult to guarantee repeatability and are prone to problems such as eccentricity and tilting. In addition, existing welding methods (such as manual oxyhydrogen flame or single-sided high-frequency induction heating) can usually only heat one side of the quartz tube from the outside, which is inefficient and leads to problems such as insufficient welding and uneven weld. Summary of the Invention

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a welding device for a quartz tube tail support cover.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] This utility model provides a welding device for a quartz tube tail support cover. The welding device for the quartz tube tail support cover includes a base, a first clamping mechanism, a second clamping mechanism, an inner welding mechanism, and an outer welding mechanism.

[0007] The base is provided with a slide rail, and the first clamping mechanism is provided on the base and located at one end of the slide rail. The first clamping mechanism is used to clamp the quartz tube.

[0008] The second clamping mechanism is movably disposed on the slide rail, and the first clamping mechanism and the second clamping mechanism are disposed opposite to each other.

[0009] The second clamping mechanism is provided with an installation channel. The inner welding mechanism includes a first bracket and an inner ring light. The first bracket passes through the installation channel, and the inner ring light is located on the side of the first bracket facing the first clamping mechanism.

[0010] The outer welding mechanism is located between the first clamping mechanism and the second clamping mechanism; the outer welding mechanism includes a base frame, a second bracket and an outer ring light, the base frame is movably mounted on the slide rail, the second bracket is mounted on the base frame, the outer ring light is mounted on the second bracket, and the outer ring light and the inner ring light are coaxially arranged.

[0011] Preferably, the first clamping mechanism includes a first base, a first bearing seat, a first chuck, a first motor, a first driving wheel, a first driven wheel, and a first synchronous belt. The first base is fixed on the base, the first bearing seat is disposed on the first base, the first chuck and the first driven wheel are coaxially connected to the first bearing seat, and the first chuck faces the second clamping mechanism. The first driving wheel is rotatably disposed on the first base, the first motor is driven and connected to the first driving wheel, and the first synchronous belt is sleeved on the first driving wheel and the first driven wheel.

[0012] Preferably, the inner side of the first chuck is provided with graphite claws.

[0013] Preferably, the second clamping mechanism includes a second base, a second bearing seat, a second chuck, a second motor, a second driving wheel, a second driven wheel, and a second synchronous belt. The second base is movably mounted on the slide rail, the second bearing seat is mounted on the second base, the second chuck and the second driven wheel are coaxially connected to the second bearing seat, and the second chuck faces the first clamping mechanism. The mounting channel corresponds to the inner side of the second driven wheel and the second chuck. The second driving wheel is rotatably mounted on the second base, the second motor drives and connects to the second driving wheel, and the second synchronous belt is sleeved on the second driving wheel and the second driven wheel.

[0014] Preferably, the inner welding mechanism further includes a slide and a connecting frame. The slide is disposed on the second base in a direction parallel to the slide rail, the connecting frame is movably disposed on the slide, and the first bracket is disposed on the connecting frame.

[0015] Preferably, the welding device for the tail support cover of the quartz tube further includes a support mechanism, which includes a base plate, a lifting frame and support wheels. The base plate is movably mounted on the slide rail, the lifting frame is mounted on the base plate, and there are two support wheels, which are rotatably mounted on the lifting frame, and the central axis of the support wheels is parallel to the length direction of the slide rail.

[0016] Preferably, the support wheel is made of graphite.

[0017] Preferably, there are two sets of support mechanisms, which are spaced apart between the first clamping mechanism and the outer welding mechanism.

[0018] Preferably, the base frame is provided with a slide table, the length direction of the slide table is perpendicular to the length direction of the slide rail, and the second bracket is movably disposed on the slide table.

[0019] Preferably, a fire baffle is provided on the second bracket corresponding to the outer side of the outer ring lamp.

[0020] Compared with the prior art, the beneficial effects of this utility model are as follows: In the welding device for the tail support cover of the quartz tube of this utility model, the first clamping mechanism and the second clamping mechanism are arranged opposite to each other, respectively used to clamp the quartz tube and the support cover, accurately ensuring the coaxiality of the quartz tube and the support cover and the accuracy of the welding position. Through the installation channel in the second clamping mechanism, the inner ring lamp is accurately sent into the predetermined welding position inside the quartz tube, directly heating the inner contact surface between the quartz tube and the support cover. The outer ring lamp of the outer welding mechanism is located outside the quartz tube, heating the outer contact surface between the quartz tube and the support cover, ensuring uniform heating in the wall thickness direction of the quartz tube, and simultaneous melting of the inside and outside, achieving deep fusion, significantly improving welding strength, sealing performance and weld uniformity, and reducing bubbles and internal defects; at the same time, it can improve welding efficiency and automation. Attached Figure Description

[0021] Figure 1 is a schematic diagram of the welding device for a quartz tube tail support cover according to the present invention.

[0022] Figure 2 is a schematic diagram of the first clamping mechanism.

[0023] Figure 3 is a schematic diagram of the structure of the second clamping mechanism and the inner welding mechanism.

[0024] Figure 4 is a schematic diagram of the second clamping mechanism.

[0025] Figure 5 is a schematic diagram of the inner welding mechanism.

[0026] Figure 6 is a schematic diagram of the outer welding mechanism.

[0027] Figure 7 is a schematic diagram of the support mechanism.

[0028] In the diagram, 10-base, 11-slide rail, 20-first clamping mechanism, 21-first base, 22-first bearing seat, 23-first chuck, 24-first motor, 25-first driving wheel, 26-first driven wheel, 27-first synchronous belt, 28-graphite gripper, 30-second clamping mechanism, 31-second base, 32-second bearing seat, 33-second chuck, 34-second motor, 35-second driving wheel, 36- 37-Second driven wheel, 38-Second synchronous belt, 39-Graphite gripper, 40-Inner welding mechanism, 41-First bracket, 42-Inner ring light, 43-Slide seat, 44-Connecting frame, 50-Outer welding mechanism, 51-Base frame, 52-Second bracket, 53-Outer ring light, 54-Slide table, 55-Fire baffle, 60-Support mechanism, 61-Base plate, 62-Lifting frame, 63-Support wheel, 70-Support cover. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the described embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. It is understood that, without conflict, some technical means of the various embodiments described herein can be substituted for or combined with each other.

[0030] In the description of this utility model, the terms "first," "second," etc., are used only to distinguish the described objects and have no sequential or technical meaning. Therefore, objects specified with "first," "second," etc., may explicitly or implicitly include one or more of those objects. Furthermore, the words "one" or "a" do not indicate a quantity limitation, but rather indicate the presence of at least one, while "multiple" indicates at least two.

[0031] In the description of this utility model, references to "one embodiment" or "some embodiments" mean that one or more embodiments of the utility model include the specific features, structures, or characteristics described in connection with that embodiment. Therefore, the phrases "one embodiment," "some embodiments," "other embodiments," "and other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized.

[0032] This utility model provides a welding device for a quartz tube tail support cover. Referring to Figure 1, the welding device for the quartz tube tail support cover includes a base 10, a first clamping mechanism 20, a second clamping mechanism 30, an inner welding mechanism 40, and an outer welding mechanism 50. The first clamping mechanism 20 and the second clamping mechanism 30 are used to clamp the quartz tube and the support cover, respectively. The inner welding mechanism 40 is used to weld the inner contact surface between the quartz tube and the support cover, and the outer welding mechanism 50 is used to weld the outer contact surface between the quartz tube and the support cover.

[0033] Specifically, a slide rail 11 is provided on the base 10, and the slide rail 11 is arranged along the X direction. A first clamping mechanism 20 is provided on the base 10 and located at one end of the slide rail 11. The first clamping mechanism 20 is used to clamp the quartz tube. A second clamping mechanism 30 is movably provided on the slide rail 11, and the first clamping mechanism 20 and the second clamping mechanism 30 are arranged opposite to each other.

[0034] Referring to Figures 3 to 5, the second clamping mechanism 30 is provided with an installation channel 39, and the inner welding mechanism 40 includes a first bracket 41 and an inner ring light 42. The first bracket 41 passes through the installation channel 39, and the inner ring light 42 is located on the side of the first bracket 41 facing the first clamping mechanism 20.

[0035] The outer welding mechanism 50 is located between the first clamping mechanism 20 and the second clamping mechanism 30. Referring to Figure 6, the outer welding mechanism 50 includes a base frame 51, a second bracket 52, and an outer ring light 53. The base frame 51 is movably mounted on the slide rail 11, the second bracket 52 is mounted on the base frame 51, and the outer ring light 53 is mounted on the second bracket 52. The outer ring light 53 and the inner ring light 42 are coaxially arranged.

[0036] In the application, the first clamping mechanism 20 and the second clamping mechanism 30 are used to fix and clamp the quartz tube and the support cover, respectively, to accurately ensure the coaxiality of the quartz tube and the support cover and the accuracy of the welding position. The inner ring lamp heats the inner contact surface between the quartz tube and the support cover, while the outer ring lamp 53 of the outer welding mechanism 50 is located outside the quartz tube to heat the outer contact surface between the quartz tube and the support cover, ensuring uniform heating in the wall thickness direction of the quartz tube and simultaneous melting of the inner and outer surfaces, achieving deep fusion, significantly improving welding strength, sealing performance, and weld uniformity, and reducing bubbles and internal defects; at the same time, it can improve welding efficiency and automation. In addition, the position adjustment of the second clamping mechanism 30 and the outer welding mechanism 50 is achieved through the slide rail 11, thereby accommodating quartz tubes of different lengths.

[0037] Referring to Figure 2, in some preferred embodiments, the first clamping mechanism 20 includes a first base 21, a first bearing seat 22, a first chuck 23, a first motor 24, a first driving wheel 25, a first driven wheel 26, and a first synchronous belt 27. The first base 21 is fixed to the base 10, the first bearing seat 22 is disposed on the first base 21, the first chuck 23 and the first driven wheel 26 are coaxially connected to the first bearing seat 22, and the first chuck 23 faces the second clamping mechanism 30. The first driving wheel 25 is rotatably disposed on the first base 21, the first motor 24 drives and connects to the first driving wheel 25, and the first synchronous belt 27 is sleeved on the first driving wheel 25 and the first driven wheel 26.

[0038] The first clamping mechanism 20 provides a stable and reliable rotary clamping function. The first motor 24 drives the first chuck 23 to rotate through the first driving wheel 25, the first driven wheel 26, and the first synchronous belt 27, thereby rotating the quartz tube clamped by the first chuck 23 and ensuring that the welding part is heated evenly.

[0039] Furthermore, the inner side of the first chuck 23 is provided with graphite claws 28. The graphite claws 28 are heat-resistant and relatively soft, which can firmly clamp the quartz tube, avoid scratching the surface of the quartz tube, and adapt to the high-temperature welding environment.

[0040] Referring to Figures 3 and 4, in some preferred embodiments, the second clamping mechanism 30 includes a second base 31, a second bearing seat 32, a second chuck 33, a second motor 34, a second driving wheel 35, a second driven wheel 36, and a second synchronous belt 37. The second base 31 is movably mounted on the slide rail 11, the second bearing seat 32 is mounted on the second base 31, and the second chuck 33 is coaxially connected to the second driven wheel 36 on the second bearing seat 32, with the second chuck 33 facing the first clamping mechanism 20. The mounting channel 39 corresponds to the inner side of the second driven wheel 36 and the second chuck 33. The second driving wheel 35 is rotatably mounted on the second base 31, and the second motor 34 drives and connects to the second driving wheel 35. The second synchronous belt 37 is sleeved on the second driving wheel 35 and the second driven wheel 36.

[0041] The second clamping mechanism 30 provides a movable rotary clamping function. Its structure is similar to that of the first clamping mechanism 20. The second motor 34 drives the second chuck 33 to rotate via the second driving wheel 35, the second driven wheel 36, and the second synchronous belt 37, thereby rotating the support cover 70 clamped by the second chuck 33. The first clamping mechanism 20 and the second clamping mechanism 30 are arranged opposite to each other to ensure the coaxiality of the quartz tube and the support cover 70, and to keep them rotating synchronously during welding.

[0042] Referring to Figure 5, the inner welding mechanism 40 also includes a slide 43 and a connecting frame 44. The slide 43 is mounted on the second base 31 in a direction parallel to the slide rail 11 (X direction). The connecting frame 44 is movably mounted on the slide 43, and the first support 41 is mounted on the connecting frame 44. Through the cooperation of the slide 43 and the connecting frame 44, the positions of the first support 41 and the inner ring lamp 42 in the axial direction of the quartz tube / support cover can be finely adjusted to ensure that the inner ring lamp 42 is accurately aligned with the welding part.

[0043] Referring to Figures 1 and 7, in some preferred embodiments, the welding device for the tail support cover of the quartz tube further includes a support mechanism 60. The support mechanism 60 includes a base plate 61, a lifting frame 62, and support wheels 63. The base plate 61 is movably mounted on the slide rail 11, the lifting frame 62 is mounted on the base plate 61, and there are two support wheels 63, each rotatably mounted on the lifting frame 62, with the central axis of the support wheels 63 parallel to the length direction (X direction) of the slide rail 11. The support mechanism 60 can provide adjustable auxiliary support for the middle part of a long quartz tube. The support height can be adjusted by the lifting frame 62, and the support position can be adjusted by moving the base plate 61. The support wheels 63 allow the quartz tube to rotate smoothly on them, effectively preventing the quartz tube from sagging or deforming due to its own weight or heat, and ensuring welding accuracy.

[0044] Furthermore, the support wheel 63 is made of graphite. Graphite is heat-resistant, self-lubricating, and chemically stable, preventing it from reacting or sticking to the quartz tube at high temperatures, ensuring reliable support without damaging the surface of the quartz tube.

[0045] In some embodiments, there are two sets of support mechanisms 60, which are spaced apart between the first clamping mechanism 20 and the outer welding mechanism 50. The two sets of support mechanisms 60 can provide more stable multi-point support, further distribute the weight of the quartz tube, and effectively prevent long tubes from vibrating or bending during welding, which is especially suitable for long quartz tubes.

[0046] Referring to Figure 6, a slide table 54 is provided in the base frame 51. The length direction of the slide table 54 is perpendicular to the length direction of the slide rail 11 and parallel to the Y direction. The second bracket 52 is movably mounted on the slide table 54. The slide table 54 allows for precise positional adjustment of the second bracket 52 and the outer ring lamp 53 in a direction perpendicular to the axis of the quartz tube (radial), ensuring that the outer ring lamp 53 and the inner ring lamp 42 are precisely coaxial and can adapt to the welding requirements of quartz tubes of different diameters.

[0047] Furthermore, a fire baffle 55 is provided on the second bracket 52 corresponding to the outer side of the outer ring lamp 53. The fire baffle 55 can effectively prevent the flames or spatter generated during welding from spreading outward, protect the operator's safety, prevent damage to surrounding equipment, and help maintain the temperature environment of the welding area.

[0048] It should be noted that the slide rail 11, slide block 43, and slide table 54 mentioned above can be products such as linear guide rails and lead screw guide rails in the prior art, the first motor 24 and the second motor 34 can be products such as servo motors in the prior art, and the lifting frame 62 can be products such as worm gear screw jacks in the prior art. The structure and working principle of these products belong to the prior art and will not be described in detail here.

[0049] In the welding device for the tail support cover of the quartz tube of this utility model, the first clamping mechanism and the second clamping mechanism are arranged opposite to each other to clamp the quartz tube and the support cover respectively, accurately ensuring the coaxiality of the quartz tube and the support cover and the accuracy of the welding position. Through the installation channel in the second clamping mechanism, the inner ring lamp is accurately delivered into the predetermined welding position inside the quartz tube to directly heat the inner contact surface between the quartz tube and the support cover. The outer ring lamp of the outer welding mechanism is located outside the quartz tube to heat the outer contact surface between the quartz tube and the support cover, ensuring uniform heating in the wall thickness direction of the quartz tube, and simultaneous melting of the inside and outside, achieving deep fusion, significantly improving welding strength, sealing performance and weld uniformity, and reducing bubbles and internal defects; at the same time, it can improve welding efficiency and automation.

[0050] This utility model has been described by the above-described embodiments; however, these embodiments are merely examples for implementing this utility model. It must be noted that the disclosed embodiments do not limit the scope of this utility model. Conversely, any modifications and refinements made without departing from the spirit and scope of this utility model are within the scope of patent protection of this utility model.

Claims

1. A welding device for a quartz tube tail support cover, characterized in that: The welding device for the tail support cover of the quartz tube includes a base, a first clamping mechanism, a second clamping mechanism, an inner welding mechanism, and an outer welding mechanism. The base is provided with a slide rail. The first clamping mechanism is located on the base and at one end of the slide rail, and is used to clamp the quartz tube. The second clamping mechanism is movably mounted on the slide rail, and the first clamping mechanism and the second clamping mechanism are arranged opposite to each other. The second clamping mechanism has an installation channel. The inner welding mechanism includes a first bracket and an inner ring light. The first bracket passes through the installation channel, and the inner ring light is located on the side of the first bracket facing the first clamping mechanism. The outer welding mechanism is located between the first clamping mechanism and the second clamping mechanism. The outer welding mechanism includes a base frame, a second bracket, and an outer ring light. The base frame is movably mounted on the slide rail, the second bracket is mounted on the base frame, and the outer ring light is mounted on the second bracket, with the outer ring light and the inner ring light coaxially arranged.

2. The welding device for the tail support cover of the quartz tube as described in claim 1, characterized in that: The first clamping mechanism includes a first base, a first bearing seat, a first chuck, a first motor, a first drive wheel, a first driven wheel, and a first synchronous belt. The first base is fixed on the base, the first bearing seat is disposed on the first base, the first chuck and the first driven wheel are coaxially connected to the first bearing seat, and the first chuck faces the second clamping mechanism. The first drive wheel is rotatably disposed on the first base, the first motor is driven and connected to the first drive wheel, and the first synchronous belt is sleeved on the first drive wheel and the first driven wheel.

3. The welding device for the tail support cover of the quartz tube as described in claim 2, characterized in that: The inner side of the first chuck is provided with graphite jaws.

4. The welding device for the tail support cover of the quartz tube as described in claim 1, characterized in that: The second clamping mechanism includes a second base, a second bearing seat, a second chuck, a second motor, a second driving wheel, a second driven wheel, and a second synchronous belt. The second base is movably mounted on the slide rail, the second bearing seat is mounted on the second base, the second chuck and the second driven wheel are coaxially connected to the second bearing seat, and the second chuck faces the first clamping mechanism. The mounting channel corresponds to the inner side of the second driven wheel and the second chuck. The second driving wheel is rotatably mounted on the second base, the second motor drives and connects to the second driving wheel, and the second synchronous belt is sleeved on the second driving wheel and the second driven wheel.

5. The welding device for the tail support cover of the quartz tube as described in claim 4, characterized in that: The inner welding mechanism further includes a slide and a connecting frame. The slide is disposed on the second base in a direction parallel to the slide rail, and the connecting frame is movably disposed on the slide. The first bracket is disposed on the connecting frame.

6. The welding device for the tail support cover of the quartz tube as described in claim 1, characterized in that: The welding device for the tail support cover of the quartz tube also includes a support mechanism, which includes a base plate, a lifting frame and support wheels. The base plate is movably mounted on the slide rail, the lifting frame is mounted on the base plate, and there are two support wheels, which are rotatably mounted on the lifting frame, and the central axis of the support wheels is parallel to the length direction of the slide rail.

7. The welding device for the tail support cover of the quartz tube as described in claim 6, characterized in that: The support wheel is made of graphite.

8. The welding device for the tail support cover of the quartz tube as described in claim 6, characterized in that: The support mechanism consists of two sets, which are spaced apart between the first clamping mechanism and the outer welding mechanism.

9. The welding device for the tail support cover of the quartz tube as described in claim 1, characterized in that: The base frame is provided with a slide table, the length direction of which is perpendicular to the length direction of the slide rail, and the second bracket is movably mounted on the slide table.

10. The welding device for the tail support cover of the quartz tube as described in claim 1, characterized in that: The second bracket has a fire baffle plate on the outer side corresponding to the outer ring lamp.

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