Flexible adsorption device integrated debugging tool assembly and integrated debugging method

Abstract

The invention relates to the technical field of mask plate transmission, in particular to a flexible adsorption device integrated debugging tool assembly and an integrated debugging method, in the first direction, a protruding plate part protrudes out of a main plate part from the side away from the bottom face, and the main plate part comprises a first positioning face and a second positioning face; in the second direction, the first positioning face is located on one side of the protruding plate part, the second positioning face is located on the other side of the protruding plate part, and the plate face, away from the main plate part, of the protruding plate part is a shell positioning plate face. The shell positioning plate surface, the first positioning surface and the second positioning surface face the same direction and are parallel to the bottom surface, the first direction is perpendicular to the bottom surface, and the second direction is perpendicular to the first direction. The invention aims to provide an integrated debugging tool assembly and an integrated debugging method for a flexible adsorption device in order to solve at least one technical problem related in the background technology.

Description

Technical Field

[0001] This application relates to the field of mask transmission technology, and more specifically, to an integrated debugging tooling assembly and integrated debugging method for a flexible adsorption device. Background Technology

[0002] Masks are crucial materials in mask transport, being expensive and easily damaged. A mask exchange robot is responsible for transferring materials between the mask stage and the pick-and-place robot. During transport, the safety and reliability of the mask must be ensured. A flexible adsorption device (see patent application CN118721159A, entitled "Adsorption Device for Mask Exchange Robot and Mask Exchange Robot") is a vital component of the mask exchange robot, playing a decisive role in the reliability and safety of the materials during transport. However, existing flexible adsorption devices suffer from poor coplanarity of the adsorption surface, resulting in poor adsorption and sealing performance, and consequently, poor safety and reliability of the materials during transport. Summary of the Invention

[0003] The purpose of this application is to provide an integrated debugging tooling assembly and integrated debugging method for a flexible adsorption device, addressing at least one of the technical problems mentioned in the background art.

[0004] To achieve the above objectives, this application adopts the following technical solution: One aspect of this application provides an integrated debugging fixture assembly for a flexible adsorption device, including a fixture base plate. The fixture base plate includes a main plate portion and a protruding plate portion fixed to the main plate portion. The main plate portion has a bottom surface. In a first direction, the protruding plate portion protrudes from the main plate portion from a side away from the bottom surface. The main plate portion includes a first positioning surface and a second positioning surface. In a second direction, the first positioning surface is located on one side of the protruding plate portion, and the second positioning surface is located on the other side of the protruding plate portion. The plate surface of the protruding plate portion that is disposed away from the main plate portion is a housing positioning plate surface. The housing positioning plate surface, the first positioning surface, and the second positioning surface have the same orientation and are all parallel to the bottom surface. The first direction is perpendicular to the bottom surface, and the second direction is perpendicular to the first direction.

[0005] Optionally, the flexible adsorption device integrated debugging tooling assembly provided in this application further includes a first positioning pin. The first positioning pin includes a first pin body and a first stop portion that are connected in sequence and coaxially arranged. The diameter of the first stop portion is larger than the diameter of the first pin body. The first pin body is used to connect the housing of the flexible adsorption device and the bearing fixing seat in the second direction.

[0006] Optionally, the flexible adsorption device integrated debugging tooling assembly provided in this application further includes a second positioning pin. The second positioning pin includes a second pin body and a second stop portion that are connected in sequence and coaxially arranged. The diameter of the second stop portion is larger than the diameter of the second pin body, and the diameter of the second pin body is smaller than the diameter of the first pin body. The second pin body is used to connect the housing of the flexible adsorption device and the bearing fixing seat in the second direction. In the first direction, the second positioning pin is used to be positioned below the first positioning pin.

[0007] Optionally, the flexible adsorption device integrated debugging tooling assembly provided in this application further includes a limiting block. The limiting block includes a third block portion and an insert portion. One end of the insert portion is fixed to the third block portion. In the thickness direction of the third block portion, the size of the insert portion is smaller than the size of the third block portion, and the insert portion is located in the middle of the third block portion. The thickness direction of the third block portion is arranged parallel to the second direction. The insert portion is used to be inserted into the bearing fixing seat. In the second direction, the third block portion is used to abut against the housing.

[0008] Optionally, the limiting block further includes a fourth blocking portion, wherein the insert portion, the third blocking portion and the fourth blocking portion are connected in sequence, and the size of the third blocking portion is smaller than the size of the fourth blocking portion in the thickness direction of the blocking portion.

[0009] Optionally, the flexible adsorption device integrated debugging tooling assembly provided in this application further includes a dovetail block alignment tooling, which includes a groove part and a limiting block part fixed to the groove part. A through groove is formed on the groove part, and the limiting block part is located in the middle of the through groove. The length direction of the limiting block is parallel to the extension direction of the through groove.

[0010] Optionally, the flexible adsorption device integrated debugging tooling assembly provided in this application further includes a dovetail block leveling block. The dovetail block leveling block includes a first plane and a second plane that are set opposite to each other. The dovetail block leveling block is used to be placed inside the housing. The first plane is used to fit against the bottom surface of the dovetail block fixing plate, and the second plane is used to fit against the bottom wall of the housing.

[0011] Another aspect of this application provides an integrated debugging method for a flexible adsorption device, implemented using the integrated debugging tooling assembly for the flexible adsorption device provided in this application. The method includes: Place the housing on the housing positioning plate surface, so that the bottom surface of the housing is in contact with the housing positioning plate surface; Install the bearing mounting base onto the housing; Place two adsorption strip assemblies on the first positioning surface, and make the adsorption surface of the adsorption strip in the two adsorption strip assemblies fit with the first positioning surface, and fix the two adsorption strip assemblies to the bearing fixing seat; Place the other two adsorption strip assemblies on the second positioning surface, and make the adsorption surface of the adsorption strips in these two adsorption strip assemblies fit with the second positioning surface, and fix these two adsorption strip assemblies to the housing.

[0012] Optionally, the flexible adsorption device integrated debugging tooling assembly further includes a first positioning pin, a second positioning pin, and a limiting block. The first positioning pin includes a first pin body and a first block portion that are connected in sequence and coaxially arranged. The diameter of the first block portion is larger than the diameter of the first pin body. The second positioning pin includes a second pin body and a second block portion that are connected in sequence and coaxially arranged. The diameter of the second block portion is larger than the diameter of the second pin body, and the diameter of the second pin body is smaller than the diameter of the first pin body. The limiting block includes a third block portion and an insert portion. One end of the insert portion is fixed to the third block portion. In the thickness direction of the third block portion, the size of the insert portion is smaller than the size of the third block portion, and the insert portion is located in the middle of the third block portion. The process of mounting the bearing mounting base onto the housing includes: The first pin body is passed sequentially through the bearing mounting holes on the housing and the bearing mounting seat; The second pin body is passed sequentially through the pin holes on the housing and the bearing mounting seat; Insert the insert portion of the limiting block into the cross groove on the bearing fixing seat, and make the third block portion abut against the housing; Accordingly, after placing the two adsorption strip assemblies on the first positioning surface, ensuring that the adsorption surfaces of the adsorption strips in the two adsorption strip assemblies are in contact with the first positioning surface, and fixing the two adsorption strip assemblies to the bearing mounting seat, the method further includes: Remove the first locating pin from the bearing mounting hole and install the cross torsion spring bearing into the bearing mounting hole; Remove the second positioning pin from the pin hole and separate the limiting block from the cross groove.

[0013] Optionally, the flexible adsorption device integrated debugging tooling assembly further includes a dovetail block alignment tooling and a dovetail block leveling block. The dovetail block alignment tooling includes a groove part and a limiting block part fixed to the groove part. A through groove is formed on the groove part, and the limiting block part is located in the middle of the through groove. The dovetail block leveling block includes a first plane and a second plane that are set opposite to each other. Before placing the housing on the housing positioning plate surface, such that the bottom surface of the housing is in contact with the housing positioning plate surface, the method further includes: Place the dovetail block into the mounting groove on the dovetail block fixing plate and adhere the dovetail block to the groove wall. Before the dovetail block is firmly bonded to the mounting groove, place the dovetail block alignment device on the dovetail block, align the two side walls of the dovetail block fixing plate with the two inner side walls of the groove body, and insert the limiting block into the groove on the dovetail block. Remove the dovetail block alignment fixture from the dovetail block fixing plate and the dovetail block; Place the dovetail leveling block into the inner cavity of the housing, and make the second plane fit against the bottom wall of the housing; Place the dovetail block fixing plate in the inner cavity of the housing, and make the first plane fit against the bottom surface of the dovetail block fixing plate; The adjusting rod assembly is installed on the end cap by bolts and nuts, the bolts and nuts being pre-tightened. Place the end cap on the top port of the housing and abut the top of the ceramic ball head of the adjusting rod assembly against the dovetail block; Tighten the bolts and nuts; Remove the dovetail leveling block from the housing.

[0014] The technical solution provided in this application can achieve at least one of the following beneficial effects: The flexible adsorption device integrated debugging tooling assembly and integrated debugging method provided in this application have good coplanarity because the shell positioning plate surface, the first positioning surface and the second positioning surface are parallel to each other, and the adsorption surfaces of each adsorption strip in the four adsorption strip assemblies that are in contact with the material are all parallel to each other. This improves the adsorption performance and sealing performance of the flexible adsorption device, thereby improving the safety and reliability of the material during the transmission process.

[0015] The additional technical features and advantages of this application will become more apparent from the following description or from practical application. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the specific embodiments of this application, the accompanying drawings used in the description of the specific embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0017] Figure 1A schematic diagram of one embodiment of the flexible adsorption device integrated debugging tooling assembly provided in this application, applied to a flexible adsorption device. Figure 2 A schematic diagram of one embodiment of the flexible adsorption device integrated debugging tooling assembly provided in this application, applied to a flexible adsorption device. Figure 3 A partial structural schematic diagram of one embodiment of the dovetail block alignment tooling provided in this application applied to a flexible adsorption device; Figure 4 A three-dimensional structural schematic diagram of one embodiment of the dovetail block alignment fixture provided in this application; Figure 5 A partial structural schematic diagram of an embodiment of the flexible adsorption device integrated debugging tooling assembly provided in this application, applied to a flexible adsorption device. Figure 6 This is a flowchart illustrating one implementation of the flexible adsorption device integration and debugging method provided in this application.

[0018] Figure label: 01. End cap; 02. Housing; 03. Second positioning surface; 04. Protruding plate portion; 05. Mainboard section; 06. Housing positioning plate; 07. First positioning surface; 08. Bearing mounting base; 9. Second locating pin; 10. First locating pin; 12. Insertion plate section; 13. Limiting block; 14. Fourth stop section; 15. Third stop section; 16. Adsorption strip assembly; 17. Cross torsion spring bearing; 18. Dovetail block alignment fixture; 19. Dovetail block; 20. Main connecting column; 21. Dovetail block fixing plate; 22. Tank body; 23. Limiting block; 24. Nut; 25. First plane; 26. Dovetail leveling block; 27. Adjusting rod assembly; 28. Second plane; 29. ​​Tooling base plate. Detailed Implementation

[0019] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0020] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0021] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0022] like Figures 1 to 5 As shown, one aspect of this application provides an integrated debugging fixture assembly for a flexible adsorption device, including a fixture base plate 29. The fixture base plate 29 includes a main plate portion 05 and a protruding plate portion 04 fixed to the main plate portion 05. The main plate portion 05 has a bottom surface. In a first direction, the protruding plate portion 04 protrudes from the main plate portion 05 from the side opposite to the bottom surface. The main plate portion 05 includes a first positioning surface 07 and a second positioning surface 03. In a second direction, the first positioning surface 07 is located on one side of the protruding plate portion 04, and the second positioning surface 03 is located on the other side of the protruding plate portion 04. The plate surface of the protruding plate portion 04 that is opposite to the main plate portion 05 is a housing positioning plate surface 06. The housing positioning plate surface 06, the first positioning surface 07, and the second positioning surface 03 have the same orientation and are all parallel to the bottom surface. The first direction is perpendicular to the bottom surface, and the second direction is perpendicular to the first direction.

[0023] When using the integrated debugging fixture assembly for the flexible adsorption device provided in this application, the fixture base plate 29 is placed on a horizontal plane, the housing 02 of the flexible adsorption device is placed on the housing positioning plate surface 06, the bearing fixing seat 08 is installed at one end of the housing 02, with the bottom surface of the bearing fixing seat 08 facing the first positioning surface 07, the two adsorption strip assemblies 16 are placed on the first positioning surface 07, so that the adsorption surface on the adsorption strip for contact with the material is in complete contact with the first positioning surface 07, then the two adsorption strip assemblies 16 are fixedly connected to the bearing fixing seat 08, the mounting plate is installed on the housing 02, and the other two adsorption strip assemblies are then fixedly connected to the bearing fixing seat 08. The strip assembly 16 is placed on the second positioning surface 03, and the adsorption surface of the corresponding adsorption strip that is in contact with the material is in complete contact with the second positioning surface 03. Then, the two adsorption strip assemblies 16 are fixedly connected to the mounting plate. In this way, since the housing positioning plate surface 06, the first positioning surface 07 and the second positioning surface 03 are parallel to each other, the adsorption surfaces of each adsorption strip in the four adsorption strip assemblies 16 that are in contact with the material are all parallel to each other. This makes the adsorption surfaces have good coplanarity, thereby improving the adsorption performance and sealing performance of the flexible adsorption device, and improving the safety and reliability of materials during the transmission process.

[0024] Optionally, the flexible adsorption device integrated debugging tooling assembly provided in this application embodiment further includes a first positioning pin 10. The first positioning pin 10 includes a first pin body and a first stop portion that are connected in sequence and coaxially arranged. The diameter of the first stop portion is larger than the diameter of the first pin body. The first pin body is used to connect the housing 02 of the flexible adsorption device and the bearing fixing seat 08 in the second direction. The flexible adsorption device is connected to the housing 02 and the bearing mounting base 08 via a cross torsion spring bearing 17. This allows the flexible adsorption device to adapt to the material position to a certain extent when adsorbing materials. Since the bearing mounting base 08 transmits force and movement through elastic deformation, if the cross torsion spring bearing 17 is used to connect the housing 02 and the bearing mounting base 08 during the adjustment of the coplanarity of the adsorption surfaces of each flexible adsorption strip, the stability will be poor, which will adversely affect the accuracy of the adjustment. In this embodiment, when adjusting the coplanarity of the adsorption surfaces of each flexible adsorption strip, a first positioning pin 10 is used instead of the cross torsion spring bearing 17 to connect the housing 02 and the bearing mounting base 08. The first pin body passes through the bearing mounting holes on the housing 02 and the bearing mounting base 08 in sequence. The position of the first positioning pin 10 extending into the bearing mounting hole is limited by the first stop. Since the first pin body is a rigid structure, the stability during the adjustment process is improved, thereby improving the adjustment accuracy and further improving the safety and reliability of materials during the transmission process of the flexible adsorption device.

[0025] Optionally, the flexible adsorption device integrated debugging tooling assembly provided in this application embodiment further includes a second positioning pin 09. The second positioning pin 09 includes a second pin body and a second stop portion that are sequentially connected and coaxially arranged. The diameter of the second stop portion is larger than the diameter of the second pin body, and the diameter of the second pin body is smaller than the diameter of the first pin body. The second pin body is used to connect the housing 02 of the flexible adsorption device and the bearing fixing seat 08 in the second direction. In the first direction, the second positioning pin 09 is used to be positioned below the first positioning pin 10. The second pin body is inserted into the pin holes on the housing 02 and the bearing fixing seat 08 to connect them. The second stop portion limits the extreme position of the pin hole of the second positioning pin 09. In this way, the first positioning pin 10 and the second positioning pin 09 cooperate to restrict the relative movement between the housing 02 and the bearing fixing seat 08 in the Y, Z, Rx, and Ry directions, further improving the stability of the connection between the housing 02 and the bearing fixing seat 08 and improving the debugging accuracy. Wherein, X is the second direction, Z is the first direction, both the first and second directions are perpendicular to Y, Rx represents the direction around the X-axis, and Ry represents the direction around the Y-axis.

[0026] Optionally, the flexible adsorption device integrated debugging tooling assembly provided in this application embodiment further includes a limiting block 13. The limiting block 13 includes a third block portion 15 and an insert portion 12. One end of the insert portion 12 is fixed to the third block portion 15. In the thickness direction of the third block portion, the size of the insert portion 12 is smaller than the size of the third block portion 15, and the insert portion 12 is located in the middle of the third block portion 15. The thickness direction of the third block portion 15 is arranged parallel to the second direction. The insert portion 12 is used to be inserted into the bearing fixing seat 08. In the second direction, the third block portion 15 is used to abut against the housing 02. A cross groove is provided on the bearing mounting base 08, which is formed by the intersection of two straight grooves. When the bearing mounting base 08 is installed on the housing 02, one straight groove is set parallel to the second direction, and the other straight groove is set perpendicular to the second direction. The insert portion 12 of the limiting block 13 is inserted into the straight groove set perpendicular to the second direction, and the third block portion 15 abuts against the housing 02. In this way, the relative movement between the housing 02 and the bearing mounting base 08 in the X and Rz directions is restricted by the limiting block 13, which further improves the stability of the connection between the housing 02 and the bearing mounting base 08 and improves the adjustment accuracy. Moreover, since the insert portion 12 is located in the middle of the third block portion 15 in the thickness direction of the third block portion, the adjustment purpose can be achieved by abutting against the housing 02 on both sides of the third block portion 15. During use, there is no need to specifically identify which side of the third block portion 15 abuts against the housing 02, which improves the convenience and efficiency of the assembly and adjustment of the flexible adsorption device. Here, Rz represents the direction around the Z-axis.

[0027] Optionally, the limiting block 13 further includes a fourth block portion 14. The insert portion 12, the third block portion 15, and the fourth block portion 14 are connected in sequence. In the thickness direction of the block portion, the size of the third block portion 15 is smaller than the size of the fourth block portion 14. In this way, when the third block portion 15 abuts against the housing 02, the fourth block portion 14 can be positioned above the housing 02. When the insert portion 12 is inserted into the cross groove at the top of the bearing mounting seat, the fourth block portion 14 can limit the insertion depth of the insert portion 12 by abutting against the top surface of the housing 02. Furthermore, the fit between the fourth block portion 14 and the top surface of the housing 02 further limits the relative position between the housing 02 and the bearing mounting seat, thereby further improving the stability of the connection between the housing 02 and the bearing mounting seat 08 and improving the adjustment accuracy.

[0028] Optionally, the flexible adsorption device integrated debugging tooling assembly provided in this application embodiment further includes a dovetail block alignment tooling 18. The dovetail block alignment tooling 18 includes a groove portion 22 and a limiting block portion 23 fixed to the groove portion 22. A through groove is formed on the groove portion 22, and the limiting block portion 23 is located in the middle of the through groove. The length direction of the limiting block is parallel to the extension direction of the through groove. The flexible adsorption device is connected to the outside world through the main connecting column 20. The main connecting column 20 cooperates with the housing 02 through the dovetail block fixing plate 21 fixed thereon. The dovetail block 19 is installed in the mounting groove on the dovetail block fixing plate 21, and the adjusting rod assembly 27 is installed on the housing 02. When adsorbing materials, the flexible adsorption device can adapt to the material position to a certain extent through the cooperation between the adjusting rod assembly 27 and the dovetail block 19. The installation accuracy of the dovetail block 19 on the dovetail block fixing plate 21 will affect the coplanarity of each adsorption surface when adsorbing materials. In this embodiment, the dovetail block alignment fixture 18 is used to adjust the installation accuracy of the dovetail block 19 on the dovetail block fixing plate 21. Specifically, the dovetail block 19 is placed in the mounting groove. Inside, the dovetail block 19 is bonded to the wall of the mounting groove. Before the dovetail block 19 is firmly bonded to the mounting groove, the dovetail block alignment fixture 18 is placed on the dovetail block 19, so that the two side walls of the dovetail block fixing plate 21 and the two inner walls of the groove body 22 are in contact one by one, so that the position of the groove body 22 is limited by the dovetail block fixing plate 21. At the same time, the limiting block part 23 is inserted into the groove on the dovetail block 19, so that the limiting block is in close contact with the inner wall of the groove on the dovetail block 19, so that the position of the dovetail block 19 relative to the dovetail block alignment fixture 18 is limited, thereby limiting the position of the dovetail block 19 relative to the dovetail block fixing plate 21. Then, the dovetail block alignment fixture 18 is removed from the dovetail block fixing plate 21 and the dovetail block 19.

[0029] Optionally, the flexible adsorption device integrated debugging tooling assembly provided in this application embodiment further includes a dovetail block leveling block 26. The dovetail block leveling block 26 includes a first plane 25 and a second plane 28 disposed opposite to each other. The dovetail block leveling block 26 is used to be placed inside the housing 02. The first plane 25 is used to fit against the bottom surface of the dovetail block fixing plate 21, and the second plane 28 is used to fit against the bottom wall of the housing 02. The housing 02 of the flexible adsorption device has a cavity formed by the inner wall of the housing 02. The dovetail block fixing plate 21 is located in the cavity. By fitting the dovetail block leveling block 26 against the bottom wall of the housing 02 and the bottom surface of the dovetail block fixing plate 21, the bottom wall of the housing 02 and the bottom surface of the dovetail block fixing plate 21 can be made parallel to each other, thereby achieving the leveling of the dovetail block 19.

[0030] like Figure 6 As shown, another aspect of this application provides an integrated debugging method for a flexible adsorption device, implemented using the integrated debugging tooling assembly for the flexible adsorption device provided in the embodiments of this application. The method comprises: S100: Place the housing 02 on the housing positioning plate surface 06, so that the bottom surface of the housing 02 is in contact with the housing positioning plate surface 06; S200: Install the bearing mounting bracket 08 onto the housing 02; S300: Place two adsorption strip assemblies 16 on the first positioning surface 07, and make the adsorption surface of the adsorption strip in the two adsorption strip assemblies 16 fit with the first positioning surface 07, and fix the two adsorption strip assemblies 16 to the bearing fixing seat 08. S400: Place the other two adsorption strip assemblies 16 on the second positioning surface 03, and make the adsorption surface of the adsorption strip in the two adsorption strip assemblies 16 fit with the second positioning surface 03, and fix the two adsorption strip assemblies 16 to the housing 02.

[0031] Preferably, the mounting plate is installed at the end of the housing 02 away from the bearing fixing seat 08, two adsorption strip assemblies 16 are installed on the bearing fixing seat 08, and two other adsorption strip assemblies 16 are installed on the mounting plate. The adsorption strip assembly 16 includes an adsorption strip, an adjusting seat, and an L-shaped connecting rod connected in sequence. The L-shaped connecting rod is installed on the bearing fixing seat 08 by bolts, the adjusting seat is installed on the L-shaped connecting rod by bolts, and the adsorption strip is fixed to the adjusting seat. When installing the adsorption strip assembly 16 on the bearing fixing seat 08, first tighten the bolts connecting the L-shaped connecting rod and the bearing fixing seat 08, and then tighten the bolts connecting the adjusting seat and the L-shaped connecting rod.

[0032] Preferably, before installing the adsorption strip assembly 16, the air tightness of each adsorption strip assembly 16 is tested. Specifically, after connecting the air inlet of the adsorption strip assembly 16 with the adsorption strips bonded together to a vacuum source, it is placed on the material. The vacuum source pressure is adjusted to -60 kPa ± 0.2 kPa, and the pressure of the adsorption strip assembly 16 should be maintained within the range of -59.7 to -60 kPa. The vacuum source is then cut off for a pressure holding test. The pressure should be higher than -30 kPa after 150 seconds, and the pressure drop should be ≤12 kPa / min. Otherwise, it is unqualified.

[0033] The flexible adsorption device integrated debugging method provided in this application is implemented using the flexible adsorption device integrated debugging tooling assembly provided in this application. Since the housing positioning plate surface 06, the first positioning surface 07 and the second positioning surface 03 are parallel to each other, the adsorption surfaces of each adsorption strip in the four adsorption strip assemblies 16 that are in contact with the material are all parallel to each other. This makes each adsorption surface have good coplanarity, thereby improving the adsorption performance and sealing performance of the flexible adsorption device, and improving the safety and reliability of the material during the transmission process.

[0034] Optionally, the flexible adsorption device integrated debugging tooling assembly further includes a first positioning pin 10, a second positioning pin 09, and a limiting block 13. The first positioning pin 10 includes a first pin body and a first blocking portion that are connected in sequence and coaxially arranged. The diameter of the first blocking portion is larger than the diameter of the first pin body. The second positioning pin 09 includes a second pin body and a second blocking portion that are connected in sequence and coaxially arranged. The diameter of the second blocking portion is larger than the diameter of the second pin body, and the diameter of the second pin body is smaller than the diameter of the first pin body. The limiting block 13 includes a third blocking portion 15 and an insert portion 12. One end of the insert portion 12 is fixed to the third blocking portion 15. In the thickness direction of the third blocking portion, the size of the insert portion 12 is smaller than the size of the third blocking portion 15, and the insert portion 12 is located in the middle of the third blocking portion 15. The process of installing the bearing mounting base 08 onto the housing 02 includes: The first pin body is passed sequentially through the bearing mounting holes on the housing 02 and the bearing fixing seat 08; The second pin body is passed sequentially through the pin holes on the housing 02 and the bearing fixing seat 08; Insert the insert portion 12 of the limiting block 13 into the cross groove on the bearing fixing seat 08, and make the third block portion 15 abut against the housing 02; Accordingly, after placing the two adsorption strip assemblies 16 on the first positioning surface 07, making the adsorption surfaces of the adsorption strips in the two adsorption strip assemblies 16 fit against the first positioning surface 07, and fixing the two adsorption strip assemblies 16 to the bearing fixing seat 08, the method further includes: Remove the first locating pin 10 from the bearing mounting hole and install the cross torsion spring bearing 17 into the bearing mounting hole; Remove the second positioning pin 09 from the pin hole and separate the limiting block 13 from the cross groove.

[0035] Preferably, the cross groove is connected to the bearing mounting hole. A bolt is installed on the bearing mounting seat 08, and the bolt passes through the cross groove. After the first pin body is installed in the bearing mounting hole, the bolt is tightened so that the bearing mounting hole clamps the bolt. When it is necessary to remove the first positioning pin 10, the bolt can be loosened.

[0036] In this way, the first positioning pin 10 and the second positioning pin 09 cooperate to restrict the relative movement between the housing 02 and the bearing fixing seat 08 in the Y, Z, Rx and Ry directions. The limit block 13 restricts the relative movement between the housing 02 and the bearing fixing seat 08 in the X and Rz directions, which further improves the stability of the connection between the housing 02 and the bearing fixing seat 08 and improves the debugging accuracy.

[0037] Optionally, the flexible adsorption device integrated debugging tooling assembly further includes a dovetail block alignment tooling 18 and a dovetail block leveling block 26. The dovetail block alignment tooling 18 includes a groove part 22 and a limiting block part 23 fixed to the groove part 22. A through groove is formed on the groove part 22, and the limiting block part 23 is located in the middle of the through groove. The dovetail block leveling block 26 includes a first plane 25 and a second plane 28 that are arranged opposite to each other. Before placing the housing 02 on the housing positioning plate surface 06, so that the bottom surface of the housing 02 is in contact with the housing positioning plate surface 06, the method further includes: Place the dovetail block 19 into the mounting groove on the dovetail block fixing plate 21 and bond the dovetail block 19 to the groove wall. Before the dovetail block 19 is firmly bonded to the mounting groove, place the dovetail block alignment fixture 18 on the dovetail block 19, align the two side walls of the dovetail block fixing plate 21 with the two inner side walls of the groove body 22, and insert the limiting block part 23 into the groove on the dovetail block 19. Remove the dovetail block alignment fixture 18 from the dovetail block fixing plate 21 and the dovetail block 19; Place the dovetail leveling block 26 into the inner cavity of the housing 02, and make the second plane 28 fit against the bottom wall of the housing 02; Place the dovetail block fixing plate 21 in the inner cavity of the housing 02, and make the first plane 25 fit against the bottom surface of the dovetail block fixing plate 21; The adjusting rod assembly 27 is installed on the end cover 01 by bolts and nuts 24, and the bolts and nuts 24 are pre-tightened. The end cap 01 is placed over the top port of the housing 02, and the top of the ceramic ball head of the adjusting rod assembly 27 abuts against the dovetail block 19; Tighten the bolt and the nut 24; Remove the dovetail leveling block 26 from the housing 02.

[0038] In this embodiment of the application, preferably, an airtightness test is performed again after the installation of each adsorption strip assembly 16 is completed. Specifically, the flexible adsorption device is placed on the material, the two air inlets are connected to a vacuum source, the vacuum source pressure is adjusted to -60kpa±0.2kpa, and the pressure should be maintained within the range of -59.5~-60kpa. The vacuum source is then cut off to conduct a pressure holding test, ensuring that the pressure drop is ≤10kpa / 20s. The flexible adsorption device and the material are then lifted, the vacuum source is cut off, and the material falling time is recorded. The material falling time should be ≥60s. The measurement is repeated 3 times, and the minimum value is taken (a sponge pad can be placed below to prevent damage after the material falls).

[0039] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A flexible adsorption device integrated debugging tooling assembly, characterized in that, The fixture includes a base plate, which comprises a main plate portion and a protruding plate portion fixed to the main plate portion. The main plate portion has a bottom surface. In a first direction, the protruding plate portion protrudes from the main plate portion from a side away from the bottom surface. The main plate portion includes a first positioning surface and a second positioning surface. In a second direction, the first positioning surface is located on one side of the protruding plate portion, and the second positioning surface is located on the other side of the protruding plate portion. The plate surface of the protruding plate portion that is disposed away from the main plate portion is a housing positioning plate surface. The housing positioning plate surface, the first positioning surface, and the second positioning surface have the same orientation and are all parallel to the bottom surface. The first direction is perpendicular to the bottom surface, and the second direction is perpendicular to the first direction.

2. The integrated debugging tooling assembly for the flexible adsorption device according to claim 1, characterized in that, It also includes a first positioning pin, which includes a first pin body and a first stop portion that are connected in sequence and coaxially arranged. The diameter of the first stop portion is larger than the diameter of the first pin body. The first pin body is used to connect the housing of the flexible adsorption device and the bearing fixing seat in the second direction.

3. The integrated debugging tooling assembly for the flexible adsorption device according to claim 2, characterized in that, It also includes a second positioning pin, which includes a second pin body and a second stop portion that are connected in sequence and coaxially arranged. The diameter of the second stop portion is larger than the diameter of the second pin body, and the diameter of the second pin body is smaller than the diameter of the first pin body. The second pin body is used to connect the housing of the flexible adsorption device and the bearing fixing seat in the second direction, and the second positioning pin is used to be disposed below the first positioning pin in the first direction.

4. The integrated debugging tooling assembly for the flexible adsorption device according to claim 3, characterized in that, It also includes a limiting block, which includes a third blocking part and an insert part. One end of the insert part is fixed to the third blocking part. The size of the insert part is smaller than the size of the third blocking part in the thickness direction of the third blocking part, and the insert part is located in the middle of the third blocking part. The thickness direction of the third blocking part is arranged parallel to the second direction. The insert part is used to be inserted into the bearing fixing seat. In the second direction, the third blocking part is used to abut against the housing.

5. The integrated debugging tooling assembly for the flexible adsorption device according to claim 4, characterized in that, The limiting block also includes a fourth blocking part. The insert part, the third blocking part and the fourth blocking part are connected in sequence. In the thickness direction of the blocking part, the size of the third blocking part is smaller than the size of the fourth blocking part.

6. The integrated debugging tooling assembly for the flexible adsorption device according to any one of claims 1 to 5, characterized in that, It also includes a dovetail block alignment fixture, which includes a groove and a limiting block fixed to the groove. A through groove is formed on the groove, and the limiting block is located in the middle of the through groove. The length direction of the limiting block is parallel to the extension direction of the through groove.

7. The integrated debugging tooling assembly for the flexible adsorption device according to claim 6, characterized in that, It also includes a dovetail leveling block, which includes a first plane and a second plane that are set opposite to each other. The dovetail leveling block is used to be placed inside the housing. The first plane is used to fit against the bottom surface of the dovetail fixing plate, and the second plane is used to fit against the bottom wall of the housing.

8. A method for integrating and debugging a flexible adsorption device, characterized in that, The method is implemented using the integrated debugging tooling assembly of the flexible adsorption device as described in any one of claims 1 to 7, characterized in that the method comprises: Place the housing on the housing positioning plate surface, so that the bottom surface of the housing is in contact with the housing positioning plate surface; Install the bearing mounting base onto the housing; Place two adsorption strip assemblies on the first positioning surface, and make the adsorption surface of the adsorption strip in the two adsorption strip assemblies fit with the first positioning surface, and fix the two adsorption strip assemblies to the bearing fixing seat; Place the other two adsorption strip assemblies on the second positioning surface, and make the adsorption surface of the adsorption strips in these two adsorption strip assemblies fit with the second positioning surface, and fix these two adsorption strip assemblies to the housing.

9. The integrated debugging method for the flexible adsorption device according to claim 8, characterized in that, The flexible adsorption device integrated debugging tooling assembly further includes a first positioning pin, a second positioning pin, and a limiting block. The first positioning pin includes a first pin body and a first block portion that are connected in sequence and coaxially arranged. The diameter of the first block portion is larger than the diameter of the first pin body. The second positioning pin includes a second pin body and a second block portion that are connected in sequence and coaxially arranged. The diameter of the second block portion is larger than the diameter of the second pin body, and the diameter of the second pin body is smaller than the diameter of the first pin body. The limiting block includes a third block portion and an insert portion. One end of the insert portion is fixed to the third block portion. In the thickness direction of the third block portion, the size of the insert portion is smaller than the size of the third block portion, and the insert portion is located in the middle of the third block portion. The process of mounting the bearing mounting base onto the housing includes: The first pin body is passed sequentially through the bearing mounting holes on the housing and the bearing mounting seat; The second pin body is passed sequentially through the pin holes on the housing and the bearing mounting seat; Insert the insert portion of the limiting block into the cross groove on the bearing fixing seat, and make the third block portion abut against the housing; Accordingly, after placing the two adsorption strip assemblies on the first positioning surface, ensuring that the adsorption surfaces of the adsorption strips in the two adsorption strip assemblies are in contact with the first positioning surface, and fixing the two adsorption strip assemblies to the bearing mounting seat, the method further includes: Remove the first locating pin from the bearing mounting hole and install the cross torsion spring bearing into the bearing mounting hole; Remove the second positioning pin from the pin hole and separate the limiting block from the cross groove.

10. The integrated debugging method for the flexible adsorption device according to claim 8, characterized in that, The flexible adsorption device integrated debugging tooling assembly also includes a dovetail block alignment tooling and a dovetail block leveling block. The dovetail block alignment tooling includes a groove part and a limiting block part fixed to the groove part. A through groove is formed on the groove part, and the limiting block part is located in the middle of the through groove. The dovetail block leveling block includes a first plane and a second plane that are set opposite to each other. Before placing the housing on the housing positioning plate surface, such that the bottom surface of the housing is in contact with the housing positioning plate surface, the method further includes: Place the dovetail block into the mounting groove on the dovetail block fixing plate and adhere the dovetail block to the groove wall. Before the dovetail block is firmly bonded to the mounting groove, place the dovetail block alignment device on the dovetail block, align the two side walls of the dovetail block fixing plate with the two inner side walls of the groove body, and insert the limiting block into the groove on the dovetail block. Remove the dovetail block alignment fixture from the dovetail block fixing plate and the dovetail block; Place the dovetail leveling block into the inner cavity of the housing, and make the second plane fit against the bottom wall of the housing; Place the dovetail block fixing plate in the inner cavity of the housing, and make the first plane fit against the bottom surface of the dovetail block fixing plate; The adjusting rod assembly is installed on the end cap by bolts and nuts, the bolts and nuts being pre-tightened. Place the end cap on the top port of the housing and abut the top of the ceramic ball head of the adjusting rod assembly against the dovetail block; Tighten the bolts and nuts; Remove the dovetail leveling block from the housing.

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