High-precision measuring rod for semiconductor quartz large square cavity

Abstract

The invention discloses a high-precision measuring rod for a semiconductor quartz large square cavity, and relates to the technical field of detection tools, the high-precision measuring rod comprises a measuring rod body, the width of the measuring rod body is gradually reduced from a mounting end to a measuring end, and one side surface of the mounting end is hinged with a joint through a rotating assembly; the connector comprises a mounting groove penetrating through the upper surface, the mounting groove communicates with a mounting cavity, and the outer side end of the mounting cavity communicates with an inclined mounting opening. The problem of large-depth form and position measurement in a narrow space of a quartz large square cavity can be effectively solved, the measurement precision is remarkably improved, and the requirement of semiconductor manufacturing for high-precision measurement is met. The degree of freedom of the measuring rod is greatly improved, so that the measuring rod can be flexibly operated in a complex space environment. The stability of the measuring rod is enhanced, and measuring errors caused by shaking of the measuring rod are effectively avoided.

Description

Technical Field

[0001] This invention relates to the field of testing tooling technology, specifically to a high-precision measuring rod for a large square cavity semiconductor quartz. Background Technology

[0002] Semiconductor-grade quartz rectangular cavities are large, narrow, rectangular products with a low internal height of approximately 50mm and a length reaching approximately 1200mm. Around 600mm from the center, there are several small countersunk holes requiring depth (tolerance ±0.05) and parallelism (<0.1mm) measurements. Due to insufficient internal space, a three-dimensional measuring probe cannot be inserted for measurement. Ordinary height gauges are too short, and extending them results in significant deflection, poor accuracy, and poor joint flexibility and stability, making them prone to deformation and unsuitable for measurement requirements. The complexity of measuring semiconductor-grade quartz rectangular cavities has long remained unresolved, becoming a pain point in the industry. Current measurement methods involve first measuring the external distance, then using an ultrasonic thickness gauge to measure the wall thickness, and finally calculating the distance from the inner wall to the reference surface. However, this method is time-consuming, labor-intensive, has large cumulative errors, and low accuracy, failing to meet the high-precision measurement requirements of semiconductor manufacturing.

[0003] Chinese Patent Publication No. CN220893297U, Publication Date: May 3, 2024, discloses a Chinese patent entitled "An Ultrasonic Thickness Gauge with an Easily Fixable Probe." The patent includes an ultrasonic thickness gauge body and a probe connected to the body via a cable. A fixing assembly is provided on the ultrasonic thickness gauge body, including an outer sleeve fitted onto the probe and a miniature vacuum pump mounted on the body. The outer sleeve has a ventilation chamber inside, and multiple vacuum suction cups are fixedly installed on its bottom surface, communicating with the ventilation chamber. A flexible tube is fixedly installed between the outer sleeve and the miniature vacuum pump, with its end connected to the ventilation chamber. A threaded connector is fixedly installed at the end of the tube near the outer sleeve, and a limiting plate is fixedly installed on the threaded connector. The threaded connector is threadedly connected to the outer sleeve. While this ultrasonic thickness gauge can measure the size of countersunk holes in large cubic quartz structures used for semiconductors, it is time-consuming, labor-intensive, and has a large cumulative error. Summary of the Invention

[0004] This invention provides a high-precision measuring rod for a large square cavity of semiconductor quartz. By setting a connector and a measuring rod body, it enables high-precision measurement of the shape and position of the large square cavity of quartz in a narrow space with great depth.

[0005] A further objective of this invention is to improve the degree of freedom and stability of the measuring rod by setting up a joint and a rotating assembly, thereby ensuring measurement accuracy.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a high-precision measuring rod for a large square cavity of semiconductor quartz, comprising a measuring rod body, the width of the measuring rod body gradually decreasing from the mounting end to the measuring end, and a connector hinged to one side of the mounting end via a rotating assembly; the connector includes a mounting groove provided through the upper surface, the mounting groove communicating with a mounting cavity, and an inclined mounting opening communicating with the outer end of the mounting cavity.

[0007] Preferably, the mounting cavity has a first opening on the mounting side, and the length of the mounting cavity is greater than the length of the mounting groove. The mounting cavity is located below the mounting groove. The depth of the mounting groove is the same as the depth of the mounting cavity. The mounting groove also has an opening on the same side as the first opening. When the measuring rod is installed on the height gauge, the positioning element on the height gauge is installed in the mounting groove and the mounting cavity. The outer end of the positioning element is L-shaped. The upper surface of the measuring end of the measuring rod body has a connecting shaft for connecting the measuring element. The outer end of the positioning element is a fixing block. A bolt passes through the first mounting hole and connects to the fixing block, initially fixing the positioning element in the joint. This structural design makes the connection between the measuring rod and the height gauge more stable, and the L-shaped outer end of the positioning element can be accurately embedded in the mounting groove and the mounting cavity, thereby significantly improving the installation accuracy and stability of the measuring rod.

[0008] Preferably, the mounting port is located on the outer side of the mounting end of the connector. A first guide slope is provided at the bottom of the mounting port, inclined towards the mounting cavity. The angle α between the first guide slope and the bottom surface of the connector is 30°–60°. The first and second guide slopes have the same inclination angle, preferably 45°. The length of the first guide slope is greater than that of the second guide slope, with a length ratio of 0.4–0.6. A positioning block extends from the inner side of the bottom end of the positioning component, inclined and engaged between the first and second guide slopes. A positioning hole is provided above the positioning block, with a trapezoidal longitudinal section. The outer wall of the mounting groove is engaged within the positioning hole. This allows the positioning component to enter the mounting cavity more smoothly during installation, reducing friction and resistance, and improving installation efficiency. The inclined design of the guide slope also enhances the deformation resistance of the measuring rod during measurement, ensuring the stability and perpendicularity of the connection, further improving the accuracy and reliability of the measurement.

[0009] Preferably, the bottom end of the first guide bevel extends to the bottom surface of the connector, and the top end extends to the mounting cavity. The mounting opening is provided on the mounting side, and the top end of the mounting opening is provided with a second guide bevel, which is inclined towards the mounting groove. The width q of the mounting opening is 13-17 mm, preferably 15 mm; the width t of the connector is 26-30 mm, preferably 28 mm; and the length s of the connector is 63-67 mm, preferably 66 mm. This ensures optimal matching of the measuring rod during installation and measurement, improves the overall structural strength of the measuring rod, and enables it to better adapt to complex measurement environments.

[0010] Preferably, the connector has a first mounting hole penetrating the mounting groove near the measuring end, and a second mounting hole penetrating the mounting cavity near the measuring end. The first mounting hole and the mounting cavity are connected. The second mounting hole is used to fix a pressure block on the height gauge. The pressure block is Π-shaped, with a slotted hole penetrating its upper surface. Bolts pass through the slotted hole and the second mounting hole to fix the connector and the pressure block. One end of the pressure block extends into the mounting cavity, and this end is larger than the end fixed to the outer side of the connector. This makes the connection between the measuring rod and the height gauge more secure. The slotted hole design of the pressure block allows the bolt to be adjusted within a certain range, thereby improving the flexibility and accuracy of installation. It also prevents displacement caused by external forces during measurement.

[0011] Preferably, the ratio d of the mounting groove length to the mounting cavity length is 0.2–0.5, the height ratio h is 0.6–0.8, the longitudinal section of the measuring rod body is trapezoidal, and the length L > 600 mm. The mounting groove length d1 is 12–16, preferably 14 mm, the mounting cavity length d2 is 38–42, preferably 40 mm, the mounting groove height h1 is 7–11, preferably 9 mm, the mounting cavity height h2 is 11–15, preferably 13 mm, and the width k of the outer wall of the mounting groove is 1–5, preferably 3 mm. The length L is preferably 657.5 mm, which can accurately measure the form and position tolerances of the 0-600 mm position in narrow spaces, allowing the measuring rod to better adapt to measurement needs in narrow spaces while maintaining sufficient structural strength.

[0012] Preferably, the connector has a rotating cavity on the side facing the measuring rod body, the rotating cavity has a second opening on the side facing the measuring rod body, and a rotating shaft is fixedly mounted on the side of the measuring rod body facing the connector. The width of the second opening is smaller than that of the rotating cavity, and the rotating cavity is a circular cavity.

[0013] Preferably, a rotating component is connected to the end of the rotating shaft. The rotating component has several rotating arms evenly distributed around its circumference. Each rotating arm is arc-shaped, and a buffer groove is provided on one side of the root of each rotating arm. The rotating component has a circular longitudinal section, and its rotating wall is elastic. When the rotating wall is compressed, the buffer groove is also compressed. This allows the measuring rod to rotate flexibly in multiple directions, greatly improving its degree of freedom and enabling it to adapt to complex measurement angles and positions.

[0014] Preferably, the rotating component extends into the rotating cavity, and a limiting block is provided on the outer end of the rotating arm facing the wall of the rotating cavity. A limiting groove is provided on the wall of the rotating cavity at a corresponding position, and the limiting block is engaged within the limiting groove. Both the limiting groove and the limiting block are hemispherical. Rotating the measuring rod body drives the rotating component to rotate, which in turn drives the rotating arm to rotate. The limiting block at the end of the rotating arm moves from its original limiting groove to the limiting groove at the rotating position, completing the rotation and limiting. This facilitates the installation of the measuring rod and enables measurements in various directions.

[0015] Preferably, the rotating shaft is disposed within the second opening, and a bearing is provided between the outer circumference of the rotating shaft and the inner wall of the second opening. This improves the stability of the measuring rod during rotation and ensures the accuracy and consistency of the measurement results.

[0016] Beneficial Effects: This invention provides a high-precision measuring rod specifically designed for large square quartz cavities in semiconductor manufacturing. Through a unique connector and measuring rod body design, it effectively solves the challenge of deep geometrical and positional measurements within the narrow space of a large square quartz cavity, significantly improving measurement accuracy and meeting the high-precision measurement requirements of semiconductor manufacturing. Furthermore, by incorporating a connector and rotating assembly, this invention greatly enhances the measuring rod's degrees of freedom, enabling flexible operation in complex spatial environments. Simultaneously, the connector design strengthens the measuring rod's stability, effectively preventing measurement errors caused by rod wobbling, thereby ensuring the accuracy and reliability of the measurement results. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the present invention.

[0018] Figure 2 for Figure 1 Enlarged view of the connector at point A.

[0019] Figure 3 This is a front view of the present invention.

[0020] Figure 4 This is an assembly cross-sectional view of the measuring rod body and the connector of the present invention.

[0021] Figure 5 This is a cross-sectional view of the rotating component of the present invention.

[0022] Figure 6 This is a cross-sectional view of the assembly of the connector and the height gauge of the present invention.

[0023] Reference numerals: 1: Measuring rod body; 2: Connector; 3: Mounting cavity; 4: Mounting groove; 5: Mounting opening; 6: First guide slope; 7: Second guide slope; 8: First mounting hole; 9: Second mounting hole; 10: Positioning component; 11: Fixing block; 12: Positioning block; 13: Positioning hole; 14: Pressure block; 15: Rotating shaft; 16: Rotating component; 17: Bearing; 18: Rotating arm; 19: Limiting block; 20: Limiting groove; 21: Buffer groove; 22: Rotating cavity; 23: Connecting shaft; 24: First opening; 25: Second opening. Detailed Implementation

[0024] This invention provides a high-precision measuring rod for large quartz cavities in semiconductor manufacturing. The core design goal is to address the technical challenges of low accuracy and difficulty in measuring the form and position parameters of large quartz cavities within narrow spaces and at great depths. Through an innovative design of the fitting structure between the connector 2 and the measuring rod body 1, combined with a rotating assembly, the measuring rod achieves flexible rotation and stable positioning, ensuring high-precision measurement even in complex spatial environments. This meets the stringent measurement requirements for the form and position parameters of large quartz cavities in the semiconductor manufacturing industry.

[0025] like Figures 1-6 As shown, the high-precision measuring rod for a large quartz cavity of the present invention uses the measuring rod body 1 and the connector 2 as core components, and together with the rotating assembly, constructs a complete measurement adaptation system. It mainly consists of the measuring rod body 1, the connector 2, the rotating assembly, and the matching positioning and connecting structure. Through precise mechanical connections and coordinated cooperation, the components achieve a stable assembly of the measuring rod and the height gauge, while ensuring flexible adjustment and accurate measurement of the measuring rod within the narrow space of the large quartz cavity. The width of the measuring rod body 1 gradually decreases from the mounting end to the measuring end. This gradual structural design effectively reduces the volume of the measuring end, making it easier to insert into the narrow area of ​​the quartz square cavity, while ensuring that the mounting end has sufficient structural strength to meet the stability requirements of the connection with the connector 2. One side of the mounting end is hinged to the connector 2 through a rotating component, allowing the measuring rod body 1 to rotate flexibly relative to the connector 2, improving the freedom of measurement operation. The connector 2 serves as the connection medium between the measuring rod and the height gauge. It has a mounting groove 4 that penetrates the upper surface inside. The mounting groove 4 is connected to the mounting cavity 3 below, and the outer end of the mounting cavity 3 is connected to an inclined mounting opening 5. Through the coordinated design of the mounting groove 4, the mounting cavity 3, and the mounting opening 5, a precise fit and stable fixation with the height gauge positioning component 10 are achieved.

[0026] The mounting cavity 3 has a first opening 24 on the mounting side. The length of the mounting cavity 3 is greater than the length of the mounting groove 4, and the mounting cavity 3 is entirely positioned below the mounting groove 4, forming a cavity structure with upper and lower parts arranged. The depth of the mounting groove 4 is consistent with the depth of the mounting cavity 3, ensuring that the positioning component 10 is subjected to balanced forces after installation and preventing the positioning component 10 from tilting due to depth differences. The mounting groove 4 also has an opening on the same side as the first opening 24, so that the mounting groove 4 and the mounting cavity 3 form a through-hole structure on the same side. When the measuring rod is installed on the height gauge, the positioning component 10 on the height gauge can be quickly inserted into the mounting groove 4 and the mounting cavity 3 from the opening on the same side, greatly improving the ease of assembly. The outer end of the positioning component 10 is designed with an L-shaped structure, which can be precisely adapted to the layered layout of the mounting groove 4 and the mounting cavity 3 to achieve vertical positioning of the positioning component 10. A connecting shaft 23 is fixedly provided on the upper surface of the measuring end of the measuring rod body 1. The connecting shaft 23 is used to connect measuring components such as dial indicators, providing a stable installation reference for the measuring components. The L-shaped structure at the outer end of the positioning element 10 extends to form a fixing block 11. The corresponding position of the connector 2 is provided with a first mounting hole 8. The bolt passes through the first mounting hole 8 and is threadedly connected to the fixing block 11 to initially fix the positioning element 10 in the connector 2.

[0027] The structural design offers significant advantages, ensuring a more stable connection between the measuring rod and the height gauge. The layered layout of the mounting cavity 3 and mounting groove 4 provides a clear installation and positioning reference for the positioning component 10, preventing misalignment during installation. The shared-side openings of both components expand the assembly operation space, facilitating observation and adjustment by operators and reducing assembly difficulty. The L-shaped outer end of the positioning component 10 can be precisely embedded into the mounting groove 4 and mounting cavity 3, achieving initial positioning through the two contact surfaces. Combined with the bolt passing through the first mounting hole 8 and connecting to the fixing block 11, a double positioning and fixing structure is formed, effectively preventing axial or radial movement of the positioning component 10 during measurement, significantly improving the installation accuracy and stability of the measuring rod. The measuring end connecting shaft 23 provides a standardized connection interface for the measuring component, facilitating quick replacement of different types of measuring components to adapt to different shape and position parameter measurement needs. Simultaneously, it ensures the coaxiality of the connection between the measuring component and the measuring rod body 1, reducing measurement errors caused by connection deviations and further guaranteeing measurement accuracy.

[0028] The mounting port 5 is located on the outer side of the mounting end of the connector 2. A first guide slope 6 is provided at the bottom of the mounting port 5, inclined towards the inner side of the mounting cavity 3. The angle α between the first guide slope 6 and the bottom surface of the connector 2 ranges from 30° to 60°, with α preferably set to 45°. The first guide slope 6 and the second guide slope 7 at the top of the mounting port 5 have the same inclination angle, and the length of the first guide slope 6 is greater than that of the second guide slope 7, with their length ratio controlled between 0.4 and 0.6. A positioning block 12 extends from the inner side of the bottom end of the height gauge positioning component 10. The positioning block 12 is inclined, and its inclination angle matches the guide slope, allowing it to be precisely engaged between the first guide slope 6 and the second guide slope 7, thus positioning the positioning component 10. A positioning hole 13 is provided above the positioning block 12. The longitudinal section of the positioning hole 13 is trapezoidal, allowing the outer wall of the mounting groove 4 to be precisely engaged within the positioning hole 13, further strengthening the connection and positioning between the positioning component 10 and the connector 2.

[0029] This structural design allows the positioning component 10 to enter the mounting cavity 3 more smoothly during installation, effectively reducing friction and resistance and significantly improving installation efficiency. The optimal 45° tilt angle achieves a balance between guiding effect and structural strength, ensuring the guide slope has sufficient load-bearing capacity and preventing deformation under stress. The length ratio design of the first guide slope 6 and the second guide slope 7 ensures uniform vertical force distribution after the positioning block 12 is engaged, improving positioning stability. The engagement of the positioning block 12 with the double guide slopes forms the first line of defense for positioning, effectively limiting the vertical displacement of the positioning component 10. The trapezoidal positioning hole 13, fitted into the outer wall of the mounting groove 4, utilizes the guiding and limiting characteristics of the trapezoidal structure to further limit the lateral displacement of the positioning component 10, forming double positioning protection and significantly enhancing the deformation resistance of the measuring rod during measurement. This double positioning structure not only ensures the stability and perpendicularity of the connection but also effectively absorbs minor vibrations during measurement, reducing the impact of vibration on measurement accuracy and further improving measurement accuracy and reliability.

[0030] The bottom end of the first guide slope 6 extends to the bottom surface of the connector 2, and the top end extends directly into the interior of the mounting cavity 3, forming a through-type guide structure. The mounting port 5 is set with an opening on the mounting side, which works in conjunction with the opening on the same side of the mounting groove 4 and the mounting cavity 3, further expanding the assembly operation space. The top end of the mounting port 5 is provided with a second guide slope 7, which is inclined towards the inside of the mounting groove 4, forming a symmetrical guide structure with the first guide slope 6. The width q of the mounting port 5 is set to 13-17mm, preferably 15mm; the width t of the connector 2 is set to 26-30mm, preferably 28mm; and the length s of the connector 2 is set to 63-67mm, preferably 66mm. The optimized design of these dimensional parameters ensures precise fit between the components.

[0031] The core value of this structural design lies in ensuring optimal matching of the measuring rod during installation and measurement, significantly improving the overall structural strength of the measuring rod and enabling it to better adapt to complex measurement environments. The coordinated design of the mounting port 5's side opening and the double guide ramps not only facilitates the insertion of the positioning component 10 but also provides operators with a clear observation view during assembly, allowing for timely adjustments to the installation posture of the positioning component 10 and reducing assembly errors. The preferred width of the mounting port 5, the width of the connector 2, and its length are the optimal parameter combinations determined based on extensive experiments: a reasonable width of the mounting port 5 ensures the smooth passage of the positioning component 10 while avoiding an excessively large opening that would reduce the structural strength of the connector 2; the width and length design of the connector 2, while ensuring sufficient space for the internal mounting groove 4 and mounting cavity 3, makes the overall structure of the connector 2 compact, meeting the connection requirements with the height gauge without being too large and affecting measurement operations in confined spaces. The precise matching of these dimensions ensures that the force is balanced on all parts of the connector 2, avoids stress concentration caused by unreasonable local dimensions, improves the structural stability and service life of the connector 2, and enables the measuring rod to maintain stable measurement accuracy during long-term use, better adapting to the complex environment and stringent requirements in the measurement process of semiconductor quartz square cavity.

[0032] The first mounting hole 8 is in communication with the mounting cavity 3. The second mounting hole 9 is specifically used to fix the pressure block 14 on the height gauge. The pressure block 14 adopts a Π-shaped structure design, with a through hole on its upper end face. By passing a bolt through the through hole and engaging with the threaded part of the second mounting hole 9, the connector 2 and the pressure block 14 can be firmly fixed. One end of the pressure block 14 extends into the mounting cavity 3, and the size of the end extending into the mounting cavity 3 is larger than the end fixed to the outer side of the connector 2, forming a "large head" type limiting structure.

[0033] This structural design makes the connection between the measuring rod and the height gauge more secure, providing a stable foundation for high-precision measurement. The layered arrangement of the first mounting hole 8 and the second mounting hole 9, combined with the dual fixation of the positioning component 10 fixing block 11 and the pressure block 14, forms a dual reinforcement system of "preliminary fixation + reinforced fixation": the first mounting hole 8 achieves preliminary fixation by connecting to the positioning component 10 fixing block 11 with bolts, limiting the basic displacement of the positioning component 10; the second mounting hole 9 achieves reinforced fixation through the pressure block 14. The Π-shaped pressure block 14 can span between the surface of the connector 2 and the inside of the mounting cavity 3, applying clamping force to the positioning component 10 from both above and below, further limiting the movement of the positioning component 10. The design of the waist hole on the pressure block 14 has significant advantages. The elongated structure of the waist hole allows the bolt to be adjusted within a certain range, which can accommodate minor deviations during the installation of the positioning component 10, improving the flexibility and adaptability of the installation, while also facilitating operators to accurately adjust the position of the positioning component 10, ensuring installation accuracy. The "large head" design of the pressure block 14 extending into the mounting cavity 3 increases the contact area with the positioning element 10, improves the uniformity of the clamping force transmission, effectively prevents displacement of the positioning element 10 due to external impact or vibration during measurement, ensures the stability of the measurement reference, reduces measurement errors caused by displacement, and further improves the reliability of the measurement results. In addition, the connection between the first mounting hole 8 and the mounting cavity 3 facilitates positioning and operation during bolt installation, avoids installation deviations caused by obstructed vision, and improves assembly efficiency.

[0034] The ratio d of the length of the mounting groove 4 to the length of the mounting cavity 3 is controlled between 0.2 and 0.5, and the height ratio h of the mounting groove 4 to the mounting cavity 3 is controlled between 0.6 and 0.8. The longitudinal section of the measuring rod body 1 is trapezoidal, and its overall length L is greater than 600mm, preferably 657.5mm. The specific dimensional parameters are optimized as follows: the length d1 of the mounting groove 4 is 12-16mm, preferably 14mm; the length d2 of the mounting cavity 3 is 38-42mm, preferably 40mm; the height h1 of the mounting groove 4 is 7-11mm, preferably 9mm; the height h2 of the mounting cavity 3 is 11-15mm, preferably 13mm; and the width k of the outer wall of the mounting groove 4 is 1-5mm, preferably 3mm.

[0035] The precise proportions and optimized design of these dimensional parameters enable the measuring rod to accurately measure the form and position tolerances within a narrow space of 0-600mm, ensuring sufficient structural strength while meeting the measurement requirements in confined spaces. The length ratio and height ratio of the mounting groove 4 to the mounting cavity 3 are designed as the optimal solution based on the structural dimensions and stress characteristics of the positioning component 10: the length ratio is controlled between 0.2 and 0.5 to ensure that the mounting cavity 3 provides sufficient load-bearing space for the positioning component 10, while avoiding the joint 2 structure from being too weak due to an excessively long mounting groove 4; the height ratio is controlled between 0.6 and 0.8 to create a reasonable height difference between the mounting groove 4 and the mounting cavity 3, ensuring the stability of the center of gravity of the positioning component 10 after installation and facilitating the precise fit between the positioning block 12 and the guide slope. The trapezoidal longitudinal section of the measuring rod body 1, with a length greater than 600mm, not only meets the needs of deep measurement of large quartz cavities, but also reduces the volume of the measuring end through a gradually changing width structure, facilitating insertion into narrow spaces. The preferred length of 657.5mm can accurately cover the measurement range of 0-600mm, avoiding measurement blind spots caused by insufficient length, while reserving sufficient installation end length to ensure the stability of the connection with connector 2. The optimized dimensions of each part further optimize the structural strength and assembly adaptability of connector 2: the 3mm width design of the outer wall of the mounting groove 4 ensures a tight fit with the positioning hole 13 while ensuring the structural rigidity of the outer wall and avoiding deformation under stress; the optimized dimensions of the mounting cavity 3 and the mounting groove 4 ensure that the positioning part 10 fits tightly with the inner wall of connector 2 after installation, reducing wobbling caused by gaps, further improving installation stability, and ensuring that the measuring rod can maintain accurate measurement even in complex measurement environments.

[0036] A rotating cavity 22 is provided on the side of the connector 2 facing the measuring rod body 1. A second opening 25 is provided on the side of the rotating cavity 22 facing the measuring rod body 1. A rotating shaft 15 is fixedly installed on the side of the measuring rod body 1 facing the connector 2. The width of the second opening 25 is smaller than the inner diameter of the rotating cavity 22, and the rotating cavity 22 adopts a circular cavity structure design.

[0037] This structural design provides a stable installation and operating space for the rotating assembly, which is the fundamental guarantee for the flexible rotation of the measuring rod. The circular rotating cavity 22 is adapted to the circular structure of the rotating component 16, ensuring that the rotating component 16 rotates smoothly within the cavity, avoiding jamming and improving rotational flexibility. The design of the second opening 25, which is narrower than the rotating cavity 22, forms an annular limiting step, which can axially limit the rotating component 16, preventing it from detaching during rotation and ensuring the structural integrity and operational safety of the rotating assembly. The cooperation between the rotating shaft 15 and the rotating cavity 22 realizes the hinged connection between the measuring rod body 1 and the connector 2, allowing the measuring rod body 1 to rotate flexibly around the rotating shaft 15. This breaks the limitation of the fixed angle of the traditional measuring rod, greatly improving the operating freedom of the measuring rod, facilitating the adjustment of the measurement angle in the complex and narrow space of the quartz square cavity, adapting to the shape and position measurement needs of different orientations, and effectively solving the problem of multi-angle measurement in narrow spaces.

[0038] Preferably, a rotating component 16 is fixedly connected to the end of the rotating shaft 15. Several rotating arms 18 are evenly distributed around the circumference of the rotating component 16. The rotating arms 18 adopt an arc-shaped structure design, and a buffer groove 21 is provided on one side of the root of the rotating arm 18. The longitudinal section of the rotating component 16 is circular, and its rotating wall has elastic properties. When the rotating wall is squeezed, the buffer groove 21 will be compressed and deformed accordingly.

[0039] This structural design allows the measuring rod to rotate flexibly in multiple directions, greatly improving its degree of freedom and enabling it to adapt to complex measurement angles and positions. The circumferentially evenly distributed arc-shaped rotating arm 18, combined with the design of the elastic rotating wall and buffer groove 21, gives the rotating component 16 excellent elastic deformation capability: during rotation and positioning, when the positioning block 19 needs to move from one positioning groove 20 to another, the rotating arm 18 is squeezed by the wall of the rotating cavity 22. The rotating wall compresses and causes the buffer groove 21 to contract, allowing the positioning block 19 to smoothly disengage from the current positioning groove 20. When the target position is reached, the rotating wall elastically resets, pushing the positioning block 19 into the corresponding positioning groove 20, completing the positioning and fixing. This elastic structural design avoids the jamming and wear caused by rigid rotation, improves the smoothness of rotation operation, and reduces noise during rotation. The arc-shaped rotating arm 18 perfectly matches the circular rotating cavity 22, ensuring balanced force during the rotation of the rotating component 16, avoiding component damage caused by localized stress concentration, and extending the service life of the rotating assembly. The buffer groove 21 not only enhances the elastic deformation capability of the rotating arm 18, but also absorbs the slight impact force during the rotation process, further improving the rotational stability and ensuring that the measuring rod will not shake violently during the rotation adjustment process, thus ensuring the stability of the measurement reference.

[0040] The rotating component 16 extends entirely into the rotating cavity 22. A limiting block 19 is provided on the outer end of the rotating arm 18 facing the wall of the rotating cavity 22. Several limiting grooves 20 are formed in the cavity wall of the rotating cavity 22 at corresponding positions, allowing the limiting block 19 to be precisely engaged within the limiting grooves 20. Both the limiting grooves 20 and the limiting block 19 adopt a hemispherical structure design. When the measurement angle needs to be adjusted, the operator rotates the measuring rod body 1, causing the rotating component 16 to rotate synchronously. The rotating component 16 then drives the rotating arm 18 to rotate, causing the limiting block 19 at the end of the rotating arm 18 to disengage from its original limiting groove 20. Under the elastic action of the rotating arm 18, it slides along the wall of the rotating cavity 22 and finally engages within the limiting groove 20 corresponding to the rotation position, completing the rotation and limiting action.

[0041] The combination of the hemispherical limiting block 19 and the limiting groove 20 offers significant advantages: the curved surface design of the hemispherical structure allows the limiting block 19 to smoothly switch between the limiting grooves 20, reducing rotational resistance. Simultaneously, the moderate contact area of ​​the hemispherical structure ensures stability after positioning without causing difficulty in disengagement due to excessive contact area. The circumferentially distributed limiting grooves 20, in conjunction with the limiting block 19, enable the measuring rod to achieve precise positioning at multiple preset angles, meeting measurement needs in different directions and positions, effectively expanding the measurement range, and solving the problem of multi-angle measurement in narrow spaces. During rotation, the engagement of the limiting block 19 and the limiting groove 20 provides clear tactile feedback, facilitating accurate judgment of the rotation position by the operator. Angle positioning can be completed without additional tools, improving operational convenience. Furthermore, this rotational limiting structure ensures stable measurement of the measuring rod at the set angle, avoiding measurement errors caused by angle deviation during the measurement process, and guaranteeing the accuracy and consistency of the measurement results.

[0042] A rotating shaft 15 is installed within the second opening 25, and a bearing 17 is provided between the outer circumference of the rotating shaft 15 and the inner wall of the second opening 25. This structural design significantly improves the stability of the measuring rod during rotation, ensuring the accuracy and consistency of the measurement results. The bearing 17 converts the sliding friction between the rotating shaft 15 and the inner wall of the second opening 25 into rolling friction, greatly reducing rotational resistance and making the rotation of the measuring rod body 1 smoother and more flexible. Operators can easily adjust the measurement angle, improving operational convenience. Compared to sliding friction, rolling friction can effectively reduce wear between components, extend the service life of the rotating shaft 15 and the connector 2, and reduce equipment maintenance costs. The bearing 17 provides precise radial positioning for the rotating shaft 15, ensuring that the rotating shaft 15 always rotates coaxially, avoiding radial offset or wobbling during rotation, and further improving the rotational stability of the measuring rod. At the same time, the isolation effect of the bearing 17 reduces vibration generated during rotation, preventing vibration from being transmitted to the measuring end and affecting measurement accuracy, thus ensuring the reliability of measurement data. In addition, the bearing 17 can also prevent direct contact wear between the rotating shaft 15 and the inner wall of the second opening 25, prevent the increase of clearance due to wear, and ensure the stability and accuracy of the rotating assembly in long-term operation.

[0043] The complete operation process of this high-precision measuring rod for a large square cavity semiconductor quartz is as follows: In the assembly stage, the positioning component 10 is first inserted into the mounting groove 4 and mounting cavity 3 of the connector 2 through the mounting port 5, and the trapezoidal positioning hole 13 is embedded and fixed to the outer wall of the mounting groove 4; the bolt passes through the first mounting hole 8 and is connected to the fixing block 11 of the positioning component 10 to complete the initial fixation; then the Π-shaped pressure block 14 is covered on the surface of the connector 2, and the bolt passes through the waist hole and is connected to the second mounting hole 9 to achieve reinforced fixation, thus completing the assembly of the measuring rod and the height gauge; the measuring component is installed on the connecting shaft 23 at the measuring end of the measuring rod body 1 to complete the measurement preparation. During the measurement phase, the measuring rod is moved to the measurement area of ​​the quartz square cavity. Based on the required measurement position, the measuring rod body 1 is rotated: the rotating component 16 drives the rotating arm 18 to rotate, and the limiting block 19, under elastic action, disengages from the current limiting groove 20, slides along the wall of the rotating cavity 22 to the target angle, and then elastically resets and snaps into the corresponding limiting groove 20, completing the angle positioning. The depth of the measuring rod is adjusted to the target measurement position (0-600mm range), and the shape and position parameters are measured using the measuring component. During the measurement process, the double fixing structure ensures the stability of the measuring rod, and the bearing 17 ensures stable rotation, preventing shaking and displacement from affecting measurement accuracy. After the measurement is completed, the pressure block 14 and the positioning component 10 are disassembled by rotating the bolt in the opposite direction, the measuring component is removed, and the equipment is stored away.

Claims

1. A high-precision measuring rod for a large square cavity semiconductor quartz, characterized in that, It includes a measuring rod body, the width of which gradually decreases from the mounting end to the measuring end, and a joint is hinged to one side of the mounting end via a rotating assembly; The connector includes a mounting groove extending through the upper surface, the mounting groove being connected to a mounting cavity, and an inclined mounting opening being connected to the outer end of the mounting cavity.

2. The high-precision measuring rod for a large square cavity semiconductor quartz according to claim 1, characterized in that, The mounting cavity has a first opening on the mounting side, the length of the mounting cavity is greater than the length of the mounting groove, and the mounting cavity is located below the mounting groove.

3. A high-precision measuring rod for a large square cavity semiconductor quartz as described in claim 1 or 2, characterized in that, The mounting port is located on the outer side of the mounting end of the connector. The bottom end of the mounting port is provided with a first guide slope. The first guide slope is inclined towards the mounting cavity, and the angle α between the first guide slope and the bottom surface of the connector is 30° to 60°.

4. The high-precision measuring rod for a large square cavity semiconductor quartz according to claim 3, characterized in that, The bottom end of the first guide slope extends to the bottom surface of the connector, and the top end extends to the mounting cavity. The mounting port is set with an opening on the mounting side. The top end of the mounting port is provided with a second guide slope, which is inclined toward the mounting groove.

5. A high-precision measuring rod for a large square cavity semiconductor quartz as described in claim 1, characterized in that, The connector has a first mounting hole through the mounting groove on the side near the measuring end, and a second mounting hole through the mounting cavity on the side near the measuring end. The first mounting hole and the mounting cavity are connected.

6. A high-precision measuring rod for a large square cavity semiconductor quartz according to claim 5, characterized in that, The ratio d of the mounting groove length to the mounting cavity length is 0.2 to 0.5, the height ratio h is 0.6 to 0.8, the longitudinal section of the measuring rod body is trapezoidal, and the length L is greater than 600 mm.

7. A high-precision measuring rod for a large square cavity semiconductor quartz according to claim 1, characterized in that, The connector has a rotating cavity on the side facing the measuring rod body, the rotating cavity has a second opening on the side facing the measuring rod body, and the measuring rod body has a rotating shaft on the side facing the connector.

8. A high-precision measuring rod for a large square cavity semiconductor quartz according to claim 7, characterized in that, A rotating component is connected to the end of the rotating shaft. Several rotating arms are evenly arranged around the circumference of the rotating component. The rotating arms are arc-shaped, and a buffer groove is provided on one side of the root of the rotating arm.

9. A high-precision measuring rod for a large square cavity semiconductor quartz according to claim 8, characterized in that, The rotating component extends into the rotating cavity. A limiting block is provided on the outer end of the rotating arm facing the wall of the rotating cavity. A limiting groove is provided on the wall of the rotating cavity at the corresponding position. The limiting block is locked in the limiting groove.

10. A high-precision measuring rod for a large square cavity semiconductor quartz according to claim 7, characterized in that, A rotating shaft is disposed within the second opening, and a bearing is provided between the outer circumference of the rotating shaft and the inner wall of the second opening.

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