Sheet film tearing machine with wafer back appearance detection function

Abstract

The invention discloses a sheet film tearing machine with a wafer back appearance detection function, and relates to the technical field of precise electronic component manufacturing equipment.The sheet film tearing machine comprises a mounting frame, a conveying unit, a deviation prevention unit, a film tearing unit and a detection unit, the mounting frame is used for providing a mounting and fixing foundation, the conveying unit is used for conveying sheets, and the deviation prevention unit is used for preventing deviation of the sheets; the anti-deviation unit is used for preventing deviation of the sheet, the film tearing unit is used for tearing the film of the sheet, the detection unit is used for detecting the appearance of a wafer back, and after the to-be-processed sheet is conveyed to the film tearing unit by the conveying unit, the posture of the sheet is adjusted through the anti-deviation unit, so that the sheet is prevented from deviating when entering the film tearing unit; pressure detection is carried out in the film tearing process of the film tearing unit, the film tearing pressure is synchronously adjusted, the phenomenon that the film tearing process is affected by uneven film tearing pressure is avoided, and the appearance of the crystal back is detected through the detection unit after film tearing is completed.

Description

Technical Field

[0001] This invention relates to the field of precision electronic component manufacturing equipment technology, specifically a thin film peeling machine with crystal back appearance inspection function. Background Technology

[0002] As the semiconductor and microelectronics industry moves towards smaller processes and higher integration, the surface quality requirements for chip carrier wafers and other thin films have reached the nanometer or even atomic level. The cleanliness, flatness, and absence of defects such as scratches, particle contamination, and residual adhesive residue on the back of the wafer (i.e., the non-circuit side) directly affect the lithography alignment accuracy, thin film deposition quality, and the performance and yield of the final chip. Therefore, rapid, accurate, and non-contact visual inspection after removing the protective film from the back of the wafer has become an indispensable part of high-end manufacturing processes. However, integrating visual inspection functions into a film-removing machine to achieve "film removal-inspection" integration faces a series of severe mechanical engineering challenges, mainly in the following three aspects: Traditional back-side inspection is usually performed in a separate inspection station, requiring multiple handling of the workpiece, resulting in low efficiency and the risk of secondary contamination.

[0003] During the process of peeling off the protective film and its subsequent transport and positioning to the detection station, the sheet is prone to microscopic slippage or rotation, leading to positional deviation. When peeling off the protective film, the peeling force generated is a dynamically changing stress with complex directions. This stress is transmitted to the sheet through the film. If the adsorption and fixation are not firm or the force balance design is poor, the sheet can easily undergo micron-level translation or torsion on the adsorption stage, causing deviation from the preset detection area.

[0004] Materials such as wafers are extremely fragile and highly sensitive to localized pressure and point contact stress. In integrated equipment, damage prevention is a constant requirement, especially during film tearing and clamping. Uneven contact pressure, the presence of hard sharp points or foreign objects can all lead to microcracks or stress concentration areas on the back of the wafer that are difficult to detect with the naked eye but have serious consequences. Summary of the Invention

[0005] The purpose of this invention is to provide a film peeling machine with crystal back appearance inspection function to solve the problems raised in the prior art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: The film peeling machine includes a mounting frame, and a controller is mounted on the mounting frame. The mounting frame is equipped with a film-tearing unit, and the film-tearing unit is equipped with a spacing self-adjusting component. The spacing self-adjusting component monitors the pressure state of the film and adjusts the film conveying pressure. The film-tearing unit is equipped with an anti-deviation unit, which in turn has a self-deflection component. This component alters the sheet conveying posture, ensuring the long axis of the sheet remains parallel to the mounting frame and the long axis of the controller. In existing film-tearing machines, when sheets of varying thicknesses are being torn, the tearing pressure cannot be actively adjusted to maintain stability. This invention utilizes the film-tearing unit to actively adjust the pressure to adapt to different sheet thicknesses. Furthermore, existing technologies lack an active deviation correction mechanism; this invention, through its anti-deviation unit, can sequentially correct deviations for individual sheets in different postures.

[0007] Furthermore, the film-tearing unit includes an upper film-tearing cylinder, a lower film-tearing cylinder, an electromagnet, a tension spring, a magnetic block, and a support assembly. Both ends of the upper film-tearing cylinder are fixedly connected to the magnetic block. The lower film-tearing cylinder is rotatably mounted on the support assembly. The electromagnet is fixedly mounted on the support assembly and connected to the magnetic block via the tension spring. The magnetic block is slidably mounted on the support assembly. The spacing self-adjusting assembly consists of an electromagnet, a tension spring, and a magnetic block. The support assembly is connected to the anti-deviation unit. In the prior art, the spacing of the film-tearing device cannot be adjusted online. However, this invention, by adjusting the spacing between the upper and lower film-tearing cylinders, can adaptively adjust the film-tearing pressure value of the sheet conveying process online.

[0008] Furthermore, a force-measuring element is provided on the surface of the magnetic block near the electromagnet. Existing technologies do not adjust the sheet thickness by actively adjusting the distance between the upper and lower tearing rollers. This invention uses the force-measuring element to monitor the pressure value fed back from the sheet to the upper tearing roller to determine the sheet's pressure state and whether it is within a preset range. If not, the distance between the upper and lower tearing rollers is changed by adjusting the current received by the electromagnet, thereby stabilizing the sheet's pressure within the preset range.

[0009] Furthermore, the anti-deviation unit includes a straight plate, a rotating rod, a connecting rod, a correction disc, an electric telescopic rod, and a push plate. Both ends of the rotating rod are connected to the straight plate via torsion springs. One end of the connecting rod is fixedly mounted on the rotating rod, and the other end is fixedly connected to the correction disc. The telescopic end of the electric telescopic rod is fixedly connected to the push plate and to a pull rope. The pull rope passes around the fixed end of the electric telescopic rod and connects to the rotating rod. The self-deflection assembly consists of the rotating rod, connecting rod, correction disc, electric telescopic rod, and pull rope. Existing technologies cannot perform individual deviation correction on individual sheets during transport. If the deviation distance is too large, active deviation correction of the sheet cannot be achieved. The anti-deviation unit of this invention can sequentially correct and adjust the posture of individual sheets during transport through the contraction movement of the electric telescopic rod in conjunction with the correction disc, adapting to the dynamic adaptive deviation correction of sheets in different postures.

[0010] Furthermore, the support assembly includes a support frame, a telescopic motor, an adjusting frame, a winding motor, a winding roller, a connecting frame, and a waste roller. The support frame is fixedly connected to the mounting frame. The fixed end of the telescopic motor is fixedly mounted on the support frame. The output end of the telescopic motor is fixedly connected to the adjusting frame. The adjusting frame is slidably connected to the support frame. The fixed end of the winding motor is fixedly connected to the adjusting frame. The output end of the winding motor is fixedly connected to the winding roller. The winding roller is rotatably connected to the adjusting frame. The connecting frame is fixedly connected to the adjusting frame. A through groove is provided on the connecting frame. A rotating motor is provided at one end of the waste roller. The rotating motor is fixedly mounted on the adjusting frame. The upper and lower tearing film cylinders are both mounted on the connecting frame via rotating motors. The lower tearing film cylinder is rotatably mounted on the upper one. The electromagnet is fixedly mounted in the through groove on the connecting frame. The magnetic block is slidably mounted in the through groove on the connecting frame. The straight plate is fixedly mounted on the connecting frame.

[0011] Furthermore, the anti-deviation unit is connected to the transport unit, which conveys the sheet to be processed. Existing technologies lack a mechanism for actively correcting the deviation of individual sheets during transport; this invention corrects deviations during the sequential transport of individual sheets via the transport unit.

[0012] Furthermore, the transport unit includes a conveyor motor, a fixed block, a long rod, a slider, and a holding plate. The fixed end of the conveyor motor is fixedly mounted on the mounting frame, the fixed block is fixedly mounted on the mounting frame, the long rod is fixedly connected to the fixed block, the slider is slidably connected to the long rod, the slider is fixedly connected to the holding plate, and the holding plate is fixedly connected to the fixed end of the electric telescopic rod.

[0013] Furthermore, the transport unit also includes a detection plate, a vertical rod, a fixing groove, a conductive sheet, and a conductive block. The detection plate is fixedly connected to the fixing groove, which is fixedly installed at the end of the conveyor motor. The output end of the conveyor motor is fixedly connected to the holding plate via the vertical rod. The conductive sheet is fixedly installed in the fixing groove, and the conductive block is fixedly installed on the support frame. The conductive block is electrically connected to the electric telescopic rod. Existing transport mechanisms lack linkage with the anti-deviation unit. This invention controls the anti-deviation unit to start after the transport unit moves to a designated position, improving work efficiency while avoiding continuous operation of the anti-deviation unit, which is unable to accurately correct deviations for each sheet with different postures, and saving energy.

[0014] Furthermore, the support component is fixedly connected to the detection unit, which performs appearance inspection on the crystal back of the sheet after the film is peeled off.

[0015] Furthermore, the detection unit includes a photographic assembly, which is fixedly mounted on the adjustment frame.

[0016] Compared with the prior art, the beneficial effects of the present invention are: 1. This invention involves a controller starting a take-up motor during the gradual movement of the sheet, which in turn drives the take-up roller to rotate. Simultaneously, the rotating motor drives the upper and lower tearing film rollers to rotate. The take-up roller releases viscous material into the upper and lower tearing film rollers, tearing the sheet. The viscous waste generated during tearing, along with the film on the sheet, is wound up by the waste roller, thus achieving the tearing action. When the sheet enters between the upper and lower tearing film rollers, it exerts an upward thrust on the upper tearing film roller, causing the magnetic block to compress the tension spring. When the force measuring element on the magnetic block detects that the force value exceeds or falls below a preset range, it sends a signal to the controller. The controller then increases or decreases the current supplied to the electromagnet, causing the electromagnet to push the magnetic block downward or pull it upward, thereby changing the distance between the upper and lower tearing film rollers and adjusting the pressure of the upper and lower tearing film rollers on the sheet. This prevents excessive pressure from damaging the sheet or insufficient pressure from failing to tear the film.

[0017] 2. This invention, when the electric telescopic rod starts to retract, drives the push plate to push the sheet to be processed into the film-tearing unit area. As the electric telescopic rod retracts, the tension of the torsion spring on the other end of the electric telescopic rod gradually decreases, and the rotating rod drives the connecting rod to rotate inward. This allows the correction disc to correct the posture of the moving sheet, preventing the sheet from shifting before entering the film-tearing unit, thus avoiding damage to the sheet and reducing production quality. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall appearance and structure of the present invention; Figure 2 This is a schematic diagram of the installation position of part of the film-tearing unit of the present invention; Figure 3 for Figure 2 A partial enlarged view of the structure at point A in the middle; Figure 4 for Figure 3 A partial enlarged view of the structure at point B in the middle; Figure 5 This is a schematic diagram of the installation location structure of the photographic component of the present invention; Figure 6 This is a schematic diagram of the installation location structure of some of the transport units in this invention; Figure 7 for Figure 6 A partial enlarged view of the structure at point C; Figure 8 This is a schematic diagram of the internal structure of the fixing groove of the present invention.

[0019] In the diagram: 1. Mounting frame; 2. Transport unit; 21. Conveyor motor; 22. Fixing block; 23. Long rod; 24. Slider; 25. Holding plate; 26. Detection plate; 27. Vertical rod; 28. Fixing groove; 29. ​​Conductive sheet; 210. Conductive block; 3. Anti-deviation unit; 31. Straight plate; 32. Rotating rod; 33. Connecting rod; 34. Calibration disc; 35. Electric telescopic rod; 36. Push plate; 4. Film tearing unit; 41. Support frame; 42. Telescopic motor; 43. Adjusting frame; 44. Rewinding motor; 45. Rewinding roller; 46. Connecting frame; 47. Upper film tearing cylinder; 48. Lower film tearing cylinder; 49. Electromagnet; 410. Tension spring; 411. Magnetic block; 412. Waste roller; 5. Detection unit; 51. Photography assembly. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Example: Figures 1-8 As shown, the present invention provides a technical solution: like Figure 1 , Figure 2 As shown, the film peeling machine includes a mounting frame 1, on which a controller is mounted; The mounting frame 1 is equipped with a film-tearing unit 4, and the film-tearing unit 4 is equipped with a spacing self-adjusting component. The spacing self-adjusting component monitors the pressure state of the film and adjusts the film conveying pressure. The film-tearing unit 4 is equipped with an anti-deviation unit 3, and the anti-deviation unit 3 is equipped with a self-deflection component. The self-deflection component changes the sheet conveying posture so that the long axis of the sheet remains parallel to the long axis of the controller and the mounting frame 1.

[0022] like Figures 2-4 As shown, the film-tearing unit 4 includes an upper film-tearing cylinder 47, a lower film-tearing cylinder 48, an electromagnet 49, a tension spring 410, a magnetic block 411, and a support assembly. Both ends of the upper film-tearing cylinder 47 are fixedly connected to the magnetic block 411. The lower film-tearing cylinder 48 is rotatably mounted on the support assembly. The electromagnet 49 is fixedly mounted on the support assembly. The electromagnet 49 is connected to the magnetic block 411 through the tension spring 410. The magnetic block 411 is slidably mounted on the support assembly. The spacing self-adjusting assembly is composed of the electromagnet 49, the tension spring 410, and the magnetic block 411. The support assembly is connected to the anti-deviation unit 3.

[0023] like Figure 4 As shown, a force-measuring element is provided on the surface of the magnetic block 411 near the electromagnet 49.

[0024] As the sheet gradually moves, the controller starts the take-up motor 44, which in turn drives the take-up roller 45 to rotate. Simultaneously, the rotating motor drives the upper tearing cylinder 47 and the lower tearing cylinder 48 to rotate. The take-up roller 45 releases the sticky material into the upper and lower tearing cylinders 47 and 48, tearing the sheet. The sticky waste generated during tearing, along with the film on the sheet, is wound up by the waste roller 412, thus achieving the tearing action. When the sheet enters between the upper and lower tearing cylinders 47 and 48, the sheet exerts an upward thrust on the upper tearing cylinder 47, thereby driving the magnetic block 411 to compress and pull. The spring 410 extends, and at this time, the force measuring element on the magnetic block 411, such as a pressure sensor, detects that the force value exceeds or is less than the preset value range, and sends a signal to the controller. The controller then increases or decreases the current value supplied to the electromagnet 49, thereby causing the electromagnet 49 to push the magnetic block 411 downward or pull the magnetic block 411 upward, thereby changing the distance between the upper tearing tube 47 and the lower tearing tube 48, adjusting the pressure of the upper tearing tube 47 and the lower tearing tube 48 on the film, so as to avoid excessive pressure causing damage to the film, or insufficient pressure preventing the film from being torn.

[0025] like Figure 3 , Figure 4 As shown, the anti-deviation unit 3 includes a straight plate 31, a rotating rod 32, a connecting rod 33, a correction disc 34, an electric telescopic rod 35, and a push plate 36. The two ends of the rotating rod 32 are connected to the straight plate 31 through torsion springs. One end of the connecting rod 33 is fixedly installed on the rotating rod 32, and the other end of the connecting rod 33 is fixedly connected to the correction disc 34. The telescopic end of the electric telescopic rod 35 is fixedly connected to the push plate 36, and the telescopic end of the electric telescopic rod 35 is connected to the pull rope. The pull rope passes around the fixed end of the electric telescopic rod 35 and connects to the rotating rod 32. The self-deflection assembly consists of the rotating rod 32, the connecting rod 33, the correction disc 34, the electric telescopic rod 35, and the pull rope.

[0026] When the electric telescopic rod 35 starts to retract, it drives the push plate 36 to push the sheet to be processed into the area of ​​the film-tearing unit 4. As the electric telescopic rod 35 retracts, as the tension of the torsion spring on the other end of the electric telescopic rod 35 gradually decreases, the rotating rod 32 drives the connecting rod 33 to rotate inward, so that the correction disc 34 corrects the posture of the moving sheet, preventing the sheet from shifting before entering the film-tearing unit 4, thereby damaging the sheet and reducing production quality.

[0027] like Figure 2 , Figure 3As shown, the support assembly includes a support frame 41, a telescopic motor 42, an adjusting frame 43, a take-up motor 44, a take-up roller 45, a connecting frame 46, and a waste roller 412. The support frame 41 is fixedly connected to the mounting frame 1. The fixed end of the telescopic motor 42 is fixedly mounted on the support frame 41, and the output end of the telescopic motor 42 is fixedly connected to the adjusting frame 43. The adjusting frame 43 is slidably connected to the support frame 41. The fixed end of the take-up motor 44 is fixedly connected to the adjusting frame 43, and the output end of the take-up motor 44 is fixedly connected to the take-up roller 45. The take-up roller 45 is connected to the adjusting frame 46. The segment frame 43 is rotatably connected, and the connecting frame 46 is fixedly connected to the adjusting frame 43. The connecting frame 46 is provided with a through groove. One end of the waste roller 412 is provided with a rotating motor, which is fixedly installed on the adjusting frame 43. The upper tearing film cylinder 47 and the lower tearing film cylinder 48 are both installed on the connecting frame 46 through the rotating motor. The lower tearing film cylinder 48 is rotatably installed on 46. The electromagnet 49 is fixedly installed in the through groove opened on the connecting frame 46. The magnetic block 411 is slidably installed in the through groove on the connecting frame 46. The straight plate 31 is fixedly installed on the connecting frame 46.

[0028] like Figure 6 As shown, the anti-deviation unit 3 is connected to the transport unit 2, and the transport unit 2 transports the sheet to be processed.

[0029] like Figure 6 As shown, the transport unit 2 includes a conveyor motor 21, a fixing block 22, a long rod 23, a slider 24, and a holding plate 25. The fixed end of the conveyor motor 21 is fixedly installed on the mounting frame 1, the fixing block 22 is fixedly installed on the mounting frame 1, the long rod 23 is fixedly connected to the fixing block 22, the slider 24 is slidably connected to the long rod 23, the slider 24 is fixedly connected to the holding plate 25, and the holding plate 25 is fixedly connected to the fixed end of the electric telescopic rod 35.

[0030] like Figures 6-8 As shown, the transport unit 2 also includes a detection plate 26, a vertical rod 27, a fixing groove 28, a conductive sheet 29, and a conductive block 210. The detection plate 26 is fixedly connected to the fixing groove 28, which is fixedly installed at the end of the conveyor motor 21. The output end of the conveyor motor 21 is fixedly connected to the holding plate 25 through the vertical rod 27. The conductive sheet 29 is fixedly installed in the fixing groove 28, and the conductive block 210 is fixedly installed on the support frame 41. The conductive block 210 is electrically connected to the electric telescopic rod 35.

[0031] The controller starts the conveyor motor 21, which drives the holding plate 25 and the slider 24 to slide along the length to the designated position. The thin film is then placed on the holding plate 25. The detection plate 26 moves to the bottom of the imaging assembly 51 as the conveyor motor 21 extends. At this time, the conductive sheet 29 in the fixing groove 28 contacts the conductive block 210. The current of the controller is transmitted to the electric telescopic rod 35 through the conductive sheet 29 and the conductive block 210, thereby controlling the electric telescopic rod 35 to start.

[0032] like Figure 5 As shown, the support component is fixedly connected to the detection unit 5, and the detection unit 5 performs appearance inspection on the crystal back of the thin film after the film is peeled off.

[0033] like Figure 5 As shown, the detection unit 5 includes a camera assembly 51, which is fixedly mounted on the adjustment frame 43.

[0034] After the film is peeled off and falls onto the detection plate 26, the camera assembly 51 performs image detection on the film and feeds the signal back to the controller for appearance detection of the crystal back.

[0035] Working principle of the invention: The controller starts the conveyor motor 21, which drives the holding plate 25 and the slider 24 to slide along the length to the designated position. The thin film is then placed on the holding plate 25. The detection plate 26 moves to the bottom of the imaging assembly 51 as the conveyor motor 21 extends. At this time, the conductive sheet 29 in the fixing groove 28 contacts the conductive block 210. The current of the controller is transmitted to the electric telescopic rod 35 through the conductive sheet 29 and the conductive block 210, thereby controlling the electric telescopic rod 35 to start.

[0036] When the electric telescopic rod 35 starts to retract, it drives the push plate 36 to push the sheet to be processed into the area of ​​the film-tearing unit 4. As the electric telescopic rod 35 retracts, as the tension of the torsion spring on the other end of the electric telescopic rod 35 gradually decreases, the rotating rod 32 drives the connecting rod 33 to rotate inward, so that the correction disc 34 corrects the posture of the moving sheet, preventing the sheet from shifting before entering the film-tearing unit 4, thereby damaging the sheet and reducing production quality.

[0037] As the sheet gradually moves, the controller starts the take-up motor 44, which in turn drives the take-up roller 45 to rotate. Simultaneously, the rotating motor drives the upper tearing cylinder 47 and the lower tearing cylinder 48 to rotate. The take-up roller 45 releases the sticky material into the upper and lower tearing cylinders 47 and 48, tearing the sheet. The sticky waste generated during tearing, along with the film on the sheet, is wound up by the waste roller 412, thus achieving the tearing action. When the sheet enters between the upper and lower tearing cylinders 47 and 48, the sheet exerts an upward thrust on the upper tearing cylinder 47, thereby driving the magnetic block 411 to compress and pull. The spring 410 extends, and at this time, the force measuring element on the magnetic block 411, such as a pressure sensor, detects that the force value exceeds or is less than the preset value range, and sends a signal to the controller. The controller then increases or decreases the current value supplied to the electromagnet 49, thereby causing the electromagnet 49 to push the magnetic block 411 downward or pull the magnetic block 411 upward, thereby changing the distance between the upper tearing tube 47 and the lower tearing tube 48, adjusting the pressure of the upper tearing tube 47 and the lower tearing tube 48 on the film, so as to avoid excessive pressure causing damage to the film, or insufficient pressure preventing the film from being torn.

[0038] After the film is peeled off and falls onto the detection plate 26, the camera assembly 51 performs image detection on the film and feeds the signal back to the controller for appearance detection of the crystal back.

[0039] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A film peeling machine with crystal back appearance inspection function, characterized in that: The film peeling machine includes a mounting frame (1), on which a controller is provided; The mounting frame (1) is provided with a film-tearing unit (4), and the film-tearing unit (4) is provided with a spacing self-adjusting component. The spacing self-adjusting component monitors the pressure state of the film and adjusts the film conveying pressure. The film-tearing unit (4) is provided with an anti-deviation unit (3), and the anti-deviation unit (3) is provided with a self-deflection component. The self-deflection component changes the sheet conveying posture so that the long axis direction of the sheet is parallel to the long axis of the mounting frame (1) and the controller.

2. A film peeling machine with crystal back appearance inspection function according to claim 1, characterized in that: The film-tearing unit (4) includes an upper film-tearing cylinder (47), a lower film-tearing cylinder (48), an electromagnet (49), a tension spring (410), a magnetic block (411), and a support assembly. Both ends of the upper film-tearing cylinder (47) are fixedly connected to the magnetic block (411). The lower film-tearing cylinder (48) is rotatably mounted on the support assembly. The electromagnet (49) is fixedly mounted on the support assembly. The electromagnet (49) is connected to the magnetic block (411) through the tension spring (410). The magnetic block (411) is slidably mounted on the support assembly. The spacing self-adjusting assembly is composed of the electromagnet (49), the tension spring (410), and the magnetic block (411). The support assembly is connected to the anti-deviation unit (3).

3. A film peeling machine with crystal back appearance inspection function according to claim 2, characterized in that: A force-measuring element is provided on the surface of the magnetic block (411) near the electromagnet (49).

4. A film peeling machine with crystal back appearance inspection function according to claim 2, characterized in that: The anti-deviation unit (3) includes a straight plate (31), a rotating rod (32), a connecting rod (33), a correction disc (34), an electric telescopic rod (35), and a push plate (36). The two ends of the rotating rod (32) are connected to the straight plate (31) through torsion springs. One end of the connecting rod (33) is fixedly installed on the rotating rod (32), and the other end of the connecting rod (33) is fixedly connected to the correction disc (34). The telescopic end of the electric telescopic rod (35) is fixedly connected to the push plate (36), and the telescopic end of the electric telescopic rod (35) is connected to the pull rope. The pull rope passes around the fixed end of the electric telescopic rod (35) and connects to the rotating rod (32). The self-deflection assembly consists of the rotating rod (32), the connecting rod (33), the correction disc (34), the electric telescopic rod (35), and the pull rope.

5. A film peeling machine with crystal back appearance inspection function according to claim 4, characterized in that: The support assembly includes a support frame (41), a telescopic motor (42), an adjusting frame (43), a winding motor (44), a winding roller (45), a connecting frame (46), and a waste roller (412). The support frame (41) is fixedly connected to the mounting frame (1). The fixed end of the telescopic motor (42) is fixedly mounted on the support frame (41). The output end of the telescopic motor (42) is fixedly connected to the adjusting frame (43). The adjusting frame (43) is slidably connected to the support frame (41). The fixed end of the winding motor (44) is fixedly connected to the adjusting frame (43). The output end of the winding motor (44) is fixedly connected to the winding roller (45). The winding roller (45) is connected to the... The adjusting frame (43) is rotatably connected, and the connecting frame (46) is fixedly connected to the adjusting frame (43). The connecting frame (46) is provided with a through groove. One end of the waste roller (412) is provided with a rotating motor. The rotating motor is fixedly installed on the adjusting frame (43). The upper tearing film cylinder (47) and the lower tearing film cylinder (48) are both installed on the connecting frame (46) through the rotating motor. The lower tearing film cylinder (48) is rotatably installed on (46). The electromagnet (49) is fixedly installed in the through groove opened on the connecting frame (46). The magnetic block (411) is slidably installed in the through groove on the connecting frame (46). The straight plate (31) is fixedly installed on the connecting frame (46).

6. A film peeling machine with crystal back appearance inspection function according to claim 4, characterized in that: The anti-deviation unit (3) is connected to the transport unit (2), which transports the sheet to be processed.

7. A film peeling machine with crystal back appearance inspection function according to claim 6, characterized in that: The transport unit (2) includes a conveyor motor (21), a fixing block (22), a long rod (23), a slider (24), and a holding plate (25). The fixed end of the conveyor motor (21) is fixedly installed on the mounting frame (1). The fixing block (22) is fixedly installed on the mounting frame (1). The long rod (23) is fixedly connected to the fixing block (22). The slider (24) is slidably connected to the long rod (23). The slider (24) is fixedly connected to the holding plate (25). The holding plate (25) is fixedly connected to the fixed end of the electric telescopic rod (35).

8. A film peeling machine with crystal back appearance inspection function according to claim 7, characterized in that: The transport unit (2) also includes a detection plate (26), a vertical rod (27), a fixing groove (28), a conductive sheet (29), and a conductive block (210). The detection plate (26) is fixedly connected to the fixing groove (28). The fixing groove (28) is fixedly installed at the end of the conveying motor (21). The output end of the conveying motor (21) is fixedly connected to the holding plate (25) through the vertical rod (27). The conductive sheet (29) is fixedly installed in the fixing groove (28). The conductive block (210) is fixedly installed on the support frame (41). The conductive block (210) is electrically connected to the electric telescopic rod (35).

9. A film peeling machine with crystal back appearance inspection function according to claim 1, characterized in that: The support component is fixedly connected to the detection unit (5), and the detection unit (5) performs appearance inspection on the crystal back of the film after the film is peeled off.

10. A film peeling machine with crystal back appearance inspection function according to claim 5, characterized in that: The detection unit (5) includes a camera assembly (51), which is fixedly mounted on the adjustment frame (43).

Images