Automatic device and method for fine burning and welding of quartz round tube products

Abstract

The invention discloses a quartz round tube type product fine burning and welding automation device and a quartz round tube type product fine burning and welding method applying the device. The device comprises a rack and a control module, the rack is provided with a liftable workpiece clamping and rotating module and a flame machining module which are electrically connected with the control module, the flame machining module is located on one side of the workpiece clamping and rotating module, the liftable workpiece clamping and rotating module comprises a chuck and a main shaft, one end of the main shaft is in transmission connection with the chuck, and the other end of the main shaft is in transmission connection with the control module. And the other end of the control module is connected with a lifting driving piece which is also electrically connected with the control module. The method has the advantages of excellent processing quality and consistency, good flexibility, strong adaptability, traceable and optimized process and capability of greatly improving the production efficiency. And the labor intensity and the dependence on skilled workers are greatly reduced.

Description

Technical Field

[0001] This invention relates to the field of special glass processing equipment technology, specifically to an automated device and method for precision firing and welding of quartz tube products. Background Technology

[0002] In semiconductor chip manufacturing processes, quartz glass products (such as diffuser tubes, quartz boats, inner liner tubes, and spray heads) are indispensable consumables and components in key processes such as diffusion, oxidation, and chemical vapor deposition. These components often have complex shapes and extremely high precision requirements; the smoothness and cleanliness of their inner walls directly affect the uniformity of process gases and the yield of wafer products. In the back-end processing of quartz products, especially for small-diameter, high aspect ratio quartz tubes of revolution, a "fine sintering" or "fire polishing" process is often required. This utilizes the high temperature of an oxyhydrogen flame or an oxyacetylene flame to rapidly melt, flow, and then solidify an extremely thin layer on the surface of the quartz glass, thereby obtaining a smooth, mirror-like surface. This effectively seals surface micropores, reduces gas adsorption, and improves product purity. Furthermore, the butt welding between quartz tubes also requires similar high-temperature flame treatment. Currently, the industry generally relies on manual operation by skilled workers for the fine sintering and welding of such small-diameter quartz tubes, resulting in low processing precision, poor quality consistency, low production efficiency, high labor intensity, and harsh working conditions. While some flame polishing equipment exists for flat glass or large quartz components, these devices are typically bulky and unsuitable for the precision machining of small-diameter tubes. They also lack the ability to control the combined motion of rotating workpieces, involving rotation, lifting, and lateral following. Therefore, developing a dedicated device that can replace manual labor and achieve automated, high-precision, and consistent sintering and welding of quartz tubes has become a pressing technical challenge in this field. Patent CN119371087A discloses a rapid welding device for quartz tubes, which reduces thermal stress caused by temperature differences and assists in welding, thus solving the problem of cracks caused by thermal stress during quartz tube welding. However, this invention does not provide a technical solution for automated sintering or welding of quartz tubes. Summary of the Invention

[0003] The existing technology lacks automated devices suitable for precision machining of small-diameter quartz tubes, resulting in low machining accuracy, poor quality consistency, low production efficiency, and high labor intensity. To overcome these defects, this invention provides an automated device for precision sintering and welding of quartz tubes, which can replace manual labor and automatically complete the precision sintering and welding of quartz tubes, greatly improving product quality consistency, production efficiency and automation level, and reducing labor costs and labor intensity.

[0004] The technical solution of the present invention is: an automated device for precision sintering and welding of quartz round tube products, including a frame and a control module. The frame is equipped with a liftable workpiece clamping and rotating module and a flame processing module, which are electrically connected to the control module respectively. The flame processing module is located on one side of the workpiece clamping and rotating module. The liftable workpiece clamping and rotating module includes a chuck and a spindle. One end of the spindle is driven to the chuck to drive its rotation, and the other end is connected to a lifting drive component, which is also electrically connected to the control module. The liftable workpiece clamping and rotating module is used to clamp and drive the quartz tube workpiece to rotate around its own axis; the flame processing module is used to generate a high-energy flame to finely sinter or weld the surface of the quartz tube workpiece; the chuck is used to coaxially clamp one end of the quartz tube workpiece; the lifting drive is used to drive the liftable workpiece clamping and rotating module and the quartz tube workpiece it clamps to reciprocate in the vertical direction; the control module is used to control the coordinated action of the liftable workpiece clamping and rotating module, the flame processing module and the lifting drive, so that while the quartz tube workpiece rotates and / or rises at a uniform speed, its outer wall receives uniform flame treatment.

[0005] Preferably, the flame processing module includes a welding torch support slide slidably connected to the frame and an adjustable welding torch mounted on the welding torch support slide. The welding torch support slide is driven by a transverse drive mechanism. The transverse drive mechanism is used to drive the welding torch support slide and the welding torch on it to move in a direction perpendicular to the axis of the quartz tube workpiece.

[0006] Preferably, there are two welding torches, which are symmetrically arranged on both sides of the quartz tube workpiece being processed. The two welding torches are symmetrically arranged so that the opposite sides of the workpiece can be processed at the same time, thereby improving processing efficiency.

[0007] Preferably, the welding torch is equipped with a pneumatic valve and an automatic igniter, both of which are electrically connected to the control module. The welding torch integrates the pneumatic valve and automatic igniter, enabling automatic flame switching and precise flow control.

[0008] Preferably, the welding torch is mounted on a torch holder that allows adjustment of the torch's spray angle and the distance between the torch and the workpiece. The torch holder is fixed to a torch support slide. By adjusting the torch holder, the torch spray angle and the distance between the torch and the workpiece surface can be adjusted to achieve the best welding results.

[0009] Preferably, a vertical guide mechanism is also provided between the chuck and the frame, and the lifting drive is an electric cylinder. The lifting drive drives the entire liftable workpiece clamping and rotating module and the workpiece it clamps to make uniform, reciprocating, and precise movements along the axial direction of the workpiece.

[0010] Alternatively, a vertical guide mechanism is provided between the chuck and the frame. The lifting drive component includes a servo motor and a ball screw. The servo motor drives the main shaft to reciprocate along the vertical guide mechanism via the ball screw. The ball screw is connected to the main shaft and, with the assistance of the vertical guide mechanism, forms a precision lifting platform. Compared to standard electric cylinders, manufacturers of automated sintering and welding equipment for quartz tube products can also select and match components themselves, using servo motors and ball screws to construct the lifting drive component, which can better match the device dimensions.

[0011] Preferably, the device also includes an automatic loading and unloading mechanism, which is located beside the chuck. For a higher degree of automation, the device can also integrate the automatic loading and unloading mechanism to achieve automatic workpiece handling, forming a fully automated production line unit.

[0012] Preferably, the control module is a programmable logic controller or an industrial computer, which pre-stores processing programs corresponding to various specifications of quartz round tube products. The processing program can define the spindle rotation speed, lifting stroke and speed, welding torch movement trajectory, flame switching sequence, and processing time.

[0013] A method for precision firing or welding of quartz tube products using the aforementioned automated device includes the following steps: S1: Clamp the quartz tube workpiece onto the liftable workpiece clamping and rotating module; S2: The control module controls the flame processing module to ignite and generate a stable flame; S3: Under the synchronous control of the control module, the workpiece rotates and moves up and down at a uniform speed, while the flame processing module is controlled to move laterally so that the flame covers all areas to be processed on the outer surface of the workpiece. S4: After processing is completed, the engine will automatically shut off and all moving parts will stop. S5: Unload the finished quartz tube workpiece.

[0014] After startup, the control module coordinates the actions of each module, so that the workpiece rotates at a constant speed while the whole unit rises and falls at a constant speed, while the welding torch flame moves laterally as needed. The three combine to form a complex spatial motion trajectory, ensuring that the flame can evenly and completely cover the entire outer surface of the workpiece.

[0015] The beneficial effects of this invention are: It boasts excellent processing quality and consistency. This invention completely eliminates the instability of manual operation by controlling the rotation, lifting, and movement of the workpiece and the welding torch through a servo system. Key process parameters such as flame distance, angle, and relative speed are constant and repeatable, ensuring that every product and every inch of surface undergoes the exact same heat treatment. This significantly improves product qualification rate and batch consistency, meeting the extremely high quality requirements of the semiconductor industry for components.

[0016] Production efficiency is significantly improved. This invention can operate continuously without interruption, with a fixed processing cycle that is much faster than manual processing. The entire outer surface of the quartz tube workpiece can be processed in a single clamping operation, eliminating the time spent on repeated manual position adjustments, thus significantly improving production efficiency and effectively releasing production capacity.

[0017] This invention significantly reduces labor intensity and reliance on skilled workers. When using this invention, operators only need to perform clamping, unloading, and program invocation, freeing them from heavy and dangerous physical labor. Product quality no longer depends on the experience of skilled workers, reducing the difficulty and cost of human resource management for enterprises.

[0018] It offers high flexibility and adaptability. By modifying the parameters in the control program, this invention can quickly adapt to the processing needs of quartz tube products of different lengths, diameters, and even those with simple diameter variations, thus achieving "flexible" production.

[0019] Process traceability and optimization. In this invention, all processing parameters are stored digitally in the program, facilitating process standardization, recording, and subsequent analysis and optimization, laying the foundation for intelligent manufacturing and process data management. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of one structure of the present invention.

[0021] Figure 2 This is a schematic diagram of the internal structure of the frame in this invention.

[0022] Figure 3 This is a schematic diagram of one structure after the rack is removed according to the present invention.

[0023] Figure 4 This is a schematic diagram of one structure of the welding torch holder in this invention.

[0024] In the diagram, 1-frame, 2-chuck, 3-spindle, 4-welding torch support slide, 5-welding torch, 6-welding torch bracket, 7-transverse linear guide rail, 8-transverse drive motor, 9-pneumatic valve, 10-lifting sleeve, 11-cantilever, 12-mounting block, 13-lifting drive component mounting plate, 14-electric cylinder, 15-guide column, 16-linear bearing, 17-chuck rotary motor, 18-lifting platform, 19-quartz tube workpiece. Detailed Implementation

[0025] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0026] Example 1: like Figures 1 to 4As shown, an automated device for the precision sintering and welding of quartz tube products comprises a robust frame 1 constructed from metal rods and plates, providing support for all functional components. A top plate serves as a working platform on the top of the frame 1, upon which a welding torch support slide 4 is mounted. One side of the bottom of the welding torch support slide 4 is slidably connected to a transverse linear guide rail 7, while the other side is threadedly connected to a transverse drive screw. This transverse drive screw is connected to the output end of a transverse drive motor 8 via a coupling. Driven by the transverse drive motor 8, the welding torch support slide 4 can precisely translate along the transverse linear guide rail 7. The transverse linear guide rail 7, the transverse drive screw, and the transverse drive motor 8 constitute a transverse drive mechanism. Two welding torches 5 are symmetrically mounted on the welding torch support slide 4. The welding torches 5 are high-purity oxyhydrogen flame welding torches, and each welding torch 5 has an integrated high-response pneumatic valve 9 and an automatic igniter on its inlet pipe, enabling instantaneous flame start / stop and flow regulation. Two welding torch supports 6 are also installed on the welding torch support slide 4, and two welding torches 5 are installed one-to-one with the welding torch supports 6. The welding torch support slide 4, the transverse drive mechanism, the welding torch supports 6 and the welding torches 5 constitute the flame processing module.

[0027] A lifting sleeve 10 is fitted onto the welding torch holder 6. The lifting sleeve 10 has an axial break, and each end face of the axial break has a connecting plate. The two connecting plates are parallel and opposite to each other and are connected by bolts. The tightness of the lifting sleeve 10 can be adjusted by tightening or loosening the bolts. A cantilever 11 is welded to the outer wall of the lifting sleeve 10. The cantilever 11 has a rectangular cross-section and a mounting block 12. The mounting block 12 has a cantilever through hole and a connecting rod through hole that are adapted to the cantilever 11. There is a vertical drop between the cantilever through hole and the connecting rod through hole. The connecting rod through hole is located above the cantilever through hole, and the axis of the cantilever through hole is perpendicular to the axis of the connecting rod through hole. The cantilever 11 slides through the cantilever through hole. A connecting rod with a rectangular cross-section is welded onto the welding torch 5. The connecting rod slides through the connecting rod through hole. The top surface of the mounting block 12 is provided with an upper clamping screw, which is threadedly connected to the mounting block 12 and presses against the connecting rod. The bottom surface of the mounting block 12 is provided with a lower clamping screw, which is threadedly connected to the mounting block 12 and presses against the cantilever 11. The combination of the lifting sleeve 10, the mounting block 12, and the welding torch bracket 6 creates a three-dimensional adjustment function, which allows for three-way adjustment of the welding torch 5 to precisely set the distance and angle of the nozzle of each welding torch 5 relative to the workpiece being processed. This ensures that the two flames can be symmetrically and stably focused on the same point or a small area on the surface of the quartz tube workpiece 19, providing uniform and concentrated heat energy. The symmetrically arranged dual welding torches can process both sides of the workpiece simultaneously, resulting in more balanced heat input. This helps reduce thermal stress deformation of the quartz tube workpiece caused by unilateral heating and further improves processing efficiency.

[0028] The frame 1 has a lifting drive mounting plate 13, which is located below the top plate of the frame 1. A lifting drive is mounted on the lifting drive mounting plate 13. In this embodiment, the lifting drive is an electric cylinder 14. The output end of the electric cylinder 14 passes through the lifting drive mounting plate 13 and is keyed to the spindle 3. The spindle 3 can achieve precise telescopic positioning and speed control under the drive of the electric cylinder 14. A chuck 2 is mounted on the top of the spindle 3. The chuck 2 is a high-precision three-jaw chuck. The three jaws are driven by a cylinder and a linkage mechanism and move synchronously along the radial direction of the chuck 2. The chuck 2 is precisely calibrated so that its clamping center coincides with the rotation axis of the spindle 3 to ensure the rotational coaxiality of the clamped quartz tube workpiece 19. The chuck 2 can ensure the dynamic balance and stability of slender workpieces under high-speed rotation, avoiding uneven processing or safety hazards caused by vibration. The chuck 2 is rotatably connected to a lifting platform 18 through a bottom rotating shaft. A driven gear is fixedly sleeved on the bottom rotating shaft of the chuck 2. The bottom center of the lifting platform 18 is fixed to the top of the main shaft 3. A chuck rotary motor 17 is fixed to the bottom of the lifting platform 18. The output end of the chuck rotary motor 17 passes through the lifting platform 18 and protrudes from the top surface of the lifting platform 18. The output end of the chuck rotary motor 17 is keyed to a drive gear, which meshes with the driven gear to form a gear transmission mechanism that drives the chuck 2 to rotate. A vertical guide mechanism is provided between the lifting platform 18 and the lifting drive component mounting plate 13. The vertical guide mechanism includes four guide pillars 15 and four linear bearings 16. The linear bearings 16 are fixed on the lifting drive component mounting plate 13 and pass through the top and bottom surfaces of the lifting drive component mounting plate 13. The top ends of the guide pillars 15 are fixed to the lifting platform 18 by bolts. The guide pillars 15 and the linear bearings 16 slide and connect one-to-one. The electric cylinder 14 drives the chuck 2 and the main shaft 3 to perform high-precision vertical lifting and lowering movements along the Z-axis (vertical direction). The lifting drive component, the vertical guide mechanism, the chuck 2, and the main shaft 3 constitute a lifting workpiece clamping and rotating module. The rack 1 houses a control cabinet containing a PLC, servo drivers, and pneumatic solenoid valve assembly. A human-machine interface (HMI) is also mounted on rack 1, communicating with the PLC, servo drivers, and pneumatic solenoid valve assembly. The PLC, acting as the control module, coordinates the actions of the transverse drive motor 8, electric cylinder 14, chuck 2, pneumatic valve 9, and automatic igniter through a program. The HMI is used by the operator to input parameters, call up machining programs, start and stop the equipment, and monitor its status.

[0029] Taking the precision firing of the outer surface of a transparent quartz tube with a diameter of Φ30mm and a length of L=800mm as an example, the method for precision firing and welding of quartz round tube products using this automated precision firing and welding device is as follows: S1: Workpiece clamping and preparation. The operator carefully inserts and secures one end of the cleaned quartz tube workpiece 19 into the chuck 2. The operator selects or enters the machining program for the workpiece, "Φ30x800 precision firing," on the human-machine interface. The following core parameters are pre-set in the program: Spindle rotation speed: 10 RPM (revolutions per minute) to ensure proper surface linear velocity.

[0030] Lifting stroke: 750mm (with a safety margin for workpiece length).

[0031] Lifting speed: 5 mm / s, matched with rotation speed to form a suitable spiral processing trajectory.

[0032] Initial lateral position of the welding torch: 15mm from the center of the workpiece (considering the workpiece radius and the optimal flame distance).

[0033] Flame parameters: hydrogen and oxygen flow rate and ratio settings.

[0034] Processing cycle count: 2 times (one up-and-down movement is one cycle).

[0035] S2: Device starts. The operator presses the start button. The PLC executes the program sequentially: Ignition: Control the pneumatic valve 9 to open to the preset opening degree and send a signal to the automatic igniter. The two welding torches 5 are ignited, forming a stable and sharp hydrogen-oxygen flame.

[0036] S3: Automatic processing begins.

[0037] Motion synthesis: After the flame stabilizes, the PLC starts the chuck rotary motor 17, and the quartz tube workpiece 19 begins to rotate at a constant speed of 10 RPM. At the same time, the entire spindle unit, driven by the electric cylinder 14, moves downward at a constant speed of 5 mm / s from the top of its stroke. At this time, the lateral position of the welding torch 5 remains fixed.

[0038] Heating: The workpiece rotates to uniformly heat its outer circumference, while axial movement causes the flame to sweep across the entire outer surface of the workpiece along a spiral path. By precisely controlling the speed ratio of rotation to lifting, the pitch of this "heat processing spiral" can be controlled, thereby controlling the residence time (i.e., energy density) of the flame at any point and ensuring uniform heating.

[0039] Contour following: The PLC sends a command to the servo motor 9 to drive the welding torch support slide 4 to move the two welding torches 5 to the appropriate position in sync, so that the flame focus is always kept on the outer surface of the workpiece. If there is a boss section on the outer surface of the workpiece, the welding torch support slide 4 will also move outward briefly to adapt to the change in the outer diameter of the workpiece. After leaving the boss section, the welding torch will move back to its original position to avoid insufficient heating due to the increased distance.

[0040] Reciprocating machining: When the lifting platform moves to the bottom of its stroke, the PLC controls the lifting servo motor 4 to reverse, and the worktable drives the workpiece to rise at a constant speed for the second precision firing. Usually, one round trip is sufficient to meet the requirements. For higher requirements, multiple reciprocating cycles can be set.

[0041] S4: Extinguishing and Resetting. When the last processing cycle ends, the PLC first closes the pneumatic valve of the welding torch, instantly extinguishing the flame. Subsequently, all motors decelerate and stop. The lifting platform automatically returns to its original upper position (for easy unloading), and the spindle stops rotating. The chuck's 2 jaw drive mechanism receives a signal, and the jaws automatically release.

[0042] S5: Unloading the workpiece.

[0043] The operator removes the finished quartz tube, at which point its outer surface has achieved a uniform and bright fire polish. After passing inspection, it can proceed to the next process or be packaged.

[0044] Compared to manual operation, the quartz tubes processed by this device have a consistent surface gloss, without localized overheating and whitening or underheating and fogging, and excellent dimensional stability, fully meeting the requirements of high-end semiconductor customers for consistency and traceability.

[0045] Example 2: An automated device for precision sintering and welding of quartz tube products comprises a robust frame 1 constructed from metal rods and plates, providing support for all functional components. A top plate serves as a working platform on the frame 1, upon which a welding torch support slide 4 is mounted. One side of the bottom of the welding torch support slide 4 is slidably connected to a transverse linear guide rail 7, while the other side is threadedly connected to a transverse drive screw. This transverse drive screw is connected via a coupling to the output end of a transverse drive motor 8. Driven by the transverse drive motor 8, the welding torch support slide 4 can precisely translate along the transverse linear guide rail 7. The transverse linear guide rail 7, the transverse drive screw, and the transverse drive motor 8 constitute a transverse drive mechanism. Two welding torches 5 are symmetrically mounted on the welding torch support slide 4. Each welding torch 5 is a high-purity oxyhydrogen flame welding torch, and each torch 5 has an integrated high-response pneumatic valve 9 and an automatic igniter on its inlet pipe, enabling instantaneous flame start / stop and flow regulation. Two welding torch supports 6 are also installed on the welding torch support slide 4, and two welding torches 5 are installed one-to-one with the welding torch supports 6. The welding torch support slide 4, the transverse drive mechanism, the welding torch supports 6 and the welding torches 5 constitute the flame processing module. Unlike embodiment 1, this embodiment also includes an automatic loading and unloading mechanism, which is a multi-axis manipulator located beside the chuck 2.

[0046] A lifting sleeve 10 is fitted onto the welding torch holder 6. The lifting sleeve 10 has an axial break, and each end face of the axial break has a connecting plate. The two connecting plates are parallel and opposite to each other and are connected by bolts. The tightness of the lifting sleeve 10 can be adjusted by tightening or loosening the bolts. A cantilever 11 is welded to the outer wall of the lifting sleeve 10. The cantilever 11 has a rectangular cross-section and a mounting block 12. The mounting block 12 has a cantilever through hole and a connecting rod through hole that are adapted to the cantilever 11. There is a vertical drop between the cantilever through hole and the connecting rod through hole. The connecting rod through hole is located above the cantilever through hole, and the axis of the cantilever through hole is perpendicular to the axis of the connecting rod through hole. The cantilever 11 slides through the cantilever through hole. A connecting rod with a rectangular cross-section is welded onto the welding torch 5. The connecting rod slides through the connecting rod through hole. The top surface of the mounting block 12 is provided with an upper clamping screw, which is threadedly connected to the mounting block 12 and presses against the connecting rod. The bottom surface of the mounting block 12 is provided with a lower clamping screw, which is threadedly connected to the mounting block 12 and presses against the cantilever 11. The combination of the lifting sleeve 10, the mounting block 12, and the welding torch bracket 6 creates a three-dimensional adjustment function, which allows for three-way adjustment of the welding torch 5 to precisely set the distance and angle of the nozzle of each welding torch 5 relative to the workpiece being processed. This ensures that the two flames can be symmetrically and stably focused on the same point or a small area on the surface of the quartz tube workpiece 19, providing uniform and concentrated heat energy. The symmetrically arranged dual welding torches can process both sides of the workpiece simultaneously, resulting in more balanced heat input. This helps reduce thermal stress deformation of the quartz tube workpiece caused by unilateral heating and further improves processing efficiency.

[0047] The frame 1 has a lifting drive mounting plate 13, which is located below the top plate of the frame 1. A lifting drive component is mounted on this mounting plate 13. Unlike embodiment 1, the lifting drive component in this embodiment includes a servo motor and a ball screw. The spindle 3 is threadedly connected to the ball screw, and the cross-section of the spindle 3 is oval. The spindle 3 vertically passes through a through hole on the lifting drive mounting plate 13. This through hole has the same shape and size as the cross-section of the spindle 3. The servo motor drives the spindle 3 to reciprocate along the vertical guide mechanism via the ball screw. Under the drive of the ball screw, the spindle 3 can achieve precise telescopic positioning and speed control. A chuck 2 is mounted on the top of the spindle 3. The chuck 2 is a high-precision three-jaw chuck. The three jaws are driven by a cylinder and a linkage mechanism, moving synchronously radially along the chuck 2. The chuck 2 is precisely calibrated so that its clamping center coincides with the rotation axis of the spindle 3 to ensure the coaxiality of the rotation of the clamped quartz tube workpiece 19. The chuck 2 ensures the dynamic balance and stability of slender workpieces under high-speed rotation, avoiding uneven processing or safety hazards caused by vibration. The chuck 2 is rotatably connected to a lifting platform 18 via a bottom rotating shaft, and a driven gear is fixedly sleeved on the bottom rotating shaft of the chuck 2.

[0048] The bottom center of the lifting platform 18 is fixed to the top of the main shaft 3. A chuck rotary motor 17 is fixed to the bottom of the lifting platform 18. The output end of the chuck rotary motor 17 passes through the lifting platform 18 and protrudes from the top surface of the lifting platform 18. The output end of the chuck rotary motor 17 is keyed to a drive gear, which meshes with the driven gear to form a gear transmission mechanism that drives the chuck 2 to rotate. A vertical guide mechanism is provided between the lifting platform 18 and the lifting drive component mounting plate 13. The vertical guide mechanism includes four guide pillars 15 and four linear bearings 16. The linear bearings 16 are fixed on the lifting drive component mounting plate 13 and pass through the top and bottom surfaces of the lifting drive component mounting plate 13. The top ends of the guide pillars 15 are fixed to the lifting platform 18 by bolts. The guide pillars 15 and the linear bearings 16 slide and connect one-to-one. The ball screw drives the chuck 2 and the main shaft 3 to perform high-precision vertical lifting and lowering movements along the Z-axis (vertical direction). The lifting drive component, the vertical guide mechanism, the chuck 2, and the main shaft 3 constitute a lifting workpiece clamping and rotating module. The rack 1 houses a control cabinet containing an industrial computer, servo drives, and pneumatic solenoid valve assemblies. A human-machine interface (HMI) is also mounted on rack 1, communicating with the industrial computer, servo drives, and pneumatic solenoid valve assemblies. The industrial computer, acting as a control module, coordinates the actions of the transverse drive motor 8, lifting drive components, chuck 2, pneumatic valves 9, and automatic igniter through programming. The HMI is used by the operator to input parameters, call up machining programs, start and stop the equipment, and monitor its status.

[0049] Taking the precision firing of the outer surface of a transparent quartz tube with a diameter of Φ30mm and a length of L=800mm as an example, the method for precision firing and welding of quartz round tube products using this automated precision firing and welding device is as follows: S1: Pre-production preparation. The operator selects or enters the machining program for the workpiece, "Φ30x800 precision firing," on the human-machine interface. The following core parameters are pre-set in the program: Spindle rotation speed: 10 RPM (revolutions per minute) to ensure proper surface linear velocity.

[0050] Lifting stroke: 750mm (with a safety margin for workpiece length).

[0051] Lifting speed: 5 mm / s, matched with rotation speed to form a suitable spiral processing trajectory.

[0052] Initial lateral position of the welding torch: 15mm from the center of the workpiece (considering the workpiece radius and the optimal flame distance).

[0053] Flame parameters: hydrogen and oxygen flow rate and ratio settings.

[0054] Processing cycle count: 2 times (one up-and-down movement is one cycle).

[0055] S2: Device Start-up. The operator presses the start button. The industrial computer executes the program sequentially: Ignition: Control the pneumatic valve 9 to open to the preset opening degree and send a signal to the automatic igniter. The two welding torches 5 are ignited, forming a stable and sharp hydrogen-oxygen flame.

[0056] S3: Automatic processing begins.

[0057] Loading process: A multi-axis robotic arm picks up the quartz tube workpiece 19 to be processed from the upstream conveyor line or material rack. After visual positioning, it accurately inserts it into the opened chuck 2 and sends a "loading complete" signal to the industrial computer. The industrial computer controls the chuck to automatically clamp.

[0058] Motion synthesis: After the flame stabilizes, the industrial computer starts the chuck rotary motor 17, and the quartz tube workpiece 19 begins to rotate at a constant speed of 10 RPM. At the same time, the entire spindle unit moves downward at a constant speed of 5 mm / s from the top of the stroke under the drive of the lifting drive. At this time, the lateral position of the welding torch 5 remains fixed.

[0059] Heating: The workpiece rotates to uniformly heat its outer circumference, while axial movement causes the flame to sweep across the entire outer surface of the workpiece along a spiral path. By precisely controlling the speed ratio of rotation to lifting, the pitch of this "heat processing spiral" can be controlled, thereby controlling the residence time (i.e., energy density) of the flame at any point and ensuring uniform heating.

[0060] Contour following: The industrial computer sends instructions to the servo motor 9, driving the welding torch support slide 4 to move the two welding torches 5 synchronously to the appropriate position so that the flame focus is always kept on the outer surface of the workpiece. If there is a boss section on the outer surface of the workpiece, the welding torch support slide 4 will also move outward briefly to adapt to the change in the outer diameter of the workpiece. After leaving the boss section, the welding torch will move back to its original position to avoid insufficient heating due to the increased distance.

[0061] Reciprocating machining: When the lifting platform moves to the bottom of its stroke, the industrial computer controls the servo motor to reverse, and the worktable drives the workpiece to rise at a constant speed for a second precision firing. Usually, one round trip is sufficient to meet the requirements. For higher requirements, multiple reciprocating cycles can be set.

[0062] S4: Extinguishing and Resetting. When the last processing cycle ends, the industrial computer first shuts off the pneumatic valve of the welding torch, instantly extinguishing the flame. Subsequently, all motors decelerate and stop. The lifting platform automatically returns to its original upper position (for easy unloading), and the spindle stops rotating. The chuck's 2 jaw drive mechanism receives a signal, and the jaws automatically release.

[0063] S5: Unloading the workpiece.

[0064] Material unloading process: After processing is completed and the chuck is released, a multi-axis robotic arm extends and grabs the processed quartz tube, placing it on the downstream conveyor line or finished product rack. At this point, its outer surface has achieved uniform and bright fire polishing. After passing inspection, it can proceed to the next process or packaging.

[0065] Compared to manual operation, the quartz tubes processed by this device have a consistent surface gloss, without localized overheating and whitening or underheating and fogging. They also exhibit excellent dimensional stability, fully meeting the consistency and traceability requirements of high-end semiconductor customers. The entire process requires no manual intervention; materials are only replenished when the racks are low, achieving fully automated production.

[0066] The precision firing and welding method for quartz tube products provided by this invention achieves three-axis linkage control of "rotation + lifting + lateral compensation," which is the core of achieving uniform flame processing on the surface of complex rotating bodies. Through interpolation control by an industrial computer, the motion of the three linear / rotational axes is precisely synthesized, making the movement trajectory of the flame hotspot relative to the workpiece surface a programmable and optimized spatial curve. This perfectly simulates ideal manual operation, with precision and consistency far exceeding that of manual labor. Furthermore, it achieves the digitization and programming of process parameters, transforming craftsmanship experience into storable, replicable, and optimizable digital programs. This represents a leap from "skill" to "digital process" in the traditional process of precision firing of quartz glass, and is a concrete manifestation of intelligent manufacturing in the processing of special materials.

Claims

1. An automated device for precision sintering and welding of quartz round tube products, characterized in that, The machine includes a frame (1) and a control module. The frame (1) is equipped with a liftable workpiece clamping and rotating module and a flame processing module, which are electrically connected to the control module respectively. The flame processing module is located on one side of the workpiece clamping and rotating module. The liftable workpiece clamping and rotating module includes a chuck (2) and a spindle (3). One end of the spindle (3) is connected to the chuck (2) for transmission, and the other end is connected to a lifting drive component. The lifting drive component is also electrically connected to the control module.

2. The automated device according to claim 1, characterized in that, The flame processing module includes a welding torch support slide (4) slidably connected to the frame (1) and an adjustable welding torch (5) mounted on the welding torch support slide (4). The welding torch support slide (4) is connected to a transverse drive mechanism.

3. The automated device according to claim 2, characterized in that, There are two welding torches (5), which are symmetrically arranged on both sides of the quartz tube workpiece being processed.

4. The automated device according to claim 2, characterized in that, The welding torch (2) is equipped with a pneumatic valve and an automatic igniter, both of which are electrically connected to the control module.

5. The automated device according to claim 2, characterized in that, The welding torch (5) is mounted on a welding torch bracket (6) that adjusts the spray angle of the welding torch (5) and the distance between the welding torch (5) and the workpiece. The welding torch bracket (6) is fixed on the welding torch support slide (4).

6. The automated device according to claim 1, characterized in that, A vertical guide mechanism is also provided between the chuck (2) and the frame (1), and the lifting drive component is an electric cylinder.

7. The automated device according to claim 1, characterized in that, A vertical guide mechanism is also provided between the chuck (2) and the frame (1). The lifting drive includes a servo motor and a ball screw. The servo motor drives the main shaft (3) to reciprocate along the vertical guide mechanism through the ball screw.

8. The automated device according to claim 1, characterized in that, It also includes an automatic loading and unloading mechanism, which is located next to the chuck (2).

9. The automated device according to claim 1, characterized in that, The control module is a PLC or industrial computer, which contains pre-stored processing programs corresponding to various specifications of quartz round tube products.

10. A method for precision firing or welding of quartz tube products using the automated device described in any one of claims 1-9, characterized in that, Includes the following steps: S1: Clamp the quartz tube workpiece onto the liftable workpiece clamping and rotating module; S2: The control module controls the flame processing module to ignite and generate a stable flame; S3: Under the synchronous control of the control module, the workpiece rotates at a constant speed and moves up and down at a constant speed. At the same time, the flame processing module is controlled to move laterally so that the flame covers all areas to be processed on the outer surface of the workpiece. S4: After processing is completed, the engine will automatically shut off and all moving parts will stop. S5: Unload the finished quartz tube workpiece.

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