Crater device for preventing evaporation source pollution
By setting multiple craters on the rotating disk corresponding to the crucible and precisely aligning them during rotation, the problem of evaporation source contamination caused by metal falling off the craters is solved, improving production efficiency and the purity of the metal source.
Patent Information
- Application Number
- CN202411587532.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-08
- Publication Date
- 2026-05-08
AI Technical Summary
In the process of multi-metal composite evaporation, existing metal evaporation stages are prone to metal detachment from the crater due to differences in stress between thin films and differences in metal melting points, resulting in contamination of the evaporation source and loss of wafer yield.
Multiple craters corresponding to the metal source inside the crucible are set on the rotating disk. While the crucible rotates, the rotating disk rotates at the corresponding angle to rotate the corresponding numbered crater above the corresponding crucible, ensuring that each crater corresponds to the correct metal source. Craters made of a single metal material are used to reduce chemical reactions.
It reduces metal shedding from the crater, lowers equipment maintenance frequency, improves production efficiency, facilitates metal recovery and cleaning, and maintains the stability and purity of the evaporation process.
Smart Images
Figure CN121992343A_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of semiconductor technology, and in particular relates to a crater device for preventing contamination from evaporation sources. Background Technology
[0002] In semiconductor manufacturing processes, an electron gun emits an electron beam after being heated by a high voltage. The electron beam bombards the surface of the metal film or other vapor deposition source in the crucible and heats it, causing it to melt. In a high vacuum environment, once the temperature of the metal film exceeds the critical temperature, the solid metal film turns into metal vapor, generating a metal vapor stream. When the metal atoms or molecules carried in the vapor stream encounter the wafer, they condense and deposit into a solid thin film.
[0003] Existing metal evaporation stages have a single crater structure. During the multi-metal composite evaporation process, due to the difference in stress between thin films and the difference in metal melting points, the crater metal is prone to falling off. In severe cases, it may fall into the crucible, thereby causing contamination of the metal source and loss of wafer yield. Summary of the Invention
[0004] This application provides a crater device to prevent contamination of the evaporation source, which is suitable for single-layer and multi-layer metal film evaporation. Multiple craters corresponding to the metal source in the crucible are set on the rotating disk. While the crucible rotates, the rotating disk also rotates at a corresponding angle, rotating the corresponding numbered crater above the corresponding crucible, thereby avoiding metal source contamination and improving production efficiency.
[0005] Other objects and advantages of the present invention can be further understood from the technical features disclosed herein.
[0006] To achieve one or more of the above objectives or other objectives, the present invention provides a crater device for preventing contamination from evaporation sources.
[0007] A crater protection device for preventing contamination from evaporation sources, comprising:
[0008] A crucible assembly, comprising a rotating platform and a plurality of crucibles disposed above the rotating platform, wherein a metal source is placed inside the crucibles, and the rotating platform drives the crucibles to rotate about their central axis.
[0009] A crater assembly, comprising a rotating disk and a rotating shaft for driving the rotating disk to rotate, wherein the rotating disk includes a plurality of craters corresponding to the crucible;
[0010] While the crucible is rotating, the rotating shaft drives the rotating disk to rotate at a preset angle, rotating the crater above the corresponding crucible.
[0011] The number of crucibles is the same as the number of craters, with different crucibles corresponding to craters with different numbers.
[0012] The preset angle of rotation of the rotating disk is an integer multiple of 90°.
[0013] Different metal sources are placed in different crucibles, and the crater is made of the same or compatible material as the metal source. The crater is made of a single metal material.
[0014] The crucible includes a crucible body and a support groove, with the crucible body inserted into the support groove.
[0015] A cooling layer is provided between the support tank and the crucible body, and the cooling layer is a cooling water layer surrounding the crucible body.
[0016] The rotating disk is detachably connected to the rotating shaft, and the rotating platform is fixedly connected to the crucible.
[0017] The rotating disk is a circular disk, and the craters are evenly distributed around the circumference of the central axis of the rotating disk.
[0018] The crater device also includes a drive assembly;
[0019] The drive assembly is used to drive the rotary table to rotate, so as to move the crucible located above the rotary table relative to the central axis of the rotary table.
[0020] The drive assembly is also used to drive the rotating shaft, which in turn drives the rotating disk to rotate at a target angle, thereby rotating the crater above the corresponding crucible.
[0021] The rotation direction of the rotary table is opposite to the rotation direction of the rotary axis.
[0022] Compared with the prior art, the beneficial effects of the present invention mainly include:
[0023] 1. This application sets multiple craters on the rotating disk that correspond to the metal source in the crucible. While the crucible rotates, the rotating disk also rotates at a corresponding angle, rotating the corresponding numbered crater above the corresponding crucible, which can reduce the falling off of the crater metal caused by the difference in melting points between different metals.
[0024] 2. This application reduces the frequency of use of a single crater by setting different craters, thereby reducing the frequency of equipment maintenance and increasing the working time of the machine.
[0025] 3. The crater in this application is made of a single metal material, which facilitates the recycling and cleaning of the metal.
[0026] To make the above and other objects, features and advantages of the present invention more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0027] To more clearly illustrate the technical solutions in the specific embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0028] Figure 1 A cross-sectional view of a crater device for preventing contamination from evaporation sources, provided as an embodiment of this application.
[0029] Figure 2 A top view of a crater device for preventing contamination from evaporation sources provided in an embodiment of this application. Figure 1 .
[0030] Figure 3 A top view of a crater device for preventing contamination from evaporation sources provided in an embodiment of this application. Figure 2 . Detailed Implementation
[0031] The foregoing and other technical contents, features, and effects of the present invention will be clearly presented in the following detailed description of a preferred embodiment with reference to the accompanying drawings. The directional terms mentioned in the following embodiments, such as up, down, left, right, front, or back, are merely for reference to the accompanying drawings. Therefore, the directional terms used are for illustrative purposes and not for limiting the present invention.
[0032] This application provides a crater device to prevent contamination of the evaporation source, which is suitable for single-layer and multi-layer metal film evaporation. Multiple craters corresponding to the metal source in the crucible are set on the rotating disk. While the crucible rotates, the rotating disk also rotates at a corresponding angle, rotating the corresponding numbered crater above the corresponding crucible, thereby avoiding metal source contamination and improving production efficiency.
[0033] The embodiments of this application will now be described in detail with reference to the accompanying drawings. However, those skilled in the art will understand that many technical details have been provided in the embodiments of this application to facilitate a better understanding of the application. However, the technical solutions claimed in this application can be implemented even without these technical details and various variations and modifications based on the following embodiments.
[0034] Example
[0035] Figure 1The image shown is a cross-sectional view of a crater device for preventing contamination from evaporation sources, provided in an embodiment of this application.
[0036] Figure 2 The image shown is a top view of a crater device for preventing contamination from evaporation sources, as provided in an embodiment of this application. Figure 1 .
[0037] Figure 3 The image shown is a top view of a crater device for preventing contamination from evaporation sources, as provided in an embodiment of this application. Figure 2 .
[0038] like Figure 1-2 As shown, a crater device for preventing contamination from evaporation sources includes:
[0039] The crucible assembly includes a rotating platform 1 and multiple crucibles 2 disposed above the rotating platform 1. A metal source is placed inside the crucibles 2, and the rotating platform 1 drives the crucibles 2 to rotate around its central axis.
[0040] The crater assembly includes a rotating disk 4 and a rotating shaft 5 that drives the rotating disk 4 to rotate. The rotating disk 4 includes a plurality of craters 3 that are arranged corresponding to the crucible 2.
[0041] While the crucible 2 is rotating, the rotating shaft 5 drives the rotating disk 4 to rotate at a preset angle, rotating the crater 3 above the corresponding crucible 2.
[0042] The number of crucibles 2 and crater 3 is the same, and different crucibles 2 correspond to different numbered crater 3.
[0043] like Figure 2 As shown, crucible a corresponds to crater A, crucible b corresponds to crater B, crucible c corresponds to crater C, and crucible d corresponds to crater D.
[0044] The rotating disk 4 is one of the core components of the entire device, and it is driven by the rotating shaft 5. The rotating disk 4 is equipped with multiple craters 3 that correspond to the crucibles 2. When the rotating disk 4 rotates, different craters 3 can be precisely positioned above the corresponding crucibles 2.
[0045] Specifically, such as Figure 2-3 As shown, the rotating disk 4 rotates at a preset angle (i.e., an integer multiple of 90°), as... Figure 2 The crucible 'a' shown corresponds to crater A. When crucible 2 is rotated 90° clockwise, rotating disk 4 needs to be rotated 90° counterclockwise to ensure that... Figure 3 The crucible d shown corresponds to the crater D, ensuring that after each rotation, a crater 3 can be accurately positioned above its corresponding crucible 2. This design simplifies the operation process, improves efficiency, and ensures the independence and purity of each metal source.
[0046] Each crucible 2 contains a different metal source. These metals evaporate under specific conditions (such as high temperature) for deposition or other processes. To ensure that the purity of each metal source is not affected by other metals, each crucible 2 is equipped with a specially designed crater 3.
[0047] The crater 3 is designed to prevent metal vapor from spreading to non-target areas, thereby reducing or avoiding contamination. Each crater 3 is made of the same or compatible material as the metal source in crucible 2 to ensure that no chemical reaction occurs under high temperature conditions, reduce metal shedding from the crater 3 due to differences in melting points between different metals, and maintain the stability and safety of the metal source evaporation process.
[0048] In a preferred embodiment of the present invention, the crater 3 in this embodiment is made of a single metal material.
[0049] like Figure 1 As shown, the crucible 2 includes a crucible body 22 and a support groove 21. The crucible body 22 is inserted into the support groove 21. A cooling layer is provided between the support groove 21 and the crucible body 22, and the cooling layer surrounds the crucible body 22.
[0050] In a preferred embodiment of the present invention, the cooling layer is a cooling water layer.
[0051] In a preferred embodiment of the present invention, the rotating disk 4 and the rotating shaft 5 are detachably connected, and the rotating table 1 and the crucible 2 are fixedly connected.
[0052] like Figure 2 As shown, the rotating disk 4 is a circular disk, and the craters 3 are evenly distributed around the circumference of the central axis of the rotating disk 4.
[0053] The drive assembly is used to drive the rotary table 1 and the rotary shaft 5 to rotate, so as to drive the crucible 2 located above the rotary table 1 to move relative to the central axis of the rotary table 1; the drive assembly drives the rotary shaft 5 to rotate the rotary disk 4 to the target angle, so as to rotate the crater 3 to the top of the corresponding crucible.
[0054] In a preferred embodiment of the present invention, the rotation direction of the rotary table 1 is opposite to the rotation direction of the rotary shaft 5, which can avoid contamination during the evaporation process of different metal sources.
[0055] This application provides a crater device to prevent contamination of the evaporation source, which is suitable for single-layer and multi-layer metal film evaporation. Multiple craters corresponding to the metal source in the crucible are set on the rotating disk. While the crucible rotates, the rotating disk also rotates at a corresponding angle, rotating the corresponding numbered crater above the corresponding crucible, thereby avoiding metal source contamination and improving production efficiency.
[0056] The common English terms or letters used in this invention for clarity of description are for illustrative purposes only and are not limiting interpretations or specific uses. They should not be used to limit the scope of protection of this invention based on their possible Chinese translations or specific letters.
[0057] It should also be noted that in this article, relational terms such as “first” and “second” are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations.
Claims
1. A crater device for preventing contamination from evaporation sources, characterized in that, include: A crucible assembly, comprising a rotating platform and a plurality of crucibles disposed above the rotating platform, wherein a metal source is placed inside the crucibles, and the rotating platform drives the crucibles to rotate about their central axis. A crater assembly, comprising a rotating disk and a rotating shaft for driving the rotating disk to rotate, wherein the rotating disk includes a plurality of craters corresponding to the crucible; While the crucible is rotating, the rotating shaft drives the rotating disk to rotate at a preset angle, rotating the crater above the corresponding crucible.
2. The crater device for preventing contamination from evaporation sources according to claim 1, characterized in that, The number of crucibles is the same as the number of craters, with different crucibles corresponding to different numbered craters.
3. A crater device for preventing contamination from evaporation sources according to claim 2, characterized in that, The preset angle of rotation of the rotating disk is an integer multiple of 90°.
4. A crater device for preventing contamination from evaporation sources according to claim 2, characterized in that, Different metal sources are placed in different crucibles, and the crater is made of the same or compatible material as the metal source. The crater is made of a single metal material.
5. A crater device for preventing contamination from evaporation sources according to claim 1, characterized in that, The crucible includes a crucible body and a support groove, with the crucible body inserted into the support groove.
6. A crater device for preventing contamination from evaporation sources according to claim 5, characterized in that, A cooling layer is provided between the support tank and the crucible body, and the cooling layer is a cooling water layer surrounding the crucible body.
7. A crater device for preventing contamination from evaporation sources according to claim 1, characterized in that, The rotating disk is detachably connected to the rotating shaft, and the rotating platform is fixedly connected to the crucible.
8. A crater device for preventing contamination from evaporation sources according to claim 7, characterized in that, The rotating disk is a circular disk, and the craters are evenly distributed around the circumference of the central axis of the rotating disk.
9. A crater device for preventing contamination from evaporation sources according to claim 1, characterized in that, The crater device also includes a drive assembly; The drive assembly is used to drive the rotary table to rotate, so as to move the crucible located above the rotary table relative to the central axis of the rotary table. The drive assembly is also used to drive the rotating shaft, which in turn drives the rotating disk to rotate at a target angle, thereby rotating the crater above the corresponding crucible.
10. A crater device for preventing contamination from evaporation sources according to claim 1, characterized in that, The rotation direction of the rotary table is opposite to the rotation direction of the rotary axis.