Base transmission device for liquid phase epitaxy horizontal silicon carbide epitaxial furnace

Abstract

The invention relates to a base transmission device for a liquid phase epitaxy horizontal silicon carbide epitaxial furnace, which comprises a transmission assembly, the transmission assembly comprises a first connecting rod, a second connecting rod and a connecting piece, one end of the second connecting rod and one end of the first connecting rod are detachably connected through the connecting piece, and the connecting piece can drive the first connecting rod and the second connecting rod to realize multi-angle deflection; the rotating assembly comprises a first shaft, a first shaft sleeve, a second shaft, a second shaft sleeve, a shell, a positioning piece and a base, the axis of the first shaft and the axis of the second shaft are perpendicular and arranged at an interval, the positioning piece close to the transmission assembly abuts against the first shaft sleeve in the axial direction of the shell, the positioning piece is detachably connected with the shell, and the shell is provided with a cavity and a plane part; the first shaft, the first shaft sleeve, the second shaft, the second shaft sleeve and the positioning piece are all arranged in the cavity, the base is arranged on the upper side face of the plane part, the device solves the problem of unstable rotation of the base through cooperative work of the transmission assembly and the rotating assembly, and the uniformity and stability of epitaxial growth are remarkably improved.

Description

Technical Field

[0001] This invention belongs to the technical field of semiconductor silicon carbide epitaxial growth equipment, specifically relating to a base transmission device for a liquid phase epitaxial horizontal silicon carbide epitaxial furnace. Background Technology

[0002] As a mainstream piece of equipment in the semiconductor field, liquid-phase epitaxy horizontal silicon carbide epitaxial furnaces are widely used in high-end applications such as infrared detectors and high-power lasers due to their significant advantages, including low crystal defect density, high doping efficiency, fast growth rate, and low equipment cost. Among them, the monolithic horizontal hot-wall cavity is a common structure for realizing homoepitaxial silicon carbide, and one of its core technologies lies in the stable rotation of the substrate to ensure the uniformity and low defect rate of the epitaxial layer.

[0003] Currently, the industry commonly uses a gas flotation combined with airflow propulsion to drive the base rotation. This technology involves introducing high-pressure inert gas into a spiral gas guide channel on the bottom of the base, using the airflow pressure to suspend the base, while simultaneously generating rotational torque through the airflow impacting the channel walls. However, this approach has inherent drawbacks that are difficult to overcome: First, it suffers from poor stability; even small fluctuations in airflow pressure can cause significant changes in the air flotation height, resulting in epitaxial layer thickness deviations of up to 8-12%. Second, it is susceptible to airflow interference; eddies generated within the guide channel can disrupt the uniform distribution of reactants in the furnace, causing doping concentration fluctuations of ±15%. Third, it is sensitive to purity; trace impurities in the gas can directly contaminate the substrate, causing a sharp increase in defect density. Finally, it is extremely costly; not only is the daily gas consumption enormous, accounting for up to 40% of the cost, but the processing precision requirements for components such as the gas guide channel are also extremely high, making the manufacturing cost far exceed that of ordinary mechanical structures.

[0004] In summary, these shortcomings collectively restrict the improvement of epitaxial quality and the reduction of production costs. Therefore, developing a new stable transmission solution to replace the existing gas-driven system has become an urgent need for the industry. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to overcome the defects of poor base rotation stability and easy interference of process environment by airflow in the prior art, thereby providing a base transmission device for a horizontal silicon carbide epitaxial furnace for liquid phase epitaxy.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A base drive device for a horizontal silicon carbide epitaxial furnace for liquid phase epitaxy, comprising: The transmission assembly includes a first link, a second link, and a connector. There are at least two connectors. One end of the second link and one end of the first link are detachably connected through the connectors. The connectors can drive the first link and the second link to achieve multi-angle deflection. A rotating assembly includes a first shaft, a first bushing, a second shaft, a second bushing, a housing, positioning elements, and a base. The axes of the first shaft and the second shaft are perpendicular and spaced apart. The first bushing is disposed on the outer diameter surface of the first shaft, and the second bushing is disposed on the outer diameter surface of the second shaft. At least two positioning elements are provided. Along the axial direction of the housing, the positioning element closest to the transmission assembly abuts against the first bushing. The positioning elements are disposed at both ends of the housing and are detachably connected to the housing. The housing has a cavity and a planar portion. The first shaft, the first bushing, the second shaft, the second bushing, and the positioning elements are all disposed in the cavity along the vertical direction. The base is disposed on the upper side of the planar portion and is detachably connected to the second shaft. The rotating component and the transmission component are detachably connected.

[0007] Preferably, the rotating assembly further includes a buffer member, which is disposed between the second bushing and the cavity in the vertical direction, and the buffer member abuts against the lower part of the second bushing and the upper side of the cavity.

[0008] Preferably, the housing further includes a first mounting groove and a third mounting groove. In the vertical direction, the first mounting groove is disposed on the inner diameter surface of the lower side of the cavity, and the third mounting groove is disposed on the inner diameter surface of the upper side of the cavity. The first mounting groove and the third mounting groove are coaxially arranged. In the vertical direction, the lower part of the second shaft is installed in the first mounting groove, and the lower part of the second shaft is installed in the third mounting groove.

[0009] Preferably, the housing further includes a second mounting groove, which is provided in at least two sets, with at least two second mounting grooves in each set. Along the axial direction of the housing, the two sets of second mounting grooves are respectively provided at both ends of the planar portion. In the vertical direction, one of the second mounting grooves is provided on the upper side of the planar portion along the axial direction of the housing, and the other second mounting groove is provided on the upper side of the end faces of both ends of the planar portion. In the vertical direction, the upper side of the positioning member is installed in the second mounting groove provided on the upper side of the planar portion.

[0010] Preferably, the positioning member further includes a body and a protrusion, the body and the protrusion being integrally formed, and the protrusion being disposed above the body in the vertical direction; Along the axial direction of the housing, the protrusion is detachably connected to the second mounting groove provided on the end face of the flat portion.

[0011] Preferably, the main body includes mounting holes and fixing holes, wherein there are multiple fixing holes arranged vertically, and each fixing hole is spaced apart and located below the main body, the mounting holes are spaced apart above the fixing holes, and the protrusions are spaced apart above the mounting holes; The first shaft is detachably connected to the mounting hole.

[0012] Preferably, the rotating assembly further includes an axial-radial conversion mechanism, wherein at least two axial-radial conversion mechanisms are provided, one of which is disposed on the outer diameter surface of the first shaft, and the other of which is disposed on the outer diameter surface of the second shaft, and the two axial-radial conversion mechanisms mesh with each other; Along the axial direction of the outer casing, the axial-radial conversion mechanism disposed on the first shaft and the positioning member near the transmission assembly respectively abut against both ends of the first bushing; In the vertical direction, the axial-radial conversion mechanism disposed on the second shaft is located on the upper side of the second shaft, and the axial-radial conversion mechanism abuts against the second bushing.

[0013] Preferably, the rotating assembly further includes a stabilizing member, which includes an arc-shaped portion and a fixed portion. In the vertical direction, the arc-shaped portion abuts against the lower side of the cavity, and the arc-shaped portion is fixedly connected to the cavity. The fixing part is provided with a plurality of fixing holes, and the fixing part limits the positioning member through the fixing holes.

[0014] Compared to existing technologies, the advantages of this invention are as follows: a highly stable base transmission system is constructed through the coordinated work of the transmission component and the rotating component. In the transmission component, the first and second connecting rods are detachably connected by a connector, which can drive the first and second connecting rods to deflect at multiple angles. This flexible connection effectively compensates for assembly errors between components and buffers fluctuations in rotational torque, ensuring the smoothness of power input. In the rotating component, the outer shell provides a solid mounting base, and its interior has cavities and planar surfaces for accommodating and mounting various moving parts. The first and second bushings cooperate to provide reliable radial support for the first and second shafts, respectively, effectively preventing the shafts from shifting due to vibration during high-speed operation, thereby ensuring the accuracy and stability of rotational motion. The positioning component precisely limits and fixes the internal rotating components axially, further enhancing the overall vibration resistance of the device and preventing relative movement between components. The base is located on the upper side of the planar portion and is detachably connected to the second shaft. Through the precise coordination of the above-mentioned components, power can be stably transmitted to the base, driving it to rotate with high precision, thereby significantly improving the uniformity of liquid phase epitaxial growth and solving the problem of unstable base rotation caused by airflow interference in the prior art. Attached Figure Description

[0015] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 A cross-sectional view of the base drive device for a horizontal silicon carbide epitaxial furnace for liquid phase epitaxy provided by the present invention. Figure 2 This is a schematic diagram of the structure of the transmission assembly provided by the present invention; Figure 3 This is a schematic diagram of the structure of a portion of the rotating component provided by the present invention; Figure 4 A schematic diagram of the outer casing provided by the present invention; Figure 5 A front view of the assembly structure of the stabilizing and positioning components provided by the present invention; Figure 6 Rear view of the assembly structure of the stabilizing and positioning components provided by the present invention.

[0017] Explanation of reference numerals in the attached figures: 1. Transmission assembly; 101. First connecting rod; 102. Second connecting rod; 103. Connecting member; 2. Rotating assembly; 201. First shaft; 202. First bushing; 203. Second shaft; 204. Second bushing; 205. Housing; 2051. Cavity; 2052. Flat part; 2053. First mounting groove; 2054. Third mounting groove; 2055. Second mounting groove; 206. Positioning member; 2061. Main body; 20611. Mounting hole; 20612. Fixing hole; 2062. Protrusion; 207. Base; 208. Buffer; 209. Axial-radial conversion mechanism; 210. Stabilizing member; 2101. Arc-shaped part; 2102. Fixing part. Detailed Implementation

[0018] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0020] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0021] The present invention provides a base transmission device for a horizontal silicon carbide epitaxial furnace for liquid phase epitaxy, which mainly consists of two parts: a transmission component 1 and a rotating component 2.

[0022] Specifically, transmission component 1, as the front-end component for power input, is connected to an external drive motor. For example... Figure 2As shown, the transmission assembly 1 mainly includes a first connecting rod 101, a second connecting rod 102, and a connecting member 103. In this embodiment, the number of connecting members 103 is set to two. One end of the first connecting rod 101 and the second connecting rod 102 are detachably connected through the connecting member 103. The design of the connecting member 103 is crucial; it not only serves as a connection but also enables the first connecting rod 101 and the second connecting rod 102 to deflect at multiple angles. Through the multi-angle deflection of the connecting member 103, the first connecting rod 101 and the second connecting rod 102 can flexibly adapt to such small axial and radial deviations, thereby effectively compensating for assembly errors between components. In addition, this flexible connection can also buffer the rotational torque fluctuations generated at the moment of motor start-up or when the load changes, ensuring the smoothness of power input and transmitting the smooth torque output by the motor to the subsequent rotating assembly 2 without loss.

[0023] Rotating component 2 is the core actuator of this invention, and its internal structure is intricate, such as... Figure 1 and Figure 3 As shown. The rotating assembly 2 includes a first shaft 201, a first bushing 202, a second shaft 203, a second bushing 204, a housing 205, a positioning element 206, a base 207, a buffer element 208, an axial-radial conversion mechanism 209, and a stabilizing element 210.

[0024] The housing 205 provides a solid mounting base and a sealed protective environment for the entire rotating assembly 2. For example... Figure 4 As shown, the housing 205 has an internal cavity 2051 to accommodate various moving parts. The upper part of the housing 205 has a flat section 2052, which is mainly used for mounting and supporting the base 207. The design of the housing 205 fully considers the optimization of structural strength and spatial layout, ensuring that the internal transmission mechanism is not affected by external interference and can operate stably for a long time in the high-temperature and high-pressure liquid phase epitaxial environment. Multiple groove structures for installation and positioning are also formed on the inner wall of the housing 205, including a first mounting groove 2053, a third mounting groove 2054, and a second mounting groove 2055.

[0025] The first shaft 201 and the second shaft 203 are the core drive shafts in the rotating assembly 2, and their axes are perpendicular and spaced apart. Specifically, the axis of the first shaft 201 extends along the axial direction of the outer shell 205 and is mainly responsible for receiving torque from the transmission assembly 1; while the axis of the second shaft 203 extends vertically and is mainly responsible for driving the base 207 to rotate. This vertical arrangement achieves a 90-degree reversal of power through the axial-radial conversion mechanism 209, thus adapting to the special requirements of the compact internal space of the horizontal epitaxial furnace and the need to convert lateral power into vertical rotational power.

[0026] To ensure the stability of the first shaft 201 and the second shaft 203 during high-speed rotation, this invention provides a first bushing 202 on the outer diameter surface of the first shaft 201 and a second bushing 204 on the outer diameter surface of the second shaft 203. The function of the first bushing 202 and the second bushing 204 is to provide high-precision radial support for the shafts. In traditional transmission devices, the shaft is directly installed in the hole, which can easily lead to radial runout due to excessive clearance or frictional heat jamming due to insufficient clearance. By providing the first bushing 202 and the second bushing 204, and utilizing the precise fit tolerance between the bushing and the shaft, the misalignment of the first shaft 201 and the second shaft 203 due to vibration during operation can be effectively prevented. The first bushing 202 firmly restricts the radial degree of freedom of the first shaft 201, and the second bushing 204 firmly restricts the radial degree of freedom of the second shaft 203, thereby ensuring the accuracy and stability of the rotational motion and avoiding rotational vibration of the base 207 caused by shaft wobbling. This is crucial for ensuring the uniformity of the epitaxial layer thickness.

[0027] In this embodiment, the outer casing 205 further includes a first mounting groove 2053 and a third mounting groove 2054. Viewed vertically, the first mounting groove 2053 is disposed on the inner diameter surface of the lower side of the cavity 2051, and the third mounting groove 2054 is disposed on the inner diameter surface of the upper side of the cavity 2051. The first mounting groove 2053 and the third mounting groove 2054 are coaxially arranged. The lower part of the second shaft 203 is mounted in the first mounting groove 2053, while the upper part of the second shaft 203 is mounted in the third mounting groove 2054. This double-groove mounting structure further enhances the centering effect of the second shaft 203. The first mounting groove 2053 and the third mounting groove 2054 act like two precise bearing seats, firmly fixing the second shaft 203 in the vertical direction, allowing it to rotate only around its own axis without any tilting or wobbling. This two-point, line-of-sight support method greatly improves the bending stiffness of the second shaft 203, maintaining a perfect vertical posture even when bearing the weight and load torque of the base 207.

[0028] To further reduce vibration and impact, the rotating assembly 2 also includes a buffer 208. For example... Figure 1As shown, along the vertical direction, a buffer 208 is disposed between the second bushing 204 and the cavity 2051, and the buffer 208 abuts against the lower part of the second bushing 204 and the upper side of the cavity 2051. The buffer 208 is preferably made of a material with excellent elasticity and high-temperature resistance, such as special rubber or a metal spring damper. When the second shaft 203 rotates at high speed, it inevitably generates minute vibrations and high-frequency harmonics. If these vibrations are directly transmitted to the housing 205, they will cause resonance throughout the entire device, affecting the epitaxial growth environment. The buffer 208, located between the second bushing 204 and the housing 205, acts as a vibration isolator and energy absorber. It can absorb the radial vibration energy generated by the second shaft 203 and buffer any possible axial impact loads. Through the elastic deformation of the buffer 208, mechanical energy is converted into heat energy and dissipated, thereby ensuring the smoothness of rotation and greatly improving the process stability of epitaxial growth.

[0029] The working process of the device of the present invention is as follows: First, the external drive motor starts and is connected to the second link 102 of the transmission assembly 1 via a coupling. The rotational power output by the motor drives the second link 102 to rotate. Due to the special design of the connector 103, the rotation of the second link 102 is smoothly transmitted to the first link 101 through the connector 103. In this process, if there is a slight misalignment between the motor shaft and the first link 101, the connector 103 will automatically undergo a slight angular deflection, thereby eliminating the additional radial force and ensuring that the torque transmission efficiency is not affected. The first link 101 is connected to the first shaft 201 of the rotating assembly 2; therefore, the rotation of the first link 101 directly drives the first shaft 201 to rotate.

[0030] After the first shaft 201 begins to rotate, the first bushing 202 mounted on the first shaft 201 provides stable radial support, ensuring smooth and jump-free rotation of the first shaft 201. The rotation of the first shaft 201 further drives the axial-radial conversion mechanism 209 mounted on its outer diameter surface to rotate around the axial direction of the housing 205. In this embodiment, the axial-radial conversion mechanism 209 is preferably a set of meshing bevel gears, with the driving bevel gear mounted on the first shaft 201 and the driven bevel gear mounted on the second shaft 203. The two axial-radial conversion mechanisms 209 mesh with each other. When the first shaft 201 drives the driving bevel gear to rotate, the power transmission direction changes by 90 degrees through the meshing of the gears, causing the driven bevel gear mounted on the second shaft 203 to rotate around the vertical direction. Furthermore, the driven bevel gear drives the second shaft 203 to rotate along the vertical direction.

[0031] The rotation of the second shaft 203 drives the detachably connected base 207 to rotate vertically. The base 207 is a key component supporting the silicon carbide substrate, and its rotational stability directly determines the growth quality of the epitaxial layer. Through the aforementioned transmission path, the motor's power is smoothly and precisely transmitted to the base 207, achieving uniform rotation of the base 207.

[0032] To ensure proper engagement and balanced force distribution of the axial-radial conversion mechanism 209, precise axial positioning of the first shaft 201 and the second shaft 203 is necessary. This is primarily achieved by the positioning element 206. The housing 205 also features second mounting slots 2055, with at least two sets of slots 2055, each set containing at least two slots. Along the axial direction of the housing 205, the two sets of second mounting slots 2055 are respectively located at both ends of the planar portion 2052. Vertically, one second mounting slot 2055 is located on the upper side of the planar portion 2052, and along the axial direction of the housing 205, the other second mounting slot 2055 is located on the upper side of both end faces of the planar portion 2052. This complex slot arrangement is designed to accommodate the installation requirements of different components. Vertically, the upper side of the positioning element 206 is installed in the second mounting slot 2055 located on the upper side of the planar portion 2052.

[0033] The structure of the positioning component 206 is as follows Figure 5 and Figure 6 As shown, it includes a main body 2061 and a protrusion 2062. The main body 2061 and the protrusion 2062 are preferably integrally formed to ensure overall strength and rigidity. The protrusion 2062 is positioned above the main body 2061 in the vertical direction. Along the axial direction of the outer shell 205, the protrusion 2062 is detachably connected to a second mounting groove 2055 provided on the end face of the flat portion 2052. This design, where the protrusion 2062 is embedded in the second mounting groove 2055, uniquely determines the position of the positioning member 206 on the outer shell 205, preventing the positioning member 206 from rotating circumferentially or moving axially.

[0034] The main body 2061 has mounting holes 20611 and fixing holes 20612. Multiple fixing holes 20612 are provided, spaced apart vertically and located below the main body 2061. Mounting holes 20611 are spaced above the fixing holes 20612, and protrusions 2062 are spaced above the mounting holes 20611. The first shaft 201 is detachably connected to the mounting holes 20611. In this embodiment, one end of the first shaft 201 passes through the mounting hole 20611 and engages with it via a bearing or bushing structure. The main function of the positioning member 206 is to axially limit the first shaft 201 and the axial-radial conversion mechanism 209 mounted on the first shaft 201. Along the axial direction of the outer casing 205, the positioning member 206 near the transmission assembly 1 abuts against the first bushing 202. Simultaneously, the first bushing 202 is clamped between the axial-radial conversion mechanism 209 and the positioning element 206. This clamping structure firmly locks the first shaft 201 and its gears in the axial position. During gear transmission, a huge axial thrust is generated. Without reliable axial limiting, the first shaft 201 will move axially, causing gear disengagement or increased meshing clearance, resulting in severe impact and noise. Through the precise limiting of the positioning element 206, the first shaft 201 is completely fixed in the axial direction, ensuring a constant gear meshing clearance, thereby guaranteeing smooth transmission and low noise.

[0035] To further enhance the stability of the positioning component 206 and prevent it from loosening during long-term vibration, the rotating assembly 2 also includes a stabilizing component 210. The stabilizing component 210 includes an arc-shaped portion 2101 and a fixing portion 2102. Vertically, the arc-shaped portion 2101 abuts against the lower side of the cavity 2051, and is fixedly connected to the cavity 2051. The arc-shaped portion 2101 is cleverly designed to fit the arc-shaped contour of the lower side of the cavity 2051 inside the housing 205, and is fixed to the cavity 2051 by fasteners. The fixing portion 2102 has multiple fixing holes 20612, which limit the positioning component 206. Specifically, the fixing portion 2102 extends upwards, and its fixing holes 20612 are aligned with the fixing holes 20612 below the main body 2061 of the positioning component 206, and are fixed by bolts or pins. In this way, the stabilizing member 210 acts like a reinforcing rib, connecting one end to the outer shell 205 and locking the positioning member 206 at the other end. This double-fixed structure greatly enhances the overall vibration resistance of the device and completely avoids relative movement between components. Even under high-speed and high-load conditions, the positioning member 206 can remain absolutely stationary, thus ensuring that the axial position of the first shaft 201 is perfectly accurate.

[0036] In the vertical direction, the axial-radial conversion mechanism 209, mounted on the second shaft 203, is located above the second shaft 203 and abuts against the second bushing 204. This means that the second bushing 204 also provides axial support for the driven gear. The second shaft 203, the axial-radial conversion mechanism 209, and the second bushing 204 form a tight fit in the axial direction, further restricting the degree of freedom of the second shaft 203.

[0037] The base 207 is disposed on the upper side of the planar portion 2052 of the housing 205 and is detachably connected to the second shaft 203. Due to the extremely stable rotation of the second shaft 203, the base 207 will not experience any eccentricity or wobbling during rotation. The base 207 is typically made of high-purity graphite or silicon carbide coated material and is used to support the wafer. During liquid phase epitaxy, the base 207 needs to rotate at a constant speed in an environment containing corrosive gases. The all-mechanical transmission structure of this invention completely replaces the traditional gas suspension drive, eliminating the influence of airflow pressure fluctuations, and enabling the rotational accuracy of the base 207 to be controlled at an extremely high level.

[0038] In summary, this invention constructs a highly stable base transmission system through the coordinated operation of transmission component 1 and rotating component 2. The connector 103 in transmission component 1 enables flexible power transmission, effectively buffering impacts and errors. In rotating component 2, the cavity 2051 and planar surface 2052 of the outer shell 205 provide the structural foundation; the first bushing 202 and the second bushing 204 provide excellent radial support for the first shaft 201 and the second shaft 203; the first mounting groove 2053, the third mounting groove 2054, and the second mounting groove 2055 achieve high-precision installation positioning; the combination of positioning component 206 and stabilizing component 210 achieves rigid axial limiting and vibration-resistant reinforcement; the buffer component 208 provides vibration absorption and buffering functions; and the axial-radial conversion mechanism 209 achieves smooth power reversal. Through the precise cooperation of the above components, power is stably transmitted to the base 207, driving it to rotate with high precision. This device solves the problem of unstable base rotation caused by airflow interference in the existing technology, eliminates thickness deviation and doping concentration fluctuation caused by gas buoyancy, and significantly reduces operating costs, providing an ideal hardware foundation for liquid phase epitaxial growth.

[0039] The above embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of protection of the present invention. Any non-substantial changes and substitutions made by those skilled in the art based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A base transmission device for a horizontal silicon carbide epitaxial furnace for liquid phase epitaxy, characterized in that, include: The transmission assembly (1) includes a first connecting rod (101), a second connecting rod (102), and a connector (103). There are at least two connectors (103). One end of the second connecting rod (102) and one end of the first connecting rod (101) are detachably connected through the connectors (103). The connectors (103) can drive the first connecting rod (101) and the second connecting rod (102) to achieve multi-angle deflection. The rotating assembly (2) includes a first shaft (201), a first bushing (202), a second shaft (203), a second bushing (204), a housing (205), positioning elements (206), and a base (207). The axis of the first shaft (201) and the axis of the second shaft (203) are perpendicular and spaced apart. The first bushing (202) is provided on the outer diameter surface of the first shaft (201), and the second bushing (204) is provided on the outer diameter surface of the second shaft (203). At least two positioning elements (206) are provided. Along the axial direction of the housing (205), the positioning element (206) near the transmission assembly (1) is positioned opposite the first shaft (201), the first bushing (202), the second shaft (203), the second bushing (204), the first shaft (205), the second bushing (206), and the base (207). A shaft (201) is sleeved and abutted, and the positioning element (206) is disposed at both ends of the outer shell (205). The positioning element (206) is detachably connected to the outer shell (205). The outer shell (205) is provided with a cavity (2051) and a flat surface (2052). The first shaft (201), the first bushing (202), the second shaft (203), the second bushing (204) and the positioning element (206) are all disposed in the cavity (2051). In the vertical direction, the base (207) is disposed on the upper side of the flat surface (2052). The base (207) is detachably connected to the second shaft (203). The rotating component (2) and the transmission component (1) are detachably connected.

2. The base transmission device for a horizontal silicon carbide epitaxial furnace for liquid phase epitaxy according to claim 1, characterized in that, The rotating assembly (2) further includes a buffer (208). In the vertical direction, the buffer (208) is disposed between the second bushing (204) and the cavity (2051), and the buffer (208) abuts against the lower part of the second bushing (204) and the upper side of the cavity (2051).

3. The base transmission device for a horizontal silicon carbide epitaxial furnace for liquid phase epitaxy according to claim 1, characterized in that, The outer casing (205) further includes a first mounting groove (2053) and a third mounting groove (2054). In the vertical direction, the first mounting groove (2053) is disposed on the inner diameter surface of the lower side of the cavity (2051), and the third mounting groove (2054) is disposed on the inner diameter surface of the upper side of the cavity (2051). The first mounting groove (2053) and the third mounting groove (2054) are coaxially arranged. In the vertical direction, the lower part of the second shaft (203) is installed in the first mounting groove (2053), and the lower part of the second shaft (203) is installed in the third mounting groove (2054).

4. The base transmission device for a horizontal silicon carbide epitaxial furnace for liquid phase epitaxy according to claim 1, characterized in that, The outer casing (205) further includes a second mounting groove (2055), which is provided in at least two sets, with each set of the second mounting groove (2055) having at least two. Along the axial direction of the outer casing (205), the two sets of the second mounting groove (2055) are respectively provided at both ends of the planar portion (2052). In the vertical direction, one of the second mounting grooves (2055) is provided on the upper side of the planar portion (2052) along the axial direction of the outer casing (205), and the other second mounting groove (2055) is provided on the upper side of the end faces of both ends of the planar portion (2052). In the vertical direction, the upper side of the positioning member (206) is installed in the second mounting groove (2055) provided on the upper side of the planar part (2052).

5. The base transmission device for a horizontal silicon carbide epitaxial furnace for liquid phase epitaxy according to claim 4, characterized in that, The positioning element (206) further includes a main body (2061) and a protrusion (2062), the main body (2061) and the protrusion (2062) are integrally formed, and the protrusion (2062) is disposed above the main body (2061) in the vertical direction; Along the axial direction of the housing (205), the protrusion (2062) is detachably connected to the second mounting groove (2055) provided on the end face of the flat portion (2052).

6. The base transmission device for a horizontal silicon carbide epitaxial furnace for liquid phase epitaxy according to claim 5, characterized in that, The main body (2061) includes mounting holes (20611) and fixing holes (20612). There are multiple fixing holes (20612) arranged vertically, with each fixing hole (20612) spaced apart and located below the main body (2061). The mounting holes (20611) are spaced apart above the fixing holes (20612), and the protrusions (2062) are spaced apart above the mounting holes (20611). The first shaft (201) is detachably connected to the mounting hole (20611).

7. The base transmission device for a horizontal silicon carbide epitaxial furnace for liquid phase epitaxy according to claim 1, characterized in that, The rotating assembly (2) further includes an axial-radial conversion mechanism (209), wherein there are at least two axial-radial conversion mechanisms (209), one of which is disposed on the outer diameter surface of the first shaft (201), and the other is disposed on the outer diameter surface of the second shaft (203), and the two axial-radial conversion mechanisms (209) mesh with each other; Along the axial direction of the outer casing (205), the axial-radial conversion mechanism (209) disposed on the first shaft (201) and the positioning member (206) near the transmission assembly (1) respectively abut against both ends of the first bushing (202); The axial-radial conversion mechanism (209) disposed on the second shaft (203) in the vertical direction is located on the upper side of the second shaft (203), and the axial-radial conversion mechanism (209) abuts against the second bushing (204).

8. The base transmission device for a horizontal silicon carbide epitaxial furnace for liquid phase epitaxy according to claim 5, characterized in that, The rotating assembly (2) further includes a stabilizing member (210), which includes an arc-shaped portion (2101) and a fixing portion (2102). In the vertical direction, the arc-shaped portion (2101) abuts against the lower side of the cavity (2051), and the arc-shaped portion (2101) is fixedly connected to the cavity (2051). The fixing part (2102) is provided with a plurality of fixing holes (20612), and the fixing part (2102) limits the positioning member (206) through the fixing holes (20612).

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