Filter material quick drying equipment and use method thereof

By designing an automated filter media rapid drying equipment, which employs stirring, heating, and inert atmosphere treatment, the problems of cumbersome operation and safety risks in the filter media drying process are solved, achieving efficient and safe filter media drying.

CN121994002APending Publication Date: 2026-05-08QUANJIAO JINHONG ELECTRONIC MATERIALS CO LTD
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Patent Information

Application Number
CN202610226216.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-02-26
Publication Date
2026-05-08

AI Technical Summary

Technical Problem

Existing filter material drying technology is cumbersome, increases the labor intensity of personnel, and poses safety risks such as fire, corrosion, and environmental pollution.

Method used

Design a rapid drying device for filter media that includes a stirring system, a heating system, a nitrogen system, and a filtrate discharge system. Employ automated control and corrosion-resistant materials, the device achieves rapid drying of the filter media through stirring, heating, and inert atmosphere treatment.

Benefits of technology

It significantly reduces the labor intensity of personnel, improves work efficiency, reduces safety hazards, ensures the safety of personnel and equipment, and reduces environmental pollution.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses filter material rapid drying equipment and a using method thereof.The filter material rapid drying equipment comprises an equipment body, a stirring system, a heating system, a nitrogen system and a filtrate discharging system. A feeding pipe is arranged at the top of the equipment main body, a solid filter material discharging pipe is arranged at the bottom of the equipment main body, a feeding control valve is mounted on the feeding pipe, and a solid filter material discharging valve is mounted on the solid filter material discharging pipe. The stirring system comprises a stirring paddle arranged in the equipment main body and is used for stirring and scattering the filter material. The heating system comprises a heat-conducting oil tank and a heat-conducting oil pipeline for connecting the heat-conducting oil tank with the equipment main body; and a heat-conducting oil inlet valve and a heat-conducting oil return valve are mounted on the heat-conducting oil pipeline. The nitrogen system comprises a nitrogen pipe, a nitrogen control valve and a pressure control valve, according to the invention, the labor intensity of personnel can be greatly reduced, the working efficiency is improved, the risks of fire catching, corrosion, environmental pollution and the like are reduced, the potential safety hazard is greatly reduced, and the safety of personnel and equipment is ensured.
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Description

Technical Field

[0001] This invention belongs to the field of filter media drying technology, specifically relating to a rapid filter media drying device and its usage method. Background Technology

[0002] With the development of the semiconductor industry, the demand for trimethylsilylamine is growing rapidly. Trimethylsilylamine has a wide range of applications in semiconductor manufacturing, integrated circuits, solar cells, and other fields, and performs particularly well in processes such as amorphous silicon growth, epitaxial growth, and chemical vapor deposition.

[0003] Trimethylsilylamine is produced by reacting monochlorosilane and ammonia in a reactor under specific temperature and pressure conditions to generate a crude product. This crude product is then purified through filtration, separation, and distillation to obtain the final, qualified target product. This process generates a certain amount of solid material. To prevent pipeline blockage, improve product yield, and reduce safety risks, the solid filter media often needs to be treated through pressure filtration, washing, and drying to meet safe extraction or discharge standards. Currently, the most common filter media drying technology involves initially separating the filtrate and solid filter media using a filter screen. After separation, the filtrate is sent to a crude product tank, while the solid filter media undergoes multiple washing processes. The washed and qualified filter media is then transferred to a drying device where heating is used to evaporate the residual liquid, thus achieving the purpose of drying the solid filter media.

[0004] Existing drying operations are cumbersome, requiring frequent operation by personnel, increasing labor intensity and wasting time. Furthermore, during the filter media transfer process, residual chemicals pose safety risks such as fire, corrosion, occupational injuries to operators, and environmental pollution.

[0005] Therefore, in order to address the above-mentioned technical problems, it is necessary to provide a rapid drying device for filter media and its usage method.

[0006] The information disclosed in this background section is intended only to enhance the understanding of the overall background of the invention and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Summary of the Invention

[0007] The purpose of this invention is to provide a rapid drying device for filter media and its usage method, which can solve the problems of leakage, fire, corrosion, and environmental pollution accidents that may occur during the drying process of filter media.

[0008] To achieve the above objectives, a specific embodiment of the present invention provides a rapid filter material drying device, comprising a main body, a stirring system, a heating system, a nitrogen system, and a filtrate discharge system. The main body has a feed pipe at the top and a solid filter material discharge pipe at the bottom. A feed control valve is installed on the feed pipe, and a solid filter material discharge valve is installed on the solid filter material discharge pipe. The stirring system includes a stirring paddle located inside the main body for stirring and dispersing the filter material. The heating system includes a heat transfer oil tank and a heat transfer oil pipeline connecting the heat transfer oil tank and the main body. A heat transfer oil inlet valve and a heat transfer oil return valve are installed on the heat transfer oil pipeline. The nitrogen system includes a nitrogen pipe and a nitrogen control valve and a pressure control valve installed thereon for providing an inert atmosphere to the main body and controlling the internal pressure. The filtrate discharge system includes a filtrate pipe and a filtrate discharge valve, a filtrate to crude product tank control valve, and a tail gas removal system control valve installed thereon.

[0009] In one or more embodiments of the present invention, a jacket is provided on the outside of the main body of the device, and the jacket is connected to the heat transfer oil tank through the heat transfer oil pipeline.

[0010] In one or more embodiments of the present invention, a filter cloth is provided at the bottom of the device body, and the inner wall of the device body is made of a corrosion-resistant material.

[0011] In one or more embodiments of the present invention, the filter cloth is made of a high-temperature resistant and chemically corrosion resistant precision filter material with a filtration accuracy of 0.1μm-10μm and the filter cloth can withstand an operating temperature of not less than 150°C.

[0012] In one or more embodiments of the present invention, the stirring system can automatically adjust the rotation speed, rotation direction and lifting height of the stirring paddle to achieve stirring, compaction and leveling of the filter material at different stages.

[0013] In one or more embodiments of the present invention, the heat transfer oil tank is provided with a temperature control device for stabilizing the temperature of the heat transfer oil at any set value between 30℃ and 200℃, with a temperature control accuracy of ±1℃.

[0014] In one or more embodiments of the present invention, the filtrate discharge system further includes a sampling valve, which is installed on the filtrate tube and is used to sample and monitor the composition and content of gases during the drying process in real time.

[0015] In one or more embodiments of the present invention, the device further includes a central control system, wherein the feed control valve, nitrogen control valve, pressure control valve, heat transfer oil inlet valve, heat transfer oil return valve and stirring paddle are all electrically connected to the central control system for realizing automated control of feed, pressure, temperature and stirring process.

[0016] A method of using a rapid filter media drying device includes the following steps: S1. The main body of the equipment is purged and replaced by nitrogen system. After the oxygen content and moisture content are found to be qualified, the internal pressure of the main body of the equipment is controlled at the preset value and the material is ready to be fed. S2. Close the valve of the filtrate discharge system, remotely open the feed control valve to transfer the reaction product into the main body of the equipment, and start the agitator to stir and wash. S3. Stop stirring and allow the solid particles on the filter cloth to stand and form a filter cake. Then, introduce nitrogen gas to increase the pressure and perform the pressure filtration operation. Discharge the filtrate to the crude product tank through the filtrate discharge system. This pressure filtration process can be repeated multiple times while stirring and leveling the filter cake. S4. Start the heating system to raise the temperature inside the main body of the equipment to the set drying temperature and perform constant temperature drying, while maintaining the filtrate discharge system passage to collect volatile products; S5. After drying, switch the filtrate discharge pipeline to the tail gas system, introduce nitrogen to purge and replace the solid filter material, and monitor the gas composition through the sampling valve until it meets the requirements. S6. Reduce the temperature of the main body of the equipment, depressurize to normal pressure, start the agitator to reverse and open the solid filter media discharge valve to complete the unloading of solid filter media.

[0017] In one or more embodiments of the present invention, in S3, the pressure of the filter press operation is 2-5 bar, and the leveling and filter press are repeated at least twice. In S4, the drying temperature is 70-90°C, and the constant temperature drying time is 1-3 hours.

[0018] Compared with the prior art, the filter material rapid drying equipment and its usage method of the present invention can significantly reduce the labor intensity of personnel, improve work efficiency, reduce fire, corrosion and environmental pollution, thereby greatly reducing safety hazards and ensuring the safety of personnel and equipment. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of a rapid filter material drying device according to an embodiment of the present invention; Figure 2 This is a partial structural schematic diagram of a rapid filter material drying device according to an embodiment of the present invention; Figure 3This is a perspective view of the stirring paddle in one embodiment of the present invention; Figure 4 for Figure 3 Schematic diagram of the structure at point A in the middle.

[0021] Explanation of key figure labels: 1-Feed pipe, 2-Feed control valve, 3-Equipment body, 4-Agitator, 401-Connecting seat, 402-Telescopic rod, 403-Cleaning plate, 404-Limit ring, 405-Connecting rod, 406-Limit seat, 407-Telescopic sleeve, 408-Elastic plate, 5-Solid filter media discharge valve, 6-Nitrogen control valve, 7-Nitrogen pipe, 8-Heat transfer oil return valve, 9-Heat transfer oil inlet valve, 10-Heat transfer oil tank, 11-Filter cloth, 12-Filtrate discharge valve, 13-Filtrate pipe, 14-Filtrate to crude product tank control valve, 15-Tail gas removal system control valve, 16-Sampling valve, 17-Pressure control valve. Detailed Implementation

[0022] To enable those skilled in the art to better understand the technical solutions in this disclosure, the technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments in this disclosure, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this disclosure.

[0023] like Figure 1 As shown, a rapid filter material drying device according to an embodiment of the present invention includes a main body 3, a stirring system, a heating system, a nitrogen system, and a filtrate discharge system. The main body 3 has a feed pipe 1 at the top and a solid filter material discharge pipe at the bottom. A feed control valve 2 is installed on the feed pipe 1, and a solid filter material discharge valve 5 is installed on the solid filter material discharge pipe. The stirring system includes a stirring paddle 4 located inside the main body 3 for stirring and dispersing the filter material. The heating system includes a heat transfer oil tank 10 and a heat transfer oil pipeline connecting the heat transfer oil tank 10 and the main body 3. A heat transfer oil inlet valve 9 and a heat transfer oil return valve 8 are installed on the heat transfer oil pipeline. The nitrogen system includes a nitrogen pipe 7 and a nitrogen control valve 6 and a pressure control valve 17 installed thereon for providing an inert atmosphere to the main body 3 and controlling the internal pressure. The filtrate discharge system includes a filtrate pipe 13 and a filtrate discharge valve 12, a filtrate to crude product tank control valve 14, and a tail gas removal system control valve 15 installed thereon.

[0024] The stirring paddle 4 of the mixing system is not only used for conventional mixing, but its adjustable speed, direction, and height functions allow it to fully mix materials during the washing stage and level the filter cake during the pressure filtration stage to improve filtration efficiency. The heating system consists of a heat transfer oil tank 10 and heat transfer oil pipelines, indirectly heating the main body of the equipment 3 through the heat transfer oil. This heating method provides uniform temperature and precise temperature control, avoiding localized overheating, and is particularly suitable for drying heat-sensitive or flammable materials. The nitrogen system is used not only to replace air before operation and create an inert environment, but also to maintain a certain system pressure throughout the process, providing power for pressure filtration, and purging the filter cake in the later stages of drying to remove residual solvent. The filtrate discharge system can direct the filtrate to a coarse product tank for product recovery, or direct the drying exhaust gas to an exhaust gas treatment system, achieving a balance between resource recovery and environmental protection.

[0025] The main body 3 of the equipment is equipped with a jacket on its outer side, which is connected to the heat transfer oil tank 10 via a heat transfer oil pipeline. A circulation pump is installed inside the heat transfer oil tank 10. The heat transfer oil pipeline includes an inlet pipeline and a return pipeline, with the inlet pipeline connected to the circulation pump. When the circulation pump is running, heat transfer oil is pumped from the heat transfer oil tank 10 into the jacket via the inlet pipeline, and then returns to the heat transfer oil tank 10 via the return pipeline, forming a circulation.

[0026] Preferably, the inner wall of the equipment body 3 is made of a corrosion-resistant material. This design can improve the service life of the equipment body 3.

[0027] In this embodiment, a filter cloth 11 is provided at the bottom of the main body 3 of the device for filtering materials. The filter cloth 11 is made of a high-temperature resistant and chemically corrosion resistant precision filter material, with a filtration accuracy of 0.1μm-10μm, and the filter cloth 11 can withstand an operating temperature of not less than 150℃.

[0028] like Figure 1 As shown, the filtrate pipe 13 is located in the collection area below the filter cloth 11. The pipeline after the filtrate pipe 13 is divided into two paths: one path leads to the crude product tank through the filtrate to the crude product tank control valve 14, and the other path leads to the exhaust gas treatment system through the exhaust gas system control valve 15.

[0029] The stirring system can automatically adjust the rotation speed, rotation direction and lifting height of the stirring paddle 4 to achieve different stages of stirring, compacting and leveling of the filter material.

[0030] In this embodiment, the heat transfer oil tank 10 is equipped with a temperature control device, such as a heater and a temperature sensor, to stably control the temperature of the heat transfer oil at any set value between 30℃ and 200℃, with a temperature control accuracy of ±1℃.

[0031] In addition, the filtrate discharge system also includes a sampling valve 16, which is installed on the filtrate tube 13 and is used to sample and monitor the composition and content of gases during the drying process in real time.

[0032] Specifically, the equipment also includes a central control system. The feed control valve 2, nitrogen control valve 6, pressure control valve 17, heat transfer oil inlet valve 9, heat transfer oil return valve 8, and agitator 4 are all electrically connected to the central control system to achieve automated control of the feeding, pressure, temperature, and mixing process.

[0033] like Figures 3-4 As shown, the agitator 4 includes a connecting seat 401, a pair of telescopic rods 402, and a pair of cleaning plates 403. The pair of telescopic rods 402 are symmetrically connected to the side wall of the connecting seat 401, and the cleaning plates 403 are connected to the free ends of the telescopic rods 402. A limiting ring 404 is connected to the side wall of the telescopic rods 402, and a pair of connecting rods 405 are fixedly connected to the cleaning plates 403. One end of the connecting rod 405 passes through the limiting ring 404 and is connected to a limiting seat 406. A plurality of elastic plates 408 are also connected to the side wall of the telescopic rods 402, and the limiting seat 406 corresponds to the elastic plates 408.

[0034] When the connecting seat 401 drives the telescopic rod 402 to rotate, the cleaning plate 403 is pulled by the centrifugal force of rotation, causing the telescopic rod 402 to extend and contact the inner wall of the equipment body 3. This serves to stir the material and remove the adhesive layer from the side wall of the equipment body 3. When the telescopic rod 402 rotates, the elastic plate 408 also swings irregularly in the material, thus stirring it. The cleaning plate 403 can be limited by the cooperation of the limiting ring 404, the connecting rod 405, and the limiting seat 406. When the connecting seat 401 does not rotate, the telescopic rod 402 returns to its original state, and the limiting seat 406 impacts the elastic plate 408, causing the elastic plate 408 to vibrate, thus preventing material from adhering to the surface of the telescopic rod 402.

[0035] The limiting ring 404 and the cleaning plate 403 are provided with a telescopic sleeve 407 to prevent materials from affecting the extension and retraction of the telescopic rod 402.

[0036] A method of using a rapid filter media drying device includes the following steps: S1. Close all valves, open nitrogen control valve 6 and pressure control valve 17, fill the main body of the equipment 3 with nitrogen to 0.2 bar, then depressurize to atmospheric pressure, repeat three times to ensure complete replacement, and finally maintain the pressure at 0.15 bar. S2. The operator confirms that the filtrate discharge valve 12, the filtrate to crude product tank control valve 14, and the tail gas removal system control valve 15 are closed. The main operator remotely opens the feed control valve 2 in the control room to press the slurry in the reactor into the main body of the equipment 3. During this period, the pressure control valve 17 automatically adjusts to maintain the pressure at 0.15-0.2 bar. S3. After feeding is complete, start the stirring paddle 4 and stir at 60 rpm for 1 hour to fully dissolve the product adsorbed on the solid particles into the liquid. S4. Stop stirring and let stand for 30 minutes. Then, increase the pressure to 3 bar through the nitrogen system. Manually open the filtrate discharge valve 12 and the filtrate to crude product tank control valve 14 to start pressure filtration. When the filtrate flow rate decreases significantly, close the filtrate to crude product tank control valve 14 and start the agitator 4 to rotate at low speed to break up and flatten the filter cake. Then, increase the pressure to 3 bar again and open the filtrate to crude product tank control valve 14 for a second pressure filtration. Repeat this process three times to ensure that most of the liquid product is separated and recovered. S5. After the pressure filtration is completed, open the heat transfer oil inlet valve 9 and the heat transfer oil return valve 8, start the temperature control device in the heat transfer oil tank 10, set the temperature to 85℃, and heat the main body 3 of the equipment. When the internal temperature of the main body 3 of the equipment reaches 80℃, start constant temperature drying for 2 hours. During this period, keep the filtrate outlet valve 12 and the filtrate to crude product tank control valve 14 open so that the solvent evaporated during the drying process can be condensed and recovered as product. S6. After drying, switch the filtrate discharge pipeline to the tail gas system, introduce nitrogen to purge and replace the solid filter material, and monitor the gas composition through sampling valve 16 until it is qualified; after the constant temperature drying is completed, close the filtrate to crude product tank control valve 14, open the tail gas system control valve 15, maintain the temperature at 80℃, and open the solid filter material discharge valve 5 to continuously introduce nitrogen at a low flow rate to purge the filter cake. Thereafter, every 30 minutes, slowly open the sampling valve 16 and use an online gas chromatograph to detect the solvent content in the exhaust gas. When the detected value is lower than 50 ppm, it is considered that the drying is qualified. S7. After drying is qualified, set the temperature of the temperature control device in the heat transfer oil tank 10 to 30℃ and start cooling. When the temperature of the main body 3 drops to 30℃, release the internal pressure to normal pressure through the pressure control valve 17, start the agitator 4 to reverse at a speed of 20rpm, and at the same time open the solid filter material discharge valve 5 to discharge the thoroughly dried solid filter material from the equipment.

[0037] It will be apparent to those skilled in the art that this disclosure is not limited to the details of the exemplary embodiments described above, and that this disclosure can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of this disclosure is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this disclosure. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0038] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A rapid drying device for filter media, characterized in that, include: The main body of the equipment has a feed pipe at the top and a solid filter media outlet pipe at the bottom. A feed control valve is installed on the feed pipe and a solid filter media outlet valve is installed on the solid filter media outlet pipe. The mixing system includes a mixing paddle disposed inside the main body of the equipment for mixing and dispersing the filter material; The heating system includes a heat transfer oil tank and a heat transfer oil pipeline connecting the heat transfer oil tank and the main body of the equipment. A heat transfer oil inlet valve and a heat transfer oil return valve are installed on the heat transfer oil pipeline. A nitrogen system, including nitrogen pipes and nitrogen control valves and pressure control valves mounted thereon, is used to provide an inert atmosphere to the main body of the equipment and control the internal pressure; The filtrate discharge system includes a filtrate pipe and a filtrate discharge valve, a filtrate to crude product tank control valve, and a tail gas removal system control valve installed thereon.

2. The rapid drying equipment for filter media according to claim 1, characterized in that, The main body of the equipment is provided with a jacket on the outside, and the jacket is connected to the heat transfer oil tank through the heat transfer oil pipeline.

3. The rapid drying equipment for filter media according to claim 1, characterized in that, The bottom of the main body of the device is equipped with a filter cloth, and the inner wall of the main body of the device is made of corrosion-resistant material.

4. The rapid drying equipment for filter media according to claim 3, characterized in that, The filter cloth is made of a high-temperature resistant and chemically corrosion resistant precision filter material with a filtration accuracy of 0.1μm-10μm and can withstand an operating temperature of not less than 150℃.

5. The rapid drying equipment for filter media according to claim 1, characterized in that, The stirring system can automatically adjust the rotation speed, rotation direction, and lifting height of the stirring paddle to achieve stirring, compaction, and leveling of the filter material at different stages.

6. The rapid drying equipment for filter media according to claim 1, characterized in that, The heat transfer oil tank is equipped with a temperature control device to stably control the temperature of the heat transfer oil at any set value between 30℃ and 200℃, with a temperature control accuracy of ±1℃.

7. The rapid drying equipment for filter media according to claim 1, characterized in that, The filtrate discharge system also includes a sampling valve, which is installed on the filtrate tube and is used to sample and monitor the composition and content of gases during the drying process in real time.

8. The rapid drying equipment for filter media according to claim 1, characterized in that, The equipment also includes a central control system. The feed control valve, nitrogen control valve, pressure control valve, heat transfer oil inlet valve, heat transfer oil return valve, and agitator are all electrically connected to the central control system to achieve automated control of feed, pressure, temperature, and agitation processes.

9. A method of using the rapid filter media drying equipment as described in any one of claims 1-8, characterized in that, Includes the following steps: S1. The main body of the equipment is purged and replaced by nitrogen system. After the oxygen content and moisture content are found to be qualified, the internal pressure of the main body of the equipment is controlled at the preset value and the material is ready to be fed. S2. Close the valve of the filtrate discharge system, remotely open the feed control valve to transfer the reaction product into the main body of the equipment, and start the agitator to stir and wash. S3. Stop stirring and allow the solid particles on the filter cloth to stand and form a filter cake. Then, introduce nitrogen gas to increase the pressure and perform pressure filtration. Discharge the filtrate to the crude product tank through the filtrate discharge system. S4. Start the heating system to raise the temperature inside the main body of the equipment to the set drying temperature and perform constant temperature drying, while maintaining the filtrate discharge system passage to collect volatile products; S5. After drying, switch the filtrate discharge pipeline to the tail gas system, introduce nitrogen to purge and replace the solid filter material, and monitor the gas composition through the sampling valve until it meets the requirements. S6. Reduce the temperature of the main body of the equipment, depressurize to normal pressure, start the agitator to reverse and open the solid filter media discharge valve to complete the unloading of solid filter media.

10. The method of using the rapid drying equipment for filter media according to claim 9, characterized in that, In S3, the pressure of the filter press operation is 2-5 bar, and the leveling and filter press are repeated at least twice; in S4, the drying temperature is 70-90℃, and the constant temperature drying time is 1-3 hours.