A finishing mechanism for polishing cloths

Abstract

The application provides a trimming mechanism for polishing cloth, relates to the field of wafer processing technology, and comprises a pressure head part arranged above the polishing cloth, wherein the pressure head part is provided with a working end and an operating end, the side of the working end facing the polishing cloth is provided with a rotatable brush disc and a trimming disc, a spraying structure is arranged on the working end and is used for spraying liquid onto the surface of the polishing cloth, a swing structure is in transmission connection with the operating end of the pressure head part and is used for driving the pressure head part to swing in the horizontal direction with the operating end as the center, a rotary driving structure is used for outputting rotary power, a transmission structure is arranged between the trimming disc, the brush disc and the rotary driving structure and is used for transmitting the rotary power output by the rotary driving structure to the trimming disc and the brush disc so that the trimming disc and the brush disc rotate, and a lifting structure is connected with the pressure head part and is used for driving the pressure head part to ascend or descend. The problems of heavy labor intensity and low efficiency of workers in the polishing cloth maintenance process are solved.

Description

Technical Field

[0001] This application relates to the field of wafer processing technology, and more specifically, to a trimming mechanism for a polishing cloth. Background Technology

[0002] Polishing is one of the key planarization processes in semiconductor wafer manufacturing. After polishing, polishing slurry, particulate contaminants, and polishing debris remain on the surface of the polishing cloth. These residues need to be repaired and cleaned to maintain the surface condition and ensure the polishing quality of subsequent wafers.

[0003] After polishing the wafer, the traditional polishing cloth dressing structure usually requires manual cleaning of the surface of the polishing cloth to remove residual polishing liquid, particulate contaminants and debris, followed by high-pressure water rinsing, and finally the use of a dressing disc to dress and maintain the surface of the polishing cloth.

[0004] Traditional polishing cloth trimming requires a lot of manual intervention from staff, which not only increases the labor intensity of staff but also leads to low polishing cloth maintenance efficiency. Utility Model Content

[0005] The purpose of this application is to provide a dressing mechanism for polishing cloths, which aims to solve the problem of heavy labor intensity and low efficiency for workers in the process of polishing cloth maintenance.

[0006] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description or may be learned by practice of this application.

[0007] According to a first aspect of this application, a dressing mechanism for a polishing cloth is provided, comprising:

[0008] A pressure head is positioned above the polishing cloth. The pressure head is provided with a working end and an operating end. The side of the working end facing the polishing cloth is provided with a rotatable brush disc and a trimming disc.

[0009] A spraying structure, located at the working end, is used to spray liquid onto the surface of the polishing cloth;

[0010] The swing structure is connected to the operating end of the pressure head and is used to drive the pressure head to swing horizontally around the operating end.

[0011] A rotary drive structure for outputting rotational power;

[0012] A transmission structure is disposed between the trimming disc, the brush disc, and the rotary drive structure, for transmitting the rotational power output by the rotary drive structure to the trimming disc and the brush disc, so that the trimming disc and the brush disc rotate.

[0013] A lifting structure is connected to the pressure head and is used to drive the pressure head to rise or fall.

[0014] In one exemplary embodiment of this application, the lifting structure is located below the pressure head, and the lifting structure includes a lifting shaft, a bearing seat, and a first pneumatic interface;

[0015] The lifting shaft is slidably inserted into the bearing seat in the vertical direction, and the top of the lifting shaft is connected to the pressure head;

[0016] The bearing housing has an internal cavity, and the circumferential outer wall of the lifting shaft has an annular sealing ring inside the cavity. The sealing ring divides the cavity into an upper cavity and a lower cavity that are isolated from each other. The upper cavity is located above the sealing ring, and the lower cavity is located below the sealing ring.

[0017] The first pneumatic interface is connected to the lower cavity and is used to inflate or deflate the interior of the lower cavity.

[0018] In one exemplary embodiment of this application, the lifting structure further includes a second pneumatic interface connected to the upper cavity, the second pneumatic interface being used to inflate or vent the interior of the upper cavity.

[0019] In one exemplary embodiment of this application, the lifting structure further includes a support frame, a worktable, and a guide structure;

[0020] The support frame is fixedly connected to the bearing seat;

[0021] The worktable is connected to the bottom end of the lifting shaft, which can drive the worktable to rise or fall synchronously.

[0022] The guide structure is disposed between the support frame and the worktable. The guide structure includes a guide post and a guide sleeve arranged in a vertical direction. The guide post is fixedly connected to one of the support frame or the worktable, and the guide sleeve is fixedly connected to the other of the support frame or the worktable. The guide post passes through the guide sleeve and is slidably connected to the guide sleeve.

[0023] In one exemplary embodiment of this application, both the brush disc and the trimming disc are slidably connected to the pressure head along their own axial direction. A first pressure-applying structure for applying pressure to the brush disc is provided between the brush disc and the pressure head; a second pressure-applying structure for applying pressure to the trimming disc is provided between the trimming disc and the pressure head.

[0024] In one exemplary embodiment of this application, both the first pressurization structure and the second pressurization structure are configured as airbags.

[0025] In one exemplary embodiment of this application, the transmission structure is located inside the pressure head, and the transmission structure includes:

[0026] The drive wheel is connected to the rotary drive structure via a transmission connection;

[0027] The first driven wheel is located directly above the brush disc and rotates synchronously with the brush disc;

[0028] The second driven wheel is located directly above the dressing disc and rotates synchronously with the dressing disc;

[0029] A timing belt is wrapped around the driving pulley, the first driven pulley, and the second driven pulley.

[0030] In one exemplary embodiment of this application, the rotary drive structure includes a rotary motor and a rotary shaft. The rotary shaft is arranged in a vertical direction, with one end of the rotary shaft fixedly connected to the drive wheel along the rotation axis of the drive wheel, and the other end fixedly connected to the output shaft of the rotary motor.

[0031] In one exemplary embodiment of this application, the swing structure includes a connecting shaft and a power source for driving the connecting shaft to rotate. One end of the connecting shaft is fixedly connected to the operating end of the pressure head, and the other end of the connecting shaft is fixedly connected to the output end of the power source.

[0032] In one exemplary embodiment of this application, the swing structure includes a connecting shaft, the rotation drive structure includes a rotating shaft, and the lifting structure includes a lifting shaft. Both the connecting shaft and the lifting shaft are hollow shafts. The rotating shaft passes through the interior of the connecting shaft in a vertical direction, and the connecting shaft passes through the interior of the lifting shaft in a vertical direction.

[0033] The exemplary embodiments of this application may have some or all of the following beneficial effects:

[0034] In the exemplary embodiment of this application, a polishing cloth trimming mechanism is provided. When the polishing cloth needs trimming and maintenance, firstly, the lifting structure drives the pressure head to move downwards, so that both the brush disc and the trimming disc are in contact with the surface of the polishing cloth. Subsequently, the rotation drive structure outputs rotational power and transmits the rotational power to the brush disc and the trimming disc through the transmission structure, realizing the rotation of both, thereby cleaning and trimming the surface of the polishing cloth. During this process, the swing structure drives the pressure head to perform planar swing, forming a reciprocating motion trajectory; at the same time, the spraying structure sprays liquid onto the surface of the polishing cloth, realizing the liquid rinsing of the polishing cloth during the trimming and maintenance process. In summary, this trimming mechanism achieves the effects of cleaning, rinsing, and maintaining and trimming the surface of the polishing cloth. Compared with traditional manual maintenance methods, it not only reduces the labor intensity of workers but also improves the efficiency of polishing cloth maintenance and trimming.

[0035] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and do not limit this application. Attached Figure Description

[0036] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0037] Figure 1 A front sectional view of a trimming mechanism for a polishing cloth according to an embodiment of this application is shown;

[0038] Figure 2 It shows Figure 1 A magnified view of part A in the middle;

[0039] Figure 3 A cross-sectional view is shown in an embodiment of this application to illustrate the positional relationship between the brush disc and the trimming disc;

[0040] Figure 4 A top sectional view illustrating the transmission structure is shown in an embodiment of this application;

[0041] Figure 5 A front sectional view of the pressure head in an embodiment of this application is shown;

[0042] Figure 6 A partial cross-sectional view illustrating the swing structure is shown in an embodiment of this application.

[0043] Explanation of reference numerals in the attached figures:

[0044] 1. Press head; 11. Working end; 12. Operating end; 13. Brush disc; 14. Trimming disc; 2. Spraying structure; 3. Swinging structure; 31. Connecting shaft; 32. Drive motor; 33. First transmission gear; 34. Second transmission gear; 4. Rotary drive structure; 41. Rotary motor; 42. Rotary shaft; 5. Transmission structure; 51. Driving wheel; 52. First driven wheel; 53. Second driven wheel; 54. Synchronous belt; 6. Lifting structure; 61. Lifting shaft; 611. Sealing ring; 62. Bearing seat; 63. First pneumatic interface; 64. Second pneumatic interface; 65. Support frame; 66. Worktable; 67. Guide column; 68. Guide sleeve; 7. Airbag; 9. Protective cover; 10. Support plate. Detailed Implementation

[0045] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this application will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore their detailed descriptions will be omitted. Furthermore, the drawings are merely illustrative of this application and are not necessarily drawn to scale.

[0046] Although relative terms such as "up" and "down" are used in this specification to describe the relative relationship of one component of an icon to another, these terms are used only for convenience, such as according to the orientation of the examples in the accompanying drawings. It is understood that if the structure of the icon is flipped so that it is upside down, the component described as "up" will become the component described as "down". When a structure is "up" of another structure, it may mean that the structure is integrally formed on the other structure, or that the structure is "directly" set on the other structure, or that the structure is "indirectly" set on the other structure through another structure.

[0047] The terms “a,” “one,” “the,” and “at least one” are used to indicate the existence of one or more elements / components / etc.; the terms “including” and “having” are used to indicate an open-ended inclusion and to mean that there may be other elements / components / etc. in addition to the listed elements / components / etc.; the terms “first” and “second” are used only as markers and are not a limitation on the number of objects.

[0048] Reference Figure 1 As shown in the embodiments of this application, a dressing mechanism for a polishing cloth is disclosed, comprising:

[0049] A pressure head 1 is located above the polishing cloth. The pressure head 1 is provided with a working end 11 and an operating end 12. The side of the working end 11 facing the polishing cloth is provided with a rotatable brush disk 13 and a trimming disk 14.

[0050] The spraying structure 2 is disposed at the working end 11 and is used to spray liquid onto the surface of the polishing cloth.

[0051] The swing structure 3 is connected to the operating end 12 of the pressure head 1 and is used to drive the pressure head 1 to swing in the horizontal direction with the operating end 12 as the center.

[0052] Rotary drive structure 4 is used to output rotational power;

[0053] The transmission structure 5 is disposed between the trimming disc 14, the brush disc 13 and the rotary drive structure 4, and is used to transmit the rotational power output by the rotary drive structure 4 to the trimming disc 14 and the brush disc 13, so that the trimming disc 14 and the brush disc 13 rotate.

[0054] The lifting structure 6 is connected to the pressure head 1 and is used to drive the pressure head 1 to rise or fall.

[0055] Reference Figure 1 , Figure 3 , Figure 4 and Figure 5 As shown in this embodiment, the working end 11 and the operating end 12 are respectively disposed at both ends of the pressure head 1. The working end 11 is located directly above the polishing cloth, while the operating end 12 is offset to one side above the polishing cloth to facilitate the installation of the swing structure 3, the rotary drive structure 4, and the lifting structure 6. Of course, this is not limiting; in other embodiments, the entire pressure head 1 may be located above the polishing cloth. The pressure head 1 includes a support plate 10 and a protective cover 9. The protective cover 9 is fixed to the top of the support plate 10, and an installation cavity is formed inside the protective cover 9. The transmission structure 5 is disposed in the installation cavity.

[0056] The spraying structure 2 includes a spray nozzle, a water pipe for supplying water to the spray nozzle, and an adapter connecting the spray nozzle and the water pipe. Preferably, the spray nozzle is an adjustable pressure nozzle, capable of spraying water at different pressures as needed. This not only improves the cleaning effect on the polishing cloth surface but also meets the spraying requirements under different maintenance conditions of the polishing cloth. Of course, this is not limiting; in other embodiments, the spray nozzle can be replaced with a common fan-shaped nozzle or an atomizing nozzle for spraying clean water, special cleaning agents, or polishing slurries to meet the processing needs of different stages of the process.

[0057] In this embodiment, when maintenance and repair of the polishing cloth surface are required, firstly, the lifting structure 6 drives the pressure head 1 to move downwards, so that both the brush disc 13 and the repair disc 14 are in contact with the polishing cloth surface. Subsequently, the rotary drive structure 4 transmits rotational power to the brush disc 13 and the repair disc 14 through the transmission structure 5, driving them to rotate, thereby achieving cleaning and repair of the polishing cloth surface. During this process, the swing structure 3 drives the pressure head 1 to swing in a planar manner, forming a reciprocating motion, thus achieving repair and maintenance of different positions on the polishing cloth. While the swing structure 3 swings the pressure head 1, the spraying structure 2 continuously sprays liquid onto the surface of the polishing cloth to achieve rinsing. The repair mechanism in this embodiment integrates cleaning, rinsing, and surface repair of polishing cloth surface debris, not only reducing the labor intensity of workers but also effectively improving the efficiency of polishing cloth maintenance and repair.

[0058] Reference Figure 1 and Figure 2 As shown in this embodiment, the lifting structure 6 is located below the pressure head 1. The lifting structure 6 includes a lifting shaft 61, a bearing seat 62, and a first pneumatic interface 63. Specifically, the lifting structure 6 is located directly below the operating end 12. The lifting shaft 61 is arranged vertically and its top is connected to the pressure head 1. When the lifting shaft 61 rises, it can drive the pressure head 1 to rise together. The bearing seat 62 is sleeved on the outside of the lifting shaft 61, and the position of the bearing seat 62 is always fixed. The bearing seat 62 has a cavity inside. The circumferential outer wall of the lifting shaft 61 has an annular sealing ring 611 in the cavity. The sealing ring 611 can be fixed to the lifting shaft 61 by welding or other means, or it can be an integral structure with the lifting shaft 61. The sealing ring 611 divides the cavity into two chambers: the upper chamber is located above the sealing ring 611, and the lower chamber is located below the sealing ring 611. The first pneumatic interface 63 is connected to the interior of the lower chamber, and air can be injected or vented into the lower chamber through the first pneumatic interface 63.

[0059] Furthermore, the top of the lifting shaft 61 can be fixedly connected to the bottom of the pressure head 1 (support plate 10), or it can be rotatably connected to the support plate 10. The top of the lifting shaft 61 can also abut against the support plate 10 without any connection.

[0060] When the pressure head 1 needs to be raised, gas is introduced into the lower cavity through the first pneumatic port 63. As the air pressure increases, the volume of the lower cavity expands, pushing the sealing ring 611 and the lifting shaft 61 to rise synchronously, thereby driving the pressure head 1 to complete the lifting action. Conversely, when it needs to be lowered, the first pneumatic port 63 switches to exhaust mode, the gas in the lower cavity is discharged, and the lifting shaft 61 and the pressure head 1 fall smoothly back under the action of gravity. This realizes the lifting and lowering adjustment of the pressure head 1.

[0061] In this embodiment, the lifting structure 6 further includes a second pneumatic interface 64, which is connected to the interior of the upper cavity. The second pneumatic interface 64 enables pressure regulation of the upper cavity. When the lifting shaft 61 is in the ascending phase, the second pneumatic interface 64 acts as an exhaust channel, discharging gas from the upper cavity to ensure dynamic pressure balance within the upper cavity. When the lifting shaft 61 descends, outside air can be passively drawn into the upper cavity through the second pneumatic interface 64, or gas can be actively injected into the upper cavity through an inflation device, thereby improving the smoothness of the lifting shaft 61 during descent.

[0062] In this embodiment, the lifting structure 6 further includes a support frame 65, a worktable 66, and a guide structure. The support frame 65 is disposed in the middle of the lifting shaft 61 and fixedly connected to the bearing seat 62. The worktable 66 is disposed at the bottom of the lifting shaft 61, and the bottom of the lifting shaft 61 is connected and fixedly connected to the worktable 66.

[0063] Furthermore, the guiding structure includes a guide sleeve 68 and a guide post 67. In this embodiment, the guide sleeve 68 is fixed to the bottom of the support frame 65, and the guide post 67 is fixed to the upper surface of the worktable 66. The guide post 67 passes vertically through the guide sleeve 68 and is slidably connected to the guide sleeve 68. In other embodiments, it is also possible for the guide sleeve 68 to be fixed to the upper surface of the worktable 66 and the guide post 67 to be fixed to the bottom of the support frame 65.

[0064] During the upward or downward movement of the lifting shaft 61, the guide column 67 slides vertically within the guide sleeve 68, guiding the movement of the lifting shaft 61 and improving the stability of the lifting shaft 61 during movement.

[0065] Reference Figure 3 As shown in this embodiment, both the brush disc 13 and the trimming disc 14 are slidably connected to the support plate 10 in the vertical direction. It is understood that both the brush disc 13 and the trimming disc 14 have a limiting structure between themselves and the support plate 10. This limiting structure restricts the downward movement of the brush disc 13 and the trimming disc 14, preventing them from detaching from the support plate 10. For example, the limiting structure includes a limiting groove and a limiting ring, with the limiting ring fixed to the top of the brush disc 13 and the trimming disc 14. The limiting groove is vertically formed at the bottom of the pressure head 1, and the limiting ring is located within the limiting groove and can slide vertically. Of course, the limiting structure is not limited to this.

[0066] Furthermore, a first pressure-applying structure is provided between the brush disc 13 and the support plate 10, and a second pressure-applying structure is provided between the trimming disc 14 and the support plate 10. During the polishing cloth trimming operation, the first pressure-applying structure can apply pressure to the brush disc 13 to improve the cleaning effect of the brush disc 13 on the surface of the polishing cloth; the second pressure-applying structure can apply pressure to the trimming disc 14 to improve the polishing effect of the trimming disc 14 on the surface of the polishing disc.

[0067] In one possible implementation of this application, the first pressurizing structure and the second pressurizing structure are both configured as airbags 7. By filling the airbags 7 with gas, pressure is applied to the brush disc 13 and the trimming disc 14. By changing the air pressure in the airbags 7, the pressure on the brush disc 13 and the trimming disc 14 can be adjusted, thereby meeting the usage requirements under different working conditions.

[0068] Reference Figure 1 , Figure 4 and Figure 5 As shown in this embodiment, the transmission structure 5 includes a driving wheel 51, a first driven wheel 52, a second driven wheel 53, and a timing belt 54. The driving wheel 51 is rotatably disposed at the operating end 12 of the pressure head 1, the first driven wheel 52 is rotatably disposed directly above the brush disc 13, and the second driven wheel 53 is rotatably disposed directly above the dressing disc 14. The timing belt 54 surrounds the driving wheel 51, the first driven wheel 52, and the second driven wheel 53. The rotary drive structure 4 is connected to the driving wheel 51 to provide rotary driving force to the driving wheel 51. When the polishing cloth surface is being dressed and maintained, the driving wheel 51 is rotated by the rotary drive structure 4, and the driving wheel 51 then drives the first driven wheel 52 and the second driven wheel 53 to rotate via the timing belt 54, thereby realizing the transmission of rotary power.

[0069] Furthermore, in this embodiment, the brush disc 13 can slide along the axial direction of the first driven wheel 52 but cannot rotate relative to it; the dressing disc 14 can slide along the axial direction of the second driven wheel 53 but cannot rotate relative to it. In one specific embodiment, the tops of both the brush disc 13 and the dressing disc 14 are fixedly connected to shafts, with keys embedded in the sidewalls of the shafts. The centers of the first driven wheel 52 and the second driven wheel 53 are provided with shaft holes for shaft insertion and keyways for key insertion, with the key able to slide vertically up and down within the keyways. Of course, this is merely an illustrative example and not a limitation. The above structure achieves the effect that the first driven wheel 52 drives the brush disc 13 to rotate, and the second driven wheel 53 drives the dressing disc 14 to rotate, thereby achieving the effect of cleaning and dressing the polishing disc.

[0070] Reference Figure 1As shown in this embodiment, the rotary drive structure 4 is located below the operating end 12. The rotary drive device includes a rotary motor 41 and a rotary shaft 42. The rotary shaft 42 is arranged vertically, with its top fixedly connected to the center of the drive wheel 51. The bottom of the rotary shaft 42 extends into the interior of the worktable 66 and is rotatably connected to the worktable 66. The rotary motor 41 is installed below the worktable 66, and its output shaft extends into the worktable 66 and is fixedly connected to the bottom of the rotary shaft 42. This achieves the effect of driving the drive wheel 51 to rotate.

[0071] Reference Figure 3 As shown, an air intake rotary joint is further provided at the center of the first driven wheel 52 and the second driven wheel 53. The air intake rotary joint is connected to the airbag 7 and is used to inflate the airbag 7.

[0072] Reference Figure 1 and Figure 6 As shown in this embodiment, the swing structure 3 includes a connecting shaft 31 and a power source for driving the connecting shaft 31 to rotate. The connecting shaft 31 is vertically positioned directly below the operating end 12. The top of the connecting shaft 31 is fixedly connected to the bottom of the support plate 10. The power source is driven by the bottom of the connecting shaft 31 and outputs rotational power to the connecting shaft 31. Specifically, the power source includes a drive motor 32, a first transmission gear 33, and a second transmission gear 34. The drive motor 32 is located on one side of the rotary motor 41. The body of the drive motor 32 is fixedly mounted on the lower surface of the worktable 66. The output shaft of the drive motor 32 extends into the worktable 66. The first transmission gear 33 and the second transmission gear 34 are both located inside the worktable 66 and mesh with each other. The output shaft of the drive motor 32 is fixedly connected to the center of the first transmission gear 33. The bottom of the connecting shaft 31 extends into the worktable 66 and is fixedly connected to the second transmission gear 34. With the above structure, when the drive motor 32 starts, it can drive the first transmission gear 33 to rotate. The first transmission gear 33, through meshing with the second transmission gear 34, can drive the second transmission gear 34 to rotate, causing the connecting shaft 31 to drive the pressure head 1 to rotate. This achieves the effect of pressure head oscillation.

[0073] Reference Figure 1 As shown in this embodiment, both the connecting shaft 31 and the lifting shaft 61 are hollow shafts with an internally hollow interior. The rotating shaft 42 passes vertically through the interior of the connecting shaft 31, and the connecting shaft 31 passes vertically through the interior of the lifting shaft 61. With this structure, the rotating shaft 42, the connecting shaft 31, and the lifting shaft 61 can all be concentrated directly below the operating end 12 of the pressure head 1, achieving a reasonable spatial layout and making the structure of the trimming mechanism more compact, effectively reducing the space occupied by the trimming mechanism.

[0074] Other embodiments of this application will readily conceive of by those skilled in the art upon consideration of the specification and practice of the embodiments thereof. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not claimed in this application. The specification and embodiments are to be considered exemplary only, and the true scope and spirit of this application are indicated by the appended claims.

Claims

1. A dressing mechanism for polishing cloth, characterized in that, include: A pressure head is positioned above the polishing cloth. The pressure head is provided with a working end and an operating end. The side of the working end facing the polishing cloth is provided with a rotatable brush disc and a trimming disc. A spraying structure, located at the working end, is used to spray liquid onto the surface of the polishing cloth; The swing structure is connected to the operating end of the pressure head and is used to drive the pressure head to swing horizontally around the operating end. A rotary drive structure for outputting rotational power; A transmission structure is disposed between the trimming disc, the brush disc, and the rotary drive structure, for transmitting the rotational power output by the rotary drive structure to the trimming disc and the brush disc, so that the trimming disc and the brush disc rotate. A lifting structure is connected to the pressure head and is used to drive the pressure head to rise or fall.

2. The dressing mechanism for polishing cloth according to claim 1, characterized in that, The lifting structure is located below the pressure head, and the lifting structure includes a lifting shaft, a bearing seat, and a first pneumatic interface; The lifting shaft is slidably inserted into the bearing seat in the vertical direction, and the top of the lifting shaft is connected to the pressure head; The bearing housing has an internal cavity, and the circumferential outer wall of the lifting shaft has an annular sealing ring inside the cavity. The sealing ring divides the cavity into an upper cavity and a lower cavity that are isolated from each other. The upper cavity is located above the sealing ring, and the lower cavity is located below the sealing ring. The first pneumatic interface is connected to the lower cavity and is used to inflate or deflate the interior of the lower cavity.

3. A dressing mechanism for polishing cloth according to claim 2, characterized in that, The lifting structure also includes a second pneumatic interface, which is connected to the upper cavity and is used to inflate or depress the interior of the upper cavity.

4. A dressing mechanism for polishing cloth according to claim 2, characterized in that, The lifting structure also includes a support frame, a worktable, and a guide structure; The support frame is fixedly connected to the bearing seat; The worktable is connected to the bottom end of the lifting shaft, which can drive the worktable to rise or fall synchronously. The guide structure is disposed between the support frame and the worktable. The guide structure includes a guide post and a guide sleeve arranged in a vertical direction. The guide post is fixedly connected to one of the support frame or the worktable, and the guide sleeve is fixedly connected to the other of the support frame or the worktable. The guide post passes through the guide sleeve and is slidably connected to the guide sleeve.

5. A dressing mechanism for polishing cloth according to any one of claims 1-4, characterized in that, Both the brush disc and the trimming disc are slidably connected to the pressure head along their own axial direction. A first pressure-applying structure for applying pressure to the brush disc is provided between the brush disc and the pressure head. A second pressure-applying structure for applying pressure to the trimming disc is provided between the trimming disc and the pressure head.

6. A dressing mechanism for a polishing cloth according to claim 5, characterized in that, Both the first pressurization structure and the second pressurization structure are configured as airbags.

7. A dressing mechanism for polishing cloth according to claim 1, characterized in that, The transmission structure is located inside the pressure head, and the transmission structure includes: The drive wheel is connected to the rotary drive structure via a transmission connection; The first driven wheel is located directly above the brush disc and rotates synchronously with the brush disc; The second driven wheel is located directly above the dressing disc and rotates synchronously with the dressing disc; A timing belt is wrapped around the driving pulley, the first driven pulley, and the second driven pulley.

8. A dressing mechanism for a polishing cloth according to claim 7, characterized in that, The rotary drive structure includes a rotary motor and a rotary shaft. One end of the rotary shaft is fixedly connected to the drive wheel along the rotation axis of the drive wheel, and the other end is fixedly connected to the output shaft of the rotary motor.

9. A dressing mechanism for polishing cloth according to claim 1, characterized in that, The swing structure includes a connecting shaft and a power source for driving the connecting shaft to rotate. The connecting shaft is arranged in a vertical direction. One end of the connecting shaft is fixedly connected to the operating end of the pressure head, and the other end of the connecting shaft is fixedly connected to the output end of the power source.

10. A dressing mechanism for a polishing cloth according to claim 1, characterized in that, The swing structure includes a connecting shaft, the rotation drive structure includes a rotating shaft, and the lifting structure includes a lifting shaft. Both the connecting shaft and the lifting shaft are hollow shafts. The rotating shaft passes through the interior of the connecting shaft in a vertical direction, and the connecting shaft passes through the interior of the lifting shaft in a vertical direction.

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