Multi-dimensional force sensor

Abstract

The invention belongs to the technical field of sensors, and particularly relates to a multi-dimensional force sensor which comprises a shell, an actuator, an elastic body and a damping component. The shell comprises a base and a cover body arranged opposite to the base, the cover body and the base jointly define a sealing cavity, and the sealing cavity is filled with a damping medium; the actuator is used for receiving an external load; the elastic body is arranged in the sealing cavity, the elastic body comprises a mounting end and a loading end, the mounting end is connected with the base, and the loading end is used for receiving a load from the actuator; the damping component is arranged in the sealing cavity and fixedly connected with the loading end, and a gap filled with the damping medium is formed between the damping component and the base and / or the cover body. Through the physical damping mechanism of the damping component, the dynamic performance of the multi-dimensional force sensor is improved, the vibration interference is suppressed, and the response time is shortened.

Description

Technical Field

[0001] This invention belongs to the field of sensor technology, specifically relating to a multidimensional force sensor. Background Technology

[0002] Multidimensional force sensors have wide applications in robotics, precision manufacturing, and automation, and their dynamic performance directly affects the real-time performance and accuracy of measurements. Existing multidimensional force sensors are typically underdamped, resulting in slow vibration decay when subjected to external excitation and insufficient dynamic response speed, thus introducing measurement errors and signal delays.

[0003] To improve dynamic performance, existing technologies often employ complex signal processing algorithms or high-damping coating methods. Signal processing algorithms rely heavily on computational resources and are susceptible to noise interference and latency in scenarios with high real-time requirements. While high-damping coating methods can directly suppress vibrations, they involve high upfront processing costs, complex processes, and difficulties in flexibly adjusting damping characteristics. These methods all suffer from drawbacks such as high implementation costs, poor adaptability, or insufficient real-time performance, limiting the application of multidimensional force sensors in high-speed dynamic measurements. Summary of the Invention

[0004] This invention provides a multi-dimensional force sensor, which improves the dynamic performance of the multi-dimensional force sensor, suppresses vibration interference, and shortens the response time by setting damping components.

[0005] This invention provides a multidimensional force sensor, comprising:

[0006] The housing includes a base and a cover disposed opposite to the base, the cover and the base together forming a sealed cavity, the sealed cavity being filled with a damping medium; An actuator is used to receive external loads; An elastomer is disposed within the sealed cavity. The elastomer includes a mounting end and a loading end. The mounting end is connected to the base, and the loading end is used to receive loads from the actuator. A damping member is disposed within the sealed cavity and fixedly connected to the loading end, and a gap is formed between the damping member and the base and / or the cover to be filled with the damping medium.

[0007] In one embodiment of the present invention, the elastomer includes: A radial beam and a circumferential beam are connected between the mounting end and the loading end, forming a T-shaped structure.

[0008] In one embodiment of the present invention, the sensor is a six-dimensional force sensor, which can simultaneously measure forces (Fx, Fy, Fz) in three orthogonal directions and torques (Mx, My, Mz) in three orthogonal directions.

[0009] In one embodiment of the present invention, the damping member includes: The first damping element is connected to the side of the elastic body near the base and forms a damping gap with the base; And / or a second damping element, connected to the side of the elastomer near the cover or connected to the first damping element, and forming a damping gap between the cover and / or the base.

[0010] In one embodiment of the present invention, the first damping member includes a damping base plate and a damping base plate central boss disposed on the damping base plate, and the damping base plate central boss is fixedly connected to the lower surface of the loading end. The second damping component includes a damping top plate and a damping top plate central boss disposed on the damping top plate, which is fixedly connected to the upper surface of the loading end through the damping top plate central boss. The thickness of the central boss of the damping bottom plate and the central boss of the damping top plate is equal along the axial direction of the actuator.

[0011] In one embodiment of the present invention, the damping top plate and the damping bottom plate are of the same shape and size, and the damping bottom plate and the damping top plate have corresponding holes in the circumferential direction to adapt to the installation structure of the elastomer and ensure that the damping of the upper and lower surfaces is symmetrical.

[0012] In one embodiment of the present invention, the first damping element and / or the second damping element are made of lightweight metal material or engineering plastic, and their density is less than that of the elastomer.

[0013] In one embodiment of the present invention, the damping gap includes at least one of axial damping gap and radial damping gap; The axial damping gap is formed by several opposing end faces of the damping member and the base or cover; the radial damping gap is formed by several opposing vertical faces of the damping member and the base or cover.

[0014] In one embodiment of the present invention, a plurality of the end faces formed axially are radially symmetrically distributed relative to the elastic body, and the radial dimension of the axial end face directly connected to the elastic body is greater than the radial dimension of the elastic body.

[0015] In one embodiment of the present invention, the radial damping gap includes: an outer radial gap formed between the vertical surface of the outer periphery of the first damping member and / or the vertical surface of the outer periphery of the second damping member and the base vertical surface of the base; And / or the inner radial gap between the multiple vertical surfaces formed on the inner side of the first damping member and / or the multiple vertical surfaces on the inner side of the second damping member and the vertical surface of the base.

[0016] In one embodiment of the present invention, the vertical surfaces of the first damping member and the second damping member are arranged in a radially staggered manner. The vertical surface of the base is disposed in the radial gap between the vertical surfaces; The vertical surface and the base vertical surface together form a labyrinthine damping channel.

[0017] In one embodiment of the present invention, the vertical surfaces of the first damping member and / or the second damping member are symmetrically arranged around the elastic body.

[0018] In one embodiment of the present invention, the axial damping clearance includes: The first axial gap between the bottom plate of the first damping member and the bottom wall of the base; And / or a second axial gap between the top plate of the second damping member and the flat plate of the cover body, wherein the size of the first axial gap is the same as the size of the second axial gap.

[0019] In one embodiment of the present invention, when the elastic body vibrates in any direction, at least one axial damping gap and at least one radial damping gap in the multidimensional damping gap system simultaneously generate damping force.

[0020] In one embodiment of the present invention, the vertical surface and / or the end surface of the damping member are disposed adjacent to the vertical surface and the end surface inside the housing, provided that the vibration displacement of the elastic body is allowed.

[0021] In one embodiment of the present invention, an overload protection structure is further included, the overload protection structure including a limiting post fixed to the housing and a limiting part disposed on the damping member, wherein the limiting part and the limiting post have a gap for overload protection.

[0022] In one embodiment of the present invention, the limiting post includes a central limiting post disposed at the center of the base and a plurality of circumferential limiting posts disposed around the central limiting post; The limiting part includes a limiting center sleeve formed on the first damping member and a plurality of circumferential limiting holes. The limiting center sleeve is sleeved outside the central limiting post, and the circumferential limiting holes are respectively sleeved outside the corresponding circumferential limiting posts.

[0023] In one embodiment of the present invention, the overload protection structure further includes a torsion limiting block and a displacement limiting block, wherein the torsion limiting block is connected to the circumferential limiting post and the displacement limiting block is connected to the central limiting post.

[0024] In one embodiment of the present invention, the inner diameter of the limiting center sleeve is larger than the outer diameter of the central limiting post, and the radial gap between the two constitutes part of the overload protection gap.

[0025] In one embodiment of the present invention, the height of the limiting center sleeve is less than the height of the center limiting post, so as to form an overload protection gap in the axial direction.

[0026] In one embodiment of the present invention, a flexible sealing cover plate is fixedly disposed on the outer side of the cover away from the elastic body, the actuator passes through the sealing cover plate and extends into the housing, and the sealing cover plate is flexibly and sealingly connected to the actuator.

[0027] In one embodiment of the present invention, the corrugated structure of the flexible cover plate generates elastic deformation when the actuator is displaced relative to the cover body, and the flexible cover plate achieves a secondary sealing connection with the base through a sealing ring.

[0028] In one embodiment of the present invention, the damping medium is a viscous liquid or a semi-fluid.

[0029] In one embodiment of the present invention, the effective working area of ​​the vertical surface and / or the end surface is adjustable; At least one of the following gaps can be adjusted by an adjustment structure: the gap between the vertical surfaces and / or between the vertical surfaces and the vertical surfaces inside the housing and / or between the end face and the bottom wall of the base and / or between the end face and the cover.

[0030] The beneficial effects of this invention are as follows: This invention proposes a multi-dimensional force sensor that integrates a housing, actuator, elastomer, and damping component. A damping medium is filled within a sealed cavity enclosed by a base and a cover. The damping component is fixedly connected to the loading end of the elastomer, forming a gap between itself and the base or cover to accommodate the damping medium. When an external load is transmitted to the elastomer through the actuator, the elastomer deforms and vibrates. The damping component moves with the elastomer, generating a relative displacement with the fixed housing. This relative displacement forces the viscous damping medium filled in the narrow gap to undergo rapid shear flow and / or extrusive flow. During this process, the damping medium generates viscous resistance (i.e., shear damping force and extrusive damping force) that hinders this flow due to its viscosity. This resistance performs work, converting the mechanical energy of the elastomer vibration system into heat energy, which is then dissipated, thereby rapidly attenuating the vibration, shortening the response time, and ultimately improving the dynamic measurement accuracy of the sensor. This structure does not rely on complex signal processing or high-cost coating processes. It achieves real-time energy dissipation through physical damping mechanisms. At the same time, the overall design is compact, easy to install and use, and suitable for high-speed dynamic measurement scenarios, thus improving the reliability and adaptability of the sensor. Attached Figure Description

[0031] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0032] In the attached diagram: Figure 1 This is a schematic diagram of the overall structure of a multidimensional force sensor provided in an embodiment of the present invention; Figure 2 This is an exploded view of the structure of a multidimensional force sensor provided in one embodiment of the present invention; Figure 3 This is a schematic diagram of a base structure provided in one embodiment of the present invention; Figure 4 This is a schematic diagram of a sealing cover structure provided in one embodiment of the present invention; Figure 5 This is a schematic diagram of the cover structure provided in one embodiment of the present invention; Figure 6 This is a schematic diagram of an elastomer structure provided in one embodiment of the present invention; Figure 7 This is a schematic diagram of the structure of the first damping element provided in one embodiment of the present invention; Figure 8 This is a schematic diagram of the structure of the second damping element provided in one embodiment of the present invention; Figure 9 This is a cross-sectional view of one structure of the multidimensional force sensor provided in one embodiment of the present invention; Figure 10 yes Figure 9 A cross-sectional view of the structure at point A; Figure 11 yes Figure 9 Sectional view of the structure at point B; Figure 12 yes Figure 9 A cross-sectional view of the structure at point C; Figure 13 This is another structural cross-sectional view of the multidimensional force sensor provided in one embodiment of the present invention; Figure 14 This is another structural cross-sectional view of the multidimensional force sensor provided in one embodiment of the present invention; Figure 15 yes Figure 14 Enlarged view of the structure at point D; The reference numerals in the attached drawings are as follows: housing 10, base 11, base vertical surface 111, mounting base 112, cover 12, upper cover mounting edge 121, actuating plate 122, external connection mounting hole 123, actuator 20, elastic body 30, mounting end 31, loading end 32, circumferential beam 33, radial beam 34, damping member 40, first damping member 41, damping base plate 411, damping base plate central boss 412, damping ring 413. 414, 42, 42, 42, 42, 42, 42, 42, 42, 42, 42, 50, 51, 51, 51, 51, 51, 52, 52, 52, 52, 52, 52, 53, 54, 51, 51, 52, 53, 54, 61, 61, 62, 61, 62. Detailed Implementation

[0033] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0034] It should be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of the present invention. The drawings only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the shape, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0035] In the following description, numerous details are explored to provide a more thorough explanation of embodiments of the invention. However, it will be apparent to those skilled in the art that embodiments of the invention may be practiced without these specific details. In other embodiments, well-known structures and devices are shown in block diagram form rather than in detail to avoid obscuring embodiments of the invention.

[0036] This invention relates to a multidimensional force sensor, and more particularly to a multidimensional force sensor that improves dynamic performance by introducing a damping environment. Multidimensional force sensors have wide applications in robotics, precision manufacturing, and automation, and their dynamic performance directly affects the real-time performance and accuracy of measurements. Existing multidimensional force sensors are typically underdamped, resulting in slow vibration decay under external excitation and insufficient dynamic response speed, thus introducing measurement errors and signal distortion. To improve dynamic performance, existing technologies often employ complex signal processing algorithms or high-damping coating methods. Signal processing algorithms rely heavily on computational resources and are susceptible to noise interference and signal delay in scenarios with high real-time requirements; while high-damping coating methods can directly suppress vibration, they have high initial processing costs, complex processes, and difficulty in flexibly adjusting damping characteristics. These methods all suffer from drawbacks such as high implementation costs, poor adaptability, or insufficient real-time performance, limiting the application of multidimensional force sensors in high-speed dynamic measurements.

[0037] Please see Figure 1-9 The present invention provides a multidimensional force sensor, including a housing 10, an actuator 20, an elastomer 30 and a damping member 40; The housing 10 includes a base 11 and a cover 12 disposed opposite to the base 11. The cover 12 and the base 11 together form a sealed cavity, which is filled with a damping medium. The actuator 20 is used to receive external loads; the elastic body 30 is disposed in the sealed cavity, the elastic body 30 includes a mounting end 31 and a loading end 32, the mounting end 31 is connected to the base 11, and the loading end 32 is used to receive loads from the actuator 20; the damping member 40 is disposed in the sealed cavity and fixedly connected to the loading end 32, and a gap filled with the damping medium is formed between the damping member 40 and the base 11 and / or the cover 12.

[0038] It should be noted that the multidimensional force sensor of the present invention includes a housing 10, an actuator 20, an elastomer 30, and a damping component 40. The housing 10 is formed by a base 11 and a cover 12 arranged opposite to each other, together forming a sealed cavity filled with a damping medium. The housing 10 serves as the support structure for the sensor, providing not only a mounting base but also ensuring stable filling of the damping medium and long-term reliability through a sealed design. Specific embodiments of the housing 10 may include metal or engineering plastic materials. The base 11 and cover 12 can be sealed and fixed through threaded connections, snap-fit ​​fittings, or welding, thereby adapting to the strength and weight requirements of different application environments. The actuator 20 is a structure for receiving external loads and transmitting them to the loading end 32 of the elastomer 30. It may take the form of an external platform, connecting shaft, or loading rod, facilitating direct docking with external actuators or loads to ensure effective transmission of force or torque. The elastomer 30 is disposed within the sealed cavity and includes a mounting end 31 and a loading end 32. The mounting end 31 is connected to the base 11, and the loading end 32 is used to receive the load from the actuator 20. The elastomer 30, as the core measuring component of the sensor, can be designed as a beam structure, diaphragm structure or Stuart structure, etc. The mounting end 31 is connected to the base 11 by bolt fixing or bonding or directly integrated with it. The loading end 32 is linked with the actuator 20 to realize the sensing and conversion of multi-dimensional force signals.

[0039] The damping component 40 is disposed within the sealed cavity and fixedly connected to the loading end 32 of the elastomer 30. A gap filled with damping medium is formed between the damping component 40 and the base 11 and / or the cover 12. The damping component 40 may be implemented as a damping plate, a damping ring 413, or a damping vertical surface, etc., and its fixed connection with the elastomer 30 can be achieved through threaded connection, welding, or integral molding. The gap formed between the damping component 40 and the housing 10 can be a radial gap, an axial gap, or a combination thereof. By adjusting the gap size or the effective working area of ​​the damping component 40, the damping coefficient can be flexibly adjusted to adapt to different vibration conditions. The damping medium is a viscous liquid or a semi-fluid, such as silicone oil, damping grease, or a gel-like semi-fluid material, for example, with a viscosity range of 100-10000 cP, selected according to the sensor's operating frequency and damping coefficient requirements. For example, low viscosity is used for high-frequency vibration, and high viscosity is used for low-frequency vibration to optimize energy absorption. The damping mechanism generates viscous resistance within the gaps. When the elastic body 30 vibrates under external excitation, the damping member 40 and the damping medium move relative to each other, rapidly absorbing and dissipating vibration energy through shear damping force and compressive damping force, thereby effectively shortening the vibration decay time and improving the dynamic response speed of the sensor. Specifically, when the elastic body 30 vibrates radially, the damping medium in the radial gap generates compressive damping force, and the damping medium in the axial gap generates shear damping force; when the elastic body 30 vibrates axially, the damping medium in the axial gap mainly generates compressive damping force, and the damping medium in the radial gap generates shear damping force; the labyrinthine damping channel generates both shear and compressive damping forces simultaneously.

[0040] This invention addresses the problem of insufficient dynamic performance in existing multidimensional force sensors due to lack of damping or underdamping, through the aforementioned structure. This invention utilizes the damping force generated by the damping component 40 and the damping medium during relative motion to directly suppress the vibration of the elastic body 30, achieving real-time energy dissipation at the physical level without relying on complex signal processing or high-cost coating processes. This solution not only significantly improves the sensor's dynamic characteristics and measurement accuracy but also reduces the overall weight and height through a compact integrated design, facilitating installation without affecting the motion stability of the actuator. Simultaneously, the adjustability of the damping environment enhances the sensor's adaptability, enabling it to possess superior performance and reliability in high-speed dynamic measurement scenarios.

[0041] Please see Figure 2 and 5 As an optional embodiment of the present invention, the cover 12 includes an upper cover mounting edge 121, an action plate 122, and an external connection mounting hole 123 disposed in the center of the action plate 122. The upper cover mounting edge 121 is the circumferential edge of the action plate 122. The upper cover mounting edge 121 is used for mounting and connecting with the base 11. The upper cover mounting edge 121 is provided with a mounting hole.

[0042] Please see Figure 2 , 6 As an optional embodiment of the present invention, the elastic body 30 includes a radial beam 34 and a circumferential beam 33 connected between the mounting end 31 and the loading end 32.

[0043] As an optional embodiment of the present invention, the sensor is a six-dimensional force sensor, which can simultaneously measure forces (Fx, Fy, Fz) in three orthogonal directions and torques (Mx, My, Mz) in three orthogonal directions.

[0044] It should be noted that the six-dimensional force sensor is based on the multi-dimensional deformation sensing principle of the elastic body 30. The structure of the elastic body 30 can be designed as a cross-beam layout or a ring layout. By arranging strain-sensitive elements in different orientations, the decoupling and measurement of force and torque are achieved. The integration of the damping component 40 further ensures that the vibration energy in each dimension is rapidly absorbed by the damping medium during dynamic measurement, thereby improving the dynamic performance of the sensor.

[0045] Please see Figure 1 , 2 7-8, 9, 13, 14, as an optional embodiment of the present invention, the damping member 40 includes a first damping member 41 and / or a second damping member 42; The first damping element 41 is connected to the side of the elastic body 30 near the base 11, and a damping gap is formed between it and the base 11. And / or the second damping member 42 is connected to the first damping member 41 or the elastic body 30 on the side near the cover 12, and a damping gap is formed between the cover 12 and / or the base 11.

[0046] It should be noted that the first damping member 41 may include a damping base plate 411 and / or a damping ring 413 structure, which are connected to the lower end of the elastomer 30 by bolt fixing or bonding; the second damping member 42 may include a damping top plate 421 and / or a damping cover structure, which are connected to the upper end of the elastomer 30 in a similar manner. The damping components 40 arranged on both sides form a symmetrical damping environment on the upper and lower sides of the elastic body 30. When the elastic body 30 is subjected to external excitation, the first damping component 41 and the second damping component 42 move synchronously with the elastic body 30, generating relative displacement between them and the components of the housing 10. This causes the damping medium filling the damping gap to generate viscous resistance, thereby rapidly absorbing vibration energy. This solves the problem of insufficient vibration suppression and sluggish dynamic response caused by the lack of damping or insufficient damping in existing sensors. This invention, through the large contact surface and the synergistic effect of the damping components on both sides, forms a sufficiently large damping force in multiple dimensions in the axial and radial directions, effectively shortening the vibration decay time, thereby improving the damping characteristics and dynamic stability of the system, achieving a more reasonable damping distribution, reducing the interference of damping on the measurement, and improving the response speed and measurement accuracy of the sensor in high-speed dynamic scenarios.

[0047] Please see Figure 2 , 7 As an optional embodiment of the present invention, the first damping member 41 includes a damping base plate 411 and a damping base plate central boss 412, which is fixedly connected to the lower surface of the loading end 32 through the damping base plate central boss 412. The second damping member 42 includes a damping top plate 421 and a damping top plate central boss 422, which is fixedly connected to the upper surface of the loading end 32.

[0048] It should be noted that the specific implementation of the damping base plate center boss 412 may include a cylindrical boss or a rectangular boss, which is fixed to the lower end of the elastomer 30 by threaded connection or press-fitting; the damping top plate center boss 422 may adopt a similar structure, thereby maintaining the force symmetry of the elastomer 30 in the damping environment. Furthermore, the damping top plate 421 and the damping base plate 411 have the same shape and size, and are provided with the same openings in the circumferential direction, to adapt to the installation requirements of the elastomer 30 and ensure that the damping magnitude on the upper and lower surfaces is consistent, thereby avoiding measurement off-center load or signal distortion caused by asymmetrical installation of the damping components.

[0049] As an optional embodiment of the present invention, the first damping element 41 and / or the second damping element 42 are made of lightweight metal materials or engineering plastics with a density lower than that of the elastomer 30. These materials have low density, corrosion resistance, and vibration damping properties. By selecting materials with a lower density than the elastomer 30 to make the damping elements, the influence of added mass on the dynamic characteristics of the sensor is effectively reduced. Avoiding the increase in system inertia and decrease in natural frequency caused by excessive mass in traditional damping elements, this invention utilizes lightweight materials to minimize the mass of moving parts while maintaining structural strength, thereby reducing the interference of the damping elements on the vibration modes of the elastomer 30. This ensures that the sensor maintains high sensitivity and fast response in high-frequency dynamic measurements, avoids additional inertial errors introduced by the damping element 40, improves the dynamic accuracy and stability of the sensor, and enhances the sensor's environmental adaptability and service life through material optimization.

[0050] Please see Figure 9-13 As an optional embodiment of the present invention, the damping gap includes at least one of axial damping gap and radial damping gap; The axial damping gap is formed by several opposing end faces of the damping member 40 and the base 11 or cover 12; the radial damping gap is formed by several opposing vertical faces of the damping member 40 and the base 11 or cover 12.

[0051] It should be noted that the axial damping clearance can be implemented by the gap between the damping member 40 and the parallel end face of the bottom or top of the housing 10, and the damping coefficient can be controlled by adjusting the end face spacing; the radial damping clearance can be implemented by the gap between the damping ring 413 and the vertical surface of the side wall of the housing 10, and the damping effect can be optimized by adjusting the vertical surface gap; the vertical surface refers to the vertical surface perpendicular to the bottom wall of the base 11, and the end face refers to the plane parallel to the bottom wall of the base 11. Furthermore, several axially formed end faces are radially symmetrically distributed relative to the elastic body 30, and the radial dimension of the axial end face directly connected to the elastic body 30 is larger than the radial dimension of the elastic body 30. For example, the damping bottom plate 411 or damping top plate 421 in the damping member 40 can be designed as a circular plate structure with a diameter larger than the outer diameter of the elastic body 30 to ensure sufficient damping coverage. This solves the problem of insufficient vibration suppression and sluggish dynamic response caused by the lack of damping or small damping in multidimensional vibration of the sensor. This invention forms an effective damping path in all directions of movement of the elastic body 30 through the combined design of axial and radial gaps. By utilizing the viscous flow of the damping medium between the opposite end faces and the vertical face, multidimensional damping force is generated, achieving more comprehensive vibration suppression and improving the dynamic performance of the sensor under complex loads. The adjustable gap design enhances the adaptability and customizability of the sensor, while the symmetrical layout ensures the accuracy and consistency of the measurement.

[0052] Please see Figure 2-37-9, as an optional embodiment of the present invention, the radial damping gap includes: an outer radial gap formed between the vertical surface of the outer periphery of the first damping member 41 and / or the vertical surface of the outer periphery of the second damping member 42 and the base vertical surface 111 of the base 11; and / or an inner radial gap formed between a plurality of vertical surfaces formed on the inner side of the first damping member 41 and / or a plurality of vertical surfaces formed on the inner side of the second damping member 42 and / or a plurality of vertical surfaces formed on the inner side of the second damping member 42 and the base vertical surface 111 of the base 11.

[0053] It should be noted that the vertical surface of the outer periphery of the first damping member 41 is, for example, a damping ring 413. The implementation of the outer radial gap may include an annular gap or a partial vertical surface array gap between the damping ring 413 and the base vertical surface 111. The damping ring 413 may be designed as a continuous circular vertical surface, and the base vertical surface 111 may correspond to the inner surface of the side wall of the housing 10 or a specially provided boss side surface. The implementation of the inner radial gap may include an annular gap between multiple concentrically arranged annular vertical surfaces 414 or a grid gap between radial vertical surfaces. For example, a multi-layer damping space can be achieved through a multi-stage sleeve structure or an internal grid. This layered radial gap arrangement increases the flow path and interaction area of ​​the damping medium, generating more significant shear and compressive damping forces when the elastic body 30 vibrates radially. This effectively dissipates vibration energy and solves the problem of insufficient vibration suppression and response delay caused by the sensor's lack of damping or weak damping. Therefore, this design uses the outer layer gap to suppress vibration caused by overall radial displacement, while the inner layer gap provides additional damping for local vibrations inside the elastic body 30, forming a multi-level energy absorption mechanism. This improves the sensor's dynamic stability in the radial dimension, reduces vibration interference with measurements, and enhances the flexibility and adaptability of the damping effect through an adjustable gap layer design, ensuring the accuracy and reliability of the sensor in high-speed radial motion scenarios.

[0054] Please see Figure 13-15 As an optional embodiment of the present invention, the vertical surfaces of the first damping member 41 and the second damping member 42 are arranged alternately in the radial direction. The vertical surface 111 of the base is disposed in the radial gap between the vertical surface of the first damping member 41 and the vertical surface of the second damping member 42; the vertical surface of the first damping member 41, the vertical surface of the second damping member 42 and the vertical surface 111 of the base together form a labyrinthine damping channel.

[0055] It should be noted that the staggered arrangement can include the vertical surfaces of the first damping member 41 and the second damping member 42 being staggered in the circumferential direction or in the axial height. The vertical surface 111 of the base can be designed as an annular protrusion or segmented vertical plate fixed to the base 11. The vertical surface 111 of the base passes through the holes provided on the vertical surface of the first damping member 41 or the second damping member 42 and is embedded in the gap between the vertical surfaces of the damping members to form a tortuous path. The specific structure of the labyrinth damping channel can be a spiral flow channel or a sawtooth flow channel. By increasing the flow resistance and path complexity of the damping medium, stronger viscous dissipation is generated during vibration, thereby solving the defect of insufficient energy absorption efficiency of simple straight damping channels under high-speed vibration. In this case, the staggered arrangement of the vertical surfaces forms multi-directional flow obstruction, causing the damping medium to undergo repeated turning and acceleration and deceleration in the labyrinth channel, which greatly improves the damping force generation efficiency, thereby quickly suppressing the radial and axial composite vibration of the elastic body 30, thus achieving more efficient energy dissipation and vibration attenuation. The labyrinthine design enhances the robustness of the damped environment and reduces the impact of interdimensional coupling on measurement accuracy, while maintaining the sensor's lightweight structure and space efficiency through a compact layout.

[0056] Please see Figure 14 As an optional embodiment of the present invention, the vertical surfaces of the first damping member 41 and / or the second damping member 42 are symmetrically arranged around the elastic body 30.

[0057] It should be noted that the symmetrical arrangement can be implemented in a circular or mirror-symmetrical manner. For example, the vertical surface of the first damping element 41 is arranged in a ring around the elastic body 30, and the vertical surface of the second damping element 42 adopts the same layout to form a vertical correspondence. This symmetrical design ensures that the damping force is evenly distributed around the elastic body 30, avoiding measurement deviations caused by local stress concentration or non-uniform damping. This solves the measurement distortion and inconsistent dynamic response caused by the asymmetrical damping layout of the sensor. In this case, geometric symmetry enables the damping medium to generate a balanced resistance distribution when the elastic body 30 vibrates, reducing the impact of the introduced damping on normal measurement, thereby improving the measurement repeatability and accuracy of the sensor. The symmetrical damping layout reduces the impact of environmental interference on sensor performance, enhances stability and durability under varying operating conditions, simplifies the manufacturing process, and improves product consistency.

[0058] Please see Figure 9-11 As an optional embodiment of the present invention, the axial damping gap includes: a first axial gap between the bottom plate 411 of the first damping member 41 and the bottom wall of the base 11. And / or the second axial gap between the top plate 421 of the second damping member 42 and the flat plate of the cover 12, wherein the size of the first axial gap is the same as the size of the second axial gap.

[0059] It should be noted that the first axial clearance can be implemented by a parallel gap between the end face of the first damping element 41 and the bottom plane of the base 11, which is controlled by adjusting the thickness of the base plate or the height of the base 11. The second axial clearance can be implemented by a corresponding gap between the end face of the second damping element 42 and the inner plate of the cover 12, which ensures dimensional consistency in a similar manner and avoids measurement off-center loading and unstable dynamic response caused by asymmetric axial damping. In this case, the damping medium generates balanced viscous resistance on both the upper and lower sides by using axial clearances of equal size. When the elastic body 30 vibrates, the damping force is evenly distributed, effectively suppressing vibration and shortening the decay time, thereby improving the measurement accuracy and repeatability of the sensor under axial load. The symmetrical damping layout reduces the impact of introduced damping on normal measurement, enhances overall dynamic stability, simplifies the debugging process, and improves product consistency.

[0060] Please see Figure 9-12 As an optional embodiment of the present invention, the first damping member 41 further includes a damping ring 413 arranged around it, and the outer radial gap includes a radial gap formed between the damping ring 413 and the side wall of the base 11; the damping ring 413 may be an integral ring structure or a segmented ring assembly, which is connected to the first damping member 41 by means of sleeve or fixation.

[0061] As an optional embodiment of the present invention, when the elastic body 30 vibrates in any direction, at least one radial damping gap and / or one axial damping gap in the multi-dimensional damping gap system provides damping force. This invention solves the problem of insufficient vibration suppression and sluggish dynamic response caused by traditional sensors with no damping or insufficient damping. Through the coordinated action of multi-dimensional damping gaps, the system can provide an effective damping path in multiple vibration directions, so that the damping force can be applied to the vibrating body in a timely manner, thereby achieving rapid energy absorption.

[0062] Please see Figure 14 As an optional embodiment of the present invention, the vertical surface and / or the end surface of the damping member 40 are disposed adjacent to the vertical surface and the end surface inside the housing 10, provided that the vibration displacement of the elastic body 30 is allowed.

[0063] It should be noted that the implementation of the vertical surface may include a continuous ring-shaped vertical surface or an annular surface composed of discrete protrusions. The end face may be a flat or textured contact surface. These surfaces are arranged as close as possible to the inner wall while maintaining a small gap with the sidewall or bottom of the housing 10. The specific implementation of this adjacent arrangement can be achieved by controlling the gap size through precision machining or by using an adjustable bracket for fine adjustment, ensuring that the elastomer 30 vibrates freely within the normal measurement range while allowing the damping medium to produce a significant viscous effect in a confined space. This invention maximizes the effective contact area between the damping member 40 and the housing 10, causing the damping medium to generate stronger shear force and compressive resistance when the elastomer 30 vibrates slightly, thereby quickly dissipating mechanical vibration energy and significantly improving the damping efficiency and dynamic response speed of the sensor. At the same time, by optimizing the spatial layout to maintain the compactness of the structure, the sensor achieves optimal dynamic performance within a limited space.

[0064] Please see Figure 9 , 11 As an optional embodiment of the present invention, it further includes an overload protection structure 50, which includes a limiting post 51 fixed to the housing 10 and a limiting part 52 disposed on the damping member 40, and the limiting part 52 and the limiting post 51 have a gap for overload protection.

[0065] It should be noted that the size of the overload protection gap is customized according to the characteristics of the elastomer used to ensure that the elastomer 34 can move freely within the normal measurement range, and that the limiting part 52 contacts the limiting post 51 to form a mechanical stop during overload. The limiting post 51 can be implemented as a cylindrical support or a rectangular column, which is fixed to the housing 10 base 11 by threaded connection, welding or integral molding; the limiting part 52 can be designed as a sleeve structure or an open groove to form a fitting gap with the limiting post 51. The size of this gap is precisely calculated to ensure the degree of freedom of movement of the sensor within the normal measurement range, and to limit further displacement through mechanical contact during overload, thereby solving the problem of plastic deformation or structural damage of the elastomer 30 due to lack of effective protection in the event of sudden overload. This invention utilizes the mechanical interference between the limiting part 52 and the limiting post 51 so that when the external load exceeds the set threshold, the overload protection structure 50 promptly prevents further displacement and avoids irreversible damage to critical components. This solution extends the lifespan of the sensor by providing reliable multi-dimensional overload protection, while ensuring that the sensor's sensitivity and accuracy are not affected during normal measurement through a non-contact design.

[0066] Please see Figure 7 , 911, 7, as an optional embodiment of the present invention, the limiting post 51 includes a central limiting post 511 disposed at the center of the base 11 and a plurality of circumferential limiting posts 512 disposed around the central limiting post 511; The limiting part 52 includes a limiting center sleeve 521 formed on the first damping member 41 and a plurality of circumferential limiting holes 522. The limiting center sleeve 521 is sleeved on the outside of the central limiting post 511, and the circumferential limiting holes 522 are respectively sleeved on the outside of the corresponding circumferential limiting post 512.

[0067] It should be noted that the central limiting post 511 can be implemented as a cylinder or an irregularly shaped column with a guide groove, and the circumferential limiting posts 512 can be evenly distributed on the concentric circumference; for example, the central limiting post 511 is set in the center of the inner bottom surface of the base 11, and multiple circumferential limiting posts 512 are evenly arranged on the inner bottom surface of the base 11; the limiting central sleeve 521 is sleeved on the central limiting post 511 in the center of the damping base plate 411; the circumferential limiting hole 522 can be a circular hole or an oblong hole to adapt to displacement restriction in different directions, for example, the circumferential limiting hole 522 is set on the damping base plate 411 of the first damping member 41. This arrangement solves the problem of insufficient coordination and reliability of multi-dimensional overload protection under complex working conditions. In this case, the central limiting column 511 mainly restricts the overload displacement of the force, and the circumferential limiting column 512 inhibits the torque overload, forming a spatial multi-dimensional constraint system, thereby achieving precise six-dimensional overload protection. The protection threshold of each dimension can be designed independently. The stress concentration during impact is reduced by the cooperation between the sleeve and the limiting column, thereby improving the durability and reliability of the protection structure.

[0068] Please see Figure 13 As an optional embodiment of the present invention, the overload protection structure 50 further includes a torsion limiting block 53 and a displacement limiting block 54. The torsion limiting block 53 is connected to the circumferential limiting post 512, and the displacement limiting block 54 is connected to the central limiting post 511.

[0069] It should be noted that the torsion limiting block 53 can be implemented as a fan-shaped block or an L-shaped stop, which is fixed to the top of the circumferential limiting post 512 by threaded connection, snap-fit, or integral molding; the displacement limiting block 54 can be designed as an annular gasket or a hemispherical cap, installed at a specified height position of the central limiting post 511. These additional limiting blocks solve the deficiency of simple post-hole fit in protecting against complex overload modes (such as compound torsion). By increasing the mechanical blocking area in a specific direction, when the sensor is subjected to compound overload, the limiting block contacts the corresponding component to generate a distributed constraint force, effectively dispersing the impact energy, thereby enhancing the adaptability to complex overload conditions. The modular design allows for adjustment of the protection threshold according to application requirements, improving the sensor's safety margin and adaptability to operating conditions, while also facilitating maintenance and replacement.

[0070] As an optional embodiment of the present invention, the external load can be connected to the actuator 20, the damping member 40 and the elastomer 30 through a connector, or the external load can be connected to the actuator 20 and the damping member 40 through a connector such as a screw or bolt, so that the overload protection structure 50 can provide overload protection for the elastomer 30.

[0071] As an optional embodiment of the present invention, the inner diameter of the limiting center sleeve 521 is larger than the outer diameter of the center limiting post 511, and the radial gap between the two constitutes part of the overload protection gap.

[0072] As an optional embodiment of the present invention, the height of the limiting center sleeve 521 is less than the height of the center limiting post 511, so as to form an overload protection gap in the axial direction.

[0073] As an optional embodiment of the present invention, the actuator 20 is connected to the loading end 32 via a flexible sealing cover plate 61, and the sealing cover plate 61 is sealed to the cover body 12.

[0074] A flexible sealing cover plate 61 is fixedly provided on the outer side of the cover 12 away from the elastic body 30. The actuator 20 passes through the sealing cover plate 61 and extends into the housing 10. The sealing cover plate 61 is sealed to the actuator 20.

[0075] It should be noted that the specific implementation of the flexible sealing cover 61 may include an annular corrugated plate structure or a diaphragm structure, which achieves flexible connection through integral molding or separate assembly. The sealing connection between the sealing cover 61 and the cover body 12 and the actuator 20 can be completed by compression fitting or bonding, such as by flange compression or edge covering design. This invention utilizes the elastic deformation capability of the flexible sealing cover 61 to maintain the sealing integrity of the connection when the actuator 20 is subjected to force displacement, while allowing the loading end 32 to transmit multidimensional loads without causing additional constraints. This achieves effective isolation between the moving parts and the sealing structure, ensuring that the damping medium does not leak, while maintaining the dynamic response characteristics of the sensor. The flexible design reduces the impact of connection stiffness on measurement accuracy, improving the reliability and environmental adaptability of the sensor in long-term use.

[0076] Please see Figure 1-2 4-5, the sealing cover plate 61 is provided with a mounting through hole 611 in the center, the cover body 12 is provided with an external connection mounting hole 123 in the center, and one end of the actuator 20 passes through the mounting through hole 611 and the external connection mounting hole 123 and is connected to the second damping member 42.

[0077] Please see Figure 1-24. As an optional embodiment of the present invention, the corrugated structure of the sealing cover plate 61 generates elastic deformation when the actuator 20 is displaced relative to the cover body 12, and the sealing cover plate 61 achieves a sealed connection with the cover body 12 and the base 11 through the sealing ring 62.

[0078] It should be noted that the specific implementation of the corrugated structure may include an annular corrugated layout, which provides multi-directional deformation capability through the alternating arrangement of crests and troughs; the implementation of the sealing ring 62 may include an O-ring or a rectangular gasket, which achieves secondary sealing through groove positioning or surface pressing, thereby solving the problem of decreased sealing performance of traditional sensors under dynamic conditions due to insufficient rigidity or fatigue deformation of sealing components. In this case, the directional deformation of the corrugated structure absorbs the multi-dimensional displacement of the actuator 20, avoiding local stress concentration. At the same time, the sealing ring 62 forms a redundant sealing barrier on the contact surface, enhancing the overall sealing reliability, thereby significantly improving the durability and fatigue resistance of the sealing system. The corrugated structure optimizes stress distribution, reduces wear of the sealing components, and the design of the sealing ring 62 simplifies the assembly process and improves sealing consistency, ensuring the long-term sealing stability of the sensor under complex motion conditions.

[0079] As an optional embodiment of the present invention, the sealing cover 61 is flexibly sealed to the actuator 20.

[0080] As an optional embodiment of the present invention, the damping medium is a viscous liquid or a semi-fluid, such as silicone oil, damping grease or a gel-like semi-fluid material.

[0081] Please see Figure 1-2 14. As an optional embodiment of the present invention, the effective working area of ​​the vertical surface and / or the end surface is adjustable. The gaps between and / or some of the vertical surfaces and / or between the vertical surfaces and the inner wall of the housing 10 and / or between the end face and the bottom wall of the base 11 and / or between the end face and the cover 12 are adjustable.

[0082] It should be noted that the adjustable effective working area implementation includes using replaceable damping accessories or adjustable composite structures, such as changing the working area by replacing damping rings 413 of different sizes or adding detachable extension panels; the adjustable gap implementation includes using threaded fine-tuning mechanisms or variable-thickness shim assemblies, such as by setting adjusting screws between the damping element and the housing 10 or inserting spacers of different specifications to precisely control various gap dimensions. The technical problem solved by these adjustable designs is the insufficient dynamic performance adaptability of traditional sensors due to fixed damping parameters. This invention changes the contact range between the damping medium and the moving parts by adjusting the effective working area, thereby affecting the generation efficiency of shear damping force and compressive damping force. Simultaneously, by adjusting the gap dimensions, the flow resistance and viscosity effect of the damping medium are directly controlled, achieving flexible optimization of the damping coefficient, thus significantly improving the adaptability and customizability of the sensor under different operating conditions. Multiple dynamic measurement needs can be matched through simple mechanical adjustments, enhancing the overall performance stability and application range of the sensor, while reducing measurement errors or performance degradation caused by parameter mismatch. This design alters the distribution and magnitude of damping force by adjusting the area, while gap adjustment directly changes the flow cross-section and velocity gradient of the damping medium. These synergistic effects enable precise control of vibration energy, achieving on-site adjustment of the sensor's dynamic characteristics. This allows the sensor to adapt to changing working conditions without replacing core components. Parameter optimization enhances the targeting and efficiency of vibration suppression, while extending the sensor's lifespan and reducing maintenance requirements.

[0083] The introduction of adjustable design also enhances the sensor's engineering applicability. Area adjustability allows for the selection of the optimal damping configuration based on specific applications; for example, a small area can be used in high-speed measurement scenarios to reduce inertial effects, while a large area can be used in high-precision scenarios to enhance energy absorption. Gap adjustability enables the sensor to compensate for performance deviations caused by manufacturing tolerances or environmental changes, such as maintaining damping consistency through fine-tuning the gap. This design utilizes adjustable parameters to form a dynamic feedback mechanism, ensuring the damping environment is always optimal. This guarantees rapid vibration decay of the elastomer 30 and stable measurement signals, thereby improving the sensor's versatility and economy. The adjustable design reduces model variety and inventory costs, while providing users with flexible adjustment methods, ensuring the sensor maintains high performance and reliability during long-term use.

[0084] When the sensor is subjected to a radial external load, the elastic body 30 drives the damping component 40 to move radially. At this time, shear damping forces are applied between the damping top plate 421 and the flat plate of the cover 12, and between the damping bottom plate 411 and the bottom wall of the base 11. The damping ring 413 is subjected to compressive damping forces between it and the inner wall of the base 11. At the same time, the damping vertical surface is subjected to the combined effects of frictional damping forces and compressive damping forces, which quickly consumes the vibration energy generated by the elastic body 30 and effectively improves the dynamic performance of the six-dimensional force sensor.

[0085] When the sensor is subjected to an axial external load, the elastic body 30 drives the damping member 40 to move axially. At this time, the damping top plate 421 and the flat plate of the cover 12, and the damping bottom plate 411 and the bottom wall of the base 11 are subjected to compressive damping force, and the damping ring 413 and the inner wall of the base 11 are subjected to shear damping force. At the same time, the damping vertical surface is subjected to the combined action of shear damping force and compressive damping force, which quickly consumes the energy generated by the vibration of the elastic body 30 and significantly improves the dynamic response characteristics of the sensor.

[0086] The gap between the damping top plate 421 and the action plate 122 of the cover 12 is t1, the gap between the damping bottom plate 411 and the bottom wall of the base 11 is t2, and the gap between the damping ring 413 and the inner wall of the base 11 is t3, with t1 and t2 having the same dimensions. By adjusting the dimensions of t1, t2, and t3, the flow resistance and viscosity effect of the damping medium can be changed, thereby obtaining different damping coefficients and optimizing the dynamic performance of the sensor.

[0087] Working Process: The multidimensional force sensor involved in this invention operates by first transmitting an external load to the loading end 32 of the elastic body 30 via the actuator 20. The actuator 20, acting as an external interface, is directly connected to the robot or other actuators, receiving multidimensional forces and torques from the working environment. During load transmission, the actuator 20 guides the forces and torques to the loading end 32 of the elastic body 30, ensuring uniform load distribution and directional accuracy.

[0088] Upon receiving a load, the elastic body 30 undergoes elastic deformation, with the circumferential beam 33 and radial beam 34 in its structure working together. The mounting end 31 of the elastic body 30 is fixed to the base 11 of the housing 10, and the loading end 32 is linked with the actuator 20, so that the multidimensional load generates a corresponding strain distribution on the elastic body 30. This strain is detected by a strain-sensitive element attached to the surface of the radial beam 34 and converted into an electrical signal, realizing the synchronous measurement of forces (Fx, Fy, Fz) and moments (Mx, My, Mz) in three orthogonal directions.

[0089] During the deformation of the elastic body 30, vibrations may occur due to external excitation or sudden load changes. At this time, the damping member 40 moves synchronously with the loading end 32 of the elastic body 30. The first damping member 41 and the second damping member 42 are located on the upper and lower sides of the elastic body 30, respectively, forming axial and radial damping gaps with the base 11 and cover 12 of the housing 10. The damping medium fills these gaps. When the damping member 40 moves relative to the housing 10, the damping medium undergoes viscous flow within the gaps, rapidly absorbing vibration energy through shear damping force, compression damping force, and friction damping force. For example, during radial vibration, the radial gap between the damping ring 413 and the side wall of the housing 10, as well as the labyrinthine channels between the damping vertical surfaces, allow the damping medium to undergo a complex flow path, enhancing energy dissipation efficiency. During axial vibration, the equal-sized axial gaps between the damping base plate 411 and the bottom wall of the base 11, and between the damping top plate 421 and the flat plate of the cover 12, ensure a symmetrical distribution of damping force, effectively suppressing vibration. The lightweight material properties of the damping component 40 avoid the impact of added mass on dynamic performance, while its adjustable gap size and effective area allow for optimization of the damping coefficient according to operating conditions, further improving the vibration decay rate.

[0090] When the sensor is subjected to an overload, the overload protection structure 50 is automatically activated. The limiting post 51 is fixed to the base 11 of the housing 10 and includes a central limiting post 511 and circumferential limiting posts 512. The limiting part 52 is disposed on the damping member 40 and includes a limiting central sleeve 521 and circumferential limiting holes 522. Within the normal measurement range, a small gap is maintained between the limiting part 52 and the limiting post 51 to ensure the free movement of the elastomer 30. Once the load exceeds the threshold, the limiting part 52 contacts the limiting post 51, forming a mechanical stop. For example, the radial gap and axial height difference between the central limiting post 511 and the limiting central sleeve 521 limit overload displacement, and multiple circumferential limiting posts 512 and circumferential limiting holes 522 are arranged correspondingly to suppress torsional deformation, thereby preventing plastic deformation or damage to the elastomer 30 and other critical components.

[0091] Throughout the operation, the sealing system ensures the stability of the damping medium and the long-term reliability of the sensor. The flexible sealing cover 61 connects the actuator 20 to the cover 12; its corrugated structure elastically deforms when the actuator 20 is displaced, maintaining seal integrity. The sealing ring 62 provides a secondary sealing barrier to prevent leakage of the damping medium. Simultaneously, the viscous properties of the damping medium remain stable over a wide temperature range and under vibration conditions, ensuring consistent damping performance.

[0092] Ultimately, the sensor's dynamic performance is achieved through a combination of physical damping mechanisms and overload protection. The strain signal of the elastic body 30 is decoupled and amplified by the signal processing circuit, outputting a high-precision six-dimensional force measurement value. This process enables the sensor to achieve real-time response, vibration suppression, and overload protection in high-speed dynamic scenarios, significantly improving measurement accuracy and reliability.

[0093] This invention introduces a multi-dimensional force sensor with a damped environment. While force or torque is transmitted from the actuator 20 to the loading end 32 of the elastic body 30 and measured in each dimension, the damping component 40 and the damping medium together form a damped environment. This increases the damping of the system in all dimensions, effectively absorbing the vibration energy of the elastic body 30 and significantly reducing system vibration. This method uses physical means to effectively shorten the vibration time of the elastic body 30 and improve the dynamic characteristics of the six-dimensional force sensor by increasing the system's damping coefficient without adjusting the stiffness of the elastic body 30 itself.

[0094] Meanwhile, the sensor adopts a modular design, requiring only sequential assembly of components in a single direction during installation, greatly improving ease of installation and use. The overall height of the sensor is optimized for a compact structure. The damping component 40 and the overload protection structure 50 share some parts; for example, the limiting post 51 serves both as overload protection and as a positioning reference for the damping structure. This integrated design effectively reduces the overall weight of the sensor. This lightweight design minimizes the adverse effects on the motion trajectory when the sensor is mounted at the actuator end, improving the stability and accuracy of the actuator's end motion.

[0095] Furthermore, the sensor is equipped with independent, uncoupled overload protection structures 50 in each dimension. When an overload occurs in one or more dimensions, the corresponding limiting device can promptly generate mechanical interference, effectively limiting further displacement and protecting the core components of the six-dimensional force sensor from damage, ensuring the accuracy and reliability of the measurement data. This comprehensive protection mechanism enables the sensor to maintain stable performance under complex working conditions.

[0096] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A multidimensional force sensor, characterized in that, include: The housing includes a base and a cover disposed opposite to the base, the cover and the base together forming a sealed cavity, the sealed cavity being filled with a damping medium; An actuator is used to receive external loads; An elastomer is disposed within the sealed cavity. The elastomer includes a mounting end and a loading end. The mounting end is connected to the base, and the loading end is used to receive loads from the actuator. A damping member is disposed within the sealed cavity and fixedly connected to the loading end, and a gap is formed between the damping member and the base and / or the cover to be filled with the damping medium.

2. The multidimensional force sensor according to claim 1, characterized in that, The damping component includes: The first damping element is connected to the side of the elastic body near the base and forms a damping gap with the base; And / or a second damping element, connected to the side of the elastomer near the cover or connected to the first damping element, and forming a damping gap between the cover and / or the base.

3. The multidimensional force sensor according to claim 2, characterized in that, The damping gap includes at least one of axial damping gap and radial damping gap; The axial damping gap is formed by several opposing end faces of the damping member and the base or cover; the radial damping gap is formed by several opposing vertical faces of the damping member and the base or cover.

4. The multidimensional force sensor according to claim 3, characterized in that, The radial damping gap includes: an outer radial gap formed on the vertical surface of the outer periphery of the first damping member and / or between the vertical surface of the outer periphery of the second damping member and the base vertical surface of the base; And / or a plurality of inner radial gaps formed on the inner side of the first damping member and / or between the plurality of inner vertical surfaces of the second damping member and the vertical surface of the base.

5. The multidimensional force sensor according to claim 3, characterized in that, The vertical surfaces of the first damping element and / or the second damping element are arranged symmetrically around the elastic body.

6. The multidimensional force sensor according to claim 3, characterized in that, The axial damping clearance includes: The first axial gap between the bottom plate of the first damping member and the bottom wall of the base; And / or a second axial gap between the top plate of the second damping member and the flat plate of the cover body, wherein the size of the first axial gap is the same as the size of the second axial gap.

7. The multidimensional force sensor according to claim 3, characterized in that, The vertical surface and / or the end face of the damping member are arranged adjacent to the vertical surface and end face inside the housing, provided that the vibration displacement of the elastomer is allowed.

8. The multidimensional force sensor according to claim 3, characterized in that, The effective working area of ​​the vertical surface and / or the end surface is adjustable; The gaps between and / or several of the vertical surfaces and / or between the vertical surfaces and the vertical surfaces inside the housing and / or between the end face and the bottom wall of the base and / or between the end face and the cover are adjustable.

9. The multidimensional force sensor according to claim 1, characterized in that, It also includes an overload protection structure, which includes a limiting post fixed to the housing and a limiting part disposed on the damping member, with a gap for overload protection between the limiting part and the limiting post.

10. The multidimensional force sensor according to claim 1, characterized in that, A flexible sealing cover plate is fixedly provided on the outer side of the cover away from the elastic body. The actuator passes through the sealing cover plate and extends into the housing. The sealing cover plate is sealed to the actuator.

11. The multidimensional force sensor according to claim 1, characterized in that, The damping medium is a viscous liquid or a semi-fluid.

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