Gas tightness detection method and device for gas distribution disc, equipment and medium

Abstract

The invention relates to a gas tightness detection method and device for a gas distribution plate, equipment and a medium, and relates to the technical field of gas tightness detection, and the method comprises the steps: obtaining the use condition of the gas distribution plate for vapor deposition; setting air tightness detection parameters according to use conditions; performing first gas tightness detection on the gas distribution disc for vapor deposition according to the gas tightness detection parameter; if the first gas tightness detection is qualified, using the gas distribution disc for vapor deposition under the use working condition for preset time; and then, carrying out second gas tightness detection on the gas distribution disc for vapor deposition according to the gas tightness detection parameters, and if the second gas tightness detection is qualified, marking that the detection is qualified. According to the gas tightness detection method provided by the invention, through optimizing the gas tightness detection process, effective detection of the gas tightness of the gas distribution plate is realized, the condition of false qualification in the detection process can be remarkably avoided, and the use stability of the gas distribution plate is remarkably improved.

Description

Technical Field

[0001] This invention relates to the field of airtightness testing technology, specifically to a method, apparatus, equipment, and medium for airtightness testing of a gas distribution plate, and particularly to a method, apparatus, equipment, and medium for airtightness testing of a vapor deposition gas distribution plate. Background Technology

[0002] Gas distribution disks are key components in semiconductor and thin film fabrication processes, primarily used to uniformly distribute reactive gases within the reaction chamber to ensure the uniformity and consistency of deposited thin films. Through precisely designed pores or channels, reactive gases are uniformly introduced onto the substrate surface, avoiding localized excessively high or low concentrations.

[0003] CN210796617U discloses a vapor deposition apparatus, relating to the field of semiconductor manufacturing technology. The vapor deposition apparatus includes: a reaction chamber; a radio frequency device and a gas distribution disk disposed in the reaction chamber; a heater disposed opposite to the gas distribution disk for placing and heating a wafer on which a thin film is deposited using plasma; a horizontal adjustment disk disposed below and fixedly connected to the heater; and an automatic height adjustment mechanism disposed below the horizontal adjustment disk for adjusting the distance between the gas distribution disk and the heater according to the thickness of the thin film deposited on the wafer.

[0004] CN113584465A discloses a chemical vapor deposition (CVD) apparatus, belonging to the field of semiconductor technology. This CVD apparatus includes a reaction chamber, a gas supply assembly, gas distribution trays, and a gas control assembly. The reaction chamber has multiple support stages for holding wafers. The gas supply assembly provides the reaction gas. Multiple gas distribution trays are arranged in a one-to-one correspondence with the support stages. Multiple gas control assemblies are also arranged in a one-to-one correspondence with the gas distribution trays. The gas distribution trays and the gas supply assembly are connected via corresponding gas control assemblies.

[0005] Currently, gas distribution plates require airtightness testing during use to ensure that the gas supplied during use strictly follows the design of the gas distribution plate and avoids unstable airflow. However, current airtightness testing is usually carried out in a normal temperature and pressure environment using the jet blowing method or suction gun method, which is significantly different from the operating conditions of the gas distribution plate. This results in situations where the airtightness test is passed, but the gas distribution plate still fails to meet the airtightness requirements during use, leading to unqualified coating results. Summary of the Invention

[0006] In view of the problems existing in the prior art, the purpose of the present invention is to provide a method, device, equipment and medium for testing the air tightness of a gas distribution plate, so as to solve the defect that false qualified gas distribution plates exist during the current air tightness test, resulting in poor performance of the film layer obtained by coating.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] In a first aspect, the present invention provides a method for detecting the airtightness of a gas distribution plate, the method comprising:

[0009] Obtain the operating conditions of the gas distribution disk used for vapor deposition;

[0010] Set the airtightness testing parameters according to the operating conditions;

[0011] The first airtightness test was performed on the gas distribution disk for vapor deposition based on the airtightness test parameters;

[0012] If the first airtightness test is passed, the gas distribution disk for vapor deposition is used for the preset time under operating conditions.

[0013] Subsequently, a second airtightness test is performed on the gas distribution disk for vapor deposition based on the airtightness test parameters. If the second airtightness test is qualified, it is recorded as qualified.

[0014] The airtightness testing method provided by this invention optimizes the airtightness testing process, thereby achieving effective testing of the airtightness of the gas distribution plate. This significantly avoids false-passing situations during the testing process and significantly improves the stability of the gas distribution plate in use.

[0015] As a preferred technical solution of the present invention, the operating conditions include: chamber temperature, chamber pressure, inlet gas pressure, and inlet gas flow rate.

[0016] As a preferred technical solution of the present invention, the airtightness detection parameters include: ambient temperature, ambient pressure, inflation pressure, and inflation flow rate.

[0017] Preferably, the airtightness testing parameters are set according to the operating conditions as follows: the ambient temperature is set to 1-1.2 times the chamber temperature, the ambient pressure is set to 1-1.2 times the chamber pressure, the inflation pressure is set to 1-1.2 times the input gas pressure, and the input gas flow rate is set to 1-1.2 times the input gas flow rate.

[0018] As a preferred technical solution of the present invention, the first airtightness test includes: under ambient temperature and ambient pressure, injecting helium gas into a sealed gas distribution disk for vapor deposition at an inflation pressure and an inflation flow rate, and maintaining it at a first pressure for a first time.

[0019] Preferably, the first pressure is 1.4 - 1.6 times the inflation pressure.

[0020] Preferably, the first time is 3 - 5 times the reaction time.

[0021] As a preferred technical solution of the present invention, if the leakage rate in the first airtightness detection < 1×10 -9 Pa·m 3 / s, it is recorded as qualified, otherwise it is unqualified.

[0022] As a preferred technical solution of the present invention, the preset time is the expected continuous working time of the gas distribution plate for vapor deposition.

[0023] As a preferred technical solution of the present invention, the second airtightness detection includes: at ambient temperature and ambient pressure, helium is inflated into the sealed gas distribution plate for vapor deposition at the inflation pressure and inflation flow rate and maintained for a second time at a second pressure.

[0024] Preferably, the second pressure is 2 - 2.5 times the inflation pressure.

[0025] Preferably, the second time is 10 - 20 times the reaction time.

[0026] Preferably, if the leakage rate in the second airtightness detection < 1×10 -9 Pa·m 3 / s, it is recorded as qualified, otherwise it is unqualified.

[0027] In a second aspect, the present invention provides an airtightness detection device for a gas distribution plate, and the airtightness detection device includes:

[0028] An acquisition module for acquiring the usage conditions of the gas distribution plate for vapor deposition;

[0029] A setting module for setting airtightness detection parameters according to the usage conditions;

[0030] A first detection module for performing a first airtightness detection on the gas distribution plate for vapor deposition according to the airtightness detection parameters;

[0031] A usage module for using the gas distribution plate for vapor deposition under the usage conditions for a preset time when the first airtightness detection is qualified;

[0032] A second detection module for performing a second airtightness detection on the gas distribution plate for vapor deposition according to the airtightness detection parameters.

[0033] Thirdly, the present invention provides an electronic device comprising: at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores a computer program executable by the at least one processor, the computer program being executed by the at least one processor to enable the at least one processor to perform the gas tightness detection method for the gas distribution plate described in the first aspect.

[0034] Fourthly, the present invention provides a computer storage medium storing computer-executable instructions, which, when executed by a processor, implement the gas tightness detection method for the gas distribution disk described in the first aspect.

[0035] Compared with existing technical solutions, the present invention has the following beneficial effects:

[0036] The airtightness testing method provided by this invention, by designing a tiered testing method that combines airtightness testing with actual working conditions, can significantly improve the accuracy of airtightness testing of gas distribution disks, and prevent false qualified gas distribution disks from entering the production line due to differences between the testing environment and actual working conditions. This ensures that the thin film obtained by vapor deposition has good performance and improves the pass rate of vapor deposition. Attached Figure Description

[0037] Figure 1 This is a flowchart of a gas distribution plate airtightness detection method provided in an embodiment of the present invention;

[0038] Figure 2 This is a schematic diagram of the airtightness detection device for the gas distribution plate provided in an embodiment of the present invention;

[0039] Figure 3 This is a schematic diagram of an electronic device provided in an embodiment of the present invention.

[0040] In the picture:

[0041] 100 - Acquisition module, 200 - Setting module, 300 - First detection module, 400 - Usage module, 500 - Second detection module;

[0042] 10-Electronic device, 11-Processor, 12-ROM, 13-RAM, 14-Bus, 15-I / O interface, 16-Input unit, 17-Output unit, 18-Storage unit, 19-Communication unit.

[0043] The present invention will now be described in further detail. However, the examples described below are merely simplified examples of the present invention and do not represent or limit the scope of protection of the present invention. The scope of protection of the present invention is determined by the claims. Detailed Implementation

[0044] To better illustrate the present invention and facilitate understanding of its technical solutions, typical but non-limiting embodiments of the present invention are as follows:

[0045] I. This embodiment provides a method for detecting the airtightness of a gas distribution plate, the process of which is as follows: Figure 1 As shown, the airtightness testing method includes:

[0046] Obtain the operating conditions of the gas distribution disk used for vapor deposition;

[0047] Set the airtightness testing parameters according to the operating conditions;

[0048] The first airtightness test was performed on the gas distribution disk for vapor deposition based on the airtightness test parameters;

[0049] If the first airtightness test is passed, the gas distribution disk for vapor deposition is used for the preset time under operating conditions.

[0050] Subsequently, a second airtightness test is performed on the gas distribution disk for vapor deposition based on the airtightness test parameters. If the second airtightness test is qualified, it is recorded as qualified.

[0051] The operating conditions include: chamber temperature, chamber pressure, inlet gas pressure, and inlet gas flow rate.

[0052] In this invention, the chamber temperature refers to the temperature of the cavity where the gas distribution disk is located during vapor deposition.

[0053] In this invention, chamber pressure refers to the pressure in the cavity where the gas distribution disk is located during vapor deposition.

[0054] In this invention, the infeed gas pressure refers to the pressure of the gas supplied through the gas distribution plate during vapor deposition.

[0055] In this invention, the feed gas flow rate refers to the flow rate of gas fed through the gas distribution plate during vapor deposition.

[0056] The airtightness testing parameters include: ambient temperature, ambient pressure, inflation pressure, and inflation flow rate.

[0057] The airtightness testing parameters set according to the operating conditions include: setting the ambient temperature to 1-1.2 times the chamber temperature, the ambient pressure to 1-1.2 times the chamber pressure, the inflation pressure to 1-1.2 times the input gas pressure, and the input gas flow rate to 1-1.2 times the input gas flow rate.

[0058] In this invention, the ambient temperature is set to 1-1.2 times the chamber temperature, for example, it can be 1, 1.02, 1.04, 1.06, 1.08, 1.1, 1.12, 1.14, 1.16, 1.18, or 1.2 times, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0059] In this invention, the ambient pressure is set to 1-1.2 times the chamber pressure, for example, it can be 1, 1.02, 1.04, 1.06, 1.08, 1.1, 1.12, 1.14, 1.16, 1.18, or 1.2 times, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0060] In this invention, the inflation pressure is set to 1-1.2 times the input gas pressure, for example, it can be 1, 1.02, 1.04, 1.06, 1.08, 1.1, 1.12, 1.14, 1.16, 1.18, or 1.2 times, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0061] In this invention, the feed gas flow rate is set to 1-1.2 times the feed gas flow rate, for example, it can be 1, 1.02, 1.04, 1.06, 1.08, 1.1, 1.12, 1.14, 1.16, 1.18 or 1.2 times, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0062] The first airtightness test includes: under ambient temperature and ambient pressure, injecting helium gas into a sealed gas distribution disk for vapor deposition at an inflation pressure and an inflation flow rate, and maintaining the pressure at a first time for a first period of time.

[0063] Wherein, the first pressure is 1.4-1.6 times the inflation pressure, for example, it can be 1.4 times, 1.42 times, 1.44 times, 1.46 times, 1.48 times, 1.5 times, 1.52 times, 1.54 times, 1.56 times, 1.58 times or 1.6 times, etc., but is not limited to the listed values, and other unlisted values ​​within this range are also acceptable.

[0064] The first time is 3 to 5 times the reaction time, for example, it can be 3 times, 3.2 times, 3.4 times, 3.6 times, 3.8 times, 4 times, 4.2 times, 4.4 times, 4.6 times, 4.8 times or 5 times, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0065] In the present invention, the reaction time refers to the time required from when helium gas enters the leak hole until the change value of the output instrument reaches 63% of its maximum value, usually 1 - 5 s, and can also be reasonably set according to actual requirements.

[0066] Among them, in the first airtightness detection, if the leak rate < 1×10 -9 Pa·m 3 / s, it is recorded as qualified, otherwise it is unqualified.

[0067] Among them, the preset time is the expected continuous working time of the gas distribution plate for vapor deposition.

[0068] In the present invention, the expected continuous working time refers to the time for one continuous operation, and is specifically and reasonably designed according to actual requirements. The short time can be selected, or the longest time can be selected. It is preferably to select the longest expected continuous working time.

[0069] Among them, the second airtightness detection includes: at ambient temperature and ambient pressure, helium gas is filled into the sealed gas distribution plate for vapor deposition with an inflation pressure and an inflation flow rate and maintained at a second pressure for a second time.

[0070] Among them, the second pressure is 2 - 2.5 times the inflation pressure. For example, it can be 2 times, 2.05 times, 2.1 times, 2.15 times, 2.2 times, 2.25 times, 2.3 times, 2.35 times, 2.4 times, 2.45 times or 2.5 times, etc., but is not limited to the listed values. Other unlisted values within this range also meet the requirements.

[0071] Among them, the second time is 10 - 20 times the reaction time. For example, it can be 10 times, 11 times, 12 times, 13 times, 14 times, 15 times, 16 times, 17 times, 18 times, 19 times or 20 times, etc., but is not limited to the listed values. Other unlisted values within this range also meet the requirements.

[0072] Among them, in the second airtightness detection, if the leak rate < 1×10 -9 Pa·m 3 / s, it is recorded as qualified, otherwise it is unqualified.

[0073] In the present invention, the specific operation processes of the first airtightness detection and the second airtightness detection can be referred to the process of the suction gun method in GB / T36176 - 2018, but need to meet the requirements of the present invention.

[0074] Second, this embodiment provides an airtightness detection device for a gas distribution plate, as Figure 2 shown, the airtightness detection device includes:

[0075] The acquisition module 100 is used to acquire the operating conditions of the gas distribution disk for vapor deposition.

[0076] The setting module 200 is used to set the airtightness test parameters according to the operating conditions.

[0077] The first detection module 300 is used to perform a first airtightness test on the gas distribution disk for vapor deposition based on airtightness detection parameters.

[0078] Module 400 is used to apply the gas distribution disk for vapor deposition to a preset time when the first airtightness test is passed;

[0079] The second detection module 500 is used to perform a second airtightness test on the gas distribution disk for vapor deposition based on airtightness detection parameters.

[0080] Regarding the apparatus in the above embodiments, the specific manner in which each module performs its operation has been described in detail in the embodiments related to the method, and will not be elaborated upon here.

[0081] III. This embodiment provides an electronic device intended to represent various forms of digital computers, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device may also represent various forms of mobile devices, such as personal digital processors, cellular phones, smartphones, wearable devices (e.g., helmets, glasses, watches, etc.), and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely illustrative and are not intended to limit the implementation of the invention described and / or claimed herein.

[0082] like Figure 3 As shown, the electronic device 10 includes at least one processor 11 and a memory, such as a read-only memory (ROM) 12 or a random access memory (RAM) 13, communicatively connected to the at least one processor 11. The memory stores computer programs executable by the at least one processor. The processor 11 can perform various appropriate actions and processes based on the computer program stored in the ROM 12 or loaded into the RAM 13 from storage unit 18. The RAM 13 can also store various programs and data required for the operation of the electronic device 10. The processor 11, ROM 12, and RAM 13 are interconnected via a bus 14. An I / O interface 15 is also connected to the bus 14.

[0083] Multiple components in electronic device 10 are connected to I / O interface 15, including: input unit 16, such as keyboard, mouse, etc.; output unit 17, such as various types of displays, speakers, etc.; storage unit 18, such as disk, optical disk, etc.; and communication unit 19, such as network card, modem, wireless transceiver, etc. Communication unit 19 allows electronic device 10 to exchange information / data with other devices through computer networks such as the Internet and / or various telecommunications networks.

[0084] Processor 11 can be a variety of general-purpose and / or special-purpose processing components with processing and computing capabilities. Some examples of processor 11 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various special-purpose artificial intelligence (AI) computing chips, various processors running machine learning model algorithms, a digital signal processor (DSP), and any suitable processor, controller, microcontroller, etc. Processor 11 performs the various methods and processes described above, such as the gas tightness detection method for a gas distribution plate.

[0085] In some embodiments, the gas distribution plate airtightness detection method can be implemented as a computer program tangibly contained in a computer-readable storage medium, such as storage unit 18. In some embodiments, part or all of the computer program can be loaded and / or installed on electronic device 10 via ROM 12 and / or communication unit 19. When the computer program is loaded into RAM 13 and executed by processor 11, one or more steps of the gas distribution plate airtightness detection method described above can be performed. Alternatively, in other embodiments, processor 11 can be configured to perform the gas distribution plate airtightness detection method by any other suitable means (e.g., by means of firmware).

[0086] Various embodiments of the systems and techniques described above herein can be implemented in digital electronic circuit systems, integrated circuit systems, field-programmable gate arrays (FPGAs), application-specific integrated circuits (ASICs), application-specific standard products (ASSPs), systems-on-a-chip (SoCs), payload-programmable logic devices (CPLDs), computer hardware, firmware, software, and / or combinations thereof. These various embodiments may include implementations in one or more computer programs that can be executed and / or interpreted on a programmable system including at least one programmable processor, which may be a dedicated or general-purpose programmable processor, capable of receiving data and instructions from a storage system, at least one input device, and at least one output device, and transmitting data and instructions to the storage system, the at least one input device, and the at least one output device.

[0087] Computer programs used to implement the methods of the present invention may be written in any combination of one or more programming languages. These computer programs may be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device, such that when executed by the processor, the computer programs cause the functions / operations specified in the flowcharts and / or block diagrams to be performed. The computer programs may be executed entirely on a machine, partially on a machine, or as a standalone software package, partially on a machine and partially on a remote machine, or entirely on a remote machine or server.

[0088] In the context of this invention, a computer-readable storage medium can be a tangible medium that may contain or store a computer program for use by or in conjunction with an instruction execution system, apparatus, or device. A computer-readable storage medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatus, or devices, or any suitable combination thereof. Alternatively, a computer-readable storage medium may be a machine-readable signal medium. More specific examples of machine-readable storage media include electrical connections based on one or more wires, portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fibers, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination thereof.

[0089] To provide interaction with a user, the systems and techniques described herein can be implemented on an electronic device having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and pointing device (e.g., a mouse or trackball) through which the user provides input to the electronic device. Other types of devices can also be used to provide interaction with the user; for example, feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including sound input, voice input, or tactile input).

[0090] The systems and technologies described herein can be implemented in computing systems that include backend components (e.g., as data servers), or middleware components (e.g., application servers), or frontend components (e.g., user computers with graphical user interfaces or web browsers through which users can interact with implementations of the systems and technologies described herein), or any combination of such backend, middleware, or frontend components. The components of the system can be interconnected via digital data communication of any form or medium (e.g., communication networks). Examples of communication networks include local area networks (LANs), wide area networks (WANs), blockchain networks, and the Internet.

[0091] A computing system can include clients and servers. Clients and servers are generally located far apart and typically interact through communication networks. The client-server relationship is created by computer programs running on the respective computers and having a client-server relationship with each other. The server can be a cloud server, also known as a cloud computing server or cloud host, which is a hosting product within the cloud computing service system to address the shortcomings of traditional physical hosts and VPS services, such as high management difficulty and weak business scalability.

[0092] The server provided in this embodiment includes: a memory, a processor, and a computer program stored in the memory and capable of running on the processor. When the processor executes the program, it implements a method for detecting the airtightness of a gas distribution plate.

[0093] Unless otherwise specifically stated, terms such as processing, calculation, operation, determination, display, etc., may refer to the actions and / or processes of one or more processing or computing systems or similar devices that represent the manipulation and conversion of data representing physical (e.g., electronic) quantities within the registers or memory of the processing system into other data similarly representing physical quantities within the memory, registers, or other such information storage, transmission, or display devices of the processing system. Information and signals can be represented using any of a variety of different techniques and methods. For example, data, instructions, commands, information, signals, bits, symbols, and chips mentioned throughout the above description can be represented by voltage, current, electromagnetic waves, magnetic fields or particles, light fields or particles, or any combination thereof.

[0094] Those skilled in the art will also understand that the various illustrative logic blocks, modules, circuits, and algorithm steps described in conjunction with embodiments of the present invention can all be implemented as electronic hardware, computer software, or a combination thereof. To clearly illustrate the interchangeability between hardware and software, the various illustrative components, blocks, modules, circuits, and steps described above are generally described in terms of their functionality. Whether this functionality is implemented as hardware or software depends on the specific application and the design constraints imposed on the overall system. Those skilled in the art can implement the described functionality in alternative ways for each specific application; however, such implementation decisions should not be construed as departing from the scope of protection of the present invention.

[0095] The steps of the methods or algorithms described in conjunction with the embodiments herein can be directly embodied in hardware, software modules executed by a processor, or a combination thereof. The software modules can reside in RAM memory, flash memory, ROM memory, EPROM memory, EEPROM memory, registers, hard disks, removable disks, CD-ROMs, or any other form of storage medium well known in the art. An exemplary storage medium is connected to the processor, enabling the processor to read information from and write information to the storage medium. Of course, the storage medium can also be a component of the processor. The processor and storage medium can reside in an ASIC. The ASIC can reside in a user terminal. Alternatively, the processor and storage medium can exist as discrete components in the user terminal.

[0096] For software implementation, the techniques described in this invention can be implemented using modules (e.g., procedures, functions, etc.) that perform the functions described in this application. This software code can be stored in memory units and executed by a processor. The memory units can be implemented within the processor or externally; in the latter case, they are communicatively coupled to the processor via various means, as is well known in the art.

[0097] IV. To illustrate the detection effect achievable by the gas distribution plate airtightness detection method provided by the present invention, a practical example is used for explanation, as follows:

[0098] Example 1

[0099] This embodiment provides a method for detecting the airtightness of a gas distribution plate, as detailed below:

[0100] Obtain the operating conditions of the gas distribution disk used for vapor deposition;

[0101] Set the airtightness testing parameters according to the operating conditions;

[0102] The first airtightness test was performed on the gas distribution disk for vapor deposition based on the airtightness test parameters;

[0103] If the first airtightness test is qualified, use the gas distribution plate for vapor deposition under the operating conditions for a preset time;

[0104] After that, conduct a second airtightness test on the gas distribution plate for vapor deposition according to the airtightness test parameters. If the second airtightness test is qualified, it is recorded as a qualified test;

[0105] The operating conditions include: chamber temperature, chamber pressure, inlet gas pressure, and inlet gas flow rate;

[0106] The airtightness test parameters include: ambient temperature, ambient pressure, inflation pressure, and inflation flow rate;

[0107] The setting of the airtightness test parameters according to the operating conditions includes: setting the ambient temperature to 1.1 times the chamber temperature, the ambient pressure to 1.1 times the chamber pressure, the inflation pressure to 1.1 times the inlet gas pressure, and the inlet gas flow rate to 1.1 times the inlet gas flow rate;

[0108] The first airtightness test includes: under the ambient temperature and ambient pressure, filling helium into the sealed gas distribution plate for vapor deposition with the inflation pressure and inflation flow rate and maintaining it at the first pressure for the first time; the first pressure is 1.5 times the inflation pressure; the first time is 4 times the reaction time; if the leak rate < 1×10 - 9 Pa·m 3 / s in the first airtightness test, it is recorded as qualified, otherwise it is unqualified;

[0109] The preset time is the expected continuous working time of the gas distribution plate for vapor deposition;

[0110] The second airtightness test includes: under the ambient temperature and ambient pressure, filling helium into the sealed gas distribution plate for vapor deposition with the inflation pressure and inflation flow rate and maintaining it at the second pressure for the second time; the second pressure is 2 times the inflation pressure; the second time is 15 times the reaction time;

[0111] If the leak rate < 1×10 -9 Pa·m 3 / s in the second airtightness test, it is recorded as qualified, otherwise it is unqualified.

[0112] The gas tightness of the gas distribution plate used for chemical vapor deposition was tested using the above-described gas tightness testing process. For comparison, the gas distribution plate was tested using the suction gun method in GB / T36176-2018. Then, chemical vapor deposition was performed using two qualified gas distribution plates, with consistent parameters throughout the process. The uniformity of the film layer in the series of coated products was analyzed (measured using the 49-point method; uniformity was indicated by the standard deviation of the 49 points; a larger standard deviation indicates greater data dispersion, i.e., greater non-uniformity). The results are shown in Table 1 below.

[0113] Table 1

[0114]

[0115] In summary, the airtightness testing method provided by this invention, by optimizing the airtightness testing process, achieves effective testing of the airtightness of the gas distribution plate, significantly avoids false qualified situations during the testing process, and significantly improves the stability of the gas distribution plate in use.

[0116] The present invention is described in detail through the above embodiments, but the present invention is not limited to the above detailed structural features, that is, it does not mean that the present invention must rely on the above detailed structural features to be implemented. Those skilled in the art should understand that any improvements to the present invention, equivalent substitutions for the components used in the present invention, additions of auxiliary components, and selection of specific methods, etc., all fall within the protection scope and disclosure scope of the present invention.

[0117] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present invention, various simple modifications can be made to the technical solution of the present invention, and these simple modifications all fall within the protection scope of the present invention.

[0118] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not describe the various possible combinations separately.

[0119] Furthermore, various different embodiments of the present invention can be combined in any way, as long as they do not violate the spirit of the present invention, they should also be regarded as the content disclosed by the present invention.

Claims

1. A method for detecting the airtightness of a gas distribution plate, characterized in that, The airtightness testing method includes: Obtain the operating conditions of the gas distribution disk used for vapor deposition; Set the airtightness testing parameters according to the operating conditions; The first airtightness test was performed on the gas distribution disk for vapor deposition based on the airtightness test parameters; If the first airtightness test is passed, the gas distribution disk for vapor deposition is used for the preset time under operating conditions. Subsequently, a second airtightness test is performed on the gas distribution disk for vapor deposition based on the airtightness test parameters. If the second airtightness test is qualified, it is recorded as qualified.

2. The airtightness testing method as described in claim 1, characterized in that, The operating conditions include: chamber temperature, chamber pressure, inlet gas pressure, and inlet gas flow rate.

3. The airtightness testing method as described in claim 2, characterized in that, The airtightness testing parameters include: ambient temperature, ambient pressure, inflation pressure, and inflation flow rate; Preferably, the airtightness testing parameters are set according to the operating conditions as follows: the ambient temperature is set to 1-1.2 times the chamber temperature, the ambient pressure is set to 1-1.2 times the chamber pressure, the inflation pressure is set to 1-1.2 times the input gas pressure, and the input gas flow rate is set to 1-1.2 times the input gas flow rate.

4. The airtightness testing method as described in claim 1, characterized in that, The first airtightness test includes: under ambient temperature and ambient pressure, injecting helium into a sealed gas distribution disk for vapor deposition at an inflation pressure and an inflation flow rate, and maintaining the pressure at a first time for a first period of time; Preferably, the first pressure is 1.4-1.6 times the inflation pressure; Preferably, the first time is 3-5 times the reaction time.

5. The airtightness testing method as described in claim 1, characterized in that, If the leakage rate < 1×10 -9 Pa·m 3 / s in the first airtightness test, it is recorded as qualified; otherwise, it is unqualified.

6. The airtightness testing method as described in claim 1, characterized in that, The preset time is the expected continuous working time of the gas distribution disk for vapor deposition.

7. The airtightness testing method as described in claim 1, characterized in that, The second airtightness test includes: under ambient temperature and ambient pressure, injecting helium gas into a sealed gas distribution disk for vapor deposition at an inflation pressure and an inflation flow rate, and maintaining the pressure at a second pressure for a second time; Preferably, the second pressure is 2-2.5 times the inflation pressure; Preferably, the second time is 10-20 times the reaction time; Preferably, in the second airtightness test, if the leakage rate < 1×10 -9 Pa·m 3 / s, it is recorded as qualified, otherwise it is unqualified.

8. A gas tightness testing device for a gas distribution plate, characterized in that, The airtightness detection device includes: The acquisition module is used to acquire the operating conditions of the gas distribution disk used for vapor deposition. The setting module is used to set the airtightness test parameters according to the operating conditions. The first detection module is used to perform a first airtightness test on the gas distribution disk for vapor deposition based on airtightness test parameters; The module is used to apply the gas distribution disk for vapor deposition to a preset time when the first airtightness test is passed; The second detection module is used to perform a second airtightness test on the gas distribution disk for vapor deposition based on airtightness detection parameters.

9. An electronic device, characterized in that, The electronic device includes: At least one processor; and a memory communicatively connected to said at least one processor; The memory stores a computer program that can be executed by the at least one processor, which is then executed by the at least one processor to enable the at least one processor to perform the gas tightness detection method for the gas distribution plate according to any one of claims 1-7.

10. A computer storage medium, characterized in that, The computer storage medium stores computer-executable instructions, which, when executed by a processor, implement the airtightness detection method for the gas distribution disk according to any one of claims 1-7.

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