Machining method of ultrathin tantalum sheet precision part

Abstract

The invention discloses a machining method of an ultrathin tantalum sheet precision part, which belongs to the field of mechanical precision machining, and aims at an ultrathin tantalum sheet which is less than or equal to 0.1 mm in thickness and strict in dimensional precision requirement, non-deformation temporary fixation of the tantalum sheet is realized by matching a fixed bottom plate with positioning glue, and then high-precision laser cutting, mixed acid liquid degumming separation and surface polishing cleaning are performed to obtain the ultrathin tantalum sheet precision part. And precise part machining is completed. The problems of deformation, displacement, adhesion and size out-of-tolerance of the ultrathin tantalum sheet caused by traditional numerical control, linear cutting and conventional laser cutting are effectively solved, the size tolerance of a machined finished product is smaller than or equal to + / -0.02 mm, the surface roughness is smaller than or equal to 0.8 micron, the requirements of high-end precise instruments such as a glow discharge mass spectrometer are completely met, the technology is simple, efficiency is high, the yield is stable, and the production cost is low. And the method is suitable for industrial production of ultrathin tantalum sheet precision parts.

Description

Technical Field

[0001] This invention belongs to the field of rare metal precision machining technology, specifically relating to a machining method for ultra-thin tantalum sheet precision components, particularly for high-purity ultra-thin tantalum sheets with a thickness ≤0.1mm. It is applicable to the precision cutting and forming of core precision components of glow discharge mass spectrometers (GDMS), and falls under the category of high-end analytical instrument supporting metal parts machining technology. Background Technology

[0002] Tantalum is a refractory metal with a high melting point, corrosion resistance, and excellent machinability, widely used in electronics, chemicals, aerospace, and precision instruments. Due to these excellent properties, tantalum sheet components are extensively used in glow discharge mass spectrometers (GDMS). These precision instruments require components with complex shapes and extremely high dimensional accuracy, especially ultra-thin tantalum sheet components with a thickness of less than 0.1 mm. The standard dimensional tolerance is within ±0.05 mm. Traditional CNC machining of ultra-thin tantalum sheets results in poor rigidity and severe deformation under stress, compromising accuracy. Wire EDM machining also presents challenges in clamping ultra-thin tantalum sheets, as the clamping process itself causes plastic deformation, similarly failing to meet accuracy requirements. Current technologies lack stable clamping and precision forming solutions for ultra-thin tantalum sheets, leading to low yield rates, high processing costs, and low efficiency, making it difficult to adapt to the stable mass production of precision instruments. Therefore, developing a high-precision, low-deformation, and stably implementable precision machining method for ultra-thin tantalum sheets has significant engineering value. Summary of the Invention

[0003] To address the shortcomings of existing technologies, the present invention aims to provide a method for processing ultrathin tantalum sheet precision components, solving technical problems such as easy deformation, displacement, and delamination during the processing of ultrathin tantalum sheets, achieving high-precision and mass-producible precision processing of ultrathin tantalum sheets, and ensuring that the dimensional accuracy and surface quality of the resulting components fully meet the requirements for use as core components of glow discharge mass spectrometers.

[0004] Technical solution A method for processing ultra-thin tantalum sheet precision parts, wherein the thickness of the ultra-thin tantalum sheet is ≤0.1mm, specifically including the following steps: (1) Select a flat metal plate with a thickness of 0.8~2mm as the fixing base plate; (2) Apply glue to the ultrathin tantalum sheet and stick it to the fixing base plate, press it flat and stick it, and let it stand at room temperature for 15~25min to cure; (3) Fix the fixing base plate with the ultrathin tantalum sheet to the laser cutting table, import the cutting pattern and then perform laser cutting; (4) Put the cut workpiece into the mixed acid solution to dissolve the glue layer, separate the ultrathin tantalum sheet from the fixing base plate, rinse and dry; (5) Polish and clean the surface of the ultrathin tantalum sheet and control the surface roughness ≤0.8μm.

[0005] Preferably: The fixed base plate is made of SUS304 stainless steel plate with a thickness of 1mm.

[0006] Preferably: The laser cutting table has a cutting power of 1800W and a cutting speed of 12m / min.

[0007] Preferably: The adhesive is an acid-soluble temporary positioning adhesive or an acid-soluble temporary positioning adhesive modified with nano tantalum powder.

[0008] Preferably: The acid-soluble temporary positioning adhesive components include: acid-soluble carboxyacrylate copolymer (44~50)%, anhydrous ethanol (41~46)%, dioctyl adipate (5~8)%, fumed silica (1~3)%, silane coupling agent KH-550 (0.5~1.5)%, silicone defoamer (0.3~0.7)%, and phenolic heat stabilizer (0.3~0.7)%.

[0009] Preferably: The method for preparing the acid-soluble temporary positioning adhesive is as follows: first, add anhydrous ethanol to a sealed stirred tank, then slowly add the acid-soluble carboxyacrylate copolymer, and stir at a constant speed of 300-500 r / min at room temperature until the copolymer is completely dissolved to form a uniform adhesive matrix; then add dioctyl adipate, fumed silica, silane coupling agent KH-550, organosilicon defoamer and phenolic heat stabilizer in sequence, and keep stirring for 1-1.5 h until the system is free of particle agglomeration and stratification.

[0010] Preferably: The nano-tantalum powder modified acid-soluble temporary positioning adhesive comprises: acid-soluble carboxylated acrylate copolymer (42~48)%, anhydrous ethanol (40~45)%, dioctyl adipate (5~7)%, fumed silica (1~2.5)%, high-purity nano-tantalum powder (0.5~2)%, silane coupling agent KH-550 (0.5~1.5)%, organosilicon defoamer (0.3~0.7)%, and phenolic heat stabilizer (0.3~0.7)%.

[0011] Preferably: The method for preparing the acid-soluble temporary positioning adhesive of nano tantalum powder is as follows: first, add anhydrous ethanol to a closed stirring vessel, then slowly add acid-soluble carboxyacrylate copolymer, and stir at a constant speed of 300-500 r / min at room temperature until the copolymer is completely dissolved to form a uniform adhesive matrix; then add dioctyl adipate, fumed silica, high-purity nano tantalum powder, silane coupling agent KH-550, organosilicon defoamer and phenolic heat stabilizer in sequence, and keep stirring for 1-1.5 h until the system is free of particle agglomeration and stratification.

[0012] Preferably: The ratio of the mixed acid solution is HCl:HNO3:HF:H2O = (6~8):(1~3):(0.5~1.5):(9~11).

[0013] Preferably: The soaking time is 15-25 minutes at room temperature. After being removed, the ultrathin tantalum sheet is rinsed with deionized water 3-5 times and then dried.

[0014] Beneficial effects The solutions designed in this invention all adopt the core approach of "adhesive binding + laser precision cutting + acid debinding," which has the following significant advantages compared to traditional processing techniques: 1. By using a flat metal base plate and bonding process, the problems of poor rigidity, easy warping and deformation, and processing displacement of ultra-thin tantalum sheets are completely solved. After processing, the dimensional tolerance of the parts is ≤ ±0.02mm, which is far better than the ±0.05mm accuracy standard required by GDMS equipment. 2. The process is simple, with room temperature bonding and acid degumming, which greatly shortens the processing cycle, reduces processing costs, and effectively improves the yield and production efficiency of ultra-thin tantalum sheet precision parts. 3. Laser cutting parameters are precise and controllable, eliminating the need for mechanical clamping and avoiding tantalum sheet indentation and damage. Processing efficiency and yield are significantly improved, and the entire process is repeatable and mass-producible, making it highly practical. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0016] Figure 1 This is a flowchart illustrating an embodiment of the present invention.

[0017] Figure 2 A diagram of a tantalum sheet component provided for an embodiment of the present invention. Detailed Implementation

[0018] To enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be described in detail below with reference to the accompanying drawings. The description in this part is only exemplary and explanatory, and should not be used to limit the scope of protection of the present invention in any way.

[0019] This embodiment provides a method for processing ultra-thin tantalum sheet precision components, wherein the thickness of the ultra-thin tantalum sheet is ≤0.1mm, and specifically includes the following steps: (1) Select a flat metal plate with a thickness of 0.8~2mm as the fixing base plate; (2) Apply glue to the ultrathin tantalum sheet and stick it to the fixing base plate, press it flat and stick it, and let it stand at room temperature for 15~25min to cure; (3) Fix the fixing base plate with the ultrathin tantalum sheet to the laser cutting table, import the cutting pattern and then perform laser cutting; (4) Put the cut workpiece into the mixed acid solution to dissolve the glue layer, separate the ultrathin tantalum sheet from the fixing base plate, rinse and dry; (5) Polish and clean the surface of the ultrathin tantalum sheet and control the surface roughness ≤0.8μm.

[0020] A flat metal plate with a thickness of 0.8-2mm is selected as the fixing base plate. This thickness range is determined by the requirements of tooling rigidity and lightweight design. A thickness less than 0.8mm is prone to deformation, affecting cutting accuracy; a thickness greater than 2mm increases tooling cost without any actual performance gain; 1mm is the optimal value that balances practicality and economy. Before use, the plate surface needs to be wiped with anhydrous ethanol to remove oil and dust, and then allowed to dry at room temperature. Positioning adhesive is evenly applied to the surface of the ultra-thin tantalum sheet, and then it is smoothly pasted onto the fixing base plate. It is allowed to stand at room temperature for 15-25 minutes. Less than 15 minutes will result in incomplete curing, potentially causing cutting displacement; more than 25 minutes will reduce processing efficiency. After pasting, the tantalum sheet should be tightly adhered to the fixing base plate, with no air bubbles at the edges. Seamless; the fixed base plate with the tantalum sheet firmly bonded to it is installed on the laser cutting table. The platform is leveled, the preset part cutting pattern is imported, and high-precision laser cutting is carried out according to the set parameters. This ensures accurate cutting path, no burrs on the edges, and no thermal deformation. The cut workpiece is then immersed in a well-mixed acid solution at room temperature. The acid corrodes the fixed base plate, creating a gap between the fixed base plate and the tantalum sheet. Once the adhesive layer is completely dissolved, the tantalum sheet part can be separated from the fixed base plate. After removal, it is rinsed and dried. The dried tantalum sheet part is then polished and cleaned to ultimately control the surface roughness of the part to ≤0.8μm, ensuring a smooth, residue-free, and deformation-free surface that meets the assembly requirements of high-end instruments.

[0021] This embodiment provides a processing method for ultra-thin tantalum sheet precision components, which adopts the core route of "adhesive bonding + laser precision cutting + acid debinding". Compared with traditional processing technology, it has the following significant advantages: 1. By using a flat metal base plate and bonding process, the problems of poor rigidity, easy warping and deformation, and processing displacement of ultra-thin tantalum sheets are completely solved. After processing, the dimensional tolerance of the parts is ≤ ±0.02mm, which is far better than the ±0.05mm accuracy standard required by GDMS equipment. 2. The process is simple, with room temperature bonding and acid degumming, which greatly shortens the processing cycle, reduces processing costs, and effectively improves the yield and production efficiency of ultra-thin tantalum sheet precision parts. 3. Laser cutting parameters are precise and controllable, eliminating the need for mechanical clamping and avoiding tantalum sheet indentation and damage, thus significantly improving processing efficiency and yield; the entire process is repeatable and can be mass-produced.

[0022] Furthermore: The base plate is made of SUS304 stainless steel plate with a thickness of 1mm.

[0023] Furthermore: The laser cutting table has a cutting power of 1800W and a cutting speed of 12m / min. Furthermore: The adhesive is an acid-soluble temporary positioning adhesive or an acid-soluble temporary positioning adhesive modified with nano tantalum powder.

[0024] Furthermore: The acid-soluble temporary positioning adhesive components include: acid-soluble carboxyacrylate copolymer (44~50)%, anhydrous ethanol (41~46)%, dioctyl adipate (5~8)%, fumed silica (1~3)%, silane coupling agent KH-550 (0.5~1.5)%, silicone defoamer (0.3~0.7)%, and phenolic heat stabilizer (0.3~0.7)%.

[0025] The core matrix polymer has insufficient bonding strength if it is below 44%, and excessive adhesive layer thickness if it is above 50%, which leads to uneven application and slow acid dissolution. Anhydrous ethanol is used as a diluent to regulate the viscosity of the adhesive. If it is outside the range, it is easy to cause layering or too fast curing. The other additives play the roles of toughening, anti-sagging, coupling, defoaming and heat resistance, respectively. The amount used is strictly controlled in the low range to avoid residue or corrosion of tantalum sheets.

[0026] Advantages: It uses conventional acid-soluble adhesives, the raw materials are readily available, the preparation is simple and the cost is low, the acid-soluble degumming speed is fast and non-corrosive, and it is suitable for conventional batch processing scenarios.

[0027] Furthermore: The preparation method of acid-soluble temporary positioning adhesive is as follows: first, add anhydrous ethanol to a closed stirring tank, then slowly add acid-soluble carboxyacrylate copolymer, and stir at a speed of 300-500 r / min at room temperature until the copolymer is completely dissolved to form a uniform adhesive matrix; then add dioctyl adipate, fumed silica, silane coupling agent KH-550, organosilicon defoamer and phenolic heat stabilizer in sequence, and keep stirring for 1~1.5h until the system is free of particle agglomeration and stratification.

[0028] Furthermore: The components of the nano-tantalum powder modified acid-soluble temporary positioning adhesive include: acid-soluble carboxyacrylate copolymer (42~48)%, anhydrous ethanol (40~45)%, dioctyl adipate (5~7)%, fumed silica (1~2.5)%, high-purity nano-tantalum powder (0.5~2)%, silane coupling agent KH-550 (0.5~1.5)%, organosilicon defoamer (0.3~0.7)%, and phenolic heat stabilizer (0.3~0.7)%.

[0029] This nano-tantalum powder modified acid-soluble temporary positioning adhesive is based on the acid-soluble temporary positioning adhesive formula with a slight adjustment to the ratio of matrix and auxiliary materials, leaving room for the addition of nano-tantalum powder. The addition of tantalum powder is less than 0.5% with no obvious modification effect, while more than 2% will result in strong particle texture of the adhesive and loose bonding interface. At the same time, it ensures that the overall viscosity, curing speed and acid solubility of the modified adhesive are consistent with the base adhesive, so that it can be adapted to a unified processing flow.

[0030] Advantages: The use of homogeneous nano tantalum powder modified adhesive has excellent interfacial compatibility with tantalum sheets, improved high temperature resistance, and the adhesive layer completely dissolves without residue after debonding, making it suitable for high-end precision parts processing.

[0031] Furthermore: The preparation method of acid-soluble temporary positioning adhesive of nano tantalum powder is as follows: first, anhydrous ethanol is added to a closed stirred tank, and then acid-soluble carboxyacrylate copolymer is slowly added. The mixture is stirred at a constant speed of 300-500 r / min at room temperature until the copolymer is completely dissolved to form a uniform adhesive matrix. Then, dioctyl adipate, fumed silica, high-purity nano tantalum powder, silane coupling agent KH-550, organosilicon defoamer and phenolic heat stabilizer are added in sequence. The mixture is stirred for 1-1.5 h until there is no particle agglomeration and no stratification in the system.

[0032] Furthermore: The ratio of the mixed acid solution is HCl:HNO3:HF:H2O = (6~8):(1~3):(0.5~1.5):(9~11).

[0033] Strictly control the proportion of hydrofluoric acid to avoid excessive corrosion of tantalum sheets; use hydrochloric acid and nitric acid in synergy to regulate the degumming rate; and dilute with pure water to reduce the risk of acid corrosion.

[0034] Furthermore: Soak for 15-25 minutes at room temperature. After removing the ultrathin tantalum sheet, rinse it with deionized water 3-5 times and then dry it.

[0035] No additional temperature control is required within the normal temperature range, making it suitable for batch processing in workshops. The time range ensures that the adhesive layer is completely dissolved and only a slight micron-level oxide layer is removed from the tantalum sheet surface, with no significant quality loss.

[0036] The technical solution of the present invention will be fully described below with reference to specific embodiments. The embodiments all use the preferred midpoint value or key limit value of the corresponding formula range to verify the feasibility of the whole range. Those skilled in the art can make equivalent adjustments within the range, all of which fall within the protection scope of the present invention. Example 1

[0037] This embodiment follows the technical solution of the present invention to process ultrathin tantalum sheet precision components for a 0.1mm thick glow discharge mass spectrometer (GDMS). The complete processing steps are as follows: (1) The base plate is made of SUS304 stainless steel plate with flat shape and no warping or deformation. The thickness is 1mm. Wipe the surface oil and dust with anhydrous ethanol and let it air dry for later use. (2) Apply positioning adhesive evenly to the surface of the ultrathin tantalum sheet, then flatly paste it onto the fixed base plate. Let it stand at room temperature for 20 minutes to allow the adhesive to dry completely. After pasting, the tantalum sheet is tightly attached to the fixed base plate with no bubbles or gaps at the edges. (3) Securely fix the base plate with the ultra-thin tantalum sheet attached to the laser cutting processing table, calibrate the equipment, import the preset cutting pattern, and set the laser cutting parameters: power 1800W, cutting speed 12m / min to complete the high-precision laser cutting. (4) The laser-cut workpiece is placed in the prepared mixed acid solution for acid treatment. The volume ratio of the mixed acid solution is HCl:HNO3:HF:H2O = 7:2:1:10. The acid treatment time is 20 minutes. After the acid treatment is completed, the ultra-thin tantalum sheet precision parts are automatically separated from the fixed base plate. The separated tantalum sheet is rinsed thoroughly with deionized water 4 times and then dried. (5) After drying, the ultra-thin tantalum sheet precision parts are surface polished and cleaned to control the surface roughness to ≤0.8μm. After the treatment, the ultra-thin tantalum sheet ( Figure 2 The dimensions of the part shown are inspected for accuracy, and the results are shown in the table below: Test results: The ultra-thin tantalum sheet precision parts processed in this embodiment have dimensional tolerances of ≤±0.02mm, which is far better than the design requirement of ±0.05mm. Only a slight micron-level oxide layer is removed from the tantalum sheet surface, with no obvious mass loss, and no deformation, no adhesive residue, and no melt adhesion, which fully meets the usage requirements of GDMS equipment. Example 2

[0038] This embodiment uses a basic acid-soluble adhesive, selects the midpoint of the component range for formulation, and uses an ultra-thin tantalum sheet with a thickness of 0.1 mm. The steps are as follows: (1) Use a 1mm thick SUS304 stainless steel plate as the base plate, wipe it with anhydrous ethanol to remove dirt, and let it air dry at room temperature. (2) Ingredients by mass percentage: 47g acid-soluble carboxyacrylate copolymer, 43g anhydrous ethanol, 6g dioctyl adipate, 2g fumed silica, 1g silane coupling agent KH-550, 0.5g silicone defoamer, and 0.5g phenolic heat stabilizer. Prepare the adhesive as follows: First, add anhydrous ethanol to a sealed stirred tank, then slowly add the acid-soluble carboxyacrylate copolymer. Stir at 400 r / min at room temperature until the copolymer is completely dissolved and a uniform liquid matrix is ​​formed. Then, add dioctyl adipate, fumed silica, silane coupling agent KH-550, silicone defoamer and phenolic heat stabilizer in sequence, and keep stirring for 1 hour until the system is free of particle agglomeration and stratification.

[0039] After the tantalum sheet is evenly coated with adhesive, it is pressed flat and attached to the base plate, and cured at room temperature for 20 minutes. (3) Fix it on the laser cutting table, import the cutting pattern and then cut it precisely according to the parameters of 1800W and 12m / min; (4) Prepare a mixed acid according to HCl:HNO3:HF:H2O=7:2:1:10, soak at room temperature (25℃) for 20 minutes to degumme, rinse with deionized water 4 times, and then dry. (5) Polishing and cleaning, controlling the surface roughness to ≤0.8μm. After processing, the ultrathin tantalum sheet ( Figure 2 The dimensions of the part shown are inspected for accuracy, and the results are shown in the table below: Test results: The dimensional tolerance of the ultra-thin tantalum sheet precision parts processed in this embodiment is ≤ ±0.02mm. Only a slight micron-level oxide layer is removed from the tantalum sheet surface, with no significant mass loss, no residue, and no deformation. It meets the requirements of conventional GDMS parts. The midpoint value of the formula can cover the entire range of components, and any ratio within the range can achieve the same effect. Example 3

[0040] This embodiment uses nano-tantalum powder to modify acid-soluble adhesive, selects the preferred midpoint value of the component range for formulation, and uses an ultra-thin tantalum sheet with a thickness of 0.1 mm. The steps are as follows: (1) Use a 1mm thick SUS304 stainless steel plate as the base plate, wipe it with anhydrous ethanol to remove dirt, and let it air dry at room temperature. (2) Ingredients by mass percentage: 45g acid-soluble carboxyacrylate copolymer, 42g anhydrous ethanol, 6g dioctyl adipate, 2g fumed silica, 1g high-purity nano tantalum powder, 1g silane coupling agent KH-550, 0.5g silicone defoamer, 0.5g phenolic heat stabilizer. Prepare the adhesive as follows: First, anhydrous ethanol was added to a sealed stirred tank, and then acid-soluble carboxyacrylate copolymer was slowly added. The mixture was stirred at 400 r / min at room temperature until the copolymer was completely dissolved and a uniform liquid matrix was formed. Then, dioctyl adipate, fumed silica, high-purity nano tantalum powder, silane coupling agent KH-550, organosilicon defoamer and phenolic heat stabilizer were added in sequence. The mixture was stirred for 1 hour until there was no particle agglomeration and no stratification in the system.

[0041] After the tantalum sheet is evenly coated with adhesive, it is pressed flat and attached to the base plate, and cured at room temperature for 20 minutes. (3) The laser cutting parameters are the same as in Example 1. After importing the cutting pattern, precise cutting is performed. (4) The mixing ratio of the mixed acid, degumming and cleaning steps are the same as in Example 2; (5) Polishing and cleaning, controlling the surface roughness to ≤0.8μm. After processing, the ultrathin tantalum sheet ( Figure 2 The dimensions of the part shown are inspected for accuracy, and the results are shown in the table below: Test results: The dimensional tolerance of the ultra-thin tantalum sheet precision parts processed in this embodiment is ≤ ±0.01mm. The adhesive layer can withstand the instantaneous high temperature of the laser without softening, cracking, shrinkage or displacement. The tantalum sheet bonding interface always remains flat without warping or misalignment, eliminating dimensional deviations caused by thermal deformation. Only a slight micron-level oxide layer is removed from the tantalum sheet surface, with no significant quality loss and no residue. The debonding process is pollution-free and suitable for the stringent requirements of high-end GDMS parts. Stable modification effects can be achieved with tantalum powder addition ranging from 0.5% to 2%.

[0042] Comparative Example Using traditional ultra-thin metal sheet processing methods in this field, the ultra-thin tantalum sheet thickness is also 0.1mm, and the processing steps are as follows: Without using a fixed base plate and bonding process, the ultrathin tantalum sheet is directly laid flat on the laser cutting worktable, and the edges of the tantalum sheet are simply clamped and fixed using mechanical clamps; (2) After importing the cutting pattern, the same laser cutting parameters as in Example 1 are used: power 1800W, cutting speed 12m / min, to directly cut the ultrathin tantalum sheet; (3) After cutting, the mechanical clamps are released, the tantalum sheet workpiece is removed, and it is thoroughly rinsed with deionized water 4 times, then dried. After the treatment, the ultrathin tantalum sheet ( Figure 2 The dimensions of the part shown are inspected for accuracy, and the results are shown in the table below: Test results: During the processing of this comparative example, the ultra-thin tantalum sheet showed obvious warping, displacement, and wavy deformation. The dimensional tolerance exceeded the ±0.05mm acceptable standard. Indentations and edge damage were produced at the mechanical clamping position, and there were many burrs on the cut edges. It could not meet the requirements for the use of GDMS parts, which fully demonstrated the technical defects of the traditional processing method and made it difficult to achieve stable mass production.

[0043] The comparative results show that the traditional mechanical clamping and glue-free fixing processing method cannot solve the technical problems of easy deformation, poor positioning and low precision of ultra-thin tantalum sheets. The present invention uses a special base plate and glue to fix the sheets, which significantly improves the processing accuracy and surface quality, and has outstanding technical advantages and industrial application value.

[0044] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. The above are merely preferred embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the technical scope disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be within the scope of protection of the present invention.

Claims

1. A method for processing ultra-thin tantalum sheet precision parts, characterized in that, The thickness of the ultrathin tantalum sheet is ≤0.1mm. The processing method includes the following steps: (1) Select a flat metal plate with a thickness of 0.8~2mm as a fixed base plate; (2) Apply glue to the ultrathin tantalum sheet and stick it to the fixed base plate, press it flat and stick it, and let it stand at room temperature for 15~25min to cure; (3) Fix the fixed base plate with the ultrathin tantalum sheet to the laser cutting table, import the cutting pattern and perform laser cutting; (4) Put the cut workpiece into the mixed acid solution to dissolve the glue layer, separate the ultrathin tantalum sheet from the fixed base plate, rinse and dry; (5) Polish and clean the surface of the ultrathin tantalum sheet and control the surface roughness to ≤0.8μm.

2. The processing method according to claim 1, characterized in that, In step (1), the base plate is a SUS304 stainless steel plate with a thickness of 1mm.

3. The processing method according to claim 1, characterized in that, The laser cutting table in step (3) has a cutting power of 1800W and a cutting speed of 12m / min.

4. The processing method according to claim 1, characterized in that, The adhesive mentioned in step (2) is an acid-soluble temporary positioning adhesive or an acid-soluble temporary positioning adhesive modified with nano tantalum powder.

5. The processing method according to claim 4, characterized in that, The acid-soluble temporary positioning adhesive components include: acid-soluble carboxyacrylate copolymer (44~50)%, anhydrous ethanol (41~46)%, dioctyl adipate (5~8)%, fumed silica (1~3)%, silane coupling agent KH-550 (0.5~1.5)%, silicone defoamer (0.3~0.7)%, and phenolic heat stabilizer (0.3~0.7)%.

6. The processing method according to claim 4, characterized in that, The method for preparing the acid-soluble temporary positioning adhesive is as follows: first, add anhydrous ethanol to a sealed stirred tank, then slowly add the acid-soluble carboxyacrylate copolymer, and stir at a constant speed of 300-500 r / min at room temperature until the copolymer is completely dissolved to form a uniform adhesive matrix; then add dioctyl adipate, fumed silica, silane coupling agent KH-550, organosilicon defoamer and phenolic heat stabilizer in sequence, and keep stirring for 1-1.5 h until the system is free of particle agglomeration and stratification.

7. The processing method according to claim 4, characterized in that, The nano-tantalum powder modified acid-soluble temporary positioning adhesive comprises: acid-soluble carboxyacrylate copolymer (42~48)%, anhydrous ethanol (40~45)%, dioctyl adipate (5~7)%, fumed silica (1~2.5)%, high-purity nano-tantalum powder (0.5~2)%, silane coupling agent KH-550 (0.5~1.5)%, organosilicon defoamer (0.3~0.7)%, and phenolic heat stabilizer (0.3~0.7)%.

8. The processing method according to claim 7, characterized in that, The method for preparing the acid-soluble temporary positioning adhesive of nano tantalum powder is as follows: first, add anhydrous ethanol to a closed stirring vessel, then slowly add acid-soluble carboxyacrylate copolymer, and stir at a constant speed of 300-500 r / min at room temperature until the copolymer is completely dissolved to form a uniform adhesive matrix; then add dioctyl adipate, fumed silica, high-purity nano tantalum powder, silane coupling agent KH-550, organosilicon defoamer and phenolic heat stabilizer in sequence, and keep stirring for 1-1.5 h until the system is free of particle agglomeration and stratification.

9. The processing method according to claim 1, characterized in that, In step (4), the ratio of the mixed acid solution is HCl:HNO3:HF:H2O = (6~8):(1~3):(0.5~1.5):(9~11).

10. The processing method according to claim 1, characterized in that, In step (4), the soaking time is 15-25 minutes and the temperature is room temperature. After taking it out, the ultrathin tantalum sheet is rinsed with deionized water 3-5 times and then dried.

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