J-shaped moving transmission valve

Abstract

The invention discloses a J-shaped moving transmission valve, and particularly relates to the technical field of valves, the J-shaped moving transmission valve comprises a valve body, a valve plate, a supporting piece, a damping air cylinder, a cam joint, a movable connecting piece, a push rod and an elastic supporting piece, a first hollow space is formed in the valve body, a channel is formed in the side wall of the valve body, and the channel communicates with the first hollow space; the valve plate is arranged in the first hollow space, one end of the supporting piece is connected with the valve body in a sliding mode, a penetrating space is formed in the middle of the supporting piece, the supporting piece is provided with at least two damping gaskets, and the damping air cylinder is connected with the end, away from the valve body, of the supporting piece. One end of the damping air cylinder is fixedly connected into the penetrating space. The transmission valve is simple in structure, low in failure risk, low in cost and relatively easy to assemble and maintain, the technical problem that vibration is relatively large when the transmission valve is opened or closed is solved, and the technical effect of reducing vibration is achieved.

Description

Technical Field

[0001] This invention relates to the field of valve technology, and more specifically, to a J-shaped motion transmission valve. Background Technology

[0002] Vacuum chambers in semiconductor equipment are usually arranged in a straight line or in a cluster. When processing wafers, gases need to be exchanged in different chambers. During the gas exchange process, the chambers are first evacuated and then the ionized process gases are released so that etching processes can be performed on the wafer surface. After the process is completed, the chamber needs to be evacuated of the process gas and then connected to the atmosphere before entering the next process. A vacuum valve is installed at the transfer chamber (TM end) of the vacuum chamber. By controlling the position of the sealing valve plate of the valve, the connection between the vacuum chamber and the atmosphere can be turned on or off.

[0003] With the development of semiconductor technology, the size of semiconductor wafers is getting smaller and smaller, which in turn increases the requirements for the sealing performance of vacuum chambers; Traditional PRESYS transfer valves use a straight-up-down valve plate transfer method, with one cylinder lifting and lowering the valve plate and another cylinder contacting / separating the valve plate from the valve body. Traditional VAT transfer valves employ L-Motion technology. The valve plate first moves vertically to the closed position, during which there is virtually no contact between the valve plate and the valve body, reducing the generation of friction particles. Furthermore, in the final movement phase, the valve plate is pushed horizontally onto the valve body. At this point, the seals on the valve plate contact the valve body with essentially the same pressure, ensuring a tight seal. However, the two types of transmission valves mentioned above use a rigid connection method for transmission (here, rigid connection means, for example, that the telescopic shaft on the cylinder is connected to the push rod by bolts, or that there is no elastic buffer structure), which results in relatively large vibrations when the transmission valve is opened or closed.

[0004] Therefore, a J-shaped motion transmission valve is proposed to address the above problems. Summary of the Invention

[0005] In order to overcome the above-mentioned defects of the prior art, the present invention provides a J-shaped motion transmission valve to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a J-shaped motion transmission valve, comprising a valve body, a valve plate, a support member, a shock-absorbing cylinder, a cam section, a movable connecting member, a push rod, and an elastic support member, wherein the valve body has a first hollow space, and the side wall of the valve body has a channel communicating with the first hollow space, and the valve plate is disposed in the first hollow space; One end of the support member is connected to the valve body, and the support member has a through space in the middle. The shock-absorbing cylinder is connected to the end of the support member away from the valve body, and one end of the shock-absorbing cylinder is fixedly connected in the through space. The end of the shock-absorbing cylinder away from the through space is located outside the through space. The cam section is connected to the shock-absorbing cylinder and is linked by the shock-absorbing cylinder. The cam section has an arc-shaped through groove. The movable connecting piece is slidably connected to the arc-shaped through groove. One end of the push rod is set in the through space and is connected to the movable connecting piece. The end of the push rod away from the movable connecting piece passes through the support and is fixedly connected to the valve plate. The elastic support is slidably connected within the through space, and the elastic support is disposed between the support, the shock-absorbing cylinder, and the push rod.

[0007] Preferably, the support member includes two sets of support blocks and connecting blocks, and the two sets of support blocks are symmetrically spaced apart. The support member has at least two shock-absorbing pads. One end of the support block is connected to the valve body, and the inner wall of the support block is provided with a groove. The groove is a waist-shaped groove, and a shock-absorbing pad is fixedly connected to the inner side of the end of the groove. The connecting block is connected to one end of the support block, and a through space is provided between the connecting block and the support block. One end of the push rod is inserted into the connecting block.

[0008] By adopting the above solution, due to the presence of elastic support components, the damping pads and damping cylinders themselves have a damping effect, and the movable connection between the arc-shaped through groove on the cam section and the movable connecting component, the purpose of reducing vibration is achieved compared with the rigid connection method in the prior art. Furthermore, the weight of the bellows assembly, push rod, and valve plate is less than the force required for the second spring to deform. During the valve closing process, the second spring is compressed and deformed, which plays a buffering role, preventing the impact from generating particles, and at the same time reducing the control of pneumatic pressure.

[0009] Preferably, the shock-absorbing cylinder includes a cylinder body, a first cover plate, a first shock-absorbing ring, a piston structure, and a second shock-absorbing ring. The cylinder body is connected to a support member, and a second hollow space is provided inside the cylinder body. A first air nozzle and a second air nozzle are connected inside the cylinder body, and the first air nozzle and the second air nozzle are spaced apart. The first cover plate is connected to the end of the cylinder body and is disposed outside the through space to seal one end of the second hollow space. The first shock absorber is fixedly connected to the inner wall of the first cover plate and is disposed in the second hollow space. The piston structure is slidably connected in the second hollow space. The second hollow space inside the cylinder is divided into a first space and a second space. The first space is connected to the first air nozzle, and the second space is connected to the second air nozzle. The piston structure is connected to the cam section, and the piston structure is in contact with the elastic support member. The second shock absorber ring is fixedly sleeved on the piston structure, and the magnetic ring is fixedly connected to the piston structure. The magnetic ring sensor is fixedly connected to the cylinder body.

[0010] Magnetic rings and magnetic ring sensors are used to test the opening and closing status of valves, thus achieving the purpose of detecting the opening and closing status of valves.

[0011] Preferably, the piston structure includes a piston, a pressure block, a piston rod, a first sealing ring, and a second sealing ring. The piston is slidably connected in the second hollow space, and at least one set of first connecting bolts connects the piston, the pressure block, and the cam section to the piston structure. The first connecting bolts press the magnetic ring between the piston and the pressure block. One end of the piston rod is fixedly connected to the piston, and the end of the piston rod away from the piston is in contact with the elastic support. The two ends of the piston rod are respectively connected to the sleeve push rod and the cam section, and the piston rod and the piston are connected by a second shock absorber ring. The first sealing ring is fitted between the piston and the cylinder, and the second sealing ring is fitted between the cylinder and the piston rod.

[0012] By adopting the above solution, both the first and second sealing rings are O-rings, ensuring sealing performance; and because the second damping ring is a flexible structure, when the piston structure moves towards the valve body, the second damping ring contacts the cylinder, reducing the vibration noise generated by the collision.

[0013] Preferably, the self-locking component is fixedly connected to the side wall of the cylinder, and a slot is provided on the outer side of the piston. The self-locking component is used to engage with the slot on the piston when the valve plate closes the channel. The self-locking component includes a side seat and a locking block, and the side seat is fixedly connected to the outer wall of the cylinder body. A first stepped through hole is provided in the side seat. A first spring is movably inserted into the first stepped through hole, and one end of the first spring protrudes out of the first stepped through hole; The cylinder body has a second stepped through hole, and the locking block is connected in the second stepped through hole. The cylinder body is engaged with the slot through the locking block. A third sealing ring is connected between the side seat and the locking block, and a fourth sealing ring is connected between the locking block and the cylinder body.

[0014] By adopting the above scheme, both the third and fourth sealing rings are O-rings. When the locking block contacts the third sealing ring, the flexible structure of the third sealing ring not only reduces the vibration and noise generated by the collision, but also ensures the sealing performance. When pressurized gas is introduced through the first gas nozzle, the pressurized gas enters the first space, pushing the piston structure to move towards the valve body. The outer chamfer on one end of the piston (the outer chamfer helps to push the locking block and prevents it from colliding and getting stuck) contacts the locking block, pushing the locking block to move along the second stepped through hole. The first spring is compressed until the slot aligns with the locking block. Under the action of the first spring, the locking block is locked into the slot, thus positioning the piston structure. At this time, the valve plate closes the channel. Because the piston structure is positioned, if there is an accidental gas interruption and the pressure of the pressurized gas in the first space is insufficient, the piston structure will not move. The valve plate will always close the channel, achieving the purpose of self-locking and ensuring the closing effect of the high-cleanliness transmission valve.

[0015] Preferably, the cam section includes a circular block and a convex plate, and the circular block is fixedly connected to the first connecting bolt, the convex plate is fixedly connected to the top of the circular block, and an arc-shaped through groove is formed in the convex plate, and the convex plate is inserted and connected to one end of the push rod.

[0016] By adopting the above solution, the arc-shaped through groove facilitates the movement of the movable connector, providing a flexible connection. Compared with the rigid connection method in the prior art, this reduces vibration. Moreover, the arc-shaped structure of the through groove acts as a guide. When the movable connector moves along the position, it moves together with the push rod. The push rod links the valve plate to open or close the channel, resulting in less friction between the valve plate and the valve body when the valve plate moves in the first hollow space, thus reducing the generation of friction particles.

[0017] Preferably, the movable connector includes a bearing and a pin, and the movable connector slides in the arc-shaped through groove. The movable connector is fixedly connected to the push rod, the bearing, and the convex plate by the pin. The two ends and the middle of the arc-shaped through groove are respectively the opening section, the closing section, and the transition section.

[0018] By adopting the above solution, the bearing rolls along the arc-shaped groove, resulting in relatively low frictional resistance and preventing jamming. When the cam section is linked by the damping cylinder, the movable connecting part moves along the arc-shaped groove, and the push rod links the valve plate to open or close the channel.

[0019] Preferably, the elastic support includes a bellows assembly and a second spring, wherein the bellows assembly is inserted into the through space, the bellows assembly is inserted between the support and the push rod, and the second spring is connected between the piston structure and the bellows assembly; The bellows assembly includes a bellows and a bellows outer seat, with the bellows sleeved on the outside of the push rod. One end of the bellows is connected to a support, and the end of the bellows away from the support contacts a protrusion on the push rod. A fifth sealing ring is connected between the bellows and the support, and a sixth sealing ring is connected between the bellows and the push rod. One end of the corrugated pipe outer seat is in contact with the push rod, and the end of the corrugated pipe outer seat away from the push rod is fixedly sleeved on the outside of the corrugated pipe; at least one set of second connecting bolts is connected between the corrugated pipe outer seat and the push rod, and there are two sets of mutually symmetrical rings on the corrugated pipe outer seat, and the two sets of rings are slidably connected to the two sets of sliding grooves one-to-one.

[0020] By adopting the above scheme, both the fifth and sixth sealing rings are O-rings, ensuring the sealing of the connection; the bellows outer seat and the bellows are spaced apart, forming a barrier and limiting the bellows, preventing the bellows from twisting and breaking during compression or rebound; the ring sleeve slides along the groove, forming a guide, which helps the bellows assembly to always move along a straight line without getting stuck; when the piston structure pushes the second spring, the second spring is compressed and moves along the push rod, forming a buffer, reducing the vibration noise generated by the collision, and when the piston structure continues to push, as the second spring is compressed, the second spring will move along with the bellows assembly, thereby moving the push rod.

[0021] Preferably, two sets of symmetrical second cover plates are connected between the connecting block and the shock-absorbing cylinder, the two sets of second cover plates are connected between the two sets of support blocks, and the two sets of second cover plates and the two sets of support blocks cover the through space; When the valve is opened, the piston is located at the lower end of the shock-absorbing cylinder, the second spring releases its elastic force, and the connection between the push rod and the cam section is in state one. At this time, the movable connecting part is located in the opening section of the cam section. When the valve is closed, the piston is located at the upper end of the shock-absorbing cylinder, the second spring is compressed, and the connection between the push rod and the cam section is in state two. At this time, the movable connecting piece is located in the closed section of the cam section.

[0022] By adopting the above solution, the second cover plate is a plate-shaped structure, which is connected to the connecting block and the shock-absorbing cylinder by internal hexagon bolts, thus forming protection and being relatively aesthetically pleasing.

[0023] The technical effects and advantages of this invention are as follows: 1. Compared with existing technologies, this J-shaped motion transmission valve has a simple structure, low failure risk, low cost, and is relatively easy to assemble and maintain. It also overcomes the technical problem of relatively large vibrations when the transmission valve is opened or closed, achieving a reduction in vibration. It is practical. The damping cylinder actuates, triggering the elastic support component. The elastic support component moves along the support component and push rod, moving in tandem with the push rod. The push rod then moves the valve plate in the first hollow space. The cam section and damping cylinder actuate together, and the movable connecting component moves along the arc-shaped groove on the cam section until the cam section is in position. The cam section then abuts against the movable connecting component, and the push rod closes the valve plate's passage in the valve body. At this point, the elastic support component partially contacts the damping pad. Due to the presence of the elastic support component, the damping pad, and the damping cylinder themselves, they all have a damping effect. Furthermore, the arc-shaped groove on the cam section and the movable connecting component provide a smooth connection, achieving vibration reduction compared to the rigid connection method in existing technologies. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the overall assembly structure of the present invention; Figure 2 For the present invention Figure 1 A schematic diagram of the structure after removing the valve body and valve plate and adding the second cover plate; Figure 3 For the present invention Figure 2 One of the partial sectional views; Figure 4 For the present invention Figure 2 Partial sectional view two; Figure 5 This is a partial sectional view of the shock-absorbing cylinder, cam section, movable connector and push rod of the present invention after connection; Figure 6 This is a partial cross-sectional view of the support member, push rod, and elastic support member of the present invention after they are connected. Figure 7 A partial cross-sectional view showing the position of the movable connector in the arc-shaped through groove when the channel on the valve body of the present invention is opened; Figure 8 This is a schematic diagram of the cam section of the present invention; Figure 9 This is a partial cross-sectional view of the self-locking component of the present invention connected to the cylinder body.

[0025] The attached figures are labeled as follows: 10, valve body; 11, channel; 20, valve plate; 30, support member; 31, through space; 32, shock-absorbing pad; 30-1, support block; 30-11, slide groove; 30-2, connecting block; 40, shock-absorbing cylinder; 40-1, cylinder body; 40-11, first space; 40-12, second space; 40-2, first air nozzle; 40-3, second air nozzle; 40-4, first cover plate; 40- 5. First damping ring; 40-6. Piston structure; 40-61. Piston; 40-61-1. Slot; 40-61-2. Outer chamfer; 40-62. Pressure block; 40-63. First connecting bolt; 40-64. Piston rod; 40-65. First sealing ring; 40-66. Second sealing ring; 40-7. Second damping ring; 40-8. Magnetic ring; 40-9. Magnetic ring sensor; 40-10. Self-locking component; 40-10-1, Side seat; 40-10-11, First stepped through hole; 40-10-2, First spring; 40-10-3, Locking block; 40-1-1, Second stepped through hole; 40-10-4, Third sealing ring; 40-10-5, Fourth sealing ring; 50, Cam section; 51, Arc-shaped through groove; 51-1, Opening section; 51-2, Closing section; 51-3, Transition section; 50-1, Circular block; 5 0-2, convex plate; 60, movable connecting piece; 60-1, bearing; 60-2, pin; 70, push rod; 70-1, protrusion; 80, elastic support; 81, bellows assembly; 81-1, bellows; 81-2, fifth sealing ring; 81-3, sixth sealing ring; 81-4, bellows outer seat; 81-5, second connecting bolt; 81-6, ring sleeve; 82, second spring; 90, second cover plate. Detailed Implementation

[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] As attached Figures 1 to 9 The J-shaped motion transmission valve shown includes a valve body 10, a valve plate 20, a support member 30, a shock-absorbing cylinder 40, a cam section 50, a movable connecting member 60, a push rod 70, and an elastic support member 80. The valve body 10 has a first hollow space inside, and the side wall of the valve body 10 has a channel 11 that communicates with the first hollow space. The valve plate 20 is disposed in the first hollow space. One end of the support member 30 is connected to the valve body 10. The support member 30 has a through space 31 in the middle. The shock-absorbing cylinder 40 is connected to the end of the support member 30 away from the valve body 10. One end of the shock-absorbing cylinder 40 is fixedly connected in the through space 31. The end of the shock-absorbing cylinder 40 away from the through space 31 is located outside the through space 31. The cam section 50 is connected to the shock-absorbing cylinder 40 and is linked by the shock-absorbing cylinder 40. The cam section 50 has an arc-shaped through groove 51. The movable connecting piece 60 is slidably connected to the arc-shaped through groove 51. One end of the push rod 70 is set in the through space 31 and is connected to the movable connecting piece 60. The end of the push rod 70 away from the movable connecting piece 60 passes through the support piece 30 and is fixedly connected to the valve plate 20. The elastic support 80 is slidably connected within the through space 31, and the elastic support 80 is disposed between the support 30, the shock-absorbing cylinder 40 and the push rod 70; as the shock-absorbing cylinder 40 moves, the elastic support 80 moves along the support 30 and the push rod 70, and moves together with the push rod 70; after the elastic support 80 moves into place, it partially contacts the shock-absorbing pad 32. Specifically, during implementation, the shock-absorbing cylinder 40 actuates, which in turn actuates the elastic support 80. The elastic support 80 moves along the support 30 and the push rod 70, and moves together with the push rod 70. The push rod 70 moves together with the valve plate 20 in the first hollow space. The cam section 50 actuates together with the shock-absorbing cylinder 40, and the movable connecting piece 60 moves along the arc-shaped through groove 51 on the cam section 50 until the cam section 50 moves into place. The cam section 50 then abuts against the movable connecting piece 60, and the push rod 70 closes the channel 11 on the valve body 10. At this time, the elastic support 80 partially contacts the shock-absorbing pad 32.

[0028] In a preferred embodiment, the support member 30 includes two sets of support blocks 30-1 and connecting blocks 30-2, and the two sets of support blocks 30-1 are symmetrically spaced apart. The support member 30 has at least two shock-absorbing pads 32. One end of the support block 30-1 is connected to the valve body 10, and the inner wall of the support block 30-1 is provided with a groove 30-11. The groove 30-11 is a waist-shaped groove, and the shock-absorbing pad 32 is fixedly connected to the inner side of the end of the groove 30-11. The connecting block 30-2 is connected to one end of the support block 30-1, and a through space 31 is provided between the connecting block 30-2 and the support block 30-1. One end of the push rod 70 is inserted into the connecting block 30-2. The connecting block 30-2 is connected between the support blocks 30-1 and the support blocks 30-1 through internal hex bolts, which makes assembly relatively convenient and ensures structural reliability. Furthermore, the combination of the support blocks 30-1 and the connecting block 30-2 facilitates assembly with the valve body 10. The support blocks 30-1 and the valve body 10 are connected through internal hex bolts, which makes assembly relatively convenient. The chute 30-11 forms a guide, which is conducive to the bellows assembly 81 always moving along a straight line; and by setting the through space 31, it is convenient to arrange other components, and the structure is relatively compact. A shock-absorbing pad 32, such as a rubber pad, is provided and is bonded to the inner wall of the end of the slide groove 30-11. When the ring 81-6 contacts the shock-absorbing pad 32, it does not make a hard collision, thus reducing the vibration noise generated by the collision.

[0029] In a preferred embodiment, the shock-absorbing cylinder 40 includes a cylinder body 40-1, a first cover plate 40-4, a first shock-absorbing ring 40-5, a piston structure 40-6, and a second shock-absorbing ring 40-7. The cylinder body 40-1 is connected to the support member 30, and a second hollow space is provided inside the cylinder body 40-1. A first air nozzle 40-2 and a second air nozzle 40-3 are connected inside the cylinder body 40-1, and the first air nozzle 40-2 and the second air nozzle 40-3 are spaced apart. The first cover plate 40-4 is connected to the end of the cylinder body 40-1, and the first cover plate 40-4 is disposed outside the through space 31 to seal one end of the second hollow space. The first shock absorber ring 40-5 is fixedly connected to the inner wall of the first cover plate 40-4, and the first shock absorber ring 40-5 is disposed in the second hollow space; The piston structure 40-6 is slidably connected in the second hollow space. The second hollow space inside the cylinder 40-1 is divided into a first space 40-11 and a second space 40-12. The first space 40-11 is connected to the first air nozzle 40-2, and the second space 40-12 is connected to the second air nozzle 40-3. The piston structure 40-6 is connected to the cam section 50, and the piston structure 40-6 is in contact with the elastic support member 80. The second damping ring 40-7 is fixedly sleeved on the piston structure 40-6; the magnetic ring 40-8 is fixedly connected to the piston structure 40-6; and the magnetic ring sensor 40-9 is fixedly connected to the cylinder 40-1. The piston 40-61, pressure block 40-62, and cam section 50 are connected by a first connecting bolt 40-63, which is relatively easy to assemble. The first connecting bolt 40-63 is an internal hex bolt. One end of the piston rod 40-64 is threaded to the piston 40-61, which is relatively easy to assemble. The piston rod 40-64 has a stepped through space in the middle, which is conducive to setting up the cam section 50, movable connecting piece 60, push rod 70, and second spring 82, making assembly relatively convenient. The first sealing ring 40-65 and the second sealing ring 40-66 are O-rings, which ensure the sealing performance. When the piston structure 40-6 moves towards the valve body 10, the second damping ring 40-7 contacts the cylinder body 40-1. Since the second damping ring 40-7 is a flexible structure, it reduces the vibration noise generated by the collision. The magnetic ring 40-8 and the magnetic ring sensor 40-9 are common structures in the prior art, used to test the opening and closing status of valves. For example, the Hall magnetic ring sensor is used to detect the position of the magnetic ring 40-8. Since the magnetic ring 40-8 is set on the piston structure 40-6, it can detect the position of the piston structure 40-6, thus achieving the purpose of detecting the opening and closing status of the valve. Those skilled in the art, after seeing the disclosed content, can directly and without doubt know how to set it up, without needing to expend creative effort or conduct excessive experiments.

[0030] In a preferred embodiment, the piston structure 40-6 includes a piston 40-61, a pressure block 40-62, a piston rod 40-64, a first sealing ring 40-65, and a second sealing ring 40-66. The piston 40-61 is slidably connected in the second hollow space, and at least one set of first connecting bolts 40-63 connects the piston 40-61, the pressure block 40-62, and the cam section 50 to the piston structure 40-6. The first connecting bolts 40-63 press the magnetic ring 40-8 between the piston 40-61 and the pressure block 40-62. One end of the piston rod 40-64 is fixedly connected to the piston 40-61, and the end of the piston rod 40-64 away from the piston 40-61 is in contact with the elastic support 80. The two ends of the piston rod 40-64 are respectively sleeved and connected to the sleeved push rod 70 and the cam section 50, and the piston rod 40-64 and the piston 40-61 are sleeved and connected to the second damping ring 40-7. The first sealing ring 40-65 is fitted between the piston 40-61 and the cylinder 40-1, and the second sealing ring 40-66 is fitted between the cylinder 40-1 and the piston rod 40-64; The cylinder body 40-1 and the support block 30-1 are connected by hexagon socket head cap screws, which makes assembly relatively convenient. The first air nozzle 40-2 or the second air nozzle 40-3 is a common structure in the prior art. It is connected to the side wall of the cylinder body 40-1, which is conducive to the entry and exit of pressurized gas. Those skilled in the art can directly and without doubt know how to set it up after seeing the disclosed content, without having to do creative work or conduct excessive experiments. When pressurized gas is introduced through the first gas nozzle 40-2, the pressurized gas enters the first space 40-11, pushing the piston structure 40-6 to move towards the valve body 10. The piston structure 40-6, in conjunction with the cam section 50, movable connecting piece 60, push rod 70, elastic support piece 80 and valve plate 20, moves until the valve plate 20 closes the channel 11. When pressurized gas is introduced through the second gas nozzle 40-3, the pressurized gas enters the second space 40-12, pushing the piston structure 40-6 to move towards the first cover plate 40-4. The piston structure 40-6, in conjunction with the cam section 50, movable connecting piece 60, push rod 70, elastic support piece 80 and valve plate 20, moves until the valve plate 20 opens the channel 11. The first cover plate 40-4 is a square plate structure, which is connected to the cylinder body 40-1 by internal hex bolts, making assembly relatively convenient; the first damping ring 40-5 is an O-ring, which is set in a groove on the inner wall of the first cover plate 40-4. When the piston structure 40-6 moves towards the first cover plate 40-4, the piston structure 40-6 contacts the first damping ring 40-5. Since the first damping ring 40-5 is a flexible structure, it reduces the vibration noise generated by the collision. In a preferred embodiment, the self-locking member 40-10 is fixedly connected to the side wall of the cylinder 40-1, and the piston 40-61 has a slot 40-61-1 on its outer side. The self-locking member 40-10 is used to engage with the slot 40-61-1 on the piston 40-61 when the valve plate 20 closes the channel 11. The self-locking component 40-10 includes a side seat 40-10-1 and a locking block 40-10-3, and the side seat 40-10-1 is fixedly connected to the outer wall of the cylinder body 40-1. A first stepped through hole 40-10-11 is provided in the side seat 40-10-1. A first spring 40-10-2 is movably inserted into the first stepped through hole 40-10-11, and one end of the first spring 40-10-2 protrudes from the first stepped through hole 40-10-11. A second stepped through hole 40-1-1 is provided inside the cylinder body 40-1, and a locking block 40-10-3 is connected inside the second stepped through hole 40-1-1, and the cylinder body 40-1 is engaged with the slot 40-61-1 through the locking block 40-10-3. A third sealing ring 40-10-4 is connected between the side seat 40-10-1 and the locking block 40-10-3, and a fourth sealing ring 40-10-5 is connected between the locking block 40-10-3 and the cylinder body 40-1.

[0031] The side seat 40-10-1 and the cylinder 40-1 are connected by hexagon socket bolts, which makes assembly relatively convenient; the first stepped through hole 40-10-11 is conducive to positioning the first spring 40-10-2, and the first spring 40-10-2 is a commonly used structure in the prior art, such as a cylindrical spring; The locking block 40-10-3 has a roughly "T" shaped structure, is located at the second step through hole 40-1-1, and can move along the second step through hole 40-1-1. Both the third sealing ring 40-10-4 and the fourth sealing ring 40-10-5 are O-rings. When the locking block 40-10-3 contacts the third sealing ring 40-10-4, the third sealing ring 40-10-4 has a flexible structure, which not only reduces the vibration and noise generated by the collision, but also ensures the sealing performance. When pressurized gas is introduced through the first air nozzle 40-2, the pressurized gas enters the first space 40-11, pushing the piston structure 40-6 to move towards the valve body 10. The outer chamfer 40-61-2 on one end of the piston 40-61 (the outer chamfer 40-61-2 facilitates pushing the locking block 40-10-3 and will not collide with or jam the locking block 40-10-3) contacts the locking block 40-10-3, pushing the locking block 40-10-3 to move along the second stepped through hole 40-1-1. The first spring 40-10-2 is compressed until it reaches the slot 4. When 0-61-1 is aligned with the locking block 40-10-3, under the action of the first spring 40-10-2, the locking block 40-10-3 is engaged in the slot 40-61-1, thereby positioning the piston structure 40-6. At this time, the valve plate 20 closes the channel 11. Since the piston structure 40-6 is positioned, if an accidental gas interruption occurs and the pressure of the pressurized gas in the first space 40-11 becomes insufficient, the piston structure 40-6 will not move. The valve plate 20 will always close the channel 11, achieving the purpose of self-locking and ensuring the closing effect of the high-cleanliness transmission valve. When it is necessary to open channel 11, pressurized gas is introduced through the second air nozzle 40-3. The pressurized gas enters the second space 40-12 and the second stepped through hole 40-1-1, pushing the locking block 40-10-3 to move along the second stepped through hole 40-1-1. The first spring 40-10-2 is compressed, the locking block 40-10-3 moves out of the slot 40-61-1, and the piston structure 40-6 moves towards the first cover plate 40-4. The piston structure 40-6 is linked to the cam section 50, the movable connecting piece 60, the push rod 70, the elastic support piece 80, and the valve plate 20 to move until the valve plate 20 opens channel 11.

[0032] In a preferred embodiment, the cam section 50 includes a circular block 50-1 and a convex plate 50-2. The circular block 50-1 is fixedly connected to the first connecting bolt 40-63, and the convex plate 50-2 is fixedly connected to the top of the circular block 50-1. An arc-shaped through groove 51 is provided in the convex plate 50-2, and the convex plate 50-2 is inserted and connected to one end of the push rod 70.

[0033] The circular block 50-1 is connected to the first connecting bolt 40-63, which is relatively easy to assemble; the convex plate 50-2 is inserted into one end of the push rod 70, which is also relatively easy to assemble. The arc-shaped through groove 51 facilitates the movement of the movable connector 60, providing a flexible connection. Compared to the rigid connection method in the prior art, this reduces vibration. Furthermore, the arc-shaped structure of the through groove 51 acts as a guide. When the movable connector 60 moves, it moves together with the push rod 70. The push rod 70, in conjunction with the valve plate 20, opens or closes the channel 11. This results in relatively low friction between the valve plate 20 and the valve body 10 when the valve plate 20 moves in the first hollow space, reducing the generation of friction particles.

[0034] In a preferred embodiment, the movable connector 60 includes a bearing 60-1 and a pin 60-2, and the movable connector 60 slides in the arc-shaped through groove 51. The movable connector 60 is fixedly connected to the push rod 70, the bearing 60-1, and the convex plate 50-2 by the pin 60-2. The two ends and the middle of the arc-shaped through groove 51 are respectively the opening section 51-3, the closing section 51-4, and the transition section 51-5.

[0035] Bearing 60-1 is a common structure in the prior art, such as a deep groove ball bearing. It rolls along the arc-shaped through groove 51, resulting in relatively low frictional resistance and preventing jamming. Pin 60-2 is a common structure in the prior art, used to connect the push rod 70, bearing 60-1, and convex plate 50-2, and is relatively easy to assemble. One end of the push rod 70 is connected to the movable connector 60 and the cam section 50, and the other end passes through the support 30 and is connected to the valve plate 20. When the cam section 50 is linked by the damping cylinder 40, the movable connector 60 moves along the arc-shaped through groove 51, and the push rod 70 links the valve plate 20 to open or close the channel 11.

[0036] In a preferred embodiment, the elastic support 80 includes a bellows assembly 81 and a second spring 82, with the bellows assembly 81 inserted into the through space 31 and the bellows assembly 81 inserted between the support 30 and the push rod 70, and the second spring 82 connected between the piston structure 40-6 and the bellows assembly 81. The bellows assembly 81 includes a bellows 81-1 and a bellows outer seat 81-4. The bellows 81-1 is sleeved on the outside of the push rod 70. One end of the bellows 81-1 is connected to the support 30, and the end of the bellows 81-1 away from the support 30 is in contact with the protrusion 70-1 on the push rod 70. A fifth sealing ring 81-2 is connected between the bellows 81-1 and the support 30, and a sixth sealing ring 81-3 is connected between the bellows 81-1 and the push rod 70. One end of the bellows outer seat 81-4 is in contact with the push rod 70, and the end of the bellows outer seat 81-4 away from the push rod 70 is fixedly sleeved on the outside of the bellows 81-1; at least one set of second connecting bolts 81-5 is connected between the bellows outer seat 81-4 and the push rod 70, and there are two sets of mutually symmetrical rings 81-6 on the bellows outer seat 81-4, and the two sets of rings 81-6 are slidably connected to the two sets of sliding grooves 30-11 one by one; The bellows 81-1 is a commonly used structure in the prior art. One end is connected to the connecting block 30-2 by an internal hex bolt, which is relatively easy to assemble. The fifth sealing ring 81-2 and the sixth sealing ring 81-3 are both O-rings, which ensures the sealing performance. The outer bellows seat 81-4 surrounds the bellows 81-1 and is spaced apart from the bellows 81-1, forming a barrier and limiting the position of the bellows 81-1 to prevent it from twisting and breaking during compression or rebound. It is equipped with protrusions 70-1, such as circular protrusions, which can be linked to the compression of the bellows 81-1. The second connecting bolt 81-5 is a threaded pin, threadedly connected to the outer bellows seat 81-4, pressing against the push rod 70 to ensure a reliable connection between the outer bellows seat 81-4 and the push rod 70. The ring 81-6 slides along the groove 30-11, forming a guide, which helps the bellows assembly 81 to always move along a straight line without jamming. The second spring 82 is a common structure in the prior art, such as a cylindrical spring. When the piston structure 40-6 pushes the second spring 82, the second spring 82 is compressed and moves along the push rod 70, forming a buffer and reducing the vibration noise generated by the collision. When the piston structure 40-6 continues to push, as the second spring 82 is compressed, the second spring 82 will move along with the bellows assembly 81, thereby moving the push rod 70.

[0037] In a preferred embodiment, two sets of mutually symmetrical second cover plates 90 are connected between the connecting block 30-2 and the shock-absorbing cylinder 40. The two sets of second cover plates 90 are connected between the two sets of support blocks 30-1, and the two sets of second cover plates 90 and the two sets of support blocks 30-1 cover the through space 31. When the valve is opened, the piston 40-61 is located at the lower end of the shock-absorbing cylinder 40, the second spring 82 releases its elastic force, and the connection between the push rod 70 and the cam section 50 is in state one. At this time, the movable connecting piece 60 is located in the opening section of the cam section. When the valve is closed, the piston 40-61 is located at the upper end of the damping cylinder 40, the second spring 82 is compressed, and the connection between the push rod 70 and the cam section 50 is in state two. At this time, the movable connecting piece 60 is located in the closed section of the cam section 50. The second cover plate 90 is a plate-shaped structure, which is connected to the connecting block 30-2 and the shock-absorbing cylinder 40 by internal hex bolts, forming a protective structure that is also relatively aesthetically pleasing.

[0038] Furthermore, when the piston 40-61 pushes the second spring 82, the second spring 82 is compressed and moves along the push rod 70, forming a buffer and reducing the vibration noise generated by the collision. As the piston 40-61 continues to push, with the compression of the second spring 82, the second spring 82 will move along with the elastic support 80, thereby moving the push rod 70. When the valve is closed, the piston 40-61 is located at the upper end of the shock-absorbing cylinder 40, the second spring 82 is compressed, and the connection between the push rod 70 and the cam section 50 is in state two. At this time, the movable connecting piece 60 is located in the closed section of the cam section 50.

[0039] During the valve closing process, the motion of the push rod 70 changes from linear motion to rotational motion. This is achieved by the shock-absorbing cylinder 40, which in turn moves the cam section 50, the movable connecting piece 60, and the push rod 70. Due to the arc-shaped groove 51 on the cam section 50, the movable connecting piece 60 moves sequentially within the arc-shaped groove 51 from the opening section 51-3, the transition section 51-5, and the closing section 51-4, thus changing the movement trajectory of the push rod. Finally, the push rod moves in conjunction with the valve plate, achieving a "J-shaped" motion. The specific motion state is as follows: In linear motion: Piston 40-61 moves upward. The power transmission route is as follows: Piston 40-61 drives piston rod 40-64 to move upward, and under the action of the second spring 82, the bellows assembly 81 drives push rod 70 to move upward, and push rod 70 drives valve plate 20 to move. When the ring 81-6 on the bellows assembly 81 reaches the end of the vertical groove, the linear motion stops. The length of the vertical groove is the distance of the linear motion. Push rod 70 and valve plate 20 are fixedly installed and can be regarded as one unit. In rotational motion: Cam section 50 continues to move upward, and during the upward movement, it pushes the movable connecting piece 60 on push rod 70 through arc groove 51, so that push rod 70 rotates around ring 81-6 until movable connecting piece 60 reaches the bottom of arc groove 51, completing the sealing action.

[0040] When the valve is opened, the push rod 70 moves in the opposite direction to when the valve is closed, changing from rotational motion to linear motion: the piston 40-61 moves downward. As the force applied to the second spring 82 by the piston 40-61 disappears, the second spring 82 releases its elastic potential energy, keeping the bellows assembly 81 stationary. However, the downward movement of the piston 40-61 will drive the cam segment 50 to move downward simultaneously. The cam segment 50 abuts against the movable connector 60, thereby rotating the push rod 70. Then, the piston 40-61 continues to move downward, and the second spring 82 completes the release of its elastic potential energy, completing the rotational action. The cam segment 50 pulls the movable connector 60, which in turn drives the push rod 70 and the valve plate 20 connected to it to complete the downward movement. Furthermore, the weight of the bellows assembly 81 + push rod 70 + valve plate 20 is less than the force required for the second spring 82 to deform. During the valve closing process, the second spring 82 is compressed and deformed, which plays a buffering role, avoids the generation of particles by impact, and at the same time reduces the control of pneumatic pressure.

[0041] The working process of this invention is as follows: When the valve is opened, the piston 40-61 is located at the lower end of the shock-absorbing cylinder 40, the second spring 82 releases its elastic force, and the connection between the push rod 70 and the cam section 50 is in state one. At this time, the movable connecting piece 60 is located in the opening section of the cam section, the piston 40-61 moves down, and since the force applied to the second spring 82 by the piston 40-61 disappears, the second spring 82 releases its elastic potential energy, so that the bellows assembly 81 remains stationary. However, the downward movement of the piston 40-61 will drive the cam section 50 to move down at the same time. The cam section 50 abuts against the movable connecting piece 60, thereby rotating the push rod 70. The piston 40-61 continues to move down, and the second spring 82 completes the release of its elastic potential energy. At this time, the rotation action is completed. The cam section 50 pulls the movable connecting piece 60 to drive the push rod 70, and the push rod 70 drives the valve plate 20 to complete the downward movement. When the valve is closed, the piston 40-61 is located at the upper end of the damping cylinder 40, the second spring 82 is compressed, and the connection between the push rod 70 and the cam section 50 is in state two. The piston 40-61 moves upward, and at this time, the piston 40-61 drives the piston rod 40-64, which, under the action of the second spring 82 and the bellows assembly 81, drives the push rod 70 to move, and the push rod 70 drives the valve plate to move. When the ring 81-6 on the bellows assembly 81 reaches the end of the vertical groove, the linear motion stops and the rotational motion begins, which is the driving length of the cam section 50, as follows: The cam section 50 continues to move upward, and the driving groove 241 of the cam section 50 is arc-shaped. During the upward movement, it pushes the movable connecting piece 60 on the push rod 70, causing the push rod 70 to rotate around the ring 81-6 as the center, until the movable connecting piece 60 reaches the bottom of the driving groove, completing the sealing action. The above is the working principle of this J-shaped motion transmission valve.

[0042] Although preferred embodiments of the invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the invention.

[0043] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. A J-shaped motion transmission valve, comprising a valve body (10), a valve plate (20), a support member (30), a shock-absorbing cylinder (40), a cam section (50), a movable connecting member (60), a push rod (70), and an elastic support member (80), characterized in that: The valve body (10) has a first hollow space inside, and the valve body (10) has a channel (11) on its side wall. The channel (11) is connected to the first hollow space, and the valve plate (20) is disposed in the first hollow space. One end of the support member (30) is connected to the valve body (10), and the support member (30) has a through space (31) in the middle position. The shock-absorbing cylinder (40) is connected to one end of the valve body (10) away from the support member (30), and one end of the shock-absorbing cylinder (40) is fixedly connected in the through space (31). The end of the shock-absorbing cylinder (40) away from the through space (31) is located outside the through space (31). The cam section (50) is connected to the shock-absorbing cylinder (40), and the cam section (50) is linked by the shock-absorbing cylinder (40). The cam section (50) has an arc-shaped through groove (51). The movable connecting piece (60) is slidably connected to the arc-shaped through groove (51). One end of the push rod (70) is set in the through space (31), and the push rod (70) is connected to the movable connecting piece (60). The end of the push rod (70) away from the movable connecting piece (60) passes through the support piece (30) and is fixedly connected to the valve plate (20). The elastic support (80) is slidably connected within the through space (31), and the elastic support (80) is disposed between the support (30), the shock-absorbing cylinder (40) and the push rod (70).

2. The J-shaped motion transmission valve according to claim 1, characterized in that: The support member (30) includes two sets of support blocks (30-1) and connecting blocks (30-2), and the two sets of support blocks (30-1) are symmetrically spaced apart. The support member (30) has at least two shock-absorbing pads (32). One end of the support block (30-1) is connected to the valve body (10), and the inner wall of the support block (30-1) is provided with a sliding groove (30-11). The sliding groove (30-11) is a waist-shaped groove, and the shock-absorbing pad (32) is fixedly connected to the inner side of the end of the sliding groove (30-11). The connecting block (30-2) is connected to one end of the support block (30-1), and a through space (31) is provided between the connecting block (30-2) and the support block (30-1). One end of the push rod (70) is inserted into the connecting block (30-2).

3. The J-shaped motion transmission valve according to claim 2, characterized in that: The shock-absorbing cylinder (40) includes a cylinder body (40-1), a first cover plate (40-4), a first shock-absorbing ring (40-5), a piston structure (40-6), and a second shock-absorbing ring (40-7). The cylinder body (40-1) is connected to the support member (30), and a second hollow space is provided inside the cylinder body (40-1). A first air nozzle (40-2) and a second air nozzle (40-3) are connected inside the cylinder body (40-1). The first air nozzle (40-2) and the second air nozzle (40-3) are spaced apart. The first cover plate (40-4) is connected to the end of the cylinder (40-1), and the first cover plate (40-4) is disposed outside the through space (31) to seal one end of the second hollow space; The first shock absorber (40-5) is fixedly connected to the inner wall of the first cover plate (40-4), and the first shock absorber (40-5) is disposed in the second hollow space; The piston structure (40-6) is slidably connected in the second hollow space. The second hollow space in the cylinder (40-1) is divided into a first space (40-11) and a second space (40-12). The first space (40-11) is connected to the first air nozzle (40-2), and the second space (40-12) is connected to the second air nozzle (40-3). The piston structure (40-6) is connected to the cam section (50), and the piston structure (40-6) is in contact with the elastic support member (80). The second shock absorber ring (40-7) is fixedly fitted onto the piston structure (40-6); The magnetic ring (40-8) is fixedly connected to the piston structure (40-6); The magnetic ring sensor (40-9) is fixedly connected to the cylinder (40-1).

4. The J-shaped motion transmission valve according to claim 3, characterized in that: The piston structure (40-6) includes a piston (40-61), a pressure block (40-62), a piston rod (40-64), a first sealing ring (40-65), and a second sealing ring (40-66). The piston (40-61) is slidably connected in the second hollow space, and at least one set of first connecting bolts (40-63) connects the piston (40-61), the pressure block (40-62), and the cam section (50) to the piston structure (40-6). The first connecting bolts (40-63) press the magnetic ring (40-8) between the piston (40-61) and the pressure block (40-62). One end of the piston rod (40-64) is fixedly connected to the piston (40-61), and the end of the piston rod (40-64) away from the piston (40-61) is in contact with the elastic support (80). The two ends of the piston rod (40-64) are respectively connected to the sleeve push rod (70) and the cam section (50), and the piston rod (40-64) and the piston (40-61) are connected by a second damping ring (40-7). The first sealing ring (40-65) is fitted between the piston (40-61) and the cylinder (40-1), and the second sealing ring (40-66) is fitted between the cylinder (40-1) and the piston rod (40-64).

5. The J-shaped motion transmission valve according to claim 4, characterized in that: Also includes: The self-locking component (40-10) is fixedly connected to the side wall of the cylinder (40-1). The piston (40-61) has a slot (40-61-1) on its outer side. The self-locking component (40-10) is used to engage with the slot (40-61-1) on the piston (40-61) when the valve plate (20) closes the channel (11).

6. The J-shaped motion transmission valve according to claim 5, characterized in that: The self-locking component (40-10) includes a side seat (40-10-1) and a locking block (40-10-3), and the side seat (40-10-1) is fixedly connected to the outer wall of the cylinder body (40-1), and a first stepped through hole (40-10-11) is provided in the side seat (40-10-1). A first spring (40-10-2) is movably inserted into the first stepped through hole (40-10-11), and one end of the first spring (40-10-2) protrudes out of the first stepped through hole (40-10-11). The cylinder body (40-1) has a second stepped through hole (40-1-1) inside, and the locking block (40-10-3) is connected inside the second stepped through hole (40-1-1), and the cylinder body (40-1) is engaged with the slot (40-61-1) through the locking block (40-10-3); A third sealing ring (40-10-4) is connected between the side seat (40-10-1) and the locking block (40-10-3), and a fourth sealing ring (40-10-5) is connected between the locking block (40-10-3) and the cylinder (40-1).

7. The J-shaped motion transmission valve according to claim 4, characterized in that: The cam section (50) includes a circular block (50-1) and a convex plate (50-2). The circular block (50-1) is fixedly connected to the first connecting bolt (40-63). The convex plate (50-2) is fixedly connected to the top of the circular block (50-1). An arc-shaped through groove (51) is provided in the convex plate (50-2). The convex plate (50-2) is inserted into one end of the push rod (70).

8. The J-shaped motion transmission valve according to claim 7, characterized in that: The movable connector (60) includes a bearing (60-1) and a pin (60-2), and the movable connector (60) slides in the arc-shaped through groove (51). The movable connector (60) is fixedly connected to the push rod (70), the bearing (60-1), and the convex plate (50-2) by the pin (60-2). The two ends and the middle of the arc-shaped through groove (51) are respectively the opening section (51-1), the closing section (51-2), and the transition section (51-3).

9. A J-shaped motion transmission valve according to claim 3, characterized in that: The elastic support (80) includes a bellows assembly (81) and a second spring (82), and the bellows assembly (81) is inserted into the through space (31), the bellows assembly (81) is inserted between the support (30) and the push rod (70), and the second spring (82) is connected between the piston structure (40-6) and the bellows assembly (81); The bellows assembly (81) includes a bellows (81-1) and a bellows outer seat (81-4), and the bellows (81-1) is sleeved on the outside of the push rod (70). One end of the bellows (81-1) is connected to the support (30), and the end of the bellows (81-1) away from the support (30) is in contact with the protrusion (70-1) on the push rod (70). A fifth sealing ring (81-2) is connected between the bellows (81-1) and the support (30), and a sixth sealing ring (81-3) is connected between the bellows (81-1) and the push rod (70). One end of the corrugated pipe outer seat (81-4) is in contact with the push rod (70), and the end of the corrugated pipe outer seat (81-4) away from the push rod (70) is fixedly sleeved on the outside of the corrugated pipe (81-1); at least one set of second connecting bolts (81-5) is connected between the corrugated pipe outer seat (81-4) and the push rod (70), and there are two sets of mutually symmetrical rings (81-6) on the corrugated pipe outer seat (81-4), and the two sets of rings (81-6) are slidably connected to the two sets of sliding grooves (30-11) one-to-one.

10. A J-shaped motion transmission valve according to claim 4, characterized in that: Two sets of symmetrical second cover plates (90) are connected between the connecting block (30-2) and the shock-absorbing cylinder (40). The two sets of second cover plates (90) are connected between the two sets of support blocks (30-1), and the two sets of second cover plates (90) and the two sets of support blocks (30-1) cover the through space (31). When the valve is opened, the piston (40-61) is located at the lower end of the shock-absorbing cylinder (40), the second spring (82) releases its elastic force, and the connection between the push rod (70) and the cam section (50) is in state one. At this time, the movable connecting piece (60) is located in the opening section of the cam section. When the valve is closed, the piston (40-61) is located at the upper end of the shock-absorbing cylinder (40), the second spring (82) is compressed, and the connection between the push rod (70) and the cam section (50) is in state two. At this time, the movable connecting piece (60) is located in the closed section of the cam section (50).

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