Vertical valve

Abstract

The invention discloses a vertical valve, comprising a valve plate; at least one first driving structure; the second driving structure and the first driving structure are symmetrically arranged, an interval space is formed between the second driving structure and the first driving structure, and the second driving structure and the first driving structure are connected with the valve plate together; the second driving structure and the first driving structure are synchronously linked with the valve plate to move along a straight line, the valve plate opens or closes an exhaust port in the wall of the process chamber, and when the exhaust port is opened, gas exhausted from the exhaust port is exhausted from the interval space; therefore, the technical problems that the forming quality of the wafer is influenced due to non-uniform gas discharge and unbalanced gas convection, the gas consumption is increased, the necessary flow time is forcibly prolonged, and the processing efficiency is reduced are solved.

Description

Technical Field

[0001] This invention relates to the field of valve technology, specifically a vertical valve. Background Technology

[0002] In semiconductor and precision manufacturing processes, the airflow dynamics inside the process chamber are one of the core factors that determine process efficiency and product quality. Traditionally, process optimization has focused on the flow field design during the gas injection stage. However, the gas behavior during the exhaust stage also has a significant impact on the process results. Ideal airflow conditions should ensure a highly uniform gas distribution near the wafer surface. This is the foundation for achieving synchronous and stable chemical reactions on the wafer surface. This principle applies not only to the gas intake stage but also throughout the entire gas exhaust process. If the outlet position is improperly designed, or if the valve changes the flow channel morphology during operation, it may cause airflow asymmetry. This asymmetry will hinder efficient gas exhaust or create an uneven flow velocity field. The direct consequence is that the gas residence time varies in different areas of the wafer, and the unbalanced convection conditions affect the uniformity of the reaction, thus affecting the wafer forming quality. In addition, these problems will also lead to increased process gas consumption, forced extension of necessary process times, and reduced processing efficiency. Summary of the Invention

[0003] In view of the above-mentioned shortcomings in the related technologies, the purpose is to provide a vertical valve to solve the technical problems of uneven gas discharge, unbalanced gas convection, which affect the wafer forming quality, increased gas consumption, forced extension of necessary process time, and reduced processing efficiency. The technical solution to achieve the objective is: a vertical valve, comprising: Valve plate; At least one primary drive structure; And at least one second driving structure, the second driving structure is symmetrically arranged with the first driving structure, the second driving structure and the first driving structure form an interval space, and the second driving structure and the first driving structure are connected together to the valve plate. The second driving structure and the first driving structure are synchronously linked to move the valve plate along a straight line. The valve plate opens or closes the exhaust port on the process chamber wall. When the exhaust port is opened, the gas discharged from the exhaust port is discharged from the interval space.

[0004] Furthermore: the valve plate includes: an intermediate blocking region, the intermediate blocking region being used to open or close the exhaust port; And at least two extension arms, symmetrically connected to the intermediate blocking area, one for connecting to the first drive structure and the other for connecting to the second drive structure.

[0005] Furthermore: the first drive structure and the second drive structure have the same structure, both including: a valve body assembly, the valve body assembly having a first space and a second space; The driving component is partially disposed in the first space and connected to the valve body assembly, and the other part is disposed outside the first space; A lead screw assembly is disposed in the second space and connected to the valve body assembly, with one end of the lead screw assembly protruding out of the second space and connected to the drive component. The lead screw assembly is driven by the drive component. The main spindle structure has one end connected to the lead screw assembly and the other end extending through the second space and the process chamber wall to connect to the valve plate.

[0006] Furthermore: the valve body assembly includes: a valve body having a first space and a second space, the first space and the second space being spaced apart; Two side cover plates are symmetrically connected to the valve body to block the first space and the second space; And a cover, connected to the valve body, for covering another part of the drive component.

[0007] Furthermore: the driving component includes a motor, disposed in the first space, and connected to the valve body assembly; The first pulley, connected to the motor, is located outside the first space; The second pulley is connected to the lead screw assembly and is spaced apart from the first pulley; And a belt body that connects the first pulley and the second pulley.

[0008] Furthermore: the lead screw assembly includes: a lead screw, disposed in the second space, with one end protruding from the second space and connected to the second pulley; The first retaining ring is connected to one end of the lead screw and abuts against the limiting step on the lead screw; The second retaining ring is connected to one end of the lead screw and is spaced apart from the first retaining ring; A lock nut, connected to the lead screw, limits the second retaining ring; A bearing is connected to the valve body assembly and is connected to the first retaining ring, the second retaining ring, and the lead screw; A bearing housing is disposed in the second space, connected to the valve body assembly, and connected to the other end of the lead screw; A lead screw nut is disposed in the second space and is threadedly connected to the lead screw. A lead screw seat is disposed in the second space and connected to the lead screw nut, used to connect one end of the main shaft structure; And a linear guide, disposed in the second space, connected to the valve body assembly, and connected to the lead screw seat.

[0009] Furthermore: the lead screw seat includes: a base, which is sleeved on the lead screw and spaced apart from the lead screw, with one end connected to the lead screw nut; and a boss, which is connected to the base and connected to one end of the main shaft structure; The linear guide includes: a linear guide rail connected to the valve body assembly and spaced parallel to the lead screw; a slider slidably connected to the linear guide rail, and the slider is disposed at a positioning stop on the base and connected to the base; and a limiting block connected to the linear guide rail and spaced apart from the slider for blocking the slider.

[0010] Furthermore: the main shaft structure includes: a main shaft, one end of which is connected to the lead screw assembly, and the other end which extends through the second space and the process chamber wall and is connected to the valve plate; And a bellows, fitted on the main shaft, with one end connected to the main shaft and the other end abutting against the wall of the process chamber.

[0011] Furthermore, it also includes two protective components, disposed in the second space and connected to the valve body assembly, for protecting the spindle structure; The protective component includes a connecting block for connecting to the valve body assembly; And a protective block, connected to the connecting block, wherein one side wall of the protective block has an arc-shaped surface facing the corrugated pipe and surrounding the corrugated pipe.

[0012] Furthermore, it also includes a heat dissipation structure disposed on the valve body assembly for heat dissipation; The heat dissipation structure includes a fan connected to the valve body, disposed in the first space, facing the vent on the valve body, for circulating air; And at least two ventilation ducts, spaced apart on the valve body, connecting the first space and the second space.

[0013] The above technical solution has the following beneficial effects: a vertical valve, compared with related technologies, is provided with a valve plate, a first driving structure and a second driving structure; The first drive structure and the second drive structure are symmetrically arranged, and an interval space is formed between the first drive structure and the second drive structure. The first drive structure and the second drive structure are connected together to the valve plate. The first drive structure and the second drive structure are synchronously linked, and the valve plate moves along a straight line to open or close the exhaust port on the process chamber wall. Because the valve plate is synchronously linked with the first and second driving structures, the valve plate always moves along a straight line during the opening or closing process without tilting. When the valve plate opens the exhaust port, the gas is discharged through the gap without obstruction, and the discharge is relatively smooth. This achieves relatively uniform gas discharge and relatively balanced gas convection, reducing gas consumption and thus ensuring the wafer forming quality and improving processing efficiency. Therefore, this method overcomes the technical problems of uneven gas discharge and unbalanced gas convection, which affect the wafer forming quality, increase gas consumption, force the necessary process time to be extended, and reduce processing efficiency. It achieves the technical effect of relatively uniform gas discharge and relatively balanced gas convection, reduces gas consumption, ensures wafer forming quality, and improves processing efficiency. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure when the valve plate is not connected to the first drive structure and the second drive structure. Figure 2 This is a schematic diagram of the valve plate when the exhaust port is closed after the valve plate is connected to the first drive structure and the second drive structure. Figure 3 This is a schematic diagram of the first or second drive structure after removing the side cover. Figure 4 for Figure 3 A partial sectional view; Figure 5 This is a partially enlarged schematic diagram of the connection between the lead screw, the first retaining ring, the second retaining ring, the lock nut, the bearing, and the valve body; Figure 6 This is one of the structural schematic diagrams of the valve body; Figure 7 This is the second schematic diagram of the valve body structure; Figure 8 This is a schematic diagram of the assembled structure of the lead screw, bearing housing, lead screw nut, lead screw seat, and linear guide. Figure 9 This is a schematic diagram of the lead screw holder. Figure 10 This is a schematic diagram of the linear guide and slider. Figure 11 One of the partial sectional views of the main shaft structure; Figure 12The second partial sectional view of the main shaft structure; Figure 13 This is a structural schematic diagram of the protective component; Figure 14 This is a structural diagram illustrating the connection method between the valve body and the process chamber wall. In the diagram: 10. Valve plate, 11. Intermediate blocking area, 12. Extension arm, 20. First drive structure, 30. Second drive structure, 21. Valve body assembly, 21-1. Valve body, 21-1-1. Threaded pin, 21-2. Side cover plate, 21-3. Cover, 211. First space, 212. Second space, 213. Vent, 22. Drive component, 22-1. Motor, 22-2. First pulley, 22-3. Second pulley, 22-4. Belt body, 23. Lead screw assembly, 23-1. Lead screw, 23-11. Limiting step, 23-2. First retaining ring, 23-3. Second retaining ring, 23-4. Locking nut, 23-5. Bearing, 23-6. Bearing seat, 23-7. Lead screw nut 23-8. Lead screw seat; 23-81. Base; 23-81-1. Positioning stop; 23-81-2. First through hole; 23-82. Boss; 23-82-1. Second through hole; 23-9. Linear guide; 23-91. Linear guide rail; 23-92. Slider; 23-93. Limiting block; 24. Spindle structure; 24-1. Spindle; 24-2. Bellows; 25. Protective component; 25-1. Connecting block; 25-2. Protective block; 25-21. Arc surface; 26. Heat dissipation structure; 26-1. Fan; 26-2. Ventilation duct; 40. Spacing space; 100. Process chamber wall; 101. Exhaust port; 100-1. Locking pin; 100-11. Groove. Detailed Implementation

[0015] To make the content easier to understand, the following detailed description is provided with reference to specific embodiments and accompanying drawings; A vertical valve addresses the technical problems in related technologies, such as uneven gas discharge and unbalanced gas convection, which affect wafer forming quality, increase gas consumption, force extended process times, and reduce processing efficiency. The valve achieves relatively uniform gas discharge and relatively balanced gas convection, reducing gas consumption, ensuring wafer forming quality, and improving processing efficiency. The overall concept is as follows: Implementation Method

[0016] like Figure 1 , Figure 2 As shown; a vertical valve, comprising: Valve plate 10; At least one first drive structure 20; And at least one second drive structure 30, the second drive structure 30 is symmetrically arranged with the first drive structure 20, the second drive structure 30 and the first drive structure 20 form an interval space 40, and the second drive structure 30 and the first drive structure 20 are connected together to the valve plate 10. The second drive structure 30 and the first drive structure 20 are synchronously linked to move the valve plate 10 along a straight line. The valve plate 10 opens or closes the exhaust port 101 on the process chamber wall 100. When the exhaust port 101 is opened, the gas discharged from the exhaust port 101 is discharged from the interval space 40. Specifically, in implementation, the first drive structure 20 and the second drive structure 30 are symmetrically arranged, and an interval space 40 is formed between the first drive structure 20 and the second drive structure 30. The first drive structure 20 and the second drive structure 30 are connected together to the valve plate 10. The first drive structure 20 and the second drive structure 30 are synchronously linked to the valve plate 10, which moves along a straight line. The valve plate 10 opens or closes the exhaust port 101 on the process chamber wall 100. Because the valve plate 10 is synchronously linked with the first driving structure 20 and the second driving structure 30, the valve plate 10 always moves along a straight line during the opening or closing process and will not tilt. When the valve plate 10 opens the exhaust port 101, the gas is discharged from the space 40 through the exhaust port 101 without being obstructed. The discharge is relatively smooth, which realizes relatively uniform gas discharge and relatively balanced gas convection, reduces gas consumption, thereby ensuring the wafer forming quality and improving processing efficiency. Another implementation method: like Figure 1 , Figure 2 As shown; in implementation, the valve plate 10 includes: a middle blocking region 11, which is used to open or close the exhaust port 101; and at least two extension arms 12, symmetrically connected to the middle blocking region 11, one for connecting to the first drive structure 20 and the other for connecting to the second drive structure 30. The intermediate blocking area 11 is a circular block structure that can cover the exhaust port 101 and form a block when the exhaust port 101 is closed. The extension arm 12 is a long, block-shaped structure used to connect with the first drive structure 20 and the second drive structure 30. For example, after the extension arm 12 is inserted into the main shaft 24-1, it is connected by bolts, which makes assembly relatively convenient. Another implementation method: like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 , Figure 10 , Figure 11 , Figure 12 , Figure 14 As shown; in implementation, the first drive structure 20 and the second drive structure 30 have the same structure, both including: a valve body assembly 21, which has a first space 211 and a second space 212; a drive member 22, partly disposed in the first space 211 and connected to the valve body assembly 21, and the other part disposed outside the first space 211; a lead screw assembly 23, disposed in the second space 212 and connected to the valve body assembly 21, with one end of the lead screw assembly 23 protruding from the second space 212 and connected to the drive member 22, and the lead screw assembly 23 being driven by the drive member 22; and a main shaft structure 24, one end of the main shaft structure 24 being connected to the lead screw assembly 23, and the other end passing through the second space 212 and the process chamber wall 100, and connected to the valve plate 10; When the drive component 22 moves, the lead screw assembly 23 rotates partially, the lead screw assembly 23 moves the main spindle structure 24 along a straight line, the main spindle structure 24 moves the valve plate 10 along a straight line, and the valve plate 10 opens or closes the exhaust port 101 on the process chamber wall 100. The valve body assembly 21 includes: a valve body 21-1 having a first space 211 and a second space 212, spaced apart from each other; two side cover plates 21-2 symmetrically connected to the valve body 21-1 for blocking the first space 211 and the second space 212; and a cover 21-3 connected to the valve body 21-1 for covering another part of the drive member 22. The valve body 21-1 has a first space 211 and a second space 212, which is conducive to the arrangement of other components, the structure is relatively compact, relatively beautiful, and relatively easy to assemble; Ventilation opening 213 consists of two semi-circular slots, which facilitates air circulation and is relatively aesthetically pleasing; The side cover plate 21-2 is connected to the valve body 21-1 by screws, forming a barrier to protect the components in the first space 211 and the second space 212; The cover 21-3 and the valve body 21-1 are connected by screws to form a barrier and protect the drive component 22; A valve body assembly 21 is provided, which is connected to the process chamber wall 100 through the valve body 21-1, forming a reliable support structure, which is conducive to the arrangement of other components and makes assembly relatively convenient. For example, the valve body 21-1 is connected to the process chamber wall 100 in the following way: Figure 14 As shown, at least one threaded pin 21-1-1 is connected to the valve body 21-1, and the threaded pin 21-1-1 is threadedly connected to the valve body 21-1. At least one locking pin 100-1 is inserted into the process chamber wall 100. When the threaded pin 21-1-1 is rotated until one end of the threaded pin 21-1-1 is locked into the groove 100-11 on the locking pin 100-1, the valve body 21-1 is connected and positioned with the process chamber wall 100. The assembly is relatively convenient and is not the inventive point of this invention. It is only for better describing this invention and facilitating the understanding of the technical solution of this invention. Those skilled in the art can directly and without doubt know how to set it up after seeing the disclosed content, without needing to put in creative effort or conduct excessive experiments. The driving component 22 includes: a motor 22-1, disposed in the first space 211 and connected to the valve body assembly 21; a first pulley 22-2, connected to the motor 22-1 and disposed outside the first space 211; a second pulley 22-3, connected to the lead screw assembly 23 and spaced apart from the first pulley 22-2; and a belt 22-4, connecting the first pulley 22-2 and the second pulley 22-3. Motor 22-1 is a common structure in existing technology, such as a closed-loop stepper motor. It has a built-in high-resolution encoder that can provide real-time feedback on the rotor position and compensate for position errors in real time. This enables precise motion control without step loss, overshoot, or absolute stillness, ensuring that the motor can still accurately reach the command-set position under high-speed and high-load conditions and provide stable torque output. The first pulley 22-2, the second pulley 22-3, and the belt body 22-4 are common structures in the prior art. For example, the first pulley 22-2 has 36 teeth, the second pulley 22-3 has 24 teeth, and the belt body 22-4 is a synchronous belt. Under the condition of meeting the torque, the speed-increasing structure design is adopted to achieve the control speed of typ.1.0 s per 100mm in the technical specification ("typ.1.0 s per 100mm" is a quantitative scale of the elasticity and flexibility of the synchronous belt, that is, the belt length is stretched by about 1.0mm after being stretched for every 100mm), thus ensuring the reliability of the transmission. Those skilled in the art, upon seeing the disclosed content, can directly and without doubt know how to set up the motor 22-1, the first pulley 22-2, the second pulley 22-3, and the belt 22-4, without needing to expend creative effort or conduct excessive experimentation; The lead screw assembly 23 includes: a lead screw 23-1, disposed in the second space 212, with one end protruding from the second space 212 and connected to the second pulley 22-3; a first retaining ring 23-2, connected to one end of the lead screw 23-1 and abutting against the limiting step 23-11 on the lead screw 23-1; a second retaining ring 23-3, connected to one end of the lead screw 23-1 and spaced apart from the first retaining ring 23-2; a locking nut 23-4, connected to the lead screw 23-1 and limiting the second retaining ring 23-3; and a bearing 23-5, connected to the valve body assembly 21 and abutting the first retaining ring 23-1. -2. The second retaining ring 23-3 is connected to the lead screw 23-1; the bearing seat 23-6 is disposed in the second space 212, connected to the valve body assembly 21, and connected to the other end of the lead screw 23-1; the lead screw nut 23-7 is disposed in the second space 212 and threadedly connected to the lead screw 23-1; the lead screw seat 23-8 is disposed in the second space 212, connected to the lead screw nut 23-7, and used to connect one end of the main shaft structure 24; and the linear guide 23-9 is disposed in the second space 212, connected to the valve body assembly 21, and connected to the lead screw seat 23-8; One end of the lead screw 23-1 has a limiting step 23-11, which is beneficial for positioning the first retaining ring 23-2; The first retaining ring 23-2 and the second retaining ring 23-3 have the same structure, which is a circular ring structure. They are sleeved on the lead screw 23-1, which is beneficial for connecting the bearing 23-5. The locking nut 23-4 is a square nut that is threadedly connected to the lead screw 23-1. It is used to block the second retaining ring 23-3. At the same time, in order to prevent the locking nut 23-4 from loosening as the lead screw 23-1 rotates after the locking nut 23-4 is threadedly connected to the lead screw 23-1, a stop screw is added to the locking nut 23-4. The stop screw is threadedly connected to the locking nut 23-4, with one end abutting against the lead screw 23-1, making the connection between the locking nut 23-4 and the lead screw 23-1 more reliable and reducing the probability of the locking nut 23-4 loosening. The bearing 23-5 is a common structure in the prior art, such as a flanged ball screw bearing. It is connected to the valve body assembly 21 by screws at the flange. The bearing 23-5 is connected to the first retaining ring 23-2, the second retaining ring 23-3 and the ball screw 23-1, so that the bearing 23-5 can reliably support the ball screw 23-1. When the ball screw 23-1 is rotated in linkage, it is relatively smooth. The bearing housing 23-6 is a common structure in the prior art, such as a mounted spherical bearing. It is connected to the valve body assembly 21 by screws and is used to connect the other end of the support screw 23-1. The bearing housing 23-6 and the bearing 23-5 support the screw 23-1 together, so that the screw 23-1 has relatively good structural reliability and smooth rotation when it is rotated in linkage. The lead screw nut 23-7 is threadedly connected to the lead screw 23-1. When the lead screw 23-1 is rotated in conjunction with the drive component 22, the lead screw nut 23-7 moves along the lead screw 23-1, thereby moving the lead screw seat 23-8 in a straight line. The lead screw seat 23-8 moves in conjunction with the main shaft structure 24 in a straight line. For example, with one pulse from the motor 22-1 on the drive component 22, the lead screw nut 23-7 moves 0.025 meters along the lead screw 23-1. The movement speed is relatively slow, equivalent to "soft contact," which effectively avoids the impact caused by violent movements, reduces contact wear between parts, and reduces the generation of wear particles that contaminate the process. The lead screw seat 23-8 includes: a base 23-81, which is sleeved on the lead screw 23-1 and spaced apart from the lead screw 23-1, with one end connected to the lead screw nut 23-7; and a boss 23-82, which is connected to the base 23-81 and connected to one end of the main shaft structure 24. The base 23-81 is fitted onto the lead screw 23-1 through the first through hole 23-81-2, with a clearance fit between it and the lead screw 23-1, which prevents friction against the lead screw 23-1 and reduces the generation of wear particles that contaminate the process. The positioning stop 23-81-1 is provided, which is beneficial for positioning with the slider 23-92, resulting in relatively high assembly accuracy and relatively convenient assembly. The boss 23-82 has a circular structure and a second through hole 23-82-1. The second through hole 23-82-1 is convenient for insertion into one end of the spindle 24-1 to position the spindle 24-1. Then, the boss 23-82 and the spindle 24-1 are connected by bolts. The assembly is relatively convenient and the structural reliability is relatively good. The linear guide 23-9 includes: a linear guide rail 23-91 connected to the valve body assembly 21 and spaced parallel to the lead screw 23-1; a slider 23-92 slidably connected to the linear guide rail 23-91, and the slider 23-92 is disposed at the positioning stop 23-81-1 on the base 23-81 and connected to the base 23-81; and a limiting block 23-93 connected to the linear guide rail 23-91 and spaced apart from the slider 23-92 for blocking the slider 23-92. The linear guide 23-91 is connected to the valve body assembly 21 by bolts; The linear guide rail 23-91 and the slider 23-92 are common structures in the prior art. The slider 23-92 is slidably connected to the linear guide rail 23-91, and the slider 23-92 can slide along the linear guide rail 23-91. The limit stop 23-93 is connected to the linear guide rail 23-91 by bolts, forming a block and limiting the movement distance of the slider 23-92; The linear guide rail 23-91 and slider 23-92 are provided to guide the movement of the lead screw seat 23-8 along a straight line, thereby ensuring that the main shaft structure 24 moves along a straight line. This ensures that the valve plate 10 moves along a straight line during opening or closing and does not tilt. The main shaft structure 24 includes: a main shaft 24-1, one end of which is connected to the lead screw assembly 23, and the other end of which passes through the second space 212 and the process chamber wall 100 and is connected to the valve plate 10; and a bellows 24-2, which is sleeved on the main shaft 24-1, one end of which is connected to the main shaft 24-1, and the other end of which abuts against the process chamber wall 100. The main spindle 24-1 is a stepped shaft. After one end is inserted into the second through hole 23-82-1, it is connected to the boss 23-82 by bolts, making assembly relatively convenient. There are two types of spindle 24-1: one is solid and the other is hollow. The purpose of the hollow design is to facilitate the passage of cables on the heating rod when the heating component is installed on the valve body assembly 21. For example, the heating method utilizes a heating rod, an M4 platinum resistance thermometer, an electrical connector, and a temperature control system, which are existing technologies. The M4 platinum resistance thermometer is installed near the heating area to accurately measure the temperature. The electrical connector connects the heating rod, the M4 platinum resistance thermometer, and the power supply. Based on the temperature data provided by the M4 platinum resistance thermometer, the temperature control system controls the switching on and off of the heating rod according to a preset temperature threshold, thereby achieving precise temperature control. The bellows 24-2 is a commonly used structure in the prior art. The bellows 24-2 is disposed between the main shaft 24-1 and the process chamber wall 100. For example, one end of the bellows 24-2 is connected to the main shaft 24-1 via a flange and bolts. There is an O-ring or gasket between the flange and the main shaft 24-1. The other end of the bellows 24-2 abuts against the outer wall of the process chamber wall 100. The other end of the bellows 24-2 has an O-ring, which forms a seal with the outer wall of the process chamber wall 100. Another implementation method: like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 6 , Figure 7 , Figure 11 , Figure 12 , Figure 13 As shown; in practice, it also includes: two protective components 25, which are disposed in the second space 212 and connected to the valve body assembly 21, for protecting the main shaft structure 24; The protective component 25 includes: a connecting block 25-1 for connecting to the valve body assembly 21; and a protective block 25-2 for connecting to the connecting block 25-1, wherein one side wall of the protective block 25-2 has an arc-shaped surface 25-21 facing the bellows 24-2 and surrounding the bellows 24-2; Two protective components 25 are symmetrically arranged around the bellows 24-2, protecting the bellows 24-2; The connecting block 25-1 is a rectangular block structure, which is connected to the valve body 21-1 by screws, making assembly relatively convenient; The protective block 25-2 is a rectangular block structure. The volume of the protective block 25-2 is larger than that of the connecting block 25-1, so that the protective block 25-2 has a relatively large area, forming a barrier to protect the bellows 24-2 and prevent the bellows 24-2 from shifting its position when it expands or contracts. The curved surface 25-21 is provided to match the shape of the bellows 24-2, which helps to form a guide and prevents the bellows 24-2 from shifting its position when it expands and contracts. It will not affect the normal expansion and contraction of the bellows 24-2, nor will it damage the bellows 24-2. Another implementation method: like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 6 , Figure 7 As shown; in practice, it also includes: a heat dissipation structure 26, which is disposed on the valve body assembly 21 for heat dissipation; The heat dissipation structure 26 includes: a fan 26-1 connected to the valve body 21-1 and disposed in the first space 211, facing the vent 213 on the valve body 21-1 for air circulation; and at least two ventilation ducts 26-2, spaced apart on the valve body 21-1, connecting the first space 211 and the second space 212. The fan 26-1 is a common structure in the prior art, used to accelerate air circulation. Since the ventilation duct 26-2 connects the first space 211 and the second space 212, it realizes heat dissipation at the first space 211 and the second space 212, and the heat dissipation effect is relatively good, ensuring the operational reliability of the first drive structure 20 and the second drive structure 30. Another implementation method: like Figure 1 , Figure 2 As shown; during implementation, a gap space 40 is formed between the first drive structure 20 and the second drive structure 30. When the valve plate 10 opens the exhaust port 101, the gas is discharged through the gap space 40 along the exhaust port 101. The gas is not blocked and the discharge is relatively smooth. Regarding the process chamber wall 100 and the exhaust port 101: See Figure 1 , Figure 2 The process chamber wall 100 is a commonly used structure in the prior art, and the exhaust port 101 is a circular opening. It is not the inventive point of this invention, but is only used to better describe this invention and facilitate understanding of the technical solution of this invention. Those skilled in the art can directly and without doubt know how to set it up after seeing the disclosed content, without needing to put in creative effort or conduct excessive experiments. The working principle is as follows: When it is necessary to open the valve plate 10 and exhaust gas through the exhaust port 101, the motor 22-1 on the drive component 22 is activated, and the first pulley 22-2, the second pulley 22-3 and the belt body 22-4 are linked to the rotation of the lead screw 23-1. The lead screw nut 23-7 moves along the lead screw 23-1. The lead screw nut 23-7 is linked to the lead screw seat 23-8 and the slider 23-92. The slider 23-92 moves along the linear guide rail 23-91. The lead screw seat 23-8 is linked to the main shaft structure 24 and moves along a straight line. The bellows 24-2 is gradually compressed, and the main shaft 24-1 is linked to the valve plate 10 to move away from the process chamber wall 100. When the valve plate 10 needs to close the exhaust port 101, the motor 22-1 on the drive component 22 is activated, and the first pulley 22-2, the second pulley 22-3 and the belt body 22-4 are linked to the screw 23-1 to rotate in the opposite direction. The screw nut 23-7 moves along the screw 23-1. The screw nut 23-7 is linked to the screw seat 23-8 and the slider 23-92. The slider 23-92 moves along the linear guide 23-91. The screw seat 23-8 is linked to the main shaft structure 24 to move along a straight line. The bellows 24-2 gradually extends back to its original position. The main shaft 24-1 is linked to the valve plate 10 to fit against the process chamber wall 100. In the description, it should be understood that the terms "up", "down", "left", "right", "front", "back", etc., indicate the orientation or positional relationship based on the positional relationship shown in the accompanying drawings. They are only for the convenience or simplification of the description and do not indicate a specific orientation that must be present. The operation process described in the embodiments is not an absolute usage step, and corresponding adjustments can be made in actual use. Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art; the words “first,” “second,” and similar terms used in the specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components, and similarly, the words “a” or “a” and similar terms do not determine a quantity limitation, but rather indicate the presence of at least one, as determined by the content of the embodiments; The above description is only a preferred embodiment, but the scope of protection is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art based on the technical solution and inventive concept within the scope of the technology disclosed should be included within the scope of protection.

Claims

1. A vertical valve, characterized in that, include: Valve plate; At least one primary drive structure; And at least one second driving structure, the second driving structure is symmetrically arranged with the first driving structure, the second driving structure and the first driving structure form an interval space, and the second driving structure and the first driving structure are connected together to the valve plate. The second driving structure and the first driving structure are synchronously linked to move the valve plate along a straight line. The valve plate opens or closes the exhaust port on the process chamber wall. When the exhaust port is opened, the gas discharged from the exhaust port is discharged from the interval space.

2. A vertical valve according to claim 1, characterized in that: The valve plate includes: a middle blocking region, which is used to open or close the exhaust port; And at least two extension arms, symmetrically connected to the intermediate blocking area, one for connecting to the first drive structure and the other for connecting to the second drive structure.

3. A vertical valve according to claim 1, characterized in that: The first driving structure and the second driving structure have the same structure, both including: a valve body assembly, the valve body assembly having a first space and a second space; The driving component is partially disposed in the first space and connected to the valve body assembly, and the other part is disposed outside the first space; A lead screw assembly is disposed in the second space and connected to the valve body assembly, with one end of the lead screw assembly protruding out of the second space and connected to the drive component. The lead screw assembly is driven by the drive component. The main spindle structure has one end connected to the lead screw assembly and the other end extending through the second space and the process chamber wall to connect to the valve plate.

4. A vertical valve according to claim 3, characterized in that: The valve body assembly includes: a valve body having a first space and a second space, wherein the first space and the second space are spaced apart. Two side cover plates are symmetrically connected to the valve body to block the first space and the second space; And a cover, connected to the valve body, for covering another part of the drive component.

5. A vertical valve according to claim 3, characterized in that: The driving component includes: a motor, which is disposed in the first space and connected to the valve body assembly; The first pulley, connected to the motor, is located outside the first space; The second pulley is connected to the lead screw assembly and is spaced apart from the first pulley; And a belt body that connects the first pulley and the second pulley.

6. A vertical valve according to claim 5, characterized in that: The lead screw assembly includes: a lead screw, disposed in the second space, with one end protruding out of the second space and connected to the second pulley; The first retaining ring is connected to one end of the lead screw and abuts against the limiting step on the lead screw; The second retaining ring is connected to one end of the lead screw and is spaced apart from the first retaining ring; A lock nut, connected to the lead screw, limits the second retaining ring; A bearing is connected to the valve body assembly and is connected to the first retaining ring, the second retaining ring, and the lead screw; A bearing housing is disposed in the second space, connected to the valve body assembly, and connected to the other end of the lead screw; A lead screw nut is disposed in the second space and is threadedly connected to the lead screw. A lead screw seat is disposed in the second space and connected to the lead screw nut, used to connect one end of the main shaft structure; And a linear guide, disposed in the second space, connected to the valve body assembly, and connected to the lead screw seat.

7. A vertical valve according to claim 6, characterized in that: The lead screw seat includes: a base, which is sleeved on the lead screw and spaced apart from the lead screw, with one end connected to the lead screw nut; and a boss, which is connected to the base and connected to one end of the main shaft structure. The linear guide includes: a linear guide rail connected to the valve body assembly and spaced parallel to the lead screw; a slider slidably connected to the linear guide rail, and the slider is disposed at a positioning stop on the base and connected to the base; and a limiting block connected to the linear guide rail and spaced apart from the slider for blocking the slider.

8. A vertical valve according to claim 3 or 7, characterized in that: The main shaft structure includes: a main shaft, one end of which is connected to the lead screw assembly, and the other end of which passes through the second space and the process chamber wall and is connected to the valve plate; And a bellows, fitted on the main shaft, with one end connected to the main shaft and the other end abutting against the wall of the process chamber.

9. A vertical valve according to claim 8, characterized in that: Also includes: Two protective components are disposed in the second space and connected to the valve body assembly to protect the spindle structure. The protective component includes a connecting block for connecting to the valve body assembly; And a protective block, connected to the connecting block, wherein one side wall of the protective block has an arc-shaped surface facing the corrugated pipe and surrounding the corrugated pipe.

10. A vertical valve according to claim 9, characterized in that: Also includes: A heat dissipation structure is provided on the valve body assembly for heat dissipation; The heat dissipation structure includes a fan connected to the valve body, disposed in the first space, facing the vent on the valve body, for circulating air; And at least two ventilation ducts, spaced apart on the valve body, connecting the first space and the second space.

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