Bundle brake rubber ammeter control box and electron beam exposure machine

Abstract

The invention discloses a beam brake rubber ammeter control box and an electron beam exposure machine, and the beam brake rubber ammeter control box comprises a housing; the first circuit board is arranged in the shell, a single chip microcomputer and a picoammeter control circuit are arranged on the first circuit board, and the single chip microcomputer is connected with the picoammeter control circuit; the second circuit board is arranged in the shell, a beam gate control circuit is arranged on the second circuit board, and the beam gate control circuit is connected with the single chip microcomputer; and the switching power supply is arranged in the shell, and the switching power supply is respectively connected with the first circuit board and the second circuit board. According to the invention, the picoammeter control circuit and the beam gate control circuit are integrated in one device, so that a user can realize high-voltage control and electron beam current testing on the same device, and convenience is provided for the user. The high voltage of the adjustable beam gate can eliminate the charging and discharging problems of imaging and exposure caused by long-term fixed-point bombardment of the deflected electron beam on the diaphragm.

Description

Technical Field

[0001] This invention relates to the field of photolithography, and more particularly to a beam shutter diaphragm control box and an electron beam exposure machine. Background Technology

[0002] In electron beam lithography, the electron beam needs to be switched on and off at high speed. The actuator for this is the beam gate. When tens or hundreds of volts of voltage are applied across the beam gate, an electric field is generated within the beam gate, deflecting the electron beam. The deflected electron beam then strikes the aperture, at which point the electron beam is switched off. When there is no voltage across the beam gate, the electron beam passes through the aperture, at which point the electron beam is switched on. High-speed control of this high voltage is crucial in electron beam lithography, and this is generally achieved through a beam gate control circuit. Furthermore, the beam current directly determines the number of electrons reaching the sample per unit time, i.e., the exposure dose. If the beam current is too high, it may lead to overexposure of the resist, causing pattern distortion or linewidth loss; if the beam current is too low, it may result in insufficient exposure, failing to form a clear pattern. Therefore, it is necessary to test the picoampere level electron beam current passing through the Faraday cup before electron beam lithography.

[0003] However, in the existing electron beam lithography process, high voltage control and electron beam current testing before electron beam lithography are implemented on different devices, requiring users to operate two devices, which causes inconvenience to users.

[0004] Therefore, existing technologies still need to be improved and developed. Summary of the Invention

[0005] In view of the shortcomings of the prior art, the purpose of the present invention is to provide a beam gate diaphragm control box and an electron beam exposure machine to solve the problem that the high voltage control in the existing electron beam lithography process and the electron beam current testing before electron beam lithography need to be on different devices, which causes inconvenience to users.

[0006] The technical solution of the present invention is as follows: In a first aspect, the present invention provides a clamping device control box for a safety meter, comprising: case; A first circuit board is disposed inside the housing. The first circuit board is provided with a microcontroller and a picoammeter control circuit, and the microcontroller is connected to the picoammeter control circuit. A second circuit board is disposed inside the housing. A brake control circuit is disposed on the second circuit board and the brake control circuit is connected to the microcontroller. A switching power supply is disposed inside the housing, and the switching power supply is connected to the first circuit board and the second circuit board respectively.

[0007] A further feature of the present invention includes a picoammeter reading head, a high-voltage reading head, a temperature alarm indicator light, and a beam shutdown indicator light; wherein, The pianisole display head is connected to the microcontroller; The high-voltage indicator is connected to the brake control circuit. The temperature alarm indicator light is connected to the picoammeter control circuit; The beam shut-off indicator light is connected to the beam gate control circuit.

[0008] A further feature of the present invention includes: an adjustable high-voltage rheostat and a high-voltage control knob; wherein, The adjustable high-voltage rheostat is connected to the clamp control circuit. The high-voltage control knob is located on the housing and connected to the adjustable high-voltage rheostat.

[0009] In a further embodiment of the present invention, the picoammeter control circuit includes: a picoammeter current detection module, a microcontroller signal amplification module, a serial communication module, a temperature detection module, and an LED signal output module; wherein, The picoammeter current detection module is connected to the microcontroller and is used to convert the input current into a voltage signal and input it to the microcontroller. The microcontroller signal amplification module is connected to the microcontroller and the clamping gate control circuit, and is used to generate a high voltage control signal to the clamping gate control circuit to control the magnitude of the clamping gate high voltage. The serial communication module is connected to the microcontroller and is used to realize communication between the microcontroller and the host computer. The temperature detection module is connected to the microcontroller and is used to detect the operating temperature; The LED signal output module is connected to the microcontroller signal amplification module and is used to trigger an alarm when the operating temperature exceeds the temperature threshold.

[0010] In a further embodiment of the present invention, the brake control circuit includes: a half-bridge drive module, a high-voltage supply module, a brake status LED module, a high-voltage indicator interface module, and a sliding rheostat power supply interface module; wherein, The half-bridge drive module is used to receive TTL level signals and outputs a clamp control signal according to the TTL level signals to control the opening and closing of the clamp. The high-voltage supply module is connected to the brake state LED module and is used to generate a high-voltage value; The beam gate status LED module is connected to the half-bridge drive module and the beam current shutdown indicator light respectively, and is used to display the working status of the half-bridge drive module. The high-voltage indicator interface module is connected to the high-voltage indicator and is used to transmit the high-voltage value to the high-voltage indicator. The power supply interface module of the sliding rheostat is connected to the high-voltage control knob.

[0011] In a further embodiment of the present invention, the picoammeter current detection module includes: a first resistor, a second resistor, a third resistor, a fourth resistor, a fifth resistor, a sixth resistor, a first capacitor, and a first operational amplifier; One end of the first resistor is connected to current, and the other end of the first resistor is connected to one end of the second resistor; The other end of the second resistor is connected to the inverting input of the first operational amplifier, the output of the first operational amplifier is connected to one end of the third resistor, and the non-inverting input of the first operational amplifier is grounded. The other end of the third resistor is connected to the microcontroller. One end of the fourth resistor is connected to the other end of the third resistor, and the other end of the fourth resistor is grounded. The first capacitor is connected in parallel with the fourth resistor; The fifth resistor is connected between the first operational amplifier and one end of the sixth resistor, and the other end of the sixth resistor is connected to one end of the second resistor.

[0012] In a further embodiment of the present invention, the serial communication module includes: a digital isolator, a receiving chip, and a serial communication interface; the digital isolator is connected to the microcontroller and the receiving chip; the receiving chip is connected to the serial communication interface; and the serial communication interface is used to connect to a host computer.

[0013] In a further embodiment of the present invention, the microcontroller signal amplification module includes: a first signal amplification chip, a seventh resistor, an eighth resistor, and a high-voltage control interface for the clamping gate; The first signal amplification chip is connected to the microcontroller; One end of the seventh resistor is connected to the first signal amplification chip, the other end of the seventh resistor is connected to the high-voltage control interface of the clamping gate, one end of the eighth resistor is connected to one end of the seventh resistor, and the other end of the eighth resistor is grounded.

[0014] In a further embodiment of the present invention, the half-bridge drive module includes: an inverter chip, a half-bridge drive chip, a ninth resistor, a tenth resistor, a first MOSFET, a second MOSFET, a first diode, and a second diode; wherein, The inverter chip is connected to the half-bridge driver chip and is used to receive TTL level signals; The half-bridge driver chip is connected to one end of the ninth resistor and one end of the tenth resistor, respectively. The other end of the ninth resistor is connected to the gate of the first MOS transistor, and the other end of the tenth resistor is connected to the gate of the second MOS transistor. The cathode of the first diode is connected to the drain of the first MOSFET, the anode of the first diode is connected to the cathode of the second diode, and the anode of the second diode is connected to the source of the second MOSFET. The high-voltage supply module includes: a high-voltage chip and a high-voltage control interface; The high-voltage chip is connected to the high-voltage control interface and the brake status LED module. The high-voltage control interface is also connected to the adjustable high-voltage rheostat and the microcontroller.

[0015] Secondly, the present invention also provides an electron beam exposure machine, which includes the beam dam control box as described above.

[0016] This invention provides a picoammeter control box and an electron beam exposure machine. The picoammeter control box includes: a housing; a first circuit board disposed within the housing, on which a microcontroller and a picoammeter control circuit are disposed, the microcontroller being connected to the picoammeter control circuit; a second circuit board disposed within the housing, on which a beam gate control circuit is disposed, the beam gate control circuit being connected to the microcontroller; and a switching power supply disposed within the housing, connected to both the first and second circuit boards. This invention integrates the picoammeter control circuit and the beam gate control circuit into a single device, allowing users to achieve high-voltage control and electron beam testing on the same device, providing convenience for users. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0018] Figure 1 This is a control principle diagram of the clamping brake diaphragm control box in one embodiment of the present invention.

[0019] Figure 2 This is a circuit diagram of the picoammeter control circuit in one embodiment of the present invention.

[0020] Figure 3 This is a circuit schematic diagram of a microcontroller in one embodiment of the present invention.

[0021] Figure 4 This is a circuit diagram of a picoammeter current detection module in one embodiment of the present invention.

[0022] Figure 5 This is a circuit diagram of a microcontroller signal amplification module and an LED signal output module in one embodiment of the present invention.

[0023] Figure 6 This is a circuit schematic diagram of a serial communication module in one embodiment of the present invention.

[0024] Figure 7 This is a circuit diagram of a temperature detection module in one embodiment of the present invention.

[0025] Figure 8 This is a circuit schematic diagram of a half-bridge driver module in one embodiment of the present invention.

[0026] Figure 9 This is a circuit diagram of a high-voltage supply module in one embodiment of the present invention.

[0027] Figure 10 This is a circuit diagram of a high-voltage indicator interface module in one embodiment of the present invention.

[0028] Figure 11 This is a circuit diagram of the LED module in the clamping state according to one embodiment of the present invention.

[0029] Figure 12 This is a circuit diagram of the power supply interface module of the sliding rheostat in one embodiment of the present invention.

[0030] Figure 13 This is a schematic diagram of the structure of the clamping brake caliper control box in one embodiment of the present invention.

[0031] Figure 14 This is a schematic diagram of the control box of the clamping brake pad ammeter from another angle in one embodiment of the present invention.

[0032] Figure 15 This is a schematic diagram of the internal structure of the clamping brake caliper control box in one embodiment of the present invention.

[0033] The following are the markings in the attached diagram: 1. Housing; 2. First circuit board; 21. Microcontroller; 22. Picoammeter control circuit; 221. Picoammeter current detection module; 222. Microcontroller signal amplification module; 223. Serial communication module; 224. Temperature detection module; 225. LED signal output module; 3. Second circuit board; 31. Brake control circuit; 311. Half-bridge drive module; 312. High voltage supply module; 313. Brake status LED module; 314. High voltage indicator interface module; 315. Sliding rheostat power supply interface module; 4. Switching power supply; 5. Picoammeter indicator; 6. High voltage indicator; 7. Temperature alarm indicator; 8. Brake current shutdown indicator; 9. Adjustable high voltage rheostat; 10. High voltage control knob; 11. Cooling fan; 12. Brake push-button switch; 13. Picoammeter push-button switch; 14. Toggle switch. Detailed Implementation

[0034] This invention provides a beam dam control box and an electron beam exposure machine. To make the objectives, technical solutions, and effects of this invention clearer and more explicit, the invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

[0035] In the implementation methods and claims, unless otherwise specified in the text, the terms "a," "an," "the," and "the" may also include plural forms. If the embodiments of the present invention involve descriptions of "first," "second," etc., such descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features.

[0036] It should be further understood that the term "comprising" as used in this specification means the presence of the stated features, integers, steps, operations, elements, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof. It should be understood that when an element is referred to as "connected" or "coupled" to another element, it can be directly connected or coupled to the other element, or there may be intermediate elements present. Furthermore, "connected" or "coupled" as used herein can include wireless connections or wireless coupling. The term "and / or" as used herein includes all or any of the units and all combinations thereof of one or more associatedly listed items.

[0037] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the same meaning as in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless specifically defined as herein.

[0038] Furthermore, the technical solutions of the various embodiments can be combined with each other, but only if they are feasible for those skilled in the art. If the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0039] Please also refer to Figures 1 to 15 The present invention provides a preferred embodiment of a clamping gate galvanometer control box.

[0040] In some embodiments, such as Figure 1 and Figure 2 as well as Figure 15 As shown, the present invention provides a picoammeter control box, comprising: a housing 1, a first circuit board 2, a second circuit board 3, and a switching power supply 4. The first circuit board 2 is disposed within the housing 1, and a microcontroller 21 and a picoammeter control circuit 22 are disposed on the first circuit board 2, the microcontroller 21 being connected to the picoammeter control circuit 22; the second circuit board 3 is disposed within the housing 1, and a picoammeter control circuit 31 is disposed on the second circuit board 3, the picoammeter control circuit 31 being connected to the microcontroller 21; the switching power supply 4 is disposed within the housing 1, and the switching power supply 4 is connected to both the first circuit board 2 and the second circuit board 3.

[0041] In this embodiment, the housing 1 has an accommodating space, and the first circuit board 2, the second circuit board 3 and the switching power supply 4 are all installed inside the housing 1.

[0042] The first circuit board 2 is equipped with a microcontroller 21 and a picoammeter control circuit 22. The microcontroller 21 enables communication between the picoammeter control circuit 22 and a host computer, thereby enabling functions such as reading and writing parameters, calibrating the current source, and setting high voltage. The picoammeter control circuit 22 can perform picoammeter-level electron beam current testing through a Faraday cup, and the beam gate control circuit 31 can control the beam gate plates, thereby controlling whether the electron beam can pass through the aperture.

[0043] The switching power supply 4 is connected to the first circuit board 2 and the second circuit board 3 respectively, and can provide power supply voltage for the microcontroller 21, the picoammeter control circuit 22 and the brake control circuit 31. The switching power supply 4 can provide 5V, 12V, and 24V power.

[0044] In the above technical solution, by integrating the picoammeter control circuit 22 and the beam brake control circuit 31 into one device, beam brake control and picoammeter functions are realized in the same equipment. This allows users to perform high-voltage control and electron beam testing on the same device, providing convenience for users.

[0045] In some embodiments, please refer to Figure 1 and combined Figure 13 and Figure 14 The picoammeter control box also includes a picoammeter reading head 5, a high-voltage reading head 6, a temperature alarm indicator 7, and a beam shutdown indicator 8. The picoammeter reading head 5 is connected to the microcontroller 21; the high-voltage reading head 6 is connected to the beam shutdown control circuit 31; the temperature alarm indicator 7 is connected to the picoammeter control circuit 22; and the beam shutdown indicator 8 is connected to the beam shutdown control circuit 31.

[0046] In this embodiment, the housing 1 is equipped with a picoammeter reading head 5 and a temperature alarm indicator 7. The picoammeter reading head 5 is connected to the microcontroller 21 and can display the detected current value in real time on the picoammeter reading head 5. The detection current range of the picoammeter reading head 5 is 0-10nA, with an accuracy of 1pA. The temperature alarm indicator 7 is activated when the operating temperature of the picoammeter control box exceeds the operating threshold temperature, thus detecting the operating temperature of the control box. The high-voltage reading head 6 is connected to the clamping control circuit 31 and can display the current voltage. The beam current shutdown indicator 8 can indicate the switch on / off of the clamping circuit or the on / off of the electron beam, allowing operators to understand the current operating status of the clamping picoammeter control box. In one implementation, both the temperature alarm indicator 7 and the beam current shutdown indicator 8 are LED lights.

[0047] In some embodiments, please refer to Figure 1 and combined Figure 13 The brake clamp meter control box also includes: an adjustable high-voltage rheostat 9 and a high-voltage control knob 10. The adjustable high-voltage rheostat 9 is connected to the brake clamp control circuit 31; the high-voltage control knob 10 is mounted on the housing 1 and connected to the housing.

[0048] In this embodiment, the adjustable high-voltage rheostat 9 is connected to the brake control circuit 31. The adjustable high-voltage rheostat 9 can be adjusted by the high-voltage control knob 10 to adjust the output high voltage level. The adjustment range is 0-200V.

[0049] In some embodiments, please refer to Figure 1 and Figure 2 The picoammeter control circuit 22 includes: a picoammeter current detection module 221, a microcontroller signal amplification module 222, a serial communication module 223, a temperature detection module 224, and an LED signal output module 225; wherein, the picoammeter current detection module 221 is connected to the microcontroller 21 and is used to convert the input current into a voltage signal and input it to the microcontroller 21; the microcontroller signal amplification module 222 is connected to the microcontroller 21 and the brake control circuit 31 and is used to generate a high-voltage control signal to the brake control circuit 31 to control the magnitude of the brake high voltage; the serial communication module 223 is connected to the microcontroller 21 and is used to realize communication between the microcontroller 21 and the host computer; the temperature detection module 224 is connected to the microcontroller 21 and is used to detect the operating temperature; the LED signal output module 225 is connected to the microcontroller signal amplification module 222 and is used to alarm when the operating temperature exceeds the temperature threshold.

[0050] In this embodiment, the picoammeter current detection module 221 collects the input current and sends it to the microcontroller 21. After calibration by the microcontroller 21, the current is displayed in real time on the picoammeter reading header 5. The serial communication module 223 can be connected to a host computer, allowing the host computer to communicate with the microcontroller 21 via the serial communication module 223, thereby enabling functions such as parameter reading and writing, current calibration, and high voltage setting.

[0051] In some embodiments, please refer to Figure 4The picoammeter current detection module 221 includes: a first resistor R1, a second resistor R2, a third resistor R3, a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, a first capacitor C1, and a first operational amplifier U1. One end of the first resistor R1 is connected to a current source, and the other end of the first resistor R1 is connected to one end of the second resistor R2. The other end of the second resistor R2 is connected to the inverting input of the first operational amplifier U1, and the output of the first operational amplifier U1 is connected to one end of the third resistor R3. The non-inverting input of the first operational amplifier U1 is grounded. The other end of the third resistor R3 is connected to the microcontroller 21. One end of the fourth resistor R4 is connected to the other end of the third resistor R3, and the other end of the fourth resistor R4 is grounded. The first capacitor C1 is connected in parallel with the fourth resistor R4. The fifth resistor R5 is connected between the first operational amplifier U1 and one end of the sixth resistor R6, and the other end of the sixth resistor R6 is connected to one end of the second resistor R2.

[0052] In this embodiment, one end of the first resistor R1 is connected to the electron beam input interface SMA1, enabling the input of an electron beam (i.e., input current). The input current is input to the first operational amplifier U1 via the second resistor R2. The input current is amplified into a voltage signal by the first operational amplifier U1, and then input to the microcontroller 21 via the third resistor R3. The microcontroller 21 displays the current value in real time on the picoammeter reading head 5 using a pre-set calibration algorithm. The first capacitor C1 is a filter capacitor, and the fourth resistor R4 and the first capacitor C1 form a filter circuit. In this embodiment, the microcontroller 21 and the picoammeter reading head 5 are connected via a picoammeter interface.

[0053] In some embodiments, please refer to Figure 6 The serial communication module 223 includes: a digital isolator U4, a receiving chip U3, and a serial communication interface CN3; the digital isolator U4 is connected to the microcontroller 21 and the receiving chip U3; the receiving chip U3 is connected to the serial communication interface CN3; the serial communication interface CN3 is used to connect to a host computer.

[0054] In this embodiment, the picoammeter control box communicates with the host computer through the serial communication interface CN3. The receiving chip U3 receives the data sent by the host computer and sends it to the microcontroller 21 through the digital isolator U4, so as to realize the functions of reading the picoammeter current value, reading and writing parameters, calibrating current, and setting the high voltage lamp.

[0055] In some embodiments, please refer to Figure 5The microcontroller signal amplification module 222 includes: a first signal amplification chip U2, a seventh resistor R7, an eighth resistor R8, and a high-voltage control interface CN1 for the clamping gate; the first signal amplification chip U2 is connected to the microcontroller 21; one end of the seventh resistor R7 is connected to the first signal amplification chip U2, the other end of the seventh resistor R7 is connected to the high-voltage control interface CN1 for the clamping gate, one end of the eighth resistor R8 is connected to one end of the seventh resistor R7, and the other end of the eighth resistor R8 is grounded.

[0056] In this embodiment, the first signal amplification chip U2 is connected between the microcontroller 21 and the high-voltage control interface CN1 of the brake, and can convert the high-voltage control signal PA4 / DA output by the microcontroller 21 into DA_ADJ and output it to the second circuit board 3 through the high-voltage control interface CN1, so as to realize the function of program control to set the magnitude of the high voltage of the brake.

[0057] Furthermore, the LED signal output module 225 includes an LED signal output interface CN2, which is connected to the first signal amplification chip U2 and is used to connect to the temperature alarm indicator 7. When the operating temperature exceeds a preset value, the temperature alarm indicator 7 is driven to light up.

[0058] In some embodiments, please refer to Figure 7 The temperature detection module 224 includes a temperature sensor U5, which is mounted on the first circuit board 2 and connected to the microcontroller 21. The temperature sensor can monitor the operating temperature of the brake picoammeter control box in real time and feed the operating temperature data back to the microcontroller 21. The microcontroller 21 collects the operating temperature value in real time, and when the operating temperature exceeds a preset value, it drives the temperature alarm indicator 7 to light up.

[0059] In some embodiments, please refer to Figure 1 as well as Figures 8 to 12The brake control circuit 31 includes: a half-bridge drive module 311, a high-voltage supply module 312, a brake status LED module 313, a high-voltage indicator interface module 314, and a sliding rheostat power supply interface module 315. The half-bridge drive module 311 receives a TTL level signal and outputs a brake control signal based on the TTL level signal to control the on / off state of the brake. The high-voltage supply module 312 is connected to the brake status LED module 313 and generates a high-voltage value. The brake status LED module 313 is connected to both the half-bridge drive module 311 and the brake current off indicator 8 to display the operating status of the half-bridge drive module 311. The high-voltage indicator interface module 314 is connected to the high-voltage indicator 6 and transmits the high-voltage value to the high-voltage indicator 6. The sliding rheostat power supply interface module 315 is connected to the high-voltage control knob 10.

[0060] In this embodiment, the half-bridge drive module 311 can output a gate control signal to control the switching on and off of the electron beam based on the TTL level signal input from the TTL level interface SMA2. The gate control signal is a high voltage or a 0V voltage and is output through the gate control interface SMA3. This gate control signal enables the switching on and off of the electron beam and the switching on and off of the electron beam. The beam current shutdown indicator 8 is connected to the half-bridge drive module 311. The beam current shutdown indicator 8 illuminates when the half-bridge drive module 311 outputs a high voltage and turns off when the half-bridge drive module 311 outputs a 0V voltage.

[0061] In some embodiments, please refer to Figure 8 The half-bridge driver module 311 includes: an inverter chip U6, a half-bridge driver chip U7, a ninth resistor R9, a tenth resistor R10, a first MOSFET Q1, a second MOSFET Q2, a first diode D1, and a second diode D2. The inverter chip U6 is connected to the half-bridge driver chip U7 to receive TTL level signals. The half-bridge driver chip U7 is connected to one end of the ninth resistor R9 and one end of the tenth resistor R10. The other end of the ninth resistor R9 is connected to the gate of the first MOSFET Q1, and the other end of the tenth resistor R10 is connected to the gate of the second MOSFET Q2. The cathode of the first diode D1 is connected to the drain of the first MOSFET Q1, the anode of the first diode D1 is connected to the cathode of the second diode D2, and the anode of the second diode D2 is connected to the source of the second MOSFET Q2.

[0062] In this embodiment, the half-bridge driver chip U7, the ninth resistor R9, the tenth resistor R10, the first MOSFET Q1, the second MOSFET Q2, the first diode D1, and the second diode D2 constitute a half-bridge circuit, which can output a gate control signal to control the switching on and off of the gate according to the input TTL level signal. In one implementation, the inverter chip U6 is a six-channel inverter.

[0063] In some embodiments, please refer to Figure 9 The high-voltage supply module 312 includes a DC-DC boost converter chip U8 and a high-voltage supply interface CN4. The DC-DC boost converter chip U8 is used to convert the input power supply (e.g., 12V) into a voltage of 0V-200V. The voltage of the DC-DC boost converter chip U8 is controlled via pins 3 and 4. The high-voltage supply interface CN4 is connected to the high-voltage adjustable rheostat or the microcontroller 21.

[0064] The selection of the adjustable high-voltage rheostat 9 or the microcontroller 21 is achieved through a toggle switch 14 on the housing 1. The principle is as follows: the first signal amplification chip U2 consists of two independent operational amplifiers. One operational amplifier converts the microcontroller signal PA4 / DA to DA_ADJ, and the other amplifies the microcontroller signal to drive the temperature alarm indicator 7 on the housing. The toggle switch 14 can select either the DA_ADJ signal converted by the microcontroller or the sliding knob rheostat on the housing, thus controlling the output voltage using either the microcontroller or the rheostat. This voltage is then connected to the high-voltage supply interface CN4 to set the voltage of the DC boost chip U7. Specifically, the high-voltage control knob 10 can adjust the adjustable high-voltage rheostat to achieve the high voltage, or the high voltage can be achieved through the microcontroller 21. It should be noted that existing beam gate high voltages are fixed values, which cannot flexibly control the landing point of the deflected electron beam. This results in the electron beam bombarding the same point of the aperture for a long time, easily causing charging and discharging effects, affecting imaging and electron beam lithography. The present invention employs an adjustable beam gate high voltage method to eliminate the charging and discharging problems of imaging and exposure caused by long-term fixed-point bombardment of the aperture by the deflected electron beam.

[0065] Further, please refer to Figure 12 The sliding rheostat power supply interface module 315 includes a sliding rheostat power supply interface CN7, and the adjustable high voltage rheostat 9 is connected to the brake control circuit 31 through the sliding rheostat power supply interface CN7.

[0066] In some embodiments, please refer to Figure 11The beam shut-off status LED module 313 includes a second signal amplification chip U9 and a high-voltage display LED interface CN6. The second signal amplification chip U9 is connected to the inverter chip U6, and the high-voltage display LED interface CN6 is connected to the beam shut-off indicator light 8. When the inverter chip U6 receives a TTL level signal, the beam shut-off indicator light 8 illuminates.

[0067] In some embodiments, the high-voltage indicator interface module 314 includes a high-voltage indicator interface CN5, which is connected to the high-voltage indicator and can display the connected high voltage in real time.

[0068] In some embodiments, please refer to Figure 10 The clamping brake permeameter control box also includes a cooling fan 11, which is disposed inside the housing 1 and connected to the switching power supply 4, and can transfer the heat generated by the clamping brake permeameter control box during operation to the outside of the housing 1 through the air.

[0069] In some embodiments, please refer to Figure 1 The housing 1 is also equipped with a brake switch 12 and a picoammeter switch 13. The brake switch 12 is connected to the brake control circuit 31 and is used to control the working state of the brake control circuit 31, while the picoammeter switch 13 is used to control the working state of the picoammeter control circuit 22.

[0070] In some embodiments, the present invention also provides an electron beam exposure machine, which includes a beam shutter picoammeter control box and a beam shutter as described above. Specific embodiments of the beam shutter picoammeter control box are described herein and will not be repeated here.

[0071] In summary, the beam shutter galvanometer control box and electron beam exposure machine provided by the present invention have the following beneficial effects: This invention integrates the functions of a beam gate controller and a picoammeter, allowing users to perform high-voltage control and electron beam testing on the same device, providing convenience for users. Adjustable beam gate high voltage can eliminate the charging and discharging problems of imaging and exposure caused by long-term fixed-point bombardment of the aperture by deflected electron beam; It adds functions such as high voltage adjustment and remote communication. The high voltage output of the beam gate plate is controlled by an external TTL level input, ranging from 0 to 200V (which can be modified via a front panel knob or serial communication). The rise time of the high voltage is approximately 10ns. The left meter on the front panel clearly displays the current set high voltage value, while the beam shutdown indicator shows whether the electron beam is in the off state. The Faraday cup current flows in through the interface on the rear panel, and the current value can be read directly from the meter on the front panel. The current detection range is 0 to -10nA, and the accuracy can reach 1pA. It features a built-in fan and temperature sensor; the temperature alarm indicator will light up when the temperature exceeds the upper or lower limit. The rear panel has a serial communication interface, allowing functions such as reading the current value of the picoammeter, setting the high voltage value of the clamping gate, setting the temperature alarm line, and calibrating the picoammeter via serial protocol.

[0072] It should be understood that the application of the present invention is not limited to the examples above. Those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. A control box for a clamping device and a safety meter, characterized in that, include: case; A first circuit board is disposed inside the housing. The first circuit board is provided with a microcontroller and a picoammeter control circuit, and the microcontroller is connected to the picoammeter control circuit. A second circuit board is disposed inside the housing. A brake control circuit is disposed on the second circuit board and the brake control circuit is connected to the microcontroller. A switching power supply is disposed inside the housing, and the switching power supply is connected to the first circuit board and the second circuit board respectively.

2. The control box for the clamping device according to claim 1, characterized in that, It also includes a picoampere meter, a high-voltage meter, a temperature alarm indicator, and a beam shut-off indicator; among which, The pianisole display head is connected to the microcontroller; The high-voltage indicator is connected to the brake control circuit. The temperature alarm indicator light is connected to the picoammeter control circuit; The beam shut-off indicator light is connected to the beam gate control circuit.

3. The control box for the clamping device according to claim 2, characterized in that, Also includes: Adjustable high-voltage rheostat and high-voltage control knob; among which... The adjustable high-voltage rheostat is connected to the clamp control circuit. The high-voltage control knob is located on the housing and connected to the adjustable high-voltage rheostat.

4. The control box for the clamping device according to claim 1, characterized in that, The picoammeter control circuit includes: a picoammeter current detection module, a microcontroller signal amplification module, a serial communication module, a temperature detection module, and an LED signal output module; wherein... The picoammeter current detection module is connected to the microcontroller and is used to convert the input current into a voltage signal and input it to the microcontroller. The microcontroller signal amplification module is connected to the microcontroller and the brake control circuit, and is used to generate a high voltage control signal to the brake control circuit to set the magnitude of the brake high voltage; the serial communication module is connected to the microcontroller and is used to realize communication between the microcontroller and the host computer. The temperature detection module is connected to the microcontroller and is used to detect the operating temperature; The LED signal output module is connected to the microcontroller signal amplification module and is used to trigger an alarm when the operating temperature exceeds the temperature threshold.

5. The control box for the clamping device according to claim 3, characterized in that, The brake clamp control circuit includes: a half-bridge drive module, a high-voltage supply module, a brake clamp status LED module, a high-voltage indicator interface module, and a sliding rheostat power supply interface module; wherein... The half-bridge drive module is used to receive TTL level signals and outputs a clamp control signal according to the TTL level signals to control the opening and closing of the clamp. The high-voltage supply module is connected to the brake state LED module and is used to generate a high-voltage value; The beam gate status LED module is connected to the half-bridge drive module and the beam current shutdown indicator light respectively, and is used to display the working status of the half-bridge drive module. The high-voltage indicator interface module is connected to the high-voltage indicator and is used to transmit the high-voltage value to the high-voltage indicator. The power supply interface module of the sliding rheostat is connected to the high-voltage control knob.

6. The control box for the clamping device according to claim 4, characterized in that, The picoammeter current detection module includes: a first resistor, a second resistor, a third resistor, a fourth resistor, a fifth resistor, a sixth resistor, a first capacitor, and a first operational amplifier; One end of the first resistor is connected to current, and the other end of the first resistor is connected to one end of the second resistor; The other end of the second resistor is connected to the inverting input of the first operational amplifier, the output of the first operational amplifier is connected to one end of the third resistor, and the non-inverting input of the first operational amplifier is grounded. The other end of the third resistor is connected to the microcontroller. One end of the fourth resistor is connected to the other end of the third resistor, and the other end of the fourth resistor is grounded. The first capacitor is connected in parallel with the fourth resistor; The fifth resistor is connected between the first operational amplifier and one end of the sixth resistor, and the other end of the sixth resistor is connected to one end of the second resistor.

7. The control box for the clamping device according to claim 4, characterized in that, The serial communication module includes: a digital isolator, a receiving chip, and a serial communication interface; the digital isolator is connected to the microcontroller and the receiving chip; the receiving chip is connected to the serial communication interface; the serial communication interface is used to connect to a host computer.

8. The control box for the clamping device according to claim 4, characterized in that, The microcontroller signal amplification module includes: a first signal amplification chip, a seventh resistor, an eighth resistor, and a high-voltage control interface for the clamping gate. The first signal amplification chip is connected to the microcontroller; One end of the seventh resistor is connected to the first signal amplification chip, the other end of the seventh resistor is connected to the high-voltage control interface of the clamping gate, one end of the eighth resistor is connected to one end of the seventh resistor, and the other end of the eighth resistor is grounded.

9. The control box for the clamping device according to claim 5, characterized in that, The half-bridge driver module includes: an inverter chip, a half-bridge driver chip, a ninth resistor, a tenth resistor, a first MOSFET, a second MOSFET, a first diode, and a second diode; wherein, The inverter chip is connected to the half-bridge driver chip and is used to receive TTL level signals; The half-bridge driver chip is connected to one end of the ninth resistor and one end of the tenth resistor, respectively. The other end of the ninth resistor is connected to the gate of the first MOS transistor, and the other end of the tenth resistor is connected to the gate of the second MOS transistor. The cathode of the first diode is connected to the drain of the first MOSFET, the anode of the first diode is connected to the cathode of the second diode, and the anode of the second diode is connected to the source of the second MOSFET. The high-voltage supply module includes: a high-voltage chip and a high-voltage control interface; The high-voltage chip is connected to the high-voltage control interface and the brake status LED module. The high-voltage control interface is also connected to the adjustable high-voltage rheostat and the microcontroller.

10. An electron beam exposure machine, characterized in that, Includes the brake pad ammeter control box as described in any one of claims 1-9.

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