Substrate processing system and substrate transfer method

Abstract

The invention provides a substrate processing system. The substrate processing system comprises a plurality of stations, a transfer device and a conveying device, wherein the transfer device is arranged on the station and is used for taking and placing the substrate; the conveying device is arranged in the arrangement direction of the multiple stations and used for transferring the substrates to any station so that the substrates can be taken and used by the transferring device. According to the substrate processing system, the transfer work of the substrate is completed through cooperation of the transfer device and the conveying device, and the transfer efficiency of the substrate is greatly improved. Furthermore, when the base plate is transferred through the conveying device, normal work of other stations is not affected, and the efficiency of the base plate transferring system is effectively improved. On the other hand, the invention further provides a base plate transfer method, the transfer work of the base plate is completed through cooperation of the transfer device and the conveying device, and the transfer efficiency of the base plate is greatly improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a substrate processing system and a substrate transfer method. Background Technology

[0002] In the semiconductor industry, a "substrate" refers to the base material (such as a wafer) used to manufacture integrated circuits (ICs) or other semiconductor devices. It is the starting point of semiconductor manufacturing, typically serving as a support or underlying structure for depositing, etching, and building different layers of semiconductor components. Substrate processing involves multiple steps, and the transfer of substrates between different workstations is handled by robotic arms in the substrate handling system.

[0003] In existing technologies, substrate processing systems mainly include a loading unit, multiple workstations, and a transfer robot. The loading unit is located at the beginning of the processing system to facilitate substrate input. The transfer robot is distributed among the various workstations, moving between the loading unit and different workstations. Due to limitations in the robot's pick-up range, one or more transition robots are needed between the initial workstation and a more distant workstation. The transfer robots at different workstations use these transition robots to transfer a substrate from the initial workstation to the more distant workstation. Under this approach, the substrate transfer efficiency is very low. Furthermore, in some special process conditions, due to the substrate's process requirements, the robot's transfer speed needs to be reduced. This further reduces transfer efficiency and also leads to a large number of idle transition units and process units in the substrate processing system, significantly reducing the efficiency of the substrate transfer system. Therefore, it is necessary to provide a novel substrate processing system to solve the above-mentioned problems existing in the prior art. Summary of the Invention

[0004] The purpose of this invention is to propose a substrate transfer method and substrate processing system to reduce substrate handling steps and processes, improve system efficiency, and enhance the system's multi-station scalability.

[0005] To achieve the above objectives, a first aspect of the present invention provides a substrate processing system, comprising: Multiple workstations, which are arranged at intervals; A conveying device is arranged along the arrangement direction of the plurality of workstations. The conveying device includes a conveying component for loading the substrate. The conveying component can reciprocate along the arrangement direction of the plurality of workstations to convey the substrate to any position corresponding to any of the plurality of workstations. Multiple transfer devices are provided, corresponding to the multiple workstations. Each transfer device is used to remove the substrate from the workstation corresponding to it and place the substrate on the conveyor. The transfer device is also used to remove the substrate from the conveyor and place the substrate on the workstation corresponding to the transfer device.

[0006] The technical effect achieved by the above technical solution is as follows: A conveying device is set up as a transition unit along the arrangement direction of the multiple workstations, facilitating the transfer of the substrate between different workstations. Specifically, when the substrate needs to be transferred between the current workstation and the target workstation, the conveying device at the current workstation takes the substrate from the current workstation and places it on the conveying device. Then, the conveying device directly transports the substrate to the target workstation. Finally, the conveying device at the target workstation takes the substrate from the conveying device and places it on the target workstation. This design not only allows for rapid transfer of the substrate between two adjacent workstations but also has greater advantages when transferring the substrate between two workstations that are far apart. This solution completes the substrate transfer work through the cooperation of the conveying device and the transfer device, significantly improving the substrate transfer efficiency. Furthermore, while the substrate is transferred via the conveying device, it does not affect the normal operation of other workstations, effectively improving the efficiency of the substrate transfer system.

[0007] Preferably, the conveying device includes: a frame, a conveyor, a guide rail, and a first driving device, wherein the frame extends along the arrangement direction of the plurality of workstations. The conveyor is slidably disposed on the frame for carrying the substrate and transferring the substrate to the corresponding workstation. The guide rail is disposed on the frame and slidably connected to the conveyor, and the guide rail is used to guide the conveyor to slide. The first driving device is mounted on the frame and connected to the conveyor through a transmission mechanism, and the first driving device is used to drive the conveyor to slide along the guide rail.

[0008] The technical effects achieved by the above technical solution are as follows: In the above-mentioned conveying device, the frame extends along the arrangement direction of the multiple workstations to meet the transfer needs of multiple workstations. The conveying component is slidably mounted on the frame, facilitating movement and docking between different workstations. The guide rail facilitates the sliding connection between the conveying component and the frame, and also guides the movement direction of the conveying component. The first driving device and the transmission device provide power for the movement of the conveying component.

[0009] Preferably, the conveying component includes a sliding connection assembly and a substrate support assembly, wherein the sliding connection assembly is slidably connected to the guide rail and slides along the guide rail under the drive of the transmission mechanism. The substrate support assembly is connected to the sliding connection assembly and is used to load the substrate. The technical effect achieved by the above technical solution is that the conveying component achieves a sliding connection with the guide rail through the sliding connection assembly, and loads the substrate through the substrate support assembly.

[0010] Preferably, the sliding connection assembly includes: a mounting plate, a first support plate, and a second support plate. The mounting plate is arranged parallel to the transfer plane of the conveying device. The first support plate and the second support plate are arranged opposite to each other and perpendicularly connected to both ends of the mounting plate. The lower ends of the first support plate and the second support plate are slidably connected to the guide rail. The technical effect achieved by the above technical solution is that the opposing first and second support plates achieve support balance for the sliding connection assembly and a sliding connection with the guide rail. The mounting plate can be used to mount the substrate support assembly.

[0011] Preferably, the substrate support assembly includes fixing blocks and support members. Two fixing blocks are disposed opposite to each other on the mounting plate and fixedly connected to the mounting plate. The support members are mounted on the fixing blocks, and multiple support members cooperate to support the substrate. The technical effect achieved by the above solution is that by providing multiple cooperating support members, the substrate can be stably supported, preventing it from falling or being damaged during transport.

[0012] Preferably, the guide rails include a first guide rail and a second guide rail symmetrically arranged on both sides of the frame. The lower end of the first support plate is slidably connected to the first guide rail, and the lower end of the second support plate is slidably connected to the second guide rail. The technical effect achieved by the above solution is that the symmetrically arranged dual guide rails facilitate stable sliding of the substrate support assembly on the guide rails.

[0013] Preferably, the conveying device includes n conveying components, wherein any two conveying components do not interfere with each other, and the (n-1)th conveying component can pass between the nth conveying component and the frame when sliding along the guide rail. The technical effect achieved by the above solution is that by setting multiple conveying components, and ensuring that these components act independently without interfering with each other, the transfer efficiency of the conveying device for the substrate can be effectively improved.

[0014] Preferably, the transfer device includes: Second drive unit.

[0015] The first robotic arm has one end connected to the power output end of the second drive device and rotates under the drive of the second drive device. A third drive device is installed at the other end.

[0016] The second robotic arm is connected at one end to the power output end of the third drive device and rotates under the drive of the third drive device. A fourth drive device is installed at the other end.

[0017] The third robotic arm is connected at one end to the power output of the fourth driving device and rotates under the drive of the fourth driving device. A tray for picking up and placing substrates is mounted at the other end.

[0018] The technical effect achieved by the above technical solution is that by setting up a first robotic arm, a second robotic arm, and a third robotic arm, the wafer picking range at the execution end of the transfer device can be effectively expanded.

[0019] Preferably, the third robotic arm is connected to a plurality of trays, which are arranged at equal intervals, and the distance between two adjacent trays is greater than the thickness of a single substrate.

[0020] The technical effect achieved by the above technical solution is that by connecting multiple pallets to the third robotic arm, the number of substrates transferred by the transfer device in a single operation can be increased, thereby improving the transfer efficiency of the transfer device.

[0021] A second aspect of the present invention provides a substrate transfer method, comprising the following steps: Step 1: The transfer device removes the substrate from the current workstation and places it on the conveyor.

[0022] Step 2: The conveying device transports the substrate to the target workstation.

[0023] Step 3: The transfer device at the target workstation takes the substrate from the conveying device and transfers the substrate to the target workstation.

[0024] The technical effect achieved by the above technical solution is as follows: In the above substrate transfer method, when transferring the substrate between the current station and the target station, the substrate is first handed over to the conveying device by the transfer device, and then the conveying device directly transports the substrate to the target station. Finally, the transfer device at the target station takes the substrate from the conveying device and transfers it to the target station. In the above process, since the conveying device can directly transfer the substrate from the current station to the target station (regardless of how many stations are between the current station and the target station), the overall substrate transfer efficiency is greatly improved. In addition, since the process of the conveying device transferring the substrate does not affect the normal operation of other stations, the overall substrate processing efficiency of the substrate processing system is greatly improved. Attached Figure Description

[0025] Figure 1 This is an overall schematic diagram of the substrate processing system according to an embodiment of the present invention; Figure 2 This is a first-view structural schematic diagram of the transmission device in an embodiment of the present invention; Figure 3 This is a schematic diagram of the transmission device from a second perspective in an embodiment of the present invention; Figure 4 This is a front view of the conveying device in an embodiment of the present invention; Figure 5 This is a schematic diagram of the structure of the transmission component in an embodiment of the present invention; Figure 6 This is a schematic diagram of the support member in an embodiment of the present invention; Figure 7 This is a schematic diagram of the transfer device in an embodiment of the present invention.

[0026] Figure label: Station 1, Substrate 11, Process Unit 12 Transfer device 2, second drive device 21, first robotic arm 22, second robotic arm 23, third robotic arm 24, pallet 25. Conveying device 3, frame 31, first conveying component 32, guide rail 33, second conveying component 34 Mounting plate 321, first support plate 322, first insert 3221, second support plate 323, second insert 3231 Fixing block 324, support member 325, support column 3251, support plate 3252, First guide groove 331, second guide groove 332 Loading unit 4, feeding robot 5. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects. Unless otherwise specified, "connection" herein can refer to a direct connection or an indirect connection, i.e., a connection through an intermediate object.

[0028] Please see Figure 1 The first embodiment of the present invention provides a substrate processing system, including multiple workstations 1, a transfer device 2, a conveying device 3, and a loading unit 4.

[0029] The plurality of workstations 1 are arranged at intervals; wherein, workstation 1 is provided with a plurality of different process units 12, which are used to process substrates 11 with different processes. "Substrate 11" refers to the basic material used to manufacture integrated circuits (ICs) or other semiconductor devices. In this embodiment, substrate 11 specifically refers to wafers.

[0030] The conveying device 2 is arranged along the arrangement direction of the plurality of workstations 1. The conveying device 2 includes a conveying component for loading the substrate. The conveying component can reciprocate along the arrangement direction of the plurality of workstations 1 to convey the substrate 11 to any position corresponding to any of the workstations 1.

[0031] The plurality of transfer devices 2 correspond to the plurality of workstations 1. In this embodiment, the transfer devices 2 are installed on the workstations 1. The transfer devices 2 are used to remove the substrate 11 from the workstation 1 corresponding to them and place the substrate 11 on the conveyor; the transfer devices 2 are also used to remove the substrate 11 from the conveyor and place the substrate 11 on the workstation 1 corresponding to the transfer device 2.

[0032] The loading unit 4 is located at the beginning of the processing system to facilitate the input of the substrate 11. A loading robot 5 is provided between the foremost station 1 and the loading unit 4. The loading robot 5 takes the substrate 11 to be processed from the loading unit 4 and passes it to the conveying device 3. The transfer device 2 then transfers the substrate 11 to the target station for use by the transfer device 2 at the target station.

[0033] In the above technical solution, a conveying device 3 is arranged along the layout direction of multiple workstations 1 as a transition unit to facilitate the transfer of substrate 11 between different workstations 1. Specifically, when it is necessary to transfer substrate 11 between the current workstation 1 and the target workstation, the conveying device 2 set on the current workstation 1 takes the substrate 11 from the current workstation 1 and places it on the conveying device 3. Then, the conveying device 3 directly transports the substrate 11 to the target workstation. Finally, the conveying device 2 at the target workstation takes the substrate 11 from the conveying device 3 and places it on the target workstation. This design not only enables rapid transfer of substrate 11 between two adjacent workstations 1, but also has greater advantages when transferring substrate 11 between two workstations 1 that are far apart. This solution completes the transfer of substrate 11 through the cooperation of the conveying device 2 and the conveying device 3, which greatly improves the transfer efficiency of substrate 11. Furthermore, while transferring substrate 11 through the conveying device 3, it does not affect the normal operation of other workstations 1, effectively improving the efficiency of the substrate 11 transfer system.

[0034] Please see Figures 2-6 In this embodiment, the conveying device 3 includes: a frame 31, a conveying component, a guide rail 33, and a first driving device (not shown). In this embodiment, there are two conveying components.

[0035] The frame 31 extends along the arrangement direction of the multiple workstations 1. Two conveyors are slidably mounted on the frame 31 to carry the substrate 11 and transfer it to the corresponding workstation 1. A guide rail 33 is mounted on the frame 31 and slidably connected to the conveyors, guiding the conveyors to slide. A first drive device is mounted on the frame 31 and connected to the conveyors via a transmission mechanism, driving the conveyors to slide along the guide rail 33.

[0036] In the conveying device 3, the frame 31 extends along the arrangement direction of multiple workstations 1 to meet the transfer needs of multiple workstations 1. The conveying component is slidably mounted on the frame 31 for easy movement and docking between different workstations 1. The guide rail 33 facilitates the sliding connection between the conveying component and the frame 31, and also guides the movement direction of the conveying component. The first drive device and the transmission device provide power for the movement of the conveying component, and each conveying component is equipped with a corresponding first drive device and transmission device.

[0037] Please see Figure 4 In this embodiment, the conveying component includes a sliding connection assembly and a substrate support assembly. The sliding connection assembly is slidably connected to the guide rail 33 and slides along the guide rail 33 under the drive of the transmission mechanism. The substrate support assembly, connected to the sliding connection assembly, is used to load the substrate 11. The conveying component achieves a sliding connection with the guide rail 33 through the sliding connection assembly and loads the substrate 11 through the substrate support assembly.

[0038] Please see Figures 4-5 In this embodiment, the sliding connection assembly includes: a mounting plate 321, a first support plate 322, and a second support plate 323.

[0039] The mounting plate 321 is arranged parallel to the transfer plane of the conveying device 3, and the first support plate 322 and the second support plate 323 are arranged opposite to each other and vertically connected at both ends of the mounting plate 321. The lower ends of the first support plate 322 and the second support plate 323 are slidably connected to the guide rail 33. The opposing arrangement of the first support plate 322 and the second support plate 323 achieves the supporting balance of the sliding connection assembly and the sliding connection with the guide rail 33. The mounting plate 321 can be used to mount the substrate support assembly.

[0040] Please see Figures 4-5 In this embodiment, the substrate support assembly includes fixing blocks 324 and support members 325. Two fixing blocks 324 are disposed opposite to each other on the mounting plate 321 and are fixedly connected to the mounting plate 321 by bolts. The support members 325 are bolted to the fixing blocks 324, and the four support members 325 cooperate with each other to support the substrate 11. By providing multiple cooperating support members 325, the substrate 11 is stably supported, preventing it from falling or being damaged during transport.

[0041] In this embodiment, two support members 325 are respectively provided on the two opposite sides of the two fixing blocks 324. Four support columns 3251 extend horizontally from the support members 325, and the four support columns 3251 are arranged vertically at intervals. The four support columns 3251 on the same horizontal plane of the four support members 325 cooperate to support one substrate 11. The above four support members 325 can hold a total of four substrates. It is worth mentioning that in other embodiments, the number of support columns 3251 on the support members 325 can be designed according to actual needs.

[0042] For further details, please refer to Figures 4-6 The end of the support post 3251 is provided with a support piece 3252, which directly contacts the bottom surface of the substrate 11 and is supported on the edge of the bottom surface of the substrate 11. A limiting step is formed between the support piece 3252 and the support post 3251 (e.g., Figure 6 The limiting step is used to limit the substrate 11 and prevent the substrate 11 from slipping off the conveyor during the transfer process. Furthermore, the end of the support piece 3252 that contacts the substrate 11 has an arc-shaped edge to avoid scratching the substrate 11 when the support piece 3252 contacts the substrate 11.

[0043] Please see Figures 2-4In this embodiment, the guide rail 33 includes a first guide rail and a second guide rail symmetrically arranged on both sides of the frame 31. The lower end of the first support plate 322 is slidably connected to the first guide rail, and the lower end of the second support plate 323 is slidably connected to the second guide rail. The symmetrical arrangement of the two guide rails facilitates the stable sliding of the substrate support assembly on the guide rails.

[0044] Furthermore, the first guide rail includes a first guide groove 331, and the second guide rail includes a second guide groove 332. Furthermore, the lower end of the first support plate 322 is connected to a first insert 3221, and the lower end of the second support plate 323 is connected to a second insert 3231; wherein, the first insert 3221 is placed in the first guide groove 331 and can slide along the guide groove, and the second insert 3231 is placed in the second guide groove 332 and can slide along the second guide groove 332.

[0045] In this embodiment, the transmission mechanism (not shown) is located inside the frame 31 and includes a synchronous belt and at least two synchronous pulleys. The first insert 3221 and the second insert 3231 of the transmission component are connected to the synchronous belt. When the first drive device drives the synchronous pulleys to rotate, the synchronous pulleys drive the synchronous belt to move, and the synchronous belt drives the first insert 3221 and the second insert 3231 to move, thereby driving the transmission component to slide along the guide rail 33.

[0046] As described above, in this embodiment, the conveying device 3 includes two conveying components, namely a first conveying component 32 and a second conveying component 34. The second conveying component 34 has the same structure as the first conveying component, and its structure has been described in detail in the description of "conveying components" above, so it will not be repeated here.

[0047] It is worth mentioning that the first conveyor 32 and the second conveyor 34 do not interfere with each other, and the first conveyor 32 can pass between the second conveyor 34 and the frame 31 when it slides along the guide rail 33.

[0048] Specifically, in this embodiment, the length of the mounting plate of the first conveyor 32 is less than the length of the mounting plate of the second conveyor 34. The lengths of the first support plate and the second support plate of the first conveyor 32 are also less than the lengths of the first support plate and the second support plate of the second conveyor 34. This allows the first conveyor 32 to easily pass through the bottom of the second conveyor 34 without interfering with it.

[0049] In other embodiments, the conveying device 3 may include n conveying elements, wherein any two conveying elements do not interfere with each other, and the (n-1)th conveying element can pass between the nth conveying element and the frame 31 when sliding along the guide rail 33. By setting multiple conveying elements, and the multiple conveying elements acting independently without interfering with each other, the transfer efficiency of the conveying device 3 on the substrate 11 can be effectively improved.

[0050] Please see Figure 7 In this embodiment, the transfer device 2 includes: a second drive device 21, a first robotic arm 22, a second robotic arm 23, and a third robotic arm 24.

[0051] The first robotic arm 22 is connected at one end to the power output end of the second drive device 21 and rotates under the drive of the second drive device 21. A third drive device (not shown) is installed at the other end.

[0052] One end of the second robotic arm 23 is connected to the power output end of the third drive unit and rotates under the drive of the third drive unit. The other end is equipped with a fourth drive unit (not shown).

[0053] One end of the third robotic arm 24 is connected to the power output end of the fourth drive device and rotates under the drive of the fourth drive device. The other end is equipped with a tray 25 for picking up and placing the substrate 11. The tray 25 here is prior art and well known to those skilled in the art, and will not be described in detail here.

[0054] By setting up a first robotic arm 22, a second robotic arm 23, and a third robotic arm 24, the wafer picking range of the execution end of the transfer device 2 can be effectively expanded.

[0055] Multiple trays 25 are connected to the third robotic arm 24. The trays 25 are arranged at equal intervals, and the distance between two adjacent trays 25 is greater than the thickness of a single substrate 11. In this embodiment, five trays 25 are connected to the third robotic arm 24. By connecting multiple trays 25 to the third robotic arm 24, the number of substrates 11 that the transfer device 2 can transfer at one time can be increased, thereby improving the transfer efficiency of the transfer device 2.

[0056] In the above embodiments, the first drive device, the second drive device 21, the third drive device, and the fourth drive device are all servo motors. In other embodiments, the drive device can be selected from existing drive devices according to the actual situation.

[0057] Please see Figure 1 The second embodiment of the present invention provides a substrate 11 transfer method, which specifically includes the following steps: Step 1: Transfer device 2 takes out substrate 11 from the current workstation and places it on transfer device 3.

[0058] Step 2: The conveying device 3 transports the substrate 11 to the target workstation.

[0059] Step 3: The transfer device 2 at the target workstation takes the substrate 11 from the transfer device 3 and transfers the substrate 11 to the target workstation.

[0060] In the aforementioned substrate transfer method, when transferring substrate 11 between the current workstation and the target workstation, substrate 11 is first handed over to conveyor 3 via transfer device 2, and then conveyor 3 directly transports substrate 11 to the target workstation. Finally, transfer device 2 at the target workstation removes substrate 11 from conveyor 3 and transfers it to the target workstation. In this process, since conveyor 3 can directly transfer the substrate from the current workstation to the target workstation (regardless of how many workstations are between them), the overall transfer efficiency of substrate 11 is significantly improved. Furthermore, since the transfer process of substrate 11 by conveyor 3 does not affect the normal operation of other workstations, the overall substrate processing efficiency of the substrate processing system is greatly improved.

[0061] In summary, the substrate processing system of the present invention completes the substrate transfer work through the cooperation of a transfer device and a conveying device, significantly improving the substrate transfer efficiency. Furthermore, while transferring the substrate via the conveying device, it does not affect the normal operation of other workstations, effectively improving the efficiency of the substrate transfer system. Therefore, the present invention effectively overcomes the various shortcomings of the prior art and has high industrial application value.

[0062] The above description is merely a specific implementation of the embodiments of this application, but the protection scope of the embodiments of this application is not limited thereto. Any changes or substitutions within the technical scope disclosed in the embodiments of this application should be covered within the protection scope of the embodiments of this application. Therefore, the protection scope of the embodiments of this application should be determined by the protection scope of the claims.

Claims

1. A substrate processing system, characterized in that, include: Multiple workstations, which are arranged at intervals; A conveying device is arranged along the arrangement direction of the plurality of workstations. The conveying device includes a conveying component for loading the substrate. The conveying component can reciprocate along the arrangement direction of the plurality of workstations to convey the substrate to any position corresponding to any of the plurality of workstations. Multiple transfer devices are provided, corresponding to the multiple workstations. Each transfer device is used to remove the substrate from the workstation corresponding to it and place the substrate on the conveyor. The transfer device is also used to remove the substrate from the conveyor and place the substrate on the workstation corresponding to the transfer device.

2. The substrate processing system according to claim 1, characterized in that: The conveying device includes: The frame extends along the arrangement direction of the multiple workstations; The conveyor is slidably mounted on the frame and is used to carry the substrate and transfer the substrate to the corresponding work station. A guide rail is mounted on the frame and slidably connected to the conveyor, the guide rail being used to guide the conveyor to slide. A first driving device is mounted on the frame and connected to the conveyor via a transmission mechanism. The first driving device is used to drive the conveyor to slide along the guide rail.

3. The substrate processing system according to claim 2, characterized in that: The transmitting device includes: A sliding connection assembly is slidably connected to the guide rail and slides along the guide rail under the drive of the transmission mechanism; A substrate support assembly, connected to the sliding connection assembly, is used to load the substrate.

4. The substrate processing system according to claim 3, characterized in that: The sliding connection assembly includes: a mounting plate, a first support plate, and a second support plate; wherein the mounting plate is arranged parallel to the transfer plane of the conveying device; the first support plate and the second support plate are arranged opposite to each other and vertically connected to both ends of the mounting plate; the lower ends of the first support plate and the second support plate are slidably connected to the guide rail.

5. The substrate processing system according to claim 4, characterized in that: The substrate support assembly includes fixing blocks and support members; wherein, two fixing blocks are disposed opposite to each other on the mounting plate and are fixedly connected to the mounting plate; the support members are mounted on the fixing blocks, and multiple support members cooperate with each other to support the substrate.

6. The substrate processing system according to claim 4, characterized in that: The guide rail includes a first guide rail and a second guide rail symmetrically arranged on both sides of the frame. The lower end of the first support plate is slidably connected to the first guide rail, and the lower end of the second support plate is slidably connected to the second guide rail.

7. The substrate processing system according to claim 6, characterized in that: The conveying device includes n conveying elements, wherein any two conveying elements do not interfere with each other, and the (n-1)th conveying element can pass between the nth conveying element and the frame when sliding along the guide rail.

8. The substrate processing system according to claim 1, characterized in that: The transfer device includes: Second drive unit; The first robotic arm has one end connected to the power output end of the second drive device and rotates under the drive of the second drive device; the other end is equipped with a third drive device. The second robotic arm is connected at one end to the power output end of the third driving device and rotates under the drive of the third driving device; a fourth driving device is installed at the other end. The third robotic arm has one end connected to the power output end of the fourth driving device and rotates under the drive of the fourth driving device; the other end is equipped with a tray for picking up and placing substrates.

9. The substrate processing system according to claim 8, characterized in that: The third robotic arm is connected to multiple trays, which are arranged at equal intervals, and the distance between two adjacent trays is greater than the thickness of a single substrate.

10. A substrate transfer method, characterized in that, Includes the following steps: Step 1: The transfer device removes the substrate from the current workstation and places it on the conveyor. Step 2: The conveying device transports the substrate to the target workstation; Step 3: The transfer device at the target workstation removes the substrate from the conveying device.

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