Collimation installation equipment

Abstract

The invention relates to the technical field of large science devices, in particular to collimation installation equipment. The collimation installation equipment comprises a laser emitting device and a reference cavity device, the reference cavity device comprises a reference vacuum cavity and a reflection mechanism, the reference vacuum cavity comprises side plates which are connected end to end in a surrounding manner, a vacuum cavity is formed in each side plate, an incident flange and an emergent flange which are communicated with the vacuum cavity are arranged on each side plate, and an optical element of the reflection mechanism is arranged in each vacuum cavity; laser emitted by the laser emitting device can enter the vacuum cavity from the incident flange, is reflected by the optical element and then is emitted out from the emergent flange, so that a collimated light beam is formed. The invention provides collimation installation equipment to solve the technical problem that in the prior art, the collimation installation process of an ultrahigh vacuum cavity is prone to affecting the performance of a scientific instrument.

Description

Technical Field

[0001] This invention relates to the field of large scientific facilities technology, and in particular to a collimation installation device. Background Technology

[0002] In the construction of large scientific facilities, a large number of ultra-high vacuum cavities need to be collimated and installed. The collimation and installation of ultra-high vacuum cavities is a key link to ensure the system performance, stability and long-term reliability, so as to ensure the sealing and ultimate vacuum of the vacuum system, as well as the structural stability of large or complex vacuum systems, and also to realize the functional integration of vacuum interconnection and modular systems.

[0003] In existing technologies, a target holder is typically welded onto the ultra-high vacuum cavity to serve as a support and precise positioning structure for the cavity. This allows for the collimation and installation of the cavity. However, during the implementation of this collimation and installation method, welding the target holder can lead to excessively high magnetic permeability, which can affect the performance of scientific instruments.

[0004] Therefore, this application provides a new collimation installation device to address the above-mentioned problems. Summary of the Invention

[0005] The purpose of this invention is to provide a collimation installation device to at least alleviate the technical problem that the collimation installation process of ultra-high vacuum cavities in the prior art can easily affect the performance of scientific instruments.

[0006] To achieve the above objectives, the present invention provides a collimation mounting device, including a laser emitting device and a reference cavity device; The reference cavity device includes a reference vacuum cavity and a reflection mechanism. The reference vacuum cavity includes side plates that are connected end to end, and a vacuum cavity is formed inside the side plates. An entrance flange and an exit flange, both of which are connected to the vacuum cavity, are provided on the side plates. The optical elements of the reflection mechanism are disposed in the vacuum cavity. The laser emitted by the laser emitting device can enter the vacuum cavity through the incident flange, be reflected by the optical element, and then exit through the exit flange to form a collimated beam.

[0007] Furthermore, the side plate has two ejection flanges, namely a first ejection flange and a second ejection flange, which are arranged opposite to each other. The laser emitted by the laser emitting device can enter the vacuum cavity through the incident flange, and after being reflected by the optical element, it can be emitted from the first exit flange to form an upstream collimated beam, or from the second exit flange to form a downstream collimated beam.

[0008] Furthermore, the optical element includes a first reflector and a second reflector with mutually perpendicular mirror surfaces, and the reflection mechanism further includes a lifting assembly. The lifting assembly is installed in the reference vacuum cavity and is driven to connect to the optical element. The lifting assembly can drive the optical element to move in the vertical direction so that the first reflector or the second reflector corresponds to the incident flange. Wherein, when the first reflector corresponds to the incident flange, the laser entering the vacuum cavity from the incident flange can be reflected by the first reflector and emitted from the first exit flange to form the upstream collimated beam; when the second reflector corresponds to the incident flange, the laser entering the vacuum cavity from the incident flange can be reflected by the second reflector and emitted from the second exit flange to form the downstream collimated beam.

[0009] Furthermore, the lifting assembly includes a mounting bracket installed on the top plate of the reference vacuum cavity and a lifting motor installed on the mounting bracket. The lifting motor is driven by a screw, a lifting seat is screwed onto the screw, a lifting rod is fixedly connected to the lifting seat, and the optical element is connected to the lifting rod. The lifting motor can drive the screw to rotate, so that the lifting seat on the screw can be raised and lowered, thereby the lifting seat can drive the optical element to move in the vertical direction through the lifting rod.

[0010] Furthermore, the reflection mechanism also includes a sealing assembly; The mounting bracket is located on the side of the top plate away from the vacuum cavity, and the lifting rod passes through the top plate so that the optical element is located inside the vacuum cavity; The sealing assembly includes an upper sealing plate installed on the lifting seat, a lower sealing plate installed on the top plate, and a bellows connecting the upper sealing plate and the lower sealing plate. When the lifting seat moves, it can move the upper sealing plate closer to or further away from the lower sealing plate, so that the bellows can extend or retract.

[0011] Furthermore, a sensor plate is provided on the lifting platform; The mounting bracket is equipped with a first limit switch and a second limit switch. When the lifting seat moves to the point where the sensing plate senses the first limit switch, the first reflector corresponds to the incident flange. When the lifting seat moves to the point where the sensing plate senses the second limit switch, the second reflector corresponds to the incident flange. And / or, the mounting bracket is provided with a third limit switch, and when the lifting seat moves to the point where the sensing plate senses the third limit switch, the optical element rises so that there is no obstruction between the first emission flange and the second emission flange.

[0012] Furthermore, the reference cavity device also includes a reference support and an adjustment mechanism. The reference vacuum cavity is mounted on the reference support via the adjustment mechanism. The adjustment mechanism includes a vertical adjustment component capable of adjusting the vertical position of the reference vacuum cavity and a horizontal adjustment component capable of adjusting the horizontal position of the reference vacuum cavity.

[0013] Furthermore, a mounting plate is provided on the reference vacuum chamber; The vertical adjustment assembly includes a vertical threaded component and a first nut and a second nut, both screwed onto the vertical threaded component. One end of the vertical threaded component is mounted on the reference bracket via the horizontal adjustment assembly, and the other end passes through the mounting plate. The first nut and the second nut are respectively located on both sides of the mounting plate.

[0014] Furthermore, the horizontal adjustment assembly includes a first adjusting threaded component, a second adjusting threaded component, a fixing frame with an inner cavity, and an adjusting block disposed in the inner cavity. The vertical threaded component is fixedly connected to the adjusting block, and the fixing frame is fixedly connected to the reference bracket. The first adjusting threaded component passes through the fixed frame from the outside into the inner cavity and is screwed onto the adjusting block. The second adjusting threaded component passes through the fixed frame from the outside into the inner cavity and is screwed onto the adjusting block. The center lines of the first adjusting threaded component and the second adjusting threaded component are both horizontally set and perpendicular to each other. Rotating the first adjusting threaded component allows the adjusting block to move along a first direction, and rotating the second adjusting threaded component allows the adjusting block to move along a second direction, wherein the first direction is perpendicular to the second direction.

[0015] Furthermore, the laser emitting device includes a laser emitter, a laser support, and a six-dimensional platform mounted on the laser support. A fixture is provided on the six-dimensional platform, and the laser emitter is mounted on the fixture.

[0016] By adopting the above technical solution, the collimation installation device of the present invention has at least the following beneficial effects: When a large number of ultra-high vacuum cavities need to be collimated, the laser emitting device is first aligned with the incident flange of the reference vacuum cavity so that the laser emitted by the laser emitting device can enter the vacuum cavity through the incident flange. The incident laser entering the vacuum cavity can be reflected by optical elements to adjust the angle of the outgoing laser so that the outgoing laser can be emitted from the outgoing flange. The laser emitted from the outgoing flange forms a collimated beam for the collimation of the ultra-high vacuum cavity, which serves as the spatial position reference line for the collimation of a series of ultra-high vacuum cavities upstream and downstream of the reference vacuum cavity.

[0017] In other words, the collimation installation device provided in this embodiment utilizes a collimated beam emitted from the exit flange. This beam remains parallel during propagation and is used to detect and correct the positional deviations of a series of ultra-high vacuum cavities upstream and downstream of the reference vacuum cavity. This allows for the collimation installation of a large number of ultra-high vacuum cavities without the need to weld target seats onto the ultra-high vacuum cavities. Therefore, it avoids the problem of excessively high magnetic permeability affecting the performance of scientific instruments. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is one of the structural schematic diagrams of the collimation and installation device provided in an embodiment of the present invention; Figure 2 A second schematic diagram of the collimation installation device provided in an embodiment of the present invention (the top plate of the reference vacuum chamber is not shown). Figure 3 A third schematic diagram of the collimation installation device provided in an embodiment of the present invention (the top plate of the reference vacuum chamber is not shown). Figure 4 This is one of the structural schematic diagrams of the reflection mechanism in the collimation mounting device provided in the embodiments of the present invention; Figure 5 This is the second schematic diagram of the reflection mechanism in the collimation mounting device provided in the embodiment of the present invention; Figure 6 This is a schematic diagram of the structure of the laser emitting device in the collimation mounting equipment provided in an embodiment of the present invention; Figure 7 This is a schematic diagram of the adjustment mechanism in the collimation and installation device provided in an embodiment of the present invention.

[0020] Figure label: 1-Laser emitting device; 11-Laser emitter; 12-Clamp; 13-Six-dimensional stage; 14-Laser support; 2-Reference cavity device; 21-Reference vacuum chamber; 212-Injection flange; 213-Output flange; 22-Reflecting mechanism; 221-First reflecting mirror; 222-Second reflecting mirror; 231-Mounting bracket; 232-Lifting motor; 233-Screw; 234-Lifting seat; 235-Lifting rod; 241 - Upper sealing plate; 242 - Bellows; 243 - Lower sealing plate; 25-Adjusting mechanism; 251-Vertical threaded component; 252-First nut; 253-Second nut; 254-First adjusting threaded component; 255-Second adjusting threaded component; 256-Fixing bracket; 257-Adjusting block; 258-First locking nut; 259-Second locking nut; 26-Reference support; 31 - Upstream collimated beam; 32 - Downstream collimated beam; 5-Induction plate; 61-Third limit switch; 62-First limit switch; 63-Second limit switch. Detailed Implementation

[0021] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0023] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0024] Example Please see Figure 1This embodiment provides a collimation mounting device, which includes a laser emitting device 1 and a reference cavity device 2. The reference cavity device 2 includes a reference vacuum cavity 21 and a reflection mechanism 22. The reference vacuum cavity 21 includes side plates that are connected end to end, forming a vacuum cavity inside the side plates. An entrance flange 212 and an exit flange 213, both communicating with the vacuum cavity, are provided on the side plates. The optical elements of the reflection mechanism 22 are disposed in the vacuum cavity. The laser emitted by the laser emitting device 1 can enter the vacuum cavity through the entrance flange 212, be reflected by the optical elements, and then be emitted from the exit flange 213 to form a collimated beam.

[0025] When a large number of ultra-high vacuum cavities need to be collimated, the laser emitting device 1 is first aligned with the incident flange 212 of the reference vacuum cavity 21 so that the laser emitted by the laser emitting device 1 can enter the vacuum cavity through the incident flange 212. The incident laser entering the vacuum cavity can be reflected by optical elements to adjust the angle of the outgoing laser so that the outgoing laser can be emitted from the outgoing flange 213. The laser emitted from the outgoing flange 213 forms a collimated beam for the collimation of the ultra-high vacuum cavity, which serves as the spatial position reference line for the collimation of a series of ultra-high vacuum cavities upstream and downstream of the reference vacuum cavity 21.

[0026] In other words, the collimation installation device provided in this embodiment utilizes a collimated beam emitted from the exit flange 213. This beam remains parallel during propagation and is used to detect and correct the positional deviations of a series of ultra-high vacuum cavities upstream and downstream of the reference vacuum cavity 21. This allows for the collimation installation of a large number of ultra-high vacuum cavities without the need to weld target seats onto the ultra-high vacuum cavities. Therefore, it avoids the problem of excessively high magnetic permeability affecting the performance of scientific instruments.

[0027] It should be noted that the collimated beam extracted by the QPD four-quadrant detector can be used as a reference to collimate a series of ultra-high vacuum cavities upstream and downstream.

[0028] Preferably, please refer to Figure 2 and Figure 3 In this embodiment, two emission flanges 213 are provided on the side plate. The two emission flanges 213 are the first emission flange 213 and the second emission flange 213, which are arranged opposite to each other. The laser emitted by the laser emitting device 1 can enter the vacuum cavity through the incident flange 212, and after being reflected by the optical element, it is emitted from the first emission flange 213 to form an upstream collimated beam 31, or it is emitted from the second emission flange 213 to form a downstream collimated beam 32.

[0029] This setup uses the upstream collimating beam 31 as a collimation reference for multiple ultra-high vacuum cavities located upstream of the reference vacuum cavity 21, and the downstream collimating beam 32 as a collimation reference for multiple ultra-high vacuum cavities located downstream of the reference vacuum cavity 21, thus enabling the ultra-high vacuum cavities located upstream and downstream of the reference vacuum cavity 21 to be collimated.

[0030] Preferably, please refer to Figure 4 and Figure 5 In this embodiment, the optical element includes a first reflector 221 and a second reflector 222 with mutually perpendicular mirror surfaces. The reflection mechanism 22 also includes a lifting assembly, which is installed in the reference vacuum cavity 21 and driven to connect to the optical element. The lifting assembly can drive the optical element to move in the vertical direction so that the first reflector 221 or the second reflector 222 corresponds to the incident flange 212. When the first reflector 221 corresponds to the incident flange 212, the laser entering the vacuum cavity from the incident flange 212 can be reflected by the first reflector 221 and emitted from the first exit flange 213 to form an upstream collimated beam 31. When the second reflector 222 corresponds to the incident flange 212, the laser entering the vacuum cavity from the incident flange 212 can be reflected by the second reflector 222 and emitted from the second exit flange 213 to form a downstream collimated beam 32.

[0031] This setup, by driving the optical element to move vertically through the lifting assembly, adjusts the first reflector 221 or the second reflector 222 to reflect the incident laser, thereby obtaining outgoing lasers in different directions, namely the upstream collimated beam 31 and the downstream collimated beam 32, so that the ultra-high vacuum cavities located upstream and downstream of the reference vacuum cavity 21 can be collimated and installed.

[0032] Preferably, please refer to Figure 4 and Figure 5 In this embodiment, the lifting assembly includes a mounting bracket 231 mounted on the top plate of the reference vacuum chamber 21 and a lifting motor 232 mounted on the mounting bracket 231. The lifting motor 232 drives a screw 233, a lifting seat 234 is screwed onto the screw 233, and a lifting rod 235 is fixed onto the lifting seat 234. The optical element is connected to the lifting rod 235. The lifting motor 232 can drive the screw 233 to rotate, so that the lifting seat 234 on the screw 233 can be raised and lowered, thereby the lifting seat 234 drives the optical element to move in the vertical direction through the lifting rod 235.

[0033] This configuration allows the optical elements to move vertically, so that the first reflector 221 or the second reflector 222 can correspond to the incident flange 212 respectively, and reflect the incident laser from the incident flange 212 to adjust the exit angle of the outgoing laser.

[0034] Preferably, please refer to Figure 4 and Figure 5 In this embodiment, the reflection mechanism 22 further includes a sealing assembly; the mounting bracket 231 is disposed on the side of the top plate away from the vacuum cavity, and the lifting rod 235 passes through the top plate so that the optical element is located inside the vacuum cavity; wherein, the sealing assembly includes an upper sealing plate 241 mounted on the lifting seat 234, a lower sealing plate 243 mounted on the top plate, and a bellows 242 connecting the upper sealing plate 241 and the lower sealing plate 243; when the lifting seat 234 moves, the lifting seat 234 can drive the upper sealing plate 241 to move closer to or away from the lower sealing plate 243 so that the bellows 242 can extend and retract.

[0035] For example, the lifting motor 232 drives the screw 233 to rotate in the first direction, causing the lifting seat 234 to lower the optical element through the lifting rod 235, so that the first reflector 221 corresponds to the incident flange 212. The laser entering the vacuum cavity from the incident flange 212 can be reflected by the first reflector 221 and emitted from the first exit flange 213 to form the upstream collimated beam 31. At the same time, the lifting seat 234 drives the upper sealing plate 241 to move closer to the lower sealing plate 243, so that the bellows 242 contracts.

[0036] The lifting motor 232 continues to drive the screw 233 to rotate in the first direction, causing the lifting seat 234 to lower the optical element via the lifting rod 235, so that the second reflector 222 corresponds to the incident flange 212. The laser entering the vacuum cavity from the incident flange 212 can be reflected by the second reflector 222 and emitted from the second exit flange 213 to form the downstream collimated beam 32. At the same time, the lifting seat 234 drives the upper sealing plate 241 to continue to move closer to the lower sealing plate 243, so that the bellows 242 further contracts.

[0037] The lifting motor 232 drives the screw 233 to rotate in the second direction, causing the lifting seat 234 to lift the optical element through the lifting rod 235, thereby raising the optical element to a position outside the incident range of the incident flange 212, so that there is no obstruction between the first exit flange 213 and the second exit flange 213, allowing the beam to pass normally. At the same time, the lifting seat 234 drives the upper sealing plate 241 away from the lower sealing plate 243, so that the bellows 242 is stretched.

[0038] In summary, the sealing component of this embodiment achieves real-time sealing of the vacuum chamber during the movement of the lifting seat 234, ensuring that the sealing performance of the vacuum chamber is not affected by the movement of the lifting seat 234, thus guaranteeing the stability and reliability of the instrument's operation.

[0039] Preferably, please refer to Figure 5 A sensor plate 5 is installed on the lifting seat 234.

[0040] Optionally, the mounting bracket 231 is provided with a first limit switch 62 and a second limit switch 63. When the lifting seat 234 moves to the sensing plate 5 and senses the first limit switch 62, the first reflector 221 corresponds to the incident flange 212; when the lifting seat 234 moves to the sensing plate 5 and senses the second limit switch 63, the second reflector 222 corresponds to the incident flange 212. Alternatively, the mounting bracket 231 is provided with a third limit switch 61. When the lifting seat 234 moves to the sensing plate 5 and senses the third limit switch 61, the optical element rises so that there is no obstruction between the first exit flange 213 and the second exit flange 213.

[0041] Preferably, the mounting frame 231 is provided with a first limit switch 62 and a second limit switch 63. When the lifting seat 234 moves to the sensing plate 5 and senses the first limit switch 62, the first reflector 221 corresponds to the incident flange 212. When the lifting seat 234 moves to the sensing plate 5 and senses the second limit switch 63, the second reflector 222 corresponds to the incident flange 212. The mounting frame 231 is also provided with a third limit switch 61. When the lifting seat 234 moves to the sensing plate 5 and senses the third limit switch 61, the optical element rises so that there is no obstruction between the first exit flange 213 and the second exit flange 213.

[0042] This setup enables automatic positioning of optical components, ensuring the stability and reliability of the instrument's operation.

[0043] Preferably, please refer to Figure 1 and Figure 2 In this embodiment, the reference cavity device 2 further includes a reference support 26 and an adjustment mechanism 25. The reference vacuum cavity 21 is mounted on the reference support 26 through the adjustment mechanism 25. The adjustment mechanism 25 includes a vertical adjustment component that can adjust the vertical position of the reference vacuum cavity 21 and a horizontal adjustment component that can adjust the horizontal position of the reference vacuum cavity 21.

[0044] Preferably, please refer to Figure 1 In this embodiment, multiple sets of adjustment mechanisms 25 are provided, and the multiple sets of adjustment mechanisms 25 are arranged at intervals between the reference vacuum chamber 21 and the reference support 26. For example, four sets of adjustment mechanisms 25 are provided, and the four sets of adjustment mechanisms 25 are respectively arranged at the four corners of the reference vacuum chamber 21.

[0045] This setup allows for the adjustment and fixation of the initial position of the reference vacuum chamber 21 via the adjustment mechanism 25. Specifically, the vertical adjustment component allows for the adjustment of the height of the four support points of the reference vacuum chamber 21, thereby enabling adjustments to the height, pitch, and yaw of the reference vacuum chamber 21. Additionally, the horizontal adjustment component allows for the adjustment of the lateral position of the four support points of the reference vacuum chamber 21.

[0046] Preferably, please refer to Figure 7 In this embodiment, a mounting plate is provided on the reference vacuum chamber 21; the vertical adjustment assembly includes a vertical threaded component 251 and a first nut 252 and a second nut 253, both screwed onto the vertical threaded component 251. One end of the vertical threaded component 251 is installed on the reference bracket 26 through the horizontal adjustment assembly, and the other end passes through the mounting plate. The first nut 252 and the second nut 253 are respectively provided on both sides of the mounting plate.

[0047] With this setup, the mounting plate is fixed between the first nut 252 and the second nut 253, thus providing support for the reference vacuum chamber 21.

[0048] When adjusting the height of the reference vacuum chamber 21, firstly, rotate the second nut 253 located at the bottom of the mounting plate away from the first nut 252, then move the mounting plate downwards so that it contacts the second nut 253. The second nut 253 supports the mounting plate. Then, rotate the first nut 252 downwards so that it abuts against the mounting plate, thus clamping the mounting plate between the first nut 252 and the second nut 253, achieving a downward adjustment of the mounting plate height. Alternatively, firstly, rotate the first nut 252 located at the top of the mounting plate away from the second nut 253, then move the mounting plate upwards so that it contacts the first nut 252. Then, rotate the second nut 253 upwards so that it abuts against the mounting plate, supporting the mounting plate between the first nut 252 and the second nut 253, thus clamping the mounting plate between the first nut 252 and the second nut 253, achieving an upward adjustment of the mounting plate height.

[0049] Preferably, please refer to Figure 7 In this embodiment, the horizontal adjustment assembly includes a first adjusting threaded component 254, a second adjusting threaded component 255, a fixing frame 256 with an inner cavity, and an adjusting block 257 disposed in the inner cavity. The vertical threaded component 251 is fixedly connected to the adjusting block 257, and the fixing frame 256 is fixedly connected to the reference bracket 26. The first adjusting threaded component 254 passes through the fixing frame 256 from the outside into the inner cavity and is screwed onto the adjusting block 257. The second adjusting threaded component 255 passes through the fixing frame 256 from the outside into the inner cavity and is screwed onto the adjusting block 257. The center lines of the first adjusting threaded component 254 and the second adjusting threaded component 255 are both horizontally arranged and perpendicular to each other. Rotating the first adjusting threaded component 254 can move the adjusting block 257 along a first direction, and rotating the second adjusting threaded component 255 can move the adjusting block 257 along a second direction. The first direction and the second direction are perpendicular to each other.

[0050] For example, see Figure 1 ,exist Figure 1In the first direction, the reference vacuum cavity 21 is the front-back direction when facing the laser emitting device 1 at an angle, and the second direction is the left-right direction when facing the reference vacuum cavity 21 when facing the laser emitting device 1.

[0051] When it is necessary to adjust the position of the reference vacuum chamber 21 in the front-back direction, the first adjusting thread 254 can be rotated to move the adjusting block 257 in the first direction, thereby causing the adjusting block 257 to move the reference vacuum chamber 21 back-back via the vertical thread 251. When it is necessary to adjust the position of the reference vacuum chamber 21 in the left-right direction, the second adjusting thread 255 can be rotated to move the adjusting block 257 in the second direction, thereby causing the adjusting block 257 to move the reference vacuum chamber 21 left-right via the vertical thread 251.

[0052] Preferably, please refer to Figure 7 The horizontal adjustment assembly includes a first locking nut 258 screwed onto the first adjusting thread 254. The first locking nut 258 is located on the side of the first adjusting thread 254 away from the inner cavity. After adjusting the position of the reference vacuum chamber 21 in the front-back direction, the first locking nut 258 is rotated so that the first locking nut 258 abuts against the fixing frame 256, thereby locking the first adjusting thread 254.

[0053] In addition, the horizontal adjustment assembly includes a second locking nut 259 screwed onto the second adjusting thread 255. The second locking nut 259 is located on the side of the second adjusting thread 255 away from the inner cavity. After adjusting the position of the reference vacuum cavity 21 in the left and right directions, the second locking nut 259 is rotated so that the second locking nut 259 abuts against the fixing frame 256, thereby locking the second adjusting thread 255.

[0054] Preferably, please refer to Figure 6 In this embodiment, the laser emitting device 1 includes a laser emitter 11, a laser support 14, and a six-dimensional platform 13 disposed on the laser support 14. A clamp 12 is disposed on the six-dimensional platform 13, and the laser emitter 11 is mounted on the clamp 12.

[0055] With this setup, the laser emitter 11 is clamped onto the six-dimensional stage 13 by the clamp 12. The six-dimensional stage 13 can adjust the laser emitter 11 with six degrees of freedom through a motion control program, thereby adjusting the position and angle of the incident laser and aligning it with the incident flange 212.

[0056] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A collimation and installation device, characterized in that, It includes a laser emitting device (1) and a reference cavity device (2); The reference cavity device (2) includes a reference vacuum cavity (21) and a reflection mechanism (22). The reference vacuum cavity (21) includes side plates that are connected end to end. A vacuum cavity is formed inside the side plates. An entrance flange (212) and an exit flange (213) that are both connected to the vacuum cavity are provided on the side plates. The optical elements of the reflection mechanism (22) are disposed in the vacuum cavity. The laser emitted by the laser emitting device (1) can enter the vacuum cavity through the incident flange (212), and after being reflected by the optical element, it is emitted out through the exit flange (213) to form a collimated beam.

2. The collimation and installation equipment according to claim 1, characterized in that, There are two ejector flanges (213) on the side plate, namely a first ejector flange (213) and a second ejector flange (213), which are arranged opposite to each other. The laser emitted by the laser emitting device (1) can enter the vacuum cavity through the entrance flange (212), and after being reflected by the optical element, it can be emitted from the first exit flange (213) to form an upstream collimated beam (31), or emitted from the second exit flange (213) to form a downstream collimated beam (32).

3. The collimation and installation equipment according to claim 2, characterized in that, The optical element includes a first reflector (221) and a second reflector (222) with mutually perpendicular mirror surfaces. The reflection mechanism (22) also includes a lifting assembly, which is installed in the reference vacuum cavity (21) and driven to connect to the optical element. The lifting assembly can drive the optical element to move in the vertical direction so that the first reflector (221) or the second reflector (222) corresponds to the incident flange (212). When the first reflector (221) corresponds to the incident flange (212), the laser entering the vacuum cavity from the incident flange (212) can be reflected by the first reflector (221) and emitted from the first exit flange (213) to form the upstream collimated beam (31); when the second reflector (222) corresponds to the incident flange (212), the laser entering the vacuum cavity from the incident flange (212) can be reflected by the second reflector (222) and emitted from the second exit flange (213) to form the downstream collimated beam (32).

4. The collimation and installation equipment according to claim 3, characterized in that, The lifting assembly includes a mounting bracket (231) installed on the top plate of the reference vacuum cavity (21) and a lifting motor (232) installed on the mounting bracket (231). The lifting motor (232) is driven by a screw (233). A lifting seat (234) is screwed onto the screw (233). A lifting rod (235) is fixed onto the lifting seat (234). The optical element is connected to the lifting rod (235). The lifting motor (232) can drive the screw (233) to rotate, so that the lifting seat (234) on the screw (233) can be raised and lowered, thereby the lifting seat (234) drives the optical element to move in the vertical direction through the lifting rod (235).

5. The collimation and installation equipment according to claim 4, characterized in that, The reflective mechanism (22) also includes a sealing assembly; The mounting bracket (231) is located on the side of the top plate away from the vacuum cavity, and the lifting rod (235) passes through the top plate so that the optical element is located inside the vacuum cavity; The sealing assembly includes an upper sealing plate (241) installed on the lifting seat (234), a lower sealing plate (243) installed on the top plate, and a bellows (242) connecting the upper sealing plate (241) and the lower sealing plate (243). When the lifting seat (234) moves, the lifting seat (234) can drive the upper sealing plate (241) to move closer to or further away from the lower sealing plate (243) so that the bellows (242) can extend or retract.

6. The collimation and installation equipment according to claim 4, characterized in that, The lifting seat (234) is equipped with a sensor plate (5); The mounting bracket (231) is equipped with a first limit switch (62) and a second limit switch (63). When the lifting seat (234) moves to the sensing plate (5) and senses the first limit switch (62), the first reflector (221) corresponds to the incident flange (212); when the lifting seat (234) moves to the sensing plate (5) and senses the second limit switch (63), the second reflector (222) corresponds to the incident flange (212). And / or, the mounting bracket (231) is provided with a third limit switch (61), and when the lifting seat (234) moves to the point where the sensing plate (5) senses the third limit switch (61), the optical element rises so that there is no obstruction between the first emission flange (213) and the second emission flange (213).

7. The collimation and installation equipment according to any one of claims 1-6, characterized in that, The reference cavity device (2) further includes a reference bracket (26) and an adjustment mechanism (25). The reference vacuum cavity (21) is mounted on the reference bracket (26) through the adjustment mechanism (25). The adjustment mechanism (25) includes a vertical adjustment component that can adjust the vertical position of the reference vacuum cavity (21) and a horizontal adjustment component that can adjust the horizontal position of the reference vacuum cavity (21).

8. The collimation installation device according to claim 7, characterized in that, A mounting plate is provided on the reference vacuum cavity (21); The vertical adjustment assembly includes a vertical threaded component (251) and a first nut (252) and a second nut (253) screwed onto the vertical threaded component (251). One end of the vertical threaded component (251) is installed on the reference bracket (26) through the horizontal adjustment assembly, and the other end passes through the mounting plate. The first nut (252) and the second nut (253) are respectively disposed on both sides of the mounting plate.

9. The collimation and installation equipment according to claim 8, characterized in that, The horizontal adjustment assembly includes a first adjusting threaded component (254), a second adjusting threaded component (255), a fixing frame (256) with an inner cavity, and an adjusting block (257) disposed in the inner cavity. The vertical threaded component (251) is fixedly connected to the adjusting block (257), and the fixing frame (256) is fixedly connected to the reference bracket (26). The first adjusting threaded component (254) passes through the fixing frame (256) from the outside into the inner cavity and is screwed onto the adjusting block (257). The second adjusting threaded component (255) passes through the fixing frame (256) from the outside into the inner cavity and is screwed onto the adjusting block (257). The center lines of the first adjusting threaded component (254) and the second adjusting threaded component (255) are both horizontally set and perpendicular to each other. Rotating the first adjusting threaded component (254) allows the adjusting block (257) to move along a first direction, and rotating the second adjusting threaded component (255) allows the adjusting block (257) to move along a second direction, wherein the first direction is perpendicular to the second direction.

10. The collimation and installation equipment according to any one of claims 1-6, characterized in that, The laser emitting device (1) includes a laser emitter (11), a laser bracket (14) and a six-dimensional platform (13) set on the laser bracket (14). A clamp (12) is set on the six-dimensional platform (13), and the laser emitter (11) is installed on the clamp (12).

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