Rotary sealing assembly and semiconductor manufacturing device

Abstract

The invention provides a rotary sealing assembly and a semiconductor manufacturing device, and relates to the field of sealing. According to the scheme, a sealing cover and a transmission shaft are coaxially arranged, and the sealing cover can rotate along with the transmission shaft; the sealing seat can be connected with a fixing part of equipment and does not rotate along with the transmission shaft, and the transmission shaft penetrates through the sealing seat; the movable sealing ring is arranged on the end face of the sealing cover; and the static sealing ring is arranged on the end face of the sealing seat, and the dynamic sealing ring can rotate relative to the static sealing ring. The sealing structure can be suitable for high-temperature working conditions of semiconductor manufacturing devices, and the sealing performance is improved.

Description

Technical Field

[0001] This invention relates to the field of sealing, and more particularly to a rotary sealing assembly and a semiconductor manufacturing apparatus. Background Technology

[0002] Semiconductor manufacturing is a highly precise process that places extremely strict requirements on the environmental control of manufacturing equipment. In particular, the airtightness of the reaction chamber is crucial. The reaction chamber is often a high-temperature, corrosive dust environment. Once the dust leaks, it will not only pollute the external environment and pose safety risks, but also affect the manufacturing precision of semiconductor components.

[0003] In some semiconductor loading devices, there is a low-speed rotation process that requires dynamic sealing. Magnetofluid sealing is a new type of dynamic sealing technology based on the properties of magnetofluids. Its core principle is that under the action of an external magnetic field, a magnetofluid composed of nanoscale magnetic particles, a base fluid, and a surfactant will form a stable O-ring liquid sealing ring in the sealing gap. This sealing ring can tightly fit the contact surface between the rotating shaft and the sealing cavity, and rotate synchronously with the shaft. It can effectively block the leakage path of dust, and achieve a contactless and wear-free sealing effect by virtue of the liquid properties of the magnetofluid. Magnetofluid sealing has significant application advantages in semiconductor manufacturing devices.

[0004] In some semiconductor manufacturing equipment, the operating conditions can reach high temperatures of 200℃ to 300℃. When using a magnetic fluid sealing device, the high temperature conditions can easily cause the magnetic fluid-based carrier liquid to evaporate and decompose, and the surfactant to fail. This can lead to the collapse and leakage of the sealing ring, which can also aggravate the leakage and contaminate the components in the reaction chamber, making it difficult to meet the sealing requirements of semiconductor equipment under high temperature conditions. Summary of the Invention

[0005] To address the technical problem that magnetorheological fluids cannot be used for dynamic sealing in semiconductor manufacturing equipment, the present invention provides a rotary sealing assembly and a semiconductor manufacturing equipment that are suitable for high-temperature operating conditions in semiconductor manufacturing equipment and improve sealing performance.

[0006] In a first aspect, the present invention provides a rotary sealing assembly to solve the above-mentioned technical problems, comprising a sealing cover, the sealing cover being coaxially arranged with a drive shaft and capable of rotating with the drive shaft; a sealing seat, the sealing seat being connectable to a fixed component of the equipment and not rotating with the drive shaft, the drive shaft passing through the sealing seat; a dynamic sealing ring, the dynamic sealing ring being disposed on the end face of the sealing cover, the sealing end face of the dynamic sealing ring being provided with an annular sealing protrusion, the sealing protrusion being coaxial with the drive shaft; and a static sealing ring, the static sealing ring being disposed on the end face of the sealing seat, the dynamic sealing ring being capable of relative rotation with the static sealing ring, the sealing end face of the static sealing ring being provided with a sealing groove, the sealing protrusion extending into the sealing groove when the dynamic sealing ring and the static sealing ring are installed; the sealing cover and the dynamic sealing ring are an integral structure, the sealing seat and the static sealing ring are an integral structure, and both the sealing cover and the sealing seat are made of high-temperature resistant materials.

[0007] This invention improves sealing performance by integrating the dynamic and static sealing rings with the sealing cover and sealing seat into an integrated structure, and combining a labyrinthine sealing form with end face protrusions and grooves. At the same time, the use of high-temperature resistant materials ensures structural stability, thereby achieving more reliable and effective sealing protection against dust under high-temperature conditions.

[0008] Furthermore, both the sealing protrusion and the sealing groove have a semi-circular cross-section, and both the sealing groove and the sealing protrusion are provided with at least two rings.

[0009] This invention constructs a tortuous sealing channel by designing the cross-sections of the sealing protrusion and sealing groove as semi-circular and using a multi-ring arrangement of at least two rings. This effectively increases the flow resistance and path length of dust leakage, and significantly improves the barrier and sealing reliability of fine dust under high-temperature conditions.

[0010] Furthermore, an electrostatic adsorption layer is provided inside the sealing groove.

[0011] This invention combines the physical barrier of the mechanical labyrinth seal with the active adsorption effect of the electrostatic field by adding an electrostatic adsorption layer, achieving dual high-efficiency interception of escaping dust (especially fine particles that are difficult to capture), and significantly improving the ultimate leak-proof capability and overall reliability of the sealing component under high-temperature and harsh operating conditions.

[0012] Furthermore, both the dynamic sealing ring and the static sealing ring are provided with limit hooks at their ends. The surface of the limit hook protruding from the outer circumference of the dynamic sealing ring is the sealing end face of the dynamic sealing ring, and the surface of the limit hook protruding from the outer circumference of the static sealing ring is the sealing end face of the static sealing ring. The limit hook is provided with a guide surface, and the two guide surfaces can generate sliding friction. When the dynamic sealing ring and the static sealing ring are installed, the dynamic sealing ring is located inside the static sealing ring.

[0013] This invention designs the ends of the dynamic and static sealing rings as limiting hook structures with guide surfaces, and embeds the dynamic ring inside the static ring. On the one hand, the guide surface ensures automatic alignment and smooth insertion during assembly; on the other hand, the limiting hook structure provides robust axial and radial support for the sealing end face, significantly enhancing overall rigidity and effectively resisting deformation under high temperature and pressure; thirdly, after installation, it forms an internal structure where the dynamic sealing ring is located inside the static sealing ring, naturally creating an axial and radial "maze" constraint, improving operational stability and anti-skewness capability.

[0014] Furthermore, a compensation pin is provided on the sealing end face of the static sealing ring. The compensation pin includes a ring seat with a U-shaped cross-section. A spring and a support ball are provided inside the ring seat. The support ball can rotate inside the ring seat and can generate rolling friction with the dynamic sealing ring.

[0015] This invention uses a spring to apply a continuous and uniform axial compensating force to the dynamic sealing ring, automatically compensating for wear on the sealing end face and thermal deformation of the components, and maintaining a stable fit between the sealing protrusion and the groove.

[0016] Furthermore, connecting sleeves are coaxially arranged on the inner and outer sides of the top of the sealing cover. The connecting sleeves are used to connect with the corresponding transmission shafts, and the connecting sleeves and the sealing cover are an integral structure.

[0017] The present invention facilitates the assembly and disassembly of the sealing component by setting a connecting sleeve, while the integrated structure avoids gaps that could cause leakage.

[0018] Furthermore, the inner hole of the connecting sleeve is provided with a spline groove, and a limit shaft is provided on the connecting sleeve for radial disassembly.

[0019] Furthermore, the sealing seat has a T-shaped structure and includes a connecting part one and a connecting part two. A sealing gasket is provided on the connecting part one. The connecting part one can be detachably connected to the end of the fixed component of the equipment. The connecting part two extends into the interior of the fixed component of the equipment, and the static sealing ring is provided on the end face of the connecting part two.

[0020] Secondly, the present invention also provides a semiconductor manufacturing apparatus, including a base frame, a platform mounted on the base frame, a column mounted on one side of the base frame, a first support seat mounted on the column, a second support seat mounted on the first support seat, the second support seat being located above the platform and capable of moving up and down relative to the platform, a reaction chamber supported on the second support seat, and a drive shaft rotatably mounted on the first support seat and connected to a drive motor, the drive shaft extending through the second support seat into the reaction chamber, and a rotary sealing assembly, the sealing assembly being connected to the second support seat, the connecting portion extending into the second support seat, a sealing cover located within the reaction chamber, a connecting sleeve inside the sealing cover being connected to the drive shaft, and the connecting sleeve outside the sealing cover being connected to the support shaft.

[0021] Furthermore, the support base is provided with a magnetic fluid seal and a connecting plate arranged sequentially from bottom to top. A sealing ring is also provided between the magnetic fluid seal and the connecting plate. The drive shaft passes through the magnetic fluid seal and the connecting plate. The connecting plate has an inverted T-shaped structure. The narrow end of the connecting plate extends into the interior of the connecting part and the two are interference-fitted. A corrugated sealing tube is also provided between the platform and the wide end of the connecting plate.

[0022] This invention uses a corrugated sealing pipe to seal the gap between the platform and the connecting plate, preventing the spread of corrosive dust leaking from the gap and causing harm to the environment and human body. It also uses a magnetic fluid seal to support and seal the drive shaft, preventing dust from entering the drive motor.

[0023] As can be seen from the above technical solutions, the present invention has the following advantages: This invention provides a rotary sealing assembly and a semiconductor manufacturing apparatus. By integrating the dynamic and static sealing rings with the sealing cover and sealing seat into a single structure, and combining a labyrinthine sealing form with end face protrusions and grooves, sealing performance is improved. Simultaneously, the use of high-temperature resistant materials ensures structural stability, thus achieving more reliable and effective dust protection under high-temperature conditions. By designing the cross-sections of the sealing protrusions and grooves as semi-circular and employing a multi-ring arrangement of at least two rings, a tortuous sealing channel is constructed, effectively increasing the flow resistance and path length for dust leakage, significantly improving the barrier and sealing reliability against fine dust under high-temperature conditions. By adding an electrostatic adsorption layer, this scheme combines the physical blocking of the mechanical labyrinth seal with the active adsorption effect of the electrostatic field, achieving dual high-efficiency interception of escaping dust (especially difficult-to-capture fine particles), significantly improving the ultimate leak-proof capability and overall reliability of the sealing assembly under harsh high-temperature conditions. By designing the ends of the dynamic and static sealing rings with guide surfaces… The limiting hook structure embeds the moving ring inside the stationary ring. Firstly, the guide surface ensures automatic alignment and smooth insertion during assembly. Secondly, the limiting hook structure provides robust axial and radial support to the sealing end face, significantly enhancing overall rigidity and effectively resisting deformation under high temperature and pressure. Thirdly, after installation, the dynamic sealing ring is located inside the stationary sealing ring, naturally forming an axial and radial "labyrinth" constraint, improving operational stability and anti-skewness capability. A spring applies continuous and uniform axial compensation force to the dynamic sealing ring, automatically compensating for wear on the sealing end face and thermal deformation of the component, maintaining a stable fit between the sealing protrusion and groove. A connecting sleeve facilitates the assembly and disassembly of this sealing component, while the integrated structure avoids gaps that could cause leakage. A corrugated sealing tube seals the gap between the platform and the connecting plate, preventing the spread of corrosive dust leaking from the gap and harming the environment and human health. A magnetic fluid seal supports and seals the drive shaft, preventing dust from entering the drive motor. Attached Figure Description

[0024] To more clearly illustrate the technical solution of the present invention, the accompanying drawings used in the description will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the structure of Embodiment 1 of the present invention.

[0026] Figure 2 This is a schematic diagram of the assembly structure of the limiting hooks of the dynamic sealing ring and the static sealing ring in Embodiment 1 of the present invention.

[0027] Figure 3This is a schematic diagram of the limiting hook of the static sealing ring in Embodiment 1 of the present invention.

[0028] Figure 4 This is a schematic diagram of the structure of Embodiment 2 of the present invention.

[0029] In the diagram, 1. Connecting sleeve; 2. Dynamic sealing ring; 3. Sealing cover; 4. Static sealing ring; 5. Corrugated sealing pipe; 6. Connecting disc; 7. Drive shaft; 8. Lead screw; 9. Sealing gasket; 10. Compensating pin; 11. Support seat one; 12. Sealing protrusion; 13. Support ball; 14. Limit hook; 15. Spring; 16. Ring seat; 17. Sealing groove; 18. Electrostatic adsorption layer; 19. Support seat two; 20. Tray; 21. Sealing ring; 22. Reaction chamber; 23. Column; 24. Lifting motor; 25. Platform; 26. Magnetohydrodynamic seal; 27. Drive motor; 28. Support shaft; 29. ​​Guide surface; 30. Sealing seat. Detailed Implementation

[0030] To make the objectives, features, and advantages of this invention more apparent and understandable, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings of the specific embodiments. Obviously, the embodiments described below are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this patent, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this patent.

[0031] Example 1 like Figures 1 to 3 As shown in the figure, this specific embodiment provides a rotary sealing assembly, including a sealing cover 3, a sealing seat 30, a dynamic sealing ring 2, and a static sealing ring 4. The sealing cover 3 is coaxially arranged with the drive shaft 7 and can rotate with the drive shaft 7; the sealing seat 30 can be connected to a fixed component of the equipment and does not rotate with the drive shaft 7, the drive shaft 7 passes through the sealing seat 30; the dynamic sealing ring 2 is disposed on the end face of the sealing cover 3, and an annular sealing protrusion 12 is provided on the sealing end face of the dynamic sealing ring 2, the sealing protrusion 12 being coaxial with the drive shaft 7; the static sealing ring 4 is disposed on... On the end face of the sealing seat 30, the dynamic sealing ring 2 can rotate relative to the static sealing ring 4. The sealing end face of the static sealing ring 4 is provided with a sealing groove 17. When the dynamic sealing ring 2 and the static sealing ring 4 are installed, the sealing protrusion 12 extends into the sealing groove 17. The sealing cover 3 and the dynamic sealing ring 2 are integrated structures, and the sealing seat 30 and the static sealing ring 4 are integrated structures. Both the sealing cover 3 and the sealing seat 30 are made of high-temperature resistant materials, such as silicon carbide and aluminum nitride.

[0032] This embodiment integrates the dynamic and static sealing rings 4 with the sealing cover 3 and sealing seat 30 into a single structure, and combines a labyrinthine sealing form with end face protrusions and grooves to improve sealing performance. At the same time, the entire structure is made of high-temperature resistant materials to ensure structural stability, thereby achieving more reliable and effective sealing protection against dust under high-temperature conditions.

[0033] like Figures 2 to 3 As shown, since the dynamic sealing ring 2 rotates relative to the static sealing ring 4, in order to reduce rotational resistance, in this embodiment, the cross-sections of the sealing protrusion 12 and the sealing groove are both semi-circular structures. To further improve sealing performance, both the sealing groove and the sealing protrusion 12 are provided with at least two rings. The multiple annular arrangement of at least two rings constructs a tortuous sealing channel, effectively increasing the flow resistance and path length of dust leakage, and significantly improving the barrier and sealing reliability of fine dust under high-temperature conditions. In this embodiment, both the sealing protrusion 12 and the sealing groove are provided with two rings.

[0034] To further prevent dust leakage, such as Figures 2 to 3 As shown, in this embodiment, an electrostatic adsorption layer 18 is provided in the sealing groove 17. By adding the electrostatic adsorption layer 18, the physical barrier of the mechanical labyrinth seal is combined with the active adsorption effect of the electrostatic field, achieving dual high-efficiency interception of escaping dust (especially fine particles that are difficult to capture), significantly improving the ultimate leak-proof capability and overall reliability of the sealing assembly under high-temperature and harsh operating conditions. In this embodiment, the electrostatic adsorption layer 18 is a composite layer, including a porous support substrate, which is made of sintered porous felt / fiber felt or ceramic foam and is bonded to the sealing groove 17 with a high-temperature resistant adhesive. An adsorption layer is provided on the substrate. To increase the adsorption surface area and charge storage, the adsorption layer is a porous thin film structure and can be made of PTFE material.

[0035] To facilitate the assembly of the dynamic sealing ring 2 and the static sealing ring 4, such as Figures 2 to 3As shown, in this embodiment, both the dynamic sealing ring 2 and the static sealing ring 4 are provided with limit hooks 14 at their ends. The surface of the limit hook 14 protruding from the outer circumference of the dynamic sealing ring 2 is the sealing end face of the dynamic sealing ring 2, and the surface of the limit hook 14 protruding from the outer circumference of the static sealing ring 4 is the sealing end face of the static sealing ring 4. The limit hook 14 is provided with a guide surface 29, which is an arc-shaped surface. The two guide surfaces 29 can generate sliding friction. When the dynamic sealing ring 2 and the static sealing ring 4 are installed, the dynamic sealing ring 2 is located inside the static sealing ring 4. During installation, axial pressure is applied to the dynamic sealing ring 2 against the static sealing ring 4 until both... The limiting hook 14 is made of spring steel 15 and is metallurgically bonded to the dynamic sealing ring 2 or the static sealing ring 4. By designing the ends of the dynamic and static sealing rings 4 as limiting hook 14 structures with guide surfaces 29, and embedding the dynamic ring inside the static ring, on the one hand, the guide surfaces 29 ensure automatic alignment and smooth insertion during assembly; on the other hand, the limiting hook 14 structure provides robust axial and radial support for the sealing end face, significantly enhancing the overall rigidity and effectively resisting deformation under high temperature and pressure; thirdly, after installation, it forms an internal structure where the dynamic sealing ring 2 is located inside the static sealing ring 4, naturally forming axial and radial labyrinth constraints, improving operational stability and anti-skewness capability.

[0036] Due to friction and wear during the rotation of the dynamic sealing ring 2, the gap between it and the static sealing ring 4 may gradually increase. To ensure sealing performance, such as... Figure 2 As shown, in this embodiment, a compensation pin 10 is also provided on the sealing end face of the static sealing ring 4. The compensation pin 10 includes a ring seat 16, which surrounds the transmission shaft 7. The cross-section of the ring seat 16 is U-shaped. A spring 15 and a support ball 13 are provided inside the ring seat 16. The support ball 13 can rotate inside the ring seat and can generate rolling friction with the dynamic sealing ring 2. In this embodiment, the support ball 13 is made of silicon nitride ceramic material. The end of the limiting hook 14 of the dynamic sealing ring 2 is also provided with a limiting groove. The support ball 13 can abut in the limiting groove. It is necessary to select a suitable spring 15 according to the load of the dynamic sealing ring 2, so as not to lock the dynamic sealing ring 2 and the static sealing ring 4 together and cause large running resistance.

[0037] For ease of disassembly and assembly, such as Figure 1 As shown, in this embodiment, a connecting sleeve 1 is coaxially provided on the inner and outer sides of the top of the sealing cover 3. The connecting sleeve 1 is used to connect with the corresponding transmission shaft 7. The connecting sleeve 1 and the sealing cover 3 are an integral structure. Specifically, the inner hole of the connecting sleeve 1 is provided with a spline groove, and a limit shaft is detachably provided on the connecting sleeve 1 along the radial direction. The limit shaft passes through the corresponding transmission shaft 7.

[0038] In this embodiment, as Figure 1As shown, the sealing seat 30 has a T-shaped structure. The sealing seat 30 includes a connecting part one and a connecting part two. A sealing gasket 9 is provided on the connecting part one. The connecting part one can be detachably connected to the end of the fixed component of the equipment. The connecting part two extends into the fixed component of the equipment. The static sealing ring 4 is provided on the end face of the connecting part two.

[0039] Example 2 like Figure 4 As shown, this embodiment provides a semiconductor manufacturing apparatus, including a base frame, a platform 25 mounted on the base frame, a column 23 mounted on one side of the base frame, a support base 11 mounted on the column 23, and a support base 19 mounted on the support base 11. The support base 19 is located above the platform 25 and can be raised and lowered relative to the platform 25. A reaction chamber 22 is supported on the support base 19. The apparatus also includes a drive shaft 7, which is rotatably mounted on the support base 11 and connected to a drive motor 27. The drive shaft 7 extends through the support base 19 into the reaction chamber. Further embodiments are also included. A rotary sealing assembly is provided, wherein the sealing seat 30 is connected to the second support seat 19, the second connecting part extends into the second support seat, the sealing cover 3 is located in the reaction chamber, the connecting sleeve 1 inside the sealing cover 3 is connected to the drive shaft 7, the connecting sleeve 1 outside the sealing cover 3 is connected to the support shaft 28, and a tray 20 is provided on the upper part of the support shaft 28 for placing workpieces; specifically, a lifting motor 24 and a lead screw 8 are provided on the column 23, the lead screw 8 is connected to the first support seat 11, which can drive the first support seat 11 to rise and fall, thereby driving the second support seat 19, the drive shaft 7, the drive motor 27 and the reaction chamber 22 to rise and fall relative to the platform 25.

[0040] like Figure 4 As shown, the support base 11 is provided with a magnetic fluid seal 26 and a connecting plate 6 connected by bolts from bottom to top. A sealing ring 21 is also provided between the magnetic fluid seal 26 and the connecting plate 6. The drive shaft 7 passes through the magnetic fluid seal 26 and the connecting plate 6. The connecting plate 6 has an inverted T-shaped structure. The narrow end of the connecting plate 6 extends into the interior of the connecting part 2 and the two are interference-fitted. A corrugated sealing pipe 5 is also provided between the platform 25 and the wide end of the connecting plate 6. The corrugated sealing pipe 5 seals the gap between the platform 25 and the connecting plate 6, preventing the spread of corrosive dust leaking from the gap and causing harm to the environment and human body. The magnetic fluid seal 26 supports and seals the drive shaft 7, preventing dust from entering the drive motor 27.

[0041] The sealing principle of this device is as follows: When dust in the reaction chamber 22 enters between the dynamic sealing ring 2 and the static sealing ring 4, it is blocked by the "labyrinth seal" of multiple sealing grooves 17 and sealing protrusions 12, making it difficult to leak to the outside. At the same time, it is adsorbed by the electrostatic adsorption layer 18, further reducing the amount of leakage. Only a very small amount of dust leaks from between the dynamic sealing ring 2 and the static sealing ring 4, and enters the outside of the connecting plate 6 through the gap between the connecting plate 6 and the sealing seat 30. Under the action of the corrugated sealing pipe 5, it will not diffuse to the outside. At the same time, under the sealing action of the fluid seal, external dust and other debris will not enter the drive motor 27.

[0042] As can be seen from the above specific embodiments, the present invention has the following beneficial effects: 1. By designing the dynamic and static sealing rings 4, the sealing cover 3, and the sealing seat 30 into an integrated structure, and combining the labyrinthine sealing form with end face protrusions and grooves, the sealing performance is improved. At the same time, the whole structure is made of high temperature resistant materials to ensure structural stability, thereby achieving more reliable and effective sealing protection against dust under high temperature conditions. 2. By designing the cross-section of the sealing protrusion 12 and the sealing groove as semi-circular and using a multi-ring arrangement of at least two rings, a tortuous sealing channel is constructed, which effectively increases the flow resistance and path length of dust leakage, and significantly improves the barrier and sealing reliability of fine dust under high temperature conditions. 3. By adding an electrostatic adsorption layer 18, this solution combines the physical barrier of the mechanical labyrinth seal with the active adsorption effect of the electrostatic field, achieving dual high-efficiency interception of escaping dust (especially fine particles that are difficult to capture), significantly improving the ultimate leak-proof capability and overall reliability of the sealing component under high temperature and harsh working conditions. 4. By designing the ends of the dynamic and static sealing rings 4 as limiting hooks 14 with guide surfaces 29, and embedding the dynamic ring inside the static ring, on the one hand, the guide surfaces 29 ensure automatic alignment and smooth insertion during assembly; on the other hand, the limiting hooks 14 structure provides robust axial and radial support for the sealing end face, significantly enhancing the overall rigidity and effectively resisting deformation under high temperature and pressure; thirdly, after installation, the dynamic sealing ring 2 is formed as an internal structure inside the static sealing ring 4, naturally forming an axial and radial "maze" constraint, improving operational stability and anti-skewness capability. 5. The spring 15 can apply a continuous and uniform axial compensation force to the dynamic sealing ring 2, automatically compensating for wear of the sealing end face and thermal deformation of the components, and maintaining a stable fit between the sealing protrusion 12 and the groove; 6. The connection sleeve 1 facilitates the assembly and disassembly of this sealing component, while the integrated structure prevents gaps from causing leakage; 7. The corrugated sealing pipe 5 is used to seal the gap between the platform 25 and the connecting plate 6, preventing the spread of corrosive dust leaking from the gap and causing harm to the environment and human body. The magnetic fluid seal 26 is used to support and seal the drive shaft 7, preventing dust from entering the drive motor 27.

[0043] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A rotary sealing assembly, characterized in that, include: A sealing cover (3) is coaxially arranged with the transmission shaft (7) and can rotate with the transmission shaft (7); A sealing seat (30) is provided, which can be connected to a fixed component of the equipment and does not rotate with the drive shaft (7), the drive shaft (7) passing through the sealing seat (30). Dynamic sealing ring (2), the dynamic sealing ring (2) is disposed on the end face of the sealing cover (3), and an annular sealing protrusion (12) is provided on the sealing end face of the dynamic sealing ring (2), the sealing protrusion (12) is coaxial with the transmission shaft (7); A static sealing ring (4) is disposed on the end face of the sealing seat (30). The dynamic sealing ring (2) can rotate relative to the static sealing ring (4). A sealing groove (17) is provided on the sealing end face of the static sealing ring (4). When the dynamic sealing ring (2) and the static sealing ring (4) are installed, the sealing protrusion (12) extends into the sealing groove (17). The sealing cover (3) and the dynamic sealing ring (2) are integrated, and the sealing seat (30) and the static sealing ring (4) are integrated. Both the sealing cover (3) and the sealing seat (30) are made of high temperature resistant materials.

2. The rotary sealing assembly as claimed in claim 1, characterized in that, The sealing protrusion (12) and the sealing groove (17) both have a semi-circular cross-section, and both the sealing groove (17) and the sealing protrusion (12) are provided with at least two rings.

3. The rotary sealing assembly as described in claim 2, characterized in that, An electrostatic adsorption layer (18) is provided inside the sealing groove (17).

4. The rotary sealing assembly as described in claim 3, characterized in that, Both the dynamic sealing ring (2) and the static sealing ring (4) are provided with limit hooks (14) at their ends. The surface of the limit hook (14) protruding from the outer circumference of the dynamic sealing ring (2) is the sealing end face of the dynamic sealing ring (2), and the surface of the limit hook (14) protruding from the outer circumference of the static sealing ring (4) is the sealing end face of the static sealing ring (4). The limit hook (14) is provided with guide surfaces (29). The two guide surfaces (29) can generate sliding friction. When the dynamic sealing ring (2) and the static sealing ring (4) are installed, the dynamic sealing ring (2) is located inside the static sealing ring (4).

5. The rotary sealing assembly as claimed in claim 4, characterized in that, The static sealing ring (4) is also provided with a compensation pin (10) on its sealing end face. The compensation pin (10) includes a ring seat (16). The cross-section of the ring seat (16) is U-shaped. A spring (15) and a support ball (13) are provided inside the ring seat (16). The support ball (13) can rotate inside the ring seat (16). The support ball (13) can generate rolling friction with the dynamic sealing ring (2).

6. The rotary sealing assembly according to any one of claims 1-5, characterized in that, The sealing cover (3) has a connecting sleeve (1) coaxially arranged on the inner and outer sides of the top. The connecting sleeve (1) is used to connect with the corresponding transmission shaft (7). The connecting sleeve (1) and the sealing cover (3) are an integrated structure.

7. The rotary sealing assembly as claimed in claim 6, characterized in that, The inner hole of the connecting sleeve (1) is provided with a spline groove, and a limit shaft is provided on the connecting sleeve (1) for radial disassembly.

8. The rotary sealing assembly as claimed in claim 7, characterized in that, The sealing seat (30) has a T-shaped structure. The sealing seat (30) includes a connecting part one and a connecting part two. A sealing gasket (9) is provided on the connecting part one. The connecting part one can be detachably connected to the end of the fixed component of the equipment. The connecting part two extends into the fixed component of the equipment. The static sealing ring (4) is provided on the end face of the connecting part two.

9. A semiconductor manufacturing apparatus, comprising a base frame, a platform (25) mounted on the base frame, a column (23) mounted on one side of the base frame, and a support base (11) mounted on the column (23) in a lifting manner, characterized in that, The first support base (11) is provided with a second support base (19). The second support base (19) is located on the upper part of the platform (25) and can be raised and lowered relative to the platform (25). The second support base (19) carries a reaction chamber (22) and also includes a drive shaft (7). The drive shaft (7) is rotatably arranged on the first support base (11) and connected to a drive motor (27). The drive shaft (7) passes through the second support base (19) and extends into the reaction chamber (22). It also includes the rotary sealing assembly as described in claim 8. The sealing seat (30) is connected to the second support base (19). The connecting part 2 extends into the second support base (19). The sealing cover (3) is located in the reaction chamber (22). The connecting sleeve (1) inside the sealing cover (3) is connected to the drive shaft (7). The connecting sleeve (1) outside the sealing cover (3) is connected to the support shaft (28).

10. The semiconductor manufacturing apparatus as claimed in claim 9, characterized in that, The support base (11) is provided with a magnetic fluid seal (26) and a connecting plate (6) connected from bottom to top. A sealing ring (21) is also provided between the magnetic fluid seal (26) and the connecting plate (6). The drive shaft (7) passes through the magnetic fluid seal (26) and the connecting plate (6). The connecting plate (6) has an inverted T-shaped structure. The narrow end of the connecting plate (6) extends into the interior of the connecting part (2) and the two are press-fitted. A corrugated sealing tube (5) is also provided between the platform (25) and the wide end of the connecting plate (6).

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